WO2022052195A1 - 一种太阳能电池硅片扩散插片工艺 - Google Patents

一种太阳能电池硅片扩散插片工艺 Download PDF

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Publication number
WO2022052195A1
WO2022052195A1 PCT/CN2020/120060 CN2020120060W WO2022052195A1 WO 2022052195 A1 WO2022052195 A1 WO 2022052195A1 CN 2020120060 W CN2020120060 W CN 2020120060W WO 2022052195 A1 WO2022052195 A1 WO 2022052195A1
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WO
WIPO (PCT)
Prior art keywords
flower basket
bottom plate
plate
push plate
silicon wafer
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Application number
PCT/CN2020/120060
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English (en)
French (fr)
Inventor
盛文彬
沈根法
刘克勇
Original Assignee
湖州奥博石英科技有限公司
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Publication of WO2022052195A1 publication Critical patent/WO2022052195A1/zh

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to the technical field of solar energy, in particular to a process for diffusing and inserting silicon wafers of solar cells.
  • the tubular diffusion furnace is widely used in the industry for phosphorus diffusion, and the operator needs to use a quartz suction pen to insert the silicon wafer into the quartz boat, and insert two silicon wafers into each slot of the quartz boat for single-sided diffusion.
  • the fragmentation rate is high, and the quartz suction pen is likely to leave suction marks when it comes into contact with the silicon wafer, causing pollution of the silicon wafer process.
  • Many silicon wafers need to be reworked for secondary cleaning, which increases the cost. Manually taking silicon wafers for transfer takes a lot of time, and the workers are more easily fatigued in the long run.
  • the invention patent application publication number CN109509810A the publication date is March 22, 2019, the name of the invention is a solar cell diffuser insert process
  • the application discloses a solar cell diffuser insert process, including texturing and blanking Flower basket, 0.5cm PTFE thin pad, 5cm thick sponge pad, push plate, quartz boat, among which the two sides of the flower basket discharged by the cashmere machine are white and black, and the white side is always used as the diffusion surface.
  • the inserter's palms face each other, clamp the side of the silicon wafer inside the texturing basket, gently lift the silicon wafer inside the texturing basket, and transfer it laterally to the quartz boat Above, align with the quartz boat card slots one by one, and gently insert it into the corresponding quartz boat vertically downward, and repeat the cycle until all the silicon wafers in the texturing basket are inserted into the corresponding quartz boat. insert.
  • the solar cell diffusion chip insertion process effectively reduces the fragmentation rate of the diffusion process from 0.15% to less than 0.06%, and greatly reduces the time for personnel in the diffusion workshop to insert chips, further saves labor costs, and achieves the purpose of reducing costs and increasing efficiency.
  • the inserter needs to repeat the cyclic operation when inserting the film, and each time they need to concentrate a lot of energy, which is prone to errors, and the efficiency is not maximized.
  • the invention overcomes the problems in the prior art that artificial wafer insertion is prone to errors and low efficiency, and proposes an efficient and stable solar cell silicon wafer diffusion wafer insertion process.
  • the first push plate on the outer side is the second push plate arranged on the outer side of the base plate 2; the base plate 1 and the base plate 2 move in the length direction through the two base plate rails arranged on the base; the push plate 1 and the push plate 2 pass through The push plate rails provided on both sides of the base move in the width direction of the bottom one and the bottom plate two; the process includes:
  • Step S01 prepare the splicing, the silicon wafers are placed in the front flower basket, the silicon wafers are placed in the reverse flower basket, and the shape and size of the positive flower basket and the reverse flower basket are the same;
  • Step S02 splicing, the front flower basket is fixed on the bottom plate 1, the reverse flower basket is fixed on the bottom plate 2, the front flower basket is opposite to the opening side of the reverse flower basket; the bottom plate 1 and the bottom plate 2 are adjusted so that the silicon wafer groove of the positive flower basket and the reverse flower basket are adjusted. If the silicon wafer slot is dislocated, use the push plate 2 on the side of the reverse flower basket to push the silicon wafer in the reverse flower basket into the positive flower basket, confirm that the suede faces outward, and there are two silicon wafers in each silicon wafer slot of the positive flower basket;
  • Step S03 prepare the inserts, remove the reverse flower basket on the bottom plate two, adjust the push plate two on one side of the bottom plate two, and fix the quartz boat on the bottom plate two, and the quartz boat card slot opening is opposite to the opening side of the positive flower basket;
  • Step S04 Adjust the bottom plate 1 and the bottom plate so that the silicon wafer grooves of the positive flower basket correspond to the clamping grooves of the quartz boat, and the silicon wafer in the positive flower basket is pushed into the quartz boat by the push plate 1 on one side of the positive flower basket.
  • the silicon wafers are placed in the positive flower basket, and the silicon wafers are placed in the reverse flower basket, so that the suede surface of the silicon wafers in the positive flower basket is facing outwards after the pieces are combined.
  • the positive flower basket is fixed on the bottom plate 1
  • the reverse flower basket is fixed on the second floor ,
  • the reverse flower basket is not easy to shift under the push of the push plate, which leads to the failure of the combination.
  • Adjusting the bottom plate 1 and the bottom plate 2 can make the silicon wafer slot of the positive flower basket and the silicon wafer slot of the reverse flower basket misaligned, and also can make the silicon wafer slot of the positive flower basket correspond to the card slot of the quartz boat, so as to ensure the correctness of the chips when they are assembled and inserted. precision.
  • the connecting line between the first support rod and the second support rod is parallel to the horizontal plane, so that the silicon wafer can be pushed forward better when it is placed.
  • the combination is completed by the push plate in two times, and the insertion is completed by the push plate in one time, which is more efficient and saves manpower.
  • the bottom plate 1 and the bottom plate 2 are provided with support bars, and the support bars move in the length direction through the track; through the movement of the bottom plate 1 and the bottom plate 2 on the track, the bottom plate 1 and the bottom plate 2 are adjusted so that the silicon wafers of the flower basket are aligned.
  • the grooves are misaligned with the silicon chip grooves of the reverse flower basket, or adjust the bottom plate 1 and the bottom plate 2 so that the silicon chip grooves of the positive flower basket correspond to the card grooves of the quartz boat.
