WO2021245870A1 - Système et procédé de collecte de microparticules - Google Patents

Système et procédé de collecte de microparticules Download PDF

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Publication number
WO2021245870A1
WO2021245870A1 PCT/JP2020/022078 JP2020022078W WO2021245870A1 WO 2021245870 A1 WO2021245870 A1 WO 2021245870A1 JP 2020022078 W JP2020022078 W JP 2020022078W WO 2021245870 A1 WO2021245870 A1 WO 2021245870A1
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WIPO (PCT)
Prior art keywords
unit
inspected
charge amount
amount
recovery
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PCT/JP2020/022078
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English (en)
Japanese (ja)
Inventor
安章 高田
峻 熊野
司 師子鹿
信二 吉岡
Original Assignee
株式会社日立ハイテク
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Application filed by 株式会社日立ハイテク filed Critical 株式会社日立ハイテク
Priority to PCT/JP2020/022078 priority Critical patent/WO2021245870A1/fr
Priority to JP2022529245A priority patent/JP7369869B2/ja
Publication of WO2021245870A1 publication Critical patent/WO2021245870A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode

Definitions

  • the present invention relates to a technique for a fine particle recovery system and a fine particle recovery method.
  • the threat of terrorism is increasing worldwide.
  • explosives are increasingly used in recent terrorism because the method of manufacturing powerful explosives made from daily necessities has spread via the Internet.
  • One of the effective means to prevent explosive terrorism is to find explosives hidden by explosive inspection equipment.
  • the information obtained by bulk inspection and trace inspection is different and can be operated complementarily. Therefore, it is known that security can be improved by using both inspection methods together.
  • Patent Document 1 states, "In order to solve the above-mentioned problems of the prior art, a dangerous substance represented by a nitro compound is efficiently ionized using a negative corona discharge, and the generated negative ions are mass spectrometerd. A sample gas sampling device and a dangerous goods detection device that "use and detect with high sensitivity” are disclosed (see summary).
  • the deposit inspection apparatus (1) sprays a compressed gas onto the inspection target (25) to which the sample substance is attached, and collects the peeled sample substance by the collecting filter (52).
  • Baggage delivery that includes a collection unit (5) and an inspection unit (2) that analyzes the sample substance collected by this collection filter (52), and further delivers baggage to the inspection unit (2). It is characterized by being composed of a section (3) and a transport section (4) that transports the collection filter (52) from the collection section (5) to the inspection section (2).
  • the kimono inspection method is disclosed (see summary).
  • the static elimination booth (20) is provided at the boundary between the first area (11) and the second area (12).
  • the static elimination booth is the first partitioning the first area and the space inside the booth. It is provided with a partition (26), a second partition (27) that separates the second area from the space inside the booth, and a humidifying nozzle (21) provided in the space inside the booth between the first partition and the second partition. Nozzles spray water or steam to increase the humidity of the space inside the booth.
  • the static elimination booth, static elimination system and static elimination method are disclosed (see summary).
  • Patent Document 4 describes, "When manufacturing a rubber stopper for pharmaceuticals and medical products using a vulcanizable rubber composition, the rubber stopper produced through a molding step, a cleaning / drying step is subjected to static elimination treatment. The rubber stoppers for pharmaceuticals and medical products are manufactured and molded, and the rubber stoppers manufactured through cleaning and drying processes are statically eliminated before the final visual inspection by image processing. "Rubber stoppers for pharmaceuticals and medical products The manufacturing method of the rubber stopper, the inspection method of the rubber stopper, and the inspection apparatus are disclosed (see summary).
  • the present invention has been made in view of such a background, and an object of the present invention is to improve the recovery efficiency of fine particles adhering to an inspected object.
  • the present invention has a peeling portion for peeling fine particles adhering to the inspected object by a first air flow generated by injecting compressed air toward the inspected object by an injection nozzle, and the above-mentioned.
  • a recovery unit that collects the fine particles peeled from the object to be inspected by the peeling unit and a static eliminator unit that eliminates static electricity on the surface of the object to be inspected are provided. It is characterized by having a part. Other solutions will be described as appropriate in the embodiments.
