CN210626790U - Beam shaping assembly, module and laser module - Google Patents
Beam shaping assembly, module and laser module Download PDFInfo
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- CN210626790U CN210626790U CN201921719711.9U CN201921719711U CN210626790U CN 210626790 U CN210626790 U CN 210626790U CN 201921719711 U CN201921719711 U CN 201921719711U CN 210626790 U CN210626790 U CN 210626790U
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Abstract
The utility model provides a light beam plastic subassembly, module and laser module relates to semiconductor laser technical field. The beam shaping assembly includes: a fast axis shaping mirror and a slow axis shaping mirror. The focal length of the fast axis shaping mirror is larger than the preset focal length, and the slow axis shaping mirror has a single surface type. The fast axis shaping mirror and the slow axis shaping mirror are arranged on the light path, and the incident light beam passes through the fast axis shaping mirror and the slow axis shaping mirror and is emitted out of the shaped light beam. Because the focal length of the fast axis shaping mirror is larger than the preset focal length, the fast axis shaping mirror can be separated from the light source, and the requirement on the tolerance of the light source is reduced. Meanwhile, the slow axis shaping mirror has a single surface type, so that the surface type of the slow axis shaping mirror does not need to be aligned and adjusted on line, the slow axis shaping mirror can be directly positioned and assembled, the tolerance of beam shaping is increased, the production difficulty is reduced, and the productivity is improved.
Description
Technical Field
The utility model relates to a semiconductor laser technical field particularly, relates to a light beam plastic subassembly, module and laser module.
Background
In the field of semiconductor laser applications, it is generally necessary to shape the laser beam emitted by the laser light source.
The existing laser beam shaping usually adopts a small Fast-Axis-collimating mirror (FAC) and a double-sided lens, for example, a small FAC is arranged at the front end close to the output surface of the laser to compress the laser and output a beam with a divergence angle, the double-sided lens is arranged at the rear end of the small FAC, the two planes are mutually perpendicular, the Fast-Axis divergence beam output by the FAC can be collimated, the slow-Axis divergence beam is compressed, and the laser beam processed by the double-sided lens can be reflected to other optical devices to adjust the angle.
However, in the prior art, the small FAC has short focal length and poor tolerance, so that the light source for arranging the small FAC needs to be adjusted and finely aligned with the double-sided lens on line, the tolerance is low, and the productivity is greatly reduced.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a beam shaping subassembly, module and laser module to the not enough among the above-mentioned prior art to solve the light source and must carry out on-line adjustment and meticulous alignment with two-sided type lens, the tolerance is low, leads to the problem that the productivity descends by a wide margin.
In order to achieve the above object, the embodiment of the present invention adopts the following technical solutions:
in a first aspect, an embodiment of the present invention provides a light beam shaping assembly, including: and the focal length of the fast axis shaping mirror is greater than the preset focal length. The fast axis shaping mirror is arranged on the light path, and the beam after shaping is obtained after the incident beam is shaped by the fast axis shaping mirror.
Optionally, the beam shaping assembly further comprises: the slow axis shaping mirror has a single surface type. The fast axis shaping mirror and the slow axis shaping mirror are arranged on the light path, and the beam after shaping is obtained after the incident beam is shaped through the fast axis shaping mirror and the slow axis shaping mirror.
Optionally, a preset relationship is satisfied between the fast axis shaping mirror and the slow axis shaping mirror. The preset relation between the fast axis shaping mirror and the slow axis shaping mirror enables the light beams shaped by the fast axis shaping mirror to enter the slow axis shaping mirror completely. Or the preset relation between the fast axis shaping mirror and the slow axis shaping mirror ensures that the light beams shaped by the slow axis shaping mirror can all enter the fast axis shaping mirror.
Optionally, the fast axis shaping mirror is a FAC, the slow axis shaping mirror is a single-sided slow axis reflector, and a light emitting surface of the FAC faces a reflecting surface of the slow axis single-sided reflector. The light beam is emitted into the FAC to be compressed, then is emitted to the reflecting surface of the slow-axis single-face type reflector, and is emitted after being converged by the single-face type slow-axis reflector.