  • the support bar makes the bottom plate 1 and the bottom plate 2 more stable when moving.
  • the bottom plate 1 and the bottom plate 2 are adjusted, it can be more accurately judged whether the silicon wafer groove of the positive flower basket and the silicon wafer groove of the reverse flower basket are dislocated, or whether the silicon wafer groove of the positive flower basket is different from the one.
  • the card slot of the quartz boat corresponds.
  • the length of the bottom rail is 0.5CM-1CM longer than the support bar.
  • the base plate 1 and the base plate 2 can be moved within the range of 0.5CM-1CM in the length direction, and the adjustment will not take more time and energy due to the excessive moving distance.
  • the first push plate is connected to the push plate track through the first drive arm
  • the second push plate is connected to the push plate track through the second drive arm
  • the drive arm drives the second push plate on one side of the reverse flower basket to push the silicon wafer in the reverse flower basket into the positive flower basket, or drive the push plate on the side of the positive flower basket to push the silicon wafer in the positive flower basket into the quartz boat.
  • the drive arm is more flexible and can better move the push plate 1 and the push plate 2.
  • the second push plate is connected to the push plate track through the second drive arm, and the second drive arm is provided with a rotating joint; step S03 specifically includes: the second push plate passes through the second drive arm on the push plate track. After moving and rotating the joint to move to the same plane as the base plate 2, then remove the reverse flower basket on the base plate 2. The push plate 2 moves to fit the quartz boat through the movement of the driving arm 2 on the push plate track and the rotation of the rotating joint. After the angle is adjusted, place the quartz boat on the second base plate.
  • the rotating joint enables the second drive arm to rotate, thereby driving the second push plate to rotate.
  • the reverse flower basket on the second base plate is removed, which makes it more convenient to take the reverse flower basket.
  • the quartz boat is fixedly placed on the bottom plate two, so that the placement of the quartz boat is more stable. Insert and dump.
  • the first push plate is connected to the push plate track through the first drive arm
  • the second push plate is connected to the push plate track through the second drive arm
  • the first drive arm and the second drive arm are provided with rotating joints
  • step S02 specifically includes : After the push plate 1 and push plate 2 are moved to the same plane as the bottom plate 1 and the bottom plate 2 through the movement of the driving arm 1 and the driving arm 2 on the push plate track and the rotation of the rotary joint, the positive flower basket is fixed and placed on the On the base plate 1, the reverse flower basket is fixedly placed on the base plate 2; after that, the push plate 1 and the push plate 2 are moved to the base plate 1 through the movement of the driving arm 1 and the driving arm 2 on the push plate track and the rotation of the rotary joint. , the vertical position of the bottom plate 2.
  • Such an arrangement makes it more convenient to fix the positive flower basket on the first floor and the reverse flower basket on the second floor, and it is not easy to damage the silicon chips in the positive flower basket and the reverse flower basket.
  • protective plates are provided on both sides of the width positions of the bottom plate 1 and the bottom plate 2, and the protective plate is provided with a limit block at the position close to the other protective plate;
  • the second push plate will stop pushing after touching the limit block;
  • the silicon wafer in the positive flower basket is pushed into the quartz boat with the first push plate on the side of the positive flower basket, the first push plate will be pushed into the quartz boat. Stop pushing when it hits the limit block.
  • the limit block prevents the push plate 1 and the push plate 2 from being pushed too far during the pushing process, which ensures the safety of the combination and insertion.
  • the second support rod and the third support rod of the quartz boat are slidably connected to the support; the step S03 further includes: after adjusting the positions of the second support rod and the third support rod according to the size of the silicon wafer, Then place the quartz boat on the second bottom plate.
  • Such an arrangement enables the quartz boat to carry silicon wafers of different sizes and has a wider application range.
  • two opposite fixing clips are arranged in the length direction of the bottom plate 1 and the bottom plate 2; the positive flower basket is fixed on the bottom plate 1 through the fixing clips, or the reverse flower basket is fixed on the bottom plate 2. , or fix the quartz boat on the second bottom plate.
  • This arrangement ensures that the positive flower basket and the reverse flower basket will not shift positions when adjusting the bottom plate 1 and the bottom plate 2, and it is also difficult for the positive flower basket and the reverse flower basket to shift when assembling, resulting in failure of assembling. It also makes it difficult for the positive flower basket and quartz boat to shift when inserting, resulting in the failure of inserting.
  • one of the two fixing clips on the bottom plate is fixed on the bottom plate by bolts, and the other is movably installed in the longitudinal direction of the bottom plate through the slot in the length direction of the bottom plate; when placing the positive flower basket, reverse flower basket, Before the quartz boat, adjust the movable fixed clips to increase the distance between the two fixed clips, and then adjust the movable fixed clips to fix the front flower basket, reverse flower basket and quartz boat.
  • This arrangement makes it more convenient to fix the front flower basket, the reverse flower basket and the quartz boat, and it can be flexibly adjusted according to the size of the front flower basket, the reverse flower basket and the quartz boat.
  • the slot corresponds to the slot of the quartz boat, so that it can be more accurate and efficient when assembling and inserting.
  • Push plate 1 and push plate 2 can be moved to the same plane as base plate 1 and base plate 2, which makes the disassembly and assembly of positive flower baskets, reverse flower baskets and quartz boats more convenient.
  • the second support rod and the third support rod of the quartz boat are slidably connected to the support. After adjusting the positions of the second support rod and the third support rod according to the size of the silicon wafer, place the quartz boat on the second base plate.
  • the quartz boat can carry silicon wafers of different sizes and has a wider application range.
  • FIG. 1 is an overall schematic diagram of the present invention.
  • FIG. 2 is a schematic diagram of the bottom plate of the present invention.
  • FIG. 3 is a schematic diagram of the push plate of the present invention.
  • FIG. 4 is an overall schematic diagram of the quartz boat of the present invention.
  • FIG. 5 is a schematic side view of the quartz boat of the present invention.
