WO2021181783A1 - X-ray inspection device and x-ray inspection method - Google Patents

Abstract

This X-ray inspection device acquires a three-dimensional image of and inspects an object under inspection and comprises an X-ray source for generating X-rays to be emitted onto the object under inspection, an X-ray camera for capturing X-ray images of the X-rays emitted from the X-ray source onto the object under inspection, and a holding part for holding the object under inspection. One from among the X-ray source, X-ray camera, and holding part turns as a turning part such that the X-ray images are captured while the capturing direction changes. The turning part sequentially turns in a plurality of locations and moves so as to shift from the turning end point of one turning motion to the turning start point of the next turning motion. There is no stopping period in which the turning part stops in the turning motion or shifting motion.

Description

X-ray inspection equipment and X-ray inspection method

The present invention relates to an X-ray inspection apparatus that acquires a plurality of X-ray images of an object to be inspected and creates three-dimensional data.

Conventionally, there is a technique of taking X-ray images of an object to be inspected such as the surface of a substrate from a plurality of directions, creating three-dimensional data from the multiple X-ray images taken, and inspecting the internal structure of the inspection site. .. Examples of this include techniques such as tomosynthesis and CT. In this technique, the inspection site of the object to be inspected is irradiated with X-rays from an X-ray source, and the transmitted X-rays are photographed by an X-ray camera. Then, a plurality of X-ray images are taken while relatively changing the positional relationship between the X-ray source, the object to be inspected, and the X-ray camera.

At that time, at least one of the X-ray source, the object to be inspected, and the X-ray camera is swiveled to change the relative positions of each other. A moving motion is performed to the imaging position for photographing the inspection point, and then a turning motion is performed. Therefore, in order to shorten the inspection time of the object to be inspected, it is necessary to efficiently perform the above-mentioned turning motion and moving motion.

To solve this problem, an imaging path in which the time required to capture a plurality of radiation transmitting images is shortened based on the imaging conditions for capturing a radiation transmitting image is set by an individual processing time (for example, a radiation generator). The time required for the radiation to be irradiated to stabilize, the time required to move the radiation generator, the time required to translate the substrate holding unit on the plane on which the substrate rotation trajectory is stretched, the detector drive unit is the detector and A technique for solving a combination / optimization problem of a combination / optimization problem (such as the time required to move the substrate holding portion in conjunction with it) is known (see, for example, Patent Document 1).

However, in the conventional technology, the optimization of the movement method and the movement trajectory when moving the X-ray source, the object to be inspected, and the X-ray camera has not been sufficiently studied.

Japanese Unexamined Patent Publication No. 2011-209054 Japanese Unexamined Patent Publication No. 2013-247228

The present invention has been made in view of the above problems, and an object of the present invention is to provide a technique capable of shortening the inspection time of an inspected object in an X-ray inspection apparatus.

The present invention for solving the above problems includes an X-ray source that generates X-rays to irradiate an inspection target, and an X-ray source.
An X-ray camera that captures an X-ray image of the X-rays emitted from the X-ray source to the inspection target, and an X-ray camera.
A holding unit for holding the inspection target is provided.
The X-ray source, the X-ray camera, and any of the holding portions rotate as a swivel portion to capture the X-ray image while changing the imaging direction, and the inspection target. An X-ray inspection device that acquires and inspects three-dimensional images.
The turning portion sequentially makes a turning motion at a plurality of places, and also performs a moving motion for moving from the turning end point of one turning motion to the turning start point of the next turning motion.
The X-ray inspection apparatus is characterized in that the turning portion does not have a stop section that stops in the middle of the turning motion and the moving motion.

That is, in the X-ray inspection apparatus of the present invention, the X-ray source, the X-ray camera, and the holding portion rotate as a swivel portion to change the imaging direction and X at the inspection location. A line image is taken, and a three-dimensional image of the inspection location is acquired and inspected. Then, the swivel unit sequentially performs swivel motions at different places in order to acquire three-dimensional images of the plurality of inspection points.

In addition, the turning unit performs a moving motion during each turning motion and for moving from the turning end point of one turning motion to the turning start point of the next turning motion. Then, it shifts from the turning motion to the moving motion without stopping.

Here, in the conventional technology, it was necessary to temporarily stop the turning portion when shifting from the turning motion to the moving motion or from the moving motion to the turning motion. Then, the approaching distance and the braking distance for accelerating and decelerating in the middle of the turning motion are required. On the other hand, in the present invention, the swivel portion does not require an acceleration motion or a deceleration motion for stopping between the swivel motion and the locomotion motion. As a result, it is not necessary to perform an additional turning motion for acceleration / deceleration before and after the turning motion for taking an X-ray image. Therefore, it is possible to reduce the total exercise time of the plurality of turning motions and the moving motions and shorten the inspection time.

Further, in the present invention, when the turning portion moves from the turning end point of one turning motion to the turning start point of the next turning motion, the X-ray source and the X-ray are described. The camera and one of the holding portions are specified as a trajectory that smoothly connects the turning circle of the one turning motion and the turning circle of the next turning motion at the turning end point and the turning start point. The specific moving trajectory may be a trajectory in which the linear velocity of the turning portion is continuous at the turning end point and / or the turning start point.

Further, in the present invention, in the specific moving trajectory, the linear velocity and acceleration of the turning portion are continuous at the turning end point and / or the turning start point, or at the turning end point and / or the turning start point. The trajectory may be such that the linear velocity, acceleration, and jerk of the turning portion are continuous. Then, in this case, the acceleration of the turning portion may be 0 at the turning end point and / or the turning start point.

That is, in the specific moving trajectory of the present invention, the linear velocity of the turning portion is required to be continuous at the turning end point and / or the turning start point. And it is desirable that the linear velocity and acceleration are continuous. Ideally, the linear velocity, acceleration and jerk are continuous. Further, when the acceleration is continuous, it is ideal that the acceleration is 0.

According to this, it is possible to alleviate the acceleration and impact acting on the turning portion when shifting from the turning motion to the moving motion or from the moving motion to the turning motion. As a result, the inspection time can be further shortened.

Further, in the present invention, the specific moving orbit may be defined by a polynomial expression. According to this, it is possible to obtain a specific moving trajectory by a general mathematical solution method.

Further, in the present invention, the turning start point and the turning end point in the turning circle of the one turning motion are the center of the turning circle of the previous turning motion and the next turning motion and the turning circle of the one turning motion. It may be the midpoint of the shorter arc on the turning circle of the one turning motion at the two intersections of the straight line connecting the centers and the turning circle of the one turning motion. According to this, it is possible to select the turning start point and the turning end point in the turning circle of the turning motion so that the specific moving trajectory is the shortest by a simple calculation.

That is, there can be a plurality of orbits that smoothly connect the turning circle of the one turning motion and the turning circle of the next turning motion at the turning end point and the turning start point, but when the length of the trajectory is long, it is possible. , The effect of shortening the inspection time is limited. On the other hand, in the present invention, the specific moving trajectory is a trajectory that smoothly connects the turning circle of the one turning motion and the turning circle of the next turning motion at the turning end point and the turning start point. Since the orbit can be the shortest, the inspection time can be shortened more reliably.

