WO2022062424A1 - 一种mems微泵测试方法及系统 - Google Patents

一种mems微泵测试方法及系统 Download PDF

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Publication number
WO2022062424A1
WO2022062424A1 PCT/CN2021/093486 CN2021093486W WO2022062424A1 WO 2022062424 A1 WO2022062424 A1 WO 2022062424A1 CN 2021093486 W CN2021093486 W CN 2021093486W WO 2022062424 A1 WO2022062424 A1 WO 2022062424A1
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liquid storage
storage assembly
liquid
micropump
pressure
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PCT/CN2021/093486
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English (en)
French (fr)
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王永光
陈义
卞达
赵晓燕
郭永信
赵永武
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苏州大学
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Priority to US17/617,576 priority Critical patent/US20220307492A1/en
Publication of WO2022062424A1 publication Critical patent/WO2022062424A1/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B51/00—Testing machines, pumps, or pumping installations

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  • the invention relates to the technical field of MEMS micro-pumps, in particular to a MEMS micro-pump testing method and system.
  • the conventional test methods are mainly manual testing, generally through the liquid column pressed out by the micro-pump.
  • the outlet pressure is calculated from the height.
  • this test method cannot only measure the flow rate by directly controlling the outlet pressure, that is, it cannot test the output liquid volume and flow rate of the MEMS micropump under a specific pressure.
  • the accuracy of the manual test is The degree is not high.
  • the present invention has been proposed in view of the above-mentioned existing problems.
  • the present invention provides a MEMS testing method and system, which can accurately test the output liquid volume and flow rate of the MEMS micropump under a specific pressure.
  • the present invention provides the following technical solutions: including: constructing a control model based on a least squares support vector machine; judging the pressure in the liquid storage assembly and the preset first threshold and second threshold in combination with the pressure value index, Obtain the judgment result; use the control model to read the judgment result, respectively control the liquid storage component, the liquid replenishment component, and the measuring device to communicate with and shut off; obtain the to-be-to-be-received component according to the change of the liquid in the measuring device. Test data of the micrometer pump.
  • the judgment includes, when the pressure in the liquid storage component is lower than the preset first threshold, the control model controls the fluid replacement component to be connected with the fluid replacement component.
  • the liquid storage assembly communicates with the liquid storage assembly and replenishes the liquid storage assembly; when the pressure in the liquid storage assembly reaches the first threshold value, the control model controls the liquid replenishment assembly and the liquid storage assembly to shut off and controls the waiting
  • a micrometer pump is in communication with the liquid reservoir assembly.
  • the control model controls the liquid storage assembly communicating with the measuring device; when the pressure in the liquid storage assembly reaches the second threshold value again, the control model controls the liquid storage assembly and the measuring device to be turned off.
  • constructing the control model includes selecting a radial basis function as the objective function of the control model, as follows:
  • x ⁇ x 1 ; x 2 ;...;x 14 ⁇ : the amplitude-frequency characteristic matrix composed of the amplitude-frequency characteristic vector of the pressure in the liquid storage assembly, y: the amplitude-frequency characteristic vector of the historical data of the measuring device , ⁇ : kernel width, that is, the distribution or range characteristics of the training sample number set.
  • the control model needs to be trained and tested, including initializing the penalty parameters C and ⁇ , using the training samples to train the objective function, and using the test samples to perform training and testing. Test; if the accuracy of the control model does not meet the requirements, the C and the ⁇ are assigned and optimized according to the error, until the accuracy of the test data meets the requirements, and the control model is output.
  • obtaining the test data includes: when the pressure in the liquid storage component reaches the first threshold, obtaining the first pressure in the measuring device a measuring scale; when the pressure in the liquid storage assembly reaches the second threshold again, obtain a second measuring scale in the measuring device; according to the second measuring scale and the first measuring scale Measure the difference between the scale and the inner diameter of the measuring device, and calculate the infusion volume of the micropump to be measured.
  • the MEMS test system includes: the fluid replacement component, the fluid storage component, the control module and the measuring device; the fluid replacement component and the fluid storage component are respectively It is connected with the micro-pump to be tested, the liquid storage assembly is connected to the micro-pump to be tested and the measuring device, respectively, and the control module is connected to the liquid replenishing assembly, the micro-pump to be tested, and the measuring device. The control end of the liquid storage assembly is connected.
  • the MEMS testing system of the present invention includes: when the pressure in the liquid storage assembly is lower than the preset first threshold, the control module controls the liquid replenishing assembly to communicate with the The liquid storage assembly communicates with the liquid storage assembly and replenishes the liquid storage assembly; when the pressure in the liquid storage assembly reaches the first threshold, the control module controls the liquid replenishment assembly and the liquid storage assembly to shut off and controls The micropump to be tested is communicated with the liquid storage assembly; when the pressure in the liquid storage assembly reaches the preset second threshold, the control module controls the liquid storage assembly and the measuring device When the pressure in the liquid storage assembly reaches the second threshold again, the control module controls the liquid storage assembly and the measuring device to turn off; according to the measurement result of the measuring device, the The liquid flow performance of the micropump to be tested.
  • the fluid replacement component includes a fluid replacement container and a fluid replacement pump
  • the first output port of the fluid replacement container is connected to the fluid storage component via the fluid replacement pump
  • the second output port of the fluid replenishing container is connected to the micropump to be tested
  • the control end of the fluid replenishing pump is connected to the control module.
  • the liquid storage assembly includes a liquid storage container, a pressure sensor and a switch; wherein, the first input port of the liquid storage container and the liquid replenishing assembly The second input port of the liquid storage container is connected to the micropump to be measured, the output port of the liquid storage container is connected to the measuring device via the switch element, and the pressure sensor is arranged on the Both the pressure sensor on the liquid storage container and the control end of the switch element are connected to the control module.
