WO2021251520A1

WO2021251520A1 - Dehumidifying air conditioner

Info

Publication number: WO2021251520A1
Application number: PCT/KR2020/007536
Authority: WO
Inventors: 송동욱
Original assignee: 엘지전자 주식회사
Priority date: 2020-06-10
Filing date: 2020-06-10
Publication date: 2021-12-16
Also published as: KR20220124728A; CN115702033A

Abstract

A dehumidifying air conditioner comprises: a gas displacer which removes moisture by displacing atmospheric air and supplies a gas, from which the moisture has been removed, into a chamber to reduce a first moisture concentration in the chamber to a second moisture concentration; and a refiner which circulates the gas in the chamber to maintain the chamber in a target moisture concentration range instead of the second moisture concentration.

Description

dehumidification air conditioner

The embodiment relates to a dehumidifying air conditioning device.

In the manufacturing process of the electronics industry such as semiconductors or OLEDs, even a trace amount of impurities such as moisture directly affects the yield.

Therefore, the manufacturing process of electronic parts/products such as semiconductors and OLEDs is in a chamber (also called 'glove box') replaced with CDA (Clean Dry Air) gas purified to a very high level while hermetically blocked from the outside. is being performed in

In the related art, first, the moisture concentration in the chamber is reduced with nitrogen gas or CDA gas, and then the chamber is circulated to maintain the target moisture concentration. For example, the moisture concentration in the chamber is reduced from 209,000 ppm to 50 ppm by using nitrogen gas or CDA gas.

Conventionally, since a large amount of nitrogen gas is consumed to reduce the moisture concentration to 50 ppm, an expensive process maintenance cost is required.

Conventionally, since the flow rate of nitrogen gas is not constantly supplied to the chamber, a separate device for constantly adjusting the flow rate of nitrogen gas in the chamber is required.

Conventionally, a pipe or the like for supplying nitrogen gas has to be installed, so that the structure of the device is complicated.

The embodiments aim to solve the above and other problems.

Another object of the embodiment is to provide a dehumidifying air conditioning device with reduced process maintenance cost.

Another object of the embodiment is to provide a dehumidifying air conditioning device having a simple device structure.

According to one aspect of the embodiment to achieve the above or other object, the dehumidification air conditioning device removes moisture by replacing air in the atmosphere, and supplies the gas from which the moisture has been removed to the chamber to increase the first moisture concentration of the chamber. a gas substituent reducing to a second moisture concentration; and a purifier configured to circulate the gas in the chamber to maintain the chamber in a target moisture concentration range higher than the second moisture concentration.

The effect of the dehumidifying air conditioner according to the embodiment will be described as follows.

According to at least one of the embodiments, the gas substitute may directly replace the air in the atmosphere to remove moisture, and supply the gas from which the moisture has been removed to the chamber to reduce the moisture concentration in the chamber. Accordingly, in a situation in which the temperature in the chamber must be reduced from the first moisture concentration to the second moisture concentration from time to time for a long period of time, a separate cost is not required, so that the process maintenance cost can be significantly reduced.

According to at least one of the embodiments, the first moisture concentration in the chamber is reduced to the second moisture concentration by the gas substituent before the purifier is operated, and then adjusted to a target moisture concentration range lower than the second moisture concentration by the purifier , thus, the dehumidification of the chamber can be efficiently managed. In addition, since the first moisture concentration can be quickly adjusted to the target moisture concentration range, the dehumidification efficiency can be improved. In particular, the gas substitute can generate gas to be supplied to the chamber by using the air in the atmosphere, rather than using the gas in the gas cylinder for which the cost is generated, so that the process maintenance cost can be significantly reduced.

