WO2022070487A1 - Capteur tactile et son procédé de fabrication - Google Patents

Capteur tactile et son procédé de fabrication Download PDF

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Publication number
WO2022070487A1
WO2022070487A1 PCT/JP2021/016348 JP2021016348W WO2022070487A1 WO 2022070487 A1 WO2022070487 A1 WO 2022070487A1 JP 2021016348 W JP2021016348 W JP 2021016348W WO 2022070487 A1 WO2022070487 A1 WO 2022070487A1
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WIPO (PCT)
Prior art keywords
touch sensor
retardation plate
phase difference
electrode
sample
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PCT/JP2021/016348
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English (en)
Japanese (ja)
Inventor
岳史 梁谷
Original Assignee
パナソニックＩｐマネジメント株式会社
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Priority to JP2022553450A priority Critical patent/JPWO2022070487A1/ja
Publication of WO2022070487A1 publication Critical patent/WO2022070487A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means

Definitions

  • This disclosure relates to a touch sensor applied to a display device and a manufacturing method thereof.
  • Patent Document 1 a touch sensor applied to a display device such as a liquid crystal display (LCD: Liquid Crystal Display), for example, the one shown in Patent Document 1 is known.
  • LCD liquid crystal display
  • Patent Document 1 discloses a resistance film type touch sensor applied to a liquid crystal display.
  • This touch sensor includes a lower electrode plate arranged on the visual side of the liquid crystal display and an upper electrode plate arranged on the visual side of the touch sensor and facing the lower electrode plate at intervals via a spacer. ing.
  • the lower electrode plate has a substrate made of an optically isotropic material and a transparent conductive film formed on the upper surface of the substrate.
  • the upper electrode plate has a 1/4 retardation plate and a transparent conductive film formed on the lower surface of the 1/4 retardation plate.
  • the angle difference between the optical axis angle of the 1/4 retardation film and the absorption axis angle of the polarizing plate provided on the liquid crystal display is arranged in the range of 45 ⁇ 5 degrees. ..
  • the linearly polarized light emitted from the polarizing plate is converted into circularly polarized light.
  • the touch sensor of Patent Document 1 has a function of eliminating the polarization characteristic emitted from the polarizing plate of the liquid crystal display.
  • the glass transition temperature peculiar to the resin material applied to the ⁇ / 4 retardation film is generally lower than 140 ° C.
  • the ⁇ / 4 retardation film is heated at a temperature exceeding the glass transition temperature, the molecules tend to move and shift to a soft rubber state, and in particular, the retardation value of the ⁇ / 4 retardation film fluctuates. It will be like.
  • an annealing treatment is generally performed as in Patent Document 2.
  • This annealing treatment includes a step of heating the photosensitive resin layer, which is in a state before the transparent conductive film is formed, at a high temperature of 140 ° C. for about 30 minutes (see, for example, paragraph 0165 of Patent Document 2).
  • the transparent conductive film made of ITO is formed under a temperature atmosphere higher than the glass transition temperature peculiar to the ⁇ / 4 retardation film. Therefore, in the process of forming the transparent conductive film, the ⁇ / 4 retardation film is affected by the high temperature heat and shifts to a soft rubber state. Then, the retardation value of the ⁇ / 4 retardation film in the rubber state greatly fluctuates as compared with the retardation value of the ⁇ / 4 retardation film in the state of the glass transition temperature or lower (that is, the glass state). become. As a result, in the configuration in which the transparent conductive film is directly formed on the ⁇ / 4 retardation film, the function for eliminating the polarization characteristics of the light emitted from the liquid crystal display (display device) may be impaired. rice field.
  • the present disclosure has been made in view of such a point, and an object thereof is to prevent the touch sensor from impairing the function for eliminating the polarization characteristic of the light emitted from the display device.
  • the touch sensor is a touch sensor applied to a display device, and is a linear polarizing plate arranged on the visual side of the display device and a linear polarizing plate. It is provided with a first retardation plate having a ⁇ / 4 retardation, which is arranged on the visual side of the touch sensor.
  • the first retardation plate is provided with a sensor electrode made of a plurality of thin wires having conductivity. Each of the plurality of thin wires includes a plating layer made of a conductive metal.
  • FIG. 1 is an overall perspective view of the touch sensor according to the first embodiment.
  • FIG. 2 is a sectional view taken along line II-II of FIG.
  • FIG. 3 is a perspective view schematically showing each configuration provided on the first retardation plate when viewed from the front surface side of the first retardation plate.
  • FIG. 4 is a schematic view showing the transmission electrode, the first wiring portion, and the pad as viewed from the back surface side of the first retardation plate.
  • FIG. 5 is a schematic view showing the receiving electrode, the second wiring portion, and the pad as viewed from the surface side of the first retardation plate.
  • FIG. 6 is a partially enlarged plan view showing a part of the sensor electrode in an enlarged manner.
  • FIG. 1 is an overall perspective view of the touch sensor according to the first embodiment.
  • FIG. 2 is a sectional view taken along line II-II of FIG.
  • FIG. 3 is a perspective view schematically showing each configuration provided on the first retardation plate when viewed from the front surface side of the first retardation
  • FIG. 7 is a schematic view showing the connection state between the first retardation plate and the flexible wiring board as viewed from the surface side of the first retardation plate.
  • FIG. 8 is a cross-sectional view schematically showing a cross-sectional state of thin wires constituting the receiving electrode.
  • FIG. 9 is a cross-sectional view schematically showing a cross-sectional state of the thin lines constituting the transmission electrode.
  • FIG. 10 is a cross-sectional view schematically showing a cross-sectional state after the groove portion is formed in the first groove forming layer and the adhesion layer and the seed layer are formed in the groove portion.
