WO2022000419A1 - Laser system - Google Patents

Laser system Download PDF

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Publication number
WO2022000419A1
WO2022000419A1 PCT/CN2020/099919 CN2020099919W WO2022000419A1 WO 2022000419 A1 WO2022000419 A1 WO 2022000419A1 CN 2020099919 W CN2020099919 W CN 2020099919W WO 2022000419 A1 WO2022000419 A1 WO 2022000419A1
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WO
WIPO (PCT)
Prior art keywords
focusing lens
mirror
gain medium
reflecting mirror
lens
Prior art date
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PCT/CN2020/099919
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French (fr)
Chinese (zh)
Inventor
刘永俊
黄启睿
Original Assignee
华为技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 华为技术有限公司 filed Critical 华为技术有限公司
Priority to CN202080092772.6A priority Critical patent/CN114982077A/en
Priority to PCT/CN2020/099919 priority patent/WO2022000419A1/en
Publication of WO2022000419A1 publication Critical patent/WO2022000419A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof

Definitions

  • the embodiments of the present application provide a laser system, the mirror assembly and the output mirror assembly are small in size and easy to integrate; at the same time, because there is no geometrical change in the shape of the mirror assembly and the output mirror assembly, the diffraction loss is reduced, and the output of the laser is improved. power and output efficiency.
  • the present application provides a laser system, comprising: a gain medium, a pump source for exciting the gain medium to generate radiation light, a mirror assembly for total reflection of the radiation light, and an output mirror for partial reflection of the radiation light component; both the mirror component and the output mirror component are arranged on the incident path or the reflection path of the laser light; the mirror component and the output mirror component define a resonant cavity, and a gain medium is arranged in the resonant cavity; the mirror component includes: a first mirror and a The first focusing lens, the reflective surface of the first reflecting mirror is arranged towards the gain medium, the first focusing lens is arranged between the first reflecting mirror and the gain medium, and the first reflecting mirror is arranged perpendicular to the main optical axis of the first focusing lens.
  • the focal lengths of the first focusing lens and the second focusing lens are both f
  • the distance between the second reflecting mirror and the The distances between the focal planes of the two focusing lenses are both d.
  • the first focusing lens and/or the second focusing lens is a metasurface lens, and a metasurface structure is provided on one side of the metasurface lens close to the gain medium.
  • the first reflecting mirror is composed of multiple first reflecting mirror units located on the same plane
  • the first focusing lens is composed of multiple first focusing lens units located on the same plane
  • the mirror assembly and the output mirror assembly are disposed opposite to each other at an interval, and a region between the mirror assembly and the output mirror assembly forms a resonant cavity.
  • the laser system further includes a second reflection mirror, and the second reflection mirror, the reflection mirror assembly and the output mirror assembly are all arranged on the reflection path or the incident path of the laser light;
  • the gain medium may be any one of a solid gain medium, a gas gain medium, a semiconductor gain medium, and a liquid gain medium.
  • the mirror assembly and the output mirror assembly are small in size and easy to integrate; at the same time, since there is no geometric abrupt change in the shape of the mirror assembly and the output mirror assembly, the diffraction loss is reduced, and the output power and output efficiency of the laser are improved.
  • FIG. 4 is a schematic diagram of the light path of the incident light and the reflected light of the cube mirror
  • FIG. 5 is a system block diagram of a laser system according to an embodiment of the present application.
  • FIG. 6 is a schematic structural diagram of a mirror assembly provided by an embodiment of the present application.
  • FIG. 9 is a schematic diagram 2 of the influence of the reflection mirror moving close to the convex lens on the reflected light provided by the embodiment of the present application;
  • FIG. 13 is a schematic structural diagram of a mirror assembly or an output mirror assembly after the metasurface lens replaces the convex lens;
  • 16 is a diagram of the focusing effect of light by a hyperplane lens provided in an embodiment of the application.
  • 17 is a schematic diagram of the principle of metasurface refraction
  • FIG. 18 is a schematic structural diagram of forming a resonant cavity jointly defined by a third mirror, a mirror assembly, and an output mirror assembly according to an embodiment of the present application.
  • the laser system of the present application includes at least a laser transmitter and a receiver.
  • the laser transmitter includes a pump source, a gain medium and a total reflection cavity mirror
  • the receiver includes a partial reflection cavity mirror with a partial light transmission function
  • the laser transmitter and the receiver together form a laser resonant cavity.
  • the application scenarios of the present application include wireless optical communication and laser charging. If the above-mentioned laser system is used for wireless optical communication, the receiver is arranged on the communication terminal, and the receiver also includes a signal processing module, which is communicatively connected to the communication terminal to realize Wireless optical communication function. If the above laser system is used for laser charging, the receiver is arranged on the charging terminal, and the receiver further includes an energy receiving module, which is electrically connected to the power supply module of the charging terminal to realize the laser charging function.
  • the laser transmitter 1 includes a gain medium 1.3, a pump source 1.2 and an emission mirror 1.1.
  • the gain medium 1.3 may be a medium such as a solid, a gas, a semiconductor, or a liquid, and contains particles that can be activated.
  • the pump source 1.2 can usually be a light source or a power supply, providing energy for the gain medium 1.3, and the excited substance is continuously in a high-energy state in order to achieve stimulated radiation luminescence, if it is a light source, it can irradiate light on the gain medium 1.3, if it is a power supply. , the current can be injected into the gain medium 1.3 through the electrode wire connection.
  • the transmitting retro-reflective cavity mirror 1.1 has retro-reflection effect on the light of the output wavelength, that is, the reflected light is reflected in the opposite direction of the incident light.
  • the wavelength of the pumping light may be inconsistent with the wavelength of the output light, so
  • the transmitting retro-reflective cavity mirror 1.1 may reflect the output wavelength, but transmit the pump light wavelength, so that the pump light can be irradiated onto the gain medium through the transmitting retro-reflective cavity mirror 1.1 to realize end-pumping. If the pump source 1.2 and the gain medium 1.3 are on the same side of the emitting retro-reflecting cavity mirror 1.1, it is a side pumping method.
  • the receiver 2 includes a receiving retroreflective cavity mirror 2.1, and may further include a signal processing module or an energy receiving module 2.2 according to application scenarios.
  • the receiving retro-cavity mirror 2.1 has a retro-reflection effect on the light of the output wavelength, that is, the reflected light is reflected in the opposite direction of the incident light, and at the same time, it has a certain transmittance for the light of the output wavelength, so that the transmitted light can be used for signal processing or energy reception.
  • the transmitting retroreflective cavity mirror 1.1 is composed of a mirror assembly
  • the receiving retroreflective cavity mirror 2.1 is composed of an output mirror assembly.
  • the mirror assembly includes a mirror 1.11 and a focusing lens 1.12 located on the reflection path or incident path of the laser light.
  • the reflective surface of the mirror 1.11 is arranged toward the gain medium, and the mirror 1.11 is arranged between the gain medium and the gain medium.
  • the focusing lens 1.12, the reflecting mirror 1.1 and the focal plane of the focusing lens 1.12 are arranged to coincide with each other. What needs to be explained here is that the reflecting mirror 1.11 is a plane mirror that fully reflects the light irradiated on its reflecting surface.
  • the output mirror assembly includes a mirror 2.11 and a focusing lens 2.12 located on the reflection path or incident path of the laser light.
  • the reflection surface of the mirror 2.11 is arranged toward the gain medium, and the mirror 2.11 is arranged between the gain medium and the gain medium.
  • the focusing lens 2.12 and the reflecting mirror 2.11 are arranged to coincide with the focal plane of the focusing lens 2.12. It should be explained here that the reflector 2.11 is a plane mirror that partially reflects and partially transmits the light irradiated on its reflecting surface.
  • the point on the focal plane is the focal point.
  • the focal point refers to the point where the optical axis intersects the focal plane.
  • the light emitted from the focal point is emitted in the same direction after passing through the focusing lens.
  • the light incident through the focusing lens after being reflected by the plane mirror and then passing through the focusing lens again, the reflected light is opposite to the direction of the original incident light. Therefore, this structure realizes the function of the retro-cavity mirror.
  • the external resonator laser system has low requirements on the alignment of the terminal cavity mirror and is easy to emit light, and at the same time avoids the problems of large volume, difficult integration, and large diffraction loss caused by the existing cube mirror.
  • a conventional convex lens as focusing lens 1.12 and focusing lens 2.12, it only needs to satisfy that the conventional convex lens is arranged between the reflector 1.11 and the gain medium, or between the reflector 2.11 and the gain medium, and the focal plane of the reflector 1.11 or the reflector 2.11 coincides with the conventional convex lens That's it.
  • the front and back of the conventional convex lens when it is installed and installed, and it is easy to be installed to form a reflector assembly with the reflector 1.11 or an output mirror assembly with the reflector 2.11.
  • the focusing lens 1.12 and the focusing lens 2.12 are both plano-convex lenses, one side of the plano-convex lens close to the gain medium is a plane structure, and one side far from the gain medium is a convex structure. That is, the side of the plano-convex lens facing the mirror 1.11 or the mirror 2.11 is a convex structure, and the side away from the mirror 1.11 or the mirror 2.11 is a plane structure. Between the plano-convex lens and the mirror 1.11, or between the plano-convex lens and the mirror 2.11, there may be a vacuum, or filled with air or other medium. In this way, both sides of the reflector assembly and the output mirror assembly are flat, and the integration on the terminal is relatively convenient, there is no problem of dust accumulation, and there is no problem of diffraction loss at the intersection of the three sides of the corner cube prism.
  • the focusing lens 1.12 is a plano-convex lens
  • the focusing lens 2.12 is a conventional convex lens (ie, a lens with a convex structure on both opposite sides).
  • One side of the plano-convex lens close to the gain medium is a plane structure, and one side away from the gain medium is a convex structure. That is, the side of the plano-convex lens facing the mirror 1.11 is a convex structure and the side away from the mirror 1.11 is a plane structure.
  • the focusing lens 1.12 is a conventional convex lens (ie, a lens with a convex structure on both opposite sides), and the focusing lens 2.12 is a plano-convex lens.
  • One side of the plano-convex lens close to the gain medium is a plane structure, and one side away from the gain medium is a convex structure. That is, the side of the plano-convex lens facing the mirror 2.11 is a convex structure, and the side away from the mirror 2.11 is a plane structure.
  • the space between the plano-convex lens and the mirror 2.11 can be a vacuum, or filled with air or other medium. In this way, both sides of the reflector assembly and the output mirror assembly are flat, and the integration on the terminal is relatively convenient, there is no problem of dust accumulation, and there is no problem of diffraction loss at the intersection of the three sides of the corner cube prism.
  • the convex lens has a focusing function, and the power density of the laser is very high, which is easy to cause damage to the mirror. Therefore, it is necessary to use a material resistant to strong light to manufacture the mirror, which undoubtedly increases the cost.
  • the position of the mirror can be changed to translate a small distance forward (closer to the focal plane) or backward (away from the focal plane) along the optical axis from the focal plane, which can greatly reduce the focused light intensity.
  • the retroreflection condition is not satisfied.
  • the dotted line in the figure is the control optical path
  • the solid line is the actual optical path.
  • the incident angle ⁇ of the convex lens 3 be the angle between the incident ray and the optical axis 3.2
  • the value range is (- ⁇ /2, ⁇ /2)
  • the incident angle ⁇ 0 when the light is incident from left to right, the incident angle ⁇ 0, otherwise ⁇ >0
  • the x-coordinate of the intersection of the planes 3.1 is f*tan ⁇ , where f is the focal length of the convex lens 3 .
