WO2021257001A1 - Dispositif et procédé pour éclairage laser sans tache - Google Patents

Dispositif et procédé pour éclairage laser sans tache Download PDF

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Publication number
WO2021257001A1
WO2021257001A1 PCT/SI2020/050014 SI2020050014W WO2021257001A1 WO 2021257001 A1 WO2021257001 A1 WO 2021257001A1 SI 2020050014 W SI2020050014 W SI 2020050014W WO 2021257001 A1 WO2021257001 A1 WO 2021257001A1
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WO
WIPO (PCT)
Prior art keywords
laser
light
fiber
illumination
laser beam
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PCT/SI2020/050014
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English (en)
Inventor
Vid AGREZ
Rok Petkovsek
Original Assignee
Univerza V Ljubljani
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univerza V Ljubljani filed Critical Univerza V Ljubljani
Priority to EP20764808.0A priority Critical patent/EP4154055A1/fr
Priority to PCT/SI2020/050014 priority patent/WO2021257001A1/fr
Publication of WO2021257001A1 publication Critical patent/WO2021257001A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/48—Laser speckle optics
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/0994—Fibers, light pipes

Definitions

  • the invention belongs to the field of laser devices, more precisely to the field of lasers used for illumination.
  • the invention relates to a device and method for generating speckle-free homogenous illumination with laser light.
  • laser-based illumination systems are desirable.
  • the advantage of laser light is its high brightness and capability of fast modulation.
  • illumination with laser light also has problems due to its high coherency, which causes an interference pattern called laser speckle on the detector.
  • Speckle causes non-homogeneous light field, can hide the observed features and can even saturate the detector.
  • the non-homogeneous image on the sensor occurs in transmissive and reflective illumination techniques.
  • speckle patterns can be objective or subjective.
  • the objective pattern is formed directly in the detection plane while the subjective speckle is formed after being imaged with the imaging system on to the detector. In most cases, the speckle pattern makes it impossible to recognize the colour or structural pattern on the object under the inspection.
  • the homogeneity of the illuminated area on the detector can be described by the speckle contrast C or, in other words, the average value of the deviation of the intensity in each part of the image from the overall average.
  • Speckle contrast is dependent on the wavelength, angle and polarization diversity of the used illumination sources as shown by Manni and Goodman (2012; doi: 10.1364/OE.20.011288). More diverse light source producing lower speckle contrast and in consequence more homogenous illumination field.
  • the increase of the number of diverse and with each other uncoherent sources is in practice hard to achieve due to complexity and cost. Especially in the case of laser sources capable of producing short laser pulses at different wavelengths.
  • the technical problem solved by the present invention is the design of a device and a method for homogenization of the illumination field, wherein the device is primarily intended for use with lasers generating pulses on the time scales under 1 ps. Namely, most solutions for homogeneous laser illumination fail on such time scales, because modulators or averagers of the interference pattern are not capable of such fast modulation (at frequencies exceeding 1 kHz). Further, solutions based on spontaneously emitted light and broad spectrum also encounter difficulties on such time scales.
  • the problem of homogenous laser illumination can be solved in various ways.
  • the existing solutions and inventions can be divided on two approaches.
  • the first approach is development of the laser source with high brightness and inherent low coherency, while the second approach is based on the design of the apparatus for lowering or averaging the speckle contrast produced by the coherent laser source.
  • mechanical variants of the homogenization of the light field include solutions like deformable mirrors that change the light distribution over time as shown by Tran et al. (2014; doi: 10.1364/OE.22.011152).
  • patent application US 3633999 discloses a method for improving the homogeneity of the light field by laser beam splitting.
  • the beam splitting is achieved by the use of several beam splitters and mirrors, which delay each beam for a coherent distance in a free space arrangement.
  • the mutually delayed beams from the same laser source then illuminate the object and form several interference patterns that average each other to some extent.
  • the benefit of the approach is spatial averaging in comparison to the time averaging and thus supporting short exposure times.
  • An improved method of using a laser beam splitter array in a free-standing optical layout is presented in patent application WO 2000043822.
  • the primary laser pulse is duplicated by passing through each successive module of the invention. In the module, the laser pulse is split in way that, one replica is delayed and obtains additional spatial aberration. Finally, all copies of the pulses are combined on the illumination surface and their speckle patterns are averaged in to the homogeneous illumination field.
  • Document US 5233460 discloses a device for homogenizing the illumination field by using a series of coherent laser pulses.
  • the solution is implemented with free space optics splitting the laser pulses by the polarization and delaying each pulse replica at one polarization to the replica transmitted at orthogonal polarization forming a train of uncorrelated pulses.
  • patent US 7463352 B2 discloses a laser sample inspection device that includes use of an integration sphere, a set of optical fibers of different lengths, and a diffraction grating. This solution is based on mixing multiple beams, which are then further emitted as multiple beams, which differs from the present invention.
  • a disadvantage of the device according to US 7463352 is lower brightness as the power is distributed on a larger surface and emitted from several sources.
  • the essence of the device and method for providing speckle-free homogeneous laser light according to the invention is that, in a fully fiber-integrated setting, the number of mutually non-coherent laser beams is increased in a manner that does not distort the laser pulse shape.
  • the invention is thus a compact device, which uses the principle of decoupling laser light from a common channel to two or more channels and back to the common channel resulting in decreased coherency consequently allowing homogenous illumination without speckles.
  • the device for providing speckle-free homogenous laser illumination comprises:
  • the multiplier being coupled to the light source or the optional light combiner, wherein the said multipliers comprise means for separating laser beam into two or more channels and means for combining the separated channel into one common channel,
