WO2022041010A1 - Chip packaging structure and electronic device - Google Patents

Chip packaging structure and electronic device Download PDF

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Publication number
WO2022041010A1
WO2022041010A1 PCT/CN2020/111523 CN2020111523W WO2022041010A1 WO 2022041010 A1 WO2022041010 A1 WO 2022041010A1 CN 2020111523 W CN2020111523 W CN 2020111523W WO 2022041010 A1 WO2022041010 A1 WO 2022041010A1
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WO
WIPO (PCT)
Prior art keywords
chip
heat dissipation
boss structure
interface layer
boss
Prior art date
Application number
PCT/CN2020/111523
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French (fr)
Chinese (zh)
Inventor
吕建标
陈晓丹
郑见涛
赵南
Original Assignee
华为技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 华为技术有限公司 filed Critical 华为技术有限公司
Priority to PCT/CN2020/111523 priority Critical patent/WO2022041010A1/en
Priority to CN202080101717.9A priority patent/CN115699298A/en
Publication of WO2022041010A1 publication Critical patent/WO2022041010A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device

Definitions

  • the present application relates to the technical field of chip packaging, and in particular, to a chip packaging structure and an electronic device.
  • Embodiments of the present application provide a chip packaging structure and an electronic device, which are used to improve the thermal contact reliability between the thermally conductive interface material, the chip, and the heat dissipation cover, respectively.
  • a chip packaging structure includes a package substrate, at least one chip, at least one inner thermal interface layer and a heat dissipation cover.
  • the package substrate has a first surface.
  • the chip is disposed on the first surface of the package substrate.
  • the at least one inner thermal interface layer respectively covers the surface of the at least one chip on the side away from the package substrate.
  • the heat dissipation cover includes an upper cover and a plurality of side walls. A plurality of side walls are arranged end to end in sequence around the circumference of the upper cover, and are connected with the first surface.
  • An accommodating cavity for accommodating at least one chip is formed between the heat dissipation cover and the package substrate.
  • the upper cover includes at least one boss structure and a first engaging structure.
  • Each of the above at least one boss structure is in contact with at least one of the above-mentioned inner thermally conductive interface layers.
  • each of the at least one boss structure is connected to the side wall through the first connecting structure.
  • the maximum thickness D1_max of the boss structure is greater than the maximum thickness D2_max of the first connecting structure, and the boss structure is away from the surface of the chip and protrudes from the surface of the first connecting structure away from the chip.
  • the direction of the thickness is perpendicular to the direction of the first surface. Based on this, during the service process of the chip package structure, the package substrate is warped due to the temperature increase.
  • the warping phenomenon tends to increase the gap between the heat dissipation cover and the heat dissipation device. But because the heat dissipation cover has a boss structure.
  • the maximum thickness D1_max of the boss structure is greater than the maximum thickness D2_max of the first connecting structure, and the boss structure is far away from the surface of the chip and protrudes from the surface of the first connecting structure far away from the chip. Therefore, the above boss structure can reduce the heat dissipation cover. clearance from the heat sink.
  • the gap between the heat dissipation cover and the heat dissipation device can be prevented from being greatly changed due to the deformation of the external thermal interface layer, so that the heat dissipation device fixed on the circuit board can still be effectively pressed against the boss structure. It can reduce the probability of delamination between the cured internal thermal interface layer and the chip, and improve the thermal contact reliability between the internal thermal interface layer and the chip and the heat dissipation cover, thereby reducing the high temperature power failure of the chip packaging structure. the probability of the phenomenon.
  • the boss structure is close to the surface of the chip, and protrudes from the surface of the first connecting structure close to the chip.
  • both the upper and lower surfaces of the boss structure protrude from the first connecting structure, which is beneficial to increase the thickness and rigidity of the boss structure, so that the heat dissipation device can more effectively apply pressure to the boss structure in the heat dissipation cover. pressure, reducing the probability of delamination of the inner thermal interface layer.
  • the surface of the boss structure close to the chip is flush with the surface of the first connecting structure close to the chip.
  • the surface of the upper cover in the heat dissipation cover close to the chip can have a higher flatness, so as to achieve the purpose of simplifying the structure of the mold for manufacturing the heat dissipation cover.
  • the thickness of the first connecting structure gradually decreases along the direction from the boss structure to the side wall.
  • the rigidity of the end of the first connecting structure close to the side wall can be reduced, so that when the heat dissipation device presses the heat dissipation cover, the end of the first connecting structure close to the side wall is easily deformed.
  • the pressure is more concentrated on the boss structure with greater thickness and rigidity, and then transmitted to the chip through the boss structure in the heat dissipation cover, reducing the appearance of the internal thermal interface layer. probability of layers.
  • the surface of the first connecting structure close to the chip is flat.
  • the first connecting structure in order to ensure that the thickness of the first connecting structure gradually decreases along the direction from the boss structure to the sidewall, the first connecting structure is close to the surface of the chip. Bevel or arc surface.
  • the surface of the first connecting structure away from the chip is flat. In this case, in order to ensure that the thickness of the first connecting structure is gradually reduced along the direction from the boss structure to the sidewall, the surface of the first connecting structure away from the chip is an inclined surface or a circular arc surface.
  • the side surface of the side wall away from the packaging substrate is the upper reference surface
  • the surface of the inner thermal interface layer away from the packaging substrate is the lower reference surface.
  • the minimum thickness D2_min of the first connecting structure is smaller than the reference thickness D0. In this way, the purpose of reducing the rigidity of the first connecting structure can be achieved by reducing the thickness of the first connecting structure. Therefore, when the heat dissipation device presses the heat dissipation cover, the pressure exerted by the heat dissipation device on the heat dissipation cover can be more concentrated on the boss structure, thereby reducing the probability of delamination of the inner thermal interface layer.
  • 20% ⁇ D0 ⁇ D2_min ⁇ 80% ⁇ D0 20% ⁇ D0 ⁇ D2_min ⁇ 80% ⁇ D0.
  • the minimum thickness D2_min of the first connecting structure is less than 20% ⁇ D0, the thickness of the first connecting structure 311 is too thin, so that the rigidity of the first connecting structure is too small, which reduces the resistance of the heat dissipation cover to the warping of the package substrate 102 control ability.
  • the minimum thickness D2_min of the first connecting structure is greater than 80% ⁇ D0, the thickness of the first connecting structure is too large and the rigidity is too strong, so that when the heat dissipation device presses the heat dissipation cover, it is not conducive to the heat dissipation device to the heat dissipation cover. The applied pressure is transmitted to the chip.
  • the maximum distance L_max between the surface of the boss structure away from the chip and the upper reference surface.
  • L_max ⁇ D0.
  • the part of the boss structure located in the accommodating cavity that is, the part of the boss structure where the reference thickness D0 is located
  • the part of the boss structure located outside the accommodating cavity that is, the largest part of the boss structure
  • the thickness of the part where the distance L_max is located is smaller. Therefore, when the maximum thickness D1_max of the boss structure meets the design requirements, the maximum distance L_max of the boss structure does not need to be too large, which is beneficial to improve the filling degree of the external thermal interface layer between the heat dissipation device and the heat dissipation cover 103 .
  • the protruding size of the boss structure is too large, so that the gap between the boss structure and the heat sink is too small, and the effective coverage area of the outer thermal interface layer on the upper surface of the heat dissipation cover is small, thereby reducing the The filling amount of the outer thermal interface layer between the heat dissipation device and the heat dissipation cover is determined.
  • the thickness of the outer thermally conductive interface layer cannot absorb the thickness of the boss structure well, so that the contact flatness with the surface of the heat dissipation device facing the package substrate is reduced.
  • a surface of the boss structure away from the chip is a first arc surface
  • a portion of the surface of the first connecting structure away from the chip that is close to the first arc surface is a second arc surface.
  • the curvature of the second arc surface is the same as that of the first arc surface
  • the second arc surface is connected with the first arc surface.
  • the vertical projection of the chip corresponding to the boss structure on the first surface is located, and the first arc surface and the second arc surface are within the range of the vertical projection of the first surface.
  • the boss structure in the upper cover is raised away from the surface of the chip, but also the surface of the first connecting structure away from the chip will be raised at the position of the second arc surface, so that the distance between the upper cover and the upper cover can be appropriately increased.
  • the size of the raised portion of the chip's surface Therefore, when the pressure applied by the heat dissipation device to the heat dissipation cover, the pressure can be more effectively applied to the pressure on the raised portion of the upper cover and transmitted to the chip, so that the thermal interface layer and the chip are more closely attached.
  • the vertical projection of the side of the second arc surface away from the first arc surface on the first surface has a first contour.
  • the vertical projection of the chip corresponding to the boss structure on the first surface has a second contour.
  • the maximum distance Hmax between the first contour and the second contour satisfies: Hmax ⁇ 2mm.
  • Hmax>2mm the size of the raised part of the surface of the upper cover away from the chip is too large, so that the gap between the upper cover and the heat sink is too small, and the external thermal interface layer can only cover the area where the boss structure is located in the upper cover. Therefore, the filling amount of the outer thermal interface layer between the heat dissipation device and the heat dissipation cover is reduced.
  • At least a part of the surface of the boss structure away from the chip is a third arc surface.
  • the vertical projection of the third arc surface on the first surface is located within the range of the vertical projection of the chip corresponding to the boss structure on the first surface.
  • the vertical projection of the third arc surface on the first surface has a third contour.
  • the vertical projection of the chip corresponding to the boss structure on the first surface has a second contour.
  • the heat dissipation device exerts pressure on the heat dissipation cover
  • the area of the active surface of the heat dissipation cover acting on the chip is too small, which is not conducive to the heat dissipation device to effectively apply pressure to the chip. .
  • the surface of the boss structure away from the chip is the first arc surface.
  • the vertical projection of the first arc surface on the first surface completely overlaps the vertical projection of the chip corresponding to the boss structure on the first surface.
  • the boss structure can completely cover the chip, so that when the heat dissipation device presses the heat dissipation cover, the force acting on the boss structure can be more effectively transmitted to the chip.
  • the vertical projection of the contact surface between the boss structure and the inner thermal conductive interface layer on the first surface completely overlaps with the vertical projection of the chip connected to the boss structure on the first surface.
  • the contact surface between the boss structure and the inner thermal interface layer can completely cover the chip, so that when the heat dissipation device presses the heat dissipation cover, the force acting on the boss structure can be more effectively transmitted to the chip.
  • the upper cover further includes at least one first groove, and the first groove is opened on one side surface of the first connecting structure close to the chip.
  • the first groove is located at one end of the first engaging structure away from the boss structure.
  • the first groove is an annular groove surrounding the circumference of at least one chip, so that the rigidity of the first engaging structures located at the periphery of the boss structure is reduced.
  • the depth S1 of the first groove satisfies: 20% ⁇ D2_max ⁇ S1 ⁇ 80% ⁇ D2_max; the groove width L1 of the first groove satisfies: 0.1mm ⁇ L1 ⁇ 20mm.
  • the depth S1 of the first groove is less than 20% ⁇ D2_max and the width L1 is less than 0.1 mm, the requirements for the manufacturing accuracy of the first groove are high, which is not conducive to reducing the manufacturing cost.
  • the size of the first groove is too small, and the effect of reducing the rigidity of the first connecting structure is not obvious.
  • the size of the first groove is too large, which results in the first connecting structure being too small, reducing the effect of the heat dissipation cover on the warping of the package substrate. control ability.
  • the at least one chip includes a first chip and a second chip.
  • the at least one inner thermally conductive interface layer includes a first inner thermally conductive interface layer covering the first chip and a second inner thermally conductive interface layer covering the second chip.
  • the surface of the first inner thermal interface layer away from the package substrate is flush with the surface of the second inner thermal interface layer away from the package substrate.
  • the at least one boss structure includes a first boss structure and a second boss structure, the first boss structure is in contact with the first inner thermally conductive interface layer, and the second boss structure is in contact with the second inner thermally conductive interface layer .
  • the upper cover further includes a second engaging structure, the second engaging structure is located between the first boss structure and the second boss structure, and is connected with the first boss structure and the second boss structure.
  • the above-mentioned chip package structure is a multi-chip package structure.
  • the upper cover further includes at least one second groove, and the second groove is opened on a side surface of the second connecting structure close to the package substrate.
  • the setting method of the size of the second groove may be the same as the setting method of the first groove, which will not be repeated here.
  • the packaging substrate is easily deformed in the process of temperature change.
  • the second groove and the first groove on the upper cover of the heat dissipation cover can weaken the rigidity of the upper cover, so that when the package substrate is deformed, there is a certain gap between the movement of the package substrate and the movement of the heat dissipation cover.
  • the decoupling effect reduces the restraint when the chip moves with the package substrate. Thus, cracking of the molding layer between two adjacent chips can be reduced.
  • the at least one chip includes a first chip and a second chip.
  • the at least one inner thermally conductive interface layer includes a first inner thermally conductive interface layer covering the first chip and a second inner thermally conductive interface layer covering the second chip.
  • the surface of the first inner thermal interface layer away from the package substrate is flush with the surface of the second inner thermal interface layer away from the package substrate.
  • a boss structure is in contact with the first inner thermally conductive interface layer and the second inner thermally conductive interface layer.
  • the above-mentioned chip package structure is a multi-chip package structure. When the heat dissipation device presses the heat dissipation cover, the pressure can be transmitted to the first chip and the second chip through the same boss structure, so that the structure of the heat dissipation cover can be simplified.
  • an electronic device including a heat dissipation device, an external thermally conductive interface layer, a circuit board, and any one of the above-mentioned chip packaging structures disposed on the circuit board.
  • the outer thermal conductive interface layer is located between the heat dissipation device and the heat dissipation cover in the chip package structure, and is connected with the heat dissipation device and the heat dissipation cover.
  • the heat sink is also connected to the circuit board.
  • the electronic device has the same technical effect as the chip packaging structure provided by the foregoing embodiments, and details are not described herein again.
  • FIG. 1 is a schematic structural diagram of a part of an electronic device provided by an embodiment of the present application.
  • Fig. 2a is a kind of structural schematic diagram of the chip packaging structure in Fig. 1;
  • FIG. 2b is a schematic structural diagram of the side wall of the heat dissipation cover in FIG. 2a;
  • Fig. 3a is another structural schematic diagram of the chip packaging structure in Fig. 1;
  • Fig. 3b is another structural schematic diagram of the chip packaging structure in Fig. 1;
  • FIG. 4 is a schematic diagram of a warping of the chip package structure provided by the embodiment of the present application.
  • FIG. 5 is a schematic structural diagram of a chip packaging structure connected to a heat sink provided by an embodiment of the present application
  • FIG. 6a is another structural schematic diagram of the chip packaging structure in FIG. 1;
  • Fig. 6b is another structural schematic diagram of the chip packaging structure in Fig. 1;
  • FIG. 7a is another schematic structural diagram of the chip packaging structure in FIG. 1;
  • FIG. 7b is another schematic structural diagram of the chip packaging structure in FIG. 1;
  • FIG. 8 is another structural schematic diagram of the chip packaging structure in FIG. 1;
  • Fig. 9a is another structural schematic diagram of the chip packaging structure in Fig. 1;
  • FIG. 9b is a schematic top view outline of the boss structure and the chip in FIG. 9a;
  • Fig. 9c is another structural schematic diagram of the chip packaging structure in Fig. 1;
  • FIG. 9d is a schematic top view outline of the boss structure and the chip in FIG. 9c;
  • Fig. 9e is another structural schematic diagram of the chip packaging structure in Fig. 1;
  • FIG. 10 is another structural schematic diagram of the chip packaging structure in FIG. 1;
  • 11a is a schematic structural diagram of a heat dissipation cover provided by an embodiment of the present application.
  • 11b is a schematic structural diagram of another heat dissipation cover provided by an embodiment of the present application.
  • 12a is a schematic diagram of a multi-chip packaged chip package structure provided by an embodiment of the present application.
  • FIG. 12b is a schematic diagram of another multi-chip packaged chip package structure according to an embodiment of the present application.
  • 12c is a schematic diagram of another multi-chip packaged chip package structure provided by an embodiment of the present application.
  • FIG. 13 is a schematic diagram of another multi-chip packaged chip package structure according to an embodiment of the present application.
  • first”, second, etc. are only used for descriptive purposes, and should not be understood as indicating or implying relative importance or implying the number of indicated technical features.
  • a feature defined as “first”, “second”, etc. may expressly or implicitly include one or more of that feature.
  • orientation terms such as “upper” and “lower” are defined relative to the orientation in which the components in the drawings are schematically placed. It should be understood that these directional terms are relative concepts, and they are used for relative In the description and clarification of the drawings, it may change correspondingly according to the change of the orientation in which the components are placed in the drawings.
  • connection should be understood in a broad sense.
  • connection may be a fixed connection, a detachable connection, or an integrated body; it may be directly connected, or Can be indirectly connected through an intermediary.
  • electrical connection may be a direct electrical connection or an indirect electrical connection through an intermediate medium.
  • Embodiments of the present application provide an electronic device.
  • the electronic device can include mobile phone (mobile phone), tablet computer (pad), smart wearable products (for example, smart watch, smart bracelet), virtual reality (virtual reality, VR) terminal equipment, augmented reality (augmented reality AR) Terminal equipment and other equipment.
  • the above-mentioned electronic devices may also be electronic devices such as electric vehicles, small household appliances (such as soymilk machines, sweeping robots), unmanned aerial vehicles, or electronic devices applied in a pan-network.
  • the embodiments of the present application do not specifically limit the specific form of the above electronic device.
  • the above-mentioned electronic device 01 may include a chip package structure 10 and a printed circuit board (PCB) 12 .
  • the chip package structure 10 may be electrically connected to the PCB 12 through a ball grid array (BGA) 13 or a land grid array (LGA).
  • BGA ball grid array
  • LGA land grid array
  • the above-mentioned chip package structure 10 may include at least one chip 101 and a package substrate 102 .
  • the package substrate 102 has a first surface A1 and a second surface A2 disposed opposite to each other.
  • the chip 101 is disposed on the first surface A1 of the package substrate 102
  • the solder ball array 13 is disposed on the second surface A2 of the package substrate 102 .
  • the chip 101 may implement signal transmission through the packaging substrate 102 , the solder ball array 13 and other chips or chip packaging structures on the PCB 12 .
  • the chip package structure 10 further includes at least one inner thermal interface layer 110 and a heat dissipation lid 103 .
  • the at least one inner thermal interface layer 110 respectively covers the surface of the at least one chip 101 on the side away from the package substrate 102 .
  • the heat dissipation cover 103 is connected with the inner thermal conductive interface layer 110 and the package substrate 102 , and a accommodating cavity 20 for accommodating the at least one chip 101 is formed between the heat dissipation cover 103 and the package substrate 102 .
  • FIG. 1 is described by taking an example in which one chip 101 is packaged in the chip packaging structure 10 .
  • the above-mentioned chip package structure 10 may also be a multi-chip package structure (multi chip module, MCM).
  • MCM multi chip module
  • the above-mentioned chip packaging structure 10 may be packaged with at least two chips 101 .
  • a surface of each chip 101 on one side away from the packaging substrate 102 may be covered with an inner thermal interface layer 110 .
  • the above-mentioned chip 101 may be a single die.
  • the above-mentioned chip 101 may be a structure in which a bare chip is disposed on an interposer using a chip on wafer on substrate (COWOS) technology including a silicon substrate.
  • COWOS chip on wafer on substrate
  • the above-mentioned chip 101 may be a structure in which a bare chip is disposed on a redistribution layer (RDL) using a fan out package (FOP) technology.
  • RDL redistribution layer
  • FOP fan out package
  • the above-mentioned electronic device 01 further includes a heat dissipation device 11 and an outer thermally conductive interface layer 120 .
  • the outer thermal interface layer 120 is connected with the heat dissipation device 11 and the heat dissipation cover 103 in the chip package structure 10 .
  • the above-mentioned heat dissipation device 11 can also be connected to the PCB 12 through screws.
  • the above-mentioned heat dissipation device 11 may be a radiator or a liquid cooling plate.
  • the heat generated by the chip 101 during operation as a heat source can be transferred to the heat dissipation cover 103 as a heat dissipation device through the inner thermal conductive interface layer 110 .
  • the inner thermal interface layer 110 can reduce the contact thermal resistance between the chip 101 and the heat dissipation cover 103 , so as to improve the heat dissipation performance of the heat dissipation cover 103 .
  • the heat dissipation cover 103 is used as a heat source, and the heat on the heat dissipation cover 103 can be transferred to the heat dissipation device 11 as a heat dissipation device through the outer thermal conductive interface layer 120 to dissipate heat through the heat dissipation device 11 .
  • the outer thermal interface layer 120 is used to reduce the contact thermal resistance between the heat dissipation device 11 and the heat dissipation cover 103 , so as to improve the heat dissipation performance of the heat dissipation device 11 .
