WO2021168839A1 - Memory and electronic device - Google Patents

Memory and electronic device Download PDF

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Publication number
WO2021168839A1
WO2021168839A1 PCT/CN2020/077293 CN2020077293W WO2021168839A1 WO 2021168839 A1 WO2021168839 A1 WO 2021168839A1 CN 2020077293 W CN2020077293 W CN 2020077293W WO 2021168839 A1 WO2021168839 A1 WO 2021168839A1
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WO
WIPO (PCT)
Prior art keywords
memory
chip
differential amplifier
word line
differential
Prior art date
Application number
PCT/CN2020/077293
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French (fr)
Chinese (zh)
Inventor
焦慧芳
赫然
范鲁明
刘燕翔
Original Assignee
华为技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 华为技术有限公司 filed Critical 华为技术有限公司
Priority to CN202080096121.4A priority Critical patent/CN115151972A/en
Priority to PCT/CN2020/077293 priority patent/WO2021168839A1/en
Publication of WO2021168839A1 publication Critical patent/WO2021168839A1/en

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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/34Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices
    • G11C11/40Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors
    • G11C11/401Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using semiconductor devices using transistors forming cells needing refreshing or charge regeneration, i.e. dynamic cells
    • G11C11/4063Auxiliary circuits, e.g. for addressing, decoding, driving, writing, sensing or timing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/56Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency

Definitions

  • This application relates to the field of information technology, and in particular to a memory and electronic equipment.
  • DRAM dynamic random access memory
  • CPU central processing unit
  • IOPS reads and writes per second
  • the memory chip includes a memory cell array and a logic circuit.
  • the memory cell array is designed to have a larger size, which can generally reach 512 Row X 1024 Column, which includes 512 word lines and 1024 bit lines, that is, both word lines and bit lines are longer, and more transistors are connected.
  • the word line activates multiple transistors, the data transmission path through the bit line is longer, and the parasitic capacitance of the bit line is large, which will cause high latency of the memory.
  • the present application provides a memory and an electronic device to expand the storage capacity of the memory, shorten the delay of the memory, simplify the memory structure, and reduce the cost.
  • the present application provides a memory that includes a first memory chip and a logic chip that are stacked and electrically connected, wherein the first memory chip includes a plurality of first memory cell arrays.
  • the memory cell array includes a plurality of transistors, and a plurality of bit lines and a plurality of word lines, and each transistor is connected with a bit line and a word line.
  • a plurality of transistor arrays are arranged, and one of the above-mentioned transistors is connected between any word line and any bit line.
  • the logic chip includes a differential amplifier and an interface control circuit, wherein both the differential amplifier and the interface control circuit are electrically connected to the first memory cell array.
  • the differential amplifier includes a first differential input terminal, a second differential input terminal, and an output terminal.
  • the first differential input terminal and the second differential input terminal are a set of differential input terminals, that is, the differential amplifier pair is from the first differential input terminal.
  • the input signal and the signal input from the second differential input terminal are differentially amplified.
  • the interface control circuit also includes a reference voltage source.
  • the first differential input terminal of the differential amplifier is electrically connected to the first memory cell array, specifically to the bit line of the first memory cell array, and the second differential input terminal is electrically connected to the logic chip.
  • the reference voltage source is electrically connected, and the differential amplifier performs differential amplification on the reference voltage of the reference voltage source and the signal of the bit line.
  • the differential amplifier is located in the logic chip, which does not occupy the area of the first memory chip and can expand the capacity of the memory.
  • the length of the connection line when the first memory cell array is connected to the differential amplifier can be shortened, which is beneficial to shorten the delay.
  • the peripheral control circuit part is located in the logic chip, and the storage part is located in the first storage chip.
  • the logic chip and the first storage chip can be processed separately by using more advanced technology to improve the transistor density and speed of the memory.
  • This solution also uses a reference voltage source to input a reference voltage to the differential amplifier to simplify the structure of the memory, reduce the area occupied by the connection line between the differential amplifier and the first memory chip, and reduce the cost.
  • the memory in this application may also include a bit line multiplexer.
  • the bit line multiplexer has multiple input ports and one output port.
  • the bit line multiplexer One end of the input port of the gate is connected to the bit line of the first memory cell array, and one end of the output port is connected to the differential amplifier. Then the bit line multiplexer can be connected to multiple bit lines.
  • the bit line multiplexer selects one of the multiple bit lines to output from the output port to the differential amplifier according to requirements. This solution can reduce the number of differential amplifiers in the memory, reduce the area occupied by the differential amplifiers, and can also reduce costs.
  • the bit line multiplexer When the bit line multiplexer is specifically set, the bit line multiplexer can be located in the first memory chip. Since the number of connections between the multiplexer and the bit line located in the first memory chip is large, and the number of connections to the differential amplifier located in the logic chip is small, this solution can reduce the number of connections from the first memory chip to the logic chip. In order to reduce the area occupied by the connection line, simplify the process, and improve the reliability of the connection between the first memory chip and the logic chip.
  • the logic chip further includes a word line driver, and the word line driver is connected to the word line of the first memory chip.
  • the word line driver can provide the gate voltage for the transistor on the word line, and control the opening and closing of the memory cell on the word line.
  • the word line driver of the memory is located on the logic chip and does not occupy the area of the first memory chip, which is beneficial to increase the number of first memory cell arrays of the first memory chip and expand the storage capacity of the memory.
  • the memory in this application may also include a word line multiplexer.
  • the word line multiplexer has multiple output ports and one input port.
  • the word line multiplexer One end of the output port of the gate is connected to the word line of the first memory cell array, and the input end is connected to the word line driver. Then the word line multiplexer can be connected to multiple word lines.
  • the word line multiplexer selects one of the multiple word lines to be connected to the word line driver according to requirements. This solution can reduce the number of word line drivers in the memory, reduce the area occupied by the word line drivers, and can also reduce costs.
  • the word line multiplexer When the word line multiplexer is specifically set, the word line multiplexer can be located in the first memory chip. Since the number of connections between the multiplexer and the word line located in the first memory chip is large, and the number of connections with the word line driver located in the logic chip is small, this solution can reduce the number of connections from the first memory chip to the logic chip.
  • the number of wires is used to reduce the area occupied by the connection wires, simplify the process, and improve the reliability of the connection between the first memory chip and the logic chip.
  • the memory may further include a second memory chip, the second memory chip is overlapped with the first memory chip, the second memory chip has a plurality of second memory cell arrays, and the second memory cell is also connected to the second memory chip.
  • the differential amplifier of the logic chip is electrically connected. Both the first storage chip and the second storage chip are connected to the logic chip.
  • the number of memory chips included in the memory is not limited, and can be selected according to actual needs.
  • the above-mentioned second memory chip further includes a local differential amplifier, the bit line of the second memory cell array is connected to the input end of the local differential amplifier, and the output end of the local differential amplifier is connected to the differential amplifier on the logic chip.
  • the signal can be first amplified by a local differential amplifier, and then amplified by a differential amplifier located on the logic chip.
  • an appropriate connection method can be selected according to requirements, specifically, hybrid bonding can be used to connect the wiring layer of the first memory chip to the wiring layer of the logic chip.
  • hybrid bonding connection process the preparation of the first storage chip and the logic chip can be separately completed in batches, and then the first storage chip and the logic chip are connected.
  • the technical solution of the present application also provides an electronic device, which includes the memory in any of the foregoing technical solutions.
  • the storage data reading delay time of the electronic device is relatively short, and the storage capacity is relatively high and the cost is relatively low under the condition of a certain memory volume.
  • FIG. 1 is a schematic diagram of a cross-sectional structure of a memory in an embodiment of the application
  • FIG. 2 is a schematic diagram of a layout of a memory in an embodiment of the application
  • FIG. 3 is a schematic structural diagram of a first memory cell array in an embodiment of the application.
  • FIG. 4 is a schematic diagram of another layout of the memory in an embodiment of the application.
  • FIG. 5 is a schematic diagram of another cross-sectional structure of the memory in an embodiment of the application.
  • FIG. 6 is a schematic diagram of another cross-sectional structure of the memory in an embodiment of the application.
  • 25-reference voltage source 26-word line driver
  • 3-interconnect layer 4-bit line multiplexer
  • references described in this specification to "one embodiment” or “some embodiments”, etc. mean that one or more embodiments of the present application include a specific feature, structure, or characteristic described in combination with the embodiment. Therefore, the sentences “in one embodiment”, “in some embodiments”, “in some other embodiments”, “in some other embodiments”, etc. appearing in different places in this specification are not necessarily All refer to the same embodiment, but mean “one or more but not all embodiments” unless it is specifically emphasized otherwise.
  • the terms “including”, “including”, “having” and their variations all mean “including but not limited to”, unless otherwise specifically emphasized.
  • the memory provided in the embodiments of this application can be applied to electronic devices.
  • the above-mentioned electronic devices can be computer systems, such as servers, desktop computers, and notebook computers.
  • the above-mentioned electronic device may also be a mobile terminal product such as a mobile phone, and this application does not specifically limit the type of electronic device.
  • the memory in this application may specifically be a dynamic random access memory (DRAM).
  • DRAM dynamic random access memory
  • the memory of this application can be specifically used to store data, and can write and read data.
  • FIG. 1 is a schematic diagram of a cross-sectional structure of a memory in an embodiment of this application
  • FIG. 2 is a schematic diagram of a layout of a memory in an embodiment of this application.
  • the first storage chip 1 and the logic chip 2 and the above-mentioned first storage chip 1 and the logic chip 2 are stacked and fixedly connected, and are electrically connected.
