WO2021227261A1 - Flexible ultrasonic probe, ultrasonic imaging measurement system, and measurement method - Google Patents

Flexible ultrasonic probe, ultrasonic imaging measurement system, and measurement method Download PDF

Info

Publication number
WO2021227261A1
WO2021227261A1 PCT/CN2020/105732 CN2020105732W WO2021227261A1 WO 2021227261 A1 WO2021227261 A1 WO 2021227261A1 CN 2020105732 W CN2020105732 W CN 2020105732W WO 2021227261 A1 WO2021227261 A1 WO 2021227261A1
Authority
WO
WIPO (PCT)
Prior art keywords
flexible
module
ultrasonic
probe
transducer array
Prior art date
Application number
PCT/CN2020/105732
Other languages
French (fr)
Chinese (zh)
Inventor
简小华
Original Assignee
苏州希声科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 苏州希声科技有限公司 filed Critical 苏州希声科技有限公司
Publication of WO2021227261A1 publication Critical patent/WO2021227261A1/en

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/42Details of probe positioning or probe attachment to the patient
    • A61B8/4272Details of probe positioning or probe attachment to the patient involving the acoustic interface between the transducer and the tissue
    • A61B8/4281Details of probe positioning or probe attachment to the patient involving the acoustic interface between the transducer and the tissue characterised by sound-transmitting media or devices for coupling the transducer to the tissue
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0644Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
    • B06B1/0648Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element of rectangular shape
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/18Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2437Piezoelectric probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/34Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/02Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
    • G01S15/06Systems determining the position data of a target
    • G01S15/08Systems for measuring distance only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/50Application to a particular transducer type
    • B06B2201/55Piezoelectric transducer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B2201/00Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
    • B06B2201/70Specific application
    • B06B2201/76Medical, dental

