WO2022074820A1 - Système d'analyse et système de gestion, procédé d'analyse, et programme d'analyse - Google Patents

Système d'analyse et système de gestion, procédé d'analyse, et programme d'analyse Download PDF

Info

Publication number
WO2022074820A1
WO2022074820A1 PCT/JP2020/038280 JP2020038280W WO2022074820A1 WO 2022074820 A1 WO2022074820 A1 WO 2022074820A1 JP 2020038280 W JP2020038280 W JP 2020038280W WO 2022074820 A1 WO2022074820 A1 WO 2022074820A1
Authority
WO
WIPO (PCT)
Prior art keywords
acid concentration
analysis
sulfuric acid
pure water
boric acid
Prior art date
Application number
PCT/JP2020/038280
Other languages
English (en)
Japanese (ja)
Inventor
勝 千代丸
寛明 三河
友一 奥崎
満智 岡本
Original Assignee
三菱重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱重工業株式会社 filed Critical 三菱重工業株式会社
Priority to PCT/JP2020/038280 priority Critical patent/WO2022074820A1/fr
Publication of WO2022074820A1 publication Critical patent/WO2022074820A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/024—Analysing fluids by measuring propagation velocity or propagation time of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N9/00—Investigating density or specific gravity of materials; Analysing materials by determining density or specific gravity