  • the materials of the inner thermally conductive interface layer 110 and the outer thermally conductive interface layer 120 may include thermally conductive silica gel. It can be seen from the above that the thermal contact resistance generated between the surface of the heat source and the heat sink can be reduced by the above-mentioned inner thermal interface layer 110 and outer thermal interface layer 120 .
  • the inner thermal interface layer 110 and the outer thermal interface layer 120 can also well fill the gap between the heat source and the heat sink, and squeeze out the air between the above two, so as to prevent the air as a poor thermal conductor from hindering the heat The transfer between the heat source and the heat sink.
  • the inner thermal interface layer 110 and the outer thermal interface layer 120 can also make the contact between the heat source and the heat sink more sufficient, and have the function of bonding the heat source and the heat sink.
  • the material constituting the heat dissipation cover 103 can be a metal material with good thermal conductivity, such as copper, aluminum, and the like.
  • the heat dissipation cover 103 may include an upper cover 31 and a plurality of side walls 32 .
  • a plurality of side walls 32 are disposed around the circumference of the upper cover 31 and may be connected to the first surface A1 of the package substrate 102 through an adhesive layer 40 .
  • the bonding position between the sidewall 32 and the package substrate 102 may be referred to as a footprint.
  • the plurality of side walls 32 are connected end to end to form a frame structure, and the hollow part of the frame structure is where the above-mentioned accommodating cavity 20 is located. area.
  • the embodiment of the present application is described by taking the heat dissipation cover 103 including four side walls 32 as an example, and the frame structure formed by the four side walls 32 being connected end to end is a rectangle as an example.
  • the present application does not limit the number of the side walls 32 in the heat dissipation cover 103 and the shape of the frame structure formed by connecting the plurality of side walls 32 end to end, which will not be repeated here.
  • the above-mentioned upper cover 31 may include at least one boss structure 310 and a first engaging structure 311 .
  • Each of the at least one boss structure 310 described above may be in contact with the at least one inner thermally conductive interface layer 110 .
  • the boss structure 310 is in contact with the inner thermal interface layer 110 .
  • the bossed structure 310 can be in contact with the above-mentioned plurality of inner thermally conductive interface layers 110 at the same time.
  • the upper cover 31 has a plurality of boss structures 310 and the chip package structure 10 includes a plurality of inner thermally conductive interface layers 110
  • each boss structure 310 in the plurality of boss structures 310 may be respectively associated with an inner thermally conductive interface layer 110 .
  • the interface layers 110 are in contact.
  • each of the at least one boss structure 310 may be connected to the side wall 32 through the first connecting structure 311 .
  • the part of the upper cover 31 used for contacting the inner thermal interface layer 110 is the above-mentioned boss structure 310
  • the part of the upper cover 31 used to connect the boss structure 310 with the side wall 32 is the above-mentioned first connecting structure 311 .
  • the boss structure 310 and the first connecting structure 311 in the upper cover 31 can be made of the same material and are an integral structure. In the process of manufacturing the heat dissipation cover 103 , the above-mentioned four side walls 32 , the boss structure 310 and the first connecting structure 311 in the upper cover 31 can be simultaneously prepared through the same process. In addition, since the boss structure 310 and the first connecting structure 311 are integrated structures, the following embodiments distinguish the boss structure 310 and the first connecting structure 311 for the convenience of description.
  • the portion corresponding to the vertical projection of the at least one chip 101 on the first surface A is the boss structure 310 . For example, as shown in FIG.
  • the vertical projection of the boss structure 310 on the first surface A1 can be the same as the chip 101 .
  • the vertical projections on the first surface A1 completely overlap.
  • the vertical projections of the above-mentioned plurality of chips 101 on the first surface A1 may all be located on the first surface A1 of the boss structure 310. within the range of the vertical projection on a surface A1.
  • the vertical projection of each boss structure 310 on the first surface A1 may be the same as that of one chip 101 .
  • the vertical projections on the first surface A1 completely overlap.
  • the part located outside the vertical projection of the chip 101 on the first surface A is the above-mentioned first connecting structure 311 .
  • the maximum thickness D1_max of the boss structure 310 is greater than the maximum thickness D2_max of the first connecting structure 311 , and the boss structure 310 is away from the surface of the chip 101 and protrudes from the surface of the first connecting structure 311 away from the chip 101 .
  • 2a is an example for illustrating that the surface of the boss structure 310 away from the chip 101 is stepped.
  • the surface of the boss structure 310 away from the chip 101 may be a convex arc surface in a direction away from the package substrate 102 .
  • the maximum thickness D1_max of the boss structure 310 refers to, along the direction perpendicular to the first surface A1 , the part with the largest thickness in the boss structure 310 .
  • the maximum thickness D2_max of the first connecting structure 311 refers to, along the direction perpendicular to the first surface A1 , the part with the largest thickness in the first connecting structure 311 .
  • FIG. 3 a illustrates the structure of the side wall 32 by taking the example that the side wall 32 of the heat dissipation cover 103 is perpendicular to the first surface A1 of the package substrate 102 .
  • the sidewall 32 of the heat dissipation cover 103 may have an acute angle ⁇ with the package substrate 102 .
  • the distribution of the entire heat dissipation cover 103 on the package substrate 102 can be reduced.
  • the component area is beneficial to save the component space on the package substrate 102 , so that more chips 101 or other electronic components can be arranged on the package substrate 102 .
  • the thickness of any one of the thickness of the boss structure 310 and the thickness of the first connecting structure 311 is perpendicular to the direction of the first surface A1, that is, along the Y direction shown in FIG. 3a .
  • the maximum thickness D1_max of the boss structure 310 refers to the maximum distance between the opposite upper and lower surfaces of the boss structure 310 along the Y direction.
  • the maximum thickness D2_max of the first connecting structure 311 refers to the maximum distance between the opposite upper and lower surfaces of the first connecting structure 311 along the Y direction.
  • the chip package structure 10 with the heat dissipation cover 103 can be arranged on the PCB 12, the outer thermal interface layer 120 is formed on the upper surface of the heat dissipation cover 103, and the heat dissipation device 11 is disposed on the side of the heat dissipation cover 103 away from the PCB12. on the surface. Then, the four corners of the heat dissipation device 11 are fixed on the PCB 12 by means of screw connections, such as screws.
  • the package substrate 102 is warped as shown in FIG. 4 due to the temperature rise.
  • the warpage phenomenon may cause the gap between the heat dissipation cover 103 and the heat dissipation device 11 to increase.
  • the heat dissipation cover 103 has the boss structure 310 .
  • the maximum thickness D1_max of the boss structure 310 is greater than the maximum thickness D2_max of the first connecting structure 311 , and the boss structure 310 is far away from the surface of the chip 101 and protrudes from the surface of the first connecting structure 311 away from the chip 101 . Therefore, the above boss The structure 310 can reduce the gap between the heat dissipation cover 103 and the heat dissipation device 11 .
  • the gap between the heat dissipation cover 103 and the heat dissipation device 11 can be prevented from being greatly changed due to the deformation of the outer thermal interface layer 120 , so that the heat dissipation device 11 fixed on the PCB 12 can still be effectively pressed against On the boss structure 310, the probability of delamination between the cured inner thermal interface layer 110 and the chip 101 is reduced, and the thermal contact reliability between the inner thermal interface layer 110 and the chip 101 and the heat dissipation cover 103 is improved, thereby The probability of the chip package structure 10 being powered down at high temperature can be reduced.
  • the thermally conductive interface layer 110 is easily delaminated at the portion in contact with the center position of the chip 101 .
  • the portion of the boss structure 310 of the heat dissipation cover 103 having the maximum thickness D1_max can be located at the center of the chip 101 .
  • the heat dissipation cover 103 when the upper surface of the heat dissipation cover 103 is flat, at the service temperature or higher, the surface will be concave to show a "smiley face" state, which makes it difficult for the external force to be effectively transmitted to the chip 101 through the heat dissipation cover 103 .
  • the heat dissipation cover 103 since the heat dissipation cover 103 has the above-mentioned boss structure 310 , it is better in contact with the outer thermal interface layer 120 , so that the heat dissipation device 11 can more effectively apply pressure to the chip 101 .
  • the boss structure 310 is used as a part of the heat dissipation cover 103 , and the preparation of the boss structure 310 can be completed when the heat dissipation cover 103 is fabricated.
  • the current mass production process can achieve that the tolerance of the heat dissipation cover 103 is far smaller than the machine-level tolerance of the heat dissipation component 11 .
  • the boss structure 310 is used as a part of the heat dissipation cover 103 , and the thickness of the boss structure 310 does not need to be large, which is conducive to the absorption of the external thermal interface layer 120
  • the thickness of the boss structure 310 can avoid that the thickness of the boss structure 310 is too large, so that the outer thermal interface layer 120 can only cover the area where the boss structure 310 is located in the upper cover 31 , thereby increasing the external surface between the heat dissipation device 11 and the heat dissipation cover 103 .
  • the filling degree of the thermally conductive interface layer 120 is provided.
  • the side surface of the side wall 32 of the heat dissipation cover 103 away from the package substrate 102 can be used as the upper reference plane B1 .
  • the boss structure 310 protrudes from the surface of the first connecting structure 311 away from the chip 101, as shown in FIG. B1, and there is a maximum distance L_max between the surface of the boss structure 310 away from the chip 101 and the upper reference plane B1.
  • L_max a maximum distance between the surface of the boss structure 310 away from the chip 101 and the upper reference plane B1.
  • the side surface of the side wall 32 of the heat dissipation cover 103 away from the packaging substrate 102 can be used as the upper reference plane B1 when the side wall 32 of the heat dissipation cover 103 is at least one side of the surface away from the packaging substrate 102 When a part is flat, this part can be used as the above-mentioned upper reference plane B1.
  • the protruding size of the boss structure 310 is too large, so that the gap between the boss structure 310 and the heat sink 11 is too small, and the outer thermal interface layer 120 can only cover the boss structure in the upper cover 31 310 is located, thereby reducing the filling amount of the external thermal interface layer 120 between the heat dissipation device 11 and the heat dissipation cover 103 .
  • the thickness of the outer thermal interface layer 120 eg, 0.12 mm ⁇ 0.3 mm
  • the surface of the outer thermal interface layer 120 in contact with the heat dissipation device 11 can be flat, which is beneficial to improve the contact performance between the outer heat conductive interface layer 120 and the heat dissipation device 11 .
  • the filling degree of the outer thermal interface layer 120 between the heat dissipation device 11 and the heat dissipation cover 103 can also meet the requirements, so that the temperature uniformity of the heat dissipation cover 103 and the heat dissipation device 11 can be maintained.
  • the above-mentioned maximum distance L_max may be 0.05mm, 0.06mm, 0.08mm, 0.10mm, 0.15mm.
  • the tolerance level of the heat dissipation cover 103 is much higher than that of the SMT nozzle, although the boss structure 310 is far away from the surface of the chip 101, it protrudes from the surface of the chip 101.
  • the first connecting structure 311 is away from the surface of the chip 101 , but the protruding portion of the surface of the boss structure 310 away from the chip 101 can be regarded as a smooth transition in macroscopic view. In this way, the SMT nozzle can be tightly attached to the heat dissipation cover 103 when sucking the chip package structure 10 .
  • the maximum thickness D1_max of the boss structure 310 is greater than the maximum thickness D2_max of the first connecting structure 311 , and the boss structure 310 is away from the surface (upper surface) of the chip 101 and protrudes The first connecting structure 311 is away from the surface of the chip 101 .
  • the boss structure 310 is close to the surface (lower surface) of the chip 101 and protrudes from the surface of the first connecting structure 311 close to the chip 101 .
  • both the upper and lower surfaces of the boss structure 310 protrude from the first connecting structure 311 , which is beneficial to increase the thickness and rigidity of the boss structure 310 , so that the heat dissipation device 11 can be more effectively inserted into the heat dissipation cover 103
  • the boss structure 310 exerts pressure to reduce the probability of delamination of the inner thermally conductive interface layer 110 .
  • the boss structure 310 is close to the surface (lower surface) of the chip 101 and protrudes from the surface of the first connecting structure 311 close to the chip 101 , when the maximum thickness D1_max of the boss structure 310 meets the design requirements, the boss structure 310
  • the filling degree of the external thermal interface layer 120 is beneficial to improve the relationship between the heat dissipation device 11 and the heat dissipation cover 103 .
  • the thickness D2 of the first connecting structure 311 gradually decreases. In this way, the rigidity of the end of the first connecting structure 311 close to the side wall 32 can be reduced, so that when the heat dissipation device 11 presses the heat dissipation cover 103 , the end of the first connecting structure 311 close to the side wall 32 is easily deformed.
  • the first connecting structure 311 can more easily move with the downward pressing direction of the heat dissipation device 11 , so that the pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 is more concentrated on the thickness and stiffness.
  • the pressure of the heat dissipation device 11 can be more effectively transmitted to the chip structure 101 through the boss structure 310 in the heat dissipation cover 103, and the probability of delamination of the inner thermal interface layer 110 is reduced. .
  • FIG. 6 a illustrates the structure of the side wall 32 by taking the example that the side wall 32 of the heat dissipation cover 103 is perpendicular to the package substrate 102 .
  • the sidewall 32 of the heat dissipation cover 103 may have an acute angle ⁇ with the package substrate 102 .
  • FIG. 6a and FIG. 6b show that the boss structure 310 is far away from the The surface (upper surface) of the chip 101 and the surface (lower surface) close to the chip 101, and the surface (upper surface) of the first connecting structure 311 away from the chip 101 and the surface (lower surface) close to the chip 101 are protruding outward A non-planar example of .
  • the surface (upper surface) of the first connecting structure 311 away from the chip 101 is flat.
  • the thickness D2 of the first connecting structure 311 is gradually reduced, and the first connecting structure 311 is close to the surface (the lower surface of the chip 101 ) ), which is an inclined surface or an arc surface.
  • the surface (lower surface) of the first connecting structure 311 close to the chip 101 is flat.
  • the surface (lower surface) of the boss structure 310 close to the chip 101 may be flush with the surface (lower surface) of the first connecting structure 311 close to the chip 101 .
  • the surface of the upper cover 31 of the heat dissipation cover 103 close to the chip 101 can have a higher flatness, so as to simplify the structure of the mold for manufacturing the heat dissipation cover 103 .
  • the first connecting structure 311 is far away from the surface (upper surface) of the chip 101 .
  • the surface (the upper surface) of the boss structure 310 and the first connecting structure 311 away from the chip 101 can have the same curvature. In this way, the structure of the mold for manufacturing the heat dissipation cover 103 can be simplified, and the manufacturing process can be simplified.
  • the sidewall 32 of the heat dissipation cover 103 may have an acute angle ⁇ with the package substrate 102 , which will not be described in detail here.
  • the description is given by taking an example that the side wall 32 of the heat dissipation cover 103 is perpendicular to the first surface A1 of the package substrate 102 .
  • the side wall 32 is far away from One surface (upper surface) of the package substrate 102 is the upper reference plane B1, and the side surface (upper surface) of the inner thermal interface layer 110 away from the package substrate 102 is the lower reference plane B2. Based on this, there is a reference thickness D0 between the upper reference plane B1 and the lower reference plane B2.
  • the minimum thickness D2_min of the first engagement structure 311 may be smaller than the reference thickness D0.
  • the purpose of reducing the rigidity of the first connecting structure 311 can be achieved by reducing the thickness of the first connecting structure 311 . Therefore, when the heat dissipation device 11 presses the heat dissipation cover 103, the first connecting structure 311 can more easily move with the pressing direction of the heat dissipation device 11, so that the pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 is more concentrated on the boss structure. In step 310, the probability of delamination of the inner thermally conductive interface layer 110 is reduced.
  • the thickness D2 of the first connecting structure 311 gradually decreases along the direction from the boss structure 310 to the side wall 32 , so the minimum thickness D2_min of the first connecting structure 311 is the first connecting structure 311 The thickness of one end near side wall 32 (or the aforementioned footprint).
  • the minimum thickness D2_min of the first connecting structure 311 and the reference thickness D0 may satisfy: 20% ⁇ D0 ⁇ D2_min ⁇ 80% ⁇ D0.
  • the minimum thickness D2_min of the first bridging structure 311 may be 25% ⁇ D0, 30% ⁇ D0, 35% ⁇ D0, 40% ⁇ D0, 45% ⁇ D0, 50% ⁇ D0, 60% ⁇ D0, or 70% ⁇ D0.
  • the above-mentioned reference thickness D0 may be in the range of 1 mm ⁇ 2 mm.
  • the range of the minimum thickness D2_min is 0.2mm ⁇ D2_min ⁇ 0.8mm.
  • the minimum thickness D2_min of the first connecting structure 311 is less than 20% ⁇ D0, the thickness of the first connecting structure 311 is too thin, so that the rigidity of the first connecting structure 311 is too small, which reduces the impact of the heat dissipation cover 103 on the package substrate 102 Warp control.
  • the minimum thickness D2_min of the first connecting structure 311 is greater than 80% ⁇ D0, the thickness of the first connecting structure 311 is too large and the rigidity is too strong. 311 is not easy to move with the downward pressing direction of the heat dissipation device 11 , so that it is not conducive to concentrate the pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 on the boss structure 310 .
  • L_max there is a maximum distance L_max between the surface (upper surface) of the boss structure 310 away from the chip 101 and the upper reference plane B1 .
  • L_max ⁇ D0.
  • the part of the boss structure 310 located in the accommodating cavity 20, that is, the part of the boss structure 310 where the reference thickness D0 is located can be made thicker, while the part of the boss structure 310 located outside the accommodating cavity 20, that is The thickness of the portion of the boss structure 310 where the maximum distance L_max is located is relatively small.
  • the maximum distance L_max of the boss structure 310 does not need to be too large, which is beneficial to improve the filling degree of the external thermal interface layer 120 between the heat dissipation device 11 and the heat dissipation cover 103 .
  • the surface of the boss structure 310 away from the chip 101 is the first arc surface S1, and the surface of the first connecting structure 311 away from the chip 101 is close to the first arc surface
  • the part of S1 is the second arc surface S2.
  • the curvature of the second arc surface S1 and the first arc surface S2 are the same, and the second arc surface S2 is connected with the first arc surface S1.
  • the vertical projection of the chip 101 corresponding to the boss structure 310 on the first surface A1 is located, and the first arc surface S1 and the second arc surface S2 are within the range of the vertical projection of the first surface A1.
  • the boss structure 310 is raised from the surface of the upper cover 31 away from the chip 101 , but the surface of the first connecting structure 311 away from the chip 101 will also be raised at the position of the second arc surface S2 , so that it can be
  • the size of the raised portion of the surface of the upper cover 31 away from the chip 101 is appropriately increased. Therefore, when the heat dissipation device 11 exerts the pressure on the heat dissipation cover 103, the pressure can be more effectively applied to the pressure of the convex portion of the upper cover 31 and transferred to the chip 101, so that the thermal interface layer 110 and the chip 101 can be more closely attached .
  • the vertical projection of the side of the second arc surface S2 away from the first arc surface S1 on the first surface A1 has a first contour T1 as shown in Figure 9b (a top view taken along the arrow Y direction in Figure 9a ) .
  • the vertical projection of the chip 101 corresponding to the boss structure 310 on the first surface A1 has a second contour T2.
  • the maximum distance Hmax between the first contour T1 and the second contour T2 satisfies: Hmax ⁇ 2mm.
  • the size of the convex part of the upper cover 31 away from the chip 101 is too large, so that the gap between the upper cover 31 and the heat sink 11 is too small, and the outer thermal interface layer 120 can only cover the convex part of the upper cover 31
  • the area where the mesa structure 310 is located reduces the filling amount of the external thermal interface layer 120 between the heat dissipation device 11 and the heat dissipation cover 103 .
  • the chip 101 corresponding to the boss structure 310 refers to the chip 101 connected to the boss structure 310 through the inner thermal interface layer 110 .
  • the third arc surface S3 is located within the range of the vertical projection of the first surface A1 of the chip 101 corresponding to the boss structure 310 .
  • the vertical projection of the third arc surface S3 on the first surface A1 has a third contour T3 as shown in FIG. 9d (a top view taken along the arrow Y direction in FIG. 9c ).
  • the vertical projection of the chip 101 corresponding to the boss structure 310 on the first surface A1 has a second contour T2.
  • the maximum distance Hmax between the third contour T3 and the second contour T2 satisfies: Hmax ⁇ 2mm.
  • Hmax>2mm the size of the boss structure 310 is too small.
  • the heat dissipation device 11 exerts pressure on the heat dissipation cover 103, the area of the working surface of the heat dissipation cover 103 acting on the chip 101 is too small, which is not conducive to the effective effect of the heat dissipation device 11. of applying pressure to the chip 101 .
