WO2022149042A1 - 表示装置、表示装置の作製方法、及び電子機器 - Google Patents

表示装置、表示装置の作製方法、及び電子機器 Download PDF

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Publication number
WO2022149042A1
WO2022149042A1 PCT/IB2021/062357 IB2021062357W WO2022149042A1 WO 2022149042 A1 WO2022149042 A1 WO 2022149042A1 IB 2021062357 W IB2021062357 W IB 2021062357W WO 2022149042 A1 WO2022149042 A1 WO 2022149042A1
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Prior art keywords
layer
light emitting
display device
insulator
transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2021/062357
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English (en)
French (fr)
Japanese (ja)
Inventor
山崎舜平
神保安弘
柳澤悠一
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to KR1020237024846A priority Critical patent/KR20230129174A/ko
Priority to JP2022573809A priority patent/JP7808054B2/ja
Priority to CN202180088514.5A priority patent/CN116710987A/zh
Priority to US18/270,770 priority patent/US20240065035A1/en
Publication of WO2022149042A1 publication Critical patent/WO2022149042A1/ja
Anticipated expiration legal-status Critical
Priority to JP2026006086A priority patent/JP2026063220A/ja
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
    • H05B33/22—Light sources with substantially two-dimensional [2D] radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
    • H05B33/26—Light sources with substantially two-dimensional [2D] radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/124—Insulating layers formed between TFT elements and OLED elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8051—Anodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8052—Cathodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8052—Cathodes
    • H10K59/80521—Cathodes characterised by their shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60—Forming conductive regions or layers, e.g. electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/873—Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/875—Arrangements for extracting light from the devices
    • H10K59/879—Arrangements for extracting light from the devices comprising refractive means, e.g. lenses

Definitions

  • One aspect of the present invention relates to a display device and a method for manufacturing the display device.
  • One aspect of the present invention relates to an electronic device.
  • one aspect of the present invention is not limited to the above technical fields.
  • the technical field of one aspect of the invention disclosed in the present specification and the like relates to a product, a method, or a manufacturing method.
  • one aspect of the invention relates to a process, machine, manufacture, or composition (composition of matter). Therefore, more specifically, the technical fields of one aspect of the present invention disclosed in the present specification include semiconductor devices, display devices, light emitting devices, power storage devices, storage devices, driving methods thereof, or manufacturing methods thereof. Can be given as an example.
  • display devices are expected to be applied to various applications.
  • applications of a large display device include a television device for home use (also referred to as a television or television receiver), digital signage (electronic signage), PID (Public Information Display), and the like. ..
  • a television device for home use also referred to as a television or television receiver
  • digital signage electronic signage
  • PID Public Information Display
  • smartphones and tablet terminals equipped with a touch panel are being developed.
  • Devices that require a high-definition display device include, for example, virtual reality (VR: Virtual Reality), augmented reality (AR: Augmented Reality), alternative reality (SR: Substitutional Reality), and mixed reality (MR: Mixed Reality). ) Is being actively developed.
  • VR Virtual Reality
  • AR Augmented Reality
  • SR Substitutional Reality
  • MR Mixed Reality
  • a light emitting device having a light emitting element As a display device, for example, a light emitting device having a light emitting element (also referred to as a light emitting device) has been developed.
  • a light emitting element also referred to as an EL element or an EL device
  • EL electroluminescence
  • Patent Document 1 discloses a display device for VR using an organic EL element (also referred to as an organic EL device).
  • One aspect of the present invention is to provide a display device for displaying a high-quality image.
  • one aspect of the present invention is to provide a display device having high light extraction efficiency.
  • one aspect of the present invention is to provide a display device having a high aperture ratio.
  • one aspect of the present invention is to provide a high-definition display device.
  • one aspect of the present invention is to provide a low-priced display device.
  • one aspect of the present invention is to provide a highly reliable display device.
  • one aspect of the present invention is to provide a new display device.
  • one aspect of the present invention is to provide a method for manufacturing a display device for displaying a high-quality image.
  • one aspect of the present invention is to provide a method for manufacturing a display device having high light extraction efficiency.
  • one aspect of the present invention is to provide a method for manufacturing a display device having a high aperture ratio.
  • one aspect of the present invention is to provide a method for manufacturing a high-definition display device.
  • one aspect of the present invention is to provide a method for manufacturing a display device having a simple process.
  • one aspect of the present invention is to provide a method for manufacturing a highly reliable display device.
  • one aspect of the present invention is to provide a method for manufacturing a new display device.
  • One aspect of the present invention has a first light emitting element, a second light emitting element, and a void
  • the first light emitting element has a first lower electrode and a first light emitting element on the first lower electrode. It has one light emitting layer and a first upper electrode on the first light emitting layer
  • the second light emitting element has a second lower electrode and a second light emitting layer on the second lower electrode.
  • a second upper electrode on the second light emitting layer, the first light emitting element and the second light emitting element are adjacent to each other, and the void is the first upper electrode and the first light emitting element.
  • the first upper electrode has a region protruding from the side surface of the first light emitting layer
  • the second upper electrode has a region protruding from the side surface of the first light emitting layer. Is a display device having a region protruding from the side surface of the second light emitting layer.
  • the distance between the side surface of the first upper electrode and the side surface of the second upper electrode may have a region of 1 ⁇ m or less.
  • the distance between the side surface of the first electron injection layer and the side surface of the second electron injection layer may have a region of 100 nm or less.
  • the void may have one or more selected from nitrogen, oxygen, carbon dioxide, and Group 18 elements.
  • the Group 18 element may have one or more selected from helium, neon, argon, xenon, and krypton.
  • the refractive index of the first light emitting layer and the refractive index of the second light emitting layer may be higher than the refractive index of the void.
  • the first light emitting element and the second light emitting element are provided on the insulating layer
  • the upper surface of the insulating layer has a region in contact with the lower surface of the void
  • the upper surface of the insulating layer is the void.
  • the thickness of the insulating layer in the region in contact with the lower surface may be thinner than the thickness of the insulating layer in the region overlapping the first light emitting layer and the thickness of the insulating layer in the region overlapping the second light emitting layer.
  • a protective layer may be provided on the first upper electrode and the second upper electrode, and the protective layer may have a region in contact with the upper surface of the void.
  • the microlens array may be provided on the protective layer.
  • the display device has a first transistor and a second transistor, and one of the source or drain of the first transistor is electrically connected to the first lower electrode.
  • One of the source or drain of the second transistor is electrically connected to the second lower electrode, and the first transistor and the second transistor each have silicon or metal oxide in the channel forming region. You may.
  • An electronic device having a display device and a lens according to an aspect of the present invention is also an aspect of the present invention.
  • one aspect of the present invention is a layer to be a first lower electrode and a second lower electrode, a layer to be a first light emitting layer and a second light emitting layer, a first upper electrode and a second light emitting layer.
  • a layer to be the upper electrode in order and processing it by the first etching, the first and second lower electrodes, the first and second light emitting layers, and the first and second upper parts are formed.
  • the electrode is formed so that the first upper electrode has a region protruding from the side surface of the first light emitting layer, and the second upper electrode has a region protruding from the side surface of the second light emitting layer.
  • the second etching may be more isotropic than the first etching.
  • a gap is provided between the first upper electrode and the first light emitting layer and the second upper electrode and the second light emitting layer.
  • a protective layer may be formed.
  • the microlens array may be formed on the protective layer.
  • a display device for displaying a high-quality image it is possible to provide a display device having high light extraction efficiency.
  • a display device having a high aperture ratio can be provided.
  • a high-definition display device can be provided.
  • a low-priced display device can be provided.
  • one aspect of the present invention can provide a highly reliable display device.
  • a novel display device can be provided by one aspect of the present invention.
  • a method for manufacturing a display device that displays a high-quality image.
  • a method for manufacturing a display device having high light extraction efficiency it is possible to provide a method for manufacturing a display device having a high aperture ratio.
  • one aspect of the present invention can provide a method for manufacturing a high-definition display device.
  • a method for manufacturing a display device having a simple process it is possible to provide a method for manufacturing a highly reliable display device.
  • a method for manufacturing a novel display device can be provided.
  • 1A and 1B are sectional views showing a configuration example of a display device.
  • 2A to 2D are sectional views showing an example of a method for manufacturing a display device.
  • 3A to 3C are sectional views showing an example of a method for manufacturing a display device.
  • FIG. 4 is a cross-sectional view showing a configuration example of the display device.
  • 5A to 5D are sectional views showing an example of a method for manufacturing a display device.
  • 6A to 6D are sectional views showing an example of a method for manufacturing a display device.
  • 7A to 7D are sectional views showing an example of a method for manufacturing a display device.
  • FIG. 8 is a cross-sectional view showing a configuration example of the display device.
  • FIG. 9 is a cross-sectional view showing a configuration example of the display device.
  • FIG. 10 is a cross-sectional view showing a configuration example of the display device.
  • 11A to 11C are sectional views showing a configuration example of a transistor.
  • FIG. 12 is a cross-sectional view showing a configuration example of the display device.
  • FIG. 13 is a cross-sectional view showing a configuration example of the display device.
  • FIG. 14 is a cross-sectional view showing a configuration example of the display device.
  • FIG. 15A is a block diagram showing a configuration example of the display device.
  • FIG. 15B is a circuit diagram showing a configuration example of pixels.
  • FIG. 16A is a top view showing a configuration example of a transistor.
  • FIG. 16B and 16C are cross-sectional views showing a configuration example of a transistor.
  • 17A to 17C are sectional views showing a configuration example of a light emitting element.
  • FIG. 18A is a diagram illustrating the classification of the crystal structure of IGZO.
  • FIG. 18B is a diagram illustrating an XRD spectrum of a CAAC-IGZO film.
  • FIG. 18C is a diagram illustrating a microelectron beam diffraction pattern of the CAAC-IGZO film.
  • 19A to 19D are diagrams showing an example of an electronic device.
  • 20A and 20B are diagrams showing an example of an electronic device.
  • the semiconductor device is a device utilizing semiconductor characteristics, and refers to a circuit including a semiconductor element (transistor, diode, photodiode, etc.), a device having the same circuit, and the like. It also refers to all devices that can function by utilizing semiconductor characteristics.
  • a semiconductor element transistor, diode, photodiode, etc.
  • the storage device, the display device, the light emitting device, the lighting device, the electronic device, and the like are themselves semiconductor devices, and may have a semiconductor device.
  • an element for example, a switch, a transistor, a capacitive element, an inductor, a resistance element, a diode, a display
  • an element for example, a switch, a transistor, a capacitive element, an inductor, a resistance element, a diode, a display
  • One or more elements, light emitting elements, loads, etc. can be connected between X and Y.
  • the switch has a function of controlling the on state and the off state. That is, the switch is in a conducting state (on state) or a non-conducting state (off state), and has a function of controlling whether or not a current flows.
  • a circuit that enables functional connection between X and Y for example, a logic circuit (inverter, NAND circuit, NOR circuit, etc.), signal conversion) Circuits (digital-analog conversion circuit, analog-digital conversion circuit, gamma correction circuit, etc.), potential level conversion circuit (power supply circuit (boost circuit, step-down circuit, etc.), level shifter circuit that changes the potential level of the signal, etc.), voltage source, current source , Switching circuit, amplifier circuit (circuit that can increase signal amplitude or current amount, operational amplifier, differential amplifier circuit, source follower circuit, buffer circuit, etc.), signal generation circuit, storage circuit, control circuit, etc.) are X and Y. It is possible to connect one or more to and from. As an example, even if another circuit is sandwiched between X and Y, if the signal output from X is transmitted to Y, it is assumed that X and Y are functionally connected. do.
  • X and Y are electrically connected, it means that X and Y are electrically connected (that is, another element between X and Y). Or when they are connected by sandwiching another circuit) and when X and Y are directly connected (that is, they are connected without sandwiching another element or another circuit between X and Y). If there is) and.
  • the circuit diagram shows that the independent components are electrically connected to each other, the case where one component has the functions of a plurality of components together.
  • one conductive film has both the function of the wiring and the function of the component of the function of the electrode. Therefore, the electrical connection in the present specification and the like includes the case where one conductive film has the functions of a plurality of components in combination.
  • the "node” can be paraphrased as a terminal, a wiring, an electrode, a conductive layer, a conductor, an impurity region, etc., depending on the circuit configuration, device structure, and the like.
  • terminals, wiring, etc. can be paraphrased as "nodes”.
  • ground potential ground potential
  • the potentials are relative, and when the reference potential changes, the potential given to the wiring, the potential applied to the circuit or the like, the potential output from the circuit or the like also changes.
  • the ordinal numbers “first”, “second”, and “third” are added to avoid confusion of the components. Therefore, the number of components is not limited. Moreover, the order of the components is not limited. For example, the component referred to in “first” in one of the embodiments of the present specification and the like is assumed to be the component referred to in “second” in another embodiment or in the scope of claims. It is possible. Further, for example, the component mentioned in “first” in one of the embodiments of the present specification and the like may be omitted in other embodiments, claims, and the like.
  • the terms indicating the arrangement such as “above”, “below”, “above”, or “below” explain the positional relationship between the components with reference to the drawings. In order to do so, it may be used for convenience. Further, the positional relationship between the constituent elements changes appropriately depending on the direction in which each configuration is depicted. Therefore, the term is not limited to the words and phrases described in the present specification and the like, and can be appropriately paraphrased according to the situation. For example, in the expression of "insulator located on the upper surface of the conductor”, it can be paraphrased as "insulator located on the lower surface of the conductor” by rotating the direction of the drawing shown by 180 degrees.
  • Electrode may be used as part of a “wiring” and vice versa.
  • the term “electrode” or “wiring” includes the case where a plurality of “electrodes” or “wiring” are integrally formed.
  • a “terminal” may be used as part of a “wiring” or “electrode” and vice versa.
  • the term “terminal” includes a case where a plurality of "electrodes", “wiring”, “terminals” and the like are integrally formed.
  • the "electrode” can be a part of “wiring” or “terminal”, and for example, “terminal” can be a part of “wiring” or “electrode”.
  • terms such as “electrode”, “wiring”, and “terminal” may be replaced with terms such as "area” in some cases.
  • parallel means a state in which two straight lines are arranged at an angle of ⁇ 10 ° or more and 10 ° or less. Therefore, the case of ⁇ 5 ° or more and 5 ° or less is also included.
  • substantially parallel or “approximately parallel” means a state in which two straight lines are arranged at an angle of -30 ° or more and 30 ° or less.
  • vertical means a state in which two straight lines are arranged at an angle of 80 ° or more and 100 ° or less. Therefore, the case of 85 ° or more and 95 ° or less is also included.
  • substantially vertical or “approximately vertical” means a state in which two straight lines are arranged at an angle of 60 ° or more and 120 ° or less.
  • a metal oxide is a metal oxide in a broad sense. Metal oxides are classified into oxide insulators, oxide conductors (including transparent oxide conductors), oxide semiconductors (also referred to as Oxide Semiconductor or simply OS) and the like. For example, when a metal oxide is used for the semiconductor layer of a transistor, the metal oxide may be referred to as an oxide semiconductor. That is, when a metal oxide can form a channel forming region of a transistor having at least one of an amplification action, a rectifying action, and a switching action, the metal oxide can be referred to as a metal oxide semiconductor. can. Further, when the term "OS transistor" is used, it can be rephrased as a transistor having a metal oxide or an oxide semiconductor.
  • a metal oxide having nitrogen may also be collectively referred to as a metal oxide. Further, the metal oxide having nitrogen may be referred to as metal oxynitride.
  • the configuration shown in each embodiment can be appropriately combined with the configuration shown in other embodiments to form one aspect of the present invention. Further, when a plurality of configuration examples are shown in one embodiment, the configuration examples can be appropriately combined with each other.
  • the void means a region containing a gas.
  • the size, layer thickness, or area may be exaggerated for clarity. Therefore, it is not necessarily limited to its size or aspect ratio.