Optionally, the fast axis shaping mirror is a transmission type plano-convex mirror, and the slow axis shaping mirror is one of a spherical reflecting concave mirror and an aspheric reflecting concave mirror. Or the fast axis shaping mirror is a reflection type parabolic collimating mirror, and the slow axis shaping mirror is one of a spherical reflection concave mirror, an aspheric reflection concave mirror, a spherical transmissive plano-convex mirror or an aspheric transmissive plano-convex mirror. Or the fast axis shaping mirror is a transmission type meniscus mirror, and the slow axis shaping mirror is one of a spherical reflection concave mirror, an aspherical reflection concave mirror or a transmission return beveling mirror.
In a second aspect, an embodiment of the present application further provides a beam shaping module, which includes the fast axis shaping mirror provided in the first aspect, and an optical reflection element. The fast axis shaping mirror shapes the incident beam to obtain a shaped beam, and the reflecting surface of the optical reflecting element faces the emergent direction of the shaped beam and is used for reflecting the shaped beam to a preset position.
Optionally, the beam shaping module further comprises: the slow axis shaping mirror provided in the first aspect. The fast axis shaping mirror and the slow axis shaping mirror shape the incident beam to obtain a shaped beam, and the reflecting surface of the optical reflecting element faces the emergent direction of the shaped beam and is used for reflecting the shaped beam to a preset position.
In a third aspect, an embodiment of the present application further provides a laser module, where the laser module includes the beam shaping module provided in the second aspect, and a laser light source. The laser source emits laser beams, the laser beams are shaped through the fast axis shaping mirror and the slow axis shaping mirror, shaped laser beams are obtained, and the optical reflection element is used for reflecting the shaped laser beams to a preset position.
Optionally, the laser light source emits a laser beam, the laser beam enters the fast axis shaping mirror to be compressed and then exits to the reflecting surface of the slow axis shaping mirror, and the laser beam after shaping is emitted after being converged by the slow axis shaping mirror. The shaped laser beam is emitted into the reflecting surface of the optical reflecting element and is emitted to a preset position.
Optionally, the fast axis shaping mirror, the laser light source, and the optical reflection element satisfy a preset position condition, so that the optical reflection element does not interfere with the main optical path.
In a fourth aspect, an embodiment of the present application further provides a laser module, which includes the fast axis shaping mirror provided in the first aspect, and a laser light source. The laser light source emits laser beams, and the laser beams are shaped through the fast axis shaping mirror to obtain shaped laser beams.
Optionally, the laser module further comprises: the slow axis shaping mirror provided in the first aspect. The laser light source emits laser beams, and the laser beams are shaped through the fast axis shaping mirror and the slow axis shaping mirror to obtain shaped laser beams.
The utility model has the advantages that: a fast axis shaping mirror with a focal length larger than a preset focal length is arranged on a light path, and an incident beam is shaped through the fast axis shaping mirror to obtain a shaped beam. Because the focal length of the fast axis shaping mirror is larger than the preset focal length, the fast axis shaping mirror can be separated from the light source, the requirement on the tolerance of the light source is reduced, the production difficulty is reduced, and the productivity is improved.
The utility model discloses still be greater than the fast axle plastic mirror of default focus through the design and the scheme that slow axle plastic mirror that has single face type combines together, form a light beam plastic scheme that has high tolerance to based on this laser module that has high tolerance of formation, fundamentally has solved in the traditional scheme light source and lens on-line adjustment and the alignment degree of difficulty height, the technical problem that the tolerance is low, the equipment is convenient, workable, low cost has wide market perspective.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic light path diagram of a light beam shaping assembly according to an embodiment of the present invention;
fig. 2 is a schematic light path diagram of a light beam shaping assembly according to another embodiment of the present invention;
fig. 3 is a schematic light path diagram of a light beam shaping assembly according to another embodiment of the present invention;
fig. 4 is a schematic light path diagram of a light beam shaping module according to an embodiment of the present invention;
fig. 5 is a schematic light path diagram of a light beam shaping module according to an embodiment of the present invention;
fig. 6 is a schematic light path diagram of a laser module according to an embodiment of the present invention;
fig. 7 is a schematic diagram of a setting condition of a laser module according to an embodiment of the present invention;
fig. 8 is a schematic diagram of boundary conditions of a laser module according to an embodiment of the present invention;
fig. 9 is a schematic diagram of boundary conditions of a laser module according to another embodiment of the present invention;
fig. 10 is a schematic diagram of boundary conditions of a laser module according to another embodiment of the present invention;
fig. 11a is a side view of an application scenario of a laser module according to an embodiment of the present invention;
fig. 11b is a top view of an application scenario of a laser module according to an embodiment of the present invention;
fig. 11c is an oblique view of an application scene of a laser module according to an embodiment of the present invention;
fig. 12a is a side view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 12b is a top view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 12c is an oblique view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 13a is a side view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 13b is a top view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 13c is an oblique view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 14a is a side view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 14b is a top view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 14c is an oblique view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 15a is a side view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 15b is a top view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 15c is an oblique view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 15d is an oblique view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 16a is a side view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 16b is a top view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 16c is an oblique view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 17a is a side view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 17b is a top view of an application scenario of a laser module according to another embodiment of the present invention;
fig. 17c is an oblique view of an application scenario of a laser module according to another embodiment of the present invention.
