WO2022117157A1 - Moteur à contact par friction comportant un élément lumineux destiné à émettre des faisceaux laser - Google Patents

Moteur à contact par friction comportant un élément lumineux destiné à émettre des faisceaux laser Download PDF

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Publication number
WO2022117157A1
WO2022117157A1 PCT/DE2021/100967 DE2021100967W WO2022117157A1 WO 2022117157 A1 WO2022117157 A1 WO 2022117157A1 DE 2021100967 W DE2021100967 W DE 2021100967W WO 2022117157 A1 WO2022117157 A1 WO 2022117157A1
Authority
WO
WIPO (PCT)
Prior art keywords
friction
actuator
friction contact
laser beams
motor
Prior art date
Application number
PCT/DE2021/100967
Other languages
German (de)
English (en)
Inventor
Burhanettin Koc
Bülent Delibas
Original Assignee
Physik Instrumente (Pi) Gmbh & Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Physik Instrumente (Pi) Gmbh & Co. Kg filed Critical Physik Instrumente (Pi) Gmbh & Co. Kg
Publication of WO2022117157A1 publication Critical patent/WO2022117157A1/fr

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0065—Friction interface

Definitions

  • Frictional contact motor having a light element for emitting laser beams
  • the invention relates to a friction contact motor with a light element for emitting laser beams according to claim 1.
  • a friction contact motor is known from DE102014221001A1.
  • friction contact motors a repetitive, periodic movement or deformation of an electrically controlled actuator is usually transmitted to an element to be driven via frictional contact or a frictional contact surface between the actuator and the element to be driven, resulting in an actuating movement of the element to be driven or its continuous movement results.
  • a particular advantage of friction contact motors is their usually prevailing self-locking in the de-energized or de-energized state. The element to be driven can thus be moved into its target position and then holds this position even without a voltage applied to the actuator.
  • US Pat. No. 6,897,598 B2 describes a guide device for a platform driven by an ultrasonic motor, with position information (displacement, speed or acceleration) of a friction element of the ultrasonic motor being determined using a non-contact measuring device such as a laser.
  • US Pat. No. 9,225,266 B2 discloses a piezoelectric linear actuator in which friction particles that occur between the friction partners during operation are removed by exciting the actuator with an alternating voltage.
  • US 2007/0251543 A1 discloses, among other things, a method for cleaning a surface by removing particles located thereon using laser beams.
  • the frictional contact motor according to the invention comprises an actuator and an element to be driven by the actuator via frictional contact.
  • the frictional contact is realized via a frictional contact surface between a contact surface of the actuator and a frictional surface of the element to be driven.
  • the friction contact motor has a light element for emitting laser beams, the laser beams being directed towards the friction contact surface, and the laser element being designed and arranged in such a way that moisture or loose particles in the vicinity of the friction contact surface, for example on the contact surface and/or on the friction surface and/or adjacent to the friction surface, can be removed or set there.
  • the laser beams of the light element can be used to warm up or heat the contact surface of the actuator and/or the friction surface of the element to be driven in the area immediately adjacent to the friction contact surface, in order to reduce or eliminate any moisture present in this area .
  • particles and moisture within the frictional contact surface can also be eliminated or reduced by the laser beams; this is conceivable at least for the edge areas of the friction contact surface.
  • the laser beams of the light element can be used to heat dust or abrasion particles in the immediate area of the friction contact surface or to heat them up, in particular to prevent these particles from adhering to the element to be driven in an area that is not in Comes into contact with the actuator to achieve so that the particles are fixed.
  • the laser beams of the light element can also be used to fix the dust or abrasion particles on the actuator or its contact surface.
  • the laser element is arranged next to the actuator along the main direction of extension of the element to be driven or along the main direction of extension of the actuator.
  • the term "main extension direction” characterizes the extension of the actuator or the element to be driven along the respective largest dimension, in particular along the length. This enables good accessibility and effective warming or heating of the area of the frictional contact surface or the area around the frictional contact surface.
  • the friction contact motor has two light elements for emitting laser beams, which are arranged on opposite sides of the actuator.
  • the two laser elements are arranged symmetrically or in mirror image with respect to the actuator. This enables a more effective removal of moisture or loose particles in the area of the friction contact surface, which in particular Substantially the same conditions result in terms of opposite drive directions of the driven element.
