WO2022148095A1 - 一种使用等离子转移弧加热的导电坩埚高温蒸发器 - Google Patents

一种使用等离子转移弧加热的导电坩埚高温蒸发器 Download PDF

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WO2022148095A1
WO2022148095A1 PCT/CN2021/125302 CN2021125302W WO2022148095A1 WO 2022148095 A1 WO2022148095 A1 WO 2022148095A1 CN 2021125302 W CN2021125302 W CN 2021125302W WO 2022148095 A1 WO2022148095 A1 WO 2022148095A1
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crucible
conductive
transfer arc
temperature evaporator
cover
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PCT/CN2021/125302
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English (en)
French (fr)
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赵登永
彭家斌
余善海
潘经珊
张仁东
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江苏博迁新材料股份有限公司
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Priority to JP2023600067U priority Critical patent/JP3244520U/ja
Publication of WO2022148095A1 publication Critical patent/WO2022148095A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/14—Evaporating with heated gases or vapours or liquids in contact with the liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/30—Accessories for evaporators ; Constructional details thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00—Technologies related to metal processing
    • Y02P10/25—Process efficiency

Definitions

  • the utility model relates to the field of high temperature evaporators, in particular to a conductive crucible high temperature evaporator heated by a plasma transfer arc.
  • a high-temperature evaporator When preparing various powders by the vapor-condensation gas-phase method, a high-temperature evaporator is required.
  • the existing high-temperature evaporators mostly use electric heating, such as intermediate frequency heating, resistance heating and plasma arc heating, etc., or several heating methods are used in combination, and laser heating is also used in some special fields.
  • Different heating methods have different requirements on the structure of the high temperature evaporator. For example, intermediate frequency heating requires the crucible or the heated body in the crucible to conduct electricity, and the heating structure is installed around the outside of the crucible.
  • resistance heating requires good temperature resistance of its own structure.
  • the heating structure can be installed at the bottom or the periphery of the crucible, or a heating structure inserted into the heated body can be installed at the top of the crucible to realize contact heating.
  • the plasma arc generated between the electrodes needs to be sprayed downward from above the high-temperature evaporator, and the object to be heated is arranged below the plasma arc.
  • the structure of the plasma non-transferred arc high temperature evaporator is relatively simple, and the raw material can be directly sprayed into the middle of the arc without the need for a crucible. The raw material is heated when passing through the plasma non-transferred arc, but the input energy is relatively small.
  • the plasma transfer arc requires two electrodes separated from each other.
  • the plasma transfer arc gun is the cathode and the heated body is the anode.
  • the advantages of this heating structure are high heating energy and high temperature inside the high temperature evaporator, especially suitable for high boiling point. It is used when the material is prepared into powder, but the structure is more complicated.
  • the utility model provides a conductive crucible high-temperature evaporator with a simple structure and suitable for preparing powder from a material with a high boiling point, which is heated by a plasma transfer arc.
  • a conductive crucible high-temperature evaporator heated by plasma transfer arc includes a shell, a conductive crucible, a transfer arc gun and a power supply, the conductive crucible is arranged in the inner cavity of the shell, and the conductive crucible is composed of a crucible body and a The crucible cover above the crucible body is formed.
  • the bottom wall of the crucible body is provided with an air inlet cavity. One side of the air inlet cavity is connected with the inner cavity of the crucible body through several carrier gas input preheating channels.
  • the side is connected with a number of air guide channels, the ends of the several air guide channels all extend to the outside of the casing, a conductive rod is connected between the bottom of the crucible body and the bottom of the casing, and the transfer arc gun is installed on the casing
  • the upper part and the lower end of the transfer arc gun extend to the inner side of the crucible cover, and the transfer arc gun and the conductive rod are respectively electrically connected with the power source.
  • the casing is composed of a lower barrel disposed outside the crucible body and an upper cover disposed outside the crucible cover, the upper cover is installed on the upper end of the lower barrel, and the upper cover is between the lower barrel and the crucible An insulating layer is arranged between the crucible cover and the crucible cover.
  • the thermal insulation layer can be made of high temperature resistant felt material or ceramic material.
  • both the lower barrel body and the upper cover are provided with a jacket structure, and the jacket structure is connected to an extracorporeal circulation cooling liquid system arranged outside the casing.
  • the material of the conductive crucible is a high temperature resistant conductive material such as metal or graphite.
  • the inner cavity of the crucible body is a concave structure with a large upper and a small lower
  • the inner cavity of the crucible cover is a dome-shaped or frustum-shaped structure with a large lower and a smaller upper.
  • insulating ventilation gaps are provided between the transfer arc gun and the crucible cover and between the transfer arc gun and the housing, and the width of the insulating ventilation gap is 5-50 mm.
  • the upper end of the casing is further provided with a feeding channel, a gas outlet and liquid return channel, and several observation ports for inspection and observation.
