WO2022000978A1

WO2022000978A1 - Aerosol mass spectrometry sampling device having wide particle size range, and aerosol mass spectrometer

Info

Publication number: WO2022000978A1
Application number: PCT/CN2020/132875
Authority: WO
Inventors: 卓泽铭; 杨俊林; 吕金诺; 蔡伟光; 杜旭兵; 苏柏江; 谢芹惠; 黄清
Original assignee: 广州禾信仪器股份有限公司
Priority date: 2020-06-30
Filing date: 2020-11-30
Publication date: 2022-01-06
Also published as: CN113871285B; CN113871285A

Abstract

An aerosol mass spectrometry sampling device having a wide particle size range, and an aerosol mass spectrometer. The aerosol mass spectrometry sampling device comprises: an aerosol delivery tube (10), a first aerosol focusing member (21), a first buffer tube (22), a critical orifice plate (30), a buffer cavity (40), a second buffer tube (51), a second aerosol focusing member (52), a third buffer tube (61), and a third aerosol focusing member (62). The first aerosol focusing member (21) and the first buffer tube (22) are disposed in front of the critical orifice plate (30). The first aerosol focusing member (21) pre-focuses sample aerosol before the sample aerosol enters the critical orifice plate (30), so that the loss caused by relatively large particles in the sample aerosol colliding with the critical orifice plate (30) when passing through a center hole of the critical orifice plate (30) can be avoided, and the transmission performance of particles having a particle size of 1 μm or more can be greatly improved, thus the particle size range of the particles passing through the center hole of the critical orifice plate (30) is increased. In this way, the detection of aerosol particles having a wide particle size range can be achieved. Furthermore, the deposition and adhesion effects of large particles on the critical orifice plate (30) are also greatly reduced, and the frequency of instrument maintenance and cleaning is reduced.

Description

Aerosol mass spectrometer sampling device and aerosol mass spectrometer with wide particle size range

technical field

The invention relates to an aerosol mass spectrometer sampling device, in particular to an aerosol mass spectrometry sampling device and an aerosol mass spectrometer with a wide particle size range.

Background technique

The composition and sources of atmospheric particulate matter in the Earth system are very complex, and understanding the chemical mixing state of particulate matter, especially individual particles, and atmospheric processes is crucial for accurately quantifying the environmental, climatic, and health effects of aerosols. Single particle mass spectrometer (SPMS) has the outstanding advantage of being able to quickly analyze the size and chemical composition of single particles online. Since its introduction in the 1990s, it has been widely used in aerosol sources and transformations and environmental climate effects. A large part of the minerals, sea salt and bioaerosols in the atmospheric environment are in the coarse particle mode (particle size > 3 μm), which is mainly limited by the inertial wall loss of coarse particles by the sampling interface of SPMS, and the detection of particles below 10 μm by SPMS The ability is relatively limited, especially for coarse particles above 3 microns. In this way, the traditional sampling interface cannot effectively detect aerosol particles with a wide particle size range (particle size of 0-10 μm), which limits the application ability of SPMS in biological aerosols, atmospheric particle source analysis, atmospheric aging mechanism, etc. .

SUMMARY OF THE INVENTION

Based on this, it is necessary to overcome the defects of the prior art and provide an aerosol mass spectrometer sampling device and aerosol mass spectrometer with a wide particle size range, which can realize the detection of aerosol particles with a wide particle size range.

The technical solution is as follows: an aerosol mass spectrometry sampling device with a wide particle size range, the aerosol mass spectrometry sampling device with a wide particle size range comprising:

an aerosol delivery tube, a first aerosol focusing member, a first buffer tube and a critical orifice plate, one end of the aerosol delivery tube is an aerosol injection port, and the other end of the aerosol delivery tube is connected to the first an aerosol focusing element is connected, the first aerosol focusing element is connected with the first buffer tube, and the first buffer tube is connected with the critical orifice plate;

a buffer cavity, a second buffer tube, a second aerosol focusing member, a third buffer tube and a third aerosol focusing member, one end of the buffer cavity is communicated with the critical orifice plate, and the other end of the buffer cavity communicated with the second buffer tube, the second buffer tube is connected with the second aerosol focusing member, the second aerosol focusing member is connected with the third buffer tube, the third buffer tube The third aerosol focusing member is connected to the third aerosol focusing member, and the third aerosol focusing member is used for sending the aerosol particles into the mass spectrometry vacuum detection mechanism.

The above-mentioned aerosol mass spectrometry sampling device with a wide particle size range, when working, the sample aerosol enters the aerosol delivery pipe through the aerosol injection port, and the aerosol delivery pipe sends the sample aerosol to the first aerosol focusing The first aerosol focusing element focuses the sample aerosol to reduce the beam width of the sample aerosol; the sample aerosol with reduced beam width enters the first buffer tube, and the sample aerosol passes through the first buffer tube. Then, the sample aerosol enters the critical orifice plate, which can greatly reduce the air pressure of the sample aerosol and improve the vacuum degree; the sample aerosol after the reduced air pressure enters the buffer chamber for buffering The transition makes the gas and particles run stably; then it enters the second aerosol focusing member through the second buffer tube, and the second aerosol focusing member performs focusing processing on the sample aerosol to reduce the beam width of the sample aerosol; The sample aerosol with reduced beam width continues to enter the third buffer tube, and after being buffered by the third buffer tube, it enters the third aerosol focusing member, and the third aerosol focusing member is focused and accelerated and then sent to the mass spectrometer vacuum detection in the institution. Wherein, since the first aerosol focusing member and the first buffer tube are arranged before the critical orifice plate, the first aerosol focusing member pre-focuses the sample aerosol before entering the critical orifice plate, so as to avoid sample gas The loss caused by the larger particles in the sol colliding with the critical orifice plate when passing through the central hole of the critical orifice plate greatly improves the transmission performance of particles with a particle size above 1 μm, so that the particles passing through the central hole of the critical orifice plate The particle size range is increased, so that the detection of aerosol particles with a wide particle size range can be realized. In addition, the influence of deposition and adhesion of large particles on the critical orifice plate is greatly reduced, and the frequency of instrument maintenance and cleaning is reduced.