Definitions

  • the invention belongs to the technical field of ultrasonic imaging detection, and specifically relates to a flexible ultrasonic probe, an ultrasonic imaging detection system and a detection method, which can be used in the fields of medical imaging and industrial non-destructive testing.
  • the ultrasonic transducer transmits and receives ultrasonic waves, and is the core component of the ultrasonic imaging system.
  • conventional ultrasound probes whether they are convex arrays, concave arrays, linear arrays or area arrays, have fixed geometric dimensions.
  • convex/concave array probes have fixed probe curvature radius, array element spacing and distribution, etc. Therefore, in order to obtain a good contact, it is necessary to close the ultrasonic probe to the inspection site and use ultrasonic couplant to fill in the small gaps. Even so, good contact is often not obtained, which greatly affects the image quality.
  • the probe In the detection of human tissue, if it is not a soft tissue part but a bone (such as a limb fracture), or the detection device surface is not flat or the curvature does not match the transducer during metal flaw detection, or the detection target surface curvature continuously changes irregularly, the probe It cannot be used, and a probe of corresponding shape and size must be developed for testing, which causes great inconvenience to imaging and testing.
  • the current flexible ultrasonic transducer mainly uses the transducer to be embedded in a flexible substrate, and uses a flexible connection circuit (such as fpcb, etc.) to connect the transducer to achieve a certain tortuous change.
  • a flexible connection circuit such as fpcb, etc.
  • Its representative structure is a flexible ultrasonic phased array array transducer and manufacturing method disclosed in Chinese patent (CN103157594B).
  • the transducer includes a flexible piezoelectric ceramic composite material wafer, a damping backing material, a matching layer, and a flexible circuit board.
  • Coaxial cable and probe interface, the matching layer, the flexible piezoelectric ceramic composite material wafer and the damping backing material are sequentially bonded together to form an acoustic laminate
  • the flexible circuit board is connected to the flexible piezoelectric ceramic composite material wafer
  • the flexible circuit board leads the multi-core coaxial cable to the probe interface.
  • This type of flexible probe can be directly attached to the surface of the detection target and can adapt to targets with different curvatures, but it cannot be applied to targets with large continuous changes in curvature.
  • imaging it is necessary to manually measure and input parameters such as curvature, imaging aperture, and field of view after attachment to complete imaging detection.
  • the ultrasonic transducer array includes a number of ultrasonic transducer units not less than two.
  • the flexible ultrasonic transducer array also includes a flexible ultrasonic transducer array.
  • the ultrasonic transducer unit is arranged in or on the flexible medium in an array, and the shape of the flexible medium is variable so as to fit the surface of the ultrasonic treatment/ultrasound imaging object.
  • the flexible ultrasonic transducer array can fit various body parts with different surface shapes, it can obtain ultrasonic treatment/ultrasound imaging effects that cannot be achieved by the prior art, and is equipped with an independent shape scanner (optical) measurement
  • the curvature of the probe after it is attached is used for later imaging.
  • the detection probe is still based on a flexible medium, so it cannot measure a target with a continuously changing curvature.
  • the shape scanner needs to be configured separately to scan, it increases the difficulty of the test, and it is difficult to obtain some positions if they are blocked. The curvature of the detected target.
  • the current flexible ultrasonic transducers mainly have the following problems: 1. Using a flexible substrate, the curvature change is limited and cannot be applied to the situation where the curvature changes continuously; 2. After the probe is attached to the target surface, it is necessary to measure and obtain the probe Parameters such as curvature and field of view can only be used for image processing in the later stage.
  • the existing method requires the use of a third-party shape scanner, and the application scenarios are limited.
  • the present invention provides an improved flexible ultrasonic probe.
  • the invention also provides an ultrasonic imaging detection system and detection method.
  • a flexible ultrasonic probe includes a flexible transducer array.
  • the probe also includes a shell whose two ends are respectively communicated with the outside.
  • the shell has a filling cavity with an opening at one end, and the opening of the filling cavity faces one end of the shell
  • the flexible transducer array is connected to the one end of the housing, and the flexible transducer array is also sealed and arranged with the open end of the filling cavity, so that the filling cavity is formed for filling a fluid filler.
  • the probe further includes a deformation detection device arranged in the housing for detecting the positions of different points of the flexible transducer array.
  • the deformation detection device includes a substrate fixedly arranged in the housing and a detection head whose array is distributed on the substrate, and the flexible transducer array faces the deformation detection device.
  • a reflective film is formed on one side, and all the detection heads are respectively used to detect the distance between each of the detection heads and the reflective film.
  • the detection heads are linear array distribution or area array distribution, preferably area array distribution, the detection result is more reliable. More preferably, the number of the detection heads is the same as or different from the number of the elements of the flexible transducer array, and the detection heads are equally spaced, and the separation distance is different from that of the flexible transducer array. The distance between the elements during deformation is the same or different. Specifically, the number of detection heads is the same as the number of array elements of the flexible transducer array.
  • the deformation detection device is an optical fiber distance measuring device or an ultrasonic thickness measurement device.
  • the detection head is an optical fiber detection head
  • the reflective film is an optical reflective film
  • the detection head is an ultrasonic detection head
  • the reflective film is an acoustic reflective film.
  • the reflective film is, but not limited to, an aluminum film or a gold film.
  • the filling cavity is jointly enclosed by the inner wall of the housing, the flexible transducer array and the deformation detection device, or the filling cavity is independently arranged inside the housing and has one end. Open cavity.
  • the filling cavity is jointly formed by the inner wall of the housing, the flexible transducer array and the deformation detection device, the flexible transducer array and the housing are sealed with a sealant, and the deformation
  • the side of the detection device facing the flexible transducer array is formed with an isolation layer for separating the filler from the deformation detection device.
  • the filling cavity is provided with valves for injecting the filling agent and exporting the filling agent.
  • the valve includes an inlet valve for injecting the filler and an outlet valve for venting the filler; or the valve is one that is used for injecting the filler.
  • Filling agent, and a valve used to lead out the filling agent are not limited, and can be 1, 2, 3 or more.
  • the shell includes a shell whose two ends are respectively capable of communicating with the outside world, and a bottom bracket connected to one end of the shell and communicating with the inside of the shell.
  • the wall has a hollow channel
  • the flexible transducer array is connected to the other end of the housing
  • the probe further includes a connection cable connected to the bottom support
  • the flexible transducer array is connected to the
  • the cables are connected by wires, and the wires enter the interior of the bottom bracket through the hollow channel of the housing and are electrically connected with the connecting cables.
  • the deformation detection device is arranged in the housing, and the deformation detection device is electrically connected to the connecting cable through a wire.
  • an adapter circuit board is arranged in the bottom bracket, and the adapter circuit board is electrically connected to the flexible transducer array, the deformation detection device and the connecting cable, respectively, and the adapter circuit board is used to connect the The connecting wires of different specifications of the flexible transducer array and the deformation detection device are converted into standard coaxial cables and then connected to the connecting cables.
  • the flexible transducer array is also fixedly arranged with the housing through a chuck.
  • the material of the chuck is metal or plastic. More preferably, the metal includes But not limited to aluminum and stainless steel.
  • the plastics include but are not limited to acrylic and polytetrafluoroethylene.
  • the flexible transducer array includes a flexible substrate, at least two transducer array elements embedded in the flexible substrate, and an isolation device formed on the inner surface of the flexible substrate.
  • the base lining film of the flexible substrate and the filler and the reflective film formed on the inner surface of the base lining film, and the deformation detection device is used for detecting the distance between the deformation detection device and the reflective film.
  • the material of the flexible substrate is polyethylene terephthalate, polydimethylsiloxane, polyvinyl alcohol, polyimide, and polyethylene naphthalate.
  • One or a combination of diol esters is polyethylene terephthalate, polydimethylsiloxane, polyvinyl alcohol, polyimide, and polyethylene naphthalate.
  • diol esters One or a combination of diol esters.
  • the base liner film is a PET film or a PI film.
  • an ultrasonic imaging detection system which contains the above-mentioned flexible ultrasonic probe.
  • the ultrasonic imaging detection system further includes a host electrically connected to the probe, and the host includes a T/R switch module, an LNA module, a TGC module, an AD sampling module, A control module and an image processor, the host further includes a power excitation module and a display screen, wherein,
  • the control module controls the deformation detection device to detect the distance data between the flexible transducer array element and the deformation detection device, and after processing, obtains the data required for subsequent ultrasonic imaging detection;
  • the power excitation module is respectively connected with the control module and the T/R switch module, and is used to transmit the excitation voltage required by the work to the probe so that the probe emits ultrasonic waves.
  • the T/R conversion switch module and then transmit a signal to the probe;
  • the T/R switch module is also used to receive the ultrasonic echo signal fed back by the probe;
  • the LNA module is used to receive and process the ultrasonic echo signal entered by the R/T switch module;
  • the TGC module is used to receive the signal processed by the LNA module to perform time gain compensation, and the TGC module is also connected to the control module.
  • the data obtained after processing adjusts the parameters set by TGC to perform real-time gain compensation
  • the AD sampling module is used to receive the signal output by the TGC module, and then perform beamforming and imaging processing by the image processor, and display it on the display screen.
  • the deformation detection device is an optical fiber detection device
  • the ultrasonic imaging detection system further includes a deformation measurement module connected to the control system and the probe respectively, and the deformation measurement module is controlled by the control module for
  • the deformation detection device inputs detection signals and receives and processes the data detected by the deformation detection device, and the processed data is sent back to the control module and processed to obtain data required for subsequent ultrasonic imaging detection.
  • an ultrasonic imaging detection method the detection system used in the detection method is an ultrasonic imaging detection system, and the ultrasonic imaging detection system contains the above-mentioned flexible ultrasonic probe.
  • the ultrasonic imaging detection system further includes a host computer electrically connected to the probe, and the host computer includes a T/R switch module, an LNA module, a TGC module, an AD sampling module, and a control module connected in sequence.
  • the host further includes a power excitation module and a display screen, the power excitation module is respectively connected with the T/R switch module and the control module, the detection method includes the following steps:
  • the power excitation module is controlled to emit the excitation voltage required for the operation of the probe, so that the probe emits ultrasonic waves;
  • the echo signal of the probe enters the LNA module for processing after passing through the T/R switch module, and then performs time gain compensation through the TGC module;
  • the signal through the TGC module is collected by the AD sampling module, and then input to the image processor for beamforming and imaging processing, and finally displayed on the display screen to complete the imaging or detection of the target.
  • step (1) the shape of the detected target is observed, and if the part in contact with the probe is a protruding structure, a part of the filler in the filling cavity is derived to make the
  • the flexible transducer array of the probe is matched with the surface of the detected target, and then filler is injected into the filling cavity to make the contact surface close; if the part contacting the probe is a recessed structure, the filling is injected into the filling cavity
  • the agent makes the flexible transducer array of the probe close to the surface of the detected target.
  • step (1) an ultrasonic couplant is applied to the surface of the probe first, and then the probe is closely attached to the surface of the target to be detected, so that the ultrasonic couplant is located on the surface of the probe and the target to be detected, so that the probe It fits more closely to the surface of the detected target.
  • the TGC module is also connected to the control module, and the parameters set by the TGC module are performed based on the data obtained by processing the data detected by the deformation detection device. Adjusted to perform real-time gain compensation.
  • the present invention has the following advantages compared with the prior art:
  • the flexible ultrasonic probe of the present invention can make the flexible transducer array realize the detection and imaging of the detected target with different curvatures by setting the filling cavity and filling the fluid filler in the filling cavity, and the built-in deformation detection device can realize the curvature of each element Real-time detection and feedback to improve the flexibility and automation of imaging detection.
  • the flexible ultrasonic probe of the present invention effectively solves the problem that the existing flexible ultrasonic probe is not tightly attached to the target, has no deformation detection function, and must be assisted by manual or a third-party surveying and mapping system, and can realize automatic testing of irregularly changing surface targets, and
  • the probe has simple structure and complete functions to meet the needs of irregular target ultrasonic imaging and non-destructive flaw detection.
  • FIG. 1 is a schematic diagram of the structure of the flexible ultrasonic probe of Embodiment 1;
  • FIG. 2 is a schematic structural diagram of the use state of the flexible ultrasonic probe of Embodiment 1 when the surface of the object to be detected is a concave surface;
  • FIG. 3 is a schematic structural diagram of the use state of the flexible ultrasonic probe of Embodiment 1 when the surface of the object to be detected is a convex surface;
  • FIG. 4 is a schematic diagram of the structure of the flexible transducer array of the flexible ultrasonic probe of Embodiment 1;
  • FIG. 5 is a schematic diagram of the structure of the ultrasonic imaging detection system of Embodiment 2;
  • FIG. 6 is a schematic diagram of the module structure of the ultrasonic imaging detection system of Embodiment 2;
  • Shell 1a, shell; 1b, bottom support; 2. flexible transducer array; 2a, flexible substrate; 2b, transducer array element; 2b1, matching layer; 2b2, piezoelectric layer; 2b3, backing 2c, common ground wire; 2d, base lining film; 2e, electrode plate; 3. chuck; 4. filling cavity; 5. deformation detection device; 5a, substrate; 5b, detection head; 6, connection cable; 7 ,valve;
  • the flexible ultrasound probe 100 of this example is shown in Figures 1 to 4.
  • the flexible ultrasound probe 100 includes a flexible transducer array 2 and a housing 1 with two ends connected to the outside.
  • the housing 1 has a filling cavity 4 with an opening at one end.
  • the opening of the cavity 4 faces one end of the housing 1, the flexible transducer array 2 is connected to one end of the housing 1, and the flexible transducer array 2 is also sealed with the open end of the filling cavity 4, so that the filling cavity 4 is formed for filling fluid.
  • the flexible ultrasonic probe 100 also includes a deformation detection device 5 arranged in the housing 1. When the flexible ultrasonic probe 100 is used, the flexible transducer array 2 is attached to the surface of the target to be detected, and the deformation detection device 5 It is used to detect the positions of different points of the flexible transducer array 2.
  • the filling cavity 4 may be enclosed by the inner wall surface of the housing 1, the flexible transducer array 2 and the deformation detection device 5, or may be a cavity with an opening at one end independently provided in the housing 1.
  • the filling cavity 4 is enclosed by the inner wall surface of the housing 1, the flexible transducer array 2 and the deformation detection device 5, and the flexible transducer array 2 is fixedly connected to the end of the housing 1 through a clamp 3.
  • the flexible transducer array 2 and the housing 1 are sealed by a sealant.
  • the chucks 3 are respectively provided on the opposite sides of the flexible transducer array 2 to fix the flexible transducer array 2 and facilitate fixing the flexible transducer array 2 to the housing 1.
  • the chucks 3 can be fixed clamps.
  • the metal parts that hold and fix the structure such as aluminum, stainless steel, etc.
  • the fluid filler filled in the filling cavity 4 may be liquid or colloid, such as one or a combination of several including but not limited to water, silicone oil, ultrasonic coupling agent, and the like.
  • the housing 1 is provided with a valve for injecting and exporting filler into the filling cavity 4.
  • the valve may be an inlet valve for injecting the filler and an outlet valve for discharging the filler, or a set
  • a valve 7 is used to inject the filler and to discharge the filler. In this example, a valve 7 is set.
  • the flexible transducer array 2 Taking the volume of the filling cavity when the flexible transducer array 2 is not deformed as the initial volume of the filling cavity, when the filling amount of the filler exceeds the initial volume of the filling cavity, the flexible transducer array 2 will be squeezed to protrude from the probe 100
  • the end surface, as shown in Figure 2, the surface suitable for the detected target is a concave surface at this time; when the filling amount of the filler is less than the initial volume of the filling cavity, the flexible transducer array 2 is recessed into the end surface of the probe 100, as shown in the figure As shown in 3, at this time, the surface suitable for the detected target is a convex surface.
  • the specific deformed shape of the flexible transducer array 2 is determined by the shape of the surface of the detected target in contact.
  • the housing 1 includes a housing 1a whose two ends are respectively connected to the outside world and a bottom bracket 1b whose one end is connected to one end of the housing 1a.
  • the hollow channel facilitates the passage and placement of wires (flexible electrode plates) of the flexible transducer array.
  • the flexible transducer array 2 is connected to the other end of the housing 1a.
  • the flexible ultrasound probe 100 also includes a connection connected to the bottom support 1b.
  • the cable 6, the flexible transducer array 2 and the connecting cable 6 are connected by wires, and the wires enter the bottom bracket 1b through the hollow channel of the housing 1a and then are electrically connected with the connecting cable 6.
  • the deformation detecting device 5 is connected in the housing 1a, and the deformation detecting device 5 is electrically connected to the connecting cable 6 through a wire.
  • the housing 1a can support and fix the flexible transducer array 2
  • the bottom support 1b can support the housing 1a
  • the cavity inside the bottom support 1b can be used for the wires and the flexible transducer array 2
  • the wire of the deformation detection device 5 can also be connected with a switching circuit board in the bottom support 1b.
  • the switching circuit board is electrically connected to the flexible transducer array 2 and the deformation detection device 5, and the switching circuit board is used to connect the flexible
  • the connecting wires of different specifications of the transducer array 2 and the deformation detection device 5 are converted into standard coaxial cables and then connected to the connecting cable 6.
  • the flexible transducer array 2 includes a flexible substrate 2a, at least two transducer array elements 2b embedded in the flexible substrate 2a, and formed on the inner surface of the flexible substrate 2a for isolating the flexible substrate 2a and The base liner film 2d of filler and the reflective film formed on the inner surface of the base liner film 2d.
  • the shape of the transducer element 2b can be a rectangular parallelepiped, a cube, a cylinder, a hexagonal prism, or the like.
  • the flexible transducer array 2 can be a linear array, a surface array, a convex array, a concave array, etc., with a center frequency in the range of 20KHz-60MHz, and the number of array elements is greater than two.
  • Each transducer element 2b includes a matching layer 2b1, a piezoelectric layer 2b2, and a backing 2b3 arranged in sequence, wherein the piezoelectric layer 2b2 is composed of a material with piezoelectric effect and reverse electric effect, which can be piezoelectric ceramic PZT, Piezoelectric single crystal PMN-PT, piezoelectric film PVDF and AIN, etc.; the matching layer 2b1 mainly optimizes the acoustic impedance, which can be one or more layers, and its acoustic impedance is between the piezoelectric ceramic and the detected target.
  • the piezoelectric layer 2b2 is composed of a material with piezoelectric effect and reverse electric effect, which can be piezoelectric ceramic PZT, Piezoelectric single crystal PMN-PT, piezoelectric film PVDF and AIN, etc.
  • the matching layer 2b1 mainly optimizes the acoustic impedance, which can be one or more layers, and its acoustic
  • the backing 2b3 is a sound-absorbing material, which can be silver glue, metal, and high The mixture of molecular epoxy, rubber, silica gel and its doped small particles such as tungsten powder.
  • the upper surface of the conductive layer at the front end of all the transducer elements 2b (if the matching layer 2b1 is not conductive, the conductive layer at the front end is the piezoelectric layer 2b2, that is, on the upper surface of the piezoelectric layer 2b2; if the matching layer 2b1 is conductive , The foremost conductive layer is the matching layer 2b1, that is, on the upper surface of the matching layer 2b1) there is a flexible common ground wire 2c, the common ground wire 2c is mainly connected to the upper surface of the conductive layer of all transducer elements 2b, And connect the ground cable in the connection cable 6.
  • the common ground wire 2c has tensile and conductive properties, and the material can be metal nanowires such as tellurium-gold heterogeneous nanowires and silver nanowires, conductive hydrogel fibers, carbon nanotubes, graphene, and the like.
  • the bottom surface of the last conductive layer of each transducer element 2b (if the backing 2b3 is not conductive, the last conductive layer is the piezoelectric layer 2b2, that is, on the bottom surface of the piezoelectric layer 2b2; if the backing 2b3 is conductive , The last conductive layer is the backing 2b3, that is, on the lower surface of the backing 2b3) there is a flexible electrode plate 2e, the electrode plate 2e is mainly to realize the single-channel connection of each transducer array element 2b, and electrical connection To the connecting cable 6.
  • the electrode plate 2e can be made of polyimide (PI) or polyester film as a substrate with high reliability and excellent flexibility. It has the characteristics of high wiring density, light weight, thin thickness and good bendability.
  • the flexible substrate 2a has good deformation characteristics, and the material can be polyethylene terephthalate (PET), polydimethylsiloxane (PDMS), polyvinyl alcohol (PVA), polyimide (PI) , Polyethylene naphthalate (PEN), etc.; one or a combination of several; the substrate lining film 2d is used to insulate the flexible substrate 2a from direct contact with the liquid in the filling cavity 4 to prevent the flexible substrate 2a from being in contact for a long time Contact with fillers can cause rapid aging, denaturation, etc.
  • PET polyethylene terephthalate
  • PDMS polydimethylsiloxane
  • PVA polyvinyl alcohol
  • PI polyimide
  • PEN Polyethylene naphthalate
  • the material can be PET film, PI film, etc., which also has good bending and stretching properties;
  • the reflective film can be an optical or acoustic highly reflective film, such as metal aluminum, gold film , Is the reference point for the optical or acoustic measurement of the deformation detection device 5 to measure the distance.
  • the deformation detection device 5 includes a substrate 5a fixedly arranged in the housing 1a and a detection head 5b arrayed on the substrate 5a.
  • the deformation detection device 5 can be an optical fiber distance measuring device or an ultrasonic thickness measurement device.
  • the detection head 5b is an optical fiber detection head
  • the reflective film is an optical reflective film
  • the detection head 5b is an ultrasonic detection head
  • the reflective film is an acoustic reflection membrane.
  • the filling cavity 4 of this example is surrounded by the inner wall of the housing 1a, the flexible transducer array 2, and the substrate 5a of the deformation detection device 5.
  • the head 5b is provided with an isolation layer for separating the filler from the substrate 5a and the detection head 5b.
  • the connecting cable 6 also has a transmission optical fiber connected to the subsequent system light source and a deformation measurement module.
  • the detection heads 5b can be distributed in a linear array or in an area array.
  • the spacing is equally spaced. Specifically, it can be the same as or different from the distance between the array elements of the flexible transducer array 2 when it is not deformed. It can be based on actual process requirements. And accuracy requirements are increased or decreased.
  • the ultrasound imaging detection system includes a flexible ultrasound probe 100 and a host 200 electrically connected to the flexible ultrasound probe 100.
  • the flexible ultrasound probe 100 is the flexible ultrasound probe of Embodiment 1 and is responsible for generating and When receiving ultrasonic waves, the host 200 is electrically connected to the connecting cable 6 of the flexible ultrasonic probe 100.
  • the host 200 includes a T/R switch module 22, an LNA module 24, a TGC module 25, an AD sampling module 26, a control module 27, and an image processor 28 connected in sequence.
  • the host 200 also includes a control module, respectively 27.
  • the high-voltage power excitation module 23 connected to the T/R switch module 22, and the TGC module 25 is also connected to the control module 27.
  • the deformation detection device 5 is an optical fiber detection device.
  • the host 200 also includes a deformation measurement module 21, which is connected to the flexible ultrasonic probe 100 and the control module 27, respectively.
  • the host 200 also includes a display screen.
  • the host 200 may be a computer.
  • the deformation measurement module 21 is controlled by the control module 27 to input detection signals to the deformation detection device 5 and receive the data detected by the deformation detection device 5, and calculate the distance between each detection head 5b and the corresponding flexible transducer array 2 , That is, obtain the deformed shape parameters of the flexible transducer array 2, and then send the data back to the control module 27 to perform real-time TGC gain compensation processing, control the power excitation module 23 to perform beamforming delay parameter correction, and obtain post-ultrasound imaging Data required for the spatial position change of each point.
  • the high-voltage power supply excitation module 23 is used to transmit the excitation voltage required by the work to the flexible ultrasonic probe 100 so that the probe 100 emits ultrasonic waves.
  • the excitation voltage first passes through the T/R switch module 22 and then transmits a signal to the probe 100.
  • the transmission of the excitation voltage passes through the control module 27 of the system according to the data obtained after processing the data detected by the deformation detection device 5 to set different excitation delay times of each transducer element.
  • the T/R switch module 22 is also used to receive the ultrasonic echo signal fed back by the flexible ultrasonic probe 100.
  • the LNA module 24 is used to receive and process the ultrasonic echo signal entered by the R/T switch module 22.
  • the TGC module 25 is used to receive the signal processed by the LNA module 24 to perform time gain compensation, and the TGC module 25 is also connected to the control module 27, and the data detected by the deformation detection device 5 is processed by the deformation measurement module 21 through the control module 27 The obtained data adjusts the parameters set by the TGC to perform real-time gain compensation.
  • the AD sampling module 26 is used to receive the signal output by the TGC module 25, and then perform beamforming and imaging processing by the image processor 28, and finally display it on the display screen of the host in real time to complete the imaging or detection of the target.
  • the detection method of the ultrasonic imaging detection system of this example includes the following steps:
  • the probe 100 Before the probe 100 is closely attached to the surface of the detected target, first observe the shape of the detected target and perform corresponding operations. If the part that is in contact with the probe 100 is mainly a protruding structure, open the valve 7 and closely adhere to the detected target to allow The filler in the filling cavity 4 of the probe 100 flows out, so that the flexible transducer array 2 of the probe 100 forms a concave shape conforming to the target shape, and then a certain filler is injected to make the contact surface closer; if it is observed to be in contact with the probe 100 The part where is mainly a recessed structure, the filler is injected into the filling cavity 4 through the valve 7, and the flexible transducer array on the surface of the probe is observed to make it tightly fit the surface of the target.
  • the deformation measurement module 21 is controlled by the control module 27 to input the detection signal to the deformation detection device 5.
  • the deformation detection device 5 detects the distance between the detection head 5b and the reflective film of the flexible transducer array 2, and then the detected signal It is fed back to the deformation measurement module 21 for processing, and the geometric shape distribution of the flexible transducer array 2 after deformation is constructed, and the relevant data is fed back to the control module 27, and the calculation includes the radius of curvature of each part, the distribution of the transducer array, and the angle of view. Wait for the data needed for later ultrasound imaging testing.
  • the high-voltage power supply excitation module 23 is controlled by the control module 27 to emit the excitation voltage required for the operation of the probe 100 so that the probe 100 emits ultrasonic waves.
  • the excitation voltage emitted by the high-voltage power supply excitation module 23 is measured by the control module 27 according to the deformation detection device 5
  • the obtained deformation parameters and beamforming requirements set different excitation delay times of each transducer array element, and the excitation voltage is first passed through the T/R switch module and then output to the probe 100.
  • the echo signal of the probe 100 passes through the T/R switch module 22 and then enters the LNA module 24 for processing, and then passes through the TGC module 25 for time gain compensation;
  • the parameters set by the TGC module 25 are not conventional linear or logarithmic relationships, but are based on the specific deformation parameters of the probe 100—obtained by detection by each detection head 5b.
  • the deformation measurement module 21 obtains the surface of the flexible probe according to the data detected by the deformation detection device 5 Spatial geometric distribution, after the relevant data is transmitted to the control module 27, the actual depth information from the detection target to the probe surface is calculated, and then the TGC model 25 is controlled to perform real-time corresponding gain compensation.
  • the AD sampling module 26 collects the gain-compensated signal of the TGC module 25 and inputs it to the image processor 28, performs beamforming and imaging processing, and finally displays it on the display screen of the system in real time to complete the imaging or detection of the target. Relevant data can be enhanced, measured, calculated and saved by the system according to the needs to meet the needs of different scenarios.
  • the deformation detection device 5 may also be an ultrasonic detection device, so the ultrasonic imaging detection system does not need to be equipped with a deformation measurement module, and the power excitation module 23 can transmit an excitation voltage to the ultrasonic detection device, and then the ultrasonic detection device can emit ultrasonic waves. , To detect the distance between the detection head of the ultrasonic detection device and the reflective film of the flexible transducer array.

