WO2021139884A1 - Dispositifs de rinçage pour la surveillance optique de processus - Google Patents

Dispositifs de rinçage pour la surveillance optique de processus Download PDF

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Publication number
WO2021139884A1
WO2021139884A1 PCT/EP2020/050320 EP2020050320W WO2021139884A1 WO 2021139884 A1 WO2021139884 A1 WO 2021139884A1 EP 2020050320 W EP2020050320 W EP 2020050320W WO 2021139884 A1 WO2021139884 A1 WO 2021139884A1
Authority
WO
WIPO (PCT)
Prior art keywords
flushing
medium
flushing medium
lance
distributor
Prior art date
Application number
PCT/EP2020/050320
Other languages
German (de)
English (en)
Inventor
Evangelos BERTAKIS
Alexander OBERMEIER
Original Assignee
Wacker Chemie Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie Ag filed Critical Wacker Chemie Ag
Priority to PCT/EP2020/050320 priority Critical patent/WO2021139884A1/fr
Publication of WO2021139884A1 publication Critical patent/WO2021139884A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G01N2021/151—Gas blown

Definitions

  • the invention relates to flushing devices for optical process monitoring, methods for producing the flushing devices and methods for optical process monitoring.
  • Optical analysis methods are very common for this, such as TDLAS (Tunable Diode Laser Absorption Spectroscopy).
  • TDLAS Tunable Diode Laser Absorption Spectroscopy
  • a transmitter sends a light beam, in particular a laser beam, into the process medium to be analyzed and the light beam emerging from this process medium is picked up by a receiver and, for example, with regard to optical effects, such as the type or extent of absorption, investigated in order to derive statements about the composition of the process medium.
  • Optical analysis methods have the advantage that there is no need to take samples from the process media - in contrast to extractive or in-line analysis methods, which thus contain additional sources of error and are also more complex compared to optical analysis methods.
  • Transmitters and / or receivers of optical analysis instruments are often located outside the process medium and can, for example, be separated from the process medium by a window.
  • Such a measuring arrangement requires that the light permeability of the entire path of the light beam from the transmitter to the receiver during the entire analysis period is not caused by deposits or impurities such as aerosols, dust particles, condensates, viscous oils, mists or other solid particles or droplets or in general Precipitation, is affected.
  • flushing devices In order to keep the window or the path of the light beam from the transmitter to the receiver free of such optical contamination, a wide variety of flushing devices have been recommended, such as windshield wipers, rotating windows, dust catchers, electrostatic or electromagnetic Filters or so-called "air knife” windows, in which a cleaning medium flows through a slot immediately in front of the window at high speed.
  • flushing devices it is a great challenge to design flushing devices in such a way that optical contamination between sender and receiver as completely and permanently as possible. This applies in particular to gas phase processes with dusty impurities.
  • deposits can occur after a short time, for example after a few hours to a few weeks, which lead to a faulty or even lead to a failure of the optical analysis and process tracking.
  • the object was to provide flushing devices for optical process monitoring with which the aforementioned problems can be eliminated or at least reduced.
  • the invention relates to flushing devices for optical process monitoring, characterized in that a flushing device comprises one or more flushing medium distributors, whereby a flushing medium distributor comprises a ring-like, spiral-shaped tapering supply channel (2) for flushing medium and said supply channel (2) on its inside of the ring (3) has one or more openings in the form of an annular gap.
  • the invention also relates to methods for optical process monitoring, characterized in that a transmitter (10) emits a light beam (12) and the light beam (12) reaches a receiver (11) after passing through one or more windows (5), one or more flushing devices and one or more process media (13) Rinsing device is attached to the side of the window (5) facing the process medium (process medium side) and comprises one or more rinsing medium distributors with which rinsing medium is supplied to the process medium side of the window (5), a rinsing medium distributor being a ring-like one Helical tapering feed channel (2) for flushing medium and said feed channel (2) has one or more openings in the form of an annular gap on its ring inner side (3) so that the flushing medium changes its flow direction as it flows through the flushing medium redistributor in the process, a jet of flushing medium forms which, in particular on the process medium side of the window (5), flows away from the window (5), and d es sen flow direction preferably has a vertical proportion relative
  • the ring-like, helically tapering feed channel (2) according to the invention is also referred to in the following for short as the feed channel (2).
