WO2021198841A1 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
WO2021198841A1
WO2021198841A1 PCT/IB2021/052351 IB2021052351W WO2021198841A1 WO 2021198841 A1 WO2021198841 A1 WO 2021198841A1 IB 2021052351 W IB2021052351 W IB 2021052351W WO 2021198841 A1 WO2021198841 A1 WO 2021198841A1
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WIPO (PCT)
Prior art keywords
circuit
transistor
insulator
conductor
data
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Ceased
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PCT/IB2021/052351
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English (en)
French (fr)
Japanese (ja)
Inventor
伊藤港
上妻宗広
岡本佑樹
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to US17/906,085 priority Critical patent/US20230109354A1/en
Priority to CN202180025916.0A priority patent/CN115362551A/zh
Priority to JP2022512493A priority patent/JP7630496B2/ja
Priority to KR1020227036996A priority patent/KR20220163977A/ko
Publication of WO2021198841A1 publication Critical patent/WO2021198841A1/ja
Anticipated expiration legal-status Critical
Priority to JP2025016656A priority patent/JP7829754B2/ja
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F7/00—Methods or arrangements for processing data by operating upon the order or content of the data handled
    • G06F7/38—Methods or arrangements for performing computations using exclusively denominational number representation, e.g. using binary, ternary, decimal representation
    • G06F7/48—Methods or arrangements for performing computations using exclusively denominational number representation, e.g. using binary, ternary, decimal representation using non-contact-making devices, e.g. tube, solid state device; using unspecified devices
    • G06F7/544—Methods or arrangements for performing computations using exclusively denominational number representation, e.g. using binary, ternary, decimal representation using non-contact-making devices, e.g. tube, solid state device; using unspecified devices for evaluating functions by calculation
    • G06F7/5443—Sum of products
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/06—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
    • G06N3/063—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using electronic means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F12/00—Accessing, addressing or allocating within memory systems or architectures
    • G06F12/02—Addressing or allocation; Relocation
    • G06F12/06—Addressing a physical block of locations, e.g. base addressing, module addressing, memory dedication
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/403—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh
    • G11C11/405—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells with charge regeneration common to a multiplicity of memory cells, i.e. external refresh with three charge-transfer gates, e.g. MOS transistors, per cell
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C7/00—Arrangements for writing information into, or reading information out from, a digital store
    • G11C7/10—Input/output [I/O] data interface arrangements, e.g. I/O data control circuits, I/O data buffers
    • G11C7/1006—Data managing, e.g. manipulating data before writing or reading out, data bus switches or control circuits therefor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
    • H10B41/70—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates the floating gate being an electrode shared by two or more components
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/048—Activation functions
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/04—Architecture, e.g. interconnection topology
    • G06N3/0495—Quantised networks; Sparse networks; Compressed networks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/4063—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
    • G11C11/407—Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing for memory cells of the field-effect type
    • G11C11/409—Read-write [R-W] circuits 
    • G11C11/4097—Bit-line organisation, e.g. bit-line layout, folded bit lines
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/54—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using elements simulating biological cells, e.g. neuron
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C5/00—Details of stores covered by group G11C11/00
    • G11C5/02—Disposition of storage elements, e.g. in the form of a matrix array
    • G11C5/025—Geometric lay-out considerations of storage- and peripheral-blocks in a semiconductor storage device
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/6729—Thin-film transistors [TFT] characterised by the electrodes
    • H10D30/673—Thin-film transistors [TFT] characterised by the electrodes characterised by the shapes, relative sizes or dispositions of the gate electrodes
    • H10D30/6733—Multi-gate TFTs
    • H10D30/6734—Multi-gate TFTs having gate electrodes arranged on both top and bottom sides of the channel, e.g. dual-gate TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D87/00—Integrated devices comprising both bulk components and either SOI or SOS components on the same substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02D—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
    • Y02D10/00—Energy efficient computing, e.g. low power processors, power management or thermal management

Definitions

  • one aspect of the present invention is not limited to the above technical fields.
  • the technical fields of one aspect of the present invention disclosed in the present specification and the like include semiconductor devices, imaging devices, display devices, light emitting devices, power storage devices, storage devices, display systems, electronic devices, lighting devices, input devices, and input / output devices. Devices, their driving methods, or their manufacturing methods can be mentioned as an example.
  • SoC System on Chip
  • Typical architectures include Binary Neural Network (BNN) and Ternary Neural Network (TNN), which are particularly effective for circuit scale reduction and power consumption reduction (see, for example, Patent Document 1).
  • BNN Binary Neural Network
  • TNN Ternary Neural Network
  • the product-sum operation using weight data and input data is repeated an enormous number of times, so it is necessary to hold a large amount of weight data and intermediate data in the memory cell array.
  • processing other than the product-sum operation such as activation operation and pooling operation is generally performed. Therefore, when the calculation by the AI technology is realized by the integrated circuit, there is a possibility that the increase in the circuit area for arranging the memory cell array or the dedicated calculation circuit becomes significantly large.
  • AI technology is required to speed up arithmetic processing.
  • the memory cell array reads the weight data and the intermediate data to the calculation circuit via the bit line.
  • bit lines With bit lines, the frequency of reading weight data and intermediate data increases. Therefore, the charge / discharge energy of the bit line may increase, and the power consumption may increase.
  • the arithmetic circuit and the memory cell array are arranged alternately, the area of the peripheral circuit may be significantly increased.
  • One aspect of the present invention is to provide a miniaturized semiconductor device. Alternatively, one aspect of the present invention is to provide a semiconductor device with low power consumption. Alternatively, one aspect of the present invention is to provide a semiconductor device in which the arithmetic processing speed is improved. Alternatively, one of the issues is to provide a semiconductor device having a new configuration.
  • one aspect of the present invention does not necessarily have to solve all of the above problems, as long as it can solve at least one problem. Moreover, the description of the above-mentioned problem does not prevent the existence of other problem. Issues other than these are naturally clarified from the description of the description, claims, drawings, etc., and problems other than these should be extracted from the description of the specification, claims, drawings, etc. Is possible.
  • One aspect of the present invention includes a plurality of memory circuits, a switching circuit, a first arithmetic circuit, and a second arithmetic circuit, and each of the plurality of memory circuits has a function of holding weight data.
  • the switching circuit has a function of switching the conduction state between any one of the plurality of memory circuits and the first arithmetic circuit, and the first arithmetic circuit has the input data, the weight data selected by the switching circuit, and the weight data.
  • the first output signal based on the product-sum calculation process is output to the second calculation circuit, and a plurality of memory circuits are provided in a layer laminated on the layer having the switching circuit, the first calculation circuit, and the second calculation circuit. ,
  • a semiconductor device A semiconductor device.
  • One aspect of the present invention includes a plurality of memory circuits, a switching circuit, a first arithmetic circuit, and a second arithmetic circuit, and each of the plurality of memory circuits has a function of holding weight data.
  • the switching circuit has a function of switching the conduction state between any one of the plurality of memory circuits and the first arithmetic circuit, and the first arithmetic circuit has the input data, the weight data selected by the switching circuit, and the weight data.
  • the first output signal based on the product-sum arithmetic processing of is output to the second arithmetic circuit, and the second arithmetic circuit has a function of performing activation function arithmetic processing, quantization arithmetic processing, and first pooling arithmetic processing, and has a plurality of functions.
  • the memory circuit is a semiconductor device provided in a layer laminated on a layer having a switching circuit, a first arithmetic circuit, and a second arithmetic circuit.
  • One aspect of the present invention includes a plurality of memory circuits, a switching circuit, a first arithmetic circuit, a second arithmetic circuit, and a third arithmetic circuit, and each of the plurality of memory circuits holds weight data.
  • the switching circuit has a function of switching the conduction state between any one of the plurality of memory circuits and the first arithmetic circuit, and the first arithmetic circuit is selected by the input data and the switching circuit.
  • the first output signal based on the product-sum calculation processing of the weighted data is output to the second calculation circuit, and the second calculation circuit performs activation function calculation processing, quantization calculation processing, and first pooling calculation processing.
  • the third arithmetic circuit has a function of performing the second pooling arithmetic processing of the second output signal output by the second arithmetic circuit, and a plurality of memory circuits include a switching circuit, a first arithmetic circuit and a first arithmetic circuit.
  • a semiconductor device provided in a layer laminated on a layer having two arithmetic circuits is preferable.
  • the memory circuit preferably has a semiconductor device having a first transistor, and the first transistor has a semiconductor layer having a metal oxide in a channel forming region.
  • the metal oxide is a semiconductor device containing In, Ga, and Zn.
  • the switching circuit, the first arithmetic circuit, and the second arithmetic circuit are semiconductor devices having a second transistor, and the second transistor has a semiconductor layer having silicon in a channel forming region. ..
  • One aspect of the present invention can provide a miniaturized semiconductor device. Alternatively, one aspect of the present invention can provide a semiconductor device with low power consumption. Alternatively, one aspect of the present invention can provide a semiconductor device in which the arithmetic processing speed is improved. Alternatively, a semiconductor device having a new configuration can be provided.
  • FIG. 1A and 1B are diagrams for explaining a configuration example of a semiconductor device.
  • FIG. 2 is a diagram illustrating a configuration example of a semiconductor device.
  • FIG. 3 is a diagram illustrating a configuration example of the semiconductor device.
  • 4A and 4B are diagrams for explaining a configuration example of the semiconductor device.
  • 5A and 5B are diagrams for explaining a configuration example of the semiconductor device.
  • 6A, 6B and 6C are diagrams for explaining a configuration example of the semiconductor device.
  • 7A and 7B are diagrams for explaining a configuration example of the semiconductor device.
  • FIG. 8 is a diagram illustrating a configuration example of the semiconductor device.
  • 9A and 9B are diagrams for explaining a configuration example of the semiconductor device.
  • FIG. 10 is a diagram illustrating a configuration example of a semiconductor device.
  • FIG. 11 is a diagram illustrating a configuration example of the semiconductor device.
  • FIG. 12 is a diagram illustrating a configuration example of the semiconductor device.
  • 13A and 13B are diagrams for explaining a configuration example of the semiconductor device.
  • 14A and 14B are diagrams for explaining a configuration example of the semiconductor device.
  • FIG. 15 is a diagram illustrating a configuration example of a semiconductor device.
  • 16A and 16B are diagrams for explaining a configuration example of the semiconductor device.
  • FIG. 17 is a diagram illustrating a configuration example of an arithmetic processing system.
  • FIG. 18 is a diagram illustrating a configuration example of a CPU.
  • 19A and 19B are diagrams for explaining a configuration example of a CPU.
  • FIG. 20 is a diagram showing a configuration example of a CPU.
  • 21 is a diagram showing a configuration example of a transistor.
  • 22A and 22B are diagrams showing a configuration example of a transistor.
  • 23A and 23B are diagrams for explaining a configuration example of an integrated circuit.
  • 24A and 24B are diagrams illustrating application examples of integrated circuits.
  • 25A and 25B are diagrams illustrating application examples of integrated circuits.
  • 26A, 26B and 26C are diagrams illustrating application examples of integrated circuits.
  • FIG. 27 is a diagram illustrating an application example of an integrated circuit.
  • the ordinal numbers “1st”, “2nd”, and “3rd” are added to avoid confusion of the components. Therefore, the number of components is not limited. Moreover, the order of the components is not limited. Further, for example, the component referred to in “first” in one of the embodiments of the present specification and the like is defined as another embodiment or the component referred to in “second” in the scope of claims. It is possible. Further, for example, the component mentioned in “first” in one of the embodiments of the present specification and the like may be omitted in another embodiment or in the claims.
  • the power supply potential VDD may be abbreviated as potential VDD, VDD, etc. This also applies to other components (eg, signals, voltages, circuits, elements, electrodes, wiring, etc.).
  • the code is used for identification such as "_1”, “_2”, “[n]", “[m, n]”. May be added and described.
  • the second wiring GL is described as wiring GL [2].
  • the semiconductor device refers to all devices that can function by utilizing the semiconductor characteristics.
  • a semiconductor device such as a transistor, a semiconductor circuit, an arithmetic unit, and a storage device are one aspect of the semiconductor device.
  • Display devices liquid crystal display devices, light emitting display devices, etc.
  • projection devices lighting devices
  • electro-optical devices power storage devices
  • storage devices semiconductor circuits
  • image pickup devices electronic devices, and the like may be said to have semiconductor devices.
  • FIG. 1A is a diagram for explaining the semiconductor device 10 which is one aspect of the present invention. Further, FIG. 1B is a diagram for explaining a configuration example of a calculation block included in the semiconductor device 10.
  • the semiconductor device 10 has a function as an accelerator that executes a program (also called a kernel or a kernel program) called from a host program.
  • the semiconductor device 10 can perform, for example, parallel processing of matrix operations in graphic processing, parallel processing of product-sum operations of neural networks, parallel processing of floating-point operations in scientific and technological calculations, and the like.
  • the semiconductor device 10 has a plurality of calculation blocks 20.
  • the calculation block 20 includes a memory circuit unit 30 (also referred to as a memory cell array) and a calculation circuit unit 40.
  • the memory circuit unit 30 and the arithmetic circuit unit 40 are provided in different layers in a direction substantially perpendicular to the xy plane in the drawing (in the z direction in FIG. 1A). That is, the memory circuit unit 30 and the arithmetic circuit unit 40 are provided in a stacked manner.
  • approximately vertical means a state in which the objects are arranged at an angle of 85 degrees or more and 95 degrees or less.
  • the X direction, the Y direction, and the Z direction shown in FIG. 1B and the like are directions that are orthogonal to each other or intersect with each other. Further, the X direction and the Y direction are parallel or substantially parallel to the substrate surface, and the Z direction is perpendicular or substantially perpendicular to the substrate surface.
  • the memory circuit unit 30 has a plurality of circuit blocks 31. Each circuit block 31 has a plurality of memory circuits 32. Writing and reading of data to the memory circuit 32 is controlled by the drive circuit 12 and the drive circuit 13.
  • the drive circuit 12 and the drive circuit 13 are also referred to as a data control circuit.
  • the data stored in the memory circuit 32 is data (weight data) corresponding to the weight parameter used in the product-sum operation of the neural network.
  • weight data may be analog data.
  • the layer having the memory circuit unit 30 is formed by the memory circuit 32 of the circuit block 31 in the switching circuit 41 of the arithmetic circuit unit 40 via the wirings LBL_1 to LBL_1 (also referred to as local bit line and read bit line) shown as an example. Be connected.
  • the memory circuit 32 included in the memory circuit unit 30 has a transistor (OS transistor) having an oxide semiconductor in the channel forming region.