  • FIG. 11 is a cross-sectional view schematically showing a cross-sectional state after copper is laminated and formed on the adhesion layer by electroplating.
  • FIG. 12 is a cross-sectional view schematically showing a cross-sectional state after forming the plating layer.
  • FIG. 13 is a view corresponding to FIG. 2 showing a cross-sectional state of the touch
  • FIG. 1 shows the entire touch sensor 1 according to the first embodiment of the present disclosure.
  • the touch sensor 1 is a liquid crystal display (LCD: Liquid Crystal) exemplified as a display device.
  • Display 100 (see FIG. 2) is a capacitance type sensor type input device.
  • the touch sensor 1 is used as an input device for, for example, in-vehicle devices such as car navigation systems, personal computer display devices, mobile phones, personal digital assistants, portable game machines, copiers, ticket vending machines, automatic cash deposit machines, watches, and the like. Used.
  • the side where the operation surface 4 of the cover member 2 described later is located (the visual side of the touch sensor 1) is referred to as the "front side” of the touch sensor 1, and the opposite side is referred to as the "back side” of the touch sensor 1.
  • the positional relationship of each element constituting the sensor 1 shall be determined. Further, in the embodiment of the present disclosure, for convenience of explanation, the direction from the left side to the right side on the paper surface of each figure is defined as the X direction, while the direction from the lower side to the upper side on the paper surface of each figure is defined as the Y direction. do.
  • the touch sensor 1 includes a cover member 2 having light transmission.
  • the cover member 2 is made of, for example, a cover glass or a plastic cover lens.
  • the cover member 2 is formed, for example, in the shape of a rectangular plate in a plan view.
  • the cover member 2 is fixed to the surface side of the first retardation plate 6 described later by, for example, an adhesive layer 8 made of an optical adhesive (OCA: Optical Clear Adhesive) (see FIG. 2).
  • OCA Optical Clear Adhesive
  • the adhesive layer 8 may have the same size and shape as the linear polarizing plate 5 described later.
  • the thickness of the adhesive layer 8 is preferably 25 to 250 ⁇ m.
  • the adhesive layer 8 may be formed in a hollow shape in which a portion corresponding to the view area V described later is omitted.
  • a decorative portion 3 having a substantially frame shape in a dark color such as black is formed by screen printing or the like.
  • the inner rectangular area surrounded by the decorative portion 3 is a translucent view area V. That is, the user can obtain visual information from the liquid crystal display 100 arranged on the back side of the touch sensor 1 through the view area V.
  • the surface of the cover member 2 in the view area V is configured as an operation surface 4 to which the user's fingers or the like come into contact with the touch operation.
  • the touch sensor 1 includes two linear polarizing plates 5.
  • the linear polarizing plate 5 is formed in a substantially rectangular shape in a plan view.
  • the linear polarizing plate 5 is laminated and arranged on the front surface side (visual recognition side) and the back surface side of the liquid crystal display 100 via the adhesive layer 8. Further, a backlight (not shown) for irradiating light toward the liquid crystal display display 100 is provided on the back surface side of the linear polarizing plate 5 laminated and arranged on the back surface side of the liquid crystal display display 100.
  • the linear polarizing plate 5 located on the surface side (visual recognition side) of the liquid crystal display display 100 is configured to convert the light emitted from the liquid crystal display display 100 into linear polarization.
  • the angle formed by the absorption axis of the linear polarizing plate 5 and the slow axis (optical axis) of the first retardation plate 6 described later is substantially 45 ° or 135 °. ..
  • the above “substantially 45 ° or 135 °” is in the range of 45 ⁇ 5 ° or 135 ⁇ 5 °.
  • the linear polarizing plate 5 includes, for example, a PVA polarizing layer in which a dichroic dye (iodine, a dichroic dye, etc.) is adsorbed and oriented with respect to a uniaxially stretched polyvinyl alcohol-based resin film (PVA), and the above.
  • a polymer film protecting film
  • the protective film is made of, for example, a transparent resin material.
  • this transparent resin material examples include acetyl cellulose resin represented by triacetyl cellulose and diacetyl cellulose, methacrylic resin represented by polymethyl methacrylate, polyester resin, polyolefin resin, polycarbonate resin, polyether ether ketone resin, and polysulfone. Examples include resin.
  • the thickness of the PVA polarizing layer is, for example, 1 to 100 ⁇ m, preferably 5 to 50 ⁇ m.
  • the touch sensor 1 includes a first retardation plate 6.
  • the first retardation plate 6 is arranged on the visual recognition side of the touch sensor 1 with respect to the linear polarizing plate 5. Specifically, the first retardation plate 6 is laminated and arranged between the linear polarizing plate 5 located on the visual recognition side of the liquid crystal display 100 and the cover member 2 via the adhesive layer 8. As shown in FIGS. 3 to 5, the first retardation plate 6 has a substantially rectangular shape in a plan view. Further, the first retardation plate 6 has the same size as the linear polarizing plate 5. The first retardation plate 6 may be formed to be larger than the linear polarizing plate 5.
  • the first phase difference plate 6 has a phase difference of ⁇ / 4. “Having a phase difference of ⁇ / 4” means that the phase difference (alteration Re) given to the light transmitted through the first retardation plate 6 in the stacking direction is about 1/4 times the wavelength ⁇ of the light. Point to. That is, the first phase difference plate 6 has a function of delaying the phase of light passing in the stacking direction by ⁇ / 4.
  • the first retardation plate 6 converts the linear polarization from the linear polarizing plate 5 into right circular polarization or left circular polarization by the phase difference (specifically, the vibration direction of the linear polarization is changed by the linear polarizing plate 5). It is configured to match the absorption axis).