  • a solar cell silicon wafer diffusion inserting process includes a positive flower basket, a reverse flower basket, a pushing device, and a quartz boat;
  • the quartz boat includes a pair of supports 5 and four a strut;
  • the strut includes a first strut 1, a second strut 2, a third strut 3 and a fourth strut 4;
  • the connecting line between the first strut 1 and the second strut 2 is The connection line between the third support rod 3 and the fourth support rod 4 forms a right angle; when the support 5 is tilted and placed on one side, the connection line between the first support rod 1 and the second support rod 2 is parallel to the horizontal plane;
  • the pusher device It includes a base 7, a base plate 1 8 and a base plate 2 9 arranged on the base 7, a push plate 1 10 arranged on the outer side of the base plate 1 8, and a push plate 2 11 arranged on the outer side of the base plate 2 9; the base plate 1 8,
  • the bottom plate 9 is moved in the length
  • Step S01 prepare the splicing, place the silicon wafer 21 on the front of the flower basket, and place the silicon wafer 21 on the reverse side of the flower basket, and the shape and size of the positive flower basket and the reverse flower basket are the same;
  • the front flower basket and the reverse flower basket are both provided with several silicon wafer slots.
  • a single silicon wafer slot of the reverse flower basket can accommodate only one silicon wafer 21
  • a single silicon wafer slot of the positive flower basket can accommodate two silicon wafers 21 .
  • the silicon wafers 21 are placed in the positive flower basket, and the silicon wafers 21 are placed in the reverse flower basket, so that the suede surface of the silicon wafers 21 in the positive flower basket is facing outward after the pieces are combined.
  • Step S02 assembling pieces, the positive flower basket is fixedly placed on the bottom plate 1 8, and the reverse flower basket is fixedly placed on the second floor 9, and the positive flower basket is opposite to the opening side of the reverse flower basket.
  • Adjust the bottom plate 1 8 and the bottom plate 2 9 to dislocate the silicon wafer slot of the front flower basket and the silicon wafer groove of the reverse flower basket.
  • two silicon wafers 21 are placed in each silicon wafer slot of the positive flower basket.
  • the positive flower basket is fixedly placed on the bottom plate 1 8, and the reverse flower basket is fixed on the bottom plate 2 9, so that when the bottom plate 1 8 and the bottom plate 2 9 are adjusted, the positive flower basket and the reverse flower basket will not shift positions.
  • the front flower basket and the reverse flower basket are not easy to shift under the push of the push plate, it will lead to the failure of the combination.
  • the first bottom plate 8 and the second bottom plate 9 are provided with two opposite fixing clips 19 in the length direction.
  • the fixing clip 19 is a rectangular parallelepiped, and the surface on which the object is placed is a frosted surface.
  • the positive flower basket is fixedly placed on the base plate 1 8 by the fixing clips 19
  • the reverse flower basket is fixed and placed on the base plate 2 9 . This arrangement ensures that the positive and reverse flower baskets will not shift positions when adjusting the bottom plate 1 8 and the bottom plate 2 9 , and it is also difficult for the positive flower basket and the reverse flower basket to shift when assembling, resulting in failure of assembling.
  • one of the two fixing clips 19 on the bottom plate is fixed on the bottom plate by bolts, and the other is movably installed in the longitudinal direction of the bottom plate through the slot 20 in the longitudinal direction of the bottom plate.
  • adjust the movable fixed clips 19 to increase the distance between the two fixed clips 19, and then adjust the movable fixed clips 19 to fix the positive and reverse flower baskets.
  • This arrangement makes it more convenient to fix the front flower basket and the reverse flower basket, and can be flexibly adjusted according to the size of the positive flower basket and the reverse flower basket.
  • the first push plate 10 is connected to the push plate track 13 through the first drive arm
  • the second push plate 11 is connected to the push plate track 13 through the second drive arm.
  • the first drive arm and the second drive arm are provided with a rotating joint 14 .
  • a driving arm is provided with three rotating joints 14 , and the three rotating joints 14 are connected together by connecting rods 15 .
  • the step S02 specifically includes: the first push plate 10 and the second push plate 11 are moved to the base plate 1 8 and the second base plate through the movement of the driving arm 1 and the driving arm 2 on the push plate track 13 and the rotation of the rotary joint 14 . 9 After the same plane, the positive flower basket is fixed on the bottom plate 8, and the reverse flower basket is fixed on the bottom plate 9.
  • the first push plate 10 and the second push plate 11 are moved to a position perpendicular to the base plate 1 8 and the base plate 2 9 by the movement of the driving arm 1 and the driving arm 2 on the push plate track 13 and the rotation of the rotary joint 14 .
  • Such an arrangement makes it more convenient to fix the positive flower basket on the bottom plate 1 8 and the reverse flower basket on the second floor 9 , and it is not easy to damage the silicon wafers 21 in the positive flower basket and the reverse flower basket.
  • Adjusting the bottom plate 1 8 and the bottom plate 2 9 can make the silicon wafer groove of the positive flower basket and the silicon wafer groove of the reverse flower basket misaligned, so as to ensure the accuracy of the lamination.
  • a support bar 16 is provided under the base plate 1 8 and the base plate 2 9 , and the support bar 16 moves in the length direction through the track, thereby driving the base plate 1 8 and the base plate 2 9 to move in the length direction.
  • the bottom plate one 8 and the bottom plate two 9 are adjusted to dislocate the silicon wafer groove of the front flower basket and the silicon wafer groove of the reverse flower basket.
  • the support bar 16 makes the bottom plate 1 8 and the bottom plate 2 9 more stable when moving. When adjusting the bottom plate 1 8 and the bottom plate 2 9, it can be more accurately judged whether the silicon wafer groove of the positive flower basket and the silicon wafer groove of the reverse flower basket are dislocated.
  • the length of the rail is 0.5CM-1CM longer than the support bar 16 .
  • the base plate 1 8 and the base plate 2 9 can be moved in the range of 0.5CM-1CM in the length direction, and it will not take more time and energy to adjust due to the excessive moving distance.
  • the driving arm drives the second push plate 11 on the side of the reverse flower basket to push the silicon wafer 21 in the reverse flower basket into the front flower basket.