  • the light source may be any suitable source, for example a multimode laser diode or single mode or near single mode laser source coupled to the fiber in the form of laser diode, mode locked laser, Q-switched laser, gain switched laser.
  • the sources used can be of the different types, working in pulsed mode or continuous mode, or in case of several sources one may be operating in pulsed mode and the other in continuous mode.
  • the essential part of the device is the laser beam multiplier, which ensures that the received light along light guiding channel is mixed, delayed and forwarded in to the next light guiding channel. Mixing is achieved by separation and combination of light beams inside the multiplier.
  • - laser beam multiplier units are connected in series each multiplying the output from the previous one potentiating the number of the pulse replicas at the illumination system output;
  • a photodiode connected in parallel to the laser light source for direct monitoring of the laser light shaping in time.
  • the invention is based on the relation that connects the number of mutually uncoherent and non-correlated laser sources Mwith the reduction of speckle contrast:
  • the multiplication factor N is the number of the fiber sub-channels used in one laser beam multiplication unit. It is also possible to exchange one laser source with two to nineteen sources all combined in to the common channel. If these laser sources are not correlated between themselves, the speckle contrast falls in a way:
  • the multimode laser diodes are the preferable but not exclusive choice, as they can provide high power pulses with the duration of several tens of nanosecond that can be shaped and modulated in time without additional modulators. Used in the application of high-speed photography this illumination system can compete directly with the high-speed camera setups for fast phenomena photography.
  • This example of the embodiment of the invention further includes a dedicated electronic driver that can modulate the electric current from 1 ns to 1 ps.
  • the multimode laser diodes can be exchanged with any laser source known to the expert in the field ranging from the Q-switched to mode locked lasers. By using laser sources producing pulses several picoseconds long or shorter with the presented method one can realize ultra-fast illumination system for fast phenomena photography.
  • the invention can be realized with different types of fibers ranging from a multimode to single mode, having different dopants known to the expert in the field, have an arbitrary cross section shape or structure like microstructure and photonic crystal fibers.
  • Multimode optical fibers are preferred because they can withstand high powers for all kinds of illumination applications.
  • the multimode optical fiber is used with the numerical aperture changing from 0.46 in the common channel to the 0.22 in the sub channels of the beam multiplying unit. The expert in the filed knows that the numerical aperture can be changed without affecting the invention’s function.
  • the mutually different length of the fiber in the beam multiplying unit can be exchanged in the variation of the embodiment with fibers of same length, but mutually different numerical apertures and fiber diameters selected in such ways that the dispersion of the pulse replica is similar to the coherence length difference in the same type of fiber.
  • the laser beam multiplier unit may comprise multimode all fiber beam splitters/combiners in the laser beam multiplier unit or single mode multiplexers and 50/50 beam splitters.
  • the principle of operation is the same as disclosed in the present disclosure.
  • the single mode multiplier consists of input fiber, single mode fiber beam splitter, splitting laser beam from single to at least two fibers and the single mode fiber beam combiner combining light from the at least two input ports to the common single fiber.
  • the single mode laser beam splitter can be exchanged with the 50/50 coupler where on the input side only one port is used. In both cases, the light guided in the single/common channel is split in to the two channels by using the single mode fiber beam splitter.
  • the so split laser beams are mutually delayed by the coherence length and then recombined in to the single/common channel.
  • the preferable number of the two channel multipliers is eight to strike a balance between compactness, cost and low contrast.
  • the single mode multiplier can be redesigned so that each channel is further split in to the two channels mutually delayed by the coherence length and split again. When the preferred pulse replicas of eight are achieved, these replicas are combined back in to the common channel.
  • the recombination can be achieved by using the same count of single mode beam combiners arranged in the inverse tree structure that was used in the laser beam splitting.
  • An alternative option in order to decrease the component count is the use of the reflective element such as fiber Bragg grating at the end of each divided channel and reflect pulse replicas back in to the splitting tree to be recombined in to the single channel.
  • the reflective element such as fiber Bragg grating at the end of each divided channel and reflect pulse replicas back in to the splitting tree to be recombined in to the single channel.
  • the beam splitter can be also used in the arrangement where the number of the split channels is greater than three and the output fiber arranged in such a way that one fiber output is emitting light in the main optical axis, while other fibers are arranged at small angle offsets to the fist fiber. Together they form a fiber cluster for angle diversity of the illuminating light and a high NA illumination system output.
  • This embodiment of the invention serves to illuminate transparent objects having boundaries of variable refraction index like glass lens in a liquid medium which otherwise makes the lens region opaque in the optical setups like shadowgraphs.
  • the output of the device can be a single fiber output or can include a beam splitter to split low coherence output in to several beams.
  • the number of the spited beams is equal to the number of views that are required for illumination of the application.
  • the beam splitter is preferably of the all fiber version realized by the inverse all fiber combiner, guiding the split beams in the three fibers positioned orthogonally to one another. Combining this with industrial grade cameras, the phenomena like shockwaves in liquid can be visualized at short exposures at the synchronized times form different directions forming a 3D picture of the dynamics, which was previously costly and hard to realize with the high-speed cameras.
  • the method for providing speckle-free laser illumination with the above described device comprises the following steps: a) optional combining of laser sources into a single channel with a fiber combiner, if two or more sources are used; b) connecting the single channel to a beam splitter to decouple light from the common channel to two to nineteen fiber channels, wherein an inversely oriented beam combiner can be used for multimode fibers; c) guiding laser beam replicas produced in step b) into a multichannel interconnection comprising of two to nineteen fibers with the mutual length difference greater than the light coherence length acquiring the phase difference between each other; d) combining the multiple laser pulse replicas back into the common channel using a fiber beam combiner; e) performing and optionally repeating steps b) to d) in the laser beam multiplier unit(s); and f) leading the multiple replicas of the laser beam via the single channel to an output.