Then, in the above, when the shorter arc on the turning circle of the one turning motion cannot be specified, the turning end point of the one turning motion and the turning start point of the next turning motion are each set. It may be arranged at a predetermined angle position in the turning circle of the turning motion. According to this, even when the shorter arc cannot be specified, for example, when the turning circles are lined up in a horizontal row, the turning end point of one turning motion and the turning start point of the next turning motion can be determined. It can be set to any angle, and a specific movement trajectory can be calculated without any problem.

Further, in the present invention, the turning end point of the one turning motion and the turning start point of the next turning motion may be arranged at the same angle position in the turning circle of each turning motion. .. For example, the turning end point of one turning motion and the turning start point of the next turning motion are determined to be 0 degree positions in the turning circle of each turning motion or arbitrary angle positions other than 0 degrees regardless of the case. You may.

Further, in the present invention, the swivel portion is any two of the X-ray source, the X-ray camera, and the holding portion, and the specific moving trajectory is the X-ray source and the X. The swivel circle of the one swivel motion and the swivel circle of the next swivel motion of the line camera and one of the two holding portions having a larger radius are completed. It may be a trajectory that smoothly connects the point and the turning start point.

Here, when the swivel portion is any two of the X-ray source, the X-ray camera, and the holding portion, the swivel portion is drawn by one of the swivel portions in order to acquire a three-dimensional image of the inspection portion. The swirling circle of motion and the swirling circle of the swivel motion drawn by the other are often different. Then, in the present invention, one of the swivel portions, the X-ray source, the X-ray camera, and the holding portion, which performs the swivel motion with a larger radius, makes one swivel of the specific moving trajectory. The turning circle of the motion and the turning circle of the next turning motion are defined as a trajectory that smoothly connects the turning end point and the turning start point. Further, the turning start point and turning end point in the turning circle of one turning motion are one with a straight line connecting the center of the turning circle of the previous turning motion and the next turning motion and the center of the turning circle of one turning motion. The midpoint of the shorter arc on the turning circle of one turning motion at the two intersections with the turning circle of the turning motion. Diligent research by the inventors has shown that this can reduce the total time of multiple turning and locomotions. Therefore, according to this, the inspection time can be shortened more reliably.

Further, in the present invention, of the X-ray source, the X-ray camera, and the holding portion, the one that performs a turning motion with a smaller radius is the X-ray source and the X. The line camera and any two of the holding portions may be made to reach the turning start point in the turning circle of the next turning motion at the same time as the one performing the turning motion having a larger radius.

Then, of the X-ray source, the X-ray camera, and any two of the holding portions, the one that performs the turning motion with the smaller radius is the X-ray source and the X-ray camera. It is possible to reach the turning start point in the turning circle of the next turning motion at the same time as the one that performs the turning motion with a larger radius among any two of the holding portions. As a result, it is possible to start the next turning motion at an early stage by the turning portion.

Further, in the present invention, the specific moving orbit has a predetermined linear velocity, axial velocity, or acceleration of any one of the X-ray source, the X-ray camera, and the holding portion, which is the turning portion. It may be determined within a range that does not exceed the permissible value (permissible speed or permissible acceleration). According to this, it is possible to prevent the speed and acceleration of the X-ray source, the X-ray camera, the holding portion, etc. from becoming excessive when the swivel portion moves along a specific moving trajectory, and it is possible to prevent a failure of the device. , It is possible to improve the reliability.

Further, in the present invention, in the specific moving trajectory, the moving range of any one of the X-ray source, the X-ray camera, and the holding portion, which is the turning portion, exceeds a predetermined movement allowable range. It may be decided not to. Alternatively, the swivel in the specific movement trajectory so that the movement range of any one of the swivel portion, the X-ray source, the X-ray camera, and the holding portion does not exceed a predetermined permissible movement range. The movement time of the unit may be determined. According to this, when the swivel part moves along a specific movement trajectory, the X-ray source, the X-ray camera, the holding part, etc. collide with the structure in the device, or the limit range set by the software is set. If it exceeds the limit, inconveniences such as an error can be prevented, and reliability can be improved.

Further, in the present invention, the swivel portion may be the X-ray source and the X-ray camera, and the holding portion may be held at a predetermined position in the X-ray inspection apparatus. In this case, the inspection can be performed by fixing the inspection target and causing the X-ray camera and the X-ray source to perform swivel movement and movement movement above and below the inspection target, and the non-inspection object in the X-ray inspection device. It is possible to simplify the moving mechanism, carrying-in mechanism, etc.

Further, the present invention includes an X-ray source that generates X-rays to irradiate an inspection target, and an X-ray source.
An X-ray camera that captures an X-ray image of the X-rays emitted from the X-ray source to the inspection target, and an X-ray camera.
A holding unit for holding the inspection target is provided.
The X-ray source, the X-ray camera, and any of the holding portions rotate as a swivel portion to capture the X-ray image while changing the imaging direction, and the inspection target. It is an X-ray inspection method using an X-ray inspection device that acquires and inspects a three-dimensional image.
The swivel portion is sequentially swiveled at a plurality of locations, and at the same time, a locomotion is performed when moving from the swivel end point of one swivel motion to the swivel start point of the next swivel motion.
X-rays characterized in that any one of the swivel portion, the X-ray source, the X-ray camera, and the holding portion is transferred from the swivel motion to the moving motion without stopping. It may be an inspection method.

Further, in that case, when the turning portion moves from the turning end point of one turning motion to the turning start point of the next turning motion, the X-ray source and the X-ray are described. A specific trajectory that smoothly connects the turning circle of the one turning motion and the turning circle of the next turning motion to the camera and one of the holding portions at the turning end point and the turning start point. Move along the moving trajectory,
The specific moving trajectory may be a trajectory in which the linear velocity of the turning portion is continuous at the turning end point and / or the turning start point.

At that time, in the specific moving trajectory, the linear velocity and acceleration of the turning portion are continuous at the turning end point and / or the turning start point, or the turning at the turning end point and / or the turning start point. It may be an orbit in which the linear velocity, acceleration and jerk of the part are continuous. Further, when the acceleration is continuous at the turning end point and / or the turning start point, the acceleration may be set to 0.

At that time, the specific moving orbit may be defined by a polynomial expression.

At that time, the turning start point and the turning end point in the turning circle of the one turning motion are the center of the turning circle of the previous turning motion and the next turning motion and the center of the turning circle of the one turning motion. It may be the midpoint of the shorter arc on the turning circle of the one turning motion at the two intersections of the connected straight line and the turning circle of the one turning motion.

Further, in the present invention, the computer is made to calculate the specific moving trajectory, and any one of the X-ray source, the X-ray camera, and the holding portion, which is the turning portion, is set to the specific moving trajectory. It may be a program that outputs a drive signal for moving along the line.

As described above, the present invention can be regarded as an X-ray inspection apparatus including at least a part of the above means. The present invention can also be regarded as an X-ray inspection method including at least a part of the processing performed by the above means. Further, it can be regarded as a computer program for causing a computer to execute each step of these methods, or as a computer-readable storage medium in which the program is stored non-temporarily. Each of the above configurations and processes can be combined with each other to construct the present invention as long as there is no technical contradiction.

According to the present invention, it is possible to shorten the inspection time of a non-inspected object in an X-ray inspection apparatus.