  • the layer having the arithmetic circuit unit 40 includes a switching circuit 41, a product-sum arithmetic circuit 42, an activation function arithmetic circuit 43 which is a dedicated arithmetic circuit, a quantization arithmetic circuit 44, and a prepooling arithmetic circuit 45.
  • Control and processing such as data input / output in the arithmetic circuit unit 40 are controlled by the control circuit 14 and the processing circuit 15.
  • the control circuit 14 and the processing circuit 15 are also referred to as an arithmetic control circuit, an arithmetic processing circuit, or an arithmetic circuit.
  • the switching circuit 41 has a function of selecting the potentials of the wirings LBL_1 to LBL_1 extending from each of the plurality of circuit blocks 31 and transmitting them to the wiring GBL (also referred to as a global bit line).
  • the switching circuit 41 for example, a three-state buffer in which the state of the output potential is controlled by a control signal can be used.
  • the switching circuit 41 is preferably composed of a transistor (Si transistor) having silicon in the channel forming region. With this configuration, it is possible to switch the connection state at high speed.
  • the wirings LBL_1 to LBL_1 are wirings for transmitting weight data from the memory circuit unit 30 to the arithmetic circuit unit 40.
  • the wiring LBL is preferably shortened in order to reduce the energy consumption associated with charging / discharging. That is, it is preferable that the switching circuit 41 is arranged so as to be close to the wiring LBL (arrow extending in the z direction in the drawing) provided so as to extend in the z direction.
  • the product-sum calculation circuit 42 has a function of executing arithmetic processing such as a product-sum calculation.
  • the product-sum calculation circuit 42 may be simply referred to as an arithmetic circuit or a first arithmetic circuit.
  • the product-sum calculation circuit 42 performs a product-sum calculation on the input data input from the control circuit 14 and the weight data given to the wiring GBL.
  • the input data and weight data are preferably digital data. Digital data is less susceptible to noise. Therefore, the product-sum calculation circuit 42 is suitable for performing arithmetic processing that requires highly accurate arithmetic results.
  • the product-sum calculation circuit 42 is preferably composed of a Si transistor.
  • the activation function calculation circuit 43 has a function of performing processing based on the activation function on the data obtained by the product-sum calculation.
  • the activation function for example, a sigmoid function, a tanh function, a softmax function, a ReLU (Rectifier Liner Unit) function, a threshold function, and the like can be used.
  • the ReLU function is a function that outputs "0" when the input value is negative, and outputs the input value as it is when the input value is "0" or more.
  • the activation function calculation circuit 43 is preferably composed of a Si transistor.
  • the quantization calculation circuit 44 has a function of performing quantization calculation processing for reducing the bit width of input data for the purpose of reducing the amount of calculation in the subsequent calculation. In the product-sum operation, the bit width is increased by repeated arithmetic processing. Therefore, in the quantization calculation circuit 44, the bit width is reduced by bit-shifting the input data and rounding off the data at the position of the decimal point.
  • the quantization calculation circuit 44 is preferably composed of a Si transistor.
  • the pre-pooling calculation circuit 45 has a function of performing a part of the pooling calculation process. For example, in the case of 3 ⁇ 3 pooling, pre-pooling, pre-pooling operation processing, or first pooling operation is performed by using some numerical values instead of all numerical values in the 3 ⁇ 3 area. Sometimes called processing. Alternatively, since the pre-pooling calculation process is a calculation process that performs a part of the pooling calculation process, it may be referred to as a partial pooling calculation process or a first partial pooling calculation process. In max pooling, for example, the pre-pooling calculation circuit 45 corresponds to a circuit that extracts the maximum value of data in a part of a region, for example, one dimension, as output data of the pre-pooling calculation circuit 45.
  • the pre-pooling calculation circuit 45 is preferably composed of a Si transistor.
  • the output data obtained by the pre-pooling calculation circuit 45 is output to the processing circuit 15.
  • the pre-pooling calculation process is performed using the numerical values in the 3 ⁇ 1 region, and the pooling calculation process corresponding to 3 ⁇ 3 pooling is performed using the data obtained by the pre-pooling calculation process. This may be referred to as post-pooling, post-pooling arithmetic processing, or second pooling arithmetic processing.
  • the post-pooling calculation process is a calculation process that performs a part of the pooling calculation process, it may be referred to as a partial pooling calculation process or a second partial pooling calculation process.
  • a processing circuit having a post-pooling arithmetic circuit may be referred to as an arithmetic circuit or a third arithmetic circuit. Specific examples of arithmetic processing in the pre-pooling arithmetic circuit and the post-pooling arithmetic circuit will be described later.
  • Each circuit of the switching circuit 41, the product-sum calculation circuit 42, the activation function calculation circuit 43 which is a dedicated calculation circuit, the quantization calculation circuit 44, and the prepooling calculation circuit 45 is laminated with the OS transistor by using a Si transistor.
  • the memory circuit unit 30 composed of the OS transistor can be provided so as to be stacked with the arithmetic circuit unit 40 that can be composed of the Si transistor. Therefore, the area where the memory circuit unit 30 can be arranged can be increased without increasing the circuit area.
  • the area where the memory circuit unit 30 is provided on the substrate on which the arithmetic circuit unit 40 is provided, as an accelerator, as compared with the case where the memory circuit unit 30 and the arithmetic circuit unit 40 are arranged on the same layer.
  • the storage capacity required for arithmetic processing in the functioning semiconductor device 10 can be increased. By increasing the storage capacity, it is possible to reduce the number of times data required for arithmetic processing is transferred from the external storage device to the semiconductor device, so that power consumption can be reduced.
  • NOSRAM Nonvolatile Oxide Semiconductor RAM
  • NOSRAM refers to a memory in which the memory cell is a 2-transistor type (2T) or 3-transistor type (3T) gain cell and the access transistor is an OS transistor.
  • the OS transistor has an extremely small leakage current, that is, the current that flows between the source and drain in the off state.
  • the NOSRAM can be used as a non-volatile memory by holding the electric charge corresponding to the data in the memory circuit by using the characteristic that the leakage current is extremely small.
  • NO SRAM can read the held data without destroying it (non-destructive reading), it is suitable for parallel processing of the product-sum operation of a neural network in which a large number of data reading operations are repeated.
  • the memory circuit 32 is preferably a memory having an OS transistor such as NOSRAM or DOSRAM (hereinafter, also referred to as OS memory). Since the bandgap of the metal oxide that functions as an oxide semiconductor is 2.5 eV or more, the OS transistor has a minimum off current. As an example, voltage 3.5V between the source and the drain, at at room temperature (25 °C), 1 ⁇ less than 10 -20 A state current per channel width 1 [mu] m, less than 1 ⁇ 10 -22 A, or 1 ⁇ 10 It can be less than -24A. Therefore, the OS memory has an extremely small amount of electric charge leaked from the holding node via the OS transistor. Therefore, since the OS memory can function as a non-volatile memory circuit, power gating of the semiconductor device 10 becomes possible.
  • OS memory such as NOSRAM or DOSRAM
  • Semiconductor devices with high density and integrated transistors may generate heat due to the drive of the circuit. Due to this heat generation, the temperature of the transistor rises, which may change the characteristics of the transistor, resulting in a change in field effect mobility and a decrease in operating frequency. Since the OS transistor has a higher thermal resistance than the Si transistor, the change in the field effect mobility due to the temperature change is unlikely to occur, and the operating frequency is also unlikely to decrease. Further, the OS transistor tends to maintain the characteristic that the drain current increases exponentially with respect to the gate-source voltage even when the temperature rises. Therefore, by using the OS transistor, stable operation can be performed in a high temperature environment.
  • the metal oxides applied to the OS transistor are Zn oxide, Zn-Sn oxide, Ga-Sn oxide, In-Ga oxide, In-Zn oxide, and In-M-Zn oxide (M is: Ti, Ga, Y, Zr, La, Ce, Nd, Sn or Hf) and the like.
  • M is: Ti, Ga, Y, Zr, La, Ce, Nd, Sn or Hf
  • oxides containing indium and zinc include aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, silicon, titanium, iron, nickel, germanium, zirconium, molybdenum, lanthanum, cerium, neodymium, hafnium, tantalum, and tungsten. , Magnesium, etc., or a plurality of types may be contained.
  • the metal oxide applied to the semiconductor layer is preferably a metal oxide having a crystal portion such as CAAC-OS, CAC-OS, and nc-OS.
  • CAAC-OS is an abbreviation for c-axis-aligned crystalline oxide semiconductor ductor.
  • CAC-OS is an abbreviation for Cloud-Aligned Composite oxide semiconductor.
  • nc-OS is an abbreviation for nanocrystalline oxide semiconductor.
  • CAAC-OS has a c-axis orientation and has a distorted crystal structure in which a plurality of nanocrystals are connected in the ab plane direction.
  • the strain refers to a region in which a plurality of nanocrystals are connected in which the orientation of the lattice arrangement changes between a region in which the lattice arrangement is aligned and a region in which another lattice arrangement is aligned.
  • the CAC-OS has a function of allowing electrons (or holes) to flow as carriers and a function of not allowing electrons (or holes) as carriers to flow. By separating the function of flowing electrons and the function of not flowing electrons, both functions can be maximized. That is, by using CAC-OS in the channel formation region of the OS transistor, both a high on-current and an extremely low off-current can be realized.
  • OS transistors Since metal oxides have a large bandgap, electrons are less likely to be excited, and the effective mass of holes is large, OS transistors may be less prone to avalanche collapse than general Si transistors. .. Therefore, for example, hot carrier deterioration caused by avalanche breakdown can be suppressed. Since hot carrier deterioration can be suppressed, the OS transistor can be driven with a high drain voltage.
  • the OS transistor is a storage type transistor that has a large number of electrons as carriers. Therefore, the influence of DIBL (Drain-Induced Barrier Lowering), which is one of the short-channel effects, is smaller than that of an inverting transistor (typically, a Si transistor) having a pn junction. That is, the OS transistor has a higher resistance to the short channel effect than the Si transistor.
  • DIBL Drain-Induced Barrier Lowering
  • the OS transistor Since the OS transistor has high resistance to the short channel effect, the channel length can be reduced without deteriorating the reliability of the OS transistor. Therefore, the degree of circuit integration can be increased by using the OS transistor.
  • the drain electric field becomes stronger as the channel length becomes finer, but as mentioned above, the OS transistor is less likely to undergo avalanche breakdown than the Si transistor.
  • the gate insulating film can be made thicker than that of the Si transistor. For example, even in a fine transistor having a channel length and a channel width of 50 nm or less, it may be possible to provide a thick gate insulating film of about 10 nm. By thickening the gate insulating film, the parasitic capacitance can be reduced, so that the operating speed of the circuit can be improved. Further, by making the gate insulating film thicker, the leakage current through the gate insulating film is reduced, which leads to a reduction in static current consumption.
  • the semiconductor device 10 since the semiconductor device 10 has the memory circuit 32 which is the OS memory, the data can be held even if the supply of the power supply voltage is stopped. Therefore, the power gating of the semiconductor device 10 becomes possible, and the power consumption can be significantly reduced.
  • FIG. 2 describes a block diagram showing the entire arithmetic processing system 100 including the semiconductor device 10 that functions as an AI accelerator.
  • FIG. 2 illustrates the CPU 110 and the bus 120 in addition to the accelerator unit 130 having a plurality of semiconductor devices 10 described with reference to FIGS. 1A and 1B.
  • the CPU 110 has a CPU core 200 and a backup circuit 222.
  • the accelerator unit 130 includes a plurality of semiconductor devices 10 and a control unit 131 for controlling data input / output between the semiconductor devices 10.
  • the CPU 110 has a function of performing general-purpose processing such as execution of an operating system, control of data, execution of various operations and programs.
  • the CPU 110 has a CPU core 200.
  • the CPU core 200 corresponds to one or more CPU cores.
  • the CPU 110 has a backup circuit 222 that can hold the data in the CPU core 200 even if the supply of the power supply voltage is stopped.
  • the supply of the power supply voltage can be controlled by electrical disconnection from the power supply domain (power domain) by a power switch or the like.
  • the power supply voltage may be referred to as a drive voltage.
  • As the backup circuit 222 for example, an OS memory having an OS transistor is suitable.
  • the backup circuit 222 composed of OS transistors can be provided so as to be stacked with the CPU core 200 which can be composed of Si transistors. Since the area of the backup circuit 222 is smaller than the area of the CPU core 200, the backup circuit 222 can be arranged on the CPU core 200 without increasing the circuit area.
  • the backup circuit 222 has a function of holding register data of the CPU core 200.
  • the backup circuit 222 is also referred to as a data holding circuit. The details of the configuration of the CPU core 200 including the backup circuit 222 including the OS transistor will be described in the third embodiment.
  • the control unit 131 has a memory circuit such as an SRAM inside.
  • the control unit 131 holds the output data obtained by the plurality of semiconductor devices 10 in the memory circuit. Then, the output data MAC held in the memory circuit is output to a plurality of semiconductor devices. With this configuration, parallel calculation with an increased number of parallels can be performed using a plurality of semiconductor devices.
  • the bus 120 electrically connects the CPU 110 and the accelerator unit 130. That is, the CPU 110 and the semiconductor device 10 can transmit data via the bus 120.
  • FIG. 3 is a diagram for explaining transistors suitable for the memory circuit unit 30 and the calculation circuit unit 40 in the calculation block 20 shown in FIG. 1B.
  • the memory circuit unit 30 has a memory circuit 32.
  • the memory circuit 32 has a transistor 21.
  • the semiconductor layer 22 included in the transistor 21 as an oxide semiconductor (metal oxide), it is possible to form a memory circuit 32 composed of the OS transistor described above.
  • the arithmetic circuit unit 40 includes a switching circuit 41, a product-sum arithmetic circuit 42, an activation function arithmetic circuit 43 which is a dedicated arithmetic circuit, a quantization arithmetic circuit 44, and a prepooling arithmetic circuit 45.
  • Each circuit included in the arithmetic circuit unit 40 has a transistor 23. By using silicon as the semiconductor layer 24 of the transistor 23, each circuit of the arithmetic circuit unit 40 composed of the Si transistor described above can be used.
  • the storage capacity required for arithmetic processing in the functioning semiconductor device 10, that is, the number of memory circuits can be increased.
  • By increasing the storage capacity it is possible to reduce the number of times data required for arithmetic processing is transferred from the external storage device to the semiconductor device, so that power consumption can be reduced.
  • FIG. 4A is a block diagram for explaining data input / output of each circuit in the semiconductor device 10 of one aspect of the present invention.
  • FIG. 4A illustrates a switching circuit 41, a product-sum calculation circuit 42, an activation function calculation circuit 43 which is a dedicated calculation circuit, a quantization calculation circuit 44, and a prepooling calculation circuit 45.