  • the surface of the boss structure 310 away from the chip 101 is the first arc surface S1 .
  • the vertical projection of the first arc surface S1 on the first surface A1 completely overlaps with the vertical projection of the chip 101 corresponding to the boss structure 310 on the first surface A1.
  • the boss structure 310 can completely cover the chip 101 , so that when the heat dissipation device 11 presses the heat dissipation cover 103 , the force acting on the boss structure 310 can be more effectively transmitted to the chip 101 .
  • the upper cover 31 may further include at least one first groove 312 .
  • the first groove 312 is formed on a side surface of the first connecting structure 311 close to the chip 101 .
  • the first groove 312 may be located at one end of the first engaging structure 311 away from the boss structure 310 .
  • the rigidity of the first engaging structure 311 close to the side wall 32 (or the above-mentioned footprint) can be further reduced, which is beneficial to the The pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 is concentrated on the boss structure 310 .
  • the depth S1 of the first groove 312 may satisfy: 20% ⁇ D2_max ⁇ S1 ⁇ 80% ⁇ D2_max.
  • the groove width L1 of the first groove 312 may satisfy: 0.1 mm ⁇ L1 ⁇ 20 mm.
  • the depth S1 of the first groove 312 is less than 20% ⁇ D2_max (for example, when the maximum thickness D2_max of the first engaging structure 311 is 1 mm, S1 is less than 0.2 mm) and the width L1 is less than 0.1 mm, the first groove 312
  • the requirements of the production accuracy are relatively high, which is not conducive to reducing the production cost.
  • the size of the first groove 312 is too small, and the effect of reducing the rigidity of the first engaging structure 311 is not obvious.
  • the depth S1 of the first groove 312 is greater than 80% ⁇ D2_max (for example, when the maximum thickness D2_max of the first engaging structure 311 is 2.7 mm, S1 is greater than 2.1 mm), and when the width L1 is greater than 20 mm, the first groove The size of 312 is too large, so that the first connecting structure 311 is too small, which reduces the ability of the heat dissipation cover 103 to control the warpage of the package substrate 102 .
  • the depth S1 of the first groove 312 may be 0.5 mm, 0.8 mm, 1.0 mm or 1.5 mm.
  • the width L1 of the first groove 312 may be 0.5 mm, 1 mm, 2 mm, 4 mm, 8 mm, 15 mm or 18 mm. In this way, on the basis of reducing the rigidity of the first connecting structure 311 , it is possible to avoid affecting the ability of the heat dissipation cover 103 to control the warpage of the package substrate 102 .
  • the above-mentioned first groove 312 may surround at least one chip 101 (the chip in FIG. 11a ).
  • the position is indicated by a dotted line) around the annular groove, so that the rigidity of the first connecting structure located around the boss structure 310 is reduced to some extent.
  • the upper cover 31 may include four first grooves as shown in FIG. are the first groove 312a, the first groove 312b, the first groove 312c and the first groove 312d, respectively.
  • the first groove 312a and the first groove 312b are located on opposite sides of the chip 101, respectively.
  • the first groove 312c and the first groove 312d are respectively located on two opposite sides of the chip 101 .
  • the bottom of any one of the first groove 312 a , the first groove 312 b , the first groove 312 c , and the first groove 312 d can penetrate through the first engaging structure 311 .
  • At least one chip in the chip package structure 10 may include a first chip 101a and a second chip 101b.
  • the at least one inner thermally conductive interface layer may include a first inner thermally conductive interface layer 110a covering the first chip 101a and The second inner thermal interface layer 110b covers the second chip 101b.
  • the surface of the first inner thermal interface layer 110a away from the package substrate 102 is flush with the surface of the second inner thermal interface layer 110b away from the package substrate 102.
  • the first inner thermal interface layer 110a and the second inner thermal interface layer 110a may be different, so that the thickness difference between the first chip 101a and the second chip 101b can be compensated for by the difference in thickness between the first inner thermal interface layer 110a and the second inner thermal interface layer 110b.
  • At least one boss structure in the upper cover 31 may include a first boss structure 310a and a second boss structure 310b.
  • the first boss structure 310a is in contact with the first inner thermal interface layer 110a
  • the second boss structure 310b is in contact with the second inner thermal interface layer 110b.
  • first and second boss structures 310a and 310b are arranged in the same manner as described above.
  • surface may protrude from the surface of the first connecting structure 311 away from the chip 101 .
  • Surfaces (lower surfaces) of the first boss structure 310a and the second boss structure 310b close to the package substrate 102 may be flat.
  • the contact surface of the first boss structure 310a and the first inner thermally conductive interface layer 110a may completely cover the first chip 101a.
  • the contact surface of the second boss structure 310b and the second inner thermally conductive interface layer 110b may completely cover the second chip 101b.
  • the surfaces (upper surfaces) of the first and second boss structures 310 a and 310 b away from the package substrate 102 may protrude from the surface of the first connecting structure 311 away from the chip 101 .
  • the first boss structure 310 a and the second boss structure 310 b are close to the surface (lower surface) of the chip 101 and protrude from the surface of the first connecting structure 311 close to the chip 101 .
  • the vertical projection of the contact surface of the first boss structure 310 a and the first inner thermal interface layer 110 a on the packaging substrate 102 may be located at the vertical projection of the first chip 101 a on the packaging substrate 102 within the projection range.
  • the vertical projection of the contact surface of the second boss structure 310b and the second inner thermal interface layer 110b on the packaging substrate 102 may be within the range of the vertical projection of the second chip 101b on the packaging substrate 102 .
  • the above-mentioned upper cover 31 may further include a second engaging structure 313 as shown in FIG. 12a or FIG. 12b.
  • the second engaging structure 313 is located between the first boss structure 310a and the second boss structure 310b, and is connected with the first boss structure 310a and the second boss structure 310b.
  • the heat dissipation device 11 presses the heat dissipation cover 103 , the pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 effectively acts on the first boss structure 310 a and the second boss structure 310 b , the upper cover 31 At least one second groove 314 is also included, and the second groove 314 is formed on one side surface of the second connecting structure 313 close to the package substrate 102 .
  • the setting method of the size of the second groove 314 can be the same as that of the first groove 312 , which is not repeated here.
  • the package substrate 102 is the redistribution layer
  • the package substrate 102 is easily deformed during a temperature change.
  • the rigidity of the upper cover 31 is weakened, so that the package substrate 102 can be moved when the package substrate 102 is deformed.
  • There is a certain decoupling effect with the movement of the heat dissipation cover 103 which reduces the restraint of the chip when it follows the movement of the package substrate 102 . Therefore, cracks in the molding material 400 shown in FIG. 12c between two adjacent chips, for example, the first chip 101a and the second chip 101b described above, can be reduced. In the embodiments of the present application, the molding material 400 in some drawings is not shown.
  • the chip package structure 10 when the chip package structure 10 includes the first chip 101a and the second chip 101b, as shown in FIG. 13 , the first chip 101a and the second chip 101b can pass through the An inner thermally conductive interface layer 110a and a second inner thermally conductive interface layer 110b are connected to the same boss structure 310 .
  • the boss structure 310 is in contact with both the first inner thermally conductive interface layer 110a and the second inner thermally conductive interface layer 110b.
  • the arrangement of the boss structure 310 is the same as described above, and will not be repeated here.
  • the pressure can be transmitted to the first chip 101a and the second chip 101b through the same boss structure 310, so that the structure of the heat dissipation cover 103 can be simplified.

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Abstract

The embodiments of the present application relate to the technical field of chip packaging and provide a chip packaging structure and an electronic device, which are used to improve the reliability of thermal contact between a heat conduction interface material and a chip as well as a heat dissipation cover. The chip packaging structure comprises a packaging substrate, at least one chip, at least one internal heat conduction interface layer, and a heat dissipation cover. The heat dissipation cover comprises an upper cover and a plurality of sidewalls. The upper cover comprises at least one boss structure and a first connecting structure. A boss structure contacts at least one internal heat conduction interface layer and is connected to a sidewall by means of the first connecting structure. The maximum thickness of the boss structure is greater than the maximum thickness of the first connecting structure. Furthermore, the boss structure is away from the surface of the chip and protrudes from the surface of the first connecting structure away from the chip. The boss structure can reduce the gap between the heat dissipation cover and a heat dissipation device, such that the heat dissipation device can effectively press the boss structure to reduce the probability of delamination occurring between the internal heat conduction interface layer and the chip(s).

Description

一种芯片封装结构、电子设备A chip packaging structure and electronic equipment 技术领域technical field
本申请涉及芯片封装技术领域,尤其涉及一种芯片封装结构、电子设备。The present application relates to the technical field of chip packaging, and in particular, to a chip packaging structure and an electronic device.
背景技术Background technique
随着半导体技术的不断发展,电子器件向着多功能的方向发展,芯片带宽以及算力不断提升,从而使得芯片的封装尺寸越来越大。基于此,芯片在封装、安装散热器以及工作过程中会经历较大温度的变化,从而使得尺寸较大的封装基板由于其内部不同叠层的材料之间的热膨胀系数(coefficient of thermal expansion,CTE)不同,而发生翘曲(warpage)形变。这样一来,在工作温度区间内,上述翘曲现象会提升芯片表面的导热界面材料(thermal interface material,TIM)与芯片分离的几率,降低了导热界面材料分别与芯片、散热盖之间的热接触可靠性,导致散热效果降低。With the continuous development of semiconductor technology, electronic devices are developing in the direction of multi-function, and chip bandwidth and computing power are continuously improved, which makes the package size of the chip larger and larger. Based on this, the chip will experience large temperature changes during packaging, installing heat sinks and working, so that the larger package substrate has a coefficient of thermal expansion (CTE) due to the coefficient of thermal expansion (CTE) between the materials of different layers inside. ) is different, and warpage deformation occurs. In this way, in the operating temperature range, the above-mentioned warping phenomenon will increase the probability of separation between the thermal interface material (TIM) on the chip surface and the chip, and reduce the thermal conductivity between the thermal interface material and the chip and the heat dissipation cover, respectively. Contact reliability, resulting in reduced heat dissipation.
发明内容SUMMARY OF THE INVENTION
本申请实施例提供一种芯片封装结构、电子设备,用于改善导热界面材料分别与芯片、散热盖之间的热接触可靠性。Embodiments of the present application provide a chip packaging structure and an electronic device, which are used to improve the thermal contact reliability between the thermally conductive interface material, the chip, and the heat dissipation cover, respectively.
为达到上述目的,本申请采用如下技术方案:To achieve the above object, the application adopts the following technical solutions:
本申请实施例的一方面,提供一种芯片封装结构。该芯片封装结构包括封装基板、至少一个芯片、至少一个内导热界面层以及散热盖。其中,封装基板具有第一表面。芯片设置于封装基板的第一表面上。至少一个内导热界面层分别覆盖至少一个芯片远离封装基板一侧的表面。散热盖包括上盖和多个侧壁。多个侧壁依次首尾相接绕上盖的一周设置,且与第一表面相连接。散热盖与封装基板之间形成用于容纳至少一个芯片的容纳腔。其中,上盖包括至少一个凸台结构和第一衔接结构。上述至少一个凸台结构中的每个凸台结构与至少一个上述内导热界面层相接触。并且,上述至少一个凸台结构中的每个凸台结构通过第一衔接结构与侧壁相连接。凸台结构的最大厚度D1_max大于第一衔接结构的最大厚度D2_max,且凸台结构远离芯片的表面,凸出于第一衔接结构远离芯片的表面。本申请实施例中厚度的方向与第一表面的方向垂直。基于此,芯片封装结构在服役过程中,由于温度升高使得封装基板发生翘曲现象。该翘曲现象会导致散热盖与散热装置之间间隙有增大的趋势。但是由于散热盖具有凸台结构。该凸台结构的最大厚度D1_max大于第一衔接结构的最大厚度D2_max,且凸台结构远离芯片的表面,凸出于第一衔接结构远离芯片的表面,因此,上述凸台结构可以减小散热盖与散热装置之间的间隙。这样一来,可以避免散热盖与散热装置之间的间隙由于外导热界面层的形变而发生较大的变化,进而可以使得固定于电路板上的散热装置仍然能够有效的施压于凸台结构上,减小固化后的内导热界面层与芯片之间出现分层的几率,提高内导热界面层分别与芯片、散热盖之间的热接触可靠性,从而可以降低芯片封装结构出现高温掉电现象的几率。In one aspect of the embodiments of the present application, a chip packaging structure is provided. The chip package structure includes a package substrate, at least one chip, at least one inner thermal interface layer and a heat dissipation cover. Wherein, the package substrate has a first surface. The chip is disposed on the first surface of the package substrate. The at least one inner thermal interface layer respectively covers the surface of the at least one chip on the side away from the package substrate. The heat dissipation cover includes an upper cover and a plurality of side walls. A plurality of side walls are arranged end to end in sequence around the circumference of the upper cover, and are connected with the first surface. An accommodating cavity for accommodating at least one chip is formed between the heat dissipation cover and the package substrate. Wherein, the upper cover includes at least one boss structure and a first engaging structure. Each of the above at least one boss structure is in contact with at least one of the above-mentioned inner thermally conductive interface layers. Moreover, each of the at least one boss structure is connected to the side wall through the first connecting structure. The maximum thickness D1_max of the boss structure is greater than the maximum thickness D2_max of the first connecting structure, and the boss structure is away from the surface of the chip and protrudes from the surface of the first connecting structure away from the chip. In the embodiments of the present application, the direction of the thickness is perpendicular to the direction of the first surface. Based on this, during the service process of the chip package structure, the package substrate is warped due to the temperature increase. The warping phenomenon tends to increase the gap between the heat dissipation cover and the heat dissipation device. But because the heat dissipation cover has a boss structure. The maximum thickness D1_max of the boss structure is greater than the maximum thickness D2_max of the first connecting structure, and the boss structure is far away from the surface of the chip and protrudes from the surface of the first connecting structure far away from the chip. Therefore, the above boss structure can reduce the heat dissipation cover. clearance from the heat sink. In this way, the gap between the heat dissipation cover and the heat dissipation device can be prevented from being greatly changed due to the deformation of the external thermal interface layer, so that the heat dissipation device fixed on the circuit board can still be effectively pressed against the boss structure. It can reduce the probability of delamination between the cured internal thermal interface layer and the chip, and improve the thermal contact reliability between the internal thermal interface layer and the chip and the heat dissipation cover, thereby reducing the high temperature power failure of the chip packaging structure. the probability of the phenomenon.
可选的,凸台结构靠近芯片的表面,凸出于第一衔接结构靠近芯片的表面。这样 一来,凸台结构的上、下表面均凸出于第一衔接结构,从而有利于增大凸台结构的厚度和刚度,使得散热器件可以更有效的向散热盖中的凸台结构施加压力,减小内导热界面层出现分层的几率。Optionally, the boss structure is close to the surface of the chip, and protrudes from the surface of the first connecting structure close to the chip. In this way, both the upper and lower surfaces of the boss structure protrude from the first connecting structure, which is beneficial to increase the thickness and rigidity of the boss structure, so that the heat dissipation device can more effectively apply pressure to the boss structure in the heat dissipation cover. pressure, reducing the probability of delamination of the inner thermal interface layer.
可选的,凸台结构靠近芯片的表面与第一衔接结构靠近芯片的表面平齐。这样一来,散热盖中上盖靠近芯片的表面可以具有较高的平整度,达到简化制作散热盖的模具结构的目的。Optionally, the surface of the boss structure close to the chip is flush with the surface of the first connecting structure close to the chip. In this way, the surface of the upper cover in the heat dissipation cover close to the chip can have a higher flatness, so as to achieve the purpose of simplifying the structure of the mold for manufacturing the heat dissipation cover.
可选的,沿凸台结构到侧壁的方向,第一衔接结构的厚度逐渐减小。这样一来,可以减小第一衔接结构靠近侧壁一端的刚度,使得散热器件向散热盖施压时,第一衔接结构靠近侧壁一端容易发生形变。从而可以在散热器件向散热盖施压时,压力更加集中作用于厚度和刚度较大的凸台结构上,进而通过散热盖中的凸台结构传递到芯片上,减小内导热界面层出现分层的几率。Optionally, along the direction from the boss structure to the side wall, the thickness of the first connecting structure gradually decreases. In this way, the rigidity of the end of the first connecting structure close to the side wall can be reduced, so that when the heat dissipation device presses the heat dissipation cover, the end of the first connecting structure close to the side wall is easily deformed. As a result, when the heat dissipation device presses the heat dissipation cover, the pressure is more concentrated on the boss structure with greater thickness and rigidity, and then transmitted to the chip through the boss structure in the heat dissipation cover, reducing the appearance of the internal thermal interface layer. probability of layers.
可选的,第一衔接结构靠近芯片的表面为平面,在此情况下,为了确保沿凸台结构到侧壁的方向,第一衔接结构的厚度逐渐减小,第一衔接结构靠近芯片的表面为斜面或者圆弧面。或者,第一衔接结构远离芯片的表面为平面。在此情况下,为了确保沿凸台结构到侧壁的方向,第一衔接结构的厚度逐渐减小,第一衔接结构远离芯片的表面为斜面或者圆弧面。Optionally, the surface of the first connecting structure close to the chip is flat. In this case, in order to ensure that the thickness of the first connecting structure gradually decreases along the direction from the boss structure to the sidewall, the first connecting structure is close to the surface of the chip. Bevel or arc surface. Alternatively, the surface of the first connecting structure away from the chip is flat. In this case, in order to ensure that the thickness of the first connecting structure is gradually reduced along the direction from the boss structure to the sidewall, the surface of the first connecting structure away from the chip is an inclined surface or a circular arc surface.
可选的,侧壁远离封装基板的一侧表面为上基准面,内导热界面层远离封装基板的一侧表面为下基准面。上基准面和下基准面之间具有基准厚度D0。第一衔接结构的最小厚度D2_min小于基准厚度D0。这样一来,可以通过减小第一衔接结构的厚度,达到减小第一衔接结构刚度的目的。从而可以在散热器件向散热盖施压时,使得散热器件向散热盖施加的压力,更加集中作用于凸台结构上,降低内导热界面层出现分层的几率。Optionally, the side surface of the side wall away from the packaging substrate is the upper reference surface, and the surface of the inner thermal interface layer away from the packaging substrate is the lower reference surface. There is a reference thickness D0 between the upper reference plane and the lower reference plane. The minimum thickness D2_min of the first connecting structure is smaller than the reference thickness D0. In this way, the purpose of reducing the rigidity of the first connecting structure can be achieved by reducing the thickness of the first connecting structure. Therefore, when the heat dissipation device presses the heat dissipation cover, the pressure exerted by the heat dissipation device on the heat dissipation cover can be more concentrated on the boss structure, thereby reducing the probability of delamination of the inner thermal interface layer.
可选的,20%×D0≤D2_min≤80%×D0。当第一衔接结构的最小厚度D2_min小于20%×D0时,该第一衔接结构311的厚度太薄,从而导致该第一衔接结构的刚度太小,降低了散热盖对封装基板102翘曲的控制能力。此外,当第一衔接结构的最小厚度D2_min大于80%×D0时,第一衔接结构的厚度太大,刚度太强,从而在散热器件向散热盖施压时,不利于将散热器件向散热盖施加的压力传递到芯片上。Optionally, 20%×D0≤D2_min≤80%×D0. When the minimum thickness D2_min of the first connecting structure is less than 20%×D0, the thickness of the first connecting structure 311 is too thin, so that the rigidity of the first connecting structure is too small, which reduces the resistance of the heat dissipation cover to the warping of the package substrate 102 control ability. In addition, when the minimum thickness D2_min of the first connecting structure is greater than 80%×D0, the thickness of the first connecting structure is too large and the rigidity is too strong, so that when the heat dissipation device presses the heat dissipation cover, it is not conducive to the heat dissipation device to the heat dissipation cover. The applied pressure is transmitted to the chip.
可选的,凸台结构远离芯片的表面与上基准面之间具有最大距离L_max。L_max<D0。这样一来,可以使得凸台结构中位于容纳腔内的部分,即凸台结构中基准厚度D0所在的部分厚度较大,而凸台结构中位于容纳腔外的部分,即凸台结构中最大距离L_max所在的部分厚度较小。从而可以使得凸台结构的最大厚度D1_max满足设计要求时,凸台结构的最大距离L_max无需太大,有利于提高散热器件与散热盖103之间外导热界面层的填充度。Optionally, there is a maximum distance L_max between the surface of the boss structure away from the chip and the upper reference surface. L_max<D0. In this way, the part of the boss structure located in the accommodating cavity, that is, the part of the boss structure where the reference thickness D0 is located, can be made thicker, while the part of the boss structure located outside the accommodating cavity, that is, the largest part of the boss structure The thickness of the part where the distance L_max is located is smaller. Therefore, when the maximum thickness D1_max of the boss structure meets the design requirements, the maximum distance L_max of the boss structure does not need to be too large, which is beneficial to improve the filling degree of the external thermal interface layer between the heat dissipation device and the heat dissipation cover 103 .