According to at least one of the embodiments, the diameter of the plurality of holes in the dispersion plate increases from the center of the first region (the region defined above the dispersion plate) of the housing toward the outside, so that the second region (the region defined below the dispersion plate) is increased. ), the air in the atmosphere may flow evenly throughout the first region without intensively flowing in the center of the first region. Accordingly, since moisture is removed from the air in the atmosphere uniformly supplied to the second region by the desiccant in the entire area of the second area, saturation by moisture absorption of the desiccant filled in the first area is uniform throughout the first area. The moisture absorption performance can be improved. In addition, since the air in the atmosphere in the second region is uniformly distributed to the first region by the plurality of hole diameters of the dispersion plate, the saturation time of the desiccant is delayed and the regeneration process is also delayed, so the number of regeneration processes is reduced, thereby reducing the dehumidification efficiency This can be improved.

According to at least one of the embodiments, since the heater unit having a double coil structure is provided, the heat source by the heater unit is uniformly absorbed by the entire desiccant in the first area of the housing during regeneration of the moisture catalyst to form an even temperature gradient, There is an advantage that the time to reach the regenerated temperature of the adsorbent can be shortened, and the regeneration process time can be shortened.

Further scope of applicability of embodiments will become apparent from the following detailed description. However, it should be understood that the specific embodiments such as the detailed description and preferred embodiments are given by way of example only, since various changes and modifications within the spirit and scope of the embodiments may be clearly understood by those skilled in the art.

1 shows a dehumidifying air conditioning apparatus according to an embodiment.

2 shows a gas substituent according to an embodiment.

FIG. 3 shows an inside view of a part of the housing removed from the gas substituent of FIG. 2 .

Figure 4 is a cross-sectional view showing the gas substituent of Figure 2;

5 shows the coil unit and the dispersion plate viewed from the upper side diagonally.

6 shows the coil unit and the dispersion plate as viewed in the diagonal direction below.

7 is a plan view illustrating a dispersion plate.

8 shows the temperature distribution of the first region of the gas substituent.

9 shows the path of gas in the desiccant.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the technical spirit of the present invention is not limited to some embodiments described, but may be implemented in various different forms, and within the scope of the technical spirit of the present invention, one or more of the components may be selected between the embodiments. It can be combined and substituted for use. In addition, terms (including technical and scientific terms) used in the embodiments of the present invention may be generally understood by those of ordinary skill in the art to which the present invention belongs, unless specifically defined and described explicitly. It may be interpreted as a meaning, and generally used terms such as terms defined in advance may be interpreted in consideration of the contextual meaning of the related art. In addition, the terminology used in the embodiments of the present invention is for describing the embodiments and is not intended to limit the present invention. In this specification, the singular form may also include the plural form unless otherwise specified in the phrase, and when it is described as "at least one (or more than one) of B and (and) C", it can be combined with A, B, and C. It may include one or more of all combinations. In addition, in describing the components of the embodiment of the present invention, terms such as first, second, A, B, (a), (b), etc. may be used. These terms are only for distinguishing the component from other components, and are not limited to the essence, order, or order of the component by the term. And, when it is described that a component is 'connected', 'coupled' or 'connected' to another component, the component is not only directly connected, coupled or connected to the other component, but also with the component It may also include a case of 'connected', 'coupled' or 'connected' due to another element between the other elements. In addition, when it is described as being formed or disposed on "above (above) or under (below)" of each component, the upper (above) or lower (below) is not only when two components are in direct contact with each other, but also one Also includes a case in which another component as described above is formed or disposed between two components. In addition, when expressed as “up (up) or down (down)”, it may include not only the upward direction but also the meaning of the downward direction based on one component.

1 shows a dehumidifying air conditioning apparatus according to an embodiment.

Referring to FIG. 1 , the dehumidification and air conditioning apparatus 100 according to the embodiment may include a gas substitute 110 and a purifier 200 . The dehumidification and air conditioning apparatus 100 according to the embodiment may or may not include the chamber 300 . The dehumidifying air conditioning apparatus 100 according to the embodiment may include more components than this.

In an embodiment, the gas substitute 110 may remove moisture by replacing air in the atmosphere. In an embodiment, the gas substitute 110 may supply the gas from which the moisture has been removed to the chamber 300 . As such, the first moisture concentration of the chamber 300 may be reduced to the second moisture concentration by the gas from which moisture has been removed. For example, the first moisture concentration may be the same as the moisture concentration in the atmosphere, but is not limited thereto.

