CN113871285B - Aerosol mass spectrum sampling device with wide particle size range and aerosol mass spectrometer - Google Patents
Aerosol mass spectrum sampling device with wide particle size range and aerosol mass spectrometer Download PDFInfo
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- 238000001514 detection method Methods 0.000 claims abstract description 19
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- 238000004949 mass spectrometry Methods 0.000 claims description 19
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N15/1031—Investigating individual particles by measuring electrical or magnetic effects
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/10—Investigating individual particles
- G01N2015/1029—Particle size
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Abstract
The invention relates to an aerosol mass spectrum sampling device with a wide particle size range and an aerosol mass spectrometer, comprising: the aerosol focusing device comprises an aerosol delivery pipe, a first aerosol focusing part, a first buffer pipe, a critical orifice plate, a buffer cavity, a second buffer pipe, a second aerosol focusing part, a third buffer pipe and a third aerosol focusing part. The first aerosol focusing part and the first buffer tube are arranged in front of the critical orifice plate, and the sample aerosol before entering the critical orifice plate is subjected to pre-focusing treatment by the first aerosol focusing part, so that the loss caused by collision of larger particles in the sample aerosol with the critical orifice plate when the larger particles pass through the central hole of the critical orifice plate can be avoided, the transmission performance of the particles with the particle size of more than 1 mu m is greatly improved, the particle size range of the particles passing through the central hole of the critical orifice plate is enlarged, the detection of aerosol particles with a wide particle size range can be realized, in addition, the deposition and adhesion influence of large particles on the critical orifice plate is greatly reduced, and the frequency of instrument maintenance and cleaning is reduced.
Description
Technical Field
The invention relates to an aerosol mass spectrum sampling device, in particular to an aerosol mass spectrum sampling device with a wide particle size range and an aerosol mass spectrometer.
Background
The components and sources of atmospheric particulates in the earth system are very complex, and the knowledge of the chemical mixing state of particulates, particularly single particles, and atmospheric processes is of great importance to accurately quantify the environmental, climatic and health effects of aerosols. Single Particle Mass Spectrometers (SPMS) have the outstanding advantage of being able to rapidly analyze the particle size and chemical composition of individual particles on-line, and have been widely used in aerosol sources and conversion and environmental climate effects since the last 90 th century. Most of minerals, sea salts and bioaerosols in the atmospheric environment are in a coarse particle mode (the particle size is greater than 3 microns), and are mainly limited by the inertial wall collision loss of the sample inlet interface of the SPMS on coarse particles, and the SPMS has a relatively limited capability of detecting particles below 10 microns, especially coarse particles above 3 microns. Thus, the traditional sample injection interface can not effectively detect aerosol particles with a wide particle size range (the particle size is 0-10 mu m), and the application capability of the SPMS in the aspects of bioaerosol, atmospheric particle source analysis, atmospheric aging mechanism and the like is limited.
Disclosure of Invention
Based on this, it is necessary to overcome the defects in the prior art, and provide an aerosol mass spectrometer and an aerosol mass sampling device with a wide particle size range, which can detect aerosol particles with a wide particle size range.
The technical scheme is as follows: a wide particle size range aerosol mass spectrometry sample introduction device, comprising:
the aerosol delivery pipe, the first aerosol focusing part, the first buffer pipe and the critical orifice plate are arranged, one end of the aerosol delivery pipe is an aerosol injection port, the other end of the aerosol delivery pipe is connected with the first aerosol focusing part, the first aerosol focusing part is connected with the first buffer pipe, and the first buffer pipe is connected with the critical orifice plate;
the device comprises a buffer cavity, a second buffer tube, a second aerosol focusing component, a third buffer tube and a third aerosol focusing component, wherein one end of the buffer cavity is communicated with the critical orifice plate, the other end of the buffer cavity is communicated with the second buffer tube, the second buffer tube is connected with the second aerosol focusing component, the second aerosol focusing component is connected with the third buffer tube, the third buffer tube is connected with the third aerosol focusing component, and the third aerosol focusing component is used for sending aerosol particles into a mass spectrum vacuum detection mechanism.
When the wide-particle-size-range aerosol mass spectrum sampling device works, the sample aerosol enters the aerosol conveying pipe through the aerosol sampling port, the aerosol conveying pipe conveys the sample aerosol to the first aerosol focusing part, and the first aerosol focusing part performs focusing treatment on the sample aerosol so as to reduce the beam width of the sample aerosol; the sample aerosol with the reduced beam width enters a first buffer tube, and the sample aerosol is subjected to buffering treatment through the first buffer tube; then, the sample aerosol enters a critical orifice plate, and the critical orifice plate can greatly reduce the air pressure of the sample aerosol and improve the vacuum degree; the sample aerosol with reduced air pressure enters a buffer cavity for buffer transition, so that the gas and particles stably run; then, the sample aerosol enters a second aerosol focusing part through a second buffer tube, and the second aerosol focusing part performs focusing treatment on the sample aerosol to reduce the beam width of the sample aerosol; the sample aerosol with the reduced beam width continuously enters a third buffer tube, and enters a third aerosol focusing part after being buffered by the third buffer tube, and the third aerosol focusing part is focused and accelerated and then sent to a mass spectrum vacuum detection mechanism. The first aerosol focusing part and the first buffer tube are arranged in front of the critical orifice plate, and the sample aerosol before entering the critical orifice plate is subjected to pre-focusing treatment by the first aerosol focusing part, so that the loss caused by collision of larger particles in the sample aerosol with the critical orifice plate when the larger particles pass through the central hole of the critical orifice plate can be avoided, the transmission performance of the particles with the particle size of more than 1 mu m is greatly improved, the particle size range of the particles passing through the central hole of the critical orifice plate is enlarged, the detection of aerosol particles with a wide particle size range can be realized, in addition, the deposition adhesion influence of large particles on the critical orifice plate is greatly reduced, and the frequency of instrument maintenance and cleaning is reduced.