Definitions

  • This disclosure relates to an analysis system and a management system, an analysis method, and an analysis program.
  • etching using a treatment liquid and film treatment
  • the liquid property of the treatment liquid is controlled so that the desired surface treatment can be performed.
  • a worker or the like collects the treatment liquid on a regular basis (once / week, etc.) and conducts a liquid property test by manual analysis.
  • Patent Document 1 discloses that an etching treatment liquid (HF solution) is supplied from a treatment tank to a concentration measuring device via a pipe, and a concentration value is detected.
  • HF solution etching treatment liquid
  • the treatment liquid may undergo a sudden change in liquid properties (for example, concentration) depending on the number of parts to be treated and the material of the product. If the liquid properties of the treatment liquid are not properly maintained, the treated product may become a non-conforming product (defective product), so it is becoming more important to more accurately control the liquid properties of the treatment liquid.
  • liquid properties for example, concentration
  • the present disclosure has been made in view of such circumstances, and an object of the present disclosure is to provide an analysis system and a management system capable of analyzing boric acid concentration and sulfuric acid concentration, as well as an analysis method and an analysis program. ..
  • the first aspect of the present disclosure is a measurement unit that measures the density and sound velocity of a sample, and the measurement results are obtained from the measurement unit, and the sample is based on information on the relationship between the density and the concentration of sulfuric acid and sulfuric acid with respect to the sound velocity. It is an analysis system including an analysis unit for analyzing boric acid concentration and sulfuric acid concentration.
  • the second aspect of the present disclosure is the step of measuring the density and the sound velocity of the sample, and the boric acid concentration and the sulfuric acid concentration of the sample based on the information on the relationship between the density and the sound velocity and the concentration of the boric acid and the sulfuric acid. It is an analysis method having a step of analyzing the above.
  • the third aspect of the present disclosure is a process of measuring the density and sound velocity of a sample, acquiring the measurement results, and based on the relationship information of the concentrations of boric acid and sulfuric acid with respect to the density and sound velocity, the boric acid concentration and sulfuric acid concentration of the sample. It is an analysis program for making a computer execute the process of analyzing.
  • the present disclosure has the effect of being able to analyze the boric acid concentration and the sulfuric acid concentration.
  • FIG. 1 is a diagram showing a configuration example of the surface treatment line 120.
  • the surface treatment line 120 is provided with a treatment tank 122 in which a plurality of treatment liquids are stored.
  • the surface treatment line 120 is provided with a treatment tank 122 such as a boric acid sulfuric acid treatment tank 122a and a primary water washing treatment tank 122b and a secondary water washing treatment tank 122c.
  • a crane 121 is provided above the processing tank 122, and the target component 123 is suspended by the crane 121, and the target component 123 is immersed in the processing liquid of the processing tank 122 by vertical movement.
  • Each surface treatment is performed by immersing the target component 123 in each treatment liquid in order from the upstream side of the line.
  • the boric acid sulfuric acid treatment tank 122a film treatment is performed. Then, in the primary water washing treatment tank 122b and the secondary water washing treatment tank 122c, the primary water washing and the secondary water washing are performed on the target component 123 after the film treatment. Pure water is stored in the primary water washing treatment tank 122b and the secondary water washing treatment tank 122c. Since the amount of pure water stored decreases due to evaporation or the like, pure water is replenished from a pure water line (not shown).
  • the treatment liquid stored in the boric acid sulfuric acid treatment tank 122a is used as a liquid analysis target (hereinafter referred to as “sample”) as a liquid analysis target (hereinafter referred to as “sample”) will be described as an example.
  • the treatment liquid of the boric acid sulfuric acid treatment tank 122a is specifically a boric acid sulfuric acid anodizing treatment liquid. That is, the treatment liquid contains three components of boric acid, sulfuric acid, and water (three-component mixed solution).
  • the sample may be the treatment liquid of the other treatment tank 122, or may be the pure water replenished from the pure water line. Other than the above, various solutions can be used as samples.
  • FIG. 2 is a diagram showing a configuration example when the analysis system 40 is applied to the processing tank 122.
  • the treatment tank 122 in FIG. 2 is, for example, a boric acid sulfuric acid treatment tank 122a.
  • a circulation system 130 and an analysis system 40 are connected to the processing tank 122.
  • the circulation system 130 partially extracts the treatment liquid from the treatment tank 122 by the pump 131, and returns the treatment liquid to the treatment tank 122 via the circulation line 133.
  • a part of the treatment liquid of the circulation line 133 flows through the detour line 134, the solid component is removed by the strainer 132, and the process returns to the circulation line 133.
  • a sampling line 135 is connected to the downstream side of the strainer 132 in the detour line 134.
  • the analysis system 40 collects the treatment liquid as a sample from the collection line 135 and performs analysis. In this embodiment, a case where the boric acid concentration and the sulfuric acid concentration of the treatment liquid are measured (analyzed) will be described.
  • FIG. 3 is a diagram showing a schematic configuration of the analysis system 40.
  • the analysis system 40 includes a measurement unit M1, a standard liquid tank T1, a pure water tank T2, and a control device 50 as main configurations.
  • the measurement unit M1 measures the density and sound velocity of the sample.
  • the measurement unit M1 is connected to a supply pipe L1 for supplying the sample acquired from the target device to the measurement unit M1 and a return pipe L2 for returning the sample from the measurement unit M1 to the target device.
  • the target device is the processing tank 122 in the present embodiment.
  • the target for sampling the sample is not limited to the treatment tank 122.
  • the supply pipe L1 is connected to the sampling line 135. Then, the sample is supplied to the measuring unit M1 via the valve MV11, the pump P11, the switching valve DV11, and the flow meter F1.
  • a bypass line having a valve MV14 is connected to the pump P11.
  • the return pipe L2 returns the sample measured by the measuring unit M1 to the processing tank 122.
  • the sample is returned to the processing tank 122 via the valve DV14.
  • a line having a valve MV18 is provided on the downstream side of the pump P11 (and the upstream side of the switching valve DV11) and the downstream side of the valve DV14.
  • a line having a valve MV17 is provided at the inlet and outlet of the measurement unit M1.
  • the measuring unit M1 measures the density and sound velocity of the sample.
