WO2021134679A1 - 电容系统及电容式麦克风 - Google Patents
电容系统及电容式麦克风 Download PDFInfo
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- WO2021134679A1 WO2021134679A1 PCT/CN2019/130916 CN2019130916W WO2021134679A1 WO 2021134679 A1 WO2021134679 A1 WO 2021134679A1 CN 2019130916 W CN2019130916 W CN 2019130916W WO 2021134679 A1 WO2021134679 A1 WO 2021134679A1
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
Definitions
- the invention relates to the technical field of acoustic-electric conversion devices, in particular to a capacitor system and a capacitor microphone.
- Micro-Electro-Mechanical-System Microphone (MEMS) microphone is an electro-acoustic transducer made by micro-machining technology, which has the characteristics of small size, good frequency response characteristics, and low noise. With the development of smaller and thinner electronic devices, MEMS microphones are more and more widely used in these devices. According to different damping methods, condenser microphones are divided into three types: pressure film damping, synovial damping and vacuum environment. Among them, the synovial damping adopts the comb-tooth capacitor method, and the capacitance is generated by the relative sliding movement between the comb teeth. However, in the prior art, the moving comb teeth at the edge of this type of condenser microphone do not only perform piston movement, but piston plus twisting movement, which has a certain impact on the performance of the microphone.
- One of the objectives of the present invention is to provide a capacitor system to solve the technical problem that the existing capacitor system cannot make the capacitor microphone have high sensitivity and good linearity.
- the second objective of the present invention is to provide a condenser microphone to solve the technical problems of low sensitivity and poor linearity of the existing condenser microphones.
- a capacitor system including a fixed substrate with a receiving cavity, a moving substrate arranged in the receiving cavity, an elastic member arranged opposite to the moving substrate, and a connection The connecting piece of the movable base plate and the elastic piece; the elastic piece drives the movable base plate to move back and forth relative to the fixed base plate through the connecting piece under the action of external force and its own restoring force, or The movable base plate moves back and forth relative to the fixed base plate under the action of external force and the restoring force of the elastic member; the fixed base plate includes a first surface close to the connecting piece and a first surface far from the connecting piece The second surface of the accommodating cavity is provided through the first surface and the second surface; the stationary substrate is provided with a plurality of stationary electrodes arranged in a comb-tooth shape protruding toward the accommodating cavity, and the movable substrate faces The fixed substrate is protrudingly provided with a plurality of movable electrodes arranged in a comb
- the elastic member is a diaphragm, which includes a vibrating part connected with the connecting member and a fixing part provided on the outer periphery of the vibrating part, and the vibrating part passes under the action of external force and its own restoring force.
- the connecting member drives the movable substrate to move back and forth relative to the fixed substrate.
- the movable substrate is provided with a plurality of through holes.
- the elastic member is a strip-shaped plate, and one end of the connecting member is connected to the strip-shaped plate, and the other end is connected to the movable substrate.
- the connecting piece is arranged in the middle of the strip-shaped plate, and two ends of the strip-shaped plate are symmetrical to each other with respect to the connecting piece.
- the connecting piece is provided at one end of the strip plate.
- the connecting member is a connecting column
- the connecting column is provided with one
- the central axis of the connecting column coincides with the central axis of the movable base plate.
- the connecting member is a connecting column
- the connecting column and the strip-shaped board are provided with several and the same number
- one connecting column is correspondingly connected to one of the strip-shaped boards.
- a plurality of the connecting posts are arranged symmetrically with respect to the central axis of the movable substrate, a plurality of the strip-shaped plates extend radially with respect to the central axis of the movable substrate, and the connecting posts are connected to the strip The plate is close to one end of the central axis of the movable base plate.
- connecting posts and the strip-shaped plates there are an even number of the connecting posts and the strip-shaped plates, and every two of the connecting posts are arranged symmetrically with respect to the central axis of the moving base plate, and every two of the strip-shaped plates are arranged symmetrically with respect to the moving base plate.
- the central axis of the substrate is symmetrically arranged.
