WO2021206237A1 - Transfer apparatus for preventing leakage of toxic combustible semiconductor special gas - Google Patents

Transfer apparatus for preventing leakage of toxic combustible semiconductor special gas Download PDF

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Publication number
WO2021206237A1
WO2021206237A1 PCT/KR2020/012562 KR2020012562W WO2021206237A1 WO 2021206237 A1 WO2021206237 A1 WO 2021206237A1 KR 2020012562 W KR2020012562 W KR 2020012562W WO 2021206237 A1 WO2021206237 A1 WO 2021206237A1
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WO
WIPO (PCT)
Prior art keywords
stopper
gas
special gas
cylinder
toxic
Prior art date
Application number
PCT/KR2020/012562
Other languages
French (fr)
Korean (ko)
Inventor
공원석
Original Assignee
더블유아이씨 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 더블유아이씨 주식회사 filed Critical 더블유아이씨 주식회사
Priority to JP2022561668A priority Critical patent/JP7489133B2/en
Priority claimed from KR1020200119800A external-priority patent/KR102417222B1/en
Publication of WO2021206237A1 publication Critical patent/WO2021206237A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/06—Closures, e.g. cap, breakable member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/08—Mounting arrangements for vessels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere

Definitions

  • the present invention relates to a transport device for preventing leakage of toxic and combustible semiconductor special gas, and more particularly, when a toxic or combustible semiconductor special gas harmful to the human body is lost due to a failure of a valve installed in the gas cylinder, the gas cylinder is delivered to the designated scrubber location.
  • a stopper can be installed to prevent the loss of special gas, and when the loss of special gas progresses and the pressure inside the stopper rises above the set value, nitrogen gas is supplied to one side of the stopper and the other side of the stopper is closed. It is possible to prevent safety accidents due to the leakage of special gas by allowing the special gas that is released and reacted with nitrogen gas to be discharged into the atmosphere after passing through the portable scrubber. It relates to a transport device for preventing leakage of toxic and combustible semiconductor special gas, which can be connected quickly by using and can secure a golden time to prevent safety accidents at the initial stage of gas leakage.
  • Special gases such as NF 3 , NH 3 , Cl 2 , B 2 H 6 , CF4, HCl, CO2, F2, PH3, and DCS, which are generally used in the semiconductor manufacturing field, are stored in a liquid state (liquefied gas state) at room temperature in a gas tank. It is stored inside, and these gases are supplied to the process chamber of the semiconductor manufacturing process through a gas supply line in a state where they are safely maintained inside the gas tank.
  • the gas tank for special gas does not have a separate technical configuration that can prevent the special gas lost from the valve of the gas tank from spreading into the atmosphere when an accident in which the special gas is lost is not provided. It is difficult to prevent personal injury or property damage, and even when the stopper is installed on the valve of the gas tank, the pressure inside the stopper rises and the stopper is damaged and the special gas can be diffused into the atmosphere.
  • a stopper is installed while the gas cylinder is transported to the location where the designated scrubber is located. It can prevent loss, and when the pressure inside the stopper rises above the set value due to the loss of special gas, nitrogen gas is supplied to one side of the stopper, and the other side of the stopper is opened to react with nitrogen gas and discharged. After passing through the portable scrubber, it is discharged into the atmosphere to prevent safety accidents caused by the leakage of special gas.
  • the purpose of this is to provide a transport device for preventing leakage of toxic and combustible semiconductor special gas that can secure the golden time to prevent safety accidents at the initial stage.
  • the present invention is provided with a seating plate on which a plurality of gas cylinders can be seated, and a transport cart equipped with wheel members so that an operator can hold and transport the frame member on which the seating plate is supported; a stopper installed to surround the valve of the gas cylinder, and preventing the special gas from being diffused into the atmosphere when the special gas is discharged from the valve; an auxiliary container seated on the seating plate and filled with nitrogen gas so as to supply nitrogen gas to the inside of the stopper; a scrubber for purifying by adsorbing harmful components contained in the special gas while discharging the special gas that is lost inside the closure device and increases the pressure inside the closure device to the outside of the closure device; And it characterized in that it comprises a connecting portion for connecting the stopper device and the auxiliary tube, and connecting the stopper device and the scrubber.
  • connection part of the present invention an injection pipe installed between the gas cylinder and the stopper member; a discharge pipe installed between the auxiliary tube and the stopper member; and a quick coupler provided at both ends of the injection pipe or the discharge pipe and connecting the gas cylinder, the auxiliary cylinder, and the stopper member and the injection pipe or the discharge pipe.
  • the seating plate or the frame member of the present invention is provided with a guide panel in close contact with the gas cylinder or the auxiliary cylinder to support the gas cylinder or the auxiliary cylinder, and the guide panel binds the gas cylinder and the auxiliary cylinder at the same time. It is characterized in that the gas cylinder and the auxiliary cylinder is provided with a locking protrusion connecting the constraining member to prevent the flow.
  • the scrubber of the present invention the stopper member to which the discharge pipe extending from the stopper is connected; a body case in which the activated carbon is accommodated, and coupled to the stopper member so that a special gas discharged through the gap between the activated carbons passes; and a plurality of exhaust pipes extending from the body case and extending from the stopper member so that the special gas introduced into the body case by the discharge pipe passes through the gap between the activated carbon and is discharged to the outside, and the ball valve is installed Therefore, when one exhaust pipe is defective, it is characterized in that the exhaust operation can be carried out by opening the opening of the other exhaust pipe.
  • the present invention while easily rotating the first stopper a first opening and closing portion to be quickly coupled to the gas cylinder; And it characterized in that it further comprises a second opening/closing part for allowing the cap member to be quickly coupled to the gas cylinder while easily rotating.
  • the first protrusion protrudes in the lateral direction from the outer wall of the first stopper, the first protrusion in which a first detachable groove is formed concavely from the end in the inward direction; and a first lever member inserted into the first detachable groove portion.
  • the second opening and closing portion of the present invention a second protrusion protruding from the outer wall of the cap member in the lateral direction, the second protruding portion is formed concavely in the inner direction from the end portion; and a second lever member inserted into the second detachable groove portion.
  • the present invention is characterized in that it further comprises a leak for connecting or blocking the inside and outside of the first stopper to reduce the pressure difference between the inside and outside of the first stopper.
  • the transport device for preventing leakage of toxic and combustible semiconductor special gas includes an auxiliary passage for supplying nitrogen gas to the inside of the stopper of the gas cylinder to a truck that accommodates and transports a special gas gas cylinder, and harmful contained in the special gas discharged from the stopper Since the scrubber that removes substances is housed at the same time, it is possible to purify the special gas that is discharged while supplying nitrogen gas to the inside of the stopper while transporting the special gas cylinder, so that the gas cylinder in which the leak has occurred can be safely transported and the special gas cylinder Even if a special gas is leaked during transport, it can prevent the special gas from spreading into the atmosphere, thereby preventing safety accidents.
  • the transport device for preventing leakage of toxic and combustible semiconductor special gas is provided with a seating plate and guide panel for accommodating the gas cylinder and the auxiliary cylinder adjacently to the conveying cart, and a restraining member for restraining the gas cylinder and the auxiliary cylinder is installed.
  • the transport device for preventing leakage of toxic and combustible semiconductor special gas according to the present invention is provided with a confirmation window for checking the replacement cycle of activated carbon in the main body case constituting the scrubber, so that the operator can visually determine whether to replace the activated carbon.
  • the transport device for preventing leakage of toxic and combustible semiconductor special gas is provided with a quick connector or a quick coupler for connecting the injection pipe or the discharge pipe in a one-touch method to the connection part connecting the auxiliary tube for supplying nitrogen gas and the stopper.
  • a stopper is installed on the gas cylinder at the initial stage of leakage, and the stopper, auxiliary cylinder, and scrubber can be easily connected to shorten the time required to move the gas cylinder to a designated place, and to prevent safety accidents caused by loss of special gas This has the advantage of securing the golden time to prevent safety accidents in the early stages of gas leaks.
  • FIG. 1 is a front perspective view showing a transfer device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 2 is a rear perspective view illustrating a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG 3 is a front view showing a transfer device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 4 is a side view illustrating a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 5 is a plan view showing a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 6 is a view showing a scrubber of a transfer device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 7 is a cross-sectional perspective view illustrating a stopper of a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 8 is an exploded perspective view illustrating a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 9 is a cross-sectional view showing a leak of a transfer device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 10 is a perspective view showing the second opening and closing part of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 11 is a cross-sectional view showing the second opening and closing portion of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 12 is a perspective view illustrating a first opening and closing part of a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 13 is a cross-sectional view showing the first opening and closing portion of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 14 is a state diagram in which the stopper of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention is applied to gas cylinders of 44 liters, 47 liters, and 49 liters.
  • 15 is a state diagram in which the stopper of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention is applied to gas cylinders of 440 liters and 460 liters.
  • 16 is a state diagram showing a leak portion of a transfer device for preventing leakage of a toxic and combustible semiconductor special gas according to another embodiment of the present invention.
  • cap member 72 fourth thread
  • injection pipe 104 discharge pipe
  • stopper member 159 exhaust pipe
  • FIG. 1 is a front perspective view showing a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention
  • FIG. 2 is a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • It is a rear perspective view
  • FIG. 3 is a front view showing a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 4 is a side view showing a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention
  • FIG. 5 is a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention
  • 6 is a view showing a scrubber of a transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • FIG. 7 is a cross-sectional perspective view showing a stopper of a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention
  • FIG. 8 is a toxic and combustible semiconductor special gas leakage prevention according to an embodiment of the present invention
  • 9 is an exploded perspective view of the transport device
  • FIG. 9 is a cross-sectional view showing a leak of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
  • the transport device for preventing leakage of toxic and combustible semiconductor special gas is provided with a seating plate 112 on which a plurality of gas cylinders 10 can be seated, the seating plate is installed so as to surround the valve of the transport bogie 110 provided with the wheel member 118 and the gas cylinder 10 so that the operator can hold and transport the frame member 111 supported by the A stopper 100 for preventing the special gas from diffusing into the atmosphere, and an auxiliary cylinder 130 that is seated on the seating plate 112 and filled with nitrogen gas so as to supply nitrogen gas into the stopper 100; A scrubber 150 for purifying by adsorbing harmful components contained in the special gas while discharging the special gas that is lost inside the closure device 100 and increases the pressure inside the closure device 100 to the outside of the closure device 100 and , Connecting the stopper device 100 and the auxiliary tube 130, and includes connecting portions 102 and 104 for connecting the stopper device 100 and the scrubber 150.
  • the gas cylinder 10 and the auxiliary cylinder 130 are seated on the seating plate 112 of the transfer cart 110 , and the gas cylinder 10 and the auxiliary cylinder 130 are mounted. ), the gas cylinder 10 and the auxiliary cylinder 130 are brought into close contact by tightening the constraining member 114b while hooking the constraining member 114b made of a chain or belt to the locking protrusion 114a of the guide panel 114 so as not to flow. fixed in a fixed state.
  • the transport cart 110 of this embodiment includes a holder 116 that can seat and store the stopper storage box 116a, and is provided with a supporter extending rearward from the lower end of the frame member 111, so that the stopper is provided.
  • the device storage box 116a forms a receiving table 116 that can accommodate it, and wheel members 118 are installed at the lower end of the frame member 111 and the end of the receiving table 116 so that an operator can use the frame member 111 ), the gas cylinder 10 can be safely transported by holding the handle installed on the upper end and walking while pushing the transport cart 110 .
  • the seating plate 112 or the frame member 111 is provided with a guide panel 114 in close contact with the gas cylinder 10 or the auxiliary cylinder 130 to support the gas cylinder 10 or the auxiliary cylinder 130, the guide panel ( 114 is provided with a locking protrusion 114a connecting the gas cylinder 10 and the auxiliary cylinder 130 at the same time and connecting the constraining member 114b for preventing the gas cylinder 10 and the auxiliary cylinder 130 from flowing.
  • the gas cylinder 10 and the auxiliary cylinder 130 are accommodated in the transfer cart 110, the lower end and the circumferential surface of the gas cylinder 10 and the auxiliary cylinder 130 are in close contact with the guide panel 114 to the gas cylinder 10 and
  • the auxiliary cylinder 130 can be safely accommodated without flowing, and the restraining member 114b is mounted on the locking protrusion 114a formed at the end of the guide panel 114 and using a tool such as a turnbuckle, the restraining member 114b ), the gas cylinder 10 and the auxiliary cylinder 130 are brought into close contact with the gas cylinder 10 and the auxiliary cylinder 130 while the constraining member 114b is in close contact with the circumferential surface of the gas cylinder 10 and the auxiliary cylinder 130 .
  • the stopper device 100 of this embodiment includes a first stopper 30 coupled to the gas cylinder 10 so as to surround the on/off valve 12 of the gas cylinder 10 , and a gas cylinder 10 to surround the first stopper 30 . ) to prevent gas from being lost in the gap between the gas cylinder 10 and the second stopper 50 by pressing the second stopper 50 and the second stopper 50 to the first stopper 30 side.
  • the 2 It includes discharge parts 52 and 90 for discharging gas from the stopper 50 to the outside.
  • the special gas cylinder 10 for semiconductor manufacturing is formed in the shape of a long pressure vessel in the vertical direction, and an opening/closing valve 12 is installed at the upper end of the gas cylinder 10 to inject or discharge special gas by opening and closing the gas cylinder 10, , a step portion on which the opening of the first stopper 30 is seated is formed around the opening/closing valve 12 .
  • first stopper 30 Assemble the first stopper 30 to the stepped portion of the gas cylinder 10, and seat the second stopper 50 on the upper portion of the gas cylinder 10 so as to surround the first stopper 30. As the first stopper 30 is inserted, a connection portion between the first stopper 30 and the gas cylinder 10 is also disposed inside the second stopper 50 .
  • the second stopper 50 when the second stopper 50 is assembled on the upper part of the gas cylinder 10 by manipulating the pressurizing part, the special gas lost from the on/off valve 12 is first sealed by the first stopper 30, and the first stopper ( 30) and the special gas lost in the gap between the gas cylinder 10 is secondary sealing by the second stopper (50).
  • a first screw thread 14 is formed in the gas cylinder 10, and a second screw thread 32 that is bolted to the first screw thread 14 is formed in the first stopper 30, so that the first stopper 30 is a step portion. After being seated in the , the first stopper 30 and the gas cylinder 10 can be assembled or disassembled while rotating the first stopper 30 in the forward or reverse direction.
  • the opening/closing valve 12 is closed while the first sealing member 34 is interposed between the opening of the first stopper 30 and the gas cylinder 10 . It is possible to prevent the loss of the special gas lost through the gap between the first stopper 30 and the gas cylinder (10).
