JPWO2021245870A1 - - Google Patents

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Publication number
JPWO2021245870A1
JPWO2021245870A1 JP2022529245A JP2022529245A JPWO2021245870A1 JP WO2021245870 A1 JPWO2021245870 A1 JP WO2021245870A1 JP 2022529245 A JP2022529245 A JP 2022529245A JP 2022529245 A JP2022529245 A JP 2022529245A JP WO2021245870 A1 JPWO2021245870 A1 JP WO2021245870A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022529245A
Other languages
Japanese (ja)
Other versions
JP7369869B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of JPWO2021245870A1 publication Critical patent/JPWO2021245870A1/ja
Application granted granted Critical
Publication of JP7369869B2 publication Critical patent/JP7369869B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Elimination Of Static Electricity (AREA)
JP2022529245A 2020-06-04 2020-06-04 微粒子回収システム及び微粒子回収方法 Active JP7369869B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/022078 WO2021245870A1 (fr) 2020-06-04 2020-06-04 Système et procédé de collecte de microparticules

Publications (2)

Publication Number Publication Date
JPWO2021245870A1 true JPWO2021245870A1 (fr) 2021-12-09
JP7369869B2 JP7369869B2 (ja) 2023-10-26

Family

ID=78830262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022529245A Active JP7369869B2 (ja) 2020-06-04 2020-06-04 微粒子回収システム及び微粒子回収方法

Country Status (2)

Country Link
JP (1) JP7369869B2 (fr)
WO (1) WO2021245870A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006097990A1 (fr) * 2005-03-14 2006-09-21 Hitachi, Ltd. Équipement d’inspection de matière adhérente et procédé d’inspection de matière adhérente
WO2009139744A1 (fr) * 2008-05-14 2009-11-19 Implant Sciences Corporation Système de collecte de particules de trace
JP2010264341A (ja) * 2009-05-12 2010-11-25 Fujitsu Ltd 塵埃収集装置及び塵埃分析方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006097990A1 (fr) * 2005-03-14 2006-09-21 Hitachi, Ltd. Équipement d’inspection de matière adhérente et procédé d’inspection de matière adhérente
WO2009139744A1 (fr) * 2008-05-14 2009-11-19 Implant Sciences Corporation Système de collecte de particules de trace
JP2010264341A (ja) * 2009-05-12 2010-11-25 Fujitsu Ltd 塵埃収集装置及び塵埃分析方法

Also Published As

Publication number Publication date
JP7369869B2 (ja) 2023-10-26
WO2021245870A1 (fr) 2021-12-09

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