- the fixed electrode is arranged symmetrically with respect to the central axis of the fixed substrate
- the movable electrode is arranged symmetrically with respect to the central axis of the movable substrate
- the central axis of the fixed substrate coincides with the central axis of the movable substrate.
- the present invention also provides a condenser microphone including the above-mentioned condenser system.
- the beneficial effects of the present invention are as follows: (1) The elastic member is arranged opposite to the movable base plate, and the connecting member transmits movement to ensure that the movable electrode provided on the edge of the movable base plate also performs piston movement and avoids the occurrence of the piston plus twisting movement. Therefore, the capacitor system provided by the present invention improves the linearity and sensitivity of the capacitor microphone, so that the capacitor microphone has better linearity and higher sensitivity. (2) The elastic element and the movable electrode are not integrated into one structure. According to different applications, it is possible to choose whether the external force acts on the elastic element or the external force on the movable substrate. The size of the elastic element and the size of the movable electrode will not be affected. Restrict each other. Therefore, the capacitive system provided by the present invention has a higher degree of freedom in design.
- FIG. 1 is a schematic structural diagram of a capacitor system with a diaphragm and a rectangular vibration part according to an embodiment of the present invention
- FIG. 2 is an exploded view of a capacitor system in which the elastic member is a diaphragm and the vibration part is a rectangular shape provided by an embodiment of the present invention
- Figure 3 is a partial enlarged view of A in Figure 2;
- FIG. 4 is a schematic structural diagram of a rectangular movable substrate and a fixed substrate provided by an embodiment of the present invention
- Figure 5 is a partial enlarged view of B in Figure 4.
- FIG. 6 is a schematic structural view of a capacitor system in which the elastic member is a diaphragm and the vibration part is rectangular, and the movable substrate has a through hole according to an embodiment of the present invention
- FIG. 7 is a schematic structural diagram of a capacitor system in which the elastic member is a diaphragm and the vibration part is a circular shape provided by an embodiment of the present invention
- FIG. 8 is a schematic structural diagram of a capacitor system in which the elastic member is a strip-shaped plate and the movable substrate is a rectangle according to an embodiment of the present invention
- FIG. 9 is a schematic structural diagram of a capacitor system in which the elastic member is a strip-shaped plate and the movable substrate is a circular shape provided by an embodiment of the present invention.
- FIG. 10 is a schematic structural diagram of a capacitor system having multiple connectors and multiple strip plates according to an embodiment of the present invention.
- the condenser microphone provided by the embodiment of the present invention includes a capacitor system 100, the capacitor system 100 includes a fixed substrate with a receiving cavity 5 1, a movable substrate 2 provided in the cavity 5 and a movable substrate 2
- the elastic member 3 arranged oppositely and the connecting member 4 for connecting the movable substrate 2 and the elastic member 3; the elastic member 3 drives the movable substrate 2 relative to the fixed substrate through the connecting member 4 under the action of external force and its own restoring force 1 Do reciprocating movement, or the movable base plate 2 moves back and forth relative to the fixed base plate 1 under the action of external force and the restoring force of the elastic member 3;
- the fixed base plate 1 includes a first surface 11 close to the connecting piece 4 and away from the connecting piece
- the accommodating cavity 5 is provided through the first surface 11 and the second surface 12; the fixed substrate 1 faces the accommodating cavity 5 with a number of fixed electrodes 6 arranged in a comb tooth shape, and the movable substrate 2 faces the fixed substrate 1.
- a number of movable electrodes 7 arranged in a comb-tooth shape are protrudingly provided, and the fixed electrodes 6 and the movable electrodes 7 are spaced apart and cross each other.
- the external force in the present invention is sound pressure.
- the elastic member 3 drives the base plate 2 to move back and forth relative to the fixed base plate 1 through the connecting member 4, or the moving base plate 2 is under sound pressure. Under the action and the restoring force of the elastic member 3, it moves back and forth relative to the fixed substrate 1.
- the value of ⁇ 0 ⁇ r is also fixed.
