WO2024033961A1 - Foreign matter detection device and foreign matter detection method - Google Patents

Foreign matter detection device and foreign matter detection method Download PDF

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Publication number
WO2024033961A1
WO2024033961A1 PCT/JP2022/030245 JP2022030245W WO2024033961A1 WO 2024033961 A1 WO2024033961 A1 WO 2024033961A1 JP 2022030245 W JP2022030245 W JP 2022030245W WO 2024033961 A1 WO2024033961 A1 WO 2024033961A1
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WO
WIPO (PCT)
Prior art keywords
image data
board
foreign object
inspection area
inspection
Prior art date
Application number
PCT/JP2022/030245
Other languages
French (fr)
Japanese (ja)
Inventor
恵市 小野
貴紘 小林
智也 藤本
一也 小谷
Original Assignee
株式会社Fuji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 株式会社Fuji filed Critical 株式会社Fuji
Priority to PCT/JP2022/030245 priority Critical patent/WO2024033961A1/en
Publication of WO2024033961A1 publication Critical patent/WO2024033961A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis

Definitions

  • This specification discloses a technology related to a foreign object detection device and a foreign object detection method.
  • the mounting line described in Patent Document 1 includes a first camera means, a second camera means, and an image processing means.
  • the first camera means is a camera means capable of viewing at least a portion of the printed circuit board, and is provided to be able to take an image of the printed circuit board before mounting the electronic components in any of the mounting machines.
  • the second camera means is a camera means that can cover the same field of view as the first camera means, and is a camera means that can cover the same field of view as the first camera means, and is a camera means that can capture electronic components by one of the mounters or a mounter in a process subsequent to the mounter. It is provided to be able to take an image of the printed circuit board after the mounting work.
  • the image processing means performs image processing by comparing the image data taken by the second camera means with the image data taken by the first camera means.
  • the mounting line described in Patent Document 1 attempts to detect abnormalities in solder printing when solder is printed on a printed circuit board or mounting abnormalities in electronic components when electronic components are mounted on a printed circuit board.
  • the board-facing work by the board-facing work machine will stop between the time when the reference image data is acquired and the time when the image data to be compared with the image data is acquired. If the board work continues to be stopped, the state of the board may change, and there is a desire to obtain the state of the board at the time the board work stopped.
  • this specification discloses a foreign object detection device and a foreign object detection method that can acquire image data at the time when the work for the substrate is stopped.
  • This specification discloses a foreign object detection device that includes an acquisition section and a determination section.
  • the acquisition unit images at least a part of the inspection area of the board as the board-to-board work progresses by a board-to-board work machine that performs a predetermined board-to-board work on the board, and images the same inspection area. Acquire multiple image data.
  • the determination unit performs image processing to obtain reference image data that is one image data of the plurality of image data and inspection image data that is image data of an inspection target acquired after the reference image data. The presence or absence of a foreign object adhering to the inspection area is determined based on the difference in the feature amount of the inspection area. Further, when the board-related work is stopped between acquiring the reference image data and acquiring the inspection image data, the acquisition unit is configured to image the inspection area and stop the board-related work. First image data, which is the image data at the time when the
  • this specification discloses a foreign object detection method that includes an acquisition step and a determination step.
  • the acquisition step at least a part of the inspection area of the board is imaged as the board-to-board work progresses by a board-to-board work machine that performs a predetermined board-to-board work on the board, and the same inspection area is imaged.
  • the determination step includes image processing and acquisition of reference image data, which is one image data of the plurality of image data, and inspection image data, which is image data of the inspection target acquired after the reference image data. The presence or absence of foreign matter adhering to the inspection area is determined based on the difference in the feature amount of the inspection area.
  • First image data which is image data at the time when the first image data is obtained, is acquired.
  • the foreign object detection device according to claim 1 is defined as "claim 6".
  • a technical concept modified to the foreign object detection device according to any one of claims 1 to 5 is disclosed.
  • ⁇ the foreign object detection device according to claim 1'' is defined as ⁇ the foreign object detection device according to any one of claims 1 to 8''.
  • the technical idea changed to "device” is disclosed.
  • the foreign object detection device according to claim 1 is defined as “the foreign object detection device according to any one of claims 1 to 10.” The technical idea changed to "device” is disclosed.
  • the foreign object detection device it is possible to acquire first image data that is image data at the time when the work for the substrate is stopped. What has been described above regarding the foreign object detection device also applies to the foreign object detection method.
  • FIG. 2 is a configuration diagram showing an example of the configuration of a board-related work line.
  • FIG. 2 is a plan view showing a configuration example of a component mounting machine. It is a block diagram showing an example of a control block of a foreign object detection device. It is a flow chart which shows an example of a control procedure by a foreign object detection device.
  • FIG. 3 is a schematic diagram showing an example of reference image data.
  • FIG. 3 is a schematic diagram showing an example of inspection image data.
  • FIG. 3 is a schematic diagram showing an example of the state of the board until the work for the board is stopped.
  • FIG. 6 is a schematic diagram showing an example of the state of the board after the work for the board is restarted.
  • Embodiment 1-1 Configuration example of the board-to-board work line WL0
  • the board-to-board work machine WM0 performs a predetermined board-to-board work on the board 90.
  • the type and number of the board-to-board work machines WM0 that constitute the board-to-board work line WL0 are not limited.
  • the board-to-board work line WL0 of the embodiment includes a plurality of board-to-board work machines WM0, including a printing machine WM1, a print inspection machine WM2, a component mounting machine WM3, a reflow oven WM4, and an appearance inspection machine WM5. Then, the substrate 90 is transported in the above order by the substrate transport device.
  • the printing machine WM1 prints solder on the mounting positions of the plurality of components 91 on the board 90.
  • the print inspection machine WM2 inspects the printing state of the solder printed by the printing machine WM1.
  • the component mounting machine WM3 mounts a plurality of components 91 onto a board 90 on which solder has been printed by the printing machine WM1.
  • the number of component mounting machines WM3 may be one or more. When a plurality of component mounting machines WM3 are provided, the plurality of component mounting machines WM3 can share the task of mounting a plurality of components 91.
  • the reflow furnace WM4 heats the board 90 on which the plurality of components 91 are mounted by the component mounting machine WM3, melts the solder, and performs soldering.
  • the appearance inspection machine WM5 inspects the mounting state of the plurality of components 91 mounted by the component mounting machine WM3. In this way, the substrate-to-board work line WL0 can use the plurality of substrate-to-board work machines WM0 to transport the substrates 90 in order, perform production processing including inspection processing, and produce the board products 900.
  • the board-related work line WL0 includes board-related work machines WM0 such as a function inspection machine, a buffer device, a substrate supply device, a substrate reversing device, a shield mounting device, an adhesive coating device, and an ultraviolet irradiation device as necessary. You can also prepare.
  • board-related work machines WM0 such as a function inspection machine, a buffer device, a substrate supply device, a substrate reversing device, a shield mounting device, an adhesive coating device, and an ultraviolet irradiation device as necessary. You can also prepare.
  • a plurality of board-to-board work machines WM0 and line management device LC0, which constitute the board-to-board work line WL0, are communicably connected by a communication unit. Further, the line management device LC0 and the management device HC0 are communicably connected by a communication section.
  • the communication unit can communicably connect them by wire or wirelessly, and various communication methods can be used.
  • a local area network is configured by a plurality of board-related work machines WM0, line management device LC0, and management device HC0. Therefore, the plurality of board-oriented work machines WM0 can communicate with each other via the communication section. Further, the plurality of board-oriented work machines WM0 can communicate with the line management device LC0 via the communication unit. Furthermore, the line management device LC0 and the management device HC0 can communicate with each other via the communication unit.
  • the line management device LC0 controls the plurality of board-related work machines WM0 that constitute the board-related work line WL0, and monitors the operating status of the board-related work line WL0.
  • the line management device LC0 stores various control data for controlling the plurality of board working machines WM0.
  • the line management device LC0 transmits control data to each of the plurality of board-facing work machines WM0. Further, each of the plurality of board-oriented work machines WM0 transmits the operating status and production status to the line management device LC0.
  • the management device HC0 manages at least one line management device LC0. For example, the operating status and production status of the board-oriented work machine WM0 acquired by the line management device LC0 are transmitted to the management device HC0 as necessary.
  • the management device HC0 is provided with a storage device.
  • the storage device can store various types of acquired data acquired by the board-oriented work machine WM0. For example, various image data captured by the substrate-to-board working machine WM0 is included in the acquired data. Records (log data) of operating conditions acquired by the board-oriented work machine WM0 are included in the acquired data. Further, the storage device can store various production information regarding the production of the board product 900.
  • the board-to-board work line WL0 includes an input/output device 80.
  • a known input/output device can be used as the input/output device 80.
  • the input/output device 80 includes a display section and displays various data in a visible manner. Further, the display unit is configured with a touch panel, and also functions as an input device that receives various operations by the operator.
  • the component mounting machine WM3 mounts a plurality of components 91 onto the board 90. As shown in FIG. 2, the component mounting machine WM3 includes a board transfer device 11, a component supply device 12, a component transfer device 13, a component camera 14, a board camera 15, and a control device 16.
  • the substrate transport device 11 is configured by, for example, a belt conveyor, and transports the substrate 90 in the transport direction (X-axis direction).
  • the substrate 90 is a circuit board on which an electronic circuit, an electric circuit, a magnetic circuit, etc. are formed.
  • the board transport device 11 carries the board 90 into the component mounting machine WM3 and positions the board 90 at a predetermined position inside the machine.
  • the board transport device 11 carries the board 90 out of the component mounting machine WM3 after the mounting process of the plurality of components 91 by the component mounting machine WM3 is completed.
  • the component supply device 12 supplies a plurality of components 91 to be mounted on the board 90.
  • the component supply device 12 includes a plurality of feeders 12a provided along the conveyance direction (X-axis direction) of the substrate 90.
  • Each of the plurality of feeders 12a is equipped with a reel.
  • a carrier tape containing a plurality of parts 91 is wound around the reel.
  • the feeder 12a feeds the carrier tape in pitches and supplies the component 91 so that it can be collected at a supply position located on the tip side of the feeder 12a.
  • the component supply device 12 can also supply electronic components (for example, lead components) that are relatively large compared to chip components and the like while being arranged on a tray.
  • the component transfer device 13 includes a head drive device 13a and a moving table 13b.
  • the head drive device 13a is configured to be able to move the movable table 13b in the X-axis direction and the Y-axis direction (direction orthogonal to the X-axis direction in the horizontal plane) using a linear motion mechanism.
  • a mounting head 20 is removably (replaceably) provided on the moving table 13b using a clamp member.
  • the mounting head 20 uses at least one holding member 30 to pick up and hold the component 91 supplied by the component supply device 12, and mounts the component 91 onto the substrate 90 positioned by the substrate transfer device 11.
  • a suction nozzle, a chuck, etc. can be used as the holding member 30.
  • the component camera 14 and the board camera 15 known imaging devices can be used.
  • the component camera 14 is fixed to the base of the component mounting machine WM3 so that its optical axis faces upward in the vertical direction (Z-axis direction perpendicular to the X-axis direction and the Y-axis direction).
  • the component camera 14 can image the component 91 held by the holding member 30 from below.
  • the board camera 15 is provided on the movable table 13b of the component transfer device 13 so that its optical axis points downward in the vertical direction (Z-axis direction).
  • the board camera 15 can image the board 90 from above.
  • the component camera 14 and the board camera 15 perform imaging based on control signals sent from the control device 16. Image data of captured images captured by the component camera 14 and the board camera 15 is transmitted to the control device 16.
  • the control device 16 includes a known arithmetic unit and a storage device, and constitutes a control circuit. Information, image data, etc. output from various sensors provided in the component mounting machine WM3 are input to the control device 16. The control device 16 sends control signals to each device based on a control program and predetermined mounting conditions set in advance.
  • control device 16 causes the substrate camera 15 to image the substrate 90 positioned by the substrate transport device 11.
  • the control device 16 processes the image captured by the board camera 15 and recognizes the positioning state of the board 90.
  • the control device 16 causes the holding member 30 to collect and hold the component 91 supplied by the component supply device 12, and causes the component camera 14 to take an image of the component 91 held by the holding member 30.
  • the control device 16 processes the image captured by the component camera 14 and recognizes the holding posture of the component 91.
  • the control device 16 moves the holding member 30 upward from a scheduled mounting position that is preset by a control program or the like. Further, the control device 16 corrects the scheduled mounting position based on the positioning state of the board 90, the holding posture of the component 91, etc., and sets the mounting position where the component 91 is actually mounted.
  • the scheduled mounting position and the mounting position include the rotation angle in addition to the position (X-axis coordinate and Y-axis coordinate).
  • the control device 16 corrects the target position (X-axis coordinate and Y-axis coordinate) and rotation angle of the holding member 30 according to the mounting position.
  • the control device 16 lowers the holding member 30 at the corrected rotation angle at the corrected target position, and mounts the component 91 on the board 90.
  • the control device 16 executes a mounting process for mounting a plurality of components 91 on the board 90 by repeating the above pick-and-place cycle.
  • FIG. 91 (not attached, floating, tilted, etc.), it is necessary to determine whether there is a foreign substance 92 attached to the substrate 90.
  • a plurality of image data PD0 obtained by capturing the same inspection area CA0 of at least a part of the substrate 90 are compared, and the foreign object 90 is detected based on the difference in the feature amount (for example, the brightness of a pixel) of the image data PD0. It is assumed that the presence or absence of
  • the board-facing work by the board-facing work machine WM0 will be stopped between the time when the reference image data PD0 is acquired and the time when the image data PD0 to be compared with the image data PD0 is acquired. If the board-related work continues to be stopped, the state of the board 90 may change, and there is a desire to obtain the state of the board 90 at the time the board-related work stopped. Therefore, the substrate-related work line WL0 of the embodiment is provided with a foreign object detection device 70 that can acquire image data at the time when the substrate-related work is stopped.
  • the foreign object detection device 70 When viewed as a control block, the foreign object detection device 70 includes an acquisition section 71 and a determination section 72. The foreign object detection device 70 can also include an estimation section 73. The foreign object detection device 70 can also include a guide section 74. As shown in FIG. 3, the foreign object detection device 70 of the embodiment includes an acquisition section 71, a determination section 72, an estimation section 73, and a guide section 74.
  • the foreign object detection device 70 can be provided in various control devices.
  • the foreign object detection device 70 can be provided in the control device 16 of the component mounting machine WM3, the line management device LC0, the management device HC0, etc.
  • the foreign object detection device 70 can also be formed on the cloud.
  • the acquisition section 71, the determination section 72, the estimation section 73, and the guide section 74 are provided in the control device 16 of the component mounting machine WM3.
  • the foreign object detection device 70 of the embodiment executes control according to the flowchart shown in FIG. 4.
  • the acquisition unit 71 performs the processes shown in step S11, step S12, step S16, and step S17.
  • the determining unit 72 performs the processing shown in part of step S13 and step S18.
  • the estimation unit 73 performs part of the processing in step S13.
  • the guide unit 74 performs the processes shown in step S14, step S15, step S19, and step S20.
  • the inspection area CA0 is imaged to obtain a plurality of image data PD0 obtained by capturing the same inspection area CA0.
  • the acquisition unit 71 may image the entire mounting area of the board 90 as the inspection area CA0, or may image a part of the mounting area of the board 90.
  • the acquisition unit 71 uses, for example, a component 91 (for example, a BGA (Ball Grid Array) component) that has a larger number of electrodes and is more susceptible to the influence of foreign matter 92 than a chip component. 91 etc.) can be imaged.
  • the acquisition unit 71 learns the mounting areas where the component 91 has failed to be mounted due to the foreign object 92, the mounting area where the foreign object 92 is likely to adhere, etc., based on past mounting results, and inspects these mounting areas. It is also possible to image the area CA0.
  • the acquisition unit 71 can also set the area specified by the operator of the component mounting machine WM3 that mounts the component 91 on the board 90 as the inspection area CA0.
  • the board-to-board work line WL0 of the embodiment includes an input/output device 80.
  • the operator can use the input/output device 80 to specify an arbitrary area (the entire mounting area of the board 90 or a part of the mounting area of the board 90) as the inspection area CA0.
  • the acquisition unit 71 can schematically display the mounting area of the component 91 on the board 90 on the display unit of the input/output device 80, so that the operator can select any mounting area.
