WO2022007039A1 - 一种陀螺仪 - Google Patents

一种陀螺仪 Download PDF

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Publication number
WO2022007039A1
WO2022007039A1 PCT/CN2020/105079 CN2020105079W WO2022007039A1 WO 2022007039 A1 WO2022007039 A1 WO 2022007039A1 CN 2020105079 W CN2020105079 W CN 2020105079W WO 2022007039 A1 WO2022007039 A1 WO 2022007039A1
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Prior art keywords
ring structure
gyroscope
electrode
inner layer
coupling
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PCT/CN2020/105079
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English (en)
French (fr)
Inventor
马昭
占瞻
杨珊
李杨
谭秋喻
洪燕
黎家健
张睿
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瑞声声学科技(深圳)有限公司
瑞声科技（南京）有限公司
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Publication of WO2022007039A1 publication Critical patent/WO2022007039A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis

Definitions

  • the invention relates to the technical field of gyroscopes, in particular to a ring-shaped double 2 ⁇ mode gyroscope.
  • the externally fixed annular 2 ⁇ modal gyroscope is a kind of miniature angular velocity sensor produced by the application of micromachining technology and microelectronic technology. It is generally composed of an anchor point structure and a vibrating body. The body vibrates according to the driving mode, that is, along the 0°/90° direction (hence the name 2 ⁇ ), when the angular acceleration is applied, due to the Coriolis effect, the gyroscope will switch to the detection mode, so that the vibrating body follows the detection mode. Vibration, that is, vibration along the 45°/135° direction. At this time, the magnitude of the angular acceleration can be obtained by detecting the vibration displacement along the 45°/135° direction.
  • the purpose of the present invention is to provide a gyroscope with better anti-vibration performance.
  • the gyroscope includes:
  • the inner layer electrode is disposed opposite to the inner layer annular structure and forms at least one driving electrode pair and at least one detection electrode pair with the inner layer annular structure;
  • the outer layer electrode is disposed opposite the outer ring structure and forms at least one driving electrode pair and at least one detection electrode pair with the outer ring structure;
  • the coupling beam structure is arranged between the outer anchor point structure and the outer ring structure and between the outer ring structure and the inner ring structure, the coupling The beam structure is used to support the vibration of the outer ring structure and the inner ring structure.
  • the coupling beam structure includes a first coupling beam connected between the outer anchor point structure and the outer ring structure and a first coupling beam connected to the outer ring structure and the second coupling beam between the inner ring structure, the number of the first coupling beam is 4*N, and the number of the second coupling beam is 4*M, where N and M are positive Integer.
  • the first coupling beam and the second coupling beam are staggered in the circumferential direction of the gyroscope, and each of the first coupling beams is located in two adjacent the middle position of the second coupling beams, each of the second coupling beams is located at the middle position of two adjacent first coupling beams.
  • the outer layer electrodes are arranged inside or outside the outer ring structure, and the inner layer electrodes are arranged inside or outside the inner ring structure.
  • the outer layer electrodes are evenly distributed inside or outside the outer ring structure, and the inner layer electrodes are evenly distributed inside or outside the inner ring structure .
  • the driving electrode pair is arranged at a first angle in the circumferential direction of the gyroscope, and the detection electrode pair is arranged at a second angle in the circumferential direction of the gyroscope;
  • the displacement of the inner ring structure and the outer ring structure at the first angle is the largest;
  • the detection mode of the gyroscope the inner ring The displacement of the layer ring structure and the outer layer ring structure is greatest at the second angle.
  • the inner layer electrode also forms at least one frequency matching electrode and at least one error suppression electrode relative to the inner layer ring structure and the inner layer ring structure, and the frequency matching
  • the electrode is used for matching the driving modal frequency and the detection modal frequency of the gyroscope
  • the error suppression electrode is used for suppressing the quadrature error of the gyroscope.
