WO2022123983A1 - Fluid control device and electronic equipment - Google Patents

Abstract

This fluid control device includes a flow path space component, an inlet, an outlet, and a driving mechanism. The flow path space component has a flexible portion having flexibility and an opposite portion opposite to the flexible portion, and a flow path space serving as a fluid flow path is configured between the flexible portion and the opposite portion. The inlet is configured in an outer peripheral portion of the flow path space when viewed from an opposite direction in which the flexible portion and the opposite portion are opposite to each other and allows a fluid to flow into the flow path space. The outlet is configured at a location different from the inlet at the outer peripheral portion of the flow path space when viewed from the opposite direction and allows the fluid to flow out from the flow path space. The driving mechanism bends the flexible portion to increase or decrease the volume of the flow path space. Further, in a reference state in which the flexible portion is not bent by the driving mechanism, at least a portion of a region on an inner side from the outer peripheral portion of the flow path space when viewed from the opposite direction is configured to be concave toward the opposite portion.

Description

Fluid control device and electronic equipment

This technology relates to fluid control devices that transport fluids and electronic devices.

As a small and thin pump, for example, a diaphragm type pump using a diaphragm has been put into practical use (see, for example, Patent Document 1). The diaphragm type pump is equipped with a pump chamber whose volume fluctuates due to bending deformation of the diaphragm, and it is possible to suck the fluid into the pump chamber by increasing the volume and discharge the fluid from the pump chamber by reducing the volume. be.

Japanese Unexamined Patent Publication No. 2011-256741

Regarding the fluid control device as described in Patent Document 1, there is a demand for a technique capable of realizing miniaturization and high performance.

In view of the above circumstances, the purpose of this technique is to provide a small and high-performance fluid control device and an electronic device using the same.

In order to achieve the above object, the fluid control device according to one embodiment of the present technology includes a flow path space component, an inlet, an outlet, and a drive mechanism.
The flow path space constituent portion has a flexible portion having flexibility and a facing portion facing the flexible portion, and a fluid flow path is provided between the flexible portion and the facing portion. It constitutes a flow path space.
The inflow port is formed in the outer peripheral portion of the flow path space when viewed from the opposite direction in which the flexible portion and the facing portion face each other, and causes the fluid to flow into the flow path space.
The outlet is configured at a position different from the inlet on the outer peripheral portion of the flow path space when viewed from the opposite direction, and causes the fluid to flow out from the flow path space.
The drive mechanism bends the flexible portion and increases or decreases the volume of the flow path space.
Further, in the reference state in which the flexible portion is not bent by the drive mechanism, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the facing direction is opposed to the flexible portion. It is configured to be concave toward the portion.

The flexible portion may be configured such that the central portion when viewed from the facing direction is concave toward the facing portion in the reference state.

The flexible portion may have a shape in which a plate-shaped member is concavely deformed toward the facing portion in the reference state.

The drive mechanism may bend the flexible portion so that the concave portion of the flexible portion in the reference state moves most along the facing direction.

The drive mechanism may have a piezoelectric element connected to a surface of the flexible portion opposite to the surface of the flexible portion facing the facing portion.

When the flexible portion is a first flexible portion, the facing portion may be composed of a second flexible portion having flexibility. In this case, the drive mechanism may bend the second flexible portion. Further, in the second flexible portion, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the opposite direction in the reference state is the first flexible portion. It may be configured to be concave toward the portion.

The first flexible portion and the second flexible portion may be configured to resonate with each other.

The drive mechanism includes a first piezoelectric element connected to a surface of the first flexible portion opposite to the surface of the first flexible portion facing the second flexible portion, and the second flexible portion. It may have a second piezoelectric element connected to a surface opposite to the surface facing the first flexible portion of the above. In this case, the resonance frequency of the entire first flexible portion and the first piezoelectric element is configured to be close to the overall resonance frequency of the second flexible portion and the second piezoelectric element. You may.

When the flexible portion is a first flexible portion, the facing portion may be composed of a second flexible portion having flexibility. In this case, the first flexible portion and the second flexible portion may be configured to resonate with each other.

The drive mechanism may have a piezoelectric element connected to a surface of the first flexible portion opposite to the surface of the first flexible portion facing the second flexible portion. In this case, the resonance frequency of the second flexible portion may be configured to be close to the resonance frequency of the entire first flexible portion and the piezoelectric element.

The thickness of the second flexible portion may be larger than the thickness of the first flexible portion.

In the second flexible portion, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the opposite direction in the reference state is the first flexible portion. It may be configured to be concave toward.

The flexible portion may have a groove portion configured in the vicinity of the outer peripheral portion of the flexible portion when viewed from the facing direction.

The drive mechanism may have a piezoelectric element connected to a surface of the flexible portion opposite to the surface of the flexible portion facing the facing portion. In this case, the groove portion may be configured at a position with respect to the outer peripheral portion of the piezoelectric element when viewed from the facing direction.

The fluid control device may further include a suction port, a suction space component, a discharge port, and a discharge space component.
The fluid is sucked into the suction port.
The suction space component constitutes a suction space that communicates the suction port and the inflow port.
The fluid is discharged from the discharge port.
The discharge space configuration constitutes a discharge space that communicates the discharge port and the outlet.

In the flow path space component, the central region constitutes the flexible portion when viewed from the facing direction, and the first plate-shaped member made of a metal material and the central region when viewed from the facing direction. The region constitutes the facing portion, the second plate-shaped member made of a metal material, and the central region as an opening when viewed from the facing direction, have a predetermined thickness, and the first plate-shaped member. And the second plate-shaped member, and may have a spacer member which is arranged between the first plate-shaped member and the second plate-shaped member and is joined to each of the first plate-shaped member by diffusion bonding.

The spacer member is configured for suction at a position different from the suction opening so as to communicate with the outer peripheral portion of the opening and the suction opening so as to communicate with the outer peripheral portion of the opening. It may have an opening.

A suction port into which the fluid is sucked is configured in at least one of a region covering the suction opening of the first plate-shaped member or a region covering the suction opening of the second plate-shaped member. You may. In this case, the discharge port for discharging the fluid to at least one of the region covering the discharge opening of the first plate-shaped member or the region covering the discharge opening of the second plate-shaped member. May be configured.

The electronic device according to one form of the present technology is equipped with the fluid control device.

It is a perspective view which saw diagonally from the upper left side of the fluid control device which concerns on 1st Embodiment. It is the top view which looked at the fluid control device from above. FIG. 2 is a cross-sectional view taken along the line AA shown in FIG. It is a schematic diagram which shows the structural example of a drive mechanism. It is a schematic diagram which shows an example of the connection method of a piezoelectric element to a top surface member. It is a schematic diagram for demonstrating the initial volume. It is a top view when the fluid control apparatus which concerns on 2nd Embodiment is seen from above. FIG. 7 is a cross-sectional view taken along the line BB shown in FIG. 7. It is a figure which showed each member which constitutes a fluid control device individually. It is a schematic diagram for demonstrating the manufacturing method of a fluid control apparatus. It is a schematic diagram which shows an example of the connection method of the 1st piezoelectric element and the 2nd piezoelectric element to the 1st flexible part and the 2nd flexible part. It is a schematic diagram which shows an example of the fluid flow at the time of a pump operation. It is a schematic diagram and a table for demonstrating an initial volume. It is a schematic diagram and a table for demonstrating an initial volume. It is a schematic diagram which shows the structural example of the fluid control apparatus which concerns on 3rd Embodiment. It is a schematic diagram which shows the structural example of the fluid control apparatus which concerns on other embodiment.

Hereinafter, embodiments relating to this technique will be described with reference to the drawings.

<First Embodiment>
[Fluid control device configuration example]
A configuration example of the fluid control device according to the first embodiment of the present technology will be described.
The fluid control device 1 is a diaphragm type fluid control device, and functions as a pump capable of sucking in and discharging a fluid.
The fluid is a gas, a liquid, another fluid, or the like, and is not particularly limited.

Below, for the sake of clarity, the X direction in the figure is the left-right direction (the direction of the arrow is the left side / the opposite direction is the right side), and the Y direction is the depth direction (the direction of the arrow is the front side / the opposite direction is the back side). , The Z direction will be described as the vertical direction (the direction of the arrow is the upper side / the opposite direction is the lower side).
Of course, the direction in which the fluid control device 1 is used is not limited.

FIG. 1 is a perspective view of the fluid control device 1 viewed obliquely from above on the left side.
FIG. 2 is a top view of the fluid control device 1 as viewed from above.
FIG. 3 is a cross-sectional view taken along the line AA shown in FIG.
Note that FIG. 2 shows the internal configuration of the fluid control device 1 with a broken line. Further, the drive mechanism 5 shown in FIG. 3 is not shown in FIGS. 1 and 2.

As shown in FIGS. 1 to 3, the fluid control device 1 has a flow path space component 2, an inlet 3, an outlet 4, and a drive mechanism 5.

The flow path space component 2 constitutes the flow path space S1 which is the flow path of the fluid F.
In the present disclosure, the space constituent part includes a part constituting the space (a part in contact with the space) and a member including the part. For example, it is assumed that a plurality of partition walls are connected on one member to form a plurality of spaces separated from each other. In this case, one member to which a plurality of partition walls are connected functions as a space component for each of the plurality of spaces.
That is, one member may be commonly used as a space component that constitutes a plurality of spaces.

As shown in FIGS. 1 to 3, in the present embodiment, the approximate outer shape of the flow path space component 2 is a cylindrical shape (cylindrical shape), and the flow path space S1 is formed inside.
Specifically, the flow path space component 2 is composed of an upper surface member 6, a lower surface member 7, and spacer members 8a and 8b. The internal space surrounded by the upper surface member 6, the lower surface member 7, and the spacer members 8a and 8b is the flow path space S1.
The flow path space S1 can be said to be a pump chamber that causes a pump function to act on the fluid F by generating pressure inside.

The upper surface member 6 is a disk-shaped member having a circular outer shape when viewed from the vertical direction (Z direction). The upper surface member 6 is composed of a flexible member.
The lower surface member 7 is a disk-shaped member having a circular outer shape when viewed from the vertical direction. The lower surface member 7 is configured so that the outer shape seen from the vertical direction is equal to that of the upper surface member 6.
Further, the lower surface member 7 is arranged so as to face the upper surface member 6 along the vertical direction. Therefore, the vertical direction (Z direction) corresponds to the facing direction in which the upper surface member 6 and the lower surface member 7 face each other.

The spacer members 8a and 8b are arranged between the upper surface member 6 and the lower surface member 7.
As shown in FIG. 2, when viewed from the vertical direction, the peripheral region 10a of the semicircular portion on the inner side of the upper surface member 6 and the lower surface member 7 is located on the inner side from the position P1 having a diameter extending in the X direction. The spacer member 8a is arranged in a region excluding the position up to the position P2 offset to.
Further, when viewed from the vertical direction, from the position P1 having a diameter extending in the X direction to the position P3 offset to the front side in the peripheral region 10b of the semicircular portion on the front side of the upper surface member 6 and the lower surface member 7. The spacer member 8b is arranged in the area other than the above.
Therefore, among the peripheral peripheral regions 10a and 10b having a circular shape of the upper surface member 6 and the lower surface member 7 when viewed from the vertical direction, the back side and the front side from the position P1 having the diameter extending in the X direction. Spacer members 8a and 8b are arranged in a region excluding the region up to the position offset to (P2 and P3).

The inflow port 3 is an opening for the fluid F to flow into the flow path space S1. As shown in FIG. 2, the inflow port 3 is configured in the outer peripheral portion 11 of the flow path space S1 when viewed from the vertical direction. The inflow port 3 is an opening that communicates the external space of the flow path space component 2 with the flow path space S1.
In the present embodiment, the gap between the right end portion 12a of the spacer member 8a and the right end portion 13a of the spacer member 8b is configured as the inflow port 3.