可选的,0.01mm≤L_max≤0.2mm。当最大距离L_max小于0.01mm时,凸台结构凸出的程度较小,该凸台结构对减小散热盖和散热装置之间间距的效果不明显,不能有效提高散热装置施压于凸台结构上的压力效果。当L_max大于0.02mm时,该凸台结构凸出的尺寸太大,使得凸台结构与散热器件之间的间隙太小,外导热界面层在散热盖上表面的有效覆盖面积较小,从而降低了散热器件与散热盖之间外导热界面层的填充量。并且,该外导热界面层的厚度不能够很好的吸收凸台结构的厚度,使得与 散热器件朝向封装基板的表面的接触平整度降低。Optional, 0.01mm≤L_max≤0.2mm. When the maximum distance L_max is less than 0.01mm, the protruding degree of the boss structure is small, the effect of the boss structure on reducing the distance between the heat dissipation cover and the heat dissipation device is not obvious, and it cannot effectively improve the pressure of the heat dissipation device on the boss structure. pressure effect. When L_max is greater than 0.02mm, the protruding size of the boss structure is too large, so that the gap between the boss structure and the heat sink is too small, and the effective coverage area of the outer thermal interface layer on the upper surface of the heat dissipation cover is small, thereby reducing the The filling amount of the outer thermal interface layer between the heat dissipation device and the heat dissipation cover is determined. In addition, the thickness of the outer thermally conductive interface layer cannot absorb the thickness of the boss structure well, so that the contact flatness with the surface of the heat dissipation device facing the package substrate is reduced.
可选的,凸台结构远离芯片的表面为第一弧面,第一衔接结构远离芯片的表面中,靠近第一弧面的部分为第二弧面。其中,第二弧面与第一弧面的曲率相同,且第二弧面与第一弧面相连接。此外,与凸台结构对应的芯片在第一表面的垂直投影位于,第一弧面和第二弧面在第一表面的垂直投影的范围内。这样一来,上盖中不仅凸台结构远离芯片的表面凸起,第一衔接结构远离芯片的表面中在位于第二弧面所在位置也会有所凸起,从而可以适当增大上盖远离芯片的表面凸起部分的尺寸。从而可以在散热器件向散热盖施加的压力时,该压力可以更有效的作用于上盖凸起部分的压力传递至芯片,从而使得导热界面层与芯片贴合的更加紧密。在此基础上,第二弧面远离第一弧面的一边在第一表面的垂直投影具有第一轮廓。与凸台结构对应的芯片在第一表面的垂直投影具有第二轮廓。其中,第一轮廓与第二轮廓之间的最大间距Hmax满足:Hmax≤2mm。当Hmax>2mm时,上盖远离芯片的表面凸起部分的尺寸太大,使得上盖与散热器件之间的间隙太小,外导热界面层只能覆盖上盖中凸台结构所在的区域,从而降低了散热器件与散热盖之间外导热界面层的填充量。Optionally, a surface of the boss structure away from the chip is a first arc surface, and a portion of the surface of the first connecting structure away from the chip that is close to the first arc surface is a second arc surface. Wherein, the curvature of the second arc surface is the same as that of the first arc surface, and the second arc surface is connected with the first arc surface. In addition, the vertical projection of the chip corresponding to the boss structure on the first surface is located, and the first arc surface and the second arc surface are within the range of the vertical projection of the first surface. In this way, not only the boss structure in the upper cover is raised away from the surface of the chip, but also the surface of the first connecting structure away from the chip will be raised at the position of the second arc surface, so that the distance between the upper cover and the upper cover can be appropriately increased. The size of the raised portion of the chip's surface. Therefore, when the pressure applied by the heat dissipation device to the heat dissipation cover, the pressure can be more effectively applied to the pressure on the raised portion of the upper cover and transmitted to the chip, so that the thermal interface layer and the chip are more closely attached. On this basis, the vertical projection of the side of the second arc surface away from the first arc surface on the first surface has a first contour. The vertical projection of the chip corresponding to the boss structure on the first surface has a second contour. Wherein, the maximum distance Hmax between the first contour and the second contour satisfies: Hmax≤2mm. When Hmax>2mm, the size of the raised part of the surface of the upper cover away from the chip is too large, so that the gap between the upper cover and the heat sink is too small, and the external thermal interface layer can only cover the area where the boss structure is located in the upper cover. Therefore, the filling amount of the outer thermal interface layer between the heat dissipation device and the heat dissipation cover is reduced.
可选的,凸台结构远离芯片的表面中至少一部分为第三弧面。该第三弧面在第一表面的垂直投影位于,与凸台结构对应的芯片在第一表面的垂直投影的范围内。在此基础上,第三弧面在第一表面的垂直投影具有第三轮廓。与凸台结构对应的芯片在第一表面的垂直投影具有第二轮廓。其中,第三轮廓与第二轮廓之间的最大间距Hmax满足:Hmax≤2mm。当Hmax>2mm时,凸台结构的尺寸太小,在散热器件向散热盖施加的压力时,散热盖作用于芯片的作用面的面积太小,从而不利于散热器件有效的将压力施加至芯片。Optionally, at least a part of the surface of the boss structure away from the chip is a third arc surface. The vertical projection of the third arc surface on the first surface is located within the range of the vertical projection of the chip corresponding to the boss structure on the first surface. On this basis, the vertical projection of the third arc surface on the first surface has a third contour. The vertical projection of the chip corresponding to the boss structure on the first surface has a second contour. Wherein, the maximum distance Hmax between the third contour and the second contour satisfies: Hmax≤2mm. When Hmax>2mm, the size of the boss structure is too small. When the heat dissipation device exerts pressure on the heat dissipation cover, the area of the active surface of the heat dissipation cover acting on the chip is too small, which is not conducive to the heat dissipation device to effectively apply pressure to the chip. .
可选的,凸台结构远离芯片的表面为第一弧面。该第一弧面在第一表面的垂直投影,与凸台结构对应的芯片在第一表面的垂直投影完全重叠。这样一来,可以使得凸台结构可以完全覆盖芯片,从而在散热器件向散热盖施压时,作用于凸台结构上的力能够更有效的传递至芯片上。Optionally, the surface of the boss structure away from the chip is the first arc surface. The vertical projection of the first arc surface on the first surface completely overlaps the vertical projection of the chip corresponding to the boss structure on the first surface. In this way, the boss structure can completely cover the chip, so that when the heat dissipation device presses the heat dissipation cover, the force acting on the boss structure can be more effectively transmitted to the chip.
可选的,凸台结构与内导热界面层的接触面在第一表面的垂直投影,和与凸台结构相连接的芯片在第一表面的垂直投影完全重叠。这样一来,可以使得凸台结构与内导热界面层的接触面完全覆盖芯片,从而在散热器件向散热盖施压时,作用于凸台结构上的力能够更有效的传递至芯片上。Optionally, the vertical projection of the contact surface between the boss structure and the inner thermal conductive interface layer on the first surface completely overlaps with the vertical projection of the chip connected to the boss structure on the first surface. In this way, the contact surface between the boss structure and the inner thermal interface layer can completely cover the chip, so that when the heat dissipation device presses the heat dissipation cover, the force acting on the boss structure can be more effectively transmitted to the chip.
可选的,上盖还包括至少一个第一凹槽,第一凹槽开设于第一衔接结构靠近芯片的一侧表面上。第一凹槽位于第一衔接结构远离凸台结构的一端。这样一来,通过在第一衔接结构远离凸台结构的一端设置上述第一凹槽,可以进一步减小第一衔接结构靠近侧壁的刚度,有利于将散热器件向散热盖施加的压力,集中作用于凸台结构上。Optionally, the upper cover further includes at least one first groove, and the first groove is opened on one side surface of the first connecting structure close to the chip. The first groove is located at one end of the first engaging structure away from the boss structure. In this way, by arranging the first groove at the end of the first connecting structure away from the boss structure, the rigidity of the first connecting structure close to the side wall can be further reduced, which is beneficial to concentrate the pressure exerted by the heat sink on the heat dissipation cover. Act on the boss structure.
可选的,第一凹槽为围绕至少一个芯片一周的环形槽,从而使得位于凸台结构周边的第一衔接结构的刚度均有所下降。Optionally, the first groove is an annular groove surrounding the circumference of at least one chip, so that the rigidity of the first engaging structures located at the periphery of the boss structure is reduced.
可选的,第一凹槽的深度S1满足:20%×D2_max≤S1≤80%×D2_max;第一凹槽的槽宽L1满足:0.1mm≤L1≤20mm。当第一凹槽的深度S1小于20%×D2_max,宽度L1小于0.1mm时,对第一凹槽的制作精度的要求较高,不利于降低制作成本。并且第一凹槽的尺寸太小,对减小第一衔接结构刚度的效果不明显。此外,当第一凹 槽的深度S1大于80%×D2_max,宽度L1大于20mm时,第一凹槽的尺寸太大,从而导致第一衔接结构太小,降低了散热盖对封装基板翘曲的控制能力。Optionally, the depth S1 of the first groove satisfies: 20%×D2_max≤S1≤80%×D2_max; the groove width L1 of the first groove satisfies: 0.1mm≤L1≤20mm. When the depth S1 of the first groove is less than 20%×D2_max and the width L1 is less than 0.1 mm, the requirements for the manufacturing accuracy of the first groove are high, which is not conducive to reducing the manufacturing cost. In addition, the size of the first groove is too small, and the effect of reducing the rigidity of the first connecting structure is not obvious. In addition, when the depth S1 of the first groove is greater than 80%×D2_max and the width L1 is greater than 20 mm, the size of the first groove is too large, which results in the first connecting structure being too small, reducing the effect of the heat dissipation cover on the warping of the package substrate. control ability.
可选的,上述至少一个芯片包括第一芯片、第二芯片。上述至少一个内导热界面层包括覆盖第一芯片的第一内导热界面层以及覆盖第二芯片的第二内导热界面层。第一内导热界面层远离封装基板的表面与第二内导热界面层远离封装基板的表面平齐。此外,上述至少一个凸台结构包括第一凸台结构和第二凸台结构,第一凸台结构与第一内导热界面层相接触,第二凸台结构与第二内导热界面层相接触。上盖还包括第二衔接结构,第二衔接结构位于第一凸台结构和第二凸台结构之间,且与第一凸台结构和第二凸台结构相连接。在此情况下,上述芯片封装结构为多芯片合封的结构。Optionally, the at least one chip includes a first chip and a second chip. The at least one inner thermally conductive interface layer includes a first inner thermally conductive interface layer covering the first chip and a second inner thermally conductive interface layer covering the second chip. The surface of the first inner thermal interface layer away from the package substrate is flush with the surface of the second inner thermal interface layer away from the package substrate. In addition, the at least one boss structure includes a first boss structure and a second boss structure, the first boss structure is in contact with the first inner thermally conductive interface layer, and the second boss structure is in contact with the second inner thermally conductive interface layer . The upper cover further includes a second engaging structure, the second engaging structure is located between the first boss structure and the second boss structure, and is connected with the first boss structure and the second boss structure. In this case, the above-mentioned chip package structure is a multi-chip package structure.
可选的,上盖还包括至少一个第二凹槽,第二凹槽开设于第二衔接结构靠近封装基板的一侧表面上。第二凹槽的尺寸设置方式可以与第一凹槽的设置方式相同,此处不再赘述。此外,在上述封装基板为重布线层的情况下,得封装基板在温度变化的过程中容易发生形变。此时,当散热盖的上盖上的第二凹槽以及第一凹槽可以减弱上盖的刚度,从而能够在封装基板变形时,使得封装基板的运动与散热盖的运动之间存在一定的解耦效果,减小芯片跟随封装基板运动时受到束缚。从而能够减小相邻两个芯片之间的模塑层发生开裂。Optionally, the upper cover further includes at least one second groove, and the second groove is opened on a side surface of the second connecting structure close to the package substrate. The setting method of the size of the second groove may be the same as the setting method of the first groove, which will not be repeated here. In addition, in the case where the above-mentioned packaging substrate is a redistribution layer, the packaging substrate is easily deformed in the process of temperature change. At this time, when the second groove and the first groove on the upper cover of the heat dissipation cover can weaken the rigidity of the upper cover, so that when the package substrate is deformed, there is a certain gap between the movement of the package substrate and the movement of the heat dissipation cover. The decoupling effect reduces the restraint when the chip moves with the package substrate. Thus, cracking of the molding layer between two adjacent chips can be reduced.
可选的,上述至少一个芯片包括第一芯片、第二芯片。上述至少一个内导热界面层包括覆盖第一芯片的第一内导热界面层以及覆盖第二芯片的第二内导热界面层。第一内导热界面层远离封装基板的表面与第二内导热界面层远离封装基板的表面平齐。一个凸台结构与第一内导热界面层以及第二内导热界面层相接触。在此情况下,上述芯片封装结构为多芯片合封的结构。当散热装置对散热盖进行施压时,上述压力可以通过同一个凸台结构传递至第一芯片和第二芯片,从而可以简化散热盖的结构。Optionally, the at least one chip includes a first chip and a second chip. The at least one inner thermally conductive interface layer includes a first inner thermally conductive interface layer covering the first chip and a second inner thermally conductive interface layer covering the second chip. The surface of the first inner thermal interface layer away from the package substrate is flush with the surface of the second inner thermal interface layer away from the package substrate. A boss structure is in contact with the first inner thermally conductive interface layer and the second inner thermally conductive interface layer. In this case, the above-mentioned chip package structure is a multi-chip package structure. When the heat dissipation device presses the heat dissipation cover, the pressure can be transmitted to the first chip and the second chip through the same boss structure, so that the structure of the heat dissipation cover can be simplified.
本申请实施例的另一方面,提供一种电子设备,包括散热装置、外导热界面层、电路板,以及设置于电路板上的如上所述的任意一种芯片封装结构。外导热界面层位于散热装置和芯片封装结构中的散热盖之间,且与散热装置和散热盖相连接。散热装置还与电路板相连接。该电子设备具有与前述实施例提供的芯片封装结构相同的技术效果,此处不再赘述。In another aspect of the embodiments of the present application, an electronic device is provided, including a heat dissipation device, an external thermally conductive interface layer, a circuit board, and any one of the above-mentioned chip packaging structures disposed on the circuit board. The outer thermal conductive interface layer is located between the heat dissipation device and the heat dissipation cover in the chip package structure, and is connected with the heat dissipation device and the heat dissipation cover. The heat sink is also connected to the circuit board. The electronic device has the same technical effect as the chip packaging structure provided by the foregoing embodiments, and details are not described herein again.
附图说明Description of drawings
图1为本申请实施例提供的电子设备的一部分结构示意图;1 is a schematic structural diagram of a part of an electronic device provided by an embodiment of the present application;
图2a为图1中芯片封装结构的一种结构示意图;Fig. 2a is a kind of structural schematic diagram of the chip packaging structure in Fig. 1;
图2b为图2a中散热盖的侧壁的结构示意图;FIG. 2b is a schematic structural diagram of the side wall of the heat dissipation cover in FIG. 2a;
图3a为图1中芯片封装结构的另一种结构示意图;Fig. 3a is another structural schematic diagram of the chip packaging structure in Fig. 1;
图3b为图1中芯片封装结构的另一种结构示意图;Fig. 3b is another structural schematic diagram of the chip packaging structure in Fig. 1;
图4为本申请实施例提供的芯片封装结构的一种翘曲示意图;FIG. 4 is a schematic diagram of a warping of the chip package structure provided by the embodiment of the present application;
图5为本申请实施例提供的芯片封装结构与散热装置相连接的一种结构示意图;FIG. 5 is a schematic structural diagram of a chip packaging structure connected to a heat sink provided by an embodiment of the present application;
图6a为图1中芯片封装结构的另一种结构示意图;FIG. 6a is another structural schematic diagram of the chip packaging structure in FIG. 1;
图6b为图1中芯片封装结构的另一种结构示意图;Fig. 6b is another structural schematic diagram of the chip packaging structure in Fig. 1;
图7a为图1中芯片封装结构的另一种结构示意图;FIG. 7a is another schematic structural diagram of the chip packaging structure in FIG. 1;
图7b为图1中芯片封装结构的另一种结构示意图;FIG. 7b is another schematic structural diagram of the chip packaging structure in FIG. 1;
图8为图1中芯片封装结构的另一种结构示意图;FIG. 8 is another structural schematic diagram of the chip packaging structure in FIG. 1;
图9a为图1中芯片封装结构的另一种结构示意图;Fig. 9a is another structural schematic diagram of the chip packaging structure in Fig. 1;
图9b为图9a中凸台结构和芯片的俯视轮廓示意图;FIG. 9b is a schematic top view outline of the boss structure and the chip in FIG. 9a;
图9c为图1中芯片封装结构的另一种结构示意图;Fig. 9c is another structural schematic diagram of the chip packaging structure in Fig. 1;
图9d为图9c中凸台结构和芯片的俯视轮廓示意图;FIG. 9d is a schematic top view outline of the boss structure and the chip in FIG. 9c;
图9e为图1中芯片封装结构的另一种结构示意图;Fig. 9e is another structural schematic diagram of the chip packaging structure in Fig. 1;
图10为图1中芯片封装结构的另一种结构示意图;FIG. 10 is another structural schematic diagram of the chip packaging structure in FIG. 1;
图11a为本申请实施例提供的一种散热盖的结构示意图;11a is a schematic structural diagram of a heat dissipation cover provided by an embodiment of the present application;
图11b为本申请实施例提供的另一种散热盖的结构示意图;11b is a schematic structural diagram of another heat dissipation cover provided by an embodiment of the present application;
图12a为本申请实施例提供的一种多芯片合封的芯片封装结构的示意图;12a is a schematic diagram of a multi-chip packaged chip package structure provided by an embodiment of the present application;
图12b为本申请实施例提供的另一种多芯片合封的芯片封装结构的示意图;FIG. 12b is a schematic diagram of another multi-chip packaged chip package structure according to an embodiment of the present application;
图12c为本申请实施例提供的另一种多芯片合封的芯片封装结构的示意图;12c is a schematic diagram of another multi-chip packaged chip package structure provided by an embodiment of the present application;
图13为本申请实施例提供的另一种多芯片合封的芯片封装结构的示意图。FIG. 13 is a schematic diagram of another multi-chip packaged chip package structure according to an embodiment of the present application.
附图标记:Reference number:
01-电子设备;10-芯片封装结构;11-散热装置;12-PCB;13-焊球阵列;101-芯片;102-封装基板;103-散热盖;110-内导热界面层;120-外导热界面层;20-容纳腔;31-上盖;310-凸台结构;311-第一衔接结构;32-侧壁;40-粘结层;312-第一凹槽;313-第二衔接结构;314-第二凹槽;101a-第一芯片;101b-第二芯片;110a-第一内导热界面层;110b-第二内导热界面层;310a-第一凸台结构;310b-第二凸台结构;400-模塑材料。01-electronic equipment; 10-chip package structure; 11-heat dissipation device; 12-PCB; 13-solder ball array; 101-chip; 102-package substrate; 103-heat dissipation cover; 110-inner thermal interface layer; 120-outer Thermal interface layer; 20-accommodating cavity; 31-upper cover; 310-boss structure; 311-first connecting structure; 32-side wall; 40-adhesive layer; 312-first groove; 313-second connecting 314-the second groove; 101a-the first chip; 101b-the second chip; 110a-the first inner thermal interface layer; 110b-the second inner thermal interface layer; 310a-the first boss structure; 310b-the first Two boss structure; 400 - molding material.
具体实施方式detailed description
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行描述,显然,所描述的实施例仅仅是本申请一部分实施例,而不是全部的实施例。The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments.
以下,术语“第一”、“第二”等仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”等的特征可以明示或者隐含地包括一个或者更多个该特征。Hereinafter, the terms "first", "second", etc. are only used for descriptive purposes, and should not be understood as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as "first", "second", etc., may expressly or implicitly include one or more of that feature.
此外,本申请中,“上”、“下”等方位术语是相对于附图中的部件示意置放的方位来定义的,应当理解到,这些方向性术语是相对的概念,它们用于相对于的描述和澄清,其可以根据附图中部件所放置的方位的变化而相应地发生变化。In addition, in this application, orientation terms such as "upper" and "lower" are defined relative to the orientation in which the components in the drawings are schematically placed. It should be understood that these directional terms are relative concepts, and they are used for relative In the description and clarification of the drawings, it may change correspondingly according to the change of the orientation in which the components are placed in the drawings.