  • the switching circuit 41 has a function of switching the conduction state between any one of the memory circuits 32 and the product-sum calculation circuit 42.
  • the weight data W 1 through W N are output from the data held in the memory circuit 32 to the wiring GBL in the circuit block 31 of the memory circuit section 30 (N is a natural number of 2 or more) is selected. Then, the switching circuit 41 outputs the selected weight data as the weight data W SEL to the product-sum calculation circuit 42 via the wiring GBL.
  • the product-sum calculation circuit 42 outputs data (output signal) based on the product-sum calculation process of the input data and the weight data selected by the switching circuit 41 to the dedicated calculation circuit 46.
  • the product-sum calculation circuit 42 performs a product-sum calculation based on the weight data W SEL and the input data A IN input from the control circuit 14.
  • the data MAC obtained by the product-sum calculation is output to the activation function calculation circuit 43 in the dedicated calculation circuit 46.
  • the dedicated arithmetic circuit 46 is an arithmetic processing of product-sum arithmetic processing in a neural network used for convolution arithmetic, for example, arithmetic processing based on an activation function, arithmetic processing for quantization, arithmetic processing for pooling arithmetic processing, or standardization. It is a circuit for performing arithmetic processing (normalization) for the purpose.
  • the dedicated arithmetic circuit 46 may be referred to as an arithmetic circuit or a second arithmetic circuit.
  • the dedicated arithmetic circuit 46 shows a configuration including an activation function arithmetic circuit 43, a quantization arithmetic circuit 44, and a prepooling arithmetic circuit 45, but may have other configurations.
  • the activation function calculation circuit 43 is a circuit for performing arithmetic processing based on the activation function on the input data MAC and outputting it as data FUNC obtained by the arithmetic processing based on the activation function.
  • the data FUNC is output to the quantization calculation circuit 44 in the dedicated calculation circuit 46.
  • the quantization calculation circuit 44 is a circuit for performing a quantization calculation process on the input data FUNC and outputting it as data QUA.
  • the quantization arithmetic process in order to adjust the bit width of the input data, the bit shift of the input data and the data at the position of the decimal point are rounded off.
  • the data QUA is output to the pre-pooling calculation circuit 45 in the dedicated calculation circuit 46.
  • the pre-pooling calculation circuit 45 is a circuit for outputting the pre-pooling calculation-processed data PPD by performing a part of the pooling calculation processing on the input data QUA.
  • the dedicated calculation circuit 46 can perform a part of the pooling calculation process.
  • the data PPD is output to the post pooling calculation circuit 47 included in the processing circuit 15 as shown in FIG. 4B.
  • the processing circuit 15 having the post-pooling calculation circuit 47 may be referred to as a calculation circuit or a third calculation circuit.
  • the post-pooling calculation circuit 47 is a circuit for performing arithmetic processing on the input data PPD and outputting the data PD subjected to the pooling arithmetic processing to the data QUA.
  • the processing circuit 15 can save an area as compared with the case where all the calculation processing of the pooling calculation processing is performed.
  • the data PD is used as input data A IN in the control circuit 14.
  • FIG. 5A is a diagram illustrating an example of a circuit configuration applicable to the circuit block 31 included in the memory circuit unit 30 in the semiconductor device 10 of the present invention.
  • writing word lines WWL_1 to WWL_M are arranged side by side in the matrix direction of M rows and N columns (M and N are natural numbers of 2 or more).
  • M and N are natural numbers of 2 or more.
  • the wirings LBL_1 to LBL_N are shown.
  • the memory circuit 32 connected to each word line and bit line is illustrated.
  • FIG. 5B is a diagram illustrating a circuit configuration example applicable to the memory circuit 32.
  • the memory circuit 32 includes a transistor 61, a transistor 62, a transistor 63, and a capacitance element 64 (also referred to as a capacitor).
  • One of the source and drain of the transistor 61 is connected to the writing bit line WBL.
  • the gate of the transistor 61 is connected to the writing word line WWL.
  • the other of the source or drain of the transistor 61 is connected to one electrode of the capacitive element 64 and the gate of the transistor 62.
  • One of the source or drain of the transistor 62 and the other electrode of the capacitive element 64 are connected to a wire that provides a fixed potential, eg, a ground potential.
  • the other of the source or drain of the transistor 62 is connected to one of the source or drain of the transistor 63.
  • the gate of the transistor 63 is connected to the read word line RWL.
  • the other of the source or drain of the transistor 63 is connected to the wiring LBL.
  • the wiring LBL is connected to the wiring GBL via the switching circuit 41.
  • the wiring LBL is connected to the switching circuit 41 via wiring provided so as to extend in a direction substantially perpendicular to the surface of the substrate on which the Si transistor of the arithmetic circuit unit 40 is provided.
  • the circuit configuration of the memory circuit 32 shown in FIG. 5B corresponds to a NO SRAM of a 3-transistor type (3T) gain cell.
  • the transistor 61 to the transistor 63 are OS transistors.
  • the OS transistor has an extremely small leakage current, that is, a current flowing between the source and the drain in the off state.
  • the NOSRAM can be used as a non-volatile memory by holding the electric charge corresponding to the data in the memory circuit by using the characteristic that the leakage current is extremely small.
  • the circuit configuration applicable to the memory circuit 32 of FIG. 5A is not limited to the 3T type NO SRAM of FIG. 5B.
  • it may be a circuit corresponding to the DOSRAM shown in FIG. 6A.
  • FIG. 6A illustrates a memory circuit 32A having a transistor 61A and a capacitive element 64A.
  • the transistor 61A is an OS transistor.
  • An example in which the memory circuit 32A is connected to the bit line BL, the word line WL, and the back gate line BGL is illustrated.
  • the circuit configuration applicable to the memory circuit 32 of FIG. 5A may be a circuit corresponding to the 2T type NO SRAM shown in FIG. 6B.
  • FIG. 6B illustrates a memory circuit 32B having a transistor 61B, a transistor 62B, and a capacitive element 64B.
  • the transistor 61B and the transistor 62B are OS transistors.
  • the transistor 61B and the transistor 62B may be an OS transistor in which semiconductor layers are arranged in different layers, or may be an OS transistor in which semiconductor layers are arranged in the same layer.
  • FIG. 32B An example in which the memory circuit 32B is connected to a write bit line WBL, a wiring LBL functioning as a read bit line, a write word line WWL, a read word line RWL, a source line SL, and a back gate line BGL is illustrated. There is.
  • the circuit configuration applicable to the memory circuit 32 of FIG. 5A may be a circuit in which the 3T type NO SRAM shown in FIG. 6C is combined.
  • FIG. 6C illustrates a memory circuit 32C having a memory circuit 32_P capable of holding data having different logics and a memory circuit 32_N.
  • FIG. 6C illustrates a memory circuit 32_P having a transistor 61_P, a transistor 62_P, a transistor 63_P and a capacitive element 64_P, and a memory circuit 32_N having a transistor 61_N, a transistor 62_N, a transistor 63_N and a capacitive element 64_N.
  • Each transistor included in the memory circuit 32_P and the memory circuit 32_N is an OS transistor.
  • Each transistor included in the memory circuit 32_P and the memory circuit 32_N may be an OS transistor in which a semiconductor layer is arranged in different layers, or an OS transistor in which a semiconductor layer is arranged in the same layer.
  • An example in which the memory circuit 32C is connected to the writing bit line WBL_P, the wiring LBL_P, the writing bit line WBL_N, the wiring LBL_N, the writing word line WWL, and the reading word line RWL is illustrated.
  • the memory circuit 32C holds data having different logics, and can read the data having different logics to the wiring LBL_P and the wiring LBL_N.
  • an exclusive OR circuit may be provided so that the data corresponding to the multiplication of the data held in the memory circuit 32_P and the memory circuit 32_N is output to the wiring LBL.
  • FIG. 7A is a diagram illustrating the switching circuit 41.
  • a weight data W 1 to W 6 from the memory circuit 32 in the circuit block 31 is read out to the wiring LBL_1 to LBL_6.
  • the weight data selected from the weight data W 1 to W 6 in the switching circuit 41 and given to the wiring GBL will be described as the weight data W SEL.
  • Input data A IN is given to each of the product-sum calculation circuits 42, and a data MAC corresponding to the product-sum calculation data will be obtained.
  • the wiring LBL P extending in the vertical direction connecting the upper layer and the lower layer in the wirings LBL_1 to LBL_1 is shorter than the wiring extending in the horizontal direction. Therefore, the parasitic capacitance of the wirings LBL_1 to LBL_6 can be reduced, the electric charge required for charging and discharging the wiring can be reduced, the power consumption can be reduced, and the calculation efficiency can be improved. Further, reading from the memory circuit 32 to the wirings LBL_1 to LBL_1 can be performed at high speed.
  • the product-sum calculation circuit 42 can perform arithmetic processing using the weight data W SEL via the wiring GBL.
  • the weight data W SEL can be configured to be given to a plurality of product-sum calculation circuits 42 via the wiring GBL. This configuration is suitable for the arithmetic processing of a convolutional neural network that performs arithmetic processing using the same weight data.
  • FIG. 7B is an example of a circuit configuration applicable to the switching circuit 41 illustrated in FIG. 7A.
  • the three-state buffer illustrated in FIG. 7B has a function of amplifying and transmitting the potential of the wiring LBL to the wiring GBL in response to the control signal EN.
  • the switching circuit 41 can be regarded as a multiplexer. It has a function of selecting one from a plurality of input signals.
  • FIG. 7A shows a configuration in which the switching circuit 41 selects one wiring from a plurality of wiring LBLs and gives weight data W SEL to the wiring GBL
  • a plurality of switching circuits may be provided as switching circuits.
  • FIG. 7A the configuration is described in which each memory circuit 32 holds 1-bit data (that is, data of '1' or '0') and performs arithmetic processing using the data.
  • One aspect of the present invention can also be applied to a configuration in which arithmetic processing is performed using the device.
  • the multi-bit weight data to be given to the wiring GBL can be selected by using the switching circuit 41 connected to the wiring LBL_1 to LBL_n according to the number of bits. good.
  • the bus width is limited according to the number of pins on the chip.
  • the number of parallel data required for arithmetic processing can be increased according to the opening in which the wiring LBL is provided. Therefore, it is possible to perform efficient arithmetic processing.
  • FIG. 8 shows a timing chart for explaining the operation of each configuration described with reference to FIG. 7A.
  • the product-sum calculation circuit 42 performs arithmetic processing according to the toggle operation of the clock signal CLK (for example, times T0 to T6). By increasing the frequency of the clock signal CLK, it is possible to speed up the arithmetic processing.
  • the weight data selected from the wiring LBL to the wiring GBL in the switching circuit 41 is read out to the wiring LBL_1 to LBL_1 in advance, so that the wiring GBL data giving the weight data can be obtained.
  • time advance reads the weight data W 1 to the wiring LBL_1 at T0
  • the wiring GBL from the wiring LBL_1 switch the switching circuit 41 at time T1 can be configured to output the weight data W 1.
  • time T1 to T6 by varying the reading of the weight data W 1 to W 6 in the wiring LBL, the selection of the weight data W SEL for wiring GBL, the time, the weight data corresponding to the clock signal CLK It can be configured to switch W SEL.
  • FIG. 9A shows a specific configuration example of the product-sum calculation circuit 42.
  • FIG. 9A illustrates a configuration example of a product-sum calculation circuit 42 capable of performing a product-sum operation of 8-bit weight data and 8-bit input data.
  • the multiplication circuit 51, the addition circuit 52, and the register 53 are illustrated.
  • the 16-bit data multiplied by the multiplication circuit 51 is input to the addition circuit 52.
  • the output of the addition circuit 52 is held in the register 53, and the product-sum operation is performed by adding the data to be multiplied by the multiplication circuit 51 and the addition circuit 52.
  • the register 53 is controlled by the clock signal CLK and the reset signal reset_B. Note that " ⁇ " in "17 + ⁇ " in the figure indicates a carry generated by adding multiplication data. With this configuration, a data MAC corresponding to the product-sum operation of the weight data W SEL and the input data A IN can be obtained.
  • FIG. 9A the configuration is described as performing arithmetic processing using 8-bit data, but one aspect of the present invention can also be applied to a configuration using 1-bit data.
  • the configuration is illustrated in FIG. 9B in the same manner as in FIG. 9A.
  • arithmetic processing may be performed according to the number of bits.
  • FIG. 10 is a diagram showing a configuration example of the activation function calculation circuit 43 described above.
  • the activation function calculation circuit 43 illustrated in FIG. 10 is a circuit having a function of calculating an activation function based on the ReLU function as an example.
  • the activation function calculation circuit 43 illustrated in FIG. 10 has a plurality of multiplexers 54. For example, 8-bit data MAC [0] to MAC [7] is input to the multiplexer 54. Data 0 is input to the multiplexer 54. The multiplexer 54 outputs data MAC [0] to MAC [7] or data 0 as data FUNC [0] to FUNC [7] by the data MAC [7] which is the most significant bit of the data MAC. When the data MAC is a signed integer, if the most significant bit of the data MAC is 0, it represents a positive value, and if it is 1, it represents a negative value. Therefore, the activation function calculation circuit 43 calculates the activation function based on the ReLU function. be able to.
  • FIG. 11 is a diagram showing a configuration example of the pre-pooling calculation circuit 45 described above.
  • the pre-pooling calculation circuit 45 illustrated in FIG. 11 is a circuit having a function of performing a calculation of a pre-pooling calculation process based on max pooling as an example.
  • the pre-pooling arithmetic circuit 45 illustrated in FIG. 11 has a comparison circuit 55 and a register 56.
  • the comparison circuit 55 data as an initial value or data input from the register 56 and data QUA output from the quantization calculation circuit 44 are input.
  • the comparison circuit 55 compares the two input data and outputs the data having a large value to the register 56 as data QUA [C].
  • the data QUA [C] is held in the register 56.
  • the held data QUA [C] becomes the data PPD which is the output signal of the pre-pooling calculation circuit 45 or the data QUA [MAX] which is input to the comparison circuit 55.
  • the operation of the pre-pooling calculation circuit 45 will be described with reference to FIG. In FIG. 12, as the data QUA output from the quantization calculation circuit 44, data QUA [1], data QUA [2] to data QUA [N] are input one after another according to the change of the clock signal CLK. do.
  • the comparison circuit 55 sets the data input as the initial value as the data QUA [0].
  • the data QUA [0] and the data QUA [1] are input to the comparison circuit 55.
  • the data QUA [1] is larger than the data QUA [0]
  • the data QUA [1] is held in the register 56 as the output data of the comparison circuit 55, that is, the data QUA [C].
