WO2022156020A1 - Adjustable quartz grinding device - Google Patents

Adjustable quartz grinding device Download PDF

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Publication number
WO2022156020A1
WO2022156020A1 PCT/CN2021/076905 CN2021076905W WO2022156020A1 WO 2022156020 A1 WO2022156020 A1 WO 2022156020A1 CN 2021076905 W CN2021076905 W CN 2021076905W WO 2022156020 A1 WO2022156020 A1 WO 2022156020A1
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WO
WIPO (PCT)
Prior art keywords
pressure
rod
grinding
sliding seat
grinding device
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PCT/CN2021/076905
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French (fr)
Chinese (zh)
Inventor
蔡新域
Original Assignee
宁波云德半导体材料有限公司
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Publication of WO2022156020A1 publication Critical patent/WO2022156020A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B24B57/02Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents

Definitions

  • the invention belongs to the technical field of grinding devices, and in particular relates to an adjustable quartz grinding device.
  • the grinding process of quartz products is the traditional processing technology of quartz products.
  • the traditional quartz grinding process is to put the quartz product on the grinding machine, make the grinding machine rotate, spread a layer of green silicon carbide powder evenly by hand on the grinding disc of the grinding machine, and then hold the quartz rod or quartz block on the grinding disc for grinding.
  • the existing quartz grinder is time-consuming and labor-intensive for manual grinding, and it is easy to have processing errors in the manual processing process. It cannot guarantee that the grinding volume of the same batch of quartz products remains basically the same, and the size to be processed cannot be controlled.
  • the consumption of micropowder requires continuous manual replenishment. If the replenishment is not timely, it will cause scratches or even gaps in the product, resulting in product scrapping and a high probability of errors.
  • the purpose of the present invention is to solve the problems in the prior art, and proposes an adjustable quartz grinding device, which can easily adjust the grinding amount of the grinding position, and can automatically add grinding liquid, and does not need to re-measure the size and trim each time the quartz product is replaced. Reduce processing time and improve the grinding efficiency and quality of products by semi-automatic methods.
  • an adjustable quartz grinding device which includes a body, a mechanical arm, and a drive device mounted on the body, the drive device is connected to the grinding disc, and a support frame is provided on the body.
  • the mechanical arm is slidably installed on the support frame, and the support frame is provided with at least one spray pipe for spraying grinding liquid or cooling liquid.
  • the mechanical arm includes a sliding seat, a vertical rod, and a pressure rod, and the sliding seat slides It is installed on the support frame and fixed with a locking device after sliding a certain distance.
  • the sliding seat is provided with a pressure indicator.
  • the upper end of the vertical rod is connected to the sliding seat.
  • An adjustment mechanism and a threaded connection part the pressure adjustment mechanism includes a screw rod and a gear meshed with the screw rod, the pressure adjustment knob is connected with the gear, and the pressure display can be adjusted by screwing the pressure adjustment knob.
  • Display value the screw rod Passing through the threaded connection part and connected with the threaded connection part, the bottom of the screw rod is provided with a pressure sensor that is electrically connected to the pressure indicator, the upper end of the pressure rod is inserted into the vertical rod and can slide up and down inside the vertical rod, and the upper end of the pressure rod and A spring is connected between the pressure sensors at the bottom of the screw rod, and a clamping claw is rotatably installed at the lower end of the pressure rod.
  • the locking device comprises a turntable and a threaded rod integrally connected to the center of the turntable, the threaded rod is threadedly connected to the back of the sliding seat, and the threaded rod passes through the locking device when the sliding seat is fixed on the support frame
  • the sliding seat is pressed against the back of the support frame, and the rotation of the threaded rod can be controlled by rotating the turntable, and the distance between the threaded rod and the sliding seat can be changed at the same time, which is convenient to control the fixing or loosening between the sliding seat and the supporting frame.
  • a handle extends outward from the turntable, which is convenient for the operator to grasp and control the rotation of the turntable.
  • two parallel connecting plates extend from the upper end of the clamping jaw, and the lower end of the pressure rod is placed between the two connecting plates and the pressure rod and the connecting plate are pressed against each other with a screw and a nut, so that the lower end of the pressure rod and the clamp
  • the relative angle between the claws is easy to adjust and the connection is firm.
  • a gasket is provided between the clamping jaw and the quartz product, and the gasket and the clamping jaw are connected by screws.
  • the gasket can be placed on the clamping jaw to damage the quartz product.
  • Different thicknesses of the gasket are selected according to the clamping requirements to meet the Grippers can be used to clamp quartz product requirements of different lengths and sizes.
  • a grinding liquid tank is installed on one side of the machine body, a peristaltic pump and a stirring device are installed on the grinding liquid tank, the peristaltic pump is connected with the spray pipe, and the grinding liquid tank is provided with grinding liquid. Quartz products grind better.
  • the grinding liquid tank is provided with a liquid filling port, and the body is provided with a liquid discharging port, which facilitates the addition of grinding liquid and the discharge of waste liquid.
  • a "cross"-shaped mark is provided at the center of the grinding disc, which is convenient for the operator to align the center of the grinding disc.
  • a control switch button is arranged on the front of the fuselage, a time display is arranged on the sliding seat, the driving device includes a driving motor and a relay, the relay is electrically connected with the time display, and the output end of the driving motor is connected to the time display.
  • the grinding disc is connected, and the relay can control the working time of the drive motor to effectively control the grinding time, and the remaining grinding time can be displayed on the time display.