  • the acquisition unit 71 can acquire the image data PD0 using an imaging device that can image the inspection area CA0.
  • the imaging device is not limited as long as it can image the inspection area CA0.
  • the imaging device includes a board camera 15 that can image a part of the mounting area of the board 90 from above the board 90, a ceiling camera that can image the entire mounting area of the board 90 from above the board 90, and the like.
  • the board camera 15 is used, and the acquisition unit 71 sets the area designated by the operator of the component mounting machine WM3 as the inspection area CA0.
  • the acquisition unit 71 images the same inspection area CA0 multiple times with the same imaging conditions (for example, exposure time, aperture, illumination time, etc.) that can be set by the imaging device, and acquires a plurality of image data PD0. do.
  • the determination unit 72 determines whether there is a foreign object 92 attached to the inspection area CA0 based on the difference in the feature amount of the inspection area CA0 obtained by image processing the reference image data SD0 and the inspection image data CD0.
  • the reference image data SD0 refers to one image data PD0 among the plurality of image data PD0 acquired by the acquisition unit 71.
  • the inspection image data CD0 refers to the image data PD0 of the inspection target acquired by the acquisition unit 71 after the reference image data SD0.
  • the determining unit 72 may take various forms as long as it can determine the presence or absence of foreign matter 92 adhering to the inspection area CA0 based on the difference in the feature amount of the inspection area CA0. For example, when the difference between the feature amounts of the inspection area CA0 acquired from the two image data PD0 (in this case, the reference image data SD0 and the inspection image data CD0) exceeds a predetermined threshold, the determination unit 72 determines that the inspection area CA0 It is determined that there is a foreign object 92 in the area. The determining unit 72 determines that there is no foreign object 92 in the inspection area CA0 when the difference between the feature amounts is less than or equal to a predetermined threshold.
  • the feature amount is not limited as long as it can be obtained by image processing the image data PD0.
  • the brightness, saturation, brightness, etc. of each pixel of the two image data PD0 (reference image data SD0 and inspection image data CD0) are included in the feature amount.
  • the area of the closed region, the length of the perimeter of the closed region, etc. obtained by image processing (for example, binarization processing, etc.) each of the two image data PD0 (reference image data SD0 and inspection image data CD0), etc. is included in the feature amount.
  • the feature amount is the brightness of each pixel of the two image data PD0 (reference image data SD0 and inspection image data CD0).
  • the above-mentioned predetermined threshold value is larger than the feature amount (for example, the brightness of a pixel) when the foreign matter 92 is not attached to the inspection area CA0, and is larger than the feature amount (for example, the brightness of a pixel) when the foreign matter 92 is attached to the inspection area CA0. is set to be smaller than the amount.
  • the predetermined threshold value is obtained in advance by, for example, simulation or verification using an actual device.
  • FIG. 5 and 6 schematically show an example of a plurality of (two) pieces of image data PD0 acquired by the acquisition unit 71.
  • FIG. 5 shows the reference image data SD0
  • FIG. 6 shows the inspection image data CD0. Note that in FIGS. 5 and 6, for convenience of explanation, a plurality of pixels arranged in a lattice pattern are shown together. Further, the area AR0 shown in FIGS. 5 and 6 indicates the same area (set of the same plurality of pixels) in the inspection area CA0.
  • the difference between the brightness of the pixels included in the area AR0 shown in FIG. 5 and the brightness of the pixels included in the area AR0 shown in FIG. 6 exceeds a predetermined threshold. Conversely, when there is no foreign object 92 in the area AR0, the difference between the brightness of the pixels included in the area AR0 shown in FIG. 5 and the brightness of the pixels included in the area AR0 shown in FIG. 6 becomes equal to or less than the predetermined threshold value.
  • the determination unit 72 determines that there is no foreign object 92 in the inspection area CA0 when the difference between the brightness of the pixels included in the area AR0 shown in FIG. 5 and the brightness of the pixels included in the area AR0 shown in FIG. I judge that. Note that the brightness comparison is performed for each corresponding pixel.
  • the acquisition unit 71 can acquire the reference image data SD0 and the inspection image data CD0 at a predetermined timing.
  • the board 90 is sequentially conveyed to a plurality of (three in the figure) component mounting machines WM3, which are the board-to-board working machine WM0, and a plurality of components 91 are mounted thereon.
  • the most upstream component mounting machine WM3 among the plurality of (three) component mounting machines WM3 will be referred to as the component mounting machine M1.
  • the next component mounting machine WM3 on the downstream side of the component mounting machine M1 is defined as a component mounting machine M2.
  • the next component mounting machine WM3 on the downstream side of the component mounting machine M2 is defined as the component mounting machine M3.
  • the acquisition unit 71 acquires the reference image data SD0 in the most upstream component mounting machine WM3 (component mounting machine M1) among the plurality of (three) component mounting machines WM3. do. More specifically, the acquisition unit 71 images the inspection area CA0 and acquires the reference image data SD0 before starting the mounting process of the component 91 in the component mounting machine M1.
  • the acquisition unit 71 acquires the inspection image data CD0 in the component mounting machine WM3 (for example, the component mounting machine M3) that mounts the component 91 in the inspection area CA0. More specifically, the acquisition unit 71 images the inspection area CA0 and acquires the inspection image data CD0 before mounting the component 91 to be mounted on the inspection area CA0 in the component mounting machine M3.
  • the determining unit 72 can determine the presence or absence of foreign matter 92 that adheres to the inspection area CA0 while the board 90 is being transported across the plurality of (three) component mounting machines WM3.
  • the above form is referred to as the first form.
  • the acquisition unit 71 can also acquire the reference image data SD0 and the inspection image data CD0 in each of the plurality of (three) component mounting machines WM3.
  • the acquisition unit 71 includes at least one component mounting machine WM3 (component mounting machine M1 and component mounting machine M2) provided upstream of a component mounting machine WM3 (for example, component mounting machine M3) that mounts the component 91 in the inspection area CA0. ), the inspection area CA0 is imaged to obtain reference image data SD0 before starting the mounting process of the component 91.
  • the acquisition unit 71 images the inspection area CA0 and acquires inspection image data CD0 after the mounting process of the component 91 is completed in each of the component mounting machines WM3 (component mounting machines M1 and M2) described above.
  • the acquisition unit 71 images the inspection area CA0 before starting the mounting process of the component 91, and generates reference image data. Get SD0.
  • the acquisition unit 71 images the inspection area CA0 and acquires inspection image data CD0 before mounting the component 91 to be mounted on the inspection area CA0.
  • the determining unit 72 can determine the presence or absence of foreign matter 92 adhering to the inspection area CA0 in each of the plurality of (three) component mounting machines WM3.
  • the above form is referred to as the second form.
  • the acquisition unit 71 can also acquire the reference image data SD0 and the inspection image data CD0 between adjacent component mounting machines WM3.
  • the acquisition unit 71 acquires the reference image data SD0 in one of the plurality of (three) component mounting machines WM3. More specifically, the acquisition unit 71 images the inspection area CA0 and acquires the reference image data SD0 after the mounting process of the component 91 in the component mounting machine WM3 is completed and before the board 90 is carried out. .
  • the acquisition unit 71 acquires the inspection image data CD0 in the next component mounting machine WM3 on the downstream side of the component mounting machine WM3. More specifically, the acquisition unit 71 images the inspection area CA0 and performs the inspection after the board 90 is carried into the component mounting machine WM3 and before starting the mounting process of the component 91 in the component mounting machine WM3. Obtain image data CD0. In these cases, the determining unit 72 can determine the presence or absence of foreign matter 92 that adheres to the inspection area CA0 when the board 90 is transported between adjacent component mounting machines WM3. In this specification, the above form is referred to as the third form.
  • board work machine WM0 performs image processing on image data PD0 acquired by an imaging device (for example, component camera 14, board camera 15, etc. in component mounting machine WM3). If the results are bad, the board work may be stopped. Further, the board-related work machine WM0 may stop the board-related work when a situation occurs in which the board-related work cannot be continued (for example, in the component mounting machine WM3, there is a shortage of components 91 to be mounted). Further, the operator may operate the stop button to stop the board-facing work by the board-facing work machine WM0.
  • an imaging device for example, component camera 14, board camera 15, etc. in component mounting machine WM3
  • the board-related work machine WM0 may stop the board-related work when a situation occurs in which the board-related work cannot be continued (for example, in the component mounting machine WM3, there is a shortage of components 91 to be mounted). Further, the operator may operate the stop button to stop the board-facing work by the board-facing work machine WM0.
  • the acquisition unit 71 images the inspection area CA0 and acquires the first image data PD1 when the board work is stopped between the acquisition of the reference image data SD0 and the acquisition of the inspection image data CD0 ( In the case of Yes in step S11 and step S12 shown in FIG. 4).
  • the first image data PD1 refers to the image data PD0 at the time when the work for the board stopped.
  • the acquisition unit 71 can image the inspection area CA0 and acquire the first image data PD1 at the timing when the board-related work is stopped, in the same manner as when the board-related work is being performed normally. Thereby, the foreign object detection device 70 can acquire the image data PD0 at the time when the work on the board stopped, and can grasp the state of the board 90 at the time when the work on the board stopped.
  • the determining unit 72 can determine the presence or absence of the foreign object 92 based on the difference in the feature amount of the inspection area CA0 obtained by image processing the reference image data SD0 and the first image data PD1 (FIG. Step S13) shown in FIG.
  • the determining unit 72 can determine the presence or absence of the foreign object 92 in the same manner as when the board work is normally performed.
  • the determination unit 72 determines if the difference in the feature amount of the inspection area CA0 obtained from the two image data PD0 (in this case, the reference image data SD0 and the first image data PD1) exceeds a predetermined threshold value. , it is determined that there is a foreign object 92 in the inspection area CA0. The determining unit 72 determines that there is no foreign object 92 in the inspection area CA0 when the difference between the feature amounts is less than or equal to a predetermined threshold.
  • the feature amount is not limited.
  • the feature amount in the embodiment is the brightness of each pixel of the two image data PD0 (standard image data SD0 and first image data PD1).
  • FIG. 7 shows an example of the state of the board 90 until the board work is stopped.
  • the state of the board 90 until the board work is stopped in the component mounting machine M2 is schematically shown using image data PD0.
  • the acquisition unit 71 acquires the reference image data SD0.
  • the acquisition unit 71 images the inspection area CA0 and acquires first image data PD1 at the timing when the board-related work has stopped in the component mounting machine M2 where the board-related work has stopped.
  • the reference image data SD0 and the first image data PD1 shown in the figure have a small difference in feature amount in the inspection area CA0 (the difference in the feature amount is less than a predetermined threshold value), and the determination unit 72 determines that there is no foreign object 92 in the inspection area CA0. It is determined that there is no In the same figure, the target board 90 has not yet been transferred to the next component mounting machine M3 on the downstream side of the component mounting machine M2, and the image data PD0 is shown blank.
  • the determining unit 72 can unconditionally determine the presence or absence of the foreign object 92 when the first image data PD1 is acquired by the acquiring unit 71. Thereby, the determining unit 72 can determine the presence or absence of foreign matter 92 adhering to the inspection area CA0 from the time the reference image data SD0 is acquired by the acquisition unit 71 until the board work is stopped. Further, as described below, the determining unit 72 can also determine the presence or absence of the foreign object 92 when a predetermined condition is satisfied. For example, the feature amount of the inspection area CA0 obtained by image processing the image data PD0 may change due to changes over time in the bonding member 93 for bonding the substrate 90 and the component 91, which is applied to the inspection area CA0 of the substrate 90. There is.
  • the joining member 93 is not limited as long as it is a member that joins the substrate 90 and the component 91.
  • solder, adhesive, etc. are included in the joining member 93.
  • bonding member 93 is solder. Solder changes color from silver to gray as the flux it contains dries. Therefore, the characteristic amount of the inspection area CA0 may change due to changes in the solder over time, and the determining unit 72 may erroneously determine that the solder is the foreign object 92.
  • the time from when the board work is stopped until it is restarted is defined as the stop time Q0.
  • a stop time Q0 is determined in which the bonding member 93 is not mistakenly determined to be a foreign object 92 even if the feature amount of the inspection area CA0 changes due to changes over time in the bonding member 93 that joins the substrate 90 and the component 91 applied to the inspection area CA0.
  • Let the allowable time be T0. The shorter the stop time Q0 is than the allowable time T0, the less the component mounting machine M3 will be affected by changes over time in the bonding member 93 when determining the presence or absence of a foreign object 92, and the component mounting machine M2 will stop working on the board. The necessity of determining the presence or absence of foreign matter 92 is reduced.
  • the estimation unit 73 estimates the stop time Q0 from when the board work is stopped until it is restarted (step S13 shown in FIG. 4).
  • the estimation unit 73 only needs to be able to estimate the stop time Q0, and can take various forms.
  • the estimating unit 73 can estimate the stop time Q0 based on the reason why the board work was stopped (for example, the result of image processing of the image data PD0 is defective, etc.).
  • the estimation unit 73 associates the cause of the stoppage of the board-related work with the stop time Q0 from when the board-related work is stopped until it is restarted each time the board product 900 is produced in advance.
  • the stop time Q0 can be expressed by, for example, an average value, a median value, etc.
  • the estimation unit 73 calculates the stop time Q0 (for example, average value or median value) stored in association with the cause of the stop of the board work. is output to the determination unit 72.
  • the determining unit 72 can determine the presence or absence of the foreign object 92 when the estimating unit 73 estimates a stop time Q0 that is longer than the allowable time T0 (step S13 shown in FIG. 4).
  • the determining unit 72 can also determine the presence or absence of the foreign object 92 when a stopping time Q0 longer than the allowable time T0 is expected after the estimating unit 73 estimates the stopping time Q0 within the allowable time T0. .
  • the allowable time T0 can be obtained in advance by, for example, simulation or verification using an actual machine. Further, the allowable time T0 may vary depending on the type of the joining member 93, and the determining unit 72 can also use the allowable time T0 depending on the type of the joining member 93. For example, the determining unit 72 can use the allowable time T0 depending on the type of solder. Further, the determination unit 72 can use the allowable time T0 depending on the type of adhesive.
  • the determining unit 72 can also use the allowable time T0 depending on at least one of the temperature and humidity inside the component mounting machine WM3 that mounts the component 91 on the board 90.
  • the guide unit 74 guides the operator to the presence of the foreign object 92 when the determining unit 72 determines that the foreign object 92 is present in the inspection area CA0 (if Yes in step S14 and step S15 shown in FIG. 4).
  • the guide section 74 may take various forms as long as it can guide the operator to the presence of the foreign object 92.
  • the board-related work line WL0 of the embodiment includes an input/output device 80.
  • the guide unit 74 can use the input/output device 80 to guide the operator to the presence of the foreign object 92 (for example, by display, voice guidance, etc.).
  • the guide unit 74 guides the presence of the substrate 90 to which the foreign object 92 is attached, the position on the substrate 90 where the foreign object 92 is attached, the substrate-to-substrate working machine WM0 where the substrate 90 is present, etc. can do. Thereby, the operator can check the substrate 90 to which the foreign matter 92 is attached, and can take countermeasures (for example, carry out the substrate 90).
  • the guide unit 74 can also similarly guide the worker about the presence of the foreign object 92 (for example, by display, voice guidance, vibration, etc.) using a mobile terminal owned by the worker.
  • the acquisition unit 71 images the inspection area CA0 to acquire the second image data PD2, and updates the reference image data SD0 with the second image data PD2 (steps shown in FIG. 4). If Yes in S16 and step S17).
  • the second image data PD2 refers to the image data PD0 at the time when the board-related work is restarted.
  • the acquisition unit 71 can image the inspection area CA0 and acquire the second image data PD2 at the timing when the board-related work is restarted, in the same way as when the board-related work is being performed normally. Thereby, the foreign object detection device 70 can acquire the image data PD0 at the time when the work for the substrate is restarted.
  • the acquisition unit 71 can update the reference image data SD0 with the second image data PD2 when the stop time Q0 is longer than the allowable time T0.
  • the acquisition unit 71 images the inspection area CA0 to acquire the second image data PD2, and uses the second image data PD2 to image the reference image.
  • Data SD0 can also be updated.