It is a figure which shows the outline of the X-ray inspection apparatus in Example 1 of this invention. It is a figure which shows the relationship between the turning motion and the moving motion of the X-ray source or the X-ray camera in Example 1 of this invention. It is a figure which shows the example of the trajectory of the turning motion and the moving motion of the X-ray source or the X-ray camera in Example 1 of this invention. It is a figure for demonstrating the method of deriving the shortest locomotion locomotion in Example 1 of this invention. It is a figure which shows the 2nd example of the locomotive locomotion of the X-ray source or the X-ray camera in Example 1 of this invention. It is a figure which shows the 3rd example of the locomotive locomotion of the X-ray source or the X-ray camera in Example 1 of this invention. It is a figure which shows the 4th example of the locomotive locomotion of the X-ray source or the X-ray camera in Example 1 of this invention. It is a figure which shows the 5th example of the locomotive locomotion of the X-ray source or the X-ray camera in Example 1 of this invention. It is a program which shows the movement control routine of an X-ray source and an X-ray camera in Example 1 of this invention. It is a figure which shows the outline of the X-ray inspection apparatus in Example 2 of this invention. It is a figure which shows the example of the trajectory of the turning motion and the moving motion of the X-ray camera and the object to be inspected in Example 2 of this invention. It is a figure which shows the 2nd example of the locomotive locomotion of the X-ray camera and the object to be inspected in Example 2 of this invention.

[Application example]
The outline of the application example of the present invention will be described below with reference to some drawings. The present invention is applied to the X-ray inspection apparatus 1 as shown in FIG. In the X-ray inspection apparatus 1, the X-ray source 10 irradiates the object S to be inspected with X-rays, and the X-ray camera 20 captures an X-ray image by the transmitted light. The X-ray source 10 and the X-ray camera 20 make swirling motions on the swirling circles 121 and 122, respectively, and take an X-ray image of the object S to be inspected at a plurality of positions on the orbit. After that, in order to inspect another inspection point, both the X-ray source 10 and the X-ray camera 20 perform a moving motion to the next turning circle, and further move on the turning circle to take an X-ray image.

Here, when the X-ray source 10 and the X-ray camera 20 shift from the turning motion to the moving motion, a stop section is provided to temporarily stop as shown in FIG. 2 (a). Along with this, acceleration motion and deceleration motion on the turning circle were added before and after the turning motion. In this application example, as shown in FIG. 2B, the stop section when the X-ray source 10 and the X-ray camera 20 shift from the turning motion to the moving motion is eliminated. The extra stop state and the extra turning motion are omitted, and the X-ray source 10 and the X-ray camera 20 can move from the turning circle to the next turning circle more quickly.

Further, in this application example, as shown in FIG. 3, the turning circle and the next turning circle are set at the turning end point and the turning start point as the trajectories of the moving motion when moving from the turning circle to the next turning circle. We decided to use a smooth orbit. As a result, the X-ray source 10 and the X-ray camera 20 can be moved more quickly without giving an excessive acceleration or impact. At that time, by the method shown in FIG. 4, the distance between the turning end point in the turning circle and the turning start point in the next turning circle is set to the shortest, and the turning end point and the turning start point can be smoothly connected. Is.

As shown in FIG. 1, the present invention is applicable to the X-ray inspection device 1 in which the object S to be inspected is fixed and the X-ray source 10 and the X-ray camera 20 are swiveled above and below the object S to be inspected. As shown in FIG. 10, it is also possible to apply it to the X-ray inspection device 11 in which the X-ray source 10 is fixed and the X-ray camera 20 and the object S to be inspected rotate.

Hereinafter, embodiments for carrying out the present invention will be described in detail exemplarily based on examples with reference to the respective drawings (including the drawings once described in the above application examples). However, the specific configurations described in this example are not intended to limit the scope of the present invention to those alone unless otherwise specified.
[Example 1]

The X-ray inspection apparatus according to the first embodiment of the present invention is, for example, an apparatus for determining the quality of soldered electronic components soldered to a printed circuit board, bumps of a ball grid array (BGA), and the like. More specifically, the X-ray source and the object to be inspected are relatively moved to perform X-ray photography multiple times, the internal state of the inspection target location is acquired, and a cross-sectional image at an appropriate position is generated. Then, the quality is inspected based on the cross-sectional image.

<Device configuration>
FIG. 1 shows a layout diagram of an X-ray source 10, a holding unit 40 for holding an object S to be inspected, and an X-ray camera 20 in the X-ray inspection apparatus 1 according to the first embodiment of the present invention. In the X-ray inspection apparatus 1, X-ray images are taken at a plurality of imaging positions for each inspection location in the object S to be inspected, which is conveyed by a conveying roller (not shown) and held by the holding unit 40, and three-dimensional data is obtained. get. Specifically, the X-ray source 10 irradiates the object S to be inspected with X-rays, and the X-ray camera 20 captures an X-ray image of the transmitted light. Both the X-ray source 10 and the X-ray camera 20 can be moved by a stage (not shown). The X-ray source 10 and the X-ray camera 20 move on the swivel circles 121 and 122, respectively, by these stages, and imaging is performed at a plurality of positions on the swivel circles.

The control of each part in the board inspection device 1 is performed based on the control signal from the control unit 100. The X-ray inspection device 1 includes a camera XY stage control unit 101, a camera control unit 102, and an X-ray source XY stage control unit 107 as control units 100. In addition, it includes a height measuring unit 103, an inspection target position control unit 104, an X-ray source control unit 105, and an imaging height control unit 106. Further, the X-ray inspection device 1 includes a calculation unit 111, a main storage unit 112, an auxiliary storage unit 113, an input unit 114, and an output unit 115.

The camera XY stage control unit 101 drives the camera XY stage (not shown) and transmits a control signal for moving the X-ray camera 20 in the horizontal direction. The camera control unit 102 transmits a control signal for taking an X-ray image by the X-ray camera 20. The height measuring unit 103 receives a signal from the displacement meter 30 and measures the height of the inspected portion of the inspected object S. The inspection target position control unit 104 transmits a control signal to the transport roller and the holding unit 40 of the inspected object S to control the horizontal position and the vertical position of the inspected object S to the optimum positions for photographing.

The X-ray source control unit 105 transmits a signal for adjusting the X-ray intensity in addition to the start and end of X-ray irradiation by the X-ray source 10. The imaging height control unit 106 transmits signals for height control of the X-ray source 10 and the X-ray camera 20. The X-ray source XY stage control unit 107 drives the X-ray source XY stage (not shown) and transmits a signal for horizontally moving the X-ray source 10. The signals output from the camera XY stage control unit 101, camera control unit 102, inspection target position control unit 104, X-ray source control unit 105, imaging height control unit 106, and X-ray source XY stage control unit 107 are calculated. It is determined based on the calculation result of the unit 111 and the information stored in the main storage unit 112 and the auxiliary storage unit 113.

In particular, the imaging command unit 111a of the calculation unit 111 transmits information necessary for acquiring an X-ray image to each unit including the camera control unit 102. Further, the locus calculation unit 111b calculates the locus that the X-ray source 10 and the X-ray camera 20 should follow by a method described later. Further, information such as setting information and inspection results is exchanged with the user via the input unit 114 and the output unit 115.

The X-ray camera 20 is a two-dimensional X-ray detector that detects X-rays emitted from the X-ray source 10 and transmitted through the object S to be inspected. As the X-ray camera 20, I. I. An (Image Intensifier) tube or an FPD (flat panel detector) can be used. Although only one X-ray camera 20 is adopted here, a plurality of X-ray cameras may be used.