Fig. 18 is a schematic optical path diagram of a laser module according to another embodiment of the present invention;
fig. 19 is a schematic optical path diagram of a laser module according to another embodiment of the present invention;
fig. 20 is a schematic optical path diagram of a laser module according to another embodiment of the present invention.
Icon: 101-a laser light source; 102-fast axis shaping mirror; 103-slow axis shaping mirror; 104-an optical reflective element; 105-a preset position; 106-concave mirror of revolution solid; 107-revolution convex surface lens.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Fig. 1 is a schematic light path diagram of a light beam shaping assembly according to an embodiment of the present invention.
As shown in fig. 1, the beam shaping assembly includes: a fast axis shaping mirror 102. The focal length of the fast axis shaping mirror 102 is greater than the preset focal length.
The fast axis shaping mirror 102 is disposed on the light path, and the incident light beam is shaped by the fast axis shaping mirror 102 to obtain a shaped light beam.
It should be noted that the term "preset focal length" means a series of focal lengths of the fast axis shaping element commonly used in the prior art, which are usually between 0.5 and 10mm, and therefore must be arranged in front of the light emitting surface of the light source. In this application, because the focus of fast axle plastic mirror is greater than predetermineeing the focus, consequently can set up fast axle plastic mirror in the position far away from the light source light emitting area, for example, predetermine the focus and be 5mm, promptly the embodiment of the utility model provides an in fast axle plastic mirror's focus should be greater than 5mm, fast axle plastic mirror this moment because the focus is bigger, consequently can set up in the position farther from the light source light emitting area for traditional fast axle plastic component.
In this embodiment, only use the fast axle plastic mirror that a is greater than preset focal length to carry out the plastic to laser beam, because the focal length of fast axle plastic mirror is greater than preset focal length, consequently can separate fast axle plastic mirror and light source, reduce the requirement to the light source tolerance, reduced the production degree of difficulty, improved the productivity.
Fig. 2 is a schematic light path diagram of a light beam shaping assembly according to another embodiment of the present invention, and fig. 3 is a schematic light path diagram of a light beam shaping assembly according to another embodiment of the present invention.
As shown in fig. 2 and 3, the beam shaping module further includes: the slow axis shaping mirror 103, the slow axis shaping mirror 103 has a single plane type.
The fast axis shaping mirror 102 and the slow axis shaping mirror 103 are disposed on the light path, and the incident light beam is shaped by the fast axis shaping mirror 102 and the slow axis shaping mirror 103 to obtain a shaped light beam.
In one possible embodiment, as shown in fig. 2, the incident beam enters the fast axis shaping mirror 102 to shape the fast axis direction, and exits the fast axis shaping mirror 102 to enter the slow axis shaping mirror 103 to shape the slow axis direction. Alternatively, as shown in fig. 3, the incident light beam may enter the slow axis shaping mirror 103 to shape the slow axis direction, and then exit the slow axis shaping mirror 103, and then enter the fast axis shaping mirror 102 to shape the fast axis direction, which is not limited herein.
The following embodiments of the present invention mainly illustrate the case where the fast axis shaping mirror is disposed on the light path in front of the slow axis shaping mirror, but this does not constitute specific limitations to the positions of the fast axis shaping mirror and the slow axis shaping mirror.
The embodiment of the present invention provides an incident light beam can be emitted through the light source, and the light source can be a laser light source, and is specific, and the laser light source can include but not limited to the semiconductor laser light source, the semiconductor laser light source includes but not limited to edge-emitting type semiconductor laser light source, surface-emitting type semiconductor laser light source (VCSEL).
In the light path direction, the light source and the focus of the fast axis shaping mirror need to be located on the same reference line, the position relation between the fast axis shaping mirror and the light source is related to the divergence angle of laser emitted by the light source and the focal length of the fast axis shaping mirror, and the fast axis shaping mirror need to meet the mutually matched relation so that the laser can completely enter the fast axis shaping mirror.