  • Insulating materials which are easier to use as a material for luggage, tended to be more difficult for fine particles to peel off than metal surfaces. Since the experiment by the inventors could not explain the difference in surface roughness depending on the material, the inventors presumed that the cause of the difficulty in peeling the fine particles from the insulating material was static electricity.
  • FIGS. 15A and 15B compare the signal intensities detected by attaching a certain amount of explosive particles to the surface of various types of objects to be inspected in a trace inspection device that separates and collects explosive particles by air flow and detects them. It is a graph.
  • the signal intensities in the case of testing by adhering fine particles to stainless steel are normalized as “1” and then shown.
  • FIG. 15A shows the signal strength when the explosive fine particles adhering to the surface of the inspected object are peeled off and recovered without static elimination of the inspected object.
  • FIG. 15B shows the signal strength when the explosive fine particles adhering to the surface of the inspected object are peeled off and recovered in the state where the inspected object is statically eliminated.
  • the first embodiment shows an example in which fine particles are peeled off and recovered from the inspected object after static elimination on the surface of the inspected object.
  • FIG. 1 is an external view of the fine particle inspection device D according to the first embodiment.
  • the cargo 5 to be inspected see FIG. 3
  • the transport unit 3 represented by the belt conveyor
  • the cargo 5 is transported to the inside of the fine particle inspection device D by the transport unit 3. ..
  • a shielding portion 41 such as a blind, a shutter, or a sliding door is provided at the portion of the entrance E1 where the luggage 5 enters the fine particle inspection device D.
  • an X-ray source, a radiation source, an ultraviolet source, etc. may be provided inside the fine particle inspection device D, so that a person outside the fine particle inspection device D may be exposed to radiation, or a person or pet may accidentally get fine particles. This is to prevent the inspection device D from getting inside.
  • FIG. 2 is a schematic internal perspective view of the configuration of the fine particle inspection device D as viewed from above.
  • a trace inspection unit 1 is provided inside the fine particle inspection device D.
  • the trace inspection unit 1 collects fine particles adhering to the surface of the luggage 5 and analyzes the components thereof.
  • the trace inspection unit 1 will be described later.
  • a bulk inspection unit 2 for performing bulk inspection in series with the trace inspection unit 1 is provided along the direction (thick arrow) in which the load 5 mounted on the transport unit 3 is transported. May be good.
  • Bulk inspection is to inspect the presence or absence of explosives based on the shape, density, etc., like an X-ray inspection device.
  • the trace inspection unit 1 adhering to the baggage 5 in one inspection and the confirmation of the inside of the baggage 5 by the bulk inspection such as the X-ray inspection.
  • the bulk inspection unit 2 may be omitted.
  • the luggage 5 that has passed through the bulk inspection unit 2 is discharged from the outlet E2 of the fine particle inspection device D by the transport unit 3.
  • FIG. 3 is a diagram showing the configuration of the trace inspection unit 1 (schematic perspective view from above).
  • the cargo 5 is transported into the fine particle inspection device D by the transport unit 3.
  • the baggage 5 transported in the fine particle inspection device D is transported near the static elimination unit 11.
  • the static eliminator unit 11 removes static electricity from the surface of the luggage 5.
  • the baggage 5 whose surface has been statically removed by the static elimination unit 11 is conveyed to the peeling recovery unit 100 in order to sample the fine particles adhering to the surface of the baggage 5.
  • the luggage 5 is transported between the peeling unit 120 and the collecting unit 130.
  • the peeling recovery unit 100 is composed of a compressed air supply unit 110, a peeling unit 120, a recovery unit 130, a concentration unit 140, and an analysis unit 150.
  • the peeling portion 120 is connected to the compressed air supply portion 110 of a compressor or the like via the pipe P1.
  • the compressed air supply unit 110 sends compressed air to the peeling unit 120, and the compressed air is ejected from the peeling unit 120 to separate the fine particles adhering to the surface of the baggage 5.
  • the peeled fine particles are collected from the collection unit 130 and sent to the concentration unit 140 via the pipe P2.