The displacement meter 30 measures the distance to the object S to be inspected at a plurality of positions of the object S to be inspected. Therefore, it is possible to measure the warp and inclination of the object S to be inspected by the displacement meter 30. In the manufacturing process of the object S to be inspected, warpage or inclination may occur, and the amount thereof varies depending on the individual. Therefore, the warp and inclination of each object S to be inspected are measured, and the height position of the holding portion 40 is adjusted so that appropriate X-ray imaging can be performed.

With the above configuration, the X-ray inspection apparatus 1 can control the positions of the X-ray source 10 and the X-ray camera 20 so that the substrate can be imaged from various directions. In this embodiment, based on the imaging results from various directions in this way, three-dimensional data of the inspected portion of the inspected object S is generated by using a three-dimensional data generation method called CT (Computed Tomography). ..

As the arithmetic unit 111, a general general-purpose arithmetic unit called a CPU (central processing unit) can be used. A memory such as a RAM can be used as the main storage unit 112. As the auxiliary storage unit 113, a ROM, an HDD, or the like can be used. The input unit 114 is an arbitrary device such as a keyboard, a button, a switch, and a mouse that allows a user to input an instruction to the calculation unit 111. The output unit 115 is an arbitrary device such as a display or a speaker that can present the output from the calculation unit 111 to the user by video, audio, or the like. That is, these functional parts can be realized by using a general computer system. When the arithmetic unit 111 reads and executes the program stored in the auxiliary storage unit 113, the movement control of the X-ray source 10 and the X-ray camera 20 as shown below is performed.

Here, as shown in FIG. 1, the X-ray source 10 and the X-ray camera 20 are each swirling circle 121 based on the control signals from the XY stage control unit 107 for the X-ray source and the XY stage control unit 101 for the camera. , 122, and X-ray images are taken at a plurality of positions on the orbit. Then, by swirling on the swirling circles 121 and 122 with respect to each inspection point on the object S to be inspected, it is possible to create a three-dimensional image of the inspection point. When the object S to be inspected is inspected, the X-ray source 10 and the X-ray camera 20 make one turning motion over 360 degrees (hereinafter, the nth turning) because there are a plurality of positions of the inspection points. After performing an X-ray image of the inspection site by performing an exercise (also referred to as an exercise), a moving motion is performed to a position where the next test site can be photographed, and a turning motion (hereinafter, n + 1) over the next 360 degrees from that position is performed. (Also called the second turning motion) is started.

FIG. 2 shows the locus of the X-ray source 10 or the X-ray camera 20 when the X-ray source 10 or the X-ray camera 20 performs the nth turning motion, the moving motion, and the n + 1th turning motion. show. At that time, as shown in FIG. 2A, more specifically, the acceleration motion is performed before the nth turning motion, the nth turning motion is performed at a constant velocity, and the nth turning motion is performed. After (360 degrees) is completed, a deceleration motion is performed to temporarily stop. Then, after that, the locomotion is performed along a predetermined trajectory. This is because during the turning motion of the X-ray source 10 or the X-ray camera 20, a high-speed, high-quality X-ray image is taken, so that it is necessary to perform a constant-velocity circular motion at high speed.

Similarly, after the X-ray source 10 or the X-ray camera 20 has finished moving and stopped, the acceleration motion is performed again, and the X-ray source 10 or the X-ray camera 20 reaches the start point of the turning motion. It is accelerated to a predetermined speed before, and then the n + 1th turning motion (360 degrees) is started. In other words, the X-ray source 10 or the X-ray camera 20 was temporarily stopped in the stop section before and after the turning motion for capturing the X-ray image. Then, a turning motion for acceleration / deceleration before and after the stop is added. As described above, in the conventional control, there is an inconvenience that the inspection time becomes long because the X-ray source 10 or the X-ray camera 20 needs to be stopped and a turning motion for acceleration / deceleration before and after the stop is required. rice field.

On the other hand, in this embodiment, as shown in FIG. 2B, the stop section is eliminated during the movement from the nth turning motion to the n + 1th turning motion, and the turning for taking an X-ray image is performed. In addition to the exercise, it was decided not to perform a turning exercise for acceleration / deceleration before and after the stop.

Then, in this embodiment, the shortest of the loci that smoothly connects the locomotion trajectory of the nth turning motion and the turning circle of the n + 1th turning motion at the turning end point and the turning start point. I decided to make it a trajectory. Here, the locus that smoothly connects the turning circle of the nth turning motion and the turning circle of the n + 1th turning motion is the linear velocity of the X-ray source 10 or the X-ray camera 20 at the turning end point and / or the turning start point. May be a continuous locus. Alternatively, it is desirable that the locus is such that the linear velocity and acceleration of the X-ray source 10 or the X-ray camera 20 are continuous at the turning end point and / or the turning start point. Alternatively, it is ideal that the linear velocity, acceleration and jerk of the X-ray source 10 or the X-ray camera 20 are continuous at the turning end point and / or the turning start point. Further, when the acceleration is continuous, it is ideal that the acceleration is 0.

FIG. 3 shows an example of the locomotion trajectory in that case. The arrows and the numbers of circles 1 to 3 in the figure correspond to the nth turning motion, the moving motion, and the n + 1th turning motion, respectively. FIG. 3A shows an example of the locomotion trajectory of the X-ray camera 20. As shown in FIG. 3A, the locomotion locomotion 123a of the X-ray camera 20 has the swivel circle 122a of the nth swivel motion and the swivel circle 122b of the n + 1th swivel motion as the highest points of both. It is the shortest curve among the curves that smoothly connect at (hereinafter, this point is also referred to as a 0 degree position or a 360 degree position).

FIG. 3B also shows an example of the locomotion trajectory of the X-ray source 10. As shown in FIG. 3B, the locomotion locomotion 123b of the X-ray source 10 has the swivel circle 121a of the nth swivel motion and the swivel circle 121b of the n + 1th swivel motion at the bottom of both. It is the shortest curve among the curves that smoothly connect at a point (hereinafter, this point is also referred to as a 180 degree position). Here, it is the X-ray source 10 and the X-ray camera 20 that the place where the locus of the moving motion and the turning circle of each turning motion are connected differs by 180 degrees between FIGS. 3 (a) and 3 (b). Is required to be arranged at a position symmetrical with respect to the inspection point of the object S to be inspected, and when the X-ray camera 20 is arranged at the 0 degree position or the 360 degree position, the X-ray source 10 is arranged. This is because it needs to be arranged at a 180 degree position.

A curve that smoothly connects the swirling circle of the nth swirling motion and the swirling circle of the n + 1th swirling motion at a predetermined point as shown in FIG. 3 is derived as a polynomial by a known mathematical method. Since it is possible, the method of deriving the curve will not be described in particular here. Further, regarding the method of deriving the shortest curve among the curves that smoothly connect the swirling circle of the nth swirling motion and the swirling circle of the n + 1th swirling motion at a predetermined point, a polynomial obtained by a known method is used. Mathematical parameters such as coefficients of each term of the curve may be assigned, and the one having the shortest length may be selected by iterative calculation.