  • condition 3 is whether the intersection of the incident light and the optical axis is forward (F) or reverse (B) compared to the front focus on the y-axis , let the positive y-axis be perpendicular to the x-axis, from the mirror to the convex lens.
  • the three conditions are FBB, FFF, BBF or BFB, the next incident angle will become larger, and when the three conditions are FBF, FFB, BBB, and BFF, the next incident angle will become smaller.
  • condition 2 is the same for the mirror assembly and the output mirror assembly
  • condition 3 is also the same when the resonance is stable, so only when the condition 1 of the mirror assembly and the output mirror assembly is different, it will appear once.
  • the incident angle increases, the primary incident angle decreases. Otherwise, the incident angle will always decrease or increase, causing the optical path to deviate from the resonator, thereby greatly reducing the output power or causing no light.
  • the mirror 1.11 can be translated a certain distance from the focal plane 1.121 to the direction away from the focusing lens 1.12, and the mirror 2.11 can be translated a certain distance from the focal plane 2.121 to the direction close to the focusing lens 2.12, or the mirror 1.11 can be translated from the focal plane 1.121 to the direction of the focusing lens 2.12.
  • the direction close to the focusing lens 1.12 translates a certain distance
  • the mirror 2.11 translates a certain distance from the focal plane 2.121 to the direction away from the focusing lens 2.12 (as shown in Figure 12), so that when the angle of one reflection is shifted, the next reflection will To get the correction, in order to control the deflection angle error, the translation distance is controlled within 0.1f. In this way, the possibility of damage to the mirror 1.11 or the mirror 2.11 by focusing is reduced, while maintaining the function of the resonator to a certain extent.
  • the mirror 1.11 is arranged parallel to the focal plane 1.121.
  • the mirror 2.11 is arranged parallel to the focal plane 2.121. In this way, the purpose of reducing the damage to the reflecting mirror 1.11 or the reflecting mirror 2.11 caused by focusing and increasing the service life of each component of the laser system is achieved.
  • the reflector 1.11 is arranged on the side of the focal plane 1.121 close to the focusing lens 1.12, and the reflector 2.11 is arranged on the side of the focal plane 2.121 away from the focusing lens 2.12; or, the reflector 1.11 is arranged on the side of the focal plane 1.121 away from the focusing lens 2.12 One side of the focusing lens 1.12; the mirror 2.11 is arranged on the side of the focal plane 2.121 close to the focusing lens 2.12.
  • the focal lengths of the focusing lens 1.12 and the focusing lens 2.12 are both f; the distance between the reflecting mirror 1.11 and the focal plane 1.121 and the distance between the reflecting mirror 2.11 and the focal plane 2.121 are both d.
  • d is less than or equal to f/10. This reduces the possibility of damage to the mirror 1.11 or the mirror 2.11 caused by focusing, while maintaining the function of the resonator to a certain extent.
  • the focusing lens 1.12 and/or the focusing lens 2.12 is a meta-surface lens 4, that is, the meta-surface lens 4 is used to realize the focusing function of the convex lens, and the meta-surface lens 4 is close to a part of the gain medium.
  • a metasurface structure is arranged on the side surface, and the side away from the gain medium is a plane structure without a metasurface structure; or the metasurface lens 4 is provided with a metasurface structure on two opposite sides.
  • the radius of curvature is not less than the radius of the convex lens, so the focal length is not less than the diameter of the convex lens. .
  • the thickness of the mirror assembly or the output mirror assembly is larger than the focal length, and usually larger than the diameter of the traditional convex lens, which results in a difference between the thickness of the mirror assembly or the output mirror assembly and the size.
  • the contradiction of the mirror assembly or the output mirror assembly is too small, which will affect the laser resonance and reduce the laser efficiency and light output power. If a certain size is to be guaranteed, the reflector assembly or the output mirror assembly will be too thick.
  • convex lens 3 plane-convex lens or conventional convex lens
  • D the distance between the incident point and the center of the convex lens 3
  • the angle between the incident direction and the optical axis 3.2, that is, the incident angle
  • the translation distance between the reflected light and the incident light will be relatively large. Since the population inversion area in the gain medium is limited, that is, the area with a large number of high-level electrons affected by the pump source, if D is too large, the reflected light will be deflected outside the inversion area, and the effect of stimulated amplification will not be achieved. , this will greatly reduce the light output power, and will lead to resonance failure.
  • Metasurface technology is an emerging technology that can change and control electromagnetic waves, sound waves, heat, etc. through certain structures.
  • subwavelength particles can change the propagation phase of light, manifesting as a change in the direction of light propagation. Since the wavelength of light is usually in the order of hundreds of nanometers to hundreds of micrometers, as shown in Figure 15, by processing the micro-nano particles on the flat surface, the incident light at different positions passes through the micro-nano particles and appends different phases to generate different phases. Deflection, to achieve the same convergence function as a convex lens (as shown in Figure 16). The size of micro-nano particles has a certain relationship with the wavelength of light, usually in the range of 1/10 to 1/2 of the wavelength of light.
  • micro-nano particles there can be many shapes of micro-nano particles, such as regular circle, square, rectangle, triangle, or more complex "U" shape, bow tie shape, etc.
  • the additional phase can pass through different sizes, different Place the angle to achieve. Different sizes refer to the differences in the size of the micro-nano particles within the above-mentioned certain range, for example, the additional phase of a circular particle with a radius of a is A, and the additional phase of a circular particle with a radius of b is B.
  • Different placement angles refer to the included angles relative to the reference direction.
  • the x-axis is a direction axis on the metasurface plane, and when the positive angle with the x-axis is ⁇ 1 , the additional phase is ⁇ 1 , and the included angle is ⁇ 2 When , add the phase ⁇ 2 .
  • the focal length can be determined first, the parallel incident light will be focused on the focal point, and the angular deflection of the micro-nano particles at a certain position from the center can be calculated according to the optical path, so as to obtain the additional phase, and Design micro-nano particles of corresponding shape and size.
  • the same additional phase may correspond to an infinite variety of shapes and sizes, which can be selected according to other requirements, such as loss.
  • the calculation is more complicated, but it can be simulated by optical simulation software. Select better micro-nano particle parameters. As shown in FIG.
  • the center position of the lens is the origin of the coordinate system, (x, y) is the coordinate of a certain position on the lens, f is the focal length, is the phase, and ⁇ is the wavelength of the incident light.
  • metasurface lenses can achieve very short focal lengths. At present, focal lengths as short as 10 times the wavelength have been achieved. For example, for infrared light with a wavelength of 1 micron, the focal length can be only 10 microns, which is much smaller than the focal length of traditional convex lenses.
  • the metasurface lens 4 itself can be made very thin and the focal length can be made very short, a very thin retro-reflecting cavity mirror can be realized, and a certain size can be maintained, thereby solving the contradiction between size and thickness.
  • L the distance between the reflected light and the incident light
  • f the focal length of the metasurface lens
  • the incident light The angle of incidence
  • the translation distance between the incident light and the reflected light is significantly smaller than the case of using a traditional lens
  • the distance K between the reflected light and the incident light on the surface of the lens is about 2L, which solves the problem that the reflected light may deflect out of the lens. Therefore, this retro-cavity mirror can achieve higher light output power.
  • the reflecting mirror 1.11 is composed of a plurality of reflecting mirror 1.11 units located on the same plane
  • the focusing lens 1.12 is composed of a plurality of focusing lens 1.12 units located on the same plane
  • the reflecting mirror 1.11, the focusing lens 1.12, the reflecting mirror 2.11 and the focusing lens 2.12 are all integral structures.
  • the mirror assembly and the output mirror assembly are disposed opposite to each other at intervals, the region between the mirror assembly and the output mirror assembly forms a resonant cavity, and a gain medium is arranged in the resonant cavity.
  • the pump source excites the gain medium to generate radiation light, which is oscillated and amplified in the resonant cavity (the radiation light is reflected and enhanced multiple times between the mirror assembly and the output mirror assembly), and the output mirror assembly has good coherence and concentrated direction. of the laser.

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
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  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

A laser system (1), comprising: a pumping source (1.2), a reflection mirror assembly (1.1) and an output mirror assembly (2.1), the reflection mirror assembly (1.1) and the output mirror assembly (2.1) defining and forming a resonant cavity, and a gain medium (1.3) being arranged in the resonant cavity; the reflection mirror assembly (1.1) comprises a first reflection mirror (1.11) and a first focusing lens (1.12), a reflection surface of the first reflection mirror (1.11) being arranged facing the gain medium (1.3), the first focusing lens (1.12) being arranged between the first reflection mirror (1.11) and the gain medium (1.3), the first reflection mirror (1.11) being arranged on a plane perpendicular to a main optical axis of the first focusing lens (1.12); the output mirror assembly (2.1) comprises a second reflection mirror (2.11) and a second focusing lens (2.12), the reflection surface of the second reflection mirror (2.11) being arranged to face the gain medium (1.3), the second focusing lens (2.12) being arranged between the second reflection mirror (2.11) and the gain medium (1.3), and the second reflection mirror (2.11) being arranged on a plane perpendicular to the main optical axis of the second focusing lens (2.12). The laser system reduces the diffraction loss and improves the laser output power.

Description

一种激光系统a laser system 技术领域technical field
本申请涉及激光技术领域,尤其涉及一种激光系统。The present application relates to the field of laser technology, and in particular, to a laser system.
背景技术Background technique
激光器的基本原理是受激辐射,即处于激发态原子的电子,在入射光子的作用下,从高能级跃迁到低能级时,辐射出与入射光频率、相位、偏振、传播方向完全相同的光子,形成更大的光强,而增强的光又可以进行新的刺激,经过反复作用形成谐振,产生了强度高,单色性好,方向性好的激光。如图1所示,激光系统主要包括泵浦源、增益介质、谐振腔等三部分,泵浦源将处于低能级的电子激发到高能级,以实现粒子数反转;增益介质是被激发的电子所在的物质,物质特性决定了输出的波长;谐振腔通常是两面相互平行的反射镜,其中一面反射镜全反射,另一面(输出镜)有部分透射功能,光在两面反射镜之间来回反射,经过增益介质会得到不断放大,当增益大于损耗时,可形成稳定的激光输出。The basic principle of laser is stimulated radiation, that is, electrons in excited state atoms, under the action of incident photons, when they transition from high energy level to low energy level, radiate photons with the same frequency, phase, polarization and propagation direction as the incident light. , forming a larger light intensity, and the enhanced light can carry out new stimulation, and after repeated action, a resonance is formed, resulting in a laser with high intensity, good monochromaticity and good directionality. As shown in Figure 1, the laser system mainly includes three parts: pump source, gain medium, and resonator. The pump source excites electrons at low energy levels to high energy levels to achieve population inversion; the gain medium is excited The material in which the electrons are located, the material properties determine the output wavelength; the resonator is usually a mirror with two parallel sides, one of which is totally reflective, and the other side (output mirror) has a partial transmission function, and the light goes back and forth between the two mirrors The reflection will be continuously amplified through the gain medium. When the gain is greater than the loss, a stable laser output can be formed.