  • the method is applicable to many laser sources emitting coherent light, which is by itself unsuitable for illumination applications. These being for example high-speed imaging, machine vision in broad sense with the specialized fields of application in high-speed shock wave photography, flow monitoring, welding monitoring, etc. All these applications have in common the requirement for the high brightness highly directivity illumination source capable of high modulation bandwidths in other words short exposure times.
  • this can be achieved by combining the invention with the pulsed coherent laser source in the form of any fiber-coupled laser system on the market.
  • the benefit of the method is that it can combine two completely different types of laser system in to the single channel to address more complex illumination requirements. For example, short and long pulsed laser system at different wavelengths in single channel for imaging different fast phenomena from single side on to the camera.
  • Figure 1 Schematic view of the first exemplary embodiment of the device Figure 2
  • Figure 3 Schematic view of the second exemplary embodiment of the device
  • Figure 4 Schematic view of the third exemplary embodiment of the device
  • Figure 5 Schematic view of the fourth exemplary embodiment of the device
  • Figure 6 Schematic views of the fifth exemplary embodiment of the device using a single mode laser beam multiplier having three different architectures (panels a, b, c)
  • Figure 7 Example of illumination with multimode laser diodes in the case with (right) and without (left) use of the device according to the invention.
  • Figure 1 shows a schematic view of the first embodiment of the device for providing speckle free homogeneous laser light illumination, wherein multimode laser diodes 101 as a laser light source are used. These lasers can have continuous output or pulsed where pulsing is achieved by mode locking, Q-switching or gain switching.
  • the illumination system has a monitoring photodiode 102 connected in parallel to the laser source for monitoring the modulation of the illuminating light. Presence of the photodiode is not essential, while its position, if used, is arbitrary so it can also be connected to the illumination system along the line in the direction of the light propagating from the output to the laser source or from the laser source to the output.
  • the output light from number M of multimode laser diodes or several laser light sources of another type is combined to the common channel through the light combiner 103 and guided to the laser beam multiplier 104 producing M times N pulse replicas.
  • Laser beam multipliers are connected in the series each multiplying the output from the previous one by the factor N potentiating the number of the pulse replicas at the illumination system output 105.
  • FIG. 2 is a schematic view of the preferred laser beam multiplier 104 architecture, wherein two fiber beam combiners 202 are used.
  • the first beam combiner is used in the opposite direction and splits light from the common laser channel at the laser beam multiplier input port 201 into a multichannel arrangement 203 comprising N channels.
  • the length of the fiber in each channel differs from the rest by a coherent length depending on the laser source used.
  • Two to nineteen multichannel interconnections realized by optical fibers may be used.
  • the channels represented by the optical fibers are then coupled back into the common channel, producing N copies of the laser beam.
  • the optical fibers are not needed to be equal in diameter or light guiding properties.
  • Light form each channel is then combined by the all fiber beam combiner 202 in to the common channel, producing N copies of the laser beam at the laser beam multiplier output port 204.
  • Figure 3 shows a second embodiment of the device, wherein two consecutive laser beam multipliers are used and each individual multiplier has N channels. After passing two multipliers, N 2 copies of the laser beam are generated. This is the multiplication factor to the number of the input beams M.
  • Figure 4 shows a third possible embodiment of the device, wherein the single fiber output 105 is exchanged with the beam splitter 401 to split low coherence output in to several beams to illuminate the area from several directions with the replicas output illumination beam.
  • the number of the spited beams is equal to the number of views that are required for illumination of the application.
  • the beam splitter is of the all fiber version, guiding the splitted beams in the three fibers 402,403,404 positioned orthogonally to one another.
  • FIG. 5 Fourth exemplary embodiment of the device is shown in Figure 5, wherein the single fiber output 105 is exchanged with beam splitter 401 to split low coherence output in to several fiber channels.
  • One fiber output is emitting light in the main optical axis 501 while other fibers are arranged at small angle offsets to the fist fiber 501 forming a fiber cluster 502 for angle diversity of the illuminating light and high NA illumination system output 503.
  • the described embodiment of the invention serves to illuminate transparent objects having variable refraction index for the illuminating light.
  • FIG. 6 Fifth exemplary embodiment of the device is shown in Figure 6, wherein the single mode components in the form of singe mode splitters from single to two channels 601 and single mode fibers are used.
  • the a) is variant using the single mode laser beam multiplier constructed from two single mode splitters, each multiplier producing by a factor of 2 more laser beam replicas at the output.
  • a less compact variant is shown in b) where the same number of pulse replicas are achieved at the output as in a) but the component count required is great with the benefit of tailoring the beam delay in each channel separately.
  • the c) single mode variant uses a circulator 603 to couple input light in to the multiplication chain where it is multiplied by beam splitters 601 , reflected in each channel by reflective element being mirror or fiber Bragg grating 602, combined back to the common channel by inversely propagating trough the beam splitters 601, and coupled trough the circulator 603 to the output port.
  • Figure 7 is an example of aluminium surface illumination with multimode laser diodes.
  • the surface is illuminated directly by the multimode laser diodes. Due to coherency of the light, a speckle pattern is produced making it impossible to discern the surface features which shows in high variation of intensity profile.
  • homogenous illumination field is achieved by the device according to the invention and much more smooth intensity profile is achieved. Smaller variations are due to the surface features and imperfections.

