WO2021237529A1

WO2021237529A1 - Mass transfer device and transfer method thereof

Info

Publication number: WO2021237529A1
Application number: PCT/CN2020/092696
Authority: WO
Inventors: 李强; 许时渊
Original assignee: 重庆康佳光电技术研究院有限公司
Priority date: 2020-05-27
Filing date: 2020-05-27
Publication date: 2021-12-02

Abstract

A mass transfer device and a transfer method thereof. The device comprises: a transfer container (101) containing a solution (102), two opposite sides of the transfer container (101) are provided with a liquid inlet (103) and a liquid outlet (104) respectively, wherein a circulating pump (105) is connected between the liquid inlet (103) and the liquid outlet (104); a target substrate (201) being arranged at the bottom of the transfer container (101) and between the liquid inlet (103) and the liquid outlet (104); the upper end of the transfer container (101) being provided with an opening end for the temporary storage substrate (301) to enter, and a light emitting diode (LED) chip (303) being pasted on the temporary storage substrate (301); a camera (304) arranged towards the temporary storage substrate (301); a mobile device (305) used for vertically moving the temporary storage substrate (301); and a processor (306) electrically connected to the camera (304), the mobile device (305) and the circulating pump (105) respectively. The solution (102) contained in the mass transfer device can flow directionally therein such that the LED chip (303) entering the solution (102) can be transferred to a target back plate along with the flow of the solution (102), thereby meeting the transfer requirements of Micro LED chips with various sizes.

Description

Invention name: A massive transfer device and its transfer method Technical field

[0001] The present invention relates to the field of mass transfer technology, in particular to a mass transfer device and a mass transfer method using the mass transfer device. Background technique

[0002] With the development of science and technology, light-emitting diodes (Light Emitting Diode, LED) have good stability, long service life, low power consumption, high color saturation, fast response speed, strong contrast, etc. Advantages, so it has become an important display element in the display screen. A large number of LED chips are installed on the existing LED display panel, and during the manufacturing process of the display screen, it is necessary to transfer the LED chip from its growth substrate to the display backplane of the display screen.

[0003] In the prior art, when the LED chip needs to be transferred from its growth substrate to the display backplane, it needs to use a vacuum suction nozzle to pick up the LED chip on the first substrate, and then place it on the second substrate. On the substrate, but this method is often affected by the size of the vacuum nozzle; with the further development of LED display technology, the size of the LED chip is getting smaller and smaller, due to the size of the existing Micro LED (micro light emitting diode) chip The size is already lower than 50 microns, or even several microns. The existing vacuum nozzles cannot break through the technical limit of 80 microns, so it is difficult to pick up Micro LED chips. Therefore, the existing transfer methods based on vacuum nozzles have been It is gradually unable to meet the demand for the transfer of Micro LED chips. Summary of Invention Technical Problem

[0004] In order to overcome the above-mentioned drawbacks, the purpose of the present invention is to provide a mass transfer device and a mass transfer method suitable for small-sized Micro LED chips. Problem solution technical solution

[0005] The purpose of the present invention is achieved through the following technical solutions:

[0006] The present invention is a mass transfer device, including:

[0007] A transfer container in which a solution is contained, and two opposite sides of the transfer container are respectively provided with inlets A liquid port and a liquid outlet, a circulating pump is connected between the liquid inlet and the liquid outlet through a pipe, so that the solution in the transfer container flows from the liquid inlet to the liquid outlet The bottom of the transfer container is provided with a target substrate, the target substrate is set between the liquid inlet and the liquid outlet; the upper end of the transfer container is provided with an open end for the temporary substrate to enter, the temporary LED chips are pasted on the storage substrate through an adhesive layer, and the adhesive layer is soluble in the solution;

[0008] A camera, the camera is arranged facing the temporary storage substrate; a mobile device, the mobile device is used to vertically move the temporary storage substrate; a processor, the processor is respectively connected to the camera and the The mobile device is electrically connected to the circulating pump.

[0009] The mass transfer device of the present invention is provided with a transfer container, and the solution contained in the transfer container can flow directionally therein, so that in the mass transfer method of the present invention, the LED entering the solution The chip can drop to a predetermined position on the bottom target backplane with the flow of the solution. It does not use a vacuum nozzle to pick it up, so its transfer process will not be limited by the size of the Micro LED chip, which greatly meets various sizes The transfer requirements of the Micro LED chip.