  • the fine particles concentrated in the concentrating unit 140 are sent to the analysis unit 150 via the pipe P3. Then, the analysis unit 150 analyzes the sent fine particles and detects the component thereof.
  • the control device 7 controls the injection of compressed air by controlling the injection nozzle 121 (see FIG. 6) of the peeling portion 120.
  • FIG. 4 is a functional block diagram showing the configuration of the control device 7.
  • the control device 7 has a storage device 703 such as a memory 701, a CPU (Central Processing Unit) 702, and an HD (Hard Disk). Further, the control device 7 has a communication device that receives a signal from the electrostatic sensor unit 12 and the like and transmits the signal to the injection nozzle 121 and the like.
  • the program stored in the storage device 703 is expanded in the memory 701 and executed by the CPU 702.
  • the processing unit 710 and the nozzle control unit 711 constituting the processing unit 710 are embodied.
  • the nozzle control unit 711 controls ON / OFF of the injection of compressed air by the injection nozzle 121.
  • FIG. 5 is a diagram specifically showing the position of the static elimination unit 11.
  • FIG. 5 shows a sectional view taken along the line AA of FIG.
  • a caster 52 is provided at the bottom and a handle 51 is often provided at the top for easy carrying.
  • the place where the fine particles are collected in the trace inspection unit 1 is preferably near the handle 51.
  • the static eliminator 11 for removing static electricity adhering to the surface of the baggage 5 also has a ceiling near the handle 51. It is preferable to install it in the vicinity. In this way, the static eliminator 11 removes static electricity on the surface near the portion where the fine particles are collected.
  • the static elimination unit 11 does not have to be installed near the handle 51 (that is, the static elimination target portion).
  • the static electricity eliminating unit 11 removes (static electricity) the static electricity on the surface of the luggage 5 (main body) and the handle 51 of the luggage 5.
  • static elimination unit 11 ionizes the atmosphere by means such as electric discharge, ultraviolet rays, X-rays, and radiation. Since the ionized atmospheric gas (ionized gas) has positive and negative charges, the static electricity near the handle 51 (the location to be statically eliminated) is neutralized and eliminated by the charge of the opposite polarity contained in the ionized gas.
  • the static elimination unit 11 attaches water droplets due to steam or mist to the luggage 5 (inspected object). In this way, the relative humidity inside the trace inspection unit 1 is maintained at about 80% or higher. In this case, by doing so, conduction is generated by water on the entire surface of the baggage 5 (object to be inspected), and static electricity can be released to the transport unit 3. At that time, it is desirable that the material of the transport portion 3 has conductivity, which makes it easy for static electricity to escape.
  • a drying portion (not shown) in order to facilitate the peeling of fine particles by the peeling portion 120 after static elimination.
  • FIG. 6 is a diagram showing a specific configuration of the peeling recovery unit 100.
  • the injection nozzle 121 constituting the peeling section 120 is transferred to the compressed air supply section 110 (via the pipe P1).
  • the compressed air supplied from (see FIG. 3) is injected.
  • the injected compressed air peels off the fine particles P adhering to the luggage 5 or the handle 51.
  • the separated fine particles P are separated in the direction of the recovery unit 130 by the air flow F1 of the compressed air.
  • dome 161 a dome-shaped cover
  • the injection nozzle 121 is preferably fixed to the dome 161 by the nozzle support portion 162.
  • the dome 161 is installed inside the housing 4 separately from the housing 4.
  • the peeled fine particles P are sucked into the intake port 131 constituting the recovery unit 130 and introduced into the concentration unit 140 via the pipe P2.
  • the enrichment unit 140 is composed of a cyclone enrichment unit 141.
  • the fine particle P and the gas are separated by the cyclone concentrating unit 141, and the separated fine particle P is introduced into the analysis unit 150.
  • the intake of the fine particles P by the collection unit 130 is controlled by the exhaust amount of the exhaust fan 142 provided in the cyclone concentration unit 141 and the intake amount by the mass spectrometer 154.
  • the analysis unit 150 includes a filter 151, a heater 152, a heater 153, and a mass spectrometer 15.