  • the second sealing member 54 Since the second sealing member 54 is installed in the opening of the second stopper 50 , when the second stopper 50 is in close contact with the gas cylinder 10 by the operation of the pressing part, the opening of the second stopper 50 and the gas cylinder 10 ), the second sealing member 54 is interposed in the gap between the first stopper 30 and the gas cylinder 10, and the special gas lost in the gap between the second stopper 50 and the gas cylinder 10 is to prevent it from being lost.
  • the pressing part includes a connecting shaft 36 extending from the first stopper 30 , a third screw thread 38 is formed, and a connecting shaft 36 extending outwardly of the second stopper 50 , and a fourth bolted connection with the third screw thread 38 .
  • the screw thread 72 is formed and includes a cap member 70 that is in close contact with the second stopper 50 .
  • a through-hole portion 56 is formed at the upper end of the second stopper 50 , and a connecting shaft 36 extending in an upward direction is formed at the upper end of the first stopper 30 opposite to the through-hole portion 56 .
  • a third thread 38 is formed on the shaft 36 .
  • the connecting shaft 36 protrudes upward of the second stopper 50 through the through hole 56,
  • the third screw thread 38 formed on the connecting shaft 36 and the fourth screw thread 72 formed in the opening of the cap member 70 are bolted to attach the cap member 70 to the upper portion of the second stopper 50 . make it tight
  • the present embodiment further includes a leak portion 80 for connecting or blocking the inside and the outside of the first stopper 30 to reduce the pressure difference between the inside and the outside of the first stopper 30, so the leak portion
  • a leak portion 80 for connecting or blocking the inside and the outside of the first stopper 30 to reduce the pressure difference between the inside and the outside of the first stopper 30, so the leak portion
  • the vacuum pressure inside the first stopper 30 is discharged to the outside while the first stopper ( 30) and the gas cylinder 10 can be easily separated, so that the separation operation of the first stopper 30 can be easily performed.
  • the leak portion 80 is formed with a fifth screw thread 82a to be fastened to the hole formed at the upper end of the connecting shaft 36 and having a discharge hole portion 82b connecting the inside and the outside of the first stopper 30 .
  • the leak body 82 and the leak body 82 is formed with a sixth screw thread 82c bolted to a seventh screw thread 84a is formed and includes a stopper member 84 for opening and closing the discharge hole 82b. .
  • Leak body 82, a fifth screw thread 82a is formed in the lower part, and a sixth screw thread 82c is formed in the upper part, so that the lower part of the leak body 82 is formed on the side of the first stopper 30. is bolted to, and bolted to the sixth screw thread 82c with the seventh screw thread 84a formed on the cap member 84, and the leak body 82 and the cap member 84 are coupled.
  • An exhaust hole portion 84b is formed on the upper side of the stopper member 84 to be connected to and communicate with the discharge hole portion 82b, and the operator rotates the stopper member 84 in the forward direction to rotate the stopper member 84 and the leak body 82 )
  • the exhaust hole portion 84b is disposed to face the side of the leak body 82 while the exhaust hole portion 82b and the exhaust hole portion 84b are blocked from each other.
  • the stopper member 84 when the stopper member 84 is rotated in the opposite direction, the stopper member 84 is moved toward the upper end of the leak body 82 and the exhaust hole 84b is connected to face the discharge hole 82b, and the first stopper 30 inside As the vacuum pressure of the vacuum pressure is discharged to the outside of the second stopper 50 through the discharge hole portion 82b and the exhaust hole portion 84b, the pressure difference between the inside and the outside of the first stopper 30 is reduced and the first stopper 30 can be easily separated from the gas cylinder 10 .
  • the discharge parts 52 and 90 installed in the supply pipe installed in the second stopper 50, and the leak installed in the discharge pipe installed in the second stopper 50, It includes a valve 52 and a pressure gauge 52a installed on the second stopper 50 and indicating the internal pressure of the second stopper 50 .
  • connection part of this embodiment the injection pipe 102 installed between the gas cylinder 10 and the stopper member 154, and the discharge pipe 104 installed between the auxiliary cylinder 130 and the stopper member 154, and,
  • a quick connector or quick connector that is provided at both ends of the injection pipe 102 or the discharge pipe 104, and connects the gas cylinder 10, the auxiliary cylinder 130, and the stopper member 154 and the injection pipe 102 or the discharge pipe 104 Includes couplers.
  • a stopper is installed in the gas cylinder 10 at the initial stage when the outflow of the special gas is started, and the gas cylinder 10 and the auxiliary cylinder 130 are seated and fixed on the transfer cart, and then between the stopper 100 and the auxiliary cylinder 130 .
  • the injection tube 102 is installed in the injection tube 102
  • the injection tube 102 and the stopper 100 are connected by a single pressing operation in a one-touch method by a quick connector or a quick coupler provided at both ends of the injection tube 102
  • the discharge pipe 104 and the stopper 100 and the scrubber 150 by a quick connector or quick coupler provided at both ends of the discharge pipe 104. are connected by one pressing operation.
  • the stopper 100 is installed at the initial stage when a malfunction of the gas cylinder 10 valve occurs. And, the stopper 100, the auxiliary cylinder 130, and the scrubber 150 can be easily connected within a short time, effectively preventing the pressure inside the stopper 100 from rising above the set value due to the outflow of special gas. There, it is possible to transport the gas cylinder 10 while purifying the special gas filled in the stopper 100 while in contact with the activated carbon 158 and discharging it to the atmosphere.
  • the stopper 100 and the auxiliary cylinder 130 are connected within a short time using a quick connector or a quick coupler to prevent gas from being lost from the gas cylinder 10 and transfer Therefore, it is possible to secure the golden time to prevent safety accidents caused by gas loss.
  • the scrubber 150 of this embodiment the stopper member 154 to which the discharge pipe 104 extending from the stopper 100 is connected, the activated carbon 158 is accommodated, and discharged through the gap between the activated carbon 158
  • the body case 152 coupled to the stopper member 154 so that the special gas to be passed through, and the special gas extending from the body case 152 and flowing into the body case 152 by the discharge pipe 104 are activated carbon ( 158) extends from the stopper member 154 so as to be discharged to the outside through the gap between them, and includes a plurality of exhaust pipes 159 in which ball valves are installed.
  • the injection pipe 102 extending from the auxiliary cylinder 130 is connected to the closure device 100 by a quick coupler, and the discharge pipe 104 extending from the closure device 100 is connected to the scrubber 150 by the quick coupler.
  • nitrogen gas is supplied into the stopper 100 from the auxiliary cylinder 130, so that the inside of the stopper 100 is filled with nitrogen gas. It is possible to safely proceed with the gas transfer operation.
  • the nitrogen gas and the special gas exhausted along the discharge pipe 104 come into contact with the activated carbon 158 accommodated in the main body case 152 while passing through the main body case 152 , and harmful substances contained in the special gas are converted into the activated carbon 158 . ) is adsorbed and purified, and discharged to the atmosphere along the exhaust pipe 159 .
  • the main body case 152 of this embodiment is formed in the shape of a small gas tank with an open top, and the stopper member 154 formed in the shape of a disk is coupled to the upper end of the body case 152 by a fastening member to form a small gas tank. It takes the shape of a tank.
  • the main body case 152 may be provided with a confirmation window 156 through which the replacement cycle of the activated carbon 158 can be confirmed, and the operator of the activated carbon 158 contained in the main body case 152 through the confirmation window 156 . It is possible to determine the replacement time of the activated carbon 158 by checking the color.
  • the confirmation window 156 is made of a transparent material so that the operator can check the inside of the main body case 152, and separates the confirmation window 156 from the main case 152 to inject or discharge the activated carbon 158. can be used
  • the frame member 111 of this embodiment is provided with a mounting portion 170 for mounting and fixing the scrubber 150, the mounting portion 170 is installed on the frame member 111, the body case (152) It is formed in a circular band shape so as to be in close contact with the outer wall, and the bottom surface of the holder 170 is sealed so that the lower end of the scrubber 150 is supported. (111) can be fixed.
  • the exhaust pipe 159 of this embodiment extends upwardly from the stopper member 154, extends in both directions, and then bends and extends downward, it is possible to discharge the purified special gas toward the ground, and each Since a ball valve 159a is installed in the exhaust pipe 159, even if any one of the pair of exhaust pipes 159 is blocked, the ball valve 159a installed in the other exhaust pipe 159 is opened to purify. The special gas can be discharged into the atmosphere.
  • the injection pipe 102 installed between the auxiliary cylinder 130 and the stopper 100 of this embodiment includes a flow meter for indicating the supply amount of nitrogen gas, and a regulator for maintaining a constant supply amount of nitrogen gas.
  • a control unit is installed.
  • a certain amount of nitrogen gas can be provided at a uniform pressure by the operation of the regulator, and the pressure inside the injection pipe 102 rises above the set value due to the malfunction of the regulator.
  • the operator can determine whether the nitrogen gas supply has been stopped by checking the flowmeter and pressure gauge.
  • a blow meter is installed in the discharge pipe 104 of this embodiment to display the pressure and flow rate of the exhaust gas discharged from the closure device 100 so that the operator can visually check the amount of exhaust gas and It is possible to proceed with the transfer operation while checking the pressure.
  • FIG. 10 is a perspective view showing the second opening and closing part of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention
  • FIG. 11 is a transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention
  • 12 is a perspective view showing the first opening and closing part of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention
  • FIG. 13 is an embodiment of the present invention. It is a cross-sectional view showing the first opening and closing part of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to
  • the first opening and closing part 250 and the cap member 70 that allow the first stopper 30 to be quickly coupled to the gas cylinder 10 while easily rotating. It further includes a second opening/closing part 350 that allows it to be quickly coupled to the gas cylinder 10 while being easily rotated.
  • the operator when harmful gas is lost from the opening/closing valve 12 of the gas cylinder 10, the operator takes out the first opening/closing unit 250 and the second opening/closing unit 350 stored in the stopper storage box 116a, and takes out the first stopper ( 30), the operator can hold the first opening/closing part 250 and quickly couple it to the gas cylinder 10 while rotating the first stopper 30.
  • the second stopper 50 is seated on the first stopper 30 so as to surround the first stopper 30 , and the cap member 70 is attached to the connecting shaft protruding through the second stopper 50 .
  • the second opening/closing part 350 is connected to the cap member 70 and rotated, so that the cap member 70 can be coupled to the connecting shaft 36 within a short time.
  • the first stopper 30 and the cap member 70 can be easily combined within a short time, so that harmful gases can be blocked more effectively. and it is possible to more effectively pressurize the first stopper 30 and the cap member 70, so that it is possible to effectively prevent the loss of harmful gases due to the interstitial between the first stopper 30 and the gas cylinder 10, It is possible to effectively prevent the loss of harmful gas in the gap between the cap member 70 and the second stopper 50 .
  • the first opening/closing part 250 of this embodiment is a first protrusion 252 protruding from the outer wall of the first stopper 30 in the lateral direction, and having a first detachable groove 256 concave inwardly from the end thereof. , and a first lever member 254 inserted into the first detachable groove 256 .
  • a ring-shaped first fixing groove 258 is formed on the inner side of the first removable groove 256 , and a first O-ring 254a is formed at an end of the first lever member 254 inserted into the first removable groove 256 . Since this is installed, the operator takes out a pair of first lever members 254 from the stopper storage box 116a and a pair of first protrusions 252 formed on the outer surface of the first stopper 30 in opposite directions to each other.
  • the first O-ring 254a made of an elastic material is pressed into the When the first O-ring 254a is seated on the first fixing groove 258 when it is inserted up to the inner surface of the detachable groove 256 , the insertion of the first lever member 254 is completed.
  • the operator can easily complete the coupling between the first stopper 30 and the gas cylinder while holding the pair of first lever members 254 and rotating the first stopper 30 .
  • the second opening/closing part 350 of this embodiment is a second protrusion 352 protruding from the outer wall of the cap member 70 in the lateral direction and having a second detachable groove 356 concave inwardly from the end thereof; and a second lever member 354 inserted into the second detachable groove 356 .
  • a ring-shaped second fixing groove 358 is formed in the inner portion of the second detachable groove 356, and a second O-ring 354a is formed at the end of the second lever member 354 inserted into the second detachable groove 356. Since this is installed, the operator takes out the pair of second lever members 354 from the stopper storage box 116a and the pair of second protrusions 352 formed on the outer surface of the cap member 70 in opposite directions to each other.
  • the second O-ring (354a) made of an elastic material is compressed, and the end of the second lever member 354 is inserted into the second detachable groove 356, and the end of the second lever member 354 is second detachable.
  • the groove portion 356 is inserted to the inner surface, the insertion of the second lever member 354 is completed while the second O-ring 354a is seated in the second fixing groove portion 358 .
  • the operator can easily complete the coupling between the cap member 70 and the second stopper 50 while holding the pair of second lever members 354 and rotating the cap member 70 .
  • FIG. 14 is a state diagram in which the stopper of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention is applied to gas cylinders of 44 liters, 47 liters, and 49 liters in size
  • FIG. 15 is an embodiment of the present invention.
  • the stopper of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to is a state diagram applied to gas cylinders of 440 liters and 460 liters of size, and FIG. It is a state diagram of the use in which the leak part is shown.
  • the stopper device 100 of this embodiment can be manufactured by variously changing the diameter and height of the second stopper 50 as shown in FIGS. 14 and 15, and the gas cylinder According to the shape or size of (10), it can be applied and installed in various gas cylinders (10).
  • the leak part 280 of this embodiment is installed on the connecting shaft of the first stopper 30 as shown in FIG. 16 , an exhaust hole part 282b is formed in the central part, and a coupling screw thread 282a on the outer wall. is formed, and the valve body 282 having an opening/closing thread 282c formed on the inner wall of the exhaust hole 282b, and the opening and closing member fastened to the exhaust hole 282b to be inserted or protruded into the exhaust hole 282b. (284).
  • the flow path 284b is formed in a ' ⁇ ' shape, so that the harmful gas flowing in from the side of the protrusion is moved upward and discharged to the upper surface of the opening and closing member 284 to the outside of the first stopper 30 and the second stopper 50 . is emitted as
  • the operator separates the cap member 70 from the connecting shaft 36 to expose the leak part 280 to the outside, and then rotates the opening/closing member 284.
  • the exhaust hole portion 282b is protruded outward while the opening and closing member 284 is moved to the outside, the projection formed at the bottom of the opening and closing member 284 passes the tanteok 282d and moves to the outside of the exhaust hole portion 282b.
  • the exhaust hole portion 282b is opened, and the exhaust hole portion 282b)
  • the noxious gas exhausted from the first stopper 30 along As a small amount is discharged, it is possible to prevent a safety accident that occurs when the pressure inside the first stopper 30 rises above a set value.
  • the opening and closing member 284 of this embodiment is formed with a fastening screw thread 284a on the outer surface, it is bolted to the opening and closing screw thread 282c formed in the exhaust hole 282b and rotates in the forward or reverse direction. It can be inserted or protruded in the direction.