In the embodiment, the shaping is performed by a fast axis shaping mirror and a slow axis shaping mirror, wherein the focal length of the fast axis shaping mirror is larger than the preset focal length, and the slow axis shaping mirror has a single surface type. The fast axis shaping mirror and the slow axis shaping mirror are arranged on the light path, and the fast axis shaping mirror and the slow axis shaping mirror are used for shaping the incident light beam to obtain a shaped light beam. Because the focal length of the fast axis shaping mirror is larger than the preset focal length, the fast axis shaping mirror can be separated from the light source, and the requirement on the tolerance of the light source is reduced. Meanwhile, the slow axis shaping mirror has a single surface type, so that the surface type of the slow axis shaping mirror does not need to be aligned and adjusted on line, the slow axis shaping mirror can be directly positioned and assembled, the tolerance of beam shaping is increased, the production difficulty is reduced, and the productivity is improved.
Optionally, the fast axis shaping mirror and the slow axis shaping mirror satisfy a preset relationship, and the fast axis shaping mirror and the slow axis shaping mirror satisfy the preset relationship, so that the light beam shaped by the fast axis shaping mirror can completely enter the slow axis shaping mirror. Or the preset relation between the fast axis shaping mirror and the slow axis shaping mirror ensures that the light beams shaped by the slow axis shaping mirror can all enter the fast axis shaping mirror.
In the optical path direction, in order to enable all the light beams shaped by the front shaping mirror to enter the rear shaping mirror, the preset relationship may be as follows: the physical aperture of the shaping mirror arranged behind the light path is larger than the clear aperture of the light beam incident on the incident surface. For example, if the fast axis shaping mirror is in front and the slow axis shaping mirror is in back, the aperture of the slow axis shaping mirror should be larger than the clear aperture of the light beam emitted from the fast axis shaping mirror; or, if the slow axis shaping mirror is in front of the fast axis shaping mirror, the aperture of the fast axis shaping mirror should be larger than the clear aperture of the light beam emitted from the slow axis shaping mirror.
Optionally, the fast axis shaping mirror is a FAC, the slow axis shaping mirror is a single-sided slow axis reflector, and a light emitting surface of the FAC faces a reflecting surface of the slow axis single-sided reflector. The light beam is emitted into the FAC to be compressed, then is emitted to the reflecting surface of the slow-axis single-face type reflector, and is emitted after being converged by the single-face type slow-axis reflector.
The focal length of the FAC is required to be larger than the preset focal length, and the FAC can be a transmission type plano-convex mirror, a reflection type parabolic collimator mirror or a transmission type meniscus mirror and the like; the single-sided slow axis mirror may be a spherical reflecting concave mirror, an aspherical reflecting concave mirror, a spherical transflective convex mirror, an aspherical transflective convex mirror, or a transflective oblique mirror, but is not limited thereto.
Fig. 4 is a schematic light path diagram of a light beam shaping assembly according to another embodiment of the present invention, and fig. 5 is a schematic light path diagram of a light beam shaping assembly according to another embodiment of the present invention.
In one embodiment, as shown in fig. 4, the beam shaping module includes a fast axis shaping mirror 102 and an optical reflection element 104 in the beam shaping assembly. The fast axis shaping mirror 102 shapes the incident beam to obtain a shaped beam. The reflecting surface of the optical reflecting element 104 faces the exit direction of the shaped light beam and is used for reflecting the shaped light beam to a preset position 105.
In yet another embodiment, as shown in fig. 5, the beam shaping module further includes: the slow axis shaping mirror 103 in the beam shaping assembly described above. The fast axis shaping mirror 102 and the slow axis shaping mirror 103 shape the incident beam to obtain a shaped beam.
The reflecting surface of the optical reflecting element 104 faces the exit direction of the shaped light beam and is used for reflecting the shaped light beam to a preset position 105.
The preset position 105 may be a specific position when the shaped light beam is applied to a specific field, where the specific field may include a laser radar scanning field, a laser medical beauty field, and the like.
In one possible embodiment, the optical reflective element 104 may be a Micro-Electro-Mechanical System (MEMS), such as a Multi-DM deformable mirror, a Hex deformable mirror, and the like, without limitation.
After the shaped light beam irradiates on the MEMS, the reflection direction of the MEMS can be adjusted through the corresponding control device, and the shaped light beam is reflected to a preset position for use.