  • the above-mentioned "circular polarization” also includes elliptically polarized light.
  • the wavelength dispersibility of the first retardation plate 6 it can be widely used from normal dispersibility to dedispersity as long as it substantially exhibits the wavelength dispersion function.
  • the wavelength dispersibility is preferably reverse dispersibility. If the wavelength dispersibility is dedispersity, it is possible to develop the depolarization function described later without depending on the wavelength.
  • the first retardation plate 6 is configured so that the retardation value Re at a wavelength of 589 nm is 130 nm to 170 nm.
  • the slow axis of the first retardation plate 6 is 45 ⁇ 10 degrees with respect to the transmission axis of the linear polarizing plate 5.
  • the first retardation plate 6 has a relationship of "Re450 / Re550 ⁇ 1.0 and Re550 / Re650> 1.0".
  • the first retardation plate 6 has a base material 6a.
  • the base material 6a include a structure in which a liquid crystal layer containing a polymer of a polymerizable liquid crystal compound is supported by a film, or a stretched film formed by uniaxially or biaxially stretching a polymer material.
  • the material of the base material 6a include resin materials such as cycloolefin-based resin, polycarbonate-based resin, and acrylic-based resin. The glass transition temperature inherent in these resin materials is lower than 140 ° C. The optical properties of the liquid crystal layer containing the polymer of the polymerizable liquid crystal compound can be adjusted by the orientation state of the polymerizable liquid crystal compound.
  • the orientation angle of the base material 6a is such that the linear polarizing plate 5 and the first retardation plate 6 are laminated.
  • the angle formed by the slow axis of the first retardation plate 6 and the transmission axis of the linear polarizing plate 5 may be adjusted to be substantially 45 ° or 135 °.
  • the first retardation plate 6 has a first groove forming layer 6b and a second groove forming layer 6c.
  • the first groove forming layer 6b and the second groove forming layer 6c are layers for forming a plurality of groove portions 7, which will be described later.
  • the first groove forming layer 6b and the second groove forming layer 6c are made of an insulating and permeable resin material.
  • the first groove forming layer 6b is laminated and arranged on the front side of the base material 6a.
  • the surface of the first groove forming layer 6b faces the back surface of the linear polarizing plate 5.
  • the thickness of the first groove forming layer 6b is, for example, 1.8 to 4.2 ⁇ m.
  • the second groove forming layer 6c is laminated and arranged on the back side of the base material 6a.
  • the thickness of the second groove forming layer 6c is, for example, 1.8 to 4.2 ⁇ m.
  • each of the first groove forming layer 6b and the second groove forming layer 6c is provided with a plurality of groove portions 7.
  • the plurality of groove portions 7 are one element for constituting each of the sensor electrode 10, the wiring portion 30, and the pad 33, which will be described later.
  • Each groove 7 is formed in a bottomed shape.
  • the depth of each groove 7 is set to, for example, 0.5 to 3.0 ⁇ m.
  • fillets may be formed at the corners between the side surface and the bottom surface of each groove portion 7 (see FIGS. 8 and 9).
  • the side surface of each groove portion 7 may be inclined so as to gradually expand from the bottom surface of the groove portion 7 toward the opening. Further, the fillet may not be formed at the corner portion.
  • the touch sensor 1 includes a plurality of sensor electrodes 10 by a capacitance method.
  • the plurality of sensor electrodes 10 are provided on the first retardation plate 6.
  • the plurality of sensor electrodes 10 are composed of a plurality of transmission electrodes 11 and a plurality of reception electrodes 12.
  • the plurality of transmitting electrodes 11 and the plurality of receiving electrodes 12 are arranged in the view area V.
  • the touch sensor 1 can detect a touch operation by a user's finger (detection target) that comes into contact with the operation surface 4 of the cover member 2 through a plurality of transmission electrodes 11 and a plurality of reception electrodes 12 located in the view area V. It has become.
  • Each transmission electrode 11 is connected to a drive circuit (not shown) via a flexible wiring board 40 described later. Each transmission electrode 11 is configured to radiate an electric field to the surroundings by this drive circuit. On the other hand, each receiving electrode 12 is connected to a detection circuit (not shown) via a flexible wiring board 40 described later. Each receiving electrode 12 is configured to receive an electric field radiated from each transmitting electrode 11.
  • each transmitting electrode 11 and each receiving electrode 12 are arranged so as to intersect (orthogonally) with each other in a plan view.
  • a node is formed in the region where the transmitting electrode 11 and the receiving electrode 12 overlap each other. This node is configured as a region where capacitance can be generated.
  • a plurality of transmission electrodes 11 are provided on the back surface of the first retardation plate 6. That is, the plurality of transmission electrodes 11 are arranged on the opposite side of the touch sensor 1 on the visual recognition side in the first retardation plate 6. Each transmission electrode 11 extends along the long side direction (X direction) of the first retardation plate 6. The plurality of transmission electrodes 11 are arranged side by side in the short side direction (Y direction) of the first retardation plate 6.
  • a plurality of receiving electrodes 12 are provided on the surface of the first retardation plate 6. That is, the plurality of receiving electrodes 12 are arranged on the visual recognition side (operation surface 4 side) of the touch sensor 1 in the first retardation plate 6.
  • the plurality of receiving electrodes 12 are insulated from the plurality of transmitting electrodes 11 via the first retardation plate 6.
  • Each receiving electrode 12 extends along the short side direction (Y direction) of the first retardation plate 6.
  • the plurality of receiving electrodes 12 are arranged side by side at intervals in the long side direction (X direction) of the first retardation plate 6.