According to the embodiment, the gas substituent 110 may directly replace the air in the atmosphere to remove moisture, and supply the gas from which the moisture has been removed to the chamber 300 to reduce the moisture concentration in the chamber 300 . In other words, in the embodiment, there is no need to purchase a specific gas at an additional cost, and a gas obtained by removing moisture from the air in the atmosphere may be used as a gas for reducing the moisture concentration in the chamber 300 . Accordingly, in a situation in which the temperature in the chamber 300 needs to be reduced from the first moisture concentration to the second moisture concentration from time to time for a long period of time, a separate cost is not required, so that the process maintenance cost can be significantly reduced.

Meanwhile, the purifier 200 circulates the gas in the chamber 300 to maintain the chamber 300 in a target moisture concentration range lower than the second moisture concentration. That is, in a state in which the moisture concentration is sufficiently lowered by the gas substituent 110 , the gas in the chamber 300 is circulated to be supplied back to the chamber 300 via the purifier 200 , thereby reducing the moisture concentration in the chamber 300 . It can be adjusted within the target moisture concentration range.

The purifier 200 may remove oxygen or moisture from the gas supplied from the chamber 300 and then supply it back to the chamber 300 . To this end, the purifier 200 may include a desiccant and/or a catalyst (not shown). As the desiccant, for example, a molecular sieve may be used, and copper particles may be used as the catalyst, but the present invention is not limited thereto. For example, moisture in the gas supplied from the chamber 300 may be removed by the desiccant. For example, oxygen in the gas supplied from the chamber 300 may be separated by a catalyst and removed as water vapor (H 2 O).

For example, the first moisture concentration may be a moisture concentration in the atmosphere. For example, the first moisture concentration may be approximately 209,000 ppm, but is not limited thereto. For example, the second moisture concentration may be approximately 50 ppm, but is not limited thereto. For example, the target moisture concentration range may be about 1 ppm to about 10 ppm, but is not limited thereto.

In general, since the chamber 300 has a large capacity, it is difficult to reduce and maintain the first moisture concentration in the chamber 300 to the target moisture concentration range with the purifier 200 . Accordingly, in the embodiment, the gas substituent 110 may be added. Therefore, before the purifier 200 is operated, the first moisture concentration in the chamber 300 is reduced to the second moisture concentration by the gas substituent 110 , and then the target moisture lower than the second moisture concentration by the purifier 200 . Since it is adjusted in the concentration range, the dehumidification of the chamber 300 can be efficiently managed accordingly. In addition, since the first moisture concentration can be quickly adjusted to the target moisture concentration range, the dehumidification efficiency can be improved. In particular, the gas substitute 110 can generate gas to be supplied to the chamber 300 by using the air in the atmosphere, rather than using the gas in the gas cylinder for which the cost is generated, so the process maintenance cost can be significantly reduced. .

2 shows a gas substituent according to an embodiment.

Referring to FIG. 2 , the gas substituent 110 according to the embodiment may include a plurality of gas substituents 111 to 114 . The plurality of gas substituents 111 to 114 may be disposed adjacent to each other. Although the figure shows four gas substituents 111 to 114, fewer or more gas substituents may be provided.

For example, the plurality of gas substituents 111 to 114 may be provided in an even number. For example, the plurality of gas substituents 111 to 114 may be provided with two, four, six, eight, and the like. For example, when two

gas substituents

111 and 113 are provided, when one gas substituent 111 is used when moisture is removed from the air in the atmosphere, the other gas substituent 113 is of the desiccant (140 in FIG. 9). Can be used for playback.

The gas substituents 111 to 114 may include a desiccant 140 . Moisture may be removed from the air in the atmosphere by the desiccant 140 . For example, although molecular sieve may be used as the desiccant, it is not limited thereto.

When the gas substituents 111 to 114 are used for a long time, moisture is continuously absorbed into the desiccant and eventually becomes saturated. In this case, the moisture removal performance by the desiccant may be significantly reduced. Therefore, it is necessary to periodically restore the performance of the desiccant through a regeneration process for the gas substituents 111 to 114 . For example, the gas substitutes 111 to 114 may be regenerated once every two weeks, but the present invention is not limited thereto.

