WO2022086440A1 - Système et procédé de détection de particules - Google Patents

Système et procédé de détection de particules Download PDF

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Publication number
WO2022086440A1
WO2022086440A1 PCT/SG2021/050583 SG2021050583W WO2022086440A1 WO 2022086440 A1 WO2022086440 A1 WO 2022086440A1 SG 2021050583 W SG2021050583 W SG 2021050583W WO 2022086440 A1 WO2022086440 A1 WO 2022086440A1
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WO
WIPO (PCT)
Prior art keywords
light
array
arrangement
detector
detectors
Prior art date
Application number
PCT/SG2021/050583
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English (en)
Inventor
Nicola Spring
Original Assignee
Ams Sensors Singapore Pte. Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ams Sensors Singapore Pte. Ltd. filed Critical Ams Sensors Singapore Pte. Ltd.
Publication of WO2022086440A1 publication Critical patent/WO2022086440A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/075—Investigating concentration of particle suspensions by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N2015/0238—Single particle scatter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G01N2015/025—Methods for single or grouped particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G01N2015/1438—Using two lasers in succession

Definitions

  • the present disclosure relates to a system for optically detecting particles and to a corresponding detection method .
  • optical particle detectors typically rely on detecting light that is scattered from obj ects or particles that are located in a sampling volume .
  • Such particle detectors typically employ a light source , such as a laser, for illuminating the obj ects or particles in the sampling volume and a photodetector arranged at a certain scattering angle with respect to an optical access defined by the path between a light source and the sampling region . From the resulting signal , a particle concentration within the sampling volume as well as a particle si ze can be estimated .
  • the described detectors have a number of disadvantages . Firstly, most of the scattered light is lost and does not contribute to the signal as the photodetector is only configured to measure scattered light at a single certain scattering angle . Moreover, in typical scattering, the bulk of the light is scattered in a forward direction, i . e . further along the optical axis , and typically cannot be distinguished from the incident light beam . In addition, light that is absorbed by the particles is also lost and does not contribute to the signal . Furthermore , for actual particle detection, the index of refraction has to be known or assumed for every particle in the sampling region . An obj ect to be solved is to provide an improved concept of a system for detecting particles that overcomes the limitations of state of the art particle detectors .
  • the improved concept is based on the idea of arranging a plurality of light emitters and detectors in a manner that a light curtain is formed in a probing volume . Particles within the probing volume disturb the light curtain via absorption, reflection and/or scattering, which in turn leads to a change in the detected photo signals of the detectors .
  • a close spacing of light barriers of the light curtain enables an estimation of particle si zes as well as a particle concentration .
  • a system for detecting particles comprises a probing volume, an emitter arrangement including an array of light emitters configured to emit light into the probing volume , and a detector arrangement including an array of light detectors configured to detect the light that is emitted by the emitter arrangement into the probing volume .
  • the system further comprises an evaluation circuit that is configured to generate an output signal from detector signals received from the detector arrangement based on the detected light .
  • Each light detector of the array of light detectors is configured to receive light from an associated one of the array of light emitters . An amount of light received by the detector arrangement depends on whether a particle is located within the probing volume .
  • the light emitters of the emitter arrangement are configured to each emit a beam of light , in particular a substantially collimated or focused beam of light , into the probing volume directed towards an associated one of the light detectors .
  • the light emitters are arranged in an array such that the emitted light beams form an array of substantially parallel beams with respect to each other .
  • the array of light emitters can be one-dimensional or multidimensional , e . g . two dimensional .
  • the array of light detectors is arranged such that each light detector receives light from an associated one of the array of light emitters .
  • the array of light detectors matches the array of light emitters in terms of number o f elements and/or pitch . Therefore , the array of light detectors correspondingly can be one-dimensional or multidimensional .
  • each beam can be understood as a light barrier .
  • each light barrier extends between one of the light emitters and an associated one of the light detectors i f no particle is located within the probing volume on the respective optical path .