激光由于相干性好、方向集中,在应用中有安全性问题,对于安全输出功率有严格的限制。因此在激光充电等应用中会存在挑战,需要在安全约束的前提下,满足输出功率的要求。外谐振腔激光器是一种较新型的激光系统,如图2所示,原理上将激光系统的部分透射反射镜与其余部分在物理上分离,相隔一定距离,比如放在激光接收的终端上,这样一旦收发之间的空间部分被遮挡,谐振条件就被破坏,将不会产生激光输出,确保了激光传输的安全性。但是这种系统的问题是很难保证两面反射镜之间的平行性。Due to the good coherence and concentrated direction of the laser, there are safety problems in the application, and there are strict restrictions on the safe output power. Therefore, there will be challenges in applications such as laser charging, and it is necessary to meet the requirements of output power under the premise of safety constraints. External resonator laser is a relatively new type of laser system, as shown in Figure 2, in principle, part of the transmission mirror of the laser system is physically separated from the rest, separated by a certain distance, such as on the laser receiving terminal, In this way, once the space between sending and receiving is partially blocked, the resonance condition will be destroyed, and no laser output will be generated, thus ensuring the safety of laser transmission. But the problem with this system is that it is difficult to ensure the parallelism between the two mirrors.
如图3所示,现有的外谐振腔激光器,收发两侧的反射镜都使用角锥棱镜,避免了平行问题。因为角锥棱镜由三个相互垂直的平面镜组成,被广泛用于各种光学系统当中,可以实现反射光的方向与入射光的方向相反(如图4所示),这样就大大降低了收发两端腔镜的相对角度要求。但是,其仍存在着器件集成,尤其是终端侧集成不方便的问题,同时因为角锥棱镜是立体结构,会有集成体积大,容易被损坏和角锥棱镜存在几何突变,光的衍射以及加工精度都会影响光的反射精度,降低谐振功率的问题。As shown in Figure 3, in the existing external resonator laser, the mirrors on both sides of the transceiver use corner prisms, which avoids the problem of parallelism. Because the corner cube is composed of three mutually perpendicular plane mirrors, it is widely used in various optical systems, and the direction of the reflected light can be opposite to the direction of the incident light (as shown in Figure 4), which greatly reduces the transmission and reception costs. Relative angle requirements for endoscopes. However, it still has the problem of inconvenient device integration, especially the integration on the terminal side. At the same time, because the corner cube is a three-dimensional structure, the integration volume is large, which is easy to be damaged, and the cube has geometrical changes, light diffraction and processing. Accuracy will affect the reflection accuracy of light and reduce the problem of resonance power.
申请内容Application content
本申请的实施例提供一种激光系统,反射镜组件和输出镜组件体积小,易于集成;同时由于反射镜组件和输出镜组件形状上没有几何突变,减小了衍射损耗,提高了激光的输出功率和输出效率。The embodiments of the present application provide a laser system, the mirror assembly and the output mirror assembly are small in size and easy to integrate; at the same time, because there is no geometrical change in the shape of the mirror assembly and the output mirror assembly, the diffraction loss is reduced, and the output of the laser is improved. power and output efficiency.
本申请提供一种激光系统,包括:增益介质、用于激发增益介质产生辐射光的泵浦源、用于对辐射光进行全反射的反射镜组件、用于对辐射光进行部分反射的输出镜组件;反射镜组件和输出镜组件均设置在激光的入射路径或反射路径上;反射镜组件和输出镜组件限定形成谐振腔,谐振腔内设置增益介质;反射镜组件包括:第一反射 镜和第一聚焦透镜,第一反射镜的反射面朝向增益介质设置,第一聚焦透镜设置于第一反射镜和增益介质之间,第一反射镜设置在与第一聚焦透镜的主光轴垂直的平面上;输出镜组件包括:第二反射镜和第二聚焦透镜,第二反射镜的反射面朝向增益介质设置,第二聚焦透镜设置于第二反射镜和增益介质之间,第二反射镜设置在与第二聚焦透镜的主光轴垂直的平面上。The present application provides a laser system, comprising: a gain medium, a pump source for exciting the gain medium to generate radiation light, a mirror assembly for total reflection of the radiation light, and an output mirror for partial reflection of the radiation light component; both the mirror component and the output mirror component are arranged on the incident path or the reflection path of the laser light; the mirror component and the output mirror component define a resonant cavity, and a gain medium is arranged in the resonant cavity; the mirror component includes: a first mirror and a The first focusing lens, the reflective surface of the first reflecting mirror is arranged towards the gain medium, the first focusing lens is arranged between the first reflecting mirror and the gain medium, and the first reflecting mirror is arranged perpendicular to the main optical axis of the first focusing lens. on a plane; the output mirror assembly includes: a second mirror and a second focusing lens, the reflective surface of the second mirror is arranged towards the gain medium, the second focusing lens is arranged between the second mirror and the gain medium, the second mirror It is arranged on a plane perpendicular to the main optical axis of the second focusing lens.
在另一个可能的实现中,所述第一反射镜设置在第一聚焦透镜的焦平面上,所述第二反射镜设置在第二聚焦透镜的焦平面上。In another possible implementation, the first reflecting mirror is disposed on the focal plane of the first focusing lens, and the second reflecting mirror is disposed on the focal plane of the second focusing lens.
在另一个可能的实现中,所述第一反射镜设置在第一聚焦透镜的焦平面靠近第一聚焦透镜的一侧,所述第二反射镜设置在第二聚焦透镜的焦平面远离第二聚焦透镜的一侧;In another possible implementation, the first reflecting mirror is disposed on the side of the focal plane of the first focusing lens close to the first focusing lens, and the second reflecting mirror is disposed on the focal plane of the second focusing lens away from the second focusing lens one side of the focusing lens;
或者,所述第一反射镜设置在第一聚焦透镜的焦平面远离第一聚焦透镜的一侧;所述第二反射镜设置在第二聚焦透镜的焦平面靠近第二聚焦透镜的一侧。Alternatively, the first reflection mirror is arranged on the side of the focal plane of the first focusing lens away from the first focusing lens; the second reflection mirror is arranged on the side of the focal plane of the second focusing lens close to the second focusing lens.
在另一个可能的实现中,所述第一聚焦透镜和第二聚焦透镜的焦距均为f,所述第一反射镜与第一聚焦透镜的焦平面的距离、所述第二反射镜与第二聚焦透镜的焦平面的距离均为d。In another possible implementation, the focal lengths of the first focusing lens and the second focusing lens are both f, the distance between the first reflecting mirror and the focal plane of the first focusing lens, the distance between the second reflecting mirror and the The distances between the focal planes of the two focusing lenses are both d.
在另一个可能的实现中,所述d小于或等于f/10。In another possible implementation, the d is less than or equal to f/10.
在另一个可能的实现中,所述第一聚焦透镜和/或第二聚焦透镜为凸透镜。In another possible implementation, the first focusing lens and/or the second focusing lens are convex lenses.
在另一个可能的实现中,所述第一聚焦透镜和/或第二聚焦透镜为平凸透镜,所述平凸透镜靠近增益介质的一侧面为平面结构,远离增益介质的一侧面为凸面结构。In another possible implementation, the first focusing lens and/or the second focusing lens is a plano-convex lens, a side of the plano-convex lens close to the gain medium is a plane structure, and a side away from the gain medium is a convex structure.
在另一个可能的实现中,所述第一聚焦透镜和/或第二聚焦透镜为超表面透镜,所述超表面透镜靠近增益介质的一侧面上设置超表面结构。In another possible implementation, the first focusing lens and/or the second focusing lens is a metasurface lens, and a metasurface structure is provided on one side of the metasurface lens close to the gain medium.
在另一个可能的实现中,所述第一反射镜为多个位于同一平面的第一反射镜单元组成,第一聚焦透镜为多个位于同一平面的第一聚焦透镜单元组成;In another possible implementation, the first reflecting mirror is composed of multiple first reflecting mirror units located on the same plane, and the first focusing lens is composed of multiple first focusing lens units located on the same plane;
所述第二反射镜为多个位于同一平面的第二反射镜单元组成,第二聚焦透镜为多个位于同一平面的第二聚焦透镜单元组成;The second reflecting mirror is composed of a plurality of second reflecting mirror units located on the same plane, and the second focusing lens is composed of a plurality of second focusing lens units located on the same plane;
或者,所述第一反射镜、第一聚焦透镜、第二反射镜和第二聚焦透镜均为整体结构。Alternatively, the first reflecting mirror, the first focusing lens, the second reflecting mirror and the second focusing lens are all integral structures.
在另一个可能的实现中,所述反射镜组件和输出镜组件间隔相对设置,反射镜组件和输出镜组件之间的区域形成谐振腔。In another possible implementation, the mirror assembly and the output mirror assembly are disposed opposite to each other at an interval, and a region between the mirror assembly and the output mirror assembly forms a resonant cavity.
在另一个可能的实现中,所述激光系统还包括第二反射镜,第二反射镜、反射镜组件和输出镜组件均设置在激光的反射路径或入射路径上;In another possible implementation, the laser system further includes a second reflection mirror, and the second reflection mirror, the reflection mirror assembly and the output mirror assembly are all arranged on the reflection path or the incident path of the laser light;
第三反射镜、反射镜组件和输出镜组件限定形成谐振腔,反射镜组件和输出镜组件设置于增益介质的同一侧,第三反射镜设置于增益介质设置反射镜组件和输出镜组件一侧的相对一侧,第三反射镜的反射面朝向增益介质设置。The third reflector, the reflector assembly and the output mirror assembly define a resonant cavity, the reflector assembly and the output mirror assembly are disposed on the same side of the gain medium, and the third reflector is disposed on the side of the gain medium where the reflector assembly and the output mirror assembly are disposed On the opposite side of the third reflector, the reflective surface of the third mirror is disposed toward the gain medium.
在另一个可能的实现中,所述增益介质可以为固体增益介质、气体增益介质、半导体增益介质、液体增益介质中的任意一种。In another possible implementation, the gain medium may be any one of a solid gain medium, a gas gain medium, a semiconductor gain medium, and a liquid gain medium.
基于本申请实施例提供的激光系统,对反射镜组件和输出镜组件改进,反射镜组件由第一反射镜和第一聚焦透镜构成,所述第一反射镜的反射面朝向增益介质设置,所述第一聚焦透镜设置于第一反射镜和增益介质之间,所述第一反射镜设置在与第一 聚焦透镜的主光轴垂直的平面上;输出镜组件由第二反射镜和第二聚焦透镜构成,所述第二反射镜的反射面朝向增益介质设置,所述第二聚焦透镜设置于第二反射镜和增益介质之间,所述第二反射镜设置在与第二聚焦透镜的主光轴垂直的平面上。反射镜组件和输出镜组件体积小,易于集成;同时由于反射镜组件和输出镜组件形状上没有几何突变,减小了衍射损耗,提高了激光的输出功率和输出效率。Based on the laser system provided by the embodiment of the present application, the mirror assembly and the output mirror assembly are improved. The mirror assembly is composed of a first reflection mirror and a first focusing lens, and the reflection surface of the first reflection mirror is arranged toward the gain medium, so The first focusing lens is arranged between the first reflecting mirror and the gain medium, and the first reflecting mirror is arranged on a plane perpendicular to the main optical axis of the first focusing lens; the output mirror assembly is composed of a second reflecting mirror and a second reflecting mirror. It consists of a focusing lens, the reflective surface of the second reflecting mirror is set towards the gain medium, the second focusing lens is set between the second reflecting mirror and the gain medium, and the second reflecting mirror is set at a position close to the second focusing lens. on a plane perpendicular to the main optical axis. The mirror assembly and the output mirror assembly are small in size and easy to integrate; at the same time, since there is no geometric abrupt change in the shape of the mirror assembly and the output mirror assembly, the diffraction loss is reduced, and the output power and output efficiency of the laser are improved.