  • the data QUA [2] is input to the comparison circuit 55 according to the change in the clock signal CLK. Further, the data QUA [1] held in the register 56 during the period P1 is input to the comparison circuit 55.
  • the data QUA [2] is larger than the data QUA [1]
  • the data QUA [2] is held in the register 56 as the output data of the comparison circuit 55, that is, the data QUA [C].
  • the comparison circuit 55 the magnitudes of the values of the data QUAs input in order are compared, and the larger data is held in the register 56, so that the largest data QUA [MAX] among the data QUAs input to the register 56 is held. Will be retained.
  • the data QUA [N] is input to the comparison circuit 55.
  • the data QUA [MAX] held by the period P (N-1) is input to the register 56 in the comparison circuit 55.
  • the data QUA [MAX] is larger than the data QUA [N]
  • the data QUA [MAX] is held in the register 56 as the output data of the comparison circuit 55, that is, the data QUA [C].
  • the data QUA [MAX] held in the register 56 is output as data PPD.
  • the dedicated arithmetic circuits 46_1 to 46_3 are provided and the arithmetic processing of 3 ⁇ 3 pooling is performed will be described.
  • the data QUA [1] to [9] can be divided and processed from the quantization arithmetic circuit 44, and the data PPD [1] to [3] can be obtained in the prepooling arithmetic circuit 45. .. That is, the pre-pooling calculation circuit 45 can take out the maximum value of the data in one dimension as the data PPD output from the pre-pooling calculation circuit 45.
  • the data PPDs [1] to [3] are compared by the post-pooling calculation circuit 47 in the processing circuit 15, and the data PDs can be obtained.
  • the post-pooling calculation circuit 47 has a function of a comparison circuit for comparing the magnitudes of the values of the input data PPD. That is, the post-pooling calculation circuit 47 can take out the maximum value of the two-dimensional data of 3 ⁇ 3, that is, the data PD of the max pooling of 3 ⁇ 3 as output data.
  • the data QUAs [1] to [9] are divided and processed according to the operation shown in FIG. 13B, and the data PPDs [1] to [3] are processed by the prepooling calculation circuit 45.
  • the dedicated arithmetic circuit 46_1 the data PPD [1] is obtained by comparing the data QUAs [1] to [3].
  • the dedicated arithmetic circuit 46_2 the data PPD [2] is obtained by comparing the data QUAs [4] to [6].
  • the dedicated arithmetic circuit 46_3 the data QUAs [7] to [9] are compared to obtain the data PPD [3].
  • the data PPD can be obtained using a different dedicated arithmetic circuit, so that the data PPD can be obtained with a small number of clocks.
  • the data QUAs [1] to [9] are output to the post-pooling calculation circuit 47 from the plurality of quantization calculation circuits 44_1 to 44_9 without obtaining the data PPD in the pre-pooling calculation circuit 45.
  • the data PD is obtained, the number of wires for transmitting the data increases. Therefore, it may be difficult to reduce the size and power consumption of the semiconductor device 10.
  • each arithmetic processing in the neural network is performed by a dedicated arithmetic circuit
  • distributed arithmetic processing is performed in a configuration in which the arithmetic processing is performed using a plurality of data such as pooling arithmetic processing. It can be configured to be performed.
  • the wiring for connecting the dedicated arithmetic circuit and the product-sum arithmetic circuit can be shortened, it is possible to suppress an increase in the area for arranging the dedicated arithmetic circuit.
  • a plurality of memory circuits can be arranged in the dedicated arithmetic circuit, the area where the memory circuits can be arranged can be increased. As a result, a huge amount of weight data can be held in the memory circuit unit, and the number of times the weight data is transferred from the external memory circuit can be reduced, so that power consumption can be reduced.
  • FIG. 15 illustrates a configuration example of the memory circuit unit 30 and its peripheral circuits, which are laminated on the arithmetic circuit unit 40 and described with reference to FIGS. 1A and 1B. Specifically, in FIG. 15, the drive circuit 12, the drive circuit 13, the control circuit 14, the processing circuit 15, the switching circuit 41, the product-sum calculation circuit 42, the activation function calculation circuit 43, the quantization calculation circuit 44, and the prepooling calculation circuit 45 is illustrated. Further, FIG. 15 illustrates a post-pooling calculation circuit 47 in the processing circuit 15.
  • each circuit in FIG. 15 has a configuration in which control signals, input data, and output data for controlling each circuit are input / output to and from an external circuit. Become.
  • FIG. 16A is a diagram in which a block for controlling the memory circuit unit 30 is extracted for each configuration shown in FIG. 16A, in addition to the memory circuit 32 included in the circuit block 31 in the memory circuit unit 30, the drive circuit 12 and the drive circuit 13 are extracted and shown.
  • the drive circuit 12 and the drive circuit 13 process an input signal from the outside to generate a signal for writing weight data to the memory circuit and a signal for reading weight data from the memory circuit.
  • the generated signal is given to the memory circuit via wiring.
  • FIG. 16B is a diagram in which a block for controlling the arithmetic circuit unit 40 is extracted for each configuration shown in FIG.
  • FIG. 16B in addition to the switching circuit 41, the product-sum calculation circuit 42, the activation function calculation circuit 43, the quantization calculation circuit 44 and the prepooling calculation circuit 45 included in the calculation circuit unit 40, the control circuit 14, the processing circuit 15, and The post-pooling arithmetic circuit 47 in the processing circuit 15 is illustrated.
  • the control circuit 14 generates input data A IN and outputs it to the product-sum calculation circuit 42.
  • the control circuit 14 outputs a control signal for controlling the switching circuit 41.
  • the switching circuit 41 selects the weight data read from the memory circuit 32 and outputs the weight data W SEL to the product-sum calculation circuit 42.
  • the activation function calculation circuit 43, the quantization calculation circuit 44, and the pre-pooling calculation circuit 45 which are dedicated calculation circuits, the calculation processing of the data MAC generated by the product-sum calculation circuit 42 was performed, and the pre-pooling calculation processing was performed.
  • the data PPD is output to the post-pooling calculation circuit 47 in the processing circuit 15.
  • the post-pooling calculation circuit 47 in the processing circuit 15 outputs the pooled calculation-processed data PD to the control circuit 14, and the control circuit 14 generates input data A IN.
  • the generated data is re-input to the arithmetic circuit unit 40.
  • the data processed by the control circuit 14 can be output again as input data to the arithmetic circuit unit 40. Therefore, the calculation process can be executed without reading the data in the middle of the calculation to the main memory or the like outside the semiconductor device 10. Further, in the semiconductor device 10, since the electrical connection between the memory circuit unit and the arithmetic circuit unit can be made via the wiring of the opening provided in the insulating film or the like, the number of wirings can be increased in parallel. It is possible to increase the number. Therefore, in the semiconductor device 10, parallel calculation of the number of bits equal to or larger than the data bus width of the CPU 110 is possible.
  • a circuit for performing dedicated calculation processing such as activation function calculation processing is provided so as to be stacked with the memory circuit, so that the area in which the memory circuit can be arranged can be increased.
  • a huge amount of weight data can be held in the memory circuit unit, and the number of times the weight data is transferred from the external memory circuit can be reduced, so that power consumption can be reduced.
  • the wiring for connecting the dedicated arithmetic circuit and the product-sum arithmetic circuit can be shortened in the configuration in which one arithmetic processing is distributed at a plurality of places as in the pooling arithmetic processing. Therefore, a configuration in which arithmetic processing is distributed at a plurality of locations is effective in suppressing an increase in the area for arranging a dedicated arithmetic circuit.
  • the configuration is such that the memory circuit unit and the arithmetic circuit unit shown in FIG. 1 are not stacked, for example, in the configuration shown in FIGS.
  • one aspect of the present invention can provide a miniaturized semiconductor device that functions as an accelerator.
  • one aspect of the present invention can provide a semiconductor device that functions as an accelerator and has low power consumption.
  • FIG. 17 is a diagram illustrating an example of operation when a part of the calculation of the program executed by the CPU is executed by the accelerator.
  • the host program is executed on the CPU (host program execution; step S1).
  • step S2 When the CPU confirms an instruction to allocate the data area required for performing the calculation using the accelerator in the memory circuit unit (memory allocation instruction; step S2), the CPU allocates the data area to the memory circuit. Allocate to the unit (allocate memory; step S3).
  • the CPU transmits weight data, which is input data, from the main memory or the external storage device to the memory circuit unit (data transmission; step S4).
  • the memory circuit unit receives the weight data and stores the weight data in the area secured in step S3 (data reception; step S5).
  • step S6 When the CPU confirms the instruction to start the kernel program (starting the kernel program; step S6), the accelerator starts executing the kernel program (starting calculation; step S7).
  • the CPU may be switched from the state of performing calculation to the state of PG (power gating) (transition to PG state; step S8). In that case, immediately before the accelerator finishes executing the kernel program, the CPU is switched from the PG state to the state of performing the calculation (PG state stop; step S9).
  • step S10 When the accelerator finishes executing the kernel program, the output data is stored in the storage unit that holds the calculation result in the accelerator (completion of calculation; step S10).
  • step S11 After the execution of the kernel program is completed, when the CPU confirms the instruction to transmit the output data stored in the storage unit to the main memory or the external storage device (data transmission request; step S11), the above output data is output. It is transmitted to the main memory or the external storage device and stored in the main memory or the external storage device (data transmission; step S12).
  • the semiconductor device of one aspect of the present invention has a non-Von Neumann architecture, and can perform arithmetic processing with extremely low power consumption as compared with the von Neumann architecture in which power consumption increases as the processing speed increases. ..
  • FIG. 18 shows a configuration example of the CPU 110.
  • the CPU 110 includes a CPU core (CPU Core) 200, an L1 (level 1) cache memory device (L1 Cache) 202, an L2 cache memory device (L2 Cache) 203, a bus interface unit (Bus I / F) 205, and a power switch 210 ⁇ . It has 212, a level shifter (LS) 214.
  • the CPU core 200 has a flip-flop 220.
  • the CPU core 200, the L1 cache memory device 202, and the L2 cache memory device 203 are connected to each other by the bus interface unit 205.
  • the PMU193 generates a clock signal GCLK1 and various PG (power gating) control signals (PG control signals) in response to signals such as interrupt signals (Interrupts) input from the outside and signal SLEEP1 issued by the CPU 110.
  • the clock signals GCLK1 and PG control signals are input to the CPU 110.
  • the PG control signal controls the power switches 210 to 212 and the flip-flop 220.
  • the power switches 210 and 211 control the supply of the voltages VDDD and VDD1 to the virtual power supply line V_VDD (hereinafter referred to as V_ VDD line), respectively.
  • the power switch 212 controls the supply of the voltage VDDH to the level shifter (LS) 214.
  • the voltage VSSS is input to the CPU 110 and the PMU 193 without going through the power switch.
  • the voltage VDDD is input to the PMU 193 without going through the power switch.
  • Voltages VDDD and VDD1 are drive voltages for CMOS circuits.
  • the voltage VDD1 is lower than the voltage VDDD and is a driving voltage in the sleep state.
  • the voltage VDDH is a drive voltage for the OS transistor and is higher than the voltage VDDD.
  • Each of the L1 cache memory device 202, the L2 cache memory device 203, and the bus interface unit 205 has at least one power gating capable power domain.
  • a power domain capable of power gating is provided with one or more power switches. These power switches are controlled by a PG control signal.
  • the flip-flop 220 is used as a register.
  • the flip-flop 220 is provided with a backup circuit. Hereinafter, the flip-flop 220 will be described.
  • FIG. 19A shows an example of a circuit configuration of a flip-flop 220 (Flip-flop).
  • the flip-flop 220 has a scan flip-flop (Scan Flip-flop) 221 and a backup circuit (Backup Circuit) 222.
  • the scan flip-flop 221 has nodes D1, Q1, SD, SE, RT, CK, and a clock buffer circuit 221A.
  • Node D1 is a data (data) input node
  • node Q1 is a data output node
  • node SD is a scan test data input node.
  • the node SE is an input node of the signal SCE.
  • the node CK is an input node for the clock signal GCLK1.
  • the clock signal GCLK1 is input to the clock buffer circuit 221A.
  • the analog switch of the scan flip-flop 221 is connected to the nodes CK1 and CKB1 of the clock buffer circuit 221A.
  • the node RT is an input node for a reset signal.
  • the signal SCE is a scan enable signal and is generated by PMU193.
  • PMU193 generates signals BK and RC.
  • the level shifter 214 level-shifts the signals BK and RC to generate the signals BKH and RCH.
  • the signal BK is a backup signal
  • the signal RC is a recovery signal.
  • the circuit configuration of the scan flip-flop 221 is not limited to FIG. Flip-flops provided in standard circuit libraries can be applied.
  • the backup circuit 222 has nodes SD_IN, SN11, transistors M11 to M13, and a capacitive element C11.
  • Node SD_IN is an input node for scan test data and is connected to node Q1 of scan flip-flop 221.
  • the node SN11 is a holding node of the backup circuit 222.
  • the capacitance element C11 is a holding capacitance for holding the voltage of the node SN11.
  • Transistor M11 controls the conduction state between node Q1 and node SN11.
  • the transistor M12 controls the conduction state between the node SN11 and the node SD.
  • the transistor M13 controls the conduction state between the node SD_IN and the node SD.
  • the on / off of the transistors M11 and M13 is controlled by the signal BKH, and the on / off of the transistors M12 is controlled by the signal RCH.
  • Transistors M11 to M13 are OS transistors like the transistors 61 to 63 included in the memory circuit 32 described above. Transistors M11 to M13 are shown in a configuration having a back gate. The back gates of the transistors M11 to M13 are connected to a power supply line that supplies the voltage VBG1.
  • the backup circuit 222 has a non-volatile characteristic because it can suppress a drop in the voltage of the node SN11 due to the feature of the OS transistor that the off-current is extremely small and consumes almost no power for holding data. Since the data is rewritten by charging / discharging the capacitive element C11, the backup circuit 222 is, in principle, not limited in the number of rewrites, and can write and read data with low energy.
  • the backup circuit 222 can be laminated on the scan flip-flop 221 composed of the silicon CMOS circuit.
  • the backup circuit 222 Since the backup circuit 222 has a very small number of elements as compared with the scan flip-flop 221, it is not necessary to change the circuit configuration and layout of the scan flip-flop 221 in order to stack the backup circuits 222. That is, the backup circuit 222 is a highly versatile backup circuit. Further, since the backup circuit 222 can be provided in the region where the scan flip-flop 221 is formed, the area overhead of the flip-flop 220 can be reduced to zero even if the backup circuit 222 is incorporated. Therefore, by providing the backup circuit 222 on the flip-flop 220, power gating of the CPU core 200 becomes possible. Since the energy required for power gating is small, it is possible to power gate the CPU core 200 with high efficiency.