  • the bottom end face of the nozzle of the transfer arc gun is located at a distance of -150 mm to +150 mm from the upper end face of the crucible body.
  • the shape of the air inlet cavity is a circular ring or a fan ring, and the number of air guide passages communicating with the air inlet cavity is 1-18.
  • a plurality of the carrier gas input preheating channels are distributed on the side wall of the crucible body in a fan ring shape, and the carrier gas input preheating channels are communicated with the carrier gas inlet at the connection point of the inner cavity of the crucible body, and the carrier gas
  • the height of the entrance is 5-50mm.
  • the utility model has the advantages of simple structure, reasonable design and high internal heating temperature, which is suitable for preparing powder from materials with high boiling point, and has broad market prospects.
  • FIG. 1 is a schematic cross-sectional structural diagram of an embodiment of the present invention.
  • a conductive crucible high-temperature evaporator heated by a plasma transfer arc includes a casing, a conductive crucible, a transfer arc gun 5 and a power source 6 .
  • the conductive crucible is arranged in the inner cavity of the housing.
  • the material of the conductive crucible is high temperature conductive material such as metal or graphite, which will not have physical or chemical reaction with the heated object at high temperature.
  • the casing is composed of a lower barrel 1 arranged outside the crucible body 3 and an upper cover 2 arranged outside the crucible cover 4 .
  • the upper cover 2 is installed on the upper end of the lower barrel 1, and an insulating layer 12 is provided between the lower barrel 1 and the crucible body 3, and between the upper cover 2 and the crucible cover 4, and the insulating layer 12 is made of high-temperature resistant felt material or Ceramic material.
  • Both the lower barrel 1 and the upper cover 2 are provided with a jacket structure 16, which is connected to an extracorporeal circulating cooling liquid system 7 arranged outside the casing, and is cooled by circulating cooling liquid to protect the equipment.
  • the conductive crucible is composed of a crucible body 3 and a crucible cover 4 installed above the crucible body 3 .
  • the inner cavity of the crucible body 3 is a concave structure with a large upper and a small lower, and the inner cavity of the crucible cover 4 is a dome-shaped or frustum-shaped structure with a large lower and a smaller upper.
  • the bottom wall of the crucible body 3 is provided with an air inlet cavity 8 , and one side of the air inlet cavity 8 communicates with the inner cavity of the crucible body 3 through a plurality of carrier gas input preheating channels 9 .
  • carrier gas input preheating channels 9 are distributed on the side wall of the crucible body 3 in a fan ring shape, and the carrier gas input preheating channels 9 are in communication with the carrier gas inlet at the connection point of the inner cavity of the crucible body 3, and the carrier gas inlet height is 5-50mm.
  • the other side of the air inlet cavity 8 is connected with several air guide passages 10 , and the ends of the several air guide passages 10 all extend to the outside of the casing.
  • the shape of the air inlet cavity 8 is annular or fan-shaped, and the number of air guide passages 10 communicating with the air inlet cavity 8 is 1-18.
  • a conductive rod 11 is connected between the bottom of the crucible body 3 and the bottom of the casing.
  • the transfer arc gun 5 is installed above the casing, and the lower end of the transfer arc gun 5 extends to the inner side of the crucible cover 4 .
  • the bottom end face of the nozzle of the transfer arc gun 5 is located at a distance of -150 mm to +150 mm from the upper end face of the crucible body 3 .
  • the transfer arc gun 5 and the conductive rod 11 are respectively electrically connected to the power source 6 .
  • the upper cover 2 of the housing is also provided with a feeding channel 14 , a gas outlet and liquid return channel 15 and several observation ports (not shown in the figure) for inspection and observation.
  • the feeding channel 14 , the gas outlet and liquid return channel 15 and the observation port extend to the inner side of the crucible cover 4 .
  • the feeding channel 14 is connected to an extracorporeal feeding system 17 for feeding.
  • the viewing port can be used to install sight glasses or to install inspection probes.
  • the utility model uses a transfer arc gun 5, which extends downward from the top of the high-temperature evaporator into the crucible cover 4 inside the high-temperature evaporator, and is placed above the heated body in the crucible body 3.
  • the transfer arc gun 5 is the cathode
  • the heated body 19 is the anode
  • the plasma arc 18 conducts between the cathode and the anode to continuously heat the heated body 19 as the anode with high power.
  • the heated body 19 is placed in a high temperature-resistant conductive crucible, and the conductive rod 11 provided at the bottom of the crucible body 3 communicates with the power source 6 outside the high-temperature evaporator and forms a conductive loop with the cathode.
  • the upper cover 2 and the lower barrel 1 are in a sealed connection, and the connections between the upper cover 2 or the lower barrel 1 and other structures are all sealed connections to ensure the air gap between the high temperature evaporator and the outside of the high temperature evaporator.
  • the plasma gas used in the carrier gas transfer arc gun, the gas circulating in the insulating ventilation gap 13 between the transfer arc gun 5 and the upper cover 2 and other gases entering the high temperature evaporator are all inert and do not chemically react with the heated body 19 gas, or the main gas source is an inert gas with a small amount of reactive components added.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Plasma Technology (AREA)