  • the drawings schematically show ideal examples, and are not limited to the shapes, values, and the like shown in the drawings. For example, it is possible to include variations in the signal, voltage, or current due to noise, or variations in the signal, voltage, or current due to timing deviation.
  • One aspect of the present invention relates to a display device in which pixels having a light emitting element such as an organic EL element are arranged in a matrix.
  • the light emitting elements provided in the adjacent pixels are separated from each other by a gap containing a gas such as air.
  • the light emitted by the light emitting element in the oblique direction can be totally reflected by the voids. As a result, it is possible to suppress the light emitted by the light emitting element from being incident on the adjacent pixels.
  • adjacent light emitting elements light emitting elements provided in adjacent pixels are referred to as adjacent light emitting elements. The same applies to other elements provided in the pixel.
  • the light emitting element has a lower electrode, a light emitting layer on the lower electrode, and an upper electrode on the light emitting layer.
  • the lower electrode, the light emitting layer, and the upper electrode are separately provided for each light emitting element.
  • the upper electrode has a region protruding from the side surface of the light emitting layer.
  • FIG. 1A is a cross-sectional view showing a configuration example of the display device 10.
  • the display device 10 includes a transistor 11, an insulating layer 13 on the transistor 11, a light emitting element 20 on the insulating layer 13, a protective layer 43 on the light emitting element 20, a microlens array 45 on the protective layer 43, and a micro.
  • the microlens array 45, the colored layer 55R, the colored layer 55G, the colored layer 55B, and the light-shielding layer 49 are bonded to each other by the adhesive layer 47.
  • the term “element” may be paraphrased as “device”.
  • the light emitting element can be said to be a light emitting device.
  • the light emitting element 20 has a lower electrode 21, a hole injection layer 31, a light emitting layer 33, an electron injection layer 35, and an upper electrode 25.
  • the hole injection layer 31, the light emitting layer 33, and the electron injection layer 35 are collectively referred to as an EL layer 30.
  • the light emitting element 20 can be a top emission type light emitting element.
  • the lower electrode 21 has a function of reflecting visible light
  • the upper electrode 25 has a function of transmitting visible light.
  • the lower electrode 21 has a function as a pixel electrode of the display device 10.
  • the hole injection layer 31 has a material having hole injection properties.
  • a layer having a material having a hole transport property can be provided between the hole injection layer 31 and the light emitting layer 33.
  • the electron injection layer 35 has a material having electron injection properties.
  • a layer having a material having electron transportability can be provided between the light emitting layer 33 and the electron injection layer 35.
  • the hole injection layer 31 and the electron injection layer 35 may be interchanged. That is, the electron injection layer 35, the light emitting layer 33, and the hole injection layer 31 may be laminated in this order on the lower electrode 21.
  • the electron injection layer 35, the electron transport layer, the light emitting layer 33, the hole transport layer, and the hole injection layer 31 can be laminated and provided on the lower electrode 21 in this order.
  • the hole injection layer 31, the light emitting layer 33, and the electron injection layer 35 are laminated in this order on the lower electrode 21, but "hole” is read as “electron” and ". Even if the structure is such that the electron injection layer 35, the light emitting layer 33, and the hole injection layer 31 are laminated in this order on the lower electrode 21 by replacing “electrons" with "holes", the following You can refer to the explanation.
  • the lower electrode 21, the hole injection layer 31, the light emitting layer 33, the electron injection layer 35, and the upper electrode 25 can be separated for each light emitting element 20.
  • the display device 10 has a pixel 60R, a pixel 60G, and a pixel 60B.
  • the pixel 60R is provided with a colored layer 55R
  • the pixel 60G is provided with a colored layer 55G
  • the pixel 60B is provided with a colored layer 55B.
  • the light emitting layer 33 included in the pixel 60R, the light emitting layer 33 included in the pixel 60G, and the light emitting layer 33 included in the pixel 60B can emit light of the same color.
  • any of these light emitting layers 33 can emit white light.
  • the light emitting element 20 may have, for example, a single structure or a tandem structure. Details of the single structure and the tandem structure will be described later.
  • the colored layer 55 can change the hue of the transmitted light.
  • the hue of the light transmitted through the colored layer 55R may be red
  • the hue of the light transmitted through the colored layer 55G may be green
  • the hue of the light transmitted through the colored layer 55B may be blue. Can be done.
  • the colored layer 55 may have a hue such as cyan, magenta, or yellow as the hue of the transmitted light.
  • the display device 10 By providing the display device 10 with, for example, a colored layer 55R, a colored layer 55G, and a colored layer 55B, full-color display can be performed.
  • the display device 10 may have pixels 60 without the colored layer 55.
  • Examples of the material that can be used for the colored layer 55 include a metal material, a resin material, a resin material containing a pigment or a dye, and the like.
  • the transistor 11 is provided in each of the pixel 60R, the pixel 60G, and the pixel 60B.
  • the conductive layer 15 and the conductive layer 17 are embedded in the insulating layer 13, and the transistor 11 is electrically connected to the lower electrode 21 via the conductive layer 15 and the conductive layer 17.
  • the conductive layer 15 has a function as wiring, for example.
  • the conductive layer 17 has a function as a plug for electrically connecting the conductive layer 15 and the lower electrode 21, for example.
  • the wiring and the plug electrically connected to the wiring may be integrated. That is, a part of the conductive layer may function as wiring, and another part may function as a plug.
  • a light-shielding layer 49 is provided at the boundary of adjacent pixels 60. As a result, it is possible to prevent light of different colors from being mixed, so that the display device 10 can display a high-quality image.
  • the configuration in which the light-shielding layer 49 is provided is illustrated, but the present invention is not limited to this, and a configuration in which the light-shielding layer 49 is not provided may be used.
  • the protective layer 43 is formed on the upper electrode 25.
  • the protective layer 43 can be an insulating layer, and for example, an oxide film, a nitride film, or an acid nitride film can be used.
  • the oxide film may be a layer having silicon oxide, aluminum oxide, or hafnium oxide.
  • the nitride film may be a layer having silicon nitride or aluminum nitride.
  • the oxynitride film may be a layer having silicon nitride, silicon nitride, aluminum nitride, or aluminum nitride.
  • silicon oxide refers to a material having a higher oxygen content than nitrogen as its composition
  • silicon nitride as its composition means a material having a higher nitrogen content than oxygen as its composition. Is shown.
  • aluminum nitride refers to a material having a composition higher in oxygen content than nitrogen
  • aluminum nitride means a material having a composition higher in nitrogen content than oxygen. Is shown.
  • the protective layer 43 can be a semiconductor layer, for example, a layer having a metal oxide (also referred to as IGZO) containing In, Ga, and Zn.
  • the protective layer 43 can be a conductive layer, and can have, for example, a conductive material having translucency. Details will be described later, but as the translucent conductive material, for example, a conductive oxide such as indium oxide, indium tin oxide, indium zinc oxide, zinc oxide, or zinc oxide added with gallium, or graphene is used. Can be done. Further, an oxide conductor can be used as the conductive material having translucency.
  • the protective layer 43 may have a laminated structure of two or more layers.
  • it may be a laminated structure of an insulating layer and a semiconductor layer or a conductive layer, or may be a laminated structure of, for example, a layer having silicon nitride and a layer having a metal oxide.
  • the protective layer 43 may have a two-layer laminated structure in which, for example, the lower layer is a layer having silicon nitride and the upper layer is a layer having a metal oxide.
  • the protective layer 43 is preferably a layer in which impurities such as water and oxygen are difficult to diffuse, or a layer capable of capturing (also referred to as gettering) impurities such as water and oxygen. This makes it possible to prevent impurities from entering the light emitting element 20, specifically, for example, the EL layer 30. Therefore, the reliability of the display device 10 can be improved.
  • the protective layer 43 is preferably formed by a method having a low covering property, and is preferably formed by a method having a lower covering property than, for example, an atomic layer deposition (ALD) method.
  • the protective layer 43 is formed by a sputtering method or a chemical vapor deposition (CVD) method.
  • CVD chemical vapor deposition
  • FIG. 1B is an enlarged view of the region 150 shown in FIG. 1A.
  • the protective layer 43 may enter below the upper electrode 25.
  • a gap 42 may be formed so as to be surrounded by the protective layer 43 and the upper electrode 25.
  • the void 40 is suitable. Can be formed into.
  • the void 40 has one or more selected from, for example, air, nitrogen, oxygen, carbon dioxide, and Group 18 elements. Further, the void 40 may contain, for example, a gas used for film formation of the upper electrode 25. For example, when the protective layer 43 is formed by the sputtering method, the void 40 may contain a Group 18 element (typically, helium, neon, argon, xenon, krypton, etc.). When the void 40 contains a gas, the gas can be identified by a gas chromatography method or the like. Alternatively, when the upper electrode 25 is formed into a film by the sputtering method, the gas used during sputtering may be contained in the film of the upper electrode 25. In this case, when the upper electrode 25 is analyzed by energy dispersive X-ray analysis (EDX analysis) or the like, an element such as argon may be detected.
  • the void 42 can also contain a gas similar to the gas contained in the void 40.
  • the refractive index of the void 40 When the refractive index of the void 40 is lower than the refractive index of the light emitting layer 33, the refractive index of the electron injection layer 35, or the refractive index of the upper electrode 25, the light emitting layer 33 emits light, and the interface between the light emitting layer 33 and the void 40, electron injection.
  • the light 61 incident on the interface between the layer 35 and the void 40 or the interface between the upper electrode 25 and the void 40 is totally reflected.
  • the upper electrode 25 has a region 63 protruding from the side surface of the light emitting layer 33. That is, in the top view, the light emitting layer 33 is formed at a position inside the upper electrode 25.
  • the width of the gap 40 between the adjacent light emitting layers 33 can be made wider than the width of the gap 40 between the adjacent upper electrodes 25. Therefore, for example, it is possible to prevent the light emitted by the light emitting layer 33 from being easily incident on the void 40 while suppressing the void 40 from being embedded in the protective layer 43. Therefore, the display device 10 can be a display device capable of displaying a highly reliable and high-quality image.
  • the upper electrode 25 may have a region protruding from the side surface of the light emitting layer 33 and a region protruding from the side surface of the electron injection layer 35. As a result, the light emitted by the light emitting layer 33 can be easily incident on the void 40. Further, the upper electrode 25 may have a region protruding from the side surface of the hole injection layer 31 and the side surface of the lower electrode 21. For example, when the upper electrode 25 has a region protruding from the side surface of the lower electrode 21, the width of the gap 40 between the adjacent lower electrodes 21 is wider than the width of the gap 40 between the adjacent upper electrodes 25. As a result, for example, it is possible to prevent the adjacent lower electrodes 21 from coming into contact with each other inside the gap 40 and being electrically short-circuited. Therefore, the reliability of the display device 10 can be improved.
  • the gap 40 can be configured to enter the insulating layer 13.
  • the thickness of the insulating layer 13 in the region where the upper surface of the insulating layer 13 is in contact with the lower surface of the void 40 is thinner than the thickness of the insulating layer 13 in the region overlapping the light emitting layer 33.
  • the thickness of the insulating layer 13 in the region where the upper surface of the insulating layer 13 is in contact with the lower surface of the void 40 is thinner than the thickness of the insulating layer 13 in the region overlapping the lower electrode 21, the hole injection layer 31, or the electron injection layer 35. can do.
  • the microlens can collect the light emitted by the light emitting layer 33. As a result, it is possible to prevent the light from being incident on the light shielding layer 49. Therefore, the light extraction efficiency of the display device 10 can be improved. Therefore, in particular, when the user of the display device 10 looks at the display surface from the front of the display surface of the display device 10, a bright image can be visually recognized.
  • Each insulating layer is made of aluminum nitride, aluminum oxide, aluminum nitride oxide, aluminum nitride, magnesium oxide, silicon nitride, silicon oxide, silicon nitride oxide, silicon nitride nitride, gallium oxide, germanium oxide, yttrium oxide, zirconium oxide, and lanthanum oxide.
  • Neodim oxide, Hafnium oxide, Tantal oxide, Aluminum silicate, etc. are used in a single layer or in a laminated manner.
  • a material obtained by mixing a plurality of materials among an oxide material, a nitride material, an oxide nitride material, and a nitride oxide material may be used.
  • the nitride oxide refers to a compound having a higher nitrogen content than oxygen.
  • the oxidative nitride refers to a compound having a higher oxygen content than nitrogen.
  • the content of each element can be measured by using, for example, Rutherford backscattering method (RBS: Rutherford Backscattering Spectrum) or the like.
  • the surface of the insulating layer or the like may be subjected to CMP treatment.
  • CMP treatment the unevenness of the sample surface can be reduced, and the covering property of the insulating layer and the conductive layer formed after that can be improved.
  • An alloy or the like in which the above-mentioned metal elements are combined can be used.
  • a semiconductor typified by polycrystalline silicon containing an impurity element such as phosphorus, and a silicide such as nickel silicide may be used.
  • the method for forming the conductive material is not particularly limited, and various forming methods such as a vapor deposition method, a CVD method, a sputtering method, and a spin coating method can be used.
  • indium tin oxide ITO: Indium Tin Oxide
  • indium oxide containing tungsten oxide indium zinc oxide containing tungsten oxide
  • indium oxide containing titanium oxide Indium tin oxide containing titanium oxide, indium zinc oxide, indium tin oxide added with silicon oxide, and other conductive materials having oxygen can also be used.
  • a conductive material containing nitrogen such as titanium nitride, tantalum nitride, and tungsten nitride can also be used.
  • a laminated structure may be formed in which a conductive material having oxygen, a conductive material containing nitrogen, and a material containing the above-mentioned metal element are appropriately combined.
  • the conductive material that can be used for the conductive layer may be a single-layer structure or a laminated structure having two or more layers.
  • an aluminum alloy containing one or more elements selected from titanium, tantalum, tungsten, molybdenum, chromium, neodymium, and scandium may be used.
  • the lower electrode 21 is preferably formed by using a conductive material that efficiently reflects the light emitted by the light emitting layer 33.
  • the structure of the lower electrode 21 is not limited to a single layer, and may be a laminated structure of a plurality of layers.
  • the layer in contact with the hole injection layer 31 is a layer having translucency such as indium tin oxide, and a layer having high reflectance (aluminum, aluminum) in contact with the layer is used. (Containing alloy, silver, etc.) may be provided.
  • the upper electrode 25 using a conductive material having translucency, the light emitted by the light emitting layer 33 can be efficiently taken out to the outside of the display device 10.
  • Examples of the conductive material that reflects visible light include metal materials such as aluminum, gold, platinum, silver, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, or palladium, or alloys containing these metal materials. Can be used. Further, lanthanum, neodymium, germanium or the like may be added to the above metal material and / or alloy. Also, alloys containing aluminum such as alloys of aluminum and titanium, alloys of aluminum and nickel, alloys of aluminum and neodym (aluminum alloys), alloys of silver and copper, alloys of silver and palladium and copper, alloys of silver and magnesium, etc. It can be formed using an alloy containing silver.
  • metal materials such as aluminum, gold, platinum, silver, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, or palladium, or alloys containing these metal materials. Can be used. Further, lanthanum, neodymium, germanium or the
  • Alloys containing silver and copper are preferred because of their high heat resistance.
  • a metal film or an alloy film and a metal oxide film may be laminated. For example, by laminating a metal film or a metal oxide film so as to be in contact with the aluminum alloy film, oxidation of the aluminum alloy film can be suppressed.
  • Other examples of the metal film and the metal oxide film include titanium, titanium oxide and the like.
  • a light-transmitting conductive film and a film made of a metal material may be laminated. For example, a laminated film of silver and indium tin oxide, a laminated film of an alloy of silver and magnesium and indium tin oxide, and the like can be used.
  • a conductive oxide such as indium oxide, indium tin oxide, indium zinc oxide, zinc oxide, and zinc oxide to which gallium is added, or graphene can be used.
  • an oxide conductor may be applied as the conductive material having translucency.
  • a metal material such as gold, silver, platinum, magnesium, nickel, tungsten, chromium, molybdenum, iron, cobalt, copper, palladium, or titanium, and an alloy material containing the metal material can be used.