  • both the inner ring structure and the outer ring structure of the gyroscope work in the 2 ⁇ mode.
  • the vibration phase difference between the inner ring structure and the outer ring structure is 180°.
  • the beneficial effect of the present invention is that: the embodiment of the present invention is provided with an outer layer ring structure and an inner layer ring structure, and the outer layer ring structure and the inner layer ring structure are supported by the coupling beam structure to work in the 2 ⁇ mode respectively, forming a Dual 2 ⁇ modal gyroscopes.
  • the gyroscope of the present invention as a whole has higher stiffness, higher modal frequency, better anti-vibration performance, and higher detection accuracy.
  • FIG. 1 is a schematic structural diagram of an annular dual 2 ⁇ modal gyroscope based on an externally fixed coupling beam structure provided by an embodiment of the present invention.
  • the embodiments of the present invention provide a ring-type dual 2 ⁇ modal gyroscope based on an externally fixed coupled beam structure (hereinafter referred to as a "ring-type dual 2 ⁇ modal gyroscope", and also directly referred to as a “gyroscope” in some cases) ), the ring-shaped dual 2 ⁇ modal gyro is used to detect angular acceleration, and has the advantages of high sensitivity and high anti-vibration performance.
  • the toroidal dual 2 ⁇ modal gyro includes an outer anchor point structure 100 , an outer layer annular structure 200 , an inner layer annular structure 300 , an outer layer electrode 410 , and an inner layer electrode 420 and the coupled beam structure 500.
  • the outer anchor point structure 100 , the outer layer electrode 410 and the inner layer electrode 420 are fixed structures.
  • the outer layer ring structure 200 and the inner layer ring structure 300 vibrate under the support of the coupling beam structure 500 .
  • the outer ring structure 200 and the inner ring structure 300 are arranged concentrically in a free state (a state in which the gyroscope is not activated), and the inner diameter of the outer ring structure 200 is larger than that of the inner ring structure 300 .
  • outer ring structure 200 and the inner ring structure 300 need to vibrate in a certain direction under the action of an external driving force, so the outer ring structure 200 and the inner ring structure 300 should be vibration-resistant. And it is made of materials with elastic recovery properties, and reference can be made to the related prior art here.
  • the outer layer electrodes 410 and the outer layer ring structure 200 are disposed opposite to each other to form several electrode pairs, these electrode pairs at least include a driving electrode pair and a detection electrode pair, wherein the driving electrode pair is used to generate the above-mentioned external driving force, so that the outer layer circular ring
  • the ring structure 200 can vibrate, and the detection electrode pair is used to detect the angular velocity of the gyroscope.
  • the inner layer electrode 420 and the inner layer circular ring structure 300 are also formed with a plurality of electrode pairs opposite to each other, and at least include a driving electrode pair and a detection electrode pair.
  • the driving electrode pair drives the ring-shaped dual 2 ⁇ modal gyroscope to vibrate in the driving mode.
  • both the outer ring structure 200 and the inner ring structure 300 can vibrate in the 0°/90° direction.
  • the vibrating outer ring structure 200 and the inner ring structure 300 are subjected to the resultant Coriolis force along the 45°/135° direction, so that the ring type dual 2 ⁇
  • the modal gyroscope vibrates in the detection mode.
  • both the outer ring structure 200 and the inner ring structure 300 can vibrate in the direction of 45°/135°, and the detection electrode pair can be used to detect the angular velocity ⁇ .
  • the driving electrode pair is arranged at a first angle in the circumferential direction of the gyroscope, and the detection electrode pair is arranged at a second angle in the circumferential direction of the gyroscope; in the driving mode of the gyroscope, the inner ring structure The displacement of the outer ring structure and the inner ring structure is the largest at the first angle; in the detection mode of the gyroscope, the displacement of the inner ring structure and the outer ring structure is the largest at the second angle.