  • the present invention uses the liquid replenishing component and the liquid storage component to assist in the MEMS micropump test, which can test a small output liquid volume and flow rate, and at the same time, by controlling the pressure of the liquid storage component, the MEMS micropump can be tested in different The output liquid volume and flow under pressure, and the design of the one-way valve is used in the system to ensure that there is no liquid backflow during the test process, and the test accuracy is guaranteed.
  • FIG. 1 is a schematic flowchart of a method for testing a MEMS micropump according to a first embodiment of the present invention
  • FIG. 2 is a schematic diagram of a judgment control flow of the MEMS micropump testing method according to the first embodiment of the present invention
  • FIG. 3 is a schematic diagram of the structure distribution of the MEMS micropump test system according to the second embodiment of the present invention.
  • references herein to "one embodiment” or “an embodiment” refers to a particular feature, structure, or characteristic that may be included in at least one implementation of the present invention.
  • the appearances of "in one embodiment” in various places in this specification are not all referring to the same embodiment, nor are they separate or selectively mutually exclusive from other embodiments.
  • connection should be understood in a broad sense, for example: it may be a fixed connection, a detachable connection or an integral connection; it may also be a mechanical connection, an electrical connection or a direct connection.
  • the connection can also be indirectly connected through an intermediate medium, or it can be the internal communication between two elements.
  • a MEMS micropump testing method including:
  • the radial basis function is selected as the objective function of the control model, as follows:
  • x ⁇ x 1 ; x 2 ;...;x 14 ⁇ : the amplitude-frequency characteristic matrix composed of the amplitude-frequency characteristic vectors of the pressure in the liquid storage assembly, y: the amplitude-frequency characteristic vector of the historical data of the measuring instrument, ⁇ : the kernel Width, i.e. the distribution or range characteristic of the set of training samples.
  • control model needs to be trained and tested, including:
  • C and ⁇ are assigned and optimized according to the error, until the accuracy of the test data meets the requirements, and the control model is output.
  • control model controls the liquid replenishing assembly to communicate with the liquid storage assembly, and replenishes the liquid storage assembly
  • control model controls the liquid replenishment assembly and the liquid storage assembly to shut off and controls the micropump to be tested to communicate with the liquid storage assembly;
  • control model controls the liquid storage assembly to communicate with the measuring device;
  • control model controls the liquid storage assembly and the gauge to shut off.
  • test data of the micropump to be tested according to the liquid change in the measuring device includes:
  • the infusion volume of the micropump to be measured is calculated.
  • the control model controls the liquid replenishing assembly to communicate with the liquid storage assembly, so as to replenish the liquid storage assembly, that is, the liquid replenishment.
  • the pump communicates with the liquid storage container through the first one-way valve, and the liquid replenishing pump transports the liquid in the liquid replenishing container to the liquid storage container; when the pressure in the liquid storage assembly reaches the first threshold value, the control model controls the liquid replenishing assembly to close the liquid storage assembly. Disconnect and control the micro-pump to be tested to communicate with the liquid storage component, that is, disconnect the infusion pump from the liquid storage container and stop the liquid output.
  • the liquid in the container is transported to the liquid storage container; when the pressure in the liquid storage assembly reaches a preset second threshold, the control model controls the liquid storage assembly to communicate with the measuring device, that is, the control model controls the switch to open, so that the liquid storage container
  • the liquid storage container communicates with the measuring device through the switch, and the liquid storage container measures the output liquid; when the pressure in the liquid storage assembly reaches the second threshold again, the liquid storage assembly and the measuring device are controlled to be turned off, that is, the control model controls the switch to be turned off. open, the liquid storage container is disconnected from the measuring device, and the liquid output is stopped.
  • the control model in this embodiment can test the liquid flow performance of the micropump according to the liquid change in the measuring device, that is, according to the measurement scale and inner diameter of the measuring device, calculate the infusion volume of the micropump to be measured;
  • the first threshold that is, when the pressure in the liquid storage reaches the first threshold
  • the first measurement scale of the measuring device is obtained
  • the second threshold again, That is, when the pressure in the liquid storage container reaches the second threshold, the second measuring scale in the measuring device is obtained
  • the Measure the infusion volume of the micropump is measured by the liquid change in the measuring device, that is, according to the measurement scale and inner diameter of the measuring device.
  • the liquid volume output by the micropump to be tested under the pressure of the second threshold value is tested, so as to test the output liquid volume of the micropump to be tested under a specific pressure.
  • the first threshold is used to control the liquid replenishment component to output a certain volume of liquid to the liquid storage component, shorten the time for the micropump to be tested to deliver the liquid to the liquid storage component, and improve the test efficiency.
  • the traditional MEMS manual testing method and the method of the present invention are selected for comparative testing, and the test results are compared by means of scientific demonstration to verify the real effect of the method of the present invention. .
  • the traditional MEMS manual testing method has low test efficiency, low accuracy, and a small range of applicability.
  • the traditional MEMS manual testing method and the method of the present invention will be used to measure and compare the MEMS micropump in real time.
  • Test environment run the micropump to be tested on the simulation platform to simulate the operation and simulate the output liquid volume and flow rate under a specific pressure, use 100 sets of actual output data collected on site as test samples, and use traditional manual operations to perform manual tests and Record the test result data; adopt the method of the present invention, then turn on the automated test equipment and use MATLB to realize the simulation test of the method of the present invention, and obtain the simulation data according to the experimental results; each of the two methods tests ten groups of data, and calculates the time and time required to obtain each group of data. The test value is compared with the actual output test value of the simulation input and the error calculation is carried out. The results are shown in the following table:
  • Table 1 Efficiency, error comparison data table.
