TWI664354B - Vortex-type pressurized gas exhausting apparatus - Google Patents

Abstract

The invention provides a vortex-type gas boosting and discharging auxiliary device, which is mainly composed of an inner ring wall, an outer ring wall, a first side wall and a second side wall. The inner ring wall, the outer ring wall, the first side wall and the second side wall define a rectifying cavity. The driving gas is input from the air inlet that passes through the outer ring wall and communicates with the rectifying cavity for rectification, and the rectified gas passes through the device. Form a plurality of injection holes in the inner wall of the pipe wall to form a jet flow and spray into the gas discharge channel, and make the jet flow form a vortex in the gas discharge channel by a predetermined angle of the spray hole, promote gas discharge and reduce the contact.

Description

Vortex-type gas boosting discharge auxiliary device

The present invention relates to a vortex-type gas boosting and discharging auxiliary device, particularly a vortex-type gas boosting and discharging auxiliary device connected in series between gas discharge pipelines.

In the existing factories, no matter it is a traditional industry, or high-tech industries such as semiconductors and optoelectronics, there are many cases where chemical agents are used in the production of products or dust is generated in the process, especially high-tech industries. Commonly used processes such as etching, vapor deposition, development, evaporation, or cutting, printing, plating, etc. at the back end will generate gases containing organic solvents or other substances.

In order to avoid causing air and environmental pollution, in each process, these gases are collected through a gas collection system, and molecules suspended in the air are physically concentrated in a high efficiency particulate air filter (HEPA). Or use a spray tower, washing tower, etc. to remove pollutants from the air.

However, in the gas gathering process, pipeline systems are bound to transport these gases, and even if filtered at the source of the pipeline, the pollutants in the air cannot be completely removed. When the pollutants in the air are concentrated through the pipeline, solid particles may be deposited directly by gravity; gas containing gas-phase chemicals may also be condensed on the pipe wall due to the lower temperature of the pipe wall of the gas collector; or with other pipelines Concentrated Incoming chemicals react and produce other kinds of substances, which in turn cause corrosion or blockage of the gas gathering pipeline. When the pipeline needs to be replaced due to corrosion or blockage, the running machine must be stopped for construction, causing a decline in production capacity.

In order to solve the above problems, the present invention proposes a vortex gas boosting and discharging auxiliary device, which generates an airflow vortex in the exhaust pipe to reduce direct contact between the gas and the pipe wall, and can be combined with heated inert gas to enhance While the tube wall temperature reduces condensation, it can also reduce the reaction of pollutants and change in properties.

The invention provides a vortex-type gas boosting discharge auxiliary device, which is suitable for being arranged in series between gas discharge pipelines, and includes: an inner ring wall, and a central accommodation space is a gas discharge channel; the outer ring wall, It has a larger pipe diameter than the inner ring wall and is arranged radially surrounding the inner ring wall; the first side wall is provided on one side of the inner ring wall and the outer ring wall; and the second side wall is provided on the inner ring The other side of the wall and the outer ring wall; wherein: the inner ring wall, the outer ring wall, the first side wall and the second side wall define a rectifying cavity with an annular flow channel; the outer ring wall is provided with an air inlet hole, and The channels of the air intake holes communicate with the rectification cavity, and the channels are arranged approximately along the tangential direction of the annular flow channel to guide the driving gas into the rectification cavity and flow in the annular flow channel for rectification; the inner ring wall is provided with a plurality of injection holes. , Starting from connecting the rectification cavity and the accommodating space, and each of the plurality of ejection channels are started from the outer tube wall of the inner ring wall, and gradually along the gas discharge direction to the inner tube wall of the inner ring wall as the end point. Direction and inside of the end line The axis of the wall is skewed and does not intersect, and the direction of the connection line is set in the same direction as the flow direction of the driving gas in the annular flow channel, so that the driving gas increases through the relatively small diameter of the plurality of injection holes. Pressure, thereby forming a plurality of oblique jets, and forming a vortex in the gas discharge channel.

When viewed from a radial projection angle of view, for each of the plurality of spray holes, the starting point and the imaginary diameter extension line passing through the center of the inner ring wall, and the extending direction connecting the starting point to the end point are angled α, α The range is between 1 degree and 89 degrees.

Preferably, the range of α is between 1 degree and 10 degrees.

When viewed from an axial projection angle of view, for each of the plurality of spray holes, when the center of the inner ring wall at the center of the starting point overlaps, the extension direction of the starting point to the end point is at an angle β, β with the axis. The range is between 1 degree and 89 degrees.