  • the determining unit 72 determines the presence or absence of a foreign object 92 based on the difference in the feature amount of the inspection area CA0 obtained by image processing the updated reference image data SD0 and inspection image data CD0, respectively (steps shown in FIG. 4). S18). The determining unit 72 can determine the presence or absence of the foreign object 92 in the same manner as when the board work is normally performed.
  • the determination unit 72 determines that the difference between the feature amounts of the inspection area CA0 obtained from the two image data PD0 (in this case, the updated reference image data SD0 and the inspection image data CD0) exceeds a predetermined threshold. In this case, it is determined that there is a foreign object 92 in the inspection area CA0. The determining unit 72 determines that there is no foreign object 92 in the inspection area CA0 when the difference between the feature amounts is less than or equal to a predetermined threshold.
  • the feature amount is not limited.
  • the feature amount in the embodiment is the brightness of each pixel of the two image data PD0 (updated reference image data SD0 and inspection image data CD0).
  • FIG. 8 shows an example of the state of the board 90 after the board-related work is resumed.
  • the state of the board 90 after the board work is restarted in the component mounting machine M2 is schematically shown using image data PD0.
  • the acquisition unit 71 images the inspection area CA0 to obtain the second image data PD2 at the timing when the board-related work has been restarted.
  • the reference image data SD0 is updated with the second image data PD2.
  • the bonding member 93 is shown in black for convenience of illustration, and it schematically shows that the bonding member 93 has changed over time while the work for the substrate is stopped. Then, the board 90 is transported to the next component mounting machine M3 on the downstream side of the component mounting machine M2, and in the component mounting machine M3, the acquisition unit 71 acquires the inspection image data CD0. If the reference image data SD0 is not updated by the second image data PD2, the determination unit 72 updates the inspection area CA0 obtained by image processing the reference image data SD0 shown in FIG. 7 and the inspection image data CD0 shown in FIG. 8, respectively. The presence or absence of the foreign object 92 is determined based on the difference in the feature amounts.
  • the feature amount of the inspection area CA0 (the joining member 93 is white) obtained by image processing the reference image data SD0 shown in FIG. 7, and the inspection obtained by image processing the inspection image data CD0 shown in FIG.
  • the feature amount of area CA0 (joining member 93 is black) has a large difference, and the difference in feature amount exceeds a predetermined threshold value. Therefore, the determining unit 72 incorrectly determines that the foreign object 92 is present in the inspection area CA0.
  • the determination unit 72 updates the inspection area CA0 obtained by image processing the reference image data SD0 and the inspection image data CD0 shown in FIG. The presence or absence of the foreign object 92 is determined based on the difference in the feature amounts.
  • the determining unit 72 determines that there is no foreign object 92 in the inspection area CA0. In other words, erroneous determination of foreign matter 92 due to changes in bonding member 93 over time is suppressed.
  • FIG. 8 shows the state of the board 90 after the board work is resumed, and the image data PD0 of the component mounting machine M1 on the upstream side of the component mounting machine M2 is shown as blank.
  • the guide unit 74 guides the operator to the presence of the foreign object 92 when the determining unit 72 determines that the foreign object 92 is present in the inspection area CA0 (in the case of Yes in step S19 and step S20 shown in FIG. 4).
  • the guide section 74 can inform the operator of the presence of the foreign object 92 in the same manner as when informing the operator of the presence of the foreign object 92 immediately after the board work is stopped.
  • the control by the foreign object detection device 70 then ends once.
  • step S11 and step S19 shown in FIG. 4 the control by the foreign object detection device 70 ends once. Moreover, in the case of No in step S14, the control by the foreign object detection device 70 proceeds to the control shown in step S16. Further, in the case of No in step S16, the control by the foreign object detection device 70 returns to the control shown in step S16, and waits until the work for the substrate is restarted.
  • the items described in this specification can be combined and selected as appropriate.
  • the first form is explained as an example, but the matters described in this specification can also be applied to the second form or the third form.
  • the matters described in this specification can also be applied to a form that combines the second form and the third form.
  • the third embodiment since the board work is stopped when the board 90 is transported between the adjacent component mounting machines WM3, the first image data PD1 and the second image data are transferred between the adjacent component mounting machines WM3.
  • An imaging device capable of acquiring image data PD2 is provided.
  • the inspection image data CD0 is acquired after the reference image data SD0 is acquired by the acquisition unit 71. It is possible to select a configuration in which the time required to complete the process is shorter than the previously described allowable time T0.
  • the foreign object detection method includes an acquisition step and a determination step.
  • the acquisition process corresponds to control performed by the acquisition unit 71.
  • the determination process corresponds to control performed by the determination unit 72.
  • the foreign object detection method can include an estimation step.
  • the estimation process corresponds to control performed by the estimation unit 73.
  • the foreign object detection method can also include a guiding step.
  • the guiding process corresponds to the control performed by the guiding section 74.
  • 70 Foreign object detection device
  • 71 Acquisition unit
  • 72 Judgment unit
  • 73 Estimation unit
  • 74 Guide part
  • 90 Board
  • 91 Components
  • 92 Foreign matter
  • 93 Joining member
  • CA0 inspection area
  • PD0 image data
  • SD0 reference image data
  • CD0 inspection image data
  • PD1 first image data
  • PD2 second image data
  • Q0 stop time
  • T0 allowable time
  • WM0 Board work machine
  • WM3 Component mounting machine.

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Abstract

This foreign matter detection device comprises an acquisition unit and a determination unit. When a substrate work machine performs prescribed work on a substrate, the acquisition unit captures images of an inspection region of at least a portion of the substrate as the work on the substrate progresses, and acquires multiple pieces of image data resulting from capturing of images of the same inspection region. The determination unit determines the presence/absence of foreign matter adhered to the inspection region, on the basis of inspection region characteristic-amount differences, obtained by image processing: reference image data, which is a one piece of image data of said multiple pieces of image data; and inspection image data, which is image data to be inspected and acquired after the reference image data. Furthermore, if the work on the substrate stops after the acquisition of the reference image data but before the acquisition of the inspection image data, the acquisition unit acquires an image of the inspection region at the point in time when the work on the substrate stopped, to obtain image data, which is first image data.

Description

異物検出装置および異物検出方法Foreign object detection device and foreign object detection method
 本明細書は、異物検出装置および異物検出方法に関する技術を開示する。 This specification discloses a technology related to a foreign object detection device and a foreign object detection method.
 特許文献1に記載の実装ラインは、第一のカメラ手段と、第二のカメラ手段と、画像処理手段とを備えている。第一のカメラ手段は、プリント基板の少なくとも一部を視野に収めることが可能なカメラ手段であって、いずれかの実装機における電子部品の実装作業前にプリント基板を撮像可能に設けられている。第二のカメラ手段は、第一のカメラ手段と同様な範囲を視野に収めることが可能なカメラ手段であって、いずれかの実装機または当該実装機よりも後工程の実装機による電子部品の実装作業後にプリント基板を撮像可能に設けられている。 The mounting line described in Patent Document 1 includes a first camera means, a second camera means, and an image processing means. The first camera means is a camera means capable of viewing at least a portion of the printed circuit board, and is provided to be able to take an image of the printed circuit board before mounting the electronic components in any of the mounting machines. . The second camera means is a camera means that can cover the same field of view as the first camera means, and is a camera means that can cover the same field of view as the first camera means, and is a camera means that can capture electronic components by one of the mounters or a mounter in a process subsequent to the mounter. It is provided to be able to take an image of the printed circuit board after the mounting work.
 画像処理手段は、第二のカメラ手段で撮像された画像データを第一のカメラ手段で撮像された画像データと比較して画像処理を行う。これにより、特許文献1に記載の実装ラインは、プリント基板にはんだを印刷した際のはんだの印刷異常、または、プリント基板に電子部品を実装した際の電子部品の実装異常を検出しようとしている。 The image processing means performs image processing by comparing the image data taken by the second camera means with the image data taken by the first camera means. As a result, the mounting line described in Patent Document 1 attempts to detect abnormalities in solder printing when solder is printed on a printed circuit board or mounting abnormalities in electronic components when electronic components are mounted on a printed circuit board.
特開2007-335524号公報Japanese Patent Application Publication No. 2007-335524
 部品の装着位置に異物が付着していると、部品の装着が不良になる可能性があり、基板に付着する異物の有無を判断する必要がある。この場合に、基板の少なくとも一部の同一の検査領域を撮像した複数の画像データを比較して、画像データの特徴量の差異に基づいて異物の有無を判断することが想定される。 If foreign matter is attached to the mounting position of the component, there is a possibility that the component will be installed incorrectly, and it is necessary to determine whether there is any foreign matter attached to the board. In this case, it is assumed that a plurality of image data obtained by capturing images of the same inspection area of at least a portion of the board are compared, and the presence or absence of a foreign object is determined based on the difference in the feature amount of the image data.
 しかしながら、基準となる画像データを取得してから、当該画像データと比較する画像データを取得するまでの間に、対基板作業機による対基板作業が停止する可能性がある。対基板作業が停止した状態が継続すると、基板の状態が変化する可能性があり、対基板作業が停止した時点の基板の状態を取得したいという要請がある。 However, there is a possibility that the board-facing work by the board-facing work machine will stop between the time when the reference image data is acquired and the time when the image data to be compared with the image data is acquired. If the board work continues to be stopped, the state of the board may change, and there is a desire to obtain the state of the board at the time the board work stopped.
 このような事情に鑑みて、本明細書は、対基板作業が停止した時点の画像データを取得可能な異物検出装置および異物検出方法を開示する。 In view of these circumstances, this specification discloses a foreign object detection device and a foreign object detection method that can acquire image data at the time when the work for the substrate is stopped.
 本明細書は、取得部と、判断部とを備える異物検出装置を開示する。前記取得部は、基板に所定の対基板作業を行う対基板作業機による前記対基板作業の進行に伴って前記基板の少なくとも一部の検査領域を撮像して、同一の前記検査領域を撮像した複数の画像データを取得する。前記判断部は、前記複数の画像データのうちの一の画像データである基準画像データおよび前記基準画像データよりも後に取得される検査対象の画像データである検査画像データをそれぞれ画像処理して取得した前記検査領域の特徴量の差異に基づいて、前記検査領域に付着する異物の有無を判断する。また、前記取得部は、前記基準画像データを取得してから前記検査画像データを取得するまでの間に前記対基板作業が停止した場合に、前記検査領域を撮像して前記対基板作業が停止した時点の画像データである第一画像データを取得する。 This specification discloses a foreign object detection device that includes an acquisition section and a determination section. The acquisition unit images at least a part of the inspection area of the board as the board-to-board work progresses by a board-to-board work machine that performs a predetermined board-to-board work on the board, and images the same inspection area. Acquire multiple image data. The determination unit performs image processing to obtain reference image data that is one image data of the plurality of image data and inspection image data that is image data of an inspection target acquired after the reference image data. The presence or absence of a foreign object adhering to the inspection area is determined based on the difference in the feature amount of the inspection area. Further, when the board-related work is stopped between acquiring the reference image data and acquiring the inspection image data, the acquisition unit is configured to image the inspection area and stop the board-related work. First image data, which is the image data at the time when the
 また、本明細書は、取得工程と、判断工程とを備える異物検出方法を開示する。前記取得工程は、基板に所定の対基板作業を行う対基板作業機による前記対基板作業の進行に伴って前記基板の少なくとも一部の検査領域を撮像して、同一の前記検査領域を撮像した複数の画像データを取得する。前記判断工程は、前記複数の画像データのうちの一の画像データである基準画像データおよび前記基準画像データよりも後に取得される検査対象の画像データである検査画像データをそれぞれ画像処理して取得した前記検査領域の特徴量の差異に基づいて、前記検査領域に付着する異物の有無を判断する。また、前記取得工程は、前記基準画像データを取得してから前記検査画像データを取得するまでの間に前記対基板作業が停止した場合に、前記検査領域を撮像して前記対基板作業が停止した時点の画像データである第一画像データを取得する。 Additionally, this specification discloses a foreign object detection method that includes an acquisition step and a determination step. In the acquisition step, at least a part of the inspection area of the board is imaged as the board-to-board work progresses by a board-to-board work machine that performs a predetermined board-to-board work on the board, and the same inspection area is imaged. Acquire multiple image data. The determination step includes image processing and acquisition of reference image data, which is one image data of the plurality of image data, and inspection image data, which is image data of the inspection target acquired after the reference image data. The presence or absence of foreign matter adhering to the inspection area is determined based on the difference in the feature amount of the inspection area. Further, in the acquisition step, if the board-related work is stopped between obtaining the reference image data and acquiring the inspection image data, the board-related work is stopped by imaging the inspection area. First image data, which is image data at the time when the first image data is obtained, is acquired.
 なお、本明細書には、願書に最初に添付した請求の範囲(以下、当初請求の範囲という。)に記載の請求項6において、「請求項1に記載の異物検出装置」を「請求項1~請求項5のいずれか一項に記載の異物検出装置」に変更した技術的思想が開示されている。また、本明細書には、当初請求の範囲に記載の請求項9において、「請求項1に記載の異物検出装置」を「請求項1~請求項8のいずれか一項に記載の異物検出装置」に変更した技術的思想が開示されている。さらに、本明細書には、当初請求の範囲に記載の請求項11において、「請求項1に記載の異物検出装置」を「請求項1~請求項10のいずれか一項に記載の異物検出装置」に変更した技術的思想が開示されている。また、本明細書には、当初請求の範囲に記載の請求項12において、「請求項1に記載の異物検出装置」を「請求項1~請求項10のいずれか一項に記載の異物検出装置」に変更した技術的思想が開示されている。さらに、本明細書には、当初請求の範囲に記載の請求項13において、「請求項1に記載の異物検出装置」を「請求項1~請求項10および請求項12のいずれか一項に記載の異物検出装置」に変更した技術的思想が開示されている。 In addition, in this specification, in claim 6 of the claims first attached to the application (hereinafter referred to as original claims), "the foreign object detection device according to claim 1" is defined as "claim 6". A technical concept modified to the foreign object detection device according to any one of claims 1 to 5 is disclosed. In addition, in the present specification, in claim 9 of the original claims, ``the foreign object detection device according to claim 1'' is defined as ``the foreign object detection device according to any one of claims 1 to 8''. The technical idea changed to "device" is disclosed. Furthermore, in the present specification, in claim 11 originally stated in the scope of claims, "the foreign object detection device according to claim 1" is defined as "the foreign object detection device according to any one of claims 1 to 10." The technical idea changed to "device" is disclosed. In addition, in the present specification, in claim 12 originally stated in the scope of claims, ``the foreign object detection device according to claim 1'' is defined as ``the foreign object detection device according to any one of claims 1 to 10''. The technical idea changed to "device" is disclosed. Furthermore, in the present specification, in claim 13 originally stated in the scope of claims, "the foreign object detection device according to claim 1" is defined as "any one of claims 1 to 10 and claim 12." A technical concept modified from the above-mentioned foreign object detection device is disclosed.
 上記の異物検出装置によれば、対基板作業が停止した時点の画像データである第一画像データを取得することができる。異物検出装置について上述されていることは、異物検出方法についても同様に言える。 According to the above-mentioned foreign object detection device, it is possible to acquire first image data that is image data at the time when the work for the substrate is stopped. What has been described above regarding the foreign object detection device also applies to the foreign object detection method.
対基板作業ラインの構成例を示す構成図である。FIG. 2 is a configuration diagram showing an example of the configuration of a board-related work line. 部品装着機の構成例を示す平面図である。FIG. 2 is a plan view showing a configuration example of a component mounting machine. 異物検出装置の制御ブロックの一例を示すブロック図である。It is a block diagram showing an example of a control block of a foreign object detection device. 異物検出装置による制御手順の一例を示すフローチャートである。It is a flow chart which shows an example of a control procedure by a foreign object detection device. 基準画像データの一例を示す模式図である。FIG. 3 is a schematic diagram showing an example of reference image data. 検査画像データの一例を示す模式図である。FIG. 3 is a schematic diagram showing an example of inspection image data. 対基板作業が停止するまでの基板の状態の一例を示す模式図である。FIG. 3 is a schematic diagram showing an example of the state of the board until the work for the board is stopped. 対基板作業が再開された後の基板の状態の一例を示す模式図である。FIG. 6 is a schematic diagram showing an example of the state of the board after the work for the board is restarted.