In one embodiment, the first aerosol focusing element is an aerodynamic lens or a nozzle; the number of the first aerosol focusing element is two or more, the first buffer tube is two or more, two or more The first aerosol focusing member is arranged in a one-to-one correspondence with two or more of the first buffer tubes, and the first aerosol focusing member and the first buffer tube are alternately communicated and arranged between the aerosol delivery tube and the first buffer tube. between the critical orifice plates.

In one embodiment, the first aerosol focusing member is an aerodynamic lens, and the apertures of the two or more first aerosol focusing members are sequentially reduced according to the transport direction of the sample aerosol.

In one embodiment, there are two first aerosol focusing members, the aperture of the first aerosol focusing member close to the aerosol delivery tube is 2 mm to 3 mm, and the other first aerosol focusing member has a diameter of 2 mm to 3 mm. The aperture of the first aerosol focusing element is 1.5 mm to 2.5 mm; the thickness of the orifice plate of the first aerosol focusing element is 0.4 mm to 0.6 mm; the inner diameter of the first buffer tube is 4 mm to 6 mm, and the length of the first buffer tube is 4 mm to 6 mm. is not less than 10mm.

In one embodiment, there are two or more second aerosol focusing members, and the second aerosol focusing members are aerodynamic lenses or nozzles; the second buffer tubes are more than two, two or more The second aerosol focusing member is arranged in a one-to-one correspondence with two or more of the second buffer tubes, and the second buffer tubes and the second aerosol focusing member are alternately arranged in the buffer cavity and the first buffer chamber. between the three buffer tubes.

In one embodiment, there are seven second aerosol focusing members, and the seven second aerosol focusing members are sequentially divided into a first-stage aerodynamic lens, a second-stage aerodynamic lens and a second-stage aerosol according to the moving path of the sample aerosol. Aerodynamic lens, third-stage aerodynamic lens, fourth-stage aerodynamic lens, fifth-stage aerodynamic lens, sixth-stage aerodynamic lens, and seventh-stage aerodynamic lens; said first stage The aerodynamic lens has an aperture range of 17mm to 22mm, the second stage aerodynamic lens has an aperture range of 12mm to 16mm, the third stage aerodynamic lens has an aperture range of 9mm to 13mm, and the fourth stage aerodynamic lens has an aperture range of 9mm to 13mm. The aperture range of the first stage aerodynamic lens is 6mm to 11mm, the aperture range of the fifth stage aerodynamic lens is 5mm to 8mm, the aperture range of the sixth stage aerodynamic lens is 4mm to 6mm, and the aperture range of the sixth stage aerodynamic lens is 4mm to 6mm. The aperture range of the seventh-stage aerodynamic lens is 3mm to 5mm; the thickness of the orifice plate of the second aerosol focusing element is 0.4mm to 0.6mm; the inner diameter of the second buffer tube is 25mm to 50mm, the second The length of the buffer tube is not less than 20mm.

In one embodiment, the wide particle size range aerosol mass spectrometry sampling device further comprises a lens sleeve, two or more of the second aerosol focusing elements, two or more of the second buffer tubes, the The third buffer tube and the third aerosol focusing element are both disposed in the lens sleeve, one end of the lens sleeve is fixedly disposed on the buffer cavity, and the other end of the lens sleeve is disposed with a A locking member, the locking member and the third aerosol focusing member are in position limit conflict, and the second buffer tube close to the buffer cavity is in position limit conflict with the buffer cavity.

In one embodiment, the third aerosol focusing member is a stepped nozzle or a conical nozzle; the inner diameter of the third buffer tube is the same as the inner diameter of the second buffer tube, and the third aerosol focusing member is The inner diameter of the buffer cavity is not less than 150mm, and the length of the buffer cavity is not less than 200mm.

In one embodiment, the aerosol mass spectrometry sampling device with a wide particle size range further includes a buffer pressure plate, an exhaust mechanism and a cone-shaped separation member disposed between the critical orifice plate and the buffer cavity; The buffer pressure plate is provided with a conical first buffer channel, the buffer pressure plate is fixedly arranged on the critical orifice plate, the first buffer channel is communicated with the central hole of the critical orifice plate, and the first buffer pressure plate is connected to the central hole of the critical orifice plate. The tip of the buffer channel is close to the central hole of the critical orifice plate; the conical separator is provided with a conical second buffer channel, and the tip of the second buffer channel is communicated with the central hole of the critical orifice plate , the other end of the second buffer channel is communicated with the buffer cavity, the tip of the conical separation piece protrudes into the first buffer channel, and the side wall of the tapered separation piece is connected to the first buffer channel. The inner wall of a buffer channel is provided with an exhaust interval; the exhaust mechanism is respectively connected with the buffer pressure plate and the conical separation member, the exhaust mechanism is provided with an exhaust flow channel, and the exhaust interval is connected with the The exhaust runners communicate with each other.