  • the light barrier extends from the light emitter towards an obj ect and is deflected towards the associated one of the detectors via reflection .
  • An amount of light received by the detector arrangement is influenced by obj ects within the probing volume . For example, less or more light is received by the detectors if an object is located within the probing volume, depending on the configuration of the emitter and detector arrays.
  • the emitters and detectors could be arranged such that a beam path is blocked if a particle is located in the probing volume within said beam path and no light reaches the respective detector.
  • the emitters and detectors could be arranged such that a beam path between emitter and associated detector is established by an object within the probing volume, e.g. via reflection.
  • An evaluation circuit e.g. an integrated circuit, analyzes the photo signals generated by the detector array and generates an output signal based on the photo signals.
  • the output signal can contain information on whether a particle is present in the probing volume and optionally about a particle size, for instance.
  • the particles can be particles in a gas, e.g. air, such as dust, fine dust, pollen or soot particles.
  • a detector according to the improved concept can be employed to determine a measure for air quality, for instance.
  • the emitter arrangement further comprises an array of lenses that is configured to collimate or focus the light emitted by the array of light emitters.
  • each of the light emitters can comprise a lens of an array of lenses, such that the emitted light is collimated or focused.
  • the array of lenses matches the array of light emitters in terms of dimensionality, number of elements and/or pitch . This is particularly desirable for light emitters having a diverging emittance of light , e . g . LEDs .
  • the detector arrangement is arranged substantially parallel to the emitter arrangement .
  • the array of light emitters in these embodiments is arranged parallel or substantially parallel to the array of light detectors .
  • the detector arrangement is arranged on a side of the probing volume opposite the emitter arrangement such that the array of light detectors faces the array of light emitters .
  • the probing volume is arranged in between the array of light emitters and the array of light detectors .
  • a light curtain is reali zed between emitters and detectors in a manner in which a particle present in the probing volume prevents one or more light beams from fully reaching the associated detector .
  • a particle can be locali zed via a reduced or absent signal in the respective detector .
  • the emitter arrangement and the detector arrangement are arranged on a common substrate body such that the array of light emitters and the array of light detectors form a greater array having an alternating arrangement of light emitters and light detectors .
  • Having the light emitters and light detectors arranged in an alternating pattern, e . g . a checkerboard pattern in the two- dimensional case can lead to reduced cross talk due to larger spacings between two adj acent detectors .
  • two of these greater arrays on a first and a second common substrate are arranged facing each other enclosing a probing volume in between, wherein the two arrays have a lateral of fset , such that a detector of one greater array directly faces a light emitter of the other greater array and vice versa .
  • a boundary element e . g . a reflector or an absorber, is arranged on one side of a probing volume and a common substrate having the aforementioned arrangement of light emitters and light detectors are arranged on the opposite side of the probing volume .
  • the array of light emitters is formed from micro light emitters , in particular micro-LEDs or VCSELs .
  • micro-LEDs and VCSELs are common choices for miniature light emitters . Choosing these micro obj ects as emitters for a particle detector enables a high resolution while maintaining a small footprint of the sensor . In addition, small pixel si zes are tantamount with an increased sensitivity also for small particles in the pm range or even smaller .
  • the emitters can additionally comprise a micro lens for focusing or collimating the emitted light .
  • the micro lenses can be reali zed as a micro-lens array that is arranged above and aligned with the array of micro light emitters .
  • the array of light emitters is a display, in particular a micro-LED display .
  • the array of light emitters can be reali zed by a micro-LED display that are readily available and constitute a two- dimensional matrix array of pixels .
  • a micro lens array arranged above the micro-LED display allows for the formation of a light curtain as described .
  • the array of light detectors is formed from micro photodetectors , in particular from micro photodiodes .
  • the array of light detectors can be formed by an array of micro photodiodes , such that each of the photodiodes is associated to one of the light emitters .
  • Such an arrangement ensures a high sensitivity and resolution of the resulting particle detector .