  • the method of the present invention has been tested three times, with a duration of 5 hours, and the three simulation results are respectively 2.72ml, 2.71ml, and 2.68ml.
  • Table 1 it can be seen intuitively that the traditional The manual method calculates the outlet pressure through the height of the liquid column extruded by the micro-pump, and cannot test the output liquid volume and flow rate of the MEMS micro-pump under a specific pressure. It also increases the error value while working in low efficiency.
  • the efficiency of the method of the present invention It is obviously higher than the traditional manual method, and at the same time, the test accuracy is also improved. Based on this, the real effect of the method of the present invention is verified.
  • FIG. 3 it is a second embodiment of the present invention.
  • This embodiment is different from the first embodiment in that a MEMS micropump testing system is provided, including: a fluid replacement component 100 , a fluid storage component 200 , and a control module 300 and gauge 400.
  • the rehydration assembly 100 includes a rehydration container 101, a rehydration pump 102 and a first one-way valve 103.
  • the rehydration pump 102 is connected to the liquid storage assembly 200 via the first one-way valve 103, and the first output port 101a of the rehydration container 101 passes through the rehydration
  • the pump 102 is connected to the liquid storage assembly 200
  • the second output port 101 b of the liquid supplement container 101 is connected to the micropump 500 to be tested
  • the control end of the liquid supplement pump 102 is connected to the control module 300 .
  • the liquid storage assembly 200 includes a liquid storage container 201, a pressure sensor 202 and a switch member 203, wherein the first input port 201a of the liquid storage container 201 is connected to the liquid replenishment assembly 100, and the second input port 201b of the liquid storage container 201 Connected to the micropump 500 to be measured, the output port 201c of the liquid storage container 201 is connected to the measuring device 400 via the switch member 203, the pressure sensor 202 is arranged on the liquid storage container 201, and the control terminals of the pressure sensor 202 and the switch member 203 are connected to the measuring device 400.
  • the control module 300 is connected.
  • the control module 300 (setting the control model) is used to calculate the infusion volume of the micropump 500 to be measured according to the measurement scale and inner diameter of the measuring device 400.
  • the pressure in the liquid storage assembly 200 reaches the first
  • the threshold value that is, when the pressure in the liquid storage container 201 reaches the first threshold value
  • the first measurement scale in the measuring device 400 is obtained.
  • the switch 203 is not opened at this time, there may still be some leakage of liquid in the system. Therefore, there may be some liquid in the measuring device 400. Therefore, the volume of this part of the liquid is used as the initial measurement scale (ie, the first measurement scale); the pressure in the liquid storage assembly 200 reaches the second threshold again.
  • the second measurement scale in the measuring device 400 is obtained, and then according to the difference between the second measurement scale and the first measurement scale, the measurement The inner diameter of the device 400 is calculated to obtain the infusion volume of the micropump 500 to be tested; by measuring the first measurement scale, and subtracting the first measurement scale from the final test result (ie, the second measurement scale), it is possible to Eliminate errors caused by seepage and improve test accuracy.
  • the measuring device 400 is provided with a measuring scale, for example, it is a liquid outlet tube with a measuring scale. By reading the scale on the liquid pipe and combining with the known inner diameter of the infusion tube, the output liquid can be obtained. volume of.
  • the liquid replenishment assembly 100 is respectively connected with the liquid storage assembly 200 and the micropump to be tested 500
  • the liquid storage assembly 200 is connected to the micropump to be tested 500 and the measuring device 400 respectively
  • the control module 300 is connected to the liquid replenishment assembly 100 and the micropump to be tested 500 and the control end of the liquid storage assembly 200 are connected; in this embodiment, it should be noted that:
  • control module 300 controls the liquid replenishment assembly 100 to communicate with the liquid storage assembly 200, and replenishes the liquid storage assembly 200;
  • control module 300 controls the liquid replenishing assembly 100 and the liquid storage assembly 200 to shut off and controls the micropump 500 to be tested to communicate with the liquid storage assembly 200;
  • control module 300 controls the liquid storage assembly 200 to communicate with the measuring device 400;
  • control module 300 controls the liquid storage assembly 200 and the measuring device 400 to turn off;
  • the liquid flow performance of the micropump 500 to be measured is obtained according to the measurement result of the measuring device 400 .
  • the test system also includes a timer to record the test duration (that is, to record the time from when the micropump to be tested is turned on and connected to the liquid storage assembly) until the time when the liquid storage assembly and the measuring device are turned off and the test is completed, and The flow rate of the output liquid of the micropump to be tested is obtained according to the test duration and the volume of the output liquid of the micropump to be tested that has been tested.
  • This embodiment also proposes a micro-pump liquid flow testing device.
  • the liquid refilling function of the liquid refilling component is realized through the liquid refilling pump and the liquid refilling container.
  • the function of specific pressure value flexibly realize the setting of different pressure values by selecting different refill pumps, liquid storage containers, etc., and flexibly control the test efficiency of the system, and use a check valve to prevent the liquid in the test system.
  • Backflow provides test accuracy.
  • the output liquid volume of the micro-pump to be tested is obtained through a measuring device with a measuring scale, and the output flow rate of the micro-pump to be tested is further obtained in combination with the test time.
  • embodiments of the present invention may be implemented or implemented by computer hardware, a combination of hardware and software, or by computer instructions stored in non-transitory computer readable memory.
  • the method can be implemented in a computer program using standard programming techniques - including a non-transitory computer-readable storage medium configured with a computer program, wherein the storage medium so configured causes the computer to operate in a specific and predefined manner - according to the specific Methods and figures described in the Examples.
