WO2021078038A1 - Antenna, antenna encapsulating method and terminal - Google Patents

Antenna, antenna encapsulating method and terminal Download PDF

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Publication number
WO2021078038A1
WO2021078038A1 PCT/CN2020/120552 CN2020120552W WO2021078038A1 WO 2021078038 A1 WO2021078038 A1 WO 2021078038A1 CN 2020120552 W CN2020120552 W CN 2020120552W WO 2021078038 A1 WO2021078038 A1 WO 2021078038A1
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WO
WIPO (PCT)
Prior art keywords
antenna
layer
glass substrate
metal connecting
away
Prior art date
Application number
PCT/CN2020/120552
Other languages
French (fr)
Chinese (zh)
Inventor
于睿
张湘辉
Original Assignee
华为技术有限公司
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Publication date
Application filed by 华为技术有限公司 filed Critical 华为技术有限公司
Publication of WO2021078038A1 publication Critical patent/WO2021078038A1/en

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/12Supports; Mounting means
    • H01Q1/22Supports; Mounting means by structural association with other equipment or articles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/36Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/36Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith
    • H01Q1/38Structural form of radiating elements, e.g. cone, spiral, umbrella; Particular materials used therewith formed by a conductive layer on an insulating support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q1/00Details of, or arrangements associated with, antennas
    • H01Q1/50Structural association of antennas with earthing switches, lead-in devices or lightning protectors

Definitions

  • This application relates to the field of packaging and the technical field of communication equipment, and in particular to an antenna, an antenna packaging method, and a terminal.
  • millimeter wave antennas With the advent of the era of high-speed communications such as 5G and virtual reality, there are more and more applications and designs of millimeter wave antennas. Since the wavelength of the millimeter wave frequency band is extremely small and the sensitivity to processing errors is very high, a high-precision process is required to manufacture the millimeter wave antenna, such as an antenna in package (AIP).
  • AIP antenna in package
  • the packaged built-in antenna includes an antenna and a radio frequency chip.
  • the antenna includes an upper antenna layer, a lower reference ground layer, and a feeder connecting the upper antenna layer.
  • the feeder is connected to the radio frequency chip, and the radio frequency chip has other ports and modules connected to it.
  • wafer-level packaging technology is generally used to design packaged built-in antennas, using thick encapsulating plastic as the antenna medium, and using the rewiring layer as the interconnection layer, which can reduce the interconnection scale and loss, and compress the interconnection space. .
  • plastic packaging material as the antenna medium has high dielectric loss, which affects the antenna gain.
  • the embodiments of the present application provide an antenna, an antenna packaging method, and a terminal.
  • Glass is used as the antenna medium, which has low dielectric loss and good antenna performance.
  • an embodiment of the present application provides an antenna, including a first glass substrate, a first antenna layer, a second antenna layer, a first encapsulation layer, a second encapsulation layer, and a first metal connecting post; wherein, the first glass substrate
  • the substrate includes a first surface and a second surface that are opposed to each other.
  • the first antenna layer is disposed on the first surface
  • the second antenna layer is disposed on the second surface
  • the first encapsulation layer covers the first surface and the first antenna layer
  • the second encapsulation The layer covers the second surface and the second antenna layer;
  • the first accommodating groove is provided in the first glass substrate, an insulator is provided in the first accommodating groove, the first metal connecting column is arranged in the insulator, and the first metal connecting column The two ends of are respectively connected to the first antenna layer and the second antenna layer.
  • the first glass substrate is used as the antenna medium, and the first glass substrate is made of glass. Compared with the plastic molding compound as the medium, the dielectric loss of the first glass substrate is lower and the antenna The high gain can effectively reduce the package volume.
  • the antenna metal layers on the upper and lower surfaces of the first glass substrate are connected by metal connection posts, and an insulator is filled between the metal connection posts and the glass, which can avoid direct contact between the metal connection posts and the glass, and can prevent the glass from cracking when the temperature changes.
  • the slot on the first glass substrate is decoupled from the design of the metal connecting column. The diameter of the metal connecting column and the position adjustment within a certain range do not require the cooperation of glass manufacturers, which can greatly shorten the development cycle of antenna design and repeat glass proofing the cost of.
  • the antenna further includes: a radio frequency chip electrically connected to the first antenna layer.
  • the RF chip is used to connect the antenna on the one hand, and connect to the external circuit board on the other hand.
  • the radio frequency chip is disposed on the surface of the first antenna layer away from the first glass substrate.
  • a second accommodating groove is provided in the first glass substrate, and the radio frequency chip is located in the second accommodating groove.
  • the radio frequency chip can be built into the glass substrate, reducing the overall volume of the antenna.
  • the antenna further includes a second metal connection post and a third encapsulation layer; the second metal connection post is arranged on the surface of the first antenna layer away from the first glass substrate, and the third encapsulation layer covers the radio frequency chip and the second metal Connecting the pillars, and the end of the second metal connecting pillar is exposed on the surface of the third packaging layer away from the first glass substrate.
  • the radio frequency chip is protected by the third encapsulation layer, and the radio frequency chip and the first antenna layer are connected to the outside through the second metal connecting column.
  • the antenna further includes solder ball bumps, the solder ball bumps are arranged on the surface of the third packaging layer away from the first glass substrate, and the solder ball bumps are connected to the second metal connecting pillars through the metal ball pads.
  • connection between the antenna and the circuit board can be realized by using the solder ball bumps.
  • the antenna further includes a blocking member, and the blocking member is arranged in the third encapsulation layer and is electrically connected to the first antenna layer.
  • Such a design can reduce electromagnetic interference by blocking the container.
  • a first rewiring layer is provided on the first antenna layer.
  • the interconnection of the metal layers of the multi-layer antenna can be realized, and the efficiency and performance of the antenna can be improved.
  • the antenna further includes a second glass substrate, a third antenna layer, and a fourth encapsulation layer; the second glass substrate is disposed on the surface of the second antenna layer away from the first glass substrate, and the third antenna layer It is arranged on the surface of the second glass substrate away from the first glass substrate, and the fourth encapsulation layer covers the surface of the second glass substrate away from the first glass substrate and the third antenna layer.
  • the double-layer thick glass is set as the antenna medium in the antenna, which can further reduce the dielectric loss and improve the gain performance of the antenna.
  • a second rewiring layer is provided on the second antenna layer.
  • the thickness of the second rewiring layer is 3 ⁇ m-10 ⁇ m.
  • Such a design can make the thickness of the second rewiring layer small, reduce the scale and loss of the antenna interconnection, compress the interconnection space, and expand the flexibility of antenna design.
  • the thickness of the first glass substrate and the second glass substrate is 150 ⁇ m-800 ⁇ m.
  • Such a design can ensure low dielectric loss of the glass substrate, reduce the thickness of the antenna, and reduce the packaging volume; on the other hand, it can ensure that the first glass substrate and the second glass substrate have high mechanical strength, and the risk of failure is low.
  • a conductive via is provided in the insulator, and the conductive via is connected to the first metal connecting post and the first antenna layer.
  • the electrical connection between the first metal connecting pillar and the first antenna layer is realized through the conductive via.
  • an embodiment of the present application provides an antenna packaging method, including the following steps:
  • a supporting base and a first glass substrate are provided, wherein a separation layer is provided on the supporting base, and a first containing groove is provided in the first glass substrate;
  • the antenna packaging method provided by the embodiments of the present application uses the first glass substrate as the antenna medium, and the first glass substrate is made of glass. Compared with the plastic packaging material as the medium, the first glass substrate has low dielectric loss and high antenna gain. , Can effectively reduce the package volume.
  • the antenna metal layers on the upper and lower surfaces of the first glass substrate are connected by metal connection posts, and an insulator is filled between the metal connection posts and the glass, which can prevent the metal connection posts from directly contacting the glass and prevent the glass from cracking when the temperature changes.
  • the slot on the first glass substrate is decoupled from the design of the metal connecting column. The diameter of the metal connecting column and the position adjustment within a certain range do not require the cooperation of glass manufacturers, which can greatly shorten the development cycle of antenna design and repeat glass. The cost of proofing.
  • the antenna packaging method further includes: bonding the radio frequency chip, the radio frequency chip and the first antenna layer on the surface of the first antenna layer away from the first glass substrate Electric connection.
  • the antenna packaging method further includes: on the surface of the first antenna layer away from the first glass substrate A second metal connecting pillar is formed; a third packaging layer covering the radio frequency chip is formed, and an end of the second metal connecting pillar away from the first glass substrate is exposed outside the third packaging layer.
  • the antenna packaging method further includes:
  • a third encapsulation layer covering the blocking container and the surface of the first antenna layer away from the first glass substrate is formed.
  • the antenna packaging method further includes: forming a metal ball pad on the third packaging layer, the metal ball pad and the second metal connecting post are electrically connected, and a solder ball bump is formed on the metal ball pad.
  • the antenna packaging method further includes: connecting a radio frequency chip on the first antenna layer; after the step of providing the first glass substrate, the antenna packaging method It also includes: opening a second accommodating groove on the first glass substrate; the step of bonding the first glass substrate to the separation layer includes: placing the radio frequency chip in the second accommodating groove, and filling the second accommodating groove with an insulating material Two accommodating grooves to form an insulator.
  • the antenna packaging method further includes: providing a second glass substrate; adhering the second glass substrate to the second packaging layer; forming on the surface of the second glass substrate away from the first glass substrate The third antenna layer, and a fourth encapsulation layer covering the third antenna layer is formed.
  • an embodiment of the present application provides an antenna packaging method, including the following steps: providing a first glass substrate and a second glass substrate; opening a first accommodating groove in the first glass substrate; forming on the second glass substrate The second antenna layer and the first metal connecting post located on the second antenna layer, and a second packaging layer covering the second antenna layer is formed; bonding the first glass substrate to the second glass substrate, the first metal connecting post Inserted in the first accommodating groove; filling the first accommodating groove with an insulating material to form an insulator; forming a first antenna layer on the surface of the first glass substrate away from the second glass substrate, and forming a covering layer The first encapsulation layer; a third antenna layer is formed on the surface of the second glass substrate away from the first glass substrate, and a fourth encapsulation layer covering the third antenna layer is formed.
  • the antenna packaging method further includes: forming a connection radio frequency chip on a surface of the first antenna layer away from the first glass substrate.
  • the antenna packaging method further includes: forming a second metal connecting post on the surface of the first antenna layer away from the first glass substrate; forming a surface that covers the radio frequency chip and the first antenna layer away from the first glass substrate.
  • the third encapsulation layer and the end of the second metal connecting pillar away from the first glass substrate is exposed outside the third encapsulation layer.
  • the antenna packaging method further includes: forming a metal ball pad on the third packaging layer, and the metal ball pad is electrically connected to the second metal connecting post; and forming a solder ball bump on the metal ball pad.