In one embodiment, the first aerosol focusing element is an aerodynamic lens or nozzle; first aerosol focusing piece is more than two, first buffer tube is more than two, more than two first aerosol focusing piece and more than two first buffer tube one-to-one sets up, first aerosol focusing piece with first buffer tube intercommunication sets up in turn the aerosol conveyer pipe with between the critical orifice plate.
In one embodiment, the first aerosol focusing element is an aerodynamic lens, and the aperture of two or more first aerosol focusing elements decreases sequentially according to the conveying direction of the sample aerosol.
In one embodiment, the number of the first aerosol focusing parts is two, the aperture of the first aerosol focusing part close to the aerosol delivery pipe is 2mm to 3mm, and the aperture of the other first aerosol focusing part is 1.5mm to 2.5mm; the thickness of the pore plate of the first aerosol focusing part is 0.4mm to 0.6mm; the first buffer tube has an inner diameter of 4mm to 6mm, and a length of not less than 10mm.
In one embodiment, the number of the second aerosol focusing members is two or more, and the second aerosol focusing members are aerodynamic lenses or nozzles; the second buffer tubes are more than two, more than two the second aerosol focusing parts and more than two the second buffer tubes are arranged in a one-to-one correspondence manner, and the second buffer tubes and the second aerosol focusing parts are alternately arranged between the buffer cavity and the third buffer tubes.
In one embodiment, the number of the second aerosol focusing elements is seven, and the seven second aerosol focusing elements are sequentially divided into a first-stage aerodynamic lens, a second-stage aerodynamic lens, a third-stage aerodynamic lens, a fourth-stage aerodynamic lens, a fifth-stage aerodynamic lens, a sixth-stage aerodynamic lens and a seventh-stage aerodynamic lens according to the moving path of the sample aerosol; the aperture range of the first stage aerodynamic lens is 17mm to 22mm, the aperture range of the second stage aerodynamic lens is 12mm to 16mm, the aperture range of the third stage aerodynamic lens is 9mm to 13mm, the aperture range of the fourth stage aerodynamic lens is 6mm to 11mm, the aperture range of the fifth stage aerodynamic lens is 5mm to 8mm, the aperture range of the sixth stage aerodynamic lens is 4mm to 6mm, and the aperture range of the seventh stage aerodynamic lens is 3mm to 5mm; the thickness of the pore plate of the second aerosol focusing part is 0.4mm to 0.6mm; the second buffer tube has an inner diameter of 25mm to 50mm and a length of not less than 20mm.
In one of them embodiment, wide particle diameter range's aerosol mass spectrum sampling device still includes the lens sleeve, more than two second aerosol focus spare, more than two the second buffer tube third buffer tube reaches third aerosol focus spare all set up in the lens sleeve, the telescopic one end of lens is fixed set up in on the buffering cavity, the telescopic other end of lens is provided with the retaining member, the retaining member with the spacing conflict of third aerosol focus spare, be close to in the buffering cavity the second buffer tube with the spacing conflict of buffering cavity.
In one embodiment, the third aerosol focusing element is a stepped nozzle or a conical nozzle; the inner diameter of the third buffer tube is the same as that of the second buffer tube, and the third aerosol focusing member and the third buffer tube are of an integrated structure; the inner diameter of the buffer cavity is not less than 150mm, and the length of the buffer cavity is not less than 200mm.
In one embodiment, the wide particle size range aerosol mass spectrometry sample injection device further comprises a buffer pressure plate, an exhaust mechanism and a conical separation piece, wherein the buffer pressure plate, the exhaust mechanism and the conical separation piece are arranged between the critical orifice plate and the buffer cavity; the buffer pressing plate is provided with a first conical buffer channel, the buffer pressing plate is fixedly arranged on the critical orifice plate, the first buffer channel is communicated with the central hole of the critical orifice plate, and the tip end of the first buffer channel is close to the central hole of the critical orifice plate; the conical separating piece is provided with a conical second buffer channel, the tip of the second buffer channel is communicated with the central hole of the critical orifice plate, the other end of the second buffer channel is communicated with the buffer cavity, the tip of the conical separating piece extends into the first buffer channel, and the side wall of the conical separating piece and the inner wall of the first buffer channel are provided with an exhaust interval; the exhaust mechanism is respectively connected with the buffer pressing plate and the conical separating piece, an exhaust channel is arranged on the exhaust mechanism, and the exhaust interval is communicated with the exhaust channel.
The aerosol mass spectrometer comprises the wide-particle-size-range aerosol mass spectrum sampling device and a mass spectrum vacuum detection mechanism, wherein aerosol particles are sent into the mass spectrum vacuum detection mechanism by the third aerosol focusing piece.