  • the aforementioned first memory chip 1 includes a plurality of first memory cell arrays 11 (subarray), and the logic chip 2 includes a plurality of differential amplifiers 21 and an interface control circuit 22.
  • FIG. 3 is a schematic structural diagram of the first memory cell array 11 in an embodiment of the application. Please refer to FIG. 3.
  • the first memory cell array 11 may include a plurality of memory cells arranged in an array, and each memory cell includes a transistor 111 and an AND This transistor 111 is connected to the bit line 113 and the word line 112.
  • the transistors 111 in each row are connected to the same word line 112, and the transistors 111 in each column are connected to the same bit line 113.
  • a transistor 111 is connected between any bit line 113.
  • the differential amplifier 21 of the logic chip 2 is electrically connected to the bit line 113 of the first memory cell array 11. Specifically, each differential amplifier 21 is connected to at least one bit line 113 of the first memory cell array 11. Each time it works, it is connected to a bit line 113 to amplify the signal corresponding to the connected bit line 113, so as to realize data transmission.
  • the differential amplifier 21 is located in the logic chip 2, and the first memory chip 1 can have a larger area for the first memory cell array 11 to expand the capacity of the memory.
  • the differential amplifier 21 and the first memory array unit 11 are both located on the first memory chip 1. That is, the differential amplifier 21 and the first memory array unit 11 are both located on the plane where the first memory chip 1 is located.
  • the connection line with the bit line 113 needs to cross a long distance in the first logic chip 1.
  • the first memory chip 1 and the logic chip 2 are overlapped, so that the differential amplifier 21 and the connected bit line 113 can be arranged oppositely, and the connection line when the first memory cell array 11 and the differential amplifier 21 are connected starts from the
  • the memory chip 1 spans to the logic chip 2, and the length of the above-mentioned connection line can be shortened, which is beneficial to shorten the delay.
  • the differential amplifier 21 and the interface control circuit 22 are both located in the logic chip 2, and the storage part is located in the first memory chip 1. Different processes can be used to prepare the first memory chip 1 and the logic chip 2.
  • the first memory chip 1 mainly includes a memory structure, which can increase the transistor density of the memory.
  • the logic chip 1 only includes the circuit structure, which facilitates the use of more advanced technology for processing, and can improve the density of the circuit structure and the calculation speed.
  • the above-mentioned differential amplifier 21 includes at least one set of differential input terminals, and each set of differential input terminals includes a first differential input terminal 211 and a second differential input terminal 212.
  • the differential amplifier 21 can perform data input from the first differential input terminal 211, and The data input by the two differential input terminals 212 is subjected to differential calculation.
  • the interface control circuit 22 further includes a reference voltage source 25.
  • the first differential input terminal 211 of the differential amplifier 21 is electrically connected to the first memory cell array 11, and specifically to the bit line 113 of the first memory cell array 11.
  • the second differential input terminal 212 is electrically connected to the above-mentioned reference voltage source 25.
  • the reference voltage source 25 inputs a reference voltage to the above-mentioned differential amplifier 21.
  • the differential amplifier 21 uses the reference voltage and the bit line 113 voltage input from the first input terminal to perform Differential calculation to obtain the data information of the storage unit.
  • the differential amplifier 21 is located in the memory chip.
  • the first differential input terminal 211 and the second differential input terminal 212 are both connected to the bit line 113, and the differential amplifier 21 is connected to the bit line 113.
  • the first memory chip 1 and the logic chip 2 are overlapped and electrically connected.
  • the connection lines between the first memory chip 1 and the logic chip 2 for connecting the bit line 113 and the differential amplifier 21 are greatly reduced, almost by half.
  • This solution can simplify the structure of the memory and reduce the area occupied by the connecting line between the differential amplifier 21 and the first memory chip 1.
  • the cost can also be reduced, and the calculation procedure can be simplified.
  • first memory chip 1 and the logic chip 2 are overlapped in the embodiment of the present application, and only the positional relationship between the first memory chip and the logic chip is described. Specifically, as shown in FIG. 2, the first memory chip 1 and the logic chip 2 are not located on the same plane. Both the first memory chip 1 and the logic chip 2 can be considered as a sheet structure, and the two sheet structures are stacked on top of each other. The first memory chip 1 and the logic chip 2 may be arranged in contact with each other, and other structures may also be arranged between the first memory chip 1 and the logic chip 2.
  • the differential amplifier 21 is a single-channel differential amplifier 21 and includes only a set of differential input terminals and output terminals 213, that is, the input terminal only includes a first differential input terminal 211 and a second differential input terminal 212.
  • each group of differential amplifiers 21 includes a first differential input terminal 211 and a second differential input terminal 212 in the embodiment of the present application.
  • Each differential amplifier 21 only performs a differential operation on the data obtained by the two corresponding differential input terminals of the road, and outputs the operation result from the output terminal 213 of the differential amplifier 21 of the road.
  • the aforementioned interface control circuit 22 may include a data bus, an address bus, a command enable terminal, a command register, a data/address latch, a global differential amplifier, a refresh counter and refresh control logic, a data buffer, a power supply circuit, a reference power supply, and so on.
  • the specific manner in which the first memory chip 1 and the logic chip 2 are stacked and electrically connected is not limited. It can be considered that there is an interconnection layer 3 between the first memory chip 1 and the logic chip 2.
  • the interconnection layer 3 realizes the fixed connection and electrical connection between the first memory chip 1 and the logic chip 2.
  • the first memory chip 1 includes a first semiconductor substrate 12, a plurality of first memory cell arrays 11 formed on the above-mentioned first semiconductor substrate 12, and a first wiring connected to the first memory cell array 11 Layer 13
  • the logic chip 2 includes a second semiconductor substrate 23, a differential amplifier 21 and an interface control circuit 22 formed on the second semiconductor substrate 23, and a second wiring layer connected to the differential amplifier 21 and the interface control circuit 22 twenty four.
  • the first memory chip 1 and the logic chip 2 are connected face-to-face. Specifically, it may be the first wiring layer 13 (first wiring layer) of the first memory chip 1.
  • the top wiring layer of the memory chip) and the second wiring layer 24 of the logic chip 2 are hybrid bonding, as shown in FIG. 1.
  • the hybrid bonding connection process is adopted, the preparation of the first storage chip 1 and the logic chip 2 can be completed in batches, and then the first storage chip 1 and the logic chip 2 can be connected.
  • the first chip top wiring layer 13 is opposite to the second chip top wiring layer 24 and is located inside the memory, it is necessary to provide through holes in the first semiconductor substrate 12 or the second semiconductor substrate 23 231, so that the memory can be connected to an external circuit.
  • the number of bit lines 113 included in the first memory cell array 11 may be less than 1024, and the number of word lines 112 included is less than 512, that is, the memory is fine-grained.
  • the number of bit lines 113 of the first memory cell array 11 may be 8 to 512; in another embodiment, the number of word lines 112 of the first memory cell array 11 is 8 to 256; in an embodiment, the number of bit lines 113 of the first memory cell array 11 can be 8 to 256, and the number of word lines 112 can be 8 to 512.
  • the memory cell array of the memory is fine-grained, and the number of memory cell arrays in each memory chip increases, and the number of differential amplifiers 21 connected to the bit line 113 also increases, resulting in differential The amplifier 21 occupies more area of the memory chip. In a memory chip of the same area, the area occupied by the memory cell array is reduced, the storage capacity is reduced, and the average cost per byte of storage is increased.
  • the differential amplifier 21 is disposed on the logic chip 2, and the first memory chip 1 can have a larger area for disposing the first memory cell array 11, which can increase the storage capacity of the memory.
  • FIG. 4 is a schematic diagram of another layout of the memory in an embodiment of the application.
  • the memory further includes a bit line multiplexer 4, one end of the bit line multiplexer 4 has multiple input ports, and the other end has an output The output port can be connected to any one of the multiple input ports.
  • Each input port of the bit line multiplexer 4 can be connected to a bit line 113 of the first memory cell array 11.
  • bit line multiplexer 4 Part of the input port of the bit line is connected to the bit line 113, which is not limited in this application; the output port of the bit line multiplexer 4 is connected to the differential amplifier 21, and the bit line multiplexer 4 can select a bit connected to the input port.
  • the line 113 communicates with the output port.
  • multiple bit lines 113 can share a differential amplifier 21 connection, and the bit line multiplexer 4 is used to make one bit line of the multiple bit lines 113 connected to the bit line multiplexer 4 113 is connected to the differential amplifier 21.
  • each bit line 113 is connected to a differential amplifier 21.
  • the number of bit lines 113 of each first memory cell array 11 of the memory decreases, that is, after the first memory cell array 11 is fine-grained, the number of first memory cell arrays 11 increases, and the bit lines 113 of the first memory chip 1
  • the total number also increases, and the number of differential amplifiers 21 that need to be connected is also larger, which occupies a larger area, and the cost of the first memory chip 1 also increases.
  • the number of differential amplifiers 21 used can be reduced, the area of the logic chip 2 occupied by the differential amplifiers 21 can be reduced, and the cost can be reduced.
  • the bit line multiplexer 4 when the bit line multiplexer 4 is specifically provided, the bit line multiplexer 4 can be provided on the first memory chip 1, thereby reducing the gap between the first memory chip 1 and the logic chip 2.
  • the number of connecting wires to simplify the process.
  • the reliability of the connection between the first storage chip 1 and the logic chip 2 is also high, and it is not easy to be damaged.
