WO2022130617A1 - ワイヤボンディング装置、ワイヤ切断方法及びプログラム - Google Patents
ワイヤボンディング装置、ワイヤ切断方法及びプログラム Download PDFInfo
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- WO2022130617A1 WO2022130617A1 PCT/JP2020/047415 JP2020047415W WO2022130617A1 WO 2022130617 A1 WO2022130617 A1 WO 2022130617A1 JP 2020047415 W JP2020047415 W JP 2020047415W WO 2022130617 A1 WO2022130617 A1 WO 2022130617A1
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- wire
- bonding
- tension
- bonding tool
- tail
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- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
- B23K20/005—Capillary welding
- B23K20/007—Ball bonding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
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- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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- H01L2224/85148—Aligning involving movement of a part of the bonding apparatus
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- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
Definitions
- the present invention relates to a wire bonding apparatus, a wire cutting method and a program.
- a wire bonding device for electrically connecting a first bond point (for example, a pad of a semiconductor die) and a second bond point (for example, a lead of a package) with a wire.
- a first bond point for example, a pad of a semiconductor die
- a second bond point for example, a lead of a package
- the shape of the bonding end portion which is the connection portion between the lower end of the wire tail and the electrode pad which is the second bonding point, may not be thin.
- the wire is gripped by the clamper and the wire tail is pulled up, a large tension is applied to the wire tail, so that the wire tail is in a stretched state. Then, after further pulling up the wire tail, the wire tail is cut at the bonding end.
- the stretched wire tail jumps up due to the reaction force at the time of cutting. This causes the wire and wire tail at the bottom of the clamper to bend in an S-shape.
- the bent wire tail may cause poor ball formation due to electric discharge or the like during the next bonding to the electrode pad. Therefore, a method for cutting a wire tail that does not cause bending of the wire tail has been proposed.
- the wire bonding method disclosed in Patent Document 1 raises the capillary diagonally upward from the bonding position after bonding so that the wire tail led out to the tip of the capillary does not bend.
- the wire bonding method if the bonding end portion which is the connection portion between the lower end of the tail wire and the electrode pad is not sufficiently thin, a large tensile force is applied to the wire when the wire tail is cut. In this case, in the wire bonding method, the wire jumps up due to the reaction force at the time of cutting the wire tail, and the wire at the lower part of the clamper and the wire tail may bend in an S shape.
- the present invention has been made in view of such circumstances, and an object thereof is to cut the wire tail without applying a large tensile force to prevent bending of the wire when the wire tail is cut.
- the wire bonding apparatus is a wire bonding apparatus that performs a wire bonding process, and is an ultrasonic wave that supplies ultrasonic vibration to the bonding tool via a bonding tool through which a wire is inserted and an ultrasonic horn.
- a vibrator, a drive mechanism for moving the bonding tool, and a control unit for controlling the wire bonding process are provided, and the control unit is a bond point to be bonded by pressing a wire with the bonding tool.
- the tension releasing step of lowering the bonding tool to release the tension applied to the wire and the series of steps including the tension applying step and the tension releasing step at least once, the bonding tool To cut the wire tail from the wire bonded to the bond point.
- the wire cutting method is a wire cutting method executed by using a wire bonding apparatus that performs a wire bonding process, wherein the wire bonding apparatus includes a bonding tool for inserting wires and an ultrasonic horn.
- the wire cutting method includes an ultrasonic vibrator that supplies ultrasonic vibrations to the bonding tool via a wire, a drive mechanism that moves the bonding tool, and a control unit that controls the wire bonding process.
- a tension applying step of raising the bonding tool to apply tension to the wire a tension releasing step of lowering the bonding tool to release the tension applied to the wire, a tension applying step, and the tension.
- the bonding tool is raised to perform a tail cutting step of cutting the wire tail from the wire bonded to the bond point.
- the program according to one aspect of the present invention is a program for causing a wire bonding apparatus to execute a wire bonding process, wherein the wire bonding apparatus superimposes a bonding tool through which a wire is inserted and the bonding tool via an ultrasonic horn.
- the program includes an ultrasonic vibrator that supplies sonic vibration, a drive mechanism that moves the bonding tool, and a control unit that controls the wire bonding process.
- a series of steps including a tension applying step of raising the wire to apply tension to the wire, a tension releasing step of lowering the bonding tool to release the tension applied to the wire, and the tension applying step and the tension releasing step.
- the bonding tool is raised to perform a tail cut step of cutting the wire tail from the wire bonded to the bond point.
- the present invention it is possible to cut the wire tail without applying a large tensile force and prevent the wire from bending when the wire tail is cut.
- FIG. 1 is a diagram showing an example of a wire bonding apparatus 1 according to the present embodiment.
- FIG. 2A is a top view of the bonding arm 20.
- FIG. 2B is a bottom view of the bonding arm 20.
- FIG. 3 is a diagram showing an example of an outline of the detection unit 70.
- FIG. 4 is a diagram showing another example of the outline of the detection unit 70.