When the wide-particle-size-range aerosol mass spectrometer works, the sample aerosol enters the aerosol conveying pipe through the aerosol sample inlet, the aerosol conveying pipe conveys the sample aerosol to the first aerosol focusing part, and the first aerosol focusing part carries out focusing treatment on the sample aerosol so as to reduce the beam width of the sample aerosol; the sample aerosol with the reduced beam width enters a first buffer tube, and the sample aerosol is subjected to buffering treatment through the first buffer tube; then, the sample aerosol enters a critical orifice plate, and the critical orifice plate can greatly reduce the air pressure of the sample aerosol and improve the vacuum degree; the sample aerosol with reduced air pressure enters a buffer cavity for buffer transition, so that the gas and particles stably run; then the sample aerosol enters a second aerosol focusing part through a second buffer tube, and the second aerosol focusing part performs focusing treatment on the sample aerosol to reduce the beam width of the sample aerosol; the sample aerosol with the reduced beam width continuously enters a third buffer tube, and enters a third aerosol focusing part after being buffered by the third buffer tube, and the third aerosol focusing part is accelerated to be focused and then sent to a mass spectrum vacuum detection mechanism. The first aerosol focusing part and the first buffer tube are arranged in front of the critical orifice plate, and the sample aerosol before entering the critical orifice plate is subjected to pre-focusing treatment by the first aerosol focusing part, so that the loss caused by collision of larger particles in the sample aerosol with the critical orifice plate when the larger particles pass through the central hole of the critical orifice plate can be avoided, the transmission performance of the particles with the particle size of more than 1 mu m is greatly improved, the particle size range of the particles passing through the central hole of the critical orifice plate is enlarged, the detection of aerosol particles with a wide particle size range can be realized, in addition, the deposition adhesion influence of large particles on the critical orifice plate is greatly reduced, and the frequency of instrument maintenance and cleaning is reduced.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification.
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of an aerosol mass spectrometer sampling apparatus with a wide particle size range according to an embodiment of the present invention;
fig. 2 is a structural diagram of an aerosol sample inlet to a critical orifice plate of an aerosol mass spectrometry sample injection device with a wide particle size range according to an embodiment of the present invention;
fig. 3 is a structural diagram from a critical orifice plate to a buffer chamber of an aerosol mass spectrometry sample injection device with a wide particle size range according to an embodiment of the present invention;
fig. 4 is a structural diagram of a buffer chamber to a third aerosol focusing member of an aerosol mass spectrometry sampling device with a wide particle size range according to an embodiment of the present invention;
FIG. 5 is a graph of particle transmission efficiency versus particle size for a wide particle size range of an aerosol mass spectrometer sampling device according to an embodiment of the present invention;
FIG. 6 is a graph of a sample aerosol motion trace of an aerosol mass spectrometer sampling device with a wide particle size range according to an embodiment of the present invention;
fig. 7 is a diagram of a movement trace of a sample aerosol from an aerosol injection port to a cone-shaped separating member of an aerosol mass spectrometer device with a wide particle size range according to an embodiment of the invention.
10. An aerosol delivery tube; 11. an aerosol sample inlet; 21. a first aerosol focusing member; 22. a first buffer tube; 30. critical orifice plates; 40. a buffer cavity; 51. a second buffer tube; 52. a second aerosol focusing member; 521. a first stage aerodynamic lens; 522. a second stage aerodynamic lens; 523. a third stage aerodynamic lens; 524. a fourth stage aerodynamic lens; 525. a fifth stage aerodynamic lens; 526. a sixth stage aerodynamic lens; 527. a seventh stage aerodynamic lens; 61. a third buffer tube; 62. a third aerosol focusing member; 70. a lens sleeve; 71. a locking member; 81. a buffer pressing plate; 811. a first buffer channel; 82. an exhaust mechanism; 821. an exhaust flow passage; 83. a conical separator; 831. a second buffer channel; 84. an exhaust interval; 91. a connecting member; 92. and (5) sealing rings.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanying figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
Referring to fig. 1, fig. 1 is a block diagram illustrating a sampling apparatus for aerosol mass spectrometry with a wide particle size range according to an embodiment of the present invention. An embodiment of the present invention provides an aerosol mass spectrometry sampling apparatus with a wide particle size range, where the aerosol mass spectrometry sampling apparatus with a wide particle size range includes: the aerosol delivery tube 10, the first aerosol focusing member 21, the first buffer tube 22, the critical orifice plate 30, the buffer cavity 40, the second buffer tube 51, the second aerosol focusing member 52, the third buffer tube 61, and the third aerosol focusing member 62. One end of the aerosol delivery pipe 10 is an aerosol sample inlet 11, and the other end of the aerosol delivery pipe 10 is connected with the first aerosol focusing component 21. The first aerosol focusing element 21 is attached to a first buffer tube 22, and the first buffer tube 22 is attached to a critical orifice plate 30. One end of the buffer cavity 40 is communicated with the critical orifice plate 30, and the other end of the buffer cavity 40 is communicated with the second buffer tube 51. A second buffer tube 51 is connected to a second aerosol focusing element 52. The second aerosol focusing element 52 is connected to a third buffer tube 61. A third buffer tube 61 is connected to a third aerosol focusing element 62. The third aerosol focusing member 62 is used to feed aerosol particles into the mass spectrometric vacuum detection mechanism.