  • Each program may be implemented in a high-level procedural or object-oriented programming language to communicate with a computer system. However, if desired, the program can be implemented in assembly or machine language. In any case, the language can be a compiled or interpreted language. Furthermore, the program can be run on a programmed application specific integrated circuit for this purpose.
  • the methods may be implemented in any type of computing platform operably connected to a suitable, including but not limited to personal computer, minicomputer, mainframe, workstation, network or distributed computing environment, stand-alone or integrated computer platform, or communicate with charged particle tools or other imaging devices, etc.
  • Aspects of the invention may be implemented in machine-readable code stored on a non-transitory storage medium or device, whether removable or integrated into a computing platform, such as a hard disk, an optically read and/or written storage medium, RAM, ROM, etc., such that it can be read by a programmable computer, when a storage medium or device is read by a computer, it can be used to configure and operate the computer to perform the processes described herein.
  • the machine-readable code, or portions thereof, may be transmitted over wired or wireless networks.
  • the invention described herein includes these and other various types of non-transitory computer-readable storage media when such media includes instructions or programs that implement the steps described above in conjunction with a microprocessor or other data processor.
  • the invention also includes the computer itself when programmed according to the methods and techniques described herein.
  • a computer program can be applied to input data to perform the functions described herein, transforming the input data to generate output data for storage to non-volatile memory.
  • the output information can also be applied to one or more output devices such as a display.
  • the transformed data represents physical and tangible objects, including specific visual depictions of physical and tangible objects produced on the display.
  • a component can be, but is not limited to, a process running on a processor, a processor, an object, an executable, a thread in execution, a program, and/or a computer.
  • an application running on a computing device and the computing device may be components.
  • One or more components can exist in a process and/or thread of execution, and a component can be localized on one computer and/or distributed between two or more computers.
  • these components can execute from various computer readable media having various data structures thereon.