  • the system for detecting particles further comprises a reflector or absorber that is arranged substantially parallel to the emitter arrangement and to the detector arrangement on a side of the probing volume opposite the emitter arrangement and the detector arrangement .
  • an absorber or reflector e . g . a mirror
  • the reflector is configured to be reflective in a wavelength range that is emitted by the light emitters while the absorber is configured to be absorbent in said wavelength range .
  • the system is sensitive to particles smaller than 3 pm, in particular smaller than 500 nm .
  • particle si zes down to the di f fraction limit can be reliably detected with the proposed light curtain method .
  • the system is sensitive to a single particle located in the probing volume .
  • each detector is associated to one of the light emitters , already a single particle can be reliably detected as this results in a signi ficantly altered signal in at least one of the light detectors .
  • the sensitivity of a detector according to the improved concept is greatly enhanced .
  • the output signal comprises information about a location and/or a velocity of a detected particle .
  • the location of a particle within the probing volume at least in the dimensions of the detector array can be determined .
  • a velocity as well as a si ze of the detected particles can be determined .
  • the aforementioned obj ect is further solved by a particle detector arrangement that comprises a plurality of systems for detecting particles according to one of the embodiments described above . Therein, each system in terms of its optical axis is arranged substantially perpendicular to the respective optical axis of the other systems .
  • two or three emitter-detector array pairs are employed to form a two- or three-dimensional cavity, in which location, si ze and velocity of particles can be exactly determined .
  • the aforementioned obj ect is further solved by a method for detecting particles .
  • the method comprises providing a probing volume , emitting, by means of an emitter arrangement including an array of light emitters , light into the probing volume and detecting, by means of a detector arrangement including an array of light detectors , the light that is emitted by the emitter arrangement into the probing volume .
  • the method further comprises generating, by means of an evaluation circuit , an output signal from detector signals received from the detector arrangement based on the detected light .
  • Each of the array of light detectors is configured to receive light from an associated one of the array of light emitters . An amount of light received by the detector arrangement depends on whether a particle is located within the probing volume .
  • Figures 1 to 6 show di f ferent exemplary embodiments of a system for detecting particles according to the improved concept ;
  • Figure 7 shows an exemplary embodiment of a particle detector arrangement
  • Figure 8 shows a further exemplary embodiment of a system for detecting particles .
  • Figure 9 shows a further exemplary embodiment of a particle detector arrangement configured as an orientation sensor .
  • Figure 1 shows a schematic side view of an exemplary embodiment of a system for detecting particles 1 according to the improved concept .
  • the system 1 comprises a first substrate body 10 on which the emitter arrangement 20 is arranged .
  • the emitter arrangement 20 comprises an array of light emitters 21 that are equally distributed across the surface of the substrate body 10 .
  • the schematics show a onedimensional array, however, the concept can be easily expanded to two dimensions , for instance .
  • the light emitters 21 are micro light emitters such as VCSELs or micro-LEDs of a micro-LED display, for example .
  • emitter arrangement 20 additionally comprises a lens array 22 , e . g .
  • the lens array 22 is illustrated to be separate from the light emitters 21 , however, the lens array 22 can likewise be integrated in the emitter arrangement 20 .
  • the system 1 further comprises a second substrate body 10 that is arranged parallel or substantially parallel to the first substrate body 10 with respect to the main plane of extension .
  • the detector arrangement 30 is arranged on the second substrate body 10 .
  • the detector arrangement 30 comprises an array of light detectors 31 that are equally distributed across the surface of the substrate body 10 . Therein, the equal distribution matches that of the emitter arrangement 20 in terms of number of elements and pitch, for instance .
  • the light detectors 31 a micro light detectors such as micro photodiodes , for example .
  • the second substrate body 10 is arranged such that the detector arrangement 30 faces the emitter arrangement 20 wherein a region in between the emitter arrangement 20 and the detector arrangement 30 defines the probing volume 2 .