  • the bit line multiplexer 4 is located on the logic chip 2, the bit lines 113 of the first memory chip 1 need to be connected from the first memory chip 1 to the bit line multiplexer located on the logic chip 2. 4 input ports, more in number.
  • bit line multiplexer 4 While the bit line multiplexer 4 is located in the first memory chip 1, the bit line 113 is directly connected to the bit line multiplexer 4 in the first memory chip 1.
  • the logic chip 2 further includes a word line driver 26, and the word line driver 26 is connected to the word line 112 of the first memory chip 1.
  • the word line driver 26 is electrically connected to the word line 112 of the above-mentioned first memory cell array 11 to realize the opening and closing of the memory cells on the word line 112.
  • the word line driver 26 of the memory is located in the logic chip 2. Therefore, it does not occupy the area of the first memory chip 1, which is beneficial to increase the number of the first memory cell array 11 of the first memory chip 1 and increase the storage capacity of the memory. capacity.
  • the memory also includes a word line multiplexer 5, one end of the word line multiplexer 5 has multiple output ports, the other end has an input port, the input port can be connected with multiple output Any one of the mouth is connected.
  • Each output port of the word line multiplexer 5 can be connected to a word line 112 of the first memory cell array 11.
  • the input port of the word line multiplexer 5 is connected to the word line driver 26, and the word line multiplexer 5 can choose the one connected to the output port
  • the word line 112 communicates with the input port.
  • a word line driver 26 can be shared by multiple word lines 112, and the word line multiplexer 5 is used to make one word of the multiple word lines 112 connected by the word line multiplexer 5
  • the line 112 is connected to the word line driver 26.
  • each word line 112 is usually connected to a word line driver 26.
  • the number of word lines 112 of each first memory cell array 11 of the memory decreases, that is, after the first memory cell array 11 is fine-grained, the number of first memory cell arrays 11 increases, and the word lines 112 of the first memory chip 1
  • the total number also increases, the number of word line drivers 26 that need to be connected is also larger, the word line driver 26 occupies a larger area, and the cost of the first memory chip 1 also increases.
  • the number of word line drivers 26 used can be reduced, the area of the logic chip 2 occupied by the word line drivers 26 can be reduced, and the cost can be reduced.
  • the word line multiplexer 5 can be provided on the first memory chip 1, thereby reducing the number of connecting lines between the first memory chip 1 and the logic chip 2 to Simplify the process. In addition, if the number of connection lines between the first storage chip 1 and the logic chip 2 is small, the reliability of the connection between the first storage chip 1 and the logic chip 2 is also high, and it is not easy to be damaged. Specifically, if the word line multiplexer 5 is located in the logic chip 2, the word lines 112 of the first memory chip 1 need to be connected from the first memory chip to the word line multiplexer 5 located in the logic chip 2. More output ports.
  • the word line multiplexer 5 is located in the first memory chip 1, and the word line 112 is directly connected to the word line multiplexer 5 in the first memory chip 1.
  • the input port of the word line multiplexer 5 Connected to the logic chip 2, and the multiple output ports of the word line multiplexer 5 correspond to one input port, so the number of input ports is less than the number of output ports, then the first memory chip 1 and the logic chip 2 The number of connecting lines is small.
  • FIG. 5 is a schematic diagram of another cross-sectional structure of the memory in an embodiment of this application. Please refer to FIG. 1 is stacked, and the second memory chip 6 shares a logic chip 2 with the first memory chip 1.
  • the second memory chip 6 includes a plurality of second memory cell arrays 61, and the second memory cell array 61 is electrically connected to the differential amplifier 21.
  • the second memory chip 6 may have the structural features of the first memory chip 1, the connection relationship between the second memory chip 6 and the logic chip 2, or the connection relationship between the first memory chip 1 and the logic chip 2 .
  • the memory may include one second storage chip 6, or may include two or more second storage chips 6, which is not limited in this application.
  • the second memory chip 6 is a schematic diagram of another cross-sectional structure of the memory in an embodiment of the application.
  • the second memory chip 6 further includes a local differential amplifier 62, and the second memory cell array 61
  • the bit line is connected to the input terminal of the local differential amplifier 62, and the output terminal of the local differential amplifier 62 is connected to the differential amplifier 21 on the logic chip 2.
  • the signal can be first amplified by the local differential amplifier 62, and then amplified by the differential amplifier 21 located in the logic chip 2 for the second stage.

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Abstract

A memory and an electronic device. The memory comprises a first storage chip (1) and a logic chip (2) that are stacked and electrically connected. The first storage chip (1) comprises a first storage unit array. The storage unit array comprises a plurality of transistors (111), and a plurality of bit lines (113) and a plurality of word lines (112), the word lines (112) and the bit lines (113) being coupled to the transistors (111). The logic chip (2) comprises a differential amplifier (21), a word line driver and a reference voltage source (25), the differential amplifier (21), the word line driver and the reference voltage source (25) being all electrically connected to the first storage unit array. The differential amplifier (21) comprises a first differential input end (211), a second differential input end (212) and an output end (213). The first differential input end (211) is electrically connected to the bit lines (113) of the first storage unit array, and the second differential input end (212) is electrically connected to the reference voltage source (25), so that the differential amplifier (21) performs differential processing on a reference voltage of the reference voltage source (25) and signals of the bit lines (113).

Description

一种存储器和电子设备A memory and electronic equipment 技术领域Technical field
本申请涉及信息技术领域,尤其涉及到一种存储器和电子设备。This application relates to the field of information technology, and in particular to a memory and electronic equipment.
背景技术Background technique
现有的计算系统中,动态随机存取存储器(DRAM)作为内存,可以用于暂存中央处理器(CPU)的运算数据,以及与硬盘等外部存储器交换的数据。通常人们用顺序读写“带宽”和每秒读写次数(IOPS)来描述存储器的性能。DRAM的接口性能随着技术的发展逐渐增强,但是存储器内部存储阵列的性能发展缓慢。目前存储器的性能的瓶颈在于内部的存储阵列,而存储阵列较为重要的一个问题在于高延迟,延迟(Latency)为两次连续激活之间的最短时间间隔。In existing computing systems, dynamic random access memory (DRAM) is used as a memory, which can be used to temporarily store the arithmetic data of the central processing unit (CPU) and the data exchanged with external memories such as hard disks. Usually people use sequential read and write "bandwidth" and reads and writes per second (IOPS) to describe memory performance. The interface performance of DRAM has gradually increased with the development of technology, but the performance of the internal storage array of the memory has developed slowly. The current bottleneck of the performance of the memory lies in the internal storage array, and a more important problem of the storage array is high latency. Latency is the shortest time interval between two consecutive activations.
现有存储器高延迟的原因主要在于:一方面,存储芯片包括存储单元阵列和逻辑电路,为了提高存储器的存储容量,需要增加存储芯片中存储单元阵列的面积,减小逻辑电路的面积。因此,将存储单元阵列设计的尺寸较大,一般可以达到512Row X 1024Column,即包括512条字线和1024条位线,即字线和位线均较长,连接了较多的晶体管。每次字线启动多个晶体管,利用位线传递数据的路径较长,位线寄生电容较大,都会导致存储器的高延迟。The main reasons for the high latency of the existing memory are: on the one hand, the memory chip includes a memory cell array and a logic circuit. In order to increase the storage capacity of the memory, it is necessary to increase the area of the memory cell array in the memory chip and reduce the area of the logic circuit. Therefore, the memory cell array is designed to have a larger size, which can generally reach 512 Row X 1024 Column, which includes 512 word lines and 1024 bit lines, that is, both word lines and bit lines are longer, and more transistors are connected. Each time the word line activates multiple transistors, the data transmission path through the bit line is longer, and the parasitic capacitance of the bit line is large, which will cause high latency of the memory.
发明内容Summary of the invention
本申请提供一种存储器和电子设备,以扩展存储器的存储容量,缩短存储器的延迟,简化存储器结构,降低成本。The present application provides a memory and an electronic device to expand the storage capacity of the memory, shorten the delay of the memory, simplify the memory structure, and reduce the cost.
第一方面,本申请提供了一种存储器,该存储器包括叠置且电连接的第一存储芯片和逻辑芯片,其中,第一存储芯片包括多个第一存储单元阵列。该存储单元阵列则包括多个晶体管,以及多根位线和多根字线,每个晶体管均连接有位线和字线。具体的,在一个第一存储单元阵列中,多个晶体管阵列排布,任意一根字线和任意一根位线之间均连接有一个上述晶体管。逻辑芯片包括差分放大器和接口控制电路,其中差分放大器和接口控制电路均与第一存储单元阵列电连接。其中,差分放大器包括第一差分输入端、第二差分输入端和输出端,上述第一差分输入端、第二差分输入端为一组差分输入端,即差分放大器对从上述第一差分输入端输入的信号和从上述第二差分输入端输入的信号进行差分放大。接口控制电路还包括参考电压源,上述差分放大器的第一差分输入端与第一存储单元阵列电连接,具体与第一存储单元阵列的位线电连接,第二差分输入端与上述逻辑芯片的参考电压源电连接,则差分放大器对上述参考电压源的参考电压以及位线的信号进行差分放大。In a first aspect, the present application provides a memory that includes a first memory chip and a logic chip that are stacked and electrically connected, wherein the first memory chip includes a plurality of first memory cell arrays. The memory cell array includes a plurality of transistors, and a plurality of bit lines and a plurality of word lines, and each transistor is connected with a bit line and a word line. Specifically, in a first memory cell array, a plurality of transistor arrays are arranged, and one of the above-mentioned transistors is connected between any word line and any bit line. The logic chip includes a differential amplifier and an interface control circuit, wherein both the differential amplifier and the interface control circuit are electrically connected to the first memory cell array. Wherein, the differential amplifier includes a first differential input terminal, a second differential input terminal, and an output terminal. The first differential input terminal and the second differential input terminal are a set of differential input terminals, that is, the differential amplifier pair is from the first differential input terminal. The input signal and the signal input from the second differential input terminal are differentially amplified. The interface control circuit also includes a reference voltage source. The first differential input terminal of the differential amplifier is electrically connected to the first memory cell array, specifically to the bit line of the first memory cell array, and the second differential input terminal is electrically connected to the logic chip. The reference voltage source is electrically connected, and the differential amplifier performs differential amplification on the reference voltage of the reference voltage source and the signal of the bit line.