Abstract

A flexible ultrasonic probe (100), an ultrasonic imaging measurement system, and a measurement method. The probe (100) comprises a flexible transducer array (2) and a housing (1) having two ends each in communication with the outside. The housing (1) has a filling cavity (4) with an opening at one end provided therein, the opening of the filling cavity (4) faces one end of the housing (1), and the flexible transducer array (2) is connected to one end of the housing (1) and the flexible transducer array (2) is also sealingly connected to the opening end of the filling cavity (4), such that the filling cavity (4) forms a sealed chamber for filling with a fluid filler. The probe (100) further comprises a deformation measurement device (5) arranged in the housing (1) and used for measuring the positions of different points of the flexible transducer array (2). By providing the flexible ultrasonic probe (100) with the filling cavity (4) and filling the filling cavity (4) with the fluid filler, the flexible transducer array (2) can implement measurement and imaging of detection targets with different curvatures, and by providing the integrated deformation measurement device (5), the flexible transducer array (2) can implement real-time measurement and feedback of the curvature of each array element, and improve the flexibility and automation of imaging measurement.

Description

一种柔性超声探头、超声成像检测系统和检测方法Flexible ultrasonic probe, ultrasonic imaging detection system and detection method 技术领域Technical field
本发明属于超声成像检测技术领域,具体涉及一种柔性超声探头、超声成像检测系统和检测方法,可用于医疗成像与工业无损探伤等领域。The invention belongs to the technical field of ultrasonic imaging detection, and specifically relates to a flexible ultrasonic probe, an ultrasonic imaging detection system and a detection method, which can be used in the fields of medical imaging and industrial non-destructive testing.
背景技术Background technique
超声换能器发射接收超声波,是超声成像系统的核心器件。目前常规的超声探头,无论是凸阵、凹阵、线阵或面阵,其几何尺寸都是固定的。如凸阵/凹阵探头,其有固定的探头曲率半径、阵元间隔和分布等。因此,为了获得良好的接触,就必须将超声探头紧贴检测部位,并使用超声耦合剂填补细小的空隙。即使如此,还是经常无法获得良好的接触,导致成像质量受到极大影响。在人体组织检测时,如果不是软组织部位而是骨骼(例如肢体骨折),或者在金属探伤时检测器件表面非平面或者曲率与换能器不匹配,或者检测目标表面曲率连续变化不规则时,探头就无法使用,必须研制相对应形状和尺寸的探头来进行检测,对成像和检测造成了极大地不便。The ultrasonic transducer transmits and receives ultrasonic waves, and is the core component of the ultrasonic imaging system. At present, conventional ultrasound probes, whether they are convex arrays, concave arrays, linear arrays or area arrays, have fixed geometric dimensions. For example, convex/concave array probes have fixed probe curvature radius, array element spacing and distribution, etc. Therefore, in order to obtain a good contact, it is necessary to close the ultrasonic probe to the inspection site and use ultrasonic couplant to fill in the small gaps. Even so, good contact is often not obtained, which greatly affects the image quality. In the detection of human tissue, if it is not a soft tissue part but a bone (such as a limb fracture), or the detection device surface is not flat or the curvature does not match the transducer during metal flaw detection, or the detection target surface curvature continuously changes irregularly, the probe It cannot be used, and a probe of corresponding shape and size must be developed for testing, which causes great inconvenience to imaging and testing.
因此,面对表面不规则目标检测时,在医疗成像中多采用超声耦合剂或者水囊等耦合介质来实现与目标的紧贴,但是这种方法存在的不足是,耦合剂有流动性无法充填凸起的目标者有大空隙的目标,而水囊则需要探头有匹配的安装结构、且增加了探测距离和衰减等,因此在临床中除了内窥成像,实际应用也较少。而在无损探伤中由于多为刚性材料,因此只能通过楔块来匹配。楔块也分刚性和柔性(多为除去水)。但刚性楔块只能应对表面形状固定的目标,不同形状曲率就要替换不同的楔块,且无法检测曲率连续变化的物体如叶片等。柔性楔块可以匹配不同的曲率半径,目前多采用液浸法。但是有些目标由于结构、材料性质和检测空间有限等,无法使用液浸法。因此,近年来,柔性超声换能器阵列由于其形状可随物体表面变化、无需使用水囊、楔块等优点,成为检测不规则目标的首选方法。Therefore, when detecting targets with irregular surfaces, coupling media such as ultrasonic couplants or water bladders are often used in medical imaging to achieve close contact with the target. However, the disadvantage of this method is that the couplant has fluidity and cannot be filled. Protruding targets have targets with large gaps, while the water bladder requires the probe to have a matching installation structure, and increase the detection distance and attenuation. Therefore, in addition to endoscopic imaging in clinical practice, there are fewer practical applications. However, in non-destructive testing, since most of them are rigid materials, they can only be matched by wedges. Wedges are also divided into rigid and flexible (mostly to remove water). However, rigid wedges can only deal with objects with a fixed surface shape. Different wedges must be replaced with different curvatures, and objects with continuously changing curvatures such as blades cannot be detected. Flexible wedges can match different radii of curvature. Currently, liquid immersion methods are mostly used. However, some targets cannot use the liquid immersion method due to the limited structure, material properties and detection space. Therefore, in recent years, flexible ultrasonic transducer arrays have become the preferred method for detecting irregular targets due to the advantages that their shape can change with the surface of the object, without the use of water bladders, wedges, and so on.
目前的柔性超声换能器主要采用的是在柔性基底上将换能器嵌入其中,并采用柔性连接线路(如fpcb等)将换能器连接起来,实现一定的曲折变化。其代表性结构如中国专利(CN103157594B)公开的一种柔性超声相控阵阵列换能器及制作方法,该换能器包括柔性压电陶瓷复合材料晶片、阻尼背材、匹配层、柔性线路板、同轴电 缆线和探头接口,所述匹配层、柔性压电陶瓷复合材料晶片和阻尼背材依次粘接在一起形成声学叠层,柔性线路板与柔性压电陶瓷复合材料晶片连接,并从柔性线路板引出多芯同轴电缆线到探头接口。该类型柔性探头可以直接贴附在检测目标表面,可以适应不同曲率的目标,但无法适用于曲率连续变化较大的目标。此外,其成像时必须人工测量输入附着后的曲率、成像孔径、视场角等参数才能完成成像检测。The current flexible ultrasonic transducer mainly uses the transducer to be embedded in a flexible substrate, and uses a flexible connection circuit (such as fpcb, etc.) to connect the transducer to achieve a certain tortuous change. Its representative structure is a flexible ultrasonic phased array array transducer and manufacturing method disclosed in Chinese patent (CN103157594B). The transducer includes a flexible piezoelectric ceramic composite material wafer, a damping backing material, a matching layer, and a flexible circuit board. , Coaxial cable and probe interface, the matching layer, the flexible piezoelectric ceramic composite material wafer and the damping backing material are sequentially bonded together to form an acoustic laminate, the flexible circuit board is connected to the flexible piezoelectric ceramic composite material wafer, and The flexible circuit board leads the multi-core coaxial cable to the probe interface. This type of flexible probe can be directly attached to the surface of the detection target and can adapt to targets with different curvatures, but it cannot be applied to targets with large continuous changes in curvature. In addition, when imaging, it is necessary to manually measure and input parameters such as curvature, imaging aperture, and field of view after attachment to complete imaging detection.
此外,也有类似如中国专利CN101152646A公开的一种柔性超声换能器阵列,该超声换能器阵列包括有数量不少于2的超声换能器单元,该柔性超声换能器阵列还包括有柔性层介质,超声换能器单元以阵列形式安置于该柔性介质中或表面,且柔性层介质形状可变从而贴合于超声治疗/超声成像对象的表面。因其中柔性超声换能器阵列能够贴合各种具有不同表面形状的身体部位,从而能够获得现有技术无法达到的超声治疗/超声成像的效果,并配有独立的形状扫描仪(光学)测量探头贴合附后的曲率,以供后期成像之用。但是该方法,其检测探头还是基于柔性介质,因此无法测量曲率连续变化较大的目标,其次,由于形状扫描仪需要单独配置扫描,增加了测试的难度,且有些位置如被遮挡后很难获取被检测目标的曲率。In addition, there is also a flexible ultrasonic transducer array similar to that disclosed in Chinese Patent CN101152646A. The ultrasonic transducer array includes a number of ultrasonic transducer units not less than two. The flexible ultrasonic transducer array also includes a flexible ultrasonic transducer array. The ultrasonic transducer unit is arranged in or on the flexible medium in an array, and the shape of the flexible medium is variable so as to fit the surface of the ultrasonic treatment/ultrasound imaging object. Because the flexible ultrasonic transducer array can fit various body parts with different surface shapes, it can obtain ultrasonic treatment/ultrasound imaging effects that cannot be achieved by the prior art, and is equipped with an independent shape scanner (optical) measurement The curvature of the probe after it is attached is used for later imaging. However, in this method, the detection probe is still based on a flexible medium, so it cannot measure a target with a continuously changing curvature. Secondly, because the shape scanner needs to be configured separately to scan, it increases the difficulty of the test, and it is difficult to obtain some positions if they are blocked. The curvature of the detected target.
总之,目前的柔性超声换能器主要存在以下问题:一、采用柔性基底,曲率变化有限,无法适用于曲率连续变化较大的情况;二、探头贴附在目标表面后,需要测量获取探头的曲率、视场角等参数,方能用于后期进行图像处理。但现有方法需要借助第三方形状扫描仪,且应用场景受限。In short, the current flexible ultrasonic transducers mainly have the following problems: 1. Using a flexible substrate, the curvature change is limited and cannot be applied to the situation where the curvature changes continuously; 2. After the probe is attached to the target surface, it is necessary to measure and obtain the probe Parameters such as curvature and field of view can only be used for image processing in the later stage. However, the existing method requires the use of a third-party shape scanner, and the application scenarios are limited.
发明内容Summary of the invention
为解决现有技术中存在的问题,本发明提供一种改进的柔性超声探头。In order to solve the problems in the prior art, the present invention provides an improved flexible ultrasonic probe.
本发明还提供一种超声成像检测系统和检测方法。The invention also provides an ultrasonic imaging detection system and detection method.
为达到上述目的,本发明所采用的技术方案为:In order to achieve the above objective, the technical solution adopted by the present invention is:
一种柔性超声探头,包括柔性换能器阵列,所述探头还包括两端分别与外界连通的外壳,所述外壳内具有一端开口的填充腔,所述填充腔的开口朝向所述外壳的一端,所述柔性换能器阵列连接在所述外壳的所述一端且所述柔性换能器阵列还与所述填充腔的开口端密封设置,使得所述填充腔形成用于填充流体填充剂的密封腔室,所述探头还包括设置在所述外壳内的用于检测所述柔性换能器阵列的不同点的位置的形变探测装置。A flexible ultrasonic probe includes a flexible transducer array. The probe also includes a shell whose two ends are respectively communicated with the outside. The shell has a filling cavity with an opening at one end, and the opening of the filling cavity faces one end of the shell The flexible transducer array is connected to the one end of the housing, and the flexible transducer array is also sealed and arranged with the open end of the filling cavity, so that the filling cavity is formed for filling a fluid filler. In the sealed chamber, the probe further includes a deformation detection device arranged in the housing for detecting the positions of different points of the flexible transducer array.
根据本发明的一些实施方面,所述形变探测装置包括固定设置在所述外壳内的基 板及阵列分布在所述基板上的检测头,所述柔性换能器阵列的面向所述形变探测装置的一面形成有反射膜,所有所述检测头分别用于检测各所述检测头与所述反射膜之间的距离。According to some implementation aspects of the present invention, the deformation detection device includes a substrate fixedly arranged in the housing and a detection head whose array is distributed on the substrate, and the flexible transducer array faces the deformation detection device. A reflective film is formed on one side, and all the detection heads are respectively used to detect the distance between each of the detection heads and the reflective film.
根据本发明的一个具体且优选方面,所述检测头为线阵分布或面阵分布,优选面阵分布,检测结果更加可靠。更优选地,所述检测头的个数与所述柔性换能器阵列的阵元的个数相同或不同,所述检测头为等间隔分布,且间隔距离与所述柔性换能器阵列非形变时的阵元间的距离相同或不同。具体如所述检测头的个数与所述柔性换能器阵列的阵元的个数相同。According to a specific and preferred aspect of the present invention, the detection heads are linear array distribution or area array distribution, preferably area array distribution, the detection result is more reliable. More preferably, the number of the detection heads is the same as or different from the number of the elements of the flexible transducer array, and the detection heads are equally spaced, and the separation distance is different from that of the flexible transducer array. The distance between the elements during deformation is the same or different. Specifically, the number of detection heads is the same as the number of array elements of the flexible transducer array.
进一步地,所述形变探测装置为光纤测距装置或超声测厚装置,当所述形变探测装置为光纤测距装置时,所述检测头为光纤检测头,所述反射膜为光学的反射膜;当所述形变探测装置为超声测厚装置时,所述检测头为超声检测头,所述反射膜为声学的反射膜。优选地,所述反射膜为但不限于铝膜或金膜。Further, the deformation detection device is an optical fiber distance measuring device or an ultrasonic thickness measurement device. When the deformation detection device is an optical fiber distance measurement device, the detection head is an optical fiber detection head, and the reflective film is an optical reflective film When the deformation detection device is an ultrasonic thickness measuring device, the detection head is an ultrasonic detection head, and the reflective film is an acoustic reflective film. Preferably, the reflective film is, but not limited to, an aluminum film or a gold film.
根据本发明的一些实施方面,所述填充腔由所述外壳的内壁、柔性换能器阵列和形变探测装置共同围设而成,或者所述填充腔为独立设置在所述外壳内部的具有一端开口的腔体。According to some implementation aspects of the present invention, the filling cavity is jointly enclosed by the inner wall of the housing, the flexible transducer array and the deformation detection device, or the filling cavity is independently arranged inside the housing and has one end. Open cavity.