  • the backup circuit 222 By providing the backup circuit 222, the parasitic capacitance due to the transistor M11 is added to the node Q1, but since it is smaller than the parasitic capacitance due to the logic circuit connected to the node Q1, the scan flip-flop 221 operates. There is no effect. That is, even if the backup circuit 222 is provided, the performance of the flip-flop 220 is not substantially deteriorated.
  • the low power consumption state of the CPU core 200 for example, a clock gating state, a power gating state, and a hibernation state can be set.
  • the PMU193 selects the low power consumption mode of the CPU core 200 based on the interrupt signal, the signal SLEEP1, and the like. For example, when shifting from the normal operating state to the clock gating state, the PMU 193 stops generating the clock signal GCLK1.
  • the PMU193 when shifting from the normal operating state to the hibernation state, the PMU193 performs voltage and / or frequency scaling. For example, when performing voltage scaling, the PMU 193 turns off the power switch 210 and turns on the power switch 211 in order to input the voltage VDD1 to the CPU core 200.
  • the voltage VDD1 is a voltage that does not cause the data of the scan flip-flop 221 to be lost.
  • PMU193 lowers the frequency of the clock signal GCLK1.
  • FIG. 20 shows an example of the power gating sequence of the CPU core 200.
  • t1 to t7 represent the time.
  • the signals PSE0 to PSE2 are control signals of the power switches 210 to 212, and are generated by the PMU193. When the signal PSE0 is “H” / “L”, the power switch 210 is on / off. The same applies to the signals PSE1 and PSE2.
  • the transistor M11 of the backup circuit 222 is turned on, and the data of the node Q1 of the scan flip-flop 221 is written to the node SN11 of the backup circuit 222. If the node Q1 of the scan flip-flop 221 is "L”, the node SN11 remains “L”, and if the node Q1 is "H”, the node SN11 becomes "H”.
  • PMU193 sets the signal PSE2 and BK to “L” at time t2, and sets the signal PSE0 to “L” at time t3. At time t3, the state of the CPU core 200 shifts to the power gating state.
  • the signal PSE0 may be turned off at the timing when the signal BK is turned off.
  • the PMU 193 sets the signal PSE0 to “H” to shift from the power gating state to the recovery state.
  • the PMU193 sets the signals PSE2, RC, and SCE to “H” in a state where charging of the V_ VDD line is started and the voltage of the V_ VDD line becomes VDDD (time t5).
  • the transistor M12 is turned on, and the electric charge of the capacitive element C11 is distributed to the node SN11 and the node SD. If the node SN11 is "H”, the voltage of the node SD rises. Since the node SE is “H”, the data of the node SD is written to the input side latch circuit of the scan flip-flop 221. When the clock signal GCLK1 is input to the node CK at time t6, the data of the input side latch circuit is written to the node Q1. That is, the data of the node SN11 is written to the node Q1.
  • PMU193 sets the signals PSE2, SCE, and RC to “L”, and the recovery operation ends.
  • the backup circuit 222 using the OS transistor has low dynamic and static power consumption, and is therefore very suitable for normal off computing.
  • the CPU 110 including the CPU core 200 having a backup circuit 222 using an OS transistor can be referred to as a NonfCPU (registered trademark).
  • the Noff CPU has a non-volatile memory and can stop the power supply when the operation is not required. Even if the flip-flop 220 is mounted, the performance of the CPU core 200 can be reduced and the dynamic power can be hardly increased.
  • the CPU core 200 may have a plurality of power domains capable of power gating.
  • the plurality of power domains are provided with one or more power switches for controlling the voltage input.
  • the CPU core 200 may have one or a plurality of power domains in which power gating is not performed.
  • a power gating control circuit for controlling the flip-flop 220 and the power switches 210 to 212 may be provided in the power domain where power gating is not performed.
  • the application of the flip-flop 220 is not limited to the CPU 110.
  • the flip-flop 220 can be applied to a register provided in a power domain capable of power gating.
  • FIG. 21 shows a part of the cross-sectional structure of the semiconductor device.
  • the semiconductor device shown in FIG. 21 includes a transistor 550, a transistor 500, and a capacitive element 600.
  • FIG. 22A is a cross-sectional view of the transistor 500 in the channel length direction
  • FIG. 22B is a cross-sectional view of the transistor 500 in the channel width direction.
  • the transistor 500 corresponds to an OS transistor included in the memory circuit 32 shown in the above embodiment, that is, a transistor having an oxide semiconductor in a channel forming region.
  • the transistor 550 corresponds to a Si transistor included in the arithmetic circuit unit 40 shown in the above embodiment, that is, a transistor having silicon in the channel forming region.
  • the capacitance element 600 corresponds to the capacitance element included in the memory circuit 32.
  • Transistor 500 is an OS transistor.
  • the OS transistor has an extremely small off current. Therefore, it is possible to hold the data voltage or electric charge written to the storage node via the transistor 500 for a long period of time. That is, since the refresh operation frequency of the storage node is reduced or the refresh operation is not required, the power consumption of the semiconductor device can be reduced.
  • the transistor 500 is provided above the transistor 550, and the capacitive element 600 is provided above the transistor 550 and the transistor 500.
  • the transistor 550 is provided on the substrate 311.
  • the substrate 311 is, for example, a p-type silicon substrate.
  • the substrate 311 may be an n-type silicon substrate.
  • the oxide layer 314 is preferably an insulating layer (also referred to as a BOX layer) formed in the substrate 311 by buried oxidation, for example, silicon oxide.
  • the transistor 550 is provided on a single crystal silicon, so-called SOI (Silicon On Insulator) substrate, which is provided on the substrate 311 via an oxide layer 314.
  • SOI Silicon On Insulator
  • the substrate 311 in the SOI substrate is provided with an insulator 313 that functions as an element separation layer.
  • the substrate 311 also has a well region 312.
  • the well region 312 is a region to which n-type or p-type conductivity is imparted depending on the conductive type of the transistor 550.
  • the single crystal silicon in the SOI substrate is provided with a semiconductor region 315, a low resistance region 316a that functions as a source region or a drain region, and a low resistance region 316b. Further, a low resistance region 316c is provided on the well region 312.
  • the transistor 550 can be provided so as to be overlapped with the well region 312 to which the impurity element that imparts conductivity is added.
  • the well region 312 can function as a bottom gate electrode of the transistor 550 by independently changing the potential via the low resistance region 316c. Therefore, the threshold voltage of the transistor 550 can be controlled.
  • the threshold voltage of the transistor 550 can be made larger and the off-current can be reduced. Therefore, by applying a negative potential to the well region 312, the drain current when the potential applied to the gate electrode of the Si transistor is 0 V can be reduced.
  • the power consumption based on the through current or the like in the arithmetic circuit unit 40 having the transistor 550 can be reduced, and the arithmetic efficiency can be improved.
  • the transistor 550 is preferably of the so-called Fin type, in which the upper surface of the semiconductor layer and the side surface in the channel width direction are covered with the conductor 318 via the insulator 317.
  • the on-characteristics of the transistor 550 can be improved by increasing the effective channel width. Further, since the contribution of the electric field of the gate electrode can be increased, the off characteristic of the transistor 550 can be improved.
  • the transistor 550 may be either a p-channel type transistor or an n-channel type transistor.
  • the conductor 318 may function as a first gate (also referred to as a top gate) electrode. Further, the well region 312 may function as a second gate (also referred to as a bottom gate) electrode. In that case, the potential applied to the well region 312 can be controlled via the low resistance region 316c.
  • the low resistance region 316a that becomes the region where the channel of the semiconductor region 315 is formed, the region in the vicinity thereof, the source region, or the drain region, and the low resistance region 316b and the low resistance connected to the electrodes that control the potential of the well region 312.
  • a semiconductor such as a silicon-based semiconductor
  • the transistor 550 may be a HEMT (High Electron Mobility Transistor) by using GaAs, GaAlAs, or the like.
  • the low resistance region 316a, the low resistance region 316b, and the low resistance region 316c are elements that impart n-type conductivity such as arsenic and phosphorus, or boron. It contains an element that imparts p-type conductivity such as.
  • the conductor 318 that functions as a gate electrode is a semiconductor material such as silicon, a metal material, or an alloy that contains an element that imparts n-type conductivity such as arsenic or phosphorus, or an element that imparts p-type conductivity such as boron.
  • a material or a conductive material such as a metal oxide material can be used.
  • a silicide such as nickel silicide may be used as the conductor 318.
  • the threshold voltage of the transistor can be adjusted by selecting the material of the conductor. Specifically, it is preferable to use a material such as titanium nitride or tantalum nitride for the conductor. Further, in order to achieve both conductivity and embedding property, it is preferable to use a metal material such as tungsten or aluminum as a laminate for the conductor, and it is particularly preferable to use tungsten in terms of heat resistance.
  • the low resistance region 316a, the low resistance region 316b, and the low resistance region 316c may be configured to be provided by laminating another conductor, for example, a silicide such as nickel silicide. With this configuration, the conductivity of the region that functions as an electrode can be enhanced. At this time, an insulator that functions as a side wall spacer (also referred to as a side wall insulating layer) may be provided on the side surface of the conductor 318 that functions as the gate electrode and the side surface of the insulator that functions as the gate insulating film. .. With this configuration, it is possible to prevent the conductor 318 and the low resistance region 316a and the low resistance region 316b from being in a conductive state.
  • a silicide such as nickel silicide
  • the insulator 320, the insulator 322, the insulator 324, and the insulator 326 are laminated in this order so as to cover the transistor 550.
  • the insulator 320, the insulator 322, the insulator 324, and the insulator 326 for example, silicon oxide, silicon oxide nitride, silicon nitride oxide, silicon nitride, aluminum oxide, aluminum oxide nitride, aluminum nitride, aluminum nitride and the like can be used. Just do it.
  • silicon oxide refers to a material having a higher oxygen content than nitrogen as its composition
  • silicon nitride as its composition means a material having a higher nitrogen content than oxygen as its composition. Is shown.
  • aluminum nitride refers to a material whose composition has a higher oxygen content than nitrogen
  • aluminum nitride refers to a material whose composition has a higher nitrogen content than oxygen. Is shown.
  • the insulator 322 may have a function as a flattening film for flattening a step generated by a transistor 550 or the like provided below the insulator 322.
  • the upper surface of the insulator 322 may be flattened by a flattening treatment using a chemical mechanical polishing (CMP) method or the like in order to improve the flatness.
  • CMP chemical mechanical polishing
  • the insulator 324 it is preferable to use a film having a barrier property so that hydrogen and impurities do not diffuse in the region where the transistor 500 is provided from the substrate 311 or the transistor 550.
  • a film having a barrier property against hydrogen for example, silicon nitride formed by the CVD method can be used.
  • hydrogen may diffuse into a semiconductor element having an oxide semiconductor such as a transistor 500, so that the characteristics of the semiconductor element may deteriorate. Therefore, it is preferable to use a film that suppresses the diffusion of hydrogen between the transistor 500 and the transistor 550.
  • the membrane that suppresses the diffusion of hydrogen is a membrane that desorbs a small amount of hydrogen.
  • the amount of hydrogen desorbed can be analyzed using, for example, a heated desorption gas analysis method (TDS).
  • TDS heated desorption gas analysis method
  • the amount of hydrogen desorbed from the insulator 324 is such that the amount desorbed in terms of hydrogen atoms is converted per area of the insulator 324 when the surface temperature of the film is in the range of 50 ° C. to 500 ° C. It may be 10 ⁇ 10 15 atoms / cm 2 or less, preferably 5 ⁇ 10 15 atoms / cm 2 or less.
  • the insulator 326 has a lower dielectric constant than the insulator 324.
  • the relative permittivity of the insulator 326 is preferably less than 4, more preferably less than 3.
  • the relative permittivity of the insulator 326 is preferably 0.7 times or less, more preferably 0.6 times or less, the relative permittivity of the insulator 324.
  • the insulator 320, the insulator 322, the insulator 324, and the insulator 326 are embedded with a capacitance element 600, a conductor 328 connected to the transistor 500, a conductor 330, and the like.
  • the conductor 328 and the conductor 330 have a function as a plug or a wiring.
  • the conductor having a function as a plug or a wiring may collectively give a plurality of configurations and give the same reference numeral.
  • the wiring and the plug connected to the wiring may be integrated. That is, a part of the conductor may function as a wiring, and a part of the conductor may function as a plug.
  • each plug and wiring As the material of each plug and wiring (conductor 328, conductor 330, etc.), a conductive material such as a metal material, an alloy material, a metal nitride material, or a metal oxide material is used as a single layer or laminated. be able to. It is preferable to use a refractory material such as tungsten or molybdenum that has both heat resistance and conductivity, and it is preferable to use tungsten. Alternatively, it is preferably formed of a low resistance conductive material such as aluminum or copper. Wiring resistance can be reduced by using a low resistance conductive material.
  • a wiring layer may be provided on the insulator 326 and the conductor 330.
  • the insulator 350, the insulator 352, and the insulator 354 are laminated in this order.
  • a conductor 356 is formed on the insulator 350, the insulator 352, and the insulator 354.
  • the conductor 356 has a function as a plug or wiring for connecting to the transistor 550.
  • the conductor 356 can be provided by using the same materials as the conductor 328 and the conductor 330.
  • the insulator 350 it is preferable to use an insulator having a barrier property against hydrogen, similarly to the insulator 324.
  • the conductor 356 preferably contains a conductor having a barrier property against hydrogen.
  • a conductor having a barrier property against hydrogen is formed in the opening of the insulator 350 having a barrier property against hydrogen.
  • the conductor having a barrier property against hydrogen for example, tantalum nitride or the like may be used. Further, by laminating tantalum nitride and tungsten having high conductivity, it is possible to suppress the diffusion of hydrogen from the transistor 550 while maintaining the conductivity as wiring. In this case, it is preferable that the tantalum nitride layer having a barrier property against hydrogen is in contact with the insulator 350 having a barrier property against hydrogen.
  • a wiring layer may be provided on the insulator 354 and the conductor 356.
  • the insulator 360, the insulator 362, and the insulator 364 are laminated in this order.
  • a conductor 366 is formed in the insulator 360, the insulator 362, and the insulator 364.
  • the conductor 366 has a function as a plug or wiring.
  • the conductor 366 can be provided by using the same materials as the conductor 328 and the conductor 330.
  • the insulator 360 it is preferable to use an insulator having a barrier property against hydrogen, similarly to the insulator 324.