If there is only one gas substituent (111 to 114), when the regeneration process is performed, the corresponding gas substituent (111 to 114) cannot be used to remove moisture.

Therefore, when an even number of gas substituents 111 to 114 is provided, even if one gas substituent is used to perform the regeneration process, the other gas substituent can be used to remove moisture, so that the dehumidification process of the chamber 300 is not stopped. can be performed continuously.

The gas substituents 111 to 114 according to the embodiment may include a housing 120 . The housing 120 maintains the outer shape of the gas substituents 111 to 114 and may support components to be accommodated therein, for example, a heater unit 130 ( 130 in FIG. 3 ) and a dispersion plate ( 150 in FIG. 3 ). That is, the heater unit 130 and the injection plate may be installed in the housing 120 .

The housing 120 may be formed of a material having excellent insulation performance and support strength. For example, it may be formed of stainless steel, but is not limited thereto.

The shape of the housing 120 may correspond to, for example, the outer shape of the distribution plate 150 , but is not limited thereto. For example, when the dispersion plate 150 has a shape having an octagonal shape and an eight-sided outer surface, the outer surface of the housing 120 may also have an octagonal and eight-sided outer surface. As described above, the housing 120 is formed to correspond to the shape of the distribution plate 150 , so that the outer surface of the distribution plate 150 is installed in direct contact with the inner surface of the housing 120 , so that the distribution plate 150 and the housing The gap between (120) can be eliminated. Accordingly, only through the distribution plate 150 , air in the atmosphere can be moved up and down of the distribution plate 150 .

The gas substituents 111 to 114 according to the embodiment may include a first pipe 161 and a second pipe 162 .

For example, the first pipe 161 may be a pipe through which atmospheric air is introduced, and the second pipe 162 may be a pipe through which atmospheric air is circulated in the housing 120 and then discharged to the chamber 300 . Accordingly, one side of the first pipe 161 is exposed to the atmosphere, so that air in the atmosphere can be introduced at any time. One side of the second pipe 162 may be connected to the chamber 300 so that the gas discharged from the second pipe 162 may be supplied to the chamber 300 . For example, the gas discharged from the second pipe 162 may be a gas from which moisture has been removed from the air in the atmosphere.

For example, the first pipe 161 and the second pipe 162 may be installed on one side, for example, an upper side of the housing 120 . For example, the first pipe 161 and the second pipe 162 may be disposed at an upper side of the housing 120 to be spaced apart from each other. For example, the first pipe 161 and the second pipe 162 may be disposed adjacent to the center of the housing 120 . For example, the first pipe 161 may be installed on the first side of the center of the housing 120 , and the second pipe 162 may be installed on the second side of the center of the housing 120 .

For example, the first pipe 161 of each of the adjacent gas substituents 111 to 114 may be connected by a first main pipe (not shown). The first main pipe and the first pipe 161 may be integrally formed, but the present invention is not limited thereto.

For example, the first pipe 161 of the first gas substituent 111 and the first pipe 161 of the second gas substituent 112 are connected by a first main pipe, and the third gas substitute 113 of The first pipe 161 and the first pipe 161 of the fourth gas substituent 114 may be connected by another first main pipe. For example, a first main pipe connecting the first gas substituent 111 and the second gas substituent 112 and another first main pipe connecting the third gas substituent 113 and the fourth gas substituent 114 are can be connected to each other. In this case, the first main pipe and another first main pipe may be selected by at least one gate valve, and air in the atmosphere may be supplied to the first main pipe or another first main pipe.

As another example, the first pipe 161 of the first gas substituent 111 and the first pipe 161 of the third gas substituent 113 are connected by a first main pipe, and the second gas substitute 112 of The first pipe 161 and the first pipe 161 of the fourth gas substituent 114 may be connected by another first main pipe.

For example, the second pipe 162 of each of the adjacent gas substituents 111 to 114 is connected by a second main pipe (not shown), and the second main pipe and the second pipe 162 are integrally formed. However, it is not limited thereto.