In the above aerosol mass spectrum sampling device with a wide particle size range, when the sampling device works, a sample aerosol enters the aerosol delivery pipe 10 through the aerosol injection port 11, the aerosol delivery pipe 10 delivers the sample aerosol to the first aerosol focusing element 21, and the first aerosol focusing element 21 focuses the sample aerosol to reduce the beam width of the sample aerosol (please refer to fig. 6, fig. 6 illustrates a movement track diagram of the sample aerosol of the aerosol mass spectrum sampling device with a wide particle size range according to an embodiment of the present invention, where a shaded portion in fig. 6 is a movement track of the sample aerosol, and a width of the shaded portion is a beam width of the sample aerosol); the sample aerosol with the reduced beam width enters the first buffer tube 22, and the sample aerosol is buffered by the first buffer tube 22; then, the sample aerosol enters the critical orifice plate 30, the critical orifice plate 30 can greatly reduce the air pressure of the sample aerosol, and the vacuum degree is improved; the sample aerosol with reduced air pressure enters the buffer cavity 40 for buffer transition, so that the gas and particles stably run; then, the sample aerosol enters the second aerosol focusing element 52 through the second buffer tube 51, and the second aerosol focusing element 52 focuses the sample aerosol to reduce the beam width of the sample aerosol; the sample aerosol with the reduced beam width continuously enters the third buffer tube 61, enters the third aerosol focusing member 62 after being buffered by the third buffer tube 61, and is sent to the mass spectrum vacuum detection mechanism after being focused and accelerated by the third aerosol focusing member 62.
Because the first aerosol focusing element 21 and the first buffer tube 22 are arranged before the critical orifice plate 30, the first aerosol focusing element 21 performs pre-focusing treatment on the sample aerosol before entering the critical orifice plate 30, so that loss caused by collision of larger particles in the sample aerosol with the critical orifice plate 30 when the larger particles pass through the central hole of the critical orifice plate 30 can be avoided, the transmission performance of the particles with the particle size of more than 1 μm can be greatly improved, the particle size range of the particles passing through the central hole of the critical orifice plate 30 is increased, thus the aerosol particles with a wide particle size range can be detected, in addition, the deposition and adhesion influence of large particles on the critical orifice plate 30 is greatly reduced, and the frequency of maintenance and cleaning of an instrument is reduced. Referring to fig. 5, fig. 5 is a graph illustrating a relationship between particle transmission efficiency and particle size of an aerosol mass spectrometer sample injection device with a wide particle size range according to an embodiment of the present invention and a graph illustrating the relationship between particle transmission efficiency and particle size of a conventional aerosol mass spectrometer sample injection device, as can be seen from fig. 5, the conventional aerosol mass spectrometer sample injection device has a high transmission performance for particles with a particle size range of 0.1 μm to 1 μm, and a greatly reduced transmission performance for particles with a particle size of more than 1 μm; whereas the transmission efficiency is higher for particle sizes in the range of 1 μm to 10 μm in the present application.
Referring to fig. 2, fig. 2 is a schematic diagram illustrating a structure from an aerosol sample inlet 11 to a critical orifice plate 30 of an aerosol mass spectrometer sample injection device with a wide particle size range according to an embodiment of the present invention. Further, the first aerosol focusing member 21 is an aerodynamic lens or a nozzle. The number of the first aerosol focusing parts 21 is more than two, the number of the first buffer tubes 22 is more than two, the more than two first aerosol focusing parts 21 and the more than two first buffer tubes 22 are arranged in a one-to-one correspondence manner, and the first aerosol focusing parts 21 and the first buffer tubes 22 are alternately communicated and arranged between the aerosol conveying pipe 10 and the critical orifice plate 30. Therefore, the two or more first aerosol focusing elements 21 realize focusing on the sample aerosol for more than two times, so that the pre-focusing effect of the sample aerosol before entering the critical orifice plate 30 is better.
As an example, the first aerosol focusing element 21 is an aerodynamic lens, and the number of the first aerosol focusing elements 21 is two, three or four, but not limited to these.
As an example, the first aerosol focusing member 21 is a nozzle, and the first aerosol focusing member 21 is two, three or four, without limitation.
Further, the first aerosol focusing element 21 is an aerodynamic lens, and the aperture of the two or more first aerosol focusing elements 21 decreases sequentially according to the conveying direction of the sample aerosol.
Referring to fig. 2, further, the first aerosol focusing elements 21 are two, the aperture of the first aerosol focusing element 21 close to the aerosol delivery tube 10 is 2mm to 3mm, and the aperture of the other first aerosol focusing element 21 is 1.5mm to 2.5mm. The aperture plate of the first aerosol focusing member 21 has a thickness of 0.4mm to 0.6mm. The first buffer tube 22 has an inner diameter of 4mm to 6mm, and the first buffer tube 22 has a length of not less than 10mm. Therefore, 100% of sample aerosol particles with the particle size range of 0.1-10 μm can pass through the critical orifice plate 30, loss caused by collision of the sample aerosol particles and the critical orifice plate 30 is avoided, and frequent cleaning of the critical orifice plate 30 due to deposition of the sample aerosol particles on the critical orifice plate 30 can also be avoided.
It should be noted that any adjacent two of the aerosol delivery tube 10, the first aerosol focusing element 21, the first buffer tube 22 and the critical orifice plate 30 may be of an integral structure, that is, they are integrally formed. Of course, it may be a separate structure and assembled into a single body by, for example, the connector 91.