本申请技术方案中,差分放大器位于逻辑芯片,则不占用第一存储芯片的面积,可以扩展存储器的容量。第一存储芯片与逻辑芯片叠置,则可以缩短第一存储单元阵列与差分放大器连接时的连接线长度,从而有利于缩短延迟。外围控制电路部分位于逻辑芯片,存储部分位于第一存储芯片,则可以采用较为先进的技术分别加工逻辑芯片和第一存储芯片,以提升存储器的晶体管密度和速度。该方案还利用参考电压源向差分放大器输入参考电压,以简化存储器的结构,减少差分放大器与第一存储芯片之间连接线占用的面积,还可以降 低成本。In the technical solution of the present application, the differential amplifier is located in the logic chip, which does not occupy the area of the first memory chip and can expand the capacity of the memory. When the first memory chip and the logic chip are stacked, the length of the connection line when the first memory cell array is connected to the differential amplifier can be shortened, which is beneficial to shorten the delay. The peripheral control circuit part is located in the logic chip, and the storage part is located in the first storage chip. The logic chip and the first storage chip can be processed separately by using more advanced technology to improve the transistor density and speed of the memory. This solution also uses a reference voltage source to input a reference voltage to the differential amplifier to simplify the structure of the memory, reduce the area occupied by the connection line between the differential amplifier and the first memory chip, and reduce the cost.
为了降低成本和缩小逻辑芯片的面积,本申请中的存储器还可以包括位线多路选通器,该位线多路选通器具有多个输入口和一个输出口,其中,位线多路选通器的输入口的一端与第一存储单元阵列的位线连接,输出口的一端与所述差分放大器连接。则该位线多路选通器可以连接多根位线,在实际应用中,根据需求,位线多路选通器选择多个位线中的一根从输出口输出至差分放大器。该方案可以减少存储器中差分放大器的数量,减小差分放大器占用的面积,还可以降低成本。In order to reduce the cost and the area of the logic chip, the memory in this application may also include a bit line multiplexer. The bit line multiplexer has multiple input ports and one output port. The bit line multiplexer One end of the input port of the gate is connected to the bit line of the first memory cell array, and one end of the output port is connected to the differential amplifier. Then the bit line multiplexer can be connected to multiple bit lines. In practical applications, the bit line multiplexer selects one of the multiple bit lines to output from the output port to the differential amplifier according to requirements. This solution can reduce the number of differential amplifiers in the memory, reduce the area occupied by the differential amplifiers, and can also reduce costs.
在具体设置上述位线多路选通器时,可以使上述位线多路选通器位于第一存储芯片。由于多路选通器与位于第一存储芯片的位线的连接数量较多,与位于逻辑芯片的差分放大器的连接数量较少,该方案可以减少从第一存储芯片到逻辑芯片之间连接线的数量,以减少连接线占用的面积,简化工艺,提高第一存储芯片与逻辑芯片之间连接的可靠性。When the bit line multiplexer is specifically set, the bit line multiplexer can be located in the first memory chip. Since the number of connections between the multiplexer and the bit line located in the first memory chip is large, and the number of connections to the differential amplifier located in the logic chip is small, this solution can reduce the number of connections from the first memory chip to the logic chip. In order to reduce the area occupied by the connection line, simplify the process, and improve the reliability of the connection between the first memory chip and the logic chip.
进一步的技术方案中,上述逻辑芯片还包括字线驱动器,上述字线驱动器与第一存储芯片的字线连接。字线驱动器能够为字线上的晶体管提供栅极电压,控制字线上存储单元的打开和关闭。该方案中,存储器的字线驱动器位于逻辑芯片,也不占用第一存储芯片的面积,有利于提高第一存储芯片的第一存储单元阵列的数量,扩展存储器的存储容量。In a further technical solution, the logic chip further includes a word line driver, and the word line driver is connected to the word line of the first memory chip. The word line driver can provide the gate voltage for the transistor on the word line, and control the opening and closing of the memory cell on the word line. In this solution, the word line driver of the memory is located on the logic chip and does not occupy the area of the first memory chip, which is beneficial to increase the number of first memory cell arrays of the first memory chip and expand the storage capacity of the memory.
为了降低成本和缩小逻辑芯片的面积,本申请中的存储器还可以包括字线多路选通器,该字线多路选通器具有多个输出口和一个输入口,其中,字线多路选通器的输出口的一端与第一存储单元阵列的字线连接,输入端与字线驱动器连接。则该字线多路选通器可以连接多根字线,在实际应用中,根据需求,字线多路选通器选择多个字线中的一根与字线驱动器连接。该方案可以减少存储器中字线驱动器的数量,减小字线驱动器占用的面积,还可以降低成本。In order to reduce the cost and the area of the logic chip, the memory in this application may also include a word line multiplexer. The word line multiplexer has multiple output ports and one input port. The word line multiplexer One end of the output port of the gate is connected to the word line of the first memory cell array, and the input end is connected to the word line driver. Then the word line multiplexer can be connected to multiple word lines. In practical applications, the word line multiplexer selects one of the multiple word lines to be connected to the word line driver according to requirements. This solution can reduce the number of word line drivers in the memory, reduce the area occupied by the word line drivers, and can also reduce costs.
在具体设置上述字线多路选通器时,可以使上述字线多路选通器位于第一存储芯片。由于多路选通器与位于第一存储芯片的字线的连接数量较多,与位于逻辑芯片的字线驱动器的连接数量较少,该方案可以减少从第一存储芯片到逻辑芯片之间连接线的数量,以减少连接线占用的面积,简化工艺,提高第一存储芯片与逻辑芯片之间连接的可靠性。When the word line multiplexer is specifically set, the word line multiplexer can be located in the first memory chip. Since the number of connections between the multiplexer and the word line located in the first memory chip is large, and the number of connections with the word line driver located in the logic chip is small, this solution can reduce the number of connections from the first memory chip to the logic chip. The number of wires is used to reduce the area occupied by the connection wires, simplify the process, and improve the reliability of the connection between the first memory chip and the logic chip.
在本申请的具体方案中,存储器还可以包括第二存储芯片,该第二存储芯片与第一存储芯片叠置,该第二存储芯片具有多个第二存储单元阵列,第二存储单元也与逻辑芯片的差分放大器电连接。第一存储芯片与第二存储芯片均连接至逻辑芯片。本申请实施例中,存储器包括的存储芯片的数量不做限制,可以根据实际需求选择。In the specific solution of the present application, the memory may further include a second memory chip, the second memory chip is overlapped with the first memory chip, the second memory chip has a plurality of second memory cell arrays, and the second memory cell is also connected to the second memory chip. The differential amplifier of the logic chip is electrically connected. Both the first storage chip and the second storage chip are connected to the logic chip. In the embodiments of the present application, the number of memory chips included in the memory is not limited, and can be selected according to actual needs.
上述第二存储芯片还包括局域差分放大器,第二存储单元阵列的位线与该局域差分放大器的输入端连接,该局域差分放大器的输出端与逻辑芯片上的差分放大器连接。在具体应用时,信号可以先通过局域差分放大器进行第一级放大,再通过位于逻辑芯片的差分放大器进行第二级放大。The above-mentioned second memory chip further includes a local differential amplifier, the bit line of the second memory cell array is connected to the input end of the local differential amplifier, and the output end of the local differential amplifier is connected to the differential amplifier on the logic chip. In specific applications, the signal can be first amplified by a local differential amplifier, and then amplified by a differential amplifier located on the logic chip.
在实现第一存储芯片与逻辑芯片之间的连接时,可以根据需求选择合适的连接方式,具体可以通过混合键合连接,使第一存储芯片的布线层与逻辑芯片的布线层连接。采用混合键合连接工艺时,可以分别批量完成第一存储芯片和逻辑芯片的制备,再将第一存储芯片与逻辑芯片连接。When realizing the connection between the first memory chip and the logic chip, an appropriate connection method can be selected according to requirements, specifically, hybrid bonding can be used to connect the wiring layer of the first memory chip to the wiring layer of the logic chip. When the hybrid bonding connection process is adopted, the preparation of the first storage chip and the logic chip can be separately completed in batches, and then the first storage chip and the logic chip are connected.
第二方面,本申请的技术方案还提供了一种电子设备,该电子设备包括上述任意技术方案中的存储器。该电子设备的存储数据读取延迟时间较短,在存储器体积一定的情况下,存储容量较高,且成本较低。In the second aspect, the technical solution of the present application also provides an electronic device, which includes the memory in any of the foregoing technical solutions. The storage data reading delay time of the electronic device is relatively short, and the storage capacity is relatively high and the cost is relatively low under the condition of a certain memory volume.