The outflow port 4 is an opening for the fluid F to flow out from the flow path space S1. As shown in FIG. 2, the outlet 4 is configured at a position different from the inlet 3 of the outer peripheral portion 11 of the flow path space S1 when viewed from above and below. The outflow port 4 also serves as an opening that communicates the external space of the flow path space component 2 with the flow path space S1.
In the present embodiment, the gap between the left end portion 12b of the spacer member 8a and the left end portion 13b of the spacer member 8b is configured as the outlet 4.
Therefore, the inflow port 3 and the outflow port 4 are configured to face each other along the X direction.

The positions, numbers, shapes, etc. of the inlet 3 and the outlet 4 are not limited and may be arbitrarily designed. For example, a plurality of inlets 3 and a plurality of outlets 4 may be formed.

Further, as shown in FIG. 3, in the reference state, at least a part of the region of the upper surface member 6 on the inner side of the outer peripheral portion 11 of the flow path space S1 when viewed from the vertical direction faces the lower surface member 7. It is configured to be concave.
That is, when viewed from the vertical direction, at least a part of the region on the inner side of the upper surface member 6 is configured to be concave toward the lower surface member 7.
The reference state is a state in which the upper surface member 6 is not bent by the drive mechanism 5 described later. That is, the reference state is a state in which the operation of bending the upper surface member 6 by the drive mechanism 5 is not executed. It can be said that the reference state is a state in which the fluid control device 1 is not driven.

In the present disclosure, the concave configuration includes, for example, a configuration in which a pressing force is applied to a certain point on the surface of the member and the member itself is deformed into a concave shape. For example, a configuration in which the plate-shaped member is deformed into a concave shape by pressing a certain point on the plate-shaped member is included.
Alternatively, a case where a part of the surface of the member is recessed and is configured as a hole is also included. In addition, any configuration that can be expressed as being recessed toward the facing member is included.

Further, as shown in FIG. 3, the configuration in which the upper surface member 6 is concave toward the lower surface member 7 means that the facing distance to at least a part of the lower surface member 7 in the inner region of the upper surface member 6 is the upper surface member. It can also be expressed as a configuration that is smaller than the facing distance to the lower surface member 7 on the outer peripheral portion of 6.
For example, as shown in the cross-sectional view shown in FIG. 3, the facing distance may decrease in a curved shape from the outer peripheral portion of the upper surface member 6 to the portion where the facing distance is the smallest (the portion closest to the lower surface member 7). obtain.
Further, there may be a case where only a part of the region on the inner side of the upper surface member 6 is configured to be close to the lower surface member 7.

The facing distance between the upper surface member 6 and the lower surface member 7 can also be referred to as the flow path height of the fluid F.
The configuration in which the upper surface member 6 is concave toward the lower surface member 7 in the present embodiment is such that the flow path height in at least a part of the region on the inner side of the upper surface member 6 is the flow path in the outer peripheral portion of the upper surface member 6. It can also be expressed as a configuration that is smaller than the height.

In the present embodiment, in the reference state, the central portion 15 when the upper surface member 6 is viewed from the vertical direction is configured to be concave toward the lower surface member 7. That is, in the reference state, the upper surface member 6 which is a plate-shaped member is deformed in a concave shape toward the lower surface member 7 at the central portion 15.
Therefore, the flow path space S1 is a space having a shape in which the upper surface (the surface on the side in contact with the upper surface member 6) of the cylindrical space is concave in the reference state.
The shape of the flow path space S1 that serves as the pump chamber is not limited. For example, any shape such as a circular shape (a perfect circle, an ellipse) or a polygon when viewed from the vertical direction may be adopted. For example, by forming the upper surface member in a concave shape toward the lower surface member, it can be realized as an embodiment of the fluid control device 1 according to the present technique.

As shown in FIG. 3, the drive mechanism 5 bends the upper surface member 6 to increase or decrease the volume of the flow path space S1.
In the present embodiment, the drive mechanism 5 is configured so that the upper surface member 6 configured to be concave toward the lower surface member 7 bends downward and upward, respectively. Further, the drive mechanism 5 is configured so that the upper surface member 6 is periodically bent downward and upward, and the upper surface member 6 vibrates in the vertical direction.
In the present embodiment, the upper surface member 6 is bent so that the central portion 15, which is a concave portion (the portion where the facing distance is the smallest) in the reference state of the upper surface member 6, moves most in the vertical direction. To.

FIG. 3A is a diagram of a reference state in which the upper surface member 6 is not bent. It can be said that the reference state is a state in which no voltage is applied to the piezoelectric element 17.
As shown in FIG. 3B, the upper surface member 6 is bent downward. As a result, the volume of the flow path space S1 is reduced. When the central portion 15 of the upper surface member 6 moves to the lowermost side, the volume is reduced most (hereinafter, referred to as the minimum volume state).
As shown in FIG. 3C, the upper surface member 6 is bent upward from the reference state. As a result, the volume of the flow path space S1 increases. Then, when the central portion 15 of the upper surface member 6 moves to the uppermost side, the volume increases most (hereinafter, referred to as the maximum volume state).
The upper surface member 6 is bent from the reference state shown in FIG. 3A, and the maximum volume state and the minimum volume state are periodically and repeatedly generated. As a result, the pump function is realized, and the fluid F flowing into the flow path space S1 from the inflow port 3 can flow out from the outflow port 4 to the outside of the flow path space S1.

FIG. 4 is a schematic diagram showing a configuration example of the drive mechanism 5.
In this embodiment, as shown in FIG. 4, the drive mechanism 5 includes a piezoelectric element 17 and a drive control unit 18.
The piezoelectric element 17 is connected to the upper surface 20 on the side opposite to the lower surface 19 on the side facing the lower surface member 7 of the upper surface member 6. When viewed from the vertical direction, the piezoelectric element 17 has a circular shape and is connected to a circular region covering the flow path space S1 of the upper surface member 6.
The drive control unit 18 applies a voltage (AC voltage) to the piezoelectric element 17 as a drive signal via wiring or the like. The specific configuration of the drive control unit 18 is not limited, and any circuit configuration or the like may be adopted.

The piezoelectric element 17 is an element capable of electro-mechanical conversion, and can bend the upper surface member 6 by expanding and contracting in response to the application of a voltage.
By using a piezoelectric element, it is possible to realize vibration in a high frequency band with a high response force. That is, it is possible to repeat the increase / decrease in the volume of the flow path space S1 having a relatively small fluctuation amount at a very high speed. As a result, the output (pressure) of the pump can be improved, and a high pump function can be realized.

In the present embodiment, the diaphragm 22 is configured by the upper surface member 6 and the piezoelectric element 17.
The configuration of the drive mechanism 5 is not limited to the configuration in which the piezoelectric element 17 is used. For example, a configuration in which a dielectric elastomer or the like is used, a configuration in which a solenoid is used, or the like may be adopted.

[size]
In the present embodiment, since it is a diaphragm type fluid control device 1, it is very advantageous for miniaturization.
For example, as the upper surface member 6 and the lower surface member 7, it is possible to realize a size of about 10 mm in diameter × 1 mm in thickness. It is also possible to design the reference facing distance between the upper surface member 6 and the lower surface member 7 to be about 100 μm. The reference facing distance corresponds to the facing distance before the upper surface member 6 is formed in a concave shape, and can be said to be the facing distance on the outer peripheral portion 11 of the upper surface member 6.
The amount of dent (deformation) of the upper surface member 6 can be designed to be, for example, 10 μm to 80 μm. The amount of dent is the amount of deformation of the central portion 15 closest to the lower surface member 7 from the state before deformation to the downward side. That is, it is possible to design the central portion 15 closest to the lower surface member 7 to be as close as 20 μm to 90 μm to the lower surface member 7.
Of course, the embodiment of the fluid control device 1 according to the present technology can be realized in any size without being limited to such a size design.
It is desirable that the upper surface member 6 does not come into contact with the lower surface member 7 in the minimum volume state shown in FIG. 3B.

[material]
In this embodiment, metal materials such as stainless steel and 42 alloy are used as the upper surface member 6, the lower surface member 7, and the spacer members 8a and 8b. Of course, other metallic materials may be used. Further, any material other than the metal material such as a plastic material may be used.
Each of the upper surface member 6, the lower surface member 7, and the spacer members 8a and 8b may be made of different materials. Further, the portion of the upper surface member 6 connected to the spacer members 8a and 8b and the portion in contact with the flow path space S1 may be made of different materials. That is, the portion bent to increase or decrease the volume of the flow path space S1 and the portion connected to the spacer members 8a and 8b may be made of different materials.
For example, when viewed from the vertical direction, the region on the outer peripheral side of the upper surface member may be made of a metal material, and the region on the inner side may be made of a plastic material.

[Production method]
First, an upper surface member 6, a lower surface member 7, and spacer members 8a and 8b made of a metal material are produced by an arbitrary processing technique such as etching or laser processing.
The created upper surface member 6, lower surface member 7, and spacer members 8a and 8b are connected to each other so as to be laminated along the vertical direction.
In the present embodiment, the upper surface member 6, the lower surface member 7, and the spacer members 8a and 8 are laminated with predetermined position accuracy and joined by diffusion bonding. This makes it possible to integrally configure the flow path space component 2 as a metal.
As a result, it is advantageous to vibrate the diaphragm 22 (upper surface member 6 + piezoelectric element 17) with a high response force in a high frequency band.
The specific method and configuration for performing processing such as etching and diffusion bonding are not limited, and for example, a well-known technique may be used.
Of course, the upper surface member 6, the lower surface member 7, and the spacer members 8a and 8b may be connected to each other by a method other than diffusion joining.
In addition, other arbitrary methods such as die casting may be adopted for forming the flow path space component 2.

FIG. 5 is a schematic view showing an example of a method of connecting the piezoelectric element 17 to the upper surface member 6.
As shown in FIG. 5A, the flow path space component 2 (hereinafter, referred to as the flow path space component 2 before the concave structure) in which the upper surface member 6 is not configured in a concave shape is placed on the holding jig 23. Will be done. The lower surface member 7 side of the flow path space component 2 before the concave structure is placed on the holding jig 23.
The specific configuration of the holding jig 23 is not limited, and any jig that can hold the flow path space configuration portion 2 before the concave configuration may be used.
An appropriate amount of adhesive is applied to the upper surface 20 of the upper surface member 6 before the concave structure, and the piezoelectric element 17 is set at a predetermined position. For example, an epoxy adhesive or the like can be applied by a method such as a dispenser or pad printing. Of course, it is not limited to this.

The pressurizing jig 24 is set on the upper side of the flow path space configuration portion 2 before the concave configuration.
The shape of the pressurizing jig 24 when viewed from the vertical direction is the same as that of the piezoelectric element 17 and has a circular shape. Then, the position of the pressurizing jig 24 is set so that the entire surface of the piezoelectric element 17 can be pressurized.
The tip portion 25 of the pressurizing jig 24 on the pressurizing surface side is made of a flexible material such as silicon rubber.

As shown in FIG. 5B, the piezoelectric element 17 is pressurized from above to below by the pressurizing jig 24. Due to the pressurization by the pressurizing jig 24, the piezoelectric element 17 and the upper surface member 6 are deformed in a concave shape toward the lower surface member 7. In this state, the curing process of the adhesive is executed.
In the present embodiment, the tip portion 25 of the pressurizing jig 24 is made of a flexible material. Therefore, the tip portion 25 is deformed following the deformation of the piezoelectric element 17. As a result, it is possible to appropriately pressurize the entire surface of the piezoelectric element 17, and it is possible to realize sufficient adhesion of the piezoelectric element 17 and deformation into a desired concave shape.
Further, since the tip portion 25 is made of a flexible material, it is possible to absorb the unevenness of the surface of the piezoelectric element 17, and it is possible to prevent the piezoelectric element 17 from being destroyed by pressurization.