Specifically, in the present embodiment, please refer to fig. 2 again, which illustrates an example that the two first aerosol focusing elements 21 and the two first buffer tubes 22 are illustrated in the figure, the aerosol delivery tube 10 and one of the adjacent first aerosol focusing elements 21 are an integrated structure, and one of the first aerosol focusing elements 21 and the adjacent first buffer tube 22 are a split structure, and are assembled and connected by using the connecting element 91. Further, in order to ensure the sealing performance, a sealing ring 92 is disposed between the connection surface of one of the first aerosol focusing elements 21 and the adjacent first buffer tube 22, so that one of the first aerosol focusing elements 21 and the adjacent first buffer tube 22 are in sealing fit. In addition, the first buffer tube 22 close to the aerosol delivery tube 10 is of an integrated structure with another adjacent aerosol focusing member, and the other aerosol focusing member is of a split structure with another first buffer tube 22, and is assembled and connected by using a connecting member 91. Similarly, to ensure the sealing performance, a sealing ring 92 is disposed between the connection surface of the other aerosol focusing element and the other first buffer tube 22, so that the other aerosol focusing element is in sealing engagement with the other first buffer tube 22. The other first buffer tube 22 and the critical orifice plate 30 may be a split structure or an integrated structure, the other first buffer tube 22 and the critical orifice plate 30 illustrated in the drawing are split structures, and a sealing ring 92 is arranged between a connection surface of the other first buffer tube 22 and the critical orifice plate 30 to ensure the sealing property of the other first buffer tube 22 and the critical orifice plate 30.
Referring to fig. 4, fig. 4 is a schematic diagram illustrating a structure of a buffer cavity 40 to a third aerosol focusing member 62 of an aerosol mass spectrometer sampling apparatus with a wide particle size range according to an embodiment of the present invention. Further, the number of the second aerosol focusing elements 52 is two or more, and the second aerosol focusing elements 52 are aerodynamic lenses or nozzles. The number of the second buffer tubes 51 is two or more, the two or more second aerosol focusing elements 52 are disposed in one-to-one correspondence with the two or more second buffer tubes 51, and the second buffer tubes 51 and the second aerosol focusing elements 52 are alternately disposed between the buffer cavity 40 and the third buffer tubes 61. Therefore, the second aerosol focusing parts 52 realize more than two times of focusing on the sample aerosol, so that the focusing effect of the sample aerosol before entering the mass spectrum vacuum detection mechanism is better, and the focused sample aerosol smoothly enters the mass spectrum vacuum detection mechanism for detection.
It should be noted that when the number of the second aerosol focusing members 52 is larger, focusing of a wider range of particle sizes can be achieved, and thus, the wider range of particle sizes of the sample aerosol to be detected can be adapted.
The second buffer tube 51 and the second aerosol focusing element 52 may be of an integral structure or a separate structure, and are not limited herein. The third buffer tube 61 and the third aerosol focusing member 62 may be of an integral structure or a separate structure, and are not limited herein.
Referring to fig. 4, the number of the second aerosol focusing elements 52 is seven, and the seven second aerosol focusing elements 52 are sequentially divided into a first-stage aerodynamic lens 521, a second-stage aerodynamic lens 522, a third-stage aerodynamic lens 523, a fourth-stage aerodynamic lens 524, a fifth-stage aerodynamic lens 525, a sixth-stage aerodynamic lens 526, and a seventh-stage aerodynamic lens 527 according to the moving path of the sample aerosol. Specifically, the aperture of the first stage aerodynamic lens 521 is in the range of 17mm to 22mm, the aperture of the second stage aerodynamic lens 522 is in the range of 12mm to 16mm, the aperture of the third stage aerodynamic lens 523 is in the range of 9mm to 13mm, the aperture of the fourth stage aerodynamic lens 524 is in the range of 6mm to 11mm, the aperture of the fifth stage aerodynamic lens 525 is in the range of 5mm to 8mm, the aperture of the sixth stage aerodynamic lens 526 is in the range of 4mm to 6mm, and the aperture of the seventh stage aerodynamic lens 527 is in the range of 3mm to 5mm. The aperture plate thickness of the second aerosol focusing member 52 is 0.4mm to 0.6mm, and correspondingly, the aperture length of the second aerosol focusing member 52 is 0.4mm to 0.6mm. The second buffer tube 51 has an inner diameter of 25mm to 50mm and the second buffer tube 51 has a length of not less than 20mm.
Referring to fig. 4, further, the wide particle size range aerosol mass spectrometer sampling device further includes a lens sleeve 70. Two or more second aerosol focusing elements 52, two or more second buffer tubes 51, a third buffer tube 61 and a third aerosol focusing element 62 are all disposed in the lens sleeve 70. One end of the lens sleeve 70 is fixedly arranged on the buffer cavity 40, the other end of the lens sleeve 70 is provided with a locking member 71, the locking member 71 is in limit contact with the third aerosol focusing member 62, and the second buffer tube 51 close to the buffer cavity 40 is in limit contact with the buffer cavity 40. Thus, by installing the two or more second aerosol focusing elements 52, the two or more second buffer tubes 51, the third buffer tubes 61 and the third aerosol focusing elements 62 into the lens sleeve 70, the two or more second aerosol focusing elements 52, the two or more second buffer tubes 51, the third buffer tubes 61 and the third aerosol focusing elements 62 can be assembled together quickly, the sealing performance can be ensured, and the vacuum degree is facilitated. The locking member 71 is, for example, a lock nut, and the lock nut is screwed to the lens sleeve 70, so that the locking member can be easily attached and detached. Of course, the locking member 71 may also be a locking snap cap, and the locking snap cap is sleeved on the lens sleeve 70 in a snap-fit manner, so that the assembling and disassembling operations are easy. The locking member 71 may be fixed to the lens sleeve 70 by other methods, which are not limited herein.