  • These components can be implemented by, for example, having one or more data groupings (eg, data from one component interacting with another component in a local system, a distributed system, and/or in a signaling manner such as the Internet network to interact with other systems) to communicate locally and/or as remote processes.
  • data groupings eg, data from one component interacting with another component in a local system, a distributed system, and/or in a signaling manner such as the Internet network to interact with other systems

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Abstract

一种MEMS微泵测试方法及系统，方法包括：基于最小二乘支持向量机构建控制模型；结合压力值指标判断贮液组件（200）内压力与预设的第一阈值和第二阈值的大小，获得判断结果；利用控制模型读取判断结果，分别控制贮液组件（200）与补液组件（100）、量测器（400）进行连通和关断；根据量测器（400）中的液体变化得到待测微泵（500）的测试数据。使用补液组件（100）和贮液组件（200）辅助进行MEMS微泵测试，能够测试较小的输出液体体积和流量，同时，通过控制贮液组件（200）的压力，可测试MEMS微泵在不同压力下的输出液体体积和流量，且系统中使用了单向阀的设计，保证了测试过程中不存在液体倒流的情况，保证了测试精度。

Description

一种MEMS微泵测试方法及系统 技术领域
本发明涉及MEMS微泵的技术领域，尤其涉及一种MEMS微泵测试方法及系统。
背景技术
近年来，由于MEMS技术的发展，带动了相关技术的发展，MEMS微泵也进入快速发展阶段。但是，由于MEMS微泵体积极小，流量、压力也非常小，对于MEMS微泵的性能测试存在极大困难，目前常规的测试办法以手动测试为主，一般是通过微泵压出的液柱高度来计算出口压力，一方面，这种测试方法不仅无法通过直接控制出口压力来测流量，也就是无法测试MEMS微泵在特定压力下的输出液体体积和流量，另一方面，手动测试的精确度不高。
发明内容
本部分的目的在于概述本发明的实施例的一些方面以及简要介绍一些较佳实施例。在本部分以及本申请的说明书摘要和发明名称中可能会做些简化或省略以避免使本部分、说明书摘要和发明名称的目的模糊，而这种简化或省略不能用于限制本发明的范围。
鉴于上述现有存在的问题，提出了本发明。
因此，本发明提供了一种MEMS测试方法及系统，能够精准测试MEMS微泵在特定压力下的输出液体体积和流量。
为解决上述技术问题，本发明提供如下技术方案：包括，基于最小二乘支持向量机构建控制模型；结合压力值指标判断贮液组件内压力与预设的第一阈值和第二阈值的大小，获得判断结果；利用所述控制模型读取所述判断结果，分别控制所述贮液组件与补液组件、量测器进行连通和关断；根据所述量测器中的液体变化得到所述待测微泵的测试数据。
作为本发明所述的MEMS测试方法的一种优选方案，其中：所述判断包括，当所述贮液组件内压力低于预设的所述第一阈值时，所述控制模型控制补液组件与贮液组件连通，向所述贮液组件补液；当所述贮液组件内的压力达到所述第一阈值时，所述控制模型控制所述补液组件与所述贮液组件关断并控制待测微泵与所述贮液组件连通。
作为本发明所述的MEMS测试方法的一种优选方案，其中：还包括，当所 述贮液组件内的压力达到预设的所述第二阈值时，所述控制模型控制所述贮液组件与所述量测器连通；当所述贮液组件内的压力再次达到所述第二阈值时，所述控制模型控制所述贮液组件与所述量测器关断。
作为本发明所述的MEMS测试方法的一种优选方案，其中：构建所述控制模型包括，选取径向基函数作为所述控制模型的目标函数，如下式：
Figure PCTCN2021093486-appb-000001
其中，x＝{x 1；x 2；…；x 14}：所述贮液组件内压力的幅频特性向量组成的幅频特性矩阵，y：所述量测器历史数据的幅频特性向量，σ：核宽度，即训练样本数集的分布或范围特性。
作为本发明所述的MEMS测试方法的一种优选方案，其中：所述控制模型需进行训练测试，包括，初始化惩罚参数C和σ，利用训练样本对所述目标函数进行训练，并用测试样本进行测试；若所述控制模型精度未达到要求，根据误差对所述C和所述σ进行赋值优化，直到测试数据精度达到要求，输出所述控制模型。
作为本发明所述的MEMS测试方法的一种优选方案，其中：获得所述测试数据包括，当所述贮液组件内的压力达到所述第一阈值时，获取所述量测器内的第一量测刻度；当所述贮液组件内的压力再次达到所述第二阈值时，获取所述量测器内的第二量测刻度；根据所述第二量测刻度与所述第一量测刻度的差值和所述量测器的内径，计算得到所述待测微泵的输液体积。
作为本发明所述的MEMS测试系统的一种优选方案，其中：包括，所述补液组件、所述贮液组件、控制模块和所述量测器；所述补液组件分别与所述贮液组件和所述待测微泵相连接，所述贮液组件分别与所述待测微泵和所述量测器相连接，所述控制模块与所述补液组件、所述待测微泵以及所述贮液组件的控制端相连。
作为本发明所述的MEMS测试系统的一种优选方案，其中：包括，当所述贮液组件内压力低于预设的所述第一阈值时，所述控制模块控制所述补液组件与所述贮液组件连通，向所述贮液组件补液；当所述贮液组件内的压力达到所述第一阈值时，所述控制模块控制所述补液组件与所述贮液组件关断并控制所述待测微泵与所述贮液组件连通；当所述贮液组件内的压力 达到预设的所述第二阈值时，所述控制模块控制所述贮液组件与所述量测器连通；当所述贮液组件内的压力再次达到所述第二阈值时，所述控制模块控制所述贮液组件与所述量测器关断；根据所述量测器的量测结果得到所述待测微泵的液流性能。
作为本发明所述的MEMS测试系统的一种优选方案，其中：所述补液组件包括补液容器和补液泵；所述补液容器的第一输出口经由所述补液泵与所述贮液组件相连，所述补液容器的第二输出口与所述待测微泵相连，所述补液泵的控制端与所述控制模块相连。