  • the sample density is the mass per unit volume.
  • the speed of sound of a sample is the speed (sound velocity) of a wave passing through the sample.
  • FIG. 4 is a diagram illustrating the principle of density measurement.
  • the density is measured by a vibration type (vibration type density meter) as shown in FIG.
  • vibration type vibration type density meter
  • FIG. 4 When a sample is passed through the U-shaped tube K1 and vibration is applied from the outside, the U-shaped tube K1 vibrates naturally.
  • the frequency of this natural vibration depends on the mass of the flowing solution (sample).
  • the frequency of the natural vibration is proportional to the square root of the value obtained by adding the mass of the U-shaped tube K1 and the mass of the liquid. That is, the mass of the liquid can be specified by measuring the frequency of the natural vibration, and the liquid density can be obtained from the volume of the U-shaped tube K1.
  • the measuring unit M1 passes the sample and measures the density of the sample.
  • the measurement unit M1 can measure the density of the sample, it is not limited to the method shown in FIG. 4, and various density measurement methods can be applied.
  • the configuration of the measuring unit M1 is not limited to the configuration shown in FIG.
  • FIG. 5 is a diagram illustrating the principle of sound velocity measurement.
  • the speed of sound is measured by a sonicometer as shown in FIG.
  • the speed of sound of a liquid obtained by mixing a plurality of types (for example, two types) having different sound velocities changes depending on the concentration. Therefore, the ultrasonic wave W is transmitted from the ultrasonic vibrator U1 while the sample is passing through. Then, the speed of sound with respect to the sample can be obtained by measuring the time until the reflected signal is returned from the reflector U2 provided at a fixed distance.
  • the measurement unit M1 can measure the sound velocity with respect to the sample, various sound velocity measurement methods can be applied without being limited to the method shown in FIG.
  • the configuration of the measuring unit M1 is not limited to the configuration shown in FIG.
  • the density and sound velocity with respect to the sample are measured by the measuring unit M1. Since the sample is supplied to the measuring unit M1 via the supply pipe L1, the processing liquid in the processing tank 122 can be automatically measured.
  • the standard liquid tank T1 stores a standard liquid in which the concentrations of boric acid and sulfuric acid are specified in advance. That is, the standard solution is a solution in which the boric acid concentration and the sulfuric acid concentration are adjusted in advance (a three-component mixed solution of boric acid, sulfuric acid and water). Since the standard liquid is stored in the standard liquid tank T1, the liquid property does not change.
  • the standard liquid tank T1 is provided with a standard liquid supply pipe L3.
  • the standard liquid supply pipe L3 is a line for supplying the standard liquid from the standard liquid tank T1 to the measuring unit M1. Specifically, as shown in FIG. 3, the standard liquid is supplied to the measuring unit M1 via the valve MV12, the pump P12, the switching valve DV12, and the flow meter F1.
  • a bypass line having a valve MV15 is connected to the pump P12. Then, the standard liquid is returned to the standard liquid tank T1 via the valve DV15.
  • the pure water tank T2 stores pure water. That is, pure water is a solution having zero boric acid concentration and zero sulfuric acid concentration. Since the pure water is stored in the pure water tank T2, the liquid property does not change.
  • the pure water tank T2 is provided with a pure water supply pipe L4.
  • the pure water supply pipe L4 is a line for supplying pure water from the pure water tank T2 to the measuring unit M1. Specifically, as shown in FIG. 3, pure water is supplied to the measuring unit M1 via the valve MV13, the pump P13, the switching valve DV13, and the flow meter F1.
  • a bypass line having a valve MV16 is connected to the pump P13. Then, the pure water may be returned to the pure water tank T2 or may be discharged to the outside of the system.
  • the control device 50 controls various devices in the analysis system 40. Specifically, various valves and pumps are controlled to control the flow of samples.
  • FIG. 6 is a diagram showing an example of the hardware configuration of the control device 50 according to the present embodiment.
  • the control device 50 is a computer system (computer system), for example, a CPU 11, a ROM (Read Only Memory) 12 for storing a program or the like executed by the CPU 11, and each program at the time of execution. It is provided with a RAM (Random Access Memory) 13 that functions as a work area, a hard disk drive (HDD) 14 as a large-capacity storage device, and a communication unit 15 for connecting to a network or the like.
  • a solid state drive (SSD) may be used as the large-capacity storage device.
  • SSD solid state drive
  • the control device 50 may include an input unit including a keyboard, a mouse, and the like, a display unit including a liquid crystal display device for displaying data, and the like.
  • the storage medium for storing the program or the like executed by the CPU 11 is not limited to the ROM 12.
  • it may be another auxiliary storage device such as a magnetic disk, a magneto-optical disk, or a semiconductor memory.
  • a series of processing processes for realizing various functions described later is recorded in the hard disk drive 14 or the like in the form of a program, and the CPU 11 reads this program into the RAM 13 or the like to execute information processing / arithmetic processing.
  • the program may be installed in ROM 12 or other storage medium in advance, provided in a state of being stored in a computer-readable storage medium, or distributed via a wired or wireless communication means. May be applied.
  • the computer-readable storage medium is a magnetic disk, a magneto-optical disk, a CD-ROM, a DVD-ROM, a semiconductor memory, or the like.
  • FIG. 7 is a functional block diagram showing the functions of the control device 50.
  • the control device 50 includes a sample supply unit 51, a standard liquid supply unit 52, a pure water supply unit 53, and an analysis unit 54.
  • the sample supply unit 51 controls the supply of the sample for the analysis of the sample. Specifically, the sample supply unit 51 distributes the sample to the distribution channel when measuring the sample. That is, the sample supply unit 51 controls the flow of the sample in the supply pipe L1 and the return pipe L2 so that the sample flows from the sample inlet to the measurement unit M1.
  • FIG. 8 is a diagram showing a sample flow of the analysis system 40 when supplying the sample. That is, the valve MV11, the switching valve DV11, and the valve DV14 are opened, and the sample is circulated to the measurement unit M1 as shown by the thick line in FIG.
  • the sample to the measuring unit M1 is supplied to the measuring unit M1 by controlling the pump P11.
  • Other valves and pumps are preferably closed (or stopped).
  • the sample is automatically supplied to the measurement unit M1 by the control of the sample supply unit 51, so that automatic measurement can be performed. Since the sample is supplied to the measuring unit M1 through each pipe, contact with the outside air can be suppressed.
