WO2022123773A1 - Suction nozzle and component mounter - Google Patents

Suction nozzle and component mounter Download PDF

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Publication number
WO2022123773A1
WO2022123773A1 PCT/JP2020/046306 JP2020046306W WO2022123773A1 WO 2022123773 A1 WO2022123773 A1 WO 2022123773A1 JP 2020046306 W JP2020046306 W JP 2020046306W WO 2022123773 A1 WO2022123773 A1 WO 2022123773A1
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WO
WIPO (PCT)
Prior art keywords
component
nozzle
suction
columnar
mounting
Prior art date
Application number
PCT/JP2020/046306
Other languages
French (fr)
Japanese (ja)
Inventor
仁哉 井村
陽介 佐藤
翔 村山
Original Assignee
株式会社Fuji
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社Fuji filed Critical 株式会社Fuji
Priority to JP2022568013A priority Critical patent/JPWO2022123773A1/ja
Priority to PCT/JP2020/046306 priority patent/WO2022123773A1/en
Priority to DE112020007833.7T priority patent/DE112020007833T5/en
Priority to CN202080107505.1A priority patent/CN116615965A/en
Publication of WO2022123773A1 publication Critical patent/WO2022123773A1/en

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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0404Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0408Incorporating a pick-up tool
    • H05K13/0409Sucking devices

Definitions

  • This specification relates to a suction nozzle used when mounting a plurality of columnar parts on a substrate, and a component mounting machine including the suction nozzle.
  • the column alignment device disclosed in Patent Document 1 has an alignment plate having a long groove engraved with the same number of electrodes as the number of electrodes of the CGA substrate (ceramic grid array substrate) and the same width as the electrode width, and the column aligning device protrudes from the long groove. It includes a lid member that eliminates columns (columnar parts), a straight-moving feeder that vibrates the alignment plate to advance the column, and a column supply device that supplies the column onto the alignment plate. According to this, the columns can be accurately aligned and sent to the suction jig, and soldering without falling off can be performed.
  • the column aligning device and the suction jig of Patent Document 1 are techniques corresponding to a CGA substrate in which a plurality of electrodes are arranged in a row, and can correspond to a substrate in which a plurality of electrodes are arranged two-dimensionally. Can not.
  • a suction nozzle capable of efficiently sucking and mounting a plurality of columnar components and mounting on the board without being restricted by the arrangement of a plurality of mounting positions set on the board, and a suction nozzle thereof. It is an issue to be solved to provide a component mounting machine including a suction nozzle.
  • the nozzle tip portion having a plurality of suction holes arranged corresponding to the arrangement of a plurality of mounting positions set on the substrate for mounting the plurality of columnar parts and capable of sucking the columnar parts, respectively.
  • a suction nozzle provided with an air passage capable of simultaneously supplying negative pressure air to each of the plurality of suction holes.
  • the present specification supplies a mounting head for holding the suction nozzle, a component transfer device having a head drive mechanism for moving the mounting head, a substrate transport device for transporting the substrate, and the columnar component.
  • a parts supply device and a parts mounting machine provided with the parts supply device.
  • the plurality of suction holes provided at the tip of the nozzle can be provided corresponding to the two-dimensional arrangement of the plurality of mounting positions set on the substrate. Not restricted by placement status. Moreover, since the negative pressure air is supplied to each of the plurality of suction holes all at once from the air passage, the columnar parts can be suctioned to each of them, and then the columnar parts can be mounted on the substrate. Therefore, the suction nozzle can suck and mount all the required columnar parts on the substrate at one time, and can efficiently suck and mount.
  • the component mounting machine 1 carries out mounting work for mounting the columnar component P (see FIGS. 5 and 6) and other components on the substrate K.
  • the direction from the left side to the right side of the paper surface is the X-axis direction for transporting the substrate K
  • the direction from the upper side (rear side) of the paper surface to the lower side (front side) of the paper surface is the Y-axis direction.
  • the component mounting machine 1 is configured by assembling a board transfer device 2, a component supply device 3, a component transfer device 4, a component recognition camera 7, a control device 8, and the like to a base 10.
  • the board transfer device 2 is arranged so as to extend in the X-axis direction on the base 10.
  • the substrate transfer device 2 is composed of a guide rail, a transfer belt, a clamp mechanism, and the like, which are abbreviated as codes.
  • the transport belt rotates along the guide rail to carry the mounted substrate K to the mounting implementation position in the machine.
  • the clamp mechanism positions the substrate K at the mounting implementation position. After the component mounting work by the component transfer device 4 is completed, the clamp mechanism releases the substrate K, and the transport belt carries the substrate K out of the machine.
  • the parts supply device 3 is arranged on the left side of the front side of the base 10.
  • the component supply device 3 includes a plurality of tape feeders 31 arranged on the left side in the X-axis direction, and a tray device 33 arranged on the center side in the X-axis direction.
  • Each tape feeder 31 sends out a carrier tape in which a large number of parts are stored in a row toward a supply position 32 on the rear end side.
  • the carrier tape is supplied so that parts can be collected at the supply position 32.
  • Various known forms of the tape feeder 31 can be applied.
  • the tray device 33 has a storage shelf 34 divided into a plurality of stages, a plurality of trays 35 stored in each stage of the storage shelf 34, and a mechanism (not shown) for selecting the tray 35 and pulling it backward from the storage shelf 34. It is composed.
  • the tray device 33 supplies a plurality of columnar parts P using a substantially rectangular tray 35 (details will be described later).
  • the component transfer device 4 is arranged above the board transfer device 2 and the component supply device 3.
  • the component transfer device 4 includes a Y-axis moving body 41, an X-axis moving body 42, a mounting head 43, three types of nozzles, a board recognition camera 45, and the like.
  • the Y-axis moving body 41 is driven by the Y-axis linear motion mechanism and moves in the Y-axis direction.
  • the X-axis moving body 42 is mounted on the Y-axis moving body 41 and is driven by the X-axis linear motion mechanism to move in the X-axis direction.
  • the mounting head 43 is attached to a clamp mechanism (not shown) provided on the front surface of the X-axis moving body 42, and moves in two horizontal directions together with the X-axis moving body 42.
  • the head drive mechanism is configured by the Y-axis moving body 41, the X-axis moving body 42, the Y-axis linear motion mechanism, and the X-axis linear motion mechanism.
  • a nozzle holding seat 44 is provided on the lower side of the mounting head 43 so as to be able to move up and down and rotate (see FIG. 5). Three types of nozzles are automatically and replaceably held under the nozzle holding seat 44.
  • a nozzle station 47 is arranged between the substrate transfer device 2 and the component supply device 3 on the base 10 for the purpose of mounting the three types of nozzles.
  • the suction nozzle 5 for sucking a plurality of columnar parts P is held under the nozzle holding seat 44.
  • a recovery nozzle 48 that adsorbs one columnar component P and a general nozzle 49 that adsorbs components other than the columnar component P are mounted on the nozzle station 47.
  • the suction nozzle 5 and the recovery nozzle 48 suck the columnar component P from the tray 35 of the tray device 33.
  • the general nozzle 49 attracts parts other than the columnar part P from the supply position 32 of the tape feeder 31.
  • Various known forms of the general nozzle 49 can be applied.
  • the automatic nozzle replacement is performed by moving the mounting head 43 above the nozzle station 47.
  • the board recognition camera 45 is provided on the X-axis moving body 42 along with the mounting head 43.
  • the substrate recognition camera 45 is arranged in a posture in which the optical axis faces downward.
  • the substrate recognition camera 45 captures the position reference mark attached to the substrate K from above.
  • the acquired image data is image-processed, and the mounting position of the substrate K is accurately obtained.
  • a digital image pickup device having an image pickup device such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) can be exemplified.
  • the component recognition camera 7 is provided on the right side of the nozzle station 47 on the base 10.
  • the component recognition camera 7 is arranged in a posture in which the optical axis faces upward.
  • the component recognition camera 7 captures images of the components attracted to the general nozzle 49 from below while the mounting head 43 is moving from the component supply device 3 to the substrate K. Further, the component recognition camera 7 performs the same imaging on the suction nozzle 5 and the recovery nozzle 48.
  • a digital image pickup device having an image pickup element such as a CCD or CMOS can be exemplified.
  • the waste box 37 and the adhesive collection unit 38 are arranged on the right side of the tray device 33.
  • the disposal box 37 and the adhesive collection unit 38 constitute a disposal unit 39 that disposes of unnecessary columnar parts P.
  • the waste box 37 is formed in a box shape that opens upward, and houses unnecessary columnar parts P inside.
  • the adhesive recovery unit 38 collects unnecessary columnar parts P by adhesive force (details will be described later).
  • the control device 8 is assembled to the base 10, and its arrangement position is not particularly limited.
  • the control device 8 is composed of a computer device having a CPU and operating by software.
  • the control device 8 may be configured such that a plurality of CPUs are distributed in the machine and are connected by communication.
  • the control device 8 controls the board transfer device 2, the component supply device 3, the component transfer device 4, and the component recognition camera 7 based on the job data for each type of the substrate K, and proceeds with the component mounting work.
  • the job data is data that describes the detailed procedure and implementation method of the mounting work.
  • the suction nozzle 5 has a nozzle base 51 and a nozzle tip 55 as main constituent members, and an air passage 6 is formed therein.
  • the nozzle base 51 is formed by connecting a flange portion 52, a shaft portion 53, and a mounting portion 54 in this order from the upper side.
  • the flange portion 52 is formed in a disk shape that extends in the horizontal direction.
  • the flange portion 52 has a notch portion 521 formed at one peripheral portion (see FIG. 3).
  • the suction nozzle 5 can be easily visually confirmed to be in a rotational state in the circumferential direction in the posture held by the nozzle holding seat 44 and as a single item. As shown in FIG. 5, when the flange portion 52 is held by the nozzle holding seat 44 of the mounting head 43, the entire suction nozzle 5 is held.
  • the nozzle holding seat 44 has a cylindrical lower portion.
  • the nozzle holding seat 44 has a central air passage 441 on the central axis, and peripheral air passages 442 at a plurality of locations deviated from the central axis.
  • the central air passage 441 and the peripheral air passage 442 are open downwards, and the air flow is controlled separately.
  • the nozzle holding seat 44 reaches above the flange portion 52 by moving the mounting head 43, descends, and comes into contact with the upper surface 522 of the flange portion 52. Then, when negative pressure air is supplied to the peripheral air passage 442, the nozzle holding seat 44 attracts and holds the flange portion 52.
  • the nozzle holding seat 44 may have a chuck mechanism for sandwiching the suction nozzle 5.
  • the shaft portion 53 is located in the center of the lower side of the flange portion 52.
  • the shaft portion 53 is formed in a cylindrical shape having a diameter smaller than that of the flange portion 52.
  • the mounting portion 54 is located below the shaft portion 53.
  • the planar shape of the upper portion 541 of the mounting portion 54 is a shape obtained by removing the four corners from the square.
  • Mounting holes 542 are formed so as to penetrate vertically at four locations near the outer circumference of the upper portion 541.
  • the mounting hole 542 has a small diameter on the upper side and a large diameter on the lower side.
  • the planar shape of the lower portion 543 of the mounting portion 54 is one size smaller than that of the upper portion 541.
  • a seal groove 544 is carved and formed so as to go around the outer circumference of the lower portion 543.
  • the seal groove 544 is fitted with an O-ring 545 for ensuring airtightness.
  • the nozzle tip portion 55 is formed by connecting the upper fixed portion 56 and the lower suction structure portion 59.
  • the fixed portion 56 is formed in a frame shape that surrounds the outer circumference of the lower portion 543 of the mounting portion 54.
  • the O-ring 545 is pressed against the inner surface of the fixed portion 56.
  • the fastened member 561 is erected and fixed at four points on the upper surface of the fixed portion 56 facing the mounting hole 542.
  • the fastened member 561 is formed with a female screw and engages with a large diameter portion below the mounting hole 542. Therefore, by inserting the fastening screw 58 into the mounting hole 542 from above and rotating it, the fastening screw 58 can be screwed into the female screw of the member to be fastened 561.
  • the nozzle base 51 holds the nozzle tip 55 in a detachable manner.
  • the suction structure portion 59 is formed in a plate shape that spreads in the horizontal direction.
  • the suction structure portion 59 is arranged slightly separated from the lower surface of the lower portion 543 of the mounting portion 54.
  • a planar air passage 65 extending in two horizontal directions with a separation distance D in the height direction is partitioned between the suction structure portion 59 and the lower portion 543 of the mounting portion 54 (see FIG. 6).
  • the flat air passage 65 is airtight by the O-ring 545.
  • the lower surface of the adsorption structure portion 59 is divided into an adsorption region 5A and a non-adsorption region 5C.
  • the suction region 5A is formed with a plurality of suction holes 5B that open downward.
  • the suction hole 5B is a portion for sucking the columnar component P.
  • the arrangement positions of the plurality of suction holes 5B correspond to the arrangement of the plurality of mounting positions set on the substrate K for mounting the plurality of columnar components P.
  • the shape and size of the suction region 5A including all the suction holes 5B are appropriately set according to the arrangement situation regardless of how the plurality of mounting positions on the substrate K side are arranged two-dimensionally. be able to.
  • the adsorption regions 5A may be dispersedly arranged at two or more locations. In the example shown in FIG. 4, the adsorption region 5A is set to have a square frame shape.
  • the number of suction holes 5B in the suction region 5A is 304, and the number is not limited to this.
  • the suction hole 5B is a vertical hole extending vertically in the axial direction, and is formed into a round hole according to the cylindrical shape of the columnar component P to be suctioned.
  • the inner diameter of the suction hole 5B is set to be slightly larger than the maximum diameter based on the dimensional tolerance of the diameter of the columnar component P.
  • the depth of the suction hole 5B is set to be slightly shorter than the length of the columnar component P.
  • the non-adsorption region 5C is an example shown in FIG. 4, which is an inner region of the adsorption region 5A and an outer region of the adsorption region 5A.