Abstract

本实用新型公开了一种使用等离子转移弧加热的导电坩埚高温蒸发器，包括壳体、导电坩埚、转移弧枪和电源，导电坩埚由坩埚本体和坩埚盖组成，坩埚本体的底壁内设置有进气腔，进气腔的一侧通过若干个载流气输入预热通道与坩埚本体的内腔连通，进气腔的另一侧连接的若干个导气通道端部均延伸至壳体的外侧，坩埚本体的底部与壳体的底部之间连接有导电棒，转移弧枪安装于壳体上方且其下端延伸至坩埚盖内侧。本实用新型结构简单，内部加热温度高，适合于沸点高的材料制备成粉体时使用。

Description

一种使用等离子转移弧加热的导电坩埚高温蒸发器 技术领域
本实用新型涉及高温蒸发器领域，具体涉及一种使用等离子转移弧加热的导电坩埚高温蒸发器。
背景技术
在使用蒸发冷凝气相法制备各种粉体时，需要用到高温蒸发器。现有的高温蒸发器多采用电加热，如中频加热、电阻加热和等离子电弧加热等，或几种加热方法配合使用，某些特殊领域还会采用激光加热。而不同的加热方法对高温蒸发器的结构有不同的要求。例如，中频加热需要坩埚或坩埚内的被加热体导电，并且加热结构在坩埚的外侧环绕安装。又例如，电阻加热需要自身结构耐温性能较好，加热结构可以在坩埚底部或周边安装，也可以在坩埚顶部安装插入被加热体的加热结构以实现接触加热。再例如，等离子电弧加热需要将在电极间产生的等离子电弧自高温蒸发器的上方向下喷射，在等离子弧下方设置被加热体。等离子非转移弧高温蒸发器的结构相对简单，可以不需要坩埚而直接向弧中间喷射原料，原料在经过等离子非转移弧时被加热，但输入能量相对较小。而等离子转移弧需要两个相间隔的电极，等离子转移弧枪为阴极，被加热体为阳极，此种加热结构的优点是加热能量高，高温蒸发器内部的温度高，特别适合于沸点高的材料制备成粉体时使用，但是结构较为复杂。
发明内容
本实用新型针对背景技术中的不足，提供了一种结构简单且适合于沸点高的材料制备成粉体时用的使用等离子转移弧加热的导电坩埚高温蒸发器。
为实现上述目的，本实用新型技术解决方案如下：
一种使用等离子转移弧加热的导电坩埚高温蒸发器，包括壳体、导电坩埚、转移弧枪和电源，所述导电坩埚设置于壳体的内腔中，所述导电坩埚由坩埚本体和安装于坩埚本体上方的坩埚盖组成，所述坩埚本体的底壁 内设置有进气腔，进气腔的一侧通过若干个载流气输入预热通道与坩埚本体内腔连通，进气腔的另一侧连接有若干个导气通道，若干个导气通道的端部均延伸至壳体的外侧，坩埚本体的底部与壳体的底部之间连接有导电棒，所述转移弧枪安装于壳体上方且转移弧枪的下端延伸至坩埚盖的内侧，转移弧枪和导电棒分别与电源电性连接。
可选的，所述壳体由设置于坩埚本体外侧的下桶体和设置于坩埚盖外侧的上盖组成，上盖安装于下桶体的上端，下桶体与坩埚本体之间、上盖与坩埚盖之间均设置有保温层。保温层可采用耐高温的毡类材料或陶瓷材料。
可选的，所述下桶体和上盖均设置有夹套结构，夹套结构与设置在壳体外侧的体外循环冷却液系统连接。
可选的，所述导电坩埚的材质为金属或石墨等耐高温导电材料。
可选的，所述坩埚本体的内腔为上大下小的内凹状结构，坩埚盖的内腔为下大上小的圆拱状或锥台状结构。
可选的，所述转移弧枪与坩埚盖之间、转移弧枪与壳体之间均设置有绝缘通气间隙，绝缘通气间隙的宽度为5-50mm。
可选的，所述壳体的上端还设置有加料通道、出气回液通道及若干个用于检测观查的观测口，加料通道、出气回液通道及观测口延伸至坩埚盖的内侧。
可选的，所述转移弧枪的喷嘴底端面位于距离坩埚本体的上端面的-150mm～+150mm处。
可选的，所述进气腔的形状为圆环状或扇环状，且与进气腔连通的导气通道的数量为1-18个。
可选的，若干个所述载流气输入预热通道呈扇环形分布于坩埚本体的侧壁上，且载流气输入预热通道与坩埚本体的内腔的连通处的载流气入口连通，载流气入口的高度为5-50mm。
相对于现有技术，本实用新型有益效果如下：
本实用新型结构简单，设计合理，内部加热温度高，适合于沸点高的材料制备成粉体时使用，具有广阔的市场前景。
附图说明
通过阅读参照以下附图对非限制性实施例所作的详细描述，本实用新型的其它特征、目的和优点将会变得更明显。
图1为本实用新型实施例的剖视结构示意图。
图中标示如下：1、下桶体，2、上盖，3、坩埚本体，4、坩埚盖，5、转移弧枪，6、电源，7、体外循环冷却液系统，8、进气腔，9、载流气输入预热通道，10、导气通道，11、导电棒，12、保温层，13、绝缘通气间隙，14、加料通道，15、出气回液通道，16、夹套结构，17、体外加料系统，18、转移等离子电弧，19、被加热体。