[0010] Optionally, the circulation pump and the pipeline are arranged outside the transfer container.

[0011] Optionally, a groove for accommodating the LED chip is provided in the target substrate.

[0012] Optionally, the number of groove positions is an integer multiple of three.

[0013] Optionally, the LED chip includes: a red LED chip, a green LED chip, and a blue LED chip.

[0014] Optionally, the number of LED chips on the temporary storage substrate is more than one.

[0015] Optionally, the solution is an organic solution.

[0016] Optionally, the solution is an inorganic solution.

[0017] Based on the same inventive concept, this application also provides a mass transfer method using the above mass transfer device, which includes:

[0018] Mount the target substrate at the bottom of the transfer container, turn on the circulation pump to make the solution in the transfer container flow from the liquid inlet to the liquid outlet;

[0019] A temporary storage substrate is provided, and an LED chip is fixed on the temporary storage substrate through an adhesive layer;

[0020] The temporary substrate is vertically placed into the solution from the upper end of the transfer container by the mobile device, so that the adhesive layer on the temporary substrate is dissolved by the solution to release the The LED chip on the temporary storage substrate; [0021] The LED chip descends in the solution and moves horizontally with the flow direction of the solution; making it fall into a predetermined position on the target substrate.

[0022] In the mass transfer method of the present invention, the LED chip entering the solution can fall to a predetermined position on the bottom target backplane with the flow of the solution, and it does not use a vacuum nozzle to pick it up, so it is The transfer process will not be limited by the size of the Micro LED chip, which greatly meets the transfer requirements of Micro LED chips of various sizes.

[0023] Optionally, the turning on the circulating pump to make the solution in the transfer container flow from the liquid inlet to the liquid outlet includes:

[0024] Turn on and adjust the circulation pump so that the solution in the transfer container flows from the liquid inlet to the liquid outlet at a preset horizontal speed.

[0025] Optionally, the step of making it fall into a predetermined position of the target substrate includes:

[0026] The circulation pump is turned off after all the LED chips on the current temporary storage substrate have been transferred.

[0027] Optionally, the step of turning off the circulating pump includes:

[0028] A new temporary storage substrate is provided, and the LED chip type on the new temporary storage substrate is inconsistent with the type of the LED chip transferred last time; and the connection to the liquid inlet and the Circulating pump between the liquid outlets.

[0029] Optionally, placing the temporary storage substrate into the solution from the upper end of the transfer container further includes:

[0030] Record the time and position of the temporary storage substrate when the substrate is placed in the solution.

[0031] Optionally, after the restarting the circulating pump connected between the liquid inlet and the liquid outlet includes

[0032] Add a predetermined length of time to the injection time to update the injection time. If the current time is consistent with the injection time, the temporary storage substrate is placed in the solution in the injection position middle.

[0033] Optionally, after the restarting the circulating pump connected between the liquid inlet and the liquid outlet includes

[0034] Add a predetermined distance to the placement position to update the placement position, and if the current time is consistent with the placement time, then the temporary storage substrate is placed in the solution in the placement position middle.

[0035] Optionally, the placing the temporary storage substrate in the solution includes:

[0036] The temporary storage substrate is perpendicular to the liquid surface of the solution, and placed in the solution at a predetermined vertical speed middle. Brief description of the beneficial effects of the invention Brief description of the drawings

[0037] For ease of description, the present invention is described in detail by the following preferred embodiments and accompanying drawings.

[0038] FIG. 1 is a schematic diagram of the structural principle of the mass transfer device of the present invention in a state;

[0039] FIG. 2 is a schematic cross-sectional view of the temporary storage substrate of the present invention;

[0040] FIG. 3 is a schematic diagram of the structural principle of the mass transfer device of the present invention in another state;

[0041] FIG. 4 is a schematic diagram of the work flow of an embodiment of the mass transfer method of the present invention;

[0042] FIG. 5 is a schematic diagram of the workflow of another embodiment of the mass transfer method of the present invention;

[0043] FIG. 6 is a schematic diagram of the workflow of another embodiment of the mass transfer method of the present invention. The best embodiment for implementing the invention The best embodiment of the invention

[0044] In order to make the objectives, technical solutions, and advantages of the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, and are not used to limit the present invention.