  • protective plates 17 are provided on both sides of the width position of the bottom plate 1 8 and the bottom plate 9 , and the protective plates 17 are provided with limit blocks 18 at positions close to the other protective plate 17 .
  • the push plate second 11 stops pushing after hitting the limit block 18 .
  • the limiting block 18 prevents the second push plate 11 from being pushed over the head during the pushing process, which ensures the safety of the combination piece.
  • the lamination is completed at one time by the push plate 211, which is more efficient and saves manpower.
  • Step S03 prepare the inserts, remove the reverse flower basket on the bottom plate 2 9, adjust the push plate 2 11 on the side of the bottom plate 2 9, fix the quartz boat on the bottom plate 2 9, the quartz boat card slot opening and the opening side of the positive flower basket relatively.
  • the connecting line between the first support rod 1 and the second support rod 2 is parallel to the horizontal plane, so that the silicon wafer 21 can be pushed forward better when placed.
  • the first push plate 10 is connected to the push plate track 13 through the first drive arm
  • the second push plate 11 is connected to the push plate track 13 through the second drive arm.
  • the second driving arm is provided with a rotating joint 14 .
  • a driving arm is provided with three rotating joints 14 , and the three rotating joints 14 are connected together by connecting rods 15 .
  • the second push plate 11 is moved to the same plane as the second floor 9 by the movement of the driving arm two on the push plate track 13 and the rotation of the rotary joint 14, and then the reverse flower basket on the second floor 9 is removed to make the reverse flower basket. It is more convenient to take. After the second push plate 11 is moved to an angle that fits the quartz boat through the movement of the second drive arm on the push plate track 13 and the rotation of the rotary joint 14 , the quartz boat is fixedly placed on the second base plate 9 .
  • the second support rod 2 and the third support rod 3 of the quartz boat are slidably connected to the support 5 through the chute 6 .
  • the quartz boat After adjusting the positions of the second support rod 2 and the third support rod 3 according to the size of the silicon wafer 21 , place the quartz boat on the bottom plate 2 9 .
  • Such an arrangement enables the quartz boat to carry silicon wafers 21 of different sizes, and has a wider application range.
  • the first bottom plate 8 and the second bottom plate 9 are provided with two opposite fixing clips 19 in the length direction.
  • the fixing clip 19 is a rectangular parallelepiped, and the surface on which the object is placed is a frosted surface.
  • the quartz boat is fixedly placed on the second base plate 9 by the fixing clips 19 .
  • This arrangement makes it difficult for the quartz boat to shift when inserting chips and cause chip inserting failure when adjusting the bottom plate one 8 and the bottom plate two 9 .
  • one of the two fixing clips 19 on the bottom plate is fixed on the bottom plate by bolts, and the other is movably installed in the longitudinal direction of the bottom plate through the slot 20 in the longitudinal direction of the bottom plate.
  • Step S04 adjust the bottom plate 1 8 and the bottom plate 2 9 so that the silicon wafer slot of the positive flower basket corresponds to the card slot of the quartz boat, and the silicon wafer 21 in the positive flower basket is pushed into the quartz boat by the push plate 1 10 on one side of the positive flower basket .
  • the bottom plate one 8 and the bottom plate two 9 the silicon wafer slot of the flower basket corresponds to the card slot of the quartz boat, so as to ensure the accuracy of inserting the wafer.
  • a support bar 16 is provided under the first bottom plate 8 and the second bottom plate 9, and the support bar 16 moves in the length direction through the track. Through the movement of the bottom plate one 8 and the bottom plate two 9 on the track, the bottom plate one 8 and the bottom plate two 9 are adjusted so that the silicon wafer slot of the positive flower basket corresponds to the card slot of the quartz boat.
  • the support bar 16 makes the bottom plate one 8 and the bottom plate two 9 more stable when moving, and ensures the precision when inserting the pieces.
  • the first push plate 10 is connected to the push plate track 13 through the first drive arm
  • the second push plate 11 is connected to the push plate track 13 through the second drive arm.
  • the silicon wafer 21 is pushed into the quartz boat.
  • the drive arm is more flexible and can better move the push plate 10 and the push plate 2 11 .
  • protective plates 17 are provided on both sides of the width of the bottom plate 1 8 and the bottom plate 9 , and the protective plates 17 are provided with limit blocks 18 at positions close to the other protective plate 17 .
  • the push plate 1 10 pushes the silicon wafer 21 in the positive flower basket into the quartz boat, the push plate 1 10 stops pushing after hitting the limit block 18 .
  • the limiting block 18 prevents the push plate 1 10 from being pushed too far during the pushing process, thereby ensuring the safety of the insert.
  • the inserts are completed by pushing the plate 10 times at a time, which is more efficient and saves manpower.