在本申请中,除非另有明确的规定和限定,术语“连接”应做广义理解,例如,“连接”可以是固定连接,也可以是可拆卸连接,或成一体;可以是直接相连,也可以通过中间媒介间接相连。此外,术语“电连接”可以是直接的电性连接,也可以是通过中间媒介间接的电性连接。In this application, unless otherwise expressly specified and limited, the term "connection" should be understood in a broad sense. For example, "connection" may be a fixed connection, a detachable connection, or an integrated body; it may be directly connected, or Can be indirectly connected through an intermediary. In addition, the term "electrical connection" may be a direct electrical connection or an indirect electrical connection through an intermediate medium.
本申请实施例提供一种电子设备。上该电子设备可以包括手机(mobile phone)、平板电脑(pad)、智能穿戴产品(例如,智能手表、智能手环)、虚拟现实(virtual reality,VR)终端设备、增强现实(augmented reality AR)终端设备等设备。上述电子设备还可以是电动汽车、家用小型电器(例如豆浆机、扫地机器人)、无人机等电子设备,或者在泛网络中应用的电子设备。本申请实施例对上述电子设备的具体形式不做特殊限制。Embodiments of the present application provide an electronic device. The electronic device can include mobile phone (mobile phone), tablet computer (pad), smart wearable products (for example, smart watch, smart bracelet), virtual reality (virtual reality, VR) terminal equipment, augmented reality (augmented reality AR) Terminal equipment and other equipment. The above-mentioned electronic devices may also be electronic devices such as electric vehicles, small household appliances (such as soymilk machines, sweeping robots), unmanned aerial vehicles, or electronic devices applied in a pan-network. The embodiments of the present application do not specifically limit the specific form of the above electronic device.
上述电子设备01,如图1所示,可以包括芯片封装结构10、电路板(printed circuit  board,PCB)12。芯片封装结构10可以通过焊球阵列(ball grid array,BGA)13,或者基板栅格阵列(land grid array,LGA)与PCB12电连接。The above-mentioned electronic device 01, as shown in FIG. 1 , may include a chip package structure 10 and a printed circuit board (PCB) 12 . The chip package structure 10 may be electrically connected to the PCB 12 through a ball grid array (BGA) 13 or a land grid array (LGA).
上述芯片封装结构10可以包括至少一个芯片101和封装基板(substrate)102。封装基板102具有相对设置的第一表面A1和第二表面A2。该芯片101设置于该封装基板102的第一表面A1上,焊球阵列13设置于封装基板102的第二表面A2上。芯片101可以通过封装基板102、焊球阵列13与PCB12上的其他芯片或者芯片封装结构实现信号传输。The above-mentioned chip package structure 10 may include at least one chip 101 and a package substrate 102 . The package substrate 102 has a first surface A1 and a second surface A2 disposed opposite to each other. The chip 101 is disposed on the first surface A1 of the package substrate 102 , and the solder ball array 13 is disposed on the second surface A2 of the package substrate 102 . The chip 101 may implement signal transmission through the packaging substrate 102 , the solder ball array 13 and other chips or chip packaging structures on the PCB 12 .
上述芯片101在工作的过程中会产生热量,为了对上述热量进行扩散,避免对该芯片101的性能造成影响。如图1所示,该芯片封装结构10还包括至少一个内导热界面层110、散热盖(lid)103。至少一个内导热界面层110分别覆盖至少一个芯片101远离封装基板102一侧的表面。散热盖103与内导热界面层110和封装基板102相连接,该散热盖103与封装基板102之间形成用于容纳上述至少一个芯片101的容纳腔20。The above-mentioned chip 101 will generate heat during operation. In order to diffuse the above-mentioned heat, the performance of the chip 101 is avoided to be affected. As shown in FIG. 1 , the chip package structure 10 further includes at least one inner thermal interface layer 110 and a heat dissipation lid 103 . The at least one inner thermal interface layer 110 respectively covers the surface of the at least one chip 101 on the side away from the package substrate 102 . The heat dissipation cover 103 is connected with the inner thermal conductive interface layer 110 and the package substrate 102 , and a accommodating cavity 20 for accommodating the at least one chip 101 is formed between the heat dissipation cover 103 and the package substrate 102 .
需要说明的是,图1是以芯片封装结构10中封装有一个芯片101为例进行的说明。在本申请的另一些实施例中,上述芯片封装结构10还可以为多芯片合封结构(multi chip module,MCM)。在此情况下,上述芯片封装结构10可以封装有至少两个芯片101。此时,每个芯片101远离封装基板102的一侧表面上,可以均覆盖有一个内导热界面层110。It should be noted that, FIG. 1 is described by taking an example in which one chip 101 is packaged in the chip packaging structure 10 . In other embodiments of the present application, the above-mentioned chip package structure 10 may also be a multi-chip package structure (multi chip module, MCM). In this case, the above-mentioned chip packaging structure 10 may be packaged with at least two chips 101 . At this time, a surface of each chip 101 on one side away from the packaging substrate 102 may be covered with an inner thermal interface layer 110 .
在本申请的一些实施例中,上述芯片101可以为裸芯片(single die)。或者,在另一些实施例中,上述芯片101可以为采用包含硅载板的封装(chip on wafer on substrate,COWOS)技术,将裸芯片设置于转接板(interposer)上的结构。又或者,在另一些实施例中,上述芯片101可以为采用扇出型封装(fan out package,FOP)技术,将裸芯片设置于重布线层(redistribution layer,RDL)上的结构。In some embodiments of the present application, the above-mentioned chip 101 may be a single die. Alternatively, in other embodiments, the above-mentioned chip 101 may be a structure in which a bare chip is disposed on an interposer using a chip on wafer on substrate (COWOS) technology including a silicon substrate. Alternatively, in other embodiments, the above-mentioned chip 101 may be a structure in which a bare chip is disposed on a redistribution layer (RDL) using a fan out package (FOP) technology.
此外,如图1所示,上述电子设备01还包括散热装置11以及外导热界面层120。该外导热界面层120与散热装置11和芯片封装结构10中的散热盖103相连接。上述散热装置11还可以通过螺钉与PCB12相连接。In addition, as shown in FIG. 1 , the above-mentioned electronic device 01 further includes a heat dissipation device 11 and an outer thermally conductive interface layer 120 . The outer thermal interface layer 120 is connected with the heat dissipation device 11 and the heat dissipation cover 103 in the chip package structure 10 . The above-mentioned heat dissipation device 11 can also be connected to the PCB 12 through screws.
在本申请的一些实施例中,上述散热装置11可以为散热器或者液冷板。在此情况下,上述芯片101作为热源在工作时产生的热量,该热量可以通过内导热界面层110传输至作为散热器件的散热盖103。该内导热界面层110可以降低芯片101与散热盖103之间的接触热阻,以提高散热盖103的散热性能。接下来,散热盖103作为热源,其上的热量可以通过外导热界面层120传输至作为散热器件的散热装置11,以通过散热装置11进行散热。该外导热界面层120用于降低散热装置11与散热盖103之间的接触热阻,以提高散热装置11的散热性能。In some embodiments of the present application, the above-mentioned heat dissipation device 11 may be a radiator or a liquid cooling plate. In this case, the heat generated by the chip 101 during operation as a heat source can be transferred to the heat dissipation cover 103 as a heat dissipation device through the inner thermal conductive interface layer 110 . The inner thermal interface layer 110 can reduce the contact thermal resistance between the chip 101 and the heat dissipation cover 103 , so as to improve the heat dissipation performance of the heat dissipation cover 103 . Next, the heat dissipation cover 103 is used as a heat source, and the heat on the heat dissipation cover 103 can be transferred to the heat dissipation device 11 as a heat dissipation device through the outer thermal conductive interface layer 120 to dissipate heat through the heat dissipation device 11 . The outer thermal interface layer 120 is used to reduce the contact thermal resistance between the heat dissipation device 11 and the heat dissipation cover 103 , so as to improve the heat dissipation performance of the heat dissipation device 11 .
基于此,上述内导热界面层110、外导热界面层120的材料可以包括导热硅胶。由上述可知,通过上述内导热界面层110、外导热界面层120可以减少热源表面与散热器件之间产生的接触热阻。此外,内导热界面层110、外导热界面层120还可以很好的对热源和散热器件之间的空隙进行填充,将上述两者之间的空气挤出,避免作为热不良导体的空气阻碍热量在热源和散热器件之间的传递。并且,内导热界面层110、外导热界面层120还可以使得热源和散热器件之间的接触更加的充分,且具有粘合热 源和散热器件的作用。此外,构成上述散热盖103的材料可以采用导热性良好的金属材料,例如铜、铝等。Based on this, the materials of the inner thermally conductive interface layer 110 and the outer thermally conductive interface layer 120 may include thermally conductive silica gel. It can be seen from the above that the thermal contact resistance generated between the surface of the heat source and the heat sink can be reduced by the above-mentioned inner thermal interface layer 110 and outer thermal interface layer 120 . In addition, the inner thermal interface layer 110 and the outer thermal interface layer 120 can also well fill the gap between the heat source and the heat sink, and squeeze out the air between the above two, so as to prevent the air as a poor thermal conductor from hindering the heat The transfer between the heat source and the heat sink. Moreover, the inner thermal interface layer 110 and the outer thermal interface layer 120 can also make the contact between the heat source and the heat sink more sufficient, and have the function of bonding the heat source and the heat sink. In addition, the material constituting the heat dissipation cover 103 can be a metal material with good thermal conductivity, such as copper, aluminum, and the like.
在此基础上,在本申请的一些实施例中,上述散热盖103如图2a所示,可以包括上盖31和多个侧壁32。多个侧壁32绕上盖31的一周设置,且可以通过粘结层(adhesive)40与封装基板102的第一表面A1相连接。其中,侧壁32与封装基板102的粘接位置可以称为焊垫(footprint)。在多个侧壁32绕上盖31的一周设置的情况下,如图2b所示,多个侧壁32依次首尾相接形成框架结构,该框架结构的中空部分即为上述容纳腔20所在的区域。On this basis, in some embodiments of the present application, as shown in FIG. 2 a , the heat dissipation cover 103 may include an upper cover 31 and a plurality of side walls 32 . A plurality of side walls 32 are disposed around the circumference of the upper cover 31 and may be connected to the first surface A1 of the package substrate 102 through an adhesive layer 40 . The bonding position between the sidewall 32 and the package substrate 102 may be referred to as a footprint. In the case where a plurality of side walls 32 are arranged around the circumference of the upper cover 31, as shown in FIG. 2b, the plurality of side walls 32 are connected end to end to form a frame structure, and the hollow part of the frame structure is where the above-mentioned accommodating cavity 20 is located. area.
需要说明的是,本申请实施例是以散热盖103包括四个侧壁32,该四个侧壁32依次首尾相接形成的框架结构为矩形为例进行的说明。本申请对散热盖103中侧壁32的数量以及多个侧壁32首尾相接形成的框架结构的形状不做限定,在此不再一一赘述。It should be noted that, the embodiment of the present application is described by taking the heat dissipation cover 103 including four side walls 32 as an example, and the frame structure formed by the four side walls 32 being connected end to end is a rectangle as an example. The present application does not limit the number of the side walls 32 in the heat dissipation cover 103 and the shape of the frame structure formed by connecting the plurality of side walls 32 end to end, which will not be repeated here.
此外,如图2a所示,上述上盖31可以包括至少一个凸台结构310和第一衔接结构311。上述至少一个凸台结构310中的每个凸台结构310可以与至少一个内导热界面层110相接触。例如,如图2a所示,当上盖31具有一个凸台结构310,芯片封装结构10包括一个内导热界面层110时,该凸台结构310与该内导热界面层110相接触。或者,当上盖31具有一个凸台结构310,芯片封装结构10包括多个内导热界面层110时,该凸台结构310可以同时与上述多个内导热界面层110均相接触。又或者,当上盖31具有多个凸台结构310,芯片封装结构10包括多个内导热界面层110时,多个凸台结构310中的每个凸台结构310,可以分别与一个内导热界面层110相接触。In addition, as shown in FIG. 2 a , the above-mentioned upper cover 31 may include at least one boss structure 310 and a first engaging structure 311 . Each of the at least one boss structure 310 described above may be in contact with the at least one inner thermally conductive interface layer 110 . For example, as shown in FIG. 2 a , when the top cover 31 has a boss structure 310 and the chip package structure 10 includes an inner thermal interface layer 110 , the boss structure 310 is in contact with the inner thermal interface layer 110 . Alternatively, when the top cover 31 has a boss structure 310 and the chip package structure 10 includes a plurality of inner thermally conductive interface layers 110 , the bossed structure 310 can be in contact with the above-mentioned plurality of inner thermally conductive interface layers 110 at the same time. Alternatively, when the upper cover 31 has a plurality of boss structures 310 and the chip package structure 10 includes a plurality of inner thermally conductive interface layers 110 , each boss structure 310 in the plurality of boss structures 310 may be respectively associated with an inner thermally conductive interface layer 110 . The interface layers 110 are in contact.
并且,上述至少一个凸台结构310中的每个凸台结构310可以通过第一衔接结构311与侧壁32相连接。在此情况下,该上盖31中用于与内导热界面层110相接触的部分为上述凸台结构310,而该上盖31中用于将凸台结构310与侧壁32相连接的部分为上述第一衔接结构311。Moreover, each of the at least one boss structure 310 may be connected to the side wall 32 through the first connecting structure 311 . In this case, the part of the upper cover 31 used for contacting the inner thermal interface layer 110 is the above-mentioned boss structure 310 , and the part of the upper cover 31 used to connect the boss structure 310 with the side wall 32 is the above-mentioned first connecting structure 311 .
需要说明的是,上盖31中的凸台结构310和第一衔接结构311材质可以相同,且为一体结构。在制作散热盖103的过程中,可以通过同一道工艺流程对上述四个侧壁32,以及上盖31中的凸台结构310和第一衔接结构311同时进行制备。此外,由于凸台结构310和第一衔接结构311为一体结构,以下实施例为了方便说明,对凸台结构310和第一衔接结构311进行区分,例如,上盖31中在封装基板102的第一表面A1的垂直投影中,与至少一个芯片101在第一表面A的垂直投影对应的部分为凸台结构310。例如,如图2a所示,当上盖31中具有一个凸台结构310,芯片封装结构10中封装有一个芯片101时,凸台结构310在第一表面A1上的垂直投影可以与该芯片101在第一表面A1上的垂直投影完全重叠。或者,当上盖31中具有一个凸台结构310,芯片封装结构10中封装有多个芯片101时,上述多个芯片101在第一表面A1上的垂直投影可以均位于凸台结构310在第一表面A1上的垂直投影的范围内。又或者,当上盖31中具有多个凸台结构310,芯片封装结构10中封装有多个芯片101时,每个凸台结构310在第一表面A1上的垂直投影,可以与一个芯片101在第一表面A1上的垂直投影完全重叠。此外,上盖31中在第一表面A的垂直投影,位于芯片101在第一表面A的垂直投影以外的部分为上述第一衔接结构311。It should be noted that, the boss structure 310 and the first connecting structure 311 in the upper cover 31 can be made of the same material and are an integral structure. In the process of manufacturing the heat dissipation cover 103 , the above-mentioned four side walls 32 , the boss structure 310 and the first connecting structure 311 in the upper cover 31 can be simultaneously prepared through the same process. In addition, since the boss structure 310 and the first connecting structure 311 are integrated structures, the following embodiments distinguish the boss structure 310 and the first connecting structure 311 for the convenience of description. In the vertical projection of a surface A1 , the portion corresponding to the vertical projection of the at least one chip 101 on the first surface A is the boss structure 310 . For example, as shown in FIG. 2a , when the upper cover 31 has a boss structure 310 and the chip package structure 10 is packaged with a chip 101 , the vertical projection of the boss structure 310 on the first surface A1 can be the same as the chip 101 . The vertical projections on the first surface A1 completely overlap. Alternatively, when the upper cover 31 has a boss structure 310 and the chip packaging structure 10 is packaged with a plurality of chips 101, the vertical projections of the above-mentioned plurality of chips 101 on the first surface A1 may all be located on the first surface A1 of the boss structure 310. within the range of the vertical projection on a surface A1. Alternatively, when the upper cover 31 has a plurality of boss structures 310 and the chip packaging structure 10 is packaged with a plurality of chips 101 , the vertical projection of each boss structure 310 on the first surface A1 may be the same as that of one chip 101 . The vertical projections on the first surface A1 completely overlap. In addition, in the vertical projection of the upper cover 31 on the first surface A, the part located outside the vertical projection of the chip 101 on the first surface A is the above-mentioned first connecting structure 311 .
此外,凸台结构310的最大厚度D1_max大于第一衔接结构311的最大厚度 D2_max,且凸台结构310远离芯片101的表面,凸出于第一衔接结构311远离芯片101的表面。其中,图2a是以凸台结构310远离芯片101的表面为台阶状为例进行的说明。在本申请的另一些实施例中,如图3a所示,凸台结构310远离芯片101的表面可以为向远离封装基板102的方向凸起的圆弧面。In addition, the maximum thickness D1_max of the boss structure 310 is greater than the maximum thickness D2_max of the first connecting structure 311 , and the boss structure 310 is away from the surface of the chip 101 and protrudes from the surface of the first connecting structure 311 away from the chip 101 . 2a is an example for illustrating that the surface of the boss structure 310 away from the chip 101 is stepped. In other embodiments of the present application, as shown in FIG. 3 a , the surface of the boss structure 310 away from the chip 101 may be a convex arc surface in a direction away from the package substrate 102 .
需要说明的是,凸台结构310的最大厚度D1_max是指,沿垂直于第一表面A1的方向,该凸台结构310中厚度最大的部分。同理,第一衔接结构311的最大厚度D2_max是指,沿垂直于第一表面A1的方向,该第一衔接结构311中厚度最大的部分。It should be noted that the maximum thickness D1_max of the boss structure 310 refers to, along the direction perpendicular to the first surface A1 , the part with the largest thickness in the boss structure 310 . Similarly, the maximum thickness D2_max of the first connecting structure 311 refers to, along the direction perpendicular to the first surface A1 , the part with the largest thickness in the first connecting structure 311 .
图3a是以散热盖103的侧壁32与封装基板102的第一表面A1垂直为例,对该侧壁32的结构进行的说明。在本申请的另一些实施例中,如图3b所示,散热盖103的侧壁32可以与封装基板102之间具有锐角α。其中,图3a所示的方案相对于图3b所示的方案而言,由于侧壁32垂直于封装基板102的第一表面A1设置,因此可以减小整个散热盖103在封装基板102上的布件面积,有利于节约封装基板102上的部件空间,使得封装基板102上可以设置更多的芯片101或者其他电子元件。FIG. 3 a illustrates the structure of the side wall 32 by taking the example that the side wall 32 of the heat dissipation cover 103 is perpendicular to the first surface A1 of the package substrate 102 . In other embodiments of the present application, as shown in FIG. 3 b , the sidewall 32 of the heat dissipation cover 103 may have an acute angle α with the package substrate 102 . Compared with the solution shown in FIG. 3b , in the solution shown in FIG. 3 a , since the side wall 32 is arranged perpendicular to the first surface A1 of the package substrate 102 , the distribution of the entire heat dissipation cover 103 on the package substrate 102 can be reduced. The component area is beneficial to save the component space on the package substrate 102 , so that more chips 101 or other electronic components can be arranged on the package substrate 102 .
需要说明的是,本申请实施中,上述凸台结构310的厚度、第一衔接结构311的厚度中的任意一个厚度的方向与第一表面A1的方向垂直,即沿图3a所示的Y方向。在此情况下,凸台结构310的最大厚度D1_max是指,沿Y方向凸台结构310相对的上、下表面之间的最大距离。第一衔接结构311的最大厚度D2_max是指,沿Y方向第一衔接结构311相对的上、下表面之间的最大距离。It should be noted that, in the implementation of the present application, the thickness of any one of the thickness of the boss structure 310 and the thickness of the first connecting structure 311 is perpendicular to the direction of the first surface A1, that is, along the Y direction shown in FIG. 3a . In this case, the maximum thickness D1_max of the boss structure 310 refers to the maximum distance between the opposite upper and lower surfaces of the boss structure 310 along the Y direction. The maximum thickness D2_max of the first connecting structure 311 refers to the maximum distance between the opposite upper and lower surfaces of the first connecting structure 311 along the Y direction.
由上述可知,可以将具有上述散热盖103的芯片封装结构10设置于PCB12上,在该散热盖103的上表面形成外导热界面层120,将散热装置11设置于散热盖103远离PCB12一侧的表面上。然后,通过螺纹连接件,例如螺钉,将散热装置11的四个角固定于PCB12上。As can be seen from the above, the chip package structure 10 with the heat dissipation cover 103 can be arranged on the PCB 12, the outer thermal interface layer 120 is formed on the upper surface of the heat dissipation cover 103, and the heat dissipation device 11 is disposed on the side of the heat dissipation cover 103 away from the PCB12. on the surface. Then, the four corners of the heat dissipation device 11 are fixed on the PCB 12 by means of screw connections, such as screws.