附图说明Description of the drawings
图1为本申请实施例中存储器的一种剖面结构示意图;FIG. 1 is a schematic diagram of a cross-sectional structure of a memory in an embodiment of the application;
图2为本申请实施例中存储器的一种布局示意图;FIG. 2 is a schematic diagram of a layout of a memory in an embodiment of the application;
图3为本申请实施例中第一存储单元阵列的结构示意图;3 is a schematic structural diagram of a first memory cell array in an embodiment of the application;
图4为本申请实施例中存储器的另一种布局示意图;FIG. 4 is a schematic diagram of another layout of the memory in an embodiment of the application;
图5为本申请实施例中存储器的另一种剖面结构示意图;5 is a schematic diagram of another cross-sectional structure of the memory in an embodiment of the application;
图6为本申请实施例中存储器的另一种剖面结构示意图。FIG. 6 is a schematic diagram of another cross-sectional structure of the memory in an embodiment of the application.
附图标记说明:Description of reference signs:
1-第一存储芯片;                       11-第一存储单元阵列;1- The first memory chip; 11- The first memory cell array;
111-晶体管;                           112-字线;111-transistor; 112-word line;
113-位线;                             12-第一半导体衬底;113-bit line; 12-first semiconductor substrate;
13-第一布线层;                        2-逻辑芯片;13-First wiring layer; 2-Logic chip;
21-差分放大器;                        211-第一差分输入端;21-Differential amplifier; 211-First differential input terminal;
212-第二差分输入端;                   213-输出端;212-second differential input terminal; 213-output terminal;
22-接口控制电路;                      23-第二半导体衬底;22-Interface control circuit; 23-Second semiconductor substrate;
231-通孔;                             24-第二布线层;231-through hole; 24-second wiring layer;
25-参考电压源;                        26-字线驱动器;25-reference voltage source; 26-word line driver;
3-互连层;                             4-位线多路选通器;3-interconnect layer; 4-bit line multiplexer;
5-字线多路选通器;                     6-第二存储芯片;5-word line multiplexer; 6-second memory chip;
61-第二存储单元阵列;                  62-局域差分放大器。61-Second storage unit array; 62-Local differential amplifier.
具体实施方式Detailed ways
为了使本申请的目的、技术方案和优点更加清楚,下面将结合附图对本申请作进一步地详细描述。In order to make the purpose, technical solutions, and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings.
以下实施例中所使用的术语只是为了描述特定实施例的目的,而并非旨在作为对本申请的限制。如在本申请的说明书和所附权利要求书中所使用的那样,单数表达形式“一个”、“一种”、“所述”、“上述”、“该”和“这一”旨在也包括例如“一个或多个”这种表达形式,除非其上下文中明确地有相反指示。The terms used in the following embodiments are only for the purpose of describing specific embodiments, and are not intended to limit the application. As used in the specification and appended claims of this application, the singular expressions "a", "an", "said", "above", "the" and "this" are intended to also This includes expressions such as "one or more" unless the context clearly indicates to the contrary.
在本说明书中描述的参考“一个实施例”或“一些实施例”等意味着在本申请的一个或多个实施例中包括结合该实施例描述的特定特征、结构或特点。由此,在本说明书中的不同之处出现的语句“在一个实施例中”、“在一些实施例中”、“在其他一些实施例中”、“在另外一些实施例中”等不是必然都参考相同的实施例,而是意味着“一个或多个但不是所有的实施例”,除非是以其他方式另外特别强调。术语“包括”、“包含”、“具有”及它们的变形都意味着“包括但不限于”,除非是以其他方式另外特别强调。References described in this specification to "one embodiment" or "some embodiments", etc. mean that one or more embodiments of the present application include a specific feature, structure, or characteristic described in combination with the embodiment. Therefore, the sentences "in one embodiment", "in some embodiments", "in some other embodiments", "in some other embodiments", etc. appearing in different places in this specification are not necessarily All refer to the same embodiment, but mean "one or more but not all embodiments" unless it is specifically emphasized otherwise. The terms "including", "including", "having" and their variations all mean "including but not limited to", unless otherwise specifically emphasized.
本申请实施例提供的存储器可以应用于电子设备,上述电子设备可以为计算机系统,如服务器、台式机电脑和笔记本电脑,本申请实施例中的存储器具体可以应用于上述计算机系统靠近中央处理器(Central Processing Unit,CPU)的最后一个缓存。此外上述电子设备还可以为手机等移动终端产品,本申请对电子设备的类型不做具体限制。本申请中的存储器具体可以为动态随机存取存储器(DRAM)。本申请存储器可以具体应用于存储数 据,可以进行数据的写出以及读取。The memory provided in the embodiments of this application can be applied to electronic devices. The above-mentioned electronic devices can be computer systems, such as servers, desktop computers, and notebook computers. The last cache of Central Processing Unit (CPU). In addition, the above-mentioned electronic device may also be a mobile terminal product such as a mobile phone, and this application does not specifically limit the type of electronic device. The memory in this application may specifically be a dynamic random access memory (DRAM). The memory of this application can be specifically used to store data, and can write and read data.
图1为本申请实施例中存储器的一种剖面结构示意图,图2为本申请实施例中存储器的一种布局示意图,请参考图1和图2,本申请实施例中的存储器包括叠置的第一存储芯片1和逻辑芯片2,上述第一存储芯片1和逻辑芯片2叠置固定连接,且电连接。上述第一存储芯片1包括多个第一存储单元阵列11(sub array),逻辑芯片2包括多个差分放大器21和接口控制电路22。图3为本申请实施例中第一存储单元阵列11的结构示意图,请参考图3,上述第一存储单元阵列11可以包括阵列排布的多个存储单元,每个存储单元包括晶体管111和与该晶体管111的连接的位线113和字线112。每行的晶体管111与同一根字线112连接,每列的晶体管111与同一根位线113连接,字线112的延伸方向与位线113的延伸方向相交设置,且任意一根字线112与任意一根位线113之间均连接有一个晶体管111。逻辑芯片2的差分放大器21与上述第一存储单元阵列11的位线113电连接,具体的,每个差分放大器21至少与第一存储单元阵列11的一根位线113连接,上述差分放大器21每次工作时与一根位线113连接,以将该连接的位线113对应的信号进行放大,从而实现数据的传输。本申请技术方案中,差分放大器21位于逻辑芯片2,则第一存储芯片1可以具有较多的面积设置第一存储单元阵列11,以扩展存储器的容量。此外,现有技术中,差分放大器21与第一存储阵列单元11均位于第一存储芯片1,即差分放大器21与第一存储阵列单元11均位于第一存储芯片1所在的平面,差分放大器21与位线113的连接线需要在第一逻辑芯片1内跨越较远的距离。本申请实施例中第一存储芯片1与逻辑芯片2叠置,可以使差分放大器21与连接的位线113相对设置,则第一存储单元阵列11与差分放大器21连接时的连接线从第一存储芯片1跨至逻辑芯片2,则上述连接线的长度可以缩短,从而有利于缩短延迟。该方案中,差分放大器21和接口控制电路22均位于逻辑芯片2,存储部分位于第一存储芯片1,则可以采用不同的工艺制备上述第一存储芯片1和逻辑芯片2,对于第一存储芯片1,第一存储芯片1主要包括存储结构,可以提升存储器的晶体管密度。对于逻辑芯片2,逻辑芯片1仅包括电路结构,则有利于采用较为先进的技术进行加工,可以提升电路结构的密度和运算速率。上述差分放大器21至少包括一组差分输入端,每组差分输入端包括第一差分输入端211和第二差分输入端212,差分放大器21可以对从第一差分输入端211输入的数据,和第二差分输入端212输入的数据进行差分计算。本申请技术方案中,接口控制电路22还包括参考电压源25,差分放大器21的第一差分输入端211与第一存储单元阵列11电连接,具体与第一存储单元阵列11的位线113电连接,第二差分输入端212与上述参考电压源25电连接,参考电压源25向上述差分放大器21输入参考电压,差分放大器21利用该参考电压与从第一输入端输入的位线113电压进行差分计算,得到存储单元数据信息。FIG. 1 is a schematic diagram of a cross-sectional structure of a memory in an embodiment of this application, and FIG. 2 is a schematic diagram of a layout of a memory in an embodiment of this application. Please refer to FIG. 1 and FIG. The first storage chip 1 and the logic chip 2, and the above-mentioned first storage chip 1 and the logic chip 2 are stacked and fixedly connected, and are electrically connected. The aforementioned first memory chip 1 includes a plurality of first memory cell arrays 11 (subarray), and the logic chip 2 includes a plurality of differential amplifiers 21 and an interface control circuit 22. FIG. 3 is a schematic structural diagram of the first memory cell array 11 in an embodiment of the application. Please refer to FIG. 3. The first memory cell array 11 may include a plurality of memory cells arranged in an array, and each memory cell includes a transistor 111 and an AND This transistor 111 is connected to the bit line 113 and the word line 112. The transistors 111 in each row are connected to the same word line 112, and the transistors 111 in each column are connected to the same bit line 113. A transistor 111 is connected between any bit line 113. The differential amplifier 21 of the logic chip 2 is electrically connected to the bit line 113 of the first memory cell array 11. Specifically, each differential amplifier 21 is connected to at least one bit line 113 of the first memory cell array 11. Each time it works, it is connected to a bit line 113 to amplify the signal corresponding to the connected bit line 113, so as to realize data transmission. In the technical solution of the present application, the differential amplifier 21 is located in the logic chip 2, and the first memory chip 1 can have a larger area for the first memory cell array 11 to expand the capacity of the memory. In addition, in the prior art, the differential amplifier 21 and the first memory array unit 11 are both located on the first memory chip 1. That is, the differential amplifier 21 and the first memory array unit 11 are both located on the plane where the first memory chip 1 is located. The connection line with the bit line 113 needs to cross a long distance in the first logic chip 1. In the embodiment of the present application, the first memory chip 1 and the logic chip 2 are overlapped, so that the differential amplifier 21 and the connected bit line 113 can be arranged oppositely, and the connection line when the first memory cell array 11 and the differential amplifier 21 are connected starts from the The memory chip 1 spans to the logic chip 2, and the length of the above-mentioned connection line can be shortened, which is beneficial to shorten the delay. In this solution, the differential amplifier 21 and the interface control circuit 22 are both located in the logic chip 2, and the storage part is located in the first memory chip 1. Different processes can be used to prepare the first memory chip 1 and the logic chip 2. For the first memory chip 1. The first memory chip 1 mainly includes a memory structure, which can increase the transistor density of the memory. For the logic chip 2, the logic chip 1 only includes the circuit structure, which facilitates the use of more advanced technology for processing, and can improve the density of the circuit structure and the calculation speed. The above-mentioned differential amplifier 21 includes at least one set of differential input terminals, and each set of differential input terminals includes a first differential input terminal 211 and a second differential input terminal 212. The differential amplifier 21 can perform data input from the first differential input terminal 211, and The data input by the two differential input terminals 212 is subjected to differential calculation. In the technical solution of the present application, the interface control circuit 22 further includes a reference voltage source 25. The first differential input terminal 211 of the differential amplifier 21 is electrically connected to the first memory cell array 11, and specifically to the bit line 113 of the first memory cell array 11. The second differential input terminal 212 is electrically connected to the above-mentioned reference voltage source 25. The reference voltage source 25 inputs a reference voltage to the above-mentioned differential amplifier 21. The differential amplifier 21 uses the reference voltage and the bit line 113 voltage input from the first input terminal to perform Differential calculation to obtain the data information of the storage unit.