For example, the second pipe 162 of the first gas substitute 111 and the second pipe 162 of the second gas substitute 112 may be connected by a second main pipe. For example, the second pipe 162 of the third gas substitute 113 and the second pipe 162 of the fourth gas substitute 114 may be connected by another second main pipe. For example, a second main pipe connecting the first gas substituent 111 and the second gas substituent 112 and another second main pipe connecting the third gas substituent 113 and the fourth gas substituent 114 are can be connected to each other. In this case, the second main pipe and another second main pipe are selected by at least one gate valve, so that atmospheric air may be supplied to the second main pipe or another second main pipe.

As another example, the second pipe 162 of the first gas substituent 111 and the second pipe 162 of the third gas substituent 113 are connected by a second main pipe, and of the second gas substituent 112 . The second pipe 162 and the second pipe 162 of the fourth gas substitute 114 may be connected by another second main pipe.

The gas substituents 111 to 114 according to the embodiment may include a power terminal block 133 . The power terminal block 133 may be included in the heater unit ( 130 of FIG. 3 ), but is not limited thereto.

For example, the power terminal block 133 may be installed above the housing 120 . For example, the power terminal block 133 may be disposed adjacent to the first pipe 161 and the second pipe 162 . For example, the power terminal block 133 may be installed to be spaced apart from the first pipe 161 and the second pipe 162 .

For example, the power terminal block 133 of each of the adjacent gas substituents 111 to 114 may be electrically connected by a connection line (not shown). Power may be applied to the power terminal block 133 through the connection line.

Although not shown, the plurality of gas substituents 111 to 114 are electrically connected to one connection line, and a distributor may be provided between the plurality of gas substituents 111 to 114 and the connection line. In this case, the power supplied to one connection line may be supplied to the power terminal block 133 of at least one of the plurality of gas substituents 111 to 114 by the distributor.

Figure 3 shows an inside view of a portion of the housing 120 removed from the gas substituent of Figure 2, Figure 4 is a cross-sectional view showing the gas substituent of Figure 2.

3 and 4 , the gas substituents 111 to 114 according to the embodiment may include a dispersion plate 150 .

The housing 120 may have an empty space inside. This space may be divided into a first area 121 and a second area 122 by the dispersion plate 150 . That is, among the spaces within the housing 120 , the space above the dispersion plate may be defined as the first region 121 , and the space below the dispersion plate may be defined as the second region 122 .

For example, the dispersion plate can regulate the airflow in the atmosphere. For example, the dispersion plate may uniformly control the airflow of air in the atmosphere.

For example, the first pipe 161 may communicate with the second region 122 through the first side of the housing 120 , the first region 121 , and the distribution plate.

As shown in FIG. 7 , the dispersion plate may include a hole 155 . The hole 155 may be a pipe connection hole through which the first pipe 161 is connected. The first pipe 161 may pass through the first side of the housing 120 to extend downward in the first region 121 and then be connected to the hole 155 of the dispersion plate. Air in the atmosphere introduced into the first pipe 161 may be supplied to the second region 122 .

The dispersion plate may include a plurality of holes 151 to 153 . The diameters of the plurality of holes 151 to 153 may be different from each other. Air in the atmosphere may flow through the plurality of holes 151 to 153 . For example, air supplied to the second region 122 through the first pipe 161 through the plurality of holes 151 to 153 may flow into the first region 121 .

For example, the diameters of the plurality of holes 151 to 153 may increase from the center of the first region 121 to the outside in the horizontal direction. Accordingly, more air in the atmosphere in the second region 122 may flow into the first region 121 at the periphery rather than at the center of the first region 121 .