作为本发明所述的MEMS测试系统的一种优选方案，其中：所述贮液组件包括贮液容器、压力传感器以及开关件；其中，所述贮液容器的第一输入口与所述补液组件相连，所述贮液容器的第二输入口与所述待测微泵相连，所述贮液容器的输出口经由所述开关件与所述量测器相连，所述压力传感器设置在所述贮液容器上所述压力传感器和所述开关件的控制端均与所述控制模块相连。
本发明的有益效果：本发明使用补液组件和贮液组件辅助进行MEMS微泵测试，能够测试较小的输出液体体积和流量，同时，通过控制贮液组件的压力，可测试MEMS微泵在不同压力下的输出液体体积和流量，且系统中使用了单向阀的设计，保证了测试过程中不存在液体倒流的情况，保证了测试精度。
附图说明
为了更清楚地说明本发明实施例的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动性的前提下，还可以根据这些附图获得其它的附图。其中：
图1为本发明第一个实施例所述的MEMS微泵测试方法的流程示意图；
图2为本发明第一个实施例所述的MEMS微泵测试方法的判断控制流程示意图；
图3为本发明第二个实施例所述的MEMS微泵测试系统的结构分布示意图。
具体实施方式
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合说明书 附图对本发明的具体实施方式做详细的说明，显然所描述的实施例是本发明的一部分实施例，而不是全部实施例。基于本发明中的实施例，本领域普通人员在没有做出创造性劳动前提下所获得的所有其他实施例，都应当属于本发明的保护的范围。
在下面的描述中阐述了很多具体细节以便于充分理解本发明，但是本发明还可以采用其他不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本发明内涵的情况下做类似推广，因此本发明不受下面公开的具体实施例的限制。
其次，此处所称的“一个实施例”或“实施例”是指可包含于本发明至少一个实现方式中的特定特征、结构或特性。在本说明书中不同地方出现的“在一个实施例中”并非均指同一个实施例，也不是单独的或选择性的与其他实施例互相排斥的实施例。
本发明结合示意图进行详细描述，在详述本发明实施例时，为便于说明，表示器件结构的剖面图会不依一般比例作局部放大，而且所述示意图只是示例，其在此不应限制本发明保护的范围。此外，在实际制作中应包含长度、宽度及深度的三维空间尺寸。
同时在本发明的描述中，需要说明的是，术语中的“上、下、内和外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一、第二或第三”仅用于描述目的，而不能理解为指示或暗示相对重要性。
本发明中除非另有明确的规定和限定，术语“安装、相连、连接”应做广义理解，例如：可以是固定连接、可拆卸连接或一体式连接；同样可以是机械连接、电连接或直接连接，也可以通过中间媒介间接相连，也可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明中的具体含义。
实施例1
参照图1和图2，为本发明的第一个实施例，提供了一种MEMS微泵测试方法，包括：
S1：基于最小二乘支持向量机构建控制模型。其中需要说明的是：构建控 制模型包括：
选取径向基函数作为控制模型的目标函数，如下式：
Figure PCTCN2021093486-appb-000002
其中，x＝{x 1；x 2；…；x 14}：贮液组件内压力的幅频特性向量组成的幅频特性矩阵，y：量测器历史数据的幅频特性向量，σ：核宽度，即训练样本数集的分布或范围特性。
进一步的，控制模型需进行训练测试，包括：
初始化惩罚参数C和σ，利用训练样本对目标函数进行训练，并用测试样本进行测试；
若控制模型精度未达到要求，根据误差对C和σ进行赋值优化，直到测试数据精度达到要求，输出控制模型。
S2：结合压力值指标判断贮液组件内压力与预设的第一阈值和第二阈值的大小，获得判断结果。
S3：利用控制模型读取判断结果，分别控制贮液组件与补液组件、量测器进行连通和关断。本步骤需要说明的是：
当贮液组件内压力低于预设的第一阈值时，控制模型控制补液组件与贮液组件连通，向贮液组件补液；
当贮液组件内的压力达到第一阈值时，控制模型控制补液组件与贮液组件关断并控制待测微泵与贮液组件连通；
当贮液组件内的压力达到预设的第二阈值时，控制模型控制贮液组件与量测器连通；
当贮液组件内的压力再次达到第二阈值时，控制模型控制贮液组件与量测器关断。
S4：根据量测器中的液体变化得到待测微泵的测试数据。其中还需要说明的是，获得测试数据包括：
当贮液组件内的压力达到第一阈值时，获取量测器内的第一量测刻度；
当贮液组件内的压力再次达到第二阈值时，获取量测器内的第二量测刻度；
根据第二量测刻度与第一量测刻度的差值和量测器的内径，计算得到待测微泵的输液体积。
较佳的，本实施例还需要说明的是，在贮液组件内的压力低于预设的第一阈值时，控制模型控制补液组件与贮液组件连通，以向贮液组件补液，即补液泵经由第一单向阀与贮液容器连通，补液泵将补液容器中的液体输送至贮液容器；在贮液组件内的压力达到第一阈值时，控制模型控制补液组件与贮液组件关断、并控制待测微泵与贮液组件连通，即补液泵与贮液容器断开、停止液体输出，待测微泵经由第二单向阀与贮液容器连通，待测微泵将补液容器中的液体输送至贮液容器；在贮液组件内的压力达到预设的第二阈值时，控制模型控制贮液组件与量测器连通，即控制模型控制开关件打开，使得贮液容器经由开关件与量测器连通，贮液容器向量测输出液体；在贮液组件内的压力再次达到第二阈值时，控制贮液组件与量测器关断，即控制模型控制开关件断开，贮液容器与量测器断开、停止液体输出。
优选的，本实施例中的控制模型能够根据量测器中的液体变化测试微泵的液流性能，即根据量测器的量测刻度和内径，计算得到待测微泵的输液体积；在贮液组件内的压力达到第一阈值时，即贮液容内的压力达到第一阈值时，获取量测器的第一量测刻度；在贮液组件内的压力再次达到第二阈值时，即贮液容器内的压力达到第二阈值时，获取量测器内的第二量测刻度；根据第二量测刻度与第一量测刻度的差值、量测器的内径，计算得到待测微泵的输液体积。
通俗的说，本实施例通过设置第二阈值来实现测试待测微泵第二阈值的压力下输出的液体体积，从而实现测试待测微泵在特定压力下的输出液体体积，同时，通过设置第一阈值，控制补液组件向贮液组件输出一定体积的液体，缩短待测微泵向贮液组件输送液体的时间，提高测试效率。
为了对本发明方法中采用的技术效果加以验证说明，本实施例选择以传统的MEMS人工测试方法与本发明方法进行对比测试，以科学论证的手段对比试验结果，验证本发明方法所具有的真实效果。