  • the coupling beam structure 500 is disposed between the outer anchor point structure 100 and the outer ring structure 200 and between the outer ring structure 200 and the inner ring structure 300 , and the coupling beam structure 500 is used to support the outer ring structure 200 and inner ring structure 300 to drive modal or detect modal vibration.
  • the outer ring structure 200 and the inner ring structure 300 both vibrate in the 0°/90° direction, but the vibration directions of the two are opposite, that is, the phase difference is 180°, and the same
  • the outer ring structure 200 and the inner ring structure 300 both vibrate in the direction of 45°/135°, but the vibration directions of the two are opposite, that is, the phase difference is 180°.
  • the embodiment of the present invention is provided with an outer layer ring structure 200 and an inner layer ring structure 300, and the outer layer ring structure 200 and the inner layer ring structure 300 are supported by the coupling beam structure 500 to work in the 2 ⁇ mode respectively, forming a dual 2 ⁇ modal gyroscope.
  • the gyroscope as a whole has greater stiffness, higher modal frequency, better anti-vibration performance, and higher detection accuracy.
  • the ring-shaped dual 2 ⁇ modal gyro in the embodiment of the present invention still has a highly symmetrical geometric structure, and the driving mode and the detection mode are exactly the same, so there is no frequency difference between the driving mode and the detection mode, that is, the structure Natural mode matching for ultra-high sensitivity.
  • the coupling beam structure 500 includes a first coupling beam 510 connected between the outer anchor point structure 100 and the outer ring structure 200 and a first coupling beam 510 connected between the outer ring structure 200 and the inner ring structure 300 The second coupling beam 520 in between.
  • the coupling beam structure 500 includes eight groups of first coupling beams 510 , and the eight groups of first coupling beams 510 are evenly connected between the outer anchor point structure 100 and the outer ring structure 200 .
  • the specific number of the first coupling beams 510 may also be an integer multiple of the other four, such as sixteen, thirty-two, and so on.
  • the coupling beam structure 500 includes eight groups of second coupling beams 520 , and the eight groups of second coupling beams 520 are evenly connected between the outer ring structure 200 and the inner ring structure 300 .
  • the specific number of the second coupling beams 520 may also be an integral multiple of the other four, such as sixteen, thirty-two, and so on.
  • first coupling beams 510 and the second coupling beams 520 are arranged in a staggered manner, which is beneficial to improve the uniformity of the force.
  • each of the first coupling beams 510 is located in the middle of two adjacent second coupling beams 520
  • each second coupling beam 520 is located at two adjacent first coupling beams 510 the middle position.
  • the first coupling beams 510 and the second coupling beams 520 are evenly spaced apart, so that the absolute symmetrical structure of the annular double 2 ⁇ modal gyroscope can be realized, and at the same time, it is beneficial to drive the outer annular structure. 200 and the inner ring structure 300 for precise mode switching.
  • the outer layer electrode 410, the inner layer electrode 420, the outer layer electrode 410, the inner layer electrode 420, the outer layer electrode 410 and the outer layer ring structure 200, and the inner layer electrode 420 and the inner layer ring structure 300 may also be formed opposite to each other.
  • At least one frequency matching electrode and at least one error suppressing electrode the frequency matching electrode is used for matching the frequency between the driving mode and the detection mode, and the error suppressing electrode is used for suppressing the quadrature error of the gyroscope.
  • the outer layer electrodes 410 are disposed inside or outside the outer layer annular structure 200
  • the inner layer electrodes 420 are disposed inside or outside the inner layer annular structure 300 .
  • the outer layer electrodes 410 are arranged outside the outer layer annular structure 200, and the inner layer electrodes 420 are arranged inside the inner layer annular structure 300, so that the outer layer electrodes 410 and the inner layer annular structure 300 are arranged.
  • the inner layer electrodes 420 are separated as much as possible to avoid mutual interference between the two.