As described above, due to the diameters of the plurality of holes 151 to 153 of the dispersion plate, air in the atmosphere in the second region 122 does not flow intensively in the center of the first region 121 , but spreads throughout the first region 121 . can flow evenly. Accordingly, as shown in FIG. 9 , since moisture is removed from the air in the atmosphere uniformly supplied to the second region 122 by the desiccant in the entire region of the second region 122 , the first region 121 . Saturation by moisture absorption of the desiccant filled in the hygroscopic agent may be uniformly performed over the entire first region 121, so that moisture absorption performance may be improved. In addition, the air in the atmosphere in the second region 122 is uniformly distributed to the first region 121 by the diameters of the plurality of holes 151 to 153 of the dispersion plate, so that the saturation point of the desiccant is delayed and the regeneration process In addition, since it is delayed, the number of regeneration processes is reduced, so that dehumidification efficiency can be improved.

As another example, the plurality of holes 151 to 153 may include a plurality of first holes 151 formed in the central portion of the dispersion plate and a plurality of

second holes

152 and 153 formed in a peripheral portion surrounding the central portion of the dispersion plate. can In this case, the diameters of the

second holes

152 and 153 may be larger than the diameters of the first holes 151 .

For example, the diameters of the plurality of first holes 151 may be the same, but the present invention is not limited thereto. For example, the diameters of the plurality of

second holes

152 and 153 may be different, but the present invention is not limited thereto.

Accordingly, since the diameters of the plurality of

second holes

152 and 153 formed at the periphery of the dispersion plate are larger than the diameters of the plurality of first holes 151 formed in the center of the dispersion plate, the atmosphere in the second region 122 is The air in the air may flow evenly throughout the first region 121 without intensively flowing in the center of the first region 121 . Accordingly, as shown in FIG. 9 , since moisture is removed from the air in the atmosphere uniformly supplied to the second region 122 by the desiccant in the entire region of the second region 122 , the first region 121 . Saturation by moisture absorption of the desiccant filled in the hygroscopic agent may be uniformly performed over the entire first region 121, so that moisture absorption performance may be improved. In addition, since the diameters of the plurality of

second holes

152 and 153 formed in the periphery of the dispersion plate are larger than the diameters of the plurality of first holes 151 formed in the center of the dispersion plate, the atmosphere in the second region 122 is Air in the air may be uniformly distributed to the first region 121 . Accordingly, since the saturation point of the desiccant is delayed and the regeneration process is also delayed, the number of regeneration processes is reduced, thereby improving the dehumidification efficiency.

The gas substituents 111 to 114 according to the embodiment may include a heater unit 130 . The heater unit 130 may be used in the regeneration process of the desiccant. That is, when the moisture absorption performance of the desiccant is saturated due to the continuous use of the desiccant, moisture molecules captured by the electrostatic force in the desiccant obtain thermal energy by heating the heater unit 130 and are separated from the desiccant. Can be discharged as water vapor. In order to discharge the water vapor, a separate pipe (not shown) other than the first pipe 161 and the second pipe 162 may be provided.

During the regeneration process, CDA gas is injected into the first region 121 of the housing 120 so that the desiccant can be efficiently regenerated by the CDA gas.

For example, the heater unit 130 may have a double coil structure as shown in FIGS. 5 and 6 . For example, the heater unit 130 may be installed in the first area 121 of the housing 120 .

For example, the heater unit 130 may include a first heater 131 , a second heater 132 , and a power terminal block 133 .

For example, the first heater 131 and the second heater 132 may be disposed on the dispersion plate. The first heater 131 and the second heater 132 may be disposed adjacent to the upper surface of the dispersion plate, but the present invention is not limited thereto.

For example, the first heater 131 and the second heater 132 may be individually connected to the power terminal block 133 , but the present invention is not limited thereto.

For example, the first heater 131 and the second heater 132 may be simultaneously heated by the power supplied to the power terminal block 133 , but the present invention is not limited thereto. For example, the heating temperature of each of the first heater 131 and the second heater 132 may be different from each other, but is not limited thereto. To this end, power applied to the first heater 131 and the second heater 132 may be different.

For example, the heating temperature of the second heater 132 may be equal to or greater than the heating temperature of the first heater 131 . Heat by the heating of the first heater 131 and the second heater 132 may be transferred to the central portion rather than the peripheral portion of the first region 121, so that the temperature of the central portion may be higher than the temperature of the peripheral portion of the first region 121. have. Accordingly, in order to uniformly heat the entire first region 121 , the heating temperature of the second heater 132 may be greater than the heating temperature of the first heater 131 .