  • a stopper can be installed while the gas cylinder is transported to the designated scrubber location to prevent the loss of the special gas.
  • nitrogen gas is supplied to one side of the stopper, and the other side of the stopper is opened to react with nitrogen gas and the discharged special gas passes through the activated carbon of the portable scrubber.
  • the transfer device for preventing leakage of toxic and combustible semiconductor special gas has been described as an example, this is only exemplary, and the transfer device of the present invention may be used for products other than the transfer device for preventing leakage of toxic and combustible semiconductor special gas.

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Abstract

The present invention comprises: a transfer cart having a seating plate on which a plurality of gas containers can be securely seated, and having a wheel member to enable a worker to hold and transfer a frame member supported by the seating plate; a stopper device which is installed to surround a valve of the gas container and prevents the diffusion of a special gas into the air when the special gas leaks from the valve; an auxiliary container seated on the seating plate and filled with nitrogen gas to supply nitrogen gas into the stopper device; a scrubber which adsorbs and purifies harmful components contained in the special gas while discharging, to the outside of the stopper device, a special gas that is lost into the stopper device and thus increases the pressure inside the stopper device; and a connecting part connecting the stopper device to the auxiliary container and connecting the stopper device to the scrubber.

Description

독성 가연성 반도체 특수가스 누설 방지용 이송장치Transport device for preventing leakage of toxic and flammable semiconductor special gas
본 발명은 독성 가연성 반도체 특수가스 누설 방지용 이송장치에 관한 것으로서, 보다 상세하게는, 가스통에 설치된 밸브의 불량으로 인체에 유해한 독성 또는 가연성 반도체 특수가스가 유실되는 경우에 지정된 스크러버가 위치한 장소까지 가스통을 이송하는 동안에 마개장치를 설치하여 특수가스의 유실을 방지할 수 있고, 특수가스의 유실이 진행되어 마개장치 내부의 압력이 설정치 이상으로 상승되면 마개장치 일측으로 질소가스를 공급하고, 마개장치 타측을 개방하여 질소가스와 반응하여 배출되는 특수가스가 휴대용 스크러버를 통과한 후에 대기 중으로 배출되도록 하여 특수가스 유출에 의한 안전사고를 예방할 수 있으며, 질소가스 공급을 위해 연결되는 보조통과 마개장치를 퀵커넥터를 이용하여 신속하게 연결할 수 있어 가스 유출이 시작되는 초기에 안전사고 방지를 위한 골든타임을 확보할 수 있는 독성 가연성 반도체 특수가스 누설 방지용 이송장치에 관한 것이다.The present invention relates to a transport device for preventing leakage of toxic and combustible semiconductor special gas, and more particularly, when a toxic or combustible semiconductor special gas harmful to the human body is lost due to a failure of a valve installed in the gas cylinder, the gas cylinder is delivered to the designated scrubber location. During transport, a stopper can be installed to prevent the loss of special gas, and when the loss of special gas progresses and the pressure inside the stopper rises above the set value, nitrogen gas is supplied to one side of the stopper and the other side of the stopper is closed. It is possible to prevent safety accidents due to the leakage of special gas by allowing the special gas that is released and reacted with nitrogen gas to be discharged into the atmosphere after passing through the portable scrubber. It relates to a transport device for preventing leakage of toxic and combustible semiconductor special gas, which can be connected quickly by using and can secure a golden time to prevent safety accidents at the initial stage of gas leakage.
일반적으로 반도체 제조 분야 등에서 사용되고 있는 NF3, NH3, Cl2, B2H6, CF4, HCl, CO2, F2, PH3, DCS와 같은 특수가스는 상온에서 액체 상태(액화가스상태)로 가스탱크 내부에 저장되어 있고, 이들 가스가 가스탱크 내부에서 안전하게 유지 관리되는 상태에서 가스공급라인을 통해 반도체 제조공정의 프로세스 챔버로 공급된다. Special gases such as NF 3 , NH 3 , Cl 2 , B 2 H 6 , CF4, HCl, CO2, F2, PH3, and DCS, which are generally used in the semiconductor manufacturing field, are stored in a liquid state (liquefied gas state) at room temperature in a gas tank. It is stored inside, and these gases are supplied to the process chamber of the semiconductor manufacturing process through a gas supply line in a state where they are safely maintained inside the gas tank.
이때, 상기와 같이 반도체 제조공정에서 사용되는 특수가스를 혼합하기 위하여 종래에는 특수가스가 혼합된 가스탱크를 별도의 혼합탱크에서 하루 정도의 시간동안 자연 방치하는 방법을 취하였다.At this time, in order to mix the special gas used in the semiconductor manufacturing process as described above, in the related art, a gas tank in which the special gas is mixed is naturally left in a separate mixing tank for about a day.
그러나 이러한 방법은 가스를 혼합하기 위하여 많은 시간이 소요되고, 이렇게 의미 없이 지나가는 시간동안 가스를 제대로 공급받지 못하면 반도체 생산에 막대한 지장을 초래하게 된다.However, this method takes a lot of time to mix the gas, and if the gas is not supplied properly during this meaningless time, it causes a huge hindrance to semiconductor production.
이러한 문제점 때문에 최근에는 가스탱크를 회전시켜 가스탱크 내부의 특수가스를 혼합하는 장치가 개발되었으나, 이 혼합장치는 일정높이에 형성된 회전바 위에 가스탱크를 눕혀놓고 회전바를 회전시킴으로써 가스탱크도 같이 회전시키는 방식을 취하고 있다.Due to this problem, a device for mixing a special gas inside a gas tank by rotating a gas tank has recently been developed. taking a method
본 발명의 배경기술은 대한민국 등록특허공보 제10-0873218호(2008년 12월 10일 공고, 발명의 명칭 : 반도체용 특수가스 혼합기)에 개시되어 있다.Background art of the present invention is disclosed in Republic of Korea Patent Publication No. 10-0873218 (December 10, 2008 announcement, title of invention: special gas mixer for semiconductors).
종래기술에 따른 특수가스용 가스탱크는, 특수가스가 유실되는 사고가 발생되는 경우에 가스탱크의 밸브로부터 유실되는 특수가스가 대기 중으로 확산되는 것을 방지할 수 있는 별도의 기술구성이 구비되지 않기 때문에 인명 피해 또는 재산 피해는 방지하기 어렵고, 가스탱크의 밸브에 마개장치를 설치하는 경우에도 마개장치 내부의 압력이 상승되어 마개장치가 파손되면서 특수가스가 대기 중으로 확산될 수 있는 문제점이 있다.Since the gas tank for special gas according to the prior art does not have a separate technical configuration that can prevent the special gas lost from the valve of the gas tank from spreading into the atmosphere when an accident in which the special gas is lost is not provided. It is difficult to prevent personal injury or property damage, and even when the stopper is installed on the valve of the gas tank, the pressure inside the stopper rises and the stopper is damaged and the special gas can be diffused into the atmosphere.
따라서 이를 개선할 필요성이 요청된다.Therefore, there is a need to improve it.
본 발명은 가스통에 설치된 밸브의 불량 및 가스통과 밸브의 조립불량으로 인체에 유해한 독성 또는 가연성 반도체 특수가스가 유실되는 경우에 지정된 스크러버가 위치한 장소까지 가스통을 이송하는 동안에 마개장치를 설치하여 특수가스의 유실을 방지할 수 있고, 특수가스의 유실이 진행되어 마개장치 내부의 압력이 설정치 이상으로 상승되면 마개장치 일측으로 질소가스를 공급하고, 마개장치 타측을 개방하여 질소가스와 반응하여 배출되는 특수가스가 휴대용 스크러버를 통과한 후에 대기 중으로 배출되도록 하여 특수가스 유출에 의한 안전사고를 예방할 수 있으며, 질소가스 공급을 위해 연결되는 보조통과 마개장치를 퀵커넥터를 이용하여 신속하게 연결할 수 있어 가스 유출이 시작되는 초기에 안전사고 방지를 위한 골든타임을 확보할 수 있는 독성 가연성 반도체 특수가스 누설 방지용 이송장치를 제공하는데 그 목적이 있다.According to the present invention, in the case where toxic or combustible semiconductor special gas harmful to the human body is lost due to a defective valve installed in the gas cylinder or a defective assembly of the gas cylinder and the valve, a stopper is installed while the gas cylinder is transported to the location where the designated scrubber is located. It can prevent loss, and when the pressure inside the stopper rises above the set value due to the loss of special gas, nitrogen gas is supplied to one side of the stopper, and the other side of the stopper is opened to react with nitrogen gas and discharged. After passing through the portable scrubber, it is discharged into the atmosphere to prevent safety accidents caused by the leakage of special gas. The purpose of this is to provide a transport device for preventing leakage of toxic and combustible semiconductor special gas that can secure the golden time to prevent safety accidents at the initial stage.
본 발명은, 복수 개의 가스통이 안착될 수 있는 안착플레이트가 구비되고, 상기 안착플레이트가 지지되는 프레임부재를 작업자가 잡고 이송할 수 있도록 바퀴부재가 구비되는 이송대차; 상기 가스통의 밸브를 감싸도록 설치되고, 상기 밸브로부터 특수가스가 유출되면 특수가스가 대기 중으로 확산되는 것을 방지하는 마개장치; 상기 마개장치 내부로 질소가스를 공급할 수 있도록 상기 안착플레이트에 안착되고 질소가스가 충진되는 보조통; 상기 마개장치 내부에 유실되어 상기 마개장치 내부의 압력을 상승시키는 특수가스를 상기 마개장치 외부로 배출시키면서 특수가스 내부에 포함되는 유해성분을 흡착시켜 정화하는 스크러버; 및 상기 마개장치와 상기 보조통을 연결하고, 상기 마개장치와 상기 스크러버를 연결하는 연결부를 포함하는 것을 특징으로 한다.The present invention is provided with a seating plate on which a plurality of gas cylinders can be seated, and a transport cart equipped with wheel members so that an operator can hold and transport the frame member on which the seating plate is supported; a stopper installed to surround the valve of the gas cylinder, and preventing the special gas from being diffused into the atmosphere when the special gas is discharged from the valve; an auxiliary container seated on the seating plate and filled with nitrogen gas so as to supply nitrogen gas to the inside of the stopper; a scrubber for purifying by adsorbing harmful components contained in the special gas while discharging the special gas that is lost inside the closure device and increases the pressure inside the closure device to the outside of the closure device; And it characterized in that it comprises a connecting portion for connecting the stopper device and the auxiliary tube, and connecting the stopper device and the scrubber.
또한, 본 발명의 상기 연결부는, 상기 가스통과 상기 마개부재 사이에 설치되는 주입관; 상기 보조통과 상기 마개부재 사이에 설치되는 배출관; 및 상기 주입관 또는 상기 배출관의 양단부에 구비되고, 상기 가스통, 상기 보조통 및 상기 마개부재와 상기 주입관 또는 상기 배출관을 연결하는 퀵커플러를 포함하는 것을 특징으로 한다.In addition, the connection part of the present invention, an injection pipe installed between the gas cylinder and the stopper member; a discharge pipe installed between the auxiliary tube and the stopper member; and a quick coupler provided at both ends of the injection pipe or the discharge pipe and connecting the gas cylinder, the auxiliary cylinder, and the stopper member and the injection pipe or the discharge pipe.
또한, 본 발명의 상기 안착플레이트 또는 상기 프레임부재에는 상기 가스통 또는 상기 보조통에 밀착되어 상기 가스통 또는 상기 보조통을 지지하는 가이드패널이 구비되고, 상기 가이드패널에는 상기 가스통과 상기 보조통을 동시에 묶어 상기 가스통과 상기 보조통이 유동되는 것을 방지하는 구속부재를 연결하는 걸림돌기가 구비되는 것을 특징으로 한다.In addition, the seating plate or the frame member of the present invention is provided with a guide panel in close contact with the gas cylinder or the auxiliary cylinder to support the gas cylinder or the auxiliary cylinder, and the guide panel binds the gas cylinder and the auxiliary cylinder at the same time. It is characterized in that the gas cylinder and the auxiliary cylinder is provided with a locking protrusion connecting the constraining member to prevent the flow.
또한, 본 발명의 상기 스크러버는, 상기 마개장치로부터 연장되는 상기 배출관이 연결되는 마개부재; 활성탄이 수납되고, 활성탄 사이의 간격을 통과하여 배출되는 특수가스가 통과되도록 상기 마개부재에 결합되는 본체케이스; 및 상기 본체케이스로부터 연장되고, 상기 배출관에 의해 상기 본체케이스 내부로 유입되는 특수가스가 활성탄 사이의 간격을 통과하여 외부로 배출되도록 상기 마개부재로부터 연장되고, 볼밸브가 설치되는 복수 개의 배기관을 포함하므로 1개의 배기관이 불량일 때 다른쪽 배기관의 개폐구를 열어 배기작업을 진행할 수 있는 것을 특징으로 한다.In addition, the scrubber of the present invention, the stopper member to which the discharge pipe extending from the stopper is connected; a body case in which the activated carbon is accommodated, and coupled to the stopper member so that a special gas discharged through the gap between the activated carbons passes; and a plurality of exhaust pipes extending from the body case and extending from the stopper member so that the special gas introduced into the body case by the discharge pipe passes through the gap between the activated carbon and is discharged to the outside, and the ball valve is installed Therefore, when one exhaust pipe is defective, it is characterized in that the exhaust operation can be carried out by opening the opening of the other exhaust pipe.
또한, 본 발명은, 상기 제1마개를 손쉽게 회전시키면서 가스통에 신속하게 결합시킬 수 있도록 하는 제1개폐부; 및 상기 캡부재를 손쉽게 회전시키면서 가스통에 신속하게 결합시킬 수 있도록 하는 제2개폐부를 더 포함하는 것을 특징으로 한다.In addition, the present invention, while easily rotating the first stopper a first opening and closing portion to be quickly coupled to the gas cylinder; And it characterized in that it further comprises a second opening/closing part for allowing the cap member to be quickly coupled to the gas cylinder while easily rotating.
또한, 본 발명의 상기 제1개폐부는, 상기 제1마개의 외벽으로부터 측 방향으로 돌출되고, 단부로부터 내측 방향으로 오목하게 제1착탈홈부가 형성되는 제1돌출부; 및 상기 제1착탈홈부에 삽입되는 제1레버부재를 포함하는 것을 특징으로 한다.In addition, the first opening and closing portion of the present invention, the first protrusion protrudes in the lateral direction from the outer wall of the first stopper, the first protrusion in which a first detachable groove is formed concavely from the end in the inward direction; and a first lever member inserted into the first detachable groove portion.