Of course, as an alternative embodiment, two or more second aerosol focusing elements 52, two or more second buffer tubes 51, a third buffer tube 61 and a third aerosol focusing element 62 may be assembled together by a connecting element 91 without providing a lens sleeve 70.
Further, one end of the lens sleeve 70 is connected to the buffer chamber 40, for example, by a connector 91. In order to improve the sealing property between one end of the lens sleeve 70 and the buffer chamber 40, a seal ring 92 is provided at a connection portion between the lens sleeve 70 and the buffer chamber 40.
Further, in order to improve the sealing property between the end surfaces of the two adjacent second buffer tubes 51, a seal ring 92 is provided between the end surfaces of the two adjacent second buffer tubes 51.
Referring to fig. 4, further, the third aerosol focusing element 62 is a stepped nozzle or a conical nozzle. The inner diameter of the third buffer tube 61 is the same as that of the second buffer tube 51, and the third aerosol focusing element 62 and the third buffer tube 61 are of an integrated structure; the inner diameter of the buffer cavity 40 is not less than 150mm, and the length of the buffer cavity 40 is not less than 200mm.
It should be noted that the hole diameter of the central hole of the critical orifice plate 30 ranges from 0.1mm to 0.4mm. When the aperture of the central hole of the critical orifice 30 is smaller, the compression capacity to the sample aerosol is stronger, the capacity of reducing the air pressure of the sample aerosol is stronger, and the particle size range of the aerosol particles is correspondingly smaller. In one embodiment, the aperture of the central hole of the critical orifice plate 30 is 0.1mm, and the critical orifice plate 30 can convert the sample aerosol from 101kpa to 100pa, and the vacuum degree of the sample aerosol passing through the critical orifice plate 30 with the aperture size is enough to directly enter the buffer cavity 40.
In this embodiment, the aperture of the central hole of the critical orifice plate 30 is 0.2mm to 0.3mm, which is suitable for a wider range of particle sizes of aerosol particles, and can realize less deposition and collision loss of aerosol particles on the critical orifice plate 30, the critical orifice plate 30 can realize that the sample aerosol is converted from an atmospheric pressure of 101kpa to an atmospheric pressure of 2kpa to 3kpa, however, the vacuum degree of the sample aerosol coming out from the critical orifice plate 30 is poor. Further, referring to fig. 3, fig. 3 illustrates a structure diagram of a critical orifice plate 30 to a buffer cavity 40 of an aerosol mass spectrometry sampling apparatus with a wide particle size range according to an embodiment of the present invention. The wide particle size range aerosol mass spectrum sampling device further comprises a buffer pressure plate 81, an exhaust mechanism 82 and a conical separating piece 83 which are arranged between the critical orifice plate 30 and the buffer cavity 40. The buffer pressing plate 81 is provided with a first buffer channel 811 in a conical shape, the buffer pressing plate 81 is fixedly arranged on the critical orifice plate 30, the first buffer channel 811 is communicated with the central hole of the critical orifice plate 30, and the tip end of the first buffer channel 811 is close to the central hole of the critical orifice plate 30. The conical separating member 83 is provided with a second buffer passage 831 in a conical shape, the tip of the second buffer passage 831 is communicated with the central hole of the critical orifice plate 30, the other end of the second buffer passage 831 is communicated with the buffer cavity 40, the tip of the conical separating member 83 extends into the first buffer passage 811, and the side wall of the conical separating member 83 and the inner wall of the first buffer passage 811 are provided with an exhaust space 84. The exhaust mechanism 82 is connected with the buffer pressure plate 81 and the conical separating piece 83 respectively, the exhaust mechanism 82 is provided with an exhaust flow passage 821, and the exhaust space 84 is communicated with the exhaust flow passage 821.
Referring to fig. 3, fig. 6 and fig. 7, fig. 7 is a diagram illustrating a movement track of a sample aerosol from an aerosol injection port 11 to a conical separating element 83 of an aerosol mass spectrometry sample injection device with a wide particle size range according to an embodiment of the present invention. The sample aerosol expands in the first buffer channel 811 and generates a local supersonic motion, so that the aerosol particles generate enough kinetic energy to perform inertial separation with the excess gas, and then enter the second buffer channel 831 of the conical separating member 83 and the buffer cavity 40. The buffer cavity 40 is used for buffering the particle velocity of the sample aerosol, so that the motion states of gas and particles are stable, and the excessive gas is extracted outwards through the exhaust gap 84 and the exhaust channel 821 communicated with the exhaust gap 84, thereby ensuring that the conical separating piece 83 and the buffer cavity 40 have enough vacuum degree.
Referring to fig. 1 again, in an embodiment, an aerosol mass spectrometer includes the aerosol mass spectrometer sampling device with a wide particle size range according to any of the above embodiments, and further includes a mass spectrometry vacuum detection mechanism, and the third aerosol focusing element 62 feeds aerosol particles into the mass spectrometry vacuum detection mechanism.