  • a nitride of the metal material for example, titanium nitride
  • the like may be used.
  • the laminated film of the above material can be used as the conductive layer.
  • a laminated film of an alloy of silver and magnesium and an indium tin oxide because the conductivity can be enhanced.
  • a conductive layer such as various wirings and electrodes constituting a display device, and a conductive layer (a conductive layer that functions as a lower electrode or an upper electrode) of a light emitting element.
  • oxide conductor which is a kind of metal oxide
  • the oxide conductor may be referred to as OC (Oxide Conductor).
  • OC Oxide Conductor
  • the oxide conductor for example, when oxygen deficiency is formed in a metal oxide (typically IGZO) which is an oxide containing at least indium or zinc and hydrogen is added to the oxygen deficiency, a donor is provided in the vicinity of the conduction band. Levels are formed. As a result, the metal oxide becomes highly conductive and becomes a conductor. A metal oxide that has been made into a conductor can be called an oxide conductor.
  • IGZO metal oxide
  • a metal oxide that has been made into a conductor can be called an oxide conductor.
  • a metal oxide (oxide semiconductor) having a function as a semiconductor has a large energy gap, and therefore has translucency with respect to visible light.
  • the oxide conductor is a metal oxide having a donor level in the vicinity of the conduction band. Therefore, the oxide conductor has a small influence of absorption by the donor level and has the same level of translucency as the oxide semiconductor with respect to visible light.
  • EL layer Either a low molecular weight compound or a high molecular weight compound can be used as the layer of the EL layer 30, and an inorganic compound may be contained.
  • the layers constituting the EL layer 30 can be formed by a method such as a thin-film deposition method (including a vacuum-film deposition method), a transfer method, a printing method, and a coating method, respectively.
  • the hole injection layer 31 included in the EL layer 30 has a material having hole transportability.
  • a material having hole transportability for example, an aromatic amine compound or an organic compound having a ⁇ -electron excess type heteroaromatic ring can be used as a material having a hole transport property.
  • a compound having an aromatic amine skeleton, a carbazole derivative, an aromatic hydrocarbon, an aromatic hydrocarbon having a vinyl group, a polymer compound (oligomer, dendrimer, polymer, etc.), etc. can be used to improve the hole transport property of the composite material. It can be used as a material to have. Further, a material having a hole mobility of 1 ⁇ 10 -6 cm 2 / Vs or more can be preferably used as a material having a hole transport property.
  • a substance having any one of a carbazole skeleton, a dibenzofuran skeleton, a dibenzothiophene skeleton and an anthracene skeleton can be preferably used as a material having a hole transport property of a composite material.
  • a substance comprising an aromatic amine having a substituent containing a dibenzofuran ring or a dibenzothiophene ring, an aromatic monoamine having a naphthalene ring, or an aromatic monoamine in which a 9-fluorenyl group is bonded to the nitrogen of the amine via an arylene group. Can be used for a material having a hole transport property of a composite material. If a substance having an N, N-bis (4-biphenyl) amino group is used, the reliability of the light emitting device can be improved.
  • the electron injection layer 35 included in the EL layer 30 has a material having electron transportability.
  • a compound having an electron-deficient complex aromatic ring and having an unshared electron pair can be used as a material having electron transportability.
  • a compound having at least one of a pyridine ring, a diazine ring (pyrimidine ring, pyrazine ring, pyridazine ring), and a triazine ring can be used.
  • the minimum empty orbital (LUMO: Lowest Unellad Molecular Orbital) of the organic compound having an unshared electron pair is -3.6 eV or more and -2.3 eV or less.
  • the highest occupied orbital (HOMO: Highest Occupied Molecular Orbital) level and LUMO level of an organic compound are generally obtained by CV (cyclic voltammetry), photoelectron spectroscopy, photoabsorption spectroscopy, backlit electron spectroscopy, etc. Can be estimated.
  • BPhen 4,7-diphenyl-1,10-phenanthroline
  • NBPhen 2,9-bis (naphthalen-2-yl) -4,7-diphenyl-1,10-phenanthroline
  • diquinoxalino [2,3-a: 2', 3'-c] Phenazine (abbreviation: HATNA), 2,4,6-tris [3'-(pyridin-3-yl) biphenyl-3-yl] -1,3 , 5-Triazine (abbreviation: TmPPPyTz) and the like can be used for an organic compound having an unshared electron pair.
  • NBPhen has a higher glass transition temperature (Tg) and is excellent in heat resistance.
  • Tg glass transition temperature
  • TmPPPyTz The chemical formulas of BPhen, NBPhen, HANTA, and TmPPPyTz described above are shown below.
  • copper phthalocyanine can be used for an organic compound having an unshared electron pair.
  • the number of electrons in copper phthalocyanine is odd.
  • the electron injection layer 35 can have a metal.
  • the electron injection layer 35 can have the organic compound having the unshared electron pair and the metal.
  • the total number of electrons of the organic compound and the number of electrons of the metal is an odd number.
  • the electron injection layer 35 preferably has NBPhen and silver.
  • the molar ratio of the metal to 1 mol of the organic compound is preferably 0.1 or more and 10 or less, more preferably 0.2 or more and 2 or less, and further preferably 0.2 or more and 0.8 or less.
  • the organic compound having an unshared electron pair can interact with the metal to form a semi-occupied orbital (SOMO: Single Occupied Molecular Orbital). Further, when electrons are injected into the electron injection layer from the upper electrode 25, the barrier between the two can be reduced. Further, since the metal has poor reactivity with water and oxygen, the moisture resistance of the light emitting element 20 can be improved.
  • SOMO Single Occupied Molecular Orbital
  • Adhesive layer 47 various curable adhesives such as a photocurable adhesive such as an ultraviolet curable type, a reaction curable adhesive, a thermosetting adhesive, and an anaerobic adhesive can be used.
  • these adhesives include epoxy resin, acrylic resin, silicone resin, phenol resin, polyimide resin, imide resin, PVC (polyvinyl chloride) resin, PVB (polyvinyl butyral) resin, EVA (ethylene vinyl acetate) resin and the like.
  • a material having low moisture permeability such as an epoxy resin is preferable.
  • a two-component mixed type resin may be used.
  • an adhesive sheet or the like may be used.
  • the light-shielding layer examples include carbon black, titanium black, metal, metal oxide, and a composite oxide containing a solid solution of a plurality of metal oxides.
  • the light-shielding layer may be a film containing a resin material or a thin film of an inorganic material such as metal.
  • a laminated film of a film containing a material of a colored layer can also be used.
  • a laminated structure of a film containing a material used for a colored layer that transmits light of a certain color and a film containing a material used for a colored layer that transmits light of another color can be used.
  • the insulating layer and semiconductor layer constituting the display device, as well as the electrode, the conductive layer for forming the wiring, etc., are a sputtering method, a CVD method, a vacuum vapor deposition method, a pulsed laser deposition (PLD) method, and the like. It can be formed by using an ALD method, a plasma ALD (PEALD: Plasma Enhanced ALD) method, or the like.
  • the CVD method may be a plasma chemical vapor deposition (PECVD) method or a thermal CVD method.
  • PECVD plasma chemical vapor deposition
  • MOCVD organometallic chemical vapor deposition
  • the insulating layer, semiconductor layer, electrodes, conductive layer for forming wiring, etc. that make up the display device include spin coating, dip, spray coating, inkjet, dispense, screen printing, offset printing, slit coating, and rolls. It may be formed by a method such as a coat, a curtain coat, or a knife coat.
  • the PECVD method provides a high quality film at a relatively low temperature.
  • a film forming method that does not use plasma at the time of film formation such as a MOCVD method, an ALD method, or a thermal CVD method
  • damage to the surface to be formed is unlikely to occur.
  • wiring, electrodes, elements (transistors, capacitive elements, etc.) and the like included in a semiconductor device may be charged up by receiving electric charges from plasma. At this time, the accumulated electric charge may destroy the wiring, electrodes, elements, etc. contained in the semiconductor device.
  • the film forming method that does not use plasma such plasma damage does not occur, so that the yield of the semiconductor device can be increased. Further, since plasma damage does not occur during film formation, a film having few defects can be obtained.
  • the film formation temperature is preferably room temperature or higher and 500 ° C. or lower, more preferably room temperature or higher and 300 ° C. or lower, and further preferably room temperature or higher and 200 ° C. or lower.
  • the oxygen gas and argon gas used as the sputtering gas are gases having a dew point of -40 ° C or lower, preferably -80 ° C or lower, more preferably -100 ° C or lower, and more preferably -120 ° C or lower. By using it, it is possible to prevent water and the like from being taken into the oxide semiconductor film as much as possible.
  • oxygen can be supplied to the cambium by using a sputtering gas containing oxygen.
  • the layer (thin film) constituting the display device When processing the layer (thin film) constituting the display device, it can be processed by using a photolithography method or the like. Alternatively, an island-shaped layer may be formed by a film forming method using a shielding mask. Alternatively, the layer may be processed by a nanoimprint method, a sandblast method, a lift-off method, or the like.
  • a photolithography method a resist mask is formed on a layer (thin film) to be processed, a resist mask is used as a mask, a part of the layer (thin film) is selectively removed, and then the resist mask is removed. There are a method and a method in which a layer having photosensitivity is formed, and then exposure and development are performed to process the layer into a desired shape.
  • i-line wavelength 365 nm
  • g-line wavelength 436 nm
  • h-line wavelength 405 nm
  • the exposure may be performed by the immersion exposure technique.
  • extreme ultraviolet light EUV: Extreme Ultra-violet
  • X-rays an electron beam can be used instead of the light used for exposure. It is preferable to use extreme ultraviolet light, X-rays, or an electron beam because extremely fine processing is possible.
  • extreme ultraviolet light, X-rays, or an electron beam because extremely fine processing is possible.
  • a dry etching method, a wet etching method, or the like can be used for removing (etching) the layer (thin film). Moreover, you may use these etching methods in combination.
  • the conductive layer 15 is formed so as to be electrically connected to the transistor 11.
  • the insulating layer 13 is formed on the transistor 11 and the conductive layer 15.
  • an opening reaching the conductive layer 15 is formed in the insulating layer 13, and the conductive layer 17 is formed in the opening (FIG. 2A).
  • a layer 21A as a lower electrode 21 As a lower electrode 21, a layer 31A as a hole injection layer 31, a layer 33A as a light emitting layer 33, and a layer 35A as an electron injection layer 35.
  • the layer 25A to be the upper electrode 25 is formed in order (FIG. 2B).
  • the layer 21A, the layer 31A, the layer 33A, the layer 35A, and the layer 25A can be formed into a film by, for example, a thin-film deposition method, a sputtering method, or the like. Not limited to this, the above-mentioned film forming method can be appropriately used.
  • a layer to be a hole transport layer is formed on the layer 31A, and then a layer 33A is formed. Further, when the electron transport layer is provided on the light emitting layer 33, the layer 33A is formed and then the layer to be the electron transport layer is formed.
  • the layer 25A, the layer 35A, the layer 33A, the layer 31A, and the layer 21A are processed by an etching method or the like. Specifically, for example, after forming a resist mask on the layer 25A, the layer 25A, the layer 35A, the layer 33A, the layer 31A, and the layer 21A are processed by an etching method or the like. Thereby, for example, an island-shaped upper electrode 25, an electron injection layer 35, a light emitting layer 33, a hole injection layer 31, and a lower electrode 21 can be formed (FIG. 2C).
  • the insulating layer 13 may also be etched when the etching is performed. As a result, the thickness of the insulating layer 13 in the region where the layer 21A overlaps the processed region may be thinner than the thickness of the insulating layer 13 in the region where the layer 21A overlaps the lower electrode 21.
  • one aspect of the present invention can be a method for manufacturing a display device having high productivity.
  • the distance between adjacent light emitting elements 20 can be reduced to 20 ⁇ m or less.
  • the distance between adjacent electron injection layers 35 can be 20 ⁇ m or less.
  • the distance between the adjacent light emitting elements 20 can be set to 0.5 ⁇ m or more and 15 ⁇ m or less, preferably 0.5 ⁇ m or more and 10 ⁇ m or less, and more preferably 0.5 ⁇ m or more and 5 ⁇ m or less. Therefore, it is possible to improve the pixel aperture ratio, increase the definition, reduce the size, and the like.
  • a device manufactured by using a metal mask or an FMM may be referred to as a device having an MM (metal mask) structure.
  • a device manufactured without using a metal mask or FMM may be referred to as a device having an MML (metal maskless) structure.
  • the distance between the light emitting elements 20 is 100 nm or less, typically 90 nm or less, it is necessary to use an optimum exposure apparatus.
  • the exposure device for example, a stepper, a scanner, or the like can be used.
  • the wavelengths of the light sources that can be used in the exposure apparatus are 13 nm (EUV), 157 nm (F2), 193 nm (ArF), 248 nm (KrF), 308 nm (XeCl), 365 nm (i-line), and 436 nm (g). Line) and the like.
  • the electron injection layer 35, the light emitting layer 33, the hole injection layer 31, and the lower electrode 21 are etched in the horizontal direction.
  • the upper electrode 25 has a region 63 protruding from the side surface of the light emitting layer 33 or the like (FIG. 2D).
  • Etching in the horizontal direction can be performed by, for example, highly isotropic etching.
  • the etching of the layer 25A, the layer 35A, the layer 33A, the layer 31A, and the layer 21A shown in FIGS. 2B to 2C is referred to as a first etching
  • the etching shown in FIGS. 2C to 2D is referred to as a second etching.
  • the second etching has a lower anisotropy than the first etching, that is, a method having a high isotropic property.
  • the layer 25A, the layer 35A, the layer 33A, the layer 31A, and the layer 21A are etched by the first etching
  • the layer 25A, the layer 35A, the layer 33A, the layer 31A, and the layer 21A are collectively. It does not have to be etched.
  • the etching conditions may be different for each layer to be etched. Even in such a case, the layer 25A, the layer 35A, the layer 33A, the layer 31A, and the layer 21A are all said to be etched by the first etching. The same applies to the second and subsequent etchings and the like.
  • the insulating layer 13 may also be etched in the horizontal direction by etching the electron injection layer 35, the light emitting layer 33, the hole injection layer 31, and the lower electrode 21 in the horizontal direction. Further, the hole injection layer 31 and the lower electrode 21 do not have to be etched in the horizontal direction. In this case, the insulating layer 13 may not be etched in the horizontal direction. Further, the electron injection layer 35 does not have to be etched in the horizontal direction.
  • the protective layer 43 is formed.
  • the protective layer 43 is preferably formed by a method having a low covering property, and is preferably formed by a method having a lower covering property than, for example, the ALD method.
  • the protective layer 43 is formed by a sputtering method or a CVD method. As a result, the opening that separates the adjacent light emitting elements 20 is not covered by the protective layer 43, and a gap 40 is formed (FIG. 3A).
  • the microlens array 45 is formed on the protective layer 43 (FIG. 3B).
  • the microlens array 45 can be formed by, for example, forming a resist pattern by a photolithography method and then performing heat treatment to reflow the resist.
  • the substrate 53 is prepared, the insulating layer 51 is formed on the substrate 53, the light-shielding layer 49 is formed on the insulating layer 51, and then the colored layer 55R and the colored layer are formed on the insulating layer 51 and the light-shielding layer 49. It forms 55G and a colored layer 55B (FIG. 3C).
  • an adhesive layer 47 is formed on the colored layer 55R, the colored layer 55G, the colored layer 55B, and the light-shielding layer 49, and the microlens array 45, the colored layer 55, and the light-shielding layer 49 are attached by the adhesive layer 47. to paste together.
  • the adhesive layer 47 can be formed by a screen printing method, a dispensing method, or the like. From the above, the display device 10 shown in FIG. 1A can be manufactured.
  • FIG. 4 is a cross-sectional view showing a configuration example of the display device 10, and is a modification of the display device 10 shown in FIG. 1A.
  • the display device 10 shown in FIG. 4 is different from the display device 10 shown in FIG. 1A in that the colored layer 55 is not provided on the pixel 60.