  • each of the transmitting electrode 11 and the receiving electrode 12 includes a mesh pattern 18 formed by arranging a plurality of cells 19 composed of a plurality of thin wires 20.
  • the mesh pattern 18 is a mesh structure formed by regularly arranging a plurality of cells 19 composed of a plurality of fine wires 20 extending diagonally with respect to each of the X direction and the Y direction.
  • Each cell 19 has a diamond shape, for example, in a plan view.
  • the plurality of cells 19 are formed to have the same size as each other.
  • the line width of the thin wire 20 constituting each of the transmitting electrode 11 and the receiving electrode 12 is preferably set to 0.5 to 2.0 ⁇ m.
  • each thin wire 20 includes a conductive material embedded in each groove 7.
  • Each thin wire 20 is composed of, for example, an adhesion layer 21, a conductive layer 22 (seed layer 23 and a plating layer 24 described later), and a blackening layer 25.
  • the adhesion layer 21 is an element for ensuring the adhesion of the conductive layer 22 to the groove portion 7. Further, the close contact layer 21 has a function of making it difficult for the user to visually recognize the thin wire 20 when viewed from the operation surface 4 side.
  • the adhesion layer 21 is a metal nitride or metal oxide containing at least one metal selected from the group consisting of, for example, Ti, Al, V, W, Ta, Si, Cr, Ag, Mo, Cu, and Zn. It is a metal layer composed of.
  • the adhesion layer 21 may be one layer or a laminated body in which a plurality of layers having different compositions are laminated.
  • the adhesion layer 21 is laminated and arranged in a thin film on the groove 7 by, for example, thin film deposition or sputtering.
  • the conductive layer 22 is an element for ensuring the conductivity of the thin wire 20.
  • the conductive layer 22 is composed of a seed layer 23 and a plating layer 24. Both the seed layer 23 and the plating layer 24 are made of a conductive material.
  • a conductive metal such as copper (Cu) or silver (Ag) is suitable.
  • a transparent conductive material having light transmittance such as a conductive resin material, indium tin oxide, tin oxide may be used.
  • the seed layer 23 has a function of enhancing the adhesion between the adhesion layer 21 and the plating layer 24.
  • the seed layer 23 functions as a cathode for laminating a plating solution such as copper (Cu) on the adhesion layer 21 in the electroplating process for forming the plating layer 24, for example.
  • the seed layer 23 is laminated and arranged in a thin film on the close contact layer 21 by, for example, thin film deposition or sputtering. If the plating layer 24 can be formed without the seed layer 23, the seed layer 23 may not be provided.
  • the plating layer 24 is formed by a plating process.
  • the plating layer 24 is laminated and arranged with respect to the seed layer 23 by the electroplating treatment.
  • the electroplating treatment is performed, the seed layer 23 and the plating layer 24 are integrally formed, and the interface between the seed layer 23 and the plating layer 24 cannot be discriminated.
  • the plating treatment is not limited to the electroplating treatment, but includes an electroless plating treatment, a hot-dip plating treatment, a vacuum plating treatment, and the like.
  • the blackening layer 25 has a function of making it difficult for the user to see the thin line 20 when viewed from the operation surface 4 side.
  • the upper layer portion of the plating layer 24 is replaced with the blackening layer 25.
  • the touch sensor 1 includes a plurality of wiring portions 30.
  • the plurality of wiring units 30 are elements for electrically connecting the plurality of transmission electrodes 11 and the plurality of reception electrodes 12 to external circuits (drive circuit and detection circuit described above) (not shown).
  • the plurality of wiring units 30 are composed of a plurality of first wiring units 31 and a plurality of second wiring units 32.
  • the plurality of first wiring portions 31 and the plurality of second wiring portions 32 are arranged outside the view area V. Specifically, the plurality of first wiring portions 31 and the plurality of second wiring portions 32 are arranged at positions overlapping with the decorative portion 3 (see FIGS. 1 and 2) in a plan view viewed from the operation surface 4 side. There is. That is, the plurality of first wiring portions 31 and the plurality of second wiring portions 32 cannot be visually recognized from the operation surface 4 side by the decorative portion 3.
  • the plurality of first wiring portions 31 are formed on the back surface of the first retardation plate 6. One end of each first wiring portion 31 is electrically connected to the end of each transmission electrode 11 (the end located on the left side of the paper in FIG. 4). The plurality of first wiring portions 31 are arranged so that the other ends thereof are focused at substantially the center of the lower side of the first retardation plate 6.
  • each second wiring portion 32 is formed on the surface of the first retardation plate 6.
  • One end of each second wiring portion 32 is electrically connected to the end portion of each receiving electrode 12 (the end portion located on the lower side of the paper surface in FIG. 5).
  • the plurality of second wiring portions 32 are arranged so that the other ends thereof are focused at substantially the center of the lower side of the first retardation plate 6.
  • each of the first and second wiring portions 31, 32 is made of at least one thin wire 20 made of a conductive material embedded in each groove portion 7 located on each of the front surface and the back surface of the first retardation plate 6. It is composed of. Since the thin wire 20 is the same as the thin wire 20 constituting the sensor electrode 10, detailed description thereof will be omitted.
  • each pad 33 is composed of thin wires 20 like the first and second wiring portions 31 and 32.
  • the touch sensor 1 includes a flexible wiring board 40.
  • the flexible wiring board 40 is configured to be flexible and its electrical characteristics do not change even in a deformed state.
  • the flexible wiring board 40 is made of a flexible insulating film such as polyimide (PI), polyethylene terephthalate (PET), or polyethylene naphthalate (PEN).
  • the flexible wiring board 40 has a wiring board main body 41, a first connection portion 42, and a second connection portion 43.