  • the lower surface of the adsorption region 5A projects downward from the lower surface of the non-adsorption region 5C.
  • the suction nozzle 5 descends and the columnar component P is mounted on the substrate K, the non-suction region 5C is retracted above the suction region 5A, so that it does not interfere with the mounted component. If the columnar component P is mounted first, the mounted columnar component P tends to interfere with the general nozzle 49 when the other components are mounted later.
  • the nozzle position mark 5D is provided at a position close to the outer edge of the non-adsorption region 5C.
  • the nozzle position mark 5D represents a reference of the position of the suction nozzle 5.
  • the nozzle position mark 5D can be imaged by the component recognition camera 7. That is, the component recognition camera 7 functions as a nozzle image pickup camera that captures the nozzle position mark 5D and acquires image data.
  • the detection accuracy of the position of the suction nozzle 5 is improved.
  • branch air passages 62 are formed at a 90 ° pitch in a plan view. Each of the branch air passages 62 branches from the midway height of the central air passage 61 and extends horizontally outward in the radial direction.
  • a lateral hole is formed in the mounting portion 54 of the nozzle base 51. The opening of this lateral hole is sealed by a stopcock 63.
  • the descending air passage 64 extends downward from a position outside the radial direction of the branch air passage 62. The lower end of the descending air passage 64 communicates with a position outside the suction region 5A of the planar air passage 65.
  • the air passage 6 when the negative pressure air is supplied to the upper end of the central air passage 61, the air passage 6 communicates with each of the plurality of suction holes 5B and supplies the negative pressure air all at once. be able to. Further, the planar air passage 65 communicates with the deepest portion of the suction hole 5B from the entire peripheral direction orthogonal to the axial direction of the suction hole 5B. Therefore, the upper end of the columnar component P sucked in the suction hole 5B is not sucked in a specific direction, and the vertical posture is maintained.
  • the plurality of suction holes 5B included in the nozzle tip portion 55 can be provided corresponding to the two-dimensional arrangement of the plurality of mounting positions set on the substrate K, depending on the arrangement situation. Not restricted. Moreover, since negative pressure air is simultaneously supplied from each of the plurality of suction holes 5B from the air passage 6, the columnar component P can be sucked, and subsequently, the columnar component P can be mounted on the substrate K. Therefore, the suction nozzle 5 can suck all the required columnar parts P and attach them to the substrate K at one time, and can efficiently perform the suction and the attachment.
  • the nozzle tip portion 55 is detachably held by the nozzle base portion 51. Therefore, for another type of substrate K in which the arrangement of the mounting positions of the plurality of columnar parts P is different, another nozzle tip portion 55 having a different arrangement of the suction holes 5B is manufactured and attached to the nozzle base 51 to cope with it. Can be done. That is, it is easy to deal with another type of substrate K, and the cost for dealing with it is low. In addition, since the nozzle tip portion 55 can be removed, maintenance such as cleaning of the suction hole 5B and the air passage 6 becomes easy.
  • the recovery nozzle 48 is in charge of a recovery operation for mounting the shortage of columnar parts P when the columnar parts P mounted on the substrate K are insufficient.
  • the recovery nozzle 48 is configured by connecting a flange portion 481 and a shaft portion 482, and an air passage 484 is formed therein.
  • the flange portion 481 is formed to have the same diameter as the flange portion 52 of the suction nozzle 5. Similar to the suction nozzle 5, when the flange portion 481 is sucked and held by the nozzle holding seat 44, the entire recovery nozzle 48 is held.
  • the shaft portion 482 is located in the center of the lower side of the flange portion 481 and extends downward.
  • the shaft portion 482 is formed in a hollow cylindrical shape, and the lower portion is reduced in diameter to form a suction hole 483.
  • the inner diameter and the depth of the suction hole 483 are set to be about the same as the suction hole 5B of the suction nozzle 5.
  • the outer diameter of the shaft portion 482 around the suction hole 483 is set small so as not to interfere with other mounted columnar parts P.
  • the air passage 484 is formed so as to vertically penetrate the flange portion 481 and the shaft portion 482. In the state where the recovery nozzle 48 is held by the nozzle holding seat 44, the air passage 484 communicates with the central air passage 441 of the nozzle holding seat 44, and negative pressure and positive pressure air is selectively supplied from the mounting head 43. Will be done.
  • the lower end of the air passage 484 communicates with the suction hole 483. Therefore, when negative pressure air is supplied to the air passage 484, the columnar component P is sucked into the suction hole 483.
  • the tray 35 holds three groups of parts consisting of 304 columnar parts P that are sucked by one suction operation of the suction nozzle 5.
  • the three group holding portions 351 that hold the parts group are arranged side by side in the longitudinal direction of the rectangular tray 35.
  • Each of the group holding portions 351 is formed in a square frame shape having the same shape as the suction region 5A of the suction nozzle 5.
  • the four sides of the group holding portion 351 are parallel to the four sides of the tray 35.
  • Each of the group holding portions 351 has 304 holding holes in the same arrangement as the suction holes 5B of the suction nozzle 5. However, the holding hole of the group holding portion 351 is formed shallower than the suction hole 5B of the suction nozzle 5, so that the columnar component P can be easily taken out.
  • the tray 35 may hold a group of parts of one group or two groups, or may hold a large number of parts groups exceeding three groups.
  • Group position marks 352 are provided at positions near the two diagonal corners of the square frame-shaped group holding portion 351.
  • the group position marks 352 are paired with each of the group holding portions 351.
  • the group position mark 352 serves as a reference for the position of the component group held by the group holding portion 351.
  • the group position mark 352 can be imaged by the substrate recognition camera 45. That is, the substrate recognition camera 45 functions as a tray image pickup camera that captures the group position mark 352 and acquires image data. If the imaging field of view is restricted, the substrate recognition camera 45 may separately capture the pair of group position marks 352 in two steps.
  • the accuracy of detecting the position of the component group is improved. In addition, it is possible to detect an error in the rotation angle of the component group in the horizontal plane.
  • the tray 35 has a single item holding unit 353 that can supply the columnar parts P one by one.
  • the single item holding portion 353 is arranged in parallel with the long side at a position near one long side of the tray 35.
  • the single item holding unit 353 holds the columnar parts P in a plurality of holding holes that are separated and arranged in a row. According to this, the component group of the columnar component P and the single item are supplied from one tray 35, which is convenient.
  • Single item position marks 354 are provided at positions near both ends of the single item holding portion 353.
  • the pair of single item position marks 354 serve as a reference for the position of the columnar component P held by the single item holding portion 353.
  • the single item position mark 354 is imaged by the substrate recognition camera 45.
  • Adhesive recovery unit 38 Next, the configuration of the adhesive recovery unit 38 will be described with reference to FIG. As shown, the adhesive recovery unit 38 is configured by using a conveyor device. That is, the double-sided adhesive tape 382 is attached to the belt conveyor 381 of the conveyor device to form the adhesive recovery unit 38. The double-sided adhesive tape 382 is pressed against the columnar component P that is no longer needed. Therefore, the double-sided adhesive tape 382 can hold and recover the columnar component P by the adhesive force.
  • the front portion of the adhesive recovery unit 38 is pulled out of the front side of the component mounting machine 1. Therefore, when the belt conveyor 381 rotates, the double-sided adhesive tape 382 is transferred to the outside of the machine. Therefore, without stopping the component mounting machine 1, the double-sided adhesive tape 382 can be peeled off outside the machine and discarded together with the columnar component P that is no longer needed. This disposal operation is performed after the number of columnar parts P corresponding to the area of the double-sided adhesive tape 382 is collected. After that, a new double-sided adhesive tape 382 is attached to the belt conveyor 381, and the belt conveyor 381 rotates again. As a result, the adhesive recovery unit 38 returns to a state in which the columnar component P can be recovered.
  • the adhesive recovery unit 38 may have a simple configuration in which the double-sided adhesive tape 382 is attached on the base 10. However, in this configuration, when the double-sided adhesive tape 382 is attached or peeled off, it is necessary to stop the component mounting machine 1 and open the safety cover (not shown). Similarly, when disposing of the columnar component P housed in the disposal box 37, it is necessary to stop the component mounting machine 1 and open the safety cover.
  • control device 8 controls the board transfer device 2, the component supply device 3, the component transfer device 4, and the component recognition camera 7 to proceed with the component mounting work. Further, the control device 8 has a calibration unit 81, a component detection unit 82, a disposal control unit 83, a position detection unit 84, and a cleaning control unit 85 as control function units that control the suction nozzle 5.
  • the calibration unit 81 moves the suction nozzle 5 held by the nozzle holding seat 44 above the component recognition camera 7.
  • the calibration unit 81 causes the component recognition camera 7 (nozzle image pickup camera) to image a plurality of nozzle position marks 5D and acquire image data. If the imaging field of view is restricted, the component recognition camera 7 may capture a plurality of nozzle position marks 5D in a plurality of times.
  • the calibration unit 81 receives the image data, performs image processing, and calibrates the relative position of the suction nozzle 5 with respect to the mounting head 43. In addition, the calibration unit 81 calibrates the rotational angle of the suction nozzle 5 in the circumferential direction.
  • the position error of the actual mounting position of the suction nozzle 5 with respect to the reference mounting position set on the mounting head 43 can be obtained.
  • the subsequent position control of the mounting head 43 is executed.
  • the reference mounting position is corrected based on the position error.
  • the image processing obtains an angle error of the actual mounting angle of the suction nozzle 5 with respect to the reference mounting angle set in the nozzle holding seat 44.
  • the subsequent rotation control of the nozzle holding seat 44 is executed.
  • the reference mounting angle is corrected based on the angle error.
  • the component detection unit 82 detects whether or not there is a columnar component P in each of the plurality of suction holes 5B of the suction nozzle 5.
  • the component detection unit 82 moves the suction nozzle 5 above the component recognition camera 7.
  • the component detection unit 82 causes the component recognition camera 7 (nozzle image pickup camera) to image the suction hole 5B and acquire image data.
  • the image data at this time may be shared with the image data acquired by the calibration unit 81.
  • the component recognition camera 7 may capture a plurality of suction holes 5B in a plurality of times.
  • the component detection unit 82 receives the image data, performs image processing, and detects whether or not the columnar component P is present in the suction hole 5B. The presence or absence of the columnar component P is detected, for example, by the difference in brightness in the image data.
  • the component detection unit 82 functions after the mounting operation in which the suction nozzle 5 mounts the columnar component P on the substrate K.
  • the component detection unit 82 can detect a third abnormality in which the columnar component P remains in at least one suction hole 5B at the time after the mounting operation.
  • the third abnormality means that the columnar component P mounted on the substrate K is insufficient.
  • the first to third abnormalities are caused, for example, by the intrusion of minute dust into the suction hole 5B and clogging.
  • the disposal control unit 83 is a part of the disposal unit 39.
  • the disposal control unit 83 functions when the component detection unit 82 detects an unnecessary columnar component P, in other words, when it detects a first abnormality and a third abnormality.
  • the disposal control unit 83 moves the suction nozzle 5 above the waste box 37, supplies positive pressure air from the air passage 6 to the suction hole 5B to blow off the columnar component P, and drops it into the waste box 37 for disposal.
  • the pressure of the positive pressure air at the time of disposal is set higher than the pressure of the positive pressure air at the time of mounting the component.
  • the disposal control unit 83 determines whether or not the product has actually been disposed of by another image pickup and image processing by the component recognition camera 7.
  • the disposal control unit 83 determines whether or not the waste can actually be disposed of by the third image pickup and image processing by the component recognition camera 7.
  • the position detection unit 84 functions before the suction nozzle 5 sucks the columnar component P from the tray 35.
  • the position detection unit 84 first moves the substrate recognition camera 45 above the tray 35.
  • the position detection unit 84 causes the substrate recognition camera 45 (tray image pickup camera) to image the group position mark 352 and acquire image data.
  • the position detection unit 84 receives the image data, performs image processing, and detects the position of the component group held by the group holding unit 351. Further, the position detection unit 84 can detect the position of the columnar component P held by the single item holding unit 353 by the same imaging and image processing.
  • the board transfer device 2 operates to carry the board K to the mounting implementation position and position it.
  • the mounting head 43 holds the general nozzle 49 and mounts a component that does not interfere with the mounting operation of the suction nozzle 5 on the substrate K.
  • the subsequent operation flow is shown in FIG.
  • step S1 of FIG. 12 the control device 8 moves the mounting head 43 to the nozzle station 47, removes the general nozzle 49 from the mounting head 43, and replaces it with the suction nozzle 5.
  • the calibration unit 81 functions to calibrate the relative position and mounting angle of the suction nozzle 5 with respect to the mounting head 43.
  • the component detection unit 82 detects whether or not the columnar component P is present in the suction hole 5B. When there is one or more unnecessary columnar parts P (first abnormality), the operation flow is branched to step S11.
  • step S11 the disposal control unit 83 disposes the columnar component P in the disposal box 37.
  • step S12 the disposal control unit 83 determines whether or not the disposal is successful by image processing. If the disposal is successful, the state of the suction hole 5B has been restored to normal, so that the operation flow is returned to step S2.
  • step S13 when disposal fails, the disposal control unit 83 disposes of the columnar component P in the adhesive recovery unit 38.
  • step S14 the disposal control unit 83 determines whether or not the disposal is successful by image processing. If the disposal is successful, the operation flow is returned to step S2. If disposal fails, the columnar component P cannot be removed from the suction hole 5B, and the component mounting machine 1 stops with an error. The control device 8 notifies that the error has stopped.
  • step S3 the position detection unit 84 detects the position of the component group held by the group holding unit 351 of the tray 35 by image processing.
  • the control device 8 controls the operation of the suction nozzle 5 to suck the columnar component P of the component group.
  • step S4 the component detection unit 82 determines whether or not there is a columnar component P in all the suction holes 5B by image processing.
  • step S5 the control device 8 stores the position of the columnar component P that the suction nozzle 5 could not suck. The stored position corresponds to a shortage position where the columnar component P is not mounted on the substrate K.