Preferably, the range of β is between 45 degrees and 89 degrees.

Preferably, the plurality of spray holes are symmetrically distributed on a radial section of the inner ring wall.

Preferably, it further comprises an input joint connected to the external exhaust pipe and the first side wall, and an output joint connected to the external exhaust pipe and the second side wall.

Preferably, an O-ring or a gasket is respectively provided between the input joint and the first side wall and between the second side wall and the output joint to prevent gas from escaping.

Preferably, the vortex-type gas boosting and discharging auxiliary device of the present invention is a combined structure including a front cover having a first side wall and a rear cover having a second side wall and an inner ring wall. The front cover and the rear cover are transmitted through a plurality of The perforations and the corresponding plurality of screw lock portions are locked by a plurality of lock members.

Preferably, an O-ring or a gasket is provided between the front cover and the rear cover to prevent the driving gas from escaping.

100‧‧‧ Vortex-type gas booster discharge assist device

101‧‧‧ outer ring wall

102‧‧‧Inner ring wall

103‧‧‧first side wall

104‧‧‧Second sidewall

105‧‧‧air inlet

106‧‧‧jet hole

107‧‧‧perforation

108‧‧‧Screw section

109‧‧‧rectifying cavity

110‧‧‧ front cover

111‧‧‧back cover

400‧‧‧vortex

500‧‧‧gas

A‧‧‧ Center of inner ring wall

R‧‧‧imaginary diameter extension cable

T‧‧‧Inner ring wall axis

FIG. 1 is a perspective view of a vortex-type gas boosting discharge assisting device of the present invention.

Fig. 2 is a rear perspective view of the vortex-type gas boosting discharge assisting device of the present invention.

Fig. 3 is a perspective view of a front cover of the vortex-type gas pressure-exhausting auxiliary device of the present invention.

FIG. 4 is a radial projection view of the vortex-type gas pressurization and discharge assisting device of the present invention.

FIG. 5 is an axial projection view of the vortex-type gas boosting and discharging assisting device of the present invention.

FIG. 6 is a schematic diagram of radial projection of the vortex generated by the vortex-type gas boosting discharge auxiliary device of the present invention.

FIG. 7 is a schematic diagram of the axial projection of the vortex generated by the vortex-type gas boosting discharge auxiliary device of the present invention.

In order to better understand the technical features, content and advantages of the present invention and the effects that can be achieved, the present invention is described in detail with the accompanying drawings in the form of embodiments, and the main purpose of the drawings is only For the purpose of illustration and supplementary description, the actual proportion and precise configuration after the implementation of the present invention may not necessarily be interpreted and restricted in terms of the relationship between the proportion and configuration of the attached drawings, and limit the scope of the right of the present invention in actual implementation. Narrated.

Hereinafter, embodiments of the vortex-type gas boosting and discharging assisting device according to the present invention will be described with reference to related drawings. In order to facilitate understanding, the same elements in the following embodiments are described with the same symbols.

Please refer to Figure 1 to Figure 3. FIG. 1 is a perspective view of a vortex-type gas boosting discharge assisting device of the present invention. Fig. 2 is a rear perspective view of the vortex-type gas boosting discharge assisting device of the present invention. Fig. 3 is a perspective view of a front cover of the vortex-type gas pressure-exhausting auxiliary device of the present invention.

The vortex-type gas boosting discharge auxiliary device of the present invention includes an inner ring wall 102, and a central accommodation space is a gas discharge passage through which the gas 500 passes; the outer ring wall 101, the pipe diameter is larger than the inner ring wall 102, and Radially covers the inner ring wall 102; the first side wall 103 is provided on one side of the inner ring wall 102 and the outer ring wall 101; the second side wall 104 is provided on the other side of the inner ring wall 102 and the outer ring wall 101 The inner ring wall 102, the outer ring wall 101, the first side wall 103 and the second side wall 104 define an annular flow channel as a rectifying cavity 109, so that gas can flow therein, and the outer ring wall 101 is provided with an air inlet hole. 105. The air inlet hole communicates with the rectification cavity 109 through the hole, so that the driving gas can enter the rectification cavity 109 from the air inlet hole 105 and flow in the annular flow channel for rectification.

Then refer to Figures 4-7. FIG. 4 is a radial projection view of the vortex-type gas pressurization and discharge assisting device of the present invention. FIG. 5 is an axial projection view of the vortex-type gas boosting and discharging assisting device of the present invention. FIG. 6 is a schematic diagram of radial projection of the vortex 400 generated by the vortex-type gas pressurization and discharge assisting device of the present invention. FIG. 7 is a schematic diagram of the axial projection of the vortex 400 generated by the vortex-type gas pressurized exhaust auxiliary device of the present invention.