[0045] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front" ", "rear", "left",

"Right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and other directions or positional relationships are based on the attached drawings The orientation or positional relationship shown is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as an impact on the present invention. limit. In addition, the term "second" is only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the term "first" is limited.

The "second" feature may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0046] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the term "installation ",""connected," and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be a direct connection, or It may be indirectly connected through an intermediate medium, which may be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present invention can be understood according to specific circumstances.

[0047] A mass transfer device of the present invention will be described in detail below with an embodiment, please refer to FIG. 1 to FIG. 3, which includes:

[0048] The transfer container 101, the transfer container 101 is a place for mass transfer, the transfer container 101 contains a solution 102, wherein the solution 102 is an organic solution or an inorganic solution; the two opposite sides of the transfer container 101 A liquid inlet 103 and a liquid outlet 104 are respectively provided on the side. When a large amount of transfer is performed, the solution 102 enters the transfer container 101 from the liquid inlet 103, and is output from the liquid outlet 104 to the outside of the transfer container 101 ; Make the solution 102 flow from the liquid inlet 103 to the liquid outlet 104 in the transfer container 101; In this embodiment, the liquid inlet 103 is arranged on the left side of the transfer container 101, and the liquid outlet 104 The right detection solution 102 set in the transfer container 101 can flow from left to right in the transfer container 101; a target substrate 201 is provided at the bottom of the transfer container 101, and the target substrate 201 is used to house the transferred LED chips 303, and the target substrate 201 is provided with a groove 202 for accommodating the LED chip 303; the LED chip 303 after the transfer is completed will be accommodated in the groove 202; the target substrate 201 is set in the groove 202; Between the liquid inlet 103 and the liquid outlet 104; the upper end of the transfer container 101 is provided with an open end for the temporary storage substrate 301 to enter, and the temporary storage substrate 301 is pasted with an LED chip through an adhesive layer 302 303. The adhesive layer 302 is soluble in the solution 102; when transferring, the temporary substrate 301 is placed in the solution 102 from top to bottom, and a plurality of LED chips 303 are provided on the temporary substrate 301 And on the same temporary storage substrate 301, the types of LED chips 303 are the same, such as: on the same temporary storage substrate 301, all LED chips 303 are red LED chips 303R; multiple pieces on the temporary storage substrate 301 The LED chips 303 will enter the solution 102 in sequence, and the adhesive layer 302 in the temporary substrate 301 is dissolved by the solution 102 in the transfer container 101, so that the LED chips 303 are separated from the temporary substrate 301 and follow the flow direction of the solution 102 Perform horizontal movement; at the same time, since the gravity of the LED chip 303 itself is greater than the buoyancy force, it will move to the predetermined groove 202 in the target substrate 201 at the bottom of the transfer container 101 and enter the predetermined groove.

[0049] A circulating pump 105 is connected between the liquid inlet 103 and the liquid outlet 104 through a pipe, and the circulating pump 1 05 and the pipeline are arranged outside the transfer container 101. The solution 102 in the transfer container 101 passes through the liquid outlet 104 and then enters the circulating pump 105. The solution 102 is pressurized by the circulating pump 105 and then enters the transfer container 101 through the liquid inlet 103; the circulating pump 105 is used for transfer The flow of the solution 102 in the container 101 brings power; and the output power of the circulating pump 105 will rise linearly within a certain predetermined time when the circulating pump 105 is just started, so the solution 102 in the transfer container 101 is also in a state of accelerating flow; therefore, After multiple LED chips 303 under the same temporary storage substrate 301 enter the solution 102 at the same position one by one, they can be brought into the groove 202 at different distances under the action of the solution 102 of different flow rates, which is convenient for multiple pieces. Fast transfer of LED chip 303

[0050] The camera 304, the camera 304 is set facing the temporary storage substrate 301, and is used to obtain the state that the temporary storage substrate 301 enters the transfer container 101; the mobile device 305, the mobile device 305 is used to move the station vertically The temporary storage substrate 301 allows the temporary storage substrate 301 to enter the solution 102 at a predetermined speed; a processor 306, which is electrically connected to the camera 304, the mobile device 305, and the circulation pump 105, respectively , Used to control the working states of the camera 304, the mobile device 305, and the circulating pump 105 respectively.

