WO2022006811A1 - 一种用于测试可调滤光片的光谱响应速度的系统及方法 - Google Patents

一种用于测试可调滤光片的光谱响应速度的系统及方法 Download PDF

Info

Publication number
WO2022006811A1
WO2022006811A1 PCT/CN2020/101055 CN2020101055W WO2022006811A1 WO 2022006811 A1 WO2022006811 A1 WO 2022006811A1 CN 2020101055 W CN2020101055 W CN 2020101055W WO 2022006811 A1 WO2022006811 A1 WO 2022006811A1
Authority
WO
WIPO (PCT)
Prior art keywords
tunable filter
light
spot position
response speed
recording device
Prior art date
Application number
PCT/CN2020/101055
Other languages
English (en)
French (fr)
Inventor
甄明亮
俞萍萍
郭斌
黄锦标
Original Assignee
深圳市海谱纳米光学科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市海谱纳米光学科技有限公司 filed Critical 深圳市海谱纳米光学科技有限公司
Priority to KR1020227014177A priority Critical patent/KR20220066968A/ko
Priority to US17/425,644 priority patent/US11650100B2/en
Priority to EP20914770.1A priority patent/EP3964815A4/en
Priority to CN202080007917.8A priority patent/CN113272636B/zh
Priority to JP2021553118A priority patent/JP7246781B2/ja
Priority to PCT/CN2020/101055 priority patent/WO2022006811A1/zh
Publication of WO2022006811A1 publication Critical patent/WO2022006811A1/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0227—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using notch filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0207—Details of measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0228—Testing optical properties by measuring refractive power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1086—Beam splitting or combining systems operating by diffraction only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2823—Imaging spectrometer
    • G01J2003/2826—Multispectral imaging, e.g. filter imaging