- S is the area between the two electric plates of the capacitor, and d is the distance between the two electric plates, so the capacitor provided by the present invention
- the fixed electrode 6 and the moving electrode 7 are distributed in a comb-tooth shape.
- the fixed electrode 6 and the moving electrode 7 are spatially separated and the fixed electrode 6 and the moving electrode 7 cross each other, so after the fixed electrode 6 and the moving electrode 7 are energized , A capacitance is formed between the fixed electrode 6 and the movable electrode 7, and the distance d between them remains unchanged, and the area depends on the area directly facing the fixed electrode 6 and the movable electrode 7.
- the movable substrate 2 moves back and forth relative to the fixed substrate 1 under the action of the sound pressure and the elastic member 3, that is, the size of the area facing the fixed electrode 6 and the movable electrode 7 is changed, so that the capacitance value is changed. , Generating current, so the condenser microphone converts the sound signal into an electrical signal.
- the fixed electrode 6 and the movable electrode 7 are spatially separated and crossed to each other to ensure that there is a certain gap 8 between the movable electrode 7 and the fixed electrode 6, so that the elastic member 3 is under the action of sound pressure and its own restoring force.
- the movable base plate 2 can move back and forth relative to the fixed base plate 1, or the moving base plate 2 can move back and forth relative to the fixed base plate 1 under the action of sound pressure and the restoring force of the elastic member 3, and the moving base plate 2 is relatively
- the reciprocating movement of the base plate 1 is a piston movement, which maximizes the characteristics of the comb tooth structure.
- the elastic member 3 is arranged opposite to the movable base plate 2, and the connecting member 4 transmits movement, ensuring that the movable electrode provided on the edge of the movable base plate 2 also performs piston movement, avoiding the occurrence of the piston plus twisting movement. Therefore, by adopting the method provided by the embodiment of the present invention
- the condenser system 100 can improve the linearity and sensitivity of the condenser microphone, so that the condenser microphone has better linearity and higher sensitivity.
- the elastic member 3 and the movable electrode 7 are not integrated into one structure. According to different applications, it is possible to choose whether the sound pressure acts on the elastic member 3 or the sound pressure on the movable substrate 2.
- the size and movement of the elastic member 3 The size of the electrodes 7 will not be restricted by each other. Therefore, the capacitive system 100 provided by the embodiment of the present invention has a higher degree of design freedom.
- the elastic member 3 is a diaphragm, and includes a vibrating portion 31 connected to the connecting member 4 and a fixed portion 32 provided on the outer periphery of the vibrating portion 31.
- the vibrating portion 31 Under the action of sound pressure and its own restoring force, the connecting member 4 drives the moving substrate 2 to move back and forth relative to the fixed substrate 1. Specifically, the sound pressure acts on the vibrating part 31, and the vibrating part 31 vibrates in a direction close to the connecting piece 4, pushing the connecting piece 4 to move closer to the moving base plate 2, thereby causing the moving base plate 2 to move away from the connecting piece relative to the fixed base plate 1.
- the vibrating part 31 vibrates in a direction away from the connecting member 4 under the action of its own restoring force, and drives the connecting member 4 to move away from the moving base plate 2, thereby causing the moving base plate 2 to move relative to the fixed base plate 1. Moving in the direction close to the connecting piece 4, the moving base plate 2 completes a reciprocating movement.
- the vibrating part 31 may be circular or rectangular, and the shape and size are not limited by the content of this embodiment and the drawings.
- the movable substrate 2 is provided with a plurality of through holes 21 therethrough. In this way, the quality of the condenser microphone is reduced and its resonant frequency is increased.
- the elastic member 3 is a strip-shaped plate, and one end of the connecting member 4 is connected to the strip-shaped plate, and the other end is connected to the movable substrate 2. Because the strip-shaped plate has a small area, the sound pressure directly acts on the moving base plate 2. Specifically, the sound pressure acts on the moving base plate 2. The moving base plate 2 moves in a direction away from the connecting piece 4 relative to the fixed base plate 1, driving the connecting piece 4 to move away from the strip plate, so that the strip plate moves closer to the connecting piece. Afterwards, the strip plate vibrates in the direction away from the connecting piece 4 under the action of its own restoring force, driving the connecting piece 4 to move away from the moving base plate 2, thereby causing the moving base plate 2 to face relative to the fixed base plate 1.