The inner ring wall 102 is provided with a plurality of injection holes 106 as shown in FIGS. 4 and 5. The injection holes 106 communicate with the rectification cavity 109 and the accommodation space. The plurality of injection holes 106 start from the outer tube wall of the inner ring wall 102 and follow The discharge direction of the gas 500 is gradually routed to the inner tube wall of the inner ring wall 102 as the end point, and the direction of the connection between the start point and the end point is skewed and does not intersect with the axis of the inner ring wall 102, and as in the sixth As shown in the figure, the connection direction is set to be in the same direction as the flow direction of the driving gas in the annular flow channel (also clockwise), so that the rectified driving gas passes through the injection hole 106 to form a jet flow and enters the gas discharge channel. A vortex 400 is formed near the tube wall of the inner ring wall 102. Among them, the diameter of the spray holes 106 should be smaller than the diameter of the rectifying cavity 109 in principle, and it is related to the number of the spray holes 106. Also, the larger the number of injection holes 106, the smaller the pipe diameter size. In an embodiment, the diameter of the spray orifice 106 is The total cross-sectional area should be smaller than the channel cross-sectional area of the rectifying cavity 109. With this design, the driving gas can be passed through the relatively small pipe diameter of the injection hole 106 to increase the flow velocity and form an injection airflow. In FIG. 5, in order to clearly show the state of the spray holes 106, only the numbers for illustration are drawn, but not all of them are drawn.

In a preferred embodiment, the driving gas used may be nitrogen or an inert gas to avoid chemical reaction with the substances in the gas 500. In an embodiment of the present invention, the waste gas generated by the machine in the factory can be used to further heat the driving gas, connect it to the air inlet 105, rectify through the rectifying cavity 109, and spray it through the injection hole 106. The gas discharge channel, forming the vortex 400 makes the discharge of the gas 500 smoother, and does not adhere to or deposit on the pipe wall. At the same time, the driving gas heated above the gas temperature can increase the tube wall temperature, reducing the chance of the gas 500 condensing on the tube wall because the tube wall temperature is low.

Observed from a radial projection angle of view, for each of the plurality of spray holes 106, the starting point and an imaginary diameter extension line R passing through the center A of the inner ring wall 102, and the extending direction connecting the starting point to the end point are sandwiched The angle α, α ranges from 1 degree to 89 degrees.

In a preferred embodiment, the range of α is between 1 degree and 10 degrees. Please refer to Fig. 6. The size of α can be different depending on the emitted gas 500. If the substance in the gas 500 has high adsorption, weight or viscosity, the size of α can be reduced to make the thickness of the vortex 400 Thickening can more reduce the gas attached to the inner ring wall 102 tube wall. When the substance in the gas 500 has low adsorption, weight or viscosity, the size of α can be increased, the angular momentum of the vortex 400 is increased, and the speed of the airflow is increased.

Observed from an axial projection angle of view, for each of the plurality of spray holes 106, when the center of the starting point overlaps with the axis T of the inner ring wall 102, the extension direction of the starting point to the end point is at an angle with the axis T β, β range from 1 degree to 89 degrees.

In a preferred embodiment, β ranges from 45 degrees to 89 degrees. Please refer to Figure 7. The size of β can be changed according to the length of the external exhaust pipe. The longer the length of the external exhaust pipe, the smaller the β, in order to push the driving gas farther away. The length of the external exhaust pipe is longer. Shortly, β is larger to increase the density of the driving gas and achieve better barrier effect.

Please refer to FIG. 5, the spray holes 106 are symmetrically distributed on the radial section of the inner ring wall 102. The symmetrical distribution can make the distribution of the driving gas more uniform and form a more complete vortex 400 to achieve the coating tube. Wall and speed up the delivery.

In another embodiment, the vortex-type gas boosting and discharging auxiliary device 100 of the present invention may include an input joint connecting the external exhaust pipe and the first side wall 103, and the input joint may change its pipe according to the diameter of the external exhaust pipe. Diameter, and connect it with the gas exhaust passage of the inner ring wall 102, and an O-ring or gasket may be provided between the input joint and the first side wall 103 to prevent the gas 500 from leaking out.

Similarly, the vortex-type gas boosting exhaust auxiliary device 100 of the present invention may include an output joint connecting the external exhaust pipe and the second side wall 104, and the output joint may change its pipe diameter according to the pipe diameter of the external exhaust pipe, and It is connected to the gas exhaust passage of the inner ring wall 102, and an O-ring or a gasket may be provided between the output joint and the second side wall 104 to prevent the gas 500 from leaking out.