  • the conductor 366 preferably contains a conductor having a barrier property against hydrogen.
  • a conductor having a barrier property against hydrogen is formed in the opening of the insulator 360 having a barrier property against hydrogen.
  • a wiring layer may be provided on the insulator 364 and the conductor 366.
  • the insulator 370, the insulator 372, and the insulator 374 are laminated in this order.
  • a conductor 376 is formed on the insulator 370, the insulator 372, and the insulator 374.
  • the conductor 376 has a function as a plug or wiring.
  • the conductor 376 can be provided by using the same materials as the conductor 328 and the conductor 330.
  • the insulator 370 it is preferable to use an insulator having a barrier property against hydrogen, similarly to the insulator 324.
  • the conductor 376 preferably contains a conductor having a barrier property against hydrogen.
  • a conductor having a barrier property against hydrogen is formed in the opening of the insulator 370 having a barrier property against hydrogen.
  • a wiring layer may be provided on the insulator 374 and the conductor 376.
  • the insulator 380, the insulator 382, and the insulator 384 are laminated in this order.
  • a conductor 386 is formed on the insulator 380, the insulator 382, and the insulator 384.
  • the conductor 386 has a function as a plug or wiring.
  • the conductor 386 can be provided by using the same materials as the conductor 328 and the conductor 330.
  • the insulator 380 it is preferable to use an insulator having a barrier property against hydrogen, similarly to the insulator 324.
  • the conductor 386 preferably contains a conductor having a barrier property against hydrogen.
  • a conductor having a barrier property against hydrogen is formed in the opening of the insulator 380 having a barrier property against hydrogen.
  • the semiconductor device according to the present embodiment has been described. It is not limited to this.
  • the number of wiring layers similar to the wiring layer containing the conductor 356 may be three or less, or the number of wiring layers similar to the wiring layer containing the conductor 356 may be five or more.
  • Insulator 510, insulator 512, insulator 514, and insulator 516 are laminated in this order on the insulator 384.
  • any of the insulator 510, the insulator 512, the insulator 514, and the insulator 516 it is preferable to use a substance having a barrier property against oxygen and hydrogen.
  • the insulator 510 and the insulator 514 it is preferable to use a film having a barrier property against hydrogen and impurities in the region where the transistor 500 is provided, from the region where the substrate 311 or the transistor 550 is provided, for example. Therefore, the same material as the insulator 324 can be used.
  • Silicon nitride formed by the CVD method can be used as an example of a film having a barrier property against hydrogen.
  • hydrogen may diffuse into a semiconductor element having an oxide semiconductor such as a transistor 500, so that the characteristics of the semiconductor element may deteriorate. Therefore, it is preferable to use a film that suppresses the diffusion of hydrogen between the transistor 500 and the transistor 550.
  • metal oxides such as aluminum oxide, hafnium oxide, and tantalum oxide for the insulator 510 and the insulator 514.
  • aluminum oxide has a high blocking effect that does not allow the membrane to permeate both oxygen and impurities such as hydrogen and water, which are factors that change the electrical characteristics of transistors. Therefore, aluminum oxide can prevent impurities such as hydrogen and moisture from being mixed into the transistor 500 during and after the manufacturing process of the transistor. In addition, it is possible to suppress the release of oxygen from the oxides constituting the transistor 500. Therefore, it is suitable for use as a protective film for the transistor 500.
  • the same material as the insulator 320 can be used for the insulator 512 and the insulator 516. Further, by applying a material having a relatively low dielectric constant to these insulators, it is possible to reduce the parasitic capacitance generated between the wirings.
  • a silicon oxide film, a silicon nitride film, or the like can be used as the insulator 512 and the insulator 516.
  • the insulator 510, the insulator 512, the insulator 514, and the insulator 516 are embedded with a conductor 518, a conductor (for example, a conductor 503) constituting the transistor 500, and the like.
  • the conductor 518 has a function as a plug or wiring for connecting to the capacitance element 600 or the transistor 550.
  • the conductor 518 can be provided by using the same material as the conductor 328 and the conductor 330.
  • the conductor 510 and the conductor 518 in the region in contact with the insulator 514 are preferably conductors having a barrier property against oxygen, hydrogen, and water.
  • the transistor 550 and the transistor 500 can be separated by a layer having a barrier property against oxygen, hydrogen, and water, and the diffusion of hydrogen from the transistor 550 to the transistor 500 can be suppressed.
  • a transistor 500 is provided above the insulator 516.
  • the transistor 500 includes a conductor 503 arranged so as to be embedded in the insulator 514 and the insulator 516, and an insulator 522 arranged on the insulator 516 and the insulator 503. And the insulator 524 arranged on the insulator 522, the oxide 530a arranged on the insulator 524, the oxide 530b arranged on the oxide 530a, and each other on the oxide 530b.
  • the insulator 544 is arranged between the oxide 530a, the oxide 530b, the conductor 542a, and the conductor 542b, and the insulator 580.
  • the conductor 560 includes a conductor 560a provided inside the insulator 545 and a conductor 560b provided so as to be embedded inside the conductor 560a. It is preferable to have.
  • the insulator 574 is arranged on the insulator 580, the conductor 560, and the insulator 545.
  • the oxide 530a and the oxide 530b may be collectively referred to as the oxide 530.
  • the transistor 500 shows a configuration in which two layers of oxide 530a and oxide 530b are laminated in a region where a channel is formed and in the vicinity thereof, but the present invention is not limited to this.
  • a single layer of the oxide 530b or a laminated structure of three or more layers may be provided.
  • the conductor 560 is shown as a two-layer laminated structure, but the present invention is not limited to this.
  • the conductor 560 may have a single-layer structure or a laminated structure of three or more layers.
  • the transistor 500 shown in FIGS. 21, 22A, and 22B is an example, and the transistor 500 is not limited to the configuration, and an appropriate transistor may be used depending on the circuit configuration, driving method, and the like.
  • the conductor 560 functions as a gate electrode of the transistor, and the conductor 542a and the conductor 542b function as a source electrode or a drain electrode, respectively.
  • the conductor 560 is formed so as to be embedded in the opening of the insulator 580 and the region sandwiched between the conductor 542a and the conductor 542b.
  • the arrangement of the conductor 560, the conductor 542a and the conductor 542b is self-aligned with respect to the opening of the insulator 580. That is, in the transistor 500, the gate electrode can be arranged in a self-aligned manner between the source electrode and the drain electrode. Therefore, since the conductor 560 can be formed without providing the alignment margin, the occupied area of the transistor 500 can be reduced. As a result, the semiconductor device can be miniaturized and highly integrated.
  • the conductor 560 is formed in a region between the conductor 542a and the conductor 542b in a self-aligned manner, the conductor 560 does not have a region that overlaps with the conductor 542a or the conductor 542b. Thereby, the parasitic capacitance formed between the conductor 560 and the conductors 542a and 542b can be reduced. Therefore, the switching speed of the transistor 500 can be improved and a high frequency characteristic can be provided.
  • the conductor 560 may function as a first gate (also referred to as a top gate) electrode. Further, the conductor 503 may function as a second gate (also referred to as a bottom gate) electrode.
  • the threshold voltage of the transistor 500 can be controlled by changing the potential applied to the conductor 503 independently of the potential applied to the conductor 560 without interlocking with the potential applied to the conductor 560. In particular, by applying a negative potential to the conductor 503, the threshold voltage of the transistor 500 can be made larger and the off-current can be reduced. Therefore, when a negative potential is applied to the conductor 503, the drain current when the potential applied to the conductor 560 is 0 V can be made smaller than when it is not applied.
  • the conductor 503 is arranged so as to overlap the oxide 530 and the conductor 560. As a result, when a potential is applied to the conductor 560 and the conductor 503, the electric field generated from the conductor 560 and the electric field generated from the conductor 503 are connected to cover the channel forming region formed in the oxide 530. Can be done.
  • the configuration of the transistor that electrically surrounds the channel formation region by the electric field of the pair of gate electrodes is referred to as a curved channel (S-channel) configuration.
  • S-channel configuration disclosed in the present specification and the like is different from the Fin type configuration and the planar type configuration.
  • the conductor 503 has the same configuration as the conductor 518, and the conductor 503a is formed in contact with the inner wall of the opening of the insulator 514 and the insulator 516, and the conductor 503b is further formed inside.
  • the transistor 500 shows a configuration in which the conductor 503a and the conductor 503b are laminated, the present invention is not limited to this.
  • the conductor 503 may be provided as a single layer or a laminated structure having three or more layers.
  • a conductive material for the conductor 503a which has a function of suppressing the diffusion of impurities such as hydrogen atoms, hydrogen molecules, water molecules, and copper atoms (the above impurities are difficult to permeate).
  • a conductive material having a function of suppressing the diffusion of oxygen for example, at least one oxygen atom, oxygen molecule, etc.
  • the function of suppressing the diffusion of impurities or oxygen is a function of suppressing the diffusion of any one or all of the above impurities or the above oxygen.
  • the conductor 503a since the conductor 503a has a function of suppressing the diffusion of oxygen, it is possible to prevent the conductor 503b from being oxidized and the conductivity from being lowered.
  • the conductor 503 When the conductor 503 also functions as a wiring, it is preferable to use a highly conductive conductive material containing tungsten, copper, or aluminum as a main component for the conductor 503b.
  • the conductor 503 is shown by laminating the conductor 503a and the conductor 503b, but the conductor 503 may have a single-layer structure.
  • the insulator 522 and the insulator 524 have a function as a second gate insulating film.
  • the insulator 524 in contact with the oxide 530 it is preferable to use an insulator containing more oxygen than oxygen satisfying the stoichiometric composition.
  • the oxygen is easily released from the membrane by heating.
  • oxygen released by heating may be referred to as "excess oxygen”. That is, it is preferable that the insulator 524 is formed with a region containing excess oxygen (also referred to as “excess oxygen region”).
  • the defective Functions as a donor, sometimes electrons serving as carriers are generated.
  • a part of hydrogen may be combined with oxygen that is bonded to a metal atom to generate an electron as a carrier. Therefore, a transistor using an oxide semiconductor containing a large amount of hydrogen tends to have a normally-on characteristic. Further, since hydrogen in the oxide semiconductor easily moves due to stress such as heat and electric field, if the oxide semiconductor contains a large amount of hydrogen, the reliability of the transistor may deteriorate.
  • the V O H to obtain a sufficiently reduced oxide semiconductor (referred to as “dewatering” or “dehydrogenation process” also.) Water in the oxide semiconductor, to remove impurities such as hydrogen It is important to supply oxygen to the oxide semiconductor to compensate for the oxygen deficiency (also referred to as “dehydrogenation treatment”).
  • the V O H oxide semiconductor impurity is sufficiently reduced such by using a channel formation region of the transistor, it is possible to have stable electrical characteristics.
  • an oxide material in which a part of oxygen is desorbed by heating is 1.0 ⁇ 10 18 atoms / cm 3 or more, preferably 1 in TDS (Thermal Desorption Spectroscopy) analysis.
  • the surface temperature of the film during the TDS analysis is preferably in the range of 100 ° C. or higher and 700 ° C. or lower, or 100 ° C. or higher and 400 ° C. or lower.
  • the insulator having the excess oxygen region and the oxide 530 may be brought into contact with each other to perform one or more of heat treatment, microwave treatment, or RF treatment.
  • heat treatment microwave treatment, or RF treatment.
  • water or hydrogen in the oxide 530 can be removed.
  • reactions occur which bonds VoH is disconnected, when other words happening reaction of "V O H ⁇ Vo + H", it can be dehydrogenated.
  • the hydrogen generated as oxygen combines with H 2 O, it may be removed from the oxide 530 or oxide 530 near the insulator.
  • a part of hydrogen may be gettered on the conductor 542.
  • the microwave processing for example, it is preferable to use an apparatus having a power source for generating high-density plasma or an apparatus having a power source for applying RF to the substrate side.
  • an apparatus having a power source for generating high-density plasma for example, by using a gas containing oxygen and using a high-density plasma, high-density oxygen radicals can be generated, and by applying RF to the substrate side, the oxygen radicals generated by the high-density plasma can be generated.
  • the pressure may be 133 Pa or more, preferably 200 Pa or more, and more preferably 400 Pa or more.
  • oxygen and argon are used as the gas to be introduced into the apparatus for performing microwave treatment, and the oxygen flow rate ratio (O 2 / (O 2 + Ar)) is 50% or less, preferably 10% or more and 30. It is better to do it at% or less.
  • the heat treatment may be performed, for example, at 100 ° C. or higher and 450 ° C. or lower, more preferably 350 ° C. or higher and 400 ° C. or lower.
  • the heat treatment is performed in an atmosphere of nitrogen gas or an inert gas, or an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas.
  • the heat treatment is preferably performed in an oxygen atmosphere.
  • oxygen can be supplied to the oxide 530 to reduce oxygen deficiency (VO ).
  • the heat treatment may be performed in a reduced pressure state.
  • the heat treatment may be carried out in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of an oxidizing gas in order to supplement the desorbed oxygen after the heat treatment in an atmosphere of nitrogen gas or an inert gas. good.
  • the heat treatment may be performed in an atmosphere containing 10 ppm or more, 1% or more, or 10% or more of the oxidizing gas, and then the heat treatment may be continuously performed in an atmosphere of nitrogen gas or an inert gas.
  • the oxygen deficiency in the oxide 530 can be repaired by the supplied oxygen, in other words, the reaction "Vo + O ⁇ null" can be promoted. Further, since the oxygen supplied to the hydrogen remaining in the oxide 530 is reacted to remove the hydrogen as H 2 O (to dehydration) can. Thus, the hydrogen remained in the oxide 530 can be prevented from recombine V O H is formed by oxygen vacancies.
  • the insulator 524 has an excess oxygen region, it is preferable that the insulator 522 has a function of suppressing the diffusion of oxygen (for example, oxygen atom, oxygen molecule, etc.) (the oxygen is difficult to permeate).
  • oxygen for example, oxygen atom, oxygen molecule, etc.
  • the insulator 522 has a function of suppressing the diffusion of oxygen and impurities, the oxygen contained in the oxide 530 does not diffuse to the conductor 503 side, which is preferable. Further, it is possible to suppress the conductor 503 from reacting with the oxygen contained in the insulator 524 and the oxide 530.
  • the insulator 522 may be, for example, aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate), tantalum oxide, zirconium oxide, lead zirconate titanate (PZT), strontium titanate (SrTIO 3 ), or It is preferable to use an insulator containing a so-called high-k material such as (Ba, Sr) TiO 3 (BST) in a single layer or in a laminated manner. As transistors become finer and more integrated, problems such as leakage current may occur due to the thinning of the gate insulating film. By using a high-k material for the insulator that functions as a gate insulating film, it is possible to reduce the gate potential during transistor operation while maintaining the physical film thickness.