基于此,一方面,芯片封装结构10中,当芯片101在服役(即工作)时,由于温度升高使得封装基板102发生如图4所示的翘曲现象。该翘曲现象会导致散热盖103与散热装置11之间间隙有增大的趋势。但是由于散热盖103具有凸台结构310。该凸台结构310的最大厚度D1_max大于第一衔接结构311的最大厚度D2_max,且凸台结构310远离芯片101的表面,凸出于第一衔接结构311远离芯片101的表面,因此,上述凸台结构310可以减小散热盖103与散热装置11之间的间隙。Based on this, on the one hand, in the chip package structure 10, when the chip 101 is in service (ie, working), the package substrate 102 is warped as shown in FIG. 4 due to the temperature rise. The warpage phenomenon may cause the gap between the heat dissipation cover 103 and the heat dissipation device 11 to increase. However, since the heat dissipation cover 103 has the boss structure 310 . The maximum thickness D1_max of the boss structure 310 is greater than the maximum thickness D2_max of the first connecting structure 311 , and the boss structure 310 is far away from the surface of the chip 101 and protrudes from the surface of the first connecting structure 311 away from the chip 101 . Therefore, the above boss The structure 310 can reduce the gap between the heat dissipation cover 103 and the heat dissipation device 11 .
这样一来,可以避免散热盖103与散热装置11之间的间隙由于外导热界面层120的形变而发生较大的变化,进而可以使得固定于PCB12上的散热装置11仍然能够有效的施压于凸台结构310上,减小固化后的内导热界面层110与芯片101之间出现分层的几率,提高内导热界面层110分别与芯片101、散热盖103之间的热接触可靠性,从而可以降低芯片封装结构10出现高温掉电现象的几率。In this way, the gap between the heat dissipation cover 103 and the heat dissipation device 11 can be prevented from being greatly changed due to the deformation of the outer thermal interface layer 120 , so that the heat dissipation device 11 fixed on the PCB 12 can still be effectively pressed against On the boss structure 310, the probability of delamination between the cured inner thermal interface layer 110 and the chip 101 is reduced, and the thermal contact reliability between the inner thermal interface layer 110 and the chip 101 and the heat dissipation cover 103 is improved, thereby The probability of the chip package structure 10 being powered down at high temperature can be reduced.
在此基础上,由图4可以看出,芯片封装结构10中的封装基板102发生形变时,封装基板102中与芯片101的中心位置相对应的区域,发生的形变较大,从而容易导致内导热界面层110容易在与芯片101的中心位置接触的部分发生分层。为了解决上述问题,该散热盖103的凸台结构310具有最大厚度D1_max的部分可以位于芯片101的中心位置。On this basis, it can be seen from FIG. 4 that when the packaging substrate 102 in the chip packaging structure 10 is deformed, the area of the packaging substrate 102 corresponding to the center position of the chip 101 is greatly deformed, which is easy to cause internal damage. The thermally conductive interface layer 110 is easily delaminated at the portion in contact with the center position of the chip 101 . In order to solve the above problem, the portion of the boss structure 310 of the heat dissipation cover 103 having the maximum thickness D1_max can be located at the center of the chip 101 .
这样一来,可以使得散热装置11通过凸台结构310向芯片101施加的压力大部分 施加于该芯片101的中心位置,避免散热装置11向芯片101施加的压力偏移,降低内导热界面层110在与芯片101的中心位置接触的部分发生分层的几率。In this way, most of the pressure applied by the heat sink 11 to the chip 101 through the boss structure 310 can be applied to the center of the chip 101 , so as to prevent the pressure applied by the heat sink 11 to the chip 101 from being offset and reduce the internal thermal interface layer 110 The probability of occurrence of delamination at the portion in contact with the center position of the chip 101 .
另一方面,当散热盖103的上表面为平面时,在服役温度或更高温度下该表面会下凹呈现“笑脸”状态,从而使得外力难以通过散热盖103有效传递到芯片101上。而本申请实施例中,由于散热盖103具有上述凸台结构310,因此更好的与外导热界面层120相接触,从而使得散热装置11能够更有效的向芯片101施加压力。On the other hand, when the upper surface of the heat dissipation cover 103 is flat, at the service temperature or higher, the surface will be concave to show a "smiley face" state, which makes it difficult for the external force to be effectively transmitted to the chip 101 through the heat dissipation cover 103 . In the embodiment of the present application, since the heat dissipation cover 103 has the above-mentioned boss structure 310 , it is better in contact with the outer thermal interface layer 120 , so that the heat dissipation device 11 can more effectively apply pressure to the chip 101 .
又一方面,本申请实施例中上述凸台结构310作为散热盖103的一部分,在制作散热盖103的同时可以完成上述凸台结构310的制备。当前的量产加工工艺可以做到散热盖103的公差远远小于制作散热器件11的整机级公差。因此,相对于将凸台结构310制作于散热器件11的方案而言,将凸台结构310作为散热盖103的一部分,凸台结构310的厚度无需较大,从而有利于外导热界面层120吸收凸台结构310的厚度,可以避免凸台结构310的厚度较大,导致外导热界面层120只能覆盖上盖31中凸台结构310所在的区域,提高散热器件11与散热盖103之间外导热界面层120的填充度。On the other hand, in the embodiment of the present application, the boss structure 310 is used as a part of the heat dissipation cover 103 , and the preparation of the boss structure 310 can be completed when the heat dissipation cover 103 is fabricated. The current mass production process can achieve that the tolerance of the heat dissipation cover 103 is far smaller than the machine-level tolerance of the heat dissipation component 11 . Therefore, compared with the solution in which the boss structure 310 is fabricated on the heat dissipation device 11 , the boss structure 310 is used as a part of the heat dissipation cover 103 , and the thickness of the boss structure 310 does not need to be large, which is conducive to the absorption of the external thermal interface layer 120 The thickness of the boss structure 310 can avoid that the thickness of the boss structure 310 is too large, so that the outer thermal interface layer 120 can only cover the area where the boss structure 310 is located in the upper cover 31 , thereby increasing the external surface between the heat dissipation device 11 and the heat dissipation cover 103 . The filling degree of the thermally conductive interface layer 120 .
在本申请的一些实施例中,如图5所示,散热盖103的侧壁32远离封装基板102的一侧表面可以作为上基准面B1。为了使得凸台结构310远离芯片101的表面,凸出于第一衔接结构311远离芯片101的表面,如图5所示,该凸台结构310远离芯片101的表面,凸出于上述上基准面B1,且凸台结构310远离芯片101的表面与上基准面B1之间具有最大距离L_max。示例的,0.01mm≤L_max≤0.2mm。In some embodiments of the present application, as shown in FIG. 5 , the side surface of the side wall 32 of the heat dissipation cover 103 away from the package substrate 102 can be used as the upper reference plane B1 . In order to keep the boss structure 310 away from the surface of the chip 101, the boss structure 310 protrudes from the surface of the first connecting structure 311 away from the chip 101, as shown in FIG. B1, and there is a maximum distance L_max between the surface of the boss structure 310 away from the chip 101 and the upper reference plane B1. Exemplarily, 0.01mm≤L_max≤0.2mm.
需要说明的是,本申请实施例中,散热盖103的侧壁32远离封装基板102的一侧表面可以作为上基准面B1当散热盖103的侧壁32远离封装基板102的一侧表面的至少一部分为平面时,该部分可以作为上述上基准面B1。It should be noted that, in the embodiment of the present application, the side surface of the side wall 32 of the heat dissipation cover 103 away from the packaging substrate 102 can be used as the upper reference plane B1 when the side wall 32 of the heat dissipation cover 103 is at least one side of the surface away from the packaging substrate 102 When a part is flat, this part can be used as the above-mentioned upper reference plane B1.
在此情况下,当最大距离L_max小于0.01mm时,凸台结构310凸出的程度较小,该凸台结构310对减小散热盖103和散热装置11之间间距的效果不明显,不能有效提高散热装置11施压于凸台结构310上的压力效果。当L_max大于0.2mm时,该凸台结构310凸出的尺寸太大,使得凸台结构310与散热器件11之间的间隙太小,外导热界面层120只能覆盖上盖31中凸台结构310所在的区域,从而降低了散热器件11与散热盖103之间外导热界面层120的填充量。并且,该外导热界面层120的厚度(例如,0.12mm~0.3mm)不能够很好的吸收凸台结构310的厚度,使得与散热器件11朝向封装基板102的表面的接触平整度降低。In this case, when the maximum distance L_max is less than 0.01 mm, the protruding degree of the boss structure 310 is small, the effect of the boss structure 310 on reducing the distance between the heat dissipation cover 103 and the heat dissipation device 11 is not obvious, and cannot be effectively The pressure effect of the heat dissipation device 11 on the boss structure 310 is improved. When L_max is greater than 0.2 mm, the protruding size of the boss structure 310 is too large, so that the gap between the boss structure 310 and the heat sink 11 is too small, and the outer thermal interface layer 120 can only cover the boss structure in the upper cover 31 310 is located, thereby reducing the filling amount of the external thermal interface layer 120 between the heat dissipation device 11 and the heat dissipation cover 103 . In addition, the thickness of the outer thermal interface layer 120 (eg, 0.12 mm˜0.3 mm) cannot absorb the thickness of the boss structure 310 well, so that the contact flatness with the surface of the heat sink 11 facing the package substrate 102 is reduced.
因此,当最大距离L_max满足0.01mm≤L_max≤0.2mm,外导热界面层120与散热器件11相接触的表面可以为平面,有利于提高外导热界面层120与散热器件11的接触性能。此外,还可以使得散热器件11与散热盖103之间外导热界面层120的填充度能够满足要求,从而可以维持散热盖103与散热器件11的均温能力。示例的,上述最大距离L_max可以为0.05mm、0.06mm、0.08mm、0.10mm、0.15mm。Therefore, when the maximum distance L_max satisfies 0.01mm≤L_max≤0.2mm, the surface of the outer thermal interface layer 120 in contact with the heat dissipation device 11 can be flat, which is beneficial to improve the contact performance between the outer heat conductive interface layer 120 and the heat dissipation device 11 . In addition, the filling degree of the outer thermal interface layer 120 between the heat dissipation device 11 and the heat dissipation cover 103 can also meet the requirements, so that the temperature uniformity of the heat dissipation cover 103 and the heat dissipation device 11 can be maintained. For example, the above-mentioned maximum distance L_max may be 0.05mm, 0.06mm, 0.08mm, 0.10mm, 0.15mm.
此外,当进行表面贴装(surface mounted technology,SMT)工艺时,由于散热盖103的公差等级远远高于SMT吸嘴的公差等级,因此虽然凸台结构310远离芯片101的表面,凸出于第一衔接结构311远离芯片101的表面,但是凸台结构310远离芯片101的表面凸起部分在宏观上可以认为是光滑过渡的。这样一来,可以使得SMT吸嘴吸附芯片封装结构10时,能够与散热盖103贴合紧密。In addition, when the surface mounted technology (SMT) process is performed, since the tolerance level of the heat dissipation cover 103 is much higher than that of the SMT nozzle, although the boss structure 310 is far away from the surface of the chip 101, it protrudes from the surface of the chip 101. The first connecting structure 311 is away from the surface of the chip 101 , but the protruding portion of the surface of the boss structure 310 away from the chip 101 can be regarded as a smooth transition in macroscopic view. In this way, the SMT nozzle can be tightly attached to the heat dissipation cover 103 when sucking the chip package structure 10 .
以下对凸台结构310的其他设置方式进行举例说明。Hereinafter, other setting manners of the boss structure 310 will be illustrated by way of example.
在本申请的一些实施例中,如图6a所示,凸台结构310的最大厚度D1_max大于第一衔接结构311的最大厚度D2_max,凸台结构310远离芯片101的表面(上表面),凸出于第一衔接结构311远离芯片101的表面。此外,凸台结构310靠近芯片101的表面(下表面),凸出于第一衔接结构311靠近芯片101的表面。In some embodiments of the present application, as shown in FIG. 6 a , the maximum thickness D1_max of the boss structure 310 is greater than the maximum thickness D2_max of the first connecting structure 311 , and the boss structure 310 is away from the surface (upper surface) of the chip 101 and protrudes The first connecting structure 311 is away from the surface of the chip 101 . In addition, the boss structure 310 is close to the surface (lower surface) of the chip 101 and protrudes from the surface of the first connecting structure 311 close to the chip 101 .
这样一来,凸台结构310的上、下表面均凸出于第一衔接结构311,从而有利于增大凸台结构310的厚度和刚度,使得散热器件11可以更有效的向散热盖103中的凸台结构310施加压力,减小内导热界面层110出现分层的几率。In this way, both the upper and lower surfaces of the boss structure 310 protrude from the first connecting structure 311 , which is beneficial to increase the thickness and rigidity of the boss structure 310 , so that the heat dissipation device 11 can be more effectively inserted into the heat dissipation cover 103 The boss structure 310 exerts pressure to reduce the probability of delamination of the inner thermally conductive interface layer 110 .
此外,由于凸台结构310靠近芯片101的表面(下表面),凸出于第一衔接结构311靠近芯片101的表面,因此,当凸台结构310的最大厚度D1_max满足设计要求时,凸台结构310远离芯片101的表面(上表面)与上基准面B1之间的最大距离L_max,可以无需太大,例如L_max=0.06mm。从而可以使得覆盖凸台结构310上表面的外导热界面层120的厚度(例如,0.12mm~0.3mm)可以很好的吸收凸台结构310的厚度,有利于提高散热器件11与散热盖103之间外导热界面层120的填充度。In addition, since the boss structure 310 is close to the surface (lower surface) of the chip 101 and protrudes from the surface of the first connecting structure 311 close to the chip 101 , when the maximum thickness D1_max of the boss structure 310 meets the design requirements, the boss structure 310 The maximum distance L_max between the surface (upper surface) far away from the chip 101 and the upper reference plane B1 may not be too large, for example, L_max=0.06mm. Therefore, the thickness of the outer thermal interface layer 120 (for example, 0.12 mm˜0.3 mm) covering the upper surface of the boss structure 310 can be well absorbed by the thickness of the boss structure 310 , which is beneficial to improve the relationship between the heat dissipation device 11 and the heat dissipation cover 103 . The filling degree of the external thermal interface layer 120 .
此外,如图6a所示,沿凸台结构310到侧壁32的方向(图6a中的X方向),第一衔接结构311的厚度D2逐渐减小。这样一来,可以减小第一衔接结构311靠近侧壁32一端的刚度,使得散热器件11向散热盖103施压时,第一衔接结构311靠近侧壁32一端容易发生形变。从而可以在散热器件11向散热盖103施压时,第一衔接结构311更容易随散热器件11的下压方向移动,使得散热器件11向散热盖103施加的压力,更加集中作用于厚度和刚度较大的凸台结构310上,进而可以使得散热器件11的压力可以更有效地通过散热盖103中的凸台结构310传递到芯片结构101上,减小内导热界面层110出现分层的几率。In addition, as shown in FIG. 6a, along the direction from the boss structure 310 to the sidewall 32 (X direction in FIG. 6a), the thickness D2 of the first connecting structure 311 gradually decreases. In this way, the rigidity of the end of the first connecting structure 311 close to the side wall 32 can be reduced, so that when the heat dissipation device 11 presses the heat dissipation cover 103 , the end of the first connecting structure 311 close to the side wall 32 is easily deformed. Therefore, when the heat dissipation device 11 presses the heat dissipation cover 103 , the first connecting structure 311 can more easily move with the downward pressing direction of the heat dissipation device 11 , so that the pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 is more concentrated on the thickness and stiffness. On the larger boss structure 310, the pressure of the heat dissipation device 11 can be more effectively transmitted to the chip structure 101 through the boss structure 310 in the heat dissipation cover 103, and the probability of delamination of the inner thermal interface layer 110 is reduced. .
需要说明的是,图6a是以散热盖103的侧壁32与封装基板102垂直为例对该侧壁32的结构进行的说明。在本申请的另一些实施例中,如图6b所示,散热盖103的侧壁32可以与封装基板102之间具有锐角α。It should be noted that, FIG. 6 a illustrates the structure of the side wall 32 by taking the example that the side wall 32 of the heat dissipation cover 103 is perpendicular to the package substrate 102 . In other embodiments of the present application, as shown in FIG. 6 b , the sidewall 32 of the heat dissipation cover 103 may have an acute angle α with the package substrate 102 .
此外,在沿凸台结构310到侧壁32的方向(图6a中的X方向),第一衔接结构311的厚度D2逐渐减小的情况下,图6a和图6b是以凸台结构310远离芯片101的表面(上表面)和靠近芯片101的表面(下表面),以及第一衔接结构311远离芯片101的表面(上表面)和靠近芯片101的表面(下表面)均为向外凸出的非平面为例进行的说明。In addition, in the case where the thickness D2 of the first connecting structure 311 gradually decreases along the direction from the boss structure 310 to the sidewall 32 (X direction in FIG. 6a ), FIG. 6a and FIG. 6b show that the boss structure 310 is far away from the The surface (upper surface) of the chip 101 and the surface (lower surface) close to the chip 101, and the surface (upper surface) of the first connecting structure 311 away from the chip 101 and the surface (lower surface) close to the chip 101 are protruding outward A non-planar example of .
在本申请的另一些实施例中,如图7a所示,第一衔接结构311远离芯片101的表面(上表面)为平面。此时,为了确保沿凸台结构310到侧壁32的方向(图7a中的X方向),第一衔接结构311的厚度D2逐渐减小,第一衔接结构311靠近芯片101的表面(下表面),为斜面或者圆弧面。In other embodiments of the present application, as shown in FIG. 7 a , the surface (upper surface) of the first connecting structure 311 away from the chip 101 is flat. At this time, in order to ensure the direction from the boss structure 310 to the sidewall 32 (X direction in FIG. 7 a ), the thickness D2 of the first connecting structure 311 is gradually reduced, and the first connecting structure 311 is close to the surface (the lower surface of the chip 101 ) ), which is an inclined surface or an arc surface.
或者,在本申请的另一些实施例中,如图7b所示,第一衔接结构311靠近芯片101的表面(下表面)为平面。在此情况下,凸台结构310靠近芯片101的表面(下表面)可以与第一衔接结构311靠近芯片101的表面(下表面)平齐。这样一来,散热盖103中上盖31靠近芯片101的表面可以具有较高的平整度,达到简化制作散热盖103的模具结构的目的。Alternatively, in other embodiments of the present application, as shown in FIG. 7b , the surface (lower surface) of the first connecting structure 311 close to the chip 101 is flat. In this case, the surface (lower surface) of the boss structure 310 close to the chip 101 may be flush with the surface (lower surface) of the first connecting structure 311 close to the chip 101 . In this way, the surface of the upper cover 31 of the heat dissipation cover 103 close to the chip 101 can have a higher flatness, so as to simplify the structure of the mold for manufacturing the heat dissipation cover 103 .
此外,为了确保沿凸台结构310到侧壁32的方向(图7b中的X方向),第一衔接结构311的厚度D2逐渐减小,第一衔接结构311远离芯片101的表面(上表面),为斜面或者圆弧面。在此情况下,当凸台结构310、第一衔接结构311远离芯片101的表面(上表面)均为圆弧面时,凸台结构310、第一衔接结构311远离芯片101的表面(上表面)的曲率可以相同。这样一来,可以使得制作散热盖103的模具的结构简单,简化制作工艺。In addition, in order to ensure that the thickness D2 of the first connecting structure 311 is gradually reduced along the direction from the boss structure 310 to the sidewall 32 (X direction in FIG. 7 b ), the first connecting structure 311 is far away from the surface (upper surface) of the chip 101 . , which is an inclined surface or an arc surface. In this case, when the surface (upper surface) of the boss structure 310 and the first connecting structure 311 away from the chip 101 are all arc surfaces, the surface (the upper surface) of the boss structure 310 and the first connecting structure 311 away from the chip 101 ) can have the same curvature. In this way, the structure of the mold for manufacturing the heat dissipation cover 103 can be simplified, and the manufacturing process can be simplified.
同理,图7a和图7b中,散热盖103的侧壁32可以与封装基板102之间具有锐角α,此处不再详细赘述。以下为了方便说明,均是以散热盖103的侧壁32与封装基板102的第一表面A1垂直为例进行的说明。Similarly, in FIGS. 7 a and 7 b , the sidewall 32 of the heat dissipation cover 103 may have an acute angle α with the package substrate 102 , which will not be described in detail here. For the convenience of description below, the description is given by taking an example that the side wall 32 of the heat dissipation cover 103 is perpendicular to the first surface A1 of the package substrate 102 .