An aerosol mass spectrometer, including the aerosol mass spectrometer sampling device with a wide particle size range, and a mass spectrometry vacuum detection mechanism, the third aerosol focusing member sends aerosol particles to the mass spectrometry vacuum detection in the institution.

The aerosol mass spectrometer with the wide particle size range mentioned above, when working, the sample aerosol enters the aerosol delivery pipe through the aerosol injection port, and the aerosol delivery pipe sends the sample aerosol to the first aerosol focusing element, The first aerosol focusing element performs focusing processing on the sample aerosol to reduce the beam width of the sample aerosol; the sample aerosol with the reduced beam width enters the first buffer tube, and the sample aerosol passes through the first buffer tube. Buffer treatment; then, the sample aerosol enters the critical orifice plate, which can greatly reduce the air pressure of the sample aerosol and improve the vacuum degree; the sample aerosol with reduced air pressure enters the buffer chamber for buffer transition, Make the gas and particles run stably; then enter the second aerosol focusing part through the second buffer tube, and the second aerosol focusing part focuses the sample aerosol to reduce the beam width of the sample aerosol; The reduced sample aerosol continues to enter the third buffer tube, and after being buffered by the third buffer tube, enters the third aerosol focusing piece, and the third aerosol focusing piece is accelerated and then sent to the mass spectrometer vacuum detection mechanism . Wherein, since the first aerosol focusing member and the first buffer tube are arranged before the critical orifice plate, the first aerosol focusing member pre-focuses the sample aerosol before entering the critical orifice plate, so as to avoid sample gas The loss caused by the larger particles in the sol colliding with the critical orifice plate when passing through the central hole of the critical orifice plate greatly improves the transmission performance of particles with a particle size above 1 μm, so that the particles passing through the central hole of the critical orifice plate The particle size range is increased, so that the detection of aerosol particles with a wide particle size range can be realized. In addition, the influence of deposition and adhesion of large particles on the critical orifice plate is greatly reduced, and the frequency of instrument maintenance and cleaning is reduced.

Description of drawings

The accompanying drawings constituting a part of the present application are used to provide further understanding of the present invention, and the exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention.

In order to illustrate the technical solutions in the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the accompanying drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, other drawings can also be obtained from these drawings without creative effort.

1 is a structural diagram of an aerosol mass spectrometry sampling device with a wide particle size range according to an embodiment of the present invention;

2 is a structural diagram of the aerosol injection port to the critical orifice plate of the aerosol mass spectrometry sampling device with a wide particle size range according to an embodiment of the present invention;

3 is a structural diagram of a critical orifice plate to a buffer chamber of a wide particle size range aerosol mass spectrometry sampling device according to an embodiment of the present invention;

4 is a structural diagram of a buffer chamber to a third aerosol focusing member of the wide particle size range aerosol mass spectrometry sampling device according to an embodiment of the present invention;

5 is a graph showing the relationship between particle transmission efficiency and particle size of the aerosol mass spectrometry sampling device with a wide particle size range according to an embodiment of the present invention and the traditional aerosol mass spectrometry sampling device;

6 is a motion trajectory diagram of a sample aerosol of the wide particle size range aerosol mass spectrometry sampling device according to an embodiment of the present invention;

FIG. 7 is a motion trajectory diagram of the sample aerosol from the aerosol injection port to the cone-shaped separation member of the wide particle size range aerosol mass spectrometry sampling device according to an embodiment of the present invention.

10. Aerosol delivery tube; 11. Aerosol injection port; 21. First aerosol focusing element; 22. First buffer tube; 30. Critical orifice plate; 40. Buffer chamber; 51, Second buffer tube; 52, second aerosol focusing element; 521, first stage aerodynamic lens; 522, second stage aerodynamic lens; 523, third stage aerodynamic lens; 524, fourth stage aerodynamic lens; 525 , fifth-stage aerodynamic lens; 526, sixth-stage aerodynamic lens; 527, seventh-stage aerodynamic lens; 61, third buffer tube; 62, third aerosol focusing element; 70, lens tube ; 71, locking piece; 81, buffer pressure plate; 811, first buffer channel; 82, exhaust mechanism; 821, exhaust flow channel; 83, conical separation piece; 831, second buffer channel; 84, exhaust interval; 91, connecting piece; 92, sealing ring.

detailed description

In order to make the above objects, features and advantages of the present invention more clearly understood, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed below.