  • the antenna packaging method provided by the embodiments of the present application uses the first glass substrate and the second glass substrate as the antenna medium. Compared with the use of a plastic molding compound as the medium, the dielectric loss is low, the antenna gain is high, and the packaging volume can be effectively reduced.
  • the design of double-layer glass substrate and three-layer antenna metal layer can improve the gain and bandwidth of the antenna.
  • the antenna metal layers on the upper and lower surfaces of the first glass substrate are connected by the first metal connecting pillars, and an insulator is filled between the first metal connecting pillars and the first glass substrate to avoid direct contact between the first metal connecting pillars and the first glass substrate. , Can prevent the first glass substrate from cracking when the temperature changes.
  • the design of the first accommodating groove on the first glass substrate and the first metal connecting column is decoupled, and the diameter of the first metal connecting column and the position adjustment within a certain range do not require the cooperation of the glass manufacturer, which can greatly shorten the antenna design.
  • an embodiment of the present application provides a terminal, including: a circuit board and the above antenna, and the antenna is connected to the circuit board.
  • FIG. 1 is a schematic structural diagram of an antenna provided in Embodiment 1 of the present application.
  • FIG. 2 is a schematic diagram of the corresponding structure of forming a first antenna layer, a first metal connecting pillar, and a first encapsulation layer on the separation layer;
  • FIG. 3 is a schematic diagram of the structure corresponding to the opening of the first accommodating groove on the first glass substrate
  • FIG. 4 is a schematic diagram of a structure corresponding to bonding the first glass substrate and the separation layer and filling the insulator in the first containing groove;
  • FIG. 5 is a schematic diagram of a structure corresponding to the second antenna layer and the second encapsulation layer formed on the first glass substrate;
  • FIG. 6 is a schematic diagram of the corresponding structure of bonding a radio frequency chip on the first antenna layer after the separation layer is peeled off;
  • FIG. 7 is a schematic diagram of a structure corresponding to bonding a radio frequency chip on the first antenna layer and opening a second accommodating groove on the first glass substrate;
  • FIG. 8 is a schematic diagram of the structure corresponding to the built-in radio frequency chip in the first glass substrate
  • FIG. 9 is a schematic diagram showing the structure corresponding to the formation of the second metal connecting column and the connecting resistance container member
  • FIG. 10 is a schematic diagram of the structure of forming a third packaging layer and solder ball bumps
  • FIG. 11 is a schematic structural diagram of an antenna provided in Embodiment 2 of the present application.
  • FIG. 12 is a schematic diagram of the structure of forming a second antenna layer, a first metal connecting pillar and a second packaging layer on a second glass substrate;
  • FIG. 13 is a schematic structural diagram of a schematic diagram of a structure corresponding to a first glass substrate and a second glass substrate that are bonded together, filled with an insulator in the first accommodating groove, and slotted at the corresponding position of the first metal connecting column;
  • FIG. 14 is a schematic diagram of the corresponding structure of forming the first antenna layer, the first encapsulation layer, the third antenna layer, and the fourth encapsulation layer;
  • FIG. 15 is a schematic diagram of a structure corresponding to forming a second metal connecting pillar and bonding a radio frequency chip.
  • Fig. 1 is a structural schematic diagram 1 of the antenna provided in the first embodiment of the present application.
  • the antenna provided in the first embodiment of the present application includes a first glass substrate 11, a first antenna layer 12, a second antenna layer 13, and a second antenna layer.
  • the first glass substrate 11 is a plate-shaped structure made of glass, the first glass substrate 11 includes a first surface and a second surface that are opposed to each other, and the first surface is the lower surface of the first glass substrate 11 shown in FIG. 1 , The second surface is the upper surface of the first glass substrate 11 shown in FIG. 1.
  • the first glass substrate 11 has a thickness of 150 ⁇ m-800 ⁇ m, which can reduce the thickness of the medium compared to using a plastic molding compound as the antenna medium.
  • the first glass substrate 11 is used as the antenna medium, which can reduce the dielectric loss and improve the antenna performance compared with the use of a plastic molding compound as the antenna medium.
  • the glass substrate Compared with plastic packaging materials, the glass substrate has high mechanical strength, low warpage, low difficulty in packaging and subsequent board processing, and low failure risk.
  • the first antenna layer 12 is disposed on the first surface of the first glass substrate 11, and the second antenna layer 13 is disposed on the second surface of the first glass substrate 11.
  • Both the first antenna layer 12 and the second antenna layer 13 are metal wiring layers, and their materials may include one or a combination of two or more of copper, nickel, aluminum, gold, silver, and titanium.
  • the first antenna layer 12 and the second antenna layer 13 can be arranged in various patterns according to the performance requirements of the antenna.
  • both the first antenna layer 12 and the second antenna layer 13 may be provided with a rewiring layer, and the thickness of the rewiring layer is 3 ⁇ m-10 ⁇ m.
  • the re-wiring layer can realize high-density wiring, reduce the scale and loss of antenna interconnection, compress the interconnection space, and expand the flexibility of antenna design.
  • the first encapsulation layer 14 covers the first surface and the first antenna layer 12, and the second encapsulation layer 15 covers the second surface and the second antenna layer 13.
  • the first encapsulation layer 14 and the second encapsulation layer 15 may include one of epoxy resin, silica gel, and polyimide PI, which protect the first antenna layer 12 and the second antenna layer 13 respectively.
  • a first accommodating groove 111 is provided in the first glass substrate 11, and the first accommodating groove 111 is a through hole penetrating the thickness direction of the first glass substrate 11.
  • the first metal connecting column 16 is disposed in the first accommodating groove 111, and both ends of the first metal connecting column 16 are connected to the first antenna layer 12 and the second antenna layer 13 respectively; the material of the first metal connecting column 16 includes At least one of gold, silver, copper, and aluminum.
  • the material of the first metal connecting post is the same as the material of the first antenna layer 12 and the second antenna layer 13.
  • An insulator 112 made of an insulating material is provided in the first accommodating groove 111.
  • the insulator 112 is used to isolate the first metal connecting column 112 from the first glass substrate 11 to prevent the side surface of the first metal connecting column 112 from contacting the first glass substrate 11 , To prevent the heat generated by the first metal connecting pillar 112 from being directly transferred to the first glass substrate 11.
  • a hole can be directly opened in the set area of the glass substrate and a metal layer is plated in the hole as a metal connecting post to connect the two sides of the glass substrate.
  • the antenna layer due to the direct contact between the electroplated metal layer and the glass substrate, the opening positions are prone to quality risks such as glass cracking and metal residue.
  • the first accommodating groove 111 is opened on the first glass substrate, the insulator 112 is filled in the first accommodating groove 111, and the first metal connecting column 16 is arranged in the insulator 112, thereby avoiding the A metal connecting column 16 directly contacts the wall surface of the first accommodating groove 111, and the quality risks of glass cracking and metal residues are not prone to occur.
  • the process can be carried out directly by the packaging manufacturer, and there is no need to reorder glass raw materials when adjusting the antenna structure, thereby saving the production cycle.
  • the antenna shown in Figure 1 above can be manufactured by the following manufacturing methods:
  • a support substrate 26 is provided, and a separation layer 27 is provided on the support substrate 26.
  • the supporting base 26 includes one of a glass substrate, a metal substrate, a semiconductor substrate, a polymer substrate, and a ceramic substrate.
  • the use of a glass substrate as the supporting base 26 has the advantages of low cost, easy formation of a separation layer on the surface, and reduction of the difficulty of the subsequent peeling process.
  • the separation layer 27 includes one of an adhesive tape and a polymer layer. The polymer layer can be coated on the surface of the support substrate 26 by a spin coating process, and then cured and molded by an ultraviolet curing or thermal curing process.
  • the first antenna layer 12 is formed on the separation layer 27, and the first metal connecting pillar 16 is formed on the first antenna layer 12.
  • a metal layer can be formed on the separation layer 27 by using a chemical vapor deposition process, an evaporation process, a sputtering process, an electroplating process or an electroless plating process. The metal layer can be etched to form the patterned first antenna layer 12 and the second antenna layer.
  • the first encapsulation layer 14 covering the first antenna layer 12 is formed, and an end of the first metal connecting pillar 16 away from the separation layer 27 is exposed outside the first encapsulation layer 14.
  • the first encapsulation layer 14 can be formed by compression molding, transfer molding, liquid sealing, vacuum lamination, spin coating, and other processes.
  • a first glass substrate 11 is provided, and a first accommodating groove 111 is provided in the first glass substrate 11.
  • the position of the first accommodating groove 111 corresponds to the position of the first metal connecting pillar 16.
  • the thickness of the first glass substrate 11 is related to the antenna structure.
  • the first accommodating groove 111 may be a through hole directly opened on the first glass substrate 11, or a blind hole may be opened on the first glass substrate 11 first, and then the A glass substrate 11 is ground and thinned until the bottom of the blind hole is exposed to form a through hole.
  • the first accommodating groove 111 may be formed by etching or laser processing, and the diameter of the first accommodating groove 111 is larger than the diameter of the first metal connecting pillar 16.
  • the first glass substrate 11 is bonded to the separation layer 27, the first metal connecting column 16 is placed in the first accommodating groove 111, and the first accommodating groove 111 is filled with an insulating material.
  • the insulator 112 is formed.
  • the insulating material can be one of epoxy resin, silica gel, and polyimide PI. After the insulating material is filled in the first accommodating groove 111, it can isolate the first metal connecting column 16 and the first accommodating groove 111.
  • the inner wall surface prevents the first metal connecting column 16 from affecting the mechanical properties of the first glass substrate 11.
  • the first metal connecting pillar 16 may also be formed by opening holes in the insulator 112 and electroplating after forming the insulator 112.
  • the insulator 112 is an epoxy resin that is convenient for processing and opening holes. And other materials.
  • a second antenna layer 13 is formed on the surface of the first glass substrate 11 away from the supporting base 26, and a second encapsulation layer 15 covering the second antenna layer 13 is formed. It is electrically connected to the first metal connecting pillar 16.
  • a chemical vapor deposition process, an evaporation process, a sputtering process, an electroplating process or an electroless plating process can be used to form a metal layer on the surface of the first glass substrate 11, and the metal layer can be etched to form a patterned second Two antenna layer 13.
  • the second encapsulation layer 15 can be formed by compression molding, transfer molding, liquid sealing, vacuum lamination, spin coating, and other processes.
  • the first glass substrate 11 and the insulator 112 are ground and thinned, so that the end of the first metal connecting pillar 16 is exposed on the surface of the insulator 112, so that the second antenna layer 13 is exposed to the surface of the insulator 112.
  • the first metal connecting post 16 on the surface of the insulator 112 is directly connected.
  • multiple vias may also be provided on the insulator 112.
  • the vias are filled with metal materials to form conductive vias, and the second antenna layer 13 passes through the conductive vias. Connect with the first metal connecting pillar 16.
  • the separation layer 27 and the supporting substrate 26 are peeled off.