 1.実施形態
 1-1.対基板作業ラインWL0の構成例
 対基板作業ラインWL0では、対基板作業機WM0が基板90に所定の対基板作業を行う。対基板作業ラインWL0を構成する対基板作業機WM0の種類および数は、限定されない。図1に示すように、実施形態の対基板作業ラインWL0は、印刷機WM1、印刷検査機WM2、部品装着機WM3、リフロー炉WM4および外観検査機WM5の複数の対基板作業機WM0を備えており、基板90は、基板搬送装置によって上記の順に搬送される。
1. Embodiment 1-1. Configuration example of the board-to-board work line WL0 In the board-to-board work line WL0, the board-to-board work machine WM0 performs a predetermined board-to-board work on the board 90. The type and number of the board-to-board work machines WM0 that constitute the board-to-board work line WL0 are not limited. As shown in FIG. 1, the board-to-board work line WL0 of the embodiment includes a plurality of board-to-board work machines WM0, including a printing machine WM1, a print inspection machine WM2, a component mounting machine WM3, a reflow oven WM4, and an appearance inspection machine WM5. Then, the substrate 90 is transported in the above order by the substrate transport device.
 印刷機WM1は、基板90の複数の部品91の装着位置に、はんだを印刷する。印刷検査機WM2は、印刷機WM1によって印刷されたはんだの印刷状態を検査する。図2に示すように、部品装着機WM3は、印刷機WM1によってはんだが印刷された基板90に複数の部品91を装着する。部品装着機WM3は、一つであっても良く、複数であっても良い。部品装着機WM3が複数設けられる場合は、複数の部品装着機WM3が分担して、複数の部品91を装着することができる。 The printing machine WM1 prints solder on the mounting positions of the plurality of components 91 on the board 90. The print inspection machine WM2 inspects the printing state of the solder printed by the printing machine WM1. As shown in FIG. 2, the component mounting machine WM3 mounts a plurality of components 91 onto a board 90 on which solder has been printed by the printing machine WM1. The number of component mounting machines WM3 may be one or more. When a plurality of component mounting machines WM3 are provided, the plurality of component mounting machines WM3 can share the task of mounting a plurality of components 91.
 リフロー炉WM4は、部品装着機WM3によって複数の部品91が装着された基板90を加熱し、はんだを溶融させて、はんだ付けを行う。外観検査機WM5は、部品装着機WM3によって装着された複数の部品91の装着状態などを検査する。このように、対基板作業ラインWL0は、複数の対基板作業機WM0を用いて、基板90を順に搬送し、検査処理を含む生産処理を実行して基板製品900を生産することができる。なお、対基板作業ラインWL0は、例えば、機能検査機、バッファ装置、基板供給装置、基板反転装置、シールド装着装置、接着剤塗布装置、紫外線照射装置などの対基板作業機WM0を必要に応じて備えることもできる。 The reflow furnace WM4 heats the board 90 on which the plurality of components 91 are mounted by the component mounting machine WM3, melts the solder, and performs soldering. The appearance inspection machine WM5 inspects the mounting state of the plurality of components 91 mounted by the component mounting machine WM3. In this way, the substrate-to-board work line WL0 can use the plurality of substrate-to-board work machines WM0 to transport the substrates 90 in order, perform production processing including inspection processing, and produce the board products 900. Note that the board-related work line WL0 includes board-related work machines WM0 such as a function inspection machine, a buffer device, a substrate supply device, a substrate reversing device, a shield mounting device, an adhesive coating device, and an ultraviolet irradiation device as necessary. You can also prepare.
 対基板作業ラインWL0を構成する複数の対基板作業機WM0およびライン管理装置LC0は、通信部によって通信可能に接続されている。また、ライン管理装置LC0および管理装置HC0は、通信部によって通信可能に接続されている。通信部は、有線または無線によって、これらを通信可能に接続することができ、通信方法は、種々の方法をとり得る。 A plurality of board-to-board work machines WM0 and line management device LC0, which constitute the board-to-board work line WL0, are communicably connected by a communication unit. Further, the line management device LC0 and the management device HC0 are communicably connected by a communication section. The communication unit can communicably connect them by wire or wirelessly, and various communication methods can be used.
 実施形態では、複数の対基板作業機WM0、ライン管理装置LC0および管理装置HC0によって、構内情報通信網(LAN:Local Area Network)が構成されている。よって、複数の対基板作業機WM0は、通信部を介して、互いに通信することができる。また、複数の対基板作業機WM0は、通信部を介して、ライン管理装置LC0と通信することができる。さらに、ライン管理装置LC0および管理装置HC0は、通信部を介して、互いに通信することができる。 In the embodiment, a local area network (LAN) is configured by a plurality of board-related work machines WM0, line management device LC0, and management device HC0. Therefore, the plurality of board-oriented work machines WM0 can communicate with each other via the communication section. Further, the plurality of board-oriented work machines WM0 can communicate with the line management device LC0 via the communication unit. Furthermore, the line management device LC0 and the management device HC0 can communicate with each other via the communication unit.
 ライン管理装置LC0は、対基板作業ラインWL0を構成する複数の対基板作業機WM0の制御を行い、対基板作業ラインWL0の動作状況を監視する。ライン管理装置LC0には、複数の対基板作業機WM0を制御する種々の制御データが記憶されている。ライン管理装置LC0は、複数の対基板作業機WM0の各々に制御データを送信する。また、複数の対基板作業機WM0の各々は、ライン管理装置LC0に動作状況および生産状況を送信する。 The line management device LC0 controls the plurality of board-related work machines WM0 that constitute the board-related work line WL0, and monitors the operating status of the board-related work line WL0. The line management device LC0 stores various control data for controlling the plurality of board working machines WM0. The line management device LC0 transmits control data to each of the plurality of board-facing work machines WM0. Further, each of the plurality of board-oriented work machines WM0 transmits the operating status and production status to the line management device LC0.
 管理装置HC0は、少なくとも一つのライン管理装置LC0を管理する。例えば、ライン管理装置LC0によって取得された対基板作業機WM0の動作状況および生産状況は、必要に応じて、管理装置HC0に送信される。管理装置HC0には、記憶装置が設けられている。記憶装置は、対基板作業機WM0が取得した種々の取得データを保存することができる。例えば、対基板作業機WM0によって撮像された種々の画像データは、取得データに含まれる。対基板作業機WM0によって取得された稼働状況の記録(ログデータ)などは、取得データに含まれる。また、記憶装置は、基板製品900の生産に関する種々の生産情報を保存することができる。 The management device HC0 manages at least one line management device LC0. For example, the operating status and production status of the board-oriented work machine WM0 acquired by the line management device LC0 are transmitted to the management device HC0 as necessary. The management device HC0 is provided with a storage device. The storage device can store various types of acquired data acquired by the board-oriented work machine WM0. For example, various image data captured by the substrate-to-board working machine WM0 is included in the acquired data. Records (log data) of operating conditions acquired by the board-oriented work machine WM0 are included in the acquired data. Further, the storage device can store various production information regarding the production of the board product 900.
 対基板作業ラインWL0は、入出力装置80を備えている。入出力装置80は、公知の入出力装置を用いることができる。入出力装置80は、表示部を備えており、各種データを視認可能に表示する。また、表示部は、タッチパネルにより構成されており、作業者による種々の操作を受け付ける入力装置としても機能する。 The board-to-board work line WL0 includes an input/output device 80. A known input/output device can be used as the input/output device 80. The input/output device 80 includes a display section and displays various data in a visible manner. Further, the display unit is configured with a touch panel, and also functions as an input device that receives various operations by the operator.
 1-2.部品装着機WM3の構成例
 部品装着機WM3は、基板90に複数の部品91を装着する。図2に示すように、部品装着機WM3は、基板搬送装置11、部品供給装置12、部品移載装置13、部品カメラ14、基板カメラ15および制御装置16を備えている。
1-2. Configuration Example of Component Mounting Machine WM3 The component mounting machine WM3 mounts a plurality of components 91 onto the board 90. As shown in FIG. 2, the component mounting machine WM3 includes a board transfer device 11, a component supply device 12, a component transfer device 13, a component camera 14, a board camera 15, and a control device 16.
 基板搬送装置11は、例えば、ベルトコンベアなどによって構成され、基板90を搬送方向(X軸方向)に搬送する。基板90は、回路基板であり、電子回路、電気回路、磁気回路などが形成される。基板搬送装置11は、部品装着機WM3の機内に基板90を搬入し、機内の所定位置に基板90を位置決めする。基板搬送装置11は、部品装着機WM3による複数の部品91の装着処理が終了した後に、基板90を部品装着機WM3の機外に搬出する。 The substrate transport device 11 is configured by, for example, a belt conveyor, and transports the substrate 90 in the transport direction (X-axis direction). The substrate 90 is a circuit board on which an electronic circuit, an electric circuit, a magnetic circuit, etc. are formed. The board transport device 11 carries the board 90 into the component mounting machine WM3 and positions the board 90 at a predetermined position inside the machine. The board transport device 11 carries the board 90 out of the component mounting machine WM3 after the mounting process of the plurality of components 91 by the component mounting machine WM3 is completed.
 部品供給装置12は、基板90に装着される複数の部品91を供給する。部品供給装置12は、基板90の搬送方向(X軸方向)に沿って設けられる複数のフィーダ12aを備えている。複数のフィーダ12aの各々には、リールが装備される。リールには、複数の部品91が収納されているキャリアテープが巻回されている。フィーダ12aは、キャリアテープをピッチ送りさせて、フィーダ12aの先端側に位置する供給位置において部品91を採取可能に供給する。また、部品供給装置12は、チップ部品などと比べて比較的大型の電子部品(例えば、リード部品など)を、トレイ上に配置した状態で供給することもできる。 The component supply device 12 supplies a plurality of components 91 to be mounted on the board 90. The component supply device 12 includes a plurality of feeders 12a provided along the conveyance direction (X-axis direction) of the substrate 90. Each of the plurality of feeders 12a is equipped with a reel. A carrier tape containing a plurality of parts 91 is wound around the reel. The feeder 12a feeds the carrier tape in pitches and supplies the component 91 so that it can be collected at a supply position located on the tip side of the feeder 12a. Further, the component supply device 12 can also supply electronic components (for example, lead components) that are relatively large compared to chip components and the like while being arranged on a tray.
 部品移載装置13は、ヘッド駆動装置13aおよび移動台13bを備えている。ヘッド駆動装置13aは、直動機構によって移動台13bを、X軸方向およびY軸方向(水平面においてX軸方向と直交する方向)に移動可能に構成されている。移動台13bには、クランプ部材によって装着ヘッド20が着脱可能(交換可能)に設けられている。装着ヘッド20は、少なくとも一つの保持部材30を用いて、部品供給装置12によって供給される部品91を採取し保持して、基板搬送装置11によって位置決めされた基板90に部品91を装着する。保持部材30は、例えば、吸着ノズル、チャックなどを用いることができる。 The component transfer device 13 includes a head drive device 13a and a moving table 13b. The head drive device 13a is configured to be able to move the movable table 13b in the X-axis direction and the Y-axis direction (direction orthogonal to the X-axis direction in the horizontal plane) using a linear motion mechanism. A mounting head 20 is removably (replaceably) provided on the moving table 13b using a clamp member. The mounting head 20 uses at least one holding member 30 to pick up and hold the component 91 supplied by the component supply device 12, and mounts the component 91 onto the substrate 90 positioned by the substrate transfer device 11. For example, a suction nozzle, a chuck, etc. can be used as the holding member 30.
 部品カメラ14および基板カメラ15は、公知の撮像装置を用いることができる。部品カメラ14は、光軸が鉛直方向(X軸方向およびY軸方向と直交するZ軸方向)の上向きになるように、部品装着機WM3の基台に固定されている。部品カメラ14は、保持部材30に保持されている部品91を下方から撮像することができる。基板カメラ15は、光軸が鉛直方向(Z軸方向)の下向きになるように、部品移載装置13の移動台13bに設けられている。基板カメラ15は、基板90を上方から撮像することができる。部品カメラ14および基板カメラ15は、制御装置16から送出される制御信号に基づいて撮像を行う。部品カメラ14および基板カメラ15によって撮像された撮像画像の画像データは、制御装置16に送信される。 As the component camera 14 and the board camera 15, known imaging devices can be used. The component camera 14 is fixed to the base of the component mounting machine WM3 so that its optical axis faces upward in the vertical direction (Z-axis direction perpendicular to the X-axis direction and the Y-axis direction). The component camera 14 can image the component 91 held by the holding member 30 from below. The board camera 15 is provided on the movable table 13b of the component transfer device 13 so that its optical axis points downward in the vertical direction (Z-axis direction). The board camera 15 can image the board 90 from above. The component camera 14 and the board camera 15 perform imaging based on control signals sent from the control device 16. Image data of captured images captured by the component camera 14 and the board camera 15 is transmitted to the control device 16.
 制御装置16は、公知の演算装置および記憶装置を備えており、制御回路が構成されている。制御装置16には、部品装着機WM3に設けられる各種センサから出力される情報、画像データなどが入力される。制御装置16は、制御プログラムおよび予め設定されている所定の装着条件などに基づいて、各装置に対して制御信号を送出する。 The control device 16 includes a known arithmetic unit and a storage device, and constitutes a control circuit. Information, image data, etc. output from various sensors provided in the component mounting machine WM3 are input to the control device 16. The control device 16 sends control signals to each device based on a control program and predetermined mounting conditions set in advance.
 例えば、制御装置16は、基板搬送装置11によって位置決めされた基板90を基板カメラ15に撮像させる。制御装置16は、基板カメラ15によって撮像された画像を画像処理して、基板90の位置決め状態を認識する。また、制御装置16は、部品供給装置12によって供給された部品91を保持部材30に採取させ保持させて、保持部材30に保持されている部品91を部品カメラ14に撮像させる。制御装置16は、部品カメラ14によって撮像された画像を画像処理して、部品91の保持姿勢を認識する。 For example, the control device 16 causes the substrate camera 15 to image the substrate 90 positioned by the substrate transport device 11. The control device 16 processes the image captured by the board camera 15 and recognizes the positioning state of the board 90. Further, the control device 16 causes the holding member 30 to collect and hold the component 91 supplied by the component supply device 12, and causes the component camera 14 to take an image of the component 91 held by the holding member 30. The control device 16 processes the image captured by the component camera 14 and recognizes the holding posture of the component 91.
 制御装置16は、制御プログラムなどによって予め設定される装着予定位置の上方に向かって、保持部材30を移動させる。また、制御装置16は、基板90の位置決め状態、部品91の保持姿勢などに基づいて、装着予定位置を補正して、実際に部品91を装着する装着位置を設定する。装着予定位置および装着位置は、位置(X軸座標およびY軸座標)の他に回転角度を含む。 The control device 16 moves the holding member 30 upward from a scheduled mounting position that is preset by a control program or the like. Further, the control device 16 corrects the scheduled mounting position based on the positioning state of the board 90, the holding posture of the component 91, etc., and sets the mounting position where the component 91 is actually mounted. The scheduled mounting position and the mounting position include the rotation angle in addition to the position (X-axis coordinate and Y-axis coordinate).
 制御装置16は、装着位置に合わせて、保持部材30の目標位置(X軸座標およびY軸座標)および回転角度を補正する。制御装置16は、補正された目標位置において補正された回転角度で保持部材30を下降させて、基板90に部品91を装着する。制御装置16は、上記のピックアンドプレースサイクルを繰り返すことによって、基板90に複数の部品91を装着する装着処理を実行する。 The control device 16 corrects the target position (X-axis coordinate and Y-axis coordinate) and rotation angle of the holding member 30 according to the mounting position. The control device 16 lowers the holding member 30 at the corrected rotation angle at the corrected target position, and mounts the component 91 on the board 90. The control device 16 executes a mounting process for mounting a plurality of components 91 on the board 90 by repeating the above pick-and-place cycle.