  • a so-called high-k material such as (Ba, Sr) TiO 3 (BST)
  • an insulator containing oxides of one or both of aluminum and hafnium which are insulating materials having a function of suppressing diffusion of impurities and oxygen (the above oxygen is difficult to permeate).
  • the insulator containing one or both oxides of aluminum and hafnium it is preferable to use aluminum oxide, hafnium oxide, an oxide containing aluminum and hafnium (hafnium aluminate) and the like.
  • the insulator 522 is formed using such a material, the insulator 522 suppresses the release of oxygen from the oxide 530 and the mixing of impurities such as hydrogen from the peripheral portion of the transistor 500 into the oxide 530. Functions as a layer.
  • aluminum oxide, bismuth oxide, germanium oxide, niobium oxide, silicon oxide, titanium oxide, tungsten oxide, yttrium oxide, and zirconium oxide may be added to these insulators.
  • these insulators may be nitrided. Silicon oxide, silicon oxide nitride, or silicon nitride may be laminated on the above insulator.
  • the insulator 522 and the insulator 524 are shown as the second gate insulating film having a three-layer laminated structure, but the second gate insulating film is It may have a single layer, two layers, or a laminated structure of four or more layers. In that case, the laminated structure is not limited to the same material, and may be a laminated structure made of different materials.
  • the transistor 500 uses a metal oxide that functions as an oxide semiconductor for the oxide 530 including the channel forming region.
  • oxide 530 In-M-Zn oxide (element M is aluminum, gallium, yttrium, copper, vanadium, beryllium, boron, titanium, iron, nickel, germanium, zirconium, molybdenum, lantern, cerium, neodymium).
  • Hafnium, tantalum, tungsten, gallium, etc. (one or more) and the like may be used.
  • the metal oxide that functions as an oxide semiconductor may be formed by a sputtering method or an ALD (Atomic Layer Deposition) method.
  • ALD Atomic Layer Deposition
  • the metal oxide that functions as a channel forming region in the oxide 530 it is preferable to use a metal oxide having a band gap of 2 eV or more, preferably 2.5 eV or more. In this way, by using a metal oxide having a large bandgap, the off-current of the transistor can be reduced.
  • the oxide 530 can suppress the diffusion of impurities into the oxide 530b from the composition formed below the oxide 530a.
  • the oxide 530 has a laminated structure of a plurality of oxide layers having different atomic number ratios of each metal atom.
  • the atomic number ratio of the element M in the constituent elements is larger than the atomic number ratio of the element M in the constituent elements in the metal oxide used in the oxide 530b.
  • the atomic number ratio of the element M to In is preferably larger than the atomic number ratio of the element M to In in the metal oxide used for the oxide 530b.
  • the atomic number ratio of In to the element M is preferably larger than the atomic number ratio of In to the element M in the metal oxide used for the oxide 530a.
  • the energy at the lower end of the conduction band of the oxide 530a is higher than the energy at the lower end of the conduction band of the oxide 530b.
  • the electron affinity of the oxide 530a is smaller than the electron affinity of the oxide 530b.
  • the energy level at the lower end of the conduction band changes gently.
  • the energy level at the lower end of the conduction band at the junction of the oxide 530a and the oxide 530b is continuously changed or continuously bonded. In order to do so, it is preferable to reduce the defect level density of the mixed layer formed at the interface between the oxide 530a and the oxide 530b.
  • the oxide 530a and the oxide 530b have a common element (main component) other than oxygen, a mixed layer having a low defect level density can be formed.
  • the oxide 530b is an In-Ga-Zn oxide
  • the main path of the carrier is oxide 530b.
  • the defect level density at the interface between the oxide 530a and the oxide 530b can be lowered. Therefore, the influence of interfacial scattering on carrier conduction is reduced, and the transistor 500 can obtain a high on-current.
  • a conductor 542a and a conductor 542b that function as a source electrode and a drain electrode are provided on the oxide 530b.
  • the conductors 542a and 542b include aluminum, chromium, copper, silver, gold, platinum, tantalum, nickel, titanium, molybdenum, tungsten, hafnium, vanadium, niobium, manganese, magnesium, zirconium, beryllium, indium, and ruthenium.
  • Iridium, strontium, lanthanum, or an alloy containing the above-mentioned metal element as a component, or an alloy in which the above-mentioned metal element is combined is preferably used.
  • tantalum nitride, titanium nitride, tungsten, nitrides containing titanium and aluminum, nitrides containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, oxides containing strontium and ruthenium, oxides containing lanthanum and nickel, etc. are used. Is preferable.
  • tantalum nitride, titanium nitride, nitrides containing titanium and aluminum, nitrides containing tantalum and aluminum, ruthenium oxide, ruthenium nitride, oxides containing strontium and ruthenium, and oxides containing lanthanum and nickel are difficult to oxidize.
  • a metal nitride film such as tantalum nitride is preferable because it has a barrier property against hydrogen or oxygen.
  • the conductor 542a and the conductor 542b are shown as a single-layer structure, but a laminated structure of two or more layers may be used.
  • a tantalum nitride film and a tungsten film may be laminated.
  • the titanium film and the aluminum film may be laminated.
  • a two-layer structure in which an aluminum film is laminated on a tungsten film a two-layer structure in which a copper film is laminated on a copper-magnesium-aluminum alloy film, a two-layer structure in which a copper film is laminated on a titanium film, and a two-layer structure in which a copper film is laminated on a titanium film. It may have a two-layer structure in which copper films are laminated.
  • a transparent conductive material containing indium oxide, tin oxide or zinc oxide may be used.
  • a region 543a and a region 543b may be formed as low resistance regions at the interface of the oxide 530 with the conductor 542a (conductor 542b) and its vicinity.
  • the region 543a functions as one of the source region or the drain region
  • the region 543b functions as the other of the source region or the drain region.
  • a channel formation region is formed in a region sandwiched between the region 543a and the region 543b.
  • the oxygen concentration in the region 543a (region 543b) may be reduced. Further, in the region 543a (region 543b), a metal compound layer containing the metal contained in the conductor 542a (conductor 542b) and the component of the oxide 530 may be formed. In such a case, the carrier density of the region 543a (region 543b) increases, and the region 543a (region 543b) becomes a low resistance region.
  • the insulator 544 is provided so as to cover the conductor 542a and the conductor 542b, and suppresses the oxidation of the conductor 542a and the conductor 542b. At this time, the insulator 544 may be provided so as to cover the side surface of the oxide 530 and come into contact with the insulator 524.
  • insulator 544 a metal oxide containing one or more selected from hafnium, aluminum, gallium, yttrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, neodymium, lanthanum, magnesium, etc. Can be used. Further, as the insulator 544, silicon nitride oxide, silicon nitride or the like can also be used.
  • the insulator 544 it is preferable to use aluminum or an oxide containing one or both oxides of hafnium, such as aluminum oxide, hafnium oxide, aluminum, and an oxide containing hafnium (hafnium aluminate). ..
  • hafnium aluminate has higher heat resistance than the hafnium oxide film. Therefore, it is preferable because it is difficult to crystallize in the heat treatment in the subsequent step.
  • the conductors 542a and 542b are made of a material having oxidation resistance, or if the conductivity does not significantly decrease even if oxygen is absorbed, the insulator 544 is not an indispensable configuration. It may be appropriately designed according to the desired transistor characteristics.
  • the insulator 544 By having the insulator 544, it is possible to prevent impurities such as water and hydrogen contained in the insulator 580 from diffusing into the oxide 530b via the insulator 545. Further, it is possible to suppress the oxidation of the conductor 560 due to the excess oxygen contained in the insulator 580.
  • the insulator 545 functions as a first gate insulating film.
  • the insulator 545 is preferably formed by using an insulator that contains excess oxygen and releases oxygen by heating, similarly to the above-mentioned insulator 524.
  • silicon oxide having excess oxygen silicon oxide, silicon nitride, silicon nitride, silicon oxide to which fluorine is added, silicon oxide to which carbon is added, carbon, and silicon oxide to which nitrogen is added, and vacancies are used.
  • Silicon oxide having can be used.
  • silicon oxide and silicon nitride nitride are preferable because they are stable against heat.
  • the insulator 545 By providing an insulator containing excess oxygen as the insulator 545, oxygen can be effectively supplied from the insulator 545 to the channel forming region of the oxide 530b. Further, similarly to the insulator 524, it is preferable that the concentration of impurities such as water or hydrogen in the insulator 545 is reduced.
  • the film thickness of the insulator 545 is preferably 1 nm or more and 20 nm or less. Further, the above-mentioned microwave treatment may be performed before and / or after the formation of the insulator 545.
  • a metal oxide may be provided between the insulator 545 and the conductor 560.
  • the metal oxide preferably suppresses oxygen diffusion from the insulator 545 to the conductor 560.
  • the diffusion of excess oxygen from the insulator 545 to the conductor 560 is suppressed. That is, it is possible to suppress a decrease in the amount of excess oxygen supplied to the oxide 530.
  • oxidation of the conductor 560 due to excess oxygen can be suppressed.
  • a material that can be used for the insulator 544 may be used.
  • the insulator 545 may have a laminated structure as in the case of the second gate insulating film.
  • an insulator that functions as a gate insulating film is made of a high-k material and heat.
  • the conductor 560 functioning as the first gate electrode is shown as a two-layer structure in FIGS. 22A and 22B, it may have a single-layer structure or a laminated structure of three or more layers.
  • Conductor 560a is a hydrogen atom, a hydrogen molecule, a water molecule, a nitrogen atom, a nitrogen molecule, nitric oxide molecule (N 2 O, NO, etc. NO 2), conductive having a function of suppressing the diffusion of impurities such as copper atoms It is preferable to use a material. Alternatively, it is preferable to use a conductive material having a function of suppressing the diffusion of oxygen (for example, at least one oxygen atom, oxygen molecule, etc.). Since the conductor 560a has a function of suppressing the diffusion of oxygen, it is possible to prevent the conductor 560b from being oxidized by the oxygen contained in the insulator 545 to reduce the conductivity.
  • the conductive material having a function of suppressing the diffusion of oxygen for example, tantalum, tantalum nitride, ruthenium, ruthenium oxide and the like are preferably used.
  • an oxide semiconductor applicable to the oxide 530 can be used as the conductor 560a. In that case, by forming the conductor 560b into a film by a sputtering method, the electric resistance value of the conductor 560a can be lowered to form a conductor. This can be called an OC (Oxide Conductor) electrode.
  • the conductor 560b it is preferable to use a conductive material containing tungsten, copper, or aluminum as a main component. Further, since the conductor 560b also functions as wiring, it is preferable to use a conductor having high conductivity. For example, a conductive material containing tungsten, copper, or aluminum as a main component can be used. Further, the conductor 560b may have a laminated structure, for example, a laminated structure of titanium or titanium nitride and the conductive material.
  • the insulator 580 is provided on the conductor 542a and the conductor 542b via the insulator 544.
  • the insulator 580 preferably has an excess oxygen region.
  • silicon, resin, or the like silicon oxide and silicon oxide nitride are preferable because they are thermally stable.
  • silicon oxide and silicon oxide having pores are preferable because an excess oxygen region can be easily formed in a later step.
  • the insulator 580 preferably has an excess oxygen region. By providing the insulator 580 in which oxygen is released by heating, the oxygen in the insulator 580 can be efficiently supplied to the oxide 530. It is preferable that the concentration of impurities such as water and hydrogen in the insulator 580 is reduced.
  • the opening of the insulator 580 is formed so as to overlap the region between the conductor 542a and the conductor 542b.
  • the conductor 560 is formed so as to be embedded in the opening of the insulator 580 and the region sandwiched between the conductor 542a and the conductor 542b.
  • the conductor 560 When miniaturizing a semiconductor device, it is required to shorten the gate length, but it is necessary to prevent the conductivity of the conductor 560 from decreasing. Therefore, if the film thickness of the conductor 560 is increased, the conductor 560 may have a shape having a high aspect ratio. In the present embodiment, since the conductor 560 is provided so as to be embedded in the opening of the insulator 580, even if the conductor 560 has a shape having a high aspect ratio, the conductor 560 is formed without collapsing during the process. Can be done.
  • the insulator 574 is preferably provided in contact with the upper surface of the insulator 580, the upper surface of the conductor 560, and the upper surface of the insulator 545.
  • an excess oxygen region can be provided in the insulator 545 and the insulator 580. Thereby, oxygen can be supplied into the oxide 530 from the excess oxygen region.
  • the insulator 574 use one or more metal oxides selected from hafnium, aluminum, gallium, yttrium, zirconium, tungsten, titanium, tantalum, nickel, germanium, magnesium and the like. Can be done.
  • aluminum oxide has a high barrier property and can suppress the diffusion of hydrogen and nitrogen even in a thin film of 0.5 nm or more and 3.0 nm or less. Therefore, the aluminum oxide formed by the sputtering method can have a function as a barrier film for impurities such as hydrogen as well as an oxygen supply source.
  • the insulator 581 that functions as an interlayer film on the insulator 574.
  • the insulator 581 preferably has a reduced concentration of impurities such as water and hydrogen in the film.
  • the conductor 540a and the conductor 540b are arranged in the openings formed in the insulator 581, the insulator 574, the insulator 580, and the insulator 544.
  • the conductor 540a and the conductor 540b are provided so as to face each other with the conductor 560 interposed therebetween.
  • the conductor 540a and the conductor 540b have the same configuration as the conductor 546 and the conductor 548 described later.
  • An insulator 582 is provided on the insulator 581.
  • the insulator 582 it is preferable to use a substance having a barrier property against oxygen and hydrogen. Therefore, the same material as the insulator 514 can be used for the insulator 582.
  • a metal oxide such as aluminum oxide, hafnium oxide, and tantalum oxide for the insulator 582.
  • aluminum oxide has a high blocking effect that does not allow the membrane to permeate both oxygen and impurities such as hydrogen and water, which are factors that change the electrical characteristics of transistors. Therefore, aluminum oxide can prevent impurities such as hydrogen and moisture from being mixed into the transistor 500 during and after the manufacturing process of the transistor. In addition, it is possible to suppress the release of oxygen from the oxides constituting the transistor 500. Therefore, it is suitable for use as a protective film for the transistor 500.
  • an insulator 586 is provided on the insulator 582.
  • the same material as the insulator 320 can be used. Further, by applying a material having a relatively low dielectric constant to these insulators, it is possible to reduce the parasitic capacitance generated between the wirings.
  • a silicon oxide film, a silicon nitride film, or the like can be used as the insulator 586.