  • step S6 the control device 8 controls the mounting operation of the columnar component P on the substrate K.
  • step S7 the component detection unit 82 determines whether or not the columnar component P is present in the suction hole 5B. When even one columnar component P remains (third abnormality), the operation flow is branched to step S8.
  • step S8 the control device 8 stores the position (deficiency position) of the shortage columnar component P that was not mounted on the substrate K due to remaining in the suction hole 5B.
  • step S11 The subsequent operation flow is the same as described above, but if the columnar component P is successfully disposed of in steps S12 and S14, the operation flow proceeds to step S9 (see the broken line arrow).
  • step S9 the control device 8 determines whether or not all the columnar components P can be mounted on the substrate K.
  • the control device 8 adsorbs all the columnar parts P without omission, and determines that all the columnar parts P can be attached without omission. In this case, the operation flow ends. Otherwise, the operation flow proceeds to step S10.
  • step S10 the control device 8 controls the recovery operation of the recovery nozzle 48.
  • the control device 8 controls based on the deficient position stored in at least one of step S5 and step S8.
  • the control method for the recovery nozzle 48 is the same as the control method for the suction nozzle 5 except that the columnar component P for suction and mounting is one. That is, the control device 8 controls the recovery nozzle 48 so as to attract the columnar component P from the single item holding portion 353 of the tray 35 and mount it at the insufficient position on the substrate K.
  • the position of the columnar component P is detected by image processing, the presence or absence of the columnar component P is determined, and the like.
  • the operation flow ends by executing step S10.
  • step S10 means that at least one of the second abnormality and the third abnormality has occurred, which is not preferable. Therefore, the control device 8 may control the component mounting machine 1 to stop with an error when the number of executions or the execution frequency of the step S10 exceeds the specified value. According to this, the control device 8 can monitor the operating state of the suction nozzle 5 and detect performance deterioration such as clogging of the suction hole 5B.
  • the board K that has been mounted is carried out of the machine by the board transfer device 2.
  • the cleaning control unit 85 cleans the suction nozzle 5 and the recovery nozzle 48.
  • the mounting head 43 mounts the suction nozzle 5 and the recovery nozzle 48 on the nozzle station 47, and holds the general nozzle 49 again. Further, the tray 35 in which all three sets of parts have been consumed is returned to the storage shelf 34, and a new tray 35 is pulled out. This prepares the mounting work for the next board K.
  • the component mounting machine 1 of the embodiment it is possible to suction and mount all the required columnar components P to the substrate K at one time, similar to the effect described for the suction nozzle 5. It can be installed efficiently. Further, if the suction nozzle 5 is manufactured, the current product can be used for the other components of the component mounting machine 1, so that the introduction cost is low.
  • the suction nozzle 5 can be fixedly provided on the mounting head 43 to be a dedicated component mounting machine 1 for mounting only the columnar component P.
  • the cleaning control unit 85 cleans the suction nozzle 5 every predetermined number of operations or when an abnormality occurs.
  • one of the waste box 37 and the adhesive recovery unit 38 constituting the disposal unit 39 may be omitted. This embodiment can be applied and modified in various ways.

Abstract

This suction nozzle comprises: a nozzle tip part having a plurality of suction holes, which are arranged corresponding to the arrangement of a plurality of mount positions that are set on a board to mount a plurality of cylindrical components, and which are capable of suctioning the cylindrical components; and air paths which communicate with the plurality of respective suction holes and are capable of supplying negative pressure air at the same time.

Description

吸着ノズルおよび部品装着機Suction nozzle and component mounting machine
 本明細書は、複数の柱状部品を基板に装着するときに用いる吸着ノズル、および、この吸着ノズルを含んで構成される部品装着機に関する。 This specification relates to a suction nozzle used when mounting a plurality of columnar parts on a substrate, and a component mounting machine including the suction nozzle.
 特許文献1に開示されたカラム整列装置は、CGA基板(セラミック・グリッド・アレイ基板)の電極数と同一数および電極幅と同一幅で刻設された長溝を有する整列板と、長溝からはみ出たカラム(柱状部品)を排除する蓋部材と、整列板を振動させてカラムを進める直進フィーダーと、整列板上にカラムを供給するカラム供給装置と、を備える。これによれば、カラムを正確に整列させて吸着治具に送ることができ、脱落のないはんだ付けが行える、とされている。 The column alignment device disclosed in Patent Document 1 has an alignment plate having a long groove engraved with the same number of electrodes as the number of electrodes of the CGA substrate (ceramic grid array substrate) and the same width as the electrode width, and the column aligning device protrudes from the long groove. It includes a lid member that eliminates columns (columnar parts), a straight-moving feeder that vibrates the alignment plate to advance the column, and a column supply device that supplies the column onto the alignment plate. According to this, the columns can be accurately aligned and sent to the suction jig, and soldering without falling off can be performed.
特開2004-200280号公報Japanese Unexamined Patent Publication No. 2004-200280
 ところで、特許文献1のカラム整列装置および吸着治具は、複数の電極が一列に配置されたCGA基板に対応する技術であり、複数の電極が二次元的に配置された基板に対応することができない。 By the way, the column aligning device and the suction jig of Patent Document 1 are techniques corresponding to a CGA substrate in which a plurality of electrodes are arranged in a row, and can correspond to a substrate in which a plurality of electrodes are arranged two-dimensionally. Can not.
 それゆえ、本明細書では、基板に設定された複数の装着位置の配置に制約されずに、複数の柱状部品の吸着および基板への装着を効率的に行うことができる吸着ノズル、および、この吸着ノズルを含んで構成される部品装着機を提供することを解決すべき課題とする。 Therefore, in the present specification, a suction nozzle capable of efficiently sucking and mounting a plurality of columnar components and mounting on the board without being restricted by the arrangement of a plurality of mounting positions set on the board, and a suction nozzle thereof. It is an issue to be solved to provide a component mounting machine including a suction nozzle.
 本明細書は、複数の柱状部品を装着するために基板に設定された複数の装着位置の配置に対応して配列され前記柱状部品をそれぞれ吸着可能な複数の吸着穴をもつノズル先端部と、複数の前記吸着穴の各々に連通して一斉に負圧エアを供給可能なエア通路と、を備える吸着ノズルを開示する。 In the present specification, the nozzle tip portion having a plurality of suction holes arranged corresponding to the arrangement of a plurality of mounting positions set on the substrate for mounting the plurality of columnar parts and capable of sucking the columnar parts, respectively. Disclosed is a suction nozzle provided with an air passage capable of simultaneously supplying negative pressure air to each of the plurality of suction holes.
 また、本明細書は、前記した吸着ノズルを保持する装着ヘッド、および前記装着ヘッドを移動させるヘッド駆動機構を有する部品移載装置と、前記基板を搬送する基板搬送装置と、前記柱状部品を供給する部品供給装置と、を備える部品装着機を開示する。 Further, the present specification supplies a mounting head for holding the suction nozzle, a component transfer device having a head drive mechanism for moving the mounting head, a substrate transport device for transporting the substrate, and the columnar component. Discloses a parts supply device and a parts mounting machine provided with the parts supply device.
 本明細書で開示する吸着ノズルや部品装着機において、ノズル先端部がもつ複数の吸着穴は、基板に設定された複数の装着位置の二次元的な配置に対応して設けることができ、その配置状況に制約されない。かつ、複数の吸着穴の各々は、エア通路から一斉に負圧エアが供給されるので、それぞれ柱状部品を吸着することができ、続いて基板に装着することができる。したがって、吸着ノズルは、必要とされる全数の柱状部品の吸着および基板への装着を一度で行うことが可能であり、吸着および装着を効率的に行うことができる。 In the suction nozzles and component mounting machines disclosed in the present specification, the plurality of suction holes provided at the tip of the nozzle can be provided corresponding to the two-dimensional arrangement of the plurality of mounting positions set on the substrate. Not restricted by placement status. Moreover, since the negative pressure air is supplied to each of the plurality of suction holes all at once from the air passage, the columnar parts can be suctioned to each of them, and then the columnar parts can be mounted on the substrate. Therefore, the suction nozzle can suck and mount all the required columnar parts on the substrate at one time, and can efficiently suck and mount.
実施形態の部品装着機の全体構成を示す平面図である。It is a top view which shows the whole structure of the component mounting machine of an embodiment. 実施形態の吸着ノズルをノズル先端部の側から見た斜視図である。It is a perspective view which looked at the suction nozzle of an embodiment from the side of the nozzle tip portion. 吸着ノズルをノズル基部の側から見た斜視図である。It is a perspective view which looked at the suction nozzle from the side of the nozzle base. 図2のA部の部分拡大斜視図であって、吸着ノズルの吸着穴の配置を示す図である。It is a partially enlarged perspective view of the part A of FIG. 2, and is the figure which shows the arrangement of the suction hole of the suction nozzle. 吸着ノズルの側面断面図である。It is a side sectional view of a suction nozzle. 図5のB部の部分拡大図であって、柱状部品が吸着穴に吸着された状態を示す図である。It is a partially enlarged view of the part B of FIG. 5, and is the figure which shows the state which the columnar part was adsorbed by the suction hole. リカバリノズルの側面断面図である。It is a side sectional view of a recovery nozzle. リカバリノズルの先端付近を拡大して示した側面断面図である。It is a side sectional view showing the vicinity of the tip of a recovery nozzle enlarged. トレイの模式的な平面図である。It is a schematic plan view of a tray. 粘着回収部の構成例を示す斜視図である。It is a perspective view which shows the structural example of the adhesive recovery part. 部品装着機の制御の構成を示すブロック図である。It is a block diagram which shows the control structure of the component mounting machine. 部品装着機の動作を説明する動作フローの図である。It is a figure of the operation flow explaining the operation of a component mounting machine.
 1.実施形態の部品装着機1の全体構成
 まず、実施形態の吸着ノズル5を含んで構成される実施形態の部品装着機1の全体構成について、図1を参考にして説明する。部品装着機1は、柱状部品P(図5、図6参照)およびその他の部品を基板Kに装着する装着作業を実施する。
1. 1. Overall configuration of the component mounting machine 1 of the embodiment First, the overall configuration of the component mounting machine 1 of the embodiment including the suction nozzle 5 of the embodiment will be described with reference to FIG. The component mounting machine 1 carries out mounting work for mounting the columnar component P (see FIGS. 5 and 6) and other components on the substrate K.
 図1において、紙面左側から右側に向かう方向が基板Kを搬送するX軸方向、紙面上側(後側)から紙面下側(前側)に向かう方向がY軸方向となる。部品装着機1は、基板搬送装置2、部品供給装置3、部品移載装置4、部品認識用カメラ7、および制御装置8などが基台10に組み付けられて構成される。 In FIG. 1, the direction from the left side to the right side of the paper surface is the X-axis direction for transporting the substrate K, and the direction from the upper side (rear side) of the paper surface to the lower side (front side) of the paper surface is the Y-axis direction. The component mounting machine 1 is configured by assembling a board transfer device 2, a component supply device 3, a component transfer device 4, a component recognition camera 7, a control device 8, and the like to a base 10.
 基板搬送装置2は、基台10上でX軸方向に延在するように配置される。基板搬送装置2は、符号略のガイドレール、搬送ベルト、およびクランプ機構などで構成される。搬送ベルトは、ガイドレールに沿って輪転することにより、載置された基板Kを機内の装着実施位置まで搬入する。クランプ機構は、基板Kを装着実施位置に位置決めする。部品移載装置4による部品の装着作業が終了した後、クランプ機構は基板Kを解放し、搬送ベルトは基板Kを機外に搬出する。 The board transfer device 2 is arranged so as to extend in the X-axis direction on the base 10. The substrate transfer device 2 is composed of a guide rail, a transfer belt, a clamp mechanism, and the like, which are abbreviated as codes. The transport belt rotates along the guide rail to carry the mounted substrate K to the mounting implementation position in the machine. The clamp mechanism positions the substrate K at the mounting implementation position. After the component mounting work by the component transfer device 4 is completed, the clamp mechanism releases the substrate K, and the transport belt carries the substrate K out of the machine.
 部品供給装置3は、基台10の前側の左寄りに配置される。部品供給装置3は、X軸方向の左寄りに配列された複数のテープフィーダ31、およびX軸方向の中央寄りに配置されたトレイ装置33で構成される。各テープフィーダ31は、多数の部品が一列に収納されたキャリアテープを、後端側の供給位置32に向けて送り出す。キャリアテープは、供給位置32で部品を採取可能に供給する。テープフィーダ31は、公知の各種形態の適用が可能である。 The parts supply device 3 is arranged on the left side of the front side of the base 10. The component supply device 3 includes a plurality of tape feeders 31 arranged on the left side in the X-axis direction, and a tray device 33 arranged on the center side in the X-axis direction. Each tape feeder 31 sends out a carrier tape in which a large number of parts are stored in a row toward a supply position 32 on the rear end side. The carrier tape is supplied so that parts can be collected at the supply position 32. Various known forms of the tape feeder 31 can be applied.
 トレイ装置33は、複数段に区画された収納棚34、収納棚34の各段に収納された複数のトレイ35、およびトレイ35を選択して収納棚34から後方に引き出す機構(図略)によって構成される。トレイ装置33は、概ね長方形のトレイ35を用いて複数の柱状部品Pを供給する(詳細後述)。 The tray device 33 has a storage shelf 34 divided into a plurality of stages, a plurality of trays 35 stored in each stage of the storage shelf 34, and a mechanism (not shown) for selecting the tray 35 and pulling it backward from the storage shelf 34. It is composed. The tray device 33 supplies a plurality of columnar parts P using a substantially rectangular tray 35 (details will be described later).