 1-3.異物検出装置70の構成例
 図2に示すように、部品91の装着位置に異物92(例えば、他の部品91、ごみなど)が付着していると、部品91の装着が不良(例えば、部品91の不装着、浮き、傾きなど)になる可能性があり、基板90に付着する異物92の有無を判断する必要がある。この場合に、基板90の少なくとも一部の同一の検査領域CA0を撮像した複数の画像データPD0を比較して、画像データPD0の特徴量(例えば、画素の輝度など)の差異に基づいて異物92の有無を判断することが想定される。
1-3. Configuration Example of Foreign Object Detection Device 70 As shown in FIG. 91 (not attached, floating, tilted, etc.), it is necessary to determine whether there is a foreign substance 92 attached to the substrate 90. In this case, a plurality of image data PD0 obtained by capturing the same inspection area CA0 of at least a part of the substrate 90 are compared, and the foreign object 90 is detected based on the difference in the feature amount (for example, the brightness of a pixel) of the image data PD0. It is assumed that the presence or absence of
 しかしながら、基準となる画像データPD0を取得してから、当該画像データPD0と比較する画像データPD0を取得するまでの間に、対基板作業機WM0による対基板作業が停止する可能性がある。対基板作業が停止した状態が継続すると、基板90の状態が変化する可能性があり、対基板作業が停止した時点の基板90の状態を取得したいという要請がある。そこで、実施形態の対基板作業ラインWL0には、対基板作業が停止した時点の画像データを取得可能な異物検出装置70が設けられている。 However, there is a possibility that the board-facing work by the board-facing work machine WM0 will be stopped between the time when the reference image data PD0 is acquired and the time when the image data PD0 to be compared with the image data PD0 is acquired. If the board-related work continues to be stopped, the state of the board 90 may change, and there is a desire to obtain the state of the board 90 at the time the board-related work stopped. Therefore, the substrate-related work line WL0 of the embodiment is provided with a foreign object detection device 70 that can acquire image data at the time when the substrate-related work is stopped.
 異物検出装置70は、制御ブロックとして捉えると、取得部71と、判断部72とを備えている。異物検出装置70は、推定部73を備えることもできる。異物検出装置70は、案内部74を備えることもできる。図3に示すように、実施形態の異物検出装置70は、取得部71と、判断部72と、推定部73と、案内部74とを備えている。 When viewed as a control block, the foreign object detection device 70 includes an acquisition section 71 and a determination section 72. The foreign object detection device 70 can also include an estimation section 73. The foreign object detection device 70 can also include a guide section 74. As shown in FIG. 3, the foreign object detection device 70 of the embodiment includes an acquisition section 71, a determination section 72, an estimation section 73, and a guide section 74.
 異物検出装置70は、種々の制御装置に設けることができる。例えば、異物検出装置70は、部品装着機WM3の制御装置16、ライン管理装置LC0、管理装置HC0などに設けることができる。異物検出装置70は、クラウド上に形成することもできる。図3に示すように、実施形態の異物検出装置70では、取得部71、判断部72、推定部73および案内部74は、部品装着機WM3の制御装置16に設けられている。 The foreign object detection device 70 can be provided in various control devices. For example, the foreign object detection device 70 can be provided in the control device 16 of the component mounting machine WM3, the line management device LC0, the management device HC0, etc. The foreign object detection device 70 can also be formed on the cloud. As shown in FIG. 3, in the foreign object detection device 70 of the embodiment, the acquisition section 71, the determination section 72, the estimation section 73, and the guide section 74 are provided in the control device 16 of the component mounting machine WM3.
 また、実施形態の異物検出装置70は、図4に示すフローチャートに従って、制御を実行する。取得部71は、ステップS11、ステップS12、ステップS16およびステップS17に示す処理を行う。判断部72は、ステップS13の一部およびステップS18に示す処理を行う。推定部73は、ステップS13の一部の処理を行う。案内部74は、ステップS14、ステップS15、ステップS19およびステップS20に示す処理を行う。 Further, the foreign object detection device 70 of the embodiment executes control according to the flowchart shown in FIG. 4. The acquisition unit 71 performs the processes shown in step S11, step S12, step S16, and step S17. The determining unit 72 performs the processing shown in part of step S13 and step S18. The estimation unit 73 performs part of the processing in step S13. The guide unit 74 performs the processes shown in step S14, step S15, step S19, and step S20.
 1-3-1.対基板作業が正常に行われている場合の制御例
 取得部71は、基板90に所定の対基板作業を行う対基板作業機WM0による対基板作業の進行に伴って基板90の少なくとも一部の検査領域CA0を撮像して、同一の検査領域CA0を撮像した複数の画像データPD0を取得する。
1-3-1. Example of control when board-related work is normally performed The inspection area CA0 is imaged to obtain a plurality of image data PD0 obtained by capturing the same inspection area CA0.
 取得部71は、検査領域CA0として基板90の全部の装着領域を撮像しても良く、基板90の一部の装着領域を撮像しても良い。取得部71は、基板90の一部の装着領域を撮像する場合、例えば、チップ部品と比べて電極の数が多く異物92の影響を受け易い部品91(例えば、BGA(Ball Grid Array)の部品91など)の装着領域を撮像することができる。また、取得部71は、過去の装着実績に基づいて、異物92によって部品91の装着不良が発生した装着領域、異物92が付着し易い装着領域などを知得して、これらの装着領域を検査領域CA0として撮像することもできる。 The acquisition unit 71 may image the entire mounting area of the board 90 as the inspection area CA0, or may image a part of the mounting area of the board 90. When capturing an image of a part of the mounting area of the board 90, the acquisition unit 71 uses, for example, a component 91 (for example, a BGA (Ball Grid Array) component) that has a larger number of electrodes and is more susceptible to the influence of foreign matter 92 than a chip component. 91 etc.) can be imaged. Furthermore, the acquisition unit 71 learns the mounting areas where the component 91 has failed to be mounted due to the foreign object 92, the mounting area where the foreign object 92 is likely to adhere, etc., based on past mounting results, and inspects these mounting areas. It is also possible to image the area CA0.
 取得部71は、基板90に部品91を装着する部品装着機WM3の作業者によって指定された領域を検査領域CA0とすることもできる。実施形態の対基板作業ラインWL0は、入出力装置80を備えている。作業者は、例えば、入出力装置80を用いて、任意の領域(基板90の全部の装着領域または基板90の一部の装着領域)を検査領域CA0として指定することができる。この場合、取得部71は、基板90における部品91の装着領域を入出力装置80の表示部に模式的に表示させて、作業者が任意の装着領域を選択可能にすることができる。 The acquisition unit 71 can also set the area specified by the operator of the component mounting machine WM3 that mounts the component 91 on the board 90 as the inspection area CA0. The board-to-board work line WL0 of the embodiment includes an input/output device 80. For example, the operator can use the input/output device 80 to specify an arbitrary area (the entire mounting area of the board 90 or a part of the mounting area of the board 90) as the inspection area CA0. In this case, the acquisition unit 71 can schematically display the mounting area of the component 91 on the board 90 on the display unit of the input/output device 80, so that the operator can select any mounting area.
 取得部71は、検査領域CA0を撮像可能な撮像装置を用いて、画像データPD0を取得することができる。撮像装置は、検査領域CA0を撮像可能であれば良く、限定されない。例えば、基板90の一部の装着領域を基板90の上方から撮像可能な基板カメラ15、基板90の全部の装着領域を基板90の上方から撮像可能な天井カメラなどは、撮像装置に含まれる。実施形態では、基板カメラ15が用いられ、取得部71は、部品装着機WM3の作業者によって指定された領域を検査領域CA0とする。なお、取得部71は、撮像装置によって設定可能な撮像条件(例えば、露光時間、絞り、照明時間など)を同一にして、同一の検査領域CA0を複数回撮像させ、複数の画像データPD0を取得する。 The acquisition unit 71 can acquire the image data PD0 using an imaging device that can image the inspection area CA0. The imaging device is not limited as long as it can image the inspection area CA0. For example, the imaging device includes a board camera 15 that can image a part of the mounting area of the board 90 from above the board 90, a ceiling camera that can image the entire mounting area of the board 90 from above the board 90, and the like. In the embodiment, the board camera 15 is used, and the acquisition unit 71 sets the area designated by the operator of the component mounting machine WM3 as the inspection area CA0. Note that the acquisition unit 71 images the same inspection area CA0 multiple times with the same imaging conditions (for example, exposure time, aperture, illumination time, etc.) that can be set by the imaging device, and acquires a plurality of image data PD0. do.
 判断部72は、基準画像データSD0および検査画像データCD0をそれぞれ画像処理して取得した検査領域CA0の特徴量の差異に基づいて、検査領域CA0に付着する異物92の有無を判断する。基準画像データSD0は、取得部71によって取得された複数の画像データPD0のうちの一の画像データPD0をいう。検査画像データCD0は、取得部71によって基準画像データSD0よりも後に取得される検査対象の画像データPD0をいう。 The determination unit 72 determines whether there is a foreign object 92 attached to the inspection area CA0 based on the difference in the feature amount of the inspection area CA0 obtained by image processing the reference image data SD0 and the inspection image data CD0. The reference image data SD0 refers to one image data PD0 among the plurality of image data PD0 acquired by the acquisition unit 71. The inspection image data CD0 refers to the image data PD0 of the inspection target acquired by the acquisition unit 71 after the reference image data SD0.
 判断部72は、検査領域CA0の特徴量の差異に基づいて、検査領域CA0に付着する異物92の有無を判断することができれば良く、種々の形態をとり得る。例えば、判断部72は、二つの画像データPD0(この場合、基準画像データSD0および検査画像データCD0)から取得した検査領域CA0の特徴量の差分が所定閾値を超えている場合に、検査領域CA0に異物92が有ると判断する。判断部72は、上記特徴量の差分が所定閾値以下の場合に、検査領域CA0に異物92が無いと判断する。 The determining unit 72 may take various forms as long as it can determine the presence or absence of foreign matter 92 adhering to the inspection area CA0 based on the difference in the feature amount of the inspection area CA0. For example, when the difference between the feature amounts of the inspection area CA0 acquired from the two image data PD0 (in this case, the reference image data SD0 and the inspection image data CD0) exceeds a predetermined threshold, the determination unit 72 determines that the inspection area CA0 It is determined that there is a foreign object 92 in the area. The determining unit 72 determines that there is no foreign object 92 in the inspection area CA0 when the difference between the feature amounts is less than or equal to a predetermined threshold.
 特徴量は、画像データPD0を画像処理して取得可能なものであれば良く、限定されない。二つの画像データPD0(基準画像データSD0および検査画像データCD0)の画素ごとの輝度、彩度、明度などは、特徴量に含まれる。また、二つの画像データPD0(基準画像データSD0および検査画像データCD0)の各々を画像処理(例えば、二値化処理など)して取得される閉領域の面積、閉領域の外周の長さなどは、特徴量に含まれる。実施形態では、特徴量は、二つの画像データPD0(基準画像データSD0および検査画像データCD0)の画素ごとの輝度である。 The feature amount is not limited as long as it can be obtained by image processing the image data PD0. The brightness, saturation, brightness, etc. of each pixel of the two image data PD0 (reference image data SD0 and inspection image data CD0) are included in the feature amount. In addition, the area of the closed region, the length of the perimeter of the closed region, etc. obtained by image processing (for example, binarization processing, etc.) each of the two image data PD0 (reference image data SD0 and inspection image data CD0), etc. is included in the feature amount. In the embodiment, the feature amount is the brightness of each pixel of the two image data PD0 (reference image data SD0 and inspection image data CD0).
 なお、上記の所定閾値は、検査領域CA0に異物92が付着していないときの特徴量(例えば、画素の輝度)よりも大きく、且つ、検査領域CA0に異物92が付着しているときの特徴量よりも小さくなるように設定される。所定閾値は、例えば、シミュレーション、実機による検証などによって、予め取得される。 Note that the above-mentioned predetermined threshold value is larger than the feature amount (for example, the brightness of a pixel) when the foreign matter 92 is not attached to the inspection area CA0, and is larger than the feature amount (for example, the brightness of a pixel) when the foreign matter 92 is attached to the inspection area CA0. is set to be smaller than the amount. The predetermined threshold value is obtained in advance by, for example, simulation or verification using an actual device.
 図5および図6は、取得部71によって取得された複数(2つ)の画像データPD0の一例を模式的に示している。図5は、基準画像データSD0を示し、図6は、検査画像データCD0を示している。なお、図5および図6では、説明の便宜上、格子状に配置されている複数の画素が合わせて図示されている。また、図5および図6に示す領域AR0は、検査領域CA0のうちの同一の領域(同一の複数の画素の集合)を示している。 5 and 6 schematically show an example of a plurality of (two) pieces of image data PD0 acquired by the acquisition unit 71. FIG. 5 shows the reference image data SD0, and FIG. 6 shows the inspection image data CD0. Note that in FIGS. 5 and 6, for convenience of explanation, a plurality of pixels arranged in a lattice pattern are shown together. Further, the area AR0 shown in FIGS. 5 and 6 indicates the same area (set of the same plurality of pixels) in the inspection area CA0.
 領域AR0に異物92が有る場合、図5に示す領域AR0に含まれる画素の輝度と、図6に示す領域AR0に含まれる画素の輝度との差分が所定閾値を超える。逆に、領域AR0に異物92が無い場合、図5に示す領域AR0に含まれる画素の輝度と、図6に示す領域AR0に含まれる画素の輝度との差分が所定閾値以下になる。 If there is a foreign object 92 in the area AR0, the difference between the brightness of the pixels included in the area AR0 shown in FIG. 5 and the brightness of the pixels included in the area AR0 shown in FIG. 6 exceeds a predetermined threshold. Conversely, when there is no foreign object 92 in the area AR0, the difference between the brightness of the pixels included in the area AR0 shown in FIG. 5 and the brightness of the pixels included in the area AR0 shown in FIG. 6 becomes equal to or less than the predetermined threshold value.
 よって、判断部72は、図5に示す領域AR0に含まれる画素の輝度と、図6に示す領域AR0に含まれる画素の輝度との差分が所定閾値を超えているときに、検査領域CA0に異物92が有ると判断する。判断部72は、図5に示す領域AR0に含まれる画素の輝度と、図6に示す領域AR0に含まれる画素の輝度との差分が所定閾値以下のときに、検査領域CA0に異物92が無いと判断する。なお、輝度の比較は、対応する画素ごとに行われる。 Therefore, when the difference between the brightness of the pixels included in the area AR0 shown in FIG. 5 and the brightness of the pixels included in the area AR0 shown in FIG. It is determined that a foreign object 92 is present. The determination unit 72 determines that there is no foreign object 92 in the inspection area CA0 when the difference between the brightness of the pixels included in the area AR0 shown in FIG. 5 and the brightness of the pixels included in the area AR0 shown in FIG. I judge that. Note that the brightness comparison is performed for each corresponding pixel.
 取得部71は、所定のタイミングにおいて基準画像データSD0および検査画像データCD0を取得することができる。図1に示すように、基板90は、対基板作業機WM0である複数(同図では、3つ)の部品装着機WM3に順に搬送されて、複数の部品91が装着される。説明の便宜上、複数(3つ)の部品装着機WM3のうちの最も上流側の部品装着機WM3を部品装着機M1とする。また、部品装着機M1よりも下流側の次の部品装着機WM3を部品装着機M2とする。さらに、部品装着機M2よりも下流側の次の部品装着機WM3を部品装着機M3とする。 The acquisition unit 71 can acquire the reference image data SD0 and the inspection image data CD0 at a predetermined timing. As shown in FIG. 1, the board 90 is sequentially conveyed to a plurality of (three in the figure) component mounting machines WM3, which are the board-to-board working machine WM0, and a plurality of components 91 are mounted thereon. For convenience of explanation, the most upstream component mounting machine WM3 among the plurality of (three) component mounting machines WM3 will be referred to as the component mounting machine M1. Further, the next component mounting machine WM3 on the downstream side of the component mounting machine M1 is defined as a component mounting machine M2. Further, the next component mounting machine WM3 on the downstream side of the component mounting machine M2 is defined as the component mounting machine M3.
 上記の対基板作業ラインWL0において、例えば、取得部71は、複数(3つ)の部品装着機WM3のうちの最も上流側の部品装着機WM3(部品装着機M1)において基準画像データSD0を取得する。より詳細には、取得部71は、部品装着機M1において部品91の装着処理を開始する前に検査領域CA0を撮像して基準画像データSD0を取得する。 In the above-mentioned board work line WL0, for example, the acquisition unit 71 acquires the reference image data SD0 in the most upstream component mounting machine WM3 (component mounting machine M1) among the plurality of (three) component mounting machines WM3. do. More specifically, the acquisition unit 71 images the inspection area CA0 and acquires the reference image data SD0 before starting the mounting process of the component 91 in the component mounting machine M1.