In another embodiment, the vortex-type gas boosting and exhaust assisting device of the present invention may further include a combined structure of a front cover 110 having a first side wall 103 and an inner ring wall 102 and a rear cover 111 having a second side wall 104. The front cover 110 and the rear cover 111 are locked by a plurality of lock members through a plurality of perforations 107 and a corresponding plurality of screw lock portions 108. This combined structure reduces production difficulty and production costs. An O-ring or a gasket may be provided between the front cover 110 and the rear cover 111 to prevent the driving gas from escaping.

According to the above technical features, the vortex-type gas booster discharge auxiliary device disclosed in the present invention can reduce the damage to the exhaust pipe caused by the gas, extend the service life of the exhaust pipe, reduce the decline in production capacity when replacing the pipeline, and improve the overall production capacity of the factory. .

Claims (10)

A vortex-type gas pressurization discharge auxiliary device is suitable for being arranged in series between gas discharge pipelines, and includes: an inner ring wall, and one of the accommodation spaces in the center is a gas discharge passage; and an outer ring wall, It has a pipe diameter larger than the inner ring wall and is disposed radially surrounding the inner ring wall; a first side wall is provided on one side of the inner ring wall and the outer ring wall; and a second The side wall is disposed on the other side of the inner ring wall and the outer ring wall; wherein: the inner ring wall, the outer ring wall, the first side wall and the second side wall define a rectifying cavity having an annular flow channel The outer ring wall is provided with an air inlet hole, and is communicated with the rectification cavity through an air hole of the air inlet hole, and the channel is arranged substantially along all directions of the annular flow channel to introduce a driving gas into the The rectifying cavity flows in the annular flow channel to perform rectification; the inner ring wall is provided with a plurality of injection holes to communicate the rectifying cavity and the accommodation space, and each of the plurality of injection holes is formed by one of the inner ring walls. The outer tube wall is the same point, and gradually moves in the direction of the gas discharge. An inner tube wall of one of the inner ring walls is passed through as an end point, and a connection direction of the starting point and the end point is skewed without intersecting with an axis of the inner ring wall, and the connection direction The driving gas is arranged in a forward direction in the flow direction of the annular flow channel, so that the driving gas forms a vortex in the gas discharge channel through the plurality of injection holes. According to the vortex gas pressure boosting auxiliary device described in item 1 of the scope of patent application, when viewed from a radial projection angle of view, for each of the plurality of injection holes, the starting point and the center of the circle passing through the inner ring wall An imaginary diameter extension line of is connected with the extension direction of the starting line to the end point by an angle α, and the range of α is between 1 degree and 89 degrees. The vortex-type gas pressurized exhaust auxiliary device according to item 2 of the scope of patent application, wherein the range of α is between 1 degree and 10 degrees. According to the vortex-type gas pressure boosting auxiliary device described in item 1 of the scope of patent application, where viewed from an axial projection angle of view, for each of the plurality of injection holes, when the center of the starting point and the inner ring wall When an axial center overlaps, the extension direction of the line connecting the starting point to the end point is angled with the axial center by an angle β, and the range of β is between 1 degree and 89 degrees. The vortex-type gas boosting emission assisting device as described in item 4 of the scope of patent application, wherein the range of β is between 45 degrees and 89 degrees. According to the vortex-type gas pressure boosting auxiliary device described in item 1 of the scope of patent application, wherein the plurality of injection holes are symmetrically distributed on a radial section of the inner ring wall. The vortex-type gas pressure boosting auxiliary device according to item 1 of the patent application scope, further comprising an input joint connecting the external exhaust pipe and the first side wall, and an input joint connecting the external exhaust pipe and the second side wall. Output connector. According to the vortex-type gas pressure boosting auxiliary device described in item 7 of the scope of the patent application, an O-ring or a pad is respectively provided between the input joint and the first side wall, and between the second side wall and the output joint. Sheet to prevent gas from escaping. The vortex-type gas boosting and discharging auxiliary device as described in item 1 of the scope of the patent application, which includes a combined structure of a front cover having the first side wall and the inner ring wall, and a back cover having the second side wall. The front cover and the rear cover are locked by a plurality of lock members through a plurality of perforations and a corresponding plurality of screw lock portions. According to the vortex-type gas pressure boosting auxiliary device described in item 9 of the scope of patent application, an O-ring or a gasket is provided between the front cover and the rear cover to prevent the driving gas from escaping.