  • the standard liquid supply unit 52 controls the supply of the standard liquid (confirmation of the standard liquid). Specifically, the standard liquid supply unit 52 distributes the standard liquid to the distribution channel when measuring the standard liquid. That is, the standard liquid supply unit 52 controls the supply of the standard liquid to the measurement unit M1 by the standard liquid supply pipe L3.
  • FIG. 9 is a diagram showing the flow of the standard solution of the analysis system 40 when the standard solution is supplied. That is, the valve MV12, the switching valve DV12, and the valve DV15 are opened, and the standard liquid is circulated to the measuring unit M1 as shown by the thick line in FIG.
  • the standard liquid to the measuring unit M1 is supplied to the measuring unit M1 by controlling the pump P12.
  • Other valves and pumps are preferably closed (or stopped).
  • the standard liquid is automatically supplied to the measurement unit M1 under the control of the standard liquid supply unit 52 in this way, automatic measurement with respect to the standard liquid can be performed. Since the standard liquid is supplied to the measuring unit M1 through each pipe, contact with the outside air can be suppressed.
  • the reliability of the measuring unit M1 can be confirmed by comparing the known boric acid concentration and sulfuric acid concentration of the standard solution with the analysis result.
  • the concentration of boric acid and the concentration of sulfuric acid may be used for confirmation, or the density and sound velocity measured by the measuring unit M1 may be used for confirmation.
  • the standard liquid supply unit 52 supplies the standard liquid to the measurement unit M1 by the standard liquid supply pipe L3 at a predetermined cycle. That is, the reliability of the measuring unit M1 can be maintained more stably by performing the analysis with the standard solution periodically.
  • the standard solution supply unit 52 may compare the known liquid properties of the standard solution with the analysis result for the standard solution (automatic comparison process). In this case, if the analysis result is not within the reference range for the known liquid properties of the standard solution, the measurement unit M1 may be notified that an abnormality may have occurred.
  • the pure water supply unit 53 controls the supply of pure water (confirms 0 points). Specifically, the pure water supply unit 53 distributes pure water to the distribution channel when measuring the pure water. That is, the pure water supply unit 53 controls the supply of pure water to the measurement unit M1 by the pure water supply pipe L4.
  • FIG. 10 is a diagram showing the flow of pure water in the analysis system 40 when supplying pure water. That is, the valve MV13 and the switching valve DV13 are opened, and pure water is circulated to the measuring unit M1 as shown by the thick line in FIG.
  • the pure water to the measuring unit M1 is supplied to the measuring unit M1 by controlling the pump P13.
  • Other valves and pumps are preferably closed (or stopped).
  • the reliability of the measuring unit M1 can be confirmed by comparing the known boric acid concentration (zero) and sulfuric acid concentration (zero) of pure water with the analysis result.
  • the confirmation may be performed using the boric acid concentration and the sulfuric acid concentration, or may be confirmed using the density and sound velocity measured by the measuring unit M1.
  • the pure water supply unit 53 supplies pure water to the measurement unit M1 by the pure water supply pipe L4 at a predetermined cycle. That is, by periodically performing the analysis with pure water, the reliability of the measuring unit M1 can be maintained more stably.
  • the pure water supply unit 53 may compare the known liquid properties of the pure water with the analysis result for the pure water (automatic comparison process). In this case, if the analysis result is not within the reference range for the known liquid properties of pure water, the measuring unit M1 may be notified that an abnormality may have occurred.
  • the pure water supply process, the standard liquid supply process, and the pure water supply process are executed at different timings, but if the processes can be performed in parallel, the processes may be executed in parallel.
  • the analysis unit 54 acquires the measurement result from the measurement unit M1 and analyzes the boric acid concentration and the sulfuric acid concentration of the sample based on the relationship information of the boric acid and sulfuric acid concentrations with respect to the density and the speed of sound. In this way, the analysis unit 54 converts the measurement results of the density and the speed of sound into the boric acid concentration and the sulfuric acid concentration.
  • FIG. 11 is a diagram showing an example of related information.
  • the horizontal axis is the speed of sound and the vertical axis is the density.
  • the boric acid concentration and the sulfuric acid concentration are associated with the density and the speed of sound.
  • the boric acid concentration increases as the speed of sound increases.
  • the sulfuric acid concentration increases.
  • the boric acid concentration and the sulfuric acid concentration in the sample are C1 and C2, respectively, using the relational information as shown in FIG. Can be identified.
  • the calibration curve as shown in FIG. 11 can be obtained by conducting a test or the like in advance using, for example, a three-component mixed solution of boric acid, sulfuric acid, and water.
  • the related information is not limited to the calibration curve shown in FIG. 11 as long as the density, the speed of sound, the boric acid concentration, and the sulfuric acid concentration with respect to the solution are related to each other.
  • FIG. 12 is a flowchart showing an example of the procedure of the analysis process according to the present embodiment.
  • the flow shown in FIG. 12 is executed, for example, at a predetermined timing for performing analysis.
  • the flow shown in FIG. 12 may be executed at a preset cycle for performing the analysis.
  • the sample line configuration is performed (S101). Specifically, the valve MV11, the switching valve DV11, and the valve DV14 are opened. The other valves are preferably closed.
  • the pump P11 is controlled to supply the sample to the measurement unit M1 (S102).
  • the control of the pump P11 may be controlled so as to circulate a predetermined flow rate, or may be controlled so that the flow rate maintains a predetermined value while observing the measurement result of the flow meter F1.
  • measurement is performed by the measurement unit M1 (S103). Specifically, the density and the speed of sound are measured for the distributed samples.
  • the boric acid concentration and the sulfuric acid concentration are specified based on the measurement results (S104).
  • S104 the relational information as shown in FIG. 11 is used.
  • FIG. 13 is a flowchart showing an example of the procedure of the standard liquid supply process according to the present embodiment.
  • the flow shown in FIG. 13 is executed, for example, at a predetermined timing for performing confirmation using a standard solution.
  • the flow shown in FIG. 13 may be executed at a preset cycle for performing confirmation using the standard solution.
  • the line configuration is performed (S201). Specifically, the valve MV12, the switching valve DV12, and the valve DV15 are opened. The other valves are preferably closed.
  • the pump P12 is controlled to supply the standard liquid to the measuring unit M1 (S202).