  • the support frame includes a horizontal bar and two vertical bars connected to the horizontal bar, the two vertical bars are both single-bar or telescopic adjustment bar structures, and the vertical bars are connected to the fuselage, so that the space between the support frame and the horizontal bar is The connection is firm, and if the vertical rod adopts the telescopic adjustment rod structure, the installation height of the support frame can be effectively adjusted.
  • the present invention is to slide the mechanical arm on the support frame and fix it with a locking device after sliding a certain distance, the end of the mechanical arm is rotated and installed with a clamping claw, and the mechanical arm is provided with a pressure regulating mechanism to control the clamping
  • the jaws move up and down and the grinding volume can be adjusted through pressure adjustment, which makes it easy to adjust the grinding volume of the quartz grinding position.
  • a grinding liquid tank is installed on one side of the machine body, and the grinding liquid can be automatically transported to the grinding disc through the peristaltic pump and spray pipe, and the grinding liquid can be automatically added during the grinding process to ensure the grinding quality;
  • the pressure display on the sliding seat can facilitate the operation The personnel can intuitively obtain the corresponding pressure value, and can adjust the pressure value by twisting the pressure adjustment button, thereby ensuring the accurate control of the grinding amount of the same batch or different batches of quartz products.
  • FIG. 1 is a schematic structural diagram of an embodiment of the present invention
  • FIG. 2 is a schematic structural diagram of an embodiment of the present invention.
  • FIG. 3 is a front view of an embodiment of the present invention.
  • FIG. 4 is a top view of an embodiment of the present invention.
  • FIG. 5 is a schematic diagram of a robotic arm according to an embodiment of the present invention.
  • FIG. 6 is a partial schematic diagram of a robotic arm according to an embodiment of the present invention.
  • Embodiment 1 Referring to FIG. 1 , FIG. 3 , FIG. 4 , FIG. 5 and FIG. 6 , this embodiment provides an adjustable quartz grinding device, including a body 1 , a mechanical arm 2 , and a drive installed on the body 1
  • the device 11, the driving device 11 is connected with the grinding disc 15
  • the body 1 is provided with a support frame 10
  • the robotic arm 2 is slidably installed on the support frame 10
  • the support frame 10 is provided with three sprays for spraying grinding liquid or cooling liquid.
  • the spray pipe 16, the ends of the three spray pipes 16 are connected to a total spray pipe with joints, and the total spray pipe is connected to the peristaltic pump 14.
  • the robotic arm 2 includes a sliding seat 3, a vertical rod 21, a pressure rod 22, and a sliding seat. 3.
  • the sliding seat 3 is provided with a pressure indicator 31, the upper end of the vertical rod 21 is connected with the sliding seat 3, and the vertical rod 21 is provided with a pressure adjustment knob 20 , the vertical rod 21 is provided with a pressure adjustment mechanism and a threaded connection portion 24.
  • the pressure adjustment mechanism includes a screw rod 23 and a gear that meshes with the screw rod 23.
  • the pressure adjustment knob 20 is connected with the gear and can be adjusted by screwing the pressure adjustment knob 20.
  • the pressure indicator 31 displays the value
  • the screw rod 23 passes through the threaded connection portion 24 and is threadedly connected with the screw connection portion 24
  • the bottom of the screw rod 23 is provided with a pressure sensor that is electrically connected to the pressure indicator 31
  • the upper end of the pressure rod 22 is inserted into the vertical rod 21 And can slide up and down inside the vertical rod 21, a spring 25 is connected between the upper end of the pressure rod 22 and the pressure sensor at the bottom of the screw rod 23, the lower end of the pressure rod 22 is rotatably installed with a clamping jaw 5, and the spray pipe 16 can spray grinding liquid, grinding
  • the liquid contains green silicon carbide micropowder.
  • the locking device includes a turntable 4 and a threaded rod integrally connected with the center of the turntable 4.
  • the threaded rod is connected to the back of the sliding seat 3 in a threaded manner.
  • the threaded rod passes through the sliding block.
  • the seat 3 is pressed against the back of the support frame 10, and a handle 41 extends outward from the turntable 4, and the handle 41 is cylindrical.
  • two parallel connecting plates extend from the upper end of the clamping jaw 5, and the lower end of the pressure rod 22 is placed between the two connecting plates, and the pressure rod and the connecting plate are pressed against each other by screws and nuts.
  • a washer 51 is provided between the clamping jaw 5 and the quartz product, and the washer 51 and the clamping jaw 5 are connected by screws 52 .
  • a grinding liquid tank 12 is installed on one side of the fuselage 1
  • a peristaltic pump 14 and a stirring device 13 are installed on the grinding liquid tank 12, and the peristaltic pump 14 is connected with the spray pipe 16, and the stirring device 13 includes a stirring motor, and a stirring motor.
  • the connected stirring rods are provided with stirring blades on the outer edge of the stirring rods.
  • the grinding liquid tank 12 is provided with a liquid filling port, the body 1 is provided with a liquid discharging port, and the center of the grinding disc 15 is provided with a "cross"-shaped mark.
  • a control switch button 17 is provided on the front of the fuselage 1
  • a time display 32 is provided on the sliding seat 3
  • the driving device 11 includes a driving motor and a relay, the relay is electrically connected with the time display 32, the output end of the driving motor and the grinding disc are 15 connected.
  • the support frame 10 includes a horizontal rod and two vertical rods connected to the horizontal rod.
  • the two vertical rods are both telescopic and adjustable rod structures, and the lower ends of the vertical rods are fixedly connected to the fuselage 1 .
  • Embodiment 2 Referring to FIG. 2 , the vertical rods are all single rods, and the vertical rods are connected with the fuselage 1 , and the rest of the structure is the same as that of the first embodiment.