Abstract

L'invention appartient au domaine des dispositifs laser, plus précisément au domaine des laser utilisés pour l'éclairage. L'invention concerne un dispositif et un procédé pour générer un éclairage homogène avec une lumière laser sans taches. L'invention est caractérisée en ce que, dans toutes les conceptions de fibre, le nombre de faisceaux laser mutuellement non cohérents est augmenté d'une manière qui ne déforme pas la forme d'impulsion laser. Le dispositif utilise le principe de découplage de la lumière laser d'un canal commun à au moins deux canaux et de retour vers le canal commun, ce qui entraîne une cohérence réduite, ce qui permet d'obtenir un éclairage homogène sans taches. Le dispositif comprend : - au moins une source de lumière produisant un faisceau laser, - au moins un multiplicateur de faisceau laser comprenant un nombre approprié de fibres optiques, - lesdits multiplicateurs comprenant des moyens pour séparer le faisceau laser en au moins deux canaux et des moyens pour combiner le canal séparé en un canal commun, - et une sortie pour émettre le faisceau/la lumière laser sans taches de sortie pour l'éclairage.
PCT/SI2020/050014 2020-06-15 2020-06-15 Dispositif et procédé pour éclairage laser sans tache WO2021257001A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP20764808.0A EP4154055A1 (fr) 2020-06-15 2020-06-15 Dispositif et procédé pour éclairage laser sans tache
PCT/SI2020/050014 WO2021257001A1 (fr) 2020-06-15 2020-06-15 Dispositif et procédé pour éclairage laser sans tache