Definitions

  • the present invention relates to the technical field of spectral testing, and in particular, to a system and method for testing the spectral response speed of a tunable optical filter.
  • the output wavelength of the tunable filter can change at a speed of microseconds, and the wavelength from visible light to infrared light can be arbitrarily selected according to needs.
  • the monochromaticity of the output wavelength is good, and the half-wave width is less than 10nm. Due to the time difference between its different wavelength outputs, special tests are required to determine the total response time of a certain wavelength range.
  • spectrometers are often used to test the rapidly changing part of the wavelength, and the time accuracy can only reach the level of milliseconds. Therefore, for the filter elements with higher-speed wavelength output changes, a test method with higher time accuracy is required.
  • the present invention proposes a system and method for testing the spectral response speed of a tunable filter. , which solves the technical problem that the high-speed wavelength output change filter element in the prior art requires high-precision time testing of the wavelength output change.
  • a system for testing the spectral response speed of an adjustable optical filter comprising a collimated light source, a beam splitting element, a focusing lens and a spot position imaging recording device arranged in sequence, the adjustable optical filter
  • An optical filter is disposed between the collimated light source and the spectroscopic element and is configured to be continuously tuned in a certain wavelength range during the test, the spectroscopic element is used to pass the tunable filter during the continuous tuning process
  • the light beams of different wavelength bands form diffracted light beams or refracted light beams corresponding to different wavelength bands
  • the focusing lens is used to focus the diffracted light beams or refracted light beams to be incident on the spot position imaging recording device, and the spot position imaging recording device
  • the device is used for recording position change information imaged by the diffracted or refracted light beams corresponding to different wavelength bands.
  • the collimating light source includes a light-emitting source, a slit and a collimating lens arranged in sequence.
  • the light splitting element adopts a diffraction grating or a refractive triangular prism.
  • the light spot imaging recording device adopts a high-speed camera or a rolling shutter camera.
  • a method for testing the spectral response speed of a tunable filter, using the above system comprising the following steps:
  • the step S4 specifically includes: first establishing a coordinate system, the abscissa represents the wavelength, the ordinate represents the time, and the light spot position P 1 is determined according to an image algorithm. The information of and P 2 is positioned in the coordinate system, and then the response time ⁇ t from wavelength ⁇ 1 to wavelength ⁇ 2 is converted.
  • the present invention mainly converts the change information of the spectral dimension to the spatial dimension through the light-splitting element, the different spectra of which have different diffraction angles or refraction angles through such elements, so as to have the spot position distribution of the corresponding wavelength at the spatial receiving end, and the change information of the spectral dimension is converted to the spatial dimension;
  • the conversion of dimensions, the high-speed spectral output of the tunable filter will make the light spot move at a high speed, and the camera side records the time required for the initial and end positions of the light spot, so as to obtain the wavelength response speed of the tunable filter.
  • FIG. 1 is a schematic diagram of an optical path according to an embodiment of the present invention.
  • FIG. 2 is a schematic diagram of a grating structure according to a specific embodiment of the present invention.
  • FIG. 3 is a schematic diagram of a simulation structure of grating diffraction according to a specific embodiment of the present invention.
  • FIG. 4 is a schematic diagram of imaging by a high-speed camera according to a specific embodiment of the present invention.
  • FIG. 5 is a schematic diagram of an imaging principle of a rolling shutter camera according to a specific embodiment of the present invention.
  • FIG. 6 is a schematic diagram of imaging by a rolling shutter camera according to a specific embodiment of the present invention.
  • FIG. 1 is a schematic diagram of an optical path according to an embodiment of the present invention.
  • a system for testing the spectral response speed of a tunable filter includes a collimated light source, a beam splitting element 5, a focusing lens 6 and a spot position imaging recording device 7.
  • the tunable filter to be tested The filter 4 is placed between the collimating light source and the spectroscopic element 5.
  • the collimating light source illuminates the tunable filter 4, and the tunable filter 4 is continuously tuned in a certain wavelength range.
  • a diffracted light beam or a refracted light beam corresponding to a wavelength band is generated; after that, the focusing lens 6 is used to image the recording device 7 in the light spot position in the form of a light spot.
  • the response speed of the tunable filter is obtained based on the time information and spot movement position information.
  • the tunable filter 4 tunes the light of different wavelengths to form different spot position distributions, and the high-speed spectral output of the tunable filter is also The light spot will move at a high speed, and the spot position imaging recording device 7 records the time required for the initial and final positions of the light spot, thereby obtaining the spectral response speed of the tunable filter.
  • the light spot imaging recording device adopts a high-speed camera or a rolling shutter camera, and the frame rate of the high-speed camera can reach thousands of frames per second, tens of thousands or even hundreds of thousands of frames, which can greatly improve the time accuracy; 1080P 30