Regarding the pressurization by the pressurizing jig 24, the pressurizing conditions are not limited. Conditions that can deform the upper surface member 6 into a concave shape may be appropriately set. For example, the pressing force, the pressurizing time, the temperature, and the like may be appropriately set so that the dented amount of the upper surface member 6 becomes a desired dented amount.

As shown in FIG. 5, in the present embodiment, it is possible to simultaneously perform bonding of the piezoelectric element 17 and deformation for making the upper surface member 6 concave. In other words, by performing the bonding process of the piezoelectric element 17, it is possible to simultaneously deform the upper surface member 6 into a concave shape.
Therefore, a special process, a special jig, or the like for forming the upper surface member 6 in a concave shape becomes unnecessary. As a result, the manufacturing process of the flow path space component 2 can be simplified, and the manufacturing time can be shortened.
Of course, the method is not limited to the method shown in FIG. For example, the upper surface member 6 may be configured in a concave shape in advance and may be connected to the spaces 8a and 8b. Further, the piezoelectric element 17 may be adhered to the upper surface member 6 which is formed in a concave shape in advance.

[Reduction of initial volume]
FIG. 6 is a schematic diagram for explaining the initial volume.
FIG. 6A is a diagram schematically showing the flow path space S1 before the concave configuration.
FIG. 6B is a diagram schematically showing the flow path space S1 in the reference state.
FIG. 6C is a diagram schematically showing the flow path space S1 during pump drive.

As shown in FIG. 6A, the upper surface member 6 and the lower surface member 7 are arranged at a reference facing distance H.
As shown in FIG. 6B, the upper surface member 6 is formed in a concave shape with a dent amount Z. The volume of the flow path space S1 in the reference state shown in FIG. 5B is defined as the initial volume.
As shown in FIG. 6C, it is assumed that the upper surface member 6 vibrates with an amplitude M along the vertical direction from the reference state. Further, the smallest facing distance between the upper surface member 6 and the lower surface member 7 in the minimum volume state is defined as the minimum gap Gm.

As an index for evaluating the pump function of flowing the fluid F into the flow path space S1 and discharging the fluid F from the flow path space S1, the volume volatility represented by the following equation can be mentioned.
Volume volatility = volume fluctuation amount / initial volume ... (1)

The volume fluctuation amount is the volume fluctuation amount of the flow path space S1 due to the bending of the upper surface member 6, and can be expressed by the difference between the minimum volume and the maximum volume of the flow path space S1. Therefore, the volume fluctuation amount can be expressed by the deformation amount (displacement amount) of the upper surface member 6 on the lower side and the upper side.
The volume volatility is calculated by dividing the difference between the minimum volume and the maximum volume of the flow path space S1 by the initial volume. The higher the volume volatility, the higher the pump function is exhibited, and it becomes possible to realize the high-performance fluid control device 1.
For example, when the deformation amounts of the upper surface members 6 are the same, the smaller the initial volume, the larger the volume volatility, and the higher the pump function is exhibited. For example, the amount of deformation of the upper surface member 6 is greatly affected by the area of the piezoelectric element 17 connected to the upper surface member 6. Therefore, when the areas of the piezoelectric elements 17 are equal, it is important to reduce the initial volume.

As shown in FIG. 6B, in the present embodiment, since the upper surface member 6 is formed in a concave shape toward the lower surface member 7 in the reference state, the initial volume can be reduced. Therefore, as shown in the equation (1), it is possible to increase the volume volatility and realize a high pump function.

For example, it is possible to reduce the initial volume by reducing the facing distance between the upper surface member 6 and the lower surface member 7 in a state where the upper surface member 6 is not configured in a concave shape as shown in FIG. 6A. However, in this case, the facing distance between the inflow port 3 and the outflow port 4 formed in the outer peripheral portion 11 of the flow path space S1 is also uniformly reduced. Therefore, the cross-sectional areas of the inflow port 3 and the outflow port 4 become small. As a result, the flow path resistance at the inflow port 3 and the outflow port 4 becomes large, and the pump function deteriorates.
As shown in FIG. 6B, in the present embodiment, the facing distance is maintained at the reference facing distance H in the outer peripheral portion 11 of the flow path space S1. Therefore, the initial volume is reduced while the height of the flow path at the inlet 3 and the outlet 4 is sufficiently maintained.
This makes it possible to prevent the flow path resistance at the inflow port 3 and the outflow port 4 from becoming large. As a result, the flow of the fluid F is not obstructed, that is, the flow path loss can be sufficiently suppressed, and a high pump function can be realized.

Further, when the upper surface member 6 is not formed in a concave shape, the reaction force (back pressure) with respect to the force applied to the upper surface member 6 in the vertical direction greatly acts on the entire upper surface member 6. As a result, high-speed vibration (piston movement) is hindered and the pump function deteriorates.
As shown in FIG. 6B, in the present embodiment, the central portion 15 of the upper surface member 6 is closest to the lower surface member 7 and is vibrated with the largest amplitude M. On the other hand, in the outer peripheral portion 11 of the flow path space S1, the fluctuation of the facing distance is small, and the amplitude of vibration is also suppressed.
That is, in the present embodiment, while a very high pressure is generated in the region on the central side of the upper surface member 6, the generation of pressure is suppressed in the outer peripheral portion 11 of the flow path space S1. As a result, it becomes possible to suppress the reaction force acting on the entire upper surface member 6, so that high-speed vibration (piston movement) becomes possible and a high pump function is exhibited.

For example, as a comparative example, it is assumed that the fluid control device is configured with the configuration before the upper surface member 6 becomes concave as shown in FIG. 5A. In this case, since the amount of deformation of the upper surface member 6 is the same, the amount of volume fluctuation in the equation (1) is the same.
As shown in FIG. 6B, the upper surface member 6 is formed in a concave shape to reduce the initial area. For example, the initial volume is set to 60% of the volume before the concave configuration. In this case, it is possible to increase the volume volatility by about 1.67 times from the equation (1).
By forming the upper surface member 6 in a concave shape in this way, the pump function can be significantly improved.

In the reference state shown in FIG. 6B, it is desirable that the upper surface member 6 does not come into contact with the lower surface member 7. Therefore, it is desirable that the reference facing distance H> the dent amount Z. In addition, (reference facing distance H-recess amount Z) corresponds to the minimum distance between the upper surface member 6 and the lower surface member 7 in the reference state.
Further, it is desirable that the upper surface member 6 does not come into contact with the lower surface member 7 when the minimum volume state is reached when the fluid control device 1 is driven.
Therefore, as shown in FIG. 5C, it is desirable that the minimum gap Gm> 0. The minimum minimum gap Gm is expressed by the following equation.
Minimum gap Gm = reference facing distance H-dent amount Z- (amplitude M / 2) ... (2)
That is, the minimum facing distance between the central portion 15 of the upper surface member 6 and the lower surface member 7 in the reference state shown in FIG. 5B is larger than 1/2 of the amplitude of the central portion 15 of the upper surface member 6 when the pump is driven. Is desirable.
The optimum value of the deformation amount of the upper surface member 6 varies depending on the relationship between the bending rigidity of the piezoelectric element 17, the bending rigidity of the upper surface member 6, and the pressing force at the time of bonding the piezoelectric element 17. Therefore, it is also important to adjust the pressing force in consideration of the bending rigidity of each member.

In the present embodiment, the upper surface member 6 corresponds to one embodiment of the flexible portion having flexibility. Further, the lower surface member 7 corresponds to one embodiment of the facing portion facing the flexible portion.
Further, the upper surface member 6 is also an embodiment of the first plate-shaped member in which the central region constitutes a flexible portion and is made of a metal material. In the present embodiment, the entire flexible portion including the central region constitutes a flexible portion.
Further, the lower surface member 7 is also an embodiment of a second plate-shaped member whose central region constitutes a facing portion and is made of a metal material. In the present embodiment, the entire region including the central region constitutes the facing portion.
The spacer members 8a and 8b have an opening in the central region, have a predetermined thickness, are arranged between the first plate-shaped member and the second plate-shaped member, and are arranged between the first plate-shaped member and the second plate-shaped member. Corresponds to one embodiment of the spacer member connected to each of the plate-shaped members by diffusion bonding. The opening in the central region corresponds to the portion that becomes the flow path space S1.
The flow path space component 2 constitutes the flow path space S1 between the flexible portion and the facing portion. The drive mechanism 5 bends the flexible portion to increase or decrease the volume of the flow path space S1.

The inflow port 3 shown in FIG. 2 or the like may be used as a suction port for sucking the fluid F into the fluid control device 1. Further, the outlet 4 may be used as a discharge port for discharging the fluid F to the outside of the fluid control device 1.
Alternatively, the suction port and the discharge port may be configured separately from the inflow port 3 and the outflow port 4. In this case, for example, a suction space component that constitutes a suction space that communicates the suction port and the inflow port 3 may be further configured. The suction space is a space that guides the fluid F sucked from the suction port to the inflow port 3. Further, a discharge space component that constitutes a discharge space that communicates the discharge port and the outlet 4 may be further configured. The discharge space is a space that guides the fluid flowing out from the outlet 4 to the discharge port.
Even when such a suction space and a discharge space are configured, it is possible to realize a high pump function in the flow path space S1, and it is possible to realize a compact and high-performance fluid control device 1. ..

[Resonance configuration]
The lower surface member 7 is configured as a flexible member. It is also possible to configure the flow path space component 2 so that the upper surface member 6 and the lower surface member 7 resonate with each other.
By resonating the upper surface member 6 and the lower surface member 7 with each other, it is possible to increase the volume fluctuation amount represented by the equation (1), and it is possible to improve the pump function.
Hereinafter, a configuration in which the upper surface member 6 and the lower surface member 7 resonate with each other may be referred to as a resonance configuration. Further, it may be described as a resonance effect that the pump function is improved by the resonance of the upper surface member 6 and the lower surface member 7 with each other.
When the resonance configuration is adopted, the lower surface member 7 also functions as a diaphragm. The diaphragm composed of the upper surface member 6 and the piezoelectric element 17 may be described as a first diaphragm, and the diaphragm composed of the lower surface member 6 may be described as a second diaphragm.
Resonating the upper surface member 6 and the lower surface member 7 with each other corresponds to resonating the first diaphragm and the second diaphragm with each other.

For example, the resonance frequency (primary resonance frequency) of the entire upper surface member 6 and the piezoelectric element 17 is configured to be close to the resonance frequency of the lower surface member 7. That is, the resonance frequency of the first diaphragm is configured to be close to the resonance frequency of the second diaphragm.
As a result, at the resonance frequency, each of the first diaphragm and the second diaphragm becomes the maximum vibration, and it becomes possible to generate a large pressure in the pump chamber.
It should be noted that the resonance causes the first diaphragm (upper surface member 6 + piezoelectric element 17) to bend upward and the second diaphragm (lower surface member 7) to bend downward in synchronization. Further, due to resonance, the downward bending of the first diaphragm (upper surface member 6 + piezoelectric element 17) and the upward bending of the second diaphragm (lower surface member 7) occur in synchronization with each other.
That is, in both diaphragms, bending in the direction of increasing the volume of the flow path space S1 and bending in the direction of decreasing the volume of the flow path space S1 are generated in synchronization with each other. As a result, a high resonance effect is exhibited.

The resonance frequency is defined by the specific gravity, Young's modulus, thickness, size, etc. of the material. By appropriately designing the materials and sizes of the upper surface member 6, the piezoelectric element 17, and the lower surface member 7, the resonance frequencies of the first diaphragm and the second diaphragm can be brought close to each other.

For example, a metal material such as stainless steel or 42 alloy is used to form the upper surface member 6. The lower surface member 7 is made of the same metal material. Since the piezoelectric element 17 is adhered to the upper surface 20 of the upper surface member 6, the resonance frequency of the first diaphragm as a whole is higher than that of the upper surface member 6 in which the piezoelectric element 17 is not adhered.
The thickness of the lower surface member 7 serving as the second diaphragm is made larger than the thickness of the upper surface member 6. This makes it possible to bring the resonance frequency of the entire first diaphragm (upper surface member 6 + piezoelectric element 17) closer to the resonance frequency of the second diaphragm (lower surface member 7). As a result, it becomes possible to realize a resonance configuration and exert a resonance effect.