Referring to FIG. 1, FIG. 1 shows a structural diagram of an aerosol mass spectrometry sampling device with a wide particle size range according to an embodiment of the present invention. An embodiment of the present invention provides an aerosol mass spectrometry sampling device with a wide particle size range. The aerosol mass spectrometry sampling device with a wide particle size range includes: an aerosol delivery tube 10 , a first aerosol focusing member 21 , a first The buffer tube 22 , the critical orifice plate 30 , the buffer cavity 40 , the second buffer tube 51 , the second aerosol focusing member 52 , the third buffer tube 61 and the third aerosol focusing member 62 . One end of the aerosol delivery tube 10 is the aerosol injection port 11 , and the other end of the aerosol delivery tube 10 is connected to the first aerosol focusing member 21 . The first aerosol focusing element 21 is connected to the first buffer tube 22 , and the first buffer tube 22 is connected to the critical orifice plate 30 . One end of the buffer cavity 40 is communicated with the critical orifice plate 30 , and the other end of the buffer cavity 40 is communicated with the second buffer tube 51 . The second buffer tube 51 is connected to the second aerosol focusing member 52 . The second aerosol focusing member 52 is connected to the third buffer tube 61 . The third buffer tube 61 is connected to the third aerosol focusing member 62 . The third aerosol focusing member 62 is used for sending the aerosol particles into the mass spectrometry vacuum detection mechanism.

The above-mentioned aerosol mass spectrometry sampling device with a wide particle size range, during operation, the sample aerosol enters the aerosol delivery pipe 10 through the aerosol injection port 11, and the aerosol delivery pipe 10 sends the sample aerosol into the first. The aerosol focusing member 21, the first aerosol focusing member 21 performs focusing processing on the sample aerosol to reduce the beam width of the sample aerosol (please refer to FIG. 6, FIG. 6 illustrates a wide particle size range according to an embodiment of the present invention The movement trajectory diagram of the sample aerosol of the aerosol mass spectrometry sampling device, in which the shaded part in Figure 6 is the movement trajectory of the sample aerosol, and the width of the shaded part is the beam width of the sample aerosol); The sample aerosol enters the first buffer tube 22, and the sample aerosol is buffered by the first buffer tube 22; then, the sample aerosol enters the critical orifice plate 30, and the critical orifice plate 30 can greatly reduce the air pressure of the sample aerosol The sample aerosol with reduced air pressure enters the buffer chamber 40 for buffer transition, so that the gas and particles run stably; and then enter the second aerosol focusing member 52 through the second buffer tube 51 , the second aerosol focusing element 52 performs focusing processing on the sample aerosol to reduce the beam width of the sample aerosol; the sample aerosol with reduced beam width continues to enter the third buffer tube 61 and passes through the third buffer tube 61 After buffering, it enters into the third aerosol focusing member 62, and the third aerosol focusing member 62 is focused and accelerated and then sent to the mass spectrometry vacuum detection mechanism.

Wherein, since the first aerosol focusing member 21 and the first buffer tube 22 are arranged before the critical orifice plate 30, the first aerosol focusing member 21 pre-focuses the sample aerosol before entering the critical orifice plate 30, Therefore, the loss caused by the collision of the larger particles in the sample aerosol with the critical orifice plate 30 when passing through the central hole of the critical orifice plate 30 can be avoided, and the transmission performance of particles with a particle size of more than 1 μm can be greatly improved. The particle size range of the central hole of the orifice plate 30 is increased, so that the detection of aerosol particles with a wide particle size range can be realized. Frequency of maintenance cleaning. Please refer to FIG. 5 . FIG. 5 is a schematic diagram showing the relationship between particle transmission efficiency and particle size of the aerosol mass spectrometry sampling device with a wide particle size range according to an embodiment of the present invention and the traditional aerosol mass spectrometry sampling device. 5 It can be seen that the traditional aerosol mass spectrometry sampling device has high transmission performance for particles with a particle size range of 0.1 μm to 1 μm, and greatly reduces the transmission performance for particles above 1 μm; The transmission efficiency is higher at 1 μm to 10 μm.

Please refer to FIG. 2 . FIG. 2 is a schematic diagram illustrating the structure from the aerosol injection port 11 to the critical orifice plate 30 of the wide particle size range aerosol mass spectrometry injection device according to an embodiment of the present invention. Further, the first aerosol focusing member 21 is an aerodynamic lens or a nozzle. There are more than two first aerosol focusing members 21 and more than two first buffer tubes 22 . The focusing member 21 and the first buffer tube 22 are alternately communicated and arranged between the aerosol delivery tube 10 and the critical orifice plate 30 . In this way, the two or more first aerosol focusing elements 21 can focus the sample aerosol more than twice, so that the pre-focusing effect of the sample aerosol before entering the critical orifice plate 30 is better.

As an example, the first aerosol focusing members 21 are aerodynamic lenses, and the number of the first aerosol focusing members 21 is two, three or four, and the number is not limited.

As an example, the first aerosol focusing members 21 are nozzles, and the number of the first aerosol focusing members 21 is two, three or four, and the number is not limited.

Further, the first aerosol focusing member 21 is an aerodynamic lens, and the apertures of the two or more first aerosol focusing members 21 are sequentially reduced according to the conveying direction of the sample aerosol.

Please refer to FIG. 2 again, further, there are two first aerosol focusing members 21 , the aperture of the first aerosol focusing member 21 close to the aerosol delivery tube 10 is 2 mm to 3 mm, and the other first aerosol focusing member 21 has a diameter of 2 mm to 3 mm. The hole diameter of the piece 21 is 1.5mm to 2.5mm. The thickness of the orifice plate of the first aerosol focusing member 21 is 0.4 mm to 0.6 mm. The inner diameter of the first buffer tube 22 is 4 mm to 6 mm, and the length of the first buffer tube 22 is not less than 10 mm. In this way, 100% of the sample aerosol particles with a particle size range of 0.1 μm to 10 μm can pass through the critical orifice plate 30 , thereby avoiding the loss caused by the collision of the sample aerosol particles with the critical orifice plate 30 , and also preventing the sample aerosol particles from depositing on the critical orifice plate 30 . The critical orifice plate 30 causes frequent cleaning of the critical orifice plate 30 .