- the moving base plate 2 completes a reciprocating movement.
- the strip-shaped plate can be any elastic member 3 that can provide restoring force, such as a cantilever beam, a serpentine beam, a double-ended fixed-supported beam, and the like. It is worth mentioning that when the elastic member 3 is a strip-shaped plate, in order to ensure that the sound pressure will not directly pass through the gap 8 between the moving electrode 7 and the fixed electrode 6, the gap 8 cannot be designed too large, that is, to ensure The moving base plate 2 performs piston movement, and it is necessary to avoid direct sound pressure leakage as much as possible.
- the connecting piece 4 can be arranged at one end of the strip-shaped board or in the middle of the strip-shaped board.
- the connecting piece 4 is arranged in the middle of the strip-shaped plate, and the two ends of the strip-shaped plate are symmetrical to each other with respect to the connecting piece 4. In this way, the connecting member 4 can receive a uniform restoring force, thereby ensuring that all the movable electrodes 7 provided on the movable substrate 2 perform piston movement.
- the connecting member 4 is a connecting column, of course, it can also be a connecting rod, a connecting block, etc., as long as it can connect the elastic member 3 and the movable substrate 2 and transmit vibration.
- One connecting column is provided, and the central axis of the connecting column coincides with the central axis of the moving base plate 2. In this way, in order to enable the connecting member 4 to uniformly apply the force from the elastic member 3 to the movable substrate 2 so as to ensure that all the movable electrodes 7 provided on the movable substrate 2 perform piston movement.
- connecting columns and strip plates there may be several connecting columns and strip plates, as long as the numbers of the two are the same and one connecting column is connected to one strip plate correspondingly.
- a number of connecting posts are arranged symmetrically with respect to the central axis of the moving base plate 2, the several strip-shaped plates extend radially with respect to the central axis of the moving base plate 2, and the connecting posts are connected to one end of the strip-shaped plate close to the central axis of the moving base plate 2.
- the arrangement in this way ensures that the restoring force from the strip-shaped plate acts evenly on the movable substrate 2 and ensures that all the movable electrodes 7 provided on the movable substrate 2 perform piston movement.
- the movable substrate 2 can be any symmetrical shape such as a circle, a rectangle, a symmetrical polygon, and the like.
- every two connecting posts are arranged symmetrically with respect to the central axis of the moving base plate 2, and every two strip plates are arranged symmetrically with respect to the central axis of the moving base plate 2.
- the strip-shaped plates extend non-radially with respect to the central axis of the moving base plate 2, and every two strip-shaped plates are arranged symmetrically with respect to the central axis of the moving base plate 2, and the connecting posts are connected to the strip-shaped plates close to the moving base.
- the movable substrate 2 can be any symmetrical shape such as a circle, a rectangle, a symmetrical polygon, and the like.
- the fixed electrode 6 is arranged symmetrically with respect to the central axis of the fixed substrate 1
- the movable electrode 7 is arranged symmetrically with respect to the central axis of the movable substrate 2
- the central axis of the fixed substrate 1 coincides with the central axis of the movable substrate 2.