附图说明Description of drawings
下面对实施例或现有技术描述中所需使用的附图作简单地介绍。The following briefly introduces the accompanying drawings required in the description of the embodiments or the prior art.
图1为激光器的基本原理图;Figure 1 is the basic schematic diagram of the laser;
图2为外谐振腔激光器原理图;Figure 2 is a schematic diagram of an external resonator laser;
图3为使用了角锥镜的外谐振腔激光器结构示意图;FIG. 3 is a schematic structural diagram of an external resonator laser using a cube mirror;
图4为角锥镜入射光与反射光光路示意图;4 is a schematic diagram of the light path of the incident light and the reflected light of the cube mirror;
图5为本申请实施例提供的一种激光系统的系统框图;FIG. 5 is a system block diagram of a laser system according to an embodiment of the present application;
图6为本申请实施例提供的反射镜组件结构示意图;6 is a schematic structural diagram of a mirror assembly provided by an embodiment of the present application;
图7为本申请实施例提供的输出镜组件结构示意图;FIG. 7 is a schematic structural diagram of an output mirror assembly provided by an embodiment of the present application;
图8为本申请实施例提供的反射镜移近凸透镜对反射光线的影响示意图一;FIG. 8 is a schematic diagram 1 of the influence of a mirror moving close to a convex lens on reflected light according to an embodiment of the present application;
图9为本申请实施例提供的反射镜移近凸透镜对反射光线的影响示意图二;FIG. 9 is a schematic diagram 2 of the influence of the reflection mirror moving close to the convex lens on the reflected light provided by the embodiment of the present application;
图10为本申请实施例提供的反射镜移近凸透镜对反射光线的影响示意图三;FIG. 10 is a schematic diagram 3 of the influence on reflected light by moving a mirror closer to a convex lens according to an embodiment of the application;
图11为本申请实施例提供的反射镜远离凸透镜对反射光线的影响示意图;FIG. 11 is a schematic diagram of the influence of a mirror away from a convex lens on reflected light according to an embodiment of the application;
图12为本申请实施例提供的反射镜与凸透镜的焦平面平行设置时的位置关系示意图;12 is a schematic diagram of the positional relationship when the focal planes of the reflecting mirror and the convex lens provided in the embodiment of the present application are arranged in parallel;
图13为超表面透镜代替凸透镜后的反射镜组件或输出镜组件结构示意图;13 is a schematic structural diagram of a mirror assembly or an output mirror assembly after the metasurface lens replaces the convex lens;
图14为本申请实施例提供的使用凸透镜的反射镜组件或输出镜组件光路示意图;14 is a schematic diagram of an optical path of a reflector assembly or an output mirror assembly using a convex lens provided by an embodiment of the present application;
图15为本申请实施例提供的超平面透镜的微纳结构分布俯视图;15 is a top view of a micro-nano structure distribution of a hyper-planar lens provided by an embodiment of the present application;
图16为本申请实施例提供的超平面透镜对光线的聚焦效果图;16 is a diagram of the focusing effect of light by a hyperplane lens provided in an embodiment of the application;
图17为超表面折射原理示意图;17 is a schematic diagram of the principle of metasurface refraction;
图18为本申请实施例提供的第三反射镜、反射镜组件和输出镜组件共同限定形成谐振腔的结构示意图。FIG. 18 is a schematic structural diagram of forming a resonant cavity jointly defined by a third mirror, a mirror assembly, and an output mirror assembly according to an embodiment of the present application.
具体实施方式detailed description
下面将结合本申请实施例中的附图,对本申请实施例中的技术方案进行描述。The technical solutions in the embodiments of the present application will be described below with reference to the accompanying drawings in the embodiments of the present application.
在本申请的描述中,术语“中心”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。In the description of this application, the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", " The orientation or positional relationship indicated by "bottom", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying the indicated device or Elements must have a particular orientation, be constructed and operate in a particular orientation and are therefore not to be construed as limitations on this application.
在本申请的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如可以是固定连接,也可以是可拆卸连接,还可以是抵触连接或一体的连接;对于本领域的普通技术人员而言,可以具体情况理解上述术语在本申请中的具体含义。In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it may be a fixed connection or a detachable connection , it may also be a conflicting connection or an integral connection; those of ordinary skill in the art can understand the specific meanings of the above terms in this application under specific circumstances.
本申请的激光系统至少包括激光发射器和接收器。其中激光发射器包括泵浦源、 增益介质和全反射腔镜,接收器包括具有部分光透过功能的部分反射腔镜,激光发射器与接收器共同组成激光谐振腔。本申请的应用场景包括无线光通信和激光充电,若上述激光系统用于无线光通信,则接收器设置在通信终端上,接收器还包括信号处理模块,信号处理模块与通信终端通信连接以实现无线光通信功能。若上述激光系统用于激光充电,则接收器设置在充电终端上,接收器还包括能源接收模块,能源接收模块与充电终端电源模块电连接以实现激光充电功能。The laser system of the present application includes at least a laser transmitter and a receiver. The laser transmitter includes a pump source, a gain medium and a total reflection cavity mirror, the receiver includes a partial reflection cavity mirror with a partial light transmission function, and the laser transmitter and the receiver together form a laser resonant cavity. The application scenarios of the present application include wireless optical communication and laser charging. If the above-mentioned laser system is used for wireless optical communication, the receiver is arranged on the communication terminal, and the receiver also includes a signal processing module, which is communicatively connected to the communication terminal to realize Wireless optical communication function. If the above laser system is used for laser charging, the receiver is arranged on the charging terminal, and the receiver further includes an energy receiving module, which is electrically connected to the power supply module of the charging terminal to realize the laser charging function.
作为本申请的一个实施例,如图5所示,激光发射器1包括增益介质1.3、泵浦源1.2和发射逆射腔镜1.1。其中增益介质1.3可以是固体、气体、半导体、液体等介质,包含有可被激活的粒子。泵浦源1.2通常可以是光源或电源,为增益介质1.3提供能量,激发物质持续处于高能级状态,以便实现受激辐射发光,如果是光源,可以将光照射到增益介质1.3上,如果是电源,可以通过电极线连接将电流注入到增益介质1.3上。发射逆射腔镜1.1对于输出波长的光具备逆射反射作用,即反射光沿入射光相反的方向反射,如果是光泵浦的情况,泵浦光的波长跟输出的光波长可能不一致,因此发射逆射腔镜1.1可能对输出波长反射,但是对泵浦光波长透射,这样泵浦光可以透过发射逆射腔镜1.1照射到增益介质上,实现端泵浦的方式,如果泵浦源1.2与增益介质1.3在发射逆射腔镜1.1的同一侧,则为侧泵浦的方式。As an embodiment of the present application, as shown in FIG. 5 , the laser transmitter 1 includes a gain medium 1.3, a pump source 1.2 and an emission mirror 1.1. The gain medium 1.3 may be a medium such as a solid, a gas, a semiconductor, or a liquid, and contains particles that can be activated. The pump source 1.2 can usually be a light source or a power supply, providing energy for the gain medium 1.3, and the excited substance is continuously in a high-energy state in order to achieve stimulated radiation luminescence, if it is a light source, it can irradiate light on the gain medium 1.3, if it is a power supply. , the current can be injected into the gain medium 1.3 through the electrode wire connection. The transmitting retro-reflective cavity mirror 1.1 has retro-reflection effect on the light of the output wavelength, that is, the reflected light is reflected in the opposite direction of the incident light. In the case of optical pumping, the wavelength of the pumping light may be inconsistent with the wavelength of the output light, so The transmitting retro-reflective cavity mirror 1.1 may reflect the output wavelength, but transmit the pump light wavelength, so that the pump light can be irradiated onto the gain medium through the transmitting retro-reflective cavity mirror 1.1 to realize end-pumping. If the pump source 1.2 and the gain medium 1.3 are on the same side of the emitting retro-reflecting cavity mirror 1.1, it is a side pumping method.
接收器2包括接收逆射腔镜2.1,根据应用场景,可能还包括信号处理模块或者能源接收模块2.2。接收逆射腔镜2.1对于输出波长的光具备逆射反射作用,即反射光沿入射光相反的方向反射,同时对于输出波长的光有一定透射率,以便透射光可用于信号处理或者能源接收。The receiver 2 includes a receiving retroreflective cavity mirror 2.1, and may further include a signal processing module or an energy receiving module 2.2 according to application scenarios. The receiving retro-cavity mirror 2.1 has a retro-reflection effect on the light of the output wavelength, that is, the reflected light is reflected in the opposite direction of the incident light, and at the same time, it has a certain transmittance for the light of the output wavelength, so that the transmitted light can be used for signal processing or energy reception.
实际的激光系统当中,一个激光发射器1可能对应一个接收器2或多个接收器2,也可能是多个激光发射器1对应一个接收器2,或多个激光发射器1对应多个接收器2。输出光的波长取决于增益介质1.3,因此可能不同激光发射器1对应的输出光的波长不一样,一个接收器2可能接收多个波长的激光。In an actual laser system, one laser transmitter 1 may correspond to one receiver 2 or multiple receivers 2, or multiple laser transmitters 1 may correspond to one receiver 2, or multiple laser transmitters 1 may correspond to multiple receivers. device 2. The wavelength of the output light depends on the gain medium 1.3, so the wavelengths of the output light corresponding to different laser transmitters 1 may be different, and one receiver 2 may receive lasers of multiple wavelengths.
在一个实施方式中,发射逆射腔镜1.1由反射镜组件构成,接收逆射腔镜2.1由输出镜组件构成。如图6所示,反射镜组件包括位于激光的反射路径或入射路径上的反射镜1.11和聚焦透镜1.12,所述反射镜1.11的反射面朝向增益介质设置,反射镜1.11和增益介质之间设置聚焦透镜1.12,反射镜1.1与聚焦透镜1.12的焦平面重合设置。此处需要解释的是,反射镜1.11为对照射到其反射面上的光线进行全部反射的平面镜。In one embodiment, the transmitting retroreflective cavity mirror 1.1 is composed of a mirror assembly, and the receiving retroreflective cavity mirror 2.1 is composed of an output mirror assembly. As shown in FIG. 6 , the mirror assembly includes a mirror 1.11 and a focusing lens 1.12 located on the reflection path or incident path of the laser light. The reflective surface of the mirror 1.11 is arranged toward the gain medium, and the mirror 1.11 is arranged between the gain medium and the gain medium. The focusing lens 1.12, the reflecting mirror 1.1 and the focal plane of the focusing lens 1.12 are arranged to coincide with each other. What needs to be explained here is that the reflecting mirror 1.11 is a plane mirror that fully reflects the light irradiated on its reflecting surface.
如图7所示,输出镜组件包括位于激光的反射路径或入射路径上的反射镜2.11和聚焦透镜2.12,所述反射镜2.11的反射面朝向增益介质设置,反射镜2.11和增益介质之间设置聚焦透镜2.12,反射镜2.11与聚焦透镜2.12的焦平面重合设置。此处需要解释的是,反射镜2.11为对照射到其反射面上的光线部分反射部分透过的平面镜。As shown in FIG. 7 , the output mirror assembly includes a mirror 2.11 and a focusing lens 2.12 located on the reflection path or incident path of the laser light. The reflection surface of the mirror 2.11 is arranged toward the gain medium, and the mirror 2.11 is arranged between the gain medium and the gain medium. The focusing lens 2.12 and the reflecting mirror 2.11 are arranged to coincide with the focal plane of the focusing lens 2.12. It should be explained here that the reflector 2.11 is a plane mirror that partially reflects and partially transmits the light irradiated on its reflecting surface.