  • the first connection portion 42 and the second connection portion 43 are formed integrally with the wiring board main body 41 and are formed so as to branch in two directions from one end side of the wiring board main body 41.
  • the first connection portion 42 is fixed to the peripheral edge portion of the back surface of the first retardation plate 6 by, for example, an anisotropic conductive adhesive (not shown). In this fixed state, the first connection portion 42 and the plurality of first wiring portions 31 are electrically connected.
  • the second connecting portion 43 is fixed to the peripheral edge of the surface of the first retardation plate 6 by, for example, an anisotropic conductive adhesive (not shown). In this fixed state, the second connecting portion 43 and the plurality of second wiring portions 32 are electrically connected.
  • Step of forming grooves and fine wires The process of forming the groove portion 7 and the thin wire 20 will be described with reference to FIGS. 10 to 12.
  • the thin wire 20 forming step is performed in a temperature atmosphere lower than the glass transition temperature of the first retardation plate 6. In the following description, only the groove portion 7 formed in the first groove forming layer 6b and the thin wire 20 constituting the receiving electrode 12 will be described.
  • the groove portion 7 is formed in the first groove forming layer 6b.
  • fillets may be formed at the corners of the side surface and the bottom surface of the groove portion 7.
  • the metal layer composed of the above-mentioned metal nitride or metal oxide is formed into a thin film on the surface and the groove portion 7 of the first groove forming layer 6b by, for example, vapor deposition or sputtering.
  • the adhesion layer 21 is formed in the groove portion 7.
  • the adhesion layer 21 is formed, for example, copper (Cu) is formed into a thin film on the adhesion layer 21 by, for example, vapor deposition or sputtering. By this film formation, the seed layer 23 is formed in the groove portion 7.
  • Cu copper
  • the seed layer 23 is formed, copper is laminated over the entire area of the seed layer 23 with the seed layer 23 as a cathode by, for example, electroplating.
  • the amount of copper laminated is adjusted so that the copper fills the groove 7.
  • the bath temperature of the electroplating treatment is 30 ° C to 70 ° C. That is, the electroplating process is performed in a temperature atmosphere lower than the glass transition temperature of the first retardation plate 6.
  • the plating layer 24 is formed in the groove portion 7.
  • the plating layer 24 has a large number of fine crystal grains having a substantially circular shape and / or a substantially elliptical shape having a particle size of about several ⁇ m. Generally, it has a layered structure.
  • the blackening layer 25 is formed by performing a blackening treatment (see FIG. 8). Finally, a rust preventive treatment is performed on the blackened layer 25 to form a rust preventive film (not shown).
  • the groove portion 7 located in the second groove forming layer 6c is formed by the same process as the groove portion 7 located in the first groove forming layer 6b. Further, the thin wire 20 constituting each of the transmission electrode 11, the first wiring portion 31, the second wiring portion 32, and the pad 33 is formed by the same process as the thin wire 20 constituting the reception electrode 12.
  • the touch sensor 1 has a linear polarizing plate 5 arranged on the viewing side of the liquid crystal display 100 and a ⁇ / 4 phase difference arranged on the viewing side of the touch sensor 1 with respect to the linear polarizing plate 5. It is provided with a first retardation plate 6 having the above.
  • the angle formed by the absorption axis of the linear polarizing plate 5 and the slow axis (optical axis) of the first retardation plate 6 is substantially 45 ° or 135 °.
  • the light thus converted has substantially the same polarization state as the light emitted from the backlight (light that is not polarized).
  • the touch sensor 1 incorporated in the liquid crystal display 100 while wearing polarized sunglasses, the occurrence of iridescent unevenness on the operation surface 4 is suppressed and the use is performed.
  • the phenomenon that the operation surface 4 becomes so dark that the operation surface 4 cannot be visually recognized depends on the angle at which the person looks at the touch sensor 1. That is, the touch sensor 1 has a function (hereinafter referred to as "depolarization function") for eliminating the polarization characteristics of the light emitted from the liquid crystal display 100 (display device) through the linear polarizing plate 5.
  • depolarization function a function for eliminating the polarization characteristics of the light emitted from the liquid crystal display 100 (display device) through the linear polarizing plate 5.
  • each thin wire 20 constituting the sensor electrode 10 includes a plating layer 24 made of a conductive metal.
  • the annealing treatment for example, the above-mentioned photosensitive resin layer at a high temperature of 140 ° C.
  • the transparent conductive film for example, ITO
  • the process of heating for about 30 minutes is unnecessary. That is, the plating layer 24 is generally formed in an environment where high temperature heat is not applied. Specifically, the plating layer 24 is usually formed in a temperature atmosphere lower than the glass transition temperature inherent in the first retardation plate 6.
  • the first retardation plate 6 is less likely to be affected by high-temperature heat, and the physical properties of the first retardation plate 6 are less likely to change. Specifically, in the configuration in which the thin wire 20 including the plating layer 24 is formed on the first retardation plate 6, the retardation value of the first retardation plate 6 in the glass state below the glass transition temperature is maintained. Since the phase difference value of the first retardation plate 6 is maintained in this way, the absorption axis of the linear polarizing plate 5 located on the visual recognition side of the liquid crystal display display 100 and the slow axis of the first retardation plate 6 The angle formed with (optical axis) is substantially maintained at 45 ° or 135 °. Therefore, the touch sensor 1 according to the first embodiment can maintain the above-mentioned polarization elimination function.
  • the touch sensor 1 since the plurality of sensor electrodes 10 are provided on the first retardation plate 6, it is not necessary to separately provide a substrate for forming the plurality of sensor electrodes 10. As a result, the number of stacked touch sensors 1 is relatively reduced, and the manufacturing cost of the touch sensor 1 is suppressed.