  • the separation layer 27 may be a light-to-heat conversion layer, which can be converted into heat by laser light, so that the separation layer 27 and the supporting substrate 26 are separated from the first antenna layer 12 to form an antenna as shown in FIG. 1.
  • the antenna provided in this embodiment can be connected to the circuit board by brushing solder paste, and can be connected to an external radio frequency chip through the circuit board to realize the antenna function.
  • FIG. 6 is a schematic diagram showing the structure of bonding the radio frequency chip on the first antenna layer after the separation layer is peeled off.
  • the antenna further includes a radio frequency chip 17 electrically connected to the first antenna layer 12, and the radio frequency chip 17 is disposed on a surface of the first antenna layer 12 away from the first glass substrate 11.
  • the radio frequency chip 17 is electrically connected to the first antenna layer 12 on the one hand, and is connected to the circuit board on the other hand.
  • the specific manufacturing method of the antenna structure provided in FIG. 6 is that after the step of peeling off the separation layer 27 and the supporting base 26, bonding the radio frequency chip 17, the radio frequency chip 17 and the surface of the first antenna layer 12 away from the first glass substrate 11
  • the first antenna layer 12 is electrically connected.
  • FIG. 7 is a schematic diagram of the structure corresponding to bonding a radio frequency chip on the first antenna layer and opening a second accommodating groove on the first glass substrate
  • FIG. 8 is a schematic diagram of the structure corresponding to embedding the radio frequency chip in the first glass substrate, refer to FIG. 7
  • a second accommodating groove 113 is provided in the first glass substrate 11, and the radio frequency chip 17 is located in the second accommodating groove 113.
  • the radio frequency chip 17 is built into the first glass substrate 11 to further reduce the overall thickness of the antenna structure.
  • the manufacturing method of embedding the radio frequency chip 17 in the first glass substrate 11 is as follows: on the basis of FIG. 2, after forming the first antenna layer 12 on the separation layer 27, the radio frequency chip is then connected to the first antenna layer 12 17; On the basis of Figure 3, after the step of providing the first glass substrate 11, a second accommodating groove 113 is opened on the first glass substrate 11; as shown in Figure 7, the first glass substrate 11 is bonded to When the separation layer 27 is on, the radio frequency chip 17 is placed in the second accommodating groove 113, and the second accommodating groove 113 is filled with an insulating material to form an insulator 112.
  • the antenna further includes a third encapsulation layer 19.
  • the third encapsulation layer 19 covers the radio frequency chip 17, and the third encapsulation layer 19 may include one of epoxy resin, silica gel, and polyimide PI to protect the radio frequency chip 17.
  • a second metal connection is provided on the first antenna layer 12. ⁇ 18 ⁇ Post 18.
  • the second metal connecting post 18 is disposed on the surface of the first antenna layer 12 away from the first glass substrate 11, and the material of the second metal connecting post 18 includes one of gold, silver, copper, and aluminum.
  • the end of the second metal connection post 18 is exposed outside the third encapsulation layer 19, or a conductive via may be provided on the third encapsulation layer 19 so that the second metal connection post 18 can communicate with the external circuit board.
  • the antenna further includes solder ball bumps 20.
  • the solder ball bumps 20 are arranged on the surface of the third packaging layer 19 away from the first glass substrate 11 and are soldered.
  • the ball bump 20 is connected to the second metal connecting pillar 18 through the metal ball pad 21.
  • the solder bump 20 includes one of tin solder, silver solder, and gold-tin alloy solder.
  • the antenna further includes a containment member 22 which is disposed in the third encapsulation layer 19 and is electrically connected to the first antenna layer 12.
  • the resistance container 22 can play a role in reducing interference. It should be noted that a filter circuit can be added between the first antenna layer 12 and the connection line of the radio frequency chip 17, and the filter circuit and the resistance container 22 together can reduce interference. , The role of improving antenna performance.
  • the method for forming the second metal connecting pillar 18, the blocking container 22, the third encapsulation layer 19, and the solder ball bumps 20 can be as follows: first, on the first antenna layer 12 A second metal connecting column 18 and a blocking container 22 are formed on the surface of the first glass substrate 11; then, a third encapsulation layer 19 covering the radio frequency chip 17, the second metal connecting column 18 and the blocking container 22 is formed.
  • the end of the two metal connecting pillars 18 away from the first glass substrate 11 is exposed outside the third packaging layer 19; then, a metal ball pad 21 is formed on the third packaging layer 19, and the metal ball pad 21 is electrically connected to the second metal connecting pillar 18 ; Finally, a solder ball bump 20 is formed on the metal ball pad 21.
  • the antenna provided in the first embodiment of the present application is provided with a first glass substrate as the antenna medium.
  • the first glass substrate made of glass has low dielectric loss and high antenna gain, which can effectively reduce the package volume.
  • the antenna metal layers on the upper and lower surfaces of the first glass substrate are connected by the first metal connecting pillars, and an insulator is filled between the first metal connecting pillars and the first glass substrate to avoid direct contact between the first metal connecting pillars and the first glass substrate. , Can prevent the first glass substrate from cracking when the temperature changes.
  • the slot on the first glass substrate is decoupled from the design of the first metal connecting column, and the adjustment of the diameter of the first metal connecting column and the position of the first accommodating groove in the first glass substrate does not require the cooperation of the glass manufacturer. It can greatly shorten the development cycle of antenna design and the cost of repeated glass substrate proofing.
  • FIG. 11 is a schematic structural diagram of the antenna provided in the second embodiment of the present application.
  • the antenna provided in the second embodiment of the present application includes: a first glass substrate 11, a first antenna layer 12, a second antenna layer 13, and a second antenna layer.
  • the first glass substrate 11 and the second glass substrate 23 are both plate-shaped structures made of glass, and the first glass substrate 11 includes a first surface and a second surface that are arranged oppositely, and the first surface is shown in FIG. 11
  • the lower surface of the first glass substrate 11 and the second surface are the upper surface of the first glass substrate 11 shown in FIG. 11.
  • the first glass substrate 11 and the second glass substrate 23 are used as the antenna medium and have a thickness of 150 ⁇ m-800 ⁇ m, which can reduce the thickness of the medium compared to using a plastic molding compound as the antenna medium.
  • the first glass substrate 11 and the second glass substrate 23 are used as the antenna medium.
  • the dielectric loss can be reduced and the antenna performance can be improved.
  • the glass substrate has high mechanical strength, low warpage, low difficulty in packaging and subsequent board processing, and low failure risk.
  • the first antenna layer 12 is disposed on the first surface of the first glass substrate 11, the second antenna layer 13 is disposed on the second surface of the first glass substrate 11, and the third antenna layer 24 is disposed on the second glass substrate 23 away from the first surface.
  • the first antenna layer 12, the second antenna layer 13 and the third antenna layer 24 are all metal wiring layers, and their materials may include one or a combination of two or more of copper, nickel, aluminum, gold, silver, and titanium, and It can be set into various patterns according to the performance requirements of the antenna.
  • the first antenna layer 12, the second antenna layer 13 and the third antenna layer 24 may all be provided with a rewiring layer, and the thickness of the rewiring layer is 3 ⁇ m-10 ⁇ m.
  • the rewiring layer can realize high-density wiring, reduce the scale and loss of antenna interconnection, compress the interconnection space, and expand the flexibility of antenna design.
  • the first encapsulation layer 14 covers the first surface and the first antenna layer 12, the second encapsulation layer 15 covers the second surface and the second antenna layer 13, and the fourth encapsulation layer 25 covers the second glass substrate 23 away from the first glass.
  • the first encapsulation layer 14, the second encapsulation layer 15 and the fourth encapsulation layer 25 may all include one of epoxy resin, silicone rubber, and polyimide PI to protect the first antenna layer 12 and the second antenna layer, respectively. 13 and the role of the third antenna layer 24.
  • a first accommodating groove 111 is provided in the first glass substrate 11, an insulator 112 is provided in the first accommodating groove 111, the first metal connecting column 16 is provided in the insulator 112, and two ends of the first metal connecting column 16 are respectively It is connected to the first antenna layer 12 and the second antenna layer 13.
  • the material of the first metal connecting column 16 includes one of gold, silver, copper, and aluminum, and is arranged in the first accommodating groove 111. Both ends of the first metal connecting column 16 are connected to the first antenna layer 12 and the first antenna layer 12 and the second antenna layer. The two antenna layers 13 are connected.
  • the first accommodating groove 111 is a through hole penetrating the thickness direction of the first glass substrate 11, and an insulator 112 made of insulating material is provided in the first accommodating groove 111.
  • the insulator 112 is used to isolate the first metal connecting pillar 112 from the first metal connecting pillar 112.
  • the glass substrate 11 prevents the side surface of the first metal connecting column 112 from contacting the first glass substrate 11, and prevents the first metal connecting column 112 from affecting the mechanical properties of the first glass substrate 11.
  • the radio frequency chip 17 is disposed on the surface of the first antenna layer 12 away from the first glass substrate 11 and is electrically connected to the first antenna layer 12.
  • the radio frequency chip 17 is electrically connected to the first antenna layer 12 on the one hand, and is connected to the circuit board on the other hand.
  • the second metal connecting pillar 18 is disposed on the surface of the first antenna layer 12 away from the first glass substrate 11, the third packaging layer 19 covers the radio frequency chip 17 and the second metal connecting pillar 18, and the third packaging layer 19 is far away The end of the second metal connection pillar 18 is exposed on the surface of the first glass substrate 11.
  • solder ball bumps 20 are disposed on the surface of the third packaging layer 19 away from the first glass substrate 11, and the solder ball bumps 20 are connected to the second metal connecting pillars 18 through the metal ball pads 21.
  • the antenna structure provided in FIG. 11 may be manufactured by the following manufacturing method:
  • a second glass substrate 23 is provided; the second glass substrate 23 is bonded to the second encapsulation layer 15; the second glass substrate 23 is far away from the first glass substrate 11
  • a third antenna layer 24 is formed on the surface, and a fourth encapsulation layer 25 covering the third antenna layer 24 is formed.
  • the antenna structure provided in FIG. 11 can be manufactured using the following steps:
  • the first glass substrate 11 and the second glass substrate 23 are provided.
  • a second antenna layer 13 and a first metal connecting post 16 located on the second antenna layer 13 can be formed on the second glass substrate 23, and a second antenna layer 13 covering the second antenna layer 13 can be formed.
  • Encapsulation layer 15. a chemical vapor deposition process, an evaporation process, a sputtering process, an electroplating process or an electroless plating process can be used to form a metal layer on the second glass substrate 23, and the metal layer can be etched to form a patterned second antenna
  • the second encapsulation layer 15 can be formed by compression molding, transfer molding, liquid sealing, vacuum lamination, spin coating, and other processes.
  • a first accommodating groove 111 may be opened in the first glass substrate 11, wherein the position of the first accommodating groove 111 corresponds to the position of the first metal connecting pillar 16.