  • the quartz product to be ground is placed on both sides or one side of the quartz product with gaskets 51 and then placed on the gripper 5 and pressed with screws 52.
  • the hand moves the sliding seat 3 back and forth so that the sliding seat 3 follows the support frame.
  • the horizontal bar on 10 moves horizontally. After moving to the designated position, grab the handle 41 and turn it clockwise to make the threaded rod stand against the sliding seat 3 so that the sliding seat 3 is fixed on the specified position of the support frame 10.
  • start Drive the motor and the peristaltic pump 14.
  • the grinding liquid is sprayed from the grinding liquid tank 12 to the grinding disc 15 through the spray pipe 16 under the action of the peristaltic pump 14.
  • the driving motor rotates to drive the grinding disc 15 to rotate. After the grinding disc 15 rotates, it can effectively grind the quartz products. ;
  • the required grinding time can be set on the relay, and the remaining grinding time can be displayed on the time display 32.
  • the grinding time is the same as the working time of the driving motor.
  • a stirring rod is connected to the output end of the stirring motor, which can effectively stir the grinding liquid in the grinding box 12 to make grinding.
  • the liquid is relatively uniform.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)

Abstract

Disclosed is an adjustable quartz grinding device, comprising a machine body, a robotic arm, and a drive device disposed on the machine body. The drive device is connected to a grinding disc. The robotic arm is slidably mounted on a holder of the machine body. The holder is provided with spray pipes. The robotic arm comprises a sliding seat, a vertical rod, and a pressure rod. The sliding seat slides on the holder by a certain distance, and then is fixed by a locking device. A pressure adjustment knob is disposed on the vertical rod. A pressure adjustment mechanism and a threaded connecting part are arranged inside the vertical rod. The pressure adjustment mechanism comprises a screw and a gear. The pressure adjustment knob is connected to the gear. The screw is threadedly connected to the threaded connecting part. A pressure sensor is provided at the bottom of the screw. The upper end of the pressure rod is inserted into the vertical rod and can slide up and down inside the vertical rod. A spring is arranged between the upper end of the pressure rod and the pressure sensor. A clamping jaw is mounted on the lower end of the pressure rod. The grinding device of the present invention has the advantages of being easy to adjust the grinding position and the grinding amount, capable of automatically adding the grinding liquid, reducing the processing time, improving the grinding efficiency and the quality of the product, and the like.

Description

一种可调节式石英研磨装置An adjustable quartz grinding device 【技术领域】【Technical field】
本发明属于研磨装置的技术领域,尤其涉及一种可调节式石英研磨装置。The invention belongs to the technical field of grinding devices, and in particular relates to an adjustable quartz grinding device.
【背景技术】【Background technique】
石英产品研磨工艺是传统石英产品加工工艺。传统的石英研磨工艺是将石英产品放在研磨机上,使研磨机旋转起来,在研磨机磨盘上用手均匀地涂抹一层绿碳化硅微粉后,手持石英棒或石英块在磨盘上进行研磨。现有的石英研磨机存在人工研磨较为费时费力,在人力加工过程中容易存在加工误差不能保证同一批石英产品研磨量保持基本相同,无法控制想要加工的尺寸,以及研磨过程中由于绿碳化硅微粉的消耗,需要不断地进行手工补充,如果补充不及时会造成产品划伤甚至缺口,导致产品报废,失误几率较大等问题。The grinding process of quartz products is the traditional processing technology of quartz products. The traditional quartz grinding process is to put the quartz product on the grinding machine, make the grinding machine rotate, spread a layer of green silicon carbide powder evenly by hand on the grinding disc of the grinding machine, and then hold the quartz rod or quartz block on the grinding disc for grinding. The existing quartz grinder is time-consuming and labor-intensive for manual grinding, and it is easy to have processing errors in the manual processing process. It cannot guarantee that the grinding volume of the same batch of quartz products remains basically the same, and the size to be processed cannot be controlled. The consumption of micropowder requires continuous manual replenishment. If the replenishment is not timely, it will cause scratches or even gaps in the product, resulting in product scrapping and a high probability of errors.
【发明内容】[Content of the invention]
本发明的目的就是解决现有技术中的问题,提出一种可调节式石英研磨装置,能够使研磨位置研磨量易调节,可自动添加研磨液,每次更换石英产品时无需重新测量尺寸及修整减少加工时间,采用半自动化方式提高产品的研磨效率和质量。The purpose of the present invention is to solve the problems in the prior art, and proposes an adjustable quartz grinding device, which can easily adjust the grinding amount of the grinding position, and can automatically add grinding liquid, and does not need to re-measure the size and trim each time the quartz product is replaced. Reduce processing time and improve the grinding efficiency and quality of products by semi-automatic methods.