In the present application, the optical reflection element is described by taking MEMS as an example, but not limited to this.
In this embodiment, the shaped light beam is reflected to the preset position through the optical reflection element, so that the irradiation position of the shaped light beam can be flexibly adjusted, and the shaped light beam can be more conveniently utilized.
Fig. 6 is a schematic light path diagram of a laser module according to an embodiment of the present invention.
As shown in fig. 6, the laser module includes the beam shaping module provided above, and a laser light source 101. The laser light source 101 emits a laser beam, the laser beam is shaped by the fast axis shaping mirror 102 and the slow axis shaping mirror 103 to obtain a shaped laser beam, and the optical reflection element 104 is configured to reflect the shaped laser beam to a preset position 105.
In the light beam shaping module, the fast axis shaping mirror is FAC, and the slow axis shaping mirror is a single-sided slow axis reflector.
In some embodiments, the laser source 101, the fast axis shaping mirror 102, and the slow axis shaping mirror 103, wherein the focal length of the fast axis shaping mirror 102 is greater than the preset focal length. The light emitting surface of the laser light source 101 faces the fast axis shaping mirror 102, and the light emitting surface of the fast axis shaping mirror 102 faces between the reflecting surfaces of the slow axis shaping mirror 103. The fast axis shaping mirror 102 is configured to compress a laser beam emitted by the laser light source 101, and emit the compressed laser beam to a reflection surface of the slow axis shaping mirror 103, so that the slow axis shaping mirror 103 reflects and converges incident light, emits a shaped laser beam, and emits the shaped laser beam to a reflection surface of the optical reflection element 104, and reflects the shaped laser beam to a preset position 105.
The laser beam emitted by the laser source is compressed when passing through the fast axis shaping mirror, then is emitted from the light emitting surface of the fast axis shaping mirror, then enters the reflecting surface of the slow axis shaping mirror, and is reflected and converged on the reflecting surface, and finally the shaped laser beam with the fast axis direction being in a collimation shape and the slow axis direction being in a convergence shape is obtained.
Since the laser module includes the beam shaping module, the beneficial effects thereof are the same, and are not described herein again.
Here, boundary conditions when the laser module is installed will be described by taking, as examples, the fact that the fast axis shaping mirror is FAC, the fact that the slow axis shaping mirror is a slow axis single-sided mirror, and the fact that the optical reflection element is MEMS.
Fig. 7 is a schematic view of a setting condition of a laser module according to an embodiment of the present invention.
Alternatively, referring to fig. 5, the setting conditions of the slow-axis single-sided mirror and the MEMS are:
d1×θ1＝d2×θ2(formula one)
Wherein d is1Chip width, theta, of the laser light source1Is the divergence angle, d, of the laser light source2Is the spot width, theta, on the image plane of the MEMS2Divergence angle, L, at the image plane for MEMS1Is the object distance, L2Is the image distance, and f is the focal length of the reflecting surface of the slow-axis single-sided mirror.
In some embodiments, the laser light source is known, i.e. d1、θ1The focal length f of the reflecting surface of the slow-axis single-sided mirror is also known, as is a known quantity.
Thus, only the position of the MEMS or slow-axis single-sided mirror, i.e., d, needs to be confirmed2Or theta2To confirm one (d)2The value of (d) is determined by the slow-axis single-sided mirror), L can be calculated according to the above formula1And L2。
Fig. 6 is a schematic diagram of boundary conditions of a laser module according to an embodiment of the present invention.
Alternatively, as shown in fig. 6, if the horizontal distance between the FAC and the laser light source is smaller than the horizontal distance between the MEMS and the laser light source, the boundary conditions between the slow-axis single-sided mirror and the MEMS are as follows:
wherein θ is the tilt angle of the slow-axis single-sided mirror, LmIs the horizontal distance between the MEMS and the laser light source.
In some embodiments, the FAC is located between the MEMS and the laser source, and the horizontal distance L between the FAC and the laser sourcefac<Lm。
At this time, the caliber D of the FACfacWithout limitation, only the boundary condition (formula four) needs to be set for the MEMS, so that the position of the MEMS and the main optical path do not interfere. That is, in the vertical direction of the MEMS, the lower end of the light spot on the MEMS is at a greater distance from the horizontal center than the beam boundary in that direction from the horizontal center line.