现有技术中,差分放大器21位于存储芯片,每个差分放大器21的一组差分输入端中,第一差分输入端211与第二差分输入端212均与位线113连接,则差分放大器21与存储单元阵列之间的连接线较多。本申请实施例中,第一存储芯片1与逻辑芯片2叠置,且电连接,采用本申请技术方案,仅差分放大器21的第一差分输入端211与第一存储芯片1的位线113电连接,则第一存储芯片1与逻辑芯片2之间用于连接位线113与差分放大器21之间的连接线大幅减少,几乎减少了一半。该方案可以简化存储器的结构,减少差分放大器21与第一存储芯片1之间连接线占用的面积。通过共享参考电压源25的资源,还可以降低成本,以及简化计算程序。In the prior art, the differential amplifier 21 is located in the memory chip. In a set of differential input terminals of each differential amplifier 21, the first differential input terminal 211 and the second differential input terminal 212 are both connected to the bit line 113, and the differential amplifier 21 is connected to the bit line 113. There are many connection lines between the memory cell arrays. In the embodiment of the present application, the first memory chip 1 and the logic chip 2 are overlapped and electrically connected. With the technical solution of the present application, only the first differential input terminal 211 of the differential amplifier 21 and the bit line 113 of the first memory chip 1 are electrically connected. Connected, the connection lines between the first memory chip 1 and the logic chip 2 for connecting the bit line 113 and the differential amplifier 21 are greatly reduced, almost by half. This solution can simplify the structure of the memory and reduce the area occupied by the connecting line between the differential amplifier 21 and the first memory chip 1. By sharing the resources of the reference voltage source 25, the cost can also be reduced, and the calculation procedure can be simplified.
值得说明的是,本申请实施例中第一存储芯片1与逻辑芯片2叠置,仅仅说明第一存储芯片与逻辑芯片之间的位置关系。具体的,如图2所示,第一存储芯片1与逻辑芯片2并非位于同一平面,第一存储芯片1和逻辑芯片2均可认为是片状结构,两个片状结构叠摞设置。第一存储芯片1与逻辑芯片2可以相互接触设置,第一存储芯片1与逻辑芯片2之间也可以设置其他结构。It is worth noting that the first memory chip 1 and the logic chip 2 are overlapped in the embodiment of the present application, and only the positional relationship between the first memory chip and the logic chip is described. Specifically, as shown in FIG. 2, the first memory chip 1 and the logic chip 2 are not located on the same plane. Both the first memory chip 1 and the logic chip 2 can be considered as a sheet structure, and the two sheet structures are stacked on top of each other. The first memory chip 1 and the logic chip 2 may be arranged in contact with each other, and other structures may also be arranged between the first memory chip 1 and the logic chip 2.
具体的实施例中,差分放大器21为单路差分放大器21,仅包括一组差分输入端和输出端213,即输入端仅包括第一差分输入端211与第二差分输入端212。在本申请技术方案中,每组差分放大器21包括本申请实施例中的一个第一差分输入端211和一个第二差分输入端212。每路差分放大器21仅对该路对应的两个差分输入端获得的数据进行差分运算,并将运算结果从该路差分放大器21的输出端213输出。In a specific embodiment, the differential amplifier 21 is a single-channel differential amplifier 21 and includes only a set of differential input terminals and output terminals 213, that is, the input terminal only includes a first differential input terminal 211 and a second differential input terminal 212. In the technical solution of the present application, each group of differential amplifiers 21 includes a first differential input terminal 211 and a second differential input terminal 212 in the embodiment of the present application. Each differential amplifier 21 only performs a differential operation on the data obtained by the two corresponding differential input terminals of the road, and outputs the operation result from the output terminal 213 of the differential amplifier 21 of the road.
上述接口控制电路22可以包括数据总线,地址总线,命令使能端,命令寄存器,数据/地址锁存器,全局差分放大器,刷新计数器和刷新控制逻辑,数据缓冲器,供电电路、参考电源等。The aforementioned interface control circuit 22 may include a data bus, an address bus, a command enable terminal, a command register, a data/address latch, a global differential amplifier, a refresh counter and refresh control logic, a data buffer, a power supply circuit, a reference power supply, and so on.
在实施本申请的实施例时,第一存储芯片1与逻辑芯片2实现叠置电连接的具体方式不限,可以认为第一存储芯片1与逻辑芯片2之间具有互连层3,利用该互连层3实现第一存储芯片1与逻辑芯片2的固定连接以及电连接。请参考图1,第一存储芯片1包括第一半导体衬底12,形成于上述第一半导体衬底12的多个第一存储单元阵列11,以及与第一存储单元阵列11连接的第一布线层13;逻辑芯片2包括第二半导体衬底23,形成于上述第二半导体衬底23的差分放大器21和接口控制电路22,以及与上述差分放大器21和接口控制电路22连接的第二布线层24。第一存储芯片1与逻辑芯片2的一种连接方式中:第一存储芯片1与逻辑芯片2面对面(face to face)连接,具体可以为第一存储芯片1的第一布线层13(第一存储芯片的top布线层)与逻辑芯片2的第二布线层24(逻辑芯片的top布线层)混合键合连接(Hybrid bonding),如图1所示。采用混合键合连接工艺时,可以分别批量完成第一存储芯片1和逻辑芯片2的制备,再将第一存储芯片1与逻辑芯片2连接。当采用混合键合连接时,由于第一芯片top布线层13与第二芯片top布线层24相对,位于存储器内部,因此,需要在第一半导体衬底12或者第二半导体衬底23设置通孔231,以便存储器与外界电路进行连接。In the implementation of the embodiments of the present application, the specific manner in which the first memory chip 1 and the logic chip 2 are stacked and electrically connected is not limited. It can be considered that there is an interconnection layer 3 between the first memory chip 1 and the logic chip 2. The interconnection layer 3 realizes the fixed connection and electrical connection between the first memory chip 1 and the logic chip 2. 1, the first memory chip 1 includes a first semiconductor substrate 12, a plurality of first memory cell arrays 11 formed on the above-mentioned first semiconductor substrate 12, and a first wiring connected to the first memory cell array 11 Layer 13; the logic chip 2 includes a second semiconductor substrate 23, a differential amplifier 21 and an interface control circuit 22 formed on the second semiconductor substrate 23, and a second wiring layer connected to the differential amplifier 21 and the interface control circuit 22 twenty four. In a connection mode of the first memory chip 1 and the logic chip 2, the first memory chip 1 and the logic chip 2 are connected face-to-face. Specifically, it may be the first wiring layer 13 (first wiring layer) of the first memory chip 1. The top wiring layer of the memory chip) and the second wiring layer 24 of the logic chip 2 (the top wiring layer of the logic chip) are hybrid bonding, as shown in FIG. 1. When the hybrid bonding connection process is adopted, the preparation of the first storage chip 1 and the logic chip 2 can be completed in batches, and then the first storage chip 1 and the logic chip 2 can be connected. When the hybrid bonding connection is used, since the first chip top wiring layer 13 is opposite to the second chip top wiring layer 24 and is located inside the memory, it is necessary to provide through holes in the first semiconductor substrate 12 or the second semiconductor substrate 23 231, so that the memory can be connected to an external circuit.