When the resonance configuration is adopted, the upper surface member 6 corresponds to one embodiment of the first flexible portion. Further, the lower surface member 7 corresponds to one embodiment of the second flexible portion. The resonance configuration has a structure in which the first flexible portion and the second flexible portion resonate with each other.

For example, it is assumed that an adhesive or the like is used for connecting the upper surface member 6, the spacer members 8a and 8b, and the lower surface member 7. In this case, transmission loss of vibration energy, deviation of resonance frequency, and the like are likely to occur, and it is difficult to realize a resonance configuration.
As in the present embodiment, the upper surface member 6, the spacer members 8a and 8b, and the lower surface member 7 are joined by diffusion joining, and the flow path space component 2 is integrally formed as metal. As a result, it is possible to suppress transmission loss of vibration energy, deviation of resonance frequency, and the like, and it is possible to easily realize a resonance configuration.
Further, by adopting the resonance configuration, the vibration energy generated in the first diaphragm can be circulated with the second diaphragm, and the loss of the vibration energy can be suppressed. As a result, it becomes possible to exert a high pump function.
Of course, the application of this technique is not limited to the case where the resonance configuration is adopted.

Products that utilize fluids such as gases and liquids are used in various applications such as industrial air cylinders, air bags, and cuffs for blood pressure measurement. By using the fluid force of the fluid, it is possible to realize new functions such as movement different from the conventional actuator and generation of pressure sensation and tactile sensation utilizing pressure.
In order to utilize the fluid force, a device that produces fluid flow and pressure is required. For example, conventionally used pumps and blowers (fans) are relatively large in size and difficult to apply to small devices and wearables.
The diaphragm type pump that utilizes the vibration of the piezoelectric element is suitable for miniaturization, and the pressure and flow rate can also be controlled. For example, it can be sufficiently applied as a pressure source for the cuff of a portable blood pressure monitor.
In order to utilize the fluid force in the future, it is desired to further reduce the size and performance of the device having a pump function.
In the present embodiment, in the reference state, the upper surface member 6 arranged so as to sandwich the flow path space S1 is configured to be concave toward the lower surface member 7. Further, the inflow port 3 and the outflow port 4 are configured in the outer peripheral portion 11 of the flow path space S1. This makes it possible to realize a compact and high-performance fluid control device 1.
Further, by adopting the resonance configuration, it is possible to further improve the performance.

<Second embodiment>
The fluid control device according to the second embodiment of the present technique will be described. In the following description, the description thereof will be omitted or simplified with respect to the parts similar to the configuration and operation in the fluid control device 1 described in the above embodiment.

FIG. 7 is a top view of the fluid control device 27 according to the second embodiment when viewed from above.
FIG. 8 is a cross-sectional view taken along the line BB shown in FIG. The BB line is a line bent at a right angle at the center portion 37 of the first resonance plate 29.
FIG. 9 is a diagram showing each member constituting the fluid control device 27 individually. In FIG. 9, the piezoelectric element is not shown.

The approximate outer shape of the fluid control device 27 according to the present embodiment is a quadrangular prism shape, and a flow path space S1, a suction space S2, and a discharge space S3 are internally configured.

The fluid control device 27 has a first fixing plate 28, a first resonance plate 29, a spacer member 30, a second resonance plate 31, and a second fixing plate 32. Further, the fluid control device 27 has a first piezoelectric element 33, a second piezoelectric element 34, and a check valve 35.
As shown in FIG. 8, each of the first fixing plate 28, the first resonance plate 29, the spacer member 30, the second resonance plate 31, and the second fixing plate 32 is configured as a plate-shaped member. .. Further, as shown in FIG. 9, each member has a rectangular shape in which the approximate outer shapes seen from the vertical direction are equal to each other. With the outer edges of the members aligned, the members are stacked and connected in the vertical direction.
As shown in FIG. 8, from the lower side to the upper side, the second fixing plate 32, the second resonance plate 31, the spacer member 30, the first resonance plate 29, and the first fixing plate 28 are in this order. The members are laminated.

As shown in FIG. 9, the spacer member 30 has a central opening 38, two suction openings 39a and 39b, and two ejection openings 40a and 40b.
When viewed from the vertical direction, the central opening 38 is formed in the central region of the spacer member 30. Further, the shape of the central opening 38 when viewed from the vertical direction is a circular shape. The central opening 38 is configured so that the position of the central portion is equal to the position of the central portion 37 of the first resonance plate 29.

The two suction openings 39a and 39b are formed on a diagonal line from the apex portion 41a on the right side and the back side of the spacer member 30 toward the apex portion 41c on the left side and the front side with the central opening 38 interposed therebetween. Further, the two suction openings 39a and 39b are formed so as to communicate with the outer peripheral portion 38a of the central opening 38.
The suction opening 39a is configured to communicate with the central opening 38 between the central opening 38 and the apex 41a.
The suction opening 39b is configured to communicate with the central opening 38 between the central opening 38 and the apex 41c.

The two discharge openings 40a and 40b are formed on the diagonal line from the left and back apex 41d of the spacer member 30 toward the right and front apex 41b with the central opening 38 interposed therebetween. Further, the two discharge openings 40a and 40b are formed so as to communicate with the outer peripheral portion 38a of the central opening 38.
The discharge opening 40a is configured to communicate with the central opening 38 between the central opening 38 and the apex portion 41d.
The discharge opening 40b is configured to communicate with the central opening 38 between the central opening 38 and the apex portion 41b.

As shown in FIG. 9, when viewed from the vertical direction, the two suction openings 39a and 39b and the two discharge openings 40a and 40b are the central portion of the spacer member 30 (the center of the central opening 38). It is formed at positions that are symmetrical with respect to the part).
Further, the two suction openings 39a and 39b and the two discharge openings 40a and 40b have the same shape and are formed so as to face the central portion of the spacer member 30.

The first resonance plate 29 has a flexible first flexible portion 42 and two discharge ports 43a and 43b.
When viewed from the vertical direction, the first flexible portion 42 is formed in the central region of the first resonance plate 29. Further, the shape of the first flexible portion 42 when viewed from the vertical direction is a circular shape.
The first flexible portion 42 is configured so that the central portion thereof is equal to the central portion 37 of the first resonance plate 29. That is, the central portion 37 can be said to be the central portion 37 of the first flexible portion 42.
Further, the first flexible portion 42 is configured at a position that covers the central opening 38 of the spacer member 30 from above (at a position that overlaps with the central opening 38). Further, the central portion 37 of the first flexible portion 42 and the central portion of the central opening 38 of the spacer member 30 are located at equal positions with each other.

As shown in FIG. 8, in the reference state, at least a part of the region of the first flexible portion 42 is on the inner side of the outer peripheral portion 11 of the flow path space S1 when viewed from the vertical direction. It is configured to be concave toward the resonance plate 31 of 2.
In the present embodiment, the first flexible portion 42 is configured such that the central portion 37 when viewed from the vertical direction is concave toward the second resonance plate 31 in the reference state.

The two discharge ports 43a and 43b sandwich the first flexible portion 42 on the diagonal line from the apex portion 45d on the left side and the back side of the first resonance plate 29 toward the apex portion 45b on the right side and the front side. Formed by.
The discharge port 43a is formed between the first flexible portion 42 and the apex portion 45d. As shown in FIG. 7, the discharge port 43a is formed at a position on the inner side of the discharge opening 40a of the spacer member 30 when viewed from above and below.
The discharge port 43b is formed between the first flexible portion 42 and the apex portion 45b. The discharge port 43b is formed at a position on the inner side of the discharge opening 40b of the spacer member 30 when viewed from the vertical direction.

The first fixing plate 28 has a central opening 46 and two ejection openings 47a and 47b.
When viewed from above and below, the central opening 46 is formed in the central region of the first fixing plate 28. Further, the shape of the central opening 46 when viewed from the vertical direction is a circular shape. The central opening 46 is configured so that the position of the central portion is equal to the position of the central portion of the central opening 38 of the spacer member 30.

The two ejection openings 47a and 47b are formed diagonally from the left and back apex 48d of the first fixing plate 28 toward the right and front apex 48b with the central opening 46 interposed therebetween. Will be done.
The discharge opening 47a is configured between the central opening 46 and the apex portion 48d. The discharge opening 47a has a shape in which a rectangular opening and a semicircular opening communicate with each other. The discharge opening 47a is formed so that the rectangular opening portion is located along the central opening 46 and the apex of the semicircular opening portion faces the apex portion 48d.
The discharge opening 47b is configured between the central opening 46 and the apex 48db. The discharge opening 47b has the same shape as the discharge opening 47a. The discharge opening 47b is formed so that the rectangular opening portion is located along the central opening 46 and the apex of the semicircular opening portion faces the apex portion 48b.

Further, as shown in FIG. 7, the discharge opening 47a is formed so that the discharge port 43a of the first resonance plate 29 is located inside when viewed from the vertical direction. The discharge opening 47b is formed so that the discharge port 43b of the first resonance plate 29 is located inside when viewed from the vertical direction.
Therefore, when viewed from the vertical direction, the ejection opening 40a of the spacer member 30 and the ejection opening 47a of the first fixed plate 28 are formed at positions where they overlap each other. Further, the ejection opening 40b of the spacer member 30 and the ejection opening 47b of the first fixing plate 28 are formed at positions where they overlap each other.

The second resonance plate 31 has a second flexible portion 49 having flexibility and two suction ports 50a and 50b.
When viewed from the vertical direction, the second flexible portion 49 is formed in the central region of the second resonance plate 31. Further, the shape of the second flexible portion 49 when viewed from the vertical direction is a circular shape.
The second flexible portion 49 is configured so that the central portion thereof is equal to the central portion 51 of the second resonance plate 29. That is, the central portion 51 can be said to be the central portion 51 of the second flexible portion 49.
The second flexible portion 49 is configured at a position that covers the central opening 38 of the spacer member 30 from below (at a position that overlaps with the central opening 38). Further, the central portion 51 of the second flexible portion 49 and the central portion of the central opening 38 of the spacer member 30 are located at equal positions with each other.

As shown in FIG. 8, in the reference state, at least a part of the second flexible portion 49 is on the inner side of the outer peripheral portion 11 of the flow path space S1 when viewed from the vertical direction. It is configured to be concave toward the resonance plate 29 of 1.
In the present embodiment, the second flexible portion 49 is configured such that the central portion 51 when viewed from the vertical direction is concave toward the first resonance plate 29 in the reference state.

As shown in FIG. 8, in the present embodiment, the first flexible portion 42 of the first resonance plate 29 and the second flexible portion 49 of the second resonance plate 31 are aligned in the vertical direction. , With the central opening 38 of the spacer member 30 in between, they face each other.
The first flexible portion 42 is configured such that the central portion 37 is concave toward the second flexible portion 49 in the reference state. The second flexible portion 49 is configured such that the central portion 51 is concave toward the first flexible portion 42 in the reference state.

The two suction ports 50a and 50b sandwich a second flexible portion 49 on a diagonal line from the apex portion 52a on the right side and the back side of the second resonance plate 31 toward the apex portion 52c on the left side and the front side. Is formed by.
The suction port 50a is formed between the second flexible portion 49 and the apex portion 52a. As shown in FIG. 7, the suction port 50a is formed at a position on the inner side of the suction opening 39a of the spacer member 30 when viewed from above and below.
The suction port 50b is formed between the second flexible portion 49 and the apex portion 52c. The suction port 50b is formed at a position on the inner side of the suction opening 39b of the spacer member 30 when viewed from above and below.