  • the first accommodating groove 111 may be a through hole directly opened on the first glass substrate 11, or a blind hole may be opened on the first glass substrate 11 first, and then the first glass substrate 11 may be ground and thinned until the blind hole is exposed At the bottom, a through hole is formed.
  • the first glass substrate 11 can be bonded to the second glass substrate 23, the first metal connecting column 16 is inserted into the first accommodating groove 111; and the insulating material is used to fill the first accommodating groove 111.
  • a accommodating groove 111 is formed to form an insulator 112.
  • the insulating material may be one of epoxy resin, silica gel, and polyimide PI. After the insulating material is filled in the first accommodating groove 111, it can isolate the first metal connecting column 16 and the inside of the first accommodating groove 111. The wall surface prevents the first metal connecting pillar 16 from affecting the mechanical properties of the first glass substrate 11.
  • the first metal connecting pillar 16 may also be formed by opening holes in the insulator 112 and electroplating after forming the insulator 112.
  • the insulator 112 is an epoxy resin that is convenient for processing and opening holes. And other materials.
  • the first antenna layer 12 may be formed on the surface of the first glass substrate 11 away from the second glass substrate 23, and the first encapsulation layer 14 covering the first antenna layer 12 may be formed;
  • a third antenna layer 24 is formed on the surface of the two glass substrates 23 away from the first glass substrate 11, and a fourth encapsulation layer 25 covering the third antenna layer 24 is formed.
  • a chemical vapor deposition process, an evaporation process, a sputtering process, an electroplating process or an electroless plating process can be used to form a metal layer on the surface of the first glass substrate 11, and the metal layer can be etched to form a patterned second One antenna layer 12.
  • the third antenna layer 24 may be formed on the surface of the second glass substrate 23.
  • Both the first encapsulation layer 14 and the fourth encapsulation layer 25 can be formed by compression molding, transfer molding, liquid sealing, vacuum lamination, spin coating, etc., to protect the first antenna layer 12 and the third antenna, respectively The role of layer 24.
  • the first glass substrate 11 and the insulator 112 can be ground and thinned, so that the end of the first metal connection post 16 is exposed.
  • the surface of the insulator 112 is directly connected to the second antenna layer 13 and the first metal connecting post 16 exposed on the surface of the insulator 112.
  • multiple vias may be provided on the insulator 112.
  • the vias are filled with a metal material to form a conductive via 114, and the second antenna layer 13 passes through the conductive via 114. Connect with the first metal connecting pillar 16. Referring to FIG.
  • a connecting radio frequency chip 17 may be formed on the surface of the first antenna layer 12 away from the first glass substrate 11, and formed on the surface of the first antenna layer 12 away from the first glass substrate 11.
  • the second metal connecting column 18 forms a third encapsulation layer 19 covering the radio frequency chip 17 and the surface of the first antenna layer 12 away from the first glass substrate 11, and the end of the second metal connecting column 18 away from the first glass substrate 11 is exposed Outside the third encapsulation layer 19.
  • the third encapsulation layer 19 may include one of epoxy resin, silica gel, and polyimide PI, which plays a role of protecting the radio frequency chip 17.
  • a second metal connecting post 18 is provided on the first antenna layer 12.
  • the material of the second metal connecting pillar 18 includes one of gold, silver, copper, and aluminum.
  • the end of the second metal connection post 18 is exposed outside the third encapsulation layer 19, or a conductive via may be provided on the third encapsulation layer 19 so that the second metal connection post 18 can communicate with the external circuit board.
  • a metal ball pad 21 may be formed on the third packaging layer 19, and the metal ball pad 21 and the second metal connecting pillar 18 may be electrically connected; and a solder ball bump 20 may be formed on the metal ball pad 21.
  • the antenna provided in the second embodiment of the present application is provided with the first glass substrate and the second glass substrate as the antenna medium.
  • the antenna has low dielectric loss and high antenna gain, which can effectively reduce the package volume.
  • An insulator is filled between the first metal connecting column and the first glass substrate, which can prevent the first metal connecting column from directly contacting the first glass substrate, and can prevent the first glass substrate from cracking when the temperature changes.
  • the slot on the first glass substrate is decoupled from the design of the first metal connecting column, and the adjustment of the diameter of the first metal connecting column and the position of the first accommodating groove in the first glass substrate does not require the cooperation of the glass manufacturer. It can greatly shorten the development cycle of antenna design and the cost of repeated glass substrate proofing.
  • the third embodiment of the present application provides a terminal, which includes a circuit board and the antenna provided in the first or second embodiment above, and the antenna is connected to the circuit board.
  • the terminal devices involved in the third embodiment of the present application may include electronic devices such as mobile phones, watches, tablet computers, personal digital assistants (PDAs), point of sales (POS), and in-vehicle computers.
  • the terminal provided in the third embodiment of the present application includes the antenna provided in the above-mentioned embodiment 1 or the second embodiment, and therefore also has the advantages described in the above-mentioned embodiment 1 or the second embodiment.
  • the antenna provided in the above-mentioned embodiment 1 or the second embodiment includes the antenna provided in the above-mentioned embodiment 1 or the second embodiment, and therefore also has the advantages described in the above-mentioned embodiment 1 or the second embodiment.

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Abstract

The present application provides an antenna, antenna encapsulating method and a terminal. The antenna includes: a first glass substrate, a first antenna layer, a second antenna layer, a first encapsulation layer, a second encapsulation layer, and a first metal connecting pillar; the first glass substrate includes a first surface and a second surface that are opposed to each other, the first antenna layer is provided on the first surface, the second antenna layer is provided on the second surface, the first encapsulation layer covers the first surface and the first antenna layer, the second encapsulation layer covers the second surface and the second antenna layer; a first accommodating groove is provided in the first glass substrate, an insulator is provided in the first accommodating groove, the first metal connecting pillar is provided in the insulator, and the two ends of the first metal connecting pillar are respectively connected with the first antenna layer and the second antenna layer. In the antenna, antenna encapsulating method, and terminal provided in the present application, glass is used as the antenna medium, which has low dielectric loss and good antenna performance.

Description

天线、天线封装方法及终端Antenna, antenna packaging method and terminal
本申请要求于2019年10月22日提交中国专利局、申请号为201911007437.7、申请名称为“天线、天线封装方法及终端”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。This application claims the priority of the Chinese patent application filed with the Chinese Patent Office on October 22, 2019, the application number is 201911007437.7, and the application name is "antenna, antenna packaging method and terminal", the entire content of which is incorporated into this application by reference .
技术领域Technical field
本申请涉及封装领域及通讯设备技术领域,尤其涉及一种天线、天线封装方法及终端。This application relates to the field of packaging and the technical field of communication equipment, and in particular to an antenna, an antenna packaging method, and a terminal.
背景技术Background technique
随着5G和虚拟现实等高速率通信时代的来临,毫米波天线的应用和设计越来越多。由于毫米波频段的波长极小,对加工误差的敏感度非常高,因此要用到高精密度的工艺来制作毫米波天线,例如封装内置天线(Antenna in package,简称AIP)。With the advent of the era of high-speed communications such as 5G and virtual reality, there are more and more applications and designs of millimeter wave antennas. Since the wavelength of the millimeter wave frequency band is extremely small and the sensitivity to processing errors is very high, a high-precision process is required to manufacture the millimeter wave antenna, such as an antenna in package (AIP).
封装内置天线包括天线和射频芯片,天线包括上层天线层、下层参考地层以及连接上层天线层的馈线,馈线和射频芯片相连,射频芯片还有其它端口和模板相连。此外,上述封装内置天线中,一般采用晶圆级封装技术来设计封装内置天线,利用厚封塑料作为天线介质,利用重新布线层作为互连层,可缩小互连尺度和损耗,压缩互连空间。The packaged built-in antenna includes an antenna and a radio frequency chip. The antenna includes an upper antenna layer, a lower reference ground layer, and a feeder connecting the upper antenna layer. The feeder is connected to the radio frequency chip, and the radio frequency chip has other ports and modules connected to it. In addition, among the above-mentioned packaged built-in antennas, wafer-level packaging technology is generally used to design packaged built-in antennas, using thick encapsulating plastic as the antenna medium, and using the rewiring layer as the interconnection layer, which can reduce the interconnection scale and loss, and compress the interconnection space. .
但是,采用塑封料作为天线介质,介电损耗高,影响天线增益。However, the use of plastic packaging material as the antenna medium has high dielectric loss, which affects the antenna gain.
发明内容Summary of the invention
本申请实施例提供一种天线、天线封装方法及终端,采用玻璃作为天线介质,介电损耗低、天线性能佳。The embodiments of the present application provide an antenna, an antenna packaging method, and a terminal. Glass is used as the antenna medium, which has low dielectric loss and good antenna performance.
第一方面,本申请实施例提供一种天线,包括第一玻璃基板、第一天线层、第二天线层、第一封装层、第二封装层和第一金属连接柱;其中,第一玻璃基板包括相对设置的第一表面和第二表面,第一天线层设置于第一表面,第二天线层设置于第二表面,第一封装层覆盖第一表面和第一天线层,第二封装层覆盖第二表面和第二天线层;第一玻璃基板中设置有第一容置槽,第一容置槽内设置有绝缘体,第一金属连接柱设置于绝缘体中,且第一金属连接柱的两端分别与第一天线层和第二天线层连接。In a first aspect, an embodiment of the present application provides an antenna, including a first glass substrate, a first antenna layer, a second antenna layer, a first encapsulation layer, a second encapsulation layer, and a first metal connecting post; wherein, the first glass substrate The substrate includes a first surface and a second surface that are opposed to each other. The first antenna layer is disposed on the first surface, the second antenna layer is disposed on the second surface, the first encapsulation layer covers the first surface and the first antenna layer, and the second encapsulation The layer covers the second surface and the second antenna layer; the first accommodating groove is provided in the first glass substrate, an insulator is provided in the first accommodating groove, the first metal connecting column is arranged in the insulator, and the first metal connecting column The two ends of are respectively connected to the first antenna layer and the second antenna layer.
在本申请的第一方面中,采用第一玻璃基板作为天线介质,而第一玻璃基板是由玻璃制成的,相比于采用塑封料作为介质,第一玻璃基板的介电损耗低、天线增益高,可有效缩小封装体积。此外,第一玻璃基板的上下表面的天线金属层通过金属连接柱连接,金属连接柱和玻璃之间填充有绝缘体,可避免金属连接柱与玻璃直接接触,可防止玻璃在温度变化时开裂。此外,第一玻璃基板上的开槽和金属连接柱的设计解耦,金属连接柱的直径和一定范围内的位置调整不需要玻璃厂商的配合,可大大缩短天线设计的开发周期和重复玻璃打样的成本。In the first aspect of the present application, the first glass substrate is used as the antenna medium, and the first glass substrate is made of glass. Compared with the plastic molding compound as the medium, the dielectric loss of the first glass substrate is lower and the antenna The high gain can effectively reduce the package volume. In addition, the antenna metal layers on the upper and lower surfaces of the first glass substrate are connected by metal connection posts, and an insulator is filled between the metal connection posts and the glass, which can avoid direct contact between the metal connection posts and the glass, and can prevent the glass from cracking when the temperature changes. In addition, the slot on the first glass substrate is decoupled from the design of the metal connecting column. The diameter of the metal connecting column and the position adjustment within a certain range do not require the cooperation of glass manufacturers, which can greatly shorten the development cycle of antenna design and repeat glass proofing the cost of.