  • the pixel 60R is provided with the light emitting layer 33R
  • the pixel 60G is provided with the light emitting layer 33G
  • the pixel 60B is provided with the light emitting layer 33B.
  • the light emitting element 20 having the light emitting layer 33R is referred to as a light emitting element 20R
  • the light emitting element 20 having the light emitting layer 33G is referred to as a light emitting element 20G
  • the light emitting element 20 having the light emitting layer 33B is referred to as a light emitting element 20B.
  • the light emitting layer 33R, the light emitting layer 33G, and the light emitting layer 33B can each have a function of emitting light of different colors.
  • the light emitting layer 33R has a function of emitting red light
  • the light emitting layer 33G has a function of emitting green light
  • the light emitting layer 33B has a function of emitting blue light.
  • the light emitting layer 33R, the light emitting layer 33G, and the light emitting layer 33B may have a function of emitting light of a color such as cyan, magenta, or yellow.
  • FIG. 1A shows three types of light emitting layers 33, the display device 10 may have four or more types of light emitting layers 33.
  • the display device 10 has a light emitting layer 33R that emits red light, a light emitting layer 33G that emits green light, a light emitting layer 33B that emits blue light, and a light emitting layer that emits white light. You may.
  • a structure in which the light emitting layer 33R, the light emitting layer 33G, and the light emitting layer 33B emit light of different colors is said to have an SBS (Side By Side) structure for the light emitting element 20.
  • SBS ide By Side
  • the power consumption of the display device 10 can be reduced as compared with the case where all the light emitting layers 33 emit light of the same color.
  • Example of manufacturing method of display device _2> an example of a method for manufacturing the display device 10 shown in FIG. 4 will be described with reference to the drawings. The steps common to the example of the manufacturing method of the display device 10 shown in FIG. 1A will be omitted as appropriate.
  • the layers up to 31A are formed by the same method as shown in FIGS. 2A and 2B.
  • a layer 33RA to be a light emitting layer 33R is formed (FIG. 5A).
  • the layer 33RA can be formed by the same film forming method as the layer 33A.
  • a layer to be a hole transport layer is formed on the layer 31A, and then a layer 33RA is formed.
  • the layer 33RA is formed and then the layer to be the electron transport layer is formed.
  • a layer 140A is formed on the layer 33RA (FIG. 5B).
  • the layer 140A is formed by using a wet film forming method such as spin coating, dipping, spray coating, inkjet, dispensing, screen printing, offset printing, doctor knife method, slit coating, roll coating, curtain coating, and knife coating. be able to.
  • a film forming method other than this may be used, and the above film forming method can be appropriately used, including the vapor deposition method.
  • the layer 140A it is preferable to use a material that can be dissolved in a chemically stable solvent.
  • a material that is soluble in water or alcohol can be suitably used for layer 140A.
  • the layer 140A it is preferable that the layer 140A is dissolved in a solvent such as water or alcohol, applied by the above-mentioned wet film forming method, and then heat-treated to evaporate the solvent. At this time, by performing the heat treatment in a reduced pressure atmosphere, the solvent can be removed at a low temperature and in a short time, so that thermal damage to the layer 33RA can be reduced, which is preferable.
  • an organic material such as polyvinyl alcohol (PVA), polyvinyl butyral, polyvinylpyrrolidone, polyethylene glycol, polyglycerin, purulan, water-soluble cellulose, or alcohol-soluble polyamide resin can be used.
  • PVA polyvinyl alcohol
  • polyvinyl butyral polyvinylpyrrolidone
  • polyethylene glycol polyglycerin
  • purulan polyethylene glycol
  • water-soluble cellulose water-soluble cellulose
  • alcohol-soluble polyamide resin water-soluble polyamide resin
  • the layer 140A, the layer 33RA, and the layer 31A are processed by an etching method or the like. Specifically, for example, after forming a resist mask on the layer 140A, the layer 140A, the layer 33RA, and the layer 31A are processed by an etching method or the like. Thereby, for example, an island-shaped sacrificial layer 140, a light emitting layer 33R, and a hole injection layer 31 can be formed (FIG. 5C). That is, the layer 140A is a layer that becomes a sacrificial layer 140 on the light emitting layer 33R.
  • a layer 31B to be a hole injection layer 31, a layer 33GA to be a light emitting layer 33G, and a layer 140B are formed on the layer 21A and the sacrificial layer 140 (FIG. 5D).
  • the layer 31B can be formed by the same film forming method as the layer 31A
  • the layer 33GA can be formed by the same forming method as the layer 33RA
  • the layer 140B can be formed by the same forming method as the layer 140A.
  • the layer 140B can have the same material as the layer 140A.
  • the layer 140B, the layer 33GA, and the layer 31B are processed by an etching method or the like. Specifically, for example, after forming a resist mask on the layer 140B, the layer 140B, the layer 33GA, and the layer 31B are processed by an etching method or the like. Thereby, for example, an island-shaped sacrificial layer 140, a light emitting layer 33G, and a hole injection layer 31 can be formed (FIG. 6A). That is, the layer 140B is a layer that becomes a sacrificial layer 140 on the light emitting layer 33G.
  • a layer 31C to be a hole injection layer 31, a layer 33BA to be a light emitting layer 33B, and a layer 140C are formed on the layer 21A and the sacrificial layer 140 (FIG. 6B).
  • the layer 31C can be formed by the same film forming method as the layer 31A
  • the layer 33BA can be formed by the same forming method as the layer 33RA
  • the layer 140C can be formed by the same forming method as the layer 140A.
  • the layer 140C can have the same material as the layer 140A.
  • the layer 140C, the layer 33BA, and the layer 31C are processed by an etching method or the like. Specifically, for example, after forming a resist mask on the layer 140C, the layer 140C, the layer 33BA, and the layer 31C are processed by an etching method or the like. Thereby, for example, an island-shaped sacrificial layer 140, a light emitting layer 33B, and a hole injection layer 31 can be formed (FIG. 6C). That is, the layer 140C is a layer that becomes a sacrificial layer 140 on the light emitting layer 33B.
  • the sacrificial layer 140 is removed to expose the upper surfaces of the light emitting layer 33R, the light emitting layer 33G, and the light emitting layer 33B (FIG. 6D).
  • the sacrificial layer 140 can be removed by an etching method. At this time, it is preferable to use a method that does not damage the light emitting layer 33R, the light emitting layer 33G, and the light emitting layer 33B as much as possible. In particular, it is preferable to remove the sacrificial layer 140 by dissolving it in a solvent such as water or alcohol.
  • a solvent such as water or alcohol.
  • the alcohol capable of dissolving the sacrificial layer 140 various alcohols such as ethyl alcohol, methyl alcohol, isopropyl alcohol (IPA), and glycerin can be used.
  • a drying treatment in order to remove the water contained in the light emitting layer 33R, the light emitting layer 33G, and the light emitting layer 33B, and the water adsorbed on the surface.
  • a drying treatment in order to remove the water contained in the light emitting layer 33R, the light emitting layer 33G, and the light emitting layer 33B, and the water adsorbed on the surface.
  • the heat treatment can be performed at a substrate temperature of 50 ° C. or higher and 200 ° C. or lower, preferably 60 ° C. or higher and 120 ° C. or lower, and more preferably 70 ° C. or higher and 100 ° C. or lower.
  • a reduced pressure atmosphere because it can be dried at a lower temperature.
  • the light emitting layer 33R, the light emitting layer 33G, and the light emitting layer 33B can be made separately.
  • a metal mask specifically, a fine metal mask is not used. Therefore, one aspect of the present invention can be a method for manufacturing a display device having high productivity.
  • the light emitting layer 33 does not necessarily have to be formed in the order of the light emitting layer 33R, the light emitting layer 33G, and the light emitting layer 33B, and can be formed in any order. For example, the light emitting layer 33B may be formed, then the light emitting layer 33G may be formed, and then the light emitting layer 33R may be formed.
  • the distance between adjacent light emitting elements 20 can be reduced to 20 ⁇ m or less.
  • the distance between adjacent electron injection layers 35 can be 20 ⁇ m or less.
  • the distance between the adjacent light emitting elements 20 can be set to 0.5 ⁇ m or more and 15 ⁇ m or less, preferably 0.5 ⁇ m or more and 10 ⁇ m or less, and more preferably 0.5 ⁇ m or more and 5 ⁇ m or less. Therefore, it is possible to improve the pixel aperture ratio, increase the definition, reduce the size, and the like.
  • the distance between the light emitting elements 20 is 100 nm or less, typically 90 nm or less, it is necessary to use an optimum exposure apparatus.
  • the exposure device for example, a stepper, a scanner, or the like can be used.
  • the wavelengths of the light sources that can be used in the exposure apparatus are 13 nm (EUV), 157 nm (F2), 193 nm (ArF), 248 nm (KrF), 308 nm (XeCl), 365 nm (i-line), and 436 nm (g). Line) and the like.
  • a layer 35A to be an electron injection layer 35 and a layer 25A to be an upper electrode 25 are formed on the light emitting layer 33R, the light emitting layer 33G, the light emitting layer 33B, and the layer 21A (FIG. 7A).
  • the layer 35A and the layer 25A can be formed into a film by, for example, a vapor deposition method, a sputtering method, or the like. Not limited to this, the above-mentioned film forming method can be appropriately used.
  • the layer 25A, the layer 35A, and the layer 21A are processed by an etching method or the like.
  • the layer 25A, the layer 35A, and the layer 21A are processed by an etching method or the like.
  • an island-shaped upper electrode 25, an electron injection layer 35, and a lower electrode 21 can be formed (FIG. 7B).
  • the insulating layer 13 may also be etched. As a result, the thickness of the insulating layer 13 in the region where the layer 21A overlaps the processed region may be thinner than the thickness of the insulating layer 13 in the region where the layer 21A overlaps the lower electrode 21.
  • the electron injection layer 35, the light emitting layer 33, the hole injection layer 31, and the lower electrode 21 are horizontally etched by the same method as shown in FIG. 2D.
  • the protective layer 43 and the microlens array 45 are formed by the same method as shown in FIGS. 3A and 3B (FIG. 7C).
  • the void 40 is formed by forming the protective layer 43.
  • the substrate 53 is prepared, the insulating layer 51 is formed on the substrate 53, and the light-shielding layer 49 is formed on the insulating layer 51 (FIG. 7D).
  • the adhesive layer 47 is formed on the insulating layer 51 and the light-shielding layer 49, and the microlens array 45 and the insulating layer 51 and the light-shielding layer 49 are bonded to each other by the adhesive layer 47.
  • the adhesive layer 47 can be formed by a screen printing method, a dispensing method, or the like. From the above, the display device 10 shown in FIG. 4 can be manufactured.
  • FIG. 8 is a cross-sectional view showing a configuration example of the display device 10, and is a modification of the display device 10 shown in FIG. 1A.
  • the display device 10 shown in FIG. 8 is different from the display device 10 shown in FIG. 1A in that it does not have the microlens array 45. Since the display device 10 does not have the microlens array 45, the manufacturing process of the display device 10 can be simplified. Therefore, the manufacturing cost of the display device 10 can be lowered and the yield can be increased. From the above, the price of the display device 10 can be reduced. It should be noted that the display device 10 shown in FIGS. 4 and other than FIG. 1A can also be configured not to have the microlens array 45.
  • FIG. 9 is a cross-sectional view showing a configuration example of the display device 10, and is a modification of the display device 10 shown in FIG. 1A.
  • the display device 10 shown in FIG. 9 is different from the display device 10 shown in FIG. 1A in that the partition wall 19 is provided on the insulating layer 13.
  • the partition wall 19 can be, for example, an insulating layer.
  • the partition wall 19 is provided between the adjacent pixels 60 and is provided so as to cover the end portion of the lower electrode 21.
  • the hole injection layer 31 is provided on the lower electrode 21 and the partition wall 19.
  • the hole injection layer 31, the light emitting layer 33, and the electron injection layer 35 do not have to have a region overlapping with the partition wall 19.
  • the upper electrode 25 does not have to have a region overlapping with the partition wall 19.
  • the partition wall 19 By providing the partition wall 19, it is possible to suppress an electrical short circuit that may occur between the adjacent lower electrodes 21 and the like.
  • the aperture ratio can be increased.
  • the aperture ratio of the pixels can be 70% or more, preferably 80% or more, and more preferably 90% or more.
  • a part of the partition wall 19 may be etched when the layer to be the hole injection layer 31 is etched in an island shape, for example. Further, when the electron injection layer 35, the light emitting layer 33, and the hole injection layer 31 are etched in the horizontal direction, the partition wall 19 may also be etched in the horizontal direction. As described above, the gap 40 can be configured to enter the partition wall 19.
  • the lower electrode 21 is not etched in the horizontal direction. Since the display device 10 shown in FIG. 9 is provided with a partition wall 19, for example, even if a part of the upper electrode 25 enters the gap 40, the upper electrode 25 and the lower electrode 21 come into contact with each other inside the gap 40 and electrically. There is no short circuit.
  • FIG. 10 is a cross-sectional view showing a configuration example of the display device 10.
  • FIG. 10 is a cross-sectional view showing a configuration example of a layer below the insulating layer 13 of the display device 10 shown in FIG. 1A.
  • the display device 10 has a transistor 80 on the substrate 81 and an element separation layer 86. Further, an insulating layer 131, an insulating layer 133, an insulating layer 135, and an insulating layer 137 are provided on the substrate 81.
  • the display device 10 has an insulating layer 71 on the insulating layer 137 and an insulating layer 13 on the insulating layer 71.
  • FIG. 10 illustrates a configuration in which the insulating layer 71 is provided, the present invention is not limited to this.
  • the insulating layer 13 may be provided on the insulating layer 137 without providing the insulating layer 71.
  • the display device 10 has a conductive layer 67 and a conductive layer 69.
  • the conductive layer 67 is embedded in the insulating layer 131, the insulating layer 133, the insulating layer 135, and the insulating layer 137, and the conductive layer 69 is embedded in the insulating layer 71.
  • the height of the conductive layer 67 and the height of the insulating layer 137 can be made the same, and the height of the conductive layer 69 and the height of the insulating layer 71 can be made the same.
  • the light emitting element 20 and the transistor 80 are provided in a laminated manner.
  • the layer on which the light emitting element 20 is provided is referred to as a layer 121
  • the layer on which the transistor 80 is provided is referred to as a layer 125.
  • the transistor 80 is provided in each of the pixel 60R, the pixel 60G, and the pixel 60B.
  • One of the source and drain of the transistor 80 passes through the conductive layer 67, the conductive layer 69, the conductive layer 15, and the conductive layer 17, and is the lower electrode 21 of the light emitting element 20R, the lower electrode 21 of the light emitting element 20G, or the light emitting. It is electrically connected to the lower electrode 21 of the element 20B. That is, in the display device 10 shown in FIG. 10, the transistor 80 corresponds to the transistor 11 shown in FIG. 1A and the like.
  • the conductive layer 69 has a function as a plug for electrically connecting the conductive layer 67 and the conductive layer 15, for example.
  • the layer 125 may be provided with a transistor included in a drive circuit such as a scanning line drive circuit.
  • the transistor 80 can be a transistor (Si transistor) having silicon in the channel forming region.
  • the silicon contained in the Si transistor can be single crystal silicon, polycrystalline silicon (polysilicon), amorphous silicon (amorphous silicon), or the like.
  • the channel forming region of the transistor 80 is preferably formed of single crystal silicon.
  • the transistor 80 has a conductive layer 82 having a function as a gate electrode, an insulating layer 83 having a function as a gate insulating layer, and a part of a substrate 81. Further, the transistor 80 has a low resistance region 85a having a function as one of a semiconductor region including a channel forming region, a source region or a drain region, and a low resistance region 85b having a function as the other of the source region or the drain region. ..
  • the transistor 80 may be either a p-channel type or an n-channel type. Alternatively, the transistor 80 may be a so-called CMOS (Complementary Metal Oxide Semiconductor) transistor in which an n-channel type transistor and a p-channel type transistor are combined.