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- Acoustics & Sound (AREA)
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
本发明提供一种电容系统，包括具有收容腔的定基板、设于收容腔内的动基板、与动基板相对设置的弹性件以及用于连接动基板与弹性件的连接件；弹性件在外力的作用下和自身回复力的作用下通过连接件带动动基板相对于定基板做往返移动，或者动基板在外力的作用下和弹性件的回复力的作用下相对于定基板做往返移动；定基板包括靠近连接件的第一表面和远离连接件的第二表面，收容腔贯穿第一表面和第二表面设置；定基板朝向收容腔凸设若干呈梳齿状排布的定电极，动基板朝向定基板凸设有若干呈梳齿状排布的动电极，定电极与动电极在空间上分离且相互交叉。因此，本发明提供的电容系统提高了电容式麦克风线性度和灵敏度，并且该电容系统设计自由度更高。
Description
本发明涉及声电转换装置技术领域，尤其涉及一种电容系统及电容式麦克风。
微电机系统(Micro-Electro-Mechanical-System Microphone，MEMS)麦克风是一种用微机械加工技术制作出来的电声换能器，其具有体积小、频响特性好、噪声低等特点。随着电子设备的小巧化、薄型化发展，MEMS麦克风被越来越广泛地运用到这些设备上。根据阻尼方式的不同，电容式麦克风分为三种：压膜阻尼、滑膜阻尼和真空环境。其中，滑膜阻尼采用梳齿电容方式，通过梳齿间相对滑移的运动产生电容。然而，现有技术中，该类电容式麦克风边缘的运动梳齿并非仅仅进行活塞运动，而是活塞加扭转运动，对麦克风的性能产生一定的影响。
发明概述
因此，有必要提供一种高灵敏度和线性度好的电容系统以及电容式麦克风。
问题的解决方案
本发明的目的之一在于提供一种电容系统，以解决现有的电容系统无法使电容式麦克风具有高灵敏度、线性度好的技术问题。
本发明的目的之二在于提供一种电容式麦克风，以解决现有的电容式麦克风灵敏度低、线性度差的技术问题。
本发明的目的之一提供的技术方案如下：一种电容系统，包括具有收容腔的定基板、设于所述收容腔内的动基板、与所述动基板相对设置的弹性件以及用于连接所述动基板与所述弹性件的连接件；所述弹性件在外力的作用下以及自身回复力的作用下通过所述连接件带动所述动基板相对于所述定基板做往返移动，或者所述动基板在外力的作用下以及所述弹性件的回复力的作用下相对于所 述定基板做往返移动；所述定基板包括靠近所述连接件的第一表面和远离所述连接件的第二表面，所述收容腔贯穿所述第一表面和所述第二表面设置；所述定基板朝向所述收容腔凸设若干呈梳齿状排布的定电极，所述动基板朝向所述定基板凸设有若干呈梳齿状排布的动电极，所述定电极与所述动电极在空间上分离且相互交叉。
进一步地，所述弹性件为振膜，包括与所述连接件连接的振动部以及设于所述振动部外周的固定部，所述振动部在外力的作用下以及自身回复力的作用下通过所述连接件带动所述动基板相对于所述定基板做往返移动。
进一步地，所述动基板贯穿设有若干个通孔。
进一步地，所述弹性件为条形板，所述连接件一端连接于所述条形板、另一端连接于所述动基板。
进一步地，所述连接件设于所述条形板的中间，所述条形板的两端相对于所述连接件相互对称。
进一步地，所述连接件设于所述条形板的一端。
进一步地，所述连接件为连接柱，所述连接柱设有一个，所述连接柱的中心轴线与所述动基板的中心轴线重合。
进一步地，所述连接件为连接柱，所述连接柱与所述条形板设有若干个且数量相同，一个所述连接柱对应连接于一个所述条形板。
进一步地，若干所述连接柱相对于所述动基板的中心轴线对称设置，若干所述条形板相对于所述动基板的中心轴线呈辐射状延伸，所述连接柱连接于所述条形板靠近所述动基板的中心轴线一端。