 また、取得部71は、検査領域CA0に部品91を装着する部品装着機WM3(例えば、部品装着機M3)において検査画像データCD0を取得する。より詳細には、取得部71は、部品装着機M3において検査領域CA0に装着予定の部品91を装着する前に検査領域CA0を撮像して検査画像データCD0を取得する。この場合、判断部72は、基板90が複数(3つ)の部品装着機WM3に亘って搬送される間に検査領域CA0に付着する異物92の有無を判断することができる。本明細書では、上記の形態を第一形態という。 Furthermore, the acquisition unit 71 acquires the inspection image data CD0 in the component mounting machine WM3 (for example, the component mounting machine M3) that mounts the component 91 in the inspection area CA0. More specifically, the acquisition unit 71 images the inspection area CA0 and acquires the inspection image data CD0 before mounting the component 91 to be mounted on the inspection area CA0 in the component mounting machine M3. In this case, the determining unit 72 can determine the presence or absence of foreign matter 92 that adheres to the inspection area CA0 while the board 90 is being transported across the plurality of (three) component mounting machines WM3. In this specification, the above form is referred to as the first form.
 取得部71は、複数(3つ)の部品装着機WM3の各々において基準画像データSD0および検査画像データCD0を取得することもできる。取得部71は、検査領域CA0に部品91を装着する部品装着機WM3(例えば、部品装着機M3)よりも上流側に設けられる少なくとも一つの部品装着機WM3(部品装着機M1および部品装着機M2)の各々において、部品91の装着処理を開始する前に検査領域CA0を撮像して基準画像データSD0を取得する。取得部71は、上記の部品装着機WM3(部品装着機M1および部品装着機M2)の各々において、部品91の装着処理が終了した後に検査領域CA0を撮像して検査画像データCD0を取得する。 The acquisition unit 71 can also acquire the reference image data SD0 and the inspection image data CD0 in each of the plurality of (three) component mounting machines WM3. The acquisition unit 71 includes at least one component mounting machine WM3 (component mounting machine M1 and component mounting machine M2) provided upstream of a component mounting machine WM3 (for example, component mounting machine M3) that mounts the component 91 in the inspection area CA0. ), the inspection area CA0 is imaged to obtain reference image data SD0 before starting the mounting process of the component 91. The acquisition unit 71 images the inspection area CA0 and acquires inspection image data CD0 after the mounting process of the component 91 is completed in each of the component mounting machines WM3 (component mounting machines M1 and M2) described above.
 また、取得部71は、検査領域CA0に部品91を装着する部品装着機WM3(例えば、部品装着機M3)において、部品91の装着処理を開始する前に検査領域CA0を撮像して基準画像データSD0を取得する。取得部71は、上記の部品装着機WM3(部品装着機M3)において、検査領域CA0に装着予定の部品91を装着する前に検査領域CA0を撮像して検査画像データCD0を取得する。これらの場合、判断部72は、複数(3つ)の部品装着機WM3の各機内において検査領域CA0に付着する異物92の有無を判断することができる。本明細書では、上記の形態を第二形態という。 In addition, in the component mounting machine WM3 (for example, component mounting machine M3) that mounts the component 91 in the inspection area CA0, the acquisition unit 71 images the inspection area CA0 before starting the mounting process of the component 91, and generates reference image data. Get SD0. In the component mounting machine WM3 (component mounting machine M3) described above, the acquisition unit 71 images the inspection area CA0 and acquires inspection image data CD0 before mounting the component 91 to be mounted on the inspection area CA0. In these cases, the determining unit 72 can determine the presence or absence of foreign matter 92 adhering to the inspection area CA0 in each of the plurality of (three) component mounting machines WM3. In this specification, the above form is referred to as the second form.
 取得部71は、隣接する部品装着機WM3の間において基準画像データSD0および検査画像データCD0を取得することもできる。取得部71は、複数(3つ)の部品装着機WM3のうちの一の部品装着機WM3において基準画像データSD0を取得する。より詳細には、取得部71は、当該部品装着機WM3における部品91の装着処理が終了した後であって基板90が搬出される前に検査領域CA0を撮像して基準画像データSD0を取得する。 The acquisition unit 71 can also acquire the reference image data SD0 and the inspection image data CD0 between adjacent component mounting machines WM3. The acquisition unit 71 acquires the reference image data SD0 in one of the plurality of (three) component mounting machines WM3. More specifically, the acquisition unit 71 images the inspection area CA0 and acquires the reference image data SD0 after the mounting process of the component 91 in the component mounting machine WM3 is completed and before the board 90 is carried out. .
 また、取得部71は、当該部品装着機WM3よりも下流側の次の部品装着機WM3において検査画像データCD0を取得する。より詳細には、取得部71は、当該部品装着機WM3に基板90が搬入された後であって当該部品装着機WM3における部品91の装着処理を開始する前に検査領域CA0を撮像して検査画像データCD0を取得する。これらの場合、判断部72は、隣接する部品装着機WM3の間において基板90が搬送されるときに検査領域CA0に付着する異物92の有無を判断することができる。本明細書では、上記の形態を第三形態という。 Furthermore, the acquisition unit 71 acquires the inspection image data CD0 in the next component mounting machine WM3 on the downstream side of the component mounting machine WM3. More specifically, the acquisition unit 71 images the inspection area CA0 and performs the inspection after the board 90 is carried into the component mounting machine WM3 and before starting the mounting process of the component 91 in the component mounting machine WM3. Obtain image data CD0. In these cases, the determining unit 72 can determine the presence or absence of foreign matter 92 that adheres to the inspection area CA0 when the board 90 is transported between adjacent component mounting machines WM3. In this specification, the above form is referred to as the third form.
 1-3-2.対基板作業が停止した場合の制御例
 例えば、対基板作業機WM0は、撮像装置(部品装着機WM3では、例えば、部品カメラ14、基板カメラ15など)によって取得された画像データPD0を画像処理した結果が不良の場合に、対基板作業を停止する場合がある。また、対基板作業機WM0は、対基板作業を継続できない状況(部品装着機WM3では、例えば、装着する部品91の不足など)が発生した場合に、対基板作業を停止する場合がある。さらに、作業者が停止ボタンを操作し、対基板作業機WM0による対基板作業を停止させる場合がある。
1-3-2. Control example when board work is stopped For example, board work machine WM0 performs image processing on image data PD0 acquired by an imaging device (for example, component camera 14, board camera 15, etc. in component mounting machine WM3). If the results are bad, the board work may be stopped. Further, the board-related work machine WM0 may stop the board-related work when a situation occurs in which the board-related work cannot be continued (for example, in the component mounting machine WM3, there is a shortage of components 91 to be mounted). Further, the operator may operate the stop button to stop the board-facing work by the board-facing work machine WM0.
 取得部71は、基準画像データSD0を取得してから検査画像データCD0を取得するまでの間に対基板作業が停止した場合に、検査領域CA0を撮像して第一画像データPD1を取得する(図4に示すステップS11においてYesの場合およびステップS12)。第一画像データPD1は、対基板作業が停止した時点の画像データPD0をいう。取得部71は、対基板作業が正常に行われている場合と同様にして、対基板作業が停止したタイミングにおいて、検査領域CA0を撮像して第一画像データPD1を取得することができる。これにより、異物検出装置70は、対基板作業が停止した時点の画像データPD0を取得することができ、対基板作業が停止した時点の基板90の状態を把握可能になる。 The acquisition unit 71 images the inspection area CA0 and acquires the first image data PD1 when the board work is stopped between the acquisition of the reference image data SD0 and the acquisition of the inspection image data CD0 ( In the case of Yes in step S11 and step S12 shown in FIG. 4). The first image data PD1 refers to the image data PD0 at the time when the work for the board stopped. The acquisition unit 71 can image the inspection area CA0 and acquire the first image data PD1 at the timing when the board-related work is stopped, in the same manner as when the board-related work is being performed normally. Thereby, the foreign object detection device 70 can acquire the image data PD0 at the time when the work on the board stopped, and can grasp the state of the board 90 at the time when the work on the board stopped.
 また、判断部72は、基準画像データSD0および第一画像データPD1をそれぞれ画像処理して取得した検査領域CA0の特徴量の差異に基づいて、異物92の有無を判断することができる(図4に示すステップS13)。判断部72は、対基板作業が正常に行われている場合と同様にして、異物92の有無を判断することができる。 Further, the determining unit 72 can determine the presence or absence of the foreign object 92 based on the difference in the feature amount of the inspection area CA0 obtained by image processing the reference image data SD0 and the first image data PD1 (FIG. Step S13) shown in FIG. The determining unit 72 can determine the presence or absence of the foreign object 92 in the same manner as when the board work is normally performed.
 具体的には、判断部72は、二つの画像データPD0(この場合、基準画像データSD0および第一画像データPD1)から取得した検査領域CA0の特徴量の差分が所定閾値を超えている場合に、検査領域CA0に異物92が有ると判断する。判断部72は、上記特徴量の差分が所定閾値以下の場合に、検査領域CA0に異物92が無いと判断する。なお、既述されているように、特徴量は、限定されない。実施形態の特徴量は、二つの画像データPD0(基準画像データSD0および第一画像データPD1)の画素ごとの輝度である。 Specifically, the determination unit 72 determines if the difference in the feature amount of the inspection area CA0 obtained from the two image data PD0 (in this case, the reference image data SD0 and the first image data PD1) exceeds a predetermined threshold value. , it is determined that there is a foreign object 92 in the inspection area CA0. The determining unit 72 determines that there is no foreign object 92 in the inspection area CA0 when the difference between the feature amounts is less than or equal to a predetermined threshold. Note that, as described above, the feature amount is not limited. The feature amount in the embodiment is the brightness of each pixel of the two image data PD0 (standard image data SD0 and first image data PD1).
 図7は、対基板作業が停止するまでの基板90の状態の一例を示している。同図では、第一形態を例に、部品装着機M2において対基板作業が停止するまでの基板90の状態が画像データPD0を用いて模式的に示されている。具体的には、複数(3つ)の部品装着機WM3のうちの最も上流側の部品装着機M1において、取得部71は、基準画像データSD0を取得する。 FIG. 7 shows an example of the state of the board 90 until the board work is stopped. In the figure, taking the first embodiment as an example, the state of the board 90 until the board work is stopped in the component mounting machine M2 is schematically shown using image data PD0. Specifically, in the most upstream component mounting machine M1 of the plurality of (three) component mounting machines WM3, the acquisition unit 71 acquires the reference image data SD0.
 そして、基板90が部品装着機M1よりも下流側の次の部品装着機M2に搬送され、部品装着機M2において対基板作業が停止したと仮定する。取得部71は、対基板作業が停止した部品装着機M2において、対基板作業が停止したタイミングにおいて、検査領域CA0を撮像して第一画像データPD1を取得する。同図に示す基準画像データSD0および第一画像データPD1は、検査領域CA0の特徴量の差異が少なく(特徴量の差分が所定閾値以下であり)、判断部72は、検査領域CA0に異物92が無いと判断する。なお、同図では、部品装着機M2よりも下流側の次の部品装着機M3には、対象の基板90がまだ搬送されておらず、画像データPD0は、空白で示されている。 Then, it is assumed that the board 90 is transferred to the next component mounting machine M2 on the downstream side of the component mounting machine M1, and the board work in the component mounting machine M2 is stopped. The acquisition unit 71 images the inspection area CA0 and acquires first image data PD1 at the timing when the board-related work has stopped in the component mounting machine M2 where the board-related work has stopped. The reference image data SD0 and the first image data PD1 shown in the figure have a small difference in feature amount in the inspection area CA0 (the difference in the feature amount is less than a predetermined threshold value), and the determination unit 72 determines that there is no foreign object 92 in the inspection area CA0. It is determined that there is no In the same figure, the target board 90 has not yet been transferred to the next component mounting machine M3 on the downstream side of the component mounting machine M2, and the image data PD0 is shown blank.
 このように、判断部72は、取得部71によって第一画像データPD1が取得された場合に、無条件に異物92の有無を判断することができる。これにより、判断部72は、取得部71によって基準画像データSD0が取得されてから対基板作業が停止するまでに、検査領域CA0に付着する異物92の有無を判断することができる。また、以下に示すように、判断部72は、所定の条件が成立する場合に、異物92の有無を判断することもできる。例えば、画像データPD0を画像処理して取得した検査領域CA0の特徴量が、基板90の検査領域CA0に塗布されている基板90と部品91を接合する接合部材93の経時変化によって変動する可能性がある。 In this way, the determining unit 72 can unconditionally determine the presence or absence of the foreign object 92 when the first image data PD1 is acquired by the acquiring unit 71. Thereby, the determining unit 72 can determine the presence or absence of foreign matter 92 adhering to the inspection area CA0 from the time the reference image data SD0 is acquired by the acquisition unit 71 until the board work is stopped. Further, as described below, the determining unit 72 can also determine the presence or absence of the foreign object 92 when a predetermined condition is satisfied. For example, the feature amount of the inspection area CA0 obtained by image processing the image data PD0 may change due to changes over time in the bonding member 93 for bonding the substrate 90 and the component 91, which is applied to the inspection area CA0 of the substrate 90. There is.
 接合部材93は、基板90と部品91を接合する部材であれば良く、限定されない。例えば、はんだ、接着剤などは、接合部材93に含まれる。実施形態では、接合部材93は、はんだである。はんだは、含有するフラックスが乾燥するにつれて、銀色から灰色に変色する。そのため、はんだの経時変化によって検査領域CA0の特徴量が変動する可能性があり、判断部72は、はんだを異物92と誤判断する可能性がある。 The joining member 93 is not limited as long as it is a member that joins the substrate 90 and the component 91. For example, solder, adhesive, etc. are included in the joining member 93. In the embodiment, bonding member 93 is solder. Solder changes color from silver to gray as the flux it contains dries. Therefore, the characteristic amount of the inspection area CA0 may change due to changes in the solder over time, and the determining unit 72 may erroneously determine that the solder is the foreign object 92.
 ここで、対基板作業が停止してから再開されるまでの時間を停止時間Q0とする。また、検査領域CA0に塗布されている基板90と部品91を接合する接合部材93の経時変化によって検査領域CA0の特徴量が変動しても接合部材93が異物92と誤判断されない停止時間Q0を許容時間T0とする。停止時間Q0が許容時間T0よりも短くなるほど、部品装着機M3において異物92の有無を判断する際に、接合部材93の経時変化の影響を受け難くなり、対基板作業が停止した部品装着機M2において異物92の有無を判断しておく必要度が低下する。 Here, the time from when the board work is stopped until it is restarted is defined as the stop time Q0. In addition, a stop time Q0 is determined in which the bonding member 93 is not mistakenly determined to be a foreign object 92 even if the feature amount of the inspection area CA0 changes due to changes over time in the bonding member 93 that joins the substrate 90 and the component 91 applied to the inspection area CA0. Let the allowable time be T0. The shorter the stop time Q0 is than the allowable time T0, the less the component mounting machine M3 will be affected by changes over time in the bonding member 93 when determining the presence or absence of a foreign object 92, and the component mounting machine M2 will stop working on the board. The necessity of determining the presence or absence of foreign matter 92 is reduced.
 逆に、停止時間Q0が許容時間T0よりも長くなると、部品装着機M3において異物92の有無を判断する際に、接合部材93の経時変化の影響を受け易くなり、判断部72は、接合部材93を異物92と誤判断し易くなる。そのため、対基板作業が停止した部品装着機M2において異物92の有無を判断しておく必要度が高まる。そこで、推定部73は、対基板作業が停止してから再開されるまでの停止時間Q0を推定する(図4に示すステップS13)。 On the other hand, if the stop time Q0 is longer than the allowable time T0, when determining the presence or absence of the foreign object 92 in the component mounting machine M3, it becomes more susceptible to changes over time in the joining member 93, and the determining unit 72 93 is likely to be mistakenly determined to be a foreign object 92. Therefore, it becomes increasingly necessary to determine the presence or absence of the foreign object 92 in the component mounting machine M2 where the work on the board has stopped. Therefore, the estimation unit 73 estimates the stop time Q0 from when the board work is stopped until it is restarted (step S13 shown in FIG. 4).