  • CMOS Complementary Metal Oxide Semiconductor
  • the transistor 80 is electrically separated from other transistors by the element separation layer 86.
  • FIG. 10 shows a case where the transistors 80 are electrically separated from each other by the element separation layer 86.
  • the element separation layer 86 can be formed by using a LOCOS (LOCO Xidation of Silicon) method, an STI (Shallow Trench Isolation) method, or the like.
  • FIG. 11A is a cross-sectional view showing a configuration example of the transistor 80 shown in FIG. 10 in the channel width direction (A1-A2 direction).
  • the transistor 80 has a convex shape in the semiconductor region. Further, the side surface and the upper surface of the semiconductor region are provided so as to be covered with the conductive layer 82 via the insulating layer 83. A material for adjusting the work function can be used for the conductive layer 82.
  • Transistors having a convex shape in the semiconductor region are called fin-type transistors because they utilize the convex portions of the semiconductor substrate.
  • it may have an insulator which is in contact with the upper part of the convex portion and has a function as a mask for forming the convex portion.
  • FIG. 10 shows a configuration in which a part of the substrate 81 is processed to form a convex portion
  • an SOI (Silicon On Insulator) substrate may be processed to form a semiconductor having a convex shape.
  • FIG. 11B and 11C are cross-sectional views showing a configuration example of the transistor 80 in the channel length direction, and is a modification of the transistor 80 shown in FIG.
  • the transistor 80 shown in FIG. 11B is different from the transistor 80 shown in FIG. 10 in that it is a planar type transistor.
  • the configuration shown in FIG. 11C is different from the configuration shown in FIG. 10 in that the insulating layer 88 is provided on the substrate 81 and the transistor 80 is provided on the insulating layer 88.
  • the transistor 80 shown in FIG. 11C has a semiconductor layer 87.
  • the semiconductor layer 87 can be a thin film, for example, a thin film having silicon.
  • the semiconductor layer 87 can be a thin film having amorphous silicon or low-temperature polysilicon.
  • the semiconductor layer 87 can be a single crystal silicon (SOI) formed on the insulating layer 88.
  • SOI single crystal silicon
  • the insulating layer 131, the insulating layer 133, the insulating layer 135, the insulating layer 137, and the insulating layer 71 shown in FIG. 10 have a function as an interlayer film.
  • the insulating layer 131, the insulating layer 133, the insulating layer 135, the insulating layer 137, and the insulating layer 71 may have a function as a flattening layer that covers the uneven shape below each of them.
  • the materials used for the substrate 81 and the substrate 53 there are no major restrictions on the materials used for the substrate 81 and the substrate 53. Depending on the purpose, it may be determined in consideration of the presence or absence of translucency and the heat resistance to the extent that it can withstand the heat treatment.
  • glass substrates such as barium borosilicate glass and aluminoborosilicate glass, ceramic substrates, quartz substrates, sapphire substrates and the like can be used.
  • a semiconductor substrate, a flexible substrate (flexible substrate), a laminated film, a base film, or the like may be used.
  • the semiconductor substrate examples include a semiconductor substrate made of silicon, germanium, or the like, or a compound semiconductor substrate made of silicon carbide, silicon germanium, gallium arsenide, indium phosphide, zinc oxide, or gallium oxide. .. Further, the semiconductor substrate may be a single crystal semiconductor or a polycrystalline semiconductor.
  • a flexible substrate flexible substrate
  • a laminated film a base film, or the like may be used for the substrate 81 and the substrate 53.
  • polyester resins such as polyethylene terephthalate (PET) and polyethylene naphthalate (PEN), polyacrylonitrile resins, acrylic resins, polyimide resins, and polymethylmethacrylates.
  • Resin polycarbonate (PC) resin, polyether sulfone (PES) resin, polyamide resin (nylon, aramid, etc.), polysiloxane resin, cycloolefin resin, polystyrene resin, polyamideimide resin, polyurethane resin, polyvinyl chloride resin, polychloride Vinylidene resin, polypropylene resin, polytetrafluoroethylene (PTFE) resin, ABS resin, cellulose nanofibers and the like can be used.
  • PC polycarbonate
  • PES polyether sulfone
  • polyamide resin nylon, aramid, etc.
  • polysiloxane resin cycloolefin resin
  • polystyrene resin polyamideimide resin
  • polyurethane resin polyurethane resin
  • polyvinyl chloride resin polychloride Vinylidene resin
  • polypropylene resin polytetrafluoroethylene (PTFE) resin
  • PTFE polytetrafluoroethylene
  • a lightweight display device can be provided. Further, by using the above material as the substrate, it is possible to provide a display device that is strong against impact. Further, by using the above material as the substrate, it is possible to provide a display device that is not easily damaged.
  • the flexible substrate used for the substrate 81 and the substrate 53 As for the flexible substrate used for the substrate 81 and the substrate 53, the lower the coefficient of linear expansion, the more the deformation due to the environment is suppressed, which is preferable.
  • the flexible substrate used for the substrate 81 and the substrate 53 is made of, for example, a material having a linear expansion coefficient of 1 ⁇ 10 -3 / K or less, 5 ⁇ 10 -5 / K or less, or 1 ⁇ 10 -5 / K or less. It may be used.
  • aramid is preferable as a flexible substrate because it has a low coefficient of linear expansion.
  • FIG. 12 is a cross-sectional view showing a configuration example of the display device 10, and is a modification of the display device 10 shown in FIG.
  • the display device 10 shown in FIG. 12 is different from the display device 10 shown in FIG. 10 in that the layer 123 is provided between the layers 121 and 125.
  • a transistor 70 is provided on the layer 123.
  • the transistor 70 is provided in each of the pixel 60R, the pixel 60G, and the pixel 60B.
  • one of the source and drain of the transistor 70 is the lower electrode 21 of the light emitting element 20R, the lower electrode 21 of the light emitting element 20G, or the lower electrode 21 of the light emitting element 20G via the conductive layer 15 and the conductive layer 17. It is electrically connected to the lower electrode 21 of the light emitting element 20B. That is, in the display device 10 shown in FIG. 10, the transistor 70 corresponds to the transistor 11 shown in FIG. 1A and the like.
  • the transistor 70 can be a transistor (OS transistor) having a metal oxide in the channel forming region.
  • the metal oxide contained in the OS transistor preferably contains at least indium or zinc. In particular, it is preferable to contain indium and zinc. Moreover, in addition to them, it is preferable that aluminum, gallium, yttrium, tin and the like are contained. Further, one or more kinds selected from boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, tungsten, magnesium, cobalt and the like may be contained.
  • FIG. 13 is a cross-sectional view showing a configuration example of the display device 10.
  • FIG. 13 shows a sealing material 91, a connection electrode 93, an anisotropic conductive layer 95, an FPC (Flexible Printed Circuit) 97, and the like. Is shown.
  • the substrate 53 and the insulating layer 13 are bonded to each other by the sealing material 91.
  • a connection electrode 93 is provided on the insulating layer 13 and the conductive layer 17 so as to be electrically connected to one of the source and drain of the transistor 80.
  • the anisotropic conductive layer 95 is provided so as to be electrically connected to the connection electrode 93
  • the FPC 97 is provided so as to be electrically connected to the anisotropic conductive layer 95.
  • Various signals and the like are supplied to the display device 10 from the outside of the display device 10 by the FPC 97.
  • the sealing material 91 may be omitted, and the FPC 97 may be wire bonding.
  • FIG. 14 is a cross-sectional view showing a configuration example of the display device 10, and is a modification of the display device 10 shown in FIG.
  • the display device 10 shown in FIG. 14 is different from the display device 10 shown in FIG. 13 in that it has a transistor 70 that can be an OS transistor or the like.
  • FIG. 15A is a block diagram showing a configuration example of the display device 10.
  • the display device 10 includes a display unit 100, a scanning line drive circuit 101, and a data line drive circuit 103. Pixels 60 are arranged in a matrix on the display unit 100.
  • the scanning line driving circuit 101 and the data line driving circuit 103 can be configured to include the transistor 80.
  • the scanning line drive circuit 101 is electrically connected to the pixel 60 via the wiring 105.
  • the data line drive circuit 103 is electrically connected to the pixel 60 via the wiring 107.
  • the wiring 105 and the wiring 107 can be configured to extend in orthogonal directions.
  • the scanning line drive circuit 101 has a function of generating a selection signal for selecting a pixel 60 for writing image data.
  • the data line drive circuit 103 has a function of generating a signal (data signal) representing image data.
  • the selection signal is supplied to the pixel 60 via the wiring 105, and the data signal is supplied to the pixel 60 via the wiring 107.
  • FIG. 15B is a circuit diagram showing a configuration example of the pixel 60.
  • the pixel 60 has a light emitting element 20 and a pixel circuit 110.
  • the pixel circuit 110 includes a transistor 111, a transistor 11, a transistor 113, and a capacitance 115. Further, the pixel circuit 110 is electrically connected to one electrode of the light emitting element 20. As described above, the transistor 11 can be the transistor 80 shown in FIG. 10 or the like, or the transistor 70 shown in FIG. 12 or the like.
  • One of the source or drain of the transistor 111 is electrically connected to the gate of the transistor 11.
  • the gate of the transistor 11 is electrically connected to one electrode of the capacitance 115.
  • One of the source or drain of the transistor 11 is electrically connected to one of the source or drain of the transistor 113.
  • One of the source or drain of the transistor 113 is electrically connected to the other electrode of the capacitance 115.
  • the other electrode of the capacitance 115 is electrically connected to one electrode of the light emitting device 20.
  • a node in which one of the source or drain of the transistor 111, the gate of the transistor 11 and one electrode of the capacitance 115 are electrically connected is referred to as a node 117.
  • a node in which one of the source or drain of the transistor 11, one of the source or drain of the transistor 113, the other electrode of the capacitance 115, and one electrode of the light emitting element 20 are electrically connected is connected to the node 119. And.
  • the other of the source or drain of the transistor 111 is electrically connected to the wiring 107.
  • the gate of the transistor 111 and the gate of the transistor 113 are electrically connected to the wiring 105.
  • the other of the source or drain of the transistor 11 is electrically connected to the potential supply line VL_a.
  • the other of the source or drain of the transistor 113 is electrically connected to the potential supply line VL0.
  • the other electrode of the light emitting element 20 is electrically connected to the potential supply line VL_b.
  • the transistor 111 has a function of controlling writing of image data to the node 117.
  • the capacity 115 has a function as a holding capacity for holding the data written in the node 117.
  • the pixel circuit 110 of each row is sequentially selected by the scanning line drive circuit 101, and the image data is written to the node 117 with the transistor 111 and the transistor 113 turned on.
  • the pixel circuit 110 in which the image data is written in the node 117 is in a holding state when the transistor 111 and the transistor 113 are turned off. Further, the amount of current flowing between the drain and the source of the transistor 11 is controlled according to the potential of the node 119, and the light emitting element 20 emits light with the brightness corresponding to the current amount. By performing this sequentially line by line, an image can be displayed on the display unit 100.
  • ⁇ Transistor configuration example> 16A, 16B, and 16C are top views and sectional views of the transistor 70 and the periphery of the transistor 70.
  • FIG. 16A is a top view of the transistor 70.
  • 16B and 16C are cross-sectional views of the transistor 70.
  • FIG. 16B is a cross-sectional view of the portion shown by the alternate long and short dash line of X1-X2 in FIG. 16A, and is also a cross-sectional view of the transistor 70 in the channel length direction.
  • FIG. 16C is a cross-sectional view of the portion shown by the alternate long and short dash line of Y1-Y2 in FIG. 16A, and is also a cross-sectional view of the transistor 70 in the channel width direction.
  • some elements are omitted for the sake of clarity of the figure.
  • the conductor 70 has a metal oxide 230a arranged on a substrate (not shown) and a metal oxide 230b arranged on the metal oxide 230a. And the conductor 242a and the conductor 242b arranged apart from each other on the metal oxide 230b, and the conductor 242a and the conductor 242b arranged on the conductor 242a and the conductor 242b, and an opening between the conductor 242a and the conductor 242b.
  • the upper surface of the conductor 260 substantially coincides with the upper surfaces of the insulator 250, the insulator 254, the metal oxide 230c, and the insulator 280.
  • the metal oxide 230a, the metal oxide 230b, and the metal oxide 230c may be collectively referred to as the metal oxide 230.
  • the conductor 242a and the conductor 242b may be collectively referred to as a conductor 242.
  • the side surfaces of the conductor 242a and the conductor 242b on the conductor 260 side have a substantially vertical shape.
  • the transistor 70 shown in FIG. 16B is not limited to this, and the angle formed by the side surface and the bottom surface of the conductor 242a and the conductor 242b is 10 ° or more and 80 ° or less, preferably 30 ° or more and 60 ° or less. May be. Further, the opposing side surfaces of the conductor 242a and the conductor 242b may have a plurality of surfaces.
  • the insulator 254 includes a side surface of the metal oxide 230c, an upper surface and a side surface of the conductor 242a, an upper surface and a side surface of the conductor 242b, and the metal oxide 230a and the metal oxide 230b. It is preferable to be in contact with the side surface of the insulator and the upper surface of the insulator 224.
  • the transistor 70 has a configuration in which three layers of a metal oxide 230a, a metal oxide 230b, and a metal oxide 230c are laminated in a region where a channel is formed (hereinafter, also referred to as a channel formation region) and in the vicinity thereof.
  • a two-layer structure of the metal oxide 230b and the metal oxide 230c, or a laminated structure of four or more layers may be provided.
  • the conductor 260 is shown as a two-layer laminated structure, but the present invention is not limited to this.
  • the conductor 260 may have a single-layer structure or a laminated structure of three or more layers.
  • each of the metal oxide 230a, the metal oxide 230b, and the metal oxide 230c may have a laminated structure of two or more layers.
  • the metal oxide 230c has a laminated structure consisting of a first metal oxide and a second metal oxide on the first metal oxide
  • the first metal oxide is the metal oxide 230b. It has a similar composition
  • the second metal oxide preferably has the same composition as the metal oxide 230a.
  • the conductor 260 functions as a gate electrode of the transistor, and the conductor 242a and the conductor 242b function as a source electrode or a drain electrode, respectively.
  • the conductor 260 is formed so as to be embedded in the opening of the insulator 280 and the region sandwiched between the conductor 242a and the conductor 242b.
  • the arrangement of the conductor 260, the conductor 242a, and the conductor 242b is selected in a self-aligned manner with respect to the opening of the insulator 280. That is, in the transistor 70, the gate electrode can be arranged in a self-aligned manner between the source electrode and the drain electrode. Therefore, since the conductor 260 can be formed without providing the alignment margin, the occupied area of the transistor 70 can be reduced. As a result, the display device can be made high-definition. Further, the display device can be made into a narrow frame.
  • the conductor 260 has a conductor 260a provided inside the insulator 250 and a conductor 260b provided so as to be embedded inside the conductor 260a. Is preferable.
  • the transistor 70 includes an insulator 214 arranged on a substrate (not shown), an insulator 216 arranged on the insulator 214, and a conductor 205 arranged so as to be embedded in the insulator 216. It is preferable to have an insulator 222 arranged on the insulator 216 and the conductor 205, and an insulator 224 arranged on the insulator 222. It is preferable that the metal oxide 230a is arranged on the insulator 224.
  • the insulator 274 that functions as an interlayer film and the insulator 281 are arranged on the transistor 70.
  • the insulator 274 is arranged in contact with the upper surface of the conductor 260, the insulator 250, the insulator 254, the metal oxide 230c, and the insulator 280.
  • the insulator 222, the insulator 254, and the insulator 274 have a function of suppressing the diffusion of hydrogen (for example, at least one of a hydrogen atom, a hydrogen molecule, etc.).
  • the insulator 222, the insulator 254, and the insulator 274 preferably have lower hydrogen permeability than the insulator 224, the insulator 250, and the insulator 280.
  • the insulator 222 and the insulator 254 have a function of suppressing the diffusion of oxygen (for example, at least one of an oxygen atom and an oxygen molecule).