It should be noted that any adjacent two of the aerosol delivery tube 10 , the first aerosol focusing member 21 , the first buffer tube 22 and the critical orifice plate 30 may be of an integrated structure, that is, integrally formed. Of course, it can also be a separate structure, and is assembled to form a whole through, for example, the connecting piece 91 .

Specifically, in this embodiment, please refer to FIG. 2 again, and the first aerosol focusing member 21 and the first buffer tube 22 shown in the figure are taken as an example for description. One of the adjacent first aerosol focusing members 21 is of an integrated structure, and one of the first aerosol focusing members 21 and its adjacent first buffer tube 22 are of a separate structure, and are assembled and connected by a connecting member 91 . Further, in order to ensure the sealing performance, at the same time, a sealing ring 92 is used to set between the connecting surfaces of one of the first aerosol focusing elements 21 and its adjacent first buffer tube 22, so that one of the first aerosol focusing elements 21 is connected to the connecting surface of the first buffer tube 22. The adjacent first buffer tubes 22 are in sealing fit. In addition, the first buffer tube 22 adjacent to the aerosol delivery tube 10 and another aerosol focusing member adjacent to it are of an integrated structure, and the other aerosol focusing member and the other first buffer tube 22 are of a separate structure, and The connecting piece 91 is used for assembly connection. Similarly, in order to ensure the sealing performance, a sealing ring 92 is arranged between the connecting surface of the other aerosol focusing element and the other first buffer tube 22 , so that the other aerosol focusing element and the other first buffer tube 22 are connected to each other. Seal fit. The other first buffer tube 22 and the critical orifice plate 30 can be either a split structure or an integrated structure. The other first buffer tube 22 and the critical orifice plate 30 shown in the figure are of a split structure. A sealing ring 92 is provided between the connecting surface of the first buffer tube 22 and the critical orifice plate 30 to ensure the sealing performance of the other first buffer tube 22 and the critical orifice plate 30 .

Please refer to FIG. 4 . FIG. 4 is a schematic diagram illustrating the structure of the buffer chamber 40 to the third aerosol focusing member 62 of the wide particle size range aerosol mass spectrometry sampling device according to an embodiment of the present invention. Further, there are more than two second aerosol focusing members 52, and the second aerosol focusing members 52 are aerodynamic lenses or nozzles. There are more than two second buffer tubes 51 , two or more second aerosol focusing members 52 are arranged in a one-to-one correspondence with more than two second buffer tubes 51 , and the second buffer tubes 51 and the second aerosol focusing members 52 are alternately arranged in between the buffer cavity 40 and the third buffer tube 61 . In this way, the two or more second aerosol focusing elements 52 can focus the sample aerosol more than twice, so that the sample aerosol has a better focusing effect before entering the mass spectrometer vacuum detection mechanism, and the focused sample aerosol enters smoothly. To the mass spectrometry vacuum detection mechanism for detection work.

It should be noted that, when the number of the second aerosol focusing members 52 is larger, the focusing of a wider range of particle sizes can be achieved, and thus the particle size range of the sample aerosol that can be adapted to be detected is wider.

It should be noted that, the second buffer tube 51 and the second aerosol focusing member 52 may be an integrated structure or a separate structure, which is not limited herein. The third buffer tube 61 and the third aerosol focusing member 62 may be an integrated structure or a separate structure, which is not limited herein.

Please refer to FIG. 4 again, further, there are seven second aerosol focusing members 52 , and the seven second aerosol focusing members 52 are sequentially divided into a first-stage aerodynamic lens 521 , a second-stage aerodynamic lens 521 and a second Stage aerodynamic lens 522, third stage aerodynamic lens 523, fourth stage aerodynamic lens 524, fifth stage aerodynamic lens 525, sixth stage aerodynamic lens 526 and seventh stage aerodynamic lens 527. Specifically, the aperture range of the first stage aerodynamic lens 521 is 17mm to 22mm, the aperture range of the second stage aerodynamic lens 522 is 12mm to 16mm, and the aperture range of the third stage aerodynamic lens 523 is 9mm to 9mm 13mm, the aperture range of the fourth stage aerodynamic lens 524 is 6mm to 11mm, the aperture range of the fifth stage aerodynamic lens 525 is 5mm to 8mm, the aperture range of the sixth stage aerodynamic lens 526 is 4mm to 6mm, The aperture of the seventh stage aerodynamic lens 527 ranges from 3mm to 5mm. The thickness of the aperture plate of the second aerosol focusing member 52 is 0.4 mm to 0.6 mm, and correspondingly, the aperture length of the second aerosol focusing member 52 is 0.4 mm to 0.6 mm. The inner diameter of the second buffer tube 51 is 25 mm to 50 mm, and the length of the second buffer tube 51 is not less than 20 mm.