 部品移載装置4は、基板搬送装置2および部品供給装置3よりも上方に配置される。部品移載装置4は、Y軸移動体41、X軸移動体42、装着ヘッド43、3種類のノズル、および基板認識用カメラ45などで構成される。Y軸移動体41は、Y軸直動機構に駆動されてY軸方向に移動する。X軸移動体42は、Y軸移動体41に装架され、X軸直動機構に駆動されてX軸方向に移動する。装着ヘッド43は、X軸移動体42の前面に設けられた図略のクランプ機構に取り付けられ、X軸移動体42と共に水平二方向に移動する。Y軸移動体41、X軸移動体42、Y軸直動機構、およびX軸直動機構により、ヘッド駆動機構が構成される。 The component transfer device 4 is arranged above the board transfer device 2 and the component supply device 3. The component transfer device 4 includes a Y-axis moving body 41, an X-axis moving body 42, a mounting head 43, three types of nozzles, a board recognition camera 45, and the like. The Y-axis moving body 41 is driven by the Y-axis linear motion mechanism and moves in the Y-axis direction. The X-axis moving body 42 is mounted on the Y-axis moving body 41 and is driven by the X-axis linear motion mechanism to move in the X-axis direction. The mounting head 43 is attached to a clamp mechanism (not shown) provided on the front surface of the X-axis moving body 42, and moves in two horizontal directions together with the X-axis moving body 42. The head drive mechanism is configured by the Y-axis moving body 41, the X-axis moving body 42, the Y-axis linear motion mechanism, and the X-axis linear motion mechanism.
 装着ヘッド43の下側に、ノズル保持座44が昇降可能かつ回転可能に設けられる(図5参照)。ノズル保持座44の下側に、3種類のノズルが自動交換可能に保持される。3種類のノズルを載置する目的で、基台10上の基板搬送装置2と部品供給装置3の間にノズルステーション47が配置される。図1において、複数の柱状部品Pを吸着する吸着ノズル5は、ノズル保持座44の下側に保持されている。また、1本の柱状部品Pを吸着するリカバリノズル48、および、柱状部品P以外の部品を吸着する一般用ノズル49は、ノズルステーション47に載置されている。 A nozzle holding seat 44 is provided on the lower side of the mounting head 43 so as to be able to move up and down and rotate (see FIG. 5). Three types of nozzles are automatically and replaceably held under the nozzle holding seat 44. A nozzle station 47 is arranged between the substrate transfer device 2 and the component supply device 3 on the base 10 for the purpose of mounting the three types of nozzles. In FIG. 1, the suction nozzle 5 for sucking a plurality of columnar parts P is held under the nozzle holding seat 44. Further, a recovery nozzle 48 that adsorbs one columnar component P and a general nozzle 49 that adsorbs components other than the columnar component P are mounted on the nozzle station 47.
 吸着ノズル5およびリカバリノズル48は、トレイ装置33のトレイ35から柱状部品Pを吸着する。一般用ノズル49は、テープフィーダ31の供給位置32から柱状部品P以外の部品を吸着する。一般用ノズル49は、公知の各種形態の適用が可能である。ノズルの自動交換は、装着ヘッド43がノズルステーション47の上方に移動することによって行われる。 The suction nozzle 5 and the recovery nozzle 48 suck the columnar component P from the tray 35 of the tray device 33. The general nozzle 49 attracts parts other than the columnar part P from the supply position 32 of the tape feeder 31. Various known forms of the general nozzle 49 can be applied. The automatic nozzle replacement is performed by moving the mounting head 43 above the nozzle station 47.
 基板認識用カメラ45は、装着ヘッド43と並んでX軸移動体42に設けられる。基板認識用カメラ45は、光軸が下向きとなる姿勢で配置される。基板認識用カメラ45は、基板Kに付設された位置基準マークを上方から撮像する。取得された画像データは画像処理され、基板Kの装着実施位置が正確に求められる。基板認識用カメラ45として、CCD(Charge Coupled Device)やCMOS(Complementary Metal Oxide Semiconductor)などの撮像素子を有するデジタル式の撮像装置を例示できる。 The board recognition camera 45 is provided on the X-axis moving body 42 along with the mounting head 43. The substrate recognition camera 45 is arranged in a posture in which the optical axis faces downward. The substrate recognition camera 45 captures the position reference mark attached to the substrate K from above. The acquired image data is image-processed, and the mounting position of the substrate K is accurately obtained. As the substrate recognition camera 45, a digital image pickup device having an image pickup device such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor) can be exemplified.
 部品認識用カメラ7は、基台10上のノズルステーション47の右側に設けられる。部品認識用カメラ7は、光軸が上向きとなる姿勢で配置される。部品認識用カメラ7は、装着ヘッド43が部品供給装置3から基板Kに移動する途中で、一般用ノズル49に吸着された部品を下方から撮像する。また、部品認識用カメラ7は、吸着ノズル5およびリカバリノズル48に対しても同様の撮像を行う。部品認識用カメラ7として、CCDやCMOS等の撮像素子を有するデジタル式の撮像装置を例示できる。 The component recognition camera 7 is provided on the right side of the nozzle station 47 on the base 10. The component recognition camera 7 is arranged in a posture in which the optical axis faces upward. The component recognition camera 7 captures images of the components attracted to the general nozzle 49 from below while the mounting head 43 is moving from the component supply device 3 to the substrate K. Further, the component recognition camera 7 performs the same imaging on the suction nozzle 5 and the recovery nozzle 48. As the component recognition camera 7, a digital image pickup device having an image pickup element such as a CCD or CMOS can be exemplified.
 また、トレイ装置33の右側に、廃棄箱37および粘着回収部38が配置される。廃棄箱37および粘着回収部38は、不要な柱状部品Pを廃棄する廃棄部39を構成する。廃棄箱37は、上方に開口する箱形状に形成されており、不要な柱状部品Pを内部に収容する。粘着回収部38は、不要な柱状部品Pを粘着力によって回収する(詳細後述)。 Further, the waste box 37 and the adhesive collection unit 38 are arranged on the right side of the tray device 33. The disposal box 37 and the adhesive collection unit 38 constitute a disposal unit 39 that disposes of unnecessary columnar parts P. The waste box 37 is formed in a box shape that opens upward, and houses unnecessary columnar parts P inside. The adhesive recovery unit 38 collects unnecessary columnar parts P by adhesive force (details will be described later).
 制御装置8は、基台10に組み付けられており、その配置位置は特に限定されない。制御装置8は、CPUを有してソフトウェアで動作するコンピュータ装置により構成される。なお、制御装置8は、複数のCPUが機内に分散配置され、かつ通信接続されて構成されてもよい。制御装置8は、基板Kの種類ごとのジョブデータに基づいて、基板搬送装置2、部品供給装置3、部品移載装置4、および部品認識用カメラ7制御し、部品の装着作業を進める。ジョブデータは、装着作業の詳細な手順や実施方法などを記述したデータである。 The control device 8 is assembled to the base 10, and its arrangement position is not particularly limited. The control device 8 is composed of a computer device having a CPU and operating by software. The control device 8 may be configured such that a plurality of CPUs are distributed in the machine and are connected by communication. The control device 8 controls the board transfer device 2, the component supply device 3, the component transfer device 4, and the component recognition camera 7 based on the job data for each type of the substrate K, and proceeds with the component mounting work. The job data is data that describes the detailed procedure and implementation method of the mounting work.
 2.実施形態の吸着ノズル5の構成
 次に、実施形態の吸着ノズル5の構成について、図2~図6を参考にして説明する。吸着ノズル5は、図2および図3に示されるように、ノズル基部51およびノズル先端部55を主要な構成部材としており、内部にエア通路6が形成される。ノズル基部51は、上側から順にフランジ部52、軸部53、および取り付け部54が連なって形成される。
2. 2. Configuration of the suction nozzle 5 of the embodiment Next, the configuration of the suction nozzle 5 of the embodiment will be described with reference to FIGS. 2 to 6. As shown in FIGS. 2 and 3, the suction nozzle 5 has a nozzle base 51 and a nozzle tip 55 as main constituent members, and an air passage 6 is formed therein. The nozzle base 51 is formed by connecting a flange portion 52, a shaft portion 53, and a mounting portion 54 in this order from the upper side.
 フランジ部52は、水平方向に広がる円板状に形成される。フランジ部52は、周囲の一箇所に切り欠き部521が形成されている(図3参照)。これにより、吸着ノズル5は、ノズル保持座44に保持された姿勢および単品において、周方向の回転状態が目視で容易に確認される。図5に示されるように、フランジ部52が装着ヘッド43のノズル保持座44に保持されると、吸着ノズル5の全体が保持される。 The flange portion 52 is formed in a disk shape that extends in the horizontal direction. The flange portion 52 has a notch portion 521 formed at one peripheral portion (see FIG. 3). As a result, the suction nozzle 5 can be easily visually confirmed to be in a rotational state in the circumferential direction in the posture held by the nozzle holding seat 44 and as a single item. As shown in FIG. 5, when the flange portion 52 is held by the nozzle holding seat 44 of the mounting head 43, the entire suction nozzle 5 is held.
 詳述すると、ノズル保持座44は、下部が円柱状に形成されている。ノズル保持座44は、中心軸上に中心エア通路441をもち、中心軸から外れた複数箇所に周辺エア通路442をもつ。中心エア通路441および周辺エア通路442は、下方に開口しており、エアの流れが別々に制御される。ノズル保持座44は、装着ヘッド43の移動によってフランジ部52の上方に到達し、下降してフランジ部52の上面522に接する。そして、周辺エア通路442に負圧のエアが供給されると、ノズル保持座44は、フランジ部52を吸着して保持する。これに限定されず、ノズル保持座44は、吸着ノズル5を挟持するチャック機構を有してもよい。 More specifically, the nozzle holding seat 44 has a cylindrical lower portion. The nozzle holding seat 44 has a central air passage 441 on the central axis, and peripheral air passages 442 at a plurality of locations deviated from the central axis. The central air passage 441 and the peripheral air passage 442 are open downwards, and the air flow is controlled separately. The nozzle holding seat 44 reaches above the flange portion 52 by moving the mounting head 43, descends, and comes into contact with the upper surface 522 of the flange portion 52. Then, when negative pressure air is supplied to the peripheral air passage 442, the nozzle holding seat 44 attracts and holds the flange portion 52. Not limited to this, the nozzle holding seat 44 may have a chuck mechanism for sandwiching the suction nozzle 5.
 軸部53は、フランジ部52の下側の中央に位置する。軸部53は、フランジ部52よりも小径の円筒状に形成されている。取り付け部54は、軸部53の下側に位置する。取り付け部54の上部541の平面形状は、正方形から四隅を取り除いた形状となっている。上部541の外周寄りの四箇所に、取り付け孔542が上下に貫通して形成される。取り付け孔542は、上側が小径で、下側が大径に形成されている。取り付け部54の下部543の平面形状は、上部541よりも一回り小さな形状となっている。下部543の外周を周回するように、シール溝544が刻まれて形成される。シール溝544は、気密を確保するためのOリング545が嵌め込まれている。 The shaft portion 53 is located in the center of the lower side of the flange portion 52. The shaft portion 53 is formed in a cylindrical shape having a diameter smaller than that of the flange portion 52. The mounting portion 54 is located below the shaft portion 53. The planar shape of the upper portion 541 of the mounting portion 54 is a shape obtained by removing the four corners from the square. Mounting holes 542 are formed so as to penetrate vertically at four locations near the outer circumference of the upper portion 541. The mounting hole 542 has a small diameter on the upper side and a large diameter on the lower side. The planar shape of the lower portion 543 of the mounting portion 54 is one size smaller than that of the upper portion 541. A seal groove 544 is carved and formed so as to go around the outer circumference of the lower portion 543. The seal groove 544 is fitted with an O-ring 545 for ensuring airtightness.
 ノズル先端部55は、上側の被固定部56、および下側の吸着構造部59が連なって形成される。被固定部56は、取り付け部54の下部543の外周を取り囲む枠形状に形成される。被固定部56は、内側の面にOリング545が圧接される。被固定部56の上面のうち取り付け孔542に対向する四箇所に、被締結部材561が立てて固定される。被締結部材561は、雌ねじが形成されており、取り付け孔542の下側の大径の部分に係入する。したがって、締結ねじ58を上側から取り付け孔542に差し込んで回転させることにより、締結ねじ58を被締結部材561の雌ねじに螺合させることができる。これにより、ノズル基部51は、ノズル先端部55を着脱可能に保持する。 The nozzle tip portion 55 is formed by connecting the upper fixed portion 56 and the lower suction structure portion 59. The fixed portion 56 is formed in a frame shape that surrounds the outer circumference of the lower portion 543 of the mounting portion 54. The O-ring 545 is pressed against the inner surface of the fixed portion 56. The fastened member 561 is erected and fixed at four points on the upper surface of the fixed portion 56 facing the mounting hole 542. The fastened member 561 is formed with a female screw and engages with a large diameter portion below the mounting hole 542. Therefore, by inserting the fastening screw 58 into the mounting hole 542 from above and rotating it, the fastening screw 58 can be screwed into the female screw of the member to be fastened 561. As a result, the nozzle base 51 holds the nozzle tip 55 in a detachable manner.
 吸着構造部59は、水平方向に広がる板形状に形成される。吸着構造部59は、取り付け部54の下部543の下面からわずかに離隔して配置される。これにより、吸着構造部59と取り付け部54の下部543との間に、高さ方向の離隔距離Dで水平二方向に広がる平面状エア通路65が区画される(図6参照)。平面状エア通路65は、Oリング545によって気密が確保される。吸着構造部59の下面は、吸着領域5Aおよび非吸着領域5Cに分かれる。 The suction structure portion 59 is formed in a plate shape that spreads in the horizontal direction. The suction structure portion 59 is arranged slightly separated from the lower surface of the lower portion 543 of the mounting portion 54. As a result, a planar air passage 65 extending in two horizontal directions with a separation distance D in the height direction is partitioned between the suction structure portion 59 and the lower portion 543 of the mounting portion 54 (see FIG. 6). The flat air passage 65 is airtight by the O-ring 545. The lower surface of the adsorption structure portion 59 is divided into an adsorption region 5A and a non-adsorption region 5C.