  • the laser beams of the light element are electrostatically charged. This makes it possible to transport dust or abrasion particles out of the area of the friction contact surface by means of the light beams and, if necessary, to collect or fix them at a point provided for this purpose and in particular at a distance from the friction contact surface.
  • the light element emits laser beams in a wavelength range from 100 to 380 nm or in a wavelength range from 780 to 1000 nm.
  • the heat output of the laser beams emitted by the light element is between 0.1 and 10 watts.
  • the contact surface of the actuator is formed by a friction element arranged on this.
  • the friction element can be adapted in terms of shape and/or material for the specific application, independently of the actuator.
  • An electromechanical material 1 is understood to mean a material which undergoes a dimensional change, for example a change in length, when an electrical voltage or an electrical field is applied. Electromechanical materials have the advantage, among other things, that they can be operated in a highly dynamic manner and do not require any gearing elements.
  • Corresponding actuators can be designed to be very small and space-saving.
  • the electromechanical material has piezoelectric properties and is preferably designed as a piezoceramic.
  • the actuator can be excited in such a way that it oscillates at different frequencies.
  • applications are conceivable in which the actuator is electrically excited in such a way that it carries out resonance oscillations.
  • Controls in which the actuator is operated outside of its resonance are conceivable, for example in so-called stepping drives, or in stick-slip or inertial drives.
  • the element to be driven has recesses in which particles can be fixed by means of the laser beams. It can be particularly advantageous here if the recesses are designed as grooves running along the main extension direction of the element to be driven and aligned parallel to one another. Due to the attachment of abrasion particles or other particles in such recesses, a possibly disadvantageous influence of particles attached directly to the friction surface of the element to be driven is avoided.
  • FIG. 2 representation a) view of the friction contact motor according to FIG. 1 from the direction of the actuator (not shown in FIG. 2) and looking in the direction of the underside of the element to be driven; Representation b) Sectional view of representation a)
  • FIG. 3 representation a) view of a friction contact motor with an element to be driven having recesses from the direction of the actuator (not shown in FIG. 3) and looking in the direction of the underside of the element to be driven; Representation b) Sectional view of representation a)
  • Figure 1 shows a schematic representation of a possible embodiment of a friction contact motor 1 according to the invention.
  • Its actuator 2 is in the form of a rectangular plate made of a piezoceramic material, with a triangular cross-section friction element 6 made of aluminum oxide being arranged on one of the two longer side surfaces .
  • the friction element 6 forms the Contact surface 22 of the actuator 2, that is, that surface which is in frictional or frictional contact with the friction surface 32 of the driven element 3 via the frictional contact surface 4.
  • the targeted deformations caused by corresponding electrical activation of the actuator which, for example, cause an elliptical trajectory of the tip of the friction element 6, can affect the element to be driven Transfer element and set this in a desired movement.
  • a light element 5 in the form of an excimer laser is arranged on each side next to the actuator 2 in a direction along its main extension direction. Accordingly, the light elements 5 are provided on opposite sides of the actuator 2 and in a symmetrical or mirror-inverted arrangement.
  • the beams of both excimer lasers are directed in the direction of the frictional contact surface 4, so that in FIG. 1 laser beams are guided from the left and from the right into the region of the frictional contact surface 4.
  • the laser beams have a wavelength of 200nm and have a heat output of 0.5 watts.
  • the embodiment of the friction contact motor according to the invention according to the illustrations a) and b) of FIG. 3 differs from that in FIG. 2 only in that the driven element 3 here has recesses 34 in the form of itself along the Main extension direction of the driven element 3 extending and parallel grooves, as can be seen in particular in the sectional view b) of FIG.
  • These groove-shaped recesses 34 are used for receiving or for the targeted deposition or fixation of dust or abrasion particles by means of the laser beams of the light elements 5, in particular by means of electrostatically charged laser beams.
  • laser beams with a specific wavelength, heat output and duration are directed in the direction of the friction contact surface before starting, in order to eliminate moisture in particular in the area of the friction contact surface. Electrical activation of the actuator to generate a movement of the element to be driven only takes place after this.
  • friction contact motor 2 actuator 3: element to be driven 4: friction contact surface 5: light element 6: friction element 22: contact surface (of the actuator 2) 32: friction surface (of the element to be driven 3) 34: recesses 52: laser beams (of the light element 5) 54: effective range (of the laser beams 52)