  • the control of the pump P12 may be controlled so as to circulate a predetermined flow rate, or may be controlled so that the flow rate maintains a predetermined value while observing the measurement result of the flow meter F1.
  • measurement is performed by the measurement unit M1 (S203). Specifically, the density and the speed of sound are measured with respect to the standard liquid that is distributed.
  • the boric acid concentration and the sulfuric acid concentration are specified based on the measurement results (S204).
  • the relational information as shown in FIG. 11 is used.
  • the concentration analysis of boric acid and sulfuric acid with respect to the standard solution is performed.
  • the analysis result may be compared with the known boric acid concentration and sulfuric acid concentration of the standard solution by, for example, a worker or the like.
  • the analysis result may be subjected to a comparison process with the known boric acid concentration and sulfuric acid concentration of the standard solution in the control device 50.
  • FIG. 14 is a flowchart showing an example of the procedure of the pure water supply process according to the present embodiment.
  • the flow shown in FIG. 14 is executed at a predetermined timing for performing confirmation using, for example, pure water.
  • the flow shown in FIG. 14 may be executed at a preset cycle for performing confirmation using pure water.
  • the pump P13 is controlled to supply pure water to the measurement unit M1 (S302).
  • the control of the pump P13 may be controlled so as to circulate a predetermined flow rate, or may be controlled so that the flow rate maintains a predetermined value while observing the measurement result of the flow meter F1.
  • measurement is performed by the measurement unit M1 (S303). Specifically, the density and the speed of sound are measured with respect to the circulating pure water.
  • the boric acid concentration and the sulfuric acid concentration are specified based on the measurement results (S304).
  • the relational information as shown in FIG. 11 is used.
  • the concentration analysis of boric acid and sulfuric acid with respect to pure water is performed.
  • the analysis result may be compared with the known boric acid concentration (zero) and sulfuric acid concentration (zero) of pure water, for example, by a worker or the like.
  • the analysis result may be subjected to a comparison process with the known boric acid concentration (zero) and sulfuric acid concentration (zero) of pure water in the control device 50.
  • the sample is based on the relationship (relationship information) of the concentrations of boric acid and sulfuric acid with respect to the density and the speed of sound.
  • the boric acid density and sulfuric acid density in the sample can be specified from the measurement results of the density and the speed of sound.
  • the relational information is represented, for example, as a calibration curve.
  • a supply pipe L1 and a return pipe L2 are provided, and the flow of the sample is controlled by the control device 50, so that automatic measurement in the measurement unit M1 becomes possible.
  • the measuring unit M1 By supplying the standard liquid to the measuring unit M1 by the standard liquid supply pipe L3, it is possible to analyze the standard liquid. That is, the reliability of the measuring unit M1 can be confirmed by comparing the known boric acid concentration and sulfuric acid concentration of the standard solution with the analysis result.
  • the measuring unit M1 By supplying pure water to the measuring unit M1 through the pure water supply pipe L4, it is possible to analyze the pure water. That is, the reliability of the measuring unit M1 can be confirmed by comparing the known boric acid concentration and sulfuric acid concentration (that is, 0 points) of pure water with the analysis result.
  • the management system according to this embodiment is applied to the processing tank 122 as shown in FIG. Similar to FIG. 2, the circulation system 130 and the analysis system 40 are connected to the processing tank 122.
  • An adjustment system 160 is connected to the processing tank 122. That is, the management system is composed of the analysis system 40 and the adjustment system 160.
  • the adjustment system 160 acquires the analysis result in the analysis system 40 and adjusts at least one of the boric acid concentration and the sulfuric acid concentration with respect to the sample based on the analysis result. As shown in FIG. 15, the adjustment system 160 is provided with a tank 163, a tank 162, and an addition control device 161.
  • the tank 163 stores a boric acid concentration adjusting chemical solution.
  • the tank 163 is connected to the processing tank 122 by the supply line W1. That is, the boric acid concentration adjusting chemical solution is added to the treatment solution in the treatment tank 122.
  • the supply line W1 is provided with a solenoid valve (not shown), a flow meter (not shown), and a pump (not shown). The solenoid valve and the pump are controlled by the addition control device 161 described later. The measurement result of the flow meter is transmitted to the addition control device 161.
  • the tank 162 stores the sulfuric acid concentration adjusting chemical solution.
  • the tank 162 is connected to the processing tank 122 by the supply line W2. That is, the sulfuric acid concentration adjusting chemical solution is added to the treatment solution in the treatment tank 122.
  • the supply line W2 is provided with a solenoid valve (not shown), a flow meter (not shown), and a pump (not shown).
  • the solenoid valve and the pump are controlled by the addition control device 161 described later.
  • the measurement result of the flow meter is transmitted to the addition control device 161.
  • the addition control device 161 controls the addition amount based on the analysis result of the analysis system 40.
  • the control device 50 is composed of a computer system (computer system) as shown in FIG.
  • the control device 50 and the addition control device 161 may be configured by different computer systems, or may be integrated into one computer system.
  • the addition control device 161 adjusts the boric acid concentration by adjusting the input amount of the boric acid concentration adjusting chemical solution.
  • the boric acid concentration of the treatment solution is controlled so as to be within a predetermined reference range. For example, when the boric acid concentration exceeds the upper limit of the reference range, the boric acid concentration adjusting chemical solution is added so as to reduce the boric acid concentration by a predetermined value. When the boric acid concentration falls below the lower limit of the reference range, the boric acid concentration adjusting chemical solution is added so as to raise the boric acid concentration by a predetermined value.
  • the solenoid valve is opened and the pump is used while checking the input amount with a flow meter.
  • the method for adjusting the boric acid concentration is not limited to the above. For example, the input amount may be determined according to the value of the detected boric acid concentration.
  • the addition control device 161 adjusts the sulfuric acid concentration by adjusting the input amount of the sulfuric acid concentration adjusting chemical solution.
  • the sulfuric acid concentration of the treatment solution is controlled so as to be within a predetermined reference range. For example, when the sulfuric acid concentration exceeds the upper limit of the reference range, the sulfuric acid concentration adjusting chemical solution is added so as to lower the sulfuric acid concentration by a predetermined value. When the sulfuric acid concentration falls below the lower limit of the reference range, the sulfuric acid concentration adjusting chemical solution is added so as to raise the sulfuric acid concentration by a predetermined value.