 吸着領域5Aは、下方に開口する複数の吸着穴5Bが形成されている。吸着穴5Bは、柱状部品Pを吸着する部位である。複数の吸着穴5Bの配列位置は、複数の柱状部品Pを装着するために基板Kに設定された複数の装着位置の配置に対応している。全部の吸着穴5Bを包含する吸着領域5Aの形状および大きさは、基板K側の複数の装着位置が二次元状にどのように配置されていても、その配置状況に合わせて適正に設定することができる。また、吸着領域5Aは、二箇所以上に分散配置されていてもよい。図4に示される例で、吸着領域5Aは、正方形の枠形状に設定されている。吸着領域5A内の吸着穴5Bの個数は304個であり、これに限定されない。 The suction region 5A is formed with a plurality of suction holes 5B that open downward. The suction hole 5B is a portion for sucking the columnar component P. The arrangement positions of the plurality of suction holes 5B correspond to the arrangement of the plurality of mounting positions set on the substrate K for mounting the plurality of columnar components P. The shape and size of the suction region 5A including all the suction holes 5B are appropriately set according to the arrangement situation regardless of how the plurality of mounting positions on the substrate K side are arranged two-dimensionally. be able to. Further, the adsorption regions 5A may be dispersedly arranged at two or more locations. In the example shown in FIG. 4, the adsorption region 5A is set to have a square frame shape. The number of suction holes 5B in the suction region 5A is 304, and the number is not limited to this.
 吸着穴5Bは、軸方向が上下に延在する垂直穴とされ、かつ、吸着する柱状部品Pの円柱形状に合わせて丸穴に形成される。吸着穴5Bの内径は、柱状部品Pの直径の寸法公差に基づく最大直径よりもわずかに大きめに設定される。吸着穴5Bの深さは、柱状部品Pの長さよりも少し短めに設定される。これらの設定により、吸着穴5Bに吸着された柱状部品Pの垂直姿勢の安定化が図られている。なお、柱状部品Pが角柱形状である場合、吸着穴5Bを同じ角柱形状の穴とすることが好ましい。図6に示されるように、吸着穴5Bの最深部(最も高い位置)は、平面状エア通路65に連通する。 The suction hole 5B is a vertical hole extending vertically in the axial direction, and is formed into a round hole according to the cylindrical shape of the columnar component P to be suctioned. The inner diameter of the suction hole 5B is set to be slightly larger than the maximum diameter based on the dimensional tolerance of the diameter of the columnar component P. The depth of the suction hole 5B is set to be slightly shorter than the length of the columnar component P. By these settings, the vertical posture of the columnar component P sucked in the suction hole 5B is stabilized. When the columnar component P has a prismatic shape, it is preferable that the suction hole 5B has the same prismatic shape. As shown in FIG. 6, the deepest portion (highest position) of the suction hole 5B communicates with the planar air passage 65.
 非吸着領域5Cは、図4に示される例で、吸着領域5Aの内側の領域および、吸着領域5Aの外側の領域となる。吸着領域5Aの下面は、非吸着領域5Cの下面よりも下方に突出している。ここで、柱状部品Pの長さが他の部品の高さよりも大きい場合、基板Kに対して他の部品を先に装着し、柱状部品Pを後で装着する。吸着ノズル5が下降して柱状部品Pを基板Kに装着する際、非吸着領域5Cは、吸着領域5Aよりも上方に引っ込んでいるため、装着済みの部品に干渉しない。仮に、柱状部品Pを先に装着すると、他の部品を後で装着するときに、装着済みの柱状部品Pが一般用ノズル49に干渉しやすくなる。 The non-adsorption region 5C is an example shown in FIG. 4, which is an inner region of the adsorption region 5A and an outer region of the adsorption region 5A. The lower surface of the adsorption region 5A projects downward from the lower surface of the non-adsorption region 5C. Here, when the length of the columnar component P is larger than the height of the other component, the other component is mounted on the substrate K first, and the columnar component P is mounted later. When the suction nozzle 5 descends and the columnar component P is mounted on the substrate K, the non-suction region 5C is retracted above the suction region 5A, so that it does not interfere with the mounted component. If the columnar component P is mounted first, the mounted columnar component P tends to interfere with the general nozzle 49 when the other components are mounted later.
 非吸着領域5Cの外縁に近い位置にノズル位置マーク5Dが設けられる。ノズル位置マーク5Dは、吸着ノズル5の位置の基準を表すものである。ノズル位置マーク5Dは、部品認識用カメラ7による撮像が可能である。つまり、部品認識用カメラ7は、ノズル位置マーク5Dを撮像して画像データを取得するノズル撮像カメラとして機能する。ノズル位置マーク5Dを複数(図2の例では4個)とすることにより、吸着ノズル5の位置の検出精度が向上する。加えて、吸着ノズル5の周方向の回転状態の検出が可能となる。 The nozzle position mark 5D is provided at a position close to the outer edge of the non-adsorption region 5C. The nozzle position mark 5D represents a reference of the position of the suction nozzle 5. The nozzle position mark 5D can be imaged by the component recognition camera 7. That is, the component recognition camera 7 functions as a nozzle image pickup camera that captures the nozzle position mark 5D and acquires image data. By using a plurality of nozzle position marks 5D (4 in the example of FIG. 2), the detection accuracy of the position of the suction nozzle 5 is improved. In addition, it is possible to detect the rotational state of the suction nozzle 5 in the circumferential direction.
 次に、複数の吸着穴5Bに一斉に負圧のエアを供給可能なエア通路6について説明する。エア通路6は、中心エア通路61、分岐エア通路62、下降エア通路64、および前述した平面状エア通路65で構成される。中心エア通路61は、ノズル基部51の中心を上下に貫通して形成される。吸着ノズル5がノズル保持座44に保持された状態において、中心エア通路61は、ノズル保持座44の中心エア通路441に連通して、装着ヘッド43から負圧および正圧のエアが選択的に供給される。中心エア通路61の下端は、平面状エア通路65の中央位置に連通する。 Next, the air passage 6 capable of supplying negative pressure air to the plurality of suction holes 5B all at once will be described. The air passage 6 is composed of a central air passage 61, a branch air passage 62, a descending air passage 64, and the above-mentioned planar air passage 65. The central air passage 61 is formed so as to vertically penetrate the center of the nozzle base 51. In a state where the suction nozzle 5 is held by the nozzle holding seat 44, the central air passage 61 communicates with the central air passage 441 of the nozzle holding seat 44, and negative pressure and positive pressure air is selectively discharged from the mounting head 43. Be supplied. The lower end of the central air passage 61 communicates with the central position of the planar air passage 65.
 分岐エア通路62は、平面視で90°ピッチに4個形成されている。分岐エア通路62の各々は、中心エア通路61の途中高さから分岐して、径方向外向きに水平に延在する。2個の分岐エア通路62を通しで形成する際に、ノズル基部51の取り付け部54に横孔が穿孔される。この横孔の開口部は、止め栓63によって封止される。下降エア通路64は、分岐エア通路62の径方向外寄りの位置から下方に延在する。下降エア通路64の下端は、平面状エア通路65の吸着領域5Aよりも外側の位置に連通する。 Four branch air passages 62 are formed at a 90 ° pitch in a plan view. Each of the branch air passages 62 branches from the midway height of the central air passage 61 and extends horizontally outward in the radial direction. When forming through the two branch air passages 62, a lateral hole is formed in the mounting portion 54 of the nozzle base 51. The opening of this lateral hole is sealed by a stopcock 63. The descending air passage 64 extends downward from a position outside the radial direction of the branch air passage 62. The lower end of the descending air passage 64 communicates with a position outside the suction region 5A of the planar air passage 65.
 このエア通路6の構成によれば、中心エア通路61の上端に負圧のエアが供給されたとき、エア通路6は複数の吸着穴5Bの各々に連通して一斉に負圧エアを供給することができる。かつ、平面状エア通路65は、吸着穴5Bの軸方向と直交する全周囲方向から吸着穴5Bの最深部に連通している。したがって、吸着穴5Bに吸着された柱状部品Pは、その上端が特定の方向に吸引されることがなく、垂直姿勢が保たれる。 According to the configuration of the air passage 6, when the negative pressure air is supplied to the upper end of the central air passage 61, the air passage 6 communicates with each of the plurality of suction holes 5B and supplies the negative pressure air all at once. be able to. Further, the planar air passage 65 communicates with the deepest portion of the suction hole 5B from the entire peripheral direction orthogonal to the axial direction of the suction hole 5B. Therefore, the upper end of the columnar component P sucked in the suction hole 5B is not sucked in a specific direction, and the vertical posture is maintained.
 仮に、分岐エア通路62および下降エア通路64を設けない構成を想定すると、柱状部品Pは、その上端が中心方向に向かって吸引される。このため、柱状部品Pは、直径の寸法公差の分だけ傾斜した姿勢で吸着されやすくなる。結果として、柱状部品Pが基板Kに装着されたときの垂直精度が低下する。 Assuming a configuration in which the branch air passage 62 and the descending air passage 64 are not provided, the upper end of the columnar component P is sucked toward the center. Therefore, the columnar component P is likely to be attracted in an inclined posture by the dimensional tolerance of the diameter. As a result, the vertical accuracy when the columnar component P is mounted on the substrate K is reduced.
 実施形態の吸着ノズル5において、ノズル先端部55がもつ複数の吸着穴5Bは、基板Kに設定された複数の装着位置の二次元的な配置に対応して設けることができ、その配置状況に制約されない。かつ、複数の吸着穴5Bの各々は、エア通路6から一斉に負圧エアが供給されるので、それぞれ柱状部品Pを吸着することができ、続いて基板Kに装着することができる。したがって、吸着ノズル5は、必要とされる全数の柱状部品Pの吸着および基板Kへの装着を一度で行うことが可能であり、吸着および装着を効率的に行うことができる。 In the suction nozzle 5 of the embodiment, the plurality of suction holes 5B included in the nozzle tip portion 55 can be provided corresponding to the two-dimensional arrangement of the plurality of mounting positions set on the substrate K, depending on the arrangement situation. Not restricted. Moreover, since negative pressure air is simultaneously supplied from each of the plurality of suction holes 5B from the air passage 6, the columnar component P can be sucked, and subsequently, the columnar component P can be mounted on the substrate K. Therefore, the suction nozzle 5 can suck all the required columnar parts P and attach them to the substrate K at one time, and can efficiently perform the suction and the attachment.
 さらに、ノズル先端部55は、ノズル基部51に着脱可能に保持されている。したがって、複数の柱状部品Pの装着位置の配置が相違する別種の基板Kに対して、吸着穴5Bの配置が相違する別のノズル先端部55を製作し、ノズル基部51に取り付けて対応することができる。つまり、別種の基板Kへの対応が容易であり、かつ、対応するためのコストが低廉になる。加えて、ノズル先端部55を取り外すことができるので、吸着穴5Bやエア通路6の清掃を始めとするメンテナンスが容易になる。 Further, the nozzle tip portion 55 is detachably held by the nozzle base portion 51. Therefore, for another type of substrate K in which the arrangement of the mounting positions of the plurality of columnar parts P is different, another nozzle tip portion 55 having a different arrangement of the suction holes 5B is manufactured and attached to the nozzle base 51 to cope with it. Can be done. That is, it is easy to deal with another type of substrate K, and the cost for dealing with it is low. In addition, since the nozzle tip portion 55 can be removed, maintenance such as cleaning of the suction hole 5B and the air passage 6 becomes easy.
 3.リカバリノズル48
 次に、リカバリノズル48について、図7および図8を参考にして説明する。リカバリノズル48は、基板Kに装着された柱状部品Pが不足する場合に、不足分の柱状部品Pを装着するリカバリ動作を担当する。リカバリノズル48は、フランジ部481および軸部482が連なって構成され、内部にエア通路484が形成される。フランジ部481は、吸着ノズル5のフランジ部52と同じ直径に形成される。吸着ノズル5と同様に、フランジ部481がノズル保持座44に吸着されて保持されると、リカバリノズル48の全体が保持される。
3. 3. Recovery nozzle 48
Next, the recovery nozzle 48 will be described with reference to FIGS. 7 and 8. The recovery nozzle 48 is in charge of a recovery operation for mounting the shortage of columnar parts P when the columnar parts P mounted on the substrate K are insufficient. The recovery nozzle 48 is configured by connecting a flange portion 481 and a shaft portion 482, and an air passage 484 is formed therein. The flange portion 481 is formed to have the same diameter as the flange portion 52 of the suction nozzle 5. Similar to the suction nozzle 5, when the flange portion 481 is sucked and held by the nozzle holding seat 44, the entire recovery nozzle 48 is held.
 軸部482は、フランジ部481の下側の中央に位置して、下方に延在する。軸部482は、中空の円筒状に形成され、下部が縮径されて吸着穴483が形成される。吸着穴483の内径および深さは、吸着ノズル5の吸着穴5Bと同程度に設定される。吸着穴483の周りの軸部482の外径は、装着済みの他の柱状部品Pに干渉しないように、細く設定される。 The shaft portion 482 is located in the center of the lower side of the flange portion 481 and extends downward. The shaft portion 482 is formed in a hollow cylindrical shape, and the lower portion is reduced in diameter to form a suction hole 483. The inner diameter and the depth of the suction hole 483 are set to be about the same as the suction hole 5B of the suction nozzle 5. The outer diameter of the shaft portion 482 around the suction hole 483 is set small so as not to interfere with other mounted columnar parts P.
 エア通路484は、フランジ部481および軸部482を上下に貫通して形成される。リカバリノズル48がノズル保持座44に保持された状態において、エア通路484は、ノズル保持座44の中心エア通路441に連通して、装着ヘッド43から負圧および正圧のエアが選択的に供給される。エア通路484の下端は、吸着穴483に連通する。したがって、エア通路484に負圧のエアが供給されたとき、吸着穴483に柱状部品Pが吸着される。 The air passage 484 is formed so as to vertically penetrate the flange portion 481 and the shaft portion 482. In the state where the recovery nozzle 48 is held by the nozzle holding seat 44, the air passage 484 communicates with the central air passage 441 of the nozzle holding seat 44, and negative pressure and positive pressure air is selectively supplied from the mounting head 43. Will be done. The lower end of the air passage 484 communicates with the suction hole 483. Therefore, when negative pressure air is supplied to the air passage 484, the columnar component P is sucked into the suction hole 483.