또한, 본 발명의 상기 제2개폐부는, 상기 캡부재의 외벽으로부터 측 방향으로 돌출되고, 단부로부터 내측 방향으로 오목하게 제2착탈홈부가 형성되는 제2돌출부; 및 상기 제2착탈홈부에 삽입되는 제2레버부재를 포함하는 것을 특징으로 한다.In addition, the second opening and closing portion of the present invention, a second protrusion protruding from the outer wall of the cap member in the lateral direction, the second protruding portion is formed concavely in the inner direction from the end portion; and a second lever member inserted into the second detachable groove portion.
또한, 본 발명은, 상기 제1마개의 내부와 외부 사이의 압력 차이를 줄이도록 상기 제1마개의 내부와 외부를 연결 또는 차단시키는 리크부를 더 포함하는 것을 특징으로 한다.In addition, the present invention is characterized in that it further comprises a leak for connecting or blocking the inside and outside of the first stopper to reduce the pressure difference between the inside and outside of the first stopper.
본 발명에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치는, 특수가스 가스통을 수납하여 이송하는 대차에 가스통의 마개장치 내부로 질소가스를 공급하는 보조통과, 마개장치에서 배출되는 특수가스 중에 포함되는 유해물질을 제거하는 스크러버가 동시에 수납되므로 특수가스 가스통을 운반하는 동안에 마개장치 내부로 질소가스를 공급하면서 배출되는 특수가스를 정화시킬 수 있어 누출 사고가 발생된 가스통을 안전하게 이송할 수 있고, 특수가스 가스통 이송 중에 특수가스의 누출이 발생되어도 특수가스가 대기 중으로 확산되는 것을 방지할 수 있어 안전사고를 예방할 수 있는 이점이 있다.The transport device for preventing leakage of toxic and combustible semiconductor special gas according to the present invention includes an auxiliary passage for supplying nitrogen gas to the inside of the stopper of the gas cylinder to a truck that accommodates and transports a special gas gas cylinder, and harmful contained in the special gas discharged from the stopper Since the scrubber that removes substances is housed at the same time, it is possible to purify the special gas that is discharged while supplying nitrogen gas to the inside of the stopper while transporting the special gas cylinder, so that the gas cylinder in which the leak has occurred can be safely transported and the special gas cylinder Even if a special gas is leaked during transport, it can prevent the special gas from spreading into the atmosphere, thereby preventing safety accidents.
또한, 본 발명에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치는, 이송대차에 가스통 및 보조통을 인접하게 수납하는 안착플레이트 및 가이드패널이 구비되고, 가스통과 보조통을 구속하는 구속부재가 설치되므로 가스통 이송 중에 발생되는 진동에 의해 가스통과 보조통이 충돌되면서 특수가스의 누출이 발생되는 것을 방지할 수 있는 이점이 있다.In addition, the transport device for preventing leakage of toxic and combustible semiconductor special gas according to the present invention is provided with a seating plate and guide panel for accommodating the gas cylinder and the auxiliary cylinder adjacently to the conveying cart, and a restraining member for restraining the gas cylinder and the auxiliary cylinder is installed. There is an advantage in that it is possible to prevent leakage of special gas as the gas cylinder and the auxiliary cylinder collide due to vibration generated during gas cylinder transport.
또한, 본 발명에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치는, 스크러버를 이루는 본체케이스에 활성탄의 교체주기를 확인할 수 있는 확인창이 구비되므로 작업자가 활성탄의 교체여부를 육안으로 확인하여 결정할 수 있어 활성탄 교체주기를 거르지 않고 진행하여 효과적인 정화작용을 진행할 수 있고, 확인창을 개방하여 활성탄의 배출작업 또는 주입작업을 진행할 수 있는 이점이 있다.In addition, the transport device for preventing leakage of toxic and combustible semiconductor special gas according to the present invention is provided with a confirmation window for checking the replacement cycle of activated carbon in the main body case constituting the scrubber, so that the operator can visually determine whether to replace the activated carbon. There is an advantage that an effective purification action can be performed without skipping the replacement cycle, and the discharge or injection operation of activated carbon can be performed by opening the confirmation window.
또한, 본 발명에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치는, 질소가스를 공급하는 보조통과 마개장치를 연결하는 연결부에 원터치 방식으로 주입관 또는 배출관을 연결하는 퀵커넥터 또는 퀵커플러가 구비되므로 가스 누설이 발생되는 초기에 가스통에 마개장치를 설치하고, 마개장치와 보조통 및 스크러버를 손쉽게 연결할 수 있어 가스통을 지정된 장소로 옮기는데 소요되는 시간을 단축시킬 수 있고, 특수가스 유실에 의한 안전사고를 방지할 수 있어 가스 유출 초기에 안전사고를 방지할 수 있는 골든타임을 확보할 수 있는 이점이 있다.In addition, the transport device for preventing leakage of toxic and combustible semiconductor special gas according to the present invention is provided with a quick connector or a quick coupler for connecting the injection pipe or the discharge pipe in a one-touch method to the connection part connecting the auxiliary tube for supplying nitrogen gas and the stopper. A stopper is installed on the gas cylinder at the initial stage of leakage, and the stopper, auxiliary cylinder, and scrubber can be easily connected to shorten the time required to move the gas cylinder to a designated place, and to prevent safety accidents caused by loss of special gas This has the advantage of securing the golden time to prevent safety accidents in the early stages of gas leaks.
도 1은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 정면 사시도이다.1 is a front perspective view showing a transfer device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 2는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 배면 사시도이다.2 is a rear perspective view illustrating a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 3은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 정면도이다.3 is a front view showing a transfer device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 4는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 측면도이다.4 is a side view illustrating a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 5는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 평면도이다.5 is a plan view showing a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 6은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 스크러버가 도시된 도면이다.6 is a view showing a scrubber of a transfer device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 7은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 마개장치가 도시된 단면 사시도이다.7 is a cross-sectional perspective view illustrating a stopper of a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 8은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 분해 사시도이다.8 is an exploded perspective view illustrating a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 9는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 리크부가 도시된 단면도이다.9 is a cross-sectional view showing a leak of a transfer device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 10은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 제2개폐부가 도시된 사시도이다.10 is a perspective view showing the second opening and closing part of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 11은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 제2개폐부가 도시된 다면도이다.11 is a cross-sectional view showing the second opening and closing portion of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 12는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 제1개폐부가 도시된 사시도이다.12 is a perspective view illustrating a first opening and closing part of a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 13은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 제1개폐부가 도시된 단면도이다.13 is a cross-sectional view showing the first opening and closing portion of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 14는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 마개장치가 44리터, 47리터, 49리터 크기의 가스통에 적용된 사용 상태도이다.14 is a state diagram in which the stopper of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention is applied to gas cylinders of 44 liters, 47 liters, and 49 liters.
도 15는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 마개장치가 440리터, 460리터 크키의 가스통에 적용된 사용 상태도이다.15 is a state diagram in which the stopper of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention is applied to gas cylinders of 440 liters and 460 liters.
도 16은 본 발명의 다른 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 리크부가 도시된 사용 상태도이다.16 is a state diagram showing a leak portion of a transfer device for preventing leakage of a toxic and combustible semiconductor special gas according to another embodiment of the present invention.
*부호의 설명* Explanation of symbols
10 : 가스통12 : 개폐밸브10: gas cylinder 12: on-off valve
14 : 제1나사산30 : 제1마개14: first thread 30: first stopper
32 : 제2나사산34 : 제1실링부재32: second thread 34: first sealing member
36 : 연결축38 : 제3나사산36: connecting shaft 38: third thread
50 : 제2마개52 : 퍼지밸브50: second stopper 52: purge valve
54 : 제2실링부재56 : 관통홀부54: second sealing member 56: through hole portion
70 : 캡부재72 : 제4나사산70: cap member 72: fourth thread
80 : 리크부82 : 리크본체80: leak part 82: leak body
82a : 제5나사산82b : 배출홀부82a: fifth thread 82b: discharge hole part
82c : 제6나사산84 : 마개부재82c: sixth thread 84: stopper member
84a : 제7나사산84b : 배기홀부84a: 7th thread 84b: exhaust hole part
90 : 공급밸브100 : 마개장치90: supply valve 100: stopper device
102 : 주입관104 : 배출관102: injection pipe 104: discharge pipe
110 : 이송대차112 : 안착플레이트110: transfer cart 112: seating plate
114 : 가이드패널114a : 걸림돌기114: guide panel 114a: stumbling block
114b : 구속부재116 : 수납대114b: restraint member 116: storage stand
118 : 바퀴부재130 : 보조통118: wheel member 130: auxiliary cylinder
150 : 스크러버152 ; 본체케이스150: scrubber 152; body case
154 : 마개부재159 : 배기관154: stopper member 159: exhaust pipe
159a : 볼밸브170 : 거치부159a: ball valve 170: mounting part
이하, 첨부된 도면들을 참조하여 본 발명에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 일 실시예를 설명한다.Hereinafter, an embodiment of a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to the present invention will be described with reference to the accompanying drawings.
이러한 과정에서 도면에 도시된 선들의 두께나 구성요소의 크기 등은 설명의 명료성과 편의상 과장되게 도시되어 있을 수 있다.In this process, the thickness of the lines or the size of the components shown in the drawings may be exaggerated for clarity and convenience of explanation.
또한, 후술되는 용어들은 본 발명에서의 기능을 고려하여 정의된 용어들로써, 이는 사용자, 운용자의 의도 또는 관례에 따라 달라질 수 있다.In addition, the terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to intentions or customs of users and operators.
그러므로 이러한 용어들에 대한 정의는 본 명세서 전반에 걸친 내용을 토대로 내려져야 할 것이다.Therefore, definitions of these terms should be made based on the content throughout this specification.
도 1은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 정면 사시도이고, 도 2는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 배면 사시도이고, 도 3은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 정면도이다.1 is a front perspective view showing a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention, and FIG. 2 is a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention. It is a rear perspective view, and FIG. 3 is a front view showing a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention.
또한, 도 4는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 측면도이고, 도 5는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 평면도이고, 도 6은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 스크러버가 도시된 도면이다.In addition, FIG. 4 is a side view showing a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention, and FIG. 5 is a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention. 6 is a view showing a scrubber of a transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
또한, 도 7은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 마개장치가 도시된 단면 사시도이고, 도 8은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 도시된 분해 사시도이고, 도 9는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 리크부가 도시된 단면도이다.In addition, FIG. 7 is a cross-sectional perspective view showing a stopper of a transport device for preventing leakage of a toxic and combustible semiconductor special gas according to an embodiment of the present invention, and FIG. 8 is a toxic and combustible semiconductor special gas leakage prevention according to an embodiment of the present invention 9 is an exploded perspective view of the transport device, and FIG. 9 is a cross-sectional view showing a leak of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention.
도 1 내지 도 9를 참조하면, 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치는, 복수 개의 가스통(10)이 안착될 수 있는 안착플레이트(112)가 구비되고, 안착프레이트가 지지되는 프레임부재(111)를 작업자가 잡고 이송할 수 있도록 바퀴부재(118)가 구비되는 이송대차(110)와, 가스통(10)의 밸브를 감싸도록 설치되고, 밸브로부터 특수가스가 유출되면 특수가스가 대기 중으로 확산되는 것을 방지하는 마개장치(100)와, 마개장치(100) 내부로 질소가스를 공급할 수 있도록 안착플레이트(112)에 안착되고 질소가스가 충진되는 보조통(130)과, 마개장치(100) 내부에 유실되어 마개장치(100) 내부의 압력을 상승시키는 특수가스를 마개장치(100) 외부로 배출시키면서 특수가스 내부에 포함되는 유해성분을 흡착시켜 정화하는 스크러버(150)와, 마개장치(100)와 보조통(130)을 연결하고, 마개장치(100)와 스크러버(150)를 연결하는 연결부(102, 104)를 포함한다.1 to 9, the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention is provided with a seating plate 112 on which a plurality of gas cylinders 10 can be seated, the seating plate is installed so as to surround the valve of the transport bogie 110 provided with the wheel member 118 and the gas cylinder 10 so that the operator can hold and transport the frame member 111 supported by the A stopper 100 for preventing the special gas from diffusing into the atmosphere, and an auxiliary cylinder 130 that is seated on the seating plate 112 and filled with nitrogen gas so as to supply nitrogen gas into the stopper 100; A scrubber 150 for purifying by adsorbing harmful components contained in the special gas while discharging the special gas that is lost inside the closure device 100 and increases the pressure inside the closure device 100 to the outside of the closure device 100 and , Connecting the stopper device 100 and the auxiliary tube 130, and includes connecting portions 102 and 104 for connecting the stopper device 100 and the scrubber 150.
따라서 반도체 특수가스가 충진되는 가스통(10)을 운반할 때에는 이송대차(110)의 안착플레이트(112)에 가스통(10)과 보조통(130)을 안착시키고, 가스통(10)과 보조통(130)이 유동되지 않도록 체인이나 벨트로 이루어지는 구속부재(114b)를 가이드패널(114)의 걸림돌기(114a)에 걸어 당기면서 구속부재(114b)를 조여 가스통(10)과 보조통(130)을 밀착된 상태로 고정시킨다.Therefore, when transporting the gas cylinder 10 filled with the semiconductor special gas, the gas cylinder 10 and the auxiliary cylinder 130 are seated on the seating plate 112 of the transfer cart 110 , and the gas cylinder 10 and the auxiliary cylinder 130 are mounted. ), the gas cylinder 10 and the auxiliary cylinder 130 are brought into close contact by tightening the constraining member 114b while hooking the constraining member 114b made of a chain or belt to the locking protrusion 114a of the guide panel 114 so as not to flow. fixed in a fixed state.
이때, 구속부재(114b)의 단부가 서로 대향되는 부위에 턴버클을 설치하여 구속부재(114b)를 당기면서 가스통(10)과 보조통(130)을 구속시킬 수 있다.At this time, it is possible to restrict the gas cylinder 10 and the auxiliary cylinder 130 while pulling the constraining member 114b by installing a turnbuckle at the portion where the ends of the constraining member 114b are opposed to each other.
또한, 본 실시예의 이송대차(110)는 마개장치 보관박스(116a)를 안착시켜 보관할 수 있는 수납대(116)를 포함하고, 프레임부재(111)의 하단으로부터 후방으로 연장되는 지지대가 구비되어 마개장치 보관박스(116a)를 수납할 수 있는 수납대(116)를 이루게 되며, 프레임부재(111)의 하단 및 수납대(116)의 단부에는 바퀴부재(118)가 설치되어 작업자가 프레임부재(111)의 상단에 설치되는 손잡이부를 잡고 이송대차(110)를 밀면서 보행하여 가스통(10)을 안전하게 이송할 수 있게 된다.In addition, the transport cart 110 of this embodiment includes a holder 116 that can seat and store the stopper storage box 116a, and is provided with a supporter extending rearward from the lower end of the frame member 111, so that the stopper is provided. The device storage box 116a forms a receiving table 116 that can accommodate it, and wheel members 118 are installed at the lower end of the frame member 111 and the end of the receiving table 116 so that an operator can use the frame member 111 ), the gas cylinder 10 can be safely transported by holding the handle installed on the upper end and walking while pushing the transport cart 110 .