[0051] Preferably, the number of grooves 202 is an integer multiple of three; there are three types of the temporary storage substrate 301, and one type of LED chip 303 is provided in each temporary storage substrate 301; Among them, the LED chip 303 includes: a red LED chip 303R, a green LED chip 303G, and a blue LED chip 303B; in this embodiment,

Take the 9 groove positions 202 as an example. After the transfer is completed, the red LED chip will be set in No. 1, No. 4, and No. 7 groove positions 202, and the green LED chip will be set in No. 2 and No. 5. , In slot 202 of No. 8, the blue LED chip will be set in slot 202 of No. 3, No. 6, and No. 9. In the present invention, the mass transfer device can be used to transfer LED chips 303 of three colors, red, green, and blue. In another embodiment, it can also be used to transfer LED chips 303 of only one color. .

[0052] The following uses an embodiment to specifically describe a mass transfer method of the present invention. Please refer to FIG. 4, which includes:

[0053] S101. Install the target substrate and make the solution flow directional

[0054] The target substrate is installed at the bottom of the transfer container, the target substrate is the destination of this LED chip transfer; the transfer container contains a solution, wherein the solution is an organic solution or an inorganic solution; and the cycle is opened The pump enables the liquid inlet to input the solution into the transfer container, and at the same time to output the solution from the liquid outlet to the outside of the transfer container Liquid, making the solution flow directional in the transfer container.

[0055] S102. Provide a temporary storage substrate

[0056] A temporary storage substrate is provided on which a number of LED chips are fixed by an adhesive layer; wherein the adhesive layer is soluble in the solution in the transfer container; and in the temporary storage substrate, all The color of the LED chips is the same, that is, the LED chip can be one of a red LED chip, a green LED chip, and a blue LED chip; in this embodiment as an example, all the LED chips in the temporary storage substrate are red. LED chip.

[0057] S103. The LED chip is separated from the temporary storage substrate

[0058] The temporary storage substrate is perpendicular to the liquid surface of the solution by the mobile device, and is placed in the solution at a predetermined speed, so that the LED chips on the temporary storage substrate enter the solution sequentially, so The adhesive layer on the temporary storage substrate is dissolved by the solution, so that the LED chip is separated from the temporary storage substrate, so as to release the LED chip on the temporary storage substrate.

[0059] S104. The LED chip is transferred to the target substrate according to the direction of the solution flow

[0060] After the LED chip is separated from the temporary storage substrate, because it is subjected to buoyancy and gravity in the vertical direction at the same time, and because the gravity it receives is greater than the buoyancy, it will fall in the solution, and because the LED chip is horizontal The direction is subjected to the horizontal thrust of the solution, so it moves horizontally with the flow direction of the solution; makes it fall into a predetermined position of the target substrate; wherein, the target substrate is provided with a LED for accommodating the LED The groove positions of the chip, and the number of the groove positions is an integer multiple of three; in this embodiment, taking 9 groove positions as an example, the red LED chips in the solution will sequentially enter No. 1 and No. 4 , No. 7 groove position.

[0061] In the following, another embodiment is used to specifically describe a mass transfer method of the present invention. Please refer to FIG. 5, which includes:

[0062] S201. Install the target substrate and accelerate the flow of the solution

[0063] The target substrate is installed at the bottom of the transfer container, the target substrate is the destination of this LED chip transfer; the transfer container contains a solution, wherein the solution is an organic solution or an inorganic solution; and the start is connected to the The circulating pump between the liquid inlet and the liquid outlet causes the solution to flow from the liquid inlet to the liquid outlet at a predetermined acceleration. Since the circulating pump is in a certain period of time when it is just started, The output power is in a state of linear increase, so the solution will accelerate from the liquid inlet to the liquid outlet.

[0064] S202. Provide a temporary storage substrate

[0065] A temporary storage substrate is provided, on which a plurality of LED chips are fixed by an adhesive layer; wherein, The adhesive layer is soluble in the solution in the transfer container; and in the temporary storage substrate, all the LED chips have the same color, that is, the LED chip can be one of a red LED chip, a green LED chip, and a blue LED chip. In this embodiment as an example, all LED chips in the temporary storage substrate are red LED chips.

[0066] S203. Record the placement time and placement location

[0067] The temporary storage substrate is moved to the placement position, and the time and placement position when the temporary storage substrate is placed in the solution are recorded; specifically: recording the on-duration of the circulating pump from the start to the current time, such as: 1S, and use the opening duration of 1S as the release time. At the same time, record the position coordinates of the temporary storage substrate entering the solution, such as: 0, and use the position coordinate point 0 as the placement position.