根据几何光学原理,焦平面上的点为焦点,焦点是指光轴与焦平面相交的点,从焦点发出的光经过聚焦透镜后,都沿相同的方向发射,根据光路可逆原理,以一定角度入射穿过聚焦透镜的光,经过平面镜反射后再次穿过聚焦透镜之后的反射光,跟原来的入射光的方向是相反的。因此这种结构实现了逆射腔镜的功能。如此,在解决外谐振腔激光系统对终端腔镜对准要求低,容易出光的基础上,同时避免现有角锥镜带来的体积大、集成困难、衍射损耗大等问题。According to the principle of geometric optics, the point on the focal plane is the focal point. The focal point refers to the point where the optical axis intersects the focal plane. The light emitted from the focal point is emitted in the same direction after passing through the focusing lens. The light incident through the focusing lens, after being reflected by the plane mirror and then passing through the focusing lens again, the reflected light is opposite to the direction of the original incident light. Therefore, this structure realizes the function of the retro-cavity mirror. In this way, the external resonator laser system has low requirements on the alignment of the terminal cavity mirror and is easy to emit light, and at the same time avoids the problems of large volume, difficult integration, and large diffraction loss caused by the existing cube mirror.
在一个实施方式中,所述聚焦透镜1.12和聚焦透镜2.12均为凸透镜。凸透镜可以选择常规凸透镜或平凸透镜。在本实施方式中,所述聚焦透镜1.12和聚焦透镜2.12均为常规凸透镜(即相对两面均为凸面结构的透镜)。常规凸透镜与反射镜1.11相对设置形成反射镜组件,或常规凸透镜与反射镜2.11相对设置形成输出镜组件。采用常规凸透镜作为聚焦透镜1.12和聚焦透镜2.12只需满足常规凸透镜设置在反射镜1.11与增益介质中间,或反射镜2.11与增益介质中间,并且反射镜1.11或反射镜2.11与常规凸透镜的焦平面重合即可。常规凸透镜设置安装时没有正反面要求,易于安装与反射镜1.11形成反射镜组件或与反射镜2.11形成输出镜组件。In one embodiment, both the focusing lens 1.12 and the focusing lens 2.12 are convex lenses. The convex lens can be selected from conventional convex lens or plano-convex lens. In this embodiment, the focusing lens 1.12 and the focusing lens 2.12 are both conventional convex lenses (ie, lenses with convex structures on both opposite sides). The conventional convex lens is arranged opposite to the mirror 1.11 to form a mirror assembly, or the conventional convex lens is arranged opposite to the mirror 2.11 to form an output mirror assembly. To use a conventional convex lens as focusing lens 1.12 and focusing lens 2.12, it only needs to satisfy that the conventional convex lens is arranged between the reflector 1.11 and the gain medium, or between the reflector 2.11 and the gain medium, and the focal plane of the reflector 1.11 or the reflector 2.11 coincides with the conventional convex lens That's it. There is no requirement on the front and back of the conventional convex lens when it is installed and installed, and it is easy to be installed to form a reflector assembly with the reflector 1.11 or an output mirror assembly with the reflector 2.11.
在另一个实施方式中,所述聚焦透镜1.12和聚焦透镜2.12均为平凸透镜,所述平凸透镜靠近增益介质的一侧面为平面结构,远离增益介质的一侧面为凸面结构。即平凸透镜朝向反射镜1.11或反射镜2.11的一侧为凸面结构,远离反射镜1.11或反射镜2.11的一侧为平面结构。平凸透镜和反射镜1.11之间,或平凸透镜和反射镜2.11之间可以是真空,或者填充空气或其他介质。如此实现反射镜组件和输出镜组件两面都是平面,在终端上面的集成比较方便,没有积灰问题,没有角锥棱镜三面交接处的衍射损耗问题。In another embodiment, the focusing lens 1.12 and the focusing lens 2.12 are both plano-convex lenses, one side of the plano-convex lens close to the gain medium is a plane structure, and one side far from the gain medium is a convex structure. That is, the side of the plano-convex lens facing the mirror 1.11 or the mirror 2.11 is a convex structure, and the side away from the mirror 1.11 or the mirror 2.11 is a plane structure. Between the plano-convex lens and the mirror 1.11, or between the plano-convex lens and the mirror 2.11, there may be a vacuum, or filled with air or other medium. In this way, both sides of the reflector assembly and the output mirror assembly are flat, and the integration on the terminal is relatively convenient, there is no problem of dust accumulation, and there is no problem of diffraction loss at the intersection of the three sides of the corner cube prism.
在另一个实施方式中,所述聚焦透镜1.12为平凸透镜,聚焦透镜2.12为常规凸透镜(即相对两面均为凸面结构的透镜)。所述平凸透镜靠近增益介质的一侧面为平面结构,远离增益介质的一侧面为凸面结构。即平凸透镜朝向反射镜1.11一侧为凸面结构远离反射镜1.11的一侧为平面结构。平凸透镜和反射镜1.11之间,或常规凸透镜和反射镜2.11之间可以是真空,或者填充空气或其他介质。如此实现反射镜组件两面都是平面,在终端上面的集成比较方便,没有积灰问题,没有角锥棱镜三面交接处的衍射损耗问题。In another embodiment, the focusing lens 1.12 is a plano-convex lens, and the focusing lens 2.12 is a conventional convex lens (ie, a lens with a convex structure on both opposite sides). One side of the plano-convex lens close to the gain medium is a plane structure, and one side away from the gain medium is a convex structure. That is, the side of the plano-convex lens facing the mirror 1.11 is a convex structure and the side away from the mirror 1.11 is a plane structure. Between the plano-convex lens and the mirror 1.11, or between the conventional convex lens and the mirror 2.11, there can be a vacuum, or filled with air or other medium. In this way, both sides of the mirror assembly are flat, the integration on the terminal is relatively convenient, there is no problem of dust accumulation, and there is no problem of diffraction loss at the intersection of the three sides of the corner cube prism.
在另一个实施方式中,所述聚焦透镜1.12为常规凸透镜(即相对两面均为凸面结构的透镜),聚焦透镜2.12均为平凸透镜。所述平凸透镜靠近增益介质的一侧面为平面结构,远离增益介质的一侧面为凸面结构。即平凸透镜朝向反射镜2.11的一侧为凸面结构,远离反射镜2.11的一侧为平面结构。平凸透镜和反射镜2.11之间可以是真空,或者填充空气或其他介质。如此实现反射镜组件和输出镜组件两面都是平面,在终端上面的集成比较方便,没有积灰问题,没有角锥棱镜三面交接处的衍射损耗问题。In another embodiment, the focusing lens 1.12 is a conventional convex lens (ie, a lens with a convex structure on both opposite sides), and the focusing lens 2.12 is a plano-convex lens. One side of the plano-convex lens close to the gain medium is a plane structure, and one side away from the gain medium is a convex structure. That is, the side of the plano-convex lens facing the mirror 2.11 is a convex structure, and the side away from the mirror 2.11 is a plane structure. The space between the plano-convex lens and the mirror 2.11 can be a vacuum, or filled with air or other medium. In this way, both sides of the reflector assembly and the output mirror assembly are flat, and the integration on the terminal is relatively convenient, there is no problem of dust accumulation, and there is no problem of diffraction loss at the intersection of the three sides of the corner cube prism.
凸透镜具有聚焦作用,而激光的功率密度很高,容易造成反射镜的损伤,因此需要用耐强光的材料来制造反射镜,这样无疑增加了成本。为了减小聚焦的影响,可以将反射镜的位置更改为从焦平面沿光轴向前(靠近焦平面)或向后(远离焦平面)平移一小段距离,能大大降低聚焦光强。然而反射镜的位置不在焦平面时,就不满足逆射条件了。The convex lens has a focusing function, and the power density of the laser is very high, which is easy to cause damage to the mirror. Therefore, it is necessary to use a material resistant to strong light to manufacture the mirror, which undoubtedly increases the cost. To reduce the effects of focusing, the position of the mirror can be changed to translate a small distance forward (closer to the focal plane) or backward (away from the focal plane) along the optical axis from the focal plane, which can greatly reduce the focused light intensity. However, when the position of the mirror is not in the focal plane, the retroreflection condition is not satisfied.
如图8-11所示,图中虚线为对照光路,实线为实际光路。设凸透镜3的入射角θ为入射光线与光轴3.2的夹角,值域为(-π/2,π/2),当光线从左到右入射时入射角θ<0,反之θ>0,又以光轴3.2与凸透镜的焦平面3.1的焦点为原点,x轴方向从右向左,则根据几何光学原理,如果没有反射镜1.11/2.11,入射光经过凸透镜3折射后与凸透镜的焦平面3.1的交点的x坐标为f*tanθ,其中f是凸透镜3的焦距。若反射镜1.11/2.11从凸透镜的焦平面3.1往凸透镜3方向平移距离d,当入射光与凸透镜3的交点x坐标 大于f*tanθ时,则反射后经凸透镜3折射的光线跟原来相比,会向光轴3.2方向偏转,(图8所示),偏转程度比较大时,又会向远离光轴3.2的方向偏转(图9所示),当入射光与凸透镜3的交点x坐标小于f*tanθ时,则反射后经凸透镜3折射的光线跟原来相比,会向远离光轴3.2的方向偏转(图10所示)。As shown in Figure 8-11, the dotted line in the figure is the control optical path, and the solid line is the actual optical path. Let the incident angle θ of the convex lens 3 be the angle between the incident ray and the optical axis 3.2, the value range is (-π/2, π/2), when the light is incident from left to right, the incident angle θ<0, otherwise θ>0 , and take the focal point of the optical axis 3.2 and the focal plane 3.1 of the convex lens as the origin, and the x-axis direction is from right to left, according to the principle of geometric optics, if there is no reflector 1.11/2.11, the incident light is refracted by the convex lens 3 and the focal point of the convex lens The x-coordinate of the intersection of the planes 3.1 is f*tan θ, where f is the focal length of the convex lens 3 . If the mirror 1.11/2.11 is translated by a distance d from the focal plane 3.1 of the convex lens to the direction of the convex lens 3, when the x-coordinate of the intersection point of the incident light and the convex lens 3 is greater than f*tanθ, then the light refracted by the convex lens 3 after reflection is compared with the original, It will be deflected in the direction of the optical axis 3.2 (as shown in Figure 8). When the degree of deflection is relatively large, it will be deflected in the direction away from the optical axis 3.2 (as shown in Figure 9). When the x-coordinate of the intersection of the incident light and the convex lens 3 is less than f When *tanθ, the light refracted by the convex lens 3 after reflection will be deflected in the direction away from the optical axis 3.2 compared with the original (as shown in Figure 10).