上述实施例中,天线还包括:与第一天线层电连接的射频芯片。射频芯片一方面用于连接天线,另一方面用于连接外部电路板。In the above embodiment, the antenna further includes: a radio frequency chip electrically connected to the first antenna layer. The RF chip is used to connect the antenna on the one hand, and connect to the external circuit board on the other hand.
在一种可能的实施方式中,射频芯片设置于第一天线层的远离第一玻璃基板的表面。In a possible implementation, the radio frequency chip is disposed on the surface of the first antenna layer away from the first glass substrate.
在另一种可能的实施方式中,第一玻璃基板内设置有第二容置槽,射频芯片位于第二容置槽内。In another possible implementation manner, a second accommodating groove is provided in the first glass substrate, and the radio frequency chip is located in the second accommodating groove.
采用该设计,可将射频芯片内置与玻璃基板中,减小天线整体的体积。With this design, the radio frequency chip can be built into the glass substrate, reducing the overall volume of the antenna.
上述实施例中,天线还包括第二金属连接柱和第三封装层;第二金属连接柱设置于第一天线层的远离第一玻璃基板的表面,第三封装层覆盖射频芯片和第二金属连接柱,且第三封装层的远离第一玻璃基板的表面上暴露出第二金属连接柱的端部。In the above embodiment, the antenna further includes a second metal connection post and a third encapsulation layer; the second metal connection post is arranged on the surface of the first antenna layer away from the first glass substrate, and the third encapsulation layer covers the radio frequency chip and the second metal Connecting the pillars, and the end of the second metal connecting pillar is exposed on the surface of the third packaging layer away from the first glass substrate.
如此设计,通过第三封装层来保护射频芯片,通过第二金属连接柱将射频芯片、第一天线层与外部连通。In this design, the radio frequency chip is protected by the third encapsulation layer, and the radio frequency chip and the first antenna layer are connected to the outside through the second metal connecting column.
上述实施例中,天线还包括焊球凸块,焊球凸块设置在第三封装层的远离第一玻璃基板的表面,且焊球凸块通过金属球垫和第二金属连接柱连接。In the above embodiment, the antenna further includes solder ball bumps, the solder ball bumps are arranged on the surface of the third packaging layer away from the first glass substrate, and the solder ball bumps are connected to the second metal connecting pillars through the metal ball pads.
如此设计,利用焊球凸块可实现天线和电路板的连接。With such a design, the connection between the antenna and the circuit board can be realized by using the solder ball bumps.
上述实施例中,天线还包括阻容器件,阻容器件设置在第三封装层内,并与第一天线层电连接。In the above-mentioned embodiment, the antenna further includes a blocking member, and the blocking member is arranged in the third encapsulation layer and is electrically connected to the first antenna layer.
如此设计,通过阻容器件可起到降低电磁干扰的作用。Such a design can reduce electromagnetic interference by blocking the container.
在一种可能的实施方式中,第一天线层上设置有第一重新布线层。通过在第一天线层上设置第一重新布线层,可以实现多层天线金属层的互连,可提高天线的效率及性能。In a possible implementation manner, a first rewiring layer is provided on the first antenna layer. By arranging the first rewiring layer on the first antenna layer, the interconnection of the metal layers of the multi-layer antenna can be realized, and the efficiency and performance of the antenna can be improved.
在一种可能的实施方式中,天线还包括第二玻璃基板、第三天线层和第四封装层;第二玻璃基板设置于第二天线层远离第一玻璃基板的表面上,第三天线层设置于第二玻璃基板的远离第一玻璃基板的表面上,第四封装层覆盖第二玻璃基板的远离第一玻璃基板的表面及第三天线层。In a possible implementation, the antenna further includes a second glass substrate, a third antenna layer, and a fourth encapsulation layer; the second glass substrate is disposed on the surface of the second antenna layer away from the first glass substrate, and the third antenna layer It is arranged on the surface of the second glass substrate away from the first glass substrate, and the fourth encapsulation layer covers the surface of the second glass substrate away from the first glass substrate and the third antenna layer.
如此设计,天线中设置双层厚玻璃作为天线介质,可进一步降低介电损耗,提高天线的增益性能。In this design, the double-layer thick glass is set as the antenna medium in the antenna, which can further reduce the dielectric loss and improve the gain performance of the antenna.
在一种可能的实施方式中,第二天线层上设置有第二重新布线层。通过在第二天线层上设置第二重新布线层,能够实现多层天线金属层的互连,可提高天线的效率及性能。In a possible implementation manner, a second rewiring layer is provided on the second antenna layer. By arranging the second rewiring layer on the second antenna layer, the interconnection of the metal layers of the multi-layer antenna can be realized, and the efficiency and performance of the antenna can be improved.
在一种可能的实施方式中,第二重新布线层的厚度为3μm-10μm。如此设计,可以使第二重新布线层的厚度小,减小天线互连的尺度和损耗,压缩互连空间,扩大天线设计的灵活性。In a possible implementation, the thickness of the second rewiring layer is 3 μm-10 μm. Such a design can make the thickness of the second rewiring layer small, reduce the scale and loss of the antenna interconnection, compress the interconnection space, and expand the flexibility of antenna design.
在一种可能的实施方式中,第一玻璃基板和第二玻璃基板的厚度为150μm-800μm。如此设计,一方面可以保证玻璃基板的介电损耗低,同时降低天线厚度,缩小封装体积;另一方面可以确保第一玻璃基板和第二玻璃基板具有较高的机械强度,失效风险低。In a possible embodiment, the thickness of the first glass substrate and the second glass substrate is 150 μm-800 μm. Such a design can ensure low dielectric loss of the glass substrate, reduce the thickness of the antenna, and reduce the packaging volume; on the other hand, it can ensure that the first glass substrate and the second glass substrate have high mechanical strength, and the risk of failure is low.
在一种可能的实施方式中,绝缘体内设置有导电过孔,导电过孔与第一金属连接柱和第一天线层连接。如此设计,通过导电过孔实现第一金属连接柱和第一天线层之间的电性连接。In a possible implementation manner, a conductive via is provided in the insulator, and the conductive via is connected to the first metal connecting post and the first antenna layer. With such a design, the electrical connection between the first metal connecting pillar and the first antenna layer is realized through the conductive via.
第二方面,本申请实施例提供一种天线封装方法,包括以下步骤:In a second aspect, an embodiment of the present application provides an antenna packaging method, including the following steps:
提供支撑基底和第一玻璃基板,其中,支撑基底上设置有分离层,第一玻璃基板中设置有第一容置槽;A supporting base and a first glass substrate are provided, wherein a separation layer is provided on the supporting base, and a first containing groove is provided in the first glass substrate;
在分离层上形成第一天线层,并在第一天线层上形成第一金属连接柱;Forming a first antenna layer on the separation layer, and forming a first metal connecting pillar on the first antenna layer;
形成覆盖第一天线层的第一封装层,第一金属连接柱远离分离层的一端暴露在第一封装层外;Forming a first encapsulation layer covering the first antenna layer, and one end of the first metal connecting pillar away from the separation layer is exposed outside the first encapsulation layer;
将第一玻璃基板粘接在分离层上,第一金属连接柱放置于第一容置槽内,并使用绝缘材料填充第一容置槽以形成绝缘体;Bonding the first glass substrate to the separation layer, placing the first metal connecting column in the first accommodating groove, and filling the first accommodating groove with an insulating material to form an insulator;
在第一玻璃基板的远离支撑基底的表面上形成第二天线层,以及形成覆盖第二天线层的第二封装层,第二天线层和第一金属连接柱电连接;Forming a second antenna layer on the surface of the first glass substrate away from the support base, and forming a second encapsulation layer covering the second antenna layer, the second antenna layer and the first metal connecting post are electrically connected;
剥离分离层和支撑基底。Peel off the separation layer and the supporting substrate.
本申请实施例提供的天线封装方法,采用第一玻璃基板作为天线介质,第一玻璃基板由玻璃制成,相比于采用塑封料作为介质,第一玻璃基板的介电损耗低、天线增益高,可有效缩小封装体积。此外,第一玻璃基板上下表面的天线金属层通过金属连接柱连接,金属连接柱和玻璃之间填充有绝缘体,可避免金属连接柱与玻璃直接接触,可防止玻璃在温度变化时开裂。再者,第一玻璃基板上的开槽和金属连接柱的设计解耦,金属连接柱的直径和一定范围内的位置调整不需要玻璃厂商的配合,可大大缩短天线设计的开发周期和重复玻璃打样的成本。The antenna packaging method provided by the embodiments of the present application uses the first glass substrate as the antenna medium, and the first glass substrate is made of glass. Compared with the plastic packaging material as the medium, the first glass substrate has low dielectric loss and high antenna gain. , Can effectively reduce the package volume. In addition, the antenna metal layers on the upper and lower surfaces of the first glass substrate are connected by metal connection posts, and an insulator is filled between the metal connection posts and the glass, which can prevent the metal connection posts from directly contacting the glass and prevent the glass from cracking when the temperature changes. Furthermore, the slot on the first glass substrate is decoupled from the design of the metal connecting column. The diameter of the metal connecting column and the position adjustment within a certain range do not require the cooperation of glass manufacturers, which can greatly shorten the development cycle of antenna design and repeat glass. The cost of proofing.
在一种可能的实施方式中,剥离分离层和支撑基底的步骤之后,天线封装方法还包括:在第一天线层的远离第一玻璃基板的表面上接合射频芯片,射频芯片和第一天线层电连接。In a possible embodiment, after the step of peeling off the separation layer and the supporting substrate, the antenna packaging method further includes: bonding the radio frequency chip, the radio frequency chip and the first antenna layer on the surface of the first antenna layer away from the first glass substrate Electric connection.
在一种可能的实施方式中,在第一天线层的远离第一玻璃基板的表面上接合射频芯片的步骤之后,天线封装方法还包括:在第一天线层的远离第一玻璃基板的表面上形成第二金属连接柱;形成覆盖射频芯片的第三封装层,第二金属连接柱远离第一玻璃基板的一端暴露在第三封装层外。In a possible implementation manner, after the step of bonding the radio frequency chip on the surface of the first antenna layer away from the first glass substrate, the antenna packaging method further includes: on the surface of the first antenna layer away from the first glass substrate A second metal connecting pillar is formed; a third packaging layer covering the radio frequency chip is formed, and an end of the second metal connecting pillar away from the first glass substrate is exposed outside the third packaging layer.