  • a conductor 546, a conductor 548, etc. are embedded in the insulator 522, the insulator 524, the insulator 544, the insulator 580, the insulator 574, the insulator 581, the insulator 582, and the insulator 586. There is.
  • the conductor 546 and the conductor 548 have a function as a plug or wiring for connecting to the capacitance element 600, the transistor 500, or the transistor 550.
  • the conductor 546 and the conductor 548 can be provided by using the same materials as the conductor 328 and the conductor 330.
  • an opening may be formed so as to surround the transistor 500, and an insulator having a high barrier property against hydrogen or water may be formed so as to cover the opening.
  • an insulator having a high barrier property against hydrogen or water By wrapping the transistor 500 with the above-mentioned insulator having a high barrier property, it is possible to prevent moisture and hydrogen from entering from the outside.
  • a plurality of transistors 500 may be put together and wrapped with an insulator having a high barrier property against hydrogen or water.
  • the insulator having a high barrier property to hydrogen or water for example, the same material as the insulator 522 or the insulator 514 may be used.
  • the capacitive element 600 has a conductor 610, a conductor 620, and an insulator 630.
  • the conductor 612 may be provided on the conductor 546 and the conductor 548.
  • the conductor 612 has a function as a plug or wiring for connecting to the transistor 500.
  • the conductor 610 has a function as an electrode of the capacitive element 600.
  • the conductor 612 and the conductor 610 can be formed at the same time.
  • the conductor 612 and the conductor 610 include a metal film containing an element selected from molybdenum, titanium, tantalum, tungsten, aluminum, copper, chromium, neodymium, and scandium, or a metal nitride film containing the above-mentioned elements as components.
  • a metal nitride film, titanium nitride film, molybdenum nitride film, tungsten nitride film and the like can be used.
  • indium tin oxide, indium oxide containing tungsten oxide, indium zinc oxide containing tungsten oxide, indium oxide containing titanium oxide, indium tin oxide containing titanium oxide, indium zinc oxide, and silicon oxide are added. It is also possible to apply a conductive material such as indium tin oxide.
  • the conductor 612 and the conductor 610 are shown in a single-layer configuration, but the configuration is not limited to this, and a laminated configuration of two or more layers may be used.
  • a conductor having a barrier property and a conductor having a high adhesion to a conductor having a high conductivity may be formed between a conductor having a barrier property and a conductor having a high conductivity.
  • the conductor 620 is provided so as to overlap with the conductor 610 via the insulator 630.
  • a conductive material such as a metal material, an alloy material, or a metal oxide material can be used. It is preferable to use a refractory material such as tungsten or molybdenum that has both heat resistance and conductivity, and it is particularly preferable to use tungsten. When it is formed at the same time as other configurations such as a conductor, Cu (copper), Al (aluminum), or the like, which are low resistance metal materials, may be used.
  • An insulator 640 is provided on the conductor 620 and the insulator 630.
  • the insulator 640 can be provided by using the same material as the insulator 320. Further, the insulator 640 may function as a flattening film that covers the uneven shape below the insulator 640.
  • FIG. 23A is an example of a schematic diagram for explaining an integrated circuit including each configuration of the arithmetic processing system 100.
  • the integrated circuit 390 illustrated in FIG. 23A can be made into one integrated circuit in which each circuit is integrated by forming a part of the circuit included in the CPU 110 and the accelerator described as the semiconductor device 10 with an OS transistor.
  • the CPU 110 may be configured to provide the backup circuit 222 on the layer having the OS transistor on the upper layer of the CPU core 200.
  • the memory circuit unit 30 is provided on the layer having the OS transistor on the upper layer of the layer having the Si transistor constituting the arithmetic circuit unit 40. be able to.
  • an OS memory 300N or the like may be provided on the layer having the OS transistor.
  • the OS memory 300N in addition to the NOSRAM described in the above embodiment, a DOSRAM can be applied. Further, in the OS memory 300N, the memory density can be improved by stacking the layer having the OS transistor on the drive circuit provided in the layer having the Si transistor.
  • FIG. 23B shows an example of a semiconductor chip incorporating an integrated circuit 390.
  • the semiconductor chip 391 shown in FIG. 23B has a lead 392 and an integrated circuit 390.
  • the integrated circuit 390 is provided with various circuits shown in the above-described embodiment on one die.
  • the integrated circuit 390 has a laminated structure and is roughly classified into a layer having a Si transistor (Si transistor layer 393), a wiring layer 394, and a layer having an OS transistor (OS transistor layer 395). Since the OS transistor layer 395 can be provided by being laminated on the Si transistor layer 393, the semiconductor chip 391 can be easily miniaturized.
  • QFP Quad Flat Package
  • Other configuration examples include insert-mount type DIP (Dual In-line Package), PGA (Pin Grid Array), surface mount type SOP (Small Outline Package), SSOP (Shrink Small Outline Package), and SSOP (Shrink Small Outline Package). Thin-Small Outline Package), LCC (Leaded Chip Carrier), QFN (Quad Flat Non-leaded package), BGA (Ball Grid Array), FBGA (Fine Grid Type), FBGA (Fine Grid), FBGA (Fine Grid) Structures such as Package) and QTP (Quad Type-carrier Package) can be appropriately used.
  • the arithmetic circuit and switching circuit having the Si transistor and the memory circuit having the OS transistor can all be formed in the Si transistor layer 393, the wiring layer 394, and the OS transistor layer 395. That is, the elements constituting the semiconductor device can be formed by the same manufacturing process. Therefore, in the IC shown in FIG. 23B, it is not necessary to increase the manufacturing process even if the number of constituent elements increases, and the semiconductor device can be incorporated at low cost.
  • a novel semiconductor device and an electronic device can be provided.
  • a semiconductor device and an electronic device having low power consumption can be provided.
  • FIG. 24A illustrates an external view of an automobile as an example of a moving body.
  • FIG. 24B is a diagram that simplifies the exchange of data in the automobile.
  • the automobile 590 has a plurality of cameras 591 and the like. Further, the automobile 590 is equipped with various sensors (not shown) such as an infrared radar, a millimeter wave radar, and a laser radar.
  • the integrated circuit 390 (or the semiconductor chip 391 incorporating the integrated circuit 390) can be used in the camera 591 or the like.
  • the camera 591 processes a plurality of images obtained in a plurality of imaging directions 592 by the integrated circuit 390 described in the above embodiment, and the plurality of images are collected by the host controller 594 or the like via the bus 593 or the like. By analyzing this, it is possible to judge the surrounding traffic conditions such as the presence or absence of guard rails and pedestrians, and perform automatic driving. It can also be used in systems for road guidance, danger prediction, and the like.
  • the obtained image data is subjected to arithmetic processing such as a neural network to increase the resolution of the image, reduce image noise, face recognition (for crime prevention, etc.), and object recognition (for automatic driving).
  • arithmetic processing such as a neural network to increase the resolution of the image, reduce image noise, face recognition (for crime prevention, etc.), and object recognition (for automatic driving).
  • Etc. image compression, image correction (wide dynamic range), image restoration of lensless image sensor, positioning, character recognition, reduction of reflection reflection, etc. can be performed.
  • moving objects include trains, monorails, ships, flying objects (helicopters, unmanned aerial vehicles (drones), airplanes, rockets), etc.
  • computer of one aspect of the present invention is applied to these moving objects. Therefore, a system using artificial intelligence can be provided.
  • FIG. 25A is an external view showing an example of a portable electronic device.
  • FIG. 25B is a diagram simplifying the exchange of data in the portable electronic device.
  • the portable electronic device 595 includes a printed wiring board 596, a speaker 597, a camera 598, a microphone 599, and the like.
  • the integrated circuit 390 can be provided on the printed wiring board 596.
  • the portable electronic device 595 improves user convenience by processing and analyzing a plurality of data obtained by the speaker 597, the camera 598, the microphone 599, etc. by using the integrated circuit 390 described in the above embodiment. be able to. It can also be used in systems that perform voice guidance, image search, and the like.
  • the obtained image data is subjected to arithmetic processing such as a neural network to increase the resolution of the image, reduce image noise, face recognition (for crime prevention, etc.), and object recognition (for automatic driving).
  • arithmetic processing such as a neural network to increase the resolution of the image, reduce image noise, face recognition (for crime prevention, etc.), and object recognition (for automatic driving).
  • Etc. image compression, image correction (wide dynamic range), image restoration of lensless image sensor, positioning, character recognition, reduction of reflection reflection, etc. can be performed.
  • the portable game machine 1100 shown in FIG. 26A has a housing 1101, a housing 1102, a housing 1103, a display unit 1104, a connection unit 1105, an operation key 1107, and the like.
  • the housing 1101, the housing 1102, and the housing 1103 can be removed.
  • the connection unit 1105 provided in the housing 1101 to the housing 1108 the video output to the display unit 1104 can be output to another video device.
  • the housing 1102 and the housing 1103 to the housing 1109, the housing 1102 and the housing 1103 are integrated and function as an operation unit.
  • the integrated circuit 390 shown in the previous embodiment can be incorporated into the chips and the like provided on the boards of the housing 1102 and the housing 1103.
  • FIG. 26B is a USB connection type stick-type electronic device 1120.
  • the electronic device 1120 has a housing 1121, a cap 1122, a USB connector 1123, and a substrate 1124.
  • the board 1124 is housed in the housing 1121.
  • a memory chip 1125 and a controller chip 1126 are attached to the substrate 1124.
  • the integrated circuit 390 shown in the previous embodiment can be incorporated into the controller chip 1126 or the like of the substrate 1124.
  • FIG. 26C is a humanoid robot 1130.
  • the robot 1130 has sensors 2101 to 2106 and a control circuit 2110.
  • the integrated circuit 390 shown in the previous embodiment can be incorporated in the control circuit 2110.
  • the integrated circuit 390 described in the above embodiment can be used as a server that communicates with the electronic device instead of being built in the electronic device.
  • the computing system is composed of electronic devices and servers.
  • FIG. 27 shows a configuration example of the system 3000.
  • the system 3000 is composed of an electronic device 3001 and a server 3002. Communication between the electronic device 3001 and the server 3002 can be performed via the Internet line 3003.
  • the server 3002 has a plurality of racks 3004.
  • a plurality of substrates 3005 are provided in the plurality of racks, and the integrated circuit 390 described in the above embodiment can be mounted on the substrate 3005.
  • a neural network is configured on the server 3002.
  • the server 3002 can perform the calculation of the neural network by using the data input from the electronic device 3001 via the Internet line 3003.
  • the result of the calculation by the server 3002 can be transmitted to the electronic device 3001 via the Internet line 3003, if necessary. Thereby, the burden of calculation in the electronic device 3001 can be reduced.
  • each embodiment can be made into one aspect of the present invention by appropriately combining with other embodiments or configurations shown in Examples. Further, when a plurality of configuration examples are shown in one embodiment, the configuration examples can be appropriately combined.
  • the content described in one embodiment is another content (may be a part of the content) described in the embodiment, and / or one or more. It is possible to apply, combine, or replace the contents described in another embodiment (some contents may be used).
  • figure (which may be a part) described in one embodiment is another part of the figure, another figure (which may be a part) described in the embodiment, and / or one or more.
  • figures (which may be a part) described in another embodiment of the above more figures can be constructed.
  • the components are classified by function and shown as blocks independent of each other.
  • it is difficult to separate the components for each function and there may be a case where a plurality of functions are involved in one circuit or a case where one function is involved in a plurality of circuits. Therefore, the blocks in the block diagram are not limited to the components described in the specification, and can be appropriately paraphrased according to the situation.
  • the size, the thickness of the layer, or the area is shown in an arbitrary size for convenience of explanation. Therefore, it is not necessarily limited to that scale.
  • the drawings are schematically shown for the sake of clarity, and are not limited to the shapes or values shown in the drawings. For example, it is possible to include variations in the signal, voltage, or current due to noise, or variations in the signal, voltage, or current due to timing lag.
  • electrode and “wiring” do not functionally limit these components.
  • an “electrode” may be used as part of a “wiring” and vice versa.
  • the terms “electrode” and “wiring” include the case where a plurality of “electrodes” and “wiring” are integrally formed.
  • the voltage and the potential can be paraphrased as appropriate.
  • the voltage is a potential difference from a reference potential.
  • the reference potential is a ground voltage (ground voltage)
  • the voltage can be paraphrased as a potential.
  • the ground potential does not necessarily mean 0V.
  • the electric potential is relative, and the electric potential given to the wiring or the like may be changed depending on the reference electric potential.
  • a node can be paraphrased as a terminal, a wiring, an electrode, a conductive layer, a conductor, an impurity region, etc., depending on a circuit configuration, a device structure, and the like.
  • terminals, wiring, etc. can be paraphrased as nodes.
  • a and B are connected means that A and B are electrically connected.
  • the term “A and B are electrically connected” refers to an object (an element such as a switch, a transistor element, or a diode, or a circuit including the element and wiring) between A and B. ) Is present, it means a connection capable of transmitting an electric signal between A and B.
  • the case where A and B are electrically connected includes the case where A and B are directly connected.
  • the fact that A and B are directly connected means that the electric signal between A and B is transmitted between A and B via wiring (or electrodes) or the like without going through the object.
  • a possible connection is a connection that can be regarded as the same circuit diagram when represented by an equivalent circuit.
  • the switch means a switch that is in a conductive state (on state) or a non-conducting state (off state) and has a function of controlling whether or not a current flows.
  • the switch means a switch having a function of selecting and switching a path through which a current flows.
  • the channel length means, for example, in the top view of a transistor, a region or a channel where a semiconductor (or a portion where a current flows in the semiconductor when the transistor is on) and a gate overlap is formed.
  • the distance between the source and drain in the region means, for example, in the top view of a transistor, a region or a channel where a semiconductor (or a portion where a current flows in the semiconductor when the transistor is on) and a gate overlap is formed. The distance between the source and drain in the region.
  • the channel width is a source in, for example, a region where a semiconductor (or a portion where a current flows in a semiconductor when a transistor is on) and a gate electrode overlap, or a region where a channel is formed.
  • membrane and layer can be interchanged with each other in some cases or depending on the situation.
  • conductive layer to the term “conductive layer”.
  • insulating film to the term “insulating layer”.

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PCT/IB2021/052351 2020-04-03 2021-03-22 半導体装置 Ceased WO2021198841A1 (ja)

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CN202180025916.0A CN115362551A (zh) 2020-04-03 2021-03-22 半导体装置
JP2022512493A JP7630496B2 (ja) 2020-04-03 2021-03-22 半導体装置
KR1020227036996A KR20220163977A (ko) 2020-04-03 2021-03-22 반도체 장치
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