而反射镜1.11/2.11自凸透镜的焦平面3.1向远离凸透镜3方向移动,则反射后经凸透镜3折射的光线跟原来比,会向靠近光轴3.2的方向偏转(如图11所示)。同理可分析其余的情况。一般情况下,考察入射角是否增大,受三个条件的影响,条件1是反射镜平移方向是向凸透镜方向移近(F)还是远离凸透镜方向(B),条件2是入射光的方向在x轴上是正向,即从右到左(F)还是反向(B),条件3是入射光与光轴交点与前焦点相比,是y轴正向(F)还是反向(B),设y轴正向是垂直于x轴,从反射镜到凸透镜的方向。三个条件是FBB、FFF、BBF或BFB时,会导致下一次入射角变大,三个条件是FBF、FFB、BBB、BFF时,会导致下一次入射角变小。以上分析都基于平面分析,实际的物体是立体的,取光轴与入射光所在的平面作为分析平面。And the mirror 1.11/2.11 moves from the focal plane 3.1 of the convex lens to the direction away from the convex lens 3, the light refracted by the convex lens 3 after reflection will be deflected toward the direction closer to the optical axis 3.2 than the original (as shown in Figure 11). The rest of the cases can be analyzed in the same way. In general, to investigate whether the incident angle increases, it is affected by three conditions. Condition 1 is whether the mirror translation direction is moving closer to the direction of the convex lens (F) or away from the direction of the convex lens (B). Condition 2 is that the direction of the incident light is in the direction of the convex lens. Is it forward on the x-axis, that is, from right to left (F) or reverse (B), and condition 3 is whether the intersection of the incident light and the optical axis is forward (F) or reverse (B) compared to the front focus on the y-axis , let the positive y-axis be perpendicular to the x-axis, from the mirror to the convex lens. When the three conditions are FBB, FFF, BBF or BFB, the next incident angle will become larger, and when the three conditions are FBF, FFB, BBB, and BFF, the next incident angle will become smaller. The above analysis is based on plane analysis. The actual object is three-dimensional, and the plane where the optical axis and the incident light are located is taken as the analysis plane.
实际应用中,对于反射镜组件和输出镜组件,条件2是相同的,稳定谐振时,条件3也是相同的,因此只有在反射镜组件和输出镜组件的条件1不相同时,才会出现一次入射角变大,一次入射角变小的情况,否则入射角会一直变小或变大,导致光路偏出谐振腔,从而大大降低出光功率或导致不出光。因此可以将反射镜1.11自焦平面1.121向远离聚焦透镜1.12的方向平移一定距离,而反射镜2.11自焦平面2.121向靠近聚焦透镜2.12的方向平移一定距离,或者将反射镜1.11自焦平面1.121向靠近聚焦透镜1.12的方向平移一定距离,而反射镜2.11自焦平面2.121向远离聚焦透镜2.12的方向平移一定距离(图12所示),这样使得在一次反射角度发生偏移时,下一次反射会得到校正,为了控制偏转角误差,平移距离控制在0.1f以内。通过这种方式,减小了聚焦对反射镜1.11或反射镜2.11的损伤可能,同时在一定程度上维持了谐振腔的作用。In practical applications, the condition 2 is the same for the mirror assembly and the output mirror assembly, and the condition 3 is also the same when the resonance is stable, so only when the condition 1 of the mirror assembly and the output mirror assembly is different, it will appear once. When the incident angle increases, the primary incident angle decreases. Otherwise, the incident angle will always decrease or increase, causing the optical path to deviate from the resonator, thereby greatly reducing the output power or causing no light. Therefore, the mirror 1.11 can be translated a certain distance from the focal plane 1.121 to the direction away from the focusing lens 1.12, and the mirror 2.11 can be translated a certain distance from the focal plane 2.121 to the direction close to the focusing lens 2.12, or the mirror 1.11 can be translated from the focal plane 1.121 to the direction of the focusing lens 2.12. The direction close to the focusing lens 1.12 translates a certain distance, while the mirror 2.11 translates a certain distance from the focal plane 2.121 to the direction away from the focusing lens 2.12 (as shown in Figure 12), so that when the angle of one reflection is shifted, the next reflection will To get the correction, in order to control the deflection angle error, the translation distance is controlled within 0.1f. In this way, the possibility of damage to the mirror 1.11 or the mirror 2.11 by focusing is reduced, while maintaining the function of the resonator to a certain extent.
在另一个实施例中,反射镜1.11与焦平面1.121平行设置。反射镜2.11与焦平面2.121平行设置。如此实现减小聚焦对反射镜1.11或反射镜2.11的损伤,增加激光系统各元器件的使用寿命的目的。In another embodiment, the mirror 1.11 is arranged parallel to the focal plane 1.121. The mirror 2.11 is arranged parallel to the focal plane 2.121. In this way, the purpose of reducing the damage to the reflecting mirror 1.11 or the reflecting mirror 2.11 caused by focusing and increasing the service life of each component of the laser system is achieved.
进一步的,反射镜1.11设置在焦平面1.121靠近聚焦透镜1.12的一侧,所述反射镜2.11设置在焦平面2.121远离聚焦透镜2.12的一侧;或者,所述反射镜1.11设置在焦平面1.121远离聚焦透镜1.12的一侧;所述反射镜2.11设置在焦平面2.121靠近聚焦透镜2.12的一侧。Further, the reflector 1.11 is arranged on the side of the focal plane 1.121 close to the focusing lens 1.12, and the reflector 2.11 is arranged on the side of the focal plane 2.121 away from the focusing lens 2.12; or, the reflector 1.11 is arranged on the side of the focal plane 1.121 away from the focusing lens 2.12 One side of the focusing lens 1.12; the mirror 2.11 is arranged on the side of the focal plane 2.121 close to the focusing lens 2.12.
在一个实施方式中,聚焦透镜1.12和聚焦透镜2.12的焦距均为f;所述反射镜1.11与焦平面1.121的距离、所述反射镜2.11与焦平面2.121的距离均为d。在减小聚焦对反射镜1.11或反射镜2.11的损伤的基础上,解决反射镜的位置不在焦平面上,反射光偏出谐振腔的问题。In one embodiment, the focal lengths of the focusing lens 1.12 and the focusing lens 2.12 are both f; the distance between the reflecting mirror 1.11 and the focal plane 1.121 and the distance between the reflecting mirror 2.11 and the focal plane 2.121 are both d. On the basis of reducing the damage to the mirror 1.11 or the mirror 2.11 caused by focusing, the problem that the position of the mirror is not on the focal plane and the reflected light is deflected out of the resonant cavity is solved.
在另一个实施方式中,d小于或等于f/10。如此减小了聚焦对反射镜1.11或反射镜2.11的损伤可能,同时在一定程度上维持了谐振腔的作用。In another embodiment, d is less than or equal to f/10. This reduces the possibility of damage to the mirror 1.11 or the mirror 2.11 caused by focusing, while maintaining the function of the resonator to a certain extent.
在一种实施方式中,如图13所示,聚焦透镜1.12和/或聚焦透镜2.12为超表面透 镜4,即采用超表面透镜4来实现凸透镜的聚焦功能,超表面透镜4靠近增益介质的一侧面上设置超表面结构,远离增益介质的一侧面为未设置超表面结构的平面结构;或者超表面透镜4相对两面均设置超表面结构。In one embodiment, as shown in FIG. 13 , the focusing lens 1.12 and/or the focusing lens 2.12 is a meta-surface lens 4, that is, the meta-surface lens 4 is used to realize the focusing function of the convex lens, and the meta-surface lens 4 is close to a part of the gain medium. A metasurface structure is arranged on the side surface, and the side away from the gain medium is a plane structure without a metasurface structure; or the metasurface lens 4 is provided with a metasurface structure on two opposite sides.
传统凸透镜的聚焦作用通过一个或两个有一定曲率的面形成,受到“制镜方程”的约束,即1/f=(n/n m-1)[1/R 1-1/R 2+(n-1)δ/(nR 1R 2)],其中f是凸透镜焦距,n是凸透镜材料的折射率,n m是凸透镜周围物质的折射率,R 1和R 2分别是凸透镜靠近光源和远离光源的表面的曲率半径,δ是凸透镜的厚度(沿主光轴方向的凸透镜两个面之间的距离)。通常应用当中凸透镜周围是空气,可以认为n m=1,对于上述一面是平面的凸透镜,凸透镜平面更靠近光源,因此R 1=∞,所以方程可简化为f=-R 2/(n-1),即焦距受到凸透镜曲率和材料折射率的限制,对于通常的材料,n<2,因此|f|>R 2。虽然存在折射率大于2的材料,但通常价格比较贵,而且对于f的缩小很有限。一般的凸透镜材料用玻璃制作,折射率约为1.5,因此f=2*R 2,曲率半径又受到凸透镜尺寸的限制,对于球形凸透镜,曲率半径不小于凸透镜半径尺寸,所以焦距不小于凸透镜直径尺寸。以平面反射镜位于凸透镜的焦平面上为例,因此反射镜组件或输出镜组件的厚度大于焦距,通常也大于传统凸透镜直径尺寸,这样就导致反射镜组件或输出镜组件厚度跟尺寸大小之间的矛盾,反射镜组件或输出镜组件尺寸过小会影响激光谐振,会降低激光效率和出光功率,如果要保证一定的尺寸,则反射镜组件或输出镜组件会过厚。 The focusing effect of a traditional convex lens is formed by one or two surfaces with a certain curvature, which is constrained by the "mirror making equation", that is, 1/f=(n/n m -1)[1/R 1 -1/R 2 + (n-1)δ/(nR 1 R 2 )], where f is the focal length of the convex lens, n is the refractive index of the convex lens material, n m is the refractive index of the material surrounding the convex lens, and R 1 and R 2 are the convex lens close to the light source and the The radius of curvature of the surface away from the light source, δ is the thickness of the convex lens (the distance between the two faces of the convex lens in the direction of the main optical axis). In general, the convex lens is surrounded by air, and it can be considered that n m = 1. For the above-mentioned convex lens with a flat surface, the convex lens plane is closer to the light source, so R 1 =∞, so the equation can be simplified to f=-R 2 /(n-1 ), that is, the focal length is limited by the curvature of the convex lens and the refractive index of the material, for common materials, n<2, so |f|>R 2 . Although materials with refractive indices greater than 2 exist, they are generally more expensive and have limited reductions in f. The general convex lens material is made of glass, the refractive index is about 1.5, so f=2*R 2 , and the radius of curvature is limited by the size of the convex lens. For a spherical convex lens, the radius of curvature is not less than the radius of the convex lens, so the focal length is not less than the diameter of the convex lens. . Taking the plane mirror located on the focal plane of the convex lens as an example, the thickness of the mirror assembly or the output mirror assembly is larger than the focal length, and usually larger than the diameter of the traditional convex lens, which results in a difference between the thickness of the mirror assembly or the output mirror assembly and the size. The contradiction of the mirror assembly or the output mirror assembly is too small, which will affect the laser resonance and reduce the laser efficiency and light output power. If a certain size is to be guaranteed, the reflector assembly or the output mirror assembly will be too thick.