  • the design of the flushing medium distributor is generally suitable that the flushing medium changes its direction of flow as it flows through the flushing medium distributor and a jet of flushing medium is formed, the flow direction of which is a vertical component relative to the orientation of the aforementioned supply channel (2) or relative to the window surface (5 ) having.
  • the feed channel (2) is designed like a ring. This means that the inside (3) of the feed channel (2) generally has a ring shape or assumes the shape of the inside of a ring. Overall, the feed channel (2) can also be viewed as a tapering ring, in particular as a ring tapering from its outside (7).
  • the outside (7) of the feed channel (2) that is to say the side opposite the inside (3) of the feed channel (2), generally has a helical shape.
  • the feed channel (2) tapers.
  • the cross-sectional area of the feed channel (2) is preferably greatest at the point at which the flushing medium enters the feed channel (2) (entry point (1)).
  • the cross-sectional area of the feed channel (2) decreases, preferably in a continuous manner, starting from the entry point (1) of the flushing medium into the feed channel (2) in the further course of the feed channel (2).
  • the cross-sectional area of the feed channel (2) is preferably smallest at the point which is immediately adjacent to the entry point (1) of the flushing medium into the feed channel (2); the flushing medium generally reaches this point as it flows through the feed channel (2) last.
  • the helical tapering of the supply channel (2) generally extends over the entire circumference of the ring-like structure of the supply channel (2), ie generally over the entire 360 ° circumference of the ring-like structure of the supply channel (2).
  • the flushing medium generally flows from the entry point (1) of the feed channel (2) towards the decreasing diameter of the feed channel (2).
  • the feed channel (2) is preferably designed in such a way that essentially the same amount of flushing medium flows out of the feed channel (2) over the entire annular gap of the feed channel (2).
  • the feed channel (2) can be oriented in any direction, but is preferably oriented horizontally.
  • the cross-sectional area of the feed channel (2) can assume the shape of a tube, a square shape or preferably a rectangular shape. Particularly preferred is the feed rungskanal (2) milled out of a cuboid. This simplifies the production and anchoring of the feed channel (2) or the flushing devices in the system for the optical process monitoring.
  • the opening of the ring formed by the inside (3) of the feed channel (2) has a diameter (ring diameter) of preferably 1 to 50 cm, particularly preferably 4 to 20 cm and most preferably 5 to 10 cm.
  • the ratio of a diameter of the entry point (1) to the inner diameter of the aforementioned ring diameter is preferably 0.1 to 100, particularly preferably 0.2 to 1 and most preferably 0.2 to 0.5.
  • the feed channel (2) can for example have 1 to 32, particularly preferably 1 to 4 and most preferably an entry point (1) for flushing medium.
  • the flushing medium is preferably fed horizontally, in particular tangentially, through the feed channel (2).
  • the flushing medium flows out of the supply channel (2) preferably to the same extent, in particular to the extent that the supply channel (2) tapers.
  • the flushing medium generally flows out of all openings or segments on the inside (3) of the supply channel (2).
  • the curvature or tapering of the feed channel (2) is preferably designed in such a way that the same amount of flushing medium flows out of all openings or segments of the same size on the inside (3) of the feed channel (2).
  • One or more guide elements (4) can be introduced on or on the inside of the ring (3), in particular in the area of the annular gap, of the feed channel (2).
  • the guide elements (4) can, for example, an air foil, the shape of an involute, also known by the name involute, for example as shown in FIG. 6, the shape of an Archimedean spiral segment, as illustrated for example in FIG. 7, or a blade shape exhibit.
  • the guide elements (4) are planar blades which can be arranged radially, see for example FIG. 4, or inclined, as for example in FIG shown in FIG. All guide elements (4) preferably have the same shape.