- the wire bonding apparatus 1 includes, for example, an XY drive mechanism 10, a Z drive mechanism 12, a bonding arm 20, an ultrasonic horn 30, a bonding tool 40, a load sensor 50, and an ultrasonic wave. It includes a vibrator 60, a detection unit 70, a control unit 80, and a bonding tool position detection unit 90.
- the XY drive mechanism 10 is configured to be movable in the XY axis direction (direction parallel to the bonding surface), for example.
- the XY drive mechanism 10 is provided with, for example, a Z drive mechanism 12 capable of moving the bonding arm 20 in the Z-axis direction (direction perpendicular to the bonding surface).
- the bonding arm 20 is supported by a support shaft 14 and is configured to swing freely with respect to the XY drive mechanism 10.
- the bonding arm 20 is formed in a substantially rectangular parallelepiped so as to extend from the XY drive mechanism 10 toward the bonding stage 16 on which the semiconductor device 100 to be bonded is placed.
- the bonding arm 20 includes an arm base end portion 22 attached to the XY drive mechanism 10, an arm tip portion 24 located on the tip end side ( ⁇ Y direction side) of the arm base end portion 22 and to which the ultrasonic horn 30 is attached. Includes a flexible connecting portion 23 that connects the arm base end portion 22 and the arm tip portion 24.
- the connecting portion 23 extends from the top surface 21a of the bonding arm 20 toward the bottom surface 21b, for example, slits 25a and 25b having a predetermined width, and extends from the bottom surface 21b of the bonding arm 20 toward the top surface 21a. It is composed of a slit 25c having a predetermined width. In this way, the connecting portion 23 is locally configured as a thin-walled portion by the slits 25a, 25b, and 25c, so that the arm tip portion 24 can be bent with respect to the arm base end portion 22.
- a recess 26 in which the ultrasonic horn 30 is housed is formed on the bottom surface 21b side of the bonding arm 20.
- the ultrasonic horn 30 is attached to the arm tip portion 24 by a horn fixing screw 32 in a state of being housed in the recess 26 of the bonding arm 20.
- the ultrasonic horn 30 holds a bonding tool 40 at a tip portion protruding from the recess 26, and the recess 26 is provided with an ultrasonic vibrator 60 that generates ultrasonic vibration.
- Ultrasonic vibration is generated by the ultrasonic vibrator 60, and this is transmitted to the bonding tool 40 by the ultrasonic horn 30.
- the ultrasonic vibration 60 can apply ultrasonic vibration to the object to be bonded via the bonding tool 40.
- the ultrasonic oscillator 60 is, for example, a piezo oscillator.
- slits 25a and 25b are formed in order from the top surface 21a toward the bottom surface 21b on the top surface 21a side of the bonding arm 20.
- the upper slit 25a is formed wider than the lower slit 25b.
- a load sensor 50 is provided in the wide upper slit 25a.
- the load sensor 50 is fixed to the arm tip portion 24 by a preload screw 52.
- the load sensor 50 is arranged so as to be sandwiched between the arm base end portion 22 and the arm tip portion 24.
- the load sensor 50 is offset from the central axis in the longitudinal direction of the ultrasonic horn 30 in the contact / separation direction with respect to the bonding target, and the rotation center of the bonding arm 20 and the mounting surface of the ultrasonic horn 30 at the arm tip portion 24 (that is,). , The tip surface of the arm tip portion 24 on the bonding tool 40 side). Then, as described above, since the ultrasonic horn 30 holding the bonding tool 40 is attached to the arm tip portion 24, when a load is applied to the tip of the bonding tool 40 by the reaction force from the bonding target, the arm base is used. The arm tip portion 24 bends with respect to the end portion 22, and the load sensor 50 can detect the load.
- the load sensor 50 is, for example, a piezo load sensor.
- the bonding tool 40 is for inserting a wire 42, for example, a capillary provided with an insertion hole 41.
- the wire 42 used for bonding is inserted into the insertion hole 41 of the bonding tool 40.
- the bonding tool 40 is configured so that a part of the wire 42 can be fed out from the tip thereof.
- the wire 42 unwound from the tip of the bonding tool 40 is referred to as a wire tail 42a.
- a pressing portion 40a for pressing the wire 42 is provided at the tip of the bonding tool 40.
- the pressing portion 40a has a rotationally symmetric shape around the insertion hole 41 of the bonding tool 40 in the axial direction, and has a pressing surface on the lower surface around the insertion hole 41.
- the bonding tool 40 is attached to the ultrasonic horn 30 so as to be replaceable by a spring force or the like.
- the clamper 44 is provided above the bonding tool 40, for example, and operates together with the bonding tool 40.
- the clamper 44 is configured to grip (constrain) or release the wire 42 at a predetermined timing based on, for example, a control signal output from the clamper control unit 81.
- a wire tensioner (not shown) may be provided above the clamper 44.
- the wire tensioner is configured to, for example, insert the wire 42 and apply an appropriate tension to the wire 42 during bonding.
- the material of the wire 42 is appropriately selected from the viewpoint of ease of processing and low electrical resistance, and for example, gold (Au), aluminum (Al), copper (Cu), silver (Ag), or the like is used.
- the wire 42 forms a ball portion 43 extending from the tip of the bonding tool 40.