  • the fine particles P are separated by the cyclone concentrating unit 141 and accumulated in the filter 151. Further, the gas separated from the fine particles P by the cyclone concentrating unit 141 is exhausted by the exhaust fan 142 provided in the cyclone concentrating unit 141 (thick arrow in FIG. 6).
  • the filter 151 is heated to about 180 ° C. to 200 ° C. by the heater 152.
  • the fine particles P collected in the filter 151 are vaporized by the heat generated by the heater 152.
  • the mass spectrometer 154 is taking in air.
  • the chemical substance derived from the vaporized fine particles P by the intake by the mass spectrometer 154 is introduced into the mass spectrometer 154 via the pipe P3 heated to about 180 ° C. by the heater 153.
  • the mass spectrometer 154 analyzes the chemical substance derived from the introduced fine particles P.
  • a processing such as issuing an alarm by a warning unit (not shown) is performed.
  • the analysis unit 150 may be provided outside the housing 4.
  • FIG. 7 is a flowchart showing a procedure of processing performed by the fine particle inspection device D in the first embodiment.
  • the static elimination unit 11 eliminates static electricity on the surface of the load 5 transported by the transport unit 3 (S101). As described above, the static elimination unit 11 eliminates static electricity on the surface (including the handle 51) of the luggage 5 by the ionized gas G or the humidity. At this time, it is desirable that the luggage 5 is stopped at the static elimination unit 11 for several seconds and the transport speed is reduced (for example, the control device 7 controls the transport unit 3).
  • the nozzle control unit 711 of the control device 7 separates the fine particles by injecting compressed air from the peeling unit 120 (injection nozzle 121) (S102), and the fine particles are separated from the collecting unit 130 (intake port 131). Is recovered (S103).
  • the recovered fine particles are concentrated by the concentrating unit 140 (cyclone concentrating unit 141) and then vaporized in the filter 151 (S104).
  • the vaporized fine particles are analyzed by a mass spectrometer 154 (S105).
  • the static elimination unit 11 for statically eliminating the surface of the inspected object (baggage 5)
  • the fine particle inspection device D of the present embodiment has the analysis unit 150, it is possible to realize the improvement of the analysis accuracy accompanying the improvement of the fine particle recovery efficiency.
  • the bulk inspection unit 2 the trace inspection and the bulk inspection can be performed by the fine particle inspection apparatus D, so that the inspection efficiency can be improved.
  • the static electricity sensor unit 12 is provided in addition to the static electricity elimination unit 11 of the first embodiment.
  • the same components as those in the first embodiment are designated by the same reference numerals, and description thereof will be omitted as appropriate.
  • the external view of the fine particle inspection device Da according to the second embodiment is the same as that in FIG. 1, the illustration and description thereof are omitted here.
  • FIG. 8 is a diagram showing the configuration of the trace inspection unit 1a.
  • an electrostatic sensor unit 12 for measuring the state of charge of the luggage 5 is provided in front of the static electricity elimination unit 11, that is, near the entrance of the trace inspection unit 1a.
  • the static electricity sensor unit 12 measures the amount of charge on the surface of the luggage 5. The measurement result by the static electricity sensor unit 12 is transmitted to the control device 7a.
  • control device 7a controls the compressed air supply unit 110, the peeling unit 120, the recovery unit 130, and the analysis unit 150 based on the measurement results of the electrostatic sensor unit 12. Further, the control device 7a controls ON / OFF of the static elimination unit 11. The processing performed by the control device 7a will be described later.
  • the luggage 5 whose surface voltage of the luggage 5 is measured by the static electricity sensor unit 12 is conveyed near the static eliminator unit 11. Then, the static electricity elimination unit 11 performs static electricity elimination to remove static electricity on the surface of the luggage 5.
  • the baggage 5 whose surface has been statically removed by the static elimination unit 11 is conveyed to the peeling recovery unit 100 in order to sample the fine particles adhering to the surface of the baggage 5. Since the processing of the static elimination unit 11 is the same as that of the first embodiment, the description thereof will be omitted here. Further, since the structure of the peeling recovery unit 100 is the same as that of the first embodiment, the description thereof is omitted here.