[0068] S204. Put the temporary substrate in the solution

[0069] At a predetermined time and position, the temporary storage substrate is perpendicular to the liquid surface of the solution, and is placed in the solution at a predetermined speed, so that the LED chips on the temporary storage substrate enter the solution sequentially The adhesive layer on the temporary storage substrate is dissolved by the solution, so that the LED chip is separated from the temporary storage substrate, so as to release the LED chip on the temporary storage substrate.

[0070] S205. The LED chips are transferred to the target substrate according to the direction of the solution flow

[0071] After the LED chip is separated from the temporary storage substrate, since it is subjected to buoyancy and gravity in the vertical direction at the same time, and because the gravity it receives is greater than the buoyancy, it will fall in the solution, and since the LED chip is horizontal The direction is subjected to the horizontal thrust of the solution, so it moves horizontally with the flow direction of the solution; makes it fall into a predetermined position of the target substrate; wherein, the target substrate is provided with a LED for accommodating the LED The groove positions of the chip, and the number of the groove positions is an integer multiple of three; in this embodiment, taking 9 groove positions as an example, the red LED chips in the solution will sequentially enter No. 1 and No. 4 , No. 7 groove position; The green LED chip will enter the No. 2, 5, 8 groove positions in turn; The blue LED chip will enter the No. 3, No. 6, and No. 9 groove positions in turn.

[0072] S206. Detect whether the transfer is completed on the current temporary storage substrate

[0073] Detecting whether the LED chips on the current temporary storage substrate have all completed the transfer, specifically: detecting whether the LED chips on the current temporary storage substrate have all separated from the temporary storage substrate and entered the target substrate.

[0074] S207. Turn off the circulating pump

[0075] The current temporary storage of LED chips on the substrate has completed the transfer, if so, turn off the circulation pump.

[0076] S208. Detect whether the target substrate is full of LED chips [0077] Detect whether the target substrate is full of the LED chips, if not, proceed to step S209 to provide a new temporary storage substrate; if yes, it means that the current round of transfer has ended, and step S201 is performed again to replace the target substrate Installed at the bottom of the transfer container.

[0078] S209. Provide a new temporary storage substrate and restart the circulating pump

[0079] A new temporary storage substrate is provided, and the LED chip type on the new temporary storage substrate is inconsistent with the type of the LED chip transferred last time; and the connection to the liquid inlet and the The circulation pump between the liquid outlets; In this embodiment, since only the temporary storage substrate transferred last time is provided with red LED chips, the new temporary storage substrate provided this time has a green light LED chip or blue LED chip; in this embodiment, it selects a temporary storage substrate provided with a green LED chip.

[0080] S210. Adjust the release time

[0081] A predetermined time period is added to the placement time to update the placement time. In this embodiment, since the last placement time is 1S, the predetermined time period can be based on the position of the groove on the target substrate. The distance and the solution flow speed are set, and in this embodiment can be set to 2S, so the updated injection time is 3S, and the injection position will remain unchanged. And proceed to S204. Put the temporary storage substrate into the solution. Therefore, in this embodiment, the position where the second temporary substrate is placed in the solution remains unchanged, and only the time of placement is adjusted. Therefore, the green LED chips will sequentially enter the target substrate No. 2 in the subsequent transfer process. , No. 5 and No. 8 grooves.

[0082] In the following, another embodiment is used to specifically describe a mass transfer method of the present invention. Please refer to FIG. 6, which includes:

[0083] S301. Install the target substrate and accelerate the flow of the solution

[0084] The target substrate is installed at the bottom of the transfer container, the target substrate is the destination of this LED chip transfer; the transfer container contains a solution, wherein the solution is an organic solution or an inorganic solution; and the startup is connected to the The circulating pump between the liquid inlet and the liquid outlet causes the solution to flow from the liquid inlet to the liquid outlet at a predetermined acceleration. Since the circulating pump is in a certain period of time when it is just started, Its output power is in a state of linear increase, so the solution will accelerate from the direction of the liquid inlet to the liquid outlet; or drive the circulating pump with a constant power, but due to the viscosity of the solution, the solution will The flow rate is in a state of linear increase, so the solution will accelerate from the liquid inlet to the direction of the liquid outlet [0085] S302. Provide a temporary storage substrate

[0086] A temporary storage substrate is provided on which a plurality of LED chips are fixed by an adhesive layer; wherein the adhesive layer is soluble in the solution in the transfer container; and in the temporary storage substrate, all The color of the LED chips is the same, that is, the LED chip can be one of a red LED chip, a green LED chip, and a blue LED chip; in this embodiment as an example, all the LED chips in the temporary storage substrate are red. LED chip.