  • the solenoid valve is opened and the pump is used while checking the input amount with a flow meter.
  • the method for adjusting the sulfuric acid concentration is not limited to the above. For example, the input amount may be determined according to the value of the detected sulfuric acid concentration.
  • the management system may be provided with a notification system (not shown).
  • the notification system acquires the analysis result from the analysis system 40 and notifies the abnormality when the analysis result is not within the preset control standard range.
  • the notification may be performed in the equipment provided with the surface treatment line 120, or may be performed by transmitting information to the remote equipment. By notifying the abnormality when it is out of the control standard range, it is possible to prevent the abnormal state from being left unattended.
  • FIG. 16 is an overall configuration example when the management system according to this embodiment is applied to a production line. As shown in FIG. 16, a sample is collected from a controlled processing tank in a production line and analyzed by an analysis system 40. Then, the adjustment system 160 automatically inputs the chemical solution and the like. In this way, the treatment liquid in each management target treatment tank is managed.
  • the analysis method, and the analysis program according to the present embodiment at least one of the boric acid concentration and the sulfuric acid concentration is adjusted based on the measurement result.
  • the liquid property of the sample can be automatically adjusted. This makes it possible to reduce human error and work time by workers and the like.
  • the analysis system and management system, the analysis method, and the analysis program described in each of the above-described embodiments are grasped as follows, for example.
  • the analysis system (40) acquires measurement results from a measurement unit (M1) that measures the density and sound velocity of a sample, and the measurement unit (M1), and concentrates boric acid and sulfuric acid with respect to the density and sound velocity. It is provided with an analysis unit (54) for analyzing the boric acid concentration and the sulfuric acid concentration of the sample based on the relational information of the above.
  • the boric acid density and the sulfuric acid density in the sample are obtained from the measurement results of the sample density and the speed of sound. Can be identified.
  • the relational information is represented, for example, as a calibration curve.
  • the analysis system (40) includes a supply pipe (L1) for supplying the sample acquired from the target device to the measurement unit (M1) and a return pipe for returning the sample from the measurement unit (M1) to the target device. (L2) and a control unit for controlling the flow of the sample in the supply pipe (L1) and the return pipe (L2) may be provided.
  • a supply pipe (L1) and a feedback pipe (L2) are provided, and the flow of the sample is controlled by the control unit, so that the measurement unit (M1) can be used. Automatic measurement is possible.
  • the analysis system (40) includes a standard liquid tank (T1) for storing a standard liquid in which the concentrations of boric acid and sulfuric acid are specified in advance, and a standard liquid supply pipe for supplying the standard liquid to the measuring unit (M1). (L3) may be provided, and the control unit may control the supply of the standard liquid to the measurement unit (M1) by the standard liquid supply pipe (L3).
  • the standard liquid can be analyzed by supplying the standard liquid to the measuring unit (M1) by the standard liquid supply pipe (L3). That is, the reliability of the measuring unit (M1) can be confirmed by comparing the known boric acid concentration and sulfuric acid concentration of the standard solution with the analysis result.
  • control unit may supply the standard liquid to the measurement unit (M1) by the standard liquid supply pipe (L3) at a predetermined cycle.
  • the analysis system (40) it is possible to periodically confirm the reliability of the measuring unit (M1) by supplying the standard liquid to the measuring unit (M1) at a predetermined cycle. Become.
  • the analysis system (40) includes a pure water tank (T2) for storing pure water and a pure water supply pipe (L4) for supplying pure water to the measurement unit (M1), and the control unit. May control the supply of pure water to the measuring unit (M1) by the pure water supply pipe (L4).
  • pure water can be analyzed for pure water by being supplied to the measuring unit (M1) by the pure water supply pipe (L4). That is, the reliability of the measuring unit (M1) can be confirmed by comparing the known boric acid concentration and sulfuric acid concentration (that is, 0 points) of pure water with the analysis result.
  • control unit may supply pure water to the measurement unit (M1) by the pure water supply pipe (L4) at a predetermined cycle.
  • the analysis system (40) it is possible to periodically confirm the reliability of the measuring unit (M1) by supplying pure water to the measuring unit (M1) at a predetermined cycle. Become.
  • the management system acquires the analysis results of the analysis system (40) and the analysis system (40), and based on the analysis results, at least one of the boric acid concentration and the sulfuric acid concentration with respect to the sample. It is equipped with an adjustment system (160) that adjusts one side.
  • the liquid property of the sample can be automatically adjusted by adjusting at least one of the boric acid concentration and the sulfuric acid concentration based on the measurement result.
  • the adjustment system (160) may adjust the boric acid concentration by adjusting the input amount of the boric acid concentration adjusting chemical solution.
  • the boric acid concentration can be adjusted.
  • the adjustment system (160) may adjust the sulfuric acid concentration by adjusting the input amount of the sulfuric acid concentration adjusting chemical solution.
  • the sulfuric acid concentration can be adjusted.
  • the management system according to the present disclosure may be provided with a notification system for notifying an abnormality when the analysis result is not within the preset management standard range.
  • the management system it is possible to prevent the abnormal state from being left unattended by notifying the abnormality when it deviates from the control standard range.
  • the analysis method according to the present disclosure is a step of measuring the density and sound velocity of a sample, and based on the information on the relationship between the density and sound velocity and the concentration of boric acid and sulfuric acid, the boric acid concentration and sulfuric acid concentration of the sample are obtained.
  • the analysis program according to the present disclosure is a process for measuring the density and sound velocity of a sample, and the measurement results are acquired, and the boric acid concentration and sulfuric acid concentration of the sample are obtained based on the relationship information of the boric acid and sulfuric acid concentrations with respect to the density and sound velocity. And let the computer perform the process of analyzing.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