 推定部73は、停止時間Q0を推定することができれば良く、種々の形態をとり得る。例えば、推定部73は、対基板作業が停止した要因(例えば、画像データPD0を画像処理した結果が不良など)に基づいて、停止時間Q0を推定することができる。この場合、推定部73は、予め基板製品900の生産が行われる度に、対基板作業が停止した要因と、対基板作業が停止してから再開されるまでの停止時間Q0とを対応付けて記憶する。停止時間Q0は、例えば、平均値、中央値などによって表すことができる。 The estimation unit 73 only needs to be able to estimate the stop time Q0, and can take various forms. For example, the estimating unit 73 can estimate the stop time Q0 based on the reason why the board work was stopped (for example, the result of image processing of the image data PD0 is defective, etc.). In this case, the estimation unit 73 associates the cause of the stoppage of the board-related work with the stop time Q0 from when the board-related work is stopped until it is restarted each time the board product 900 is produced in advance. Remember. The stop time Q0 can be expressed by, for example, an average value, a median value, etc.
 推定部73は、今回の基板製品900の生産において対基板作業が停止した場合に、当該対基板作業が停止した要因に対応付けて記憶されている停止時間Q0(例えば、平均値または中央値)を判断部72に出力する。そして、判断部72は、推定部73によって許容時間T0よりも長い停止時間Q0が推定された場合に、異物92の有無を判断することができる(図4に示すステップS13)。 When the board work is stopped in the current production of the board product 900, the estimation unit 73 calculates the stop time Q0 (for example, average value or median value) stored in association with the cause of the stop of the board work. is output to the determination unit 72. The determining unit 72 can determine the presence or absence of the foreign object 92 when the estimating unit 73 estimates a stop time Q0 that is longer than the allowable time T0 (step S13 shown in FIG. 4).
 また、例えば、対基板作業が停止した際に作業者が対処する場合、推定部73によって推定された停止時間Q0よりも実際の停止時間Q0が長くなる可能性がある。よって、判断部72は、推定部73によって許容時間T0内の停止時間Q0が推定された後に許容時間T0よりも長い停止時間Q0が見込まれた場合に、異物92の有無を判断することもできる。 Furthermore, for example, when a worker takes action when board work is stopped, the actual stop time Q0 may be longer than the stop time Q0 estimated by the estimation unit 73. Therefore, the determining unit 72 can also determine the presence or absence of the foreign object 92 when a stopping time Q0 longer than the allowable time T0 is expected after the estimating unit 73 estimates the stopping time Q0 within the allowable time T0. .
 なお、許容時間T0は、例えば、シミュレーション、実機による検証などによって、予め取得することができる。また、接合部材93の種類に応じて許容時間T0が異なる場合があり、判断部72は、接合部材93の種類に応じた許容時間T0を用いることもできる。例えば、判断部72は、はんだの種類に応じた許容時間T0を用いることができる。また、判断部72は、接着剤の種類に応じた許容時間T0を用いることができる。 Note that the allowable time T0 can be obtained in advance by, for example, simulation or verification using an actual machine. Further, the allowable time T0 may vary depending on the type of the joining member 93, and the determining unit 72 can also use the allowable time T0 depending on the type of the joining member 93. For example, the determining unit 72 can use the allowable time T0 depending on the type of solder. Further, the determination unit 72 can use the allowable time T0 depending on the type of adhesive.
 さらに、部品装着機WM3の機内の温度が高くなるほど、はんだは、含有するフラックスの乾燥が早くなり易い。また、部品装着機WM3の機内の湿度が低くなるほど、はんだは、含有するフラックスの乾燥が早くなり易い。よって、判断部72は、基板90に部品91を装着する部品装着機WM3の機内の温度および湿度のうちの少なくとも一つに応じた許容時間T0を用いることもできる。 Furthermore, the higher the temperature inside the component mounting machine WM3, the faster the flux contained in the solder dries. Furthermore, the lower the humidity inside the component mounting machine WM3, the faster the flux contained in the solder dries. Therefore, the determining unit 72 can also use the allowable time T0 depending on at least one of the temperature and humidity inside the component mounting machine WM3 that mounts the component 91 on the board 90.
 案内部74は、判断部72によって検査領域CA0に異物92が有ると判断された場合に、作業者に異物92の存在を案内する(図4に示すステップS14においてYesの場合およびステップS15)。案内部74は、作業者に異物92の存在を案内することができれば良く、種々の形態をとり得る。例えば、実施形態の対基板作業ラインWL0は、入出力装置80を備えている。案内部74は、入出力装置80を用いて、作業者に異物92の存在を案内(例えば、表示、音声案内など)することができる。 The guide unit 74 guides the operator to the presence of the foreign object 92 when the determining unit 72 determines that the foreign object 92 is present in the inspection area CA0 (if Yes in step S14 and step S15 shown in FIG. 4). The guide section 74 may take various forms as long as it can guide the operator to the presence of the foreign object 92. For example, the board-related work line WL0 of the embodiment includes an input/output device 80. The guide unit 74 can use the input/output device 80 to guide the operator to the presence of the foreign object 92 (for example, by display, voice guidance, etc.).
 具体的には、案内部74は、異物92が付着している基板90が存在する旨、基板90において異物92が付着している位置、当該基板90が存在する対基板作業機WM0などを案内することができる。これにより、作業者は、異物92が付着している基板90を確認することができ、対処(例えば、基板90の搬出など)することができる。なお、案内部74は、作業者が所有する携帯端末機を用いて、作業者に異物92の存在を同様に案内(例えば、表示、音声案内、振動など)することもできる。 Specifically, the guide unit 74 guides the presence of the substrate 90 to which the foreign object 92 is attached, the position on the substrate 90 where the foreign object 92 is attached, the substrate-to-substrate working machine WM0 where the substrate 90 is present, etc. can do. Thereby, the operator can check the substrate 90 to which the foreign matter 92 is attached, and can take countermeasures (for example, carry out the substrate 90). Note that the guide unit 74 can also similarly guide the worker about the presence of the foreign object 92 (for example, by display, voice guidance, vibration, etc.) using a mobile terminal owned by the worker.
 取得部71は、対基板作業が再開された場合に、検査領域CA0を撮像して第二画像データPD2を取得し、第二画像データPD2によって基準画像データSD0を更新する(図4に示すステップS16においてYesの場合およびステップS17)。第二画像データPD2は、対基板作業が再開された時点の画像データPD0をいう。取得部71は、対基板作業が正常に行われている場合と同様にして、対基板作業が再開されたタイミングにおいて、検査領域CA0を撮像して第二画像データPD2を取得することができる。これにより、異物検出装置70は、対基板作業が再開された時点の画像データPD0を取得することができる。 When the board work is restarted, the acquisition unit 71 images the inspection area CA0 to acquire the second image data PD2, and updates the reference image data SD0 with the second image data PD2 (steps shown in FIG. 4). If Yes in S16 and step S17). The second image data PD2 refers to the image data PD0 at the time when the board-related work is restarted. The acquisition unit 71 can image the inspection area CA0 and acquire the second image data PD2 at the timing when the board-related work is restarted, in the same way as when the board-related work is being performed normally. Thereby, the foreign object detection device 70 can acquire the image data PD0 at the time when the work for the substrate is restarted.
 既述されているように、対基板作業が停止してから再開されるまでの停止時間Q0が許容時間T0よりも長くなると、部品装着機M3において異物92の有無を判断する際に、接合部材93の経時変化の影響を受け易くなり、判断部72は、接合部材93を異物92と誤判断し易くなる。そこで、取得部71は、許容時間T0よりも停止時間Q0が長い場合に、第二画像データPD2によって基準画像データSD0を更新することができる。 As described above, if the stop time Q0 from when the board work is stopped until it is restarted is longer than the allowable time T0, when determining the presence or absence of foreign matter 92 in the component mounting machine M3, the bonding member 93 becomes susceptible to changes over time, and the determining unit 72 tends to erroneously determine that the joining member 93 is a foreign object 92. Therefore, the acquisition unit 71 can update the reference image data SD0 with the second image data PD2 when the stop time Q0 is longer than the allowable time T0.
 また、対基板作業が停止してから再開されるまでの停止時間Q0が許容時間T0以内であっても、接合部材93は、経時変化している。そのため、取得部71は、停止時間Q0の如何に関わらず、対基板作業が再開された場合に、検査領域CA0を撮像して第二画像データPD2を取得し、第二画像データPD2によって基準画像データSD0を更新することもできる。 Furthermore, even if the stop time Q0 from when the board work is stopped until it is restarted is within the allowable time T0, the bonding member 93 has changed over time. Therefore, regardless of the stop time Q0, when the board work is restarted, the acquisition unit 71 images the inspection area CA0 to acquire the second image data PD2, and uses the second image data PD2 to image the reference image. Data SD0 can also be updated.
 判断部72は、更新された基準画像データSD0および検査画像データCD0をそれぞれ画像処理して取得した検査領域CA0の特徴量の差異に基づいて、異物92の有無を判断する(図4に示すステップS18)。判断部72は、対基板作業が正常に行われている場合と同様にして、異物92の有無を判断することができる。 The determining unit 72 determines the presence or absence of a foreign object 92 based on the difference in the feature amount of the inspection area CA0 obtained by image processing the updated reference image data SD0 and inspection image data CD0, respectively (steps shown in FIG. 4). S18). The determining unit 72 can determine the presence or absence of the foreign object 92 in the same manner as when the board work is normally performed.
 具体的には、判断部72は、二つの画像データPD0(この場合、更新された基準画像データSD0および検査画像データCD0)から取得した検査領域CA0の特徴量の差分が所定閾値を超えている場合に、検査領域CA0に異物92が有ると判断する。判断部72は、上記特徴量の差分が所定閾値以下の場合に、検査領域CA0に異物92が無いと判断する。なお、既述されているように、特徴量は、限定されない。実施形態の特徴量は、二つの画像データPD0(更新された基準画像データSD0および検査画像データCD0)の画素ごとの輝度である。 Specifically, the determination unit 72 determines that the difference between the feature amounts of the inspection area CA0 obtained from the two image data PD0 (in this case, the updated reference image data SD0 and the inspection image data CD0) exceeds a predetermined threshold. In this case, it is determined that there is a foreign object 92 in the inspection area CA0. The determining unit 72 determines that there is no foreign object 92 in the inspection area CA0 when the difference between the feature amounts is less than or equal to a predetermined threshold. Note that, as described above, the feature amount is not limited. The feature amount in the embodiment is the brightness of each pixel of the two image data PD0 (updated reference image data SD0 and inspection image data CD0).
 図8は、対基板作業が再開された後の基板90の状態の一例を示している。同図では、第一形態を例に、部品装着機M2において対基板作業が再開された後の基板90の状態が画像データPD0を用いて模式的に示されている。具体的には、取得部71は、対基板作業が再開された部品装着機M2において、対基板作業が再開されたタイミングにおいて、検査領域CA0を撮像して第二画像データPD2を取得し、第二画像データPD2によって基準画像データSD0を更新する。 FIG. 8 shows an example of the state of the board 90 after the board-related work is resumed. In the figure, using the first embodiment as an example, the state of the board 90 after the board work is restarted in the component mounting machine M2 is schematically shown using image data PD0. Specifically, in the component mounting machine M2 where the board-related work has been restarted, the acquisition unit 71 images the inspection area CA0 to obtain the second image data PD2 at the timing when the board-related work has been restarted. The reference image data SD0 is updated with the second image data PD2.
 同図では、接合部材93が図示の便宜上、黒色で示されており、対基板作業が停止している間に、接合部材93が経時変化したことを模式的に示している。そして、基板90が部品装着機M2よりも下流側の次の部品装着機M3に搬送され、部品装着機M3において、取得部71は、検査画像データCD0を取得する。仮に、第二画像データPD2によって基準画像データSD0が更新されない場合、判断部72は、図7に示す基準画像データSD0および図8に示す検査画像データCD0をそれぞれ画像処理して取得した検査領域CA0の特徴量の差異に基づいて、異物92の有無を判断することになる。 In the figure, the bonding member 93 is shown in black for convenience of illustration, and it schematically shows that the bonding member 93 has changed over time while the work for the substrate is stopped. Then, the board 90 is transported to the next component mounting machine M3 on the downstream side of the component mounting machine M2, and in the component mounting machine M3, the acquisition unit 71 acquires the inspection image data CD0. If the reference image data SD0 is not updated by the second image data PD2, the determination unit 72 updates the inspection area CA0 obtained by image processing the reference image data SD0 shown in FIG. 7 and the inspection image data CD0 shown in FIG. 8, respectively. The presence or absence of the foreign object 92 is determined based on the difference in the feature amounts.
 この場合、図7に示す基準画像データSD0を画像処理して取得した検査領域CA0の特徴量(接合部材93が白色)、および、図8に示す検査画像データCD0を画像処理して取得した検査領域CA0の特徴量(接合部材93が黒色)は、差異が大きく、特徴量の差分が所定閾値を超えている。よって、判断部72は、検査領域CA0に異物92が有ると誤判断してしまう。これに対して、第二画像データPD2によって基準画像データSD0が更新される場合、判断部72は、図8に示す基準画像データSD0および検査画像データCD0をそれぞれ画像処理して取得した検査領域CA0の特徴量の差異に基づいて、異物92の有無を判断する。 In this case, the feature amount of the inspection area CA0 (the joining member 93 is white) obtained by image processing the reference image data SD0 shown in FIG. 7, and the inspection obtained by image processing the inspection image data CD0 shown in FIG. The feature amount of area CA0 (joining member 93 is black) has a large difference, and the difference in feature amount exceeds a predetermined threshold value. Therefore, the determining unit 72 incorrectly determines that the foreign object 92 is present in the inspection area CA0. On the other hand, when the reference image data SD0 is updated by the second image data PD2, the determination unit 72 updates the inspection area CA0 obtained by image processing the reference image data SD0 and the inspection image data CD0 shown in FIG. The presence or absence of the foreign object 92 is determined based on the difference in the feature amounts.
 この場合、図8に示す基準画像データSD0を画像処理して取得した検査領域CA0の特徴量(接合部材93が黒色)、および、図8に示す検査画像データCD0を画像処理して取得した検査領域CA0の特徴量(接合部材93が黒色)は、差異が少なく、特徴量の差分が所定閾値以下である。よって、判断部72は、検査領域CA0に異物92が無いと判断する。つまり、接合部材93の経時変化による異物92の誤判断が抑制される。なお、図8は、対基板作業が再開された後の基板90の状態を示しており、部品装着機M2よりも上流側の部品装着機M1の画像データPD0は、空白で示されている。 In this case, the feature amount of the inspection area CA0 (the joining member 93 is black) obtained by image processing the reference image data SD0 shown in FIG. 8, and the inspection obtained by image processing the inspection image data CD0 shown in FIG. There is little difference in the feature amounts of area CA0 (the joining member 93 is black), and the difference in feature amounts is less than or equal to a predetermined threshold value. Therefore, the determining unit 72 determines that there is no foreign object 92 in the inspection area CA0. In other words, erroneous determination of foreign matter 92 due to changes in bonding member 93 over time is suppressed. Note that FIG. 8 shows the state of the board 90 after the board work is resumed, and the image data PD0 of the component mounting machine M1 on the upstream side of the component mounting machine M2 is shown as blank.
 案内部74は、判断部72によって検査領域CA0に異物92が有ると判断された場合に、作業者に異物92の存在を案内する(図4に示すステップS19においてYesの場合およびステップS20)。案内部74は、対基板作業が停止した直後に異物92の存在を案内する場合と同様にして、作業者に異物92の存在を案内することができる。そして、異物検出装置70による制御は、一旦、終了する。 The guide unit 74 guides the operator to the presence of the foreign object 92 when the determining unit 72 determines that the foreign object 92 is present in the inspection area CA0 (in the case of Yes in step S19 and step S20 shown in FIG. 4). The guide section 74 can inform the operator of the presence of the foreign object 92 in the same manner as when informing the operator of the presence of the foreign object 92 immediately after the board work is stopped. The control by the foreign object detection device 70 then ends once.