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PCT/SI2020/050014 WO2021257001A1 (fr) 2020-06-15 2020-06-15 Dispositif et procédé pour éclairage laser sans tache

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023222317A1 (fr) * 2022-05-16 2023-11-23 Asml Netherlands B.V. Systèmes optiques intégrés passifs et procédés de réduction de cohérence optique spatiale

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US3633999A (en) 1970-07-27 1972-01-11 Richard G Buckles Removing speckle patterns from objects illuminated with a laser
US4938556A (en) 1983-11-25 1990-07-03 The Board Of Trustees Of The Leland Stanford Junior University Superfluorescent broadband fiber laser source
US5233460A (en) 1992-01-31 1993-08-03 Regents Of The University Of California Method and means for reducing speckle in coherent laser pulses
JPH06167640A (ja) * 1991-10-03 1994-06-14 Senri Oyo Keisoku Kenkyusho:Kk レーザー光照明装置
WO2000043822A1 (fr) 1999-01-20 2000-07-27 Tropel Corporation Illumination laser avec diminution de la granulation cohérente
US6249381B1 (en) * 1998-05-13 2001-06-19 Sony Corporation Illuminating method and illuminating device
US6347173B1 (en) * 1998-05-15 2002-02-12 Sony Corporation Optical coherence reduction method and its device, illuminating method and its system and optical fiber bundle
US20020126479A1 (en) * 2001-03-08 2002-09-12 Ball Semiconductor, Inc. High power incoherent light source with laser array
JP2007193108A (ja) * 2006-01-19 2007-08-02 Nano Photon Kk スペックル低減装置、及びレーザ顕微鏡
JP2008043493A (ja) * 2006-08-14 2008-02-28 Olympus Corp 蛍光内視鏡システム
US7463352B2 (en) 1999-11-17 2008-12-09 Applied Materials, Inc. Method and apparatus for article inspection including speckle reduction
US7817693B2 (en) 2002-05-22 2010-10-19 Cavitar Oy Method and a laser device for producing high optical power density
US20140071406A1 (en) 2012-01-02 2014-03-13 Jgm Associates, Inc. Low-speckle Light Sources and Displays Employing Multimode Optical Fiber
CN106610529A (zh) * 2017-02-14 2017-05-03 山西大学 光纤型光束分布式相位延迟器及其散斑消除方法

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3633999A (en) 1970-07-27 1972-01-11 Richard G Buckles Removing speckle patterns from objects illuminated with a laser
US4938556A (en) 1983-11-25 1990-07-03 The Board Of Trustees Of The Leland Stanford Junior University Superfluorescent broadband fiber laser source
JPH06167640A (ja) * 1991-10-03 1994-06-14 Senri Oyo Keisoku Kenkyusho:Kk レーザー光照明装置
US5233460A (en) 1992-01-31 1993-08-03 Regents Of The University Of California Method and means for reducing speckle in coherent laser pulses
US6249381B1 (en) * 1998-05-13 2001-06-19 Sony Corporation Illuminating method and illuminating device
US6347173B1 (en) * 1998-05-15 2002-02-12 Sony Corporation Optical coherence reduction method and its device, illuminating method and its system and optical fiber bundle
WO2000043822A1 (fr) 1999-01-20 2000-07-27 Tropel Corporation Illumination laser avec diminution de la granulation cohérente
US7463352B2 (en) 1999-11-17 2008-12-09 Applied Materials, Inc. Method and apparatus for article inspection including speckle reduction
US20020126479A1 (en) * 2001-03-08 2002-09-12 Ball Semiconductor, Inc. High power incoherent light source with laser array
US7817693B2 (en) 2002-05-22 2010-10-19 Cavitar Oy Method and a laser device for producing high optical power density
JP2007193108A (ja) * 2006-01-19 2007-08-02 Nano Photon Kk スペックル低減装置、及びレーザ顕微鏡
JP2008043493A (ja) * 2006-08-14 2008-02-28 Olympus Corp 蛍光内視鏡システム
US20140071406A1 (en) 2012-01-02 2014-03-13 Jgm Associates, Inc. Low-speckle Light Sources and Displays Employing Multimode Optical Fiber
CN106610529A (zh) * 2017-02-14 2017-05-03 山西大学 光纤型光束分布式相位延迟器及其散斑消除方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023222317A1 (fr) * 2022-05-16 2023-11-23 Asml Netherlands B.V. Systèmes optiques intégrés passifs et procédés de réduction de cohérence optique spatiale

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