  • the light emitters 21 and the light detectors 31 form pairs in a manner, in which each of the light detectors 31 is associated to one of the light emitters 21 .
  • each of the light detectors 31 exclusively, or at least predominantly, receives light from the associated one of the light emitters 21 in case no obj ects are located within the probing volume 2 .
  • This is achieved by forming light beams that are parallel or substantially parallel to each other in a manner that a light curtain is formed between the emitter arrangement 20 and the detector arrangement 30 .
  • each light beam between a light emitter 21 and the associated lights detectors 31 can be understood as a light barrier of the light curtain .
  • a lens array 22 focuses or collimates the light from the light emitters 21 towards the associated one of the light detectors 31 .
  • the system 1 further comprises an evaluation circuit 60 , which in this figure is illustrated as an integrated circuit layer .
  • the evaluation circuit 60 is electrically connected to the light detectors 31 in order to enable the readout of photo signals generated by each of the light detectors 31 based on received light .
  • Figure 2 shows the exemplary embodiment of a system for detecting particles 1 of figure 1 .
  • the evaluation circuit 60 is not shown in this and in the following figures .
  • particles 3 are located within the probing volume 2 .
  • the probing volume 2 is fi lled with a gas , e . g . air, that contains particles , such as dust , fine dust , bacteria or pollen, for instance .
  • a system for detecting particles 1 according to the improved concept can be used for determining or monitoring parameters such as air quality, for instance .
  • the particles 3 each obstruct a light path formed between a pair of light emitter 21 and associated light detector 31 .
  • the resulting photo signal of said light detector 31 in this embodiment shows a reduced, or zero , amount of received light , thus generating a smaller, or no , photocurrent compared to the pairs of light emitter 21 and light detector 31 whose light path is not obstructed .
  • positions and number of particles 3 within the probing volume 2 can be determined .
  • measurements of particle si zes can be performed by evaluating the signal of neighboring light detectors 31 .
  • velocity and hence movement of the particles 3 can be measured by evaluating a change in the signal of neighboring light detectors 31 .
  • These parameters in sum are suf ficient to determine the particle type as di f ferent particles are characteri zed by di f ferent si zes and/or velocities within an air volume .
  • FIG 3 shows a further embodiment of a system 1 according to the improved concept .
  • both substrate bodies 10 are common substrate bodies and comprise both light emitters 21 and light detectors 31 .
  • the array of light emitters 21 and the array of light detectors 31 are interleaved such that a greater array 40 is formed featuring an alternating arrangement of light emitters 21 and detectors 31 .
  • the two greater arrays 40 are arranged with respect to each other such that again each of the light emitters 21 of the first substrate body 10 is associated to one of the light detectors 31 of the second substrate body 10 , and vice versa .
  • the alternating arrangement reduces cross talk as even in the case of a diverging light beam
  • only one of the light detectors 31 is arranged to receive light from a speci fic light emitter 21 as its neighboring elements are light emitters 21 .
  • two lens arrays 22 are arranged as there are light emitters 21 located on both substrate bodies 10 .
  • the light detectors 31 each comprise a lens elements , which may serve to focus light onto a light-sensitive region of the respective light detector 31 .
  • the 2 lens arrays 22 can comprise lenses only for the light emitters 21 .
  • Figure 4 shows the exemplary embodiment of a system for detecting particles 1 of figure 3 .
  • a particle 3 is located within the probing volume 2 .
  • the system 1 is operated one-sided . This means that only the light emitters 21 on one side of the probing volume 2 are activated to emit light . However, it is illustrated in the drawing, all detector elements 31 are activated to generate a photo signal based on received light .
  • a particle 3 located within the probing volume 2 can obstruct light from reaching the associated light detector 31 of a respective light emitter 21 i f a particle 3 is located on the light path between these two elements .
  • the presence of a particle 3 can be detected via a reduced, or zero , photocurrent generated by one of the light detectors 31 on the substrate body 10 opposite the activated light emitters 21 .