Referring to FIG. 4 again, further, the wide particle size range aerosol mass spectrometry sampling device further includes a lens sleeve 70 . The two or more second aerosol focusing members 52 , the two or more second buffer tubes 51 , the third buffer tube 61 and the third aerosol focusing member 62 are all disposed in the lens sleeve 70 . One end of the lens sleeve 70 is fixedly arranged on the buffer cavity 40 , and the other end of the lens sleeve 70 is provided with a locking member 71 , the locking member 71 is in limit conflict with the third aerosol focusing member 62 and is close to the buffer cavity. The second buffer tube 51 of the 40 is in limited contact with the buffer cavity 40 . In this way, by incorporating two or more second aerosol focusing members 52 , two or more second buffer tubes 51 , third buffer tubes 61 and third aerosol focusing members 62 into the lens sleeve 70 , it is easy to realize two or more More than one second aerosol focusing member 52 , more than two second buffer tubes 51 , third buffer tubes 61 and third aerosol focusing member 62 are quickly assembled together, and the sealing performance can also be ensured, which is beneficial to the degree of vacuum. In addition, the locking member 71 is, for example, a locking nut, and the locking nut is sleeved on the lens sleeve 70 in a screwing manner, and the assembly and disassembly operations are relatively convenient. Of course, the locking member 71 can also be a locking snap cap, and the locking snap cap is sleeved on the lens sleeve 70 by means of snap connection, and the assembling and dismounting operations are relatively convenient. The locking member 71 may also be fixed on the lens tube 70 by other means, which is not limited herein.

Of course, as an optional implementation, the lens sleeve 70 may not be provided, and the two or more second aerosol focusing elements 52 , the two or more second buffer tubes 51 , the third buffer tubes 61 and the The third aerosol focusing member 62 is assembled together.

Further, one end of the lens sleeve 70 is specifically connected to the buffer cavity 40 through a connecting member 91 , for example. It should be noted that, in order to improve the sealing between one end of the lens sleeve 70 and the buffer cavity 40 , a sealing ring 92 is provided at the connection portion of the lens sleeve 70 and the buffer cavity 40 .

Further, in order to improve the sealing between the end surfaces of two adjacent second buffer tubes 51 , a sealing ring 92 is provided between the end surfaces of two adjacent second buffer tubes 51 .

Please refer to FIG. 4 again. Further, the third aerosol focusing member 62 is a stepped nozzle or a conical nozzle. The inner diameter of the third buffer tube 61 is the same as the inner diameter of the second buffer tube 51 , the third aerosol focusing member 62 and the third buffer tube 61 are of an integrated structure; the inner diameter of the buffer cavity 40 is not less than 150 mm, and the inner diameter of the buffer cavity 40 The length is not less than 200mm.

It should be noted that the diameter of the central hole of the critical orifice plate 30 ranges from 0.1 mm to 0.4 mm. When the diameter of the central hole of the critical orifice plate 30 is smaller, the compressibility of the sample aerosol is stronger, and the ability to reduce the gas pressure of the sample aerosol is stronger, and the particle size range of the passing aerosol particles is correspondingly smaller. In one embodiment, the diameter of the central hole of the critical orifice plate 30 is 0.1 mm. At this time, the critical orifice plate 30 can realize the conversion of the sample aerosol from the atmospheric pressure of 101 kPa to the atmospheric pressure of 100 Pa. The vacuum degree of the sample aerosol at 30 is sufficient to directly enter the buffer chamber 40 .

In this embodiment, the diameter of the central hole of the critical orifice plate 30 is 0.2 mm to 0.3 mm, which can be adapted to pass a wide range of aerosol particles, and can realize the deposition of aerosol particles on the critical orifice plate 30 and The collision loss is less, and the critical orifice plate 30 can realize the conversion of the sample aerosol from the atmospheric pressure of 101kpa to the atmospheric pressure of 2kpa to 3kpa, but the vacuum degree of the sample aerosol coming out of the critical orifice plate 30 is poor. Further, please refer to FIG. 3 . FIG. 3 is a schematic diagram illustrating the structure from the critical orifice plate 30 to the buffer chamber 40 of the wide particle size range aerosol mass spectrometry sampling device according to an embodiment of the present invention. The aerosol mass spectrometry sampling device with a wide particle size range further includes a buffer pressure plate 81 disposed between the critical orifice plate 30 and the buffer cavity 40 , an exhaust mechanism 82 and a cone-shaped separation member 83 . The buffer pressure plate 81 is provided with a conical first buffer channel 811, the buffer pressure plate 81 is fixedly arranged on the critical orifice plate 30, the first buffer channel 811 communicates with the central hole of the critical orifice plate 30, and the tip of the first buffer channel 811 is close to the in the central hole of the critical orifice plate 30 . The conical separator 83 is provided with a conical second buffer channel 831 , the tip of the second buffer channel 831 communicates with the central hole of the critical orifice plate 30 , and the other end of the second buffer channel 831 communicates with the buffer cavity 40 . The tip of the cone-shaped separating member 83 protrudes into the first buffer channel 811 , and an exhaust space 84 is provided between the side wall of the cone-shaped separating member 83 and the inner wall of the first buffer channel 811 . The exhaust mechanism 82 is respectively connected with the buffer pressure plate 81 and the conical separation member 83 .

Please refer to FIG. 3 , FIG. 6 and FIG. 7 . FIG. 7 illustrates the flow of the sample aerosol from the aerosol injection port 11 to the cone-shaped separation member 83 of the aerosol mass spectrometry sampling device with a wide particle size range according to an embodiment of the present invention. Motion trajectory diagram. The sample aerosol expands and expands in the first buffer channel 811, and generates local supersonic motion, so that the aerosol particles generate enough kinetic energy to carry out inertial separation from the excess gas, and sequentially enter the second buffer channel 831 of the conical separation member 83, and the buffer cavity 40 . Among them, the buffer chamber 40 is used to buffer the particle velocity of the sample aerosol, so that the gas and particle motion state is stable. The conical separation member 83 and the buffer cavity 40 have sufficient vacuum degree.