进一步地,所述填充腔由所述外壳的内壁、柔性换能器阵列和形变探测装置共同围设而成,所述柔性换能器阵列与所述外壳之间采用密封胶密封,所述形变探测装置的面向所述柔性换能器阵列的一面形成有用于隔离所述填充剂和形变探测装置的隔离层。Further, the filling cavity is jointly formed by the inner wall of the housing, the flexible transducer array and the deformation detection device, the flexible transducer array and the housing are sealed with a sealant, and the deformation The side of the detection device facing the flexible transducer array is formed with an isolation layer for separating the filler from the deformation detection device.
根据本发明的一些实施方面,所述填充腔上开设有用于注入所述填充剂和导出所述填充剂的阀门。According to some implementation aspects of the present invention, the filling cavity is provided with valves for injecting the filling agent and exporting the filling agent.
根据本发明的一个具体且优选方面,所述阀门包括用于注入所述填充剂的进液阀门和用于导出所述填充剂的出液阀门;或所述阀门为一即用于注入所述填充剂、又用于导出所述填充剂的阀门。具体地,所述阀门的个数不限,可以是1、2、3或多个。According to a specific and preferred aspect of the present invention, the valve includes an inlet valve for injecting the filler and an outlet valve for venting the filler; or the valve is one that is used for injecting the filler. Filling agent, and a valve used to lead out the filling agent. Specifically, the number of the valves is not limited, and can be 1, 2, 3 or more.
根据本发明的一些实施方面,所述外壳包括两端分别能够外界连通的壳体及连接在所述壳体的一端且内部与所述壳体的内部连通的底托,所述壳体的壳壁具有中空通道,所述柔性换能器阵列连接在所述壳体的另一端,所述探头还包括连接在所述底托上的连接线缆,所述柔性换能器阵列与所述连接线缆之间通过导线连接,所述导线经所述壳体的中空通道进入所述底托内部后与所述连接线缆电连接。According to some implementation aspects of the present invention, the shell includes a shell whose two ends are respectively capable of communicating with the outside world, and a bottom bracket connected to one end of the shell and communicating with the inside of the shell. The wall has a hollow channel, the flexible transducer array is connected to the other end of the housing, the probe further includes a connection cable connected to the bottom support, and the flexible transducer array is connected to the The cables are connected by wires, and the wires enter the interior of the bottom bracket through the hollow channel of the housing and are electrically connected with the connecting cables.
进一步地,所述形变探测装置设置在所述壳体内,所述形变探测装置通过导线与所述连接线缆电连接。Further, the deformation detection device is arranged in the housing, and the deformation detection device is electrically connected to the connecting cable through a wire.
优选地,所述底托内设置转接电路板,所述转接电路板分别与所述柔性换能器阵列、形变探测装置和连接线缆电连接,所述转接电路板用于将所述柔性换能器阵列和形变探测装置不同规格的连接导线转变成标准的同轴线缆后与所述连接线缆连接。Preferably, an adapter circuit board is arranged in the bottom bracket, and the adapter circuit board is electrically connected to the flexible transducer array, the deformation detection device and the connecting cable, respectively, and the adapter circuit board is used to connect the The connecting wires of different specifications of the flexible transducer array and the deformation detection device are converted into standard coaxial cables and then connected to the connecting cables.
根据本发明的一个具体且优选方面,所述柔性换能器阵列还通过夹头与所述外壳固定设置,优选地,所述夹头的材质为金属或塑料,进一步优选地,所述金属包括但不限于铝、不锈钢,所述塑料包括但不限于亚克力、聚四氟乙烯。According to a specific and preferred aspect of the present invention, the flexible transducer array is also fixedly arranged with the housing through a chuck. Preferably, the material of the chuck is metal or plastic. More preferably, the metal includes But not limited to aluminum and stainless steel. The plastics include but are not limited to acrylic and polytetrafluoroethylene.
根据本发明的一些实施方面,所述柔性换能器阵列包括柔性基底、嵌设在所述柔性基底内部的至少2个换能器阵元、形成在所述柔性基底内表面的用于隔离所述柔性基底和填充剂的基底衬膜及形成在所述基底衬膜内表面的反射膜,所述形变探测装置用于检测所述形变探测装置与所述反射膜之间的距离。According to some implementation aspects of the present invention, the flexible transducer array includes a flexible substrate, at least two transducer array elements embedded in the flexible substrate, and an isolation device formed on the inner surface of the flexible substrate. The base lining film of the flexible substrate and the filler and the reflective film formed on the inner surface of the base lining film, and the deformation detection device is used for detecting the distance between the deformation detection device and the reflective film.
根据本发明的一个具体且优选方面,所述柔性基底的材质为聚对苯二甲酸乙二醇酯、聚二甲基硅氧烷、聚乙烯醇、聚酰亚胺、聚萘二甲酯乙二醇酯中的一种或几种的组合。According to a specific and preferred aspect of the present invention, the material of the flexible substrate is polyethylene terephthalate, polydimethylsiloxane, polyvinyl alcohol, polyimide, and polyethylene naphthalate. One or a combination of diol esters.
根据本发明的一个具体且优选方面,所述基底衬膜为PET膜或PI膜。本发明采取的另一技术方案:一种超声成像检测系统,其含有上述所述的柔性超声探头。According to a specific and preferred aspect of the present invention, the base liner film is a PET film or a PI film. Another technical solution adopted by the present invention: an ultrasonic imaging detection system, which contains the above-mentioned flexible ultrasonic probe.
根据本发明的一些实施方面,所述超声成像检测系统还包括与所述探头通过电连接的主机,所述主机包括依次相连的T/R转换开关模块、LNA模块、TGC模块、AD采样模块、控制模块及图像处理器,所述主机还包括电源激励模块和显示屏幕,其中,According to some implementation aspects of the present invention, the ultrasonic imaging detection system further includes a host electrically connected to the probe, and the host includes a T/R switch module, an LNA module, a TGC module, an AD sampling module, A control module and an image processor, the host further includes a power excitation module and a display screen, wherein,
所述控制模块控制所述形变探测装置探测所述柔性换能器阵元与所述形变探测装置之间的距离数据,经处理后,获得后续超声成像检测需要的数据;The control module controls the deformation detection device to detect the distance data between the flexible transducer array element and the deformation detection device, and after processing, obtains the data required for subsequent ultrasonic imaging detection;
所述电源激励模块分别与所述控制模块和所述T/R转换开关模块相连,用于向所述探头发射工作所需的激励电压从而使所述探头发射超声波,所述激励电压先经所述T/R转换开关模块,然后向所述探头发射信号;The power excitation module is respectively connected with the control module and the T/R switch module, and is used to transmit the excitation voltage required by the work to the probe so that the probe emits ultrasonic waves. The T/R conversion switch module, and then transmit a signal to the probe;
所述T/R转换开关模块还用于接收由所述探头反馈的超声回波信号;The T/R switch module is also used to receive the ultrasonic echo signal fed back by the probe;
所述LNA模块用于接收由所述R/T转换开关模块进入的超声回波信号,并进行处理;The LNA module is used to receive and process the ultrasonic echo signal entered by the R/T switch module;
所述TGC模块用于接收由所述LNA模块处理的信号,进行时间增益补偿,且所 述TGC模块还与所述控制模块相连,通过所述控制模块根据所述形变探测装置探测到的数据经处理后获得的数据调整TGC设置的参数从而进行实时的增益补偿;The TGC module is used to receive the signal processed by the LNA module to perform time gain compensation, and the TGC module is also connected to the control module. The data obtained after processing adjusts the parameters set by TGC to perform real-time gain compensation;
所述AD采样模块用于接收由所述TGC模块输出的信号,然后经所述图像处理器进行波束成型和成像处理,显示到所述显示屏幕上。The AD sampling module is used to receive the signal output by the TGC module, and then perform beamforming and imaging processing by the image processor, and display it on the display screen.
进一步地,所述形变探测装置为光纤探测装置,所述超声成像检测系统还包括分别与所述控制系统和探头相连的形变测量模块,所述形变测量模块由所述控制模块控制用于向所述形变探测装置输入检测信号并接收由所述形变探测装置探测到的数据并进行处理,处理后的数据输送回所述控制模块并进行处理,获得后续超声成像检测需要的数据。Further, the deformation detection device is an optical fiber detection device, the ultrasonic imaging detection system further includes a deformation measurement module connected to the control system and the probe respectively, and the deformation measurement module is controlled by the control module for The deformation detection device inputs detection signals and receives and processes the data detected by the deformation detection device, and the processed data is sent back to the control module and processed to obtain data required for subsequent ultrasonic imaging detection.
本发明采取的又另一技术方案:一种超声成像检测方法,所述检测方法使用的检测系统为超声成像检测系统,所述超声成像检测系统含有上述所述的柔性超声探头。Yet another technical solution adopted by the present invention: an ultrasonic imaging detection method, the detection system used in the detection method is an ultrasonic imaging detection system, and the ultrasonic imaging detection system contains the above-mentioned flexible ultrasonic probe.
根据发明的一些实施方面,所述超声成像检测系统还包括与所述探头通过电连接的主机,所述主机包括依次相连的T/R转换开关模块、LNA模块、TGC模块、AD采样模块、控制模块及图像处理器,所述主机还包括电源激励模块和显示屏幕,所述电源激励模块分别与所述T/R转换开关模块和控制模块相连,所述检测方法包括以下步骤:According to some implementation aspects of the invention, the ultrasonic imaging detection system further includes a host computer electrically connected to the probe, and the host computer includes a T/R switch module, an LNA module, a TGC module, an AD sampling module, and a control module connected in sequence. Module and image processor, the host further includes a power excitation module and a display screen, the power excitation module is respectively connected with the T/R switch module and the control module, the detection method includes the following steps:
(1)将所述探头与被检测目标表面紧贴;(1) Close the probe to the surface of the detected target;
(2)通过所述控制模块控制所述形变探测装置探测所述形变探测装置与所述探头的柔性换能器阵列之间的距离数据,经处理后,获得后续超声成像检测需要的数据;(2) Control the deformation detection device to detect the distance data between the deformation detection device and the flexible transducer array of the probe through the control module, and obtain the data required for subsequent ultrasonic imaging detection after processing;
(3)通过所述控制模块控制所述电源激励模块发射出所述探头工作所需的激励电压从而使所述探头发射超声波;(3) Through the control module, the power excitation module is controlled to emit the excitation voltage required for the operation of the probe, so that the probe emits ultrasonic waves;
(4)所述探头的回波信号经所述T/R转换开关模块后进入LNA模块进行处理,然后经TGC模块进行时间增益补偿;(4) The echo signal of the probe enters the LNA module for processing after passing through the T/R switch module, and then performs time gain compensation through the TGC module;
(5)经TGC模块的信号由所述AD采样模块采集,然后输入所述图像处理器,进行波束成型和成像处理,最终显示在所述显示屏幕上,完成目标的成像或检测。(5) The signal through the TGC module is collected by the AD sampling module, and then input to the image processor for beamforming and imaging processing, and finally displayed on the display screen to complete the imaging or detection of the target.
根据本发明的进一步实施方面,步骤(1)中,观测所述被检测目标的形状,若与所述探头接触的部位为凸出结构,则导出部分所述填充腔内的填充剂使所述探头的柔性换能器阵列与被检测目标表面相配合,然后向所述填充腔注入填充剂使接触面紧贴;若与所述探头接触的部位为凹陷结构,则向所述填充腔注入填充剂使所述探头的柔性换能器阵列紧贴所述被检测目标表面。According to a further implementation aspect of the present invention, in step (1), the shape of the detected target is observed, and if the part in contact with the probe is a protruding structure, a part of the filler in the filling cavity is derived to make the The flexible transducer array of the probe is matched with the surface of the detected target, and then filler is injected into the filling cavity to make the contact surface close; if the part contacting the probe is a recessed structure, the filling is injected into the filling cavity The agent makes the flexible transducer array of the probe close to the surface of the detected target.
优选地,步骤(1)中,先在所述探头表面涂覆超声耦合剂,然后将所述探头与被检测目标表面紧贴,使超声耦合剂位于所述探头和被检测目标表面,使得探头和被检测目标表面贴合的更加紧密。Preferably, in step (1), an ultrasonic couplant is applied to the surface of the probe first, and then the probe is closely attached to the surface of the target to be detected, so that the ultrasonic couplant is located on the surface of the probe and the target to be detected, so that the probe It fits more closely to the surface of the detected target.
根据本发明的进一步实施方面,步骤(4)中,所述TGC模块还与所述控制模块相连,所述TGC模块设置的参数是根据所述形变探测装置检测的数据经处理后获得的数据进行调整的,从而进行实时的增益补偿。According to a further implementation aspect of the present invention, in step (4), the TGC module is also connected to the control module, and the parameters set by the TGC module are performed based on the data obtained by processing the data detected by the deformation detection device. Adjusted to perform real-time gain compensation.
由于上述技术方案运用,本发明与现有技术相比具有下列优点:Due to the application of the above technical solutions, the present invention has the following advantages compared with the prior art:
本发明柔性超声探头通过设置填充腔,并在填充腔内填充流体填充剂,能够使得柔性换能器阵列实现不同曲率被检测目标检测成像,并通过内置形变探测装置,可实现对各阵元曲率的实时检测和反馈,提高成像检测的灵活性和自动化。The flexible ultrasonic probe of the present invention can make the flexible transducer array realize the detection and imaging of the detected target with different curvatures by setting the filling cavity and filling the fluid filler in the filling cavity, and the built-in deformation detection device can realize the curvature of each element Real-time detection and feedback to improve the flexibility and automation of imaging detection.
本发明柔性超声探头有效解决现有的柔性超声探头与目标贴附不紧、无形变探测功能,必须要人工或第三方测绘系统辅助的不足,可实现对不规则变化曲面目标的自动测试,且探头结构简单,功能齐全,满足非规则目标超声成像和无损探伤的需要。The flexible ultrasonic probe of the present invention effectively solves the problem that the existing flexible ultrasonic probe is not tightly attached to the target, has no deformation detection function, and must be assisted by manual or a third-party surveying and mapping system, and can realize automatic testing of irregularly changing surface targets, and The probe has simple structure and complete functions to meet the needs of irregular target ultrasonic imaging and non-destructive flaw detection.
附图说明Description of the drawings