 なお、図4に示すステップS11およびステップS19においてNoの場合、異物検出装置70による制御は、一旦、終了する。また、ステップS14においてNoの場合、異物検出装置70による制御は、ステップS16に示す制御に進む。さらに、ステップS16においてNoの場合、異物検出装置70による制御は、ステップS16に示す制御に戻り、対基板作業が再開されるまで待機する。 Note that in the case of No in step S11 and step S19 shown in FIG. 4, the control by the foreign object detection device 70 ends once. Moreover, in the case of No in step S14, the control by the foreign object detection device 70 proceeds to the control shown in step S16. Further, in the case of No in step S16, the control by the foreign object detection device 70 returns to the control shown in step S16, and waits until the work for the substrate is restarted.
 また、本明細書において記載されている事項は、適宜、組み合わせることができ、取捨選択することができる。例えば、本明細書では、第一形態を例に説明されているが、本明細書において記載されている事項は、第二形態または第三形態に適用することもできる。また、本明細書において記載されている事項は、第二形態および第三形態を組み合わせた形態に適用することもできる。なお、第三形態では、隣接する部品装着機WM3の間を基板90が搬送されるときに対基板作業が停止するので、隣接する部品装着機WM3の間に、第一画像データPD1および第二画像データPD2を取得可能な撮像装置が設けられている。また、第一形態、第二形態および第三形態は、対基板作業が停止することなく正常に行われる場合に、取得部71によって基準画像データSD0が取得されてから検査画像データCD0が取得されるまでの所要時間が、既述されている許容時間T0よりも短くなる形態を選択することができる。 Additionally, the items described in this specification can be combined and selected as appropriate. For example, in this specification, the first form is explained as an example, but the matters described in this specification can also be applied to the second form or the third form. Moreover, the matters described in this specification can also be applied to a form that combines the second form and the third form. In addition, in the third embodiment, since the board work is stopped when the board 90 is transported between the adjacent component mounting machines WM3, the first image data PD1 and the second image data are transferred between the adjacent component mounting machines WM3. An imaging device capable of acquiring image data PD2 is provided. Furthermore, in the first, second, and third embodiments, when the board-related work is normally performed without stopping, the inspection image data CD0 is acquired after the reference image data SD0 is acquired by the acquisition unit 71. It is possible to select a configuration in which the time required to complete the process is shorter than the previously described allowable time T0.
 2.異物検出方法
 異物検出装置70について既述されていることは、異物検出方法についても同様に言える。具体的には、異物検出方法は、取得工程と、判断工程とを備えている。取得工程は、取得部71が行う制御に相当する。判断工程は、判断部72が行う制御に相当する。また、異物検出方法は、推定工程を備えることができる。推定工程は、推定部73が行う制御に相当する。異物検出方法は、案内工程を備えることもできる。案内工程は、案内部74が行う制御に相当する。
2. Foreign Matter Detection Method What has already been described about the foreign matter detection device 70 is also applicable to the foreign matter detection method. Specifically, the foreign object detection method includes an acquisition step and a determination step. The acquisition process corresponds to control performed by the acquisition unit 71. The determination process corresponds to control performed by the determination unit 72. Further, the foreign object detection method can include an estimation step. The estimation process corresponds to control performed by the estimation unit 73. The foreign object detection method can also include a guiding step. The guiding process corresponds to the control performed by the guiding section 74.
 3.実施形態の効果の一例
 異物検出装置70によれば、対基板作業が停止した時点の画像データPD0である第一画像データPD1を取得することができる。異物検出装置70について上述されていることは、異物検出方法についても同様に言える。
3. Example of Effects of Embodiment According to the foreign object detection device 70, it is possible to acquire first image data PD1, which is image data PD0 at the time when the work for the substrate is stopped. What has been described above regarding the foreign object detection device 70 also applies to the foreign object detection method.
70:異物検出装置、71:取得部、72:判断部、73:推定部、
74:案内部、90:基板、91:部品、92:異物、93:接合部材、
CA0:検査領域、PD0:画像データ、SD0:基準画像データ、
CD0:検査画像データ、PD1:第一画像データ、
PD2:第二画像データ、Q0:停止時間、T0:許容時間、
WM0:対基板作業機、WM3:部品装着機。
70: Foreign object detection device, 71: Acquisition unit, 72: Judgment unit, 73: Estimation unit,
74: Guide part, 90: Board, 91: Components, 92: Foreign matter, 93: Joining member,
CA0: inspection area, PD0: image data, SD0: reference image data,
CD0: inspection image data, PD1: first image data,
PD2: second image data, Q0: stop time, T0: allowable time,
WM0: Board work machine, WM3: Component mounting machine.

Claims (14)

  1.  基板に所定の対基板作業を行う対基板作業機による前記対基板作業の進行に伴って前記基板の少なくとも一部の検査領域を撮像して、同一の前記検査領域を撮像した複数の画像データを取得する取得部と、
     前記複数の画像データのうちの一の画像データである基準画像データおよび前記基準画像データよりも後に取得される検査対象の画像データである検査画像データをそれぞれ画像処理して取得した前記検査領域の特徴量の差異に基づいて、前記検査領域に付着する異物の有無を判断する判断部と、
    を備え、
     前記取得部は、前記基準画像データを取得してから前記検査画像データを取得するまでの間に前記対基板作業が停止した場合に、前記検査領域を撮像して前記対基板作業が停止した時点の画像データである第一画像データを取得する異物検出装置。
    A plurality of image data obtained by imaging at least a part of the inspection area of the board as the board-to-board work progresses by a board-to-board work machine that performs a predetermined board-to-board work on the board, and the same inspection area is imaged. an acquisition unit that acquires;
    of the inspection area obtained by image processing the reference image data that is one image data of the plurality of image data and the inspection image data that is the image data of the inspection target acquired after the reference image data. a determination unit that determines the presence or absence of foreign matter adhering to the inspection area based on the difference in feature amounts;
    Equipped with
    When the board-facing work is stopped between acquiring the reference image data and acquiring the inspection image data, the acquisition unit is configured to image the inspection area and detect the point at which the board-facing work stops. A foreign object detection device that acquires first image data that is image data of.
  2.  前記判断部は、前記基準画像データおよび前記第一画像データをそれぞれ画像処理して取得した前記検査領域の前記特徴量の差異に基づいて、前記異物の有無を判断する請求項1に記載の異物検出装置。 The foreign object according to claim 1, wherein the determination unit determines the presence or absence of the foreign object based on the difference in the feature amount of the inspection area obtained by image processing the reference image data and the first image data, respectively. Detection device.
  3.  前記異物検出装置は、前記対基板作業が停止してから再開されるまでの停止時間を推定する推定部を備え、
     前記判断部は、前記検査領域に塗布されている前記基板と部品を接合する接合部材の経時変化によって前記検査領域の前記特徴量が変動しても前記接合部材が前記異物と誤判断されない許容時間よりも長い前記停止時間が推定された場合に、前記異物の有無を判断する請求項2に記載の異物検出装置。
    The foreign object detection device includes an estimation unit that estimates a stop time from when the board-related work is stopped until it is restarted,
    The determination unit determines an allowable time period in which the bonding member is not mistakenly determined to be the foreign object even if the characteristic amount of the inspection area changes due to changes over time in the bonding member that is applied to the inspection area and that bonds the substrate and the component. The foreign object detection device according to claim 2, wherein the presence or absence of the foreign object is determined when the stop time is estimated to be longer than .
  4.  前記異物検出装置は、前記対基板作業が停止してから再開されるまでの停止時間を推定する推定部を備え、
     前記判断部は、前記検査領域に塗布されている前記基板と部品を接合する接合部材の経時変化によって前記検査領域の前記特徴量が変動しても前記接合部材が前記異物と誤判断されない許容時間内の前記停止時間が推定された後に前記許容時間よりも長い前記停止時間が見込まれた場合に、前記異物の有無を判断する請求項2に記載の異物検出装置。
    The foreign object detection device includes an estimation unit that estimates a stop time from when the board-related work is stopped until it is restarted,
    The determination unit determines an allowable time period in which the bonding member is not mistakenly determined to be the foreign object even if the characteristic amount of the inspection area changes due to changes over time in the bonding member that is applied to the inspection area and that bonds the substrate and the component. 3. The foreign object detection device according to claim 2, wherein the presence or absence of the foreign object is determined when the stop time is estimated to be longer than the allowable time after the stop time is estimated.
  5.  前記異物検出装置は、前記判断部によって前記検査領域に前記異物が有ると判断された場合に、作業者に前記異物の存在を案内する案内部を備える請求項1~請求項4のいずれか一項に記載の異物検出装置。 The foreign object detection device includes a guide section that guides an operator to the presence of the foreign object when the judgment section determines that the foreign object is present in the inspection area. The foreign object detection device described in Section 1.
  6.  前記取得部は、前記対基板作業が再開された場合に、前記検査領域を撮像して前記対基板作業が再開された時点の画像データである第二画像データを取得し、前記第二画像データによって前記基準画像データを更新する請求項1に記載の異物検出装置。 When the board-facing work is restarted, the acquisition unit captures an image of the inspection area to obtain second image data that is image data at the time when the board-facing work is restarted, The foreign object detection device according to claim 1, wherein the reference image data is updated by:.
  7.  前記取得部は、前記検査領域に塗布されている前記基板と部品を接合する接合部材の経時変化によって前記検査領域の前記特徴量が変動しても前記接合部材が前記異物と誤判断されない許容時間よりも、前記対基板作業が停止してから再開されるまでの停止時間が長い場合に、前記第二画像データによって前記基準画像データを更新する請求項6に記載の異物検出装置。 The acquisition unit is configured to determine an allowable time period in which the bonding member is not erroneously determined to be the foreign object even if the characteristic amount of the inspection area changes due to a change over time of the bonding member that is applied to the inspection area and that bonds the substrate and the component. 7. The foreign object detection device according to claim 6, wherein the reference image data is updated by the second image data when the stop time from when the board work is stopped until it is restarted is longer than the above.
  8.  前記判断部は、更新された前記基準画像データおよび前記検査画像データをそれぞれ画像処理して取得した前記検査領域の前記特徴量の差異に基づいて、前記異物の有無を判断する請求項6または請求項7に記載の異物検出装置。 The determination unit determines the presence or absence of the foreign object based on the difference in the feature amount of the inspection area obtained by image processing the updated reference image data and the inspection image data, respectively. The foreign object detection device according to item 7.
  9.  前記判断部は、二つの画像データから取得した前記検査領域の前記特徴量の差分が所定閾値を超えている場合に、前記検査領域に前記異物が有ると判断し、前記特徴量の前記差分が所定閾値以下の場合に、前記検査領域に前記異物が無いと判断する請求項1に記載の異物検出装置。 The determination unit determines that the foreign object is present in the inspection area when the difference between the feature quantities of the inspection area obtained from two image data exceeds a predetermined threshold, and the determination unit determines that the foreign object is present in the inspection area, and the difference between the feature quantities The foreign object detection device according to claim 1, wherein the foreign object detection device determines that the foreign object is not present in the inspection area if the amount is equal to or less than a predetermined threshold value.
  10.  前記特徴量は、二つの画像データの画素ごとの輝度である請求項9に記載の異物検出装置。 The foreign object detection device according to claim 9, wherein the feature amount is the luminance of each pixel of two image data.
  11.  前記基板は、前記対基板作業機である複数の部品装着機に順に搬送されて、複数の部品が装着され、
     前記取得部は、前記複数の部品装着機のうちの最も上流側の部品装着機において前記基準画像データを取得し、前記検査領域に前記部品を装着する部品装着機において前記検査画像データを取得し、
     前記判断部は、前記基板が前記複数の部品装着機に亘って搬送される間に前記検査領域に付着する前記異物の有無を判断する請求項1に記載の異物検出装置。
    The board is sequentially conveyed to a plurality of component mounting machines, which are the board-to-board working machines, and a plurality of components are mounted thereon,
    The acquisition unit acquires the reference image data in the most upstream component mounting machine of the plurality of component mounting machines, and acquires the inspection image data in a component mounting machine that mounts the component in the inspection area. ,
    The foreign object detection device according to claim 1, wherein the determination unit determines whether or not the foreign object adheres to the inspection area while the board is being transported through the plurality of component mounting machines.
  12.  前記基板は、前記対基板作業機である複数の部品装着機に順に搬送されて、複数の部品が装着され、
     前記取得部は、前記複数の部品装着機の各々において前記基準画像データおよび前記検査画像データを取得し、
     前記判断部は、前記複数の部品装着機の各機内において前記検査領域に付着する前記異物の有無を判断する請求項1に記載の異物検出装置。
    The board is sequentially conveyed to a plurality of component mounting machines, which are the board-to-board working machines, and a plurality of components are mounted thereon,
    The acquisition unit acquires the reference image data and the inspection image data in each of the plurality of component mounting machines,
    The foreign object detection device according to claim 1, wherein the determination unit determines whether or not the foreign object is attached to the inspection area in each of the plurality of component mounting machines.
  13.  前記基板は、前記対基板作業機である複数の部品装着機に順に搬送されて、複数の部品が装着され、
     前記取得部は、前記複数の部品装着機のうちの一の部品装着機において前記基準画像データを取得し、当該部品装着機よりも下流側の次の部品装着機において前記検査画像データを取得し、
     前記判断部は、隣接する部品装着機の間において前記基板が搬送されるときに前記検査領域に付着する前記異物の有無を判断する請求項1に記載の異物検出装置。
    The board is sequentially conveyed to a plurality of component mounting machines, which are the board-to-board working machines, and a plurality of components are mounted thereon,
    The acquisition unit acquires the reference image data in one of the plurality of component placement machines, and acquires the inspection image data in a next component placement machine downstream of the component placement machine. ,
    2. The foreign object detection device according to claim 1, wherein the determination unit determines whether or not the foreign object adheres to the inspection area when the board is transferred between adjacent component mounting machines.
  14.  基板に所定の対基板作業を行う対基板作業機による前記対基板作業の進行に伴って前記基板の少なくとも一部の検査領域を撮像して、同一の前記検査領域を撮像した複数の画像データを取得する取得工程と、
     前記複数の画像データのうちの一の画像データである基準画像データおよび前記基準画像データよりも後に取得される検査対象の画像データである検査画像データをそれぞれ画像処理して取得した前記検査領域の特徴量の差異に基づいて、前記検査領域に付着する異物の有無を判断する判断工程と、
    を備え、
     前記取得工程は、前記基準画像データを取得してから前記検査画像データを取得するまでの間に前記対基板作業が停止した場合に、前記検査領域を撮像して前記対基板作業が停止した時点の画像データである第一画像データを取得する異物検出方法。
    A plurality of image data obtained by imaging at least a part of the inspection area of the board as the board-to-board work progresses with the progress of the board-to-board work by a board-to-board work machine that performs a predetermined board-to-board work on the board. an acquisition process to acquire;
    of the inspection area obtained by image processing the reference image data that is one image data of the plurality of image data and the inspection image data that is the image data of the inspection target acquired after the reference image data, respectively. a determination step of determining the presence or absence of foreign matter adhering to the inspection area based on the difference in feature amounts;
    Equipped with
    In the acquisition step, if the board-facing work is stopped between acquiring the reference image data and acquiring the inspection image data, the point at which the board-facing work is stopped after imaging the inspection area is performed. A method for detecting a foreign object that obtains first image data that is image data.
PCT/JP2022/030245 2022-08-08 2022-08-08 Foreign matter detection device and foreign matter detection method WO2024033961A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004186308A (en) * 2002-12-02 2004-07-02 Matsushita Electric Ind Co Ltd Device and method for mounting component
JP2005286309A (en) * 2004-03-01 2005-10-13 Omron Corp Inspection method and inspection system for component-mounting board and method of manufacturing part-mounting board
JP2006319332A (en) * 2006-05-08 2006-11-24 Fuji Mach Mfg Co Ltd Apparatus for installing electronic components provided with device for inspecting installed electronic components
WO2016129057A1 (en) * 2015-02-10 2016-08-18 富士機械製造株式会社 Mounting operation machine

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004186308A (en) * 2002-12-02 2004-07-02 Matsushita Electric Ind Co Ltd Device and method for mounting component
JP2005286309A (en) * 2004-03-01 2005-10-13 Omron Corp Inspection method and inspection system for component-mounting board and method of manufacturing part-mounting board
JP2006319332A (en) * 2006-05-08 2006-11-24 Fuji Mach Mfg Co Ltd Apparatus for installing electronic components provided with device for inspecting installed electronic components
WO2016129057A1 (en) * 2015-02-10 2016-08-18 富士機械製造株式会社 Mounting operation machine

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