- the ball portion 43 is bonded to a predetermined bond point (for example, an electrode pad 112, hereinafter referred to as a first bond point).
- the detection unit 70 electrically detects, for example, whether or not the ball unit 43 formed at the tip of the wire 42 inserted through the bonding tool 40 is grounded to the semiconductor device 100 to be bonded. Further, in the detection unit 70, for example, based on the output of the electric signal supplied to the wire 42, the wire tail 42a is a predetermined bond point (for example, an electrode pad 122, hereinafter referred to as a second bond point) of the semiconductor device 100. It detects whether or not it was disconnected from).
- a predetermined bond point for example, an electrode pad 122, hereinafter referred to as a second bond point
- the detection unit 70 includes, for example, a power supply unit 71, an output measurement unit 72, and a determination unit 73.
- the power supply unit 71 applies a predetermined electric signal between the semiconductor device 100 and the wire 42, for example.
- the output measuring unit 72 measures, for example, the output of an electric signal supplied by the power supply unit 71.
- the determination unit 73 determines whether or not the wire 42 has electrically contacted the semiconductor device 100, for example, based on the measurement result of the output measurement unit 72. As shown in FIG. 1, in the detection unit 70, one terminal is electrically connected to the bonding stage 16 and the other terminal is electrically connected to the clamper 44 (or wire spool (omitted in FIG. 1)). There is.
- the power supply unit 71 of the detection unit 70 may be composed of a DC voltage power supply. That is, when it is considered that the bond point of the semiconductor device 100 and the bonding stage 16 are connected only by the resistance component (for example, when both are electrically conductive), the detection unit 70 determines a DC voltage signal. It can be used as an electric signal of. In this case, when the ball portion 43 of the wire 42 comes into contact with the bond point of the semiconductor device 100, an electrical short circuit occurs between the bonding stage 16 and the wire 42.
- the detection unit 70 determines whether or not the ball unit 43 has come into contact with the electrode pad 122, which is the second bond point of the semiconductor device 100, based on the change in the presence or absence of this electrical short circuit (for example, the change in the output voltage v). can do. In other words, the detection unit 70 can detect whether or not the wire tail 42a is cut from the second bond point of the semiconductor device 100.
- the power supply unit 71 of the detection unit 70 may be composed of an AC voltage power supply. That is, when the bonding point of the semiconductor device 100 and the bonding stage 16 include a capacitive component (for example, when both are not electrically conductive), an AC voltage signal can be used as a predetermined electrical signal. In this case, when the ball portion 43 of the wire 42 comes into contact with the bond point of the semiconductor device 100, the capacitance value of the semiconductor device 100 is further added to the capacitance value of the wire bonding device 1. As a result, the capacitance value between the bonding stage 16 and the wire 42 changes.
- the detection unit 70 can determine whether or not the ball unit 43 has contacted the second bond point of the semiconductor device 100 based on the change in the capacitance value (for example, the change in the output voltage v). In other words, the detection unit 70 can detect whether or not the wire tail 42a is cut from the second bond point of the semiconductor device 100.
- the bonding tool position detecting unit 90 detects, for example, the position of the bonding tool 40 including the position of the bonding tool 40 in the Z-axis direction (for example, the position of the tip of the bonding tool 40).
- the bonding tool position detection unit 90 outputs information regarding the detected result (hereinafter referred to as detection result information) to the control unit 80.
- the control unit 80 includes, for example, a clamper control unit 81 and an XYZ axis control unit 82.
- the clamper control unit 81 controls the opening / closing operation of the clamper 44.
- the XYZ axis control unit 82 controls the operation in the X-axis direction, the Y-axis direction, and the Z-axis direction in the bonding tool 40.
- the control unit 80 includes an XY drive mechanism 10, a Z drive mechanism 12, an ultrasonic horn 30 (ultrasonic oscillator 60), a clamper 44, a load sensor 50, a detection unit 70, a bonding tool position detection unit 90, and the like. It is connected so that signals can be sent and received between them. By controlling the operation of these configurations, the control unit 80 can execute a process of cutting the wire tail 42a so as not to cause bending of the wire tail 42a in the wire bonding.
- the control unit 80 raises and lowers the bonding tool 40 in the Z-axis direction based on the detection result information output from the bonding tool position detection unit 90. After bonding the wire 42 to the second bond point, the control unit 80 applies tension to the wire 42 by raising the bonding tool 40 in the Z-axis direction (hereinafter referred to as a tension applying step). That is, the control unit 80 applies stress to the connection portion between the wire tail 42a and the second bond point. After that, the control unit 80 releases the tension applied to the wire 42 by lowering the bonding tool 40 in the Z-axis direction (hereinafter, referred to as a tension release step). That is, the control unit 80 releases the stress at the connection portion between the wire tail 42a and the second bond point.
- a tension applying step that is, the control unit 80 applies stress to the connection portion between the wire tail 42a and the second bond point.