图1为实施例1的柔性超声探头的结构示意图;FIG. 1 is a schematic diagram of the structure of the flexible ultrasonic probe of Embodiment 1;
图2为实施例1的柔性超声探头在用于检测被检测目标的表面为凹陷面时的使用状态结构示意图;2 is a schematic structural diagram of the use state of the flexible ultrasonic probe of Embodiment 1 when the surface of the object to be detected is a concave surface;
图3为实施例1的柔性超声探头在用于检测被检测目标的表面为凸出面时的使用状态结构示意图;3 is a schematic structural diagram of the use state of the flexible ultrasonic probe of Embodiment 1 when the surface of the object to be detected is a convex surface;
图4为实施例1的柔性超声探头的柔性换能器阵列的结构示意图;4 is a schematic diagram of the structure of the flexible transducer array of the flexible ultrasonic probe of Embodiment 1;
图5为实施例2的超声成像检测系统的结构示意图;5 is a schematic diagram of the structure of the ultrasonic imaging detection system of Embodiment 2;
图6为实施例2的超声成像检测系统的模块结构示意图;6 is a schematic diagram of the module structure of the ultrasonic imaging detection system of Embodiment 2;
图中:100、探头;In the figure: 100, probe;
1、外壳;1a、壳体;1b、底托;2、柔性换能器阵列;2a、柔性基底;2b、换能器阵元;2b1、匹配层;2b2、压电层;2b3、背衬;2c、共地导线;2d、基底衬膜;2e、电极板;3、夹头;4、填充腔;5、形变探测装置;5a、基板;5b、检测头;6、连接线缆;7、阀门;1. Shell; 1a, shell; 1b, bottom support; 2. flexible transducer array; 2a, flexible substrate; 2b, transducer array element; 2b1, matching layer; 2b2, piezoelectric layer; 2b3, backing 2c, common ground wire; 2d, base lining film; 2e, electrode plate; 3. chuck; 4. filling cavity; 5. deformation detection device; 5a, substrate; 5b, detection head; 6, connection cable; 7 ,valve;
200、主机;200. Host;
21、形变测量模块;22、T/R转换开关模块;23、电源激励模块;24、LNA模块; 25、TGC模块;26、AD采样模块;27、控制模块;28、图像处理器。21. Deformation measurement module; 22. T/R conversion switch module; 23. Power excitation module; 24. LNA module; 25. TGC module; 26. AD sampling module; 27. Control module; 28. Image processor.
具体实施方式Detailed ways
下面通过具体实施例对本发明做进一步详述,以下实施例仅用于更加清楚地说明本发明的技术方案,而不能以此来限制本发明的保护范围。The present invention will be described in further detail below through specific embodiments. The following embodiments are only used to illustrate the technical solutions of the present invention more clearly, and cannot be used to limit the protection scope of the present invention.
实施例1Example 1
本例的柔性超声探头100如图1~4所示,该柔性超声探头100包括柔性换能器阵列2及两端分别与外界连通的外壳1,外壳1内具有一端开口的填充腔4,填充腔4的开口朝向外壳1的一端,柔性换能器阵列2连接在外壳1的一端且柔性换能器阵列2还与填充腔4的开口端密封设置,使得填充腔4形成用于填充流体填充剂的密封腔室,该柔性超声探头100还包括设置在外壳1内的形变探测装置5,当柔性超声探头100使用时,柔性换能器阵列2贴合于被检测目标表面,形变探测装置5用于检测柔性换能器阵列2的不同点的位置。The flexible ultrasound probe 100 of this example is shown in Figures 1 to 4. The flexible ultrasound probe 100 includes a flexible transducer array 2 and a housing 1 with two ends connected to the outside. The housing 1 has a filling cavity 4 with an opening at one end. The opening of the cavity 4 faces one end of the housing 1, the flexible transducer array 2 is connected to one end of the housing 1, and the flexible transducer array 2 is also sealed with the open end of the filling cavity 4, so that the filling cavity 4 is formed for filling fluid. The flexible ultrasonic probe 100 also includes a deformation detection device 5 arranged in the housing 1. When the flexible ultrasonic probe 100 is used, the flexible transducer array 2 is attached to the surface of the target to be detected, and the deformation detection device 5 It is used to detect the positions of different points of the flexible transducer array 2.
填充腔4可以是由外壳1的内壁面、柔性换能器阵列2和形变探测装置5共同围设而成,也可以是独立设置在外壳1内部的具有一端开口的腔体。本例中,填充腔4由外壳1的内壁面、柔性换能器阵列2和形变探测装置5共同围设而成,柔性换能器阵列2通过夹头3固定连接在外壳1的端部,且柔性换能器阵列2与外壳1之间通过密封胶密封设置。在柔性换能器阵列2的相对二侧分别设置夹头3,起到固定柔性换能器阵列2,便于将柔性换能器阵列2固定到外壳1上的作用,夹头3可以是一定夹持和固定结构的金属件(如铝、不锈钢等),也可以是塑料件(如亚克力、聚四氟乙烯PTFE等)。The filling cavity 4 may be enclosed by the inner wall surface of the housing 1, the flexible transducer array 2 and the deformation detection device 5, or may be a cavity with an opening at one end independently provided in the housing 1. In this example, the filling cavity 4 is enclosed by the inner wall surface of the housing 1, the flexible transducer array 2 and the deformation detection device 5, and the flexible transducer array 2 is fixedly connected to the end of the housing 1 through a clamp 3. In addition, the flexible transducer array 2 and the housing 1 are sealed by a sealant. The chucks 3 are respectively provided on the opposite sides of the flexible transducer array 2 to fix the flexible transducer array 2 and facilitate fixing the flexible transducer array 2 to the housing 1. The chucks 3 can be fixed clamps. The metal parts that hold and fix the structure (such as aluminum, stainless steel, etc.) can also be plastic parts (such as acrylic, polytetrafluoroethylene, PTFE, etc.).
在填充腔4内填充的流体填充剂可以是液体或胶体,如包括但不限于水、硅油、超声耦合剂等的一种或几种的组合。The fluid filler filled in the filling cavity 4 may be liquid or colloid, such as one or a combination of several including but not limited to water, silicone oil, ultrasonic coupling agent, and the like.
在外壳1上设置用于向填充腔4内注入填充剂和导出填充剂的阀门,阀门可以是分别用于注入填充剂的进液阀门和用于放出填充剂的出液阀门,也可以是设置一个即用于注入填充剂、又用于导出填充剂的阀门7。本例中,设置一个阀门7。以柔性换能器阵列2无形变时的填充腔的体积为填充腔初始体积,当填充剂的填充量超出填充腔初始体积时,就会挤压柔性换能器阵列2使之凸出探头100端面,如图2所示,此时适用于被检测目标的表面为凹陷面;当填充剂的填充量少于填充腔初始体积时,柔性换能器阵列2向探头100端面内凹陷,如图3所示,此时适用于被检测目标的表面 为凸起面。柔性换能器阵列2的具体形变的形状由接触的被检测目标表面的形状决定。The housing 1 is provided with a valve for injecting and exporting filler into the filling cavity 4. The valve may be an inlet valve for injecting the filler and an outlet valve for discharging the filler, or a set A valve 7 is used to inject the filler and to discharge the filler. In this example, a valve 7 is set. Taking the volume of the filling cavity when the flexible transducer array 2 is not deformed as the initial volume of the filling cavity, when the filling amount of the filler exceeds the initial volume of the filling cavity, the flexible transducer array 2 will be squeezed to protrude from the probe 100 The end surface, as shown in Figure 2, the surface suitable for the detected target is a concave surface at this time; when the filling amount of the filler is less than the initial volume of the filling cavity, the flexible transducer array 2 is recessed into the end surface of the probe 100, as shown in the figure As shown in 3, at this time, the surface suitable for the detected target is a convex surface. The specific deformed shape of the flexible transducer array 2 is determined by the shape of the surface of the detected target in contact.
本例中,外壳1包括两端分别与外界连通的壳体1a及一端与壳体1a的一端连接的底托1b,壳体1a的壳壁具有两端分别与外界和底托1b内部连通的中空通道,方便柔性换能器阵列的导线(柔性电极板)等通过和安置,柔性换能器阵列2连接在壳体1a的另一端,柔性超声探头100还包括连接在底托1b上的连接线缆6,柔性换能器阵列2与连接线缆6之间通过导线连接,导线经壳体1a的中空通道进入底托1b内部后与连接线缆6电连接。形变探测装置5连接在壳体1a内,且形变探测装置5通过导线与连接线缆6电连接。In this example, the housing 1 includes a housing 1a whose two ends are respectively connected to the outside world and a bottom bracket 1b whose one end is connected to one end of the housing 1a. The hollow channel facilitates the passage and placement of wires (flexible electrode plates) of the flexible transducer array. The flexible transducer array 2 is connected to the other end of the housing 1a. The flexible ultrasound probe 100 also includes a connection connected to the bottom support 1b. The cable 6, the flexible transducer array 2 and the connecting cable 6 are connected by wires, and the wires enter the bottom bracket 1b through the hollow channel of the housing 1a and then are electrically connected with the connecting cable 6. The deformation detecting device 5 is connected in the housing 1a, and the deformation detecting device 5 is electrically connected to the connecting cable 6 through a wire.
壳体1a可以对柔性换能器阵列2起到支撑和固定作用,底托1b可以起到支撑壳体1a的作用,底托1b内部的空腔可以用于柔性换能器阵列2的导线和形变探测装置5的导线接入,也可以在底托1b内设置转接电路板,转接电路板分别与柔性换能器阵列2和形变探测装置5电连接,转接电路板用于将柔性换能器阵列2和形变探测装置5不同规格的连接导线转变成标准的同轴线缆后与连接线缆6连接。The housing 1a can support and fix the flexible transducer array 2, the bottom support 1b can support the housing 1a, and the cavity inside the bottom support 1b can be used for the wires and the flexible transducer array 2 The wire of the deformation detection device 5 can also be connected with a switching circuit board in the bottom support 1b. The switching circuit board is electrically connected to the flexible transducer array 2 and the deformation detection device 5, and the switching circuit board is used to connect the flexible The connecting wires of different specifications of the transducer array 2 and the deformation detection device 5 are converted into standard coaxial cables and then connected to the connecting cable 6.
如图4所示,柔性换能器阵列2包括柔性基底2a、嵌设在柔性基底2a内部的至少2个换能器阵元2b、形成在柔性基底2a内表面的用于隔离柔性基底2a和填充剂的基底衬膜2d及形成在基底衬膜2d内表面的反射膜。换能器阵元2b的形状可以长方体、正方体、圆柱体、六棱柱体等。具体设置时,柔性换能器阵列2可以是线阵、面阵、凸阵、凹阵等,其中心频率在20KHz~60MHz范围,阵元数量大于2个。As shown in Figure 4, the flexible transducer array 2 includes a flexible substrate 2a, at least two transducer array elements 2b embedded in the flexible substrate 2a, and formed on the inner surface of the flexible substrate 2a for isolating the flexible substrate 2a and The base liner film 2d of filler and the reflective film formed on the inner surface of the base liner film 2d. The shape of the transducer element 2b can be a rectangular parallelepiped, a cube, a cylinder, a hexagonal prism, or the like. In specific settings, the flexible transducer array 2 can be a linear array, a surface array, a convex array, a concave array, etc., with a center frequency in the range of 20KHz-60MHz, and the number of array elements is greater than two.
各换能器阵元2b包括依次设置的匹配层2b1、压电层2b2和背衬2b3,其中,压电层2b2由具有压电效应和逆电效应的材料组成,可以是压电陶瓷PZT、压电单晶PMN-PT、压电薄膜PVDF和AIN等;匹配层2b1主要对声阻抗进行优化,可以是一层或多层,其声阻抗介于压电陶瓷和被检测目标之间,材质可以是银胶、Parylene、塑料薄膜、以及高分子环氧、橡胶、硅胶及其掺杂小颗粒如氧化铝粉的混合物等;背衬2b3为吸声材料,可以是银胶、金属、以及高分子环氧、橡胶、硅胶及其掺杂小颗粒如钨粉的混合物。Each transducer element 2b includes a matching layer 2b1, a piezoelectric layer 2b2, and a backing 2b3 arranged in sequence, wherein the piezoelectric layer 2b2 is composed of a material with piezoelectric effect and reverse electric effect, which can be piezoelectric ceramic PZT, Piezoelectric single crystal PMN-PT, piezoelectric film PVDF and AIN, etc.; the matching layer 2b1 mainly optimizes the acoustic impedance, which can be one or more layers, and its acoustic impedance is between the piezoelectric ceramic and the detected target. It can be silver glue, Parylene, plastic film, polymer epoxy, rubber, silica gel and mixtures of small particles doped with alumina powder, etc.; the backing 2b3 is a sound-absorbing material, which can be silver glue, metal, and high The mixture of molecular epoxy, rubber, silica gel and its doped small particles such as tungsten powder.
所有换能器阵元2b的最前端的导电层上表面(若匹配层2b1不导电,则最前端的导电层为压电层2b2,即在压电层2b2的上表面;若匹配层2b1导电,则最前端的导电层为匹配层2b1,即在匹配层2b1的上表面)有一柔性的共地导线2c,该共地导 线2c主要是连接所有换能器阵元2b的导电层上表面,并连接连接线缆6中的接地线缆。该共地导线2c具有拉伸和导电特性,材质可以是金属纳米线如碲-金异质纳米线和银纳米线等、导电水凝胶纤维、碳纳米管和石墨烯等。The upper surface of the conductive layer at the front end of all the transducer elements 2b (if the matching layer 2b1 is not conductive, the conductive layer at the front end is the piezoelectric layer 2b2, that is, on the upper surface of the piezoelectric layer 2b2; if the matching layer 2b1 is conductive , The foremost conductive layer is the matching layer 2b1, that is, on the upper surface of the matching layer 2b1) there is a flexible common ground wire 2c, the common ground wire 2c is mainly connected to the upper surface of the conductive layer of all transducer elements 2b, And connect the ground cable in the connection cable 6. The common ground wire 2c has tensile and conductive properties, and the material can be metal nanowires such as tellurium-gold heterogeneous nanowires and silver nanowires, conductive hydrogel fibers, carbon nanotubes, graphene, and the like.
各换能器阵元2b的最后一层导电层下表面(若背衬2b3不导电,则最后一层导电层为压电层2b2,即在压电层2b2的下表面;若背衬2b3导电,则最后一层导电层为背衬2b3,即在背衬2b3的下表面)有一柔性电极板2e,该电极板2e主要是实现每个换能器阵元2b的单通道连接,并电连接到连接线缆6上。该电极板2e可以是聚酰亚胺(PI)或聚酯薄膜为基材制成的一种具有高度可靠性,绝佳的可挠性印刷电路板。具有配线密度高、重量轻、厚度薄、弯折性好的特点。The bottom surface of the last conductive layer of each transducer element 2b (if the backing 2b3 is not conductive, the last conductive layer is the piezoelectric layer 2b2, that is, on the bottom surface of the piezoelectric layer 2b2; if the backing 2b3 is conductive , The last conductive layer is the backing 2b3, that is, on the lower surface of the backing 2b3) there is a flexible electrode plate 2e, the electrode plate 2e is mainly to realize the single-channel connection of each transducer array element 2b, and electrical connection To the connecting cable 6. The electrode plate 2e can be made of polyimide (PI) or polyester film as a substrate with high reliability and excellent flexibility. It has the characteristics of high wiring density, light weight, thin thickness and good bendability.