  • the insulator 222 and the insulator 254 preferably have lower oxygen permeability than the insulator 224, the insulator 250, and the insulator 280.
  • the insulator 224, the metal oxide 230, and the insulator 250 are separated from the insulator 280 and the insulator 281 by the insulator 254 and the insulator 274. Therefore, in the insulator 224, the metal oxide 230, and the insulator 250, impurities such as hydrogen contained in the insulator 280 and the insulator 281 or excess oxygen are present in the insulator 224, the metal oxide 230a, and the metal oxide. It is possible to suppress contamination with 230b and the insulator 250.
  • a conductor 240 (conductor 240a and conductor 240b) that is electrically connected to the transistor 70 and functions as a plug is provided.
  • An insulator 241 (insulator 241a and insulator 241b) is provided in contact with the side surface of the conductor 240 that functions as a plug. That is, the insulator 241 is provided in contact with the inner wall of the opening of the insulator 254, the insulator 280, the insulator 274, and the insulator 281. Further, the first conductor of the conductor 240 may be provided in contact with the side surface of the insulator 241 and the second conductor of the conductor 240 may be further provided inside.
  • the height of the upper surface of the conductor 240 and the height of the upper surface of the insulator 281 can be made equal to each other.
  • the transistor 70 shows a configuration in which the first conductor of the conductor 240 and the second conductor of the conductor 240 are laminated, but the present invention is not limited to this.
  • the conductor 240 may be provided as a single layer or a laminated structure having three or more layers. When the structure has a laminated structure, an ordinal number may be given in the order of formation to distinguish them.
  • the transistor 70 is a metal oxide 230 (metal oxide 230a, metal oxide 230b, and metal oxide 230c) containing a channel forming region, and a metal oxide (hereinafter, also referred to as an oxide semiconductor) that functions as an oxide semiconductor. ) Is preferably used.
  • a metal oxide serving as the channel forming region of the metal oxide 230, it is preferable to use a metal oxide having a band gap of 2 eV or more, preferably 2.5 eV or more.
  • the metal oxide preferably contains at least indium (In) or zinc (Zn). In particular, it is preferable to contain indium (In) and zinc (Zn). Further, in addition to these, it is preferable that the element M is contained.
  • Elements M include aluminum (Al), gallium (Ga), yttrium (Y), tin (Sn), boron (B), titanium (Ti), iron (Fe), nickel (Ni), germanium (Ge), and zirconium.
  • Zr molybdenum
  • Mo lanthanum
  • La cerium
  • Ce neodymium
  • Hf hafnium
  • the element M is preferably one or more of aluminum (Al), gallium (Ga), yttrium (Y), or tin (Sn). Further, it is more preferable that the element M has either one or both of Ga and Sn.
  • the film thickness of the region of the metal oxide 230b that does not overlap with the conductor 242 may be thinner than the film thickness of the region that overlaps with the conductor 242. This is formed by removing a part of the upper surface of the metal oxide 230b when forming the conductor 242a and the conductor 242b.
  • a region having low resistance may be formed in the vicinity of the interface with the conductive film. As described above, by removing the region having low resistance located between the conductor 242a and the conductor 242b on the upper surface of the metal oxide 230b, it is possible to prevent the formation of a channel in the region.
  • a display device having a transistor having a small size and a high definition it is possible to provide a display device having a transistor having a large on-current and a high luminance. Alternatively, it is possible to provide a display device having a fast-moving transistor and a fast-moving display device. Alternatively, it is possible to provide a highly reliable display device having a transistor having stable electrical characteristics. Alternatively, it is possible to provide a display device having a transistor having a small off current and low power consumption.
  • transistor 70 A detailed configuration of the transistor 70 that can be used in the display device according to one aspect of the present invention will be described.
  • the conductor 205 is arranged so as to have a region overlapping with the metal oxide 230 and the conductor 260. Further, it is preferable that the conductor 205 is embedded in the insulator 216.
  • the conductor 205 has a conductor 205a, a conductor 205b, and a conductor 205c.
  • the conductor 205a is provided in contact with the bottom surface and the side wall of the opening provided in the insulator 216.
  • the conductor 205b is provided so as to be embedded in the recess formed in the conductor 205a.
  • the upper surface of the conductor 205b is lower than the upper surface of the conductor 205a and the upper surface of the insulator 216.
  • the conductor 205c is provided in contact with the upper surface of the conductor 205b and the side surface of the conductor 205a.
  • the height of the upper surface of the conductor 205c substantially coincides with the height of the upper surface of the conductor 205a and the height of the upper surface of the insulator 216. That is, the conductor 205b is wrapped in the conductor 205a and the conductor 205c.
  • the conductor 205a and the conductor 205c have a function of suppressing diffusion of impurities such as hydrogen atom, hydrogen molecule, water molecule, nitrogen atom, nitrogen molecule, nitrogen oxide molecule ( N2O, NO, NO2 , etc.) and copper atom. It is preferable to use a conductive material having. Alternatively, it is preferable to use a conductive material having a function of suppressing the diffusion of oxygen (for example, at least one such as an oxygen atom and an oxygen molecule).
  • impurities such as hydrogen contained in the conductor 205b are removed from the metal oxide 230 via the insulator 224 and the like. It can be suppressed from spreading to hydrogen. Further, by using a conductive material having a function of suppressing the diffusion of oxygen for the conductor 205a and the conductor 205c, it is possible to prevent the conductor 205b from being oxidized and the conductivity from being lowered.
  • the conductive material having a function of suppressing the diffusion of oxygen for example, titanium, titanium nitride, tantalum, tantalum nitride, ruthenium, ruthenium oxide and the like are preferably used. Therefore, as the conductor 205a, the above-mentioned conductive material may be a single layer or a laminated material. For example, titanium nitride may be used for the conductor 205a.
  • a conductive material containing tungsten, copper, or aluminum as a main component for the conductor 205b.
  • tungsten may be used for the conductor 205b.
  • the conductor 260 may function as a first gate (also referred to as a top gate) electrode.
  • the conductor 205 may function as a second gate (also referred to as a bottom gate) electrode.
  • the Vth of the transistor 70 can be controlled by changing the potential applied to the conductor 205 independently without interlocking with the potential applied to the conductor 260.
  • a negative potential to the conductor 205, it is possible to make the Vth of the transistor 70 larger than 0V and reduce the off-current. Therefore, when a negative potential is applied to the conductor 205, the drain current when the potential applied to the conductor 260 is 0 V can be made smaller than when it is not applied.
  • the conductor 205 may be provided larger than the channel forming region in the metal oxide 230.
  • the conductor 205 is also stretched in a region outside the end portion intersecting the channel width direction of the metal oxide 230. That is, it is preferable that the conductor 205 and the conductor 260 are superimposed via an insulator on the outside of the side surface of the metal oxide 230 in the channel width direction.
  • the channel forming region of the metal oxide 230 is formed by the electric field of the conductor 260 having the function as the first gate electrode and the electric field of the conductor 205 having the function as the second gate electrode. Can be electrically surrounded.
  • the conductor 205 is stretched to function as wiring.
  • the present invention is not limited to this, and a conductor that functions as wiring may be provided under the conductor 205.
  • the insulator 214 preferably functions as a barrier insulating film that prevents impurities such as water and hydrogen from being mixed into the transistor 70 from the substrate side. Therefore, the insulator 214 has a function of suppressing the diffusion of impurities such as hydrogen atom, hydrogen molecule, water molecule, nitrogen atom, nitrogen molecule, nitrogen oxide molecule ( N2 O, NO, NO 2 , etc.) and copper atom. (It is difficult for the above impurities to permeate.) It is preferable to use an insulating material. Alternatively, it is preferable to use an insulating material having a function of suppressing the diffusion of oxygen (for example, at least one such as an oxygen atom and an oxygen molecule) (the above oxygen is difficult to permeate).
  • the insulator 214 it is preferable to use aluminum oxide, silicon nitride, or the like as the insulator 214. This makes it possible to prevent impurities such as water and hydrogen from diffusing from the substrate side to the transistor 70 side of the insulator 214. Alternatively, oxygen contained in the insulator 224 or the like can be suppressed from diffusing toward the substrate side of the insulator 214.
  • the insulator 216, the insulator 280, and the insulator 281 that function as the interlayer film preferably have a lower dielectric constant than the insulator 214.
  • a material having a low dielectric constant as an interlayer film, it is possible to reduce the parasitic capacitance generated between the wirings.
  • silicon oxide, silicon oxide nitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine was added, silicon oxide to which carbon was added, carbon, and nitrogen were added. Silicon oxide, silicon oxide having pores, or the like may be appropriately used.
  • the insulator 222 and the insulator 224 have a function as a gate insulator.
  • the insulator 224 in contact with the metal oxide 230 desorbs oxygen by heating.
  • oxygen released by heating may be referred to as excess oxygen.
  • silicon oxide, silicon nitride, or the like may be appropriately used for the insulator 224.
  • an oxide material in which a part of oxygen is desorbed by heating is an oxide having an oxygen desorption amount of 1.0 ⁇ 10 18 atoms / cm 3 or more, preferably 1
  • the surface temperature of the film during the TDS analysis is preferably in the range of 100 ° C. or higher and 700 ° C. or lower, or 100 ° C. or higher and 400 ° C. or lower.
  • the film thickness of the region of the insulator 224 that does not overlap with the insulator 254 and does not overlap with the metal oxide 230b may be thinner than the film thickness of the other regions.
  • the film thickness of the region that does not overlap with the insulator 254 and does not overlap with the metal oxide 230b is preferably a film thickness that can sufficiently diffuse the oxygen.
  • the insulator 222 preferably functions as a barrier insulating film that prevents impurities such as water and hydrogen from being mixed into the transistor 70 from the substrate side.
  • the insulator 222 preferably has a lower hydrogen permeability than the insulator 224.
  • the insulator 222 has a function of suppressing the diffusion of oxygen (for example, at least one of an oxygen atom and an oxygen molecule) (the oxygen is difficult to permeate).
  • the insulator 222 preferably has a lower oxygen permeability than the insulator 224. Since the insulator 222 has a function of suppressing the diffusion of oxygen or impurities, it is possible to reduce the diffusion of oxygen contained in the metal oxide 230 toward the substrate side, which is preferable. Further, it is possible to suppress the conductor 205 from reacting with the oxygen contained in the insulator 224 or the oxygen contained in the metal oxide 230.
  • the insulator 222 it is preferable to use an insulator containing oxides of one or both of aluminum and hafnium, which are insulating materials.
  • an insulator containing an oxide of one or both of aluminum and hafnium it is preferable to use aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate) and the like.
  • the insulator 222 releases oxygen from the metal oxide 230 and mixes impurities such as hydrogen from the peripheral portion of the transistor 70 into the metal oxide 230. It functions as a suppressing layer.
  • aluminum oxide, bismuth oxide, germanium oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttrium oxide, and zirconium oxide may be added to these insulators.
  • these insulators may be nitrided. Silicon oxide, silicon nitride or silicon nitride may be laminated and used on the above-mentioned insulator.
  • the insulator 222 is, for example, so-called high such as aluminum oxide, hafnium oxide, tantalum oxide, zirconate oxide, lead zirconate titanate (PZT), strontium titanate (SrTiO 3 ) or (Ba, Sr) TiO 3 (BST). Insulators containing the ⁇ k material may be used in a single layer or laminated. As the miniaturization and high integration of transistors progress, problems such as leakage current may occur due to the thinning of the gate insulator. By using a high-k material for an insulator that functions as a gate insulator, it is possible to reduce the gate potential during transistor operation while maintaining the physical film thickness.
  • the insulator 222 and the insulator 224 may have a laminated structure of two or more layers.
  • the laminated structure is not limited to the same material, and may be a laminated structure made of different materials.
  • an insulator similar to the insulator 224 may be provided under the insulator 222.
  • the metal oxide 230 has a metal oxide 230a, a metal oxide 230b on the metal oxide 230a, and a metal oxide 230c on the metal oxide 230b.
  • the metal oxide 230a under the metal oxide 230b, it is possible to suppress the diffusion of impurities from the structure formed below the metal oxide 230a to the metal oxide 230b.
  • the metal oxide 230c on the metal oxide 230b, it is possible to suppress the diffusion of impurities from the structure formed above the metal oxide 230c to the metal oxide 230b.
  • the metal oxide 230 preferably has a laminated structure of a plurality of oxide layers having different atomic number ratios of each metal atom.
  • the number of the elements M contained in the metal oxide 230a is the same as the number of atoms of all the elements constituting the metal oxide 230a.
  • the ratio is preferably higher than the ratio of the number of atoms of the element M contained in the metal oxide 230b to the number of atoms of all the elements constituting the metal oxide 230b.
  • the atomic number ratio of the element M contained in the metal oxide 230a to In is larger than the atomic number ratio of the element M contained in the metal oxide 230b to In.
  • the metal oxide 230c a metal oxide that can be used for the metal oxide 230a or the metal oxide 230b can be used.
  • the energy at the lower end of the conduction band of the metal oxide 230a and the metal oxide 230c is higher than the energy at the lower end of the conduction band of the metal oxide 230b.
  • the electron affinity of the metal oxide 230a and the metal oxide 230c is smaller than the electron affinity of the metal oxide 230b.
  • the metal oxide 230c it is preferable to use a metal oxide that can be used for the metal oxide 230a.
  • the ratio of the number of atoms of the element M contained in the metal oxide 230c to the number of atoms of all the elements constituting the metal oxide 230c is the metal with respect to the number of atoms of all the elements constituting the metal oxide 230b. It is preferably higher than the ratio of the number of atoms of the element M contained in the oxide 230b. Further, it is preferable that the atomic number ratio of the element M contained in the metal oxide 230c to In is larger than the atomic number ratio of the element M contained in the metal oxide 230b to In.
  • the energy level at the lower end of the conduction band changes gently.
  • the energy level at the lower end of the conduction band at the junction of the metal oxide 230a, the metal oxide 230b, and the metal oxide 230c is continuously changed or continuously bonded.
  • the metal oxide 230a and the metal oxide 230b, and the metal oxide 230b and the metal oxide 230c have a common element (main component) other than oxygen, so that the defect level density is low.
  • a mixed layer can be formed.
  • the metal oxide 230b is an In-Ga-Zn oxide, In-Ga-Zn oxide, Ga-Zn oxide, gallium oxide or the like may be used as the metal oxide 230a and the metal oxide 230c. ..
  • the metal oxide 230c may have a laminated structure.
  • a laminated structure with gallium oxide can be used.
  • the laminated structure of the In-Ga-Zn oxide and the oxide containing no In may be used as the metal oxide 230c.
  • the metal oxide 230c has a laminated structure
  • the main path of the carrier is the metal oxide 230b.
  • the defect level density at the interface between the metal oxide 230a and the metal oxide 230b and the interface between the metal oxide 230b and the metal oxide 230c can be determined. Can be lowered. Therefore, the influence of interfacial scattering on carrier conduction is reduced, and the transistor 70 can obtain high on-current and high frequency characteristics.
  • the constituent elements of the metal oxide 230c are It is expected to suppress diffusion to the insulator 250 side.
  • the metal oxide 230c has a laminated structure and the oxide containing no In is positioned above the laminated structure, In that can be diffused to the insulator 250 side can be suppressed. Since the insulator 250 functions as a gate insulator, if In is diffused, the characteristics of the transistor become poor. Therefore, by forming the metal oxide 230c in a laminated structure, it is possible to provide a highly reliable display device.
  • a conductor 242 (conductor 242a and conductor 242b) that functions as a source electrode and a drain electrode is provided on the metal oxide 230b.
  • the conductor 242 aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, ruthenium, iridium, strontium, lanthanum. It is preferable to use a metal element selected from the above, an alloy containing the above-mentioned metal element as a component, an alloy in which the above-mentioned metal element is combined, or the like.
  • tantalum nitride, titanium nitride, tungsten, a nitride containing titanium and aluminum, a nitride containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, an oxide containing strontium and ruthenium, an oxide containing lanthanum and nickel, and the like are used. Is preferable.