When the wide-particle-size-range aerosol mass spectrometer works, a sample aerosol enters the aerosol conveying pipe 10 through the aerosol sample inlet 11, the aerosol conveying pipe 10 conveys the sample aerosol to the first aerosol focusing part 21, and the first aerosol focusing part 21 performs focusing treatment on the sample aerosol to reduce the beam width of the sample aerosol; the sample aerosol with the reduced beam width enters the first buffer tube 22, and the sample aerosol is buffered by the first buffer tube 22; then, the sample aerosol enters the critical orifice plate 30, the critical orifice plate 30 can greatly reduce the air pressure of the sample aerosol, and the vacuum degree is improved; the sample aerosol with reduced air pressure enters the buffer cavity 40 for buffer transition, so that the gas and particles stably run; then, the sample aerosol enters a second aerosol focusing piece 52 through a second buffer tube 51, and the second aerosol focusing piece 52 performs focusing treatment on the sample aerosol to reduce the beam width of the sample aerosol; the sample aerosol with the reduced beam width continuously enters the third buffer tube 61, enters the third aerosol focusing member 62 after being buffered by the third buffer tube 61, and is sent to the mass spectrum vacuum detection mechanism after being focused and accelerated by the third aerosol focusing member 62. Because the first aerosol focusing part 21 and the first buffer tube 22 are arranged in front of the critical orifice plate 30, the first aerosol focusing part 21 performs pre-focusing treatment on the sample aerosol before entering the critical orifice plate 30, so that loss caused by collision of larger particles in the sample aerosol with the critical orifice plate 30 when the larger particles pass through the central hole of the critical orifice plate 30 can be avoided, the transmission performance of the particles with the particle size of more than 1 μm is greatly improved, the particle size range of the particles passing through the central hole of the critical orifice plate 30 is increased, the detection of aerosol particles with a wide particle size range can be realized, in addition, the deposition and adhesion influence of large particles on the critical orifice plate 30 is greatly reduced, and the maintenance and cleaning frequency of an instrument is reduced.
The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent should be subject to the appended claims.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the invention and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless explicitly specified otherwise.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.
In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature "under," "beneath," and "under" a second feature may be directly under or obliquely under the second feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are for purposes of illustration only and do not denote a single embodiment.
Claims (10)
1. The wide particle size range aerosol mass spectrometry sampling device is characterized by comprising:
the aerosol focusing device comprises an aerosol conveying pipe, a first aerosol focusing part, a first buffer pipe and a critical orifice plate, wherein one end of the aerosol conveying pipe is an aerosol injection port, the other end of the aerosol conveying pipe is connected with the first aerosol focusing part, the first aerosol focusing part is connected with the first buffer pipe, the first buffer pipe is connected with the critical orifice plate, the number of the first aerosol focusing parts is more than two, the number of the first buffer pipes is more than two, the more than two first aerosol focusing parts are arranged in a one-to-one correspondence manner with the more than two first buffer pipes, and the first aerosol focusing part and the first buffer pipe are alternately communicated and arranged between the aerosol conveying pipe and the critical orifice plate;
the device comprises a buffer cavity, a second buffer tube, a second aerosol focusing part, a third buffer tube and a third aerosol focusing part, wherein one end of the buffer cavity is communicated with the critical orifice plate, the other end of the buffer cavity is communicated with the second buffer tube, the second buffer tube is connected with the second aerosol focusing part, the second aerosol focusing part is connected with the third buffer tube, the third buffer tube is connected with the third aerosol focusing part, and the third aerosol focusing part is used for sending aerosol particles into a mass spectrum vacuum detection mechanism.
2. The wide particle size range aerosol mass spectrometer sampling device of claim 1, wherein the first aerosol focusing element is an aerodynamic lens or a nozzle.
3. The wide particle size range aerosol mass spectrometry sampling device of claim 2, wherein the first aerosol focusing member is an aerodynamic lens, and the aperture of two or more first aerosol focusing members decreases in sequence according to the conveying direction of the sample aerosol.
4. The wide particle size range aerosol mass spectrometer sampling device of claim 3, wherein the number of the first aerosol focusing elements is two, the aperture of the first aerosol focusing element close to the aerosol delivery pipe is 2mm to 3mm, and the aperture of the other first aerosol focusing element is 1.5mm to 2.5mm; the thickness of the pore plate of the first aerosol focusing piece is 0.4mm to 0.6mm; the first buffer tube has an inner diameter of 4mm to 6mm, and a length of not less than 10mm.
5. The wide particle size range aerosol mass spectrometer sampling device of claim 1, wherein the number of the second aerosol focusing elements is two or more, and the second aerosol focusing elements are aerodynamic lenses or nozzles; the second buffer tubes are more than two, more than two the second aerosol focusing parts and more than two the second buffer tubes are arranged in a one-to-one correspondence manner, and the second buffer tubes and the second aerosol focusing parts are alternately arranged between the buffer cavity and the third buffer tubes.
6. The wide particle size range aerosol mass spectrometry sampling device of claim 5, wherein the number of the second aerosol focusing elements is seven, and the seven second aerosol focusing elements are sequentially divided into a first-stage aerodynamic lens, a second-stage aerodynamic lens, a third-stage aerodynamic lens, a fourth-stage aerodynamic lens, a fifth-stage aerodynamic lens, a sixth-stage aerodynamic lens and a seventh-stage aerodynamic lens according to the moving path of the sample aerosol; the aperture range of the first stage aerodynamic lens is 17mm to 22mm, the aperture range of the second stage aerodynamic lens is 12mm to 16mm, the aperture range of the third stage aerodynamic lens is 9mm to 13mm, the aperture range of the fourth stage aerodynamic lens is 6mm to 11mm, the aperture range of the fifth stage aerodynamic lens is 5mm to 8mm, the aperture range of the sixth stage aerodynamic lens is 4mm to 6mm, and the aperture range of the seventh stage aerodynamic lens is 3mm to 5mm; the thickness of the orifice plate of the second aerosol focusing part is 0.4mm to 0.6mm; the second buffer tube has an inner diameter of 25mm to 50mm, and a length of not less than 20mm.