 4.トレイ35による柱状部品Pの供給
 次に、トレイ35を用いた複数の柱状部品Pの供給について、図9を参考にして説明する。トレイ35は、吸着ノズル5の一回の吸着動作で吸着される304本の柱状部品Pからなる部品群を三群保持する。部品群を保持する三つの群保持部351は、長方形のトレイ35の長手方向に並んで配置される。群保持部351の各々は、吸着ノズル5の吸着領域5Aと同一形状の正方形の枠状に形成される。群保持部351の四辺は、トレイ35の四辺に対して平行する。
4. Supply of Columnar Parts P by Tray 35 Next, supply of a plurality of columnar parts P using the tray 35 will be described with reference to FIG. The tray 35 holds three groups of parts consisting of 304 columnar parts P that are sucked by one suction operation of the suction nozzle 5. The three group holding portions 351 that hold the parts group are arranged side by side in the longitudinal direction of the rectangular tray 35. Each of the group holding portions 351 is formed in a square frame shape having the same shape as the suction region 5A of the suction nozzle 5. The four sides of the group holding portion 351 are parallel to the four sides of the tray 35.
 群保持部351の各々は、吸着ノズル5の吸着穴5Bと同一配置の304個の保持穴をもつ。ただし、群保持部351の保持穴は、吸着ノズル5の吸着穴5Bよりも浅く形成され、柱状部品Pの取り出しが容易化されている。なお、トレイ35は、一群や二群の部品群を保持してもよく、あるいは、三群を越える多数の部品群を保持してもよい。 Each of the group holding portions 351 has 304 holding holes in the same arrangement as the suction holes 5B of the suction nozzle 5. However, the holding hole of the group holding portion 351 is formed shallower than the suction hole 5B of the suction nozzle 5, so that the columnar component P can be easily taken out. The tray 35 may hold a group of parts of one group or two groups, or may hold a large number of parts groups exceeding three groups.
 正方形枠状の群保持部351の対角線上の二つのコーナーの近傍位置に、それぞれ群位置マーク352が設けられる。群位置マーク352は、群保持部351の各々に対して一対とされている。群位置マーク352は、群保持部351に保持された部品群の位置の基準となるものである。群位置マーク352は、基板認識用カメラ45による撮像が可能である。つまり、基板認識用カメラ45は、群位置マーク352を撮像して画像データを取得するトレイ撮像カメラとして機能する。なお、撮像視野の制約がある場合、基板認識用カメラ45は、一対の群位置マーク352を別々に二回に分けて撮像してもよい。群位置マーク352を一対とすることにより、部品群の位置の検出精度が向上する。加えて、部品群の水平面内における回転角度の誤差の検出が可能となる。 Group position marks 352 are provided at positions near the two diagonal corners of the square frame-shaped group holding portion 351. The group position marks 352 are paired with each of the group holding portions 351. The group position mark 352 serves as a reference for the position of the component group held by the group holding portion 351. The group position mark 352 can be imaged by the substrate recognition camera 45. That is, the substrate recognition camera 45 functions as a tray image pickup camera that captures the group position mark 352 and acquires image data. If the imaging field of view is restricted, the substrate recognition camera 45 may separately capture the pair of group position marks 352 in two steps. By pairing the group position marks 352, the accuracy of detecting the position of the component group is improved. In addition, it is possible to detect an error in the rotation angle of the component group in the horizontal plane.
 さらに、トレイ35は、柱状部品Pを1本ずつ供給することができる単品保持部353を有する。単品保持部353は、トレイ35の一方の長辺の近くの位置に、長辺に平行して配置される。単品保持部353は、離隔して一列に並ぶ複数の保持穴に柱状部品Pをそれぞれ保持している。これによれば、柱状部品Pの部品群および単品が一つのトレイ35から供給されるので、便利である。単品保持部353の両端付近の位置に、それぞれ単品位置マーク354が設けられる。一対の単品位置マーク354は、単品保持部353に保持された柱状部品Pの位置の基準となるものである。単品位置マーク354は、群位置マーク352と同様、基板認識用カメラ45によって撮像される。 Further, the tray 35 has a single item holding unit 353 that can supply the columnar parts P one by one. The single item holding portion 353 is arranged in parallel with the long side at a position near one long side of the tray 35. The single item holding unit 353 holds the columnar parts P in a plurality of holding holes that are separated and arranged in a row. According to this, the component group of the columnar component P and the single item are supplied from one tray 35, which is convenient. Single item position marks 354 are provided at positions near both ends of the single item holding portion 353. The pair of single item position marks 354 serve as a reference for the position of the columnar component P held by the single item holding portion 353. Like the group position mark 352, the single item position mark 354 is imaged by the substrate recognition camera 45.
 5.粘着回収部38
 次に、粘着回収部38の構成について、図10を参考にして説明する。図示されるように、粘着回収部38は、コンベア装置を用いて構成される。すなわち、コンベア装置のベルトコンベア381に両面粘着テープ382が貼り付けられて、粘着回収部38が構成される。両面粘着テープ382は、不要になった柱状部品Pが移送されて押し当てられる。したがって、両面粘着テープ382は、当該の柱状部品Pを粘着力によって保持し、回収することができる。
5. Adhesive recovery unit 38
Next, the configuration of the adhesive recovery unit 38 will be described with reference to FIG. As shown, the adhesive recovery unit 38 is configured by using a conveyor device. That is, the double-sided adhesive tape 382 is attached to the belt conveyor 381 of the conveyor device to form the adhesive recovery unit 38. The double-sided adhesive tape 382 is pressed against the columnar component P that is no longer needed. Therefore, the double-sided adhesive tape 382 can hold and recover the columnar component P by the adhesive force.
 図1に示されるように、粘着回収部38の前部は、部品装着機1の前側の機外に引き出されている。このため、ベルトコンベア381が輪転すると、両面粘着テープ382が機外に移送される。したがって、部品装着機1を停止することなく、機外で両面粘着テープ382を剥がして、不要になった柱状部品Pとともに廃棄することができる。この廃棄操作は、両面粘着テープ382の面積に見合う本数の柱状部品Pが回収された後に実施される。この後、新品の両面粘着テープ382がベルトコンベア381に貼付されて、ベルトコンベア381が再度輪転する。これにより、粘着回収部38は、柱状部品Pの回収を行える状態に戻る。 As shown in FIG. 1, the front portion of the adhesive recovery unit 38 is pulled out of the front side of the component mounting machine 1. Therefore, when the belt conveyor 381 rotates, the double-sided adhesive tape 382 is transferred to the outside of the machine. Therefore, without stopping the component mounting machine 1, the double-sided adhesive tape 382 can be peeled off outside the machine and discarded together with the columnar component P that is no longer needed. This disposal operation is performed after the number of columnar parts P corresponding to the area of the double-sided adhesive tape 382 is collected. After that, a new double-sided adhesive tape 382 is attached to the belt conveyor 381, and the belt conveyor 381 rotates again. As a result, the adhesive recovery unit 38 returns to a state in which the columnar component P can be recovered.
 なお、粘着回収部38は、基台10上に両面粘着テープ382を貼付する簡易な構成としてもよい。ただし、この構成では、両面粘着テープ382を貼付したり剥がしたりする際に、部品装着機1を停止させて、図略の安全カバーを開く必要がある。同様に、廃棄箱37に収容された柱状部品Pを廃棄する際にも、部品装着機1を停止させて、安全カバーを開く必要がある。 The adhesive recovery unit 38 may have a simple configuration in which the double-sided adhesive tape 382 is attached on the base 10. However, in this configuration, when the double-sided adhesive tape 382 is attached or peeled off, it is necessary to stop the component mounting machine 1 and open the safety cover (not shown). Similarly, when disposing of the columnar component P housed in the disposal box 37, it is necessary to stop the component mounting machine 1 and open the safety cover.
 6.部品装着機1の制御の構成
 次に、部品装着機1の制御の構成について、図11を参考にして説明する。前述したように、制御装置8は、基板搬送装置2、部品供給装置3、部品移載装置4、および部品認識用カメラ7制御して、部品の装着作業を進める。また、制御装置8は、吸着ノズル5に関する制御を行う制御機能部として、較正部81、部品検出部82、廃棄制御部83、位置検出部84、および清掃制御部85を有する。
6. Configuration of control of component mounting machine 1 Next, a configuration of control of component mounting machine 1 will be described with reference to FIG. 11. As described above, the control device 8 controls the board transfer device 2, the component supply device 3, the component transfer device 4, and the component recognition camera 7 to proceed with the component mounting work. Further, the control device 8 has a calibration unit 81, a component detection unit 82, a disposal control unit 83, a position detection unit 84, and a cleaning control unit 85 as control function units that control the suction nozzle 5.
 較正部81は、吸着ノズル5がノズル保持座44に保持されたときに機能する。ここで、吸着ノズル5は、ノズル保持座44に繰り返して着脱され、保持されるたびに装着ヘッド43に対する相対位置が変化し得る。較正部81は、この相対位置の変化を較正するものである。 The calibration unit 81 functions when the suction nozzle 5 is held by the nozzle holding seat 44. Here, the suction nozzle 5 is repeatedly attached to and detached from the nozzle holding seat 44, and the relative position with respect to the mounting head 43 may change each time the suction nozzle 5 is held. The calibration unit 81 calibrates this change in relative position.
 較正部81は、まず、ノズル保持座44に保持された吸着ノズル5を部品認識用カメラ7の上方に移動させる。較正部81は、次に、部品認識用カメラ7(ノズル撮像カメラ)に複数のノズル位置マーク5Dを撮像させて、画像データを取得させる。なお、撮像視野の制約がある場合、部品認識用カメラ7は、複数のノズル位置マーク5Dを複数回に分けて撮像してもよい。較正部81は、三番目に、画像データを受け取って画像処理を施し、装着ヘッド43に対する吸着ノズル5の相対位置を較正する。加えて、較正部81は、吸着ノズル5の周方向の回転角度を較正する。 First, the calibration unit 81 moves the suction nozzle 5 held by the nozzle holding seat 44 above the component recognition camera 7. Next, the calibration unit 81 causes the component recognition camera 7 (nozzle image pickup camera) to image a plurality of nozzle position marks 5D and acquire image data. If the imaging field of view is restricted, the component recognition camera 7 may capture a plurality of nozzle position marks 5D in a plurality of times. Third, the calibration unit 81 receives the image data, performs image processing, and calibrates the relative position of the suction nozzle 5 with respect to the mounting head 43. In addition, the calibration unit 81 calibrates the rotational angle of the suction nozzle 5 in the circumferential direction.
 補足すると、画像処理によって、装着ヘッド43に設定された基準取り付け位置に対する吸着ノズル5の実際の取り付け位置の位置誤差が求められる。この位置誤差を考慮して、以降の装着ヘッド43の位置制御が実行される。あるいは、位置誤差に基づいて、基準取り付け位置が補正される。さらに、画像処理によって、ノズル保持座44に設定された基準取り付け角度に対する吸着ノズル5の実際の取り付け角度の角度誤差が求められる。この角度誤差を考慮して、以降のノズル保持座44の回転制御が実行される。あるいは、角度誤差に基づいて、基準取り付け角度が補正される。較正の実施により、以降の吸着ノズル5の位置の制御および回転の制御が正確に行われる。 Supplementally, by image processing, the position error of the actual mounting position of the suction nozzle 5 with respect to the reference mounting position set on the mounting head 43 can be obtained. In consideration of this position error, the subsequent position control of the mounting head 43 is executed. Alternatively, the reference mounting position is corrected based on the position error. Further, the image processing obtains an angle error of the actual mounting angle of the suction nozzle 5 with respect to the reference mounting angle set in the nozzle holding seat 44. In consideration of this angle error, the subsequent rotation control of the nozzle holding seat 44 is executed. Alternatively, the reference mounting angle is corrected based on the angle error. By performing the calibration, the subsequent control of the position of the suction nozzle 5 and the control of the rotation are accurately performed.
 部品検出部82は、吸着ノズル5の複数の吸着穴5Bの各々に柱状部品Pが有るか否かを検出する。部品検出部82は、まず、吸着ノズル5を部品認識用カメラ7の上方に移動させる。部品検出部82は、次に、部品認識用カメラ7(ノズル撮像カメラ)に吸着穴5Bを撮像させて、画像データを取得させる。なお、このときの画像データは、較正部81が取得した画像データと共通化されてもよい。また、撮像視野の制約がある場合、部品認識用カメラ7は、複数の吸着穴5Bを複数回に分けて撮像してもよい。部品検出部82は、三番目に、画像データを受け取って画像処理を施し、吸着穴5Bに柱状部品Pが有るか否かを検出する。柱状部品Pの有無は、例えば、画像データにおける輝度の相違によって検出される。 The component detection unit 82 detects whether or not there is a columnar component P in each of the plurality of suction holes 5B of the suction nozzle 5. First, the component detection unit 82 moves the suction nozzle 5 above the component recognition camera 7. Next, the component detection unit 82 causes the component recognition camera 7 (nozzle image pickup camera) to image the suction hole 5B and acquire image data. The image data at this time may be shared with the image data acquired by the calibration unit 81. Further, when the imaging field of view is restricted, the component recognition camera 7 may capture a plurality of suction holes 5B in a plurality of times. Thirdly, the component detection unit 82 receives the image data, performs image processing, and detects whether or not the columnar component P is present in the suction hole 5B. The presence or absence of the columnar component P is detected, for example, by the difference in brightness in the image data.