In FIG. 3, the moving time when the X-ray camera 20 moves along the locomotion 123a shown in FIG. 3A and the X-ray source 10 along the locomotion 123b shown in FIG. 3B. In order to match the movement times in the case of the movement movement, the speed in the movement movement of the one having the longer movement time may be increased so that both movements are completed at the same time. By doing so, both can complete the locomotion at the same time and move to the next turning motion.

As described above, in the present embodiment, the stop section when the X-ray source 10 and the X-ray camera 20 shift from the nth turning motion to the moving motion and shift from the moving motion to the n + 1th turning motion is set. It was decided that the X-ray source 10 and the X-ray camera 20 would not stop. As a result, in the turning motion for taking an X-ray image, it is not necessary to add a turning motion for acceleration / deceleration before and after the stop section, and immediately after the end of the turning motion, the moving motion to the next turning motion is started. It is possible to make a transition, and immediately after the end of the locomotion, it is possible to shift to the next turning movement. As a result, the inspection time in the X-ray inspection apparatus 1 can be shortened.

Further, in the present embodiment, the locomotion locomotion at the time of transition from the nth turning motion to the n + 1th turning motion is defined as the turning circle of the nth turning motion and the turning circle of the n + 1th turning motion. The shortest curve among the curves smoothly connected at the turning end point and the turning start point (both at the 0 degree position in FIG. 3) was used. As a result, the X-ray source 10 and the X-ray camera 20 are moved more smoothly from the turning motion to the moving motion or from the moving motion to the turning motion (excessive acceleration or impact acts on the X-ray source 10 or the X-ray camera 20). It is possible to make a transition (without doing so), and even when the speed in the turning motion is high, it is possible to more reliably perform the acceleration / deceleration motion in the middle of the moving motion. Further, the X-ray source 10 and the X-ray camera 20 can be moved more quickly from the turning motion to the moving motion or from the moving motion to the turning motion.

Table 1 shows the results of comparing the time required for the nth turning motion, the moving motion, and the n + 1th turning motion in the X-ray inspection apparatus between the case where the present invention is not applied and the case where the present invention is applied. show.

It can be seen that the elapsed time is improved by about 13% by applying the present invention to the X-ray inspection apparatus. Here, the locomotion locomotion 123a of the X-ray camera 20 and the locomotion locomotion 123b of the X-ray source 10 in FIG. 3 correspond to the specific locomotion trajectories in this embodiment. This point is the same for the following modifications and examples. Further, in this embodiment, the locus 123a of the moving motion of the X-ray camera 20 and the locus 123b of the moving motion of the X-ray source 10 are the shortest curves among the curves smoothly connecting the swirling circles, but they are not necessarily the shortest. It does not have to be, and any curve that smoothly connects the swirling circles and has a length that can sufficiently shorten the inspection time is sufficient.

<Modification example>
Next, a modified example in this embodiment will be described. In this modification, an example of optimizing the turning end point in the nth turning motion and the turning start point in the n + 1th turning motion will be described. In this example, the turning end point in the nth turning motion and the turning start point in the n + 1th turning motion are not fixed at the 0 degree position or the 180 degree position, but the n + 1th turning from the nth turning motion. The locomotion trajectory when transitioning to exercise is defined to be shorter.

As shown in FIG. 4, in this modification, for example, when calculating the turning end point of the turning circle 122n of the nth turning motion, the previous n-1th turning motion in the turning circle 122n. The intersection of the straight line connecting the centers of the turning circle 122n-1 and the turning circle 122n and the turning circle 122n is obtained. Further, the intersection of the straight line connecting the center of the swirling circle 122n and the center of the swirling circle 122n + 1 after it and the swirling circle 122n is obtained. Then, the central point Pn of the shorter arc of the arcs sandwiched between the two intersections is set as the turning end point of the turning circle 122n of the nth turning motion.

Further, when calculating the turning start point of the turning circle 122n + 1 of the n + 1th turning motion, the straight line connecting the turning circle 122n of the previous nth turning motion and the center of the turning circle 122n + 1 in the turning circle 122n + 1. Find the intersection of and the turning circle 122n + 1. Further, the intersection of the straight line connecting the center of the swirling circle 122n + 1 and the center of the swirling circle 122n + 2 one after it and the swirling circle 122n + 1 is obtained. Then, the central point Pn + 1 of the shorter arc among the arcs sandwiched between the two intersections is set as the turning start point of the turning circle 122n + 1 of the n + 1th turning motion. Then, Pn and Pn + 1 are smoothly connected by a curve 123n. According to this, it is possible to smoothly connect the turning circle of the nth turning motion and the turning circle of the n + 1th turning motion with a shorter curve.

FIG. 5 shows an example of the locomotion trajectory determined according to this method. FIG. 5B shows the locomotion locomotion 123b between the swirling circle 121a of the nth swivel motion of the X-ray source 10 and the swirling circle 121b of the n + 1th swirling motion. FIG. 5A shows the locomotion locomotion 123a between the swivel circle 122a of the nth swivel motion of the X-ray camera 20 and the swivel circle 122b of the n + 1th swivel motion.

In FIG. 5, the turning end point in the turning circle 121a and the turning start point in the turning circle 121b are determined by the method shown in FIG. 4 so that the locus 123b shown in FIG. 5B is the shortest. The shortest curve among the curves that smoothly connect the turning circle 121a and the turning circle 121b at the turning end point and the turning start point is obtained. Then, in FIG. 5A, the curve that smoothly connects the turning circle 122a of the nth turning motion of the X-ray camera 20 and the turning circle 122b of the n + 1th turning motion at the turning end point and the turning start point. The locus 123a is obtained as the shortest curve. The turning end point and turning start point in FIG. 5A are points obtained as points having 180-degree phases different from the turning end point and turning start point in FIG. 5B, respectively.

Table 2 shows the time required for the nth turning motion, the moving motion, and the n + 1th turning motion in the X-ray inspection apparatus when the present invention according to the modified example is not applied and when the present invention is applied. The result of comparison is shown.

It can be seen that the elapsed time is improved by about 16% by applying the present invention to the X-ray inspection apparatus. It should be noted that, for example, when the swirling circles are lined up in a horizontal row, the shorter arc of the arcs sandwiched between the two intersections may not be specified by the method shown in FIG. In this embodiment, in such a case, the turning end point and the turning start point in the turning motion may be set at predetermined angular positions. In this case, it may be fixed at the 0 degree position or the 180 degree position, or may be changed for each turning circle. In this way, it is possible to avoid a situation in which the turning end point and the turning start point in the turning motion cannot be calculated.

Next, in FIG. 6, when the distance between the turning circle of the nth turning motion and the turning circle of the n + 1th turning motion is relatively long (for example, the distance between the centers of the turning circles is three times the diameter of the turning circles). Examples 123a and 123b of the locomotion trajectory of the above) are shown. In FIG. 6A, the turning end point in the turning circle 122a of the nth turning motion of the X-ray camera 20 and the turning start point in the turning circle 122b of the n + 1th turning motion are fixed at the 0 degree position, and the nth turning motion is performed. The shortest curve among the curves smoothly connecting the turning circle 122a of the turning motion and the turning circle 122b of the n + 1th turning motion at the 0 degree position is obtained as the locus 123a.