进一步地，所述连接柱与所述条形板设有偶数个，每两个所述连接柱相对于所述动基板的中心轴线对称设置，每两个所述条形板相对于所述动基板的中心轴线对称设置。
进一步地，所述定电极相对所述定基板的中心轴线对称设置，所述动电极相对所述动基板的中心轴对称设置，所述定基板的中心轴线与所述动基板的中心轴线重合。
本发明还提供一种电容式麦克风，包括上述的电容系统。
发明的有益效果
本发明的有益效果在于：(1)通过弹性件与动基板相对设置，连接件传递运动，确保设于动基板边缘的动电极也进行活塞运动，避免活塞加扭转运动的发生。因此，本发明提供的电容系统提高了电容式麦克风线性度和灵敏度，使电容式麦克风具有更佳的线性度以及更高的灵敏度。(2)弹性件和动电极没有集成在一个结构上，可根据不同的应用场合选择使外力作用在弹性件上还是使外力作用在动基板上，弹性件的大小和动电极的大小不会受到彼此限制。因此，本发明提供的电容系统设计自由度更高。
对附图的简要说明
图1为本发明一实施例提供的弹性件为振膜且振动部为矩形的电容系统的结构示意图；
图2为本发明一实施例提供的弹性件为振膜且振动部为矩形的电容系统的爆炸图；
图3为图2中A处的局部放大图；
图4为本发明一实施例提供的矩形动基板与定基板相配合的结构示意图；
图5为图4中B处的局部放大图；
图6为本发明一实施例提供的弹性件为振膜且振动部为矩形，并且动基板具有通孔的电容系统的结构示意图；
图7为本发明一实施例提供的弹性件为振膜且振动部为圆形的电容系统的结构示意图；
图8为本发明一实施例提供的弹性件为条形板且动基板为矩形的电容系统的结构示意图；
图9为本发明一实施例提供的弹性件为条形板且动基板为圆形的电容系统的结构示意图；
图10为本发明一实施例提供的具有多个连接件和多个条形板的电容系统的结构示意图。
图中：100、电容系统；1、定基板；11、第一表面；12、第二表面；2、动基板；21、通孔；3、弹性件；31、振动部；32、固定部；4、连接件；5、收容腔；6、定电极；7、动电极；8、缝隙。
发明实施例
下面结合图1至图10对本发明作详细描述。
请参阅图1至图10，本发明实施例提供的电容式麦克风包括电容系统100，该电容系统100包括具有收容腔5的定基板1、设于收容腔5内的动基板2、与动基板2相对设置的弹性件3以及用于连接动基板2与弹性件3的连接件4；弹性件3在外力的作用下以及自身回复力的作用下通过连接件4带动动基板2相对于定基板1做往返移动，或者动基板2在外力的作用下以及弹性件3的回复力的作用下相对于定基板1做往返移动；定基板1包括靠近连接件4的第一表面11和远离连接件4的第二表面12，收容腔5贯穿第一表面11和第二表面12设置；定基板1朝向收容腔5凸设若干呈梳齿状排布的定电极6，动基板2朝向定基板1凸设有若干呈梳齿状排布的动电极7，定电极6与动电极7在空间上分离且相互交叉。本发明中的外力为声压，弹性件3在声压的作用下以及自身回复力的作用下通过连接件4带动动基板2相对于定基板1做往返移动，或者动基板2在声压的作用下以及弹性件3的回复力的作用下相对于定基板1做往返移动。
由于电容的值与电容两个板之间的正对面积成正比，与电容两个板之间的距离成反比，即C＝kε
0ε
rS/d，k为常数，ε
0为常数，ε
r为常数。当电容式麦克风制作出来后，ε
0ε
r的值也就固定了，S是电容两个电板之间正对的面积，d为两个电板之间的距离，所以本发明提供的电容式麦克风中定电极6和动电极7均为梳齿状分布，定电极6与动电极7在空间上分离并且定电极6与动电极7相互交叉，所以在定电极6和动电极7通电后，定电极6和动电极7之间就形成了电容，且其之间的距离d不变，面积取决于定电极6和动电极7之间的正对面积。本发明实施例中动基板2在声压和弹性件3的作用下相对于定基板1做往返移动，即改变定电极6和动电极7之间的正对面积大小，从而使电容值发生变化，产生电流，于是电容式麦克风将声音信号转换成电信号。