具体实施方式
下面将结合本实用新型实施例中的附图，对本实用新型实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本实用新型一部分实施例，而不是全部的实施例。
在本实用新型的描述中，需要理解的是，术语“中部”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本实用新型和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本实用新型的限制。
在本实用新型中，除非另有明确的规定和限定，术语“设置”、“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接；可以是机械连接；可以是直接相连，也可以通过中间媒介间接相连。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本实用新型中的具体含义。
如图1所示，一种使用等离子转移弧加热的导电坩埚高温蒸发器，包括壳体、导电坩埚、转移弧枪5和电源6。导电坩埚设置于壳体的内腔中。导电坩埚的材质为金属或石墨等耐高温导电材料，在高温下不与被加热物 产生物理或化学反应。壳体由设置于坩埚本体3外侧的下桶体1和设置于坩埚盖4外侧的上盖2组成。上盖2安装于下桶体1的上端，下桶体1与坩埚本体3之间、上盖2与坩埚盖4之间均设置有保温层12，保温层12采用耐高温的毡类材料或陶瓷材料。下桶体1和上盖2均设置有夹套结构16，夹套结构16与设置在壳体外侧的体外循环冷却液系统7连接，利用循环冷却液进行冷却以保护设备。导电坩埚由坩埚本体3和安装于坩埚本体3上方的坩埚盖4组成。坩埚本体3的内腔为上大下小的内凹状结构，坩埚盖4的内腔为下大上小的圆拱状或锥台状结构。坩埚本体3的底壁内设置有进气腔8，进气腔8的一侧通过若干个载流气输入预热通道9与坩埚本体3的内腔连通。若干个载流气输入预热通道9呈扇环形分布于坩埚本体3的侧壁上，且载流气输入预热通道9与坩埚本体3的内腔的连通处的载流气入口连通，载流气入口高度为5-50mm。进气腔8的另一侧连接有若干个导气通道10，若干个导气通道10的端部均延伸至壳体外侧。进气腔8的形状为圆环状或扇环状，且与进气腔8连通的导气通道10的数量为1-18个。坩埚本体3的底部与壳体的底部之间连接有导电棒11。转移弧枪5安装于壳体的上方，且转移弧枪5的下端延伸至坩埚盖4的内侧。转移弧枪5的喷嘴底端面位于距离坩埚本体3的上端面的-150mm～+150mm处。转移弧枪5和导电棒11分别与电源6电性连接。
转移弧枪5与坩埚盖4之间、转移弧枪5与壳体之间均设置有绝缘通气间隙13，绝缘通气间隙13的宽度为5-50mm。壳体的上盖2上还设置有加料通道14、出气回液通道15及若干个用于检测观查的观测口(图中未示出)。加料通道14、出气回液通道15及观测口延伸至坩埚盖4的内侧。加料通道14与用于供料的体外加料系统17连接。观测口可用于安装视镜或安装检测探头。
本实用新型使用转移弧枪5，从高温蒸发器顶部向下伸入高温蒸发器的内部的坩埚盖4内，置于坩埚本体3内的被加热体的上方。转移弧枪5为阴极，被加热体19为阳极，在阴极与阳极之间通过等离子气电弧18导通，以对作为阳极的被加热体19持续大功率加热。被加热体19置于耐高温的导电坩埚内，坩埚本体3的底部设置的导电棒11与高温蒸发器外的电 源6连通并与阴极形成导电回路。上盖2与下桶体1之间为密封连接，上盖2或下桶体1与其他结构之间的连接均为密封连接，以保证高温蒸发器内与高温蒸发器外的大气间隔。载流气转移弧枪使用的等离子气、转移弧枪5与上盖2之间的绝缘通气间隙13中流通的气体及其他进入高温蒸发器的气体均为惰性且不与被加热体19产生化学反应的气体，或主气源为惰性气体添加少量用于反应成份。
以上显示和描述了本实用新型的基本原理和主要特征和本实用新型的优点,对于本领域技术人员而言，显然本实用新型不限于上述示范性实施例的细节，而且在不背离本实用新型的精神或基本特征的情况下，能够以其他的具体形式实现本实用新型。因此，无论从哪一点来看，均应将实施例看作是示范性的，而且是非限制性的，本实用新型的范围由所附权利要求而不是上述说明限定，因此旨在将落在权利要求的等同要件的含义和范围内的所有变化囊括在本实用新型内。