7. The wide particle size range aerosol mass spectrometry sampling device of claim 5, characterized in that, the wide particle size range aerosol mass spectrometry sampling device further comprises a lens sleeve, two or more of the second aerosol focusing element, two or more of the second buffer tube, the third buffer tube and the third aerosol focusing element are all disposed in the lens sleeve, one end of the lens sleeve is fixedly disposed on the buffer cavity, the other end of the lens sleeve is provided with a locking element, the locking element is in limit contact with the third aerosol focusing element, the second buffer tube close to the buffer cavity is in limit contact with the buffer cavity.
8. The wide particle size range aerosol mass spectrometry sample introduction device of claim 7, wherein the third aerosol focusing element is a stepped nozzle or a conical nozzle; the inner diameter of the third buffer tube is the same as that of the second buffer tube, and the third aerosol focusing piece and the third buffer tube are of an integrated structure; the inner diameter of the buffer cavity is not less than 150mm, and the length of the buffer cavity is not less than 200mm.
9. The wide particle size range aerosol mass spectrometer sampling device of any one of claims 1 to 8, further comprising a buffer pressure plate, an exhaust mechanism and a cone-shaped separation member disposed between the critical orifice plate and the buffer cavity; the buffer pressing plate is provided with a first conical buffer channel, the buffer pressing plate is fixedly arranged on the critical orifice plate, the first buffer channel is communicated with the central hole of the critical orifice plate, and the tip end of the first buffer channel is close to the central hole of the critical orifice plate; the conical separating piece is provided with a conical second buffer channel, the tip of the second buffer channel is communicated with the central hole of the critical orifice plate, the other end of the second buffer channel is communicated with the buffer cavity, the tip of the conical separating piece extends into the first buffer channel, and the side wall of the conical separating piece and the inner wall of the first buffer channel are provided with an exhaust interval; the exhaust mechanism is respectively connected with the buffer pressing plate and the conical separating piece, an exhaust channel is arranged on the exhaust mechanism, and the exhaust interval is communicated with the exhaust channel.
10. An aerosol mass spectrometer comprising the wide particle size range aerosol mass spectrometer sampling device of any of claims 1 to 9, further comprising a mass spectrometry vacuum detection mechanism into which the third aerosol focusing element feeds aerosol particles.
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| CN202010615218.3A CN113871285B (en) | 2020-06-30 | 2020-06-30 | Aerosol mass spectrum sampling device with wide particle size range and aerosol mass spectrometer |
| PCT/CN2020/132875 WO2022000978A1 (en) | 2020-06-30 | 2020-11-30 | Aerosol mass spectrometry sampling device having wide particle size range, and aerosol mass spectrometer |
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| CN116072506B (en) * | 2023-01-06 | 2024-06-25 | 西北核技术研究所 | Particle sampling device, aerosol mass spectrometer and single particle diameter measuring method |
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| CN109752224A (en) * | 2017-11-06 | 2019-05-14 | 广州禾信仪器股份有限公司 | Enrichment facility and pneumatic focusing system |
| CN210668271U (en) * | 2019-07-11 | 2020-06-02 | 广州禾信仪器股份有限公司 | Mass spectrometer and sample injection mechanism thereof |
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| US7476851B2 (en) * | 2004-11-12 | 2009-01-13 | Regents Of The University Of Minnesota | Aerodynamic focusing of nanoparticle or cluster beams |
| JP2008544258A (en) * | 2005-06-17 | 2008-12-04 | ローレンス リヴァーモア ナショナル セキュリティ，エルエルシー | Pressure flow reducer for aerosol focusing device. |
| CN101769846A (en) * | 2008-12-29 | 2010-07-07 | 中国科学院大连化学物理研究所 | Lens for charged aerosol particles |
| CN106449348B (en) * | 2016-10-27 | 2018-02-27 | 中国科学院合肥物质科学研究院 | A kind of capillary sample inlet interface arrangement for nanoparticles aerosol mass spectrometer |
| CN107946165B (en) * | 2017-11-29 | 2019-09-24 | 中国科学院合肥物质科学研究院 | A kind of aerosol mass spectrometer measuring nanoparticles chemical constituent |
| CN210071591U (en) * | 2019-02-21 | 2020-02-14 | 广州禾信仪器股份有限公司 | Vacuum transition device and mass spectrometer comprising same |
| CN209658132U (en) * | 2019-03-20 | 2019-11-19 | 广州禾信仪器股份有限公司 | Mass spectrograph |
| CN110660637A (en) * | 2019-10-17 | 2020-01-07 | 中国科学院合肥物质科学研究院 | Sampling interface device of ultra-fine nano-particle rapid growth mass spectrometer |
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| CN210668271U (en) * | 2019-07-11 | 2020-06-02 | 广州禾信仪器股份有限公司 | Mass spectrometer and sample injection mechanism thereof |
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