The second fixing plate 32 has a central opening 53 and two suction openings 54a and 54b.
When viewed from above and below, the central opening 53 is formed in the central region of the second fixing plate 32. Further, the shape of the central opening 53 when viewed from the vertical direction is a circular shape. The central opening 53 is configured so that the position of the central portion is equal to the position of the central portion of the central opening 38 of the spacer member 30.

The two suction openings 54a and 54b are formed diagonally from the apex 55a on the right side and the back side of the second fixing plate 32 toward the apex 55c on the left side and the front side with the central opening 53 interposed therebetween. Will be done.
The suction opening 54a is configured between the central opening 53 and the apex 55a. The suction opening 54a has the same shape as the discharge opening 47a formed in the first fixing plate 28. An inhalation opening 54a is formed such that the rectangular opening is located along the central opening 53 and the apex of the semicircular opening faces the apex 55a.
The suction opening 54b is configured between the central opening 53 and the apex 55c. The inhalation opening 54b has the same shape as the inhalation opening 54a. An inhalation opening 54b is formed such that the rectangular opening is located along the central opening 53 and the apex of the semicircular opening faces the apex 55c.

Further, as shown in FIG. 7, the suction opening 54a is formed so that the suction port 50a of the second resonance plate 31 is located inside when viewed from above and below. The suction opening 54b is formed so that the suction port 50b of the second resonance plate 31 is located inside when viewed from above and below.
Therefore, when viewed from the vertical direction, the suction opening 39a of the spacer member 30 and the suction opening 54a of the second fixing plate 32 are formed at positions where they overlap each other. Further, the suction opening 39b of the spacer member 30 and the suction opening 54b of the second fixing plate 32 are formed at positions where they overlap each other.

As shown in FIG. 9, when viewed from the vertical direction, the first fixing plate 28 is rotated by 90 degrees to have the same configuration as the second fixing plate 32. That is, the first fixing plate 28 and the second fixing plate 32 have a configuration in which the arrangement relations of the openings are equal to each other when viewed from the vertical direction. Therefore, by preparing two of the same members and changing their orientations, they can be used as the first fixing plate 28 and the second fixing plate 32, respectively.
Further, the first resonance plate 29 and the second resonance plate 31 also have a flexible portion (first flexible portion 42 and a second flexible portion 49) configured in the center and two holes (suction port). The positional relationship with the 50a and 50b / discharge ports 43a and 43b) is equal to each other. Therefore, by preparing two identical members and changing their orientations, they can be used as the first resonance plate 29 and the second resonance plate 31, respectively.
Since the same member can be used in different directions in this way, it is possible to reduce the production cost of the parts.

As shown in FIG. 8, the first fixing plate 28, the first resonance plate 29, the spacer member 30, the second resonance plate 31, and the second fixing plate 32 are laminated and connected in the vertical direction. Will be done.
The central opening 38 of the spacer member 30 is sandwiched between the first flexible portion 42 of the first resonance plate 29 and the second flexible portion 42 of the second resonance plate 31, so that the flow path space S1 Is configured.
The portion of the communication hole that communicates the central opening 38 shown in FIG. 9 and the two suction openings 39a and 39b is configured as the inflow port 3 shown in FIG. Further, the portion of the communication hole that communicates the central opening 38 and the two discharge openings 40a and 40b is configured as the outlet 4 shown in FIG.
Therefore, in the present embodiment, the first resonance plate 29, the second resonance plate 31, and the spacer member 30 function as a flow path space component.

As shown in FIG. 8, the suction space S2 is formed by sandwiching the two suction openings 39a and 39b of the spacer member 30 by the first resonance plate 29 and the second resonance plate 31.
The suction ports 50a and 50b are formed in the region of the second resonance plate 31 that covers the two suction openings 39a and 39b of the spacer member 30. The suction ports 50a and 50b communicate the suction space S2 with the two suction openings 54a and 54b of the second fixed plate 32.
In the present embodiment, the first resonance plate 29, the second resonance plate 31, and the spacer member 30 form a suction space component S2 that communicates the suction ports 50a and 50b with the inflow port 3. Also works as.

As shown in FIG. 8, the discharge space S3 is formed by sandwiching the two discharge openings 40a and 40b of the spacer member 30 between the first resonance plate 29 and the second resonance plate 31.
Discharge ports 43a and 43b are formed in the region of the first resonance plate 29 that covers the two ejection openings 40a and 40b of the spacer member 30. The discharge ports 43a and 43b communicate the discharge space S3 with the two discharge openings 47a and 47b of the first fixed plate 28.
In the present embodiment, the first resonance plate 29, the second resonance plate 31, and the spacer member 30 form a discharge space component S3 that communicates the discharge ports 43a and 43b with the outlet 4. Also works as.

The fluid F is sucked into the suction space S2 from the two suction openings 54a and 54b of the second fixed plate 32 through the suction ports 50a and 50b. The sucked fluid F flows into the flow path space S1 that functions as a pump chamber through the inflow port 3.
The fluid F flowing into the flow path space S1 is discharged from the outlet 4 to the discharge space S3 by the pump function. The fluid F is discharged from the discharge space S3 through the discharge ports 43a and 43b to the two discharge openings 47a and 47b of the first fixed plate 28.

As shown in FIG. 8, the first piezoelectric element 33 is connected to the upper surface 57 of the first flexible portion 42. The upper surface 57 of the first flexible portion 42 is a surface opposite to the surface facing the second flexible portion 49. The first piezoelectric element 33 is arranged in the central opening 46 of the first fixing plate 28.
As shown in FIG. 7, the first piezoelectric element 33 has a circular shape when viewed from the vertical direction. The first piezoelectric element 33 is connected to the upper surface 57 of the first flexible portion 42 so that the central portion is at the same position as the central portion 37 of the first flexible portion 42.
Further, when viewed from the vertical direction, the size of the first piezoelectric element 33 is one size smaller than the size of the upper surface 57 of the first flexible portion 42. That is, the first piezoelectric element 33 is arranged in a region one size smaller than the entire region of the upper surface of the flow path space S1 when viewed from the vertical direction.

As shown in FIG. 8, the second piezoelectric element 34 is connected to the lower surface 58 of the second flexible portion 49. The lower surface 58 of the second flexible portion 49 is a surface opposite to the surface facing the first flexible portion 42. The second piezoelectric element 34 is arranged in the central opening 53 of the second fixing plate 32.
The second piezoelectric element 34 has a circular shape equal to that of the first piezoelectric element 33 when viewed from above and below. Further, the second piezoelectric element 34 is arranged at a position overlapping with the first piezoelectric element 33 when viewed from the vertical direction.
Therefore, the second piezoelectric element 34 is connected to the lower surface 58 of the second flexible portion 49 so that the central portion is at the same position as the central portion 51 of the second flexible portion 49.
Further, when viewed from the vertical direction, the size of the second piezoelectric element 34 is one size smaller than the size of the lower surface 58 of the second flexible portion 49. That is, the second piezoelectric element 34 is arranged in a region one size smaller than the entire region of the lower surface of the flow path space S1 when viewed from the vertical direction.

In the present embodiment, the first diaphragm is configured by the first flexible portion 42 of the first resonance plate 29 and the first piezoelectric element 33. The second flexible portion 49 of the second resonance plate 31 and the second piezoelectric element 34 form a second diaphragm.

As shown in FIG. 8, the check valve 35 is installed at each of the two discharge ports 43a and 44b, respectively. The check valve 35 allows the flow of the fluid F discharged from the discharge ports 43a and 44b to the discharge openings 47a and 47b. On the other hand, the flow of the fluid F from the discharge openings 47a and 47b to the discharge ports 43a and 44b is restricted.
By installing the check valves 35 at the discharge ports 43a and 44b, it is possible to prevent the backflow of the fluid F and to exhibit a high pump function.
The specific configuration of the check valve 35 is not limited, and any configuration may be adopted. Note that the check valve 35 is not shown in FIG. 7.

In this embodiment, by applying a drive signal (AC voltage) to the first piezoelectric element 33 and the second piezoelectric element 34, the first diaphragm and the second diaphragm have a high response in the high frequency band. It can be vibrated by force. That is, the volume increase / decrease (pump operation) of the flow path space S1 is repeated at high speed.
As a result, high performance was maintained without deteriorating the pump function even if the check valves were not provided in the suction ports 50a and 50b. Therefore, it is possible to reduce the number of required check valves and reduce the cost of parts.
Of course, check valves may be provided at the suction ports 50a and 50b.

In the present embodiment, the first resonance plate 29 corresponds to one embodiment of the first plate-shaped member. The second resonance plate 31 corresponds to one embodiment of the second plate-shaped member. It can also be considered that the first resonance plate 29 corresponds to one embodiment of the second plate-shaped member, and the second resonance plate 31 corresponds to one embodiment of the first plate-shaped member.
The spacer member 30 corresponds to one embodiment of the spacer member.
The first piezoelectric element 33 and the second piezoelectric element function as a drive mechanism for bending each of the first flexible portion 42 and the second flexible portion 49. A drive signal (AC voltage) is applied to the first piezoelectric element 33 and the second piezoelectric element 34 from a drive control unit (not shown) that functions as the same drive mechanism.

[material]
In the present embodiment, each of the first fixing plate 28, the first resonance plate 29, the spacer member 30, the second resonance plate 31, and the second fixing plate 32 is made of a metal material such as stainless steel or 42 alloy. Used. Of course, other metallic materials may be used. Further, any material other than the metal material such as a plastic material may be used.
For example, the first flexible portion 42 of the first resonance plate 29 may be made of a plastic material or the like, and the portion connected to the spacer member 30 or the first fixing plate 28 may be made of a metal material.
Similarly, the second flexible portion 49 of the second resonance plate 31 may be made of a plastic material or the like, and the portion connected to the spacer member 30 or the second fixing plate 32 may be made of a metal material.

[Resonance configuration]
In this embodiment, the resonance that resonates the first diaphragm (first flexible portion 42 + first piezoelectric element 33) and the second diaphragm (second flexible portion 49 + second piezoelectric element 34) with each other. The configuration is adopted. That is, the first flexible portion 42 and the second flexible portion 49 are configured to resonate with each other.
Specifically, the overall resonance frequency of the first flexible portion 42 and the first piezoelectric element 33 is close to the overall resonance frequency of the second flexible portion 49 and the second piezoelectric element 34. It is composed.

[Production method]
10 and 11 are schematic views for explaining a manufacturing method of the fluid control device 27.
First, a first fixing plate 28 made of a metal material, a first resonance plate 29, a spacer member 30, a second resonance plate 31, and a second fixing plate made of a metal material by an arbitrary processing technique such as etching or laser processing. 32 is created.
As shown in FIGS. 10A and 10B, the created first fixing plate 28, first resonance plate 29, spacer member 30, second resonance plate 31, and second fixing plate 32 have predetermined positional accuracy. It is laminated and connected with.
In this embodiment, each member is joined by diffusion joining. This makes it possible to integrally join each member as a metal. Of course, other methods may be used.

As shown in FIG. 10C, the first piezoelectric element 33 is connected to the upper surface 57 of the first flexible portion 42 via the adhesive 60. Further, the second piezoelectric element 34 is connected to the lower surface 58 of the second flexible portion 49 via the adhesive 61.
As shown in FIG. 10D, the first flexible portion 42 is formed in a concave shape toward the second flexible portion 49. Further, the second flexible portion 49 is formed in a concave shape toward the first flexible portion 42.
As shown in FIG. 10D, check valves 35 are installed at the two discharge ports 43a and 44b.