Although not shown, a heat insulating material may be installed on the inner surface of the housing 120 in contact with the first heater 131 and the second heater 132 . The heat insulating material may be formed by coating a heat insulating material on the inner surface of the housing 120 . The heat in the first region 121 of the housing 120 is not lost to the outside of the housing 120 due to this insulating material, so that the target heating temperature of the first region 121 of the housing 120 can be reached more quickly. Therefore, the regeneration process can be performed quickly and the regeneration process can be efficiently managed.

For example, the second heater 132 may be installed to surround the first heater 131 . For example, the first heater 131 may be installed close to the center of the first region 121 of the housing 120 and may be connected to the first region 121 above the power terminal block 133 . For example, the second heater 132 may be installed in a peripheral portion surrounding the central portion of the first region 121 of the housing 120 and may be connected to the second region 122 above the power terminal block 133 .

For example, the first heater 131 may form a closed loop electrical path together with the power terminal block 133 . That is, the current of the power terminal block 133 may flow to one side of the first heater 131 and flow to the power terminal block 133 through the other side. For example, the second heater 132 may form a closed loop electrical path together with the power terminal block 133 . That is, the current of the power terminal block 133 may flow to one side of the second heater 132 and flow to the power terminal block 133 through the other side.

For example, the first heater 131 may include a plurality of first coil units 135 wound in a vertical direction. One side and the other side of the first coil unit 135 may be connected to the first region 121 above the power terminal block 133 . In this case, the current of the power terminal block 133 flows through the first coil unit 135 through one side of the first coil unit 135 , and then flows to the power terminal block 133 through the other side of the first coil unit 135 . can flow

For example, the second heater 132 may include a plurality of second coil units 136 wound in a vertical direction. One side and the other side of the second coil unit 136 may be connected to the second region 122 above the power terminal block 133 . In this case, the current of the power terminal block 133 flows through the second coil unit 136 through one side of the second coil unit 136 , and then flows to the power terminal block 133 through the other side of the second coil unit 136 . can flow

For example, the first coil unit 135 may maintain the same diameter along the vertical direction, and the second coil unit 136 may maintain the same diameter along the vertical direction, but is not limited thereto.

For example, the second coil unit 136 may be installed to surround the first coil unit 135 . For example, the first coil unit 135 and the second coil unit 136 may be spaced apart from each other. In this case, the separation distance between the first coil unit 135 and the second coil unit 136 may be smaller than the radius of the first coil unit 135 .

For example, the first coil unit 135 may be disposed adjacent to a central portion of the first region 121 of the housing 120 , and the second coil unit 136 may be disposed at a peripheral portion of the housing 120 .

For example, the first pipe 161 through which atmospheric air is introduced may be disposed inside the first coil unit 135 . That is, the first pipe 161 may be disposed in the hollow portion of the first coil unit 135 . Since the first coil unit 135 and the second coil unit 136 are disposed in the first region 121 , there is a spatial limitation in which the first pipe 161 is installed. Accordingly, since no components are disposed in the hollow portion of the first coil portion 135 , the first pipe 161 is disposed in the hollow portion of the first coil portion 135 to optimally dispose within a unit area. structure is possible.

By disposing the first heater 131 and the second heater 132 in this way, as shown in FIG. 8 , portions (first and second) corresponding to each of the first heater 131 and the second heater 132 . The portions 165 and 166) have a higher temperature than the other portions (the third portion 167). For example, the second portion 166 corresponding to the second heater 132 may have a higher temperature distribution in a wider area than the first portion 165 corresponding to the first heater 131 , but the present invention is not limited thereto. does not Heat from the first and

second portions

165 and 166 may be transferred to the periphery, that is, to the third portion 167 , and ultimately, a uniform temperature gradient may be obtained in the first region 121 .

Accordingly, in the embodiment, since the heater unit 130 having a double coil structure is provided, the heat source by the heater unit 130 is uniformly absorbed by the entire desiccant in the first region 121 of the housing 120 when the moisture catalyst is regenerated. Thus, an even temperature gradient is formed, the time to reach the regenerating temperature of the adsorbent can be shortened, and the regeneration process time can be shortened.