Further, in FIG. 6B, the turning end point in the turning circle 121a of the nth turning motion of the X-ray source 10 and the turning start point in the turning circle 121b of the n + 1th turning motion are fixed at 180 degree positions, and n The shortest curve among the curves smoothly connecting the turning circle 121a of the first turning motion and the turning circle 121b of the n + 1th turning motion at the 180-degree position is obtained as the locus 123b.

Further, in FIG. 7, when the distance between the turning circle of the first turning motion and the turning circle of the second turning motion is relatively long (for example, the distance between the centers of the turning circles is three times or more the diameter of the turning circles). ), Examples 123a and 123b of the locomotion locomotion are shown. In FIG. 7B, the turning end point in the turning circle 121a of the nth turning motion of the X-ray source 10 and the turning start point in the turning circle 121b of the n + 1th turning motion are optimized by the method of FIG. , The shortest curve among the curves smoothly connecting the turning circle 121a of the nth turning motion and the turning circle 121b of the n + 1th turning motion at the optimized turning end point and the turning start point is obtained as the locus 123b. There is.

7 (a) shows the turning end point in the turning circle 122a of the nth turning motion of the X-ray camera 20 and the turning start point in the turning circle 122b of the n + 1th turning motion, and FIG. 7 (b) shows the turning end point in FIG. 7 (b). It is determined as a position where the movement is changed by 180 degrees with respect to the point and the turning start point. Then, the shortest curve among the curves smoothly connecting the turning circle 122a of the nth turning motion and the turning circle 122b of the n + 1th turning motion at the determined turning end point and the turning start point is obtained as the locus 123a. ing. Table 3 shows the effect of shortening the inspection time in the case shown in FIG.

As shown in Table 3, the turning end point in the turning circle 122a of the nth turning motion of the X-ray camera 20 and the turning start point in the turning circle 122b of the n + 1th turning motion are fixed at the 0 degree position, and the X-ray source is used. When the turning end point in the turning circle 121a of the 10th nth turning motion and the turning start point in the turning circle 121b of the n + 1th turning motion were fixed at the 180-degree position, an improvement effect of about 12% was observed. ..

Further, when the turning end point in the turning circles 122a and 121a of the nth turning motion of the X-ray camera 20 and the X-ray source 10 and the turning start point in the turning circles 121a and 121b of the n + 1th turning motion are optimized. , An improvement effect of about 18% was observed.

Next, FIG. 8 shows an example of the locomotion trajectory when the distance between the turning circle of the nth turning motion and the turning circle of the n + 1th turning motion is relatively long, and is an example of the locomotion trajectory of the X-ray camera 20 and the X-ray source. The case where the turning end point in the turning circle of the nth turning motion and the turning start point in the turning circle of the n + 1th turning motion is optimized is shown.

In FIG. 8A, the turning end point in the turning circle of the nth turning motion of the X-ray source 10 and the turning start point in the turning circle of the n + 1th turning motion are optimized by the method of FIG. The turning end point in the turning circle of the 20th nth turning motion and the turning start point in the turning circle of the n + 1th turning motion change their phases by 180 degrees with respect to the turning end point and the turning start point of the X-ray source 10. The loci of the moving motion 123a and 123b in the case of the above are shown. In this case, the X-ray camera 20 reaches the turning start point in the turning circle 122b of the n + 1th turning motion, and at the same time, the X-ray source 10 reaches the turning start point in the turning circle 121b of the n + 1th turning motion. In addition, the speed of the X-ray source 10 during the locomotion is adjusted.

In FIG. 8B, the turning end point in the turning circle 122a of the nth turning motion of the X-ray camera 20 and the turning start point in the turning circle 122b of the n + 1th turning motion are optimized by the method of FIG. The turning end point in the turning circle 121a of the nth turning motion of the source 10 and the turning start point in the turning circle 121b of the n + 1th turning motion are 180 degrees with respect to the turning end point and the turning start point of the X-ray camera 20, respectively. The case where the phase is changed is shown. As can be seen from FIG. 8, the travel time in this case was 1.674 s in the case of FIG. 8 (a) and 1.552 s in the case of FIG. 9 (b).

Thus, according to the diligent research of the inventors, when the distance between the turning circle of the nth turning motion and the turning circle of the n + 1th turning motion is relatively long (for example, the distance between the centers of the turning circles is swirling). This is an example of the locomotion trajectory of (more than 3 times the diameter of the circle), and the turning end point in the nth turning motion of the X-ray camera 20 and the X-ray source 10 and the turning start point in the n + 1th turning motion are optimal. In this case, the turning end point in the nth turning motion and the turning start point in the n + 1th turning motion are optimized for the X-ray camera 20 and the X-ray source 10 having a larger turning radius. It has been found that the effect of shortening the time in locomotion is greater.

Therefore, when the distance between the turning circle of the nth turning motion and the turning circle of the n + 1th turning motion is relatively long, the X-ray camera 20 and the X-ray source 10 have a larger turning radius. It is advisable to optimize the turning end point in the nth turning motion and the turning start point in the n + 1th turning motion.

Next, the flow of control by the calculation unit 111 and the control unit 100 in this embodiment will be described. FIG. 9 shows a flowchart of the movement control routine of the X-ray source 10 and the X-ray camera 20 in this embodiment. This routine is a program stored in the main storage unit 112, and is executed by the calculation unit 111 and the control unit 100.

When this routine is executed, first, in step S01, the turning end point and the turning start point are set for the turning circle having the larger radius among the turning circle drawn by the X-ray source 10 and the turning circle drawn by the X-ray camera 20. Optimize. More specifically, the turning end point and the turning start point where the distance between the two becomes shorter are calculated by the calculation method shown in FIG. Here, the description will be continued on the assumption that the swirling circle drawn by the X-ray camera 20 is larger than the swirling circle drawn by the X-ray source 10. When the process of step S01 is completed, the process proceeds to step S02.

In step S02, a locus that smoothly connects the above two turning circles at the turning end point and the turning start point calculated in step S01 is calculated. Since this is performed by a mathematically known method for calculating a polynomial expression, detailed description thereof will be omitted here. When the process of step S02 is completed, the process proceeds to step S03.

In step S03, the movement time is calculated from the locomotion trajectory calculated in step S02 and the movement speed of the X-ray camera 20. When the process of step S03 is completed, the process proceeds to step S04. In step S04, whether or not either the linear speed or the axial speed of the X-ray camera 20 exceeds the permissible speed and the acceleration acting on the X-ray camera 20 when moving within the movement time calculated in step S03. It is determined whether or not the permissible acceleration is exceeded and whether or not the motion range in the turning motion and the moving motion of the X-ray camera 20 exceeds the permissible movement range.

Here, either the linear velocity or the axial velocity of the X-ray camera 20 exceeds the permissible speed, the acceleration acting on the X-ray camera 20 exceeds the permissible acceleration, or the motion range of the X-ray camera 20 exceeds the permissible movement. If it is determined that the range is exceeded, the permissible rotation speed of the motor or ball screw is exceeded, the X-ray camera 20 cannot withstand the acceleration and deteriorates, or the X-ray camera 20 is a member in the X-ray inspection device 1. Since it is determined that there is a risk of collision with the X-ray camera 20, the acceleration acting on the X-ray camera 20 becomes low, or the mathematical parameters of the curve are changed so that the motion range of the X-ray camera 20 becomes narrow, and then step S02 is performed again. Return to the processing of. Then, in the routines of steps S02 to S05, in step S04, either the linear velocity or the axial velocity of the X-ray camera 20 does not exceed the permissible speed, and the acceleration acting on the X-ray camera 20 does not exceed the permissible acceleration. And, it is repeatedly executed until it is determined that the motion range of the X-ray camera 20 does not exceed the allowable movement range.