Please refer to FIG. 1 again. In one embodiment, an aerosol mass spectrometer includes a wide particle size range aerosol mass spectrometer sampling device according to any of the above embodiments, a mass spectrometer vacuum detection mechanism, and a third aerosol focusing member. 62 The aerosol particles are fed into the mass spectrometry vacuum detection mechanism.

The above-mentioned aerosol mass spectrometer with a wide particle size range, during operation, the sample aerosol enters the aerosol delivery pipe 10 through the aerosol injection port 11, and the aerosol delivery pipe 10 sends the sample aerosol to the first aerosol. Focusing member 21, the first aerosol focusing member 21 performs focusing processing on the sample aerosol to reduce the beam width of the sample aerosol; the sample aerosol with the reduced beam width enters the first buffer tube 22, and the sample aerosol Buffer treatment is performed through the first buffer tube 22; then, the sample aerosol enters the critical orifice plate 30, and the critical orifice plate 30 can greatly reduce the air pressure of the sample aerosol and improve the vacuum degree; the sample aerosol after the reduced air pressure enters the The buffer transition is carried out in the buffer chamber 40 to make the gas and particles run stably; then it enters the second aerosol focusing member 52 through the second buffer tube 51, and the second aerosol focusing member 52 focuses the sample aerosol. , reduce the beam width of the sample aerosol; the sample aerosol with reduced beam width continues to enter the third buffer tube 61, and after being buffered by the third buffer tube 61, it enters the third aerosol focusing member 62, and the third The aerosol focusing member 62 is focused and accelerated and then sent to the mass spectrometry vacuum detection mechanism. Wherein, since the first aerosol focusing member 21 and the first buffer tube 22 are arranged before the critical orifice plate 30, the first aerosol focusing member 21 pre-focuses the sample aerosol before entering the critical orifice plate 30, Therefore, the loss caused by the collision of the larger particles in the sample aerosol with the critical orifice plate 30 when passing through the central hole of the critical orifice plate 30 can be avoided, and the transmission performance of particles with a particle size of more than 1 μm can be greatly improved. The particle size range of the central hole of the orifice plate 30 is increased, so that the detection of aerosol particles with a wide particle size range can be realized. Frequency of maintenance cleaning.

The technical features of the above embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above embodiments are not described. However, as long as there is no contradiction in the combination of these technical features It is considered to be the range described in this specification.

The above-mentioned embodiments only represent several embodiments of the present invention, and the descriptions thereof are specific and detailed, but should not be construed as a limitation on the scope of the invention patent. It should be pointed out that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can also be made, which all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention should be subject to the appended claims.

In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", " Back, Left, Right, Vertical, Horizontal, Top, Bottom, Inner, Outer, Clockwise, Counterclockwise, Axial , "radial", "circumferential" and other indicated orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the indicated device or Elements must have a particular orientation, be constructed and operate in a particular orientation and are therefore not to be construed as limitations of the invention.

In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature delimited with "first", "second" may expressly or implicitly include at least one of that feature. In the description of the present invention, "plurality" means at least two, such as two, three, etc., unless otherwise expressly and specifically defined.

In the present invention, unless otherwise expressly specified and limited, the terms "installed", "connected", "connected", "fixed" and other terms should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between the two elements, unless otherwise specified limit. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

In the present invention, unless otherwise expressly specified and limited, a first feature "on" or "under" a second feature may be in direct contact between the first and second features, or the first and second features indirectly through an intermediary get in touch with. Also, the first feature being "above", "over" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is level higher than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature has a lower level than the second feature.

It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or an intervening element may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for the purpose of illustration only and do not represent the only embodiment.

Claims

An aerosol mass spectrometry sampling device with a wide particle size range, characterized in that the aerosol mass spectrometry sampling device with a wide particle size range comprises:

an aerosol delivery tube, a first aerosol focusing member, a first buffer tube and a critical orifice plate, one end of the aerosol delivery tube is an aerosol injection port, and the other end of the aerosol delivery tube is connected to the first an aerosol focusing element is connected, the first aerosol focusing element is connected with the first buffer tube, and the first buffer tube is connected with the critical orifice plate;