  • Figure 5 shows the exemplary embodiment of a system for detecting particles 1 of figures 3 and 4 .
  • the system 1 is operated double-sided . This means that the light emitters 21 on both substrate bodies 10 are activated to emit light . Likewise , also in this operational mode all detector elements 31 are activated to generate a photo signal based on received light .
  • a particle 3 present within the probing volume 2 again obstructs the light path between at least one of the light emitters 21 and the associated light detectors 31 arranged on opposite sides of the probing volume 2 .
  • lights detectors 31 can in addition from the light of the associated light emitter 21 also receive light that is reflected from the particle 3 , thus leading to an increased photocurrent compared to the case , in which no particle 3 is present to reflect light .
  • this embodiment enables the aforementioned detection of a particle 3 in a twofold manner, however, without sacri ficing the resolution by a factor of 2 .
  • FIG. 6 shows a further embodiment of a system 1 according to the improved concept .
  • This embodiment features one substrate body 10 as a common substrate body featuring the aforementioned greater array 40 of interleaved arrays of light emitters 21 and light detectors 31 .
  • the probing volume 2 in this embodiment is defined by the space between said substrate body 10 and a boundary element 50 that is arranged parallel or substantially parallel to the substrate body 10 in terms of the main planes of extension .
  • the boundary element 50 can be an absorber or a reflector, such as a mirror .
  • the boundary element 50 is an absorber, as it is illustrated in the drawing, it is configured to absorb substantially all light that is emitted by the light emitters 21 and reaches a surface of the boundary element 50 . Similar to the embodiments of figures 4 and 5 , the presence of the particle 3 can be veri fied by means of a photocurrent induced by those light detectors 31 that receive light that is reflected from said particle 3 .
  • the boundary element 50 is a reflector, on the contrary, it is configured to reflect light that is emitted by the light emitters 21 and reaches a surface of the boundary element 50 .
  • the reflector is arranged such that again each of the light detectors 31 is associated to one of the light emitters 21 .
  • each of the light detectors 31 exclusively or predominantly receives light from one of the light emitters 21 , e . g . a neighboring light emitter 21 , i f no particle 3 is present within the probing volume 2 and obstructs said light path between said light emitter 21 , the reflector and the associated light detectors 31 .
  • the boundary element 50 can be arranged at a speci fic tilting angle with respect to the substrate body 10 .
  • the lens array 22 can be configured to reali ze the desired light path .
  • Figure 7 shows an exemplary embodiment of a particle detector arrangement 100 comprising multiple systems 1 according to the improved concept .
  • two systems 1 according to the embodiment of figures 2 to 5 are arranged perpendicular to each other .
  • a multidimensional light curtain is created for determining position and movement of a particle within the probing volume 2 in multiple dimensions , for instance .
  • a particle detector arrangement 100 can be formed using any of the exemplary embodiments of the system 1 described above .
  • a particle detector arrangement 100 can comprise various di f ferent embodiments of the system 1 .
  • Figure 8 shows a further embodiment of a system 1 according to the improved concept .
  • both the emitter arrangement 20 and the detector arrangement 30 are formed by a two-dimensional array, e . g . a matrix, of light emitters 21 and light detectors 31 .
  • the emitter arrangement 20 on the bottom substrate body 10 is a display, e . g . a micro-LED display comprising micro-LEDs as light emitters 21 .
  • the display is a commonly available display typically used in mobile devices , for instance .
  • the detector arrangement 30 on the top substrate body 10 is a detector matrix comprising micro photodetectors , such as micro photodiodes as lights detectors 31 .
  • Figure 9 shows a further exemplary embodiment of a particle detector arrangement 100 configured as an orientation sensor .
  • the particle 3 is a round or spherical obj ect , e . g . a disk or a ball , that is free to move within a predefined probing volume 2 , here illustrated as a spherical enclosed space .