本申请的一个实施例中,为了减少存储器的延迟,可以使第一存储单元阵列11包括的位线113数量小于1024,包括的字线112数量小于512,即对存储器进行细粒度化。具体的,一种实施例中,可以使第一存储单元阵列11的位线113的数量为8根至512根;另一种实施例中,第一存储单元阵列11的字线112的数量为8根至256根;在一种实施例中,可以使第一存储单元阵列11的位线113的数量为8根至256根,且字线112的数量为8根至512根。第一存储单元阵列11中的字线112和位线113的数量越少,存储器的细粒度化程度越高,存储器的延迟越短。现有技术中,为了减少存储器延迟,存在将存储器的存储单元阵列细粒度化,则每个存储芯片中的存储单元阵列数量增加,与位线113连接的差分放大器21的数量也增加,导致差分放大器21占用存储芯片较多的面积。则同等面积的存储芯片中,存储单元阵列占的面积减小,存储容量缩小,平均每字节存储量的成本增加。而采用本申请的技术方案,差分放大器21设置于逻辑芯片2,则第一存储芯片1可以具有较多的面积用于设置第一存储单元阵列11,可以增加存储器的存储容量。In an embodiment of the present application, in order to reduce the delay of the memory, the number of bit lines 113 included in the first memory cell array 11 may be less than 1024, and the number of word lines 112 included is less than 512, that is, the memory is fine-grained. Specifically, in an embodiment, the number of bit lines 113 of the first memory cell array 11 may be 8 to 512; in another embodiment, the number of word lines 112 of the first memory cell array 11 is 8 to 256; in an embodiment, the number of bit lines 113 of the first memory cell array 11 can be 8 to 256, and the number of word lines 112 can be 8 to 512. The fewer the number of word lines 112 and bit lines 113 in the first memory cell array 11, the higher the degree of granularity of the memory, and the shorter the delay of the memory. In the prior art, in order to reduce the memory delay, the memory cell array of the memory is fine-grained, and the number of memory cell arrays in each memory chip increases, and the number of differential amplifiers 21 connected to the bit line 113 also increases, resulting in differential The amplifier 21 occupies more area of the memory chip. In a memory chip of the same area, the area occupied by the memory cell array is reduced, the storage capacity is reduced, and the average cost per byte of storage is increased. However, with the technical solution of the present application, the differential amplifier 21 is disposed on the logic chip 2, and the first memory chip 1 can have a larger area for disposing the first memory cell array 11, which can increase the storage capacity of the memory.
图4为本申请实施例中存储器的另一种布局示意图。如图4所示,为了降低成本,本 申请实施例中,存储器还包括位线多路选通器4,该位线多路选通器4的一端具有多个输入口,另一端具有一个输出口,该输出口可以与多个输入口中的任一个连接。位线多路选通器4的每个输入口可以连接一根第一存储单元阵列11的位线113,当然在实际应用中,可以仅使位线多路选通器4的多个输入口中的部分输入口与位线113连接,本申请不做限制;位线多路选通器4的输出口与差分放大器21连接,位线多路选通器4可以选择与输入口连接的一个位线113与输出口连通。在应用过程中,可以多根位线113共用一个差分放大器21连接,利用位线多路选通器4,使位线多路选通器4连接的多个位线113中的一根位线113与差分放大器21连接。现有技术中,通常每根位线113连接一个差分放大器21。当存储器的每个第一存储单元阵列11的位线113数量减少时,即第一存储单元阵列11细粒度化后,第一存储单元阵列11的数量增加,第一存储芯片1的位线113总数也增加,需要连接的差分放大器21数量也较多,占用的面积较多,第一存储芯片1的成本也增加。则该方案中,可以减少使用的差分放大器21数量,减小差分放大器21占用的逻辑芯片2的面积,且可以降低成本。FIG. 4 is a schematic diagram of another layout of the memory in an embodiment of the application. As shown in FIG. 4, in order to reduce costs, in the embodiment of the present application, the memory further includes a bit line multiplexer 4, one end of the bit line multiplexer 4 has multiple input ports, and the other end has an output The output port can be connected to any one of the multiple input ports. Each input port of the bit line multiplexer 4 can be connected to a bit line 113 of the first memory cell array 11. Of course, in practical applications, only the multiple input ports of the bit line multiplexer 4 Part of the input port of the bit line is connected to the bit line 113, which is not limited in this application; the output port of the bit line multiplexer 4 is connected to the differential amplifier 21, and the bit line multiplexer 4 can select a bit connected to the input port. The line 113 communicates with the output port. In the application process, multiple bit lines 113 can share a differential amplifier 21 connection, and the bit line multiplexer 4 is used to make one bit line of the multiple bit lines 113 connected to the bit line multiplexer 4 113 is connected to the differential amplifier 21. In the prior art, usually each bit line 113 is connected to a differential amplifier 21. When the number of bit lines 113 of each first memory cell array 11 of the memory decreases, that is, after the first memory cell array 11 is fine-grained, the number of first memory cell arrays 11 increases, and the bit lines 113 of the first memory chip 1 The total number also increases, and the number of differential amplifiers 21 that need to be connected is also larger, which occupies a larger area, and the cost of the first memory chip 1 also increases. In this solution, the number of differential amplifiers 21 used can be reduced, the area of the logic chip 2 occupied by the differential amplifiers 21 can be reduced, and the cost can be reduced.
如图4所示,具体设置上述位线多路选通器4时,可以将位线多路选通器4设置于第一存储芯片1,从而减少第一存储芯片1与逻辑芯片2之间连接线的数量,以简化工艺。此外,第一存储芯片1与逻辑芯片2之间的连接线数量较少,则第一存储芯片1与逻辑芯片2之间的连接可靠性也较高,不易损坏。具体的,位线多路选通器4若位于逻辑芯片2,则需要使第一存储芯片1的位线113均从第一存储芯片1连接到位于逻辑芯片2的位线多路选通器4的输入口,数量较多。而位线多路选通器4位于第一存储芯片1,则位线113在第一存储芯片1内直接与位线多路选通器4连接,位线多路选通器4的输出口与逻辑芯片2连接,而位线多路选通器4的多个输入口与一个输出口相对应,因此输出口的数量远小于输入口的数量,则第一存储芯片1与逻辑芯片2之间的连接线数量较少。As shown in FIG. 4, when the bit line multiplexer 4 is specifically provided, the bit line multiplexer 4 can be provided on the first memory chip 1, thereby reducing the gap between the first memory chip 1 and the logic chip 2. The number of connecting wires to simplify the process. In addition, if the number of connection lines between the first storage chip 1 and the logic chip 2 is small, the reliability of the connection between the first storage chip 1 and the logic chip 2 is also high, and it is not easy to be damaged. Specifically, if the bit line multiplexer 4 is located on the logic chip 2, the bit lines 113 of the first memory chip 1 need to be connected from the first memory chip 1 to the bit line multiplexer located on the logic chip 2. 4 input ports, more in number. While the bit line multiplexer 4 is located in the first memory chip 1, the bit line 113 is directly connected to the bit line multiplexer 4 in the first memory chip 1. The output port of the bit line multiplexer 4 Connected to the logic chip 2, and the multiple input ports of the bit line multiplexer 4 correspond to one output port, so the number of output ports is much smaller than the number of input ports, then the first memory chip 1 and the logic chip 2 The number of connecting lines between is small.
请继续参考图4,在上述任一实施例的基础上,逻辑芯片2还包括字线驱动器26,该字线驱动器26与第一存储芯片1的字线112连接。该字线驱动器26与上述第一存储单元阵列11的字线112电连接,以实现字线112上存储单元的打开和关闭。该方案中,存储器的字线驱动器26位于逻辑芯片2,因此,也不占用第一存储芯片1的面积,有利于提高第一存储芯片1的第一存储单元阵列11的数量,提高存储器的存储容量。Please continue to refer to FIG. 4. Based on any of the above embodiments, the logic chip 2 further includes a word line driver 26, and the word line driver 26 is connected to the word line 112 of the first memory chip 1. The word line driver 26 is electrically connected to the word line 112 of the above-mentioned first memory cell array 11 to realize the opening and closing of the memory cells on the word line 112. In this solution, the word line driver 26 of the memory is located in the logic chip 2. Therefore, it does not occupy the area of the first memory chip 1, which is beneficial to increase the number of the first memory cell array 11 of the first memory chip 1 and increase the storage capacity of the memory. capacity.
请继续参考图4,存储器还包括字线多路选通器5,该字线多路选通器5的一端具有多个输出口,另一端具有一个输入口,该输入口可以与多个输出口中的任一个连接。字线多路选通器5的每个输出口可以连接一根第一存储单元阵列11的字线112,当然在实际应用中,可以仅使字线多路选通器5的多个输出口中的部分输出口与字线112连接,本申请不做限制;字线多路选通器5的输入口与字线驱动器26连接,字线多路选通器5可以选择与输出口连接的一个字线112与输入口连通。在应用过程中,可以多根字线112共用一个字线驱动器26连接,利用字线多路选通器5,使字线多路选通器5连接的多个字线112中的一根字线112与字线驱动器26连接。现有技术中,通常每根字线112连接一个字线驱动器26。当存储器的每个第一存储单元阵列11的字线112数量减少时,即第一存储单元阵列11细粒度化后,第一存储单元阵列11的数量增加,第一存储芯片1的字线112总数也增加,需要连接的字线驱动器26数量也较多,字线驱动器26占用的面积较多,第一存储芯片1的成本也增加。则该方案中,可以减少使用的字线驱动器26数量,减小字线驱动器26占用的逻辑芯片2的面积,且可以降低成本。Please continue to refer to FIG. 4, the memory also includes a word line multiplexer 5, one end of the word line multiplexer 5 has multiple output ports, the other end has an input port, the input port can be connected with multiple output Any one of the mouth is connected. Each output port of the word line multiplexer 5 can be connected to a word line 112 of the first memory cell array 11. Of course, in practical applications, only the multiple output ports of the word line multiplexer 5 Part of the output ports of the word line 112 are connected to the word line 112, and this application is not limited; the input port of the word line multiplexer 5 is connected to the word line driver 26, and the word line multiplexer 5 can choose the one connected to the output port The word line 112 communicates with the input port. In the application process, a word line driver 26 can be shared by multiple word lines 112, and the word line multiplexer 5 is used to make one word of the multiple word lines 112 connected by the word line multiplexer 5 The line 112 is connected to the word line driver 26. In the prior art, each word line 112 is usually connected to a word line driver 26. When the number of word lines 112 of each first memory cell array 11 of the memory decreases, that is, after the first memory cell array 11 is fine-grained, the number of first memory cell arrays 11 increases, and the word lines 112 of the first memory chip 1 The total number also increases, the number of word line drivers 26 that need to be connected is also larger, the word line driver 26 occupies a larger area, and the cost of the first memory chip 1 also increases. In this solution, the number of word line drivers 26 used can be reduced, the area of the logic chip 2 occupied by the word line drivers 26 can be reduced, and the cost can be reduced.