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Abstract

一种太阳能电池硅片扩散插片工艺，涉及太阳能技术领域。一种太阳能电池硅片扩散插片工艺，工艺包括：步骤S01，准备合片，正花篮正放硅片，反花篮反放硅片。步骤S02，合片，正花篮固定放置在底板一上、反花篮固定放置在底板二上，正花篮与反花篮开口侧相对。调节底板一、底板二，令正花篮的硅片槽与反花篮的硅片槽错位，用推板二将反花篮内的硅片推入正花篮内。步骤S03，准备插片，取下底板二上的反花篮，调整推板二后，固定放置石英舟在底板二上，石英舟卡槽开口与正花篮开口侧相对。步骤S04，调整底板一、底板二令正花篮的硅片槽与石英舟的卡槽相对应，用推板一将正花篮内的硅片推入石英舟内。本发明提出的工艺高效且稳定。

Description

一种太阳能电池硅片扩散插片工艺 技术领域
本发明涉及太阳能技术领域，尤其是涉及一种太阳能电池硅片扩散插片工艺。
 背景技术
随着多晶硅太阳能电池片生产技术的日渐成熟，行业对电池片的生产要求越来越高,行业生产车间均在降本增效方面深入挖掘潜在利益。现在行业内普遍采用管式扩散炉进行磷扩散，而操作人员需要用石英吸笔将硅片单片式插入石英舟内，石英舟每个槽插入两片硅片，进行单面扩散。但是这样碎片率高，而且石英吸笔接触到硅片容易留下吸笔印，引起硅片工艺污染，很多硅片需要返工进行二次清洗，加大了成本。而人工拿取硅片进行转移，需要耗时较多，而且长期下来工作人员更易疲累。
例如，发明专利申请公布号CN109509810A，公布日2019年3月22日，发明的名称为 一种太阳能电池扩散插片工艺，该申请案公开了 一种太阳能电池扩散插片工艺，包括制绒下料花篮、0.5cm聚四氟乙烯薄垫、5cm海绵厚垫、推片板、石英舟，其中制绒下料机出料花篮两边分别为白色面和黑色面，白色面一侧始终作为扩散面，扩散上料前检片、合片，插片人员两手掌心相对，夹住制绒下料花篮内在制硅片侧边，将制绒下料花篮内在制硅片轻轻提起，横向转移到石英舟上方，与石英舟卡槽一一对齐，垂直向下轻轻插入到所对应的石英舟中，重复该循环动作，直至制绒下料花篮内在制硅片全部插入到所对应的石英舟中完成插片。该太阳能电池扩散插片工艺，有效把扩散工序制程碎片率从0.15%降为0.06%以内，并大大降低扩散车间人员插片时间，进一步节约人工成本，达到降本增效的目的。但是插片人员插片时需要重复循环操作，而且每次都需要集中较大的精力，容易产生错误，而且效率没有得到最大的提高。
 技术问题
本发明克服了现有技术中人工插片容易产生错误且效率不高的问题，提出了一种高效且稳定太阳能电池硅片扩散插片工艺。
 技术解决方案
为实现以上目的，本发明通过以下技术方案来实现：
一种太阳能电池硅片扩散插片工艺，包括正花篮、反花篮、推片装置、石英舟；所述石英舟包括一对支座和设有卡槽的四个支杆；所述支杆包括第一支杆、第二支杆、第三支杆和第四支杆；所述第一支杆、第二支杆的连线与第三支杆、第四支杆的连线形成直角；在支座一侧倾倒放置时，第一支杆、第二支杆的连线与水平面平行；所述推片装置包括基座，设置在基座上的底板一、底板二，设置在底板一外侧的推板一，设置在底板二外侧的推板二；所述底板一、底板二通过设置在基座上的两个底板轨道在长度方向上移动；所述推板一、推板二通过基座两侧设有的推板轨道在底部一、底板二宽度方向上移动；工艺包括：
步骤S01，准备合片，正花篮正放硅片，反花篮反放硅片，正花篮、反花篮外形大小一致；
步骤S02，合片，正花篮固定放置在底板一上、反花篮固定放置在底板二上，正花篮与反花篮开口侧相对；调节底板一、底板二，令正花篮的硅片槽与反花篮的硅片槽错位，用反花篮一侧的推板二将反花篮内的硅片推入正花篮内，确认绒面朝外，正花篮每个硅片槽内放有两片硅片；
步骤S03，准备插片，取下底板二上的反花篮，调整底板二一侧的推板二后，固定放置石英舟在底板二上，石英舟卡槽开口与正花篮开口侧相对；
步骤S04，调整底板一、底板二令正花篮的硅片槽与石英舟的卡槽相对应，用正花篮一侧的推板一将正花篮内的硅片推入石英舟内。
所述正花篮正放硅片，反花篮反放硅片，使得合片后正花篮里面的硅片都是绒面朝外。正花篮固定放置在底板一上、反花篮固定放置在底板二上，这样设置使得在调节底板一、底板二时，正花篮、反花篮不会偏移位置，也使得在合片时，正花篮、反花篮不易在推板推动下发生偏移而导致合片失败。调节底板一、底板二，可以令正花篮的硅片槽与反花篮的硅片槽错位，也可以令正花篮的硅片槽与石英舟的卡槽相对应，保证合片、插片时的精准度。所述石英舟在支座一侧倾倒放置时，第一支杆、第二支杆的连线与水平面平行，这样便于在硅片放置时可以更好地推进去。合片采用推板二一次完成，插片采用推板一一次完成，效率更高，节省人力。
作为优选，所述底板一、底板二下方设有支撑条，支撑条通过轨道在长度方向上移动；通过底板一、底板二在轨道上的移动，调节底板一、底板二令正花篮的硅片槽与反花篮的硅片槽错位，或调整底板一、底板二令正花篮的硅片槽与石英舟的卡槽相对应。
支撑条令底板一、底板二在移动时更稳定，调节底板一、底板二时可以更准确地判断是否正花篮的硅片槽与反花篮的硅片槽错位，或是否正花篮的硅片槽与石英舟的卡槽相对应。
作为优选，所述底板轨道长度比支撑条长0.5CM-1CM。
这样使得底板一、底板二在长度方向上在0.5CM-1CM范围内移动，不会因为过大的移动距离，导致调整花费更多时间和精力。
作为优选，所述推板一通过驱动臂一连接到推板轨道、推板二通过驱动臂二连接到推板轨道；驱动臂驱动反花篮一侧的推板二将反花篮内的硅片推入正花篮内，或驱动正花篮一侧的推板一将正花篮内的硅片推入石英舟内。