为实现上述目的,本发明提出了一种可调节式石英研磨装置,包括机身、机械臂、安装在机身上的驱动装置,驱动装置与研磨盘相连,所述机身上设有支撑架,所述机械臂滑动安装在支撑架上,支撑架上设有至少一根喷淋研磨液或冷却液用的喷淋管,所述机械臂包括滑座、立杆、压力杆,滑座滑动安装在支撑架上且在滑动一定距离后用锁紧装置固定,滑座上设有压力显示器,所述立杆上端与滑座相连,立杆上设有压力调节旋钮,立杆内部设有压力调节机构 和螺纹连接部,所述压力调节机构包括丝杆、与丝杆相啮合的齿轮,所述压力调节旋钮与齿轮相连且可通过旋拧压力调节旋钮调节压力显示器显示数值,所述丝杆穿过螺纹连接部并与螺纹连接部螺纹连接,丝杆底部设有与压力显示器电性相连的压力传感器,所述压力杆上端插入立杆内且可在立杆内部上下滑动,压力杆上端和丝杆底部的压力传感器之间连接有弹簧,所述压力杆下端转动安装有夹爪。In order to achieve the above purpose, the present invention proposes an adjustable quartz grinding device, which includes a body, a mechanical arm, and a drive device mounted on the body, the drive device is connected to the grinding disc, and a support frame is provided on the body. , the mechanical arm is slidably installed on the support frame, and the support frame is provided with at least one spray pipe for spraying grinding liquid or cooling liquid. The mechanical arm includes a sliding seat, a vertical rod, and a pressure rod, and the sliding seat slides It is installed on the support frame and fixed with a locking device after sliding a certain distance. The sliding seat is provided with a pressure indicator. The upper end of the vertical rod is connected to the sliding seat. An adjustment mechanism and a threaded connection part, the pressure adjustment mechanism includes a screw rod and a gear meshed with the screw rod, the pressure adjustment knob is connected with the gear, and the pressure display can be adjusted by screwing the pressure adjustment knob. Display value, the screw rod Passing through the threaded connection part and connected with the threaded connection part, the bottom of the screw rod is provided with a pressure sensor that is electrically connected to the pressure indicator, the upper end of the pressure rod is inserted into the vertical rod and can slide up and down inside the vertical rod, and the upper end of the pressure rod and A spring is connected between the pressure sensors at the bottom of the screw rod, and a clamping claw is rotatably installed at the lower end of the pressure rod.
作为优选,所述锁紧装置包括转盘、与转盘中心一体相连的螺纹杆,所述螺纹杆与滑座背面螺纹方式连接,所述锁紧装置将滑座固定在支撑架上时螺纹杆穿过滑座并抵住支撑架背面,通过转动转盘控制螺纹杆转动的同时可使得螺纹杆相对滑座距离发生改变,方便对滑座与支撑架之间的固定或松动进行控制。Preferably, the locking device comprises a turntable and a threaded rod integrally connected to the center of the turntable, the threaded rod is threadedly connected to the back of the sliding seat, and the threaded rod passes through the locking device when the sliding seat is fixed on the support frame The sliding seat is pressed against the back of the support frame, and the rotation of the threaded rod can be controlled by rotating the turntable, and the distance between the threaded rod and the sliding seat can be changed at the same time, which is convenient to control the fixing or loosening between the sliding seat and the supporting frame.
作为优选,所述转盘上往外延伸出一把手,方便操作人员抓取及控制转盘的转动。Preferably, a handle extends outward from the turntable, which is convenient for the operator to grasp and control the rotation of the turntable.
作为优选,所述夹爪上端延伸出两片平行的连接板,所述压力杆下端放置在两片连接板之间并用螺杆和螺母将压力杆和连接板相互压紧,使得压力杆下端和夹爪之间相对角度调节方便,连接牢固。Preferably, two parallel connecting plates extend from the upper end of the clamping jaw, and the lower end of the pressure rod is placed between the two connecting plates and the pressure rod and the connecting plate are pressed against each other with a screw and a nut, so that the lower end of the pressure rod and the clamp The relative angle between the claws is easy to adjust and the connection is firm.
作为优选,所述夹爪和石英产品之间设置有垫片,垫片和夹爪之间通过螺钉相连,垫片可放置夹爪损伤石英产品,垫片根据装夹需求选择不同厚度,进而满足夹爪可用于装夹不同长度尺寸的石英产品要求。Preferably, a gasket is provided between the clamping jaw and the quartz product, and the gasket and the clamping jaw are connected by screws. The gasket can be placed on the clamping jaw to damage the quartz product. Different thicknesses of the gasket are selected according to the clamping requirements to meet the Grippers can be used to clamp quartz product requirements of different lengths and sizes.
作为优选,所述机身一侧安装有研磨液箱,研磨液箱上安装有蠕动泵和搅拌装置,蠕动泵和喷淋管相连,研磨液箱内设有研磨液,通过喷淋研磨液使得石英产品研磨效果更好。Preferably, a grinding liquid tank is installed on one side of the machine body, a peristaltic pump and a stirring device are installed on the grinding liquid tank, the peristaltic pump is connected with the spray pipe, and the grinding liquid tank is provided with grinding liquid. Quartz products grind better.
作为优选,所述研磨液箱上设有加液口,所述机身上设有排液口,方便研磨液的添加及废液的排放。Preferably, the grinding liquid tank is provided with a liquid filling port, and the body is provided with a liquid discharging port, which facilitates the addition of grinding liquid and the discharge of waste liquid.
作为优选,所述研磨盘中心处设有“十”字形标记,方便操作人员对准研 磨盘中心。Preferably, a "cross"-shaped mark is provided at the center of the grinding disc, which is convenient for the operator to align the center of the grinding disc.
作为优选,所述机身正面设有控制开关按钮,所述滑座上设有时间显示器,所述驱动装置包括驱动电机和继电器,继电器与时间显示器电性连接,所述驱动电机的输出端和研磨盘相连,继电器可对驱动电机工作时间进行控制进而有效控制研磨时间,时间显示器上可显示剩余研磨时间。Preferably, a control switch button is arranged on the front of the fuselage, a time display is arranged on the sliding seat, the driving device includes a driving motor and a relay, the relay is electrically connected with the time display, and the output end of the driving motor is connected to the time display. The grinding disc is connected, and the relay can control the working time of the drive motor to effectively control the grinding time, and the remaining grinding time can be displayed on the time display.