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un moteur (1) pourvu d'un actionneur (2) et d'un élément (3) devant être entraîné par l'actionneur (2) par le biais d'un contact par friction, le contact par friction étant réalisé au moyen d'une zone de contact par friction (4) entre une surface de contact (22) de l'actionneur (2) et une surface de friction (32) de l'élément à entraîner. Selon l'invention, le moteur (1) comprend un élément lumineux (5) destiné à émettre des faisceaux laser (52), les faisceaux laser étant dirigés vers la zone de contact par friction (4) pour éliminer l'humidité ou les particules libres dans le voisinage direct de la zone de contact par friction (4) ou pour fixer celles-ci sur la surface de contact (22) ou sur la surface de friction (32).
PCT/DE2021/100967 2020-12-04 2021-12-03 Moteur à contact par friction comportant un élément lumineux destiné à émettre des faisceaux laser WO2022117157A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020132282.8 2020-12-04
DE102020132282.8A DE102020132282B3 (de) 2020-12-04 2020-12-04 Reibkontaktmotor mit einem Lichtelement zum Emittieren von Laserstrahlen

Publications (1)

Publication Number Publication Date
WO2022117157A1 true WO2022117157A1 (fr) 2022-06-09

Family

ID=78957531

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2021/100967 WO2022117157A1 (fr) 2020-12-04 2021-12-03 Moteur à contact par friction comportant un élément lumineux destiné à émettre des faisceaux laser

Country Status (2)

Country Link
DE (1) DE102020132282B3 (fr)
WO (1) WO2022117157A1 (fr)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6897598B2 (en) 2002-03-15 2005-05-24 Kyocera Corporation Ultrasonic motor and guide apparatus having the same as driving source of movable body
JP2007035559A (ja) * 2005-07-29 2007-02-08 Kyocera Corp ステージおよびステージの微粉検出方法
EP1850182A2 (fr) * 2006-04-28 2007-10-31 ASML Netherlands BV Procédés de nettoyage d'une surface, procédé de fabrication du dispositif, ensemble de nettoyage, appareil de nettoyage, et appareil lithographique
DE102007021338A1 (de) * 2007-05-07 2008-11-13 Robert Bosch Gmbh Piezoelektrische Antriebsvorrichtung
US9225266B2 (en) 2012-12-10 2015-12-29 Samsung Electronics Co., Ltd. Piezoelectric linear actuator
DE102014221001A1 (de) 2014-10-16 2016-04-21 Picofine GmbH Antriebsvorrichtung und -verfahren zur linearen und/oder rotatorischen Positionierung
US20190319552A1 (en) * 2018-04-11 2019-10-17 Canon Kabushiki Kaisha Vibration type actuator for relatively moving vibrating body and contact body, electronic device, and method for inspecting friction material

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6897598B2 (en) 2002-03-15 2005-05-24 Kyocera Corporation Ultrasonic motor and guide apparatus having the same as driving source of movable body
JP2007035559A (ja) * 2005-07-29 2007-02-08 Kyocera Corp ステージおよびステージの微粉検出方法
EP1850182A2 (fr) * 2006-04-28 2007-10-31 ASML Netherlands BV Procédés de nettoyage d'une surface, procédé de fabrication du dispositif, ensemble de nettoyage, appareil de nettoyage, et appareil lithographique
US20070251543A1 (en) 2006-04-28 2007-11-01 Asml Netherlands B.V. Methods to clean a surface, a device manufacturing method, a cleaning assembly, cleaning apparatus, and lithographic apparatus
DE102007021338A1 (de) * 2007-05-07 2008-11-13 Robert Bosch Gmbh Piezoelektrische Antriebsvorrichtung
US9225266B2 (en) 2012-12-10 2015-12-29 Samsung Electronics Co., Ltd. Piezoelectric linear actuator
DE102014221001A1 (de) 2014-10-16 2016-04-21 Picofine GmbH Antriebsvorrichtung und -verfahren zur linearen und/oder rotatorischen Positionierung
US20190319552A1 (en) * 2018-04-11 2019-10-17 Canon Kabushiki Kaisha Vibration type actuator for relatively moving vibrating body and contact body, electronic device, and method for inspecting friction material

Also Published As

Publication number Publication date
DE102020132282B3 (de) 2022-02-24

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