a buffer cavity, a second buffer tube, a second aerosol focusing member, a third buffer tube and a third aerosol focusing member, one end of the buffer cavity is communicated with the critical orifice plate, and the other end of the buffer cavity communicated with the second buffer tube, the second buffer tube is connected with the second aerosol focusing member, the second aerosol focusing member is connected with the third buffer tube, the third buffer tube The third aerosol focusing member is connected to the third aerosol focusing member, and the third aerosol focusing member is used for sending the aerosol particles into the mass spectrometry vacuum detection mechanism.
The aerosol mass spectrometry sampling device with a wide particle size range according to claim 1, wherein the first aerosol focusing member is an aerodynamic lens or a nozzle; the first aerosol focusing member is two Above, the number of the first buffer tubes is more than two, and the two or more first aerosol focusing members are arranged in a one-to-one correspondence with the two or more first buffer tubes, and the first aerosol focusing members and the The first buffer tubes are alternately communicated and arranged between the aerosol delivery tube and the critical orifice plate.
The aerosol mass spectrometry sampling device with a wide particle size range according to claim 2, wherein the first aerosol focusing member is an aerodynamic lens, and the apertures of more than two first aerosol focusing members are Decrease sequentially according to the transport direction of the sample aerosol.
The aerosol mass spectrometry sampling device with a wide particle size range according to claim 3, wherein the number of the first aerosol focusing members is two, and the first aerosol focusing member is close to the aerosol delivery pipe The aperture of the first aerosol focusing member is 2 mm to 3 mm, and the aperture of the other first aerosol focusing member is 1.5 mm to 2.5 mm; the thickness of the orifice plate of the first aerosol focusing member is 0.4 mm to 0.6 mm; the first buffer The inner diameter of the tube is 4 mm to 6 mm, and the length of the first buffer tube is not less than 10 mm.
The aerosol mass spectrometry sampling device with a wide particle size range according to claim 1, wherein there are more than two second aerosol focusing members, and the second aerosol focusing members are aerodynamic lenses or Nozzle; the number of the second buffer tubes is two or more, and the two or more second aerosol focusing elements are arranged in a one-to-one correspondence with the two or more second buffer tubes, and the second buffer tubes and the second The aerosol focusing elements are alternately arranged between the buffer cavity and the third buffer tube.
The aerosol mass spectrometry sampling device with a wide particle size range according to claim 5, wherein the number of the second aerosol focusing members is seven, and the seven second aerosol focusing members are based on the sample aerosol The moving path is divided into the first-stage aerodynamic lens, the second-stage aerodynamic lens, the third-stage aerodynamic lens, the fourth-stage aerodynamic lens, the fifth-stage aerodynamic lens, and the sixth-stage aerodynamic lens. The first-stage aerodynamic lens has an aperture range of 17mm to 22mm, the second-stage aerodynamic lens has an aperture range of 12mm to 16mm, and the third-stage aerodynamic lens has an aperture range of 12mm to 16mm. The aperture range of the aerodynamic lens is 9mm to 13mm, the aperture range of the fourth stage aerodynamic lens is 6mm to 11mm, the aperture range of the fifth stage aerodynamic lens is 5mm to 8mm, and the aperture range of the sixth stage aerodynamic lens is 5mm to 8mm. The aperture range of the first-stage aerodynamic lens is 4mm to 6mm, and the aperture range of the seventh-stage aerodynamic lens is 3mm to 5mm; the thickness of the orifice plate of the second aerosol focusing piece is 0.4mm to 0.6mm; The inner diameter of the second buffer tube is 25mm to 50mm, and the length of the second buffer tube is not less than 20mm.
The aerosol mass spectrometry sampling device with a wide particle size range according to claim 5, wherein the aerosol mass spectrometry sampling device with a wide particle size range further comprises a lens sleeve, two or more of the second gas The sol focusing element, two or more of the second buffer tubes, the third buffer tube and the third aerosol focusing element are all arranged in the lens sleeve, and one end of the lens sleeve is fixedly arranged in the lens sleeve. On the buffer cavity, the other end of the lens sleeve is provided with a locking piece, and the locking piece is in limited contact with the third aerosol focusing piece, and is close to the second aerosol focusing piece of the buffer cavity. The buffer tube is in position limit conflict with the buffer cavity.
The aerosol mass spectrometry sampling device with a wide particle size range according to claim 7, wherein the third aerosol focusing element is a stepped nozzle or a conical nozzle; the inner diameter of the third buffer tube is the same as that of the third buffer tube. The inner diameter of the second buffer tube is the same, the third aerosol focusing element and the third buffer tube are an integrated structure; the inner diameter of the buffer cavity is not less than 150mm, and the length of the buffer cavity is not less than 200mm .
The aerosol mass spectrometry sampling device with a wide particle size range according to any one of claims 1 to 8, wherein the aerosol mass spectrometry sampling device with a wide particle size range further comprises an aerosol mass spectrometer disposed on the critical orifice plate The buffer pressure plate, the exhaust mechanism and the cone-shaped separation member between the buffer cavity and the buffer pressure plate; the buffer pressure plate is provided with a first buffer channel in the shape of a cone, and the buffer pressure plate is fixedly arranged on the critical orifice plate, so The first buffer channel is communicated with the central hole of the critical orifice plate, and the tip of the first buffer channel is close to the central hole of the critical orifice plate; the conical separator is provided with a conical second buffer The tip of the second buffer channel is communicated with the central hole of the critical orifice plate, the other end of the second buffer channel is communicated with the buffer cavity, and the tip of the conical separator extends into the In the first buffer channel, the side wall of the conical separation member and the inner wall of the first buffer channel are provided with an exhaust interval; the exhaust mechanism is respectively connected with the buffer pressure plate and the conical separation member. , the exhaust mechanism is provided with an exhaust flow channel, and the exhaust interval is communicated with the exhaust flow channel.
An aerosol mass spectrometer, characterized in that it comprises the wide particle size range aerosol mass spectrometer sampling device according to any one of claims 1 to 9, and further comprises a mass spectrometer vacuum detection mechanism, and the third aerosol focuses The device sends the aerosol particles into the mass spectrometry vacuum detection mechanism.