FIG. 11 is a schematic view showing an example of a method of connecting the first piezoelectric element 33 and the second piezoelectric element 34 to the first flexible portion 42 and the second flexible portion 49.
As shown in FIG. 11A, the fluid control device 27 before the concave configuration shown in FIG. 10B is placed on the holding jig 23. First, the second fixing plate 32 side is placed on the holding jig 23.
Then, as shown in FIG. 11A, the first piezoelectric element 33 is pressurized from above to below by the pressurizing jig 24. Due to the pressurization by the pressurizing jig 24, the first piezoelectric element 33 and the first flexible portion 42 are deformed in a concave shape toward the second flexible portion 49. In this state, the curing treatment of the adhesive 60 is executed.
As a result, as shown in FIG. 11B, the fluid control device 27 in which the first diaphragm (first flexible portion 42 + first piezoelectric element 33) is concavely formed is created.
The tip portion 25 of the pressurizing jig 24 is made of a flexible material such as silicon rubber.

As shown in FIG. 11C, the fluid control device 27 is turned upside down, and the first fixing plate 28 side is placed on the holding jig 23.
Then, as shown in FIG. 11C, the second piezoelectric element 34 is pressurized from above to below by the pressurizing jig 24. Due to the pressurization by the pressurizing jig 24, the second piezoelectric element 34 and the second flexible portion 49 are deformed in a concave shape toward the first flexible portion 42. In this state, the curing process of the adhesive 61 is executed.
As a result, as shown in FIG. 11D, the fluid control device 27 in which the second diaphragm (second flexible portion 49 + second piezoelectric element 34) is configured in a concave shape is created.

Pressurizing conditions for adhering the first piezoelectric element 33 (hereinafter referred to as first pressurizing conditions) and pressurizing conditions for adhering the second piezoelectric element 34 (second pressurizing conditions). Each of (described as) may be arbitrarily set. For example, the pressing force, the pressurizing time, the temperature, and the like may be appropriately set so that the respective dents of the first flexible portion 42 and the second flexible portion 49 have a desired dent amount.
For example, the first pressurizing condition and the second pressurizing condition are made equal. This makes it possible to simplify the process. Further, it is possible to make the amount of the dent of the first flexible portion 42 equal to the amount of the dent of the second flexible portion 49.
As mentioned above, the resonance frequency of the member is also affected by the shape of the member. Therefore, making the first pressurizing condition equal to the second pressurizing condition is to make the first diaphragm (first flexible portion 42 + first piezoelectric element 33) and the second diaphragm (first). It is advantageous to bring the resonance frequencies of the flexible portions 49 + the second piezoelectric element 34) of 2 closer to each other.
Of course, the first pressurizing condition and the second pressurizing condition may be set so as to be different from each other. For example, the dented amount of the first flexible portion 42 and the dented amount of the second flexible portion 49 may be configured to be different from each other.

As shown in FIG. 11, in the present embodiment, it is possible to simultaneously perform the bonding of the first piezoelectric element 33 and the deformation for making the first flexible portion 42 concave. In other words, by performing the bonding step of the first piezoelectric element 33, it is possible to simultaneously deform the first flexible portion 42 into a concave shape.
Further, in the present embodiment, it is possible to simultaneously perform the bonding of the second piezoelectric element 34 and the deformation for making the second flexible portion 49 concave. In other words, by performing the bonding step of the second piezoelectric element 34, it is possible to simultaneously deform the second flexible portion 49 into a concave shape.
As a result, the manufacturing process of the fluid control device 27 can be simplified, and the manufacturing time can be shortened.

[Pump operation]
In the present embodiment, the same drive signal (AC voltage) is applied to each of the first piezoelectric element 33 and the second piezoelectric element 34 of the drive control unit (not shown).
As a result, the first diaphragm (first flexible portion 42 + first piezoelectric element 33) is bent upward, and the second diaphragm (second flexible portion 49 + second piezoelectric element 34) is bent upward. It is possible to generate downward bending while synchronizing with each other.
Further, the bending of the first diaphragm (first flexible portion 42 + first piezoelectric element 33) downward and above the second diaphragm (second flexible portion 49 + second piezoelectric element 34). It is possible to generate lateral bending while synchronizing with each other.
That is, in both diaphragms, bending in the direction of increasing the volume of the flow path space S1 and bending in the direction of decreasing the volume of the flow path space S1 are generated in synchronization with each other. As a result, a very high pump function is exhibited.

Further, in the present embodiment, a resonance configuration in which the first diaphragm and the second diaphragm resonate with each other is adopted. Therefore, at the resonance frequency, each of the first diaphragm and the second diaphragm becomes the maximum vibration, and a very high pump function is exhibited.

FIG. 12 is a schematic diagram showing an example of the flow of the fluid F during pump operation.
In the present embodiment, the fluid F sucked from the suction port 50a on the right side and the back side passes through the flow path space S1 and is discharged from the discharge port 43b on the right side and the front side.
Further, the fluid F sucked from the suction port 50b on the left side and the front side passes through the flow path space S1 and is discharged from the discharge port 43a on the left side and the back side.
Of course, it is not limited to such a flow path design.

Note that suction ports may be formed in the regions of the first resonance plate 29 that cover the two suction openings 39a and 39b of the spacer member 30, respectively. Further, discharge ports may be formed in the regions of the second resonance plate 31 that cover the two ejection openings 40a and 40b of the spacer member 30, respectively.

[Reduction of initial volume]
13 and 14 are schematic views and tables for explaining the initial volume.
FIG. 13A is a diagram schematically showing the flow path space S1 before the concave configuration.
FIG. 13B is a diagram schematically showing the flow path space S1 in the reference state.
FIG. 13C is a diagram schematically showing the flow path space S1 during pump drive.

As shown in FIG. 13A, the first flexible portion 42 and the second flexible portion 49 are arranged at the reference facing distance H.
As shown in FIG. 13B, the first flexible portion 42 is formed in a concave shape with a recess amount Z1. Further, the second flexible portion 49 is formed in a concave shape with a dent amount Z2.
As shown in FIG. 13C, it is assumed that the first flexible portion 42 vibrates with an amplitude M1 along the vertical direction from the reference state. Further, it is assumed that the second flexible portion 49 vibrates with an amplitude M2 in synchronization with the first flexible portion 42.
The smallest facing distance between the first flexible portion 42 and the second flexible portion 49 in the minimum volume state is defined as the minimum gap Gm.

As shown in FIG. 13B, in the present embodiment, since each of the first flexible portion 42 and the second flexible portion 49 is formed in a concave shape in the reference state, the initial volume can be reduced. Will be. Therefore, as shown in the equation (1), it is possible to increase the volume volatility and realize a high pump function.
Further, in the outer peripheral portion 11 of the flow path space S1, the facing distance is maintained at the reference facing distance H. Therefore, it is possible to prevent the flow path resistance at the inflow port 3 and the outflow port 4 from becoming large. As a result, the flow of the fluid F is not obstructed, that is, the flow path loss can be sufficiently suppressed, and a high pump function can be realized.
Further, since the reaction force (back pressure) can be suppressed for each of the first flexible portion 42 and the second flexible portion 49, high-speed vibration (piston movement) becomes possible and a high pump function is possible. Is demonstrated.

For example, the first flexible portion 42 and the second flexible portion 49 are configured to have a diameter of 9 mm. Further, it constitutes two embodiments in which the reference facing distance H is 0.1 mm and 0.2 mm.
Further, the dent amount Z1 of the first flexible portion 42 and the dent amount Z2 of the second flexible portion 49 are designed to have the same size.
In this case, the relationship between the initial volume and the amount of dent is as shown in the table of FIG.

When the reference facing distance H is 0.1 mm and the recess amounts Z1 and Z2 are both 0 (that is, before the concave configuration), the initial volume is 6.361725 cubic mm.
When the dent amounts Z1 and Z2 are both 0.01 mm, the initial volume is 5.725552 cubic mm. Therefore, it is possible to reduce the initial volume to 90% as compared with the case before the concave structure. As a result, from the equation (1), it is possible to increase the volume volatility by about 1.11 times.
When the dent amounts Z1 and Z2 are both 0.02 mm, the initial volume is 5.089372 cubic mm. Therefore, it is possible to reduce the initial volume to 80% as compared with the case before the concave structure. As a result, it is possible to increase the volume volatility by about 1.25 times from the equation (1).
When the dent amounts Z1 and Z2 are both 0.04 mm, the initial volume is 3.816968 cubic mm. Therefore, it is possible to reduce the initial volume to 60% as compared with the case before the concave structure. As a result, it is possible to increase the volume volatility by about 1.67 times from the equation (1).

When the reference facing distance H is 0.2 mm and the recess amounts Z1 and Z2 are both 0 (that is, before the concave configuration), the initial volume is 12.72345 cubic mm.
When the dent amounts Z1 and Z2 are both 0.01 mm, the initial volume is 12.08728 cubic mm. Therefore, it is possible to reduce the initial volume to 95% as compared with the case before the concave structure. As a result, it is possible to increase the volume volatility by about 1.05 times from the equation (1).
When the dent amounts Z1 and Z2 are both 0.02 mm, the initial volume is 11.4511 cubic mm. Therefore, it is possible to reduce the initial volume to 90% as compared with the case before the concave structure. As a result, from the equation (1), it is possible to increase the volume volatility by about 1.11 times.
When the dent amounts Z1 and Z2 are both 0.04 mm, the initial volume is 10.17869 cubic mm. Therefore, it is possible to reduce the initial volume to 80% as compared with the case before the concave structure. As a result, it is possible to increase the volume volatility by about 1.25 times from the equation (1).

In the reference state shown in FIG. 13B, it is desirable that the first flexible portion 42 does not come into contact with the second flexible portion 49. Therefore, it is desirable that the reference facing distance H> the dent amount Z1 + the dent amount Z2. In addition, (reference facing distance H- (recess amount Z1 + dent amount Z2)) corresponds to the minimum facing distance between the first flexible portion 42 and the second flexible portion 49 in the reference state.
Further, it is desirable that the first flexible portion 42 does not come into contact with the second flexible portion 49 when the minimum volume state is reached when the fluid control device 1 is driven.
Therefore, as shown in FIG. 13C, it is desirable that the minimum gap Gm> 0. The minimum minimum gap Gm is expressed by the following equation.
Minimum gap Gm = Reference facing distance H- (dent amount Z1 + dent amount Z2)-(amplitude M1 / 2 + amplitude M2 / 2) ... (3)

That is, the minimum facing distance between the central portion 37 of the first flexible portion 42 and the central portion 51 of the lower surface member 7 in the reference state shown in FIG. 13B is (amplitude M1 / 2 + amplitude M2 / 2) when the pump is driven. ) Is desirable.
The amount of deformation of the first flexible portion 42 and the second flexible portion 49 is the bending rigidity of each of the first piezoelectric element 33 and the second piezoelectric element 34, and the first flexible portion 42 and the first flexible portion 49. The optimum value will be appropriately different depending on the relationship between the bending rigidity of each of the flexible portions 49 of 2 and the pressing force at the time of bonding each of the first piezoelectric element 33 and the second piezoelectric element 34. Therefore, it is also important to adjust the pressing force in consideration of the bending rigidity of each member.

The configuration of the fluid control device 27 according to the present embodiment is adopted, and the first flexible portion 42 and the second flexible portion 49 are respectively configured with a diameter of 13 mm. The reference facing distance H was set to 1 mm.
An AC voltage of 30 Vpp was applied to the first piezoelectric element 33 and the second piezoelectric element 34 to drive the fluid control device 27.
As a result, an output with a maximum flow rate of 800 ml / min or more and a maximum pressure of 30 kPa or more was obtained. In this way, it is possible to realize a fluid control device 27 which is small in size but has very high performance.

<Third embodiment>
FIG. 15 is a schematic diagram showing a configuration example of the fluid control device according to the third embodiment.
The fluid control device 64 of the present embodiment has a configuration in which the second piezoelectric element 34 is not provided as compared with the fluid control device 27 according to the second embodiment.
That is, in the present embodiment, the piezoelectric element (first piezoelectric element 33) is connected only to the first flexible portion 42. Then, the vibration of the first flexible portion 42 causes the first flexible portion 42 and the second flexible portion to resonate with each other.
The fluid control device 64 according to the present embodiment can be said to be a combination of the fluid control device 1 according to the first embodiment and the fluid control device 27 according to the second embodiment.