안착플레이트(112) 또는 프레임부재(111)에는 가스통(10) 또는 보조통(130)에 밀착되어 가스통(10) 또는 보조통(130)을 지지하는 가이드패널(114)이 구비되고, 가이드패널(114)에는 가스통(10)과 보조통(130)을 동시에 묶어 가스통(10)과 보조통(130)이 유동되는 것을 방지하는 구속부재(114b)를 연결하는 걸림돌기(114a)가 구비된다.The seating plate 112 or the frame member 111 is provided with a guide panel 114 in close contact with the gas cylinder 10 or the auxiliary cylinder 130 to support the gas cylinder 10 or the auxiliary cylinder 130, the guide panel ( 114 is provided with a locking protrusion 114a connecting the gas cylinder 10 and the auxiliary cylinder 130 at the same time and connecting the constraining member 114b for preventing the gas cylinder 10 and the auxiliary cylinder 130 from flowing.
따라서 가스통(10) 및 보조통(130)을 이송대차(110)에 수납할 때에 가스통(10) 및 보조통(130)의 하단 및 둘레면을 가이드패널(114)에 밀착시켜 가스통(10) 및 보조통(130)이 유동되지 않고 안전하게 수납할 수 있고, 가이드패널(114)의 단부에 형성되는 걸림돌기(114a)에 구속부재(114b)를 거치하여 턴버클과 같은 공구를 사용하여 구속부재(114b)를 당기면 가스통(10)과 보조통(130) 둘레면에 구속부재(114b)가 밀착되면서 가스통(10)과 보조통(130)을 이송대차(110)에 밀착시키게 된다.Therefore, when the gas cylinder 10 and the auxiliary cylinder 130 are accommodated in the transfer cart 110, the lower end and the circumferential surface of the gas cylinder 10 and the auxiliary cylinder 130 are in close contact with the guide panel 114 to the gas cylinder 10 and The auxiliary cylinder 130 can be safely accommodated without flowing, and the restraining member 114b is mounted on the locking protrusion 114a formed at the end of the guide panel 114 and using a tool such as a turnbuckle, the restraining member 114b ), the gas cylinder 10 and the auxiliary cylinder 130 are brought into close contact with the gas cylinder 10 and the auxiliary cylinder 130 while the constraining member 114b is in close contact with the circumferential surface of the gas cylinder 10 and the auxiliary cylinder 130 .
본 실시예의 마개장치(100)는, 가스통(10)의 개폐밸브(12)를 감싸도록 가스통(10)에 결합되는 제1마개(30)와, 제1마개(30)를 감싸도록 가스통(10)에 안착되는 제2마개(50)와, 제2마개(50)를 제1마개(30) 측으로 가압하여 가스통(10)과 제2마개(50) 사이의 간격으로 가스가 유실되는 것을 방지하는 가압부와, 가스통(10)으로부터 유출되고 제1마개(30)를 통과하여 제2마개(50) 내부에 잔존하는 가스에 의해 제2마개(50) 내부의 압력이 설정치를 초과하여 상승하면 제2마개(50)로부터 가스를 외부로 배출시키는 배출부(52, 90)를 포함한다.The stopper device 100 of this embodiment includes a first stopper 30 coupled to the gas cylinder 10 so as to surround the on/off valve 12 of the gas cylinder 10 , and a gas cylinder 10 to surround the first stopper 30 . ) to prevent gas from being lost in the gap between the gas cylinder 10 and the second stopper 50 by pressing the second stopper 50 and the second stopper 50 to the first stopper 30 side. When the pressure inside the second stopper 50 rises above the set value by the pressurizing part and the gas flowing out from the gas cylinder 10 and passing through the first stopper 30 and remaining inside the second stopper 50, the 2 It includes discharge parts 52 and 90 for discharging gas from the stopper 50 to the outside.
반도체 제조용 특수가스통(10)은 수직방향으로 긴 압력용기 모양으로 형성되고, 가스통(10)의 상단에는 가스통(10)을 개폐하여 특수가스를 주입 또는 배출시킬 수 있는 개폐밸브(12)가 설치되며, 개폐밸브(12)의 주변에는 제1마개(30)의 개구부가 안착되는 단차부가 형성된다.The special gas cylinder 10 for semiconductor manufacturing is formed in the shape of a long pressure vessel in the vertical direction, and an opening/closing valve 12 is installed at the upper end of the gas cylinder 10 to inject or discharge special gas by opening and closing the gas cylinder 10, , a step portion on which the opening of the first stopper 30 is seated is formed around the opening/closing valve 12 .
가스통(10)의 단차부에 제1마개(30)를 조립하고, 제1마개(30)를 감싸도록 제2마개(50)를 가스통(10) 상부에 안착시키면 제2마개(50) 내부에 제1마개(30)가 삽입되면서 제1마개(30)와 가스통(10) 사이의 연결부위도 제2마개(50) 내부에 배치된다.Assemble the first stopper 30 to the stepped portion of the gas cylinder 10, and seat the second stopper 50 on the upper portion of the gas cylinder 10 so as to surround the first stopper 30. As the first stopper 30 is inserted, a connection portion between the first stopper 30 and the gas cylinder 10 is also disposed inside the second stopper 50 .
따라서 가압부를 조작하여 제2마개(50)를 가스통(10) 상부에 조립하면 개폐밸브(12)로부터 유실되는 특수가스는 제1마개(30)에 의해 1차 실링이 이루어지고, 제1마개(30)와 가스통(10) 사이의 간격으로 유실되는 특수가스는 제2마개(50)에 의해 2차 실링이 이루어지게 된다.Therefore, when the second stopper 50 is assembled on the upper part of the gas cylinder 10 by manipulating the pressurizing part, the special gas lost from the on/off valve 12 is first sealed by the first stopper 30, and the first stopper ( 30) and the special gas lost in the gap between the gas cylinder 10 is secondary sealing by the second stopper (50).
가스통(10)에는 제1나사산(14)이 형성되고, 제1마개(30)에는 제1나사산(14)과 볼트결합되는 제2나사산(32)이 형성되므로 제1마개(30)를 단차부에 안착시킨 후에 정방향 또는 역방향으로 제1마개(30)를 회전시키면서 제1마개(30)와 가스통(10)을 조립 또는 분해할 수 있게 된다.A first screw thread 14 is formed in the gas cylinder 10, and a second screw thread 32 that is bolted to the first screw thread 14 is formed in the first stopper 30, so that the first stopper 30 is a step portion. After being seated in the , the first stopper 30 and the gas cylinder 10 can be assembled or disassembled while rotating the first stopper 30 in the forward or reverse direction.
제1마개(30)의 개구부에는 제1실링부재(34)가 설치되므로 제1마개(30)의 개구부와 가스통(10) 사이에 제1실링부재(34)가 개재되면서 개폐밸브(12)를 통해 유실되는 특수가스가 제1마개(30)와 가스통(10) 사이의 간격으로 유실되는 것을 방지할 수 있게 된다.Since the first sealing member 34 is installed in the opening of the first stopper 30 , the opening/closing valve 12 is closed while the first sealing member 34 is interposed between the opening of the first stopper 30 and the gas cylinder 10 . It is possible to prevent the loss of the special gas lost through the gap between the first stopper 30 and the gas cylinder (10).
제2마개(50)의 개구부에는 제2실링부재(54)가 설치되므로 가압부의 작동에 의해 제2마개(50)가 가스통(10)에 밀착되면 제2마개(50)의 개구부와 가스통(10) 사이의 간격에 제2실링부재(54)가 개재되어 제1마개(30)와 가스통(10) 사이의 간격으로 유실되는 특수가스가 제2마개(50)와 가스통(10) 사이의 간격을 통해 유실되는 것을 방지할 수 있도록 한다.Since the second sealing member 54 is installed in the opening of the second stopper 50 , when the second stopper 50 is in close contact with the gas cylinder 10 by the operation of the pressing part, the opening of the second stopper 50 and the gas cylinder 10 ), the second sealing member 54 is interposed in the gap between the first stopper 30 and the gas cylinder 10, and the special gas lost in the gap between the second stopper 50 and the gas cylinder 10 is to prevent it from being lost.
가압부는, 제1마개(30)로부터 연장되고 제3나사산(38)이 형성되며 제2마개(50) 외측으로 연장되는 연결축(36)과, 제3나사산(38)과 볼트결합되는 제4나사산(72)이 형성되고 제2마개(50)에 밀착되는 캡부재(70)를 포함한다.The pressing part includes a connecting shaft 36 extending from the first stopper 30 , a third screw thread 38 is formed, and a connecting shaft 36 extending outwardly of the second stopper 50 , and a fourth bolted connection with the third screw thread 38 . The screw thread 72 is formed and includes a cap member 70 that is in close contact with the second stopper 50 .
제2마개(50)의 상단에는 관통홀부(56)가 형성되고, 관통홀부(56)에 대향되는 제1마개(30)의 상단에는 상측 방향으로 연장되는 연결축(36)이 형성되며, 연결축(36)에는 제3나사산(38)이 형성된다.A through-hole portion 56 is formed at the upper end of the second stopper 50 , and a connecting shaft 36 extending in an upward direction is formed at the upper end of the first stopper 30 opposite to the through-hole portion 56 . A third thread 38 is formed on the shaft 36 .
따라서 제1마개(30)를 감싸도록 가스통(10) 상부에 제2마개(50)를 안착시키면 연결축(36)이 관통홀부(56)를 통해 제2마개(50)의 상측으로 돌출되고, 연결축(36)에 형성되는 제3나사산(38)과 캡부재(70)의 개구부에 형성되는 제4나사산(72)을 볼트결합하여 캡부재(70)를 제2마개(50)의 상부에 밀착시킨다.Therefore, when the second stopper 50 is seated on the upper part of the gas cylinder 10 so as to surround the first stopper 30, the connecting shaft 36 protrudes upward of the second stopper 50 through the through hole 56, The third screw thread 38 formed on the connecting shaft 36 and the fourth screw thread 72 formed in the opening of the cap member 70 are bolted to attach the cap member 70 to the upper portion of the second stopper 50 . make it tight
제2마개(50)의 상부에 밀착되는 캡부재(70)는 제2마개(50)를 하측으로 가압하여 가스통(10)과 제2마개(50)의 개구부가 밀착되게 하므로 제1마개(30)와 가스통(10) 사이의 간격으로 유실되는 특수가스가 제2마개(50)와 가스통(10) 사이의 간격으로 유실되는 것을 방지할 수 있게 된다.The cap member 70 in close contact with the upper portion of the second stopper 50 presses the second stopper 50 downward so that the opening of the gas cylinder 10 and the second stopper 50 comes into close contact with the first stopper 30 . ) and the special gas that is lost in the interval between the gas cylinder 10 can be prevented from being lost in the interval between the second stopper 50 and the gas cylinder 10 .
또한, 연결축(36)이 통과되는 관통홀부(56)로 유실되는 특수가스는 연결축(36)에 볼트결합되는 캡부재(70)가 제2마개(50)의 상부에 말착되면서 연결축(36)과 제2마개(50) 사이의 간격으로 특수가스가 유실되는 것을 방지하여 3차 실링이 이루어지게 된다.In addition, the special gas lost to the through-hole portion 56 through which the connecting shaft 36 passes is attached to the connecting shaft ( 36) and the second stopper 50 to prevent the loss of the special gas in the gap between the third sealing is made.
또한, 본 실시예는, 제1마개(30)의 내부와 외부 사이의 압력 차이를 줄이도록 제1마개(30)의 내부와 외부를 연결 또는 차단시키는 리크부(80)를 더 포함하므로 리크부(80)를 조작하여 제1마개(30)의 내부와 외부가 연결되어 통하는 상태를 이룬 후에 제1마개(30)를 가스통(10)에 조립하면 제1마개(30) 내부의 압력이 필요 이상으로 상승되는 것을 방지할 수 있어 제1마개(30)의 조립을 용이하게 행할 수 있게 된다.In addition, the present embodiment further includes a leak portion 80 for connecting or blocking the inside and the outside of the first stopper 30 to reduce the pressure difference between the inside and the outside of the first stopper 30, so the leak portion When the first stopper 30 is assembled to the gas cylinder 10 after the inside and outside of the first stopper 30 are connected and communicated by manipulating 80, the pressure inside the first stopper 30 is more than necessary. It is possible to prevent it from rising to the top, so that it is possible to easily assemble the first stopper 30 .
제1마개(30)를 가스통(10)으로부터 분리시킬 때에는 제1마개(30) 내부의 형성되는 진공압에 의해 제1마개(30)와 가스통(10) 사이의 분리가 용이하게 이루어지지 않는 경우가 있는데, 본 실시예는, 작업자가 리크부(80)를 조작하여 제1마개(30)의 내부와 외부를 연결시키면 제1마개(30) 내부의 진공압이 외부로 배출되면서 제1마개(30)와 가스통(10)이 쉽게 분리될 수 있어 제1마개(30)의 분리작업을 손쉽게 행할 수 있게 된다.When the first stopper 30 is separated from the gas cylinder 10, when the separation between the first stopper 30 and the gas cylinder 10 is not easily achieved by the vacuum pressure formed inside the first stopper 30 There is, in this embodiment, when the operator operates the leak portion 80 to connect the inside and the outside of the first stopper 30, the vacuum pressure inside the first stopper 30 is discharged to the outside while the first stopper ( 30) and the gas cylinder 10 can be easily separated, so that the separation operation of the first stopper 30 can be easily performed.
리크부(80)는, 연결축(36) 상단에 형성되는 홀부에 체결되도록 제5나사산(82a)이 형성되고 제1마개(30)의 내부와 외부를 연결하는 배출홀부(82b)를 구비하는 리크본체(82)와, 리크본체(82)에 형성되는 제6나사산(82c)에 볼트결합되는 제7나사산(84a)이 형성되고 배출홀부(82b)를 개폐시키는 마개부재(84)를 포함한다.The leak portion 80 is formed with a fifth screw thread 82a to be fastened to the hole formed at the upper end of the connecting shaft 36 and having a discharge hole portion 82b connecting the inside and the outside of the first stopper 30 . The leak body 82 and the leak body 82 is formed with a sixth screw thread 82c bolted to a seventh screw thread 84a is formed and includes a stopper member 84 for opening and closing the discharge hole 82b. .