在一种可能的实施方式中,在第一天线层的远离第一玻璃基板的表面上接合射频芯片的步骤之后,天线封装方法还包括:In a possible implementation, after the step of bonding the radio frequency chip on the surface of the first antenna layer away from the first glass substrate, the antenna packaging method further includes:
在第一天线层的远离第一玻璃基板的表面上形成或贴装阻容器件;Forming or attaching a blocking container on the surface of the first antenna layer away from the first glass substrate;
形成覆盖阻容器件以及第一天线层的远离第一玻璃基板的表面的第三封装层。A third encapsulation layer covering the blocking container and the surface of the first antenna layer away from the first glass substrate is formed.
在一种可能的实施方式中,天线封装方法还包括:在第三封装层上形成金属球垫,金属球垫和第二金属连接柱电连接,在金属球垫上形成焊球凸块。In a possible implementation manner, the antenna packaging method further includes: forming a metal ball pad on the third packaging layer, the metal ball pad and the second metal connecting post are electrically connected, and a solder ball bump is formed on the metal ball pad.
在另一种可能的实施方式中,在分离层上形成第一天线层后,天线封装方法还包括:在第一天线层上连接射频芯片;在提供第一玻璃基板的步骤之后,天线封装方法还包括:在第一玻璃基板上开设第二容置槽;在将第一玻璃基板粘接在分离层上的步骤包括:将射频芯片放置于第二容置槽内,并使用绝缘材料填充第二容置槽以形成绝缘体。In another possible embodiment, after the first antenna layer is formed on the separation layer, the antenna packaging method further includes: connecting a radio frequency chip on the first antenna layer; after the step of providing the first glass substrate, the antenna packaging method It also includes: opening a second accommodating groove on the first glass substrate; the step of bonding the first glass substrate to the separation layer includes: placing the radio frequency chip in the second accommodating groove, and filling the second accommodating groove with an insulating material Two accommodating grooves to form an insulator.
在一种可能的实施方式中,天线封装方法还包括:提供第二玻璃基板;将第二玻璃基板粘接在第二封装层上;在第二玻璃基板的远离第一玻璃基板的表面上形成第三天线层,以及形成覆盖第三天线层的第四封装层。In a possible implementation, the antenna packaging method further includes: providing a second glass substrate; adhering the second glass substrate to the second packaging layer; forming on the surface of the second glass substrate away from the first glass substrate The third antenna layer, and a fourth encapsulation layer covering the third antenna layer is formed.
第三方面,本申请实施例提供一种天线封装方法,包括以下步骤:提供第一玻璃基板和第二玻璃基板;在第一玻璃基板中开设第一容置槽;在第二玻璃基板上形成第二天线层和位于第二天线层上的第一金属连接柱,以及形成覆盖第二天线层的第二封装层;将第一玻璃基板粘接在第二玻璃基板上,第一金属连接柱插装在第一容置槽内;使用绝缘材料填充第一容置槽以形成绝缘体;在第一玻璃基板的远离第二玻璃基板的表面上形成第一天线层,以及形成覆盖第一天线层的第一封装层;在第二玻璃基板的远离第一玻璃基板的表面上形成第三天线层,以及形成覆盖第三天线层的第四封装层。In a third aspect, an embodiment of the present application provides an antenna packaging method, including the following steps: providing a first glass substrate and a second glass substrate; opening a first accommodating groove in the first glass substrate; forming on the second glass substrate The second antenna layer and the first metal connecting post located on the second antenna layer, and a second packaging layer covering the second antenna layer is formed; bonding the first glass substrate to the second glass substrate, the first metal connecting post Inserted in the first accommodating groove; filling the first accommodating groove with an insulating material to form an insulator; forming a first antenna layer on the surface of the first glass substrate away from the second glass substrate, and forming a covering layer The first encapsulation layer; a third antenna layer is formed on the surface of the second glass substrate away from the first glass substrate, and a fourth encapsulation layer covering the third antenna layer is formed.
上述实施例中,天线封装方法还包括:在第一天线层的远离第一玻璃基板的表面上形 成连接射频芯片。In the foregoing embodiment, the antenna packaging method further includes: forming a connection radio frequency chip on a surface of the first antenna layer away from the first glass substrate.
上述实施例中,天线封装方法还包括:在第一天线层的远离第一玻璃基板的表面上形成第二金属连接柱;形成覆盖射频芯片和第一天线层的远离第一玻璃基板的表面的第三封装层,第二金属连接柱远离第一玻璃基板的的一端暴露在第三封装层外。In the above embodiment, the antenna packaging method further includes: forming a second metal connecting post on the surface of the first antenna layer away from the first glass substrate; forming a surface that covers the radio frequency chip and the first antenna layer away from the first glass substrate. The third encapsulation layer and the end of the second metal connecting pillar away from the first glass substrate is exposed outside the third encapsulation layer.
上述实施例中,天线封装方法还包括:在第三封装层上形成金属球垫,金属球垫和第二金属连接柱电连接;在金属球垫上形成焊球凸块。In the above embodiment, the antenna packaging method further includes: forming a metal ball pad on the third packaging layer, and the metal ball pad is electrically connected to the second metal connecting post; and forming a solder ball bump on the metal ball pad.
本申请实施例提供的天线封装方法,设置第一玻璃基板和第二玻璃基板作为天线介质,相比于采用塑封料作为介质,介电损耗低、天线增益高,可有效缩小封装体积。双层玻璃基板和三层天线金属层的设计,可提高天线的增益和带宽。且第一玻璃基板的上下表面的天线金属层通过第一金属连接柱连接,第一金属连接柱和第一玻璃基板之间填充有绝缘体,可避免第一金属连接柱与第一玻璃基板直接接触,可防止第一玻璃基板在温度变化时开裂。此外,第一玻璃基板上的第一容置槽和第一金属连接柱的设计解耦,第一金属连接柱的直径和一定范围内的位置调整不需要玻璃厂商的配合,可大大缩短天线设计的开发周期和重复玻璃打样的成本。The antenna packaging method provided by the embodiments of the present application uses the first glass substrate and the second glass substrate as the antenna medium. Compared with the use of a plastic molding compound as the medium, the dielectric loss is low, the antenna gain is high, and the packaging volume can be effectively reduced. The design of double-layer glass substrate and three-layer antenna metal layer can improve the gain and bandwidth of the antenna. In addition, the antenna metal layers on the upper and lower surfaces of the first glass substrate are connected by the first metal connecting pillars, and an insulator is filled between the first metal connecting pillars and the first glass substrate to avoid direct contact between the first metal connecting pillars and the first glass substrate. , Can prevent the first glass substrate from cracking when the temperature changes. In addition, the design of the first accommodating groove on the first glass substrate and the first metal connecting column is decoupled, and the diameter of the first metal connecting column and the position adjustment within a certain range do not require the cooperation of the glass manufacturer, which can greatly shorten the antenna design. The development cycle and the cost of repeated glass proofing.
第四方面,本申请实施例提供一种终端,包括:电路板以及如上的天线,天线与电路板连接。In a fourth aspect, an embodiment of the present application provides a terminal, including: a circuit board and the above antenna, and the antenna is connected to the circuit board.
附图说明Description of the drawings
图1是本申请实施例一提供的天线的结构示意图;FIG. 1 is a schematic structural diagram of an antenna provided in Embodiment 1 of the present application;
图2是在分离层上形成第一天线层、第一金属连接柱和第一封装层对应的结构示意图;FIG. 2 is a schematic diagram of the corresponding structure of forming a first antenna layer, a first metal connecting pillar, and a first encapsulation layer on the separation layer;
图3是在第一玻璃基板上开设第一容置槽对应的结构示意图;FIG. 3 is a schematic diagram of the structure corresponding to the opening of the first accommodating groove on the first glass substrate;
图4是将第一玻璃基板和分离层粘接并在第一容置槽内填充绝缘体对应的结构示意图;4 is a schematic diagram of a structure corresponding to bonding the first glass substrate and the separation layer and filling the insulator in the first containing groove;
图5是在第一玻璃基板上形成第二天线层和第二封装层对应的结构示意图;FIG. 5 is a schematic diagram of a structure corresponding to the second antenna layer and the second encapsulation layer formed on the first glass substrate;
图6是剥离分离层后在第一天线层上接合射频芯片对应的结构示意图;FIG. 6 is a schematic diagram of the corresponding structure of bonding a radio frequency chip on the first antenna layer after the separation layer is peeled off;
图7是在第一天线层上接合射频芯片并在第一玻璃基板上开设第二容置槽对应的结构示意图;FIG. 7 is a schematic diagram of a structure corresponding to bonding a radio frequency chip on the first antenna layer and opening a second accommodating groove on the first glass substrate;
图8是将射频芯片内置于第一玻璃基板对应的结构示意图;FIG. 8 is a schematic diagram of the structure corresponding to the built-in radio frequency chip in the first glass substrate;
图9是形成第二金属连接柱和连接阻容器件对应的结构示意图;FIG. 9 is a schematic diagram showing the structure corresponding to the formation of the second metal connecting column and the connecting resistance container member;
图10是形成第三封装层及焊球凸块的结构示意图;FIG. 10 is a schematic diagram of the structure of forming a third packaging layer and solder ball bumps;
图11是本申请实施例二提供的天线的结构示意图;FIG. 11 is a schematic structural diagram of an antenna provided in Embodiment 2 of the present application;
图12是在第二玻璃基板上形成第二天线层、第一金属连接柱和第二封装层的结构示意图;12 is a schematic diagram of the structure of forming a second antenna layer, a first metal connecting pillar and a second packaging layer on a second glass substrate;
图13是将第一玻璃基板和第二玻璃基板粘接并在第一容置槽内填充绝缘体,并在第一金属连接柱对应位置开槽对应的结构示意图的结构示意图;FIG. 13 is a schematic structural diagram of a schematic diagram of a structure corresponding to a first glass substrate and a second glass substrate that are bonded together, filled with an insulator in the first accommodating groove, and slotted at the corresponding position of the first metal connecting column;
图14是形成第一天线层、第一封装层、第三天线层和第四封装层对应的结构示意图;14 is a schematic diagram of the corresponding structure of forming the first antenna layer, the first encapsulation layer, the third antenna layer, and the fourth encapsulation layer;
图15是形成第二金属连接柱和接合射频芯片对应的结构示意图。FIG. 15 is a schematic diagram of a structure corresponding to forming a second metal connecting pillar and bonding a radio frequency chip.