此外,在沿凸台结构310到侧壁32的方向,第一衔接结构311的厚度D2逐渐减小的情况下,在本申请过的一些实施例中,如图8所示,侧壁32远离封装基板102的一侧表面(上表面)为上基准面B1,内导热界面层110远离封装基板102的一侧表面(上表面)为下基准面B2。基于此,该上基准面B1和下基准面B2之间具有基准厚度D0。第一衔接结构311的最小厚度D2_min可以小于基准厚度D0。In addition, in the case where the thickness D2 of the first connecting structure 311 gradually decreases along the direction from the boss structure 310 to the side wall 32, in some embodiments of the present application, as shown in FIG. 8, the side wall 32 is far away from One surface (upper surface) of the package substrate 102 is the upper reference plane B1, and the side surface (upper surface) of the inner thermal interface layer 110 away from the package substrate 102 is the lower reference plane B2. Based on this, there is a reference thickness D0 between the upper reference plane B1 and the lower reference plane B2. The minimum thickness D2_min of the first engagement structure 311 may be smaller than the reference thickness D0.
这样一来,可以通过减小第一衔接结构311的厚度,达到减小第一衔接结构311刚度的目的。从而可以在散热器件11向散热盖103施压时,第一衔接结构311更容易随散热器件11的下压方向移动,使得散热器件11向散热盖103施加的压力,更加集中作用于凸台结构310上,降低内导热界面层110出现分层的几率。In this way, the purpose of reducing the rigidity of the first connecting structure 311 can be achieved by reducing the thickness of the first connecting structure 311 . Therefore, when the heat dissipation device 11 presses the heat dissipation cover 103, the first connecting structure 311 can more easily move with the pressing direction of the heat dissipation device 11, so that the pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 is more concentrated on the boss structure. In step 310, the probability of delamination of the inner thermally conductive interface layer 110 is reduced.
需要说明的是,由上述可知,沿凸台结构310到侧壁32的方向,第一衔接结构311的厚度D2逐渐减小,因此第一衔接结构311的最小厚度D2_min为该第一衔接结构311靠近侧壁32(或者上述footprint)的一端的厚度。It should be noted that, as can be seen from the above, the thickness D2 of the first connecting structure 311 gradually decreases along the direction from the boss structure 310 to the side wall 32 , so the minimum thickness D2_min of the first connecting structure 311 is the first connecting structure 311 The thickness of one end near side wall 32 (or the aforementioned footprint).
示例的,第一衔接结构311的最小厚度D2_min与基准厚度D0可以满足:20%×D0≤D2_min≤80%×D0。例如,第一衔接结构311的最小厚度D2_min可以为25%×D0、30%×D0、35%×D0、40%×D0、45%×D0、50%×D0、60%×D0或者70%×D0。其中,在本申请的一些实施例中,上述基准厚度D0可以为1mm~2mm的范围内。例如,当D0=1mm时,最小厚度D2_min的范围为0.2mm≤D2_min≤0.8mm。For example, the minimum thickness D2_min of the first connecting structure 311 and the reference thickness D0 may satisfy: 20%×D0≤D2_min≤80%×D0. For example, the minimum thickness D2_min of the first bridging structure 311 may be 25%×D0, 30%×D0, 35%×D0, 40%×D0, 45%×D0, 50%×D0, 60%×D0, or 70% ×D0. Wherein, in some embodiments of the present application, the above-mentioned reference thickness D0 may be in the range of 1 mm˜2 mm. For example, when D0=1mm, the range of the minimum thickness D2_min is 0.2mm≤D2_min≤0.8mm.
当第一衔接结构311的最小厚度D2_min小于20%×D0时,该第一衔接结构311的厚度太薄,从而导致该第一衔接结构311的刚度太小,降低了散热盖103对封装基板102翘曲的控制能力。此外,当第一衔接结构311的最小厚度D2_min大于80%×D0时,第一衔接结构311的厚度太大,刚度太强,从而在散热器件11向散热盖103施压时,第一衔接结构311不容易随散热器件11的下压方向移动,从而不利于将散热器件11向散热盖103施加的压力,集中作用于凸台结构310上。When the minimum thickness D2_min of the first connecting structure 311 is less than 20%×D0, the thickness of the first connecting structure 311 is too thin, so that the rigidity of the first connecting structure 311 is too small, which reduces the impact of the heat dissipation cover 103 on the package substrate 102 Warp control. In addition, when the minimum thickness D2_min of the first connecting structure 311 is greater than 80%×D0, the thickness of the first connecting structure 311 is too large and the rigidity is too strong. 311 is not easy to move with the downward pressing direction of the heat dissipation device 11 , so that it is not conducive to concentrate the pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 on the boss structure 310 .
在此基础上,由上述可知,凸台结构310远离芯片101的表面(上表面)与上基准面B1之间具有最大距离L_max。在本申请的一些实施例中,L_max<D0。这样一来,可以使得凸台结构310中位于容纳腔20内的部分,即凸台结构310中基准厚度D0所在的部分厚度较大,而凸台结构310中位于容纳腔20外的部分,即凸台结构310中最大距离L_max所在的部分厚度较小。从而可以使得凸台结构310的最大厚度D1_max满足设计要求时,凸台结构310的最大距离L_max无需太大,有利于提高散热器件11与散热盖103之间外导热界面层120的填充度。On this basis, it can be seen from the above that there is a maximum distance L_max between the surface (upper surface) of the boss structure 310 away from the chip 101 and the upper reference plane B1 . In some embodiments of the present application, L_max<D0. In this way, the part of the boss structure 310 located in the accommodating cavity 20, that is, the part of the boss structure 310 where the reference thickness D0 is located, can be made thicker, while the part of the boss structure 310 located outside the accommodating cavity 20, that is The thickness of the portion of the boss structure 310 where the maximum distance L_max is located is relatively small. Therefore, when the maximum thickness D1_max of the boss structure 310 meets the design requirements, the maximum distance L_max of the boss structure 310 does not need to be too large, which is beneficial to improve the filling degree of the external thermal interface layer 120 between the heat dissipation device 11 and the heat dissipation cover 103 .
此外,在本申请的一些实施例中,如图9a所示,凸台结构310远离芯片101的表面为第一弧面S1,第一衔接结构311远离芯片101的表面中,靠近第一弧面S1的部分为第二弧面S2。其中,第二弧面S1与第一弧面S2的曲率相同,且第二弧面S2与第一弧面S1相连接。此外,与凸台结构310对应的芯片101在第一表面A1的垂直投影位于,第一弧面S1和第二弧面S2在第一表面A1的垂直投影的范围内。这样一来,上盖31中不仅凸台结构310远离芯片101的表面凸起,第一衔接结构311远离芯片101的表面中在位于第二弧面S2所在位置也会有所凸起,从而可以适当增大上盖31远离芯片101的表面凸起部分的尺寸。从而可以在散热器件11向散热盖103施加的压力时,该压力可以更有效的作用于上盖31凸起部分的压力传递至芯片101,从而使得导热界面层110与芯片101贴合的更加紧密。In addition, in some embodiments of the present application, as shown in FIG. 9a, the surface of the boss structure 310 away from the chip 101 is the first arc surface S1, and the surface of the first connecting structure 311 away from the chip 101 is close to the first arc surface The part of S1 is the second arc surface S2. The curvature of the second arc surface S1 and the first arc surface S2 are the same, and the second arc surface S2 is connected with the first arc surface S1. In addition, the vertical projection of the chip 101 corresponding to the boss structure 310 on the first surface A1 is located, and the first arc surface S1 and the second arc surface S2 are within the range of the vertical projection of the first surface A1. In this way, not only the boss structure 310 is raised from the surface of the upper cover 31 away from the chip 101 , but the surface of the first connecting structure 311 away from the chip 101 will also be raised at the position of the second arc surface S2 , so that it can be The size of the raised portion of the surface of the upper cover 31 away from the chip 101 is appropriately increased. Therefore, when the heat dissipation device 11 exerts the pressure on the heat dissipation cover 103, the pressure can be more effectively applied to the pressure of the convex portion of the upper cover 31 and transferred to the chip 101, so that the thermal interface layer 110 and the chip 101 can be more closely attached .
在此基础上,第二弧面S2远离第一弧面S1的一边在第一表面A1的垂直投影具有如图9b(沿图9a中的箭头Y方向得到的俯视图)所示的第一轮廓T1。与凸台结构310对应的芯片101在第一表面A1的垂直投影具有第二轮廓T2。其中,第一轮廓T1与第二轮廓T2之间的最大间距Hmax满足:Hmax≤2mm。当Hmax>2mm时,上盖31远离芯片101的表面凸起部分的尺寸太大,使得上盖31与散热器件11之间的间隙太小,外导热界面层120只能覆盖上盖31中凸台结构310所在的区域,从而降低了散热器件11与散热盖103之间外导热界面层120的填充量。On this basis, the vertical projection of the side of the second arc surface S2 away from the first arc surface S1 on the first surface A1 has a first contour T1 as shown in Figure 9b (a top view taken along the arrow Y direction in Figure 9a ) . The vertical projection of the chip 101 corresponding to the boss structure 310 on the first surface A1 has a second contour T2. Wherein, the maximum distance Hmax between the first contour T1 and the second contour T2 satisfies: Hmax≤2mm. When Hmax>2mm, the size of the convex part of the upper cover 31 away from the chip 101 is too large, so that the gap between the upper cover 31 and the heat sink 11 is too small, and the outer thermal interface layer 120 can only cover the convex part of the upper cover 31 The area where the mesa structure 310 is located reduces the filling amount of the external thermal interface layer 120 between the heat dissipation device 11 and the heat dissipation cover 103 .
需要说明的是,本申请实施例中,与凸台结构310对应的芯片101是指,通过内导热界面层110与凸台结构310相连接的芯片101。It should be noted that, in the embodiment of the present application, the chip 101 corresponding to the boss structure 310 refers to the chip 101 connected to the boss structure 310 through the inner thermal interface layer 110 .
或者,在本申请的另一些实施例中,如图9c所示,凸台结构310远离芯片101的表面中至少一部分为第三弧面S3。该第三弧面S3在第一表面A1的垂直投影位于,与凸台结构310对应的芯片101在第一表面A1的垂直投影的范围内。在此基础上,第三弧面S3在第一表面A1的垂直投影具有如图9d(沿图9c中的箭头Y方向得到的俯视图)所示的第三轮廓T3。与凸台结构310对应的芯片101在第一表面A1的垂直投影具有第二轮廓T2。其中,第三轮廓T3与第二轮廓T2之间的最大间距Hmax满足:Hmax≤2mm。当Hmax>2mm时,凸台结构310的尺寸太小,在散热器件11向散热盖103施加的压力时,散热盖103作用于芯片101的作用面的面积太小,从而不利于散热器件11有效的将压力施加至芯片101。Alternatively, in other embodiments of the present application, as shown in FIG. 9 c , at least a part of the surface of the boss structure 310 away from the chip 101 is the third arc surface S3 . The vertical projection of the third arc surface S3 on the first surface A1 is located within the range of the vertical projection of the first surface A1 of the chip 101 corresponding to the boss structure 310 . On this basis, the vertical projection of the third arc surface S3 on the first surface A1 has a third contour T3 as shown in FIG. 9d (a top view taken along the arrow Y direction in FIG. 9c ). The vertical projection of the chip 101 corresponding to the boss structure 310 on the first surface A1 has a second contour T2. Wherein, the maximum distance Hmax between the third contour T3 and the second contour T2 satisfies: Hmax≤2mm. When Hmax>2mm, the size of the boss structure 310 is too small. When the heat dissipation device 11 exerts pressure on the heat dissipation cover 103, the area of the working surface of the heat dissipation cover 103 acting on the chip 101 is too small, which is not conducive to the effective effect of the heat dissipation device 11. of applying pressure to the chip 101 .
又或者,在本申请的另一些实施例中,如图9e所示,凸台结构310远离芯片101的表面为第一弧面S1。该第一弧面S1在第一表面A1的垂直投影,与凸台结构310对应的芯片101在第一表面A1的垂直投影完全重叠。这样一来,可以使得凸台结构310可以完全覆盖芯片101,从而在散热器件11向散热盖103施压时,作用于凸台结构310上的力能够更有效的传递至芯片101上。Alternatively, in other embodiments of the present application, as shown in FIG. 9e , the surface of the boss structure 310 away from the chip 101 is the first arc surface S1 . The vertical projection of the first arc surface S1 on the first surface A1 completely overlaps with the vertical projection of the chip 101 corresponding to the boss structure 310 on the first surface A1. In this way, the boss structure 310 can completely cover the chip 101 , so that when the heat dissipation device 11 presses the heat dissipation cover 103 , the force acting on the boss structure 310 can be more effectively transmitted to the chip 101 .
此外,为了进一步减小散热盖103的上盖31中,第一衔接结构311的厚度D2,如图10所示,该上盖31还可以包括至少一个第一凹槽312。第一凹槽312开设于第一衔接结构311靠近芯片101的一侧表面上。第一凹槽312可以位于第一衔接结构311远离凸台结构310的一端。这样一来,通过在第一衔接结构311远离凸台结构310的一端设置上述第一凹槽312,可以进一步减小第一衔接结构311靠近侧壁32(或者上述footprint)的刚度,有利于将散热器件11向散热盖103施加的压力,集中作用于凸 台结构310上。In addition, in order to further reduce the thickness D2 of the first engaging structure 311 in the upper cover 31 of the heat dissipation cover 103 , as shown in FIG. 10 , the upper cover 31 may further include at least one first groove 312 . The first groove 312 is formed on a side surface of the first connecting structure 311 close to the chip 101 . The first groove 312 may be located at one end of the first engaging structure 311 away from the boss structure 310 . In this way, by arranging the first groove 312 at the end of the first engaging structure 311 away from the boss structure 310, the rigidity of the first engaging structure 311 close to the side wall 32 (or the above-mentioned footprint) can be further reduced, which is beneficial to the The pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 is concentrated on the boss structure 310 .
在本申请的一些实施例中,如图10所示,上述第一凹槽312的深度S1可以满足:20%×D2_max≤S1≤80%×D2_max。第一凹槽312的槽宽L1可以满足:0.1mm≤L1≤20mm。当第一凹槽312的深度S1小于20%×D2_max(例如,当第一衔接结构311的最大厚度D2_max为1mm时,S1小于0.2mm),宽度L1小于0.1mm时,对第一凹槽312的制作精度的要求较高,不利于降低制作成本。并且第一凹槽312的尺寸太小,对减小第一衔接结构311刚度的效果不明显。此外,当第一凹槽312的深度S1大于80%×D2_max(例如,当第一衔接结构311的最大厚度D2_max为2.7mm时,S1大于2.1mm),宽度L1大于20mm时,第一凹槽312的尺寸太大,从而导致第一衔接结构311太小,降低了散热盖103对封装基板102翘曲的控制能力。In some embodiments of the present application, as shown in FIG. 10 , the depth S1 of the first groove 312 may satisfy: 20%×D2_max≤S1≤80%×D2_max. The groove width L1 of the first groove 312 may satisfy: 0.1 mm≤L1≤20 mm. When the depth S1 of the first groove 312 is less than 20%×D2_max (for example, when the maximum thickness D2_max of the first engaging structure 311 is 1 mm, S1 is less than 0.2 mm) and the width L1 is less than 0.1 mm, the first groove 312 The requirements of the production accuracy are relatively high, which is not conducive to reducing the production cost. In addition, the size of the first groove 312 is too small, and the effect of reducing the rigidity of the first engaging structure 311 is not obvious. In addition, when the depth S1 of the first groove 312 is greater than 80%×D2_max (for example, when the maximum thickness D2_max of the first engaging structure 311 is 2.7 mm, S1 is greater than 2.1 mm), and when the width L1 is greater than 20 mm, the first groove The size of 312 is too large, so that the first connecting structure 311 is too small, which reduces the ability of the heat dissipation cover 103 to control the warpage of the package substrate 102 .
示例的,第一凹槽312的深度S1可以为0.5mm、0.8mm、1.0mm或者1.5mm。第一凹槽312的宽度L1可以为0.5mm、1mm、2mmm、4mm、8mm、15mm或者18mm。这样一来,可以在减小第一衔接结构311刚度的基础上,避免影响散热盖103对封装基板102翘曲的控制能力。For example, the depth S1 of the first groove 312 may be 0.5 mm, 0.8 mm, 1.0 mm or 1.5 mm. The width L1 of the first groove 312 may be 0.5 mm, 1 mm, 2 mm, 4 mm, 8 mm, 15 mm or 18 mm. In this way, on the basis of reducing the rigidity of the first connecting structure 311 , it is possible to avoid affecting the ability of the heat dissipation cover 103 to control the warpage of the package substrate 102 .
在此基础上,在本申请的一些实施例中,如图11a(散热盖103靠近芯片101的一侧表面)所示,上述第一凹槽312可以为绕至少一个芯片101(图11a中芯片所在位置采用虚线表示)一周的环形槽,从而使得位于凸台结构310周边的第一衔接结构的刚度均有所下降。On this basis, in some embodiments of the present application, as shown in FIG. 11a (the side surface of the heat dissipation cover 103 close to the chip 101 ), the above-mentioned first groove 312 may surround at least one chip 101 (the chip in FIG. 11a ). The position is indicated by a dotted line) around the annular groove, so that the rigidity of the first connecting structure located around the boss structure 310 is reduced to some extent.
或者,在本申请的另一些实施例中,以芯片101为矩形为例,上述上盖31可以包括四个如图11b(散热盖103靠近芯片101的一侧表面)所示的第一凹槽,分别为第一凹槽312a、第一凹槽312b、第一凹槽312c以及第一凹槽312d。其中,第一凹槽312a、第一凹槽312b分别位于芯片101相对的两边。第一凹槽312c、第一凹槽312d分别位于芯片101另外相对的两边。在此情况下,第一凹槽312a、第一凹槽312b、第一凹槽312c以及第一凹槽312d中的任意一个第一凹槽的底部可以穿透上述第一衔接结构311。Alternatively, in other embodiments of the present application, taking the chip 101 as a rectangle as an example, the upper cover 31 may include four first grooves as shown in FIG. are the first groove 312a, the first groove 312b, the first groove 312c and the first groove 312d, respectively. The first groove 312a and the first groove 312b are located on opposite sides of the chip 101, respectively. The first groove 312c and the first groove 312d are respectively located on two opposite sides of the chip 101 . In this case, the bottom of any one of the first groove 312 a , the first groove 312 b , the first groove 312 c , and the first groove 312 d can penetrate through the first engaging structure 311 .
上述均是以一个芯片封装结构10中设置有一个芯片101为例进行的说明,以下对一个芯片封装结构10中设置两个芯片为例对上述散热盖103的结构进行举例说明。The above description is based on an example where one chip 101 is provided in one chip package structure 10 , and the following describes the structure of the heat dissipation cover 103 by using an example where two chips are provided in one chip package structure 10 .
在本申请的一些实施例中,如图12a所示,芯片封装结构10中至少一个芯片可以包括第一芯片101a和第二芯片101b。在此情况下,为了使得每个芯片101a远离封装基板102一侧的表面均覆盖有内导热界面层,上述至少一个内导热界面层可以包括覆盖第一芯片101a的第一内导热界面层110a以及覆盖第二芯片101b的第二内导热界面层110b。In some embodiments of the present application, as shown in FIG. 12a, at least one chip in the chip package structure 10 may include a first chip 101a and a second chip 101b. In this case, in order to make the surface of each chip 101a on the side away from the packaging substrate 102 covered with an inner thermally conductive interface layer, the at least one inner thermally conductive interface layer may include a first inner thermally conductive interface layer 110a covering the first chip 101a and The second inner thermal interface layer 110b covers the second chip 101b.
为了使得散热盖103与第一芯片101a和第二芯片101b平稳粘接,上述第一内导热界面层110a远离封装基板102的表面与第二内导热界面层110b远离封装基板102的表面平齐。在此情况下,如图12a所示,当第一芯片101a和第二芯片101b为功能或者类型不同的芯片,其厚度会存在差异时,第一内导热界面层110a和第二内导热界面层110b的厚度可以不同,从而可以通过第一内导热界面层110a和第二内导热界面层110b的厚度差对第一芯片101a和第二芯片101b的厚度差进行补偿。In order to smoothly bond the heat dissipation cover 103 to the first chip 101a and the second chip 101b, the surface of the first inner thermal interface layer 110a away from the package substrate 102 is flush with the surface of the second inner thermal interface layer 110b away from the package substrate 102. In this case, as shown in FIG. 12a, when the first chip 101a and the second chip 101b are chips with different functions or types, and their thicknesses may be different, the first inner thermal interface layer 110a and the second inner thermal interface layer 110a The thicknesses of 110b may be different, so that the thickness difference between the first chip 101a and the second chip 101b can be compensated for by the difference in thickness between the first inner thermal interface layer 110a and the second inner thermal interface layer 110b.