[0087] S303. Record the placement time and placement location

[0088] The temporary storage substrate is moved to the placement position, and the time and the placement position of the temporary storage substrate placed in the solution are recorded; specifically: recording the on-time length of the circulating pump from the start to the current time, such as: 1S, and use the opening duration of 1S as the release time. At the same time, record the position coordinates of the temporary storage substrate entering the solution, such as: 0, and use the position coordinate point 0 as the placement position.

[0089] S304. Put the temporary substrate in the solution

[0090] At a predetermined time and position, the temporary storage substrate is perpendicular to the liquid surface of the solution, and is placed in the solution at a predetermined speed, so that the LED chips on the temporary storage substrate sequentially enter the solution The adhesive layer on the temporary storage substrate is dissolved by the solution, so that the LED chip is separated from the temporary storage substrate, so as to release the LED chip on the temporary storage substrate.

[0091] S305. The LED chips are transferred to the target substrate according to the direction of the solution flow

[0092] After the LED chip is separated from the temporary storage substrate, because it is subjected to buoyancy and gravity in the vertical direction at the same time, and because the gravity it receives is greater than the buoyancy, it will fall in the solution, and because the LED chip is horizontal The direction is subjected to the horizontal thrust of the solution, so it moves horizontally with the flow direction of the solution; makes it fall into a predetermined position of the target substrate; wherein, the target substrate is provided with a LED for accommodating the LED The groove positions of the chip, and the number of the groove positions is an integer multiple of three; in this embodiment, taking 9 groove positions as an example, the red LED chips in the solution will sequentially enter No. 1 and No. 4 , No. 7 groove position; The green LED chip will enter the No. 2, 5, 8 groove positions in turn; The blue LED chip will enter the No. 3, No. 6, and No. 9 groove positions in turn.

[0093] S306. Detect whether the transfer is completed on the current temporary storage substrate

[0094] Detecting whether the LED chips on the current temporary storage substrate have all completed the transfer, specifically: detecting whether the LED chips on the current temporary storage substrate have all separated from the temporary storage substrate and entered the target substrate.

[0095] S307. Turn off the circulating pump [0096] The current temporary storage of LED chips on the substrate has completed the transfer, if so, turn off the circulation pump.

[0097] S308. Detect whether the target substrate is full of LED chips

[0098] It is detected whether the LED chips are filled in the target substrate, and if not, step S309 is performed to provide a new temporary substrate; Transfer the bottom of the container.

[0099] S309. Provide a new temporary storage substrate and restart the circulating pump

[0100] A new temporary storage substrate is provided, and the LED chip type on the new temporary storage substrate is inconsistent with the type of the LED chip transferred last time; and the connection to the liquid inlet and the The circulation pump between the liquid outlets; In this embodiment, since only the temporary storage substrate transferred last time is provided with red LED chips, the new temporary storage substrate provided this time has a green light LED chip or blue LED chip; in this embodiment, it selects a temporary storage substrate provided with a green LED chip.

[0101] S310. Adjust placement position

[0102] A predetermined distance is added to the placement position to update the placement position. In this embodiment, since the last placement position is 0 o’clock, the predetermined distance can be based on the position of the groove on the target substrate. The distance between and the solution flow rate are set. In this embodiment, it can be set to 1, so the updated injection time is 1 o'clock, and the injection time will remain unchanged, which is still 1S after the circulation pump is turned on. And proceed to S304. Put the temporary storage substrate into the solution. Therefore, in this embodiment, the time for placing the second temporary substrate in the solution does not change, and only the placement position is adjusted. Therefore, the green LED chips will sequentially enter the target substrate No. 2 during the subsequent transfer process. , No. 5 and No. 8 grooves.