  • the guide elements (4) are preferably aerodynamic. This can also counteract flow separation, pressure losses or deposits on the window (5).
  • a flushing medium distributor preferably comprises 2 to 100, particularly preferably 4 to 50 and most preferably 10 to 30 line elements (4).
  • the guide elements (4) are preferably regularly, in particular evenly, attached to the inside of the ring (3) of the feed channel (2). Adjacent guide elements (4) preferably have essentially the same distance from one another.
  • the openings or flow channels between the guide elements (4) have a width to length ratio of preferably 1 to 20, particularly preferably 1.5 to 10 and most preferably 2 to 5.
  • the guide elements (4) preferably do not protrude vertically or radially from the inner side of the ring (3) of the feed channel (2), in particular not as shown in FIG.
  • the guide elements (4) protrude at an angle of preferably 5 to 80 °, particularly preferably 10 ° to 50 ° and most preferably 20 ° to 40 ° from the inside of the ring (3) of the feed channel (2).
  • the guide elements (4) are preferably inclined in the direction from which the flushing medium flows into the supply channel (2), as illustrated, for example, in FIG. This applies in particular to planar guide elements (4).
  • the feed channel (2) is preferably designed in such a way that essentially the same amount of flushing medium flows out between all guide elements (4).
  • the direction of flow of the flushing medium changes as it flows through the flushing medium distributor, preferably under the action of guide elements (4), by preferably 10 ° to 170 °, more preferably 30 ° to 150 °, particularly preferably 60 ° to 120 ° and most preferably 80 ° to 100 °.
  • the aforementioned change in the direction of flow of the flushing medium is defined, for example, by the angle formed by the window area (5) and the direction of flow of the flushing medium at the point where it exits the flushing medium distributor.
  • a flushing medium jet is formed, the flow direction of which has a vertical component to the flow direction in the feed channel (2) or relative to the window surface (5).
  • the flow direction of the flushing medium jet preferably changes as it flows through the flushing medium distributor by the aforementioned degrees in the vertical direction to the flow direction in the feed channel (2) or relative to the window surface (5).
  • a flushing device preferably additionally comprises one or more windows (5).
  • the window (5) and the Spülmediumvertei ler are preferably arranged coaxially.
  • the window (5) is preferably connected directly to the flushing medium distributor, for example with a flange.
  • the window (5) is preferably at least as large as the ring diameter of the feed channel (2) or the inner diameter of the lance (6).
  • the window (5) preferably covers the entire area which the feed channel (2) defines with its inner diameter (3).
  • the rinsing medium jet preferably flows away from the window (5) after leaving the rinsing medium distributor.
  • the rinsing medium distributor is preferably attached to the side of the window (5) that faces the process medium (process medium side).
  • the window (5) has a diameter of preferably 1 to 50 cm, particularly preferably 4 to 20 cm and most preferably 5 to 10 cm.
  • a suitable material for the window (5) is, for example, glass, such as inorganic or organic glass, in particular quartz glass, sapphire glass, borosilicate glass or aluminosilicate glass, or plexiglass.
  • windows (5) can be used as they are common as viewing windows for reactors or pipelines.
  • the flushing medium After leaving the flushing medium distributor, the flushing medium preferably has a swirl flow, in particular a uniform, stable or stationary swirl flow.
  • the flushing medium distributor advantageously enables flows with as few flow breaks as possible, preferably even without flow breaks.
  • a flushing device preferably additionally comprises a lance
  • the lance (6) is preferably in the form of a tube, in particular a straight tube. Preferably both ends of the tube are open.
  • the lance (6) is preferably attached directly to the Spülmediumvertei ler.
  • One end, in particular an open end, of the lance (6) is preferably attached to the flushing medium distributor.
  • the inside diameter of the pipe is preferably smaller than a diameter of the flushing medium distributor, an inside diameter (3) of the feed channel (2) or a diameter of the round opening which is defined by the guide elements (4) of a flushing medium distributor.