  • Modification 1 of the first embodiment As a modification of the first embodiment, for example, a ⁇ / 2 retardation plate (not shown) having a phase difference of ⁇ / 2 is laminated between the linear polarizing plate 5 and the first retardation plate 6. You may. Further, in this modification, for example, a plurality of receiving electrodes 12 are provided on the surface of the first retardation plate 6, and a plurality of transmitting electrodes 11 are provided on either the front surface or the back surface of the ⁇ / 2 retardation plate. You may.
  • the above-mentioned "having a phase difference of ⁇ / 2” means that the phase difference (alteration Re) given to the light transmitted through the ⁇ / 2 retardation plate in the stacking direction is about 1/2 of the wavelength ⁇ of the light.
  • the ⁇ / 2 phase difference plate has a function of delaying the phase of light passing in the stacking direction by ⁇ / 2.
  • the ⁇ / 2 phase difference plate is configured so that the phase difference value Re at a wavelength of 589 nm is 270 nm to 310 nm.
  • the angle between the slow axis of the first retardation plate 6 and the transmission axis of the linear polarizing plate 5 is ⁇ , and the angle between the slow axis of the ⁇ / 2 retardation plate and the transmission axis of the linear polarizing plate 5.
  • the angle ⁇ is 90 ° and the angle ⁇ is 22.5 °. More preferably, the angle ⁇ is 75 ° and the angle ⁇ is 15 °.
  • a backlight (not shown) is provided on the back surface side of the linear polarizing plate 5 laminated and arranged on the back surface side of the liquid crystal display 100, but the present invention is not limited to this embodiment.
  • a reflector (not shown) for reflecting external light incident on the operation surface 4 of the touch sensor 1 may be installed on the back surface of the liquid crystal display 100. When the reflector is installed, it is not necessary to provide the linear polarizing plate 5 on the back surface side of the liquid crystal display 100.
  • FIG. 13 shows the touch sensor 1 according to the second embodiment of the present disclosure.
  • the second embodiment shows the configuration of the touch sensor 1 when applied to the self-luminous display 200 exemplified as the display device.
  • the main configuration of the touch sensor 1 according to the second embodiment is the same as the configuration of the touch sensor 1 according to the first embodiment. Therefore, in the following description, the same parts as those in FIGS. 1 to 12 are designated by the same reference numerals, and detailed description thereof will be omitted.
  • the self-luminous display 200 is composed of, for example, an organic EL display (OLED: Organic Light Emitting Diode).
  • OLED Organic Light Emitting Diode
  • an organic EL display is, for example, laminated on a transparent substrate, a transparent electrode formed of a transparent electrode material on the surface of the transparent substrate, a light emitting layer made of an EL material laminated on the transparent electrode, and a light emitting layer. It also has a back electrode formed so as to face the transparent electrode.
  • the self-luminous display 200 is not limited to the organic EL display, and may be, for example, a micro LED panel.
  • one linear polarizing plate 5 is arranged on the surface side (visual recognition side) of the self-luminous display 200.
  • the linear polarizing plate 5 of this embodiment converts the external light incident on the touch sensor 1 from the outside of the touch sensor 1 (that is, the operation surface 4 side) into linear polarization, and the external light is reflected by the self-luminous display 200. It is configured to block reflected light. This makes it possible to suppress the reflection of the external light incident on the touch sensor 1.
  • a second retardation plate 9 is laminated and arranged between the self-luminous display 200 and the linear polarizing plate 5 via the adhesive layers 8 and 8.
  • the second phase difference plate 9 has a phase difference of ⁇ / 4 like the first phase difference plate 6.
  • the second retardation plate 9 converts the linearly polarized light from the linear polarizing plate 5 into right-handed circularly polarized light or left-handed circularly polarized light by the phase difference of ⁇ / 4, and the left-handed circularly polarized light or right-handed circle reflected by the self-luminous display 200. It is configured to convert the polarization into linear polarization again (specifically, to match the vibration direction of the linear polarization with the absorption axis of the linear polarizing plate 5).
  • the above-mentioned "circular polarization” includes elliptically polarized light as long as it substantially exhibits the antireflection function. Since the specific configuration of the second retardation plate 9 is the same as the configuration of the first retardation plate 6 except that a plurality of groove portions 7 are not provided, detailed description thereof will be omitted. ..
  • the first retardation plate 6 is provided, which is arranged on the visual recognition side of the touch sensor 1 with respect to the linear polarizing plate 5.
  • the first retardation plate 6 is provided with a sensor electrode 10 made of a plurality of conductive thin wires 20, and each thin wire 20 constituting the sensor electrode 10 includes a plating layer 24 made of a conductive metal. Therefore, even with the touch sensor 1 applied to the self-luminous display 200 as in the second embodiment, the polarization elimination function can be maintained as in the first embodiment.
  • a ⁇ / 2 retardation plate (not shown) may be arranged between the linear polarizing plate 5 and the second retardation plate 9.
  • the first phase difference plate 6 having a phase difference of ⁇ / 4 and the ⁇ / 2 phase difference plate the external light incident on the touch sensor 1 is reflected by the self-luminous display 200. It can be suppressed in a wide wavelength range. Since the configuration of the ⁇ / 2 retardation plate is the same as the configuration described in the first modification of the first embodiment, detailed description thereof will be omitted.
  • a substantially rectangular view area V is applied, but the present invention is not limited to this embodiment.
  • the view area V may have a polygonal shape such as a substantially circular shape or a pentagonal shape in a plan view.