  • the outer layer electrodes 410 are evenly distributed inside or outside the outer layer annular structure 200 to form a plurality of electrode pairs with the outer layer annular structure 200
  • the inner layer electrodes 420 are evenly distributed
  • the inner or outer side of the inner ring structure 300 forms a plurality of electrode pairs with the inner ring structure 300 .
  • the outer layer electrodes 410 and the inner layer electrodes 420 can be evenly filled with multiple driving electrode pairs to ensure stable capacitance, thereby forming a stable external driving force, and multiple detection electrodes can be formed to improve detection accuracy.
  • the driving electrode pair can be arranged at any number of 0°, 90°, 180°, and 270°
  • the detection electrode pair can be arranged at any number of 45°, 135°, 225°, and 315°.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

一种陀螺仪，包括外部锚点结构（100）、外层圆环结构（200）、内层圆环结构（300）、内层电极（410）、外层电极（420）以及耦合梁结构（500），耦合梁结构（500）设置在外部锚点结构（100）与外层圆环结构（200）之间以及外层圆环结构（200）与内层圆环结构（300）之间，耦合梁结构（500）用于支撑外层圆环结构（200）和内层圆环结构（300）振动。陀螺仪整体上具有更大的刚度，更高的模态频率，更佳的抗振性能，以及更高的检测精度。

Description

一种陀螺仪 技术领域
本发明涉及陀螺仪技术领域，尤其涉及一种圆环型双2θ模态陀螺仪。
 背景技术
外部固定的圆环型2θ模态陀螺由于其超高的灵敏度和较强的抗振动性能而被应用在诸多场合。外部固定的圆环型2θ模态陀螺是一种应用微机械加工技术和微电子工艺制作的一种微型角速度传感器，其一般由锚点结构和振动体组成，当其在受到外力驱动时，振动体按照驱动模态振动，即沿0°/90°方向（2θ因此得名）振动，当施加角加速度后，由于哥氏效应，陀螺仪将切换到检测模态，使振动体按照检测模态振动，即沿45°/135°方向振动，此时通过检测沿45°/135°方向的振动位移即可获取角加速度的大小。
 技术问题
电子设备及其应用的快速发展，对陀螺仪的刚度、灵敏度及抗振动特性提出了更高的要求，因此有必要提出具有更优性能的陀螺仪。
 技术解决方案
本发明的目的在于提供一种抗振性能更佳的陀螺仪。
为此，根据本发明的实施例，该陀螺仪包括：
外部锚点结构；
外层圆环结构；
内层圆环结构；
内层电极，所述内层电极相对所述内层圆环结构设置并与所述内层圆环结构形成至少一个驱动电极对和至少一个检测电极对；