柔性基底2a具有良好的形变特性,材质可以是聚对苯二甲酸乙二醇酯(PET)、聚二甲基硅氧烷(PDMS)、聚乙烯醇(PVA)、聚酰亚胺(PI)、聚萘二甲酯乙二醇酯(PEN)等中的一种或几种的组合;基底衬膜2d用于隔绝柔性基底2a与填充腔4内的液体直接接触防止柔性基底2a因长时间接触填充剂而导致快速老化、变性等,材质可以是PET薄膜、PI薄膜等,同样具有良好的弯折和拉伸性能;反射膜可以是光学或声学的高反射膜,如金属铝、金膜,为形变探测装置5光学或声学法测量距离的参考点。The flexible substrate 2a has good deformation characteristics, and the material can be polyethylene terephthalate (PET), polydimethylsiloxane (PDMS), polyvinyl alcohol (PVA), polyimide (PI) , Polyethylene naphthalate (PEN), etc.; one or a combination of several; the substrate lining film 2d is used to insulate the flexible substrate 2a from direct contact with the liquid in the filling cavity 4 to prevent the flexible substrate 2a from being in contact for a long time Contact with fillers can cause rapid aging, denaturation, etc. The material can be PET film, PI film, etc., which also has good bending and stretching properties; the reflective film can be an optical or acoustic highly reflective film, such as metal aluminum, gold film , Is the reference point for the optical or acoustic measurement of the deformation detection device 5 to measure the distance.
本例中,形变探测装置5包括固定设置在壳体1a内的基板5a及阵列分布在基板5a上的检测头5b,形变探测装置5可是光纤测距装置或超声测厚装置,当形变探测装置5为光纤测距装置时,检测头5b为光纤检测头,反射膜为光学的反射膜;当形变探测装置5为超声测厚装置时,检测头5b为超声检测头,反射膜为声学的反射膜。具体地,本例的填充腔4由壳体1a的内壁、柔性换能器阵列2、形变探测装置5的基板5a围设而成,在基板5a的面向柔性换能器阵列2的一面和检测头5b上设置用于隔离填充剂和基板5a及检测头5b的隔离层。In this example, the deformation detection device 5 includes a substrate 5a fixedly arranged in the housing 1a and a detection head 5b arrayed on the substrate 5a. The deformation detection device 5 can be an optical fiber distance measuring device or an ultrasonic thickness measurement device. When 5 is an optical fiber distance measuring device, the detection head 5b is an optical fiber detection head, and the reflective film is an optical reflective film; when the deformation detection device 5 is an ultrasonic thickness measurement device, the detection head 5b is an ultrasonic detection head, and the reflective film is an acoustic reflection membrane. Specifically, the filling cavity 4 of this example is surrounded by the inner wall of the housing 1a, the flexible transducer array 2, and the substrate 5a of the deformation detection device 5. The surface of the substrate 5a facing the flexible transducer array 2 and the detection The head 5b is provided with an isolation layer for separating the filler from the substrate 5a and the detection head 5b.
若形变探测装置5为光纤测距装置,则连接线缆6内还具有传输光纤连接后续系统光源和形变测量模块。If the deformation detection device 5 is an optical fiber distance measuring device, the connecting cable 6 also has a transmission optical fiber connected to the subsequent system light source and a deformation measurement module.
检测头5b可以是线阵分布,也可以是面阵分布,其间隔为等间隔分布,具体可以与柔性换能器阵列2非形变时的阵元间的距离相同或不同,可以根据实际工艺需要和精度要求进行增减。The detection heads 5b can be distributed in a linear array or in an area array. The spacing is equally spaced. Specifically, it can be the same as or different from the distance between the array elements of the flexible transducer array 2 when it is not deformed. It can be based on actual process requirements. And accuracy requirements are increased or decreased.
实施例2Example 2
本实施例提供的超声成像检测系统,如图5~6,包括柔性超声探头100和与柔性超声探头100电连接的主机200,该柔性超声探头100为实施例1的柔性超声探头,负责发生和接收超声波,主机200与柔性超声探头100的连接线缆6电连接。The ultrasound imaging detection system provided by this embodiment, as shown in Figures 5-6, includes a flexible ultrasound probe 100 and a host 200 electrically connected to the flexible ultrasound probe 100. The flexible ultrasound probe 100 is the flexible ultrasound probe of Embodiment 1 and is responsible for generating and When receiving ultrasonic waves, the host 200 is electrically connected to the connecting cable 6 of the flexible ultrasonic probe 100.
如图6所示,主机200包括依次相连的T/R转换开关模块22、LNA模块24、TGC模块25、AD采样模块26、控制模块27及图像处理器28,主机200还包括分别与控制模块27和T/R转换开关模块22相连的高压电源激励模块23,TGC模块25还与控制模块27相连。As shown in FIG. 6, the host 200 includes a T/R switch module 22, an LNA module 24, a TGC module 25, an AD sampling module 26, a control module 27, and an image processor 28 connected in sequence. The host 200 also includes a control module, respectively 27. The high-voltage power excitation module 23 connected to the T/R switch module 22, and the TGC module 25 is also connected to the control module 27.
本例中,形变探测装置5为光纤探测装置。该主机200还包括形变测量模块21,形变测量模块21分别与柔性超声探头100和控制模块27相连。In this example, the deformation detection device 5 is an optical fiber detection device. The host 200 also includes a deformation measurement module 21, which is connected to the flexible ultrasonic probe 100 and the control module 27, respectively.
该主机200还包括显示屏幕。The host 200 also includes a display screen.
本例中,主机200可以是计算机。In this example, the host 200 may be a computer.
具体地,形变测量模块21由控制模块27控制用于向形变探测装置5输入检测信号并接受由形变探测装置5探测到的数据,计算出各检测头5b到对应柔性换能器阵列2的距离,即获得柔性换能器阵列2形变后的形状参数,然后将数据输送回控制模块27,进行实时TGC的增益补偿处理,控制电源激励模块23进行波束成型的延迟参数修正,及获得后期超声成像各点进行空间位置变化需要的数据。Specifically, the deformation measurement module 21 is controlled by the control module 27 to input detection signals to the deformation detection device 5 and receive the data detected by the deformation detection device 5, and calculate the distance between each detection head 5b and the corresponding flexible transducer array 2 , That is, obtain the deformed shape parameters of the flexible transducer array 2, and then send the data back to the control module 27 to perform real-time TGC gain compensation processing, control the power excitation module 23 to perform beamforming delay parameter correction, and obtain post-ultrasound imaging Data required for the spatial position change of each point.
高压电源激励模块23用于向柔性超声探头100发射工作所需的激励电压从而使探头100发射超声波,该激励电压先经过T/R转换开关模块22,然后向探头100发射信号。该激励电压的发射通过系统的控制模块27根据形变探测装置5探测到的数据经处理后获得的数据,设置各个换能器阵元的不同的激励延迟时间。The high-voltage power supply excitation module 23 is used to transmit the excitation voltage required by the work to the flexible ultrasonic probe 100 so that the probe 100 emits ultrasonic waves. The excitation voltage first passes through the T/R switch module 22 and then transmits a signal to the probe 100. The transmission of the excitation voltage passes through the control module 27 of the system according to the data obtained after processing the data detected by the deformation detection device 5 to set different excitation delay times of each transducer element.
T/R转换开关模块22还用于接收由柔性超声探头100反馈的超声回波信号。The T/R switch module 22 is also used to receive the ultrasonic echo signal fed back by the flexible ultrasonic probe 100.
LNA模块24用于接收由R/T转换开关模块22进入的超声回波信号,并进行处理。The LNA module 24 is used to receive and process the ultrasonic echo signal entered by the R/T switch module 22.
TGC模块25用于接收由LNA模块24处理的信号,进行时间增益补偿,且TGC模块25还与控制模块27相连,通过控制模块27根据形变探测装置5探测到的数据经形变测量模块21处理后获得的数据调整TGC设置的参数从而进行实时的增益补偿。The TGC module 25 is used to receive the signal processed by the LNA module 24 to perform time gain compensation, and the TGC module 25 is also connected to the control module 27, and the data detected by the deformation detection device 5 is processed by the deformation measurement module 21 through the control module 27 The obtained data adjusts the parameters set by the TGC to perform real-time gain compensation.
AD采样模块26用于接收由TGC模块25输出的信号,然后经图像处理器28进行波束成型和成像处理,最终实时显示到主机的显示屏幕上,完成对目标的成像或检测。The AD sampling module 26 is used to receive the signal output by the TGC module 25, and then perform beamforming and imaging processing by the image processor 28, and finally display it on the display screen of the host in real time to complete the imaging or detection of the target.
本例的超声成像检测系统的检测方法,包括以下步骤:The detection method of the ultrasonic imaging detection system of this example includes the following steps:
(1)在探头100表面涂覆一层超声耦合剂,使得探头100与被检测目标的表面贴合的更加紧密。(1) Coating a layer of ultrasonic coupling agent on the surface of the probe 100 to make the probe 100 fit more closely to the surface of the target to be detected.
(2)将探头100与被检测目标表面紧贴;(2) Close the probe 100 to the surface of the detected target;
将探头100与被检测目标表面紧贴前,先观测被检测目标的形状,进行相应的操作,若与探头100接触的部位主要是凸出结构,则打开阀门7,紧贴被检测目标,让探头100的填充腔4内的填充剂流出,使得探头100的柔性换能器阵列2形成符合目标形状的凹陷形状,然后再注入一定的填充剂使接触面更加紧密;若观测到与探头100接触的部位主要是凹陷结构,则通过阀门7向填充腔4注入填充剂,观察探头表面的柔性换能器阵列,使之紧紧地贴合目标的表面。Before the probe 100 is closely attached to the surface of the detected target, first observe the shape of the detected target and perform corresponding operations. If the part that is in contact with the probe 100 is mainly a protruding structure, open the valve 7 and closely adhere to the detected target to allow The filler in the filling cavity 4 of the probe 100 flows out, so that the flexible transducer array 2 of the probe 100 forms a concave shape conforming to the target shape, and then a certain filler is injected to make the contact surface closer; if it is observed to be in contact with the probe 100 The part where is mainly a recessed structure, the filler is injected into the filling cavity 4 through the valve 7, and the flexible transducer array on the surface of the probe is observed to make it tightly fit the surface of the target.
(3)通过控制模块27控制形变测量模块21向形变探测装置5输入检测信号,形变探测装置5探测检测头5b与柔性换能器阵列2的反射膜之间的距离,然后将检测到的信号反馈至形变测量模块21进行处理,构建出柔性换能器阵列2形变后的几何形状分布,相关数据反馈回控制模块27,计算求得包括各部分曲率半径、换能器阵列分布、视场角等后期超声成像检测需要的数据。(3) The deformation measurement module 21 is controlled by the control module 27 to input the detection signal to the deformation detection device 5. The deformation detection device 5 detects the distance between the detection head 5b and the reflective film of the flexible transducer array 2, and then the detected signal It is fed back to the deformation measurement module 21 for processing, and the geometric shape distribution of the flexible transducer array 2 after deformation is constructed, and the relevant data is fed back to the control module 27, and the calculation includes the radius of curvature of each part, the distribution of the transducer array, and the angle of view. Wait for the data needed for later ultrasound imaging testing.
(4)通过控制模块27控制高压电源激励模块23发射出探头100工作所需的激励电压从而使探头100发射超声波,高压电源激励模块23发射的激励电压是由控制模块27根据形变探测装置5测得的形变参数和波束成型的要求设置各个换能器阵元的不同的激励延迟时间,且激励电压先经T/R转换开关模块,然后输至探头100。(4) The high-voltage power supply excitation module 23 is controlled by the control module 27 to emit the excitation voltage required for the operation of the probe 100 so that the probe 100 emits ultrasonic waves. The excitation voltage emitted by the high-voltage power supply excitation module 23 is measured by the control module 27 according to the deformation detection device 5 The obtained deformation parameters and beamforming requirements set different excitation delay times of each transducer array element, and the excitation voltage is first passed through the T/R switch module and then output to the probe 100.
(5)探头100的回波信号经T/R转换开关模块22后进入LNA模块24进行处理,然后经TGC模块25进行时间增益补偿;(5) The echo signal of the probe 100 passes through the T/R switch module 22 and then enters the LNA module 24 for processing, and then passes through the TGC module 25 for time gain compensation;
TGC模块25设置的参数不是常规的线性或对数关系,而是根据探头100具体的形变参数—由各个检测头5b探测获得,形变测量模块21根据形变探测装置5检测的数据获得柔性探头表面的空间几何分布,相关数据传输给控制模块27后,计算出探测目标到探头表面的实际深度信息,再控制TGC模型25进行实时的相应增益补偿。The parameters set by the TGC module 25 are not conventional linear or logarithmic relationships, but are based on the specific deformation parameters of the probe 100—obtained by detection by each detection head 5b. The deformation measurement module 21 obtains the surface of the flexible probe according to the data detected by the deformation detection device 5 Spatial geometric distribution, after the relevant data is transmitted to the control module 27, the actual depth information from the detection target to the probe surface is calculated, and then the TGC model 25 is controlled to perform real-time corresponding gain compensation.
(6)AD采样模块26采集经TGC模块25增益补偿后的信号并输入图像处理器28,进行波束成型和成像处理,最终实时显示到系统的显示屏幕上,完成对目标的成像或检测。相关数据可根据需要,由系统进行相应的图像增强、测量、测算和保存等,以满足不同场景应用的需要。(6) The AD sampling module 26 collects the gain-compensated signal of the TGC module 25 and inputs it to the image processor 28, performs beamforming and imaging processing, and finally displays it on the display screen of the system in real time to complete the imaging or detection of the target. Relevant data can be enhanced, measured, calculated and saved by the system according to the needs to meet the needs of different scenarios.
在其他实施例中,形变探测装置5也可以为超声探测装置,则超声成像检测系统不需设置形变测量模块,可通过电源激励模块23向超声探测装置发射激励电压,进 而使超声探测装置发射超声波,检测超声探测装置的检测头与柔性换能器阵列的反射膜之前的距离。In other embodiments, the deformation detection device 5 may also be an ultrasonic detection device, so the ultrasonic imaging detection system does not need to be equipped with a deformation measurement module, and the power excitation module 23 can transmit an excitation voltage to the ultrasonic detection device, and then the ultrasonic detection device can emit ultrasonic waves. , To detect the distance between the detection head of the ultrasonic detection device and the reflective film of the flexible transducer array.
上述实施例只为说明本发明的技术构思及特点,其目的在于让熟悉此项技术的人士能够了解本发明的内容并据以实施,并不能以此限制本发明的保护范围。凡根据本发明精神实质所作的等效变化或修饰,都应涵盖在本发明的保护范围之内。The above-mentioned embodiments are only to illustrate the technical concept and characteristics of the present invention, and their purpose is to enable those familiar with the technology to understand the content of the present invention and implement them accordingly, and cannot limit the protection scope of the present invention. All equivalent changes or modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.