  • An inner diameter (3) of the feed channel (2) is in relation to a diameter of the round opening, which is defined by the guide elements (4) of a flushing medium distributor of preferably 1.1 to 5, particularly preferably 1.1 to 3.5 and most preferably 1.1 to 2.5.
  • the flushing medium which leaves a flushing medium distributor or a feed channel (2) or passes the guide elements (4), is preferably completely introduced into a lance (6).
  • This end of the lance (6) is preferably completed by the Spülmediumvertei ler, the feed channel (2), the window (5) or the Leitele elements (4).
  • the end of the lance (6) that does not face the flushing medium distributor or is not connected to the flushing medium distributor is preferably turned towards the process medium, which is monitored by optical analysis methods.
  • This end of the lance (6) is generally not closed, that is, generally open.
  • flushing medium can be introduced into the process medium via this end of the lance (6) after it has left the flushing medium distributor.
  • This end of the lance (6) can, for example, be flush with the wall of the device (9) containing the process medium.
  • the end of the lance (6) mentioned here preferably protrudes into the device (9) containing the process medium.
  • the end of the lance (6) mentioned here preferably protrudes 5 to 50 cm, particularly preferably 5 to 30 cm and most preferably 5 to 20 cm into the device (9) containing the process medium.
  • the lance (6) is at an angle to the flow direction of the process medium of preferably 0 ° to 180 °, particularly preferably 45 ° to 135 ° and even more preferably 80 ° to 100 °. Most preferably, the lance (6) is attached perpendicular to the flow direction of the process medium.
  • the lance (6) can have any length.
  • the lance (6) is preferably at least twice as long, particularly preferably 5 to 15 times as long as the diameter of the lance (6), in particular the inner diameter of the lance (6).
  • the inner diameter of the lance (6) is preferably at most as large as the inner diameter (3) of the feed channel (2) or the Diameter of the round opening which is defined by the guide elements (4).
  • the lance (6) has an inside diameter of preferably 1 to 30 cm, particularly preferably 2 to 10 cm and most preferably 2 to 4 cm.
  • the lance (6) has a length of preferably 10 to 60 cm, particularly preferably 10 to 40 cm and most preferably 20 to 30 cm. This information preferably relates to a lance (6) without a mouthpiece (8) or particularly preferably to a lance (6) including a mouthpiece (8).
  • the flow rate of the flushing medium in the lance (6) and in the flushing medium distributor can be adapted to the requirements of the individual case, for example to the type or flow rate of the process medium or the type of contamination of the process medium.
  • the flushing medium in the lance (6) or at the inlet of the flushing medium distributor is characterized by a Reynolds number of preferably 100 to 100,000, particularly preferably 500 to 50,000 and most preferably 500 to 2000.
  • the Reynolds number is preferably at the narrowest point of the lance ( 6), i.e. at the point of the lance (6) with the smallest diameter, or immediately in front of the mouthpiece (8).
  • the object according to the invention can be achieved even better.
  • the opening of the lance (6), which protrudes into the device (9) containing the process medium, can, for example, have the shape of a pipe cut off.
  • a mouthpiece (8) is preferably attached to this end of the lance (6).
  • the mouthpiece (8) is therefore preferably located at the end of the lance (6) opposite the flushing medium distributor.
  • the mouthpiece (8) preferably forms an end to the lance (6).
  • the mouthpiece (8) is preferably attached to the pipe wall of one end of the lance (6).
  • the mouthpiece (8) can, for example, take the form of a ring.
  • the outer wall of the mouthpiece is particularly preferred ckes (8) flat or straight and / or the inner wall of this mouthpiece (8) ring-shaped or trumpet-like or turned upside down. It is particularly preferred that the inside of the mouthpiece (8) widens conically or conically or not tapers.
  • the inside of the mouthpiece (8) denotes the side through which, in particular, starting from the rinsing medium distributor, rinsing medium flows.
  • the mouthpiece (8) has an inner diameter of preferably 1 to 30 cm, particularly preferably 2 to 10 cm and most preferably 2 to 4 cm.