  • FIG. 9 is a diagram specifically showing the position of the static electricity sensor unit 12 in the fine particle inspection device Da.
  • FIG. 9 shows a sectional view taken along the line BB of FIG.
  • the static electricity sensor unit 12 is preferably installed near the ceiling near the handle 51 and measures the amount of static electricity (charge amount) on the surface near the collection of fine particles.
  • the static electricity sensor unit 12 does not have to be installed near the handle 51. Since the installation position of the static elimination unit 11 is the same as that of the first embodiment, the description thereof will be omitted here.
  • the luggage 5 and the handle 51 are charged with static electricity, the attached fine particles are difficult to peel off.
  • compressed air strong wind pressure
  • the flow rate of instantaneous injection is larger than the flow rate of the gas sucked by the recovery unit 130, so that the air is blown off.
  • the proportion of the fine particles collected by the collection unit 130 is limited.
  • the static electricity sensor unit 12 measures the amount of static electricity on the surface of the luggage 5 or the handle 51. Further, the amount of static electricity, the optimum injection pressure of compressed air, the distance between the injection nozzle 121 and the luggage 5 and the handle 51, the amount of intake air by an appropriate collection unit 130, and the like are measured in advance.
  • the amount of static electricity on the surface is measured by the static electricity sensor unit 12, and the injection pressure of compressed air, the distance between the injection nozzle 121 and the luggage 5, the amount of intake air by the recovery unit 130, and the like are determined according to the amount of static electricity.
  • Optimal control can improve the collection efficiency of fine particles even when the surface of the luggage 5 is charged.
  • FIG. 10 is a functional block diagram showing the configuration of the control device 7a.
  • the same components as those in FIG. 4 are designated by the same reference numerals and description thereof will be omitted.
  • the program stored in the storage device 703 is expanded in the memory 701 and executed by the CPU 702.
  • the processing unit 710a, the nozzle control unit 711, the determination unit 712, the static elimination control unit 713, and the peeling recovery control unit 714 that constitute the processing unit 710a are embodied.
  • the determination unit 712 makes various determinations.
  • the static elimination control unit 713 controls ON / OFF of the static elimination unit.
  • the peeling recovery control unit 714 controls the wind pressure of the compressed air blown to the peeling target portion (handle 51 in this embodiment).
  • the peeling recovery control unit 714 increases the injection pressure of the compressed air or shortens the distance between the injection nozzle 121 and the luggage 5 or the handle 51 to reduce the compressed air at the peeling target portion (handle 51 in this embodiment).
  • the wind pressure is controlled to be large. When the wind pressure is controlled to be small, the reverse control is performed.
  • the peel recovery control unit 714 recovers by controlling the exhaust amount of the exhaust fan 142 (see FIG. 6) provided in the cyclone enrichment unit 141 and the intake amount by the mass spectrometer 154 (see FIG. 6).
  • the intake amount by the unit 130 is controlled.
  • the peeling recovery control unit 714 controls so that the larger the wind pressure at the peeling target portion (the larger the wind pressure), the larger the intake amount of the recovery unit 130.
  • the peeling recovery control unit 714 controls so that the smaller the wind pressure at the peeling target portion (the smaller), the smaller the intake amount of the recovery unit 130.
  • FIG. 11 is a flowchart showing a procedure of processing performed by the fine particle inspection device D in the second embodiment. See FIG. 10 as appropriate.
  • the static electricity sensor unit 12 measures the charge amount Q on the surface of the luggage 5 (S201).
  • the determination unit 712 of the control device 7a determines whether or not the charge amount Q measured by step S201 is larger than the predetermined value Q1 (Q>Q1; S202).
  • the predetermined value Q1 is a value at which if the amount of charge Q is larger than this, it becomes difficult to peel off the fine particles.
  • the static elimination control unit 713 of the control device 7a turns on the static elimination unit 11 (S211).