Claims (26)

  1. 一种柔性超声探头,包括柔性换能器阵列,其特征在于:所述探头还包括两端分别与外界连通的外壳,所述外壳内具有一端开口的填充腔,所述填充腔的开口朝向所述外壳的一端,所述柔性换能器阵列连接在所述外壳的所述一端且所述柔性换能器阵列还与所述填充腔的开口端密封设置,使得所述填充腔形成用于填充流体填充剂的密封腔室,所述探头还包括设置在所述外壳内的用于检测所述柔性换能器阵列的不同点的位置的形变探测装置。A flexible ultrasound probe, including a flexible transducer array, is characterized in that: the probe also includes a shell whose two ends are respectively communicated with the outside, and the shell has a filling cavity with an opening at one end. One end of the housing, the flexible transducer array is connected to the one end of the housing, and the flexible transducer array is also sealed with the open end of the filling cavity, so that the filling cavity is formed for filling In the sealed chamber of a fluid filler, the probe further includes a deformation detection device arranged in the housing for detecting the positions of different points of the flexible transducer array.
  2. 根据权利要求1所述的柔性超声探头,其特征在于:所述形变探测装置包括固定设置在所述外壳内的基板及阵列分布在所述基板上的检测头,所述柔性换能器阵列的面向所述形变探测装置的一面形成有反射膜,所有所述检测头分别用于检测各所述检测头与所述反射膜之间的距离。The flexible ultrasonic probe according to claim 1, wherein the deformation detection device comprises a substrate fixedly arranged in the housing and a detection head arrayed on the substrate, and the flexible transducer array A reflection film is formed on the side facing the deformation detection device, and all the detection heads are respectively used for detecting the distance between each detection head and the reflection film.
  3. 根据权利要求2所述的柔性超声探头,其特征在于:所述检测头为线阵分布或面阵分布。The flexible ultrasonic probe according to claim 2, wherein the detection heads are distributed in a linear array or in an area array.
  4. 根据权利要求3所述的柔性超声探头,其特征在于:所述检测头的个数与所述柔性换能器阵列的阵元的个数相同或不同,所述检测头为等间隔分布,且间隔距离与所述柔性换能器阵列非形变时的阵元间的距离相同或不同。The flexible ultrasonic probe according to claim 3, wherein the number of the detection heads is the same as or different from the number of the elements of the flexible transducer array, and the detection heads are distributed at equal intervals, and The separation distance is the same as or different from the distance between the array elements when the flexible transducer array is not deformed.
  5. 根据权利要求2所述的柔性超声探头,其特征在于:所述形变探测装置为光纤测距装置或超声测厚装置,当所述形变探测装置为光纤测距装置时,所述检测头为光纤检测头,所述反射膜为光学的反射膜;当所述形变探测装置为超声测厚装置时,所述检测头为超声检测头,所述反射膜为声学的反射膜。The flexible ultrasonic probe according to claim 2, wherein the deformation detection device is an optical fiber distance measurement device or an ultrasonic thickness measurement device, and when the deformation detection device is an optical fiber distance measurement device, the detection head is an optical fiber In the detection head, the reflection film is an optical reflection film; when the deformation detection device is an ultrasonic thickness measuring device, the detection head is an ultrasonic detection head, and the reflection film is an acoustic reflection film.
  6. 根据权利要求1所述的柔性超声探头,其特征在于:所述填充腔由所述外壳的内壁、柔性换能器阵列和形变探测装置共同围设而成,或者所述填充腔为独立设置在所述外壳内部的具有一端开口的腔体。The flexible ultrasonic probe according to claim 1, wherein the filling cavity is enclosed by the inner wall of the housing, the flexible transducer array and the deformation detection device, or the filling cavity is independently arranged in A cavity with an opening at one end is provided inside the housing.
  7. 根据权利要求6所述的柔性超声探头,其特征在于:所述填充腔由所述外壳的内壁、柔性换能器阵列和形变探测装置共同围设而成,所述柔性换能器阵列与所述外壳之间采用密封胶密封,所述形变探测装置的面向所述柔性换能器阵列的一面形成有用于隔离所述填充剂和形变探测装置的隔离层。The flexible ultrasonic probe according to claim 6, wherein the filling cavity is surrounded by an inner wall of the housing, a flexible transducer array, and a deformation detection device, and the flexible transducer array is The shells are sealed with a sealant, and a side of the deformation detection device facing the flexible transducer array is formed with an isolation layer for separating the filler from the deformation detection device.
  8. 根据权利要求1所述的柔性超声探头,其特征在于:所述填充腔上开设有用于注入所述填充剂和导出所述填充剂的阀门。The flexible ultrasonic probe according to claim 1, wherein the filling cavity is provided with a valve for injecting the filling agent and for exporting the filling agent.
  9. 根据权利要求8所述的柔性超声探头,其特征在于:所述阀门包括用于注入所述填充剂的进液阀门和用于导出所述填充剂的出液阀门;或所述阀门为一即用于注入所述填充剂、又用于导出所述填充剂的阀门。The flexible ultrasonic probe according to claim 8, wherein the valve comprises an inlet valve for injecting the filler and an outlet valve for deriving the filler; or the valve is one A valve used to inject the filler and to discharge the filler.
  10. 根据权利要求1、8或9所述的柔性超声探头,其特征在于:所述填充剂为液体和/或胶体,优选地,所述填充剂为水、硅油、超声耦合剂中的一种或几种的组合。The flexible ultrasonic probe according to claim 1, 8 or 9, characterized in that: the filler is liquid and/or colloid, preferably, the filler is one of water, silicone oil, ultrasonic coupling agent or Several combinations.
  11. 根据权利要求1所述的柔性超声探头,其特征在于:所述外壳包括两端分别能够外界连通的壳体及连接在所述壳体的一端且内部与所述壳体的内部连通的底托,所述壳体的壳壁具有中空通道,所述柔性换能器阵列连接在所述壳体的另一端,所述探头还包括连接在所述底托上的连接线缆,所述柔性换能器阵列与所述连接线缆之间通过导线连接,所述导线经所述壳体的中空通道进入所述底托内部后与所述连接线缆电连接。The flexible ultrasonic probe according to claim 1, wherein the outer shell includes a shell whose two ends are respectively capable of communicating with the outside world, and a bottom bracket connected to one end of the shell and communicating with the inside of the shell. The shell wall of the housing has a hollow channel, the flexible transducer array is connected to the other end of the housing, the probe further includes a connecting cable connected to the bottom support, the flexible transducer The energy device array is connected with the connecting cable through a wire, and the wire enters the interior of the bottom bracket through the hollow channel of the housing and is electrically connected with the connecting cable.
  12. 根据权利要求11所述的柔性超声探头,其特征在于:所述形变探测装置设置在所述壳体内,所述形变探测装置通过导线与所述连接线缆电连接。The flexible ultrasonic probe according to claim 11, wherein the deformation detecting device is arranged in the housing, and the deformation detecting device is electrically connected to the connecting cable through a wire.
  13. 根据权利要求12所述的柔性超声探头,其特征在于:所述底托内设置转接电路板,所述转接电路板分别与所述柔性换能器阵列、形变探测装置和连接线缆电连接,所述转接电路板用于将所述柔性换能器阵列和形变探测装置不同规格的连接导线转变成标准的同轴线缆后与所述连接线缆连接。The flexible ultrasonic probe according to claim 12, wherein a switching circuit board is provided in the bottom bracket, and the switching circuit board is electrically connected to the flexible transducer array, the deformation detection device and the connecting cable respectively. For connection, the switching circuit board is used to convert the connecting wires of different specifications of the flexible transducer array and the deformation detection device into a standard coaxial cable and then connect to the connecting cable.
  14. 根据权利要求1所述的柔性超声探头,其特征在于:所述柔性换能器阵列还通过夹头与所述外壳固定设置,优选地,所述夹头的材质为金属或塑料,进一步优选地,所述金属包括但不限于铝、不锈钢,所述塑料包括但不限于亚克力、聚四氟乙烯。The flexible ultrasonic probe according to claim 1, wherein the flexible transducer array is also fixedly arranged with the housing through a chuck. Preferably, the material of the chuck is metal or plastic, and more preferably The metal includes but is not limited to aluminum and stainless steel, and the plastic includes but is not limited to acrylic and polytetrafluoroethylene.
  15. 根据权利要求1所述的柔性超声探头,其特征在于:所述柔性换能器阵列包括柔性基底、嵌设在所述柔性基底内部的至少2个换能器阵元、形成在所述柔性基底内表面的用于隔离所述柔性基底和填充剂的基底衬膜及形成在所述基底衬膜内表面的反射膜,所述形变探测装置用于检测所述形变探测装置与所述反射膜之间的距离。The flexible ultrasonic probe according to claim 1, wherein the flexible transducer array comprises a flexible substrate, at least two transducer elements embedded in the flexible substrate, and are formed on the flexible substrate. The inner surface of the base lining film used to isolate the flexible substrate and the filler and the reflective film formed on the inner surface of the base lining film, the deformation detection device is used to detect the difference between the deformation detection device and the reflective film The distance between.
  16. 根据权利要求15所述的柔性超声探头,其特征在于:所述柔性基底的材质为聚对苯二甲酸乙二醇酯、聚二甲基硅氧烷、聚乙烯醇、聚酰亚胺、聚萘二甲酯乙二醇酯中的一种或几种的组合。The flexible ultrasonic probe according to claim 15, wherein the material of the flexible substrate is polyethylene terephthalate, polydimethylsiloxane, polyvinyl alcohol, polyimide, poly One or a combination of naphthalene dimethyl ethylene glycol esters.
  17. 根据权利要求15所述的柔性超声探头,其特征在于:所述基底衬膜为PET膜或PI膜。The flexible ultrasonic probe according to claim 15, wherein the base liner film is a PET film or a PI film.
  18. 根据权利要求2、5或15,所述的柔性超声探头,其特征在于:所述反射膜的材质为铝或金。The flexible ultrasonic probe according to claim 2, 5 or 15, characterized in that the material of the reflective film is aluminum or gold.
  19. 一种超声成像检测系统,其含有权利要求1~18中任一项权利要求所述的柔性超声探头。An ultrasonic imaging detection system comprising the flexible ultrasonic probe according to any one of claims 1-18.
  20. 根据权利要求19所述的超声成像检测系统,其特征在于:所述超声成像检测系统还包括与所述探头通过电连接的主机,所述主机包括依次相连的T/R转换开关模块、LNA模块、TGC模块、AD采样模块、控制模块及图像处理器,所述主机还包括电源激励模块和显示屏幕,其中,The ultrasonic imaging inspection system according to claim 19, characterized in that: the ultrasonic imaging inspection system further comprises a host computer electrically connected to the probe, and the host computer includes a T/R switch module and an LNA module connected in sequence , TGC module, AD sampling module, control module and image processor, the host also includes a power excitation module and a display screen, among which,
    所述控制模块控制所述形变探测装置探测所述柔性换能器阵元与所述形变探测装置之间的距离数据,经处理后,获得后续超声成像检测需要的数据;The control module controls the deformation detection device to detect the distance data between the flexible transducer array element and the deformation detection device, and after processing, obtains the data required for subsequent ultrasonic imaging detection;
    所述电源激励模块分别与所述控制模块和所述T/R转换开关模块相连,用于向所述探头发射工作所需的激励电压从而使所述探头发射超声波,所述激励电压先经所述T/R转换开关模块,然后向所述探头发射信号;The power excitation module is respectively connected with the control module and the T/R switch module, and is used to transmit the excitation voltage required by the work to the probe so that the probe emits ultrasonic waves. The T/R conversion switch module, and then transmit a signal to the probe;
    所述T/R转换开关模块还用于接收由所述探头反馈的超声回波信号;The T/R switch module is also used to receive the ultrasonic echo signal fed back by the probe;
    所述LNA模块用于接收由所述R/T转换开关模块进入的超声回波信号,并进行处理;The LNA module is used to receive and process the ultrasonic echo signal entered by the R/T switch module;
    所述TGC模块用于接收由所述LNA模块处理的信号,进行时间增益补偿,且所述TGC模块还与所述控制模块相连,通过所述控制模块根据所述形变探测装置探测到的数据经处理后获得的数据调整TGC设置的参数从而进行实时的增益补偿;The TGC module is used to receive the signal processed by the LNA module to perform time gain compensation, and the TGC module is also connected to the control module. The data obtained after processing adjusts the parameters set by TGC to perform real-time gain compensation;
    所述AD采样模块用于接收由所述TGC模块输出的信号,然后经所述图像处理器进行波束成型和成像处理,显示到所述显示屏幕上。The AD sampling module is used to receive the signal output by the TGC module, and then perform beamforming and imaging processing by the image processor, and display it on the display screen.
  21. 根据权利要求20所述的超声成像检测系统,其特征在于:所述形变探测装置为光纤探测装置,所述超声成像检测系统还包括分别与所述控制系统和探头相连的形变测量模块,所述形变测量模块由所述控制模块控制用于向所述形变探测装置输入检测信号并接收由所述形变探测装置探测到的数据并进行处理,处理后的数据输送回所述控制模块并进行处理,获得后续超声成像检测需要的数据。The ultrasonic imaging detection system according to claim 20, wherein the deformation detection device is an optical fiber detection device, and the ultrasonic imaging detection system further comprises a deformation measurement module connected to the control system and the probe respectively, and The deformation measurement module is controlled by the control module to input a detection signal to the deformation detection device and receive and process the data detected by the deformation detection device. The processed data is sent back to the control module for processing, Obtain the data needed for subsequent ultrasound imaging inspections.
  22. 一种超声成像检测方法,所述检测方法使用的检测系统为超声成像检测系统,所 述超声成像检测系统含有权利要求1~18中任一项权利要求所述的柔性超声探头。An ultrasonic imaging detection method, the detection system used in the detection method is an ultrasonic imaging detection system, and the ultrasonic imaging detection system contains the flexible ultrasonic probe according to any one of claims 1-18.
  23. 根据权利要求22所述的超声成像检测方法,其特征在于,所述超声成像检测系统还包括与所述探头通过电连接的主机,所述主机包括依次相连的T/R转换开关模块、LNA模块、TGC模块、AD采样模块、控制模块及图像处理器,所述主机还包括电源激励模块和显示屏幕,所述电源激励模块分别与所述T/R转换开关模块和控制模块相连,所述检测方法包括以下步骤:The ultrasonic imaging detection method according to claim 22, wherein the ultrasonic imaging detection system further comprises a host electrically connected with the probe, and the host comprises a T/R switch module and an LNA module connected in sequence , TGC module, AD sampling module, control module, and image processor. The host further includes a power excitation module and a display screen. The power excitation module is respectively connected to the T/R switch module and the control module. The detection The method includes the following steps:
    (1)将所述探头与被检测目标表面紧贴;(1) Close the probe to the surface of the detected target;
    (2)通过所述控制模块控制所述形变探测装置探测所述形变探测装置与所述探头的柔性换能器阵列之间的距离数据,经处理后,获得后续超声成像检测需要的数据;(2) Control the deformation detection device to detect the distance data between the deformation detection device and the flexible transducer array of the probe through the control module, and obtain the data required for subsequent ultrasonic imaging detection after processing;
    (3)通过所述控制模块控制所述电源激励模块发射出所述探头工作所需的激励电压从而使所述探头发射超声波;(3) Through the control module, the power excitation module is controlled to emit the excitation voltage required for the operation of the probe, so that the probe emits ultrasonic waves;
    (4)所述探头的回波信号经所述T/R转换开关模块后进入LNA模块进行处理,然后经TGC模块进行时间增益补偿;(4) The echo signal of the probe enters the LNA module for processing after passing through the T/R switch module, and then performs time gain compensation through the TGC module;
    (5)经TGC模块的信号由所述AD采样模块采集,然后输入所述图像处理器,进行波束成型和成像处理,显示在所述显示屏幕上,完成目标的成像或检测。(5) The signal through the TGC module is collected by the AD sampling module, and then input to the image processor for beamforming and imaging processing, and displayed on the display screen to complete the imaging or detection of the target.
  24. 根据权利要求23所述的超声成像检测方法,其特征在于:步骤(1)中,观测所述被检测目标的形状,若与所述探头接触的部位为凸出结构,则导出部分所述填充腔内的填充剂使所述探头的柔性换能器阵列与被检测目标表面相配合,然后向所述填充腔注入填充剂使接触面紧贴;若与所述探头接触的部位为凹陷结构,则向所述填充腔注入填充剂使所述探头的柔性换能器阵列紧贴所述被检测目标表面。The ultrasonic imaging detection method according to claim 23, characterized in that: in step (1), the shape of the detected target is observed, and if the part in contact with the probe is a protruding structure, a part of the filling is derived The filler in the cavity makes the flexible transducer array of the probe fit with the surface of the detected target, and then the filler is injected into the filling cavity to make the contact surface close; if the part contacting the probe is a recessed structure, Then, a filler is injected into the filling cavity to make the flexible transducer array of the probe close to the surface of the detected target.
  25. 根据权利要求23所述的超声成像检测方法,其特征在于:步骤(1)中,先在所述探头表面涂覆超声耦合剂,然后将所述探头与被检测目标表面紧贴。The ultrasonic imaging detection method according to claim 23, characterized in that: in step (1), an ultrasonic couplant is first coated on the surface of the probe, and then the probe is closely attached to the surface of the target to be detected.
  26. 根据权利要求23所述的超声成像检测方法,其特征在于:步骤(4)中,所述TGC模块还与所述控制模块相连,所述TGC模块设置的参数是根据所述形变探测装置检测的数据经处理后获得的数据进行调整的,从而进行实时的增益补偿。The ultrasonic imaging detection method according to claim 23, wherein: in step (4), the TGC module is also connected to the control module, and the parameters set by the TGC module are detected according to the deformation detection device After the data is processed, the data obtained is adjusted to perform real-time gain compensation.
PCT/CN2020/105732 2020-05-15 2020-07-30 Flexible ultrasonic probe, ultrasonic imaging measurement system, and measurement method WO2021227261A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202010412964.2A CN111458409A (en) 2020-05-15 2020-05-15 Flexible ultrasonic probe, ultrasonic imaging detection system and detection method
CN202010412964.2 2020-05-15