Fig. 7 is a schematic diagram of boundary conditions of a laser module according to another embodiment of the present invention.
Alternatively, as shown in fig. 7, if the horizontal distance between the FAC and the laser light source is equal to the horizontal distance between the MEMS and the laser light source, the boundary conditions between the slow-axis single-sided mirror and the MEMS are:
wherein θ is the tilt angle of the slow-axis single-sided mirror, LfacIs the horizontal distance, D, between the FAC and the laser sourcefacIs the caliber of FAC.
In some embodiments, where the FAC is coplanar with the MEMS, then Lfac＝Lm。
In order to make the light beam emitted by the laser light source completely enter the FAC, a boundary condition (formula five) needs to be set on the aperture of the FAC, and meanwhile, the position of the MEMS cannot interfere with the position of the FAC, so a boundary condition (formula six) needs to be set on the position of the MEMS, so that the distance from the lower end of the light spot on the MEMS to the horizontal center is larger than the distance from the boundary of the light beam to the horizontal center line in the direction.
Wherein two boundary conditions (formula five and formula six) need to be satisfied simultaneously, i.e., when L isfac＝LmWhen the temperature of the water is higher than the set temperature,
fig. 8 is a schematic diagram of boundary conditions of a laser module according to another embodiment of the present invention.
Alternatively, as shown in fig. 8, if the horizontal distance between the FAC and the laser light source is greater than the horizontal distance between the MEMS and the laser light source, the boundary conditions between the slow-axis single-sided mirror and the MEMS are as follows:
wherein theta is the inclination angle L of the slow-axis single-sided reflectorfacIs the horizontal distance, L, between the FAC and the laser sourcemIs the horizontal distance, D, between the MEMS and the laser light sourcefacIs the caliber of FAC.
In some embodiments, the MEMS is located between the FAC and the laser source, then Lfac>Lm。
In order to allow all the light beams emitted from the laser light source to enter the FAC and prevent the MEMS position from interfering with the FAC, boundary conditions (formula seven) need to be set for the aperture of the FAC and the MEMS position.
Meanwhile, the MEMS position cannot interfere with the main optical path, so that the boundary condition (formula eight) needs to be set again for the MEMS position. That is, in the vertical direction of the FAC, the distance from the lower end of the MEMS spot to the horizontal center line is greater than the distance from the beam boundary to the horizontal center line in this direction.
Wherein, two boundary conditions (formula seven and formula eight) need to be satisfied simultaneously.
The embodiment of the present invention provides a "main light path" can be understood as: the laser light emitted by the laser light source goes through a series of shaped light paths before being incident on a certain shaping element (such as a fast axis shaping mirror, a slow axis shaping mirror, a MEMS (micro-electromechanical system) and the like).
In the following, some application scenarios of the laser beam shaping structure are provided, and further description of the laser beam shaping structure is provided, and it should be clear to those skilled in the art that the following application scenarios are only examples, but not necessarily limitations.
Scene one
Fig. 11a is the utility model provides an embodiment of the applied scene side view of laser module, fig. 11b is the utility model discloses an embodiment of the applied scene top view of laser module that provides, fig. 11c is the utility model relates to an embodiment of the applied scene oblique view of laser module that provides.
As shown in fig. 11a, 11b, and 11c, in the first scene, FAC is a transmission type plano-convex mirror, and the slow-axis single-sided mirror is a spherical reflecting concave mirror or an aspheric reflecting concave mirror.
However, the FAC may be an aspheric transmissive plano-convex mirror in this scenario, but is not limited thereto.
Scene two
Fig. 12a is an application scene side view of the laser module provided by another embodiment of the present invention, fig. 12b is an application scene top view of the laser module provided by another embodiment of the present invention, and fig. 12c is an application scene oblique view of the laser module provided by another embodiment of the present invention.
As shown in fig. 12a, 12b, and 12c, in the second scene, FAC is a reflection type parabolic collimator, and the slow-axis single-sided mirror is a spherical reflection concave mirror or an aspheric reflection concave mirror.
In the second scenario, similar to the first scenario, a reflective collimating mirror is used as the FAC in the second scenario, and a transmissive plano-convex mirror is used in the first scenario.
Scene three
Fig. 13a is an application scene side view of the laser module provided by another embodiment of the present invention, fig. 13b is an application scene top view of the laser module provided by another embodiment of the present invention, and fig. 13c is an application scene oblique view of the laser module provided by another embodiment of the present invention.