  • the static elimination unit 11 executes static elimination based on the value of the charge amount. Then, the static elimination unit 11 eliminates static electricity on the surface of the load 5 conveyed by the conveying unit 3 (S212). As described above, the static elimination unit 11 eliminates static electricity on the surface of the luggage 5 by the ionized gas G or the humidity. At this time, it is desirable that the luggage 5 is stopped at the static elimination unit 11 for several seconds. After that, the processing unit 710a proceeds to the process to step S231.
  • the peel recovery control unit 714 of the control device 7a is at the peel target location (handle 51 in this embodiment) according to the measured charge amount Q.
  • the compressed air supply unit 110, the peeling unit 120, and the recovery unit 130 are controlled so that the air pressure of the compressed air is optimized (peeling recovery control: S221).
  • the peeling recovery control unit 714 controls so that the larger the charge amount Q, the stronger the wind pressure of the compressed air at the peeling target portion. Further, the peeling recovery control unit 714 controls so that the smaller the charge amount Q is, the weaker the wind pressure of the compressed air at the peeling target portion.
  • the peel recovery control unit 714 controls so that the larger the charge amount Q is, the larger the intake amount by the recovery unit 130 is. Further, the peeling recovery control unit 714 controls so that the smaller the charge amount Q is, the smaller the intake amount by the recovery unit 130 at the peeling target portion.
  • the optimum wind pressure at the peeling target location, the optimum intake amount by the recovery unit 130, and the like are controlled.
  • the wind pressure at the peeling target portion is controlled based on the injection pressure of the compressed air, the distance between the injection nozzle 121 and the luggage 5, the handle 51, and the like.
  • the intake amount is controlled by the recovery unit 130, the exhaust amount of the exhaust fan 142 (see FIG. 6) provided in the cyclone enrichment unit 141, and the intake air by the mass spectrometer 154 (see FIG. 6). It is done by controlling the amount.
  • step S221 When the process of step S221 is completed, compressed air is injected from the peeling unit 120 (injection nozzle 121) under the control of the nozzle control unit 711 (S231). Further, the fine particles are recovered from the recovery unit 130 (intake port 131) together with the peeling of the fine particles by the injected compressed air (S232). The recovered fine particles are concentrated by the concentrating unit 140 (cyclone concentrating unit 141) and then vaporized in the filter 141 (S233). The vaporized fine particles are analyzed by a mass spectrometer 154 (S234).
  • the static electricity elimination unit 11 Static electricity is removed by.
  • the charge amount Q is smaller than the predetermined value Q1
  • the static elimination process is not performed. This makes it possible to improve the throughput.
  • the larger the charge amount Q measured by the electrostatic sensor unit 12 the larger the wind pressure of the compressed air at the peeling target portion (handle 51 in this embodiment) is adjusted. Further, the smaller the charge amount Q is, the smaller the wind pressure of the compressed air at the peeling target portion (handle 51 in this embodiment) is adjusted.
  • the larger the charge amount Q is, the larger the intake amount by the recovery unit 130 is controlled. Further, the smaller the charge amount Q is, the smaller the intake amount by the recovery unit 130 at the peeling target portion is controlled. As a result, an appropriate wind pressure according to the charge amount Q can be realized, and the recovery efficiency of fine particles can be improved.
  • FIG. 12 is a diagram showing the configuration of the peeling portion 120b according to the third embodiment.
  • the same components as those in FIG. 6 are designated by the same reference numerals, and the description thereof will be omitted.
  • a discharge electrode 122 for generating an ionized gas G is provided between the injection nozzle 121 and the luggage 5, or in the vicinity of the injection nozzle 121.
  • the discharge electrode 122 has the function of the static elimination unit 11.
  • the discharge electrode 122 is fixed by the discharge electrode support portion 123 so that the positional relationship with the injection nozzle 121 does not change. A high voltage is applied to the discharge electrode 122 from the power supply 125 via the wiring W1.
  • the discharge electrode 122 is a static elimination unit 11 in the first embodiment and the second embodiment. As described above, in the example shown in FIG. 12, the peeling portion 120b is configured to include the static elimination portion 11.
  • a valve 124 is provided in the middle of the pipe P1 for supplying compressed air, and this valve 124 is connected to the control device 7b via the wiring W2.
  • a part of the valve 124 is opened by a signal transmitted from the peel recovery control unit 714 (see FIG. 10) of the control device 7b.