Claims (10)

  1. 一种使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：包括壳体、导电坩埚、转移弧枪和电源，所述导电坩埚设置于壳体的内腔中，所述导电坩埚由坩埚本体和安装于坩埚本体上方的坩埚盖组成，所述坩埚本体的底壁内设置有进气腔，进气腔的一侧通过若干个载流气输入预热通道与坩埚本体的内腔连通，进气腔的另一侧连接有若干个导气通道，若干个导气通道的端部均延伸至壳体的外侧，坩埚本体的底部与壳体的底部之间连接有导电棒，所述转移弧枪安装于壳体上方且转移弧枪的下端延伸至坩埚盖的内侧，转移弧枪和导电棒分别与电源电性连接。
  2. 如权利要求1所述的使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：所述壳体由设置于坩埚本体外侧的下桶体和设置于坩埚盖外侧的上盖组成，上盖安装于下桶体的上端，下桶体与坩埚本体之间、上盖与坩埚盖之间均设置有保温层。
  3. 如权利要求1或2所述的使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：所述下桶体和上盖均设置有夹套结构，夹套结构与设置在壳体外侧的体外循环冷却液系统连接。
  4. 如权利要求1至3中任一项所述的使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：所述导电坩埚的材质为金属或石墨耐高温导电材料。
  5. 如权利要求1至4中任一项所述的使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：所述坩埚本体的内腔为上大下小的内凹状结构，坩埚盖的内腔为下大上小的圆拱状或锥台状结构。
  6. 如权利要求1至5中任一项所述的使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：所述转移弧枪与坩埚盖之间、转移弧枪与壳体之间均设置有绝缘通气间隙，绝缘通气间隙的宽度为5-50mm。
  7. 如权利要求1至6中任一项所述的使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：所述壳体的上端还设置有加料通道、出气回液通道及若干个用于检测观查的观测口，加料通道、出气回液通道及观测口延伸至坩埚盖的内侧。
  8. 如权利要求1至7中任一项所述的使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：所述转移弧枪的喷嘴底端面位于距离坩埚本体的上端面的-150mm～+150mm处。
  9. 如权利要求1至8中任一项所述的使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：所述进气腔的形状为圆环状或扇环状，且与进气腔连通导气通道的数量为1-18个。
  10. 如权利要求1至9中任一项所述的使用等离子转移弧加热的导电坩埚高温蒸发器，其特征在于：若干个所述载流气输入预热通道呈扇环形分布于坩埚本体的侧壁上，且载流气输入预热通道与坩埚本体的内腔的连通处的载流气入口连通，载流气入口的高度为5-50mm。
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