外层电极，所述外层电极相对所述外层圆环结构设置并与所述外侧圆环结构形成至少一个驱动电极对和至少一个检测电极对；
以及耦合梁结构，所述耦合梁结构设置在所述外部锚点结构与所述外层圆环结构之间以及所述外层圆环结构与所述内层圆环结构之间，所述耦合梁结构用于支撑所述外层圆环结构和所述内层圆环结构振动。
作为所述陀螺仪的进一步可选方案，所述耦合梁结构包括连接在所述外部锚点结构和所述外层圆环结构之间的第一耦合梁以及连接在所述外层圆环结构和所述内层圆环结构之间的第二耦合梁，所述第一耦合梁的数量为4*N个, 所述第二耦合梁的数量为4*M个，其中N、M为正整数。
作为所述陀螺仪的进一步可选方案，所述第一耦合梁和所述第二耦合梁在所述陀螺仪的周向交错布置，每一所述第一耦合梁位于两个相邻的所述第二耦合梁的中间位置，每一所述第二耦合梁位于两个相邻的所述第一耦合梁的中间位置。
作为所述陀螺仪的进一步可选方案，所述外层电极设置在所述外层圆环结构的内侧或外侧，所述内层电极设置在所述内层圆环结构的内侧或外侧。
作为所述陀螺仪的进一步可选方案，所述外层电极均匀布满所述外层圆环结构的内侧或外侧，所述内层电极均匀布满所述内层圆环结构的内侧或外侧。
作为所述陀螺仪的进一步可选方案，所述驱动电极对设置于所述陀螺仪周向的第一角度处，所述检测电极对设置于所述陀螺仪周向的第二角度处；在所述陀螺仪的驱动模态下，所述内层圆环结构和所述外层圆环结构在所述第一角度处的位移最大；在所述陀螺仪的检测模态下，所述内层圆环结构和所述外层圆环结构在所述第二角度处的位移最大。
作为所述陀螺仪的进一步可选方案，所述第一角度和所述第二角度相差（2L-1）*45°，其中L=1,3,5或7。
作为所述陀螺仪的进一步可选方案，所述内层电极相对所述内层圆环结构与所述内层圆环结构还形成至少一个频率匹配电极和至少一个误差抑制电极，所述频率匹配电极用于匹配所述陀螺仪的驱动模态频率和检测模态频率，所述误差抑制电极用于抑制所述陀螺仪的正交误差。
作为所述陀螺仪的进一步可选方案，所述陀螺仪的内层圆环结构和所述外层圆环结构均工作于2θ模态。
作为所述陀螺仪的进一步可选方案，所述内层圆环结构和所述外层圆环结构的振动相位相差180°。
 有益效果
本发明的有益效果在于：本发明实施例设置有外层圆环结构和内层圆环结构，并且通过耦合梁结构支撑外层圆环结构和内层圆环结构分别工作于2θ模态，形成了双2θ模态陀螺仪。本发明陀螺仪整体上具有更大的刚度，更高的模态频率，更佳的抗振性能，以及更高的检测精度。
 附图说明
图1为本发明实施例所提供的一种基于外部固定的耦合梁结构的圆环型双2θ模态陀螺的结构原理图。
 本发明的实施方式
下面结合附图和实施方式对本发明作进一步说明。
本发明实施例提供了一种基于外部固定的耦合梁结构的圆环型双2θ模态陀螺（下文简称“圆环型双2θ模态陀螺”，某些情况下也直接简称为“陀螺仪”），该圆环型双2θ模态陀螺用于对角加速度进行检测，具有高灵敏度和高抗振性能的优点。
请参考图1，在本发明实施例中，该圆环型双2θ模态陀螺包括外部锚点结构100、外层圆环结构200、内层圆环结构300、外层电极410、内层电极420以及耦合梁结构500。
其中，外部锚点结构100、外层电极410和内层电极420为固定结构外层圆环结构200、内层圆环结构300在耦合梁结构500的支撑下振动。
外层圆环结构200和内层圆环结构300在自由状态下（陀螺仪未被启动的状态）同心设置，且外层圆环结构200的内径大于内侧圆环结构300的内径。
可以理解的是，外层圆环结构200和内层圆环结构300需要在外部驱动力的作用下沿某个方向振动，因此外层圆环结构200和内层圆环结构300宜采用耐振动且具有弹性恢复性能的材料制成，此处可参照相关现有技术。