  • the opening degree of the valve 124 is adjusted so that the weak airflow F2 is ejected from the injection nozzle 121.
  • the relationship between the weak airflow F2 and the airflow F1 shown in FIG. 6 is F2 ⁇ F1.
  • the ionized gas G generated in the vicinity of the discharge electrode 122 is blown in the vicinity of the handle 51 by the weak air flow F2 sent from the injection nozzle 121.
  • the ionized gas G stays in the vicinity of the handle 51, and the surface in the vicinity of the handle 51 is statically eliminated. That is, the weak airflow F2 is strong enough to keep the airflow in the vicinity of the handle 51.
  • the valve 124 is opened so that compressed air is ejected from the injection nozzle 121 at a high injection pressure by a signal from the control device 7b.
  • compressed air is injected from the injection nozzle 121 at a high injection pressure, and the fine particles adhering to the vicinity of the handle 51 are separated by the air flow F1 (see FIG. 6).
  • the peeled fine particles are collected from the collection unit 130, and the components thereof are analyzed by the analysis unit 150.
  • the weak airflow F2 may be constantly injected, or may be injected only when the load 5 is conveyed.
  • the static elimination unit 11 is provided on the peeling unit 120b. That is, the peeling portion 120b and the static elimination portion 11 are integrally configured. As described above, the peeling portion 120b and the static elimination portion 11 are integrally configured, so that the entire fine particle inspection device D becomes compact.
  • the generation of the ionized gas G is not limited to the discharge by the discharge electrode 122, and the ionized gas G may be generated by X-rays, radiation, or the like.
  • FIG. 13 is a diagram showing the configuration of the trace inspection unit 1c in the fourth embodiment.
  • the same components as those in FIG. 8 are designated by the same reference numerals, and the description thereof will be omitted.
  • the trace inspection unit 1c shown in FIG. 13 has a child configuration in which the static elimination unit 11 of the trace inspection unit 1a of FIG. 8 is omitted.
  • Other configurations are the same as in FIG.
  • the static electricity sensor unit 12 is preferably installed so as to be in the vicinity of the handle 51 as shown in FIG. 9, but may not be installed in the vicinity of the handle 51.
  • the specific configuration of the trace inspection unit 1c is the same as that in FIG. 12, so illustration and description thereof will be omitted.
  • the amount of static electricity (charge amount) on the surface of the luggage 5 or the handle 51 is measured by the static electricity sensor unit 12. Further, as in the second embodiment, the amount of static electricity (charge amount) on the surface of the luggage 5 or the handle 51, the optimum injection pressure of the compressed air, and the distance between the injection nozzle 121 and the luggage 5 or the handle 51 in advance. , The appropriate intake amount of the recovery unit 130 and the like are measured. Then, the control device 7a measures the amount of static electricity (charge amount) on the surface of the luggage 5 and the handle 51 measured by the static electricity sensor unit 12, and according to the charge amount, the injection pressure of the compressed air and the injection nozzle 121 The distance to the luggage 5, the intake amount of the collection unit 130, and the like are optimally controlled. As a result, even when the surface of the baggage 5 is charged, fine particles can be detected with high sensitivity. Incidentally, since the configuration of the control device 7a is the same as the configuration shown in FIG. 10, the description thereof is omitted here.
  • FIG. 14 is a flowchart showing a procedure of processing performed by the fine particle inspection device D.
  • the static electricity sensor unit 12 measures the charge amount Q on the surface of the luggage 5 (handle 51) (S301).
  • the peeling recovery control unit 714 of the control device 7a has the compressed air supply unit 110 and the compressed air supply unit 110 so that the wind pressure of the compressed air at the peeling target portion (handle 51 in this embodiment) is optimized according to the measured charge amount Q.
  • the peeling unit 120 and the collecting unit 130 are controlled (peeling recovery control: S311).
  • step S311 the peeling recovery control unit 714 performs the same processing as in step S221 of FIG.
  • Compressed air is ejected from the peeling section 120 (injection nozzle 121) (S312) to peel off the fine particles, and the fine particles are recovered from the recovery section 130 (intake port 131) (S313).