  • the mouthpiece (8) has an outer diameter of preferably 2 to 50 cm, particularly preferably 3 to 15 cm and most preferably 4 to 6 cm.
  • the object according to the invention can be achieved even better with the mouthpiece (8).
  • the process medium can be in any device (9), for example a reactor, pipe or some other container.
  • the material of the individual components of the flushing device can, for example, be based on plastics such as epoxy resins, Teflon, or metals such as steel, in particular stainless steel, titanium, aluminum or silicon. In general, this does not apply to window (5).
  • Liquids or, preferably, gases can serve as the rinsing medium.
  • liquids are water or oil.
  • gases are air, water vapor, hydrogen, carbon dioxide, carbon monoxide, chlorine, oxygen and, in particular, inert gases such as nitrogen or noble gases, e.g. helium, neon, argon, xenon or radon.
  • the temperature or pressure of the flushing medium is advantageously based on the conditions of the process medium.
  • the impurities or the components of the process medium that form deposits can be, for example Aerosols, particles, steam, condensates, viscous oils, mists, sprays or other solid particles or droplets or general precipitation or by-products of chemical or biological reactions.
  • optical analysis methods or devices can be used to carry out the optical analyzes, in particular TDLAS (Tunable Diode Laser Absorption Spectroscopy).
  • TDLAS Tunable Diode Laser Absorption Spectroscopy
  • material properties can be determined, such as the refractive index, or spectroscopic examinations are carried out, such as UV, IR or UV / VIS, or other properties, such as film thicknesses, are determined.
  • the transmitter (10) and / or the receiver (11) of the optical analysis instrument is preferably separated from the flushing medium distributor and / or process medium by a window (5).
  • the flushing device is preferably located on the window (5) of the Sen ders (10) and / or on the window (5) of the receiver (11).
  • the invention also relates to methods for producing the flushing devices according to the invention, preferably the flushing medium distributor and particularly preferably the Leitele elements (4) by means of 3D printing.
  • 3d printing stands for three-dimensional printing. Conventional 3D printing processes can be used per se.
  • the starting material for 3D printing can, for example, be based on polymers such as epoxy resins, or metals such as steel, stainless steel, titanium, aluminum or silicon. The choice of starting material is generally based on the requirements of the applications in which the flushing devices are used, such as resistance to corrosion, caustic conditions or temperature loads.
  • the Leitelemen te (4) and the supply channel are produced by means of 3D printing (2), optionally including lance (6) and optionally including mouthpiece (8), produced by turning.
  • the feed channel (2) and lance (6) and / or mouthpiece (8) are preferably a one-piece workpiece.
  • the guide elements (4) of the flushing medium distributor are preferably inserted into the workpiece including the supply channel (2), optionally a lance (6) and optionally a mouthpiece (8). This procedure has the advantage that the wire elements (4) can be exchanged quickly and easily, even during operation of the device (9) with process medium.
  • the formation of deposits can be counteracted in a particularly efficient manner.
  • the path of the light from the transmitter to the receiver can be kept free of optically disruptive influences or influences that falsify the measurement result in a particularly efficient manner.
  • Deposits can be removed or kept away from the light path more completely or permanently.
  • the contact of measurement-relevant system parts, such as the window (5), with potential optical contamination can even be completely ruled out.
  • more correct measurement results can be obtained, which is of particular importance when determining safety-relevant parameters or for process control in product manufacture or other processes and the guarantee of product properties.
  • the intervals for a thorough cleaning of the system can be extended, or such a thorough cleaning can even be completely unnecessary, which saves work, time and costs for cleaning and the associated shutdown or shutdown of the system and reduces production downtimes or even completely avoids.
  • the modular structure of the flushing devices according to the invention is also advantageous. Individual components of a flushing device, such as the guide elements (4), can be designed independently of one another. can be exchanged, even in running systems, for example to replace worn parts or to retrofit the system for a modified mode of operation. For this reason, too, the optical process monitoring according to the invention is characterized by a particular flexibility.
  • FIG. 8 shows a preferred embodiment of the device according to the invention for optical process monitoring.