在此基础上,为了在散热器件11向散热盖103施压时,使得散热器件11向散热盖103施加的压力,有效作用于上述第一芯片101a和第二芯片101b,如图12a所示, 该上盖31中的至少一个凸台结构可以包括第一凸台结构310a和第二凸台结构310b。其中,第一凸台结构310a与第一内导热界面层110a相接触,第二凸台结构310b与第二内导热界面层110b相接触。On this basis, when the heat dissipation device 11 presses the heat dissipation cover 103, the pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 effectively acts on the first chip 101a and the second chip 101b, as shown in FIG. 12a, At least one boss structure in the upper cover 31 may include a first boss structure 310a and a second boss structure 310b. The first boss structure 310a is in contact with the first inner thermal interface layer 110a, and the second boss structure 310b is in contact with the second inner thermal interface layer 110b.
上述第一凸台结构310a、第二凸台结构310b的设置方式同上所述,例如,如图12a所示,第一凸台结构310a、第二凸台结构310b远离封装基板102的表面(上表面)可以凸出于第一衔接结构311远离芯片101的表面。第一凸台结构310a、第二凸台结构310b靠近封装基板102的表面(下表面)可以为平面。在此情况下,如图12a所示,第一凸台结构310a与第一内导热界面层110a的接触面可以完全覆盖第一芯片101a。同理,第二凸台结构310b与第二内导热界面层110b的接触面可以完全覆盖第二芯片101b。The above-mentioned first and second boss structures 310a and 310b are arranged in the same manner as described above. For example, as shown in FIG. surface) may protrude from the surface of the first connecting structure 311 away from the chip 101 . Surfaces (lower surfaces) of the first boss structure 310a and the second boss structure 310b close to the package substrate 102 may be flat. In this case, as shown in FIG. 12a, the contact surface of the first boss structure 310a and the first inner thermally conductive interface layer 110a may completely cover the first chip 101a. Similarly, the contact surface of the second boss structure 310b and the second inner thermally conductive interface layer 110b may completely cover the second chip 101b.
或者,又例如,如图12b所示,第一凸台结构310a、第二凸台结构310b远离封装基板102的表面(上表面)可以凸出于第一衔接结构311远离芯片101的表面。此外,第一凸台结构310a、第二凸台结构310b靠近芯片101的表面(下表面),凸出于第一衔接结构311靠近芯片101的表面。在此情况下,如图12b所示,第一凸台结构310a与第一内导热界面层110a的接触面在封装基板102上的垂直投影,可以位于第一芯片101a在封装基板102上的垂直投影的范围内。同理,第二凸台结构310b与第二内导热界面层110b的接触面在封装基板102上的垂直投影,可以位于第二芯片101b在封装基板102上的垂直投影的范围内。Or, for another example, as shown in FIG. 12 b , the surfaces (upper surfaces) of the first and second boss structures 310 a and 310 b away from the package substrate 102 may protrude from the surface of the first connecting structure 311 away from the chip 101 . In addition, the first boss structure 310 a and the second boss structure 310 b are close to the surface (lower surface) of the chip 101 and protrude from the surface of the first connecting structure 311 close to the chip 101 . In this case, as shown in FIG. 12 b , the vertical projection of the contact surface of the first boss structure 310 a and the first inner thermal interface layer 110 a on the packaging substrate 102 may be located at the vertical projection of the first chip 101 a on the packaging substrate 102 within the projection range. Similarly, the vertical projection of the contact surface of the second boss structure 310b and the second inner thermal interface layer 110b on the packaging substrate 102 may be within the range of the vertical projection of the second chip 101b on the packaging substrate 102 .
在此基础上,上述上盖31还可以包括如图12a或图12b所示的第二衔接结构313。该第二衔接结构313位于第一凸台结构310a和第二凸台结构310b之间,且与第一凸台结构310a和第二凸台结构310b相连接。On this basis, the above-mentioned upper cover 31 may further include a second engaging structure 313 as shown in FIG. 12a or FIG. 12b. The second engaging structure 313 is located between the first boss structure 310a and the second boss structure 310b, and is connected with the first boss structure 310a and the second boss structure 310b.
基于此,为了在散热器件11向散热盖103施压时,使得散热器件11向散热盖103施加的压力,有效作用于上述第一凸台结构310a和第二凸台结构310b,该上盖31还包括至少一个第二凹槽314,该第二凹槽314开设于第二衔接结构313靠近封装基板102的一侧表面上。第二凹槽314的尺寸设置方式可以与第一凹槽312的设置方式相同,此处不再赘述。Based on this, when the heat dissipation device 11 presses the heat dissipation cover 103 , the pressure exerted by the heat dissipation device 11 on the heat dissipation cover 103 effectively acts on the first boss structure 310 a and the second boss structure 310 b , the upper cover 31 At least one second groove 314 is also included, and the second groove 314 is formed on one side surface of the second connecting structure 313 close to the package substrate 102 . The setting method of the size of the second groove 314 can be the same as that of the first groove 312 , which is not repeated here.
此外,在上述封装基板102为重布线层的情况下,封装基板102在温度变化的过程中容易发生形变。此时,当散热盖103的上盖31上设置上述第一凹槽312以及第二凹槽314时,上盖31刚度有所减弱,从而能够在封装基板102变形时,使得封装基板102的运动与散热盖103的运动之间存在一定的解耦效果,减小芯片跟随封装基板102运动时受到束缚。从而能够减小相邻两个芯片,例如上述第一芯片101a和第二芯片101b之间的如图12c所示的模塑(molding)材料400发生开裂(crack)。本申请实施例中,部分附图中的模塑材料400未示出。In addition, in the case where the package substrate 102 is the redistribution layer, the package substrate 102 is easily deformed during a temperature change. At this time, when the first groove 312 and the second groove 314 are provided on the upper cover 31 of the heat dissipation cover 103, the rigidity of the upper cover 31 is weakened, so that the package substrate 102 can be moved when the package substrate 102 is deformed. There is a certain decoupling effect with the movement of the heat dissipation cover 103 , which reduces the restraint of the chip when it follows the movement of the package substrate 102 . Therefore, cracks in the molding material 400 shown in FIG. 12c between two adjacent chips, for example, the first chip 101a and the second chip 101b described above, can be reduced. In the embodiments of the present application, the molding material 400 in some drawings is not shown.
此外,在本申请的另一些实施例中,当芯片封装结构10包括上述第一芯片101a和第二芯片101b时,如图13所示,该第一芯片101a和第二芯片101b可以分别通过第一内导热界面层110a和第二内导热界面层110b与同一个凸台结构310相连接。该凸台结构310与第一内导热界面层110a和第二内导热界面层110b均接触。该凸台结构310的设置方式同上所述,此处不再赘述。当散热装置11对散热盖103进行施压时,上述压力可以通过同一个凸台结构310传递至第一芯片101a和第二芯片101b,从而 可以简化散热盖103的结构。In addition, in other embodiments of the present application, when the chip package structure 10 includes the first chip 101a and the second chip 101b, as shown in FIG. 13 , the first chip 101a and the second chip 101b can pass through the An inner thermally conductive interface layer 110a and a second inner thermally conductive interface layer 110b are connected to the same boss structure 310 . The boss structure 310 is in contact with both the first inner thermally conductive interface layer 110a and the second inner thermally conductive interface layer 110b. The arrangement of the boss structure 310 is the same as described above, and will not be repeated here. When the heat dissipation device 11 presses the heat dissipation cover 103, the pressure can be transmitted to the first chip 101a and the second chip 101b through the same boss structure 310, so that the structure of the heat dissipation cover 103 can be simplified.
以上所述,仅为本申请的具体实施方式,但本申请的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本申请揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本申请的保护范围之内。因此,本申请的保护范围应以所述权利要求的保护范围为准。The above are only specific embodiments of the present application, but the protection scope of the present application is not limited to this. should be covered within the scope of protection of this application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims (19)

  1. 一种芯片封装结构,其特征在于,包括:A chip packaging structure, characterized in that it includes:
    封装基板,具有第一表面;a package substrate having a first surface;
    至少一个芯片,设置于所述封装基板的第一表面上;at least one chip, disposed on the first surface of the package substrate;
    至少一个内导热界面层;所述至少一个内导热界面层分别覆盖所述至少一个芯片远离所述封装基板一侧的表面;at least one inner thermal interface layer; the at least one inner thermal interface layer respectively covers the surface of the at least one chip on the side away from the package substrate;
    散热盖,包括上盖和多个侧壁;所述多个侧壁依次首尾相接绕所述上盖的一周设置,且与所述第一表面相连接;所述散热盖与所述封装基板之间形成用于容纳所述至少一个芯片的容纳腔;a heat dissipation cover, including an upper cover and a plurality of side walls; the plurality of side walls are arranged end to end in sequence around the circumference of the upper cover, and are connected with the first surface; the heat dissipation cover is connected to the packaging substrate A accommodating cavity for accommodating the at least one chip is formed therebetween;
    其中,所述上盖包括至少一个凸台结构和第一衔接结构;所述至少一个凸台结构中的每个凸台结构与至少一个所述内导热界面层相接触,且所述至少一个凸台结构中的每个凸台结构通过所述第一衔接结构与所述侧壁相连接;所述凸台结构的最大厚度D1_max大于所述第一衔接结构的最大厚度D2_max,且所述凸台结构远离所述芯片的表面,凸出于所述第一衔接结构远离所述芯片的表面;所述厚度的方向与所述第一表面的方向垂直。Wherein, the upper cover includes at least one boss structure and a first connecting structure; each boss structure in the at least one boss structure is in contact with at least one of the inner thermally conductive interface layers, and the at least one boss structure Each boss structure in the platform structure is connected with the side wall through the first connecting structure; the maximum thickness D1_max of the boss structure is greater than the maximum thickness D2_max of the first connecting structure, and the boss structure is The structure is away from the surface of the chip, and protrudes from the surface of the first connecting structure away from the chip; the direction of the thickness is perpendicular to the direction of the first surface.
  2. 根据权利要求1所述的芯片封装结构,其特征在于,所述凸台结构靠近所述芯片的表面,凸出于所述第一衔接结构靠近所述芯片的表面。The chip package structure according to claim 1, wherein the boss structure is close to the surface of the chip, and protrudes from the surface of the first connecting structure close to the chip.
  3. 根据权利要求1所述的芯片封装结构,其特征在于,所述凸台结构靠近所述芯片的表面与所述第一衔接结构靠近所述芯片的表面平齐。The chip package structure according to claim 1, wherein a surface of the boss structure close to the chip is flush with a surface of the first connecting structure close to the chip.
  4. 根据权利要求1-3任一项所述的芯片封装结构,其特征在于,沿所述凸台结构到所述侧壁的方向,所述第一衔接结构的厚度D2逐渐减小。The chip package structure according to any one of claims 1-3, characterized in that, along the direction from the boss structure to the sidewall, the thickness D2 of the first connecting structure gradually decreases.
  5. 根据权利要求4所述的芯片封装结构,其特征在于,所述第一衔接结构靠近所述芯片的表面,或者远离所述芯片的表面为平面。The chip packaging structure according to claim 4, wherein the first connecting structure is close to the surface of the chip, or the surface far from the chip is flat.
  6. 根据权利要求4所述的芯片封装结构,其特征在于,The chip packaging structure according to claim 4, wherein,
    所述侧壁远离所述封装基板的一侧表面为上基准面,所述内导热界面层远离所述封装基板的一侧表面为下基准面;A surface of the side wall away from the packaging substrate is an upper reference surface, and a surface of the inner thermal interface layer away from the packaging substrate is a lower reference surface;
    所述上基准面和所述下基准面之间具有基准厚度D0;所述第一衔接结构的最小厚度D2_min小于所述基准厚度D0。There is a reference thickness D0 between the upper reference plane and the lower reference plane; the minimum thickness D2_min of the first connecting structure is smaller than the reference thickness D0.
  7. 根据权利要求6所述的芯片封装结构,其特征在于,20%×D0≤D2_min≤80%×D0。The chip package structure according to claim 6, wherein 20%×D0≤D2_min≤80%×D0.
  8. 根据权利要求6或7所述的芯片封装结构,其特征在于,The chip packaging structure according to claim 6 or 7, wherein,
    所述凸台结构远离所述芯片的表面与所述上基准面之间具有最大距离L_max;L_max<D0。There is a maximum distance L_max between the surface of the boss structure away from the chip and the upper reference plane; L_max<D0.
  9. 根据权利要求8所述的芯片封装结构,其特征在于,0.01mm≤L_max≤0.2mm。The chip package structure according to claim 8, wherein 0.01mm≤L_max≤0.2mm.
  10. 根据权利要求4所述的芯片封装结构,其特征在于,The chip packaging structure according to claim 4, wherein,
    所述凸台结构远离所述芯片的表面为第一弧面;The surface of the boss structure away from the chip is a first arc surface;
    所述第一衔接结构远离所述芯片的表面中,靠近所述第一弧面的部分为第二弧面,所述第二弧面与所述第一弧面的曲率相同,且所述第二弧面与所述第一弧面相连接;与所述凸台结构对应的芯片在所述第一表面的垂直投影位于,所述第一弧面和所述第 二弧面在所述第一表面的垂直投影的范围内;In the surface of the first connecting structure away from the chip, the part close to the first arc surface is a second arc surface, the curvature of the second arc surface and the first arc surface is the same, and the first arc surface is the same as the first arc surface. Two arc surfaces are connected to the first arc surface; the vertical projection of the chip corresponding to the boss structure on the first surface is located, and the first arc surface and the second arc surface are located on the first arc surface. within the vertical projection of the surface;
    所述第二弧面远离第一弧面的一边在所述第一表面的垂直投影具有第一轮廓;与所述凸台结构对应的芯片在所述第一表面的垂直投影具有第二轮廓;The vertical projection of the side of the second arc surface away from the first arc surface on the first surface has a first contour; the vertical projection of the chip corresponding to the boss structure on the first surface has a second contour;
    所述第一轮廓与所述第二轮廓之间的最大间距Hmax满足:Hmax≤2mm。The maximum distance Hmax between the first contour and the second contour satisfies: Hmax≤2mm.
  11. 根据权利要求1-9任一项所述的芯片封装结构,其特征在于,The chip packaging structure according to any one of claims 1-9, wherein,
    所述凸台结构远离所述芯片的表面中至少一部分为第三弧面;At least a part of the surface of the boss structure away from the chip is a third arc surface;
    所述第三弧面在所述第一表面的垂直投影位于,与所述凸台结构对应的芯片在所述第一表面的垂直投影的范围内;The vertical projection of the third arc surface on the first surface is located, and the chip corresponding to the boss structure is within the range of the vertical projection of the first surface;
    所述第三弧面在所述第一表面的垂直投影具有第三轮廓;与所述凸台结构对应的芯片在所述第一表面的垂直投影具有第二轮廓;The vertical projection of the third arc surface on the first surface has a third contour; the vertical projection of the chip corresponding to the boss structure on the first surface has a second contour;
    所述第三轮廓与所述第二轮廓之间的最大间距Hmax满足:Hmax≤2mm。The maximum distance Hmax between the third contour and the second contour satisfies: Hmax≤2mm.
  12. 根据权利要求1-9任一项所述的芯片封装结构,其特征在于,The chip packaging structure according to any one of claims 1-9, wherein,
    所述凸台结构远离所述芯片的表面为第一弧面;The surface of the boss structure away from the chip is a first arc surface;
    所述第一弧面在所述第一表面的垂直投影,与所述凸台结构对应的芯片在所述第一表面的垂直投影完全重叠。The vertical projection of the first arc surface on the first surface completely overlaps with the vertical projection of the chip corresponding to the boss structure on the first surface.
  13. 根据权利要求1-12任一项所述的芯片封装结构,其特征在于,The chip package structure according to any one of claims 1-12, wherein,
    所述上盖还包括至少一个第一凹槽,所述第一凹槽开设于所述第一衔接结构靠近所述芯片的一侧表面上;所述第一凹槽位于所述第一衔接结构远离所述凸台结构的一端。The upper cover also includes at least one first groove, the first groove is opened on a side surface of the first connecting structure close to the chip; the first groove is located on the first connecting structure one end away from the boss structure.
  14. 根据权利要求13所述的芯片封装结构,其特征在于,所述第一凹槽为围绕所述至少一个芯片一周的环形槽。The chip package structure according to claim 13, wherein the first groove is an annular groove surrounding the at least one chip.
  15. 根据权利要求13或14所述的芯片封装结构,其特征在于,所述第一凹槽的深度S1满足:20%×D2_max≤S1≤80%×D2_max;所述第一凹槽的槽宽L1满足:0.1mm≤L1≤20mm。The chip package structure according to claim 13 or 14, wherein the depth S1 of the first groove satisfies: 20%×D2_max≤S1≤80%×D2_max; the groove width L1 of the first groove Satisfaction: 0.1mm≤L1≤20mm.
  16. 根据权利要求1-15任一项所述的芯片封装结构,其特征在于,The chip package structure according to any one of claims 1-15, wherein,
    所述至少一个芯片包括第一芯片、第二芯片;所述至少一个内导热界面层包括覆盖所述第一芯片的第一内导热界面层以及覆盖所述第二芯片的第二内导热界面层;所述第一内导热界面层远离所述封装基板的表面与所述第二内导热界面层远离所述封装基板的表面平齐;The at least one chip includes a first chip and a second chip; the at least one inner thermal interface layer includes a first inner thermal interface layer covering the first chip and a second inner thermal interface layer covering the second chip ; the surface of the first inner thermally conductive interface layer away from the packaging substrate is flush with the surface of the second inner thermally conductive interface layer away from the packaging substrate;
    所述至少一个凸台结构包括第一凸台结构和第二凸台结构,所述第一凸台结构与所述第一内导热界面层相接触,所述第二凸台结构与所述第二内导热界面层相接触;The at least one boss structure includes a first boss structure and a second boss structure, the first boss structure is in contact with the first inner thermally conductive interface layer, and the second boss structure is in contact with the first boss structure. The two inner thermal interface layers are in contact;
    所述上盖还包括第二衔接结构,所述第二衔接结构位于所述第一凸台结构和所述第二凸台结构之间,且与所述第一凸台结构和所述第二凸台结构相连接。The upper cover further includes a second engagement structure, the second engagement structure is located between the first boss structure and the second boss structure, and is connected with the first boss structure and the second boss structure. The boss structure is connected.
  17. 根据权利要求16所述的芯片封装结构,其特征在于,The chip package structure according to claim 16, wherein,
    所述上盖还包括至少一个第二凹槽,所述第二凹槽开设于所述第二衔接结构靠近所述封装基板的一侧表面上。The upper cover further includes at least one second groove, and the second groove is opened on a side surface of the second connecting structure close to the package substrate.
  18. 根据权利要求1-15任一项所述的芯片封装结构,其特征在于,The chip package structure according to any one of claims 1-15, wherein,
    所述至少一个芯片包括第一芯片、第二芯片;所述至少一个内导热界面层包括覆盖所述第一芯片的第一内导热界面层以及覆盖所述第二芯片的第二内导热界面层;所 述第一内导热界面层远离所述封装基板的表面与所述第二内导热界面层远离所述封装基板的表面平齐;The at least one chip includes a first chip and a second chip; the at least one inner thermal interface layer includes a first inner thermal interface layer covering the first chip and a second inner thermal interface layer covering the second chip ; the surface of the first inner thermally conductive interface layer away from the packaging substrate is flush with the surface of the second inner thermally conductive interface layer away from the packaging substrate;
    一个所述凸台结构与所述第一内导热界面层以及所述第二内导热界面层相接触。One of the boss structures is in contact with the first inner thermally conductive interface layer and the second inner thermally conductive interface layer.
  19. 一种电子设备,其特征在于,包括散热装置、外导热界面层、电路板,以及设置于所述电路板上的如权利要求1-18任一项所述的芯片封装结构;An electronic device, characterized in that it comprises a heat sink, an external thermally conductive interface layer, a circuit board, and the chip packaging structure according to any one of claims 1-18 disposed on the circuit board;
    所述外导热界面层位于所述散热装置和所述芯片封装结构中的散热盖之间,且与所述散热装置和所述散热盖相连接;所述散热装置还与所述电路板相连接。The outer thermal interface layer is located between the heat dissipation device and the heat dissipation cover in the chip packaging structure, and is connected with the heat dissipation device and the heat dissipation cover; the heat dissipation device is also connected with the circuit board .
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CN117528913A (en) * 2024-01-04 2024-02-06 荣耀终端有限公司 Circuit board assembly and electronic equipment
CN117528913B (en) * 2024-01-04 2024-05-24 荣耀终端有限公司 Circuit board assembly and electronic equipment

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