- the control unit 80 determines, for example, the moving direction and height of the ascending tip of the bonding tool 40 in the tension applying step based on preset information on ascending (hereinafter referred to as ascending information). Similarly, the control unit 80 determines the moving direction and height of the descent of the tip of the bonding tool 40 in the tension release step, for example, based on preset information regarding descent (hereinafter referred to as descent information).
- descent information preset information regarding descent
- the height of the tip of the bonding tool 40 means a distance from a predetermined reference point, and the predetermined reference point is not particularly limited and may be, for example, a second bond point.
- the control unit 80 determines the height of the tip of the bonding tool 40 based on the ascending information or the descending information, but the present invention is not limited to this.
- the control unit 80 may determine the moving distance of the tip of the bonding tool 40 based on the ascending information or the descending information.
- the control unit 80 may determine the moving distance that rises in the Z-axis direction from the second bond point in the tension applying step, or from the end point raised in the tension applying step in the tension releasing step.
- the moving distance descending in the Z-axis direction may be determined.
- the ascending height or moving distance of the tip of the bonding tool 40 may be referred to as an “ascending moving amount”, and the descending height or moving distance may be referred to as a “descending moving amount”.
- the ascending moving direction is, for example, a direction away from the second bond point, and is preferably a Z-axis direction.
- the downward moving direction is, for example, a direction approaching the second bond point, and is preferably a direction along the ascending moving direction.
- stress in the X-axis direction or the Y-axis direction can be applied to the lower end of the wire tail 42a.
- the wire tail 42a can be cut with a small tensile force as described later.
- the starting point in the ascending moving direction may be, for example, a second bond point or a point deviated from the second bond point in the XY plane.
- the start point in the descending moving direction may be, for example, the end point of the tension applying step.
- the ascending moving direction and the descending moving direction are set in the Z-axis direction, the starting point of the starting ascending moving direction is set as the second bond point, and the starting descending moving direction is set. It will be described as assuming that the start point is set to the end point of the tension applying process.
- control unit 80 may automatically set the height or the moving distance (moving amount) in the tension applying step and the tension releasing step based on the thickness of the wire 42, for example. Specifically, the control unit 80 may set, for example, a predetermined ratio (for example, 60%) to the thickness of the wire 42 as the ascending movement amount. The control unit 80 may set a predetermined ratio (for example, 30%) to the thickness of the wire 42 as the amount of downward movement. Further, the control unit 80 may automatically set the amount of movement of the descent in the tension release step based on, for example, the ascending information. Specifically, the control unit 80 may set a predetermined ratio (for example, 50%) to the ascending movement amount as the descending movement amount.
- a predetermined ratio for example, 60%
- control unit 80 automatically sets, for example, the ascending movement amount of the tension applying process and the descending moving amount of the tension release process based on the material of the wire 42, in addition to the thickness of the wire 42. You may. Specifically, for example, the control unit 80 may set the ascending movement amount to be larger and the descending movement amount to be smaller as the material of the wire 42 is harder. This is because the stronger the strength of the wire 42, the less bending deformation occurs even if a large tension is applied. As a result, the amount of work required for setting the worker can be reduced.
- control unit 80 is set so that, for example, the ascending movement amount in the tension applying process is larger than the descending moving amount in the tension release process. Then, it is desirable that the control unit 80 repeats, for example, the tension applying process and the tension releasing process a plurality of times. That is, in the control unit 80, for example, the height of the tip of the bonding tool 40 in the current tension applying step (the second tension applying step described later) is the bonding in the previous tension applying step (the first tension applying step described later). It is set to be higher than the height of the tip of the tool 40.
- the control unit 80 repeats the tension applying step and the tension releasing step, so that the lower end of the wire tail 42a (the end in the ⁇ Z axis direction) and the wire 42 connected to the second bond point are finely crushed.
- Metal fatigue is gradually caused in the portion between the shape and the end portion (hereinafter referred to as the bonding end portion 42c). That is, the tensile strength at the portion between the lower end of the wire tail 42a and the bonding end portion 42c is reduced.
- the wire tail 42a can be cut from the second bond point without applying a large tensile force to the portion.
- connection portion between the wire tail 42a and the second bond point is gradually thinned, and the wire tail 42a can be cut with a small pulling force at the time of cutting.
- the wire tail 42a is not bent and deformed, and the bonding quality can be improved.
- the control unit 80 has a series of steps including a tension applying step and a tension releasing step. To stop.
- the tension applying step and the tension releasing step can be executed a minimum number of times, so that the time of the cutting step of the wire tail 42a can be shortened. Further, since it is not necessary to set the number of times of the tension applying process and the tension releasing process, the amount of work of the operator can be reduced.
- the control unit 80 is connected to, for example, an operation unit 132 for inputting information for control (hereinafter referred to as control information) and a display unit 134 for outputting control information.
- the operator confirms the screen on the display unit 134, and inputs control information (rising information, descending information, etc.) on the operation unit 132.
- the control unit 80 is a computer device including a CPU, a memory, and the like, and the memory stores a program and the like for executing processing necessary for wire bonding in advance.
- the control unit 80 is configured to perform each step for controlling the operation of the bonding tool 40 described in the wire bonding method described later (for example, includes a program for causing a computer to execute each step).