  • Two flushing devices are attached to a pipe (9) through which the process medium (13) flows.
  • the device comprised the transmitter (10) and the receiver (11), the window (5) and flushing medium distributor with a feed channel (2), guide elements (4) and a lance (6) with mouthpiece (8).
  • the transmitter (10) emitted a laser beam (12) which, after passing through the window (5) and flushing medium distributor with lance (6) and mouthpiece (8), was finally picked up by the receiver (11).
  • Feed channel (2) and guide plates (4) were not in the optical path between transmitter (10) and receiver (11)
  • Rinsing medium flowed through the entry point (1) of the feed channel (2) into the rinsing medium distributor and through the lance (6) and the mouthpiece (8) into the pipeline (9) and mixed with the process medium (13).
  • the rinsing medium was introduced via inlet (1) perpendicular to the lance (6).
  • FIG. 10 shows optical process monitoring that is not in accordance with the invention.
  • Inlet (1) for the flushing medium was attached perpendicular to the lances (6) and bent so that the flushing medium flowed away from the windows (5).
  • the inlet (1) for the flushing medium was placed perpendicular to the lance (6) and bent so that the flushing medium flowed towards the window (5).
  • FIG. 12 shows a device not according to the invention.
  • Rinsing medium was introduced tangentially to the lance (6) via inlet (1). Here, too, there were deposits of impurities from the process gas (13) on the windows (5).
  • flushing medium was introduced tangentially into a lance (6) via several inlets (1). The same amount of flushing medium flowed through all inlets.
  • Example 1 In contrast to this, the system according to the invention from Example 1 was technically simpler and deposits on the window (5) were also completely prevented.

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne des dispositifs de rinçage pour la surveillance optique de processus, caractérisés en ce que le dispositif de rinçage comprend un ou plusieurs distributeurs de milieu de rinçage, un distributeur de milieu de rinçage présentant un canal d'amenée annulaire (2) pour le milieu de rinçage, rétrécissant en forme de vis sans fin, ledit canal d'amenée (2) présentant sur son côté intérieur annulaire (3) une ou plusieurs ouvertures en forme de fente annulaire.
PCT/EP2020/050320 2020-01-08 2020-01-08 Dispositifs de rinçage pour la surveillance optique de processus WO2021139884A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/EP2020/050320 WO2021139884A1 (fr) 2020-01-08 2020-01-08 Dispositifs de rinçage pour la surveillance optique de processus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2020/050320 WO2021139884A1 (fr) 2020-01-08 2020-01-08 Dispositifs de rinçage pour la surveillance optique de processus

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WO2021139884A1 true WO2021139884A1 (fr) 2021-07-15

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1497581A1 (de) * 1966-09-27 1969-04-03 Siemens Ag Einrichtung zur Verhinderung von Staubablagerungen auf den Linsen optischer Geraete
DE10225151A1 (de) * 2002-06-06 2003-12-18 Bosch Gmbh Robert Vorrichtung zur Vermeidung von Ablagerungen von Partikeln/Substanzen auf einem empfindlichen optischen Gerät, insbesondere einer Sensor-Oberfläche
DE102012215805B3 (de) * 2012-09-06 2013-09-26 Siemens Aktiengesellschaft Prozess-Schnittstelle eines nach dem Durchlichtverfahren arbeitenden Prozess-Gasanalysators

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1497581A1 (de) * 1966-09-27 1969-04-03 Siemens Ag Einrichtung zur Verhinderung von Staubablagerungen auf den Linsen optischer Geraete
DE10225151A1 (de) * 2002-06-06 2003-12-18 Bosch Gmbh Robert Vorrichtung zur Vermeidung von Ablagerungen von Partikeln/Substanzen auf einem empfindlichen optischen Gerät, insbesondere einer Sensor-Oberfläche
DE102012215805B3 (de) * 2012-09-06 2013-09-26 Siemens Aktiengesellschaft Prozess-Schnittstelle eines nach dem Durchlichtverfahren arbeitenden Prozess-Gasanalysators

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