  • tantalum nitride, titanium nitride, nitrides containing titanium and aluminum, nitrides containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, oxides containing strontium and ruthenium, and oxides containing lanthanum and nickel are difficult to oxidize. It is preferable because it is a conductive material or a material that maintains conductivity even if it absorbs oxygen.
  • the oxygen concentration may be reduced in the vicinity of the conductor 242 of the metal oxide 230. Further, in the vicinity of the conductor 242 of the metal oxide 230, a metal compound layer containing the metal contained in the conductor 242 and the component of the metal oxide 230 may be formed. In such a case, the carrier density increases in the region near the conductor 242 of the metal oxide 230, and the region becomes a low resistance region.
  • the region between the conductor 242a and the conductor 242b is formed so as to overlap with the opening of the insulator 280.
  • the conductor 260 can be arranged in a self-aligned manner between the conductor 242a and the conductor 242b.
  • the insulator 250 functions as a gate insulator.
  • the insulator 250 is preferably arranged in contact with the upper surface of the metal oxide 230c.
  • the insulator 250 uses silicon oxide, silicon oxide nitride, silicon nitride oxide, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, and silicon oxide having holes. be able to.
  • silicon oxide and silicon nitride nitride are preferable because they are stable against heat.
  • the insulator 250 preferably has a reduced concentration of impurities such as water or hydrogen in the insulator 250.
  • the film thickness of the insulator 250 is preferably 1 nm or more and 20 nm or less.
  • a metal oxide may be provided between the insulator 250 and the conductor 260.
  • the metal oxide preferably suppresses oxygen diffusion from the insulator 250 to the conductor 260. As a result, the oxidation of the conductor 260 by oxygen of the insulator 250 can be suppressed.
  • the metal oxide may function as part of the gate insulator. Therefore, when silicon oxide, silicon oxynitride, or the like is used for the insulator 250, it is preferable to use a metal oxide which is a high-k material having a high relative permittivity.
  • a metal oxide which is a high-k material having a high relative permittivity.
  • metal oxides selected from hafnium, aluminum, gallium, ittrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, magnesium and the like.
  • metal oxides selected from hafnium, aluminum, gallium, ittrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, magnesium and the like.
  • the conductor 260 is shown as a two-layer structure in FIGS. 16B and 16C, it may have a single-layer structure or a laminated structure of three or more layers.
  • the conductor 260a has the above-mentioned function of suppressing the diffusion of impurities such as hydrogen atom, hydrogen molecule, water molecule, nitrogen atom, nitrogen molecule, nitrogen oxide molecule ( N2O, NO, NO2 , etc.) and copper atom. It is preferable to use a conductor having the same. Alternatively, it is preferable to use a conductive material having a function of suppressing the diffusion of oxygen (for example, at least one such as an oxygen atom and an oxygen molecule).
  • the conductor 260a has a function of suppressing the diffusion of oxygen, it is possible to prevent the conductor 260b from being oxidized by the oxygen contained in the insulator 250 and the conductivity from being lowered.
  • the conductive material having a function of suppressing the diffusion of oxygen for example, tantalum, tantalum nitride, ruthenium, ruthenium oxide and the like are preferably used.
  • the conductor 260b it is preferable to use a conductive material containing tungsten, copper, or aluminum as a main component. Further, since the conductor 260 also functions as wiring, it is preferable to use a conductor having high conductivity. For example, a conductive material containing tungsten, copper, or aluminum as a main component can be used. Further, the conductor 260b may have a laminated structure, for example, a laminated structure of titanium or titanium nitride and the conductive material.
  • the insulator 254 preferably functions as a barrier insulating film that prevents impurities such as water and hydrogen from being mixed into the transistor 70 from the insulator 280 side.
  • the insulator 254 preferably has a lower hydrogen permeability than the insulator 224.
  • the insulator 254 is a side surface of the metal oxide 230c, an upper surface and a side surface of the conductor 242a, an upper surface and a side surface of the conductor 242b, and a metal oxide 230a and a metal oxide 230b. It is preferable to be in contact with the side surface and the upper surface of the insulator 224.
  • the insulator 254 has a function of suppressing the diffusion of oxygen (for example, at least one of an oxygen atom and an oxygen molecule) (the oxygen is difficult to permeate).
  • the insulator 254 preferably has lower oxygen permeability than the insulator 280 or the insulator 224.
  • the insulator 254 is preferably formed by a sputtering method.
  • oxygen can be added to the vicinity of the region of the insulator 224 in contact with the insulator 254. Thereby, oxygen can be supplied from the region into the metal oxide 230 via the insulator 224.
  • the insulator 254 has a function of suppressing the diffusion of oxygen upward, it is possible to prevent oxygen from diffusing from the metal oxide 230 to the insulator 280.
  • the insulator 222 has a function of suppressing the diffusion of oxygen downward, it is possible to prevent oxygen from diffusing from the metal oxide 230 toward the substrate side. In this way, oxygen is supplied to the channel forming region of the metal oxide 230. As a result, the oxygen deficiency of the metal oxide 230 can be reduced and the normalization of the transistor can be suppressed.
  • an insulator containing an oxide of one or both of aluminum and hafnium may be formed.
  • the insulator containing one or both oxides of aluminum and hafnium it is preferable to use aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate) and the like.
  • the insulator 280 is made of the insulator 224, the metal oxide 230, by the insulator 254. And isolated from the insulator 250. As a result, impurities such as hydrogen can be suppressed from entering from the outside of the transistor 70, so that good electrical characteristics and reliability can be given to the transistor 70.
  • the insulator 280 is provided on the insulator 224, the metal oxide 230, and the conductor 242 via the insulator 254.
  • silicon oxide, silicon oxide nitride, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, silicon oxide to which carbon and nitrogen are added, silicon oxide having holes, and the like are used as the insulator 280. It is preferable to have.
  • silicon oxide and silicon nitride nitride are preferable because they are thermally stable.
  • materials such as silicon oxide, silicon oxide nitride, and silicon oxide having pores are preferable because they can easily form a region containing oxygen desorbed by heating.
  • the concentration of impurities such as water or hydrogen in the insulator 280 is reduced. Further, the upper surface of the insulator 280 may be flattened.
  • the insulator 274 preferably functions as a barrier insulating film that prevents impurities such as water and hydrogen from being mixed into the insulator 280 from above.
  • the insulator 274 for example, an insulator that can be used for the insulator 214, the insulator 254, and the like may be used.
  • the insulator 281 that functions as an interlayer film on the insulator 274.
  • the insulator 281 preferably has a reduced concentration of impurities such as water and hydrogen in the membrane.
  • the conductor 240a and the conductor 240b are arranged in the openings formed in the insulator 281, the insulator 274, the insulator 280, and the insulator 254.
  • the conductor 240a and the conductor 240b are provided so as to face each other with the conductor 260 interposed therebetween.
  • the upper surfaces of the conductor 240a and the conductor 240b may be flush with the upper surface of the insulator 281.
  • the insulator 241a is provided in contact with the inner wall of the opening of the insulator 281, the insulator 274, the insulator 280, and the insulator 254, and the first conductor of the conductor 240a is formed in contact with the side surface thereof. ing.
  • a conductor 242a is located at least a part of the bottom of the opening, and the conductor 240a is in contact with the conductor 242a.
  • the insulator 241b is provided in contact with the inner wall of the opening of the insulator 281, the insulator 274, the insulator 280, and the insulator 254, and the first conductor of the conductor 240b is formed in contact with the side surface thereof.
  • the conductor 242b is located at least a part of the bottom of the opening, and the conductor 240b is in contact with the conductor 242b.
  • the conductor 240a and the conductor 240b it is preferable to use a conductive material containing tungsten, copper, or aluminum as a main component. Further, the conductor 240a and the conductor 240b may have a laminated structure.
  • the conductor 240 has a laminated structure
  • the above-mentioned water is used as the conductor in contact with the metal oxide 230a, the metal oxide 230b, the conductor 242, the insulator 254, the insulator 280, the insulator 274, and the insulator 281.
  • a conductor having a function of suppressing the diffusion of impurities such as hydrogen For example, tantalum, tantalum nitride, titanium, titanium nitride, ruthenium, ruthenium oxide and the like are preferably used.
  • the conductive material having a function of suppressing the diffusion of impurities such as water or hydrogen may be used in a single layer or in a laminated state.
  • the conductive material By using the conductive material, it is possible to suppress the oxygen added to the insulator 280 from being absorbed by the conductor 240a and the conductor 240b. Further, it is possible to prevent impurities such as water or hydrogen from being mixed into the metal oxide 230 from the layer above the insulator 281 through the conductor 240a and the conductor 240b.
  • the insulator 241a and the insulator 241b for example, an insulator that can be used for the insulator 254 or the like may be used. Since the insulator 241a and the insulator 241b are provided in contact with the insulator 254, impurities such as water or hydrogen from the insulator 280 and the like are suppressed from being mixed into the metal oxide 230 through the conductor 240a and the conductor 240b. can. Further, it is possible to suppress the oxygen contained in the insulator 280 from being absorbed by the conductor 240a and the conductor 240b.
  • a conductor that functions as wiring may be arranged in contact with the upper surface of the conductor 240a and the upper surface of the conductor 240b.
  • the conductor functioning as wiring it is preferable to use a conductive material containing tungsten, copper, or aluminum as a main component.
  • the conductor may have a laminated structure, for example, titanium or titanium nitride may be laminated with the conductive material.
  • the conductor may be formed so as to be embedded in an opening provided in the insulator.
  • the EL layer 30 included in the light emitting element 20 can be composed of a plurality of layers such as a hole injection layer 31, a light emitting layer 33, and an electron injection layer 35, as shown in FIG. 17A.
  • a configuration in which the hole injection layer 31, the light emitting layer 33, and the electron injection layer 35 are provided between the lower electrode 21 and the upper electrode 25 can function as a single light emitting unit, which is shown in the present specification.
  • the configuration of 17A is called a single structure.
  • a configuration in which a plurality of light emitting layers (for example, light emitting layer 33a, light emitting layer 33b, and light emitting layer 33c) are provided between the electron injection layer 35 and the hole injection layer 31 is also a variation of the single structure. Is.
  • FIG. 17C a configuration in which a plurality of light emitting units (for example, EL layer 30a and EL layer 30b) are connected in series via an intermediate layer (charge generation layer) 37 is referred to as a tandem structure in the present specification. ..
  • FIG. 17C shows a configuration in which the EL layer 30a has a light emitting layer 33d and the EL layer 30b has a light emitting layer 33e.
  • the configuration as shown in FIG. 17C is referred to as a tandem structure, but the structure is not limited to this, and for example, the tandem structure may be referred to as a stack structure.
  • the tandem structure can be used as a light emitting element capable of high-luminance light emission.
  • the power consumption can be reduced in the order of the SBS structure, the tandem structure, and the single structure.
  • the SBS structure When it is desired to keep the power consumption of the display device of one aspect of the present invention low, it is preferable to use the SBS structure.
  • the single structure and the tandem structure have a simpler manufacturing process than the SBS structure. Therefore, the manufacturing cost of the display device according to one aspect of the present invention can be reduced, and the yield can be increased. From the above, it is possible to reduce the price of a display device of one aspect of the display device.
  • the emission color of the light emitting element 20 may be red, green, blue, cyan, magenta, yellow, white, or the like, depending on the material constituting the EL layer 30. Further, the color purity can be further improved by imparting the microcavity structure to the light emitting element 20.
  • the light emitting element that emits white light is preferably configured to contain two or more kinds of light emitting substances in the light emitting layer.
  • a light emitting substance may be selected so that the light emission of each of the two or more light emitting substances has a complementary color relationship.
  • the light emitting layer preferably contains two or more kinds of light emitting substances such as R (red), G (green), B (blue), Y (yellow), and O (orange).
  • the light emitting element 20 shown in FIG. 17B is white.
  • the light emitting element 20 shown in FIG. 17C can emit white light.
  • This embodiment can be carried out in combination with at least a part thereof as appropriate in combination with other embodiments described in the present specification.
  • FIG. 18A is a diagram illustrating the classification of the crystal structure of an oxide semiconductor, typically IGZO (a metal oxide containing In, Ga, and Zn).
  • IGZO a metal oxide containing In, Ga, and Zn
  • oxide semiconductors are roughly classified into “Amorphous”, “Crystalline”, and “Crystal”.
  • Amorphous includes “completable amorphous”.
  • Crystalline includes CAAC (c-axis-aligned crystalline), nc (nanocrystalline), and CAC (cloud-aligned composite).
  • single crystal, poly crystal, and compactry amorphous are excluded from the classification of “Crystalline” (excluding single crystal and poly crystal).
  • “Crystal” includes single crystal and poly crystal.
  • the structure in the thick frame shown in FIG. 18A is an intermediate state between "Amorphous” and “Crystal", and belongs to a new boundary region (New crystal line phase). .. That is, the structure can be rephrased as a structure completely different from the energetically unstable "Amorphous” and "Crystal".
  • the crystal structure of the film or substrate can be evaluated using an X-ray diffraction (XRD: X-Ray Diffraction) spectrum.
  • XRD X-ray diffraction
  • the XRD spectrum obtained by the GIXD (Glazing-Incidence XRD) measurement of the CAAC-IGZO film classified as "Crystalline" is shown in FIG. 18B.
  • the horizontal axis is 2 ⁇ [deg. ]
  • the vertical axis is Integrity [a. u. ].
  • the GIXD method is also referred to as a thin film method or a Seemann-Bohlin method.
  • the XRD spectrum obtained by the GIXD measurement shown in FIG. 18B is simply referred to as an XRD spectrum.
  • the horizontal axis is 2 ⁇ [deg. ], And the vertical axis is intensity [a. u. ].
  • a peak showing clear crystallinity is detected in the XRD spectrum of the CAAC-IGZO film.
  • the crystal structure of the film or substrate can be evaluated by a diffraction pattern (also referred to as a microelectron diffraction pattern) observed by a micro electron diffraction method (NBED: Nano Beam Electron Diffraction).
  • the diffraction pattern of the CAAC-IGZO film is shown in FIG. 18C.
  • FIG. 18C is a diffraction pattern observed by the NBED in which the electron beam is incident parallel to the substrate.
  • electron beam diffraction is performed with the probe diameter set to 1 nm.
  • oxide semiconductors When focusing on the crystal structure, oxide semiconductors may be classified differently from FIG. 18A. For example, oxide semiconductors are divided into single crystal oxide semiconductors and other non-single crystal oxide semiconductors. Examples of the non-single crystal oxide semiconductor include the above-mentioned CAAC-OS and nc-OS. Further, the non-single crystal oxide semiconductor includes a polycrystal oxide semiconductor, a pseudo-amorphous oxide semiconductor (a-like OS: atomous-like oxide semiconductor), an amorphous oxide semiconductor, and the like.
  • CAAC-OS CAAC-OS
  • nc-OS nc-OS
  • a-like OS the details of the above-mentioned CAAC-OS, nc-OS, and a-like OS will be described.
  • CAAC-OS is an oxide semiconductor having a plurality of crystal regions, the plurality of crystal regions having the c-axis oriented in a specific direction.
  • the specific direction is the thickness direction of the CAAC-OS film, the normal direction of the surface to be formed of the CAAC-OS film, or the normal direction of the surface of the CAAC-OS film.
  • the crystal region is a region having periodicity in the atomic arrangement. When the atomic arrangement is regarded as a lattice arrangement, the crystal region is also a region in which the lattice arrangement is aligned. Further, the CAAC-OS has a region in which a plurality of crystal regions are connected in the ab plane direction, and the region may have distortion.
  • the strain refers to a region in which a plurality of crystal regions are connected in which the orientation of the lattice arrangement changes between a region in which the lattice arrangement is aligned and a region in which another grid arrangement is aligned. That is, CAAC-OS is an oxide semiconductor that is c-axis oriented and not clearly oriented in the ab plane direction.
  • Each of the plurality of crystal regions is composed of one or a plurality of minute crystals (crystals having a maximum diameter of less than 10 nm).
  • the maximum diameter of the crystal region is less than 10 nm.