作为优选,所述支撑架包括横杆、与横杆相连的两根竖杆,两根竖杆均为单杆或伸缩调节杆结构,竖杆与机身相连,使得支撑架和横杆之间连接牢固,竖杆若采用伸缩调节杆结构可对支撑架的安装高度进行有效调节。Preferably, the support frame includes a horizontal bar and two vertical bars connected to the horizontal bar, the two vertical bars are both single-bar or telescopic adjustment bar structures, and the vertical bars are connected to the fuselage, so that the space between the support frame and the horizontal bar is The connection is firm, and if the vertical rod adopts the telescopic adjustment rod structure, the installation height of the support frame can be effectively adjusted.
本发明的有益效果:本发明通过将机械臂滑动安装在支撑架上且在滑动一定距离后用锁紧装置固定,机械臂末端转动安装有夹爪,机械臂上设有压力调节机构可控制夹爪上下移动并通过压力调节实现研磨量的调节,使得石英研磨位置研磨量易调节,每次更换石英产品时无需重新测量尺寸及修整减少加工时间,采用半自动化方式提高产品的研磨效率和质量;机身一侧安装研磨液箱,研磨液可通过蠕动泵和喷淋管自动输送至研磨盘上,可在研磨过程中自动添加研磨液,保证研磨质量;通过滑座上的压力显示器可便于操作人员直观获取相应的压力数值,并可通过旋拧压力调节按钮进行压力数值调节,进而保证同批或不同批次石英产品研磨量的准确把控。Beneficial effects of the present invention: the present invention is to slide the mechanical arm on the support frame and fix it with a locking device after sliding a certain distance, the end of the mechanical arm is rotated and installed with a clamping claw, and the mechanical arm is provided with a pressure regulating mechanism to control the clamping The jaws move up and down and the grinding volume can be adjusted through pressure adjustment, which makes it easy to adjust the grinding volume of the quartz grinding position. Every time the quartz product is replaced, there is no need to re-measure the size and trim to reduce the processing time, and the semi-automatic method is used to improve the grinding efficiency and quality of the product; A grinding liquid tank is installed on one side of the machine body, and the grinding liquid can be automatically transported to the grinding disc through the peristaltic pump and spray pipe, and the grinding liquid can be automatically added during the grinding process to ensure the grinding quality; the pressure display on the sliding seat can facilitate the operation The personnel can intuitively obtain the corresponding pressure value, and can adjust the pressure value by twisting the pressure adjustment button, thereby ensuring the accurate control of the grinding amount of the same batch or different batches of quartz products.
本发明的特征及优点将通过实施例结合附图进行详细说明。The features and advantages of the present invention will be described in detail through embodiments in conjunction with the accompanying drawings.
【附图说明】【Description of drawings】
图1是本发明一种实施例的结构示意图;1 is a schematic structural diagram of an embodiment of the present invention;
图2是本发明一种实施例的结构示意图;2 is a schematic structural diagram of an embodiment of the present invention;
图3是本发明一种实施例的主视图;3 is a front view of an embodiment of the present invention;
图4是本发明一种实施例的俯视图;4 is a top view of an embodiment of the present invention;
图5是本发明一种实施例的机械臂示意图;5 is a schematic diagram of a robotic arm according to an embodiment of the present invention;
图6是本发明一种实施例的机械臂局部示意图。FIG. 6 is a partial schematic diagram of a robotic arm according to an embodiment of the present invention.
图中:1-机身、2-机械臂、3-滑座、4-转盘、5-夹爪、10-支撑架、11-驱动装置、12-研磨液箱、13-搅拌装置、14-、15-研磨盘、16-喷淋管、17-、20-压力调节旋钮、21-立杆、22-压力杆、23-丝杆、24-螺纹连接部、25-弹簧、31-压力显示器、32-时间显示器、41-把手、51-垫片、52-螺钉。In the picture: 1-body, 2-robot, 3-slide, 4-turntable, 5-gripper, 10-support frame, 11-drive device, 12-grinding liquid tank, 13-stirring device, 14- , 15-grinding disc, 16-spray pipe, 17-, 20-pressure adjustment knob, 21-upright rod, 22-pressure rod, 23-screw rod, 24-threaded connection, 25-spring, 31-pressure indicator , 32-time display, 41-handle, 51-washer, 52-screw.