리크본체(82)는, 하부에 제5나사산(82a)이 형성되고, 상부에 제6나사산(82c)이 형성되므로 리크본체(82)의 하부를 제1마개(30)의 측면에 형성되는 홀부에 볼트결합시키고, 제6나사산(82c)에 마개부재(84)에 형성되는 제7나사산(84a)과 볼트결합시키며 리크본체(82)와 마개부재(84)를 결합시킨다. Leak body 82, a fifth screw thread 82a is formed in the lower part, and a sixth screw thread 82c is formed in the upper part, so that the lower part of the leak body 82 is formed on the side of the first stopper 30. is bolted to, and bolted to the sixth screw thread 82c with the seventh screw thread 84a formed on the cap member 84, and the leak body 82 and the cap member 84 are coupled.
마개부재(84)의 측면 상부에는 배출홀부(82b)와 연결되어 통하도록 배기홀부(84b)가 형성되고, 작업자가 마개부재(84)를 정방향으로 회전시켜 마개부재(84)와 리크본체(82) 사이의 결합이 이루어지면 배기홀부(84b)가 리크본체(82)의 측면에 대향되게 배치되면서 배출홀부(82b)와 배기홀부(84b)가 서로 차단된다.An exhaust hole portion 84b is formed on the upper side of the stopper member 84 to be connected to and communicate with the discharge hole portion 82b, and the operator rotates the stopper member 84 in the forward direction to rotate the stopper member 84 and the leak body 82 ) When the coupling is made, the exhaust hole portion 84b is disposed to face the side of the leak body 82 while the exhaust hole portion 82b and the exhaust hole portion 84b are blocked from each other.
또한, 마개부재(84)를 반대로 회전시키면 마개부재(84)가 리크본체(82)의 상단 측으로 이동되면서 배기홀부(84b)가 배출홀부(82b)에 대향되도록 연결되어 제1마개(30) 내부의 진공압이 배출홀부(82b) 및 배기홀부(84b)를 통해 제2마개(50)의 외부로 배출되면서 제1마개(30)의 내부 및 외부 사이의 압력차가 감소되면서 제1마개(30)를 쉽게 가스통(10)으로부터 분리시킬 수 있게 된다.In addition, when the stopper member 84 is rotated in the opposite direction, the stopper member 84 is moved toward the upper end of the leak body 82 and the exhaust hole 84b is connected to face the discharge hole 82b, and the first stopper 30 inside As the vacuum pressure of the vacuum pressure is discharged to the outside of the second stopper 50 through the discharge hole portion 82b and the exhaust hole portion 84b, the pressure difference between the inside and the outside of the first stopper 30 is reduced and the first stopper 30 can be easily separated from the gas cylinder 10 .
또한, 본 실시예에 따른 배출부(52, 90)는, 제2마개(50)에 설치되는 공급관에 설치되는 공급밸브(90)와, 제2마개(50)에 설치되는 배출관에 설치되는 리크밸브(52)와, 제2마개(50)에 설치되고 제2마개(50)의 내부 압력을 표시하는 압력계(52a)를 포함한다.In addition, the discharge parts 52 and 90 according to this embodiment, the supply valve 90 installed in the supply pipe installed in the second stopper 50, and the leak installed in the discharge pipe installed in the second stopper 50, It includes a valve 52 and a pressure gauge 52a installed on the second stopper 50 and indicating the internal pressure of the second stopper 50 .
따라서 가스통(10)으로부터 유출되는 가스가 제1마개(30)를 통과하여 제2마개(50) 내부에 충진되는 경우에는 제2마개(50) 내부의 압력이 상승하게 되는데, 작업자가 압력계(52a)를 확인하여 제2마개(50) 내부의 압력이 설정치를 초과하게 되면 리크밸브(52)를 개방하여 마개장치(100) 내부의 가스를 배출관(104)을 따라 스크러버(150)로 공급하게 된다.Therefore, when the gas flowing out from the gas cylinder 10 passes through the first stopper 30 and is filled in the second stopper 50, the pressure inside the second stopper 50 rises, and the operator uses the pressure gauge 52a ) and when the pressure inside the second stopper 50 exceeds the set value, the leak valve 52 is opened and the gas inside the stopper 100 is supplied to the scrubber 150 along the discharge pipe 104. .
여기서, 본 실시예의 연결부는, 가스통(10)과 마개부재(154) 사이에 설치되는 주입관(102)과, 보조통(130)과 마개부재(154) 사이에 설치되는 배출관(104)과, 주입관(102) 또는 배출관(104)의 양단부에 구비되고, 가스통(10), 보조통(130) 및 마개부재(154)와 주입관(102) 또는 배출관(104)을 연결하는 퀵커넥터 또는 퀵커플러를 포함한다.Here, the connection part of this embodiment, the injection pipe 102 installed between the gas cylinder 10 and the stopper member 154, and the discharge pipe 104 installed between the auxiliary cylinder 130 and the stopper member 154, and, A quick connector or quick connector that is provided at both ends of the injection pipe 102 or the discharge pipe 104, and connects the gas cylinder 10, the auxiliary cylinder 130, and the stopper member 154 and the injection pipe 102 or the discharge pipe 104 Includes couplers.
따라서 특수가스 유출이 개시된 초기에 가스통(10)에 마개장치를 설치하고, 가스통(10)과 보조통(130)을 이송대차에 안착시켜 고정시킨 후에 마개장치(100)와 보조통(130) 사이에 주입관(102)을 설치할 때에 주입관(102)의 양단부에 구비되는 퀵커넥터 또는 퀵커플러에 의해 주입관(102)과 마개장치(100)가 원터치 방식으로 한 번의 가압작업에 의해 연결되고, 마개장치(100)와 스크러버(150) 사이에 배출관(104)을 연결할 때에 배출관(104)의 양단부에 구비되는 퀵커넥터 또는 퀵커플러에 의해 배출관(104)과 마개장치(100) 및 스크러버(150)가 한 번의 가압작업에 의해 연결된다.Therefore, a stopper is installed in the gas cylinder 10 at the initial stage when the outflow of the special gas is started, and the gas cylinder 10 and the auxiliary cylinder 130 are seated and fixed on the transfer cart, and then between the stopper 100 and the auxiliary cylinder 130 . When the injection tube 102 is installed in the injection tube 102, the injection tube 102 and the stopper 100 are connected by a single pressing operation in a one-touch method by a quick connector or a quick coupler provided at both ends of the injection tube 102, When connecting the discharge pipe 104 between the stopper 100 and the scrubber 150, the discharge pipe 104 and the stopper 100 and the scrubber 150 by a quick connector or quick coupler provided at both ends of the discharge pipe 104. are connected by one pressing operation.
상기한 바와 같이 주입관(102) 및 배출관(104)의 연결작업이 퀵커넥터 또는 퀵커플러에 의해 원터치 방식으로 이루어지기 때문에 가스통(10) 밸브의 오작동이 발생되는 초기에 마개장치(100)를 설치하고, 마개장치(100)와 보조통(130) 및 스크러버(150)를 짧은 시간 내에 손쉽게 연결할 수 있어 특수가스 유출에 의해 마개장치(100) 내부의 압력이 설정치 이상으로 상승하는 것을 효과적으로 방지할 수 있고, 마개장치(100) 내부에 충진되는 특수가스를 활성탄(158)과 접촉시키면서 정화시켜 대기 중으로 배출시키면서 가스통(10)을 이송할 수 있게 된다.As described above, since the connection operation of the injection pipe 102 and the discharge pipe 104 is performed in a one-touch method by a quick connector or a quick coupler, the stopper 100 is installed at the initial stage when a malfunction of the gas cylinder 10 valve occurs. And, the stopper 100, the auxiliary cylinder 130, and the scrubber 150 can be easily connected within a short time, effectively preventing the pressure inside the stopper 100 from rising above the set value due to the outflow of special gas. There, it is possible to transport the gas cylinder 10 while purifying the special gas filled in the stopper 100 while in contact with the activated carbon 158 and discharging it to the atmosphere.
상기한 바와 같이 가스 유출이 발생되는 초기에 퀵커넥터 또는 퀵커플러를 사용하여 마개장치(100)와 보조통(130)을 짧은 시간 내에 연결하여 가스통(10)으로부터 가스가 유실되는 것을 방지하며 이송할 수 있으므로 가스 유실에 의한 안전사고를 방지할 수 있는 골든타임을 확보할 수 있게 된다.As described above, when gas leakage occurs, the stopper 100 and the auxiliary cylinder 130 are connected within a short time using a quick connector or a quick coupler to prevent gas from being lost from the gas cylinder 10 and transfer Therefore, it is possible to secure the golden time to prevent safety accidents caused by gas loss.
본 실시예의 스크러버(150)는, 마개장치(100)로부터 연장되는 배출관(104)이 연결되는 마개부재(154)와, 활성탄(158)이 수납되고, 활성탄(158) 사이의 간격을 통과하여 배출되는 특수가스가 통과되도록 마개부재(154)에 결합되는 본체케이스(152)와, 본체케이스(152)로부터 연장되고, 배출관(104)에 의해 본체케이스(152) 내부로 유입되는 특수가스가 활성탄(158) 사이의 간격을 통과하여 외부로 배출되도록 마개부재(154)로부터 연장되고, 볼밸브가 설치되는 복수 개의 배기관(159)을 포함한다.The scrubber 150 of this embodiment, the stopper member 154 to which the discharge pipe 104 extending from the stopper 100 is connected, the activated carbon 158 is accommodated, and discharged through the gap between the activated carbon 158 The body case 152 coupled to the stopper member 154 so that the special gas to be passed through, and the special gas extending from the body case 152 and flowing into the body case 152 by the discharge pipe 104 are activated carbon ( 158) extends from the stopper member 154 so as to be discharged to the outside through the gap between them, and includes a plurality of exhaust pipes 159 in which ball valves are installed.
따라서 보조통(130)에서 연장되는 주입관(102)을 퀵커플러에 의해 마개장치(100)에 연결하고, 마개장치(100)에서 연장되는 배출관(104)을 퀵커플러에 의해 스크러버(150)에 연결한 후에 주입관(102)의 양단부에 구비되는 밸브를 개방하면 보조통(130)으로부터 질소가스가 마개장치(100) 내부로 공급되어 마개장치(100) 내부에 질소가스가 충진된 상태로 특수가스의 이송작업을 안전하게 진행할 수 있게 된다.Therefore, the injection pipe 102 extending from the auxiliary cylinder 130 is connected to the closure device 100 by a quick coupler, and the discharge pipe 104 extending from the closure device 100 is connected to the scrubber 150 by the quick coupler. After connection, when the valves provided at both ends of the injection pipe 102 are opened, nitrogen gas is supplied into the stopper 100 from the auxiliary cylinder 130, so that the inside of the stopper 100 is filled with nitrogen gas. It is possible to safely proceed with the gas transfer operation.
이후에, 가스통(10)으로부터 특수가스가 유실되어 마개장치(100) 내부의 압력이 설정치 이상으로 상승되면 작업자는 배출관(104) 양단부에 설치되는 밸브를 개방하여 마개장치(100) 내부에 충진되었던 질소가스 및 특수가스를 배출관(104)을 통해 마개장치(100) 외부로 배출시킨다.Thereafter, when the special gas is lost from the gas cylinder 10 and the pressure inside the closure device 100 rises above the set value, the operator opens the valves installed at both ends of the discharge pipe 104 to open the closure device 100. The nitrogen gas and the special gas are discharged to the outside of the stopper 100 through the discharge pipe 104 .
이때, 배출관(104)을 따라 배기되는 질소가스 및 특수가스는 본체케이스(152)를 통과하면서 본체케이스(152)에 수납되는 활성탄(158)과 접촉되면서 특수가스 중에 포함되는 유해물질이 활성탄(158)에 흡착되면서 정화되고, 배기관(159)을 따라 대기 중으로 배출된다.At this time, the nitrogen gas and the special gas exhausted along the discharge pipe 104 come into contact with the activated carbon 158 accommodated in the main body case 152 while passing through the main body case 152 , and harmful substances contained in the special gas are converted into the activated carbon 158 . ) is adsorbed and purified, and discharged to the atmosphere along the exhaust pipe 159 .
본 실시예의 본체케이스(152)는, 상부가 개방된 소형의 가스탱크 모양으로 형성되고, 원판 모양으로 형성되는 마개부재(154)가 체결부재에 의해 본체케이스(152) 상단에 결합되어 소형의 가스탱크 모양을 이루게 된다.The main body case 152 of this embodiment is formed in the shape of a small gas tank with an open top, and the stopper member 154 formed in the shape of a disk is coupled to the upper end of the body case 152 by a fastening member to form a small gas tank. It takes the shape of a tank.
본체케이스(152)에는 활성탄(158)의 교체주기를 확인할 수 있는 확인창(156)이 구비될 수 있으며, 작업자가 확인창(156)의 통해 본체케이스(152) 내부에 담겨진 활성탄(158)의 색상을 확인하여 활성탄(158) 교체시점을 결정할 수 있게 된다.The main body case 152 may be provided with a confirmation window 156 through which the replacement cycle of the activated carbon 158 can be confirmed, and the operator of the activated carbon 158 contained in the main body case 152 through the confirmation window 156 . It is possible to determine the replacement time of the activated carbon 158 by checking the color.
확인창(156)은 투명재질로 이루어져 작업자가 본체케이스(152) 내부를 확인할 수 있도록 하고, 확인창(156)을 본체케이스(152)로부터 분리시켜 활성탄(158)을 주입 또는 배출시키는 주입홀부로 사용될 수 있다.The confirmation window 156 is made of a transparent material so that the operator can check the inside of the main body case 152, and separates the confirmation window 156 from the main case 152 to inject or discharge the activated carbon 158. can be used
또한, 본 실시예의 프레임부재(111)에는 스크러버(150)를 거치하여 고정시키는 거치부(170)가 구비되고, 거치부(170)는, 프레임부재(111)에 설치되고, 본체케이스(152) 외벽에 밀착되도록 원형 띠 모양으로 형성되고, 스크러버(150)의 하단이 지지되도록 거치부(170)의 바닥면은 밀폐되므로 스크러버(150)의 하단을 거치부(170)에 삽입하여 안착시키면서 프레임부재(111)에 고정시킬 수 있게 된다.In addition, the frame member 111 of this embodiment is provided with a mounting portion 170 for mounting and fixing the scrubber 150, the mounting portion 170 is installed on the frame member 111, the body case (152) It is formed in a circular band shape so as to be in close contact with the outer wall, and the bottom surface of the holder 170 is sealed so that the lower end of the scrubber 150 is supported. (111) can be fixed.
또한, 본 실시예의 배기관(159)은, 마개부재(154)로부터 상측으로 연장되고, 양측 방향으로 연장된 후에 하측 방향으로 굴곡되어 연장되므로 지면 측으로 정화된 특수가스를 배출시킬 수 있게 되고, 각각의 배기관(159)에는 볼밸브(159a)가 설치되므로 한 쌍의 배기관(159) 중 어느 하나의 배기관(159)이 막혀도 다른 하나의 배기관(159)에 설치되는 볼밸브(159a)를 개방하여 정화된 특수가스를 대기 중으로 배출시킬 수 있게 된다.In addition, since the exhaust pipe 159 of this embodiment extends upwardly from the stopper member 154, extends in both directions, and then bends and extends downward, it is possible to discharge the purified special gas toward the ground, and each Since a ball valve 159a is installed in the exhaust pipe 159, even if any one of the pair of exhaust pipes 159 is blocked, the ball valve 159a installed in the other exhaust pipe 159 is opened to purify. The special gas can be discharged into the atmosphere.