附图标记说明:Description of reference signs:
11-第一玻璃基板;111-第一容置槽;112-绝缘体;113-第二容置槽;114-导电过孔;12-第一天线层;13-第二天线层;14-第一封装层;15-第二封装层;16-第一金属连接柱; 17-射频芯片;18-第二金属连接柱;19-第三封装层;20-焊球凸块;21-金属球垫;22-阻容器件;23-第二玻璃基板;24-第三天线层;25-第四封装层;26-支撑基底;27-分离层。11-first glass substrate; 111-first accommodating groove; 112-insulator; 113-second accommodating groove; 114-conductive via; 12-first antenna layer; 13-second antenna layer; 14-th One encapsulation layer; 15-second encapsulation layer; 16-first metal connection pillar; 17-radio frequency chip; 18-second metal connection pillar; 19-third encapsulation layer; 20-solder bump; 21-metal ball Mat; 22-resistance container; 23-second glass substrate; 24-third antenna layer; 25-fourth encapsulation layer; 26-support base; 27-separation layer.
具体实施方式Detailed ways
下面结合附图和具体实施例对本申请提供的天线、天线封装方法及终端进行说明。The antenna, antenna packaging method, and terminal provided in the present application will be described below with reference to the accompanying drawings and specific embodiments.
实施例一Example one
图1是本申请实施例一提供的天线的结构示意图一,参考图1所示,本申请实施例一提供的天线包括第一玻璃基板11、第一天线层12、第二天线层13、第一封装层14、第二封装层15和第一金属连接柱16。Fig. 1 is a structural schematic diagram 1 of the antenna provided in the first embodiment of the present application. Referring to Fig. 1, the antenna provided in the first embodiment of the present application includes a first glass substrate 11, a first antenna layer 12, a second antenna layer 13, and a second antenna layer. An encapsulation layer 14, a second encapsulation layer 15 and a first metal connecting pillar 16.
其中,第一玻璃基板11由玻璃制成的板状结构,第一玻璃基板11包括相对设置的第一表面和第二表面,第一表面为图1所示的第一玻璃基板11的下表面,第二表面为图1所示的第一玻璃基板11的上表面。第一玻璃基板11作为天线介质,其厚度为150μm-800μm,相比于采用塑封料作为天线介质,可降低介质厚度。Wherein, the first glass substrate 11 is a plate-shaped structure made of glass, the first glass substrate 11 includes a first surface and a second surface that are opposed to each other, and the first surface is the lower surface of the first glass substrate 11 shown in FIG. 1 , The second surface is the upper surface of the first glass substrate 11 shown in FIG. 1. As the antenna medium, the first glass substrate 11 has a thickness of 150 μm-800 μm, which can reduce the thickness of the medium compared to using a plastic molding compound as the antenna medium.
本实施例中,采用第一玻璃基板11作为天线介质,相比于采用塑封料作为天线介质,可降低介电损耗,提高天线性能。且相比于塑封料,玻璃基板机械强度高、翘曲低、封装和后续上板加工难度低,失效风险低。In this embodiment, the first glass substrate 11 is used as the antenna medium, which can reduce the dielectric loss and improve the antenna performance compared with the use of a plastic molding compound as the antenna medium. Compared with plastic packaging materials, the glass substrate has high mechanical strength, low warpage, low difficulty in packaging and subsequent board processing, and low failure risk.
第一天线层12设置于第一玻璃基板11的第一表面,第二天线层13设置于第一玻璃基板11的第二表面。第一天线层12和第二天线层13均为金属布线层,其材料可以包括铜、镍、铝、金、银、钛中的一种或两种以上的组合。第一天线层12和第二天线层13可根据天线的性能需求,设置成各种不同的图形。The first antenna layer 12 is disposed on the first surface of the first glass substrate 11, and the second antenna layer 13 is disposed on the second surface of the first glass substrate 11. Both the first antenna layer 12 and the second antenna layer 13 are metal wiring layers, and their materials may include one or a combination of two or more of copper, nickel, aluminum, gold, silver, and titanium. The first antenna layer 12 and the second antenna layer 13 can be arranged in various patterns according to the performance requirements of the antenna.
在一种可能的实施方式中,第一天线层12和第二天线层13上均可以设置有重新布线层,重新布线层的厚度为3μm-10μm。重新布线层可实现高密度布线,减小天线互连的尺度和损耗,压缩互连空间,扩大天线设计的灵活性。In a possible implementation manner, both the first antenna layer 12 and the second antenna layer 13 may be provided with a rewiring layer, and the thickness of the rewiring layer is 3 μm-10 μm. The re-wiring layer can realize high-density wiring, reduce the scale and loss of antenna interconnection, compress the interconnection space, and expand the flexibility of antenna design.
在上述实施例中,第一封装层14覆盖第一表面和第一天线层12,第二封装层15覆盖第二表面和第二天线层13。第一封装层14和第二封装层15可以包括环氧树脂、硅胶、聚酰亚胺PI中的一种,分别起到保护第一天线层12和第二天线层13的作用。In the above embodiment, the first encapsulation layer 14 covers the first surface and the first antenna layer 12, and the second encapsulation layer 15 covers the second surface and the second antenna layer 13. The first encapsulation layer 14 and the second encapsulation layer 15 may include one of epoxy resin, silica gel, and polyimide PI, which protect the first antenna layer 12 and the second antenna layer 13 respectively.
第一玻璃基板11中设置有第一容置槽111,第一容置槽111为贯穿第一玻璃基板11的厚度方向的通孔。第一金属连接柱16设置于第一容置槽111内,第一金属连接柱16的两端分别与第一天线层12和第二天线层13连接;第一金属连接柱16的制作材料包括金、银、铜、铝中的至少一种,在一种可能的实施方式中,第一金属连接柱的制作材料与第一天线层12和第二天线层13的制作材料相同。第一容置槽111内设置由绝缘材料构成的绝缘体112,绝缘体112用于隔离第一金属连接柱112和第一玻璃基板11,防止第一金属连接柱112的侧面与第一玻璃基板11接触,防止第一金属连接柱112产生的热量直接传递到第一玻璃基板11上。A first accommodating groove 111 is provided in the first glass substrate 11, and the first accommodating groove 111 is a through hole penetrating the thickness direction of the first glass substrate 11. The first metal connecting column 16 is disposed in the first accommodating groove 111, and both ends of the first metal connecting column 16 are connected to the first antenna layer 12 and the second antenna layer 13 respectively; the material of the first metal connecting column 16 includes At least one of gold, silver, copper, and aluminum. In a possible implementation manner, the material of the first metal connecting post is the same as the material of the first antenna layer 12 and the second antenna layer 13. An insulator 112 made of an insulating material is provided in the first accommodating groove 111. The insulator 112 is used to isolate the first metal connecting column 112 from the first glass substrate 11 to prevent the side surface of the first metal connecting column 112 from contacting the first glass substrate 11 , To prevent the heat generated by the first metal connecting pillar 112 from being directly transferred to the first glass substrate 11.
需要说明的是,相关技术中,采用玻璃基板作为天线介质时,可直接在玻璃基板的设定区域开孔并在该开孔内电镀金属层作为金属连接柱,以连接位于玻璃基板两侧的天线层,但是,由于电镀金属层与玻璃基板直接接触,开孔位置容易出现玻璃开裂、金属残留等质量风险。并且,需要预先在玻璃生产厂家进行钻孔电镀工艺,再运输至封装厂家进行封装加工,如果天线的结构需要调整,则封装厂家需要向玻璃生产厂家重新订购玻璃原料,导 致供应链复杂,生产周期长。It should be noted that in the related art, when a glass substrate is used as the antenna medium, a hole can be directly opened in the set area of the glass substrate and a metal layer is plated in the hole as a metal connecting post to connect the two sides of the glass substrate. The antenna layer, however, due to the direct contact between the electroplated metal layer and the glass substrate, the opening positions are prone to quality risks such as glass cracking and metal residue. In addition, it is necessary to perform drilling and electroplating process at the glass manufacturer in advance, and then transport it to the packaging manufacturer for packaging processing. If the structure of the antenna needs to be adjusted, the packaging manufacturer needs to re-order glass raw materials from the glass manufacturer, resulting in a complex supply chain and production cycle long.
而本实施例中,通过在第一玻璃基板上开设第一容置槽111,在第一容置槽111内填充绝缘体112,将第一金属连接柱16设置在绝缘体112中,从而避免了第一金属连接柱16直接与第一容置槽111的壁面接触,不容易出现玻璃开裂、金属残留的质量风险。且该工艺可以在封装厂家直接进行,调整天线结构时,无需重新订购玻璃原料,从而节约了生产周期。In this embodiment, the first accommodating groove 111 is opened on the first glass substrate, the insulator 112 is filled in the first accommodating groove 111, and the first metal connecting column 16 is arranged in the insulator 112, thereby avoiding the A metal connecting column 16 directly contacts the wall surface of the first accommodating groove 111, and the quality risks of glass cracking and metal residues are not prone to occur. In addition, the process can be carried out directly by the packaging manufacturer, and there is no need to reorder glass raw materials when adjusting the antenna structure, thereby saving the production cycle.
上述图1所示的天线,可采用如下制作方法制作形成:The antenna shown in Figure 1 above can be manufactured by the following manufacturing methods:
首先,提供支撑基底26,支撑基底26上设置有分离层27。First, a support substrate 26 is provided, and a separation layer 27 is provided on the support substrate 26.
作为示例,支撑基底26包括玻璃衬底、金属衬底、半导体衬底、聚合物衬底及陶瓷衬底中的一种。其中,采用玻璃衬底作为支撑基底26,具有成本低,容易在表面形成分离层,且能降低后续剥离工艺的难度的优点。作为示例,分离层27包括胶带及聚合物层中的一种,聚合物层可采用旋涂工艺涂覆于支撑基底26的表面,然后采用紫外固化或者热固化工艺使其固化成型。As an example, the supporting base 26 includes one of a glass substrate, a metal substrate, a semiconductor substrate, a polymer substrate, and a ceramic substrate. Among them, the use of a glass substrate as the supporting base 26 has the advantages of low cost, easy formation of a separation layer on the surface, and reduction of the difficulty of the subsequent peeling process. As an example, the separation layer 27 includes one of an adhesive tape and a polymer layer. The polymer layer can be coated on the surface of the support substrate 26 by a spin coating process, and then cured and molded by an ultraviolet curing or thermal curing process.
参考图2所示,接下来,在分离层27上形成第一天线层12,并在第一天线层12上形成第一金属连接柱16。可采用化学气相沉积工艺、蒸镀工艺、溅射工艺、电镀工艺或化学镀工艺在分离层27上形成金属层,可通过对金属层进行刻蚀以形成图形化的第一天线层12和第一金属连接柱16,其中,第一金属连接柱16的下端与第一天线层12连接。Referring to FIG. 2, next, the first antenna layer 12 is formed on the separation layer 27, and the first metal connecting pillar 16 is formed on the first antenna layer 12. A metal layer can be formed on the separation layer 27 by using a chemical vapor deposition process, an evaporation process, a sputtering process, an electroplating process or an electroless plating process. The metal layer can be etched to form the patterned first antenna layer 12 and the second antenna layer. A metal connecting post 16, wherein the lower end of the first metal connecting post 16 is connected to the first antenna layer 12.