驱动臂更加灵活，更好地令推板一、推板二移动。
作为优选，所述推板二通过驱动臂二连接到推板轨道，所述驱动臂二上设有转动关节；步骤S03具体包括：所述推板二通过驱动臂二的在推板轨道上的移动和转动关节的转动而移动到与底板二同一平面后，再取下底板二上反花篮，推板二通过驱动臂二在推板轨道上的移动和转动关节的转动而移动到契合石英舟的角度后，固定放置石英舟在底板二上。
转动关节令驱动臂二可以转动，从而带动推板二转动。所述推板二通过驱动臂二的在推板轨道上的移动和转动关节的转动而移动到与底板二同一平面后，再取下底板二上反花篮，令反花篮的拿取更加方便。而推板二通过驱动臂二在推板轨道上的移动和转动关节的转动而移动到契合石英舟的角度后，固定放置石英舟在底板二上，使得石英舟的放置更加稳定，不会因为插片而倾倒。
作为优选，所述推板一通过驱动臂一连接到推板轨道、推板二通过驱动臂二连接到推板轨道；所述驱动臂一、驱动臂二上设有转动关节；步骤S02具体包括：所述推板一、推板二通过驱动臂一、驱动臂二在推板轨道上的移动和转动关节的转动而移动到与底板一、底板二同一平面后，再将正花篮固定放置在底板一上，反花篮固定放置在底板二上；之后，所述推板一、推板二通过驱动臂一、驱动臂二在推板轨道上的移动和转动关节的转动而移动到与底板一、底板二垂直的位置。
这样的设置使得将正花篮固定放置在底板一上，反花篮固定放置在底板二上时更加方便，不易损坏正花篮、反花篮内的硅片。
作为优选，所述底板一、底板二宽度位置的两侧均设有防护板，所述防护板在靠近另一个防护板的位置均设有限位块；用反花篮一侧的推板二将反花篮内的硅片推入正花篮内时，推板二碰到限位块后停止推动；用正花篮一侧的推板一将正花篮内的硅片推入石英舟内时，推板一碰到限位块后停止推动。
限位块使得推板一、推板二不会在推动过程中推过头，保证了合片、插片的安全性。
作为优选，所述石英舟的第二支杆、第三支杆滑动连接在支座上；所述步骤S03还包括：根据硅片的大小调整第二支杆、第三支杆的位置后，再放置石英舟在底板二上。
这样的设置，使得石英舟可以承载不同大小的硅片，适用范围更广。
作为优选，所述底板一、底板二的长度方向上设有两个相对的固定卡件；通过固定卡件将所述正花篮固定放置在底板一上，或将反花篮固定放置在底板二上，或将石英舟固定放置在底板二上。
这样设置使得在调节底板一、底板二时，正花篮、反花篮不会偏移位置，也使得正花篮、反花篮不易在合片时发生偏移而导致合片失败。也令正花篮、石英舟在插片时不易发生偏移而导致插片失败。
作为优选，所述底板上的两个固定卡件，一个通过螺栓固定在底板上，另一个通过底板长度方向上的开槽在底板长度方向上可移动地安装；在放置正花篮、反花篮、石英舟前，调节可移动的固定卡件将两个固定卡件之间距离变大，之后再调整可移动的固定卡件将正花篮、反花篮、石英舟固定住。
这样设置，使得在固定正花篮、反花篮、石英舟时，更加方便，可以根据正花篮、反花篮、石英舟的大小灵活调整。
 有益效果
本发明的优点是：
（1）合片采用推板二一次完成，插片采用推板一一次完成，效率更高，节省人力。
（2）正花篮、反花篮、石英舟通过固定卡件固定，使得在调节底板一、底板二时，正花篮、反花篮不会偏移位置，也使得在合片时，正花篮、反花篮不易在推板推动下发生偏移而导致合片失败。也令正花篮、石英舟在插片时不易发生偏移而导致插片失败。
（3）通过底板一、底板二在轨道上的移动，调节底板一、底板二令正花篮的硅片槽与反花篮的硅片槽错位，或调整底板一、底板二令正花篮的硅片槽与石英舟的卡槽相对应，这样在合片和插片时可以更准确，效率也更高。
（4）推板一、推板二可以移动到与底板一、底板二同一平面，令正花篮、反花篮、石英舟的拆装更加方便。
（5）所述石英舟的第二支杆、第三支杆滑动连接在支座上。根据硅片的大小调整第二支杆、第三支杆的位置后，再放置石英舟在底板二上。使得石英舟可以承载不同大小的硅片，适用范围更广。
 附图说明
图1为本发明的整体示意图。
图2为本发明的底板示意图。
图3为本发明的推板示意图。
图4为本发明的石英舟整体示意图。
图5为本发明的石英舟侧面示意图。
图中：1-第一支杆，2-第二支杆，3-第三支杆，4-第四支杆，5-支座，6-滑槽，7-基座，8-底板一，9-底板二，10-推板一，11-推板二，12-底板轨道，13-推板轨道，14-转动关节，15-连杆，16-支撑条，17-防护板，18-限位块，19-固定卡件，20-开槽，21-硅片。
 本发明的实施方式
以下是本发明的具体实施例并结合附图，对本发明的技术方案作进一步的描述，但本发明并不限于这些实施例。
如图1-5所示，一种太阳能电池硅片扩散插片工艺，包括正花篮、反花篮、推片装置、石英舟；所述石英舟包括一对支座5和设有卡槽的四个支杆；所述支杆包括第一支杆1、第二支杆2、第三支杆3和第四支杆4；所述第一支杆1、第二支杆2的连线与第三支杆3、第四支杆4的连线形成直角；在支座5一侧倾倒放置时，第一支杆1、第二支杆2的连线与水平面平行；所述推片装置包括基座7，设置在基座7上的底板一8、底板二9，设置在底板一8外侧的推板一10，设置在底板二9外侧的推板二11；所述底板一8、底板二9通过设置在基座7上的两个底板轨道12在长度方向上移动；所述推板一10、推板二11通过基座7两侧设有的推板轨道13在底部一、底板二9宽度方向上移动；工艺包括：
步骤S01，准备合片，正花篮正放硅片21，反花篮反放硅片21，正花篮、反花篮外形大小一致；
所述正花篮、反花篮上均设有若干个硅片槽，所述反花篮的单个硅片槽可只容纳一块硅片21，所述正花篮的单个硅片槽可容纳两块硅片21。所述正花篮正放硅片21，反花篮反放硅片21，使得合片后正花篮里面的硅片21都是绒面朝外。