  • the recovered fine particles are concentrated by the concentrating unit 140 (cyclone concentrating unit 141) and then vaporized in the filter 141 (S314).
  • the vaporized fine particles are analyzed by a mass spectrometer 154 (S315).
  • the wind pressure is adjusted so that the larger the charge amount Q measured by the electrostatic sensor unit 12 is, the larger the peeling point pressure is, and the smaller the charge amount Q is, the smaller the peeling point pressure is.
  • the wind pressure is adjusted.
  • the larger the charge amount Q is, the larger the intake amount by the recovery unit 130 is controlled.
  • the smaller the charge amount Q is, the smaller the intake amount by the recovery unit 130 at the peeling target portion is controlled.
  • the present invention is not limited to the above-described embodiment, and includes various modifications.
  • the above-described embodiment has been described in detail in order to explain the present invention in an easy-to-understand manner, and is not necessarily limited to those having all the described configurations.
  • it is possible to replace a part of the configuration of one embodiment with the configuration of another embodiment and it is also possible to add the configuration of another embodiment to the configuration of one embodiment.
  • the injection nozzle 121 can also be held by a robot arm (not shown). With such a configuration, it is possible to change the position of the injection nozzle 121 to a desired position and to inject an air flow so as to lick the surface of the luggage 5. It is also possible to configure the injection nozzle 121 so that the neck swings up, down, left and right. When the injection nozzle 121 is held by the robot arm or the neck of the injection nozzle 121 is configured to swing up, down, left and right, the direction and position of the collection unit 130 are changed according to the movement of the injection nozzle 121. Be done.
  • each of the above-mentioned configurations, functions, processing units 710, 710a, storage device 703, and the like may be realized by hardware, for example, by designing a part or all of them by an integrated circuit or the like. Further, as shown in FIGS. 4 and 10, each of the above-mentioned configurations, functions, and the like may be realized by software by interpreting and executing a program in which a processor such as a CPU 702 realizes each function.
  • control lines and information lines are shown as necessary for explanation, and not all the control lines and information lines are shown in the product. In practice, you can think of almost all configurations as interconnected.

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Elimination Of Static Electricity (AREA)

Abstract

Afin d'améliorer l'efficacité de collecte de microparticules sur un objet à inspecter, la présente invention fait appel à une partie d'élimination (120) qui élimine des microparticules d'un chargement au moyen d'un flux d'air généré par une projection d'air comprimé d'une buse de projection vers l'objet à inspecter, à une partie de collecte (130) qui collecte les microparticules éliminées du chargement par la partie d'élimination (120), et à une partie d'élimination de charge (11) qui élimine l'électricité statique de la surface de l'objet à inspecter; et est caractérisée en ce que la partie d'élimination (120) et la partie de collecte (130) sont comprises au niveau d'un étage qui suit la partie d'élimination de charge (11).
PCT/JP2020/022078 2020-06-04 2020-06-04 Système et procédé de collecte de microparticules WO2021245870A1 (fr)

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JP2022529245A JP7369869B2 (ja) 2020-06-04 2020-06-04 微粒子回収システム及び微粒子回収方法

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006097990A1 (fr) * 2005-03-14 2006-09-21 Hitachi, Ltd. Équipement d’inspection de matière adhérente et procédé d’inspection de matière adhérente
WO2009139744A1 (fr) * 2008-05-14 2009-11-19 Implant Sciences Corporation Système de collecte de particules de trace
JP2010264341A (ja) * 2009-05-12 2010-11-25 Fujitsu Ltd 塵埃収集装置及び塵埃分析方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006097990A1 (fr) * 2005-03-14 2006-09-21 Hitachi, Ltd. Équipement d’inspection de matière adhérente et procédé d’inspection de matière adhérente
WO2009139744A1 (fr) * 2008-05-14 2009-11-19 Implant Sciences Corporation Système de collecte de particules de trace
JP2010264341A (ja) * 2009-05-12 2010-11-25 Fujitsu Ltd 塵埃収集装置及び塵埃分析方法

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