本发明通过将定电极6与动电极7在空间上分离且相互交叉，确保动电极7与定电极6之间具有一定缝隙8，以使弹性件3在声压的作用下以及自身回复力的作用下使动基板2能相对于定基板1做往返移动，或者动基板2在声压的作用下以及弹性件3的回复力的作用下能相对于定基板1做往返移动，动基板2相对于定基板1的往返移动为活塞运动，最大限度地发挥了梳齿结构的特点。通过弹性件3与动基板2相对设置，连接件4传递运动，确保设于动基板2边缘的动电极也进行活塞运动，避免活塞加扭转运动的发生，因此，通过采用本发明实施例提供的电容系统100可提高电容式麦克风线性度和灵敏度，使电容式麦克风具有更佳的线性度和更高的灵敏度。另外，弹性件3和动电极7没有集成在一个结构上，可根据不同的应用场合选择使声压作用在弹性件3上还是使声压作用在动基板2上，弹性件3的大小和动电极7的大小不会受到彼此限制，因此，本发明实施例提供的电容系统100设计自由度更高。
请参阅图1-2和图6-7，在一个实施例中，弹性件3为振膜，包括与连接件4连接的振动部31以及设于振动部31外周的固定部32，振动部31在声压的作用下以及自身回复力的作用下通过连接件4带动动基板2相对于定基板1做往返移动。具体地，声压作用于振动部31，振动部31朝靠近连接件4的方向振动，推动连接件4朝靠近动基板2的方向移动，从而使动基板2相对于定基板1朝远离连接件4的方向移动；之后，振动部31在自身回复力的作用下朝远离连接件4的方向振动，带动连接件4朝远离动基板2的方向移动，从而使动基板2相对于定基板1朝靠近连接件4的方向移动，动基板2完成一个往返移动。振动部31可以为圆形，也可以为矩形，形状和大小均不受本实施例的内容以及附图的限制。
优选地，动基板2贯穿设有若干个通孔21。通过该种方式，降低电容式麦克风的质量，并提高其谐振频率。
在另一实施例中，弹性件3为条形板，连接件4一端连接于条形板、另一端连接于动基板2。因为条形板面积小，所以声压直接作用于动基板2上。具体地，声压作用于动基板2，动基板2相对于定基板1朝远离连接件4的方向移动，带动连接件4朝远离条形板的方向移动，从而使条形板朝靠近连接件4的方向振动；之后，条形板在自身回复力的作用下朝远离连接件4的方向振动，带动连接件4朝 远离动基板2的方向移动，从而使动基板2相对于定基板1朝靠近连接件4的方向移动，动基板2完成一个往返移动。可以理解地，条形板可以为悬臂梁、蛇形梁、双端固支梁等任何可提供回复力的弹性件3。值得一提的是，在弹性件3为条形板时，为了保证声压不会直接从动电极7和定电极6之间的缝隙8穿过去，该缝隙8不能设计太大，即要保证动基板2进行活塞运动，又要尽可能避免声压直接下漏。
连接件4可以设于条形板的一端，也可以设于条形板的中间。优选地，连接件4设于条形板的中间，条形板的两端相对于连接件4相互对称。通过该种方式，可使连接件4受到均匀的回复力，从而确保设于动基板2上的所有动电极7进行活塞运动。
优选地，连接件4为连接柱，当然也可以为连接杆、连接块等，只要能连接弹性件3和动基板2并传递振动即可。
请参阅图1、图7、图9-10，连接柱设有一个，连接柱的中心轴线与动基板2的中心轴线重合。通过该种方式，为了使连接件4能将来自弹性件3的力均匀地作用到动基板2上，从而确保设于动基板2上的所有动电极7进行活塞运动。
可以理解地，连接柱与条形板也可以设有若干个，只要两者数量相同且一个连接柱对应连接于一个条形板即可。
优选地，若干连接柱相对于动基板2的中心轴线对称设置，若干条形板相对于动基板2的中心轴线呈辐射状延伸，连接柱连接于条形板靠近动基板2的中心轴线一端。通过该种方式设置，确保来自条形板的回复力均匀地作用在动基板2上，保证设于动基板2上的所有动电极7进行活塞运动。动基板2可以为圆形、矩形、对称的多边形等任何对称的形状。