步骤S02，合片，正花篮固定放置在底板一8上、反花篮固定放置在底板二9上，正花篮与反花篮开口侧相对。调节底板一8、底板二9，令正花篮的硅片槽与反花篮的硅片槽错位，用反花篮一侧的推板二11将反花篮内的硅片21推入正花篮内，确认绒面朝外，正花篮每个硅片槽内放有两片硅片21。
正花篮固定放置在底板一8上、反花篮固定放置在底板二9上，这样设置使得在调节底板一8、底板二9时，正花篮、反花篮不会偏移位置，也使得在合片时，正花篮、反花篮不易在推板推动下发生偏移而导致合片失败。
优选地，所述底板一8、底板二9的长度方向上设有两个相对的固定卡件19。所述固定卡件19为长方体，在朝内放置物品的一面为磨砂表面。通过固定卡件19将所述正花篮固定放置在底板一8上，将反花篮固定放置在底板二9上。这样设置使得在调节底板一8、底板二9时，正花篮、反花篮不会偏移位置，也使得正花篮、反花篮不易在合片时发生偏移而导致合片失败。优选地，所述底板上的两个固定卡件19，一个通过螺栓固定在底板上，另一个通过底板长度方向上的开槽20在底板长度方向上可移动地安装。在放置正花篮、反花篮前，调节可移动的固定卡件19将两个固定卡件19之间距离变大，之后再调整可移动的固定卡件19将正花篮、反花篮固定住。这样设置，使得在固定正花篮、反花篮时，更加方便，可以根据正花篮、反花篮的大小灵活调整。
优选地，所述推板一10通过驱动臂一连接到推板轨道13、推板二11通过驱动臂二连接到推板轨道13。优选地，所述驱动臂一、驱动臂二上设有转动关节14。一个驱动臂上设有三个转动关节14，这三个转动关节14通过连杆15连接在一起。所述步骤S02具体包括：所述推板一10、推板二11通过驱动臂一、驱动臂二在推板轨道13上的移动和转动关节14的转动而移动到与底板一8、底板二9同一平面后，再将正花篮固定放置在底板一8上，反花篮固定放置在底板二9上。之后，所述推板一10、推板二11通过驱动臂一、驱动臂二在推板轨道13上的移动和转动关节14的转动而移动到与底板一8、底板二9垂直的位置。这样的设置使得将正花篮固定放置在底板一8上，反花篮固定放置在底板二9上时更加方便，不易损坏正花篮、反花篮内的硅片21。
调节底板一8、底板二9，可以令正花篮的硅片槽与反花篮的硅片槽错位，保证合片时的准确度。优选地，所述底板一8、底板二9下方设有支撑条16，支撑条16通过轨道在长度方向上移动，从而带动底板一8、底板二9在长度方向上移动。通过底板一8、底板二9在轨道上的移动，调节底板一8、底板二9令正花篮的硅片槽与反花篮的硅片槽错位。支撑条16令底板一8、底板二9在移动时更稳定，调节底板一8、底板二9时可以更准确地判断是否正花篮的硅片槽与反花篮的硅片槽错位。
优选地，所述轨道长度比支撑条16长0.5CM-1CM。这样使得底板一8、底板二9在长度方向上在0.5CM-1CM范围内移动，不会因为过大的移动距离，导致调整花费更多时间和精力。
之后，驱动臂驱动反花篮一侧的推板二11将反花篮内的硅片21推入正花篮内。
优选地，所述底板一8、底板二9宽度位置的两侧均设有防护板17，所述防护板17在靠近另一个防护板17的位置均设有限位块18，用反花篮一侧的推板二11将反花篮内的硅片21推入正花篮内时，推板二11碰到限位块18后停止推动。限位块18使得推板二11不会在推动过程中推过头，保证了合片的安全性。
合片采用推板二11一次完成，效率更高，节省人力。
步骤S03，准备插片，取下底板二9上的反花篮，调整底板二9一侧的推板二11后，固定放置石英舟在底板二9上，石英舟卡槽开口与正花篮开口侧相对。所述石英舟在支座5一侧倾倒放置时，第一支杆1、第二支杆2的连线与水平面平行，这样便于在硅片21放置时可以更好地推进去。
所述推板一10通过驱动臂一连接到推板轨道13、推板二11通过驱动臂二连接到推板轨道13。优选地，所述驱动臂二上设有转动关节14。一个驱动臂上设有三个转动关节14，这三个转动关节14通过连杆15连接在一起。所述推板二11通过驱动臂二的在推板轨道13上的移动和转动关节14的转动而移动到与底板二9同一平面后，再取下底板二9上反花篮，令反花篮的拿取更加方便。推板二11通过驱动臂二在推板轨道13上的移动和转动关节14的转动而移动到契合石英舟的角度后，固定放置石英舟在底板二9上。
优选地，所述石英舟的第二支杆2、第三支杆3通过滑槽6滑动连接在支座5上。根据硅片21的大小调整第二支杆2、第三支杆3的位置后，再放置石英舟在底板二9上。这样的设置，使得石英舟可以承载不同大小的硅片21，适用范围更广。
优选地，所述底板一8、底板二9的长度方向上设有两个相对的固定卡件19。所述固定卡件19为长方体，在朝内放置物品的一面为磨砂表面。通过固定卡件19将石英舟固定放置在底板二9上。这样设置使得在调节底板一8、底板二9时，令石英舟在插片时不易发生偏移而导致插片失败。优选地，所述底板上的两个固定卡件19，一个通过螺栓固定在底板上，另一个通过底板长度方向上的开槽20在底板长度方向上可移动地安装。在放置石英舟前，调节可移动的固定卡件19将两个固定卡件19之间距离变大，之后再调整可移动的固定卡件19将石英舟固定住。这样设置，使得在固定石英舟时，更加方便，可以根据石英舟的大小灵活调整。
步骤S04，调整底板一8、底板二9令正花篮的硅片槽与石英舟的卡槽相对应，用正花篮一侧的推板一10将正花篮内的硅片21推入石英舟内。
调节底板一8、底板二9，花篮的硅片槽与石英舟的卡槽相对应，保证插片时的准确度。优选地，所述底板一8、底板二9下方设有支撑条16，支撑条16通过轨道在长度方向上移动。通过底板一8、底板二9在轨道上的移动，调整底板一8、底板二9令正花篮的硅片槽与石英舟的卡槽相对应。支撑条16令底板一8、底板二9在移动时更稳定，保证插片时的精准度。