  • each transmitting electrode 11 extends along the X direction, while the receiving electrode 12 extends along the Y direction, but the present invention is not limited to this embodiment. That is, each transmitting electrode 11 may extend along the Y direction, while each receiving electrode 12 may extend along the X direction.
  • the sensor electrode 10 is configured by the mesh pattern 18, but the present invention is not limited to this embodiment. That is, the sensor electrode 10 may be configured to have a pattern different from the mesh pattern 18 by the plurality of thin wires 20.
  • the touch sensor 1 in a state where the cover member 2 and the flexible wiring board 40 are attached to the first retardation plate 6 is shown, but the present invention is not limited to this embodiment. That is, the concept of the touch sensor 1 according to the present disclosure includes a state before the cover member 2, the flexible wiring board 40, and the like are attached to the first retardation plate 6. Further, the concept of the touch sensor 1 of the present disclosure is based on the above description in a long base material (for example, a long hoop-shaped member (not shown)) which is in a state before the first retardation plate 6 is formed. A configuration in which a plurality of sensor electrodes 10 are formed on the base material is also included.
  • a long base material for example, a long hoop-shaped member (not shown)
  • the first retardation plate is heated to a high temperature by using three types of samples A to C (see Table 1) applicable to the first retardation plate described in each of the above embodiments.
  • the change in the physical properties of the first retardation plate was measured and evaluated.
  • the first retardation plate described in each of the above embodiments is not limited to the materials of the samples A to C shown in this embodiment.
  • Sample A is a retardation film (ZD12, manufactured by Nippon Zeon Corporation) containing a cycloolefin resin as a main component.
  • the glass transition temperature Tg of sample A is 123 ° C.
  • the thickness of sample A is 48 ⁇ m.
  • Sample B is a retardation film (RM147, manufactured by Teijin Limited) containing a polycarbonate resin as a main component.
  • the glass transition temperature Tg of sample B is 138 ° C.
  • the thickness of sample B is 47 ⁇ m.
  • Sample C is a retardation film (ZF14, manufactured by Nippon Zeon Corporation) containing a cycloolefin resin as a main component.
  • the glass transition temperature Tg of sample C is 136 ° C.
  • the thickness of sample C is 29 ⁇ m.
  • sample A1 the samples used for measuring the phase difference value
  • sample B1 the samples used for measuring the phase difference value
  • sample C1 the samples used for evaluation of appearance change.
  • the samples that were used are referred to as “Sample A2”, “Sample B2”, and “Sample C2”.
  • each of sample A1, sample B1, and sample C1 was prepared so that the outer shape was 50 mm square.
  • Each of the sample A1, sample B1, and sample C1 thus prepared is placed in a predetermined constant temperature bath (KATO constant temperature) under the respective temperature atmospheres of 80 ° C., 90 ° C., 100 ° C., 110 ° C., 120 ° C., and 130 ° C. It was installed in a tank "SSE-43KT-AS”) and left for 30 minutes.
  • KATO constant temperature 80 ° C., 90 ° C., 100 ° C., 110 ° C., 120 ° C., and 130 ° C.
  • the phase difference value (unit: nm) of each sample was measured both before the start of leaving and after leaving.
  • WPA-100 manufactured by Photonic Lattice
  • the phase difference value at each measurement point was measured by the above measuring instrument.
  • the average value (unit: nm) of the phase difference values of each sample before and after standing in an atmosphere of each temperature was calculated. Further, in an atmosphere of each temperature, the rate of change (%) of the phase difference value of each sample was calculated based on the average value before leaving and the average value before leaving. Further, the standard deviation (unit: nm) of the phase difference value of each sample before and after standing in an atmosphere of each temperature was calculated.
  • 20 evaluators visually evaluated the presence or absence of changes in the appearance of each of Sample A2, Sample B2, and Sample C2 before and after leaving.
  • the slow axis of each of the sample A2, the sample B2, and the sample C2 and the absorption axis of the linear polarizing plate (manufacturer: Nitto Denko, model number: HDZQ1473XJ1ZZ18) prepared in advance are used.
  • a laminate was prepared by laminating each sample and a linear polarizing plate with an adhesive layer so that the temperature was 45 °.
  • each evaluator evaluated the presence or absence of change in appearance of the laminated body before and after leaving by visually recognizing the reflected light due to the external light incident on the linear polarizing plate side.
  • the standard deviation of the phase difference value of the sample A1 was "22.706 nm" after being left in a temperature atmosphere of 130 ° C. for 30 minutes, whereas it was in a temperature atmosphere of 120 ° C. After leaving for 30 minutes, the standard deviation was "2.716 nm". That is, after being left in a temperature atmosphere of 120 ° C. for 30 minutes, the standard deviation is smaller than that after being left in a temperature atmosphere of 130 ° C. for 30 minutes, and the variation in the phase difference value is relatively suppressed. Was there.
  • the appearance change of the sample A2 was "x" after being left in a temperature atmosphere of 130 ° C. for 30 minutes, whereas the appearance change was "x” after being left in a temperature atmosphere of 120 ° C. for 30 minutes. It was improved to " ⁇ ".
  • the rate of change of the phase difference value of sample A1 is "-0.58%".
  • the standard deviation after leaving for 30 minutes was "1.129 nm”. That is, in the sample A1, the phase difference value was further stabilized in the temperature atmosphere of 100 ° C. (Tg ⁇ 81.3%) as compared with the temperature atmosphere of 120 ° C.
  • the change in appearance was improved to " ⁇ " in a temperature atmosphere of 100 ° C.