In step S04, either the linear velocity or the axial velocity of the X-ray camera 20 does not exceed the permissible speed, the acceleration acting on the X-ray camera 20 does not exceed the permissible acceleration, and the motion range of the X-ray camera 20 is increased. If it is determined that the allowable movement range is not exceeded, the process proceeds to step S06. Here, the permissible speed is a speed value predetermined as a threshold value that does not exceed the permissible rotation speed of the motor or the ball screw. The permissible acceleration is a predetermined acceleration value as a threshold value at which the X-ray camera does not deteriorate even if it acts on the X-ray camera 20. The permissible movement range is a motion range predetermined as a threshold value of the motion range in which the X-ray camera 20 does not collide with other members in the device.

In step S06, the calculation of the travel time is completed. When the process of step S06 is completed, the process proceeds to step S07. The processes from step S01 to step S06 are executed by the calculation unit 111.

Next, in step S07, the control unit 100 receives the calculated travel time. Further, in step S08, information necessary for the moving motion of the X-ray source 10 and the X-ray camera 20 such as the moving position coordinates, the turning speed, the turning center, and the turning radius is received. When the processing of step S07 and step S08 is completed, the process proceeds to step S09.

In step S09, the locus of movement to the turning start point, which is the next movement destination, is calculated. Here, the locus of movement corresponding to the movement time received in S07 is calculated again. When the process of step S09 is completed, the process proceeds to step S10. In step S10, the output for the X-ray source 10 and the X-ray camera 20 to move along the trajectory to the next turning start point is supported by controlling the movement of the X-ray source 10 and the X-ray camera 20. Output to the drive motor (not shown) of the XY stage. The processes from step S07 to step S10 are executed by the control unit 100.

In this routine, in step S02 and step S03, the turning end point and turning are performed until it is determined in S04 that the speed (either linear speed or axial speed), acceleration, and moving position do not exceed the permissible values. The locus that smoothly connects the starting point and the moving time were calculated. However, the trajectory and movement that smoothly connects the turning end point and the turning start point until it is determined that any of the speed (either linear speed or axial speed), acceleration, or moving position does not exceed the permissible value. The flow may be such that the time is calculated.
<Example 2>

Next, Example 2 of the present invention will be described. In the first embodiment, the present invention is applied to an X-ray inspection apparatus 1 in which the position of the object S to be inspected is fixed and the X-ray camera 20 and the X-ray source 10 are swiveled above and below the position. Was explained. In the second embodiment, an example in which the present invention is applied to the X-ray inspection apparatus 11 in which the X-ray source 10 is fixed and the inspected object S and the X-ray camera 20 are swiveled will be described.

FIG. 10 shows an example of arrangement of the X-ray camera 20, the object to be inspected S, and the X-ray source 10 in the X-ray inspection apparatus 11 in this embodiment. FIG. 9A shows an example in which the X-ray camera 20 is arranged above the object S to be inspected and the X-ray source 10 is arranged below the object S to be inspected. This is an example in which the X-ray source 10 is arranged above the object S to be inspected and the X-ray camera 20 is arranged below the object S to be inspected. In either case, the X-ray source 10 is fixed, and the X-ray camera 20 and the object S to be inspected perform a turning motion.

FIG. 11 shows a case where the present invention is applied to the X-ray inspection apparatus 11 adopting the arrangement shown in FIG. The locomotives of the turning motion and the moving motion of the X-ray camera 20 and the object S to be inspected are shown when the point and the turning start point in the turning circle of the n + 1th turning motion are set to the 0 degree position. Unlike the case of the first embodiment, in the X-ray camera 20 and the object S to be inspected, the turning end point in the turning circle of the nth turning motion and the turning start point of the n + 1th turning motion are both at the 0 degree position. ing. FIG. 11A shows a locomotive of the turning motion and the moving motion of the X-ray camera 20. FIG. 11B is a locomotion locomotion of the object S to be inspected.

FIG. 12 shows a case where the present invention is applied to the X-ray inspection apparatus 11 adopting the arrangement shown in FIG. 10A, and the turning circle of the nth turning motion of the X-ray camera 20 and the object S to be inspected. The locomotives of the turning motion and the moving motion of the X-ray camera 20 and the object S to be inspected when the turning end point in the above and the turning start point in the turning circle of the n + 1th turning motion are optimized are shown. FIG. 12 (a) shows the loci of the turning motion and the moving motion of the X-ray camera 20. FIG. 12B shows the locomotion locomotion and locomotion of the object S to be inspected. Table 4 shows the effect of shortening the travel time in this embodiment.

Even when the present invention is applied to the X-ray inspection apparatus 11 according to the arrangement of the present embodiment, the travel time can be shortened by 19% in the case shown in FIG. 11 and by 23% in the case shown in FIG. I understand.

In addition, in order to make it possible to compare the constituent requirements of the present invention with the configurations of the examples, the constituent requirements of the present invention are described below with reference numerals in the drawings.
<Invention 1>
An X-ray source (10) that generates X-rays to irradiate the inspection target, and
An X-ray camera (20) that captures an X-ray image of the X-ray emitted from the X-ray source (10) to the inspection target, and an X-ray camera (20).
A holding unit (40) for holding the inspection target is provided.
Any one of the X-ray source (10), the X-ray camera (20), and the holding portion (40) swivels as a swivel portion (10, 20, 40) to change the shooting direction. It is an X-ray inspection apparatus (1, 11) which takes an X-ray image while changing and acquires and inspects a three-dimensional image of the inspection target (S).
The turning portions (10, 20, 40) sequentially turn at a plurality of places, and also perform a moving motion for moving from the turning end point of one turning motion to the turning start point of the next turning motion.
An X-ray inspection apparatus, wherein the swivel portion does not have a stop section in which the swivel portion stops in the middle of the swivel motion and the locomotion motion.
<Invention 13>
An X-ray source (10) that generates X-rays to irradiate the inspection target, and
An X-ray camera (20) that captures an X-ray image of the X-ray emitted from the X-ray source to the inspection target, and an X-ray camera (20).
A holding unit (40) for holding the inspection target is provided.
Any one of the X-ray source (10), the X-ray camera (20), and the holding portion (40) swivels as a swivel portion (10, 20, 40) to change the shooting direction. It is an X-ray inspection method using an X-ray inspection apparatus (1, 11) that takes an X-ray image while changing and acquires and inspects a three-dimensional image of the inspection target.
The swivel portion is sequentially swiveled at a plurality of places, and a locomotion is performed to move from the swivel end point of one swivel motion to the swivel start point of the next swivel motion.
Any one of the X-ray source (10), the X-ray camera (20), and the holding portion (40), which is the swivel portion, is shifted from the swivel motion to the locomotion motion without stopping. An X-ray inspection method characterized by this.