具体设置上述字线多路选通器5时,可以将字线多路选通器5设置于第一存储芯片1,从而减少第一存储芯片1与逻辑芯片2之间连接线的数量,以简化工艺。此外,第一存储芯片1与逻辑芯片2之间的连接线数量较少,则第一存储芯片1与逻辑芯片2之间的连接可靠性也较高,不易损坏。具体的,字线多路选通器5若位于逻辑芯片2,则需要使第一存储芯片1的字线112均从第存储芯片连接到位于逻辑芯片2的字线多路选通器5的输出口,数量较多。而字线多路选通器5位于第一存储芯片1,则字线112在第一存储芯片1内直接与字线多路选通器5连接,字线多路选通器5的输入口与逻辑芯片2连接,而字线多路选通器5的多个输出口与一个输入口相对应,因此输入口的数量小于输出口的数量,则第一存储芯片1与逻辑芯片2之间的连接线数量较少。When specifically setting the word line multiplexer 5, the word line multiplexer 5 can be provided on the first memory chip 1, thereby reducing the number of connecting lines between the first memory chip 1 and the logic chip 2 to Simplify the process. In addition, if the number of connection lines between the first storage chip 1 and the logic chip 2 is small, the reliability of the connection between the first storage chip 1 and the logic chip 2 is also high, and it is not easy to be damaged. Specifically, if the word line multiplexer 5 is located in the logic chip 2, the word lines 112 of the first memory chip 1 need to be connected from the first memory chip to the word line multiplexer 5 located in the logic chip 2. More output ports. The word line multiplexer 5 is located in the first memory chip 1, and the word line 112 is directly connected to the word line multiplexer 5 in the first memory chip 1. The input port of the word line multiplexer 5 Connected to the logic chip 2, and the multiple output ports of the word line multiplexer 5 correspond to one input port, so the number of input ports is less than the number of output ports, then the first memory chip 1 and the logic chip 2 The number of connecting lines is small.
图5为本申请实施例中存储器的另一种剖面结构示意图,请参考图5,本申请另一些实施例中,存储器还包括第二存储芯片6,该第二存储芯片6与第一存储芯片1叠置,且第二存储芯片6与第一存储芯片1共用一个逻辑芯片2。具体的实施例中,第二存储芯片6包括多个第二存储单元阵列61,该第二存储单元阵列61与差分放大器21电连接。上述第二存储芯片6可以具有上述第一存储芯片1的结构特征,第二存储芯片6与逻辑芯片2的连接关系,也可以具有上述第一存储芯片1与逻辑芯片2之间的连接关系特征。5 is a schematic diagram of another cross-sectional structure of the memory in an embodiment of this application. Please refer to FIG. 1 is stacked, and the second memory chip 6 shares a logic chip 2 with the first memory chip 1. In a specific embodiment, the second memory chip 6 includes a plurality of second memory cell arrays 61, and the second memory cell array 61 is electrically connected to the differential amplifier 21. The second memory chip 6 may have the structural features of the first memory chip 1, the connection relationship between the second memory chip 6 and the logic chip 2, or the connection relationship between the first memory chip 1 and the logic chip 2 .
具体的实施例中,存储器可以包括一个第二存储芯片6,也可以包括两个或者更多的第二存储芯片6,本申请不做限制。In a specific embodiment, the memory may include one second storage chip 6, or may include two or more second storage chips 6, which is not limited in this application.
图6为本申请实施例中存储器的另一种剖面结构示意图,如图6所示,一种实施例中,上述第二存储芯片6还包括局域差分放大器62,第二存储单元阵列61的位线与该局域差分放大器62的输入端连接,该局域差分放大器62的输出端与逻辑芯片2上的差分放大器21连接。在具体应用时,信号可以先通过局域差分放大器62进行第一级放大,再通过位于逻辑芯片2的差分放大器21进行第二级放大。6 is a schematic diagram of another cross-sectional structure of the memory in an embodiment of the application. As shown in FIG. 6, in an embodiment, the second memory chip 6 further includes a local differential amplifier 62, and the second memory cell array 61 The bit line is connected to the input terminal of the local differential amplifier 62, and the output terminal of the local differential amplifier 62 is connected to the differential amplifier 21 on the logic chip 2. In a specific application, the signal can be first amplified by the local differential amplifier 62, and then amplified by the differential amplifier 21 located in the logic chip 2 for the second stage.
显然,本领域的技术人员可以对本申请进行各种改动和变型而不脱离本申请的保护范围。这样,倘若本申请的这些修改和变型属于本申请权利要求及其等同技术的范围之内,则本申请也意图包含这些改动和变型在内。Obviously, those skilled in the art can make various changes and modifications to this application without departing from the protection scope of this application. In this way, if these modifications and variations of this application fall within the scope of the claims of this application and their equivalent technologies, then this application is also intended to include these modifications and variations.

Claims (10)

  1. 一种存储器,其特征在于,包括:A memory, characterized in that it comprises:
    第一存储芯片,包括第一存储单元阵列,所述第一存储单元阵列包括多个晶体管、以及与所述多个晶体管耦合的字线和位线;The first memory chip includes a first memory cell array, the first memory cell array includes a plurality of transistors, and word lines and bit lines coupled with the plurality of transistors;
    逻辑芯片,与所述第一存储芯片叠置且电连接,包括差分放大器和参考电压源;A logic chip, which is overlapped and electrically connected to the first storage chip, and includes a differential amplifier and a reference voltage source;
    所述差分放大器具有第一差分输入端和第二差分输入端,所述第一输入端与所述第一存储单元阵列电连接,所述第二输入端与所述参考电压源电连接,所述第一差分输入端与所述第二差分输入端为一对差分输入端。The differential amplifier has a first differential input terminal and a second differential input terminal. The first input terminal is electrically connected to the first memory cell array, and the second input terminal is electrically connected to the reference voltage source. The first differential input terminal and the second differential input terminal are a pair of differential input terminals.
  2. 根据权利要求1所述的存储器,其特征在于,还包括位线多路选通器,所述位线多路选通器的一端与所述第一存储单元阵列的多根位线连接,另一端与所述差分放大器连接。The memory according to claim 1, further comprising a bit line multiplexer, one end of the bit line multiplexer is connected to a plurality of bit lines of the first memory cell array, and One end is connected with the differential amplifier.
  3. 根据权利要求2所述的存储器,其特征在于,所述位线多路选通器位于所述第一存储芯片。The memory according to claim 2, wherein the bit line multiplexer is located in the first memory chip.
  4. 根据权利要求1至3任一项所述的存储器,其特征在于,所述逻辑芯片还包括字线驱动器,所述字线驱动器与所述第一存储芯片的字线连接。The memory according to any one of claims 1 to 3, wherein the logic chip further comprises a word line driver, and the word line driver is connected to a word line of the first memory chip.
  5. 根据权利要求4所述的存储器,其特征在于,还包括字线多路选通器,所述字线多路选通器的一端与多个所述字线连接,另一端与所述字线驱动器连接。The memory according to claim 4, further comprising a word line multiplexer, one end of the word line multiplexer is connected to the plurality of word lines, and the other end is connected to the word line Drive connection.
  6. 根据权利要求5所述的存储器,其特征在于,所述字线多路选通器位于所述第一存储芯片。The memory according to claim 5, wherein the word line multiplexer is located in the first memory chip.
  7. 根据权利要求1至6任一项所述的存储器,其特征在于,还包括第二存储芯片,所述第二存储芯片与所述第一存储芯片叠置,所述第二存储芯片包括多个第二存储单元阵列,所述第二存储单元阵列与所述差分放大器电连接。The memory according to any one of claims 1 to 6, further comprising a second memory chip, the second memory chip is overlapped with the first memory chip, and the second memory chip includes a plurality of A second memory cell array, and the second memory cell array is electrically connected to the differential amplifier.
  8. 根据权利要求7所述的存储器,其特征在于,所述第二存储芯片还包括局域差分放大器,所述第二存储单元阵列与所述局域差分放大器电连接,所述局域差分放大器与所述逻辑芯片上的差分放大器电连接。7. The memory according to claim 7, wherein the second memory chip further comprises a local differential amplifier, the second memory cell array is electrically connected to the local differential amplifier, and the local differential amplifier is electrically connected to the The differential amplifier on the logic chip is electrically connected.
  9. 根据权利要求1至8任一项所述的存储器,其特征在于,所述第一存储芯片与所述逻辑芯片混合键合连接。The memory according to any one of claims 1 to 8, wherein the first memory chip and the logic chip are connected by hybrid bonding.
  10. 一种电子设备,其特征在于,包括如权利要求1至9任一项所述的存储器。An electronic device, characterized by comprising the memory according to any one of claims 1 to 9.
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