  • the exposure time difference between lines is 30us, which can also greatly improve the time accuracy.
  • the collimated light source includes a light source 1, a slit 2 and a collimating lens 3. After the light source 1 passes through the slit 2 and the collimating lens 3, a parallel beam is formed to illuminate the tunable filter 4 to ensure that the incident light can be Adjust the intensity of the light source and the stability of the light source with the filter.
  • the light splitting element 5 adopts a diffraction grating, and the light beams of different wavelength bands passing through the tunable filter 4 pass through the diffraction grating to generate diffracted light beams of corresponding wavelength bands, and then enter the spot position imaging recording device through the focusing lens 6 7.
  • the spot position imaging and recording device 7 receives the light beam to image the spot and records the position image information of the spot movement of the tunable filter 4 in different wavelength bands.
  • the selection of the spectroscopic element 5 is not limited to this, the spectroscopic element 5 plays a light splitting role, and can be a diffractive optical element such as a grating or a refractive geometric optical element such as a prism, and the grating can also be a reflective or transmissive type, ordinary grating or blazed grating. , can be selected according to specific needs.
  • the spectroscopic element 5 plays a light splitting role, and can be a diffractive optical element such as a grating or a refractive geometric optical element such as a prism, and the grating can also be a reflective or transmissive type, ordinary grating or blazed grating. , can be selected according to specific needs.
  • the light splitting element 5 adopts a reflective blazed grating, as shown in FIG. 2 .
  • the collimated light source is incident at the blaze angle, and in the blaze direction, the focusing lens 6 focuses the diffracted light rays of different wavelength bands on the spot position imaging recording device 7 .
  • the blaze angle of the reflective blazed grating is ⁇
  • the grating constant d is the normal direction of the grating slope
  • N is the normal direction of the grating surface
  • i and i′ are the incident angle and reflection angle relative to the normal line of the grating slope
  • the distribution intensity I of the diffraction slit of the blazed grating is specifically: in It can be inferred that when the grating parameter selection is fixed, the wavelength ⁇ is different, the grating diffraction slit distribution intensity I is different, and the image will be imaged at different positions.
  • the tunable filter 4 tunes light of different wavelengths to form different spot position distributions, the high-speed spectral output of the tunable filter will also make the spot move at a high speed, and the spot position imaging recording device 7 records the initial and end positions of the spot required time to obtain the spectral response speed of the tunable filter.
  • a method for testing the spectral response speed of a tunable optical filter using the above device comprising the following steps:
  • the high-speed camera when a high-speed camera is used for the imaging and recording device for the spot position in the optical path, the high-speed camera records the moving distance of the spot corresponding to the adjustable filter in a certain wavelength range, and obtains the available light spot according to the total time corresponding to the moving distance. Adjust the response speed of the filter in the corresponding spectral range; the total time corresponding to the moving distance can be calculated according to the sensor time characteristics of the camera.
  • the high-speed camera starts recording the wavelength ⁇ 1 corresponding to the spot position P 1 , the wavelength moves to ⁇ 2 , and the corresponding tunable filter stops at the time t 1 .
  • the high-speed camera recording wavelength [lambda] 2 corresponding to the spot position P 2, after the image analysis of a high speed camera, to find the corresponding spot positions P 1 and F-th frame corresponding to the spot position P 1 of the second frame F 2 2, a high-speed camera
  • the frame rate of high-speed cameras can reach thousands of frames per second, tens of thousands or even hundreds of thousands of frames, which can greatly improve the time accuracy.
  • each individual row can start the exposure of the next frame after completing the readout of the previous frame, so in the frame Each row will be exposed for the same amount of time, but exposures will start at different time points on different rows, allowing overlapping exposures for two frames.
  • the start exposure time of the first line of frame M is different from the start exposure time of the second line.
  • different lines have different exposure sampling time points, and the influence of the spot movement will cause distortion. According to This distortion can convert the response time of the tunable filter into a spatial record.
  • the tunable filter starts at time t 1
  • the rolling shutter CMOS sensor starts recording the wavelength ⁇ 1 corresponding to the spot position P 1
  • the wavelength moves to ⁇ 2
  • the recording wavelength ⁇ 2 of the rolling shutter CMOS sensor corresponds to the spot position P 2
  • the wavelength space is represented by the abscissa in Figure 6
  • the sampling time is represented by the ordinate in Figure 6, according to the data in the coordinate system
  • diffractive or refractive optical elements are used to present the filtering effect of the adjustable filter in the time dimension in the spatial dimension, and the imaging chip or sensor is used to record the spatial positions of different wavelength bands, and the corresponding spatial position difference Therefore, the response speed of a wavelength range of the tunable filter can be obtained, and the time accuracy can also be greatly improved by using a high-speed camera or a rolling shutter camera.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Geometry (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

一种用于测试可调滤光片（4）的光谱响应速度的系统，包括依次设置的准直光源、分光元件（5）、聚焦透镜（6）和光斑位置成像记录装置（7），可调滤光片（4）被设置在准直光源和分光元件（5）之间并且被配置为在测试中在一定波长范围内连续调谐，分光元件（5）将经过可调滤光片（4）的不同波长段的光束形成对应不同波长段的衍射光束或折射光束，聚焦透镜（6）将光束进行聚焦，光斑位置成像记录装置（7）记录对应不同波长段的衍射光束或折射光束所成像的位置变化信息。一种测试方法，通过分光元件（5）产生不同衍射角或折射角，从而在空间接收端具有相应波长的光斑位置分布，将光谱维度的变化信息转换到空间维度从而获得可调滤光片（4）波长响应速度。

Description

一种用于测试可调滤光片的光谱响应速度的系统及方法 技术领域
本发明涉及光谱测试技术领域，并且特别涉及一种用于测试可调滤光片的光谱响应速度的系统及方法。
背景技术
可调滤光片的输出波长的变化速度达微秒级别，可见光至红外光波段可根据需要任意选择想要输出的波长，且输出波长的单色性较好，半波宽小于10nm。由于其不同波长输出存在时间差，要确定一定波长范围的总响应时间需要经过特殊的测试。目前对于波长的快速改变部分的测试常采用的是光谱仪，时间精度只能达到豪秒级别，所以对于更高速波长输出变化的滤光元件，需要更高时间精度的测试方法。
发明内容
为了解决现有技术中的高速波长输出变化滤光元件需要对波长输出变化的高精度时间测试的技术问题，本发明提出了一种用于测试可调滤光片的光谱响应速度的系统及方法，解决了现有技术中的高速波长输出变化滤光元件需要对波长输出变化的高精度时间测试的技术问题。
根据本发明的一方面，提出了一种用于测试可调滤光片的光谱响应速度的系统，包括依次设置的准直光源、分光元件、聚焦透镜和光斑位置成像记录装置，所述可调滤光片被设置在所述准直光源和所述分光元件之间并且被配置为在测试中在一定波长范围内连续调谐，所述分光元件用于将连续调谐过程中经过可调滤光片的不同波长段的光束形成对应不同波长段的衍射光束或折射光束，所述聚焦透镜用于对将要入射到光斑位置成像记录装置的所述衍射光束或折射光束进行聚焦，所述光斑位置成像记录装置用于记录对应不同波长段的所述衍射光束或折射光束所成像的位置变化信息。
进一步的，所述准直光源包括依次设置的发光源、狭缝和准直透镜。
进一步的，所述分光元件采用衍射型光栅、或者折射型三棱镜。
进一步的，所述光斑成像记录装置采用高速相机或者卷帘快门相机。
一种用于测试可调滤光片的光谱响应速度的方法，采用上述系统，包括以下步骤：
S1：使来自准直光源的光照射到可调滤光片上；
S2：在一定波长范围内连续调谐所述可调滤光片；
S3：记录在所述连续调谐过程中，所述成像记录装置中的光斑位置的移动距离；
以及
S4：基于所述位移距离所需时间从而获得所述可调滤光片的响应速度。
进一步的，在所述光斑成像记录装置包括高速相机的情况下，所述步骤S4具体包括：记录对应光斑位置P 1的光斑位置图像为第F 1帧，对应光斑位置P 2的光斑位置图像为第F 2帧，波长λ 1到波长λ 2的响应时间则为Δt＝(F 2-F 1)/M，其中M为光斑位置成像记录装置的帧率。
进一步的，在所述光斑成像记录装置包括卷帘快门相机的情况下，所述步骤S4具体包括：先建立一坐标系，横坐标表示波长，纵坐标表示时间，根据图像算法将光斑位置P 1和P 2的信息定位在坐标系内，再换算出波长λ 1到波长λ 2的响应时间Δt。
本发明主要通过分光元件，其不同光谱经过此类元件拥有不同衍射角或折射角，从而在空间接收端具有相应波长的光斑位置分布，将光谱维度的变化信息转换到空间维度；光谱维度到空间维度的转换，可调滤光片的高速光谱输出将使光斑高速移动，相机端记录光斑初始和结束时位置所需时间，从而获得可调滤光片波长响应速度。
附图说明
包括附图以提供对实施例的进一步理解并且附图被并入本说明书中并且构成本说明书的一部分。附图图示了实施例并且与描述一起用于解释本发明的原理。将容易认识到其它实施例和实施例的很多预期优点，因为通过引用以下详细描述，它们变得被更好地理解。附图的元件不一定是相互按照比例的。同样的附图标记指代对应的类似部件。
图1是根据本发明的一个实施例的光路示意图；
图2是根据本发明的一个具体实施例的光栅结构示意图；
图3是根据本发明的一个具体实施例的光栅衍射的仿真结构示意图；
图4是根据本发明的一个具体实施例的高速相机成像示意图；
图5是根据本发明的一个具体实施例的卷帘快门相机成像原理示意图；
图6是根据本发明的一个具体实施例的卷帘快门相机成像示意图。
具体实施方式
在以下详细描述中，参考附图，该附图形成详细描述的一部分，并且通过其中可实践本发明的说明性具体实施例来示出。对此，参考描述的图的取向来使用方向术语，例如“顶”、“底”、“左”、“右”、“上”、“下”等。因为实施例的部件可被定位于若干不同 取向中，为了图示的目的使用方向术语并且方向术语绝非限制。应当理解的是，可以利用其他实施例或可以做出逻辑改变，而不背离本发明的范围。因此以下详细描述不应当在限制的意义上被采用，并且本发明的范围由所附权利要求来限定。
图1是根据本发明的一个实施例的光路示意图。
如图1所示，一种用于测试可调滤光片的光谱响应速度的系统，包括准直光源、分光元件5、聚焦透镜6和光斑位置成像记录装置7，待测试的可调滤光片4放置准直光源和分光元件5之间，准直光源照射可调滤光片4，可调滤光片4在一定波长范围连续调谐，经过可调滤光片4出射的光束入射到分光元件5上，产生对应波长段的衍射光束或者折射光束；之后再通过聚焦透镜6以光斑形态成像在光斑位置成像记录装置7。
在具体实施例中，根据光斑位置成像记录装置7记录的一定波长变化范围内的时间信息和光斑位置移动信息，基于此时间信息和光斑移动位置信息获得所述可调滤光片的响应速度。
利用分光元件5的不同波光的光经过分光元件拥有不同衍射或折射角的原理，可调滤光片4调谐出不同波长的光形成不同的光斑位置分布，可调滤光片的高速光谱输出也将使光斑高速移动，光斑位置成像记录装置7记录光斑初始和结束时位置所需时间，从而获得可调滤光片光谱响应速度。
在具体实施例中，所述光斑成像记录装置采用高速相机或者卷帘快门相机，高速相机的帧率可以达到每秒几千帧几万帧甚至几十万帧，可大大提高时间精度；1080P 30帧卷帘快门相机，逐行的曝光时间差为30us，也可大大提高时间精度。
在具体实施例中，准直光源包括光源1、狭缝2和准直透镜3，在光源1经过狭缝2和准直透镜3后形成平行光束照射可调滤光片4，确保入射到可调滤光片的光源的强度和光源的稳定。
在具体实施例中，分光元件5采用衍射型光栅，经过可调滤光片4的不同波长段的光束通过衍射型光栅产生对应波长段的衍射光束，再通过聚焦透镜6进入光斑位置成像记录装置7，光斑位置成像记录装置7接收光束以光斑成像并记录可调滤光片4在不同波长段内光斑移动的位置图像信息。
分光元件5的选择不局限于此，分光元件5起到分光作用，可以为衍射型光学元件如光栅或者折射型几何光学元件如三棱镜，光栅也可以为反射式或者透射式，普通光栅或者闪耀光栅，可根据具体需求选择。
在具体实施例中，分光元件5采用反射型闪耀光栅，如图2所示。准直光源以闪耀 角入射，在闪耀方向上聚焦透镜6将不同波段的衍射光线聚焦在光斑位置成像记录装置7上。该反射型闪耀光栅的闪耀角为θ，光栅常数d，n为光栅斜面法线方向，N为光栅面法线方向，
Figure PCTCN2020101055-appb-000001
和
Figure PCTCN2020101055-appb-000002
为相对于光栅面法线的入射角和反射角，i和i′是相对于光栅斜面法线的入射角和反射角，闪耀光栅衍射光缝分布强度I具体为：
Figure PCTCN2020101055-appb-000003
其中
Figure PCTCN2020101055-appb-000004
Figure PCTCN2020101055-appb-000005
可以推出当光栅参数选择固定，波长λ不同，光栅衍射光缝分布强度I不同，也就会成像在不同的位置。
如图3所示，为一刻线数M＝600，闪耀角θ＝8.6°，光栅常数d＝10u的闪耀光栅的衍射仿真结果，可以看出，利用光栅的色散性质，不同波长λ 1和λ 2在图像探测器中不同的位置成像，波长λ 1＝400nm和λ 2＝900nm的衍射仿真结果，可以看出当光栅参数选择固定，波长λ不同，光栅衍射光缝分布强度I不同，也就会成像在不同的位置。因此，可调滤光片4调谐出不同波长的光形成不同的光斑位置分布，可调滤光片的高速光谱输出也将使光斑高速移动，光斑位置成像记录装置7记录光斑初始和结束时位置所需时间，从而获得可调滤光片光谱响应速度。
采用上述装置的一种用于测试可调滤光片的光谱响应速度的方法，包括以下步骤：
S1：使来自准直光源的光照射到可调滤光片上；
S2：在一定波长范围内连续调谐所述可调滤光片；
S3：记录在所述连续调谐过程中，所述成像记录装置中的光斑位置的移动距离；
以及
S4：基于所述位移距离所需时间从而获得所述可调滤光片的响应速度。
在具体实施例中，S4中当光路中光斑位置成像记录装置采用高速相机时，高速相机记录可调滤光片在一定波长范围内对应的光斑移动距离，根据移动距离对应的总时间，获得可调滤光片在对应光谱范围内的响应速度；移动距离对应的总时间可根据相机的sensor时间特性计算。
在具体实施例中，如图4所示，可调滤光片启动时间t 1，高速相机开始记录波长λ 1对应光斑位置P 1,波长移动到λ 2，对应的可调滤光片停止时间t 2，高速相机记录波长λ 2对应光斑位置P 2,经过对高速相机的图像分析，找出对应光斑位置P 1的第F 1帧和对应光斑位置P 2的第F 2帧，高速相机的速度为M帧/秒,从可调滤光片启动到停止，一共拍摄到F 2-F 1帧，波长λ 1到波长λ 2的响应时间则为Δt＝(F 2-F 1)/M。高速相机的帧率可以达到每秒几千帧几万帧甚至几十万帧，可大大提高时间精度。
在具体实施例中，S4中当光路中光斑位置成像记录装置采用卷帘快门相机的CMOS 传感器，每个单独的行能够在完成前一帧的读出后开始下一帧的曝光，故帧中的每一行将暴露相同的时间量，但在不同行在不同的时间点开始曝光，允许两帧的重叠曝光。如图5所示，帧M的第一行开始曝光时间和第二行的开始曝光时间不一样，这样的情况造成不同行有不同的曝光采样时间点，光斑移动中的影响会产生畸变，根据这种畸变可以把可调滤光片的响应时间转换成空间记录下来。
在具体实施例中，可调滤光片启动时间t 1，卷帘快门式CMOS传感器开始记录波长λ 1对应光斑位置P 1，波长移动到λ 2，对应的可调滤光片停止时间t 2，卷帘快门式CMOS传感器记录波长λ 2对应光斑位置P 2，如图6所示，波长空间以图6中的横坐标表示，采样时间以图6中的纵坐标表示，根据数据在坐标系中定位光斑位置P 1和P 2，即可换算出波长λ 1到波长λ 2的响应时间则为Δt。
在具体实施例中，改变卷帘快门式CMOS传感器的不同驱动参数，可以调整测量时间量程。假设卷帘快门式CMOS传感器的像素为W*H，帧率为M,单帧所用时间1/M，逐行曝光时间差则为1/(M*H)，如1080P 30帧卷帘快门式CMOS传感器，逐行的曝光时间差为1/30*1080＝30us，即可大大提高时间精度。
通过本发明的系统和方法，利用衍射或折射光学元件将可调滤光片时间维度的滤光效果呈现在空间维度上，利用成像芯片或传感器将不同波段空间位置记录下来，通过空间位置差对应的时间差，从而获得可调滤光片一段波长范围的响应速度，并且利用高速相机或者卷帘式快门相机，也可以大大提高时间精度。
显然，本领域技术人员在不偏离本发明的精神和范围的情况下可以作出对本发明的实施例的各种修改和改变。以该方式，如果这些修改和改变处于本发明的权利要求及其等同形式的范围内，则本发明还旨在涵盖这些修改和改变。词语“包括”不排除未在权利要求中列出的其它元件或步骤的存在。某些措施记载在相互不同的从属权利要求中的简单事实不表明这些措施的组合不能被用于获利。权利要求中的任何附图标记不应当被认为限制范围。

Claims (7)

  1. 一种用于测试可调滤光片的光谱响应速度的系统，其特征在于，包括依次设置的准直光源、分光元件、聚焦透镜和光斑位置成像记录装置，所述可调滤光片被设置在所述准直光源和所述分光元件之间并且被配置为在测试中在一定波长范围内连续调谐，所述分光元件用于将连续调谐过程中经过可调滤光片的不同波长段的光束形成对应不同波长段的衍射光束或折射光束，所述聚焦透镜用于对将要入射到光斑位置成像记录装置的所述衍射光束或折射光束进行聚焦，所述光斑位置成像记录装置用于记录对应不同波长段的所述衍射光束或折射光束所成像的位置变化信息。
  2. 根据权利要求1所述的一种用于测试可调滤光片的光谱响应速度的系统，其特征在于，所述准直光源包括依次设置的发光源、狭缝和准直透镜。
  3. 根据权利要求1所述的一种用于测试可调滤光片的光谱响应速度的系统，其特征在于，所述分光元件采用衍射型光栅、或者折射型三棱镜。
  4. 根据权利要求1所述的一种用于测试可调滤光片的光谱响应速度的系统，其特征在于，所述光斑成像记录装置采用高速相机或者卷帘快门相机。
  5. 一种用于测试可调滤光片的光谱响应速度的方法，其特征在于，采用权利要求1-4中任一项所述的系统，包括以下步骤：
    S1：使来自准直光源的光照射到可调滤光片上；
    S2：在一定波长范围内连续调谐所述可调滤光片；
    S3：记录在所述连续调谐过程中，所述成像记录装置中的光斑位置的移动距离；以及
    S4：基于所述位移距离所需时间从而获得所述可调滤光片的响应速度。
  6. 根据权利要求5所述的一种测试可调滤光片光谱响应速度的方法，其特征在于，在所述光斑成像记录装置包括高速相机的情况下，所述步骤S4具体包括：记录对应光斑位置P 1的光斑位置图像为第F 1帧，对应光斑位置P 2的光斑位置图像为第F 2帧，波长λ 1到波长λ 2的响应时间则为Δt＝(F 2-F 1)/M，其中M为光斑位置成像记录装置的帧率。
  7. 根据权利要求5所述的一种测试可调滤光片光谱响应速度的方法，其特征在于，在所述光斑成像记录装置包括卷帘快门相机的情况下，所述步骤 S4具体包括：先建立一坐标系，横坐标表示波长，纵坐标表示时间，根据图像算法将光斑位置P 1和P 2的信息定位在坐标系内，再换算出波长λ 1到波长λ 2的响应时间Δt。
PCT/CN2020/101055 2020-07-09 2020-07-09 一种用于测试可调滤光片的光谱响应速度的系统及方法 WO2022006811A1 (zh)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR1020227014177A KR20220066968A (ko) 2020-07-09 2020-07-09 파장 가변 광필터의 스펙트럼 응답 속도를 테스트하기 위한 시스템 및 방법
US17/425,644 US11650100B2 (en) 2020-07-09 2020-07-09 System and method for testing a spectral response speed of a tunable filter
EP20914770.1A EP3964815A4 (en) 2020-07-09 2020-07-09 SYSTEM AND METHOD FOR TESTING THE SPECTRAL RESPONSE VELOCITY OF A TUNABLE FILTER
CN202080007917.8A CN113272636B (zh) 2020-07-09 2020-07-09 一种用于测试可调滤光片的光谱响应速度的系统及方法
JP2021553118A JP7246781B2 (ja) 2020-07-09 2020-07-09 波長可変光学フィルタのスペクトル応答速度をテストするためのシステム及び方法
PCT/CN2020/101055 WO2022006811A1 (zh) 2020-07-09 2020-07-09 一种用于测试可调滤光片的光谱响应速度的系统及方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2020/101055 WO2022006811A1 (zh) 2020-07-09 2020-07-09 一种用于测试可调滤光片的光谱响应速度的系统及方法

Publications (1)

Publication Number Publication Date
WO2022006811A1 true WO2022006811A1 (zh) 2022-01-13

Family

ID=77229235

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/101055 WO2022006811A1 (zh) 2020-07-09 2020-07-09 一种用于测试可调滤光片的光谱响应速度的系统及方法

Country Status (6)

Country Link
US (1) US11650100B2 (zh)
EP (1) EP3964815A4 (zh)
JP (1) JP7246781B2 (zh)
KR (1) KR20220066968A (zh)
CN (1) CN113272636B (zh)
WO (1) WO2022006811A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117330527B (zh) * 2023-12-01 2024-03-12 苏州大学 一种单脉冲长延迟瞬态吸收的测量装置及方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5321539A (en) * 1991-02-04 1994-06-14 Nippon Telegraph And Telephone Corporation Liquid crystal Fabry-Perot etalon with glass spacer
CN1799001A (zh) * 2003-06-13 2006-07-05 日本电信电话株式会社 可变波长光学过滤器
CN101688808A (zh) * 2007-07-31 2010-03-31 日本电信电话株式会社 分光计
CN102494873A (zh) * 2011-11-20 2012-06-13 中国科学院光电技术研究所 一种微透镜阵列焦距的测量方法
CN108919478A (zh) * 2018-07-27 2018-11-30 电子科技大学 一种可调谐f-p滤光片及其制备方法
CN109196333A (zh) * 2016-05-27 2019-01-11 威里利生命科学有限责任公司 用于4-d高光谱成像的系统和方法
CN209624935U (zh) * 2019-04-30 2019-11-12 福州高意通讯有限公司 一种快速可调滤波结构

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7342658B2 (en) * 2005-12-28 2008-03-11 Eastman Kodak Company Programmable spectral imaging system
JP4380634B2 (ja) * 2006-01-16 2009-12-09 横河電機株式会社 波長特性測定装置
CN102384841B (zh) * 2011-09-23 2013-11-13 中国兵器工业第二〇五研究所 面阵探测器光谱响应度测试方法
CN102621073B (zh) * 2012-03-02 2013-08-14 北京卓立汉光仪器有限公司 一种太阳能电池的光谱响应值测量系统及方法
CN106768855B (zh) * 2016-11-14 2019-07-30 中国电子科技集团公司第四十一研究所 一种大口径辐射计的光谱响应度测量装置及方法
JPWO2018117149A1 (ja) * 2016-12-22 2019-11-21 国立大学法人名古屋大学 光検波装置、光特性解析装置、光検波方法
US10401738B2 (en) * 2017-08-02 2019-09-03 Kla-Tencor Corporation Overlay metrology using multiple parameter configurations
CN109724780A (zh) * 2018-12-15 2019-05-07 中国科学院长春光学精密机械与物理研究所 一种小光斑测试系统及其测试方法
CN110514300B (zh) * 2019-08-22 2021-07-06 华东师范大学 声光调制实现时空测探的光谱响应调节方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5321539A (en) * 1991-02-04 1994-06-14 Nippon Telegraph And Telephone Corporation Liquid crystal Fabry-Perot etalon with glass spacer
CN1799001A (zh) * 2003-06-13 2006-07-05 日本电信电话株式会社 可变波长光学过滤器
CN101688808A (zh) * 2007-07-31 2010-03-31 日本电信电话株式会社 分光计
CN102494873A (zh) * 2011-11-20 2012-06-13 中国科学院光电技术研究所 一种微透镜阵列焦距的测量方法
CN109196333A (zh) * 2016-05-27 2019-01-11 威里利生命科学有限责任公司 用于4-d高光谱成像的系统和方法
CN108919478A (zh) * 2018-07-27 2018-11-30 电子科技大学 一种可调谐f-p滤光片及其制备方法
CN209624935U (zh) * 2019-04-30 2019-11-12 福州高意通讯有限公司 一种快速可调滤波结构

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP3964815A4 *

Also Published As

Publication number Publication date
JP7246781B2 (ja) 2023-03-28
US11650100B2 (en) 2023-05-16
EP3964815A4 (en) 2022-08-03
EP3964815A1 (en) 2022-03-09
JP2022542733A (ja) 2022-10-07
CN113272636A (zh) 2021-08-17
CN113272636B (zh) 2022-09-20
KR20220066968A (ko) 2022-05-24
US20220187127A1 (en) 2022-06-16

Similar Documents

Publication Publication Date Title
US10578554B2 (en) Spectrum-scanned SPR imaging detection system
US7053991B2 (en) Differential numerical aperture methods
US7495762B2 (en) High-density channels detecting device
JP5394317B2 (ja) 回転対称非球面形状測定装置
JP2005530144A (ja) 単一構造の光学測定法
JPH07134007A (ja) 高空間解像度で薄膜の膜厚測定を行なうための装置
JP2021518565A (ja) 瞬時的エリプソメータ又は光波散乱計及び関連する測定方法
CN110132412A (zh) 基于数字微镜器件的双波段光谱成像系统及实现方法
JPH01308930A (ja) 顕微分光装置
US6757067B2 (en) Fringe pattern discriminator for grazing incidence interferometer
CN100468045C (zh) 光栅光谱仪
US20090168079A1 (en) Reflective film thickness measurement method
US5642191A (en) Multi-channel imaging spectrophotometer
WO2022006811A1 (zh) 一种用于测试可调滤光片的光谱响应速度的系统及方法
US4893024A (en) Apparatus for measuring the thickness of a thin film with angle detection means
JP2002005823A (ja) 薄膜測定装置
JP4667965B2 (ja) 光ビーム測定装置
JP4565663B2 (ja) 液滴の形状計測方法及び装置
US11346769B2 (en) Fast generalized multi-wavelength ellipsometer
KR20220120588A (ko) 결합된 ocd 및 광반사변조 방법 및 시스템
CN112067128A (zh) 一种高速静态色散成像光谱装置及其使用方法
KR102015811B1 (ko) 분광 타원계를 이용한 표면 검사장치
JP2007093288A (ja) 光計測装置及び光計測方法
KR20220101344A (ko) 초분광 이미징 기술 기반 광학 계측 시스템 및 광학 계측 시스템의 보정 방법
KR102465675B1 (ko) 면적 스캔 기능을 구비한 복합 영상 분광기

Legal Events

Date Code Title Description
ENP Entry into the national phase

Ref document number: 2020914770

Country of ref document: EP

Effective date: 20210729

ENP Entry into the national phase

Ref document number: 2021553118

Country of ref document: JP

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20227014177

Country of ref document: KR

Kind code of ref document: A

NENP Non-entry into the national phase

Ref country code: DE