Publications (1)

Publication Number Publication Date
WO2021227261A1 true WO2021227261A1 (en) 2021-11-18

Family

ID=71678773

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2020/105732 WO2021227261A1 (en) 2020-05-15 2020-07-30 Flexible ultrasonic probe, ultrasonic imaging measurement system, and measurement method

Country Status (2)

Country Link
CN (1) CN111458409A (en)
WO (1) WO2021227261A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114152672A (en) * 2021-12-02 2022-03-08 西安交通大学 Flexible phased array electromagnetic ultrasonic detection probe, system and method
CN115097014A (en) * 2022-06-21 2022-09-23 辽宁机电职业技术学院 Ultrasonic device for nondestructive testing of thin plate
CN116439981A (en) * 2023-06-16 2023-07-18 北京航空航天大学 Shock wave treatment feedback device

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111458409A (en) * 2020-05-15 2020-07-28 苏州希声科技有限公司 Flexible ultrasonic probe, ultrasonic imaging detection system and detection method
CN112957075A (en) * 2021-03-23 2021-06-15 苏州希声科技有限公司 Sliding ring type ultrasonic endoscope probe and imaging method
CN113588799B (en) * 2021-06-22 2024-03-15 南昌航空大学 Flexible ultrasonic focusing detection probe for ultrasonic nondestructive detection of lithium battery ring electrode laser weld
CN113866269A (en) * 2021-09-16 2021-12-31 中国科学院南海海洋研究所 Vertical cross section layered acoustic measurement system and method
CN113984892B (en) * 2021-09-28 2023-04-07 西安交通大学 Semi-flexible array type electromagnetic ultrasonic probe for detecting defects of spherical plate
CN113848375B (en) * 2021-10-20 2023-11-28 国网湖南省电力有限公司 Electrified detection device for internal device of oil insulation transformer and application method thereof
CN114101016B (en) * 2021-11-04 2022-08-23 之江实验室 Magnetic control flexible ultrasonic transducer
CN114145769B (en) * 2021-12-03 2022-10-21 深圳先进技术研究院 Wearable health monitoring equipment, flexible sensor thereof and manufacturing method
CN116735721B (en) * 2023-08-15 2023-11-07 浙江大学 Flexible coupling wedge block for ultrasonic detection and application method thereof
CN116973302B (en) * 2023-09-20 2024-01-23 四川省交通勘察设计研究院有限公司 Road surface anti-skid performance detection method, device, equipment and medium

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101330874A (en) * 2005-12-14 2008-12-24 皇家飞利浦电子股份有限公司 Method and apparatus for guidance and application of high intensity focused ultrasound for control of bleeding due to severed limbs
CN101569540A (en) * 2008-04-29 2009-11-04 香港理工大学 Wireless ultrasonic scanning system
CN103208282A (en) * 2012-01-11 2013-07-17 精工爱普生株式会社 Ultrasonic transducer, ultrasonic probe, diagnostic instrument, and electronic instrument
US20170164839A1 (en) * 2015-12-15 2017-06-15 Canon Kabushiki Kaisha Acoustic probe and subject information acquisition apparatus
CN111458409A (en) * 2020-05-15 2020-07-28 苏州希声科技有限公司 Flexible ultrasonic probe, ultrasonic imaging detection system and detection method
CN212083324U (en) * 2020-05-15 2020-12-04 苏州希声科技有限公司 Flexible ultrasonic probe and ultrasonic imaging detection system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101330874A (en) * 2005-12-14 2008-12-24 皇家飞利浦电子股份有限公司 Method and apparatus for guidance and application of high intensity focused ultrasound for control of bleeding due to severed limbs
CN101569540A (en) * 2008-04-29 2009-11-04 香港理工大学 Wireless ultrasonic scanning system
CN103208282A (en) * 2012-01-11 2013-07-17 精工爱普生株式会社 Ultrasonic transducer, ultrasonic probe, diagnostic instrument, and electronic instrument
US20170164839A1 (en) * 2015-12-15 2017-06-15 Canon Kabushiki Kaisha Acoustic probe and subject information acquisition apparatus
CN111458409A (en) * 2020-05-15 2020-07-28 苏州希声科技有限公司 Flexible ultrasonic probe, ultrasonic imaging detection system and detection method
CN212083324U (en) * 2020-05-15 2020-12-04 苏州希声科技有限公司 Flexible ultrasonic probe and ultrasonic imaging detection system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114152672A (en) * 2021-12-02 2022-03-08 西安交通大学 Flexible phased array electromagnetic ultrasonic detection probe, system and method
CN114152672B (en) * 2021-12-02 2024-03-12 西安交通大学 Flexible phased array electromagnetic ultrasonic detection probe, system and method
CN115097014A (en) * 2022-06-21 2022-09-23 辽宁机电职业技术学院 Ultrasonic device for nondestructive testing of thin plate
CN116439981A (en) * 2023-06-16 2023-07-18 北京航空航天大学 Shock wave treatment feedback device
CN116439981B (en) * 2023-06-16 2023-11-24 北京航空航天大学 Shock wave treatment feedback device

Also Published As

Publication number Publication date
CN111458409A (en) 2020-07-28

Similar Documents

Publication Publication Date Title
WO2021227261A1 (en) Flexible ultrasonic probe, ultrasonic imaging measurement system, and measurement method
CN212083324U (en) Flexible ultrasonic probe and ultrasonic imaging detection system
EP2110186B1 (en) Ultrasound transducer and electronic device
WO2017181553A1 (en) Ultrasonic probe and ultrasonic detection device provided with said ultrasonic probe
US20090062656A1 (en) Backing material, ultrasonic probe, ultrasonic endoscope, ultrasonic diagnostic apparatus, and ultrasonic endoscopic apparatus
CN105903667B (en) The hollow focusing ultrasonic detector of double frequency
US20100204617A1 (en) Ultrasonic probe with acoustic output sensing
JP2010227562A (en) Ultrasonic probe with replaceable head section
Roy et al. Body conformal linear ultrasound array for combined ultrasound and photoacoustic imaging
US20060241473A1 (en) Ultrasonic probe and producing method therefor
US20110077520A1 (en) Ultrasonic diagnostic apparatus and ultrasonic diagnostic method
CN106932488A (en) A kind of stretchable ultrasound transducer array
US20110074244A1 (en) Ultrasonic probe
CN103069844B (en) Ultrasonic probe and its diagnostic ultrasound equipment of use
US10923099B2 (en) Acoustical lens and ultrasound transducer probe
US6511433B1 (en) Active acoustic array for ultrasonic biomedical applications
CN109758180B (en) Flexible ultrasonic probe and ultrasonic diagnosis device and method thereof
KR20110003057A (en) Ultrasonic probe and ultrasonic diagnostic apparatus
KR101053286B1 (en) Ultrasonic probes and ultrasonic diagnostic equipment
JP4638854B2 (en) Manufacturing method of ultrasonic probe
US20210339282A1 (en) Gas Matrix Piezoelectric Ultrasound Array Transducer
CN113438987B (en) Acoustic coupling interface
KR20100056309A (en) Probe for ultrasonic diagnostic apparatus and manufacturing method thereof
JP2016168107A (en) Ultrasonic apparatus, control device for ultrasonic apparatus, probe and peeling detection method
US20240019406A1 (en) Ultrasonic transducing module and ultrasonic probe

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 20936036

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 20936036

Country of ref document: EP

Kind code of ref document: A1