As shown in FIG. 15A, the second resonance plate 65 may be used in the state of a flat plate without being deformed in a concave shape. Therefore, the second flexible portion 66 is not formed in a concave shape and is in a flat plate state.
The thickness of the second flexible portion 66, which is the second diaphragm, is designed to be larger than the thickness of the first flexible portion 42. This makes it possible to bring the resonance frequency of the entire first diaphragm (first flexible portion 42 + first piezoelectric element 33) closer to the resonance frequency of the second diaphragm (second flexible portion 66). Become. As a result, it becomes possible to realize a resonance configuration, and it becomes possible to exhibit a high pump function due to the resonance effect.

As shown in FIG. 15B, in the reference state, the second flexible portion 66 of the second resonance plate 65 may be configured to be concave toward the first flexible portion 42. This makes it possible to reduce the initial volume of the flow path space S1. Therefore, as shown in the equation (1), it is possible to increase the volume volatility and realize a high pump function.

Since only one piezoelectric element is used in the fluid control device 64 according to the present embodiment, it is possible to reduce the component cost. Further, since the bonding process of the piezoelectric element may be performed only once, the manufacturing process of the fluid control device 64 can be simplified. In addition, the time required for manufacturing can be shortened.
In the configuration shown in FIG. 15A, the step of forming the second flexible portion 66 in a concave shape becomes unnecessary. Therefore, it is possible to simplify the manufacturing process and shorten the time required for manufacturing. On the other hand, in the configuration shown in FIG. 15B, a high pump function is exhibited.

<Other embodiments>
The present technique is not limited to the embodiments described above, and various other embodiments can be realized.

FIG. 16 is a schematic diagram showing a configuration example of the fluid control device according to another embodiment.
In the fluid control device 70 shown in FIG. 16, when viewed from the vertical direction (Z direction), a groove portion is located near the outer peripheral portion of the flexible portion (first flexible portion 71 and second flexible portion 72). 73 is configured.
The vicinity of the outer peripheral portion is a region closer to the outer peripheral portion on the inner side than the outer peripheral portion. For example, the maximum width is the size of the portion having the widest width when the flexible portion is viewed from the vertical direction. Based on the maximum width, it is possible to define a region in the vicinity of the outer peripheral portion.
For example, a region from the outer peripheral portion to a size of 25% of the maximum width can be defined as a region in the vicinity of the outer peripheral portion. Of course, a region up to a proportion smaller than 25% may be defined as a region in the vicinity of the outer peripheral portion.

Typically, the groove portion 73 is formed over the entire circumference along the outer peripheral portion of the flexible portion when viewed from the vertical direction. Not limited to this, the groove 73 may be formed intermittently at predetermined intervals.
Further, a plurality of groove portions 73 may be formed concentrically over the entire circumference of the flexible portion.

In the example shown in FIG. 16A, a groove portion 73 is formed on the lower surface 74 of the first flexible portion 71 over the entire circumference when viewed from the vertical direction. Further, a groove portion 73 is formed on the upper surface 75 of the second flexible portion 72 over the entire circumference when viewed from the vertical direction. The groove portion 73 formed in the first flexible portion 71 and the groove portion 73 formed in the second flexible portion 72 are formed at the same positions when viewed from the vertical direction.

In the example shown in FIG. 16B, a groove portion 73 is formed on the upper surface 76 of the first flexible portion 71 over the entire circumference when viewed from the vertical direction. Further, a groove portion 73 is formed on the lower surface 77 of the second flexible portion 72 over the entire circumference when viewed from the vertical direction. The groove portion 73 formed in the first flexible portion 71 and the groove portion 73 formed in the second flexible portion 72 are formed at the same positions when viewed from the vertical direction.

In the example shown in FIG. 16C, two groove portions 73 are formed concentrically on the lower surface 74 of the first flexible portion 71 over the entire circumference when viewed from the vertical direction. Further, on the upper surface 75 of the second flexible portion 72, two groove portions 73 are formed concentrically over the entire circumference when viewed from the vertical direction. The two groove portions 73 formed in the first flexible portion 71 and the two groove portions 73 formed in the second flexible portion 72 are formed at the same positions when viewed from the vertical direction.

In the example shown in FIG. 16B, a groove portion 73 is formed on each of the upper surface 76 and the lower surface 74 of the first flexible portion 71 over the entire circumference when viewed from the vertical direction. These two groove portions 73 are formed at positions that are concentric when viewed from the vertical direction.
Further, a groove portion 73 is formed on each of the lower surface 77 and the upper surface 75 of the second flexible portion 72 over the entire circumference when viewed from the vertical direction. These two groove portions 73 are formed at positions that are concentric when viewed from the vertical direction.
The two groove portions 73 formed in the first flexible portion 71 and the two groove portions 73 formed in the second flexible portion 72 are formed at the same positions when viewed from the vertical direction.

By forming the groove portion 73, the portion in which the groove portion 73 is formed is easily deformed. This makes it possible to optimize the amount of deformation and the deformed shape of the resonance plate due to pressurization during bonding of the piezoelectric element.
Further, in the outer peripheral portion of the piezoelectric element bonded to the flexible portion, the stress generated in the flexible portion becomes large. Therefore, by forming the groove portion 73 at a position with respect to the outer peripheral portion of the piezoelectric element, it is possible to relieve the stress generated in the flexible portion. As a result, it is possible to prevent the flexible portion from being destroyed.
The position with respect to the outer peripheral portion of the piezoelectric element includes an arbitrary position determined with reference to the outer peripheral portion of the piezoelectric element.
For example, when viewed from the vertical direction, the position is the same as the outer peripheral portion of the piezoelectric element, the position is outside the outer peripheral portion of the piezoelectric element by a predetermined length, and the position is inside the outer peripheral portion of the piezoelectric element by a predetermined length. Is included in the position with respect to the outer peripheral portion. The predetermined length may be arbitrarily set.
Of course, the position set by any other method may be included as the position with respect to the outer peripheral portion of the piezoelectric element.

Further, when the piezoelectric element is adhered to the flexible portion by using an adhesive, the resonance frequency of the flexible portion and the entire piezoelectric element may vary depending on the amount of the adhesive.
On the other hand, by appropriately forming the groove portion 73, it is possible to suppress the variation in the resonance frequency.
For example, by appropriately forming the groove portion 73, it becomes easy to bring the resonance frequencies of the first flexible portion 71 and the second flexible portion 72 closer to each other.

The formation position, number, width, depth, etc. of the groove 73 are not limited, and may be arbitrarily designed. Since these parameters are closely related to the resonance frequency of the resonance plate, the amount of deformation of the piezoelectric element after bonding, and the like, it is desirable to determine these parameters in consideration of these.
The method of forming the groove 73 is also not limited. For example, any processing technique such as etching or laser processing may be used. When the resonance plate is produced by etching, laser processing, or the like, the groove portion 73 can also be formed at the same time.

[About electronic devices]
The application of each fluid control device according to the above-mentioned technique is not particularly limited, but it can be mounted on, for example, an electronic device. Each fluid control device can discharge the air inside the electronic device to the outside or suck the air from the outside of the electronic device.
For example, each fluid control device can be used for various purposes such as a human body-mounted device for generating compression, a small cooling device, and a pump for a pneumatic actuator such as a robot.
As a specific example, for example, each of the above fluid control devices can be used as a cooling device that suppresses heat generation by blowing a fluid onto a heating element in an electronic device. For example, a mobile device such as a mobile phone can be equipped with a fluid control device for cooling.
Further, the fluid control device can be mounted on an electronic device such as a tactile presentation device, and a pseudo pressure sense or a tactile sense can be presented.
Further, the fluid control device can be mounted on an electronic device such as a blood pressure monitor.
Further, each of the above-mentioned fluid control devices can be applied to an artificial muscle which is an elastic actuator made of rubber or the like that expands and contracts by air pressure.
Since each fluid control device can be miniaturized, it can be easily incorporated in an electronic device. It is also very advantageous for miniaturization of electronic devices. Further, since each fluid control device has high performance, it is possible to realize a high-performance electronic device in each application.

Each configuration of the fluid control device, flow path space configuration unit, suction space configuration unit, discharge space configuration unit, flow path space, suction space, discharge space, drive mechanism, piezoelectric element, groove portion, etc., described with reference to each drawing. Each manufacturing method and the like is only one embodiment, and can be arbitrarily modified without departing from the spirit of the present technology. That is, any other configuration, method, or the like for implementing the present technique may be adopted.

In this disclosure, words such as "abbreviation", "almost", and "approximate" are appropriately used to facilitate understanding of the explanation. On the other hand, there is no clear difference between the case where these words such as "abbreviation", "almost" and "approximate" are used and the case where they are not used.
That is, in the present disclosure, "center", "center", "uniform", "equal", "same", "orthogonal", "parallel", "symmetrical", "extended", "axial direction", "cylindrical shape", "cylindrical shape", and "ring shape". Concepts that define shape, size, positional relationship, state, etc., such as "circular shape", are "substantially center", "substantially center", "substantially uniform", "substantially equal", and "substantially equal". Same as "substantially orthogonal""substantiallyparallel""substantiallysymmetric""substantiallyextended""substantiallyaxial""substantiallycylindrical""substantiallycylindrical""substantiallycylindrical" The concept includes "substantially a ring shape" and "substantially an annular shape".
For example, "perfectly centered", "perfectly centered", "perfectly uniform", "perfectly equal", "perfectly identical", "perfectly orthogonal", "perfectly parallel", "perfectly symmetric", "perfectly extending", "perfectly extending". Includes states that are included in a predetermined range (for example, ± 10% range) based on "axial direction", "completely cylindrical shape", "completely cylindrical shape", "completely ring shape", "completely annular shape", etc. Is done.
Therefore, even when words such as "abbreviation", "almost", and "approximate" are not added, a concept that can be expressed by adding so-called "abbreviation", "almost", "approximate", etc. can be included. On the contrary, the complete state is not always excluded from the state expressed by adding "abbreviation", "almost", "approximate" and the like.

In the present disclosure, expressions using "more" such as "greater than A" and "less than A" comprehensively include both the concept including the case equivalent to A and the concept not including the case equivalent to A. It is an expression included in. For example, "greater than A" is not limited to the case where the equivalent of A is not included, and "greater than or equal to A" is also included. Further, "less than A" is not limited to "less than A" and includes "less than or equal to A".
When implementing this technique, specific settings and the like may be appropriately adopted from the concepts included in "greater than A" and "less than A" so that the effects described above can be exhibited.

It is also possible to combine at least two feature parts among the feature parts related to the present technology described above. That is, the various feature portions described in each embodiment may be arbitrarily combined without distinction between the respective embodiments. Further, the various effects described above are merely exemplary and not limited, and other effects may be exhibited.