因此,聚焦透镜1.12或聚焦透镜2.12使用凸透镜3(平凸透镜或常规凸透镜)存在一个问题,如图14所示,反射光与入射光之间虽然平行,但有一定的距离D,根据几何光学原理可以求得D=2(L*cosθ+f*sinθ),其中L为入射点离凸透镜3中心的距离,θ为入射方向与光轴3.2的夹角,即入射角,f为透镜的焦距。由于焦距f难以做小,即使L=0,也有D=2f*sinθ,当入射角较大时,反射光与入射光之间平移的距离就会比较大。由于增益介质当中粒子数反转区域有限,即受泵浦源影响实现高能级电子数较多的区域,D过大会导致反射光偏出反转区域之外,就起不到受激放大的作用,这样轻则大大降低出光功率,重则导致谐振失败。另外,反射光与入射光在凸透镜3表面之间的距离为K=2(L+f*tanθ),在f和θ较大的时候,K较大会导致反射光偏出透镜,造成无法逆射的后果,实质上限制了反射镜组件和输出镜组件的有效面积以及有效入射角。Therefore, there is a problem with the use of convex lens 3 (plano-convex lens or conventional convex lens) for focusing lens 1.12 or focusing lens 2.12. As shown in Figure 14, although the reflected light and the incident light are parallel, there is a certain distance D. According to the principle of geometric optics D=2(L*cosθ+f*sinθ) can be obtained, where L is the distance between the incident point and the center of the convex lens 3, θ is the angle between the incident direction and the optical axis 3.2, that is, the incident angle, and f is the focal length of the lens. Since the focal length f is difficult to make small, even if L=0, there is D=2f*sinθ. When the incident angle is large, the translation distance between the reflected light and the incident light will be relatively large. Since the population inversion area in the gain medium is limited, that is, the area with a large number of high-level electrons affected by the pump source, if D is too large, the reflected light will be deflected outside the inversion area, and the effect of stimulated amplification will not be achieved. , this will greatly reduce the light output power, and will lead to resonance failure. In addition, the distance between the reflected light and the incident light on the surface of the convex lens 3 is K=2(L+f*tanθ). When f and θ are larger, the larger K will cause the reflected light to be deflected out of the lens, resulting in no reflection. As a result, the effective area and effective angle of incidence of the mirror assembly and the output mirror assembly are substantially limited.
超表面技术是一种新兴的技术,通过一定的结构来改变和控制电磁波、声波、热等。在光学上,亚波长的微粒可以改变光的传播相位,表现为光的传播方向的变化。由于光波长通常为几百纳米到几百微米量级,如图15所示,通过在平面表面上加工微纳颗粒,使得不同位置的入射光通过微纳颗粒后附加不同的相位从而产生不同的偏折,实现了跟凸透镜一样的汇聚功能(如图16所示)。微纳颗粒的尺寸跟光波长有一定关系,通常为光波长的1/10至1/2的范围。微纳颗粒的形状可以有很多种,比如规则的圆形、方形、长方形、三角形,或者较复杂的“U”形、领结形等,对于特定的形状,附加相位可以通过不同的尺寸、不同的放置角度来实现。不同的尺寸是指上述的一定范围内的微纳颗粒尺寸的不同,比如半径为a的圆形颗粒附加相位为A,半径为b的圆形颗粒附加相位为B。不同的放置角度则是指相对于基准方向的夹角,比如x轴为超表面平面上的一条方向轴,跟x轴正向夹角为θ 1时,附加相位φ 1,夹角为θ 2时,附加相 位φ 2Metasurface technology is an emerging technology that can change and control electromagnetic waves, sound waves, heat, etc. through certain structures. Optically, subwavelength particles can change the propagation phase of light, manifesting as a change in the direction of light propagation. Since the wavelength of light is usually in the order of hundreds of nanometers to hundreds of micrometers, as shown in Figure 15, by processing the micro-nano particles on the flat surface, the incident light at different positions passes through the micro-nano particles and appends different phases to generate different phases. Deflection, to achieve the same convergence function as a convex lens (as shown in Figure 16). The size of micro-nano particles has a certain relationship with the wavelength of light, usually in the range of 1/10 to 1/2 of the wavelength of light. There can be many shapes of micro-nano particles, such as regular circle, square, rectangle, triangle, or more complex "U" shape, bow tie shape, etc. For a specific shape, the additional phase can pass through different sizes, different Place the angle to achieve. Different sizes refer to the differences in the size of the micro-nano particles within the above-mentioned certain range, for example, the additional phase of a circular particle with a radius of a is A, and the additional phase of a circular particle with a radius of b is B. Different placement angles refer to the included angles relative to the reference direction. For example, the x-axis is a direction axis on the metasurface plane, and when the positive angle with the x-axis is θ 1 , the additional phase is φ 1 , and the included angle is θ 2 When , add the phase φ 2 .
用超表面透镜4来实现凸透镜3的聚焦功能,可以先确定焦距,平行入射光会聚焦在焦点上,根据光路可以计算出离中心一定位置的微纳颗粒的角度偏转,从而得到附加相位,并设计相应形状和尺寸的微纳颗粒,注意相同的附加相位可能对应无穷多种形状和尺寸,可以再根据其它需求,比如损耗等来选择,通常计算比较复杂,但目前可以通过光学仿真软件模拟来选择出较好的微纳颗粒参数。如图17所示,入射光经过超表面透镜4时,由于超表面透镜4上面的微纳颗粒在不同的位置有不同的附加相位,从而形成相位梯度,使得光线发生折射。根据广义斯涅尔定律n osinθ o-n isinθ i=λ/(2π)*dφ/dx,其中n i和n o分别是超表面透镜4在入射光一侧跟折射光一侧的介质折射率,θ i和θ o分别是入射角和折射角,入射点处的相位梯度变化是dφ/dx,光波长为λ。因此如果入射角和折射角确定,则可计算出对应的相位梯度变化,即在x轴方向上,在相邻微纳颗粒的附加相位α上增加一个相位β,使得β/L=dφ/dx,其中L为在x轴方向上跟相邻微纳颗粒的距离。 Using the metasurface lens 4 to realize the focusing function of the convex lens 3, the focal length can be determined first, the parallel incident light will be focused on the focal point, and the angular deflection of the micro-nano particles at a certain position from the center can be calculated according to the optical path, so as to obtain the additional phase, and Design micro-nano particles of corresponding shape and size. Note that the same additional phase may correspond to an infinite variety of shapes and sizes, which can be selected according to other requirements, such as loss. Usually the calculation is more complicated, but it can be simulated by optical simulation software. Select better micro-nano particle parameters. As shown in FIG. 17 , when the incident light passes through the meta-surface lens 4, since the micro-nano particles on the meta-surface lens 4 have different additional phases at different positions, a phase gradient is formed and the light is refracted. According to the generalized Snell's law n o sinθ o -n i sinθ i =λ/(2π)*dφ/dx, where n i and n o are the refractive indices of the medium on the incident light side and the refracted light side of the metasurface lens 4, respectively , θ i and θ o are the incident angle and the refraction angle, respectively, the phase gradient change at the incident point is dφ/dx, and the light wavelength is λ. Therefore, if the incident angle and the refraction angle are determined, the corresponding phase gradient change can be calculated, that is, in the x-axis direction, a phase β is added to the additional phase α of the adjacent micro-nano particles, so that β/L=dφ/dx , where L is the distance from the adjacent micro-nano particles in the x-axis direction.
为了实现凸透镜聚焦的效果,通常可以先分析垂直入射光的偏折情况,确定焦距f,在透镜中心的位置上确定一个基准相位,则间隔L的相邻位置的微纳颗粒的附加相位可以计算出来,因为入射角θ i=0,折射角θo=arctan(L/f),按上述方法即可计算出来,这样从中心位置开始,沿着一个方向可计算出来每一个位置上面的附加相位,因此对于与中心位置距离为D的位置的微纳颗粒的附加相位就可以求出来。一种可能的相位是
Figure PCTCN2020099919-appb-000001
其中,以透镜的中心位置为坐标系原点,(x,y)为透镜上某一位置的坐标,f为焦距,
Figure PCTCN2020099919-appb-000002
为相位,λ为入射光的波长。
In order to achieve the focusing effect of the convex lens, the deflection of the vertically incident light can usually be analyzed first, the focal length f can be determined, and a reference phase can be determined at the center of the lens. Since the incident angle θ i = 0 and the refraction angle θo = arctan (L/f), it can be calculated according to the above method, so starting from the center position, the additional phase above each position can be calculated along one direction, Therefore, the additional phase of the micro-nano particles at a distance D from the central position can be obtained. One possible phase is
Figure PCTCN2020099919-appb-000001
Among them, the center position of the lens is the origin of the coordinate system, (x, y) is the coordinate of a certain position on the lens, f is the focal length,
Figure PCTCN2020099919-appb-000002
is the phase, and λ is the wavelength of the incident light.
上述分析只考虑了光线垂直入射的情况,当光线斜入射时,若入射角不大,可近似聚焦在副焦点上,若入射角较大时有较大的偏差,则可同时考虑垂直入射及斜入射的一个或多个入射角,选择合适的微纳颗粒,使其形状、尺寸等同时满足多个入射角的情况,以应对较大视场角的应用。The above analysis only considers the vertical incidence of light. When the light is incident obliquely, if the incident angle is not large, it can be approximately focused on the sub-focus. If the incident angle is large, there is a large deviation, and the vertical incidence and For one or more incident angles of oblique incidence, select suitable micro-nano particles so that their shape and size can meet the conditions of multiple incident angles at the same time, so as to cope with the application of large field of view.
利用超表面透镜可以实现非常短的焦距,目前已经实现了短至10倍波长的焦距,比如对于1微米波长的红外光,焦距可做到只有10微米,远远小于传统凸透镜的焦距。The use of metasurface lenses can achieve very short focal lengths. At present, focal lengths as short as 10 times the wavelength have been achieved. For example, for infrared light with a wavelength of 1 micron, the focal length can be only 10 microns, which is much smaller than the focal length of traditional convex lenses.
因此,由于超表面透镜4本身可以做得很薄,焦距可以做得很短,就可以实现很薄的逆射腔镜,并且保持一定尺寸大小,解决了尺寸与厚度的矛盾。而在L>>f时,反射光与入射光之间的距离约为2L*cosθ(此处的L为入射点到超表面透镜中心的距离,f为超表面透镜的焦距,θ为入射光的入射角度),入射光与反射光的平移距离显著小于使用传统透镜的情况,而且反射光与入射光在透镜表面之间的距离K约为2L,解决了反射光可能偏出透镜的问题。因此这种逆射腔镜可以实现更高的出光功率。Therefore, since the metasurface lens 4 itself can be made very thin and the focal length can be made very short, a very thin retro-reflecting cavity mirror can be realized, and a certain size can be maintained, thereby solving the contradiction between size and thickness. When L>>f, the distance between the reflected light and the incident light is about 2L*cosθ (where L is the distance from the incident point to the center of the metasurface lens, f is the focal length of the metasurface lens, and θ is the incident light The angle of incidence), the translation distance between the incident light and the reflected light is significantly smaller than the case of using a traditional lens, and the distance K between the reflected light and the incident light on the surface of the lens is about 2L, which solves the problem that the reflected light may deflect out of the lens. Therefore, this retro-cavity mirror can achieve higher light output power.
在一个实施方式中,所述反射镜1.11为多个位于同一平面的反射镜1.11单元组成,聚焦透镜1.12为多个位于同一平面的聚焦透镜1.12单元组成;In one embodiment, the reflecting mirror 1.11 is composed of a plurality of reflecting mirror 1.11 units located on the same plane, and the focusing lens 1.12 is composed of a plurality of focusing lens 1.12 units located on the same plane;
所述反射镜2.11为多个位于同一平面的反射镜2.11单元组成,聚焦透镜2.12为多个位于同一平面的聚焦透镜2.12单元组成。The reflecting mirror 2.11 is composed of a plurality of reflecting mirror 2.11 units located on the same plane, and the focusing lens 2.12 is composed of a plurality of focusing lens 2.12 units located on the same plane.
在另一个实施方式中,所述反射镜1.11、聚焦透镜1.12、反射镜2.11和聚焦透镜 2.12均为整体结构。In another embodiment, the reflecting mirror 1.11, the focusing lens 1.12, the reflecting mirror 2.11 and the focusing lens 2.12 are all integral structures.