外层电极410和外层圆环结构200相对设置以形成若干电极对，这些电极对至少包括一个驱动电极对和一个检测电极对，其中驱动电极对用于产生上述外部驱动力，使得外层圆环结构200能够振动，检测电极对用于检测陀螺仪的角速度。同理，内层电极420和内层圆环结构300也相对形成有若干电极对，且至少包括一个驱动电极对和一个检测电极对。
具体而言，驱动电极对驱动圆环型双2θ模态陀螺以驱动模态进行振动，此时外层圆环结构200和内层圆环结构300均可以沿0°/90°方向振动。当圆环型双2θ模态陀螺受到外界角速度ω时，振动的外层圆环结构200和内层圆环结构300受到沿45°/135°方向的哥氏力合力，使得圆环型双2θ模态陀螺以检测模态进行振动，此时外层圆环结构200和内层圆环结构300均可以沿45°/135°方向振动，检测电极对可用于检测角速度ω。
本发明实施例中，驱动电极对设置于陀螺仪周向的第一角度处，检测电极对设置于陀螺仪周向的第二角度处；在陀螺仪的驱动模态下，内层圆环结构和外层圆环结构在第一角度处的位移最大；在陀螺仪的检测模态下，内层圆环结构和外层圆环结构在第二角度处的位移最大。其中，第一角度和第二角度相差（2L-1）*45°， L=1,3,5或7。
耦合梁结构500设置在外部锚点结构100与外层圆环结构200之间以及外层圆环结构200与内层圆环结构300之间，耦合梁结构500用于支撑外层圆环结构200和内层圆环结构300以驱动模态或检测模态振动。
在本发明实施例中，在驱动模态时，外层圆环结构200和内层圆环结构300均沿0°/90°方向振动，但两者振动方向相反，即相位相差180°，同理在检测模态时，外层圆环结构200和内层圆环结构300均沿45°/135°方向振动，但两者振动方向相反，即相位相差180°。
本发明实施例设置有外层圆环结构200和内层圆环结构300，并且通过耦合梁结构500支撑外层圆环结构200和内层圆环结构300分别工作于2θ模态，形成了双2θ模态陀螺仪。该陀螺仪整体上具有更大的刚度，更高的模态频率，从而具有更佳的抗振性能，并且具有更高的检测精度。
另一方面，本发明实施例中的圆环型双2θ模态陀螺依然具有高度对称的几何结构，驱动模态和检测模态完全相同，因此驱动模态和检测模态无频率差，即结构固有模态匹配，具有超高灵敏度。
在一种实施例中，耦合梁结构500包括连接在外部锚点结构100和外层圆环结构200之间的第一耦合梁510以及连接在外层圆环结构200和内层圆环结构300之间的第二耦合梁520。
进一步地，在一种实施例中，耦合梁结构500包括八组第一耦合梁510，八组第一耦合梁510均匀连接在外部锚点结构100和外层圆环结构200之间。
当然，在其他实施例中，第一耦合梁510的具体数量还可以是其他四的整数倍，例如十六、三十二等。
同样地，在一种实施例中，耦合梁结构500包括八组第二耦合梁520，八组第二耦合梁520均匀连接在外层圆环结构200和内层圆环结构300之间。
当然，在其他实施例中，第二耦合梁520的具体数量还可以是其他四的整数倍，例如十六、三十二等。
在一种实施例中，第一耦合梁510和第二耦合梁520交错布置，由此有利于提高受力均匀性。
进一步地，在一种实施例中，每一第一耦合梁510位于两个相邻的第二耦合梁520的中间位置，每一第二耦合梁520位于两个相邻的第一耦合梁510的中间位置。
由此，从整个周向来看，第一耦合梁510和第二耦合梁520均匀间隔布置，由此可以实现圆环型双2θ模态陀螺的绝对对称结构，同时有利于驱使外层圆环结构200和内层圆环结构300进行精确的模态切换。
在一种实施例中，外层电极410内层电极420外层电极410内层电极420外层电极410和外层圆环结构200以及内层电极420和内层圆环结构300还可相对形成至少一个频率匹配电极和至少一个误差抑制电极，所述频率匹配电极用于匹配驱动模态与检测两模态间的频率，所述误差抑制电极用于抑制陀螺仪的正交误差。
在一种实施例中，外层电极410设置在外层圆环结构200的内侧或外侧，内层电极420设置在内层圆环结构300的内侧或外侧。