【具体实施方式】【Detailed ways】
实施例1参阅图1、图3、图4、图5和图6,本实施例提供了一种可调节式石英研磨装置,包括机身1、机械臂2、安装在机身1上的驱动装置11,驱动装置11与研磨盘15相连,机身1上设有支撑架10,机械臂2滑动安装在支撑架10上,支撑架10上设有三根喷淋研磨液或冷却液用的喷淋管16,三根喷淋管16的末端用接头连为一根总喷淋管,总喷淋管和蠕动泵14相连,机械臂2包括滑座3、立杆21、压力杆22,滑座3滑动安装在支撑架3上且在滑动一定距离后用锁紧装置固定,滑座3上设有压力显示器31,立杆21上端与滑座3相连,立杆21上设有压力调节旋钮20,立杆21内部设有压力调节机构和螺纹连接部24,压力调节机构包括丝杆23、与丝杆23相啮合的齿轮,压力调节旋钮20与齿轮相连且可通过旋拧压力调节旋钮20调节压力显示器31显示数值,丝杆23穿过螺纹连接部24并与螺纹连接部24螺纹连接,丝杆23底部设有与压力显示器31电性相连的压力传感器,压力杆22上端插入立杆21内且可在立杆21内部上下滑动,压力杆22上端和丝杆23底部的压力传感器之间连接有弹簧25,压力杆22下端转动安装有夹爪5,喷淋管16可喷研磨液,研磨液中含有绿碳化硅微粉。 Embodiment 1 Referring to FIG. 1 , FIG. 3 , FIG. 4 , FIG. 5 and FIG. 6 , this embodiment provides an adjustable quartz grinding device, including a body 1 , a mechanical arm 2 , and a drive installed on the body 1 The device 11, the driving device 11 is connected with the grinding disc 15, the body 1 is provided with a support frame 10, the robotic arm 2 is slidably installed on the support frame 10, and the support frame 10 is provided with three sprays for spraying grinding liquid or cooling liquid. The spray pipe 16, the ends of the three spray pipes 16 are connected to a total spray pipe with joints, and the total spray pipe is connected to the peristaltic pump 14. The robotic arm 2 includes a sliding seat 3, a vertical rod 21, a pressure rod 22, and a sliding seat. 3. It is slidably installed on the support frame 3 and fixed with a locking device after sliding a certain distance. The sliding seat 3 is provided with a pressure indicator 31, the upper end of the vertical rod 21 is connected with the sliding seat 3, and the vertical rod 21 is provided with a pressure adjustment knob 20 , the vertical rod 21 is provided with a pressure adjustment mechanism and a threaded connection portion 24. The pressure adjustment mechanism includes a screw rod 23 and a gear that meshes with the screw rod 23. The pressure adjustment knob 20 is connected with the gear and can be adjusted by screwing the pressure adjustment knob 20. The pressure indicator 31 displays the value, the screw rod 23 passes through the threaded connection portion 24 and is threadedly connected with the screw connection portion 24 , the bottom of the screw rod 23 is provided with a pressure sensor that is electrically connected to the pressure indicator 31 , and the upper end of the pressure rod 22 is inserted into the vertical rod 21 And can slide up and down inside the vertical rod 21, a spring 25 is connected between the upper end of the pressure rod 22 and the pressure sensor at the bottom of the screw rod 23, the lower end of the pressure rod 22 is rotatably installed with a clamping jaw 5, and the spray pipe 16 can spray grinding liquid, grinding The liquid contains green silicon carbide micropowder.
进一步地,锁紧装置包括转盘4、与转盘4中心一体相连的螺纹杆,螺纹杆与滑座3背面螺纹方式连接,锁紧装置将滑座3固定在支撑架10上时螺纹杆穿 过滑座3并抵住支撑架10背面,转盘4上往外延伸出一把手41,把手41呈圆柱状。Further, the locking device includes a turntable 4 and a threaded rod integrally connected with the center of the turntable 4. The threaded rod is connected to the back of the sliding seat 3 in a threaded manner. When the locking device fixes the sliding seat 3 on the support frame 10, the threaded rod passes through the sliding block. The seat 3 is pressed against the back of the support frame 10, and a handle 41 extends outward from the turntable 4, and the handle 41 is cylindrical.
进一步地,夹爪5上端延伸出两片平行的连接板,压力杆22下端放置在两片连接板之间并用螺杆和螺母将压力杆和连接板相互压紧。Further, two parallel connecting plates extend from the upper end of the clamping jaw 5, and the lower end of the pressure rod 22 is placed between the two connecting plates, and the pressure rod and the connecting plate are pressed against each other by screws and nuts.
进一步地,夹爪5和石英产品之间设置有垫片51,垫片51和夹爪5之间通过螺钉52相连。Further, a washer 51 is provided between the clamping jaw 5 and the quartz product, and the washer 51 and the clamping jaw 5 are connected by screws 52 .
进一步地,机身1一侧安装有研磨液箱12,研磨液箱12上安装有蠕动泵14和搅拌装置13,蠕动泵14和喷淋管16相连,搅拌装置13包括搅拌电机、与搅拌电机相连的搅拌棒,搅拌棒外沿设有搅拌叶片。Further, a grinding liquid tank 12 is installed on one side of the fuselage 1, a peristaltic pump 14 and a stirring device 13 are installed on the grinding liquid tank 12, and the peristaltic pump 14 is connected with the spray pipe 16, and the stirring device 13 includes a stirring motor, and a stirring motor. The connected stirring rods are provided with stirring blades on the outer edge of the stirring rods.
进一步地,研磨液箱12上设有加液口,机身1上设有排液口,研磨盘15中心处设有“十”字形标记。Further, the grinding liquid tank 12 is provided with a liquid filling port, the body 1 is provided with a liquid discharging port, and the center of the grinding disc 15 is provided with a "cross"-shaped mark.
进一步地,机身1正面设有控制开关按钮17,滑座3上设有时间显示器32,驱动装置11包括驱动电机和继电器,继电器与时间显示器32电性连接,驱动电机的输出端和研磨盘15相连。Further, a control switch button 17 is provided on the front of the fuselage 1, a time display 32 is provided on the sliding seat 3, the driving device 11 includes a driving motor and a relay, the relay is electrically connected with the time display 32, the output end of the driving motor and the grinding disc are 15 connected.
进一步地,支撑架10包括横杆、与横杆相连的两根竖杆,两根竖杆均为伸缩调节杆结构,竖杆下端与机身1固定相连。Further, the support frame 10 includes a horizontal rod and two vertical rods connected to the horizontal rod. The two vertical rods are both telescopic and adjustable rod structures, and the lower ends of the vertical rods are fixedly connected to the fuselage 1 .