优选地，连接柱与条形板设有偶数个，每两个连接柱相对于动基板2的中心轴线对称设置，每两个条形板相对于动基板2的中心轴线对称设置。在本实施例中，条形板相对于动基板2的中心轴线呈非辐射状延伸，且每两个条形板相对于动基板2的中心轴线对称设置，连接柱连接于条形板靠近动基板2的中心轴线一端。动基板2可以为圆形、矩形、对称的多边形等任何对称的形状。
通过上述方式设置，确保来自条形板的回复力均匀地作用在动基板2上，从而 保证设于动基板2上的所有动电极7进行活塞运动。
可以理解地，以上所述的连接柱和条形板的设置方式相互交叉设置也是可以的，只要确保来自条形板的回复力均匀地作用在动基板2上即可。
优选地，定电极6相对定基板1的中心轴线对称设置，动电极7相对动基板2的中心轴对称设置，定基板1的中心轴线与动基板2的中心轴线重合。可以理解地，定电极6和动电极7均不对称设置也是可以的。
以上所述的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。
Claims (12)
- 一种电容系统，其特征在于，包括具有收容腔的定基板、设于所述收容腔内的动基板、与所述动基板相对设置的弹性件以及用于连接所述动基板与所述弹性件的连接件；所述弹性件在外力的作用下以及自身回复力的作用下通过所述连接件带动所述动基板相对于所述定基板做往返移动，或者所述动基板在外力的作用下以及所述弹性件的回复力的作用下相对于所述定基板做往返移动；所述定基板包括靠近所述连接件的第一表面和远离所述连接件的第二表面，所述收容腔贯穿所述第一表面和所述第二表面设置；所述定基板朝向所述收容腔凸设若干呈梳齿状排布的定电极，所述动基板朝向所述定基板凸设有若干呈梳齿状排布的动电极，所述定电极与所述动电极在空间上分离且相互交叉。
- 根据权利要求1所述的电容系统，其特征在于，所述弹性件为振膜，包括与所述连接件连接的振动部以及设于所述振动部外周的固定部，所述振动部在外力的作用下以及自身回复力的作用下通过所述连接件带动所述动基板相对于所述定基板做往返移动。
- 根据权利要求2所述的电容系统，其特征在于，所述动基板贯穿设有若干个通孔。
- 根据权利要求1所述的电容系统，其特征在于，所述弹性件为条形板，所述连接件一端连接于所述条形板、另一端连接于所述动基板。
- 根据权利要求4所述的电容系统，其特征在于，所述连接件设于所述条形板的中间，所述条形板的两端相对于所述连接件相互对称。
- 根据权利要求4所述的电容系统，其特征在于，所述连接件设于所述条形板的一端。
- 根据权利要求1至6任一项所述的电容系统，其特征在于，所述连接件为连接柱，所述连接柱设有一个，所述连接柱的中心轴线与 所述动基板的中心轴线重合。
- 根据权利要求6所述的电容系统，其特征在于，所述连接件为连接柱，所述连接柱与所述条形板设有若干个且数量相同，一个所述连接柱对应连接于一个所述条形板。
- 根据权利要求8所述的电容系统，其特征在于，若干所述连接柱相对于所述动基板的中心轴线对称设置，若干所述条形板相对于所述动基板的中心轴线呈辐射状延伸，所述连接柱连接于所述条形板靠近所述动基板的中心轴线一端。
- 根据权利要求8所述的电容系统，其特征在于，所述连接柱与所述条形板设有偶数个，每两个所述连接柱相对于所述动基板的中心轴线对称设置，每两个所述条形板相对于所述动基板的中心轴线对称设置。
- 根据权利要求1所述的电容系统，其特征在于，所述定电极相对所述定基板的中心轴线对称设置，所述动电极相对所述动基板的中心轴对称设置，所述定基板的中心轴线与所述动基板的中心轴线重合。
- 一种电容式麦克风，其特征在于，包括如权利要求1至11任一项所述的电容系统。
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