The above detailed description should not be construed as restrictive in all respects and should be considered as exemplary. The scope of the embodiments should be determined by a reasonable interpretation of the appended claims, and all modifications within the equivalent scope of the embodiments are included in the scope of the embodiments.

The embodiment may be applied to a device requiring dehumidification. For example, the embodiment may be applied to a process device requiring dehumidification. For example, the embodiment may be applied to an apparatus for manufacturing a semiconductor or display panel.

Claims

a gas substitute for removing moisture by replacing air in the atmosphere, and supplying the gas from which the moisture has been removed to the chamber to reduce the first moisture concentration of the chamber to a second moisture concentration; and

Comprising a purifier to circulate the gas in the chamber to maintain the chamber in a target moisture concentration range than the second moisture concentration

dehumidification air conditioning unit.
According to claim 1,

The gas substituent,

a housing having a first area and a second area below the first area;

a heater unit having a double coil structure installed in the first region;

a desiccant filled in the first region; and

and a dispersion plate installed between the first area and the second area

dehumidification air conditioning unit.
3. The method of claim 2,

The gas substitute,

a first pipe passing through the first side of the housing, the first area, and the distribution plate and communicating with the second area; and

and a second pipe connected to the chamber and communicating with the first area through a second side of the housing

dehumidification air conditioning unit.
4. The method of claim 3,

The air is supplied to the second region through the first pipe, is supplied to the first region via the dispersion plate, and after moisture is removed from the air by the desiccant, the air is supplied to the second region through the second pipe. supplied to the chamber

dehumidification air conditioning unit.
3. The method of claim 2,

The second area is a space

dehumidification air conditioning unit.
3. The method of claim 2,

The heater unit is

a first heater;

a second heater installed adjacent to the first heater; and

and a power terminal block installed on one side of the housing and connected to the first heater and the second heater

dehumidification air conditioning unit.
7. The method of claim 6,

The second heater is installed to surround the first heater

dehumidification air conditioning unit.
8. The method of claim 7,

The first heater is installed close to the center of the first area,

The second heater is installed in a peripheral portion surrounding the central portion of the first region.

dehumidification air conditioning unit.
9. The method of claim 8,

The first heater includes a plurality of first coil parts wound in a vertical direction),

The second heater includes a plurality of second coil parts wound in the vertical direction,

The second coil part is installed to surround the first coil part

dehumidification air conditioning unit.
10. The method of claim 9,

The first coil unit is disposed close to the central portion,

The second coil part is disposed on the peripheral part

dehumidification air conditioning unit.
3. The method of claim 2,

The dispersion plate includes a plurality of holes

dehumidification air conditioning unit.
12. The method of claim 11,

The diameter of the hole increases toward the outside from the center of the first region along the horizontal direction.

dehumidification air conditioning unit.
12. The method of claim 11,

the plurality of holes

A plurality of first holes formed in the central portion of the dispersion plate and a plurality of second holes formed in a peripheral portion surrounding the central portion of the dispersion plate,

The second hole has a larger diameter than that of the first hole.

dehumidification air conditioning unit.
14. The method of claim 13,

The diameters of the plurality of first holes are the same

dehumidification air conditioning unit.
14. The method of claim 13,

The diameters of the plurality of second holes are different

dehumidification air conditioning unit.
3. The method of claim 2,

The dispersion plate has a polygonal shape.

dehumidification air conditioning unit.
17. The method of claim 16,

The dispersion plate has an octagonal shape

dehumidification air conditioning unit.
3. The method of claim 2,

The desiccant is Molecular Sieve

dehumidification air conditioning unit.
3. The method of claim 2,

The gas substituent is composed of a plurality of

dehumidification air conditioning unit.
3. The method of claim 2,

When at least one or more gas substituents among the plurality of gas substituents are used to remove moisture from the air, the remaining gas substituents are used for regeneration of the desiccant

dehumidification air conditioning unit.