传统的MEMS人工测试方法测试效率低、精确度不高，且适用性范围较小，为验证本发明方法相较于传统方法具有较高的精确度、效率和较全面的适用性，本实施例中将采用传统的MEMS人工测试方法与本发明方法分别对MEMS微泵进行实时测量对比。
测试环境：将待测试微泵运行在仿真平台模拟运行并模拟特定压力下的输出液体体积和流量，采用现场采集的100组实际输出数据作为测试样本，分别利用传统方法的人工操作进行手动测试并记录测试结果数据；采用本发明方法，则开启自动化测试设备并运用MATLB实现本发明方法的仿真测试，根据实验结果得到仿真数据；两种方法各测试十组数据，计算获得每组数据的时间和测试值，与仿真模拟输入的实际输出测试值进行对比误差计算，结果如下表所示：
表1：效率、误差对比数据表。
Figure PCTCN2021093486-appb-000003
还需要说明的是，在本实施例中本发明方法进行了三次测试，时长5小时，仿真模拟的三次结果分别是2.72ml、2.71ml、2.68ml，参照表1，能够直观的看出，传统人工方法通过微泵压出的液柱高度来计算出口压力，无法测试MEMS微泵在特定压力下的输出液体体积和流量，在低效率工作的同时也增加了误差值，而本发明方法的效率明显高于传统人工方法，与此同时还提高了测试准确度，基于此，验证了本发明方法所具有的真实效果。
实施例2
参照图3，为本发明的第二个实施例，该实施例不同于第一个实施例的是，提供了一种MEMS微泵测试系统，包括：补液组件100、贮液组件200、控制模块300和量测器400。
具体的，补液组件100包括补液容器101、补液泵102和第一单向阀103，补液泵102经由第一单向阀103与贮液组件200相连，补液容器101的第一输出口101a经由补液泵102与贮液组件200相连，补液容器101的第二输出口101b与待测微泵500相连，补液泵102的控制端与控制模块300相连。
进一步的是，贮液组件200包括贮液容器201、压力传感器202以及开关件203，其中，贮液容器201的第一输入口201a与补液组件100相连，贮液容器201的第二输入口201b与待测微泵500相连，贮液容器201的输出口201c经由开关件203与量测器400相连，压力传感器202设置在贮液容器201上，压力传感器202和开关件203的控制端均与控制模块300相连。
较佳的，控制模块300(设置控制模型)用于根据量测器400的量测刻度和内径，计算得到待测微泵500的输液体积，例如，在贮液组件200内的压力达到第一阈值时(即贮液容器201内的压力达到第一阈值时)，获取量测器400内的第一量测刻度，虽然此时开关件203并未打开，但是系统中仍然可能出现部分渗液的情况，因此，量测器400中可能存在部分液体，因此，将该部分液体的体积作为初始量测刻度(即第一量测刻度)；在贮液组件200内的压力再次达到第二阈值时(即贮液容器201内的压力再次达到第二阈值时)，获取量测器400内的第二量测刻度，再根据第二量测刻度与第一量测刻度的差值、量测器400的内径，计算得到待测微泵500的输液体积；通过量测第一量测刻度，并从最终的测试结果(即第二量测刻度)中减去该第一量测刻度，可以排除由渗液带来的误差，提高测试精度。
再进一步的是，量测器400设置有量测刻度，例如，为具有量测刻度的出液管，通过读取出液管上的刻度，结合已知的输液管的内径，从而得到输出液体的体积。
优选的，补液组件100分别与贮液组件200和待测微泵500相连，贮液组件200分别与待测微泵500和量测器400相连，控制模块300与补液组件100、待测微泵500以及贮液组件200的控制端相连；本实施例还需要说明的是：
当贮液组件200内压力低于预设的第一阈值时，控制模块300控制补液组件100与贮液组件200连通，向贮液组件200补液；
当贮液组件200内的压力达到第一阈值时，控制模块300控制补液组件 100与贮液组件200关断并控制待测微泵500与贮液组件200连通；
当贮液组件200内的压力达到预设的第二阈值时，控制模块300控制贮液组件200与量测器400连通；
当贮液组件200内的压力再次达到第二阈值时，控制模块300控制贮液组件200与量测器400关断；
根据量测器400的量测结果得到待测微泵500的液流性能。
本测试系统中还包括计时器，用于记录测试时长(即记录从待测微泵开启并与贮液组件连通的时间)，直至贮液组件与量测器关断、完成测试的时间，并根据该测试时长和已经测试得到的待测微泵的输出液体体积得到待测微泵输出液体的流量。
本实施例中还提出一种微泵的液流测试装置，通过补液泵和补液容器具体实现补液组件的补液功能，通过贮液容器、压力传感器和卡关件具体实现贮液组件为测试系统设置特定压力值的功能，通过选取不同的补液泵、贮液容器等灵活的实现不同压力值的设置，同时灵活控制系统的测试效率，并分别通过使用连个单向阀，防止测试系统中的液体回流，提供测试精度，此外，通过具有量测刻度的量测器得到待测微泵输出液体体积，并结合测试时间进一步得到待测微泵的输出流量。
应当认识到，本发明的实施例可以由计算机硬件、硬件和软件的组合、或者通过存储在非暂时性计算机可读存储器中的计算机指令来实现或实施。所述方法可以使用标准编程技术-包括配置有计算机程序的非暂时性计算机可读存储介质在计算机程序中实现，其中如此配置的存储介质使得计算机以特定和预定义的方式操作——根据在具体实施例中描述的方法和附图。每个程序可以以高级过程或面向对象的编程语言来实现以与计算机系统通信。然而，若需要，该程序可以以汇编或机器语言实现。在任何情况下，该语言可以是编译或解释的语言。此外，为此目的该程序能够在编程的专用集成电路上运行。
此外，可按任何合适的顺序来执行本文描述的过程的操作，除非本文另外指示或以其他方式明显地与上下文矛盾。本文描述的过程(或变型和/或其组合)可在配置有可执行指令的一个或多个计算机系统的控制下执行，并且可作为共同地在一个或多个处理器上执行的代码(例如，可执行指令、一个或多个计算机程序或一个或多个应用)、由硬件或其组合来实现。所述计算机程序包括可 由一个或多个处理器执行的多个指令。
进一步，所述方法可以在可操作地连接至合适的任何类型的计算平台中实现，包括但不限于个人电脑、迷你计算机、主框架、工作站、网络或分布式计算环境、单独的或集成的计算机平台、或者与带电粒子工具或其它成像装置通信等等。本发明的各方面可以以存储在非暂时性存储介质或设备上的机器可读代码来实现，无论是可移动的还是集成至计算平台，如硬盘、光学读取和/或写入存储介质、RAM、ROM等，使得其可由可编程计算机读取，当存储介质或设备由计算机读取时可用于配置和操作计算机以执行在此所描述的过程。此外，机器可读代码，或其部分可以通过有线或无线网络传输。当此类媒体包括结合微处理器或其他数据处理器实现上文所述步骤的指令或程序时，本文所述的发明包括这些和其他不同类型的非暂时性计算机可读存储介质。当根据本发明所述的方法和技术编程时，本发明还包括计算机本身。计算机程序能够应用于输入数据以执行本文所述的功能，从而转换输入数据以生成存储至非易失性存储器的输出数据。输出信息还可以应用于一个或多个输出设备如显示器。在本发明优选的实施例中，转换的数据表示物理和有形的对象，包括显示器上产生的物理和有形对象的特定视觉描绘。