The present technology can also adopt the following configurations.
(1)
A flow having a flexible portion and a facing portion facing the flexible portion, and forming a flow path space serving as a fluid flow path between the flexible portion and the facing portion. Road space component and
When viewed from the opposite direction in which the flexible portion and the facing portion face each other, an inflow port configured on the outer peripheral portion of the flow path space and allowing the fluid to flow into the flow path space.
When viewed from the opposite direction, the outlet is configured at a position different from the inlet of the outer peripheral portion of the flow path space, and the fluid flows out from the flow path space.
It is provided with a drive mechanism that bends the flexible portion and increases or decreases the volume of the flow path space.
In the reference state where the flexible portion is not bent by the drive mechanism, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the facing direction is the facing portion. A fluid control device configured to be concave toward.
(2) The fluid control device according to (1).
The flexible portion is a fluid control device configured such that, in the reference state, the central portion when viewed from the facing direction is concave toward the facing portion.
(3) The fluid control device according to (1) or (2).
The flexible portion is a fluid control device having a shape in which a plate-shaped member is deformed in a concave shape toward the facing portion in the reference state.
(4) The fluid control device according to any one of (1) to (3).
The drive mechanism is a fluid control device that bends the flexible portion so that the concave portion of the flexible portion in the reference state moves most along the facing direction.
(5) The fluid control device according to any one of (1) to (4).
The drive mechanism is any one of fluid control devices (6) (1) to (5) having a piezoelectric element connected to a surface of the flexible portion opposite to the surface of the flexible portion facing the facing portion. The fluid control device according to one.
Assuming that the flexible portion is the first flexible portion,
The facing portion is composed of a second flexible portion having flexibility.
The drive mechanism bends the second flexible portion, and the drive mechanism bends the second flexible portion.
In the second flexible portion, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the opposite direction in the reference state is the first flexible portion. A fluid control device configured to be concave toward.
(7) The fluid control device according to (6).
The first flexible portion and the second flexible portion are fluid control devices configured to resonate with each other.
(8) The fluid control device according to (7).
The drive mechanism is
A first piezoelectric element connected to a surface of the first flexible portion opposite to the surface of the first flexible portion facing the second flexible portion.
It has a second piezoelectric element connected to a surface of the second flexible portion opposite to the surface of the first flexible portion facing the first flexible portion.
Fluid control configured so that the overall resonance frequency of the first flexible portion and the first piezoelectric element is close to the overall resonance frequency of the second flexible portion and the second piezoelectric element. Device.
(9) The fluid control device according to any one of (1) to (5).
Assuming that the flexible portion is the first flexible portion,
The facing portion is composed of a second flexible portion having flexibility.
The first flexible portion and the second flexible portion are fluid control devices configured to resonate with each other.
(10) The fluid control device according to (9).
The drive mechanism has a piezoelectric element connected to a surface of the first flexible portion opposite to the surface of the first flexible portion facing the second flexible portion.
A fluid control device configured such that the resonance frequency of the second flexible portion is close to the resonance frequency of the entire first flexible portion and the piezoelectric element.
(11) The fluid control device according to (10).
A fluid control device in which the thickness of the second flexible portion is larger than the thickness of the first flexible portion.
(12) The fluid control device according to any one of (8) to (11).
In the second flexible portion, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the opposite direction in the reference state is the first flexible portion. A fluid control device configured to be concave toward.
(13) The fluid control device according to any one of (1) to (12).
The flexible portion is a fluid control device having a groove portion formed in the vicinity of the outer peripheral portion of the flexible portion when viewed from the facing direction.
(14) The fluid control device according to (13).
The drive mechanism has a piezoelectric element connected to a surface of the flexible portion opposite to the surface of the flexible portion facing the facing portion.
The groove portion is a fluid control device configured at a position with respect to the outer peripheral portion of the piezoelectric element when viewed from the facing direction.
(15) The fluid control device according to any one of (1) to (14), and further.
The suction port from which the fluid is sucked and
A suction space component that constitutes a suction space that communicates the suction port and the inflow port,
The discharge port from which the fluid is discharged and
A fluid control device including a discharge space component that constitutes a discharge space that communicates the discharge port and the outlet.
(16) The fluid control device according to any one of (1) to (15).
The flow path space component is
When viewed from the opposite direction, the central region constitutes the flexible portion, and the first plate-shaped member made of a metal material and
When viewed from the facing direction, the central region constitutes the facing portion, and the second plate-shaped member made of a metal material and
When viewed from the opposite direction, the central region becomes an opening, has a predetermined thickness, is arranged between the first plate-shaped member and the second plate-shaped member, and has the first plate-shaped member. A fluid control device having a spacer member bonded to each of the member and the second plate-shaped member by diffusion bonding.
(17) The fluid control device according to (16).
The spacer member is configured for suction at a position different from the suction opening so as to communicate with the outer peripheral portion of the opening and the suction opening so as to communicate with the outer peripheral portion of the opening. A fluid control device with an opening.
(18) The fluid control device according to (17).
A suction port into which the fluid is sucked is configured in at least one of a region covering the suction opening of the first plate-shaped member or a region covering the suction opening of the second plate-shaped member. ,
A discharge port for discharging the fluid is configured in at least one of a region covering the discharge opening of the first plate-shaped member or a region covering the discharge opening of the second plate-shaped member. Fluid control device.
(19)
A flow having a flexible portion and a facing portion facing the flexible portion, and forming a flow path space serving as a fluid flow path between the flexible portion and the facing portion. Road space component and
When viewed from the opposite direction in which the flexible portion and the facing portion face each other, an inflow port configured on the outer peripheral portion of the flow path space and allowing the fluid to flow into the flow path space.
When viewed from the opposite direction, the outlet is configured at a position different from the inlet of the outer peripheral portion of the flow path space, and the fluid flows out from the flow path space.
It has a drive mechanism that bends the flexible portion and increases or decreases the volume of the flow path space.
In the reference state where the flexible portion is not bent by the drive mechanism, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the facing direction is the facing portion. A fluid control device configured to be concave toward.
An electronic device equipped with.

Gm ... Minimum gap H ... Reference facing distance M ... Amplification S1 ... Flow path space S2 ... Suction space S3 ... Discharge space Z ... Depression amount 1, 27, 64, 70 ... Fluid control device 2 ... Flow path space component 3 ... Flow Inlet 4 ... Outlet 5 ... Drive mechanism 6 ... Top surface member 7 ... Bottom surface member 8a, 8b, 30 ... Spacer member 11 ... Outer peripheral part of flow path space 15 ... Central part of top surface member 17 ... Piezoelectric element 29 ... First resonance Plates 31, 65 ... Second resonance plate 33 ... First piezoelectric element 34 ... Second piezoelectric element 37 ... Central portion of first flexible portion 42, 71 ... First flexible portion 43a, 43b ... Discharge Outlets 49, 66, 72 ... Second flexible portion 50a, 50b ... Suction port 51 ... Central portion of the second flexible portion 73 ... Groove portion

Claims (19)

1. A flow having a flexible portion and a facing portion facing the flexible portion, and forming a flow path space serving as a fluid flow path between the flexible portion and the facing portion. Road space component and
   When viewed from the opposite direction in which the flexible portion and the facing portion face each other, an inflow port configured on the outer peripheral portion of the flow path space and allowing the fluid to flow into the flow path space.
   When viewed from the opposite direction, the outlet is configured at a position different from the inlet of the outer peripheral portion of the flow path space, and the fluid flows out from the flow path space.
   It is provided with a drive mechanism that bends the flexible portion and increases or decreases the volume of the flow path space.
   In the reference state where the flexible portion is not bent by the drive mechanism, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the facing direction is the facing portion. A fluid control device configured to be concave toward.
2. The fluid control device according to claim 1.
   The flexible portion is a fluid control device configured such that, in the reference state, the central portion when viewed from the facing direction is concave toward the facing portion.
3. The fluid control device according to claim 1.
   The flexible portion is a fluid control device having a shape in which a plate-shaped member is deformed in a concave shape toward the facing portion in the reference state.
4. The fluid control device according to claim 1.
   The drive mechanism is a fluid control device that bends the flexible portion so that the concave portion of the flexible portion in the reference state moves most along the facing direction.
5. The fluid control device according to claim 1.
   The drive mechanism is a fluid control device having a piezoelectric element connected to a surface of the flexible portion opposite to the surface of the flexible portion facing the facing portion.
6. The fluid control device according to claim 1.
   Assuming that the flexible portion is the first flexible portion,
   The facing portion is composed of a second flexible portion having flexibility.
   The drive mechanism bends the second flexible portion, and the drive mechanism bends the second flexible portion.
   In the second flexible portion, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the opposite direction in the reference state is the first flexible portion. A fluid control device configured to be concave toward.
7. The fluid control device according to claim 6.
   The first flexible portion and the second flexible portion are fluid control devices configured to resonate with each other.
8. The fluid control device according to claim 7.
   The drive mechanism is
   A first piezoelectric element connected to a surface of the first flexible portion opposite to the surface of the first flexible portion facing the second flexible portion.
   It has a second piezoelectric element connected to a surface of the second flexible portion opposite to the surface of the first flexible portion facing the first flexible portion.
   Fluid control configured so that the overall resonance frequency of the first flexible portion and the first piezoelectric element is close to the overall resonance frequency of the second flexible portion and the second piezoelectric element. Device.
9. The fluid control device according to claim 1.
   Assuming that the flexible portion is the first flexible portion,
   The facing portion is composed of a second flexible portion having flexibility.
   The first flexible portion and the second flexible portion are fluid control devices configured to resonate with each other.
10. The fluid control device according to claim 9.
    The drive mechanism has a piezoelectric element connected to a surface of the first flexible portion opposite to the surface of the first flexible portion facing the second flexible portion.
    A fluid control device configured such that the resonance frequency of the second flexible portion is close to the resonance frequency of the entire first flexible portion and the piezoelectric element.
11. The fluid control device according to claim 10.
    A fluid control device in which the thickness of the second flexible portion is larger than the thickness of the first flexible portion.
12. The fluid control device according to claim 8.
    In the second flexible portion, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the opposite direction in the reference state is the first flexible portion. A fluid control device configured to be concave toward.
13. The fluid control device according to claim 1.
    The flexible portion is a fluid control device having a groove portion formed in the vicinity of the outer peripheral portion of the flexible portion when viewed from the facing direction.
14. The fluid control device according to claim 13.
    The drive mechanism has a piezoelectric element connected to a surface of the flexible portion opposite to the surface of the flexible portion facing the facing portion.
    The groove portion is a fluid control device configured at a position with respect to the outer peripheral portion of the piezoelectric element when viewed from the facing direction.
15. The fluid control device according to claim 1, further
    The suction port from which the fluid is sucked and
    A suction space component that constitutes a suction space that communicates the suction port and the inflow port,
    The discharge port from which the fluid is discharged and
    A fluid control device including a discharge space component that constitutes a discharge space that communicates the discharge port and the outlet.
16. The fluid control device according to claim 1.
    The flow path space component is
    When viewed from the opposite direction, the central region constitutes the flexible portion, and the first plate-shaped member made of a metal material and
    When viewed from the facing direction, the central region constitutes the facing portion, and the second plate-shaped member made of a metal material and
    When viewed from the opposite direction, the central region becomes an opening, has a predetermined thickness, is arranged between the first plate-shaped member and the second plate-shaped member, and has the first plate-shaped member. A fluid control device having a spacer member bonded to each of the member and the second plate-shaped member by diffusion bonding.
17. The fluid control device according to claim 16.
    The spacer member is configured for suction at a position different from the suction opening so as to communicate with the outer peripheral portion of the opening and the suction opening so as to communicate with the outer peripheral portion of the opening. A fluid control device with an opening.
18. The fluid control device according to claim 17.
    A suction port into which the fluid is sucked is configured in at least one of a region covering the suction opening of the first plate-shaped member or a region covering the suction opening of the second plate-shaped member. ,
    A discharge port for discharging the fluid is configured in at least one of a region covering the discharge opening of the first plate-shaped member or a region covering the discharge opening of the second plate-shaped member. Fluid control device.
19. A flow having a flexible portion and a facing portion facing the flexible portion, and forming a flow path space serving as a fluid flow path between the flexible portion and the facing portion. Road space component and
    When viewed from the opposite direction in which the flexible portion and the facing portion face each other, an inflow port configured on the outer peripheral portion of the flow path space and allowing the fluid to flow into the flow path space.
    When viewed from the opposite direction, the outlet is configured at a position different from the inlet of the outer peripheral portion of the flow path space, and the fluid flows out from the flow path space.
    It has a drive mechanism that bends the flexible portion and increases or decreases the volume of the flow path space.
    In the reference state where the flexible portion is not bent by the drive mechanism, at least a part of a region on the inner side of the outer peripheral portion of the flow path space when viewed from the facing direction is the facing portion. A fluid control device configured to be concave toward.
    An electronic device equipped with.

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