优选地，所述推板一10通过驱动臂一连接到推板轨道13、推板二11通过驱动臂二连接到推板轨道13，驱动正花篮一侧的推板一10将正花篮内的硅片21推入石英舟内。驱动臂更加灵活，更好地令推板一10、推板二11移动。
优选地，所述底板一8、底板二9宽度位置的两侧均设有防护板17，所述防护板17在靠近另一个防护板17的位置均设有限位块18，用正花篮一侧的推板一10将正花篮内的硅片21推入石英舟内时，推板一10碰到限位块18后停止推动。限位块18使得推板一10、不会在推动过程中推过头，保证了插片的安全性。
插片采用推板一10一次完成，效率更高，节省人力。
本文中所描述的具体实施例仅仅是对本发明精神作举例说明。本发明所属技术领域的技术人员可以对所描述的具体实施例做各种各样的修改或补充或采用类似的方式替代，但并不会偏离本发明的精神或者超越所附权利要求书所定义的范围。

Claims (10)

  1. 一种太阳能电池硅片扩散插片工艺，其特征在于，包括正花篮、反花篮、推片装置、石英舟；所述石英舟包括一对支座和设有卡槽的四个支杆；所述支杆包括第一支杆、第二支杆、第三支杆和第四支杆；所述第一支杆、第二支杆的连线与第三支杆、第四支杆的连线形成直角；在支座一侧倾倒放置时，第一支杆、第二支杆的连线与水平面平行；所述推片装置包括基座，设置在基座上的底板一、底板二，设置在底板一外侧的推板一，设置在底板二外侧的推板二；所述底板一、底板二通过设置在基座上的两个底板轨道在长度方向上移动；所述推板一、推板二通过基座两侧设有的推板轨道在底部一、底板二宽度方向上移动；工艺包括：
    步骤S01，准备合片，正花篮正放硅片，反花篮反放硅片，正花篮、反花篮外形大小一致；
    步骤S02，合片，正花篮固定放置在底板一上、反花篮固定放置在底板二上，正花篮与反花篮开口侧相对；调节底板一、底板二，令正花篮的硅片槽与反花篮的硅片槽错位，用反花篮一侧的推板二将反花篮内的硅片推入正花篮内，确认绒面朝外，正花篮每个硅片槽内放有两片硅片；
    步骤S03，准备插片，取下底板二上的反花篮，调整底板二一侧的推板二后，固定放置石英舟在底板二上，石英舟卡槽开口与正花篮开口侧相对；
    步骤S04，调整底板一、底板二令正花篮的硅片槽与石英舟的卡槽相对应，用正花篮一侧的推板一将正花篮内的硅片推入石英舟内。
  2. 根据权利要求1所述的一种太阳能电池硅片扩散插片工艺，其特征在于，所述底板一、底板二下方设有支撑条，支撑条通过轨道在长度方向上移动；通过底板一、底板二在轨道上的移动，调节底板一、底板二令正花篮的硅片槽与反花篮的硅片槽错位，或调整底板一、底板二令正花篮的硅片槽与石英舟的卡槽相对应。
  3. 根据权利要求2所述的一种太阳能电池硅片扩散插片工艺，其特征在于，所述底板轨道长度比支撑条长0.5CM-1CM。
  4. 根据权利要求1所述的一种太阳能电池硅片扩散插片工艺，其特征在于，所述推板一通过驱动臂一连接到推板轨道、推板二通过驱动臂二连接到推板轨道；驱动臂驱动反花篮一侧的推板二将反花篮内的硅片推入正花篮内，或驱动正花篮一侧的推板一将正花篮内的硅片推入石英舟内。
  5. 根据权利要求1所述的一种太阳能电池硅片扩散插片工艺，其特征在于，所述推板二通过驱动臂二连接到推板轨道，所述驱动臂二上设有转动关节；步骤S03具体包括：所述推板二通过驱动臂二在推板轨道上的移动和转动关节的转动而移动到与底板二同一平面后，再取下底板二上反花篮，推板二通过驱动臂二在推板轨道上的移动和转动关节的转动而移动到契合石英舟的角度后，固定放置石英舟在底板二上。
  6. 根据权利要求1所述的一种太阳能电池硅片扩散插片工艺，其特征在于，所述推板一通过驱动臂一连接到推板轨道、推板二通过驱动臂二连接到推板轨道；所述驱动臂一、驱动臂二上设有转动关节；步骤S02具体包括：所述推板一、推板二通过驱动臂一、驱动臂二在推板轨道上的移动和转动关节的转动而移动到与底板一、底板二同一平面后，再将正花篮固定放置在底板一上，反花篮固定放置在底板二上；之后，所述推板一、推板二通过驱动臂一、驱动臂二在推板轨道上的移动和转动关节的转动而移动到与底板一、底板二垂直的位置。
  7. 根据权利要求1所述的一种太阳能电池硅片扩散插片工艺，其特征在于，所述底板一、底板二宽度位置的两侧均设有防护板，所述防护板在靠近另一个防护板的位置均设有限位块；用反花篮一侧的推板二将反花篮内的硅片推入正花篮内时，推板二碰到限位块后停止推动；用正花篮一侧的推板一将正花篮内的硅片推入石英舟内时，推板一碰到限位块后停止推动。
  8. 根据权利要求1所述的一种太阳能电池硅片扩散插片工艺，其特征在于，所述石英舟的第二支杆、第三支杆滑动连接在支座上；所述步骤S03还包括：根据硅片的大小调整第二支杆、第三支杆的位置后，再放置石英舟在底板二上。
  9. 根据权利要求1所述的一种太阳能电池硅片扩散插片工艺，其特征在于，所述底板一、底板二的长度方向上设有两个相对的固定卡件；通过固定卡件将所述正花篮固定放置在底板一上，或将反花篮固定放置在底板二上，或将石英舟固定放置在底板二上。
  10. 根据权利要求9所述的一种太阳能电池硅片扩散插片工艺，其特征在于，所述底板上的两个固定卡件，一个通过螺栓固定在底板上，另一个通过底板长度方向上的开槽在底板长度方向上可移动地安装；在放置正花篮、反花篮、石英舟前，调节可移动的固定卡件将两个固定卡件之间距离变大，之后再调整可移动的固定卡件将正花篮、反花篮、石英舟固定住。
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