进一步地，在一种具体的实施例中，外层电极410设置在外层圆环结构200的外侧，内层电极420设置在内层圆环结构300的内侧，由此会使得外层电极410和内层电极420尽量隔开，以免两者之间形成相互干扰。
另一方面，在一种实施例中，外层电极410均匀布满外层圆环结构200的内侧或外侧以与外层圆环结构形成200形成多个电极对，内层电极420均匀布满内层圆环结构300的内侧或外侧以与内层圆环结构形成300形成多个电极对。
采用外层电极410和内层电极420均匀布满的方式能够形成多个驱动电极对以确保形成稳定的电容，从而形成稳定的外部驱动力，也能够形成多个检测电极，从而提高检测精度。此时，驱动电极对可设置于0°、90°、180°、270°中的任意多处，检测电极对可设置于45°、135°、225°、315°中的任意多处。
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。

Claims (10)

  1. 一种陀螺仪，其特征在于，包括：
    外部锚点结构；
    外层圆环结构；
    内层圆环结构；
    内层电极，所述内层电极相对所述内层圆环结构设置并与所述内层圆环结构形成至少一个驱动电极对和至少一个检测电极对；
    外层电极，所述外层电极相对所述外层圆环结构设置并与所述外侧圆环结构形成至少一个驱动电极对和至少一个检测电极对；
    以及耦合梁结构，所述耦合梁结构设置在所述外部锚点结构与所述外层圆环结构之间以及所述外层圆环结构与所述内层圆环结构之间，所述耦合梁结构用于支撑所述外层圆环结构和所述内层圆环结构振动。
  2. 根据权利要求1所述的陀螺仪，其特征在于，所述耦合梁结构包括连接在所述外部锚点结构和所述外层圆环结构之间的第一耦合梁以及连接在所述外层圆环结构和所述内层圆环结构之间的第二耦合梁，所述第一耦合梁的数量为4*N个, 所述第二耦合梁的数量为4*M个，其中N、M为正整数。
  3. 根据权利要求2所述的陀螺仪，其特征在于，所述第一耦合梁和所述第二耦合梁在所述陀螺仪的周向交错布置，每一所述第一耦合梁位于两个相邻的所述第二耦合梁的中间位置，每一所述第二耦合梁位于两个相邻的所述第一耦合梁的中间位置。
  4. 根据权利要求1所述的陀螺仪，其特征在于，所述外层电极设置在所述外层圆环结构的内侧或外侧，所述内层电极设置在所述内层圆环结构的内侧或外侧。
  5. 根据权利要求4所述的陀螺仪，其特征在于，所述外层电极均匀布满所述外层圆环结构的内侧或外侧，所述内层电极均匀布满所述内层圆环结构的内侧或外侧。
  6. 根据权利要求1所述的陀螺仪，其特征在于，所述驱动电极对设置于所述陀螺仪周向的第一角度处，所述检测电极对设置于所述陀螺仪周向的第二角度处；在所述陀螺仪的驱动模态下，所述内层圆环结构和所述外层圆环结构在所述第一角度处的位移最大；在所述陀螺仪的检测模态下，所述内层圆环结构和所述外层圆环结构在所述第二角度处的位移最大。
  7. 根据权利要求6所述的陀螺仪，其特征在于，所述第一角度和所述第二角度相差（2L-1）*45°，其中L=1,3,5或7。
  8. 根据权利要求1所述的陀螺仪，其特征在于，所述内层电极相对所述内层圆环结构与所述内层圆环结构还形成至少一个频率匹配电极和至少一个误差抑制电极，所述频率匹配电极用于匹配所述陀螺仪的驱动模态频率和检测模态频率，所述误差抑制电极用于抑制所述陀螺仪的正交误差。
  9. 根据权利要求1-8中任一项所述的陀螺仪，其特征在于，所述陀螺仪的内层圆环结构和所述外层圆环结构均工作于2θ模态。
  10. 根据权利要求9所述的陀螺仪，其特征在于，所述内层圆环结构和所述外层圆环结构的振动相位相差180°。
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