实施例2参阅图2,竖杆均为单杆,竖杆与机身1相连,其余结构同实施例1相同。 Embodiment 2 Referring to FIG. 2 , the vertical rods are all single rods, and the vertical rods are connected with the fuselage 1 , and the rest of the structure is the same as that of the first embodiment.
本石英研磨装置工作过程:The working process of this quartz grinding device:
本石英研磨装置在工作过程中,将待研磨的石英产品两侧或单侧垫上垫片51后放置在夹手5上并用螺钉52压紧,手前后移动滑座3使得滑座3沿支撑架10上的横杆水平移动,当移动到指定位置后,抓住把手41后顺时针转动可使得螺纹杆顶住滑座3使得滑座3固定在支撑架10的指定位置上,研磨时,启动驱 动电机、蠕动泵14,研磨液在蠕动泵14作用下从研磨液箱12经喷淋管16喷向研磨盘15,驱动电机转动带动研磨盘15转动,研磨盘15转动后可有效研磨石英产品;During the working process of the quartz grinding device, the quartz product to be ground is placed on both sides or one side of the quartz product with gaskets 51 and then placed on the gripper 5 and pressed with screws 52. The hand moves the sliding seat 3 back and forth so that the sliding seat 3 follows the support frame. The horizontal bar on 10 moves horizontally. After moving to the designated position, grab the handle 41 and turn it clockwise to make the threaded rod stand against the sliding seat 3 so that the sliding seat 3 is fixed on the specified position of the support frame 10. When grinding, start Drive the motor and the peristaltic pump 14. The grinding liquid is sprayed from the grinding liquid tank 12 to the grinding disc 15 through the spray pipe 16 under the action of the peristaltic pump 14. The driving motor rotates to drive the grinding disc 15 to rotate. After the grinding disc 15 rotates, it can effectively grind the quartz products. ;
继电器上可设置所需研磨时间,时间显示器32上可显示剩余研磨时间,研磨时间和驱动电机工作时间相同,搅拌电机输出端连接有搅拌棒可对研磨箱12内的研磨液进行有效搅拌使得研磨液相对均匀,当需要调节石英产品的研磨位置时,松动螺杆和螺母使得夹爪5和压力杆22之间相互松动,之后将夹爪5转动一定角度至所需研磨位置重新拧紧螺杆和螺母,当需要拿取或更换石英产品,转动夹爪5后松开螺钉52即可,新的石英产品完成装夹后拧紧螺钉52重复之前操作;The required grinding time can be set on the relay, and the remaining grinding time can be displayed on the time display 32. The grinding time is the same as the working time of the driving motor. A stirring rod is connected to the output end of the stirring motor, which can effectively stir the grinding liquid in the grinding box 12 to make grinding. The liquid is relatively uniform. When it is necessary to adjust the grinding position of the quartz product, loosen the screw and nut so that the clamping jaw 5 and the pressure rod 22 are loosened from each other, and then turn the clamping jaw 5 to a certain angle to the desired grinding position and re-tighten the screw and nut. When it is necessary to take or replace the quartz product, turn the clamping jaw 5 and then loosen the screw 52. After the new quartz product is clamped, tighten the screw 52 and repeat the previous operation;
当需要调节研磨压力时,顺时针旋拧压力调节旋钮20,压力调节旋钮20转动带动齿轮转动,齿轮转动带动丝杆23向上移动,丝杆23向上移动会拉动弹簧25,弹簧25拉伸后压力传感器检测的压力数值会上升即压力显示器31上的压力数值会上升,反之,压力显示器31上的压力数值会下降,通过弹簧25伸缩变化实现压力杆22上下移动并带动夹爪5上下移动并最终实现研磨量的调节。When it is necessary to adjust the grinding pressure, turn the pressure adjustment knob 20 clockwise, the rotation of the pressure adjustment knob 20 drives the gear to rotate, and the rotation of the gear drives the screw rod 23 to move upward, and the upward movement of the screw rod 23 will pull the spring 25, and the pressure after the spring 25 is stretched The pressure value detected by the sensor will rise, that is, the pressure value on the pressure display 31 will rise. On the contrary, the pressure value on the pressure display 31 will drop. Realize the adjustment of grinding amount.
上述实施例是对本发明的说明,不是对本发明的限定,任何对本发明简单变换后的方案均属于本发明的保护范围。The above-mentioned embodiments are illustrative of the present invention, not limitations of the present invention, and any scheme after simple transformation of the present invention belongs to the protection scope of the present invention.