- the wire bonding method is a method using a wire bonding method using the wire bonding device 1.
- FIG. 5 is a flowchart showing an example of a wire bonding method.
- 6A to 6L are diagrams showing an example of the operation of each process.
- FIG. 7 is a timing chart showing each process.
- the times t1 to t9 in FIGS. 6A to 6L correspond to the times t1 to t9 in FIG. 7.
- FIG. 8 is a timing chart showing a detailed example of the tension applying process and the tension releasing process.
- step S10 time t1
- the wire bonding apparatus 1 forms a ball portion 43 at the tip of the wire 42 extending from the tip of the bonding tool 40.
- the clamper 44 is, for example, in an open state.
- step S11 (time t1), the wire bonding apparatus 1 lowers the bonding tool 40 toward the electrode pad 112 of the semiconductor die 110.
- the clamper 44 is, for example, in a closed state.
- step S12 time t2
- the wire bonding device 1 brings the ball portion 43 into contact with the electrode pad 112.
- the wire bonding apparatus 1 keeps the clamper 44 open and controls the ultrasonic vibration to ON (first bonding step).
- the ball portion 43 is bonded to the electrode pad 112.
- the wire bonding apparatus 1 pays out the wire 42 from the tip of the bonding tool 40 while raising the tip of the bonding tool 40 in the Z-axis direction.
- the detection unit 70 detects an electric signal. At this time, the clamper 44 is in an open state.
- step S13 time t3
- the wire bonding apparatus 1 is connected to the wire 42 on the side opposite to the second bond point (here, the electrode pad 122) (in the direction of the “arrow” in FIG. 6C).
- the wire 42 exhibits a bent shape.
- step S14 time t4, as shown in FIG. 6D, the wire bonding apparatus 1 forms a wire loop of the wire 42 while bending the wire 42 toward the second bond point (wire loop step). Then, the wire bonding device 1 brings a part of the wire 42 into contact with the upper surface of the electrode pad 122. As a result, a wire loop (not shown) that electrically connects the electrode pad 112, which is the first bond point, and the electrode pad 122, which is the second bond point, is formed. In step S14, the clamper 44 is in the closed state.
- step S15 the wire bonding apparatus 1 presses a part of the wire 42 against the electrode pad 122 by the pressing portion 40a of the bonding tool 40.
- the wire bonding device 1 controls the ultrasonic vibration to ON and bonds a part of the wire 42 to the electrode pad 122 (second bonding step).
- a finely crushed bonding end portion 42c is formed at the end portion of the wire 42 connected to the electrode pad 122.
- the wire bonding apparatus 1 raises the tip of the bonding tool 40 in the Z-axis direction and feeds out the wire tail 42a from the tip (tail feeding step).
- the clamper 44 is in an open state.
- the bonding tool position detection unit 90 detects the height of the tip of the bonding tool 40, and outputs information indicating the height (hereinafter referred to as height information) to the control unit 80.
- the control unit 80 acquires the height information indicating that the height of the bonding tool 40 indicates the height H1
- the XYZ axis control unit 82 controls the Z drive mechanism 12 to operate the bonding tool 40. To stop.
- the height of the tip of the bonding tool 40 is the height H1
- the wire tail 42a is derived from the tip of the bonding tool 40.
- the wire bonding apparatus 1 closes the clamper 44 and grips the wire 42. With the clamper 44 closed, at time t8, the wire bonding apparatus 1 executes the tension applying step and the tension releasing step. As shown in FIG. 7, the wire bonding apparatus 1 controls ultrasonic vibration to ON in, for example, a tension applying step and a tension releasing step.
- the tension applying step and the tension releasing step at time t8 will be described with reference to FIG.
- step S16 time t81 in FIG. 8
- the wire bonding apparatus 1 holds the wire 42 with the clamper 44 and holds the tip of the bonding tool 40 together with the clamper 44 in the Z-axis direction. It is raised to a height (here, height H1 + D1) (hereinafter referred to as a first tension applying step).
- a first tension applying step a height
- the tip of the bonding tool 40 is increased by a predetermined moving distance (here, the moving distance D1).
- the wire bonding apparatus 1 can apply tension to the bonding end portion 42c in the Z-axis direction.
- the control unit 80 acquires the height information indicating that the height of the tip of the bonding tool 40 indicates the height H1 + D1
- the XYZ axis control unit 82 controls the Z drive mechanism 12 to control the bonding tool 40 ( The operation of the clamper 44) is stopped.
- step S17 time t82 in FIG. 8
- the wire bonding apparatus 1 lowers the wire tail 42a in the Z-axis direction to a predetermined height (here, height H1 + D1-D2) (here, height H1 + D1-D2).
- a predetermined height here, height H1 + D1-D2
- the first tension release step the tip of the bonding tool 40 is lowered by a predetermined moving distance (here, the moving distance D2).
- the wire bonding apparatus 1 can release the tension applied to the bonding end portion 42c.
- the control unit 80 acquires the height information indicating that the height of the tip of the bonding tool 40 indicates the height H1 + D1-D2
- the XYZ axis control unit 82 controls the Z drive mechanism 12 to control the bonding tool.