As shown in fig. 13a, 13b, and 13c, in the third scene, the FAC is a reflective parabolic collimator, and the slow-axis single-sided mirror is a spherical turning mirror or an aspheric turning mirror.
Wherein, the third scene is different from the first scene and the second scene, the reflective slow-axis single-surface reflector is replaced by a spherical surface transflective convex mirror or an aspheric surface transflective convex mirror, and a lens of a planar-convex transflective type is used as the slow-axis single-surface reflector.
Scene four
Fig. 14a is an application scene side view of the laser module provided by another embodiment of the present invention, fig. 14b is an application scene top view of the laser module provided by another embodiment of the present invention, and fig. 14c is an application scene oblique view of the laser module provided by another embodiment of the present invention.
As shown in fig. 14a, 14b, and 14c, in the fourth scene, the FAC is a transmissive meniscus mirror, and the slow-axis single-sided mirror is a spherical turning mirror or an aspheric turning mirror.
The transmission type meniscus lens in the scene four may be an aspherical lens, but is not limited thereto.
Scenario four is similar to scenario one, except that FAC uses an aspherical transmissive meniscus, while scenario one uses a transmissive plano-convex mirror.
Scene five
Fig. 15a is the laser module's that another embodiment of the present invention provides uses the scene side view, fig. 15b is the utility model discloses another embodiment provides a laser module's uses the scene top view, fig. 15c is the utility model discloses another embodiment provides a laser module's uses the scene oblique view, fig. 15d is the utility model discloses another embodiment provides a laser module's uses the scene oblique view.
As shown in fig. 15a, 15b, 15c, and 15d, in the scene five, the FAC is a transmission meniscus mirror, and the slow-axis single-sided mirror is a return-transmission beveling mirror.
The transmissive meniscus lens in scene five may be an aspherical lens, but is not limited thereto.
The scheme of the scene five is similar to that of the scene three, and both belong to transmission type schemes, and the difference is that a transmission-return oblique mirror is used as a slow-axis single-sided reflector in the scene five, and a plano-convex transmission-return lens is used as a slow-axis single-sided reflector in the scene three.
Scene six
Fig. 16a is an application scene side view of the laser module provided by another embodiment of the present invention, fig. 16b is an application scene top view of the laser module provided by another embodiment of the present invention, and fig. 16c is an application scene oblique view of the laser module provided by another embodiment of the present invention.
As shown in fig. 16a, 16b, and 16c, in scene six, the FAC and the slow axis single-sided mirror are combined into the revolving body concave mirror 106, so that the laser beam shaping structure in scene one, scene two, or scene four is simplified, and the method is suitable for the case where the difference between the fast axis and the slow axis is small, and the effect of the scheme in scene six is better as the difference between the fast axis and the slow axis is smaller.
Scene seven
Fig. 17a is an application scene side view of the laser module provided by another embodiment of the present invention, fig. 17b is an application scene top view of the laser module provided by another embodiment of the present invention, and fig. 17c is an application scene oblique view of the laser module provided by another embodiment of the present invention.
As shown in fig. 17a, 17b, and 17c, in scene seven, the FAC and the slow-axis single-sided mirror are combined into the revolving convex transflector 107, so that the laser beam shaping structure in scene three or scene five is simplified, and the method is suitable for the case where the difference between the fast axis and the slow axis is small, and the effect of the scheme in scene seven is better as the difference between the fast axis and the slow axis is smaller.
It should be noted that, the schemes in the scenario six and the scenario seven may be actually understood as: the scheme of processing the fast axis plastic mirror and the slow axis plastic mirror that will independently set up into an organic whole, both are equivalent basically on the realizability of technical scheme and technological effect, therefore scene six and the scheme of scene seven also should be included in the utility model discloses claimed protection within the scope.
Fig. 18 is a schematic light path diagram of a laser module according to another embodiment of the present invention, and fig. 19 is a schematic light path diagram of a laser module according to another embodiment of the present invention.
As shown in fig. 18 and 19, an embodiment of the present application further provides a laser module, which includes the beam shaping assembly and the laser light source 101.
The laser light source 101 emits a laser beam, and the laser beam is shaped by the fast axis shaping mirror 102 and the slow axis shaping mirror 103 to obtain a shaped laser beam.
Since the laser module includes the beam shaping component, the beneficial effects are the same as those of the laser module, and are not described herein again.
Fig. 20 is a schematic optical path diagram of a laser module according to another embodiment of the present invention.