1, 11 ... X-ray inspection device 10 ... X-ray source 20 ... X-ray camera 40 ... Holding unit 121 ... X-ray source swivel motion swivel circle 122 ... X-ray camera swivel motion Swirling circle 123 ・ ・ ・ Moving motion locus S ・ ・ ・ Object to be inspected (board)

Claims (21)

1. An X-ray source that emits X-rays that irradiate the inspection target,
   An X-ray camera that captures an X-ray image of the X-rays emitted from the X-ray source to the inspection target, and an X-ray camera.
   A holding unit for holding the inspection target is provided.
   The X-ray source, the X-ray camera, and any of the holding portions rotate as a swivel portion to capture the X-ray image while changing the imaging direction, and the inspection target. An X-ray inspection device that acquires and inspects three-dimensional images.
   The turning portion sequentially makes a turning motion at a plurality of places, and also performs a moving motion for moving from the turning end point of one turning motion to the turning start point of the next turning motion.
   An X-ray inspection apparatus, wherein the swivel portion does not have a stop section in which the swivel portion stops in the middle of the swivel motion and the locomotion motion.
2. Of the X-ray source, the X-ray camera, and the holding portion, which are the swivel portions, when the swivel portion moves from the swivel end point of one swivel motion to the swivel start point of the next swivel motion. Either of the above moves along a specific moving trajectory which is a trajectory that smoothly connects the turning circle of the one turning motion and the turning circle of the next turning motion at the turning end point and the turning start point.
   The X-ray inspection apparatus according to claim 1, wherein the specific moving trajectory is a trajectory in which the linear velocity of the turning portion is continuous at the turning end point and / or the turning start point.
3. In the specific moving trajectory, the linear velocity and acceleration of the turning portion are continuous at the turning end point and / or the turning start point, or the linear velocity of the turning portion at the turning end point and / or the turning start point. The X-ray inspection apparatus according to claim 2, wherein the orbit has continuous acceleration and jerk.
4. The X-ray inspection apparatus according to claim 3, wherein the acceleration of the turning portion is 0 at the turning end point and / or the turning start point.
5. The X-ray inspection apparatus according to any one of claims 2 to 4, wherein the specific moving orbit is defined by a polynomial expression.
6. The turning start point and / or turning end point in the turning circle of the one turning motion is a straight line connecting the center of the turning circle of the previous turning motion and the next turning motion and the center of the turning circle of the one turning motion. Any one of claims 2 to 5, characterized in that it is the midpoint of the shorter arc on the turning circle of the one turning motion at the two intersections of the turning circle of the one turning motion and the turning circle of the one turning motion. The X-ray inspection apparatus according to the section.
7. When the shorter arc on the turning circle of the one turning motion cannot be specified, the turning end point of the one turning motion and the turning start point of the next turning motion are the turning circles of each turning motion. The X-ray inspection apparatus according to claim 6, wherein the X-ray inspection apparatus is arranged at a predetermined angle position.
8. Claims 2 to 5, wherein the turning end point of the one turning motion and the turning start point of the next turning motion are arranged at the same angle position in the turning circle of each turning motion. The X-ray inspection apparatus according to any one of the following items.
9. The swivel portion is any two of the X-ray source, the X-ray camera, and the holding portion, and the specific moving trajectory is the X-ray source, the X-ray camera, and the holding portion. The turning circle of the one turning motion and the turning circle of the next turning motion of the one that performs the turning motion with a larger radius among any two of the portions are the turning end point and the turning start point. The X-ray inspection apparatus according to any one of claims 2 to 6, wherein the orbits are smoothly connected in the above.
10. Of the X-ray source, the X-ray camera, and any two of the holding portions, the one that performs a turning motion with a smaller radius is the X-ray source, the X-ray camera, and the holding portion. The X-ray according to claim 9, wherein the X-ray of any two of the above-mentioned ones reaches the turning start point in the turning circle of the next turning motion at the same time as the one performing the turning motion with a larger radius. Inspection device.
11. The specific moving trajectory is a range in which either the linear velocity or the axial velocity of any of the X-ray source, the X-ray camera, and the holding portion, which is the turning portion, does not exceed a predetermined allowable speed. The X-ray inspection apparatus according to any one of claims 2 to 10, wherein the X-ray inspection apparatus is determined by.
12. The specific moving trajectory is determined within a range in which the acceleration acting on any of the X-ray source, the X-ray camera, and the holding portion, which is the turning portion, does not exceed a predetermined allowable acceleration. The X-ray inspection apparatus according to any one of claims 2 to 11, wherein the X-ray inspection apparatus is characterized.
13. The specific movement trajectory is determined so that the movement range of any one of the X-ray source, the X-ray camera, and the holding portion, which is the turning portion, does not exceed a predetermined allowable movement range. The X-ray inspection apparatus according to any one of claims 2 to 12, wherein the X-ray inspection apparatus is characterized.
14. The swivel portion in the specific movement trajectory so that the movement range of any of the swivel portion, the X-ray source, the X-ray camera, and the holding portion does not exceed a predetermined allowable movement range. The X-ray inspection apparatus according to any one of claims 2 to 12, wherein the travel time is determined.
15. The swivel part is the X-ray source and the X-ray camera, and the holding part is held at a predetermined position in the X-ray inspection apparatus, according to any one of claims 1 to 14. The X-ray inspection apparatus described.
16. An X-ray source that emits X-rays that irradiate the inspection target,
    An X-ray camera that captures an X-ray image of the X-rays emitted from the X-ray source to the inspection target, and an X-ray camera.
    A holding unit for holding the inspection target is provided.
    The X-ray source, the X-ray camera, and any of the holding portions rotate as a swivel portion to capture the X-ray image while changing the imaging direction, and the inspection target. It is an X-ray inspection method using an X-ray inspection device that acquires and inspects a three-dimensional image.
    The swivel portion is sequentially swiveled at a plurality of places, and a locomotion is performed to move from the swivel end point of one swivel motion to the swivel start point of the next swivel motion.
    An X-ray inspection characterized in that any one of the X-ray source, the X-ray camera, and the holding portion, which is the swivel portion, is transferred from the swivel motion to the moving motion without stopping. Method.
17. Of the X-ray source, the X-ray camera, and the holding portion, which are the swivel portions, when the swivel portion moves from the swivel end point of one swivel motion to the swivel start point of the next swivel motion. In any of the above, the turning circle of the one turning motion and the turning circle of the next turning motion are moved along a specific moving trajectory which is a trajectory smoothly connecting the turning end point and the turning start point.
    The X-ray inspection method according to claim 16, wherein the specific moving trajectory is a trajectory in which the linear velocity of the turning portion is continuous at the turning end point and / or the turning start point.
18. In the specific moving trajectory, the linear velocity and acceleration of the turning portion are continuous at the turning end point and / or the turning start point, or the linear velocity of the turning portion at the turning end point and / or the turning start point. The X-ray inspection method according to claim 17, wherein the orbit has continuous acceleration and jerk.
19. The X-ray inspection method according to claim 18, wherein the acceleration of the turning portion is 0 at the turning end point and / or the turning start point.
20. The X-ray inspection method according to any one of claims 17 to 19, wherein the specific moving orbit is defined by a polynomial expression.
21. The turning start point and turning end point in the turning circle of the one turning motion are the straight line connecting the center of the turning circle of the previous turning motion and the next turning motion and the center of the turning circle of the one turning motion and the said. The item according to any one of claims 16 to 20, wherein the two intersections with the turning circle of one turning motion are the midpoints of the shorter arc on the turning circle of the one turning motion. The described X-ray inspection method.
    

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