如在本申请所使用的，术语“组件”、“模块”、“系统”等等旨在指代计算机相关实体，该计算机相关实体可以是硬件、固件、硬件和软件的结合、软件或者运行中的软件。例如，组件可以是，但不限于是：在处理器上运行的处理、处理器、对象、可执行文件、执行中的线程、程序和/或计算机。作为示例，在计算设备上运行的应用和该计算设备都可以是组件。一个或多个组件可以存在于执行中的过程和/或线程中，并且组件可以位于一个计算机中以及/或者分布在两个或更多个计算机之间。此外，这些组件能够从在其上具有各种数据结构的各种计算机可读介质中执行。这些组件可以通过诸如根据具有一个或多个数据分组(例如，来自一个组件的数据，该组件与本地系统、分布式系统中的另一个组件进行交互和/或以信号的方式通过诸如互联网之类的网络与其它系统进行交互)的信号，以本地和/或远程过程的方式进行通信。
应说明的是，以上实施例仅用以说明本发明的技术方案而非限制，尽管参照较佳实施例对本发明进行了详细说明，本领域的普通技术人员应当理解，可以对本发明的技术方案进行修改或者等同替换，而不脱离本发明技术方案的精 神和范围，其均应涵盖在本发明的权利要求范围当中。

Claims (6)

  1. 一种MEMS微泵测试方法及系统，其特征在于：包括，
    基于最小二乘支持向量机构建控制模型；
    结合压力值指标判断贮液组件内压力与预设的第一阈值和第二阈值的大小，获得判断结果；
    利用所述控制模型读取所述判断结果，分别控制所述贮液组件与补液组件、量测器进行连通和关断；
    根据所述量测器中的液体变化得到待测微泵的测试数据；
    所述判断包括，当所述贮液组件内压力低于预设的所述第一阈值时，所述控制模型控制补液组件与贮液组件连通，向所述贮液组件补液；
    当所述贮液组件内的压力达到所述第一阈值时，所述控制模型控制所述补液组件与所述贮液组件关断并控制待测微泵与所述贮液组件连通；
    当所述贮液组件内的压力达到预设的所述第二阈值时，所述控制模型控制所述贮液组件与所述量测器连通；
    当所述贮液组件内的压力再次达到所述第二阈值时，所述控制模型控制所述贮液组件与所述量测器关断；
    所述MEMS微泵测试方法还包括控制运行的MEMS微泵测试系统，其包括，补液组件(100)、贮液组件(200)、控制模块(300)和量测器(400)；
    所述补液组件(100)分别与所述贮液组件(200)和待测微泵(500)相连接，所述贮液组件(200)分别与所述待测微泵(500)和所述量测器(400)相连接，所述控制模块(300)与所述补液组件(100)、所述待测微泵(500)以及所述贮液组件(200)的控制端相连；
    当所述贮液组件(200)内压力低于预设的所述第一阈值时，所述控制模块(300)控制所述补液组件(100)与所述贮液组件(200)连通，向所述贮液组件(200)补液；
    当所述贮液组件(200)内的压力达到所述第一阈值时，所述控制模块(300)控制所述补液组件(100)与所述贮液组件(200)关断并控制所述待测微泵(500)与所述贮液组件(200)连通；
    当所述贮液组件(200)内的压力达到预设的所述第二阈值时，所述控制模块(300)控制所述贮液组件(200)与所述量测器(400)连通；
    当所述贮液组件(200)内的压力再次达到所述第二阈值时，所述控制 模块(300)控制所述贮液组件(200)与所述量测器(400)关断；
    根据所述量测器(400)的量测结果得到所述待测微泵(500)的液流性能。
  2. 根据权利要求1所述的MEMS微泵测试方法及系统，其特征在于：构建所述控制模型包括，
    选取径向基函数作为所述控制模型的目标函数，如下式：
    Figure PCTCN2021093486-appb-100001
    其中，x＝{x 1；x 2；…；x 14}：所述贮液组件内压力的幅频特性向量组成的幅频特性矩阵，y：所述量测器历史数据的幅频特性向量，σ：核宽度，即训练样本数集的分布或范围特性。
  3. 根据权利要求2所述的MEMS微泵测试方法及系统，其特征在于：所述控制模型需进行训练测试，包括，
    初始化惩罚参数C和σ，利用训练样本对所述目标函数进行训练，并用测试样本进行测试；
    若所述控制模型精度未达到要求，根据误差对所述C和所述σ进行赋值优化，直到测试数据精度达到要求，输出所述控制模型。
  4. 根据权利要求2或3所述的MEMS微泵测试方法及系统，其特征在于：获得所述测试数据包括，
    当所述贮液组件(200)内的压力达到所述第一阈值时，获取所述量测器(400)内的第一量测刻度；
    当所述贮液组件(200)内的压力再次达到所述第二阈值时，获取所述量测器(400)内的第二量测刻度；
    根据所述第二量测刻度与所述第一量测刻度的差值和所述量测器(400)的内径，计算得到所述待测微泵(500)的输液体积。
  5. 根据权利要求4所述的MEMS微泵测试方法及系统，其特征在于：所述补液组件(100)包括补液容器(101)和补液泵(102)；
    所述补液容器(101)的第一输出口经由所述补液泵(102)与所述贮液组件(200)相连，所述补液容器(101)的第二输出口与所述待测微泵(500)相连，所述补液泵(102)的控制端与所述控制模块(300)相连。
  6. 根据权利要求5所述的MEMS微泵测试方法及系统，其特征在于：所述贮液组件(200)包括贮液容器(201)、压力传感器(202)以及开关件(203)；
    其中，所述贮液容器(201)的第一输入口与所述补液组件(100)相连，所述贮液容器(201)的第二输入口与所述待测微泵(500)相连，所述贮液容器(201)的输出口经由所述开关件(203)与所述量测器(400)相连，所述压力传感器(202)设置在所述贮液容器(201)上，所述压力传感器(202)和所述开关件(203)的控制端均与所述控制模块(300)相连。
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