- the operation of 40 (clamper 44) is stopped.
- the wire bonding apparatus 1 is, for example, a next tension applying step (hereinafter referred to as a second tension applying step) and a tension releasing step (hereinafter referred to as a second tension) with respect to the first tension applying step and the first tension releasing step.
- a movement amount indicating the height or movement distance of each bonding tool 40 (referred to as a release step) is set.
- the wire bonding apparatus 1 sets the movement amount of each step based on, for example, information (rising information, descending information, etc.) regarding the movement amount stored in a predetermined storage unit.
- the wire bonding apparatus 1 sets, for example, a height higher than the height of the first tension applying process to the height of the second tension applying process.
- the wire bonding apparatus 1 sets, for example, a height higher than the height of the first tension release step to the height of the second tension release step.
- the wire bonding apparatus 1 has, for example, the same moving distance as the moving distance of the first tension applying step and the moving distance of the first tension releasing step, the moving distance of the second tension applying step and the moving distance of the second tension releasing step. It may be set to a distance.
- the "same travel distance" means, for example, a travel distance that allows a mechanical error of the wire bonding device 1 in two travel distances.
- step S19 time t83 in FIG. 8
- the wire bonding apparatus 1 grips the wire 42 with the clamper 44 in the second tension applying step, and holds the tip of the bonding tool 40 together with the clamper 44.
- the tip of the bonding tool 40 is increased by a predetermined moving distance (here, moving distance D1) starting from the end point (here, height H1 + D1-D2) of the first tension release step.
- the wire bonding apparatus 1 can apply tension to the bonding end portion 42c in the Z-axis direction.
- the control unit 80 acquires the height information indicating that the height of the tip of the bonding tool 40 indicates the height H1 + 2D1-D2
- the XYZ axis control unit 82 controls the Z drive mechanism 12 to control the bonding tool.
- the operation of 40 (clamper 44) is stopped.
- step S20 time t84 in FIG. 8
- the wire bonding apparatus 1 raises the wire tail 42a in the Z-axis direction at a predetermined height (here, height H1 + 2D1) in the second tension release step. -Lower to -2D2).
- the tip of the bonding tool 40 is lowered by a predetermined moving distance (here, moving distance D2) starting from the end point (here, height H1 + 2D1-D2) of the second tension applying step.
- the wire bonding apparatus 1 can release the tension applied to the bonding end portion 42c.
- the control unit 80 acquires the height information indicating that the height of the tip of the bonding tool 40 indicates the height H1 + 2D1-2D2
- the XYZ axis control unit 82 controls the Z drive mechanism 12 to control the bonding tool.
- the operation of 40 (clamper 44) is stopped.
- step S21 the wire bonding apparatus 1 determines whether or not the wire tail 42a has been cut. Specifically, the wire bonding apparatus 1 determines that the wire tail 42a has been cut when the electric signal is not detected in the detection unit 70 (step S21: YES). In this case, the wire bonding apparatus 1 ends the process for cutting the wire tail 42a. On the other hand, when the electric signal is detected by the detection unit 70, the wire bonding apparatus 1 determines that the wire tail 42a is not cut (step S21: NO). In this case, the wire bonding apparatus 1 shifts the process to step S18.
- first and second tension applying steps and the first and second tension releasing steps have been described as shown at time t81 to time t84, but as shown at time t85 and t86 in FIG. 8, detection.
- the tension applying step and the tension releasing step are repeated until the electric signal is no longer detected in the unit 70.
- tension is applied to the wire tail 42a stepwise by a plurality of tension applying steps, and excessive tension is applied to the wire tail 42a.
- the bonding tool 40 can be operated so as not to be applied.
- the connection portion between the wire tail 42a and the bond point here, the bonding end portion 42c
- the wire tail 42a can be cut with a small pulling force at the time of cutting.
- the wire bonding apparatus 1 does not detect the electric signal in the detection unit 70 as shown in the graph (OFF) of the “electric signal” shown in FIG. 7. After making a determination, the tension applying process and the tension releasing process are completed.
- FIG. 9 is a timing chart showing other examples of the tension applying process and the tension releasing process.
- the height of the second tension applying step (height H + D in FIG. 9) is higher than the height of the first tension applying step (height H in FIG. 9). It suffices if it is set to be high. That is, the height of the second tension release step may be the same as the height of the first tension release step. Furthermore, the height of the second tension release step and the height of the first tension release step may be substantially the same as the height of the second bond point. This simplifies the processing for the amount of downward movement in the tension release step, and thus improves the processing speed of the system.
- the present invention is not limited to this.
- the above embodiment may be applied to a method of forming a bump 140 on an electrode 212 which is a bond point of a semiconductor device 200 in the bump bonding shown in FIG.
- the steps S10 to S14 can be omitted from the flowchart of FIG.
- the above embodiment may be applied to wedge bonding. In this case, the process of step S10 can be omitted from the flowchart of FIG.
- the wire bonding apparatus 1 has been described as determining whether or not the wire tail 42a has been cut after the second tension release step (step S20), but the present invention is not limited to this.