  • the size of the crystal region may be about several tens of nm.
  • CAAC-OS is a layer having indium (In) and oxygen (element M).
  • indium In
  • oxygen element M
  • a layered crystal structure also referred to as a layered structure
  • an In layer and a layer having elements M, zinc (Zn), and oxygen
  • (M, Zn) layer are laminated.
  • the (M, Zn) layer may contain indium.
  • the In layer may contain the element M.
  • the In layer may contain Zn.
  • the layered structure is observed as a grid image, for example, in a high-resolution TEM image.
  • the position of the peak indicating the c-axis orientation may vary depending on the type, composition, and the like of the metal elements constituting CAAC-OS.
  • a plurality of bright spots are observed in the electron diffraction pattern of the CAAC-OS film. Note that a certain spot and another spot are observed at point-symmetrical positions with the spot of the incident electron beam transmitted through the sample (also referred to as a direct spot) as the center of symmetry.
  • the lattice arrangement in the crystal region is based on a hexagonal lattice, but the unit lattice is not limited to a regular hexagon and may be a non-regular hexagon. Further, in the above strain, it may have a lattice arrangement such as a pentagon or a heptagon.
  • a clear grain boundary cannot be confirmed even in the vicinity of strain. That is, it can be seen that the formation of grain boundaries is suppressed by the distortion of the lattice arrangement. This is because the CAAC-OS can tolerate distortion due to the fact that the arrangement of oxygen atoms is not dense in the ab plane direction and that the bond distance between the atoms changes due to the replacement of metal atoms. It is thought that this is the reason.
  • CAAC-OS for which no clear crystal grain boundary is confirmed, is one of the crystalline oxides having a crystal structure suitable for the semiconductor layer of the transistor.
  • a configuration having Zn is preferable.
  • In-Zn oxide and In-Ga-Zn oxide are more suitable than In oxide because they can suppress the generation of grain boundaries.
  • CAAC-OS is an oxide semiconductor having high crystallinity and no clear grain boundary is confirmed. Therefore, it can be said that CAAC-OS is unlikely to cause a decrease in electron mobility due to grain boundaries. Further, since the crystallinity of the oxide semiconductor may be deteriorated due to the mixing of impurities or the generation of defects, CAAC-OS can be said to be an oxide semiconductor having few impurities or defects (oxygen deficiency, etc.). Therefore, the oxide semiconductor having CAAC-OS has stable physical properties. Therefore, the oxide semiconductor having CAAC-OS is resistant to heat and has high reliability. CAAC-OS is also stable against high temperatures (so-called thermal budgets) in the manufacturing process. Therefore, if CAAC-OS is used for the OS transistor, the degree of freedom in the manufacturing process can be expanded.
  • nc-OS has periodicity in the atomic arrangement in a minute region (for example, a region of 1 nm or more and 10 nm or less, particularly a region of 1 nm or more and 3 nm or less).
  • nc-OS has tiny crystals. Since the size of the minute crystal is, for example, 1 nm or more and 10 nm or less, particularly 1 nm or more and 3 nm or less, the minute crystal is also referred to as a nanocrystal.
  • nc-OS has no regularity in crystal orientation between different nanocrystals. Therefore, no orientation is observed in the entire film.
  • nc-OS may be indistinguishable from a-like OS or amorphous oxide semiconductor depending on the analysis method.
  • a peak indicating crystallinity is not detected in the Out-of-plane XRD measurement using a ⁇ / 2 ⁇ scan.
  • electron beam diffraction also referred to as limited field electron diffraction
  • a diffraction pattern such as a halo pattern is performed. Is observed.
  • electron diffraction also referred to as nanobeam electron diffraction
  • an electron beam having a probe diameter for example, 1 nm or more and 30 nm or less
  • An electron diffraction pattern in which a plurality of spots are observed in a ring-shaped region centered on a direct spot may be acquired.
  • the a-like OS is an oxide semiconductor having a structure between nc-OS and an amorphous oxide semiconductor.
  • the a-like OS has a void or low density region. That is, the a-like OS has lower crystallinity than the nc-OS and CAAC-OS.
  • a-like OS has a higher hydrogen concentration in the membrane than nc-OS and CAAC-OS.
  • CAC-OS relates to the material composition.
  • CAC-OS is, for example, a composition of a material in which the elements constituting the metal oxide are unevenly distributed in a size of 0.5 nm or more and 10 nm or less, preferably 1 nm or more and 3 nm or less, or in the vicinity thereof.
  • the metal oxide one or more metal elements are unevenly distributed, and the region having the metal elements is 0.5 nm or more and 10 nm or less, preferably 1 nm or more and 3 nm or less, or a size in the vicinity thereof.
  • the mixed state is also called a mosaic shape or a patch shape.
  • the CAC-OS has a structure in which the material is separated into a first region and a second region to form a mosaic, and the first region is distributed in the film (hereinafter, also referred to as a cloud shape). It is said.). That is, the CAC-OS is a composite metal oxide having a structure in which the first region and the second region are mixed.
  • the atomic number ratios of In, Ga, and Zn to the metal elements constituting CAC-OS in the In-Ga-Zn oxide are expressed as [In], [Ga], and [Zn], respectively.
  • the first region is a region where [In] is larger than [In] in the composition of the CAC-OS film.
  • the second region is a region in which [Ga] is larger than [Ga] in the composition of the CAC-OS film.
  • the first region is a region where [In] is larger than [In] in the second region and [Ga] is smaller than [Ga] in the second region.
  • the second region is a region in which [Ga] is larger than [Ga] in the first region and [In] is smaller than [In] in the first region.
  • the first region is a region containing indium oxide, indium zinc oxide, or the like as a main component.
  • the second region is a region containing gallium oxide, gallium zinc oxide, or the like as a main component. That is, the first region can be rephrased as a region containing In as a main component. Further, the second region can be rephrased as a region containing Ga as a main component.
  • a region containing In as a main component (No. 1) by EDX mapping acquired by using energy dispersive X-ray spectroscopy (EDX: Energy Dispersive X-ray spectroscopy). It can be confirmed that the region (1 region) and the region containing Ga as a main component (second region) have a structure in which they are unevenly distributed and mixed.
  • EDX Energy Dispersive X-ray spectroscopy
  • the conductivity caused by the first region and the insulating property caused by the second region act in a complementary manner to switch the switching function (On / Off function).
  • the CAC-OS has a conductive function in a part of the material and an insulating function in a part of the material, and has a function as a semiconductor in the whole material. By separating the conductive function and the insulating function, both functions can be maximized. Therefore, by using CAC-OS for the transistor, high on -current (Ion), high field effect mobility ( ⁇ ), and good switching operation can be realized.
  • Oxide semiconductors have various structures, and each has different characteristics.
  • the oxide semiconductor of one aspect of the present invention has two or more of amorphous oxide semiconductor, polycrystalline oxide semiconductor, a-like OS, CAC-OS, nc-OS, and CAAC-OS. You may.
  • the oxide semiconductor as a transistor, a transistor having high field effect mobility can be realized. In addition, a highly reliable transistor can be realized.
  • the carrier concentration of the oxide semiconductor is 1 ⁇ 10 17 cm -3 or less, preferably 1 ⁇ 10 15 cm -3 or less, more preferably 1 ⁇ 10 13 cm -3 or less, and more preferably 1 ⁇ 10 11 cm ⁇ . It is 3 or less, more preferably less than 1 ⁇ 10 10 cm -3 , and more preferably 1 ⁇ 10 -9 cm -3 or more.
  • the impurity concentration in the oxide semiconductor film may be lowered to lower the defect level density.
  • a low impurity concentration and a low defect level density is referred to as high-purity intrinsic or substantially high-purity intrinsic.
  • An oxide semiconductor having a low carrier concentration may be referred to as a high-purity intrinsic or substantially high-purity intrinsic oxide semiconductor.
  • the trap level density may also be low.
  • the charge captured at the trap level of the oxide semiconductor takes a long time to disappear and may behave as if it were a fixed charge. Therefore, a transistor in which a channel forming region is formed in an oxide semiconductor having a high trap level density may have unstable electrical characteristics.
  • the impurities include hydrogen, nitrogen, alkali metal, alkaline earth metal, iron, nickel, silicon and the like.
  • the concentration of silicon or carbon in the oxide semiconductor and the concentration of silicon or carbon near the interface with the oxide semiconductor are determined. , 2 ⁇ 10 18 atoms / cm 3 or less, preferably 2 ⁇ 10 17 atoms / cm 3 or less.
  • the concentration of the alkali metal or alkaline earth metal in the oxide semiconductor obtained by SIMS is set to 1 ⁇ 10 18 atoms / cm 3 or less, preferably 2 ⁇ 10 16 atoms / cm 3 or less.
  • the nitrogen concentration in the oxide semiconductor obtained by SIMS is less than 5 ⁇ 10 19 atoms / cm 3 , preferably 5 ⁇ 10 18 atoms / cm 3 or less, and more preferably 1 ⁇ 10 18 atoms / cm 3 or less. , More preferably 5 ⁇ 10 17 atoms / cm 3 or less.
  • Hydrogen contained in an oxide semiconductor reacts with oxygen bonded to a metal atom to form water, which may form an oxygen deficiency.
  • oxygen deficiency When hydrogen enters the oxygen deficiency, electrons that are carriers may be generated.
  • a part of hydrogen may be combined with oxygen that is bonded to a metal atom to generate an electron as a carrier. Therefore, a transistor using an oxide semiconductor containing hydrogen tends to have a normally-on characteristic. Therefore, it is preferable that hydrogen in the oxide semiconductor is reduced as much as possible.
  • the hydrogen concentration obtained by SIMS is less than 1 ⁇ 10 20 atoms / cm 3 , preferably less than 1 ⁇ 10 19 atoms / cm 3 , and more preferably 5 ⁇ 10 18 atoms / cm. Less than 3 , more preferably less than 1 ⁇ 10 18 atoms / cm 3 .
  • This embodiment can be carried out in combination with at least a part thereof as appropriate in combination with other embodiments described in the present specification.
  • FIG. 19A is a diagram showing the appearance of the head-mounted display 8200.
  • the head-mounted display 8200 has a mounting unit 8201, a lens 8202, a main body 8203, a display unit 8204, a cable 8205, and the like. Further, the battery 8206 is built in the mounting portion 8201.
  • the cable 8205 supplies electric power from the battery 8206 to the main body 8203.
  • the main body 8203 is provided with a wireless receiver or the like, and an image corresponding to the received image data or the like can be displayed on the display unit 8204.
  • the user's line of sight can be used as an input means by capturing the movement of the user's eyeball or eyelid with a camera provided on the main body 8203 and calculating the coordinates of the user's line of sight based on the information. can.
  • the mounting portion 8201 may be provided with a plurality of electrodes at positions where it touches the user.
  • the main body 8203 may have a function of recognizing the line of sight of the user by detecting the current flowing through the electrodes with the movement of the eyeball of the user. Further, it may have a function of monitoring the pulse of the user by detecting the current flowing through the electrode.
  • the mounting unit 8201 may have various sensors such as a temperature sensor, a pressure sensor, and an acceleration sensor, and may have a function of displaying the biometric information of the user on the display unit 8204. Further, the movement of the head of the user may be detected and the image displayed on the display unit 8204 may be changed according to the movement.
  • a display device can be applied to the display unit 8204. As a result, a high-quality image can be displayed on the display unit 8204.
  • 19B, 19C, and 19D are views showing the appearance of the head-mounted display 8300.
  • the head-mounted display 8300 has a housing 8301, a display unit 8302, a band-shaped fixture 8304, and a pair of lenses 8305. Further, the battery 8306 is built in the housing 8301, and power can be supplied from the battery 8306 to the display unit 8302 and the like.
  • the user can visually recognize the display of the display unit 8302 through the lens 8305. It is preferable that the display unit 8302 is arranged in a curved shape. By arranging the display unit 8302 in a curved shape, the user can feel a high sense of presence.
  • the configuration in which one display unit 8302 is provided has been illustrated, but the present invention is not limited to this, and for example, a configuration in which two display units 8302 may be provided may be used. In this case, if one display unit is arranged in one eye of the user and one display unit is arranged in the other eye, it is possible to perform three-dimensional display using parallax or the like.
  • the display device of one aspect of the present invention can be applied to the display unit 8302. As a result, a high-quality image can be displayed on the display unit 8302.
  • FIGS. 20A and 20B an example of an electronic device different from the electronic device shown in FIGS. 19A to 19D is shown in FIGS. 20A and 20B.
  • the electronic devices shown in FIGS. 20A and 20B include a housing 9000, a display unit 9001, a speaker 9003, an operation key 9005 (including a power switch or an operation switch), a connection terminal 9006, and a sensor 9007 (force, displacement, position, speed). , Acceleration, angular velocity, rotation speed, distance, light, liquid, magnetism, temperature, chemical substance, voice, time, hardness, electric field, current, voltage, power, radiation, flow rate, humidity, gradient, vibration, smell, or infrared rays. It has a function to measure), a battery 9009, and the like.
  • the electronic devices shown in FIGS. 20A and 20B have various functions. For example, a function to display various information (still images, moving images, text images, etc.) on the display unit, a touch panel function, a function to display a calendar, date, time, etc., and a function to control processing by various software (programs).
  • Wireless communication function function to connect to various computer networks using wireless communication function, function to transmit or receive various data using wireless communication function, read out program or data recorded on recording medium It can have a function of displaying on a display unit, and the like.
  • the functions that the electronic devices shown in FIGS. 20A and 20B can have are not limited to these, and can have various functions. Further, although not shown in FIGS.
  • the electronic device may have a configuration having a plurality of display units.
  • the electronic device is provided with a camera or the like, and has a function of shooting a still image, a function of shooting a moving image, a function of saving the shot image on a recording medium (external or built in the camera), and displaying the shot image on the display unit. It may have a function to perform, and the like.
  • FIGS. 20A and 20B The details of the electronic devices shown in FIGS. 20A and 20B will be described below.
  • FIG. 20A is a perspective view showing a mobile information terminal 9101.
  • the mobile information terminal 9101 has one or more functions selected from, for example, a telephone, a notebook, an information browsing device, and the like. Specifically, it can be used as a smartphone. Further, the mobile information terminal 9101 can display characters or images on a plurality of surfaces thereof.
  • the operation button 9050 also referred to as an operation icon or simply an icon
  • the information 9051 indicated by the broken line rectangle can be displayed on the other surface of the display unit 9001.
  • an e-mail As an example of information 9051, an e-mail, an SNS (social networking service), a display for notifying an incoming call, a title such as an e-mail or an SNS, a sender name such as an e-mail or an SNS, a date and time, and a time. , Battery level, signal strength, etc.
  • the operation button 9050 or the like may be displayed instead of the information 9051 at the position where the information 9051 is displayed.
  • a display device can be applied to the mobile information terminal 9101. As a result, a high-quality image can be displayed on the display unit 9001.
  • FIG. 20B is a perspective view showing a wristwatch-type portable information terminal 9200.
  • the personal digital assistant 9200 can execute various applications such as mobile phone, e-mail, text viewing and creation, music playback, Internet communication, and computer games.
  • the display unit 9001 is provided with a curved display surface, and can display along the curved display surface.
  • FIG. 20B shows an example in which the time 9251, the operation button 9252 (also referred to as an operation icon or simply an icon), and the content 9253 are displayed on the display unit 9001.
  • the content 9253 can be, for example, a moving image.
  • the mobile information terminal 9200 can execute short-range wireless communication standardized for communication. For example, by communicating with a headset capable of wireless communication, it is possible to make a hands-free call. Further, the mobile information terminal 9200 has a connection terminal 9006, and can directly exchange data with another information terminal via a connector. It is also possible to charge via the connection terminal 9006. The charging operation may be performed by wireless power supply without going through the connection terminal 9006.
  • a display device can be applied to the portable information terminal 9200. As a result, a high-quality image can be displayed on the display unit 9001.
  • This embodiment can be carried out in combination with at least a part thereof as appropriate in combination with other embodiments described in the present specification.

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