[0103] In the description of this specification, descriptions with reference to the terms "one embodiment", "some embodiments", "exemplary embodiments", "examples", "specific examples", or "some examples" etc. mean The specific features, structures, materials or characteristics described in combination with the embodiments or examples are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above-mentioned terms does not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials, or characteristics can be combined in any one or more embodiments or examples in an appropriate manner.

[0104] The foregoing descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the present invention. Within the scope of protection of the invention. [0105]

Claims

[Claim 1] A mass transfer device, characterized by comprising: a transfer container in which a solution is contained, and two opposite sides of the transfer container are respectively provided with a liquid inlet and a liquid outlet, A circulating pump is connected between the liquid inlet and the liquid outlet through a pipeline, so that the solution in the transfer container flows from the liquid inlet to the liquid outlet; the bottom of the transfer container is provided There is a target substrate, the target substrate is arranged between the liquid inlet and the liquid outlet; the upper end of the transfer container is provided with an open end for the temporary storage substrate to enter, and the temporary storage substrate passes through an adhesive layer LED chips are pasted, and the adhesive layer is soluble in the solution; a camera, the camera is arranged toward the temporary storage substrate; a mobile device, the mobile device is used to vertically move the temporary storage substrate; processing The processor is electrically connected to the camera, the mobile device, and the circulation pump, respectively.

[Claim 2] The mass transfer device according to claim 1, wherein the circulation pump and the pipe are provided outside the transfer container.

3. The mass transfer device according to claim 2, wherein the target substrate is provided with grooves for accommodating the LED chip.

4. The mass transfer device according to claim 3, wherein the number of the groove positions is an integer multiple of three.

5. The mass transfer device according to claim 4, wherein the LED chip comprises: a red LED chip, a green LED chip, and a blue LED chip.

6. The mass transfer device according to claim 5, wherein the number of LED chips on the temporary storage substrate is more than one.

7. The mass transfer device according to claim 6, wherein the solution is an organic solution.

8. The mass transfer device according to claim 6, wherein the solution is an inorganic solution.

9. A mass transfer method using the mass transfer device according to any one of claims 1 to 8, characterized in that it comprises: Install the target substrate on the bottom of the transfer container, turn on the circulation pump to make the solution in the transfer container flow from the liquid inlet to the liquid outlet; provide a temporary storage substrate, and the temporary storage substrate is fixed by an adhesive layer There is an LED chip; the temporary storage substrate is vertically placed into the solution from the upper end of the transfer container through the mobile device, so that the adhesive layer on the temporary storage substrate is dissolved by the solution to release The LED chip on the temporary storage substrate; the LED chip descends in the solution and moves horizontally with the flow direction of the solution; and makes it fall into a predetermined position on the target substrate.

10. The mass transfer method according to claim 9, wherein the opening the circulating pump to make the solution in the transfer container flow from the liquid inlet to the liquid outlet comprises: opening and adjusting the The circulating pump makes the solution in the transfer container flow from the liquid inlet to the liquid outlet at a preset horizontal speed.

11. The mass transfer method according to claim 10, wherein the step of making it fall into a predetermined position of the target substrate comprises: turning off the LED chips on the current temporary substrate after the transfer is completed. The circulating pump.

12. The mass transfer method according to claim 11, characterized in that, after the turning off the circulating pump comprises: providing a new temporary storage substrate, and the LED chip type on the new temporary storage substrate and the upper The types of the LED chips that have been transferred are inconsistent each time; and restart the circulating pump connected between the liquid inlet and the liquid outlet.

13. The mass transfer method according to claim 12, characterized in that, placing a temporary storage substrate into the solution from the upper end of the transfer container further comprises: recording the placement of the temporary storage substrate into the solution Time and placement.

14. The mass transfer method according to claim 13, characterized in that, after the restarting the circulating pump connected between the liquid inlet and the liquid outlet comprises: adding A predetermined length of time to update the placement time; if the current time is consistent with the placement time, the temporary storage substrate is placed in the solution in the placement position.

15. The mass transfer method according to claim 13, characterized in that, after the restarting the circulating pump connected between the liquid inlet and the liquid outlet comprises: adding A predetermined distance is used to update the placement position, and if the current time is consistent with the placement time, the temporary storage substrate is placed in the solution in the placement position.

16. The mass transfer method according to claim 14 or 15, wherein the placing the temporary storage substrate in the solution comprises: placing the temporary storage substrate perpendicular to the liquid surface of the solution, and Put it into the solution at a predetermined vertical speed.