 部品検出部82は、吸着ノズル5が柱状部品Pを吸着穴5Bに吸着する吸着動作の動作前および動作後に機能する。部品検出部82は、吸着動作の動作前の時点で、少なくとも一つの吸着穴5Bに既に柱状部品Pが有る第1の異常を検出することができる。また、部品検出部82は、吸着動作の動作後の時点で、少なくとも一つの吸着穴5Bに柱状部品Pが無い第2の異常を検出することができる。 The component detection unit 82 functions before and after the suction operation in which the suction nozzle 5 sucks the columnar component P into the suction hole 5B. The component detection unit 82 can detect the first abnormality in which the columnar component P already exists in at least one suction hole 5B before the suction operation. Further, the component detection unit 82 can detect a second abnormality in which there is no columnar component P in at least one suction hole 5B at the time after the suction operation.
 さらに、部品検出部82は、吸着ノズル5が柱状部品Pを基板Kに装着する装着動作の動作後に機能する。部品検出部82は、装着動作の動作後の時点で、少なくとも一つの吸着穴5Bに柱状部品Pが残留している第3の異常を検出することができる。第3の異常は、基板Kに装着された柱状部品Pが不足していることを意味する。第1~第3の異常は、例えば、吸着穴5B内に微小な塵埃が侵入して目詰まりすることにより引き起こされる。 Further, the component detection unit 82 functions after the mounting operation in which the suction nozzle 5 mounts the columnar component P on the substrate K. The component detection unit 82 can detect a third abnormality in which the columnar component P remains in at least one suction hole 5B at the time after the mounting operation. The third abnormality means that the columnar component P mounted on the substrate K is insufficient. The first to third abnormalities are caused, for example, by the intrusion of minute dust into the suction hole 5B and clogging.
 廃棄制御部83は、廃棄部39の一部となっている。廃棄制御部83は、部品検出部82が不要な柱状部品Pを検出した場合、換言すると第1の異常および第3の異常を検出した場合に機能する。廃棄制御部83は、吸着ノズル5を廃棄箱37の上方に移動させ、エア通路6から吸着穴5Bに正圧エアを供給して柱状部品Pを吹き飛ばし、廃棄箱37に落下させて廃棄する。廃棄時の正圧エアの圧力は、部品装着時の正圧エアの圧力よりも高く設定される。廃棄制御部83は、実際に廃棄できたか否かについて、再度の部品認識用カメラ7による撮像および画像処理により判定する。 The disposal control unit 83 is a part of the disposal unit 39. The disposal control unit 83 functions when the component detection unit 82 detects an unnecessary columnar component P, in other words, when it detects a first abnormality and a third abnormality. The disposal control unit 83 moves the suction nozzle 5 above the waste box 37, supplies positive pressure air from the air passage 6 to the suction hole 5B to blow off the columnar component P, and drops it into the waste box 37 for disposal. The pressure of the positive pressure air at the time of disposal is set higher than the pressure of the positive pressure air at the time of mounting the component. The disposal control unit 83 determines whether or not the product has actually been disposed of by another image pickup and image processing by the component recognition camera 7.
 廃棄できなかった場合、廃棄制御部83は、吸着ノズル5を粘着回収部38の両面粘着テープ382の上方から下降させ、柱状部品Pを両面粘着テープ382に押し当てる。これにより、柱状部品Pは、両面粘着テープ382の粘着力によって回収され、廃棄される。廃棄制御部83は、実際に廃棄できたか否かについて、三度目の部品認識用カメラ7による撮像および画像処理により判定する。 If the waste cannot be disposed of, the disposal control unit 83 lowers the suction nozzle 5 from above the double-sided adhesive tape 382 of the adhesive collection unit 38, and presses the columnar component P against the double-sided adhesive tape 382. As a result, the columnar component P is recovered by the adhesive force of the double-sided adhesive tape 382 and discarded. The disposal control unit 83 determines whether or not the waste can actually be disposed of by the third image pickup and image processing by the component recognition camera 7.
 位置検出部84は、吸着ノズル5がトレイ35から柱状部品Pを吸着する前に機能する。位置検出部84は、まず、基板認識用カメラ45をトレイ35の上方に移動させる。位置検出部84は、次に、基板認識用カメラ45(トレイ撮像カメラ)に群位置マーク352を撮像させて、画像データを取得させる。位置検出部84は、三番目に、画像データを受け取って画像処理を施し、群保持部351に保持された部品群の位置を検出する。また、位置検出部84は、同様の撮像および画像処理によって、単品保持部353に保持された柱状部品Pの位置を検出することができる。 The position detection unit 84 functions before the suction nozzle 5 sucks the columnar component P from the tray 35. The position detection unit 84 first moves the substrate recognition camera 45 above the tray 35. Next, the position detection unit 84 causes the substrate recognition camera 45 (tray image pickup camera) to image the group position mark 352 and acquire image data. Third, the position detection unit 84 receives the image data, performs image processing, and detects the position of the component group held by the group holding unit 351. Further, the position detection unit 84 can detect the position of the columnar component P held by the single item holding unit 353 by the same imaging and image processing.
 清掃制御部85は、吸着ノズル5の清掃を行う。清掃制御部85は、具体的にはエア通路6から吸着穴5Bに正圧エアを供給して、吸着穴5B内のエアブローを行う。清掃時の正圧エアの圧力は、部品装着時の正圧エアの圧力よりも高く設定される。清掃制御部85が機能する時期は、装着ヘッド43が吸着ノズル5を取り外してノズルステーション47に載置する前に設定されている。また、清掃制御部85は、稼働の合間の時間などを利用して、吸着ノズル5の清掃を行ってもよい。これによれば、吸着穴5B内の塵埃のブローなどにより、吸着ノズル5は、良好な状態に維持される。さらに、清掃制御部85は、リカバリノズル48が使用された都度、吸着ノズル5の清掃と同様の方法でリカバリノズル48の清掃を行うことができる。 The cleaning control unit 85 cleans the suction nozzle 5. Specifically, the cleaning control unit 85 supplies positive pressure air from the air passage 6 to the suction hole 5B to blow air in the suction hole 5B. The pressure of the positive pressure air at the time of cleaning is set higher than the pressure of the positive pressure air at the time of mounting the parts. The time when the cleaning control unit 85 functions is set before the mounting head 43 removes the suction nozzle 5 and mounts it on the nozzle station 47. Further, the cleaning control unit 85 may clean the suction nozzle 5 by utilizing the time between operations. According to this, the suction nozzle 5 is maintained in a good state by blowing dust in the suction hole 5B or the like. Further, the cleaning control unit 85 can clean the recovery nozzle 48 by the same method as the cleaning of the suction nozzle 5 each time the recovery nozzle 48 is used.
 7.部品装着機1の動作
 次に、部品装着機1の動作について、図12の動作フローを参考にして説明する。部品装着機1の装着作業において、先ず、基板搬送装置2が動作して、基板Kを装着実施位置に搬入し、位置決めする。次に、装着ヘッド43は、一般用ノズル49を保持して、吸着ノズル5の装着動作と干渉しない部品を基板Kに装着する。この後の動作フローが図12に示されている。
7. Operation of the component mounting machine 1 Next, the operation of the component mounting machine 1 will be described with reference to the operation flow of FIG. In the mounting work of the component mounting machine 1, first, the board transfer device 2 operates to carry the board K to the mounting implementation position and position it. Next, the mounting head 43 holds the general nozzle 49 and mounts a component that does not interfere with the mounting operation of the suction nozzle 5 on the substrate K. The subsequent operation flow is shown in FIG.
 図12のステップS1で、制御装置8は、装着ヘッド43をノズルステーション47に移動し、装着ヘッド43から一般用ノズル49を取り外し、吸着ノズル5に交換する。次に、較正部81が機能して、装着ヘッド43に対する吸着ノズル5の相対位置および取り付け角度を較正する。次のステップS2で、部品検出部82は、吸着穴5Bに柱状部品Pが有るか否かを検出する。1本以上の不要な柱状部品Pが有る場合(第1の異常)、動作フローはステップS11に分岐される。 In step S1 of FIG. 12, the control device 8 moves the mounting head 43 to the nozzle station 47, removes the general nozzle 49 from the mounting head 43, and replaces it with the suction nozzle 5. Next, the calibration unit 81 functions to calibrate the relative position and mounting angle of the suction nozzle 5 with respect to the mounting head 43. In the next step S2, the component detection unit 82 detects whether or not the columnar component P is present in the suction hole 5B. When there is one or more unnecessary columnar parts P (first abnormality), the operation flow is branched to step S11.
 ステップS11で、廃棄制御部83は、柱状部品Pを廃棄箱37に廃棄する。次のステップS12で、廃棄制御部83は、画像処理によって廃棄に成功したか否かを判定する。廃棄に成功した場合、吸着穴5Bの状態が正常に復帰しているので、動作フローはステップS2に戻される。廃棄に失敗した場合のステップS13で、廃棄制御部83は、柱状部品Pを粘着回収部38に廃棄する。次のステップS14で、廃棄制御部83は、画像処理によって廃棄に成功したか否かを判定する。廃棄に成功した場合、動作フローはステップS2に戻される。廃棄に失敗した場合、吸着穴5Bから柱状部品Pを取り去ることができない状態になっており、部品装着機1はエラー停止する。制御装置8は、エラー停止したことを通報する。 In step S11, the disposal control unit 83 disposes the columnar component P in the disposal box 37. In the next step S12, the disposal control unit 83 determines whether or not the disposal is successful by image processing. If the disposal is successful, the state of the suction hole 5B has been restored to normal, so that the operation flow is returned to step S2. In step S13 when disposal fails, the disposal control unit 83 disposes of the columnar component P in the adhesive recovery unit 38. In the next step S14, the disposal control unit 83 determines whether or not the disposal is successful by image processing. If the disposal is successful, the operation flow is returned to step S2. If disposal fails, the columnar component P cannot be removed from the suction hole 5B, and the component mounting machine 1 stops with an error. The control device 8 notifies that the error has stopped.
 ステップS2で、吸着穴5Bに柱状部品Pが無い場合(正常状態)、動作フローはステップS3に進められる。ステップS3で、位置検出部84は、画像処理によってトレイ35の群保持部351に保持された部品群の位置を検出する。次に、制御装置8は、吸着ノズル5が部品群の柱状部品Pを吸着する動作を制御する。 If there is no columnar component P in the suction hole 5B in step S2 (normal state), the operation flow proceeds to step S3. In step S3, the position detection unit 84 detects the position of the component group held by the group holding unit 351 of the tray 35 by image processing. Next, the control device 8 controls the operation of the suction nozzle 5 to suck the columnar component P of the component group.
 次のステップS4で、部品検出部82は、画像処理によって全ての吸着穴5Bに柱状部品Pが有るか否かを判定する。柱状部品Pが1本でも不足する場合(第2の異常)、動作フローはステップS5に分岐される。ステップS5で、制御装置8は、吸着ノズル5が吸着できなかった柱状部品Pの位置を記憶する。記憶された位置は、基板K上に柱状部品Pが装着されない不足位置に相当する。 In the next step S4, the component detection unit 82 determines whether or not there is a columnar component P in all the suction holes 5B by image processing. When even one columnar component P is insufficient (second abnormality), the operation flow is branched to step S5. In step S5, the control device 8 stores the position of the columnar component P that the suction nozzle 5 could not suck. The stored position corresponds to a shortage position where the columnar component P is not mounted on the substrate K.
 ステップS4で全ての吸着穴5Bに柱状部品Pが有る場合(正常状態)、およびステップS5の実行後、動作フローは、ステップS6に合流される。ステップS6で、制御装置8は、柱状部品Pの基板Kへの装着動作を制御する。次のステップS7で、部品検出部82は、吸着穴5Bに柱状部品Pが有るか否かを判定する。柱状部品Pが1本でも残留している場合(第3の異常)、動作フローはステップS8に分岐される。 When all the suction holes 5B have columnar parts P in step S4 (normal state), and after the execution of step S5, the operation flow is merged with step S6. In step S6, the control device 8 controls the mounting operation of the columnar component P on the substrate K. In the next step S7, the component detection unit 82 determines whether or not the columnar component P is present in the suction hole 5B. When even one columnar component P remains (third abnormality), the operation flow is branched to step S8.
 ステップS8で、制御装置8は、吸着穴5Bに残留することによって基板Kに装着されなかった不足分の柱状部品Pの位置(不足位置)を記憶する。ステップS8の実行後、動作フローは、ステップS11に進められる。この後の動作フローは、前述と同様であるが、ステップS12やステップS14において柱状部品Pの廃棄に成功した場合、動作フローはステップS9に進められる(破線の矢印参照)。 In step S8, the control device 8 stores the position (deficiency position) of the shortage columnar component P that was not mounted on the substrate K due to remaining in the suction hole 5B. After the execution of step S8, the operation flow proceeds to step S11. The subsequent operation flow is the same as described above, but if the columnar component P is successfully disposed of in steps S12 and S14, the operation flow proceeds to step S9 (see the broken line arrow).
 ステップS7で吸着穴5Bに1本の柱状部品Pも残留していない場合(正常状態)、動作フローはステップS9に合流される。ステップS9で、制御装置8は、全ての柱状部品Pを基板Kに装着できたか否かを判定する。制御装置8は、ステップS5もステップS8も経由していない場合に、全ての柱状部品Pを漏れなく吸着して、漏れなく装着できたと判定する。この場合、動作フローは終了する。これ以外の場合、動作フローはステップS10に進められる。 If no columnar component P remains in the suction hole 5B in step S7 (normal state), the operation flow is merged with step S9. In step S9, the control device 8 determines whether or not all the columnar components P can be mounted on the substrate K. When neither step S5 nor step S8 is passed, the control device 8 adsorbs all the columnar parts P without omission, and determines that all the columnar parts P can be attached without omission. In this case, the operation flow ends. Otherwise, the operation flow proceeds to step S10.