在一个实施方式中,所述反射镜组件与输出镜组件间隔相对设置,反射镜组件与输出镜组件之间的区域形成谐振腔,谐振腔内设置增益介质。泵浦源激发增益介质产生辐射光,所述辐射光在谐振腔内振荡放大(辐射光在反射镜组件和输出镜组件之间多次反射增强)并从输出镜组件输出相干性好、方向集中的激光。In one embodiment, the mirror assembly and the output mirror assembly are disposed opposite to each other at intervals, the region between the mirror assembly and the output mirror assembly forms a resonant cavity, and a gain medium is arranged in the resonant cavity. The pump source excites the gain medium to generate radiation light, which is oscillated and amplified in the resonant cavity (the radiation light is reflected and enhanced multiple times between the mirror assembly and the output mirror assembly), and the output mirror assembly has good coherence and concentrated direction. of the laser.
区别于上一实施方式,如图18所示,所述激光系统还包括反射镜5,反射镜5、反射镜组件1.10和输出镜组件2.10均设置在激光的反射路径或入射路径上,反射镜5、反射镜组件1.10和输出镜组件2.10限定区域形成谐振腔,谐振腔内设置增益介质;反射镜组件1.10和输出镜组件2.10设置于增益介质的同一侧,反射镜5设置于增益介质设置反射镜组件1.10和输出镜组件2.10的一侧的相对一侧。反射镜5的反射面朝向增益介质设置。如此可使反射镜组件和输出镜组件的设置位置更加灵活。Different from the previous embodiment, as shown in FIG. 18 , the laser system further includes a reflector 5. The reflector 5, the reflector assembly 1.10 and the output mirror assembly 2.10 are all arranged on the reflection path or incident path of the laser light. 5. The limited area of the mirror assembly 1.10 and the output mirror assembly 2.10 forms a resonant cavity, and the gain medium is arranged in the resonant cavity; the mirror assembly 1.10 and the output mirror assembly 2.10 are arranged on the same side of the gain medium, and the mirror 5 is arranged on the gain medium to set the reflection Opposite side of one side of mirror assembly 1.10 and output mirror assembly 2.10. The reflection surface of the mirror 5 is disposed toward the gain medium. In this way, the arrangement positions of the mirror assembly and the output mirror assembly can be more flexible.
以上所述,仅为本申请的具体实施方式,但本申请的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本申请揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本申请的保护范围之内。因此,本申请的保护范围应以所述权利要求的保护范围为准。The above are only specific embodiments of the present application, but the protection scope of the present application is not limited to this. should be covered within the scope of protection of this application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims (12)

  1. 一种激光系统,包括:A laser system comprising:
    增益介质;gain medium;
    泵浦源,用于激发所述增益介质产生辐射光;a pump source for exciting the gain medium to generate radiant light;
    反射镜组件,用于对入射的辐射光进行全反射;A reflector assembly for total reflection of incident radiation;
    输出镜组件,用于对入射的辐射光进行部分反射;an output mirror assembly for partially reflecting the incident radiation;
    谐振腔,至少由反射镜组件和输出镜组件限定形成,其内设置所述增益介质;a resonant cavity, at least defined and formed by a mirror assembly and an output mirror assembly, in which the gain medium is arranged;
    其特征在于,It is characterized in that,
    所述反射镜组件包括:第一反射镜和第一聚焦透镜,所述第一反射镜的反射面朝向增益介质设置,所述第一聚焦透镜设置于第一反射镜和增益介质之间,所述第一反射镜设置在与第一聚焦透镜的主光轴垂直的平面上;The reflecting mirror assembly includes: a first reflecting mirror and a first focusing lens, the reflecting surface of the first reflecting mirror is disposed towards the gain medium, and the first focusing lens is disposed between the first reflecting mirror and the gain medium, so The first reflecting mirror is arranged on a plane perpendicular to the main optical axis of the first focusing lens;
    所述输出镜组件包括:第二反射镜和第二聚焦透镜,所述第二反射镜的反射面朝向增益介质设置,所述第二聚焦透镜设置于第二反射镜和增益介质之间,所述第二反射镜设置在与第二聚焦透镜的主光轴垂直的平面上。The output mirror assembly includes: a second reflecting mirror and a second focusing lens, the reflecting surface of the second reflecting mirror is disposed toward the gain medium, and the second focusing lens is disposed between the second reflecting mirror and the gain medium, so The second reflecting mirror is arranged on a plane perpendicular to the main optical axis of the second focusing lens.
  2. 根据权利要求1所述的激光系统,其特征在于,所述第一反射镜设置在第一聚焦透镜的焦平面上,所述第二反射镜设置在第二聚焦透镜的焦平面上。The laser system according to claim 1, wherein the first reflecting mirror is disposed on the focal plane of the first focusing lens, and the second reflecting mirror is disposed on the focal plane of the second focusing lens.
  3. 根据权利要求1所述的激光系统,其特征在于,所述第一反射镜设置在第一聚焦透镜的焦平面靠近第一聚焦透镜的一侧,所述第二反射镜设置在第二聚焦透镜的焦平面远离第二聚焦透镜的一侧;The laser system according to claim 1, wherein the first reflecting mirror is disposed on a side of the focal plane of the first focusing lens close to the first focusing lens, and the second reflecting mirror is disposed on the second focusing lens The focal plane is far from the side of the second focusing lens;
    或者,所述第一反射镜设置在第一聚焦透镜的焦平面远离第一聚焦透镜的一侧;所述第二反射镜设置在第二聚焦透镜的焦平面靠近第二聚焦透镜的一侧。Alternatively, the first reflection mirror is arranged on the side of the focal plane of the first focusing lens away from the first focusing lens; the second reflection mirror is arranged on the side of the focal plane of the second focusing lens close to the second focusing lens.
  4. 根据权利要求3所述的激光系统,其特征在于,所述第一聚焦透镜和第二聚焦透镜的焦距均为f,所述第一反射镜与第一聚焦透镜的焦平面的距离、所述第二反射镜与第二聚焦透镜的焦平面的距离均为d。The laser system according to claim 3, wherein the focal lengths of the first focusing lens and the second focusing lens are both f, the distance between the first reflecting mirror and the focal plane of the first focusing lens, the The distances between the second reflecting mirror and the focal plane of the second focusing lens are both d.
  5. 根据权利要求4所述的激光的系统,其特征在于,所述d小于或等于f/10。The laser system according to claim 4, wherein the d is less than or equal to f/10.
  6. 根据权利要求1-5任意一项所述的激光系统,其特征在于,所述第一聚焦透镜和/或第二聚焦透镜为凸透镜。The laser system according to any one of claims 1-5, wherein the first focusing lens and/or the second focusing lens are convex lenses.
  7. 根据权利要求6所述的激光系统,其特征在于,所述第一聚焦透镜和/或第二聚焦透镜为平凸透镜,所述平凸透镜靠近增益介质的一侧面为平面结构,远离增益介质的一侧面为凸面结构。The laser system according to claim 6, wherein the first focusing lens and/or the second focusing lens is a plano-convex lens, a side surface of the plano-convex lens close to the gain medium is a plane structure, and a side away from the gain medium is a plane structure. The sides are convex structures.
  8. 根据权利要求1-5任意一项所述的激光系统,其特征在于,所述第一聚焦透镜和/或第二聚焦透镜为超表面透镜,所述超表面透镜靠近增益介质的一侧面上设置超表面结构。The laser system according to any one of claims 1-5, wherein the first focusing lens and/or the second focusing lens is a meta-surface lens, and the meta-surface lens is arranged on a side surface close to the gain medium metasurface structure.
  9. 根据权利要求1-8任意一项所述的激光系统,其特征在于,所述第一反射镜为多个位于同一平面的第一反射镜单元组成,第一聚焦透镜为多个位于同一平面的第一聚焦透镜单元组成;The laser system according to any one of claims 1-8, wherein the first reflecting mirror is composed of a plurality of first reflecting mirror units located on the same plane, and the first focusing lens is a plurality of first focusing lenses located on the same plane The first focusing lens unit is composed;
    所述第二反射镜为多个位于同一平面的第二反射镜单元组成,第二聚焦透镜为多个位于同一平面的第二聚焦透镜单元组成;The second reflecting mirror is composed of a plurality of second reflecting mirror units located on the same plane, and the second focusing lens is composed of a plurality of second focusing lens units located on the same plane;
    或者,所述第一反射镜、第一聚焦透镜、第二反射镜和第二聚焦透镜均为整体结 构。Alternatively, the first reflecting mirror, the first focusing lens, the second reflecting mirror and the second focusing lens are all integral structures.
  10. 根据权利要求1-9任意一项所述的激光系统,其特征在于,所述反射镜组件和输出镜组件间隔相对设置,反射镜组件和输出镜组件之间的区域形成谐振腔。The laser system according to any one of claims 1-9, wherein the mirror assembly and the output mirror assembly are disposed opposite to each other at intervals, and a region between the mirror assembly and the output mirror assembly forms a resonant cavity.
  11. 根据权利要求1-9任意一项所述的激光系统,其特征在于,所述激光系统还包括第三反射镜,第三反射镜、反射镜组件和输出镜组件均设置在激光的反射路径或入射路径上;The laser system according to any one of claims 1-9, characterized in that, the laser system further comprises a third reflection mirror, and the third reflection mirror, the reflection mirror assembly and the output mirror assembly are all arranged on the reflection path or the output mirror assembly of the laser light. on the incident path;
    第三反射镜、反射镜组件和输出镜组件限定形成谐振腔,反射镜组件和输出镜组件设置于增益介质的同一侧,第三反射镜设置于增益介质设置反射镜组件和输出镜组件一侧的相对一侧,第三反射镜的反射面朝向增益介质设置。The third reflector, the reflector assembly and the output mirror assembly define a resonant cavity, the reflector assembly and the output mirror assembly are disposed on the same side of the gain medium, and the third reflector is disposed on the side of the gain medium where the reflector assembly and the output mirror assembly are disposed On the opposite side of the third mirror, the reflective surface of the third mirror is disposed toward the gain medium.
  12. 根据权利要求1-11任意一项所述的激光系统,其特征在于,所述增益介质可以为固体增益介质、气体增益介质、半导体增益介质、液体增益介质中的任意一种。The laser system according to any one of claims 1-11, wherein the gain medium can be any one of a solid gain medium, a gas gain medium, a semiconductor gain medium, and a liquid gain medium.
PCT/CN2020/099919 2020-07-02 2020-07-02 Laser system WO2022000419A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020186742A1 (en) * 2001-05-03 2002-12-12 Flint Graham W. Single mode autocoupled resonator for telecommunications
CN202059039U (en) * 2011-03-30 2011-11-30 北京工业大学 Double cladding photonic crystal fiber laser of 980nm
CN203617541U (en) * 2013-11-21 2014-05-28 武汉洛芙科技有限公司 Passive mode-locked picosecond laser
CN209434593U (en) * 2019-01-28 2019-09-24 刘振林 A kind of long-pulse green light laser

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020186742A1 (en) * 2001-05-03 2002-12-12 Flint Graham W. Single mode autocoupled resonator for telecommunications
CN202059039U (en) * 2011-03-30 2011-11-30 北京工业大学 Double cladding photonic crystal fiber laser of 980nm
CN203617541U (en) * 2013-11-21 2014-05-28 武汉洛芙科技有限公司 Passive mode-locked picosecond laser
CN209434593U (en) * 2019-01-28 2019-09-24 刘振林 A kind of long-pulse green light laser

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