  • the position detected by the detector arrangement 100 i . e . by each of the systems 1 , gives information about the orientation of the detector arrangement 100 , and therefore of the device the detector arrangement 100 is employed in .
  • a particle detector arrangement 100 is shown is employed in a mobile device , such as a smartphone , a tablet computer or a laptop, for instance .

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  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
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  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Système de détection de particules (1) comprenant un volume de sondage (2), un agencement d'émetteurs (20) comprenant un réseau d'émetteurs de lumière (21) configurés pour émettre de la lumière dans le volume de sondage (2), et un agencement de détecteurs (30) comprenant un réseau de détecteurs de lumière (31) configurés pour détecter la lumière émise par l'agencement d'émetteurs (20) dans le volume de sondage (2). Le système comprend en outre un circuit d'évaluation (60) configuré pour générer un signal de sortie à partir de signaux de détecteurs reçus en provenance de l'agencement de détecteurs (30) en fonction de la lumière détectée. Chaque détecteur du réseau de détecteurs de lumière (31) est configuré pour recevoir de la lumière provenant d'un réseau associé du réseau d'émetteurs de lumière (21), et une quantité de lumière reçue par l'agencement de détecteurs (30) dépend de la présence ou non d'une particule (3) à l'intérieur du volume de sondage (2).
PCT/SG2021/050583 2020-10-19 2021-09-26 Système et procédé de détection de particules WO2022086440A1 (fr)

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DE102020127466.1 2020-10-19

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03176641A (ja) * 1989-12-06 1991-07-31 Fujitsu Ltd 真空用パーティクルセンサ及び該真空用パーティクルセンサを有する真空装置
US7064827B2 (en) * 2002-05-20 2006-06-20 Brown University Research Foundation Optical tracking and detection of particles by solid state energy sources
US20110303137A1 (en) * 2008-11-13 2011-12-15 Tevs Nikolai R Seed sensor system and method for improved seed count and seed spacing
WO2017060105A1 (fr) * 2015-10-08 2017-04-13 Koninklijke Philips N.V. Capteur de particules pour détection de particules
US20180340889A1 (en) * 2013-08-09 2018-11-29 Lester F. Ludwig Optical tomography optoelectronic arrangements for microplate wells
US20200056981A1 (en) * 2018-08-17 2020-02-20 Robert Bosch Gmbh Optical Particle Sensor Device and Method for Operating an Optical Particle Sensor Device
WO2020106036A1 (fr) * 2018-11-19 2020-05-28 Samsung Electronics Co., Ltd. Capteur de poussière multimodal
CA3124019A1 (fr) * 2019-03-22 2020-10-01 Precision Planting Llc Appareil, systemes et procedes de comptage de particules

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03176641A (ja) * 1989-12-06 1991-07-31 Fujitsu Ltd 真空用パーティクルセンサ及び該真空用パーティクルセンサを有する真空装置
US7064827B2 (en) * 2002-05-20 2006-06-20 Brown University Research Foundation Optical tracking and detection of particles by solid state energy sources
US20110303137A1 (en) * 2008-11-13 2011-12-15 Tevs Nikolai R Seed sensor system and method for improved seed count and seed spacing
US20180340889A1 (en) * 2013-08-09 2018-11-29 Lester F. Ludwig Optical tomography optoelectronic arrangements for microplate wells
WO2017060105A1 (fr) * 2015-10-08 2017-04-13 Koninklijke Philips N.V. Capteur de particules pour détection de particules
US20200056981A1 (en) * 2018-08-17 2020-02-20 Robert Bosch Gmbh Optical Particle Sensor Device and Method for Operating an Optical Particle Sensor Device
WO2020106036A1 (fr) * 2018-11-19 2020-05-28 Samsung Electronics Co., Ltd. Capteur de poussière multimodal
CA3124019A1 (fr) * 2019-03-22 2020-10-01 Precision Planting Llc Appareil, systemes et procedes de comptage de particules

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