 ステップS10で、制御装置8は、リカバリノズル48のリカバリ動作を制御する。このとき、制御装置8は、ステップS5およびステップS8の少なくとも一方で記憶した不足位置に基づいて制御を行う。リカバリノズル48に対する制御方法は、吸着および装着する柱状部品Pが1本である点を除き、吸着ノズル5に対する制御方法と同様である。つまり、制御装置8は、リカバリノズル48がトレイ35の単品保持部353から柱状部品Pを吸着し、基板K上の不足位置に装着するように制御する。このとき、吸着ノズル5と同様、画像処理による柱状部品Pの位置の検出、および柱状部品Pの有無の判定等が行われる。ステップS10の実行により、動作フローは終了する。 In step S10, the control device 8 controls the recovery operation of the recovery nozzle 48. At this time, the control device 8 controls based on the deficient position stored in at least one of step S5 and step S8. The control method for the recovery nozzle 48 is the same as the control method for the suction nozzle 5 except that the columnar component P for suction and mounting is one. That is, the control device 8 controls the recovery nozzle 48 so as to attract the columnar component P from the single item holding portion 353 of the tray 35 and mount it at the insufficient position on the substrate K. At this time, similarly to the suction nozzle 5, the position of the columnar component P is detected by image processing, the presence or absence of the columnar component P is determined, and the like. The operation flow ends by executing step S10.
 なお、ステップS10の実行は、第2の異常および第3の異常の少なくとも一方が発生したことを意味しており、好ましいことではない。したがって、制御装置8は、ステップS10の実行回数や実行頻度が規定値を超えた場合に、部品装着機1がエラー停止するように制御してもよい。これによれば、制御装置8は、吸着ノズル5の稼働状態を監視して、吸着穴5Bの目詰まりを始めとする性能低下を検出することができる。 Note that the execution of step S10 means that at least one of the second abnormality and the third abnormality has occurred, which is not preferable. Therefore, the control device 8 may control the component mounting machine 1 to stop with an error when the number of executions or the execution frequency of the step S10 exceeds the specified value. According to this, the control device 8 can monitor the operating state of the suction nozzle 5 and detect performance deterioration such as clogging of the suction hole 5B.
 装着動作が済んだ基板Kは、基板搬送装置2によって機外に搬出される。一方、清掃制御部85は、吸着ノズル5やリカバリノズル48の清掃を行う。この後、装着ヘッド43は、吸着ノズル5やリカバリノズル48をノズルステーション47に載置し、一般用ノズル49を再度保持する。また、三組の部品群がすべて消費されたトレイ35は、収納棚34に戻され、新しいトレイ35が引き出される。これで、次の基板Kに対する装着作業の準備が整う。 The board K that has been mounted is carried out of the machine by the board transfer device 2. On the other hand, the cleaning control unit 85 cleans the suction nozzle 5 and the recovery nozzle 48. After that, the mounting head 43 mounts the suction nozzle 5 and the recovery nozzle 48 on the nozzle station 47, and holds the general nozzle 49 again. Further, the tray 35 in which all three sets of parts have been consumed is returned to the storage shelf 34, and a new tray 35 is pulled out. This prepares the mounting work for the next board K.
 実施形態の部品装着機1によれば、吸着ノズル5に関して述べた効果と同様、必要とされる全数の柱状部品Pの吸着および基板Kへの装着を一度で行うことが可能であり、吸着および装着を効率的に行うことができる。さらに、吸着ノズル5を製作すれば、部品装着機1のその他の構成要素は現行品を用いることができるので、導入コストは低廉である。 According to the component mounting machine 1 of the embodiment, it is possible to suction and mount all the required columnar components P to the substrate K at one time, similar to the effect described for the suction nozzle 5. It can be installed efficiently. Further, if the suction nozzle 5 is manufactured, the current product can be used for the other components of the component mounting machine 1, so that the introduction cost is low.
 8.実施形態の応用および変形
 なお、吸着ノズル5を装着ヘッド43に固定的に設けて、柱状部品Pのみを装着する専用の部品装着機1とすることができる。この場合、清掃制御部85は、吸着ノズル5の所定動作回数ごとに、あるいは異常発生時などに清掃を行うことが好ましい。さらに、廃棄部39を構成する廃棄箱37および粘着回収部38の一方は省略されてもよい。本実施形態は、その他にも様々な応用や変形が可能である。
8. Application and Modification of the Embodiment In addition, the suction nozzle 5 can be fixedly provided on the mounting head 43 to be a dedicated component mounting machine 1 for mounting only the columnar component P. In this case, it is preferable that the cleaning control unit 85 cleans the suction nozzle 5 every predetermined number of operations or when an abnormality occurs. Further, one of the waste box 37 and the adhesive recovery unit 38 constituting the disposal unit 39 may be omitted. This embodiment can be applied and modified in various ways.
 1:部品装着機  2:基板搬送装置  3:部品供給装置  33:トレイ装置  34:収納棚  35:トレイ  351:群保持部  352:群位置マーク  353:単品保持部  354:単品位置マーク  37:廃棄箱  38:粘着回収部  39:廃棄部  4:部品移載装置  43:装着ヘッド  44:ノズル保持座  45:基板認識用カメラ  47:ノズルステーション  48:リカバリノズル  483:吸着穴  484:エア通路  49:一般用ノズル  5:吸着ノズル  51:ノズル基部  55:ノズル先端部  59:吸着構造部  5A:吸着領域  5B:吸着穴  5C:非吸着領域  5D:ノズル位置マーク  6:エア通路  61:中心エア通路  62:分岐エア通路  64:下降エア通路  65:平面状エア通路  8:制御装置  81:較正部  82:部品検出部  83:廃棄制御部  84:位置検出部  85:清掃制御部  K:基板  P:柱状部品 1: Parts mounting machine 2: Board transfer device 3: Parts supply device 33: Tray device 34: Storage shelf 35: Tray 351: Group holding part 352: Group position mark 353: Single item holding part 354: Single item position mark 37: Disposal box 38: Adhesive recovery part 39: Disposal part 4: Parts transfer device 43: Mounting head 44: Nozzle holding seat 45: Board recognition camera 47: Nozzle station 48: Recovery nozzle 483: Suction hole 484: Air passage 49: General use Nozzle 5: Nozzle nozzle 51: Nozzle base 55: Nozzle tip 59: Suction structure 5A: Suction area 5B: Suction hole 5C: Non-suction area 5D: Nozzle position mark 6: Air passage 61: Central air passage 62: Branch air Passage 64: Down air passage 65: Flat air passage 8: Control device 81: Calibration unit 82: Parts detection unit 83: Disposal control unit 84: Position detection unit 85: Cleaning control unit K: Board P: Columnar parts

Claims (15)

  1.  複数の柱状部品を装着するために基板に設定された複数の装着位置の配置に対応して配列され前記柱状部品をそれぞれ吸着可能な複数の吸着穴をもつノズル先端部と、
     複数の前記吸着穴の各々に連通して一斉に負圧エアを供給可能なエア通路と、
     を備える吸着ノズル。
    A nozzle tip having a plurality of suction holes arranged corresponding to the arrangement of a plurality of mounting positions set on the substrate for mounting a plurality of columnar parts and capable of sucking the columnar parts, respectively.
    An air passage that communicates with each of the plurality of suction holes and can supply negative pressure air all at once,
    A suction nozzle equipped with.
  2.  前記ノズル先端部は、下方に開口する前記吸着穴が配列された吸着領域、および前記吸着穴が配列されていない非吸着領域を有し、前記吸着領域が前記非吸着領域よりも下方に突出している、請求項1に記載の吸着ノズル。 The nozzle tip portion has an adsorption region in which the adsorption holes that open downward are arranged and a non-adsorption region in which the adsorption holes are not arranged, and the adsorption region projects downward from the non-adsorption region. The suction nozzle according to claim 1.
  3.  前記エア通路は、前記吸着穴が延在する軸方向と交差する複数の方向から前記吸着穴に連通する、請求項1または2に記載の吸着ノズル。 The suction nozzle according to claim 1 or 2, wherein the air passage communicates with the suction hole from a plurality of directions intersecting the axial direction in which the suction hole extends.
  4.  前記エア通路は、前記軸方向と直交する全周囲方向から前記吸着穴の最深部に連通する、請求項3に記載の吸着ノズル。 The suction nozzle according to claim 3, wherein the air passage communicates with the deepest part of the suction hole from the entire peripheral direction orthogonal to the axial direction.
  5.  前記ノズル先端部を着脱可能に保持するノズル基部を備える、請求項1~4のいずれか一項に記載の吸着ノズル。 The suction nozzle according to any one of claims 1 to 4, further comprising a nozzle base that holds the tip of the nozzle detachably.
  6.  請求項1~5のいずれか一項に記載された前記吸着ノズルを保持する装着ヘッド、および前記装着ヘッドを移動させるヘッド駆動機構を有する部品移載装置と、
     前記基板を搬送する基板搬送装置と、
     前記柱状部品を供給する部品供給装置と、
     を備える部品装着機。
    A mounting head for holding the suction nozzle according to any one of claims 1 to 5, and a component transfer device having a head drive mechanism for moving the mounting head.
    A substrate transfer device that conveys the substrate and
    A component supply device that supplies the columnar components and
    Parts mounting machine equipped with.
  7.  前記吸着ノズルは、位置の基準を表すノズル位置マークを有し、
     前記装着ヘッドは、前記吸着ノズルを着脱可能に保持し、
     前記部品装着機は、
     前記ノズル位置マークを撮像して画像データを取得するノズル撮像カメラと、
     前記画像データに画像処理を施して、前記装着ヘッドに対する前記吸着ノズルの相対位置を較正する較正部と、
     を備える、請求項6に記載の部品装着機。
    The suction nozzle has a nozzle position mark indicating a position reference and has a nozzle position mark.
    The mounting head holds the suction nozzle detachably and detachably.
    The parts mounting machine is
    A nozzle imaging camera that captures the nozzle position mark and acquires image data,
    A calibration unit that performs image processing on the image data to calibrate the relative position of the suction nozzle with respect to the mounting head.
    The component mounting machine according to claim 6.
  8.  前記吸着ノズルの前記吸着穴を撮像して画像データを取得するノズル撮像カメラと、
     前記画像データに画像処理を施して、前記吸着穴に前記柱状部品が有るか否かを検出する部品検出部と、
     を備える、請求項6または7に記載の部品装着機。
    A nozzle imaging camera that acquires image data by imaging the suction holes of the suction nozzle, and
    A component detection unit that performs image processing on the image data to detect whether or not the columnar component is present in the suction hole, and a component detection unit.
    The component mounting machine according to claim 6 or 7.
  9.  前記ノズル撮像カメラは、前記吸着ノズルが前記柱状部品を前記吸着穴に吸着する吸着動作の動作前および動作後、ならびに、前記吸着ノズルが前記柱状部品を前記基板に装着する装着動作の動作前および動作後のうちひとつ以上のタイミングで前記吸着穴を撮像する、請求項8に記載の部品装着機。 The nozzle imaging camera is used before and after the suction operation in which the suction nozzle sucks the columnar component into the suction hole, and before and after the mounting operation in which the suction nozzle mounts the columnar component on the substrate. The component mounting machine according to claim 8, wherein the suction holes are imaged at one or more timings after the operation.
  10.  前記部品検出部が不要な前記柱状部品を検出した場合に、前記エア通路から前記吸着穴に正圧エアを供給して不要な前記柱状部品を廃棄する廃棄部を備える、請求項8または9に記載の部品装着機。 8. The parts mounting machine described.
  11.  前記廃棄部は、不要な前記柱状部品を収容する廃棄箱、および不要な前記柱状部品を粘着力によって回収する粘着回収部の少なくとも一方を有する、請求項10に記載の部品装着機。 The component mounting machine according to claim 10, wherein the disposal unit has at least one of a disposal box for accommodating unnecessary columnar parts and an adhesive collection unit for collecting unnecessary columnar parts by adhesive force.
  12.  前記装着ヘッドは、前記吸着ノズルを着脱可能に保持し、
     前記部品装着機は、前記部品検出部が前記基板に装着された前記柱状部品の不足を検出した場合に、前記装着ヘッドに着脱可能に保持されて不足した前記柱状部品の吸着動作および前記基板への装着動作を行うリカバリノズルを備える、
     請求項8~11のいずれか一項に記載の部品装着機。
    The mounting head holds the suction nozzle detachably and detachably.
    When the component detecting unit detects a shortage of the columnar component mounted on the substrate, the component mounting machine is detachably held by the mounting head and is held to the substrate by sucking the missing columnar component. Equipped with a recovery nozzle that performs the mounting operation of
    The component mounting machine according to any one of claims 8 to 11.
  13.  前記リカバリノズルは、前記柱状部品を吸着可能な吸着穴、および前記吸着穴に連通して負圧エアを供給可能なエア通路を備える、請求項12に記載の部品装着機。 The component mounting machine according to claim 12, wherein the recovery nozzle includes a suction hole capable of sucking the columnar component and an air passage communicating with the suction hole to supply negative pressure air.
  14.  前記部品供給装置は、一回の吸着動作で吸着される複数の前記柱状部品からなる部品群を一群以上保持したトレイを有する、請求項6~13のいずれか一項に記載の部品装着機。 The component mounting machine according to any one of claims 6 to 13, wherein the component supply device has a tray that holds one or more groups of components composed of the plurality of columnar components that are adsorbed by one suction operation.
  15.  前記トレイは、前記部品群の位置の基準となる群位置マークを有し、
     前記部品装着機は、
     前記群位置マークを撮像して画像データを取得するトレイ撮像カメラと、
     前記画像データに画像処理を施して、前記部品群の位置を検出する位置検出部と、を備える、
     請求項14に記載の部品装着機。
    The tray has a group position mark that serves as a reference for the position of the component group.
    The parts mounting machine is
    A tray imaging camera that captures the group position mark and acquires image data,
    A position detecting unit for detecting the position of the component group by performing image processing on the image data is provided.
    The component mounting machine according to claim 14.
PCT/JP2020/046306 2020-12-11 2020-12-11 Suction nozzle and component mounter WO2022123773A1 (en)

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