  • the standard deviation of the phase difference value of sample B1 was "7.188 nm" after being left in a temperature atmosphere of 130 ° C. for 30 minutes, whereas it was in a temperature atmosphere of 120 ° C. After leaving for 30 minutes, the standard deviation was "1.968 nm". That is, after being left in a temperature atmosphere of 120 ° C. for 30 minutes, the standard deviation is smaller than that after being left in a temperature atmosphere of 130 ° C. for 30 minutes, and the variation in the phase difference value is relatively suppressed. Was there.
  • the rate of change of the phase difference value of sample B1 is "0.66%".
  • the standard deviation after being left for 30 minutes was "1.693 nm”. That is, in the sample B1, the phase difference value was further stabilized in the temperature atmosphere of 100 ° C. (Tg ⁇ 79.7%) as compared with the temperature atmosphere of 120 ° C.
  • the change in appearance was improved to " ⁇ " in a temperature atmosphere of 100 ° C.
  • the standard deviation of the phase difference value of the sample C1 was "5.026 nm" after being left for 30 minutes in a temperature atmosphere of 130 ° C., whereas it was in a temperature atmosphere of 120 ° C. After leaving for 30 minutes, the standard deviation was "2.137 nm". That is, after being left in a temperature atmosphere of 120 ° C. for 30 minutes, the standard deviation is smaller than that after being left in a temperature atmosphere of 130 ° C. for 30 minutes, and the variation in the phase difference value is relatively suppressed. Was there.
  • the appearance change of the sample C2 was "x" after being left in a temperature atmosphere of 130 ° C. for 30 minutes, whereas the appearance change was "x" after being left in a temperature atmosphere of 120 ° C. for 30 minutes. It was improved to " ⁇ ".
  • the rate of change of the phase difference value of sample C1 is "-2.98%".
  • the standard deviation after leaving for 30 minutes was "0.876 nm”. That is, in the sample C1, the phase difference value was further stabilized in the temperature atmosphere of 110 ° C. (Tg ⁇ 80.9%) as compared with the temperature atmosphere of 120 ° C.
  • the retardation value is stable and the appearance is unlikely to change under a temperature atmosphere of 120 ° C. regardless of the material of the first retardation plate. That is, in the touch sensor manufacturing method according to each of the above embodiments, if the step of forming each thin wire is performed in a temperature atmosphere of 120 ° C. or lower, the retardation value of the first retardation plate is stable and the phase difference value is stable. The appearance of the first retardation plate is less likely to change.
  • each fine wire is formed in a temperature atmosphere equal to or lower than the temperature corresponding to 81.3% of the glass transition temperature Tg of the first retardation plate, any of Samples A to C. However (that is, regardless of the material of the first retardation plate), the retardation value of the first retardation plate is further stabilized, and the appearance of the first retardation plate is less likely to change. As a result, in the touch sensor, it is possible to prevent the depolarization function from being impaired.
  • This disclosure can be industrially used as a capacitive touch sensor applied to a display device.

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Abstract

Un capteur tactile (1) est pourvu : d'une plaque de polarisation linéaire (5) qui est disposée sur le côté de reconnaissance visuelle d'un dispositif d'affichage ; et d'une première plaque de différence de phase (6) qui a une différence de phase λ/4 et qui est disposée sur le côté de reconnaissance visuelle du capteur tactile (1) par comparaison avec la plaque de polarisation linéaire (5). La première plaque de différence de phase (6) est pourvue d'électrodes de capteur (10) constituées d'une pluralité de fils fins (20) ayant une conductivité électrique. Chacun des fils fins (20) comprend une couche de placage (24) formée d'un métal conducteur.
PCT/JP2021/016348 2020-09-29 2021-04-22 Capteur tactile et son procédé de fabrication WO2022070487A1 (fr)

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Cited By (1)

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WO2024058056A1 (fr) * 2022-09-12 2024-03-21 パナソニックＩｐマネジメント株式会社 Surface à sélection de fréquence

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014137427A (ja) * 2013-01-15 2014-07-28 Nissha Printing Co Ltd 偏光サングラス対応のタッチ機能付偏光板とその製造方法、液晶表示装置
JP2014535111A (ja) * 2011-10-25 2014-12-25 ユニピクセル ディスプレイズ，インコーポレーテッド 柔軟な誘電体基板上に導電性の顕微鏡的なパターンを印刷するために巻き出し・巻き取り式のプロセスを用いる容量式タッチセンサ回路の製造方法
JP2018072915A (ja) * 2016-10-25 2018-05-10 ホシデン株式会社 タッチ入力装置
JP2018513501A (ja) * 2015-04-24 2018-05-24 エルジー イノテック カンパニー リミテッド タッチウィンドウ
JP2020154641A (ja) * 2019-03-19 2020-09-24 パナソニックＩｐマネジメント株式会社 タッチパネル装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014535111A (ja) * 2011-10-25 2014-12-25 ユニピクセル ディスプレイズ，インコーポレーテッド 柔軟な誘電体基板上に導電性の顕微鏡的なパターンを印刷するために巻き出し・巻き取り式のプロセスを用いる容量式タッチセンサ回路の製造方法
JP2014137427A (ja) * 2013-01-15 2014-07-28 Nissha Printing Co Ltd 偏光サングラス対応のタッチ機能付偏光板とその製造方法、液晶表示装置
JP2018513501A (ja) * 2015-04-24 2018-05-24 エルジー イノテック カンパニー リミテッド タッチウィンドウ
JP2018072915A (ja) * 2016-10-25 2018-05-10 ホシデン株式会社 タッチ入力装置
JP2020154641A (ja) * 2019-03-19 2020-09-24 パナソニックＩｐマネジメント株式会社 タッチパネル装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024058056A1 (fr) * 2022-09-12 2024-03-21 パナソニックＩｐマネジメント株式会社 Surface à sélection de fréquence

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