L'invention concerne un système d'analyse et un système de gestion, un procédé d'analyse, ainsi qu'un programme d'analyse permettant d'analyser une concentration d'acide borique et une concentration d'acide sulfurique. Le système d'analyse (40) selon l'invention comprend : une unité de mesure (M1) destinée à mesurer la densité et la vitesse du son par rapport à un échantillon ; et un dispositif de commande (50) destiné à acquérir des résultats de mesure à partir de l'unité de mesure (M1), et à analyser la concentration d'acide sulfurique et la concentration d'acide borique de l'échantillon en fonction d'informations de relation entre les concentrations d'acide borique et d'acide sulfurique par rapport à la densité et à la vitesse du son.
PCT/JP2020/038280 2020-10-09 2020-10-09 Système d'analyse et système de gestion, procédé d'analyse, et programme d'analyse WO2022074820A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/038280 WO2022074820A1 (fr) 2020-10-09 2020-10-09 Système d'analyse et système de gestion, procédé d'analyse, et programme d'analyse

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/038280 WO2022074820A1 (fr) 2020-10-09 2020-10-09 Système d'analyse et système de gestion, procédé d'analyse, et programme d'analyse

Publications (1)

Publication Number Publication Date
WO2022074820A1 true WO2022074820A1 (fr) 2022-04-14

Family

ID=81126348

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2020/038280 WO2022074820A1 (fr) 2020-10-09 2020-10-09 Système d'analyse et système de gestion, procédé d'analyse, et programme d'analyse