또한, 본 실시예의 보조통(130)과 마개장치(100) 사이에 설치되는 주입관(102)에는 질소가스의 공급량을 표시하는 유량계와, 질소가스의 공급량을 일정하게 유지시키는 레귤레이터를 포함하여 이루어지는 제어부가 설치된다.In addition, the injection pipe 102 installed between the auxiliary cylinder 130 and the stopper 100 of this embodiment includes a flow meter for indicating the supply amount of nitrogen gas, and a regulator for maintaining a constant supply amount of nitrogen gas. A control unit is installed.
따라서 마개장치(100)에 질소가스를 공급할 때에 레귤레이터의 작동에 의해 일정한 양의 질소가스가 균일한 압력으로 제공될 수 있고, 레귤레이터의 오작동에 의해 주입관(102) 내부의 압력이 설정치 이상으로 상승되면 작업자가 유량계 및 압력계를 확인하여 질소가스 공급의 중단 여부를 판단할 수 있게 된다.Therefore, when supplying nitrogen gas to the stopper 100, a certain amount of nitrogen gas can be provided at a uniform pressure by the operation of the regulator, and the pressure inside the injection pipe 102 rises above the set value due to the malfunction of the regulator. In this case, the operator can determine whether the nitrogen gas supply has been stopped by checking the flowmeter and pressure gauge.
또한, 본 실시예의 배출관(104)에는 블로우 미터(Blow meter)가 설치되어 마개장치(100)로부터 배출되는 배기가스의 압력 및 유량을 작업자가 육안으로 확인할 수 있도록 표시하므로 작업자는 배기가스의 배출량 및 압력을 확인하면서 이송작업을 진행할 수 있게 된다.In addition, a blow meter is installed in the discharge pipe 104 of this embodiment to display the pressure and flow rate of the exhaust gas discharged from the closure device 100 so that the operator can visually check the amount of exhaust gas and It is possible to proceed with the transfer operation while checking the pressure.
도 10은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 제2개폐부가 도시된 사시도이고, 도 11은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 제2개폐부가 도시된 다면도이고, 도 12는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 제1개폐부가 도시된 사시도이고, 도 13은 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 제1개폐부가 도시된 단면도이다.10 is a perspective view showing the second opening and closing part of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention, and FIG. 11 is a transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention 12 is a perspective view showing the first opening and closing part of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention, and FIG. 13 is an embodiment of the present invention. It is a cross-sectional view showing the first opening and closing part of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to
도 10 내지 도 13을 참조하면, 본 실시예는, 제1마개(30)를 손쉽게 회전시키면서 가스통(10)에 신속하게 결합시킬 수 있도록 하는 제1개폐부(250)와, 캡부재(70)를 손쉽게 회전시키면서 가스통(10)에 신속하게 결합시킬 수 있도록 하는 제2개폐부(350)를 더 포함한다.10 to 13 , in this embodiment, the first opening and closing part 250 and the cap member 70 that allow the first stopper 30 to be quickly coupled to the gas cylinder 10 while easily rotating. It further includes a second opening/closing part 350 that allows it to be quickly coupled to the gas cylinder 10 while being easily rotated.
따라서 가스통(10)의 개폐밸브(12)로부터 유해가스가 유실되는 경우에는 작업자는 마개장치 보관박스(116a)에 수납된 제1개폐부(250) 및 제2개폐부(350)를 꺼내어 제1마개(30)에 체결한 후에 작업자가 제1개폐부(250)를 잡고 제1마개(30)를 회전시키면서 신속하게 가스통(10)에 결합시킬 수 있게 된다.Therefore, when harmful gas is lost from the opening/closing valve 12 of the gas cylinder 10, the operator takes out the first opening/closing unit 250 and the second opening/closing unit 350 stored in the stopper storage box 116a, and takes out the first stopper ( 30), the operator can hold the first opening/closing part 250 and quickly couple it to the gas cylinder 10 while rotating the first stopper 30.
이후에, 제1마개(30)를 감싸도록 제2마개(50)를 제1마개(30) 상부에 안착시키고, 제2마개(50)를 관통하여 돌출되는 연결축에 캡부재(70)를 안착시킨 후에 제2개폐부(350)를 캡부재(70)에 연결하여 회전시키면서 캡부재(70)를 짧은 시간 내에 연결축(36)과 결합시킬 수 있게 된다.Thereafter, the second stopper 50 is seated on the first stopper 30 so as to surround the first stopper 30 , and the cap member 70 is attached to the connecting shaft protruding through the second stopper 50 . After being seated, the second opening/closing part 350 is connected to the cap member 70 and rotated, so that the cap member 70 can be coupled to the connecting shaft 36 within a short time.
상기한 바와 같이 제1개폐부(250) 및 제2개폐부(350)를 사용하여 제1마개(30) 및 캡부재(70)를 손쉽게 짧은 시간 내에 결합시킬 수 있게 되므로 유해가스가 보다 효과적으로 차단될 수 있게 되고, 제1마개(30) 및 캡부재(70)를 보다 효과적으로 가압할 수 있게 되어 제1마개(30)와 가스통(10) 사이의 간겨으로 유해가스가 유실되는 것을 효과적으로 방지할 수 있고, 캡부재(70)와 제2마개(50) 사이의 간격으로 유해가스가 유실되는 것을 효과적으로 방지할 수 있게 된다.As described above, by using the first opening and closing part 250 and the second opening and closing part 350, the first stopper 30 and the cap member 70 can be easily combined within a short time, so that harmful gases can be blocked more effectively. and it is possible to more effectively pressurize the first stopper 30 and the cap member 70, so that it is possible to effectively prevent the loss of harmful gases due to the interstitial between the first stopper 30 and the gas cylinder 10, It is possible to effectively prevent the loss of harmful gas in the gap between the cap member 70 and the second stopper 50 .
본 실시예의 제1개폐부(250)는, 제1마개(30)의 외벽으로부터 측 방향으로 돌출되고, 단부로부터 내측 방향으로 오목하게 제1착탈홈부(256)가 형성되는 제1돌출부(252)와, 제1착탈홈부(256)에 삽입되는 제1레버부재(254)를 포함한다.The first opening/closing part 250 of this embodiment is a first protrusion 252 protruding from the outer wall of the first stopper 30 in the lateral direction, and having a first detachable groove 256 concave inwardly from the end thereof. , and a first lever member 254 inserted into the first detachable groove 256 .
제1착탈홈부(256)의 내측부에는 링 모양의 제1고정홈부(258)가 형성되고, 제1착탈홈부(256)에 삽입되는 제1레버부재(254)의 단부에는 제1오링(254a)이 설치되므로 작업자가 마개장치 보관박스(116a)로부터 한 쌍의 제1레버부재(254)를 꺼내어 제1마개(30)의 외측면에 서로 반대 방향으로 형성되는 한 쌍의 제1돌출부(252)에 압입하면 탄성재질로 이루어지는 제1오링(254a)이 압축되면서 제1레버부재(254)의 단부가 제1착탈홈부(256) 내부로 삽입되고, 제1레버부재(254)의 단부가 제1착탈홈부(256) 내측면까지 삽입되면 제1오링(254a)이 제1고정홈부(258)에 안착되면서 제1레버부재(254)의 삽입이 완료된다.A ring-shaped first fixing groove 258 is formed on the inner side of the first removable groove 256 , and a first O-ring 254a is formed at an end of the first lever member 254 inserted into the first removable groove 256 . Since this is installed, the operator takes out a pair of first lever members 254 from the stopper storage box 116a and a pair of first protrusions 252 formed on the outer surface of the first stopper 30 in opposite directions to each other. When the first O-ring 254a made of an elastic material is pressed into the When the first O-ring 254a is seated on the first fixing groove 258 when it is inserted up to the inner surface of the detachable groove 256 , the insertion of the first lever member 254 is completed.
이후에, 작업자는 한 쌍의 제1레버부재(254)를 잡고 제1마개(30)를 회전시키면서 제1마개(30)와 가스통 사이의 결합을 손쉽게 완료할 수 있게 된다.Thereafter, the operator can easily complete the coupling between the first stopper 30 and the gas cylinder while holding the pair of first lever members 254 and rotating the first stopper 30 .
본 실시예의 제2개폐부(350)는, 캡부재(70)의 외벽으로부터 측 방향으로 돌출되고, 단부로부터 내측 방향으로 오목하게 제2착탈홈부(356)가 형성되는 제2돌출부(352)와, 제2착탈홈부(356)에 삽입되는 제2레버부재(354)를 포함한다.The second opening/closing part 350 of this embodiment is a second protrusion 352 protruding from the outer wall of the cap member 70 in the lateral direction and having a second detachable groove 356 concave inwardly from the end thereof; and a second lever member 354 inserted into the second detachable groove 356 .
제2착탈홈부(356)의 내측부에는 링 모양의 제2고정홈부(358)가 형성되고, 제2착탈홈부(356)에 삽입되는 제2레버부재(354)의 단부에는 제2오링(354a)이 설치되므로 작업자가 마개장치 보관박스(116a)로부터 한 쌍의 제2레버부재(354)를 꺼내어 캡부재(70)의 외측면에 서로 반대 방향으로 형성되는 한 쌍의 제2돌출부(352)에 압입하면 탄성재질로 이루어지는 제2오링(354a)부가 압축되면서 제2레버부재(354)의 단부가 제2착탈홈부(356) 내부로 삽입되고, 제2레버부재(354)의 단부가 제2착탈홈부(356) 내측면까지 삽입되면 제2오링(354a)이 제2고정홈부(358)에 안착되면서 제2레버부재(354)의 삽입이 완료된다.A ring-shaped second fixing groove 358 is formed in the inner portion of the second detachable groove 356, and a second O-ring 354a is formed at the end of the second lever member 354 inserted into the second detachable groove 356. Since this is installed, the operator takes out the pair of second lever members 354 from the stopper storage box 116a and the pair of second protrusions 352 formed on the outer surface of the cap member 70 in opposite directions to each other. When press-fitted, the second O-ring (354a) made of an elastic material is compressed, and the end of the second lever member 354 is inserted into the second detachable groove 356, and the end of the second lever member 354 is second detachable. When the groove portion 356 is inserted to the inner surface, the insertion of the second lever member 354 is completed while the second O-ring 354a is seated in the second fixing groove portion 358 .
이후에, 작업자는 한 쌍의 제2레버부재(354)를 잡고 캡부재(70)를 회전시키면서 캡부재(70)와 제2마개(50) 사이의 결합을 손쉽게 완료할 수 있게 된다.Thereafter, the operator can easily complete the coupling between the cap member 70 and the second stopper 50 while holding the pair of second lever members 354 and rotating the cap member 70 .
도 14는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 마개장치가 44리터, 47리터, 49리터 크기의 가스통에 적용된 사용 상태도이고, 도 15는 본 발명의 일 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 이송장치의 마개장치가 440리터, 460리터 크키의 가스통에 적용된 사용 상태도이고, 도 16은 본 발명의 다른 실시예에 따른 독성 가연성 반도체 특수가스 누설 방지용 미송장치의 리크부가 도시된 사용 상태도이다.14 is a state diagram in which the stopper of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to an embodiment of the present invention is applied to gas cylinders of 44 liters, 47 liters, and 49 liters in size, and FIG. 15 is an embodiment of the present invention. The stopper of the transport device for preventing leakage of toxic and combustible semiconductor special gas according to is a state diagram applied to gas cylinders of 440 liters and 460 liters of size, and FIG. It is a state diagram of the use in which the leak part is shown.
도 14 내지 도 16을 참조하면, 본 실시예의 마개장치(100)는, 도 14 및 도 15에 도시된 바와 같이 제2마개(50)의 지름 및 높이가 다양하게 변경하여 제작될 수 있으며, 가스통(10)의 형상 또는 크기에 따라 다양한 가스통(10)에 적용되어 설치될 수 있게 된다.14 to 16, the stopper device 100 of this embodiment can be manufactured by variously changing the diameter and height of the second stopper 50 as shown in FIGS. 14 and 15, and the gas cylinder According to the shape or size of (10), it can be applied and installed in various gas cylinders (10).
또한, 본 실시예의 리크부(280)는, 도 16에 도시된 바와 같이 제1마개(30)의 연결축에 설치되고, 중앙부에 배기홀부(282b)가 형성되며, 외벽에 결합나사산(282a)이 형성되고, 배기홀부(282b) 내벽에 개폐나사산(282c)이 형성되는 밸브본체(282)와, 배기홀부(282b)에 체결되어 배기홀부(282b) 내측으로 삽입 또는 돌출 가능하게 설치되는 개폐부재(284)를 포함한다.In addition, the leak part 280 of this embodiment is installed on the connecting shaft of the first stopper 30 as shown in FIG. 16 , an exhaust hole part 282b is formed in the central part, and a coupling screw thread 282a on the outer wall. is formed, and the valve body 282 having an opening/closing thread 282c formed on the inner wall of the exhaust hole 282b, and the opening and closing member fastened to the exhaust hole 282b to be inserted or protruded into the exhaust hole 282b. (284).
배기홀부(282b) 내벽에는 지름이 서로 다른 홀부가 단턱(282d)에 의해 연결되는 모양으로 형성되고, 개폐부재(284)의 하부에는 지름이 좁아지는 돌기가 형성되며, 돌기의 측면으로부터 형성되는 배기유로(284b)는 'ㅗ'모양으로 형성되어 돌기의 측면으로부터 유입되는 유해가스는 상측으로 이동되어 개폐부재(284)의 상면으로 배출되어 제1마개(30) 및 제2마개(50)의 외부로 배출된다.On the inner wall of the exhaust hole 282b, hole portions having different diameters are formed to be connected by a step 282d, and a protrusion having a narrower diameter is formed in the lower portion of the opening and closing member 284, and the exhaust formed from the side of the protrusion The flow path 284b is formed in a 'ㅗ' shape, so that the harmful gas flowing in from the side of the protrusion is moved upward and discharged to the upper surface of the opening and closing member 284 to the outside of the first stopper 30 and the second stopper 50 . is emitted as
따라서 제1마개(30) 내부의 압력이 설정치 이상으로 상승되면 작업자는 캡부재(70)를 연결축(36)으로부터 분리시켜 리크부(280)를 외부로 노출시킨 후에 개폐부재(284)를 회전시키면서 배기홀부(282b) 외측으로 돌출시키면 개폐부재(284) 하단에 형성되는 돌기가 탄턱(282d)을 지나 배기홀부(282b) 외측으로 이동되면 배기홀부(282b)가 개방되고, 배기홀부(282b)를 따라 제1마개(30)로부터 배기되는 유해가스는 돌기의 둘레면으로부터 배기유로(284b)를 따라 개폐부재(284) 상단으로 이동되어 제1마개(30) 및 제2마개(50) 외측으로 소량이 배출되면서 제1마개(30) 내부의 압력이 설정치 이상으로 상승되면서 발생되는 안전사고를 예방할 수 있게 된다.Therefore, when the pressure inside the first stopper 30 rises above the set value, the operator separates the cap member 70 from the connecting shaft 36 to expose the leak part 280 to the outside, and then rotates the opening/closing member 284. When the exhaust hole portion 282b is protruded outward while the opening and closing member 284 is moved to the outside, the projection formed at the bottom of the opening and closing member 284 passes the tanteok 282d and moves to the outside of the exhaust hole portion 282b. The exhaust hole portion 282b is opened, and the exhaust hole portion 282b) The noxious gas exhausted from the first stopper 30 along As a small amount is discharged, it is possible to prevent a safety accident that occurs when the pressure inside the first stopper 30 rises above a set value.