- the wire bonding apparatus 1 may determine whether or not the wire tail 42a has been cut after the second tension applying step (step S19), or may always determine whether or not the wire tail 42a has been cut. good. As a result, it can be determined whether or not the wire tail 42a has been cut without delay, so that the operation related to the cutting of the wire tail 42a of the wire bonding apparatus 1 can be reduced.
- the wire bonding apparatus 1 has been described as having the clamper 44 closed in the tension release step, but the present invention is not limited to this.
- the clamper 44 may be open. This facilitates the operation of releasing the tension of the wire 42.
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Abstract
Description
図1~図4を参照して、ワイヤボンディング装置1について説明する。図1は、本実施形態に係るワイヤボンディング装置1の一例を示す図である。図2Aは、ボンディングアーム20の頂面図である。図2Bは、ボンディングアーム20の底面図である。図3は、検出部70の概要の一例を示す図である。図4は、検出部70の概要の他の例を示す図である。
次に、図5~図8を参照して、ワイヤボンディング方法について説明する。ワイヤボンディング方法は、ワイヤボンディング装置1によるワイヤボンディング方法を用いた方法である。図5は、ワイヤボンディング方法の一例を示すフローチャートである。図6A~図6Lは、各工程の動作の一例を示す図である。図7は、各工程を示すタイミングチャートである。図6A~図6Lの時刻t1~t9は、図7の時刻t1~t9に対応する。図8は、テンション付与工程及びテンション解放工程の詳細の一例を示すタイミングチャートである。
上記において、ワイヤボンディング装置1は、図8に示すように、第1テンション付与工程の移動距離及び第1テンション解放工程の移動距離と同一の移動距離を設定した動作について説明したが、これに限定されない。図9は、テンション付与工程及びテンション解放工程の他の例を示すタイミングチャートである。図9に示すように、ワイヤボンディング装置1は、例えば、第2テンション付与工程の高さ(図9では高さH+D)が第1テンション付与工程の高さ(図9では高さH)よりも高くなるよう設定されていればよい。すなわち、第2テンション解除工程の高さが第1テンション解除工程の高さと同一であってもよい。さらに言うと、第2テンション解除工程の高さ及び第1テンション解除工程の高さは、第2ボンド点と略同一の高さであってもよい。これにより、テンション解除工程における下降の移動量に対する処理が簡素化されるため、システムの処理速度が向上する。
Claims (10)
- ワイヤボンディング処理を行うワイヤボンディング装置であって、
ワイヤを挿通するボンディングツールと、
超音波ホーンを介して前記ボンディングツールに超音波振動を供給する超音波振動子と、
前記ボンディングツールを移動させる駆動機構と、
前記ワイヤボンディング処理を制御する制御部と、
を備え、
前記制御部は、
前記ボンディングツールでワイヤを押圧することによって、ボンディング対象であるボンド点にワイヤをボンディングするボンディング工程と、
前記ボンド点にボンディングされたワイヤからワイヤテールを繰り出すテール繰出工程と、
ワイヤをクランプした状態で、前記ボンディングツールを上昇させて、ワイヤにテンションを付与するテンション付与工程と、
前記ボンディングツールを下降させて、ワイヤに付与されたテンションを解放するテンション解放工程と、
前記テンション付与工程及び前記テンション解放工程を含む一連の工程を少なくとも1回実行した後、前記ボンディングツールを上昇させて、前記ボンド点にボンディングされたワイヤから前記ワイヤテールを切断するテールカット工程と、
を実行する、ワイヤボンディング装置。 - 前記制御部は、前記テールカット工程において、前記テンション付与工程及び前記テンション解放工程を含む一連の工程を複数回実行する、
請求項1に記載のワイヤボンディング装置。 - 前記テンション付与工程は、第1テンション付与工程と、前記第1テンション付与工程よりも後に実行される第2テンション付与工程とを含み、
前記テンション解放工程は、前記第1テンション付与工程と前記第2テンション付与工程の間に実行され、
前記第2テンション付与工程における前記ボンディングツールの上昇の移動量は、前記テンション解放工程における前記ボンディングツールの下降の移動量よりも大きい、
請求項2に記載のワイヤボンディング装置。 - 前記第1テンション付与工程における前記ボンディングツールの上昇の移動量は、前記第2テンション付与工程における前記ボンディングツールの上昇の移動量と同一である、
請求項3に記載のワイヤボンディング装置。 - 前記第1テンション付与工程における前記ボンディングツールの上昇の移動量は、前記テンション解放工程における前記ボンディングツールの下降の移動量と同一である、
請求項3に記載のワイヤボンディング装置。 - 前記制御部は、
前記ボンディングツールの先端のワイヤを第1ボンド点にボンディングする第1ボンディング工程と、
前記第1ボンディング工程を実行した後、前記第1ボンド点から、前記ボンド点である第2ボンド点に向かってワイヤをループさせるワイヤループ工程と、
をさらに実行する、
請求項1から請求項5のいずれか一項に記載のワイヤボンディング装置。 - 前記ボンディング工程は、前記ボンディングツールの先端のワイヤをボール状に形成し、前記ボール状に形成されたワイヤを前記ボンド点にボンディングすることを含む、