Country Status (1)

Country Link
WO (1) WO2022074820A1 (fr)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6344164A (ja) * 1986-08-12 1988-02-25 Hakutsuru Syuzo Kk アルコ−ル分、エキス分の測定方法
JPH08159946A (ja) * 1994-12-09 1996-06-21 Mitsubishi Gas Chem Co Inc 溶液濃度の測定方法および測定装置
US5760297A (en) * 1997-03-24 1998-06-02 Mesa Laboratories, Inc. System for measuring acid concentration in an alkylation process
JP2006184258A (ja) * 2004-12-28 2006-07-13 Fuji Kogyo Kk 超音波濃度演算方法及び装置
JP2015134963A (ja) * 2014-01-17 2015-07-27 株式会社荏原製作所 めっき方法およびめっき装置
US20150325490A1 (en) * 2014-05-12 2015-11-12 Samsung Electronics Co., Ltd. Apparatus for and method of processing substrate
JP2017028090A (ja) * 2015-07-22 2017-02-02 株式会社平間理化研究所 現像液の成分濃度測定装置、成分濃度測定方法、現像液管理装置、及び現像液管理方法
US20190127872A1 (en) * 2017-11-01 2019-05-02 Lam Research Corporation Controlling plating electrolyte concentration on an electrochemical plating apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6344164A (ja) * 1986-08-12 1988-02-25 Hakutsuru Syuzo Kk アルコ−ル分、エキス分の測定方法
JPH08159946A (ja) * 1994-12-09 1996-06-21 Mitsubishi Gas Chem Co Inc 溶液濃度の測定方法および測定装置
US5760297A (en) * 1997-03-24 1998-06-02 Mesa Laboratories, Inc. System for measuring acid concentration in an alkylation process
JP2006184258A (ja) * 2004-12-28 2006-07-13 Fuji Kogyo Kk 超音波濃度演算方法及び装置
JP2015134963A (ja) * 2014-01-17 2015-07-27 株式会社荏原製作所 めっき方法およびめっき装置
US20150325490A1 (en) * 2014-05-12 2015-11-12 Samsung Electronics Co., Ltd. Apparatus for and method of processing substrate
JP2017028090A (ja) * 2015-07-22 2017-02-02 株式会社平間理化研究所 現像液の成分濃度測定装置、成分濃度測定方法、現像液管理装置、及び現像液管理方法
US20190127872A1 (en) * 2017-11-01 2019-05-02 Lam Research Corporation Controlling plating electrolyte concentration on an electrochemical plating apparatus

Similar Documents

Publication Publication Date Title
US20190011490A1 (en) Fluid tank sensor network fault detection method
KR100997009B1 (ko) 산업설비의 공정 여유도에 대한 동적 감시 및 적시 경보 방법
CN110492497A (zh) 一种发电机组功率振荡综合诊断方法及系统
Jung et al. Burst detection in water distribution system using the extended Kalman filter
WO2022074820A1 (fr) Système d'analyse et système de gestion, procédé d'analyse, et programme d'analyse
Hamby et al. A probabilistic approach to run-to-run control
Bhagwat et al. Fault detection during process transitions: a model-based approach
Jämsä-Jounela et al. Evaluation of control performance: methods, monitoring tool and applications in a flotation plant
CN108182503A (zh) 一种工业用离心泵的质量评价方法及其设备
Babichenko et al. Identification of heat exchange process in the evaporators of absorption refrigerating units under conditions of uncertainty
JP6886563B2 (ja) 熱交換器のファウリングを評価する方法
US10928801B2 (en) Manufacturing statistical process control in the presence of multiple batch effects
AU2021385477A9 (en) Computer surrogate model to predict the single-phase mixing quality in steady state mixing tanks
Castagliola et al. A variable sample size S2-EWMA control chart for monitoring the process variance
JP2021051030A (ja) 濃度監視システム、濃度管理システムおよび濃度監視方法
JPH02253159A (ja) 水処理装置の性能診断装置
WO2022074814A1 (fr) Système d'analyse et système de gestion, et procédé d'analyse et programme d'analyse
US10816524B2 (en) Method for calculating amount of ammonia in gas sample
JP6578612B2 (ja) 監視装置、これを備える蒸気タービン設備、及び蒸気タービン設備の監視方法
Michelena et al. A Novel Method for Failure Detection Based on Real-Time Systems Identification
Wang et al. Base on bias and process capability index monitoring mechanism to improve tool consistency
RU2788068C2 (ru) Способ и система виртуального детектирования для управления переменной состава в процессе производства карбамида
RU2480700C2 (ru) Устройство для автоматического анализа параметров теплоносителя и способ его реализации
CN108829641B (zh) 一种基于统计技术的测量过程核查方法
Scali et al. Modeling disturbance dynamics to improve controller performance in industrial loops

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20956767

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20956767

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP