WO2022004147A1 - 光学特性測定光学系および光学特性測定装置 - Google Patents

光学特性測定光学系および光学特性測定装置 Download PDF

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Publication number
WO2022004147A1
WO2022004147A1 PCT/JP2021/018221 JP2021018221W WO2022004147A1 WO 2022004147 A1 WO2022004147 A1 WO 2022004147A1 JP 2021018221 W JP2021018221 W JP 2021018221W WO 2022004147 A1 WO2022004147 A1 WO 2022004147A1
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Prior art keywords
optical system
optical
lens group
image
measurement target
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Ceased
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PCT/JP2021/018221
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English (en)
French (fr)
Japanese (ja)
Inventor
貴志 川崎
良隆 寺岡
拓史 宇田
尚吾 持田
賢治 金野
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Konica Minolta Inc
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Konica Minolta Inc
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Priority to JP2022533715A priority Critical patent/JPWO2022004147A1/ja
Priority to US18/013,439 priority patent/US12298240B2/en
Priority to EP21833381.3A priority patent/EP4177659A4/en
Publication of WO2022004147A1 publication Critical patent/WO2022004147A1/ja
Anticipated expiration legal-status Critical
Priority to JP2025007831A priority patent/JP7708341B2/ja
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/108—Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/24—Optical objectives specially designed for the purposes specified below for reproducing or copying at short object distances
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0242—Control or determination of height or angle information of sensors or receivers; Goniophotometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4704—Angular selective
    • G01N2021/4711—Multiangle measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/57—Measuring gloss
    • G01N2021/575—Photogoniometering

Definitions

  • the present invention relates to an optical characteristic measuring optical system and an optical characteristic measuring device.
  • BRDF Bidirectional Reflectance Distribution Function
  • a goniometer is generally used as a device for measuring BRDF.
  • it is necessary to move the illumination unit and the measurement unit of the goniometer when measuring the BRDF. Therefore, the measurement of BRDF by the goniometer has problems that 1) it takes time to measure, 2) it is a measurement of discrete illumination angle and light receiving angle, and 3) the measuring device is large.
  • Patent Document 1 discloses a reflection angle characteristic device using a Fourier transform optical system of a relay system. According to the present invention, the BRDF to be measured can be measured with one shot. Further, Example 4 (FIG. 5) of International Publication No. 2006/050978 discloses an optical system capable of acquiring a two-dimensional image of the surface to be measured.
  • the device disclosed in International Publication No. 2006/050978 has a problem that the image of the measurement target acquired by the optical system for acquiring a two-dimensional image deviates from the appearance when the measurement target is visually observed by a person. be.
  • a lens 3 having a positive power and a lens 13 having a positive power are arranged so as to sandwich an intermediate imaging position (Fourier plane 9).
  • These lenses 3 and 13 are lenses common to the BRDF measurement optical system and the two-dimensional image acquisition optical system. Further, the intermediate image formation position corresponds to the focal position of the lens 3.
  • the optical system for acquiring a two-dimensional image will be a so-called object-side telecentric optical system.
  • the aperture diaphragm in the optical system for acquiring a two-dimensional image is located at a position far away from the intermediate imaging position.
  • the observation angle is greatly tilted in the peripheral portion of the measurement area.
  • the image taken by the optical system disclosed in International Publication No. 2006/050978 deviates from the appearance when viewed visually.
  • the present invention has been made in view of such problems, and in addition to measuring the optical characteristics of the object to be measured, an optical characteristic measurement optical system and an optical characteristic measurement capable of acquiring a two-dimensional image close to visual observation.
  • the purpose is to provide the device.
  • the optical characteristic measurement optical system is an optical characteristic measurement optical system for measuring reflected light from a measurement target, and measures a common measurement target. It includes one optical system and a second optical system, and the first optical system has a first lens group having a positive power, a second lens group having a positive power, an aperture aperture, and a first optical system in order from the object side. It is a relay optical system that consists of one image pickup element and an illumination light source and forms an intermediate image formation between the first lens group and the second lens group.
  • the measurement target is arranged in the vicinity of the incident pupil of the aperture aperture, the first image pickup element is arranged in conjugation with the object side infinity, and the second optical system is arranged on the object side. In this order, it consists of a first lens group common to the first optical system, a third lens group having positive power, and a second image pickup element, and the second image pickup element is arranged at a position conjugate with the measurement target. .. Assuming that the distance in the optical axis direction from the image-side near-axis focal length of the first lens group to the aperture stop is ⁇ p and the focal length of the first lens group is f1, the following conditional expression (1) is satisfied. -1.0 ⁇ p / f1 ⁇ 3.0 ...
  • the first optical system and the second optical system share the first lens group, and the optical characteristic measurement optical system further has an optical element that deflects the optical axis toward the image side of the first lens group, and the optical axis is It is branched in two directions by an optical element, the first optical system is arranged in the first direction of the two directions, and the second optical system is arranged in the second direction of the two directions.
  • the optical axis is deflected by another optical element and another optical element that deflects the optical axis between the intermediate image formation by the first lens group and the first image pickup element. It has a light source capable of emitting an arbitrary minute region on the surface at a position conjugate with the other object side infinity.
  • ⁇ and Y ( ⁇ ) are substantially proportional when the angle of the light ray reflected from the center of the measurement target is ⁇ and the position where the light ray reaches the image pickup element is Y ( ⁇ ).
  • the maximum image height is Ymax and the maximum ray angle is ⁇ max
  • the following conditional equation (3) -0.1 ⁇ (Y ( ⁇ max / 2) -Ymax / 2) / Ymax ⁇ 0.1 ... (3) is satisfied.
  • the optical characteristic measuring optical system is arranged around the aperture stop of the second optical system and further has a light source capable of illuminating the measurement target when the measurement target is imaged by the second optical system.
  • the back focus of the first optical system is fB and the effective diameter of the most image side surface of the second lens group is ⁇ 2, fB / ⁇ 2 satisfies the following conditional expression (4).
  • the optical characteristic measuring device includes the optical characteristic measuring optical system according to any one of the above, and has a function of measuring the optical characteristic of the measurement target and a function of imaging the measurement target.
  • an optical characteristic measurement optical system and an optical characteristic measurement device capable of acquiring a two-dimensional image close to visual observation in addition to measuring the optical characteristics of a measurement target.
  • the optical characteristic measurement optical system includes a first optical system that captures an infinite conjugate image and a second optical system that captures a conjugate image to be measured.
  • the first optical system and the second optical system share the first lens group and are arranged on two optical axes separated by an optical element that deflects the optical axis to form one measurement optical system. Will be done.
  • the aperture stop of the second optical system is placed near the intermediate image formation. Specifically, assuming that the distance in the optical axis direction from the image-side near-axis focal length of the first lens group to the aperture stop is ⁇ p and the focal length of the first lens group is f1, ⁇ p / f1 is based on the following conditional expression. Fulfill.
  • the aperture diaphragm of the second optical system is arranged in the vicinity of the intermediate image formation, so that the observation angle of the second optical system can be made close to parallel. Therefore, in addition to measuring the optical characteristics of the measurement target, it is possible to acquire a two-dimensional image close to visual observation.
  • the optical characteristic measurement optical system is an optical characteristic measurement optical system for measuring reflected light from a measurement target, and is a first optical characteristic measurement optical system for measuring a common measurement target.
  • the first optical system includes an optical system and a second optical system, and the first optical system has a first lens group having a positive power, a second lens group having a positive power, an aperture aperture, and a first lens group in order from the object side.
  • It is a relay optical system that consists of an image pickup element and an illumination light source and forms an intermediate image formation between the first lens group and the second lens group.
  • the measurement target is arranged in the vicinity of the incident pupil of the aperture aperture, the first image pickup element is arranged in conjugation with the object side infinity, and the second optical system is arranged from the object side.
  • the first lens group common to the first optical system, the third lens group having positive power, and the second image pickup element are composed of the second image pickup element, and the second image pickup element is arranged at a position conjugate with the measurement target.
  • the first optical system and the second optical system share the first lens group, and the optical characteristic measurement optical system further has an optical element that deflects the optical axis toward the image side of the first lens group, and the optical axis is It is branched in two directions by an optical element, the first optical system is arranged in the first direction of the two directions, and the second optical system is arranged in the second direction of the two directions.
  • the first optical system Since the first optical system has the above configuration, the first image pickup element is arranged at an infinitely conjugated position, and the first optical system is on the image pickup surface of the first image pickup element according to the angle of light rays incident from the object side. It is an optical system in which the coordinates are determined (that is, a Fourier transform optical system). Due to this characteristic, the angular distribution of the reflected light from the measurement target can be imaged on the image pickup surface of the first image pickup device. Further, by arranging the aperture diaphragm so that the entrance pupil is located closest to the object and arranging the measurement target in the vicinity of the entrance pupil, it is possible to measure substantially the same position for all reflection angles.
  • the first lens group forms an image of a very wide-angle ray of about 80 °, it is difficult to correct various aberrations, particularly curvature of field and distortion that increase with a wide angle, only with the first lens group.
  • the relay optical system as the first optical system, the aberration generated in the first lens group can be corrected by the second lens group, so that good aberration performance can be maintained.
  • the second image sensor can capture a two-dimensional image to be measured.
  • the aperture diaphragm By arranging the aperture diaphragm so as to satisfy the conditional equation (1), the aperture diaphragm can be arranged near the intermediate image formation position and the entrance pupil is separated from the measurement target. Therefore, the second optical system has a configuration close to the object-side telecentric. It becomes.
  • the main ray In an object-side telecentric optical system, the main ray is parallel to the optical axis on the measurement target side.
  • first optical system and the second optical system share the first lens group, the optical axis is branched into two by an optical element, and the first optical system and the second optical system are arranged in each direction. Allows two different optical systems to be configured for the same measurement position. As a result, the reflection angle distribution and the two-dimensional image can be acquired simultaneously or continuously, so that the measurement can be performed in a short time.
  • the value ⁇ p / f1 satisfies the following conditional expression (1)'. -0.8 ⁇ p / f1 ⁇ 2.0 ... (1)' More preferably, the value ⁇ p / f1 satisfies the following conditional expression (1)''.
  • the optical characteristic measurement optical system is composed of an intermediate image formation by the first lens group, another optical element that deflects the optical axis between the first image pickup elements, and another optical element thereof.
  • a light source capable of emitting an arbitrary minute region on the surface may be provided at a position conjugate with the other object-side infinity whose optical axis is deflected.
  • the optical system on the object side of the additional optical element also functions as an illumination optical system, there is no need to separately provide an optical system for illumination. Therefore, the optical system can be simplified. Furthermore, by having a light source capable of emitting light from an arbitrary minute region on the surface at a position conjugate with the infinity on the object side, it is possible to illuminate the measurement target with parallel light having an angle according to the position to emit light. can. As a result, the measurement target can be illuminated at an arbitrary angle, so that the BRDF can be measured in more detail.
  • the value L / ⁇ 1 satisfies the following conditional expression (2)'. 0.5 ⁇ L / ⁇ 1 ⁇ 2.5 ... (2)' More preferably, the value L / ⁇ 1 satisfies the following conditional expression (2)''.
  • the angle distribution of the reflection from the image sensor is formed as the illuminance distribution on the image sensor as it is. Therefore, the correction calculation for converting the position on the image sensor into the angle of reflection from the measurement target becomes easy.
  • the optical characteristic measurement optical system has a light source that is arranged around the aperture stop of the second optical system and can illuminate the measurement target when the measurement target is imaged by the second optical system. You may. As a result, the entire imaging range of the second optical system can be uniformly illuminated, so that an image closer to visual observation can be obtained.
  • fB / ⁇ 2 can satisfy the following conditional expression (4). preferable.
  • conditional expression (4) is a condition for arranging the optical element between the intermediate image pickup by the first lens group and the first image pickup element and in the back focus portion of the first optical system.
  • fB / ⁇ 2 satisfies the following conditional expression (4)'. 1.3 ⁇ fB / ⁇ 2 ⁇ 2.8 ... (4)' More preferably, fB / ⁇ 2 satisfies the following conditional expression (4)''.
  • the optical characteristic measuring device includes the optical characteristic measuring optical system according to any one of the above, and has a function of measuring the optical characteristic of the measurement target and a function of imaging the measurement target. .. This makes it possible to acquire a two-dimensional image close to visual observation in addition to measuring the optical characteristics (reflection characteristics) of the measurement target. In addition, it is possible to avoid increasing the size of the optical characteristic measuring device.
  • FIGS. 1 to 6B are diagrams showing the configurations of optical characteristic measurement optical systems according to the first to third embodiments, respectively.
  • the first to third embodiments are referred to as "EX1", “EX2”, and "EX3", respectively.
  • the optical characteristic measurement optical system according to the first embodiment includes a first optical system 11 and a second optical system 12 for measuring a common measurement target M.
  • FIG. 2A is a diagram showing only the first optical system 11
  • FIG. 2B is a diagram showing only the second optical system 12.
  • the first optical system 11 includes a first lens group G1 having a positive power, a second lens group G2 having a positive power, an aperture stop S1, and a first image pickup element (not shown) in order from the object side. And an illumination light source (not shown).
  • the first lens group G1 is composed of lenses L1, L2, and L3.
  • the second lens group G2 includes lenses L4, L5, L6, L7, L8, and L9.
  • the first optical system 11 is a relay optical system that forms an intermediate image formation between the first lens group G1 and the second lens group G2.
  • the aperture stop S1 is arranged in the second lens group G2.
  • the entrance pupil of the aperture stop S1 is directed toward the object side of the first lens group G1.
  • the measurement target M is arranged in the vicinity of the aperture stop S1.
  • the first image sensor is arranged conjugate with the object side at infinity. Therefore, the first optical system 11 is an optical system that captures an infinite conjugated image of the measurement target M.
  • the image plane IM1 is shown instead of the first image sensor (the same applies to the figures described below).
  • a light-shielding diaphragm S3 is provided in front of the first image sensor (image surface IM1).
  • the second optical system 12 includes a first lens group G1, a third lens group G3 having a positive power, and a second image pickup element (not shown) in order from the object side.
  • the first lens group G1 is common to the first optical system 11.
  • the third lens group G3 includes a lens L11, a lens L12, and an L13.
  • the second image sensor is arranged at a position conjugate with the measurement target. Therefore, the second optical system captures the conjugate image of the measurement target M.
  • the image plane IM2 is shown instead of the second image sensor.
  • the aperture stop S1 is arranged in the vicinity of the intermediate imaging position so as to satisfy the conditional expression (1).
  • the aperture stop S1 is located closer to the object (measurement target M) than the intermediate imaging position.
  • the second optical system 12 has a configuration close to that of the object-side telecentric lens. Therefore, it is possible to acquire a two-dimensional image that is close to visual observation.
  • the optical characteristic measurement optical system further includes an optical element 5 that deflects the optical axis AX on the image side of the first lens group G1. Specifically, the optical element 5 branches the optical axis AX into an optical axis AX1 and an optical axis AX2. The direction of the optical axis AX1 and the direction of the optical axis AX2 are different from each other.
  • the first optical system 11 is arranged in the direction of the optical axis AX1
  • the second optical system 12 is arranged in the direction of the optical axis AX2.
  • the type of the optical element 5 is not particularly limited, and for example, a beam splitter, a half mirror, or the like can be applied as the optical element 5.
  • the optical element 5 may be a mirror having the size of the opening of the aperture stop S1 and being removable. This mirror is removed during imaging by the first optical system 11 and inserted during imaging by the second optical system 12.
  • the optical element 5 may be a beam splitter having an antireflection film formed in the size of the opening of the aperture diaphragm S1.
  • the aperture stop S1 and the optical element 5 are shown at substantially the same position, but when the optical element 5 is a mirror that can be inserted and removed, the movement of the optical element 5 is not hindered.
  • the optical element 5 and the aperture stop S1 may be arranged therein.
  • the optical characteristic measurement optical system may further include an optical element 7 and a light source 8.
  • the optical element 7 deflects the optical axis AX1 between the intermediate image formation by the first lens group G1 and the first image pickup element.
  • the optical axis AX3 corresponds to an optical axis obtained by deflecting the optical axis AX1 by the optical element 7.
  • the position of the light source 8 is a position conjugate with the object-side infinity on the optical axis AX1 (that is, the optical axis AX3) deflected by the optical element 7.
  • the optical element 7 and the light source 8 are shown in FIG. 1, it should be noted that their positions in FIG. 1 may not always be accurate.
  • the optical element 7 may be, for example, a beam splitter, a half mirror, or the like.
  • the light source 8 is an element capable of emitting light from an arbitrary minute region on the surface. Although not particularly limited, for example, the light source 8 may be a microdisplay.
  • the optical characteristic measurement optical system may further include a light source 9 that is arranged around the aperture stop S1 of the second optical system 12 and illuminates the measurement target at the time of imaging of the measurement target by the second optical system 12.
  • the light source 9 may be, for example, ring illumination.
  • the light source 9 uniformly illuminates the entire imaging range of the second optical system 12. Although the light source 9 is shown in FIG. 1, it should be noted that the position of the light source 9 in FIG. 1 may not always be accurate.
  • the above configuration makes it possible to acquire a two-dimensional image close to visual observation in addition to measuring the optical characteristics of the measurement target.
  • the optical characteristic measurement optical system according to the second embodiment includes a first optical system 11 and a second optical system 12 for measuring a common measurement target M.
  • 4A is a diagram showing only the first optical system 11
  • FIG. 4B is a diagram showing only the second optical system 12.
  • the first optical system 11 includes a first lens group G1 having a positive power, a second lens group G2 having a positive power, an aperture stop S1, and a first image pickup element (not shown) in order from the object side. And an illumination light source (not shown).
  • the first lens group G1 is composed of lenses L1, L2, L3, and L4.
  • the second lens group G2 includes lenses L5, L6, L7, L8, and L9. In this respect, the second embodiment is different from the first embodiment.
  • the aperture stop S1 is arranged in the vicinity of the intermediate imaging position so as to satisfy the conditional expression (1).
  • the aperture stop S1 is located closer to the object (measurement target M) than the intermediate imaging position.
  • the aperture stop S1 is located closer to the object (measurement target M) than the optical element 5.
  • the second embodiment is different from the first embodiment.
  • the aperture stop S1 is arranged so as to satisfy the conditional expression (1), the second optical system 12 has a configuration close to the object-side telecentric, as in the first embodiment. Therefore, even in the second embodiment, it is possible to acquire a two-dimensional image close to visual observation.
  • the aperture stop S1 and the optical element 5 are inserted and removed together. At the time of imaging of the first optical system 11, both the aperture stop S1 and the optical element 5 are retracted from the optical path. At the time of imaging of the second optical system 12, both the aperture stop S1 and the optical element 5 are inserted.
  • a beam splitter or a mirror can be used for the optical element 5.
  • the other configurations of the optical characteristic measurement optical system according to the second embodiment are the same as the configurations of the optical characteristic measurement optical system according to the first embodiment, the following description will not be repeated. Also in the second embodiment, in addition to measuring the optical characteristics of the measurement target, it is possible to acquire a two-dimensional image close to visual observation. Although the optical element 7, the light source 8, and the light source 9 are not shown in FIG. 3, these elements can be added to the optical characteristic measurement optical system according to the second embodiment.
  • the optical characteristic measurement optical system according to the third embodiment includes a first optical system 11 and a second optical system 12 for measuring a common measurement target M.
  • FIG. 6A is a diagram showing only the first optical system 11
  • FIG. 6B is a diagram showing only the second optical system 12.
  • the first optical system 11 includes a first lens group G1 having a positive power, a second lens group G2 having a positive power, an aperture stop S1, and a first image pickup element (not shown) in order from the object side. And an illumination light source (not shown). Similar to the first embodiment, the first lens group G1 includes lenses L1, L2, and L3. The second lens group G2 includes lenses L4, L5, L6, L7, L8, and L9.
  • the opening formed in the housing 15 of the first optical system 11 is used as the aperture stop S1.
  • the aperture stop S1 is arranged in the vicinity of the intermediate imaging position so as to satisfy the conditional expression (1).
  • the aperture stop S1 is located on the image side of the intermediate image formation position.
  • the aperture stop S1 is arranged on the image side of the optical element 5.
  • the aperture stop S1 is arranged on the second optical axis (optical axis AX2).
  • the third embodiment is different from the first and second embodiments.
  • the second optical system 12 has a configuration close to the object-side telecentric, as in the first embodiment and the second embodiment. Become.
  • a beam splitter or a removable mirror can be used for the optical element 5.
  • the optical element 5 is a removable mirror, the optical element 5 is retracted from the optical path when the first optical system 11 is imaged, and is inserted when the second optical system 12 is imaged.
  • the other configurations of the optical characteristic measurement optical system according to the third embodiment are the same as the configurations of the optical characteristic measurement optical system according to the first embodiment and the second embodiment. The explanation will not be repeated. Also in the third embodiment, in addition to measuring the optical characteristics of the measurement target, it is possible to acquire a two-dimensional image close to visual observation. Although the optical element 7, the light source 8, and the light source 9 are not shown in FIG. 5, these elements can be added to the optical characteristic measurement optical system according to the third embodiment.
  • Examples 1 to 3 (EX1 to 3) given here are numerical examples corresponding to the above-mentioned first to third embodiments, respectively, and are lens configuration diagrams showing the first to third embodiments.
  • FIGGS. 1 to 6B show the corresponding optical configurations (lens arrangement, lens shape, etc.) of Examples 1 to 3, respectively.
  • FIG. 7 is a schematic configuration diagram of an optical characteristic measuring device provided with an optical characteristic measuring optical system according to an embodiment of the present invention.
  • the optical characteristic measuring device 100 includes an optical characteristic measuring optical system 101.
  • the optical characteristic measurement optical system 101 includes a first optical system 11 and a second optical system 12.
  • the optical characteristic measurement optical system 101 can have the configuration of the optical system according to any one of the first to third embodiments.
  • the first optical system 11 includes a lighting device 3, a first lens group G1, an aperture diaphragm S1, a second lens group G2, and a first image pickup element 21.
  • the lighting device 3 is a device for illuminating the measurement target M. Further, the first optical system 11 can have the optical element 7 and the light source 8 shown in FIG.
  • the second optical system 12 has a first lens group G1, a third lens group G3, an optical element 5, and a second image pickup element 22.
  • the first lens group G1 is common to the first optical system 11 and the second optical system 12.
  • the second optical system 12 may have the light source 9 shown in FIG.
  • the optical characteristic measuring device 100 further includes a control unit 50, an input unit 51, an output unit 52, an IF (interface) unit 53, and a storage unit 54.
  • the control unit 50 controls the optical characteristic measuring device 100.
  • the control unit 50 processes an image signal from the first image sensor 21.
  • the control unit 50 obtains the BRDF.
  • the control unit 50 processes the image signal from the second image pickup device 22 to generate the image data of the measurement target M.
  • the input unit 51 is connected to the control unit 50.
  • the input unit 51 is a device that inputs various commands such as a command for instructing the measurement target M and various setting information necessary for measuring the optical characteristics to the optical characteristic measuring device 100.
  • the output unit 52 is connected to the control unit 50.
  • the output unit 52 outputs commands and data controlled by the control unit 50 and input by the input unit 51. Further, the output unit 52 outputs the optical characteristics (reflection characteristics) of the measurement target M measured by the optical characteristic measuring device 100.
  • the output unit 52 may be a display or a printer.
  • the output unit 52 displays an image of the measurement target M taken by the optical characteristic measuring device 100 in addition to the optical characteristics of the measurement target M.
  • the input unit 51 and the output unit 52 may be realized by a touch panel.
  • the IF unit 53 is connected to the control unit 50.
  • the IF unit 53 is a circuit controlled by the control unit 50 to input / output data to / from an external device.
  • Data communication standards are not limited to specific standards.
  • the storage unit 54 is connected to the control unit 50.
  • the storage unit 54 is controlled by the control unit 50 to store various predetermined programs and various predetermined data.
  • the program stored in the storage unit 54 can include, for example, a control program for controlling each unit of the optical characteristic measuring device 100, an arithmetic program for calculating a reflection characteristic (BRDF), and the like.
  • the storage unit 54 stores, for example, the image data of the measurement target M acquired by the first image sensor 21 and the image data of the measurement target M acquired by the second image sensor 22.
  • BRDF may be measured for each wavelength.
  • the lighting device 3 (light source) included in the first optical system 11 can emit light in a plurality of different spectra.
  • the first image sensor 21 of the first optical system 11 may be able to separately receive a plurality of different spectra.
  • the first image sensor 21 may be, for example, an RGB sensor. Filters having a plurality of different bandpass characteristics may be arranged in front of the first image sensor 21 so as to be interchangeable.
  • a surface light source may be adopted as the lighting device 3 of the first optical system 11, and a microlens array may be arranged on the object side of the surface light source.
  • a microdisplay can be used as a light source in the lighting device 3.
  • the microdisplay has a wide light distribution characteristic, only a part of the light emission amount of the microdisplay can be used as illumination light.
  • the optical element 5 for branching the optical axes of the first optical system 11 and the second optical system 12 may be a mirror arranged so as to be insertable and removable on the optical axis.
  • the optical element 5 that splits the optical axis is, for example, a half mirror having a reflectance of 50%
  • the amount of illumination light is halved by the half mirror.
  • the amount of received light is 1/4 or less of the amount of illumination light. Therefore, the optical element 5 may be a mirror that can be inserted and removed on the optical axis as described above.
  • the mirror is removed when the BRDF is measured by the first optical system 11, and the mirror is inserted when the image is taken by the second optical system 12.
  • the loss of the amount of light as described above can be substantially eliminated, so that the amount of illumination light and the amount of received light can be increased.
  • the lighting device 3 may be configured to simultaneously emit light from light emitting positions corresponding to a plurality of angles.
  • the lighting device 3 may be a surface light emitting element configured to simultaneously emit light from an arbitrary plurality of regions on the light emitting surface.
  • the reflection characteristics of the plurality of angles can be measured at the same time. As a result, the measurement time can be shortened.
  • optical characteristic measuring device 100 a configuration for performing measurement corresponding to various industrial standards may be adopted.
  • the lighting device 3 may be configured to emit light at all positions corresponding to a lighting angle of 45 ° in all azimuth angles.
  • the illuminating device 3 will perform circular illumination of 45 °.
  • the same measurement as the color measurement of the 45 ° c: 0 ° geometry defined in the standard such as JIS becomes possible.
  • optical characteristic measuring device 101 optical characteristic measuring optical system, AX, AX1, AX2, AX3 optical axis, G1 first lens group, G2 second lens group, G3 first 3 lens groups, IM1 image plane, L1 to L9, L11, L12 lenses, M measurement target.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Lenses (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
PCT/JP2021/018221 2020-07-02 2021-05-13 光学特性測定光学系および光学特性測定装置 Ceased WO2022004147A1 (ja)

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JP2022533715A JPWO2022004147A1 (https=) 2020-07-02 2021-05-13
US18/013,439 US12298240B2 (en) 2020-07-02 2021-05-13 Optical system for measuring optical characteristics and device for measuring optical characteristics
EP21833381.3A EP4177659A4 (en) 2020-07-02 2021-05-13 OPTICAL SYSTEM FOR MEASURING OPTICAL PROPERTIES AND DEVICE FOR MEASURING OPTICAL PROPERTIES
JP2025007831A JP7708341B2 (ja) 2020-07-02 2025-01-20 光学特性測定光学系および光学特性測定装置

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JP2001500986A (ja) * 1996-09-19 2001-01-23 モレキュラー・ダイナミックス・インコーポレイテッド 微小画像結像システム
JP2005195685A (ja) * 2003-12-26 2005-07-21 Unitec:Kk 反射光学系、拡散光源測定装置の反射光学系および拡散光源測定装置ならびにその測定方法
WO2006050978A2 (en) 2004-11-11 2006-05-18 Eldim Sa Optical device for determining the in-focus position of a fourier optics set-up
JP2017530394A (ja) * 2014-09-29 2017-10-12 エーエスエムエル ホールディング エヌ．ブイ． 高開口数対物レンズシステム

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JP3812051B2 (ja) * 1997-04-30 2006-08-23 株式会社ニコン 反射屈折投影光学系
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JP6305098B2 (ja) * 2014-02-19 2018-04-04 キヤノン株式会社 ズーム光学系及びそれを有する画像投射装置
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JPH1031154A (ja) * 1996-04-04 1998-02-03 Boc Group Inc:The 物体の反射率の測定用光学システム
JP2001500986A (ja) * 1996-09-19 2001-01-23 モレキュラー・ダイナミックス・インコーポレイテッド 微小画像結像システム
JP2005195685A (ja) * 2003-12-26 2005-07-21 Unitec:Kk 反射光学系、拡散光源測定装置の反射光学系および拡散光源測定装置ならびにその測定方法
WO2006050978A2 (en) 2004-11-11 2006-05-18 Eldim Sa Optical device for determining the in-focus position of a fourier optics set-up
JP2017530394A (ja) * 2014-09-29 2017-10-12 エーエスエムエル ホールディング エヌ．ブイ． 高開口数対物レンズシステム

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Title
See also references of EP4177659A4

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US20230288330A1 (en) 2023-09-14
JP7708341B2 (ja) 2025-07-15
JP2025063237A (ja) 2025-04-15
EP4177659A4 (en) 2023-12-27
EP4177659A1 (en) 2023-05-10
US12298240B2 (en) 2025-05-13
JPWO2022004147A1 (https=) 2022-01-06

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