본 실시예의 개폐부재(284)는 외면에 체결나사산(284a)이 형성되므로 배기홀부(282b)에 형성되는 개폐나사산(282c)과 볼트 결합되어 정방향 또는 역방향으로 회전시키면 배기홀부(282b) 내측 또는 외측 방향으로 삽입 또는 돌출시킬 수 있게 된다.Since the opening and closing member 284 of this embodiment is formed with a fastening screw thread 284a on the outer surface, it is bolted to the opening and closing screw thread 282c formed in the exhaust hole 282b and rotates in the forward or reverse direction. It can be inserted or protruded in the direction.
이로써, 가스통에 설치된 밸브의 불량으로 인체에 유해한 독성 또는 가연성 반도체 특수가스가 유실되는 경우에 지정된 스크러버가 위치한 장소까지 가스통을 이송하는 동안에 마개장치를 설치하여 특수가스의 유실을 방지할 수 있고, 특수가스의 유실이 진행되어 마개장치 내부의 압력이 설정치 이상으로 상승되면 마개장치 일측으로 질소가스를 공급하고, 마개장치 타측을 개방하여 질소가스와 반응하여 배출되는 특수가스가 휴대용 스크러버의 활성탄을 통과한 후에 대기 중으로 배출되도록 하여 특수가스 유출에 의한 안전사고를 예방할 수 있으며, 질소가스 공급을 위해 연결되는 보조통과 마개장치를 퀵커넥터를 이용하여 신속하게 연결할 수 있어 가스 유출이 시작되는 초기에 안전사고 방지를 위한 골든타임을 확보할 수 있는 독성 가연성 반도체 특수가스 누설 방지용 이송장치를 제공할 수 있게 된다.Accordingly, in the case of loss of toxic or combustible semiconductor special gas harmful to the human body due to a malfunction of the valve installed in the gas cylinder, a stopper can be installed while the gas cylinder is transported to the designated scrubber location to prevent the loss of the special gas. When the gas is lost and the pressure inside the stopper rises above the set value, nitrogen gas is supplied to one side of the stopper, and the other side of the stopper is opened to react with nitrogen gas and the discharged special gas passes through the activated carbon of the portable scrubber. It can be discharged to the atmosphere later to prevent safety accidents caused by the leakage of special gas, and it is possible to quickly connect the auxiliary tube and the stopper connected to the nitrogen gas supply using a quick connector, thereby preventing safety accidents at the beginning of gas leakage. It will be possible to provide a transport device for preventing leakage of toxic and combustible semiconductor special gas that can secure the golden time for
본 발명은 도면에 도시되는 일 실시예를 참고로 하여 설명되었으나, 이는 예시적인 것에 불과하며, 당해 기술이 속하는 분야에서 통상의 지식을 가진 자라면 이로부터 다양한 변형 및 균등한 타 실시예가 가능하다는 점을 이해할 것이다.Although the present invention has been described with reference to one embodiment shown in the drawings, this is merely exemplary, and various modifications and equivalent other embodiments are possible therefrom by those of ordinary skill in the art. will understand
또한, 독성 가연성 반도체 특수가스 누설 방지용 이송장치를 예로 들어 설명하였으나, 이는 예시적인 것에 불과하며, 독성 가연성 반도체 특수가스 누설 방지용 이송장치가 아닌 다른 제품에도 본 발명의 이송장치가 사용될 수 있다.In addition, although the transfer device for preventing leakage of toxic and combustible semiconductor special gas has been described as an example, this is only exemplary, and the transfer device of the present invention may be used for products other than the transfer device for preventing leakage of toxic and combustible semiconductor special gas.
따라서 본 발명의 진정한 기술적 보호범위는 아래의 특허청구범위에 의해서 정하여져야 할 것이다.Therefore, the true technical protection scope of the present invention should be defined by the following claims.

Claims (8)

  1. 복수 개의 가스통이 안착될 수 있는 안착플레이트가 구비되고, 상기 안착플레이트가 지지되는 프레임부재를 작업자가 잡고 이송할 수 있도록 바퀴부재가 구비되는 이송대차;a transport cart provided with a seating plate on which a plurality of gas cylinders can be seated, and a wheel member provided so that an operator can hold and transport the frame member on which the seating plate is supported;
    상기 가스통의 밸브를 감싸도록 설치되고, 상기 밸브로부터 특수가스가 유출되면 특수가스가 대기 중으로 확산되는 것을 방지하는 마개장치;a stopper installed to surround the valve of the gas cylinder, and preventing the special gas from being diffused into the atmosphere when the special gas is discharged from the valve;
    상기 마개장치 내부로 질소가스를 공급할 수 있도록 상기 안착플레이트에 안착되고 질소가스가 충진되는 보조통;an auxiliary container seated on the seating plate and filled with nitrogen gas so as to supply nitrogen gas to the inside of the stopper;
    상기 마개장치 내부에 유실되어 상기 마개장치 내부의 압력을 상승시키는 특수가스를 상기 마개장치 외부로 배출시키면서 특수가스 내부에 포함되는 유해성분을 흡착시켜 정화하는 스크러버; 및a scrubber for purifying by adsorbing harmful components contained in the special gas while discharging the special gas that is lost inside the closure device and increases the pressure inside the closure device to the outside of the closure device; and
    상기 마개장치와 상기 보조통을 연결하고, 상기 마개장치와 상기 스크러버를 연결하는 연결부를 포함하는 것을 특징으로 하는 독성 가연성 반도체 특수가스 누설 방지용 이송장치.A transport device for preventing leakage of toxic and combustible semiconductor special gas, characterized in that it connects the stopper and the auxiliary cylinder, and includes a connection part for connecting the stopper and the scrubber.
  2. 제1항에 있어서, 상기 연결부는,According to claim 1, wherein the connection portion,
    상기 가스통과 상기 마개부재 사이에 설치되는 주입관;an injection pipe installed between the gas cylinder and the stopper;
    상기 보조통과 상기 마개부재 사이에 설치되는 배출관; 및a discharge pipe installed between the auxiliary tube and the stopper member; and
    상기 주입관 또는 상기 배출관의 양단부에 구비되고, 상기 가스통, 상기 보조통 및 상기 마개부재와 상기 주입관 또는 상기 배출관을 연결하는 퀵커플러를 포함하는 것을 특징으로 하는 독성 가연성 반도체 특수가스 누설 방지용 이송장치.A transport device for preventing leakage of toxic and combustible semiconductor special gas, which is provided at both ends of the injection pipe or the discharge pipe, and includes a quick coupler connecting the gas cylinder, the auxiliary cylinder, and the stopper and the injection pipe or the discharge pipe .
  3. 제1항에 있어서,According to claim 1,
    상기 안착플레이트 또는 상기 프레임부재에는 상기 가스통 또는 상기 보조통에 밀착되어 상기 가스통 또는 상기 보조통을 지지하는 가이드패널이 구비되고, 상기 가이드패널에는 상기 가스통과 상기 보조통을 동시에 묶어 상기 가스통과 상기 보조통이 유동되는 것을 방지하는 구속부재를 연결하는 걸림돌기가 구비되는 것을 특징으로 하는 독성 가연성 반도체 특수가스 누설 방지용 이송장치.The seating plate or the frame member is provided with a guide panel in close contact with the gas cylinder or the auxiliary cylinder to support the gas cylinder or the auxiliary cylinder, and the guide panel binds the gas cylinder and the auxiliary cylinder at the same time to the gas cylinder and the auxiliary cylinder. A transport device for preventing leakage of toxic and combustible semiconductor special gas, characterized in that it is provided with a locking protrusion for connecting a restraining member that prevents the barrel from flowing.
  4. 제2항에 있어서, 상기 스크러버는,According to claim 2, wherein the scrubber,
    상기 마개장치로부터 연장되는 상기 배출관이 연결되는 마개부재;a stopper member to which the discharge pipe extending from the stopper is connected;
    활성탄이 수납되고, 활성탄 사이의 간격을 통과하여 배출되는 특수가스가 통과되도록 상기 마개부재에 결합되는 본체케이스; 및a body case in which the activated carbon is accommodated, and coupled to the stopper member so that a special gas discharged through the gap between the activated carbons passes; and
    상기 본체케이스로부터 연장되고, 상기 배출관에 의해 상기 본체케이스 내부로 유입되는 특수가스가 활성탄 사이의 간격을 통과하여 외부로 배출되도록 상기 마개부재로부터 연장되고, 볼밸브가 설치되는 복수 개의 배기관을 포함하는 것을 특징으로 하는 독성 가연성 반도체 특수가스 누설 방지용 이송장치.A plurality of exhaust pipes extending from the body case and extending from the stopper member so that the special gas introduced into the body case by the discharge pipe passes through the gap between the activated carbon and is discharged to the outside, and the ball valve is installed A transport device for preventing leakage of toxic and combustible semiconductor special gas, characterized in that.
  5. 제1항 또는 제4항 중 어느 한 항에 있어서,5. The method of any one of claims 1 or 4,
    상기 제1마개를 손쉽게 회전시키면서 가스통에 신속하게 결합시킬 수 있도록 하는 제1개폐부; 및a first opening/closing part for quickly coupling the first stopper to the gas cylinder while easily rotating; and
    상기 캡부재를 손쉽게 회전시키면서 가스통에 신속하게 결합시킬 수 있도록 하는 제2개폐부를 더 포함하는 것을 특징으로 하는 독성 가연성 반도체 특수가스 누설 방지용 이송장치.A transport device for preventing leakage of toxic and combustible semiconductor special gas, characterized in that it further comprises a second opening/closing part for quickly coupling the cap member to the gas cylinder while easily rotating the cap member.
  6. 제5항에 있어서, 상기 제1개폐부는,According to claim 5, The first opening and closing portion,
    상기 제1마개의 외벽으로부터 측 방향으로 돌출되고, 단부로부터 내측 방향으로 오목하게 제1착탈홈부가 형성되는 제1돌출부; 및a first protrusion protruding laterally from the outer wall of the first stopper and having a first detachable groove concave inwardly from an end thereof; and
    상기 제1착탈홈부에 삽입되는 제1레버부재를 포함하는 것을 특징으로 하는 독성 가연성 반도체 특수가스 누설 방지용 이송장치.A transport device for preventing leakage of toxic and combustible semiconductor special gas, characterized in that it comprises a first lever member inserted into the first removable groove portion.
  7. 제5항에 있어서, 상기 제2개폐부는,The method of claim 5, wherein the second opening and closing portion,
    상기 캡부재의 외벽으로부터 측 방향으로 돌출되고, 단부로부터 내측 방향으로 오목하게 제2착탈홈부가 형성되는 제2돌출부; 및a second protrusion protruding laterally from the outer wall of the cap member and having a second detachable groove concave inwardly from the end thereof; and
    상기 제2착탈홈부에 삽입되는 제2레버부재를 포함하는 것을 특징으로 하는 독성 가연성 반도체 특수가스 누설 방지용 이송장치.A transport device for preventing leakage of toxic and combustible semiconductor special gas, characterized in that it comprises a second lever member inserted into the second detachable groove portion.
  8. 제5항에 있어서,6. The method of claim 5,
    상기 제1마개의 내부와 외부 사이의 압력 차이를 줄이도록 상기 제1마개의 내부와 외부를 연결 또는 차단시키는 리크부를 더 포함하는 것을 특징으로 하는 독성 가연성 반도체 특수가스 누설 방지용 이송장치.Toxic and combustible semiconductor special gas leakage prevention transfer device, characterized in that it further comprises a leak for connecting or blocking the inside and outside of the first stopper to reduce the pressure difference between the inside and outside of the first stopper.
PCT/KR2020/012562 2020-04-09 2020-09-17 Transfer apparatus for preventing leakage of toxic combustible semiconductor special gas WO2021206237A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230099470A1 (en) * 2021-09-29 2023-03-30 Inosystems Hospital cart for transporting a cylinder of gas, in particular of medical no

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5086804A (en) * 1991-01-23 1992-02-11 Solkatronic Chemicals, Inc. Emergency security device for head of a leaking gas cylinder
DE10359313B3 (en) * 2003-12-17 2005-07-14 Federal-Mogul Nürnberg GmbH Safety device for gas cylinder is in form of protective cover in region of cylinder on fittings side
KR100907697B1 (en) * 2007-03-14 2009-07-14 주식회사 카엘 Gas scrubber
KR101724687B1 (en) * 2016-03-31 2017-04-07 더블유아이씨 주식회사 Closure device for special gas tank used making semiconductor
KR20190104760A (en) * 2018-03-02 2019-09-11 김현식 Carriage for gas cutting apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN207438127U (en) 2017-07-07 2018-06-01 合肥瑞雪化工科技有限公司 A kind of high pressure gas holder of automatic detection band alarm

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5086804A (en) * 1991-01-23 1992-02-11 Solkatronic Chemicals, Inc. Emergency security device for head of a leaking gas cylinder
DE10359313B3 (en) * 2003-12-17 2005-07-14 Federal-Mogul Nürnberg GmbH Safety device for gas cylinder is in form of protective cover in region of cylinder on fittings side
KR100907697B1 (en) * 2007-03-14 2009-07-14 주식회사 카엘 Gas scrubber
KR101724687B1 (en) * 2016-03-31 2017-04-07 더블유아이씨 주식회사 Closure device for special gas tank used making semiconductor
KR20190104760A (en) * 2018-03-02 2019-09-11 김현식 Carriage for gas cutting apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230099470A1 (en) * 2021-09-29 2023-03-30 Inosystems Hospital cart for transporting a cylinder of gas, in particular of medical no
US12012140B2 (en) * 2021-09-29 2024-06-18 Inosystems Hospital cart for transporting a cylinder of gas, in particular of medical NO

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