As shown in fig. 20, the embodiment of the present application further provides a laser module, which includes the fast axis shaping mirror 102 provided above, and a laser light source 101.
The laser light source 101 emits a laser beam, and the laser beam is shaped by the fast axis shaping mirror 102 with the focal length larger than the preset focal length to obtain a shaped laser beam.
In this embodiment, only one fast axis shaping mirror larger than the preset focal length is used for shaping the laser beam, so that the number of components of the laser module is further reduced, the tolerance of beam shaping is increased, the production difficulty is reduced, and the productivity is improved.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A beam shaping assembly, comprising: the focal length of the fast axis shaping mirror is larger than the preset focal length;
the fast axis shaping mirror is arranged on the light path, and the beam after shaping is obtained after the incident beam is shaped by the fast axis shaping mirror.
2. The beam shaping assembly of claim 1, further comprising: a slow axis shaping mirror having a single face shape;
the fast axis shaping mirror and the slow axis shaping mirror are arranged on a light path, and the beam after shaping is obtained after the incident beam is shaped through the fast axis shaping mirror and the slow axis shaping mirror.
3. The beam shaping assembly of claim 2, wherein the fast axis shaping mirror and the slow axis shaping mirror satisfy a predetermined relationship;
the preset relation between the fast axis shaping mirror and the slow axis shaping mirror ensures that the light beam shaped by the fast axis shaping mirror can completely enter the slow axis shaping mirror; or the like, or, alternatively,
the preset relation between the fast axis shaping mirror and the slow axis shaping mirror enables the light beams shaped by the slow axis shaping mirror to enter the fast axis shaping mirror.
4. The beam shaping assembly according to claim 2, wherein the fast axis shaping mirror is a fast axis collimating mirror FAC, the slow axis shaping mirror is a single-sided slow axis reflector, and a light emitting surface of the FAC faces a reflecting surface of the slow axis single-sided reflector;
and the light beam is emitted into the FAC to be compressed, then is emitted to the reflecting surface of the slow-axis single-sided reflector, and is emitted after being converged by the single-sided slow-axis reflector.
5. A beam shaping module comprising the fast axis shaping mirror of any one of claims 1 to 4, and an optical reflection element;
the fast axis shaping mirror shapes the incident beam to obtain a shaped beam, and the reflecting surface of the optical reflecting element faces the emergent direction of the shaped beam and is used for reflecting the shaped beam to a preset position.
6. The beam shaping module of claim 5, further comprising: a slow-axis shaping mirror as claimed in any one of claims 2 to 4;
the fast axis shaping mirror and the slow axis shaping mirror shape the incident light beam to obtain a shaped light beam, and the reflecting surface of the optical reflecting element faces the emergent direction of the shaped light beam and is used for reflecting the shaped light beam to a preset position.
7. A laser module, comprising: the beam shaping module of claim 6, and a laser light source;
the laser light source emits laser beams, the laser beams are shaped through the fast axis shaping mirror and the slow axis shaping mirror, shaped laser beams are obtained, and the optical reflection element is used for reflecting the shaped laser beams to a preset position.
8. The laser module of claim 7, wherein the laser source emits the laser beam, and the laser beam enters the fast axis shaping mirror for compression and then exits to the reflecting surface of the slow axis shaping mirror, and the laser beam after shaping exits after being converged by the slow axis shaping mirror;
and the shaped laser beam is emitted into the reflecting surface of the optical reflecting element and is emitted to the preset position.
9. A laser module, comprising: the fast axis shaping mirror of any one of claims 1 to 4, and a laser light source;
the laser light source emits laser beams, and the laser beams are shaped through the fast axis shaping mirror to obtain shaped laser beams.
10. A laser module as claimed in claim 9, further comprising: a slow-axis shaping mirror as claimed in any one of claims 2 to 4;
the laser light source emits laser beams, and the laser beams are shaped through the fast axis shaping mirror and the slow axis shaping mirror to obtain shaped laser beams.
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| CN201921719711.9U CN210626790U (en) | 2019-10-14 | 2019-10-14 | Beam shaping assembly, module and laser module |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110703450A (en) * | 2019-10-14 | 2020-01-17 | 西安炬光科技股份有限公司 | Beam shaping assembly, module and laser module |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110703450A (en) * | 2019-10-14 | 2020-01-17 | 西安炬光科技股份有限公司 | Beam shaping assembly, module and laser module |
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