Claims (10)

  1. 一种可调节式石英研磨装置,包括机身、安装在机身上的驱动装置,驱动装置与研磨盘相连,其特征在于:还包括机械臂,所述机身上设有支撑架,所述机械臂滑动安装在支撑架上,支撑架上设有至少一根喷淋研磨液或冷却液用的喷淋管,所述机械臂包括滑座、立杆、压力杆,滑座滑动安装在支撑架上且在滑动一定距离后用锁紧装置固定,滑座上设有压力显示器,所述立杆上端与滑座相连,立杆上设有压力调节旋钮,立杆内部设有压力调节机构和螺纹连接部,所述压力调节机构包括丝杆、与丝杆相啮合的齿轮,所述压力调节旋钮与齿轮相连且可通过旋拧压力调节旋钮调节压力显示器显示数值,所述丝杆穿过螺纹连接部并与螺纹连接部螺纹连接,丝杆底部设有与压力显示器电性相连的压力传感器,所述压力杆上端插入立杆内且可在立杆内部上下滑动,压力杆上端和丝杆底部的压力传感器之间连接有弹簧,所述压力杆下端转动安装有夹爪。An adjustable quartz grinding device, comprising a body, a drive device mounted on the body, the drive device being connected to a grinding disc, and characterized in that it also includes a mechanical arm, the body is provided with a support frame, the The mechanical arm is slidably installed on the support frame, and the support frame is provided with at least one spray pipe for spraying grinding liquid or cooling liquid. It is mounted on the frame and fixed with a locking device after sliding a certain distance. The sliding seat is provided with a pressure indicator, the upper end of the vertical rod is connected with the sliding seat, the vertical rod is provided with a pressure adjusting knob, and the vertical rod is provided with a pressure regulating mechanism and Threaded connection part, the pressure adjustment mechanism includes a screw rod and a gear meshed with the screw rod, the pressure adjustment knob is connected with the gear and can adjust the value displayed on the pressure display by screwing the pressure adjustment knob, and the screw rod passes through the thread The connection part is threadedly connected with the threaded connection part. The bottom of the screw rod is provided with a pressure sensor that is electrically connected to the pressure indicator. The upper end of the pressure rod is inserted into the vertical rod and can slide up and down inside the vertical rod. The upper end of the pressure rod and the bottom of the screw rod A spring is connected between the pressure sensors, and the lower end of the pressure rod is rotatably installed with a clamping claw.
  2. 如权利要求1所述的可调节式石英研磨装置,其特征在于:所述锁紧装置包括转盘、与转盘中心一体相连的螺纹杆,所述螺纹杆与滑座背面螺纹方式连接,所述锁紧装置将滑座固定在支撑架上时螺纹杆穿过滑座并抵住支撑架后背面。The adjustable quartz grinding device according to claim 1, wherein the locking device comprises a turntable and a threaded rod integrally connected with the center of the turntable, the threaded rod is threadedly connected to the back of the sliding seat, and the lock The threaded rod passes through the sliding seat and abuts the back of the supporting frame when the tightening device fixes the sliding seat on the supporting frame.
  3. 如权利要求2所述的可调节式石英研磨装置,其特征在于:所述转盘上往外延伸出一把手。The adjustable quartz grinding device of claim 2, wherein a handle extends outward from the turntable.
  4. 如权利要求1所述的可调节式石英研磨装置,其特征在于:所述夹爪上端延伸出两片平行的连接板,所述压力杆下端放置在两片连接板之间并用螺杆和螺母将压力杆和连接板相互压紧。The adjustable quartz grinding device according to claim 1, wherein two parallel connecting plates extend from the upper end of the clamping jaws, and the lower end of the pressure rod is placed between the two connecting plates and is fixed with a screw and a nut. The pressure rod and the connecting plate are pressed against each other.
  5. 如权利要求1所述的可调节式石英研磨装置,其特征在于:所述夹爪和石英产品之间设置有垫片,垫片和夹爪之间通过螺钉相连。The adjustable quartz grinding device according to claim 1, wherein a gasket is arranged between the clamping jaw and the quartz product, and the gasket and the clamping jaw are connected by screws.
  6. 如权利要求1所述的可调节式石英研磨装置,其特征在于:所述机身一侧安 装有研磨液箱,研磨液箱上安装有蠕动泵和搅拌装置,蠕动泵和喷淋管相连。Adjustable quartz grinding device as claimed in claim 1, is characterized in that: described fuselage side is equipped with grinding liquid tank, and grinding liquid tank is equipped with peristaltic pump and stirring device, and peristaltic pump is connected with spray pipe.
  7. 如权利要求6所述的可调节式石英研磨装置,其特征在于:所述研磨液箱上设有加液口,所述机身上设有排液口。The adjustable quartz grinding device according to claim 6, wherein the grinding liquid tank is provided with a liquid filling port, and the body is provided with a liquid discharge port.
  8. 如权利要求1所述的可调节式石英研磨装置,其特征在于:所述研磨盘中心处设有“十”字形标记。The adjustable quartz grinding device according to claim 1, wherein a "cross"-shaped mark is provided at the center of the grinding disc.
  9. 如权利要求1所述的可调节式石英研磨装置,其特征在于:所述机身正面设有控制开关按钮,所述滑座上设有时间显示器,所述驱动装置包括驱动电机和继电器,继电器与时间显示器电性连接,所述驱动电机的输出端和研磨盘相连。The adjustable quartz grinding device according to claim 1, characterized in that: the front of the body is provided with a control switch button, the sliding seat is provided with a time display, the driving device comprises a driving motor and a relay, and the relay It is electrically connected with the time display, and the output end of the driving motor is connected with the grinding disc.
  10. 如权利要求1至9中任一项所述的可调节式石英研磨装置,其特征在于:所述支撑架包括横杆、与横杆相连的两根竖杆,两根竖杆均为单杆或伸缩调节杆结构,竖杆与机身相连。The adjustable quartz grinding device according to any one of claims 1 to 9, wherein the support frame comprises a horizontal bar and two vertical bars connected to the horizontal bar, and the two vertical bars are single bars Or telescopic adjustment rod structure, the vertical rod is connected with the fuselage.
PCT/CN2021/076905 2021-01-22 2021-02-19 Adjustable quartz grinding device WO2022156020A1 (en)

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CN117484378A (en) * 2023-12-05 2024-02-02 苏州齐芯技术服务合伙企业(有限合伙) Double-sided grinding equipment for semiconductor silicon wafer
CN117484378B (en) * 2023-12-05 2024-05-17 苏州齐芯技术服务合伙企业(有限合伙) Double-sided grinding equipment for semiconductor silicon wafer

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