請求項1から請求項5のいずれか一項に記載のワイヤボンディング装置。 - クランプされたワイヤに供給される電気信号に基づいて、前記ボンド点で前記ワイヤテールが切断されたことを検出する検出部をさらに備え、
前記制御部は、前記検出部において前記ボンド点で前記ワイヤテールが切断されたことが検知されたときに、前記テンション付与工程及び前記テンション解放工程を含む一連の工程を停止させる、
請求項1から請求項5のいずれか一項に記載のボンディング装置。 - ワイヤボンディング処理を行うワイヤボンディング装置を用いて実行されるワイヤ切断方法であって、
前記ワイヤボンディング装置は、
ワイヤを挿通するボンディングツールと、
超音波ホーンを介して前記ボンディングツールに超音波振動を供給する超音波振動子と、
前記ボンディングツールを移動させる駆動機構と、
前記ワイヤボンディング処理を制御する制御部と、
を備え、
前記ワイヤ切断方法は、
前記ボンディングツールでワイヤを押圧することによって、ボンディング対象であるボンド点にワイヤをボンディングするボンディング工程と、
前記ボンド点にボンディングされたワイヤからワイヤテールを繰り出すテール繰出工程と、
ワイヤをクランプした状態で、前記ボンディングツールを上昇させて、ワイヤにテンションを付与するテンション付与工程と、
前記ボンディングツールを下降させて、ワイヤに付与されたテンションを解放するテンション解放工程と、
前記テンション付与工程及び前記テンション解放工程を含む一連の工程を少なくとも1回実行した後、前記ボンディングツールを上昇させて、前記ボンド点にボンディングされたワイヤから前記ワイヤテールを切断するテールカット工程と、
を実行する、ワイヤ切断方法。 - ワイヤボンディング装置にワイヤボンディング処理を実行させるプログラムであって、
前記ワイヤボンディング装置は、
ワイヤを挿通するボンディングツールと、
超音波ホーンを介して前記ボンディングツールに超音波振動を供給する超音波振動子と、
前記ボンディングツールを移動させる駆動機構と、
前記ワイヤボンディング処理を制御する制御部と、
を備え、
前記プログラムは、前記ワイヤボンディング装置に、
前記ボンディングツールでワイヤを押圧することによって、ボンディング対象であるボンド点にワイヤをボンディングするボンディングステップと、
前記ボンド点にボンディングされたワイヤからワイヤテールを繰り出すテール繰出ステップと、
ワイヤをクランプした状態で、前記ボンディングツールを上昇させて、ワイヤにテンションを付与するテンション付与ステップと、
前記ボンディングツールを下降させて、ワイヤに付与されたテンションを解放するテンション解放ステップと、
前記テンション付与ステップ及び前記テンション解放ステップを含む一連のステップを少なくとも1回実行した後、前記ボンディングツールを上昇させて、前記ボンド点にボンディングされたワイヤから前記ワイヤテールを切断するテールカットステップと、
を実行させる、プログラム。
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JP2022569661A JP7416491B2 (ja) | 2020-12-18 | 2020-12-18 | ワイヤボンディング装置、ワイヤ切断方法及びプログラム |
PCT/JP2020/047415 WO2022130617A1 (ja) | 2020-12-18 | 2020-12-18 | ワイヤボンディング装置、ワイヤ切断方法及びプログラム |
CN202080098905.0A CN115315792A (zh) | 2020-12-18 | 2020-12-18 | 打线接合装置、打线切断方法以及程序 |
US17/912,527 US20230163097A1 (en) | 2020-12-18 | 2020-12-18 | Wire bonding device, wire cutting method and non-transitory computer-readable recording medium recording program |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH09252005A (ja) * | 1996-03-15 | 1997-09-22 | Shinkawa Ltd | バンプ形成方法 |
JP2007294581A (ja) * | 2006-04-24 | 2007-11-08 | Shinkawa Ltd | ボンディング装置のテールワイヤ切断方法及びプログラム |
WO2015122410A1 (ja) * | 2014-02-14 | 2015-08-20 | 株式会社新川 | ワイヤボンディング装置及び半導体装置の製造方法 |
Family Cites Families (1)
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JP2723277B2 (ja) | 1989-01-30 | 1998-03-09 | 株式会社東芝 | ワイヤボンディング方法 |
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- 2020-12-18 CN CN202080098905.0A patent/CN115315792A/zh active Pending
- 2020-12-18 US US17/912,527 patent/US20230163097A1/en active Pending
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JPH09252005A (ja) * | 1996-03-15 | 1997-09-22 | Shinkawa Ltd | バンプ形成方法 |
JP2007294581A (ja) * | 2006-04-24 | 2007-11-08 | Shinkawa Ltd | ボンディング装置のテールワイヤ切断方法及びプログラム |
WO2015122410A1 (ja) * | 2014-02-14 | 2015-08-20 | 株式会社新川 | ワイヤボンディング装置及び半導体装置の製造方法 |
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JPWO2022130617A1 (ja) | 2022-06-23 |
CN115315792A (zh) | 2022-11-08 |
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