接着,形成覆盖第一天线层12的第一封装层14,第一金属连接柱16远离分离层27的一端暴露在第一封装层14外。其中,第一封装层14可采用压缩成型、传递模塑成型、液封成型、真空层压及旋涂等工艺形成。Next, a first encapsulation layer 14 covering the first antenna layer 12 is formed, and an end of the first metal connecting pillar 16 away from the separation layer 27 is exposed outside the first encapsulation layer 14. Among them, the first encapsulation layer 14 can be formed by compression molding, transfer molding, liquid sealing, vacuum lamination, spin coating, and other processes.
参考图3所示,接下来,提供第一玻璃基板11,第一玻璃基板11中设置有第一容置槽111。其中,第一容置槽111的位置和第一金属连接柱16的位置对应。第一玻璃基板11的厚度与天线结构相关,第一容置槽111可以为直接在第一玻璃基板11上开设的通孔,也可先在第一玻璃基板11上开盲孔,再将第一玻璃基板11研磨减薄,直至露出盲孔的底部,形成通孔。第一容置槽111可以通过蚀刻或者激光加工形成,第一容置槽111的直径大于第一金属连接柱16的直径。Referring to FIG. 3, next, a first glass substrate 11 is provided, and a first accommodating groove 111 is provided in the first glass substrate 11. Wherein, the position of the first accommodating groove 111 corresponds to the position of the first metal connecting pillar 16. The thickness of the first glass substrate 11 is related to the antenna structure. The first accommodating groove 111 may be a through hole directly opened on the first glass substrate 11, or a blind hole may be opened on the first glass substrate 11 first, and then the A glass substrate 11 is ground and thinned until the bottom of the blind hole is exposed to form a through hole. The first accommodating groove 111 may be formed by etching or laser processing, and the diameter of the first accommodating groove 111 is larger than the diameter of the first metal connecting pillar 16.
参考图4所示,接着,将第一玻璃基板11粘接在分离层27上,第一金属连接柱16放置于第一容置槽111内,并使用绝缘材料填充第一容置槽111以形成绝缘体112。其中,绝缘材料可以为环氧树脂、硅胶、聚酰亚胺PI中的一种,绝缘材料填充在第一容置槽111内后,可隔离第一金属连接柱16和第一容置槽111的内壁面,防止第一金属连接柱16影响到第一玻璃基板11的机械性能。Referring to FIG. 4, next, the first glass substrate 11 is bonded to the separation layer 27, the first metal connecting column 16 is placed in the first accommodating groove 111, and the first accommodating groove 111 is filled with an insulating material. The insulator 112 is formed. The insulating material can be one of epoxy resin, silica gel, and polyimide PI. After the insulating material is filled in the first accommodating groove 111, it can isolate the first metal connecting column 16 and the first accommodating groove 111. The inner wall surface prevents the first metal connecting column 16 from affecting the mechanical properties of the first glass substrate 11.
在另一种可能的实施方式中,第一金属连接柱16也可以在形成绝缘体112后,通过在绝缘体112中开孔并进行电镀形成,此时,绝缘体112是便于加工开孔的环氧树脂等材料。In another possible embodiment, the first metal connecting pillar 16 may also be formed by opening holes in the insulator 112 and electroplating after forming the insulator 112. In this case, the insulator 112 is an epoxy resin that is convenient for processing and opening holes. And other materials.
参考图5所示,接下来,在第一玻璃基板11的远离支撑基底26的表面上形成第二天线层13,以及形成覆盖第二天线层13的第二封装层15,第二天线层13和第一金属连接柱16电连接。其中,可采用化学气相沉积工艺、蒸镀工艺、溅射工艺、电镀工艺或化学镀工艺在第一玻璃基板11的表面上形成金属层,可通过对金属层进行刻蚀以形成图形化的第二天线层13。第二封装层15可采用压缩成型、传递模塑成型、液封成型、真空层压及旋涂等工艺形成。Referring to FIG. 5, next, a second antenna layer 13 is formed on the surface of the first glass substrate 11 away from the supporting base 26, and a second encapsulation layer 15 covering the second antenna layer 13 is formed. It is electrically connected to the first metal connecting pillar 16. Wherein, a chemical vapor deposition process, an evaporation process, a sputtering process, an electroplating process or an electroless plating process can be used to form a metal layer on the surface of the first glass substrate 11, and the metal layer can be etched to form a patterned second Two antenna layer 13. The second encapsulation layer 15 can be formed by compression molding, transfer molding, liquid sealing, vacuum lamination, spin coating, and other processes.
在一种可能的实施方式中,将第一玻璃基板11和绝缘体112研磨减薄,以使第一金属 连接柱16的端部暴露在绝缘体112的表面,以使第二天线层13和暴露在绝缘体112表面的第一金属连接柱16直接连接。In a possible implementation, the first glass substrate 11 and the insulator 112 are ground and thinned, so that the end of the first metal connecting pillar 16 is exposed on the surface of the insulator 112, so that the second antenna layer 13 is exposed to the surface of the insulator 112. The first metal connecting post 16 on the surface of the insulator 112 is directly connected.
在另一种可能的实施方式中,也可在绝缘体112上设置多个过孔,形成第二天线层13时,过孔被金属材料填充形成导电过孔,第二天线层13通过导电过孔与第一金属连接柱16连接。In another possible implementation manner, multiple vias may also be provided on the insulator 112. When the second antenna layer 13 is formed, the vias are filled with metal materials to form conductive vias, and the second antenna layer 13 passes through the conductive vias. Connect with the first metal connecting pillar 16.
最后,剥离分离层27和支撑基底26。其中,分离层27可以为光热转换层,可通过激光对光热转换成进行加热,以使分离层27和支撑基底26与第一天线层12相互分离,形成如图1所示的天线。Finally, the separation layer 27 and the supporting substrate 26 are peeled off. Wherein, the separation layer 27 may be a light-to-heat conversion layer, which can be converted into heat by laser light, so that the separation layer 27 and the supporting substrate 26 are separated from the first antenna layer 12 to form an antenna as shown in FIG. 1.
需要注意的是,本实施例提供的天线,可通过刷锡膏的方式与电路板互连,且可通过电路板外接射频芯片,以实现天线功能。It should be noted that the antenna provided in this embodiment can be connected to the circuit board by brushing solder paste, and can be connected to an external radio frequency chip through the circuit board to realize the antenna function.
射频芯片也可直接设置在天线内,图6是剥离分离层后在第一天线层上接合射频芯片对应的结构示意图,参考图6所示,在一种可能的实施方式中,本实施例提供的天线还包括:与第一天线层12电连接的射频芯片17,射频芯片17设置于第一天线层12的远离第一玻璃基板11的表面。射频芯片17一方面和第一天线层12电连接,另一方面与电路板连接。The radio frequency chip can also be directly arranged in the antenna. FIG. 6 is a schematic diagram showing the structure of bonding the radio frequency chip on the first antenna layer after the separation layer is peeled off. Referring to FIG. 6, in a possible implementation manner, this embodiment provides The antenna further includes a radio frequency chip 17 electrically connected to the first antenna layer 12, and the radio frequency chip 17 is disposed on a surface of the first antenna layer 12 away from the first glass substrate 11. The radio frequency chip 17 is electrically connected to the first antenna layer 12 on the one hand, and is connected to the circuit board on the other hand.
图6提供的天线结构的具体制作方法为,在剥离分离层27和支撑基底26的步骤后,在第一天线层12的远离第一玻璃基板11的表面上接合射频芯片17,射频芯片17和第一天线层12电连接。The specific manufacturing method of the antenna structure provided in FIG. 6 is that after the step of peeling off the separation layer 27 and the supporting base 26, bonding the radio frequency chip 17, the radio frequency chip 17 and the surface of the first antenna layer 12 away from the first glass substrate 11 The first antenna layer 12 is electrically connected.
图7是在第一天线层上接合射频芯片并在第一玻璃基板上开设第二容置槽对应的结构示意图,图8是将射频芯片内置于第一玻璃基板对应的结构示意图,参考图7和图8所示,在另一种可能的实施方式中,第一玻璃基板11内设置有第二容置槽113,射频芯片17位于第二容置槽113内。将射频芯片17内置于第一玻璃基板11内,可进一步降低天线结构整体的厚度。FIG. 7 is a schematic diagram of the structure corresponding to bonding a radio frequency chip on the first antenna layer and opening a second accommodating groove on the first glass substrate, and FIG. 8 is a schematic diagram of the structure corresponding to embedding the radio frequency chip in the first glass substrate, refer to FIG. 7 As shown in FIG. 8, in another possible implementation manner, a second accommodating groove 113 is provided in the first glass substrate 11, and the radio frequency chip 17 is located in the second accommodating groove 113. The radio frequency chip 17 is built into the first glass substrate 11 to further reduce the overall thickness of the antenna structure.
其中,将射频芯片17内置于第一玻璃基板11内的制作方法如下:在图2的基础上,在分离层27上形成第一天线层12后,接着在第一天线层12上连接射频芯片17;在图3的基础上,提供第一玻璃基板11的步骤之后,在第一玻璃基板11上开设第二容置槽113;如图7所示,在将第一玻璃基板11粘接在分离层27上时,将射频芯片17放置于第二容置槽113内,并使用绝缘材料填充第二容置槽113以形成绝缘体112。Wherein, the manufacturing method of embedding the radio frequency chip 17 in the first glass substrate 11 is as follows: on the basis of FIG. 2, after forming the first antenna layer 12 on the separation layer 27, the radio frequency chip is then connected to the first antenna layer 12 17; On the basis of Figure 3, after the step of providing the first glass substrate 11, a second accommodating groove 113 is opened on the first glass substrate 11; as shown in Figure 7, the first glass substrate 11 is bonded to When the separation layer 27 is on, the radio frequency chip 17 is placed in the second accommodating groove 113, and the second accommodating groove 113 is filled with an insulating material to form an insulator 112.
图9是形成第二金属连接柱和连接阻容器件对应的结构示意图,图10是形成第三封装层及焊球凸块的结构示意图,参考图9和图10所示,在图6的基础上,本实施例中,天线还包括第三封装层19。第三封装层19覆盖射频芯片17,第三封装层19可以包括环氧树脂、硅胶、聚酰亚胺PI中的一种,起到保护射频芯片17的作用。9 is a schematic diagram of the structure corresponding to the formation of the second metal connecting post and the connection resistance container member. FIG. 10 is a schematic diagram of the structure of forming the third encapsulation layer and solder ball bumps. Refer to FIG. 9 and FIG. 10, on the basis of FIG. 6 Above, in this embodiment, the antenna further includes a third encapsulation layer 19. The third encapsulation layer 19 covers the radio frequency chip 17, and the third encapsulation layer 19 may include one of epoxy resin, silica gel, and polyimide PI to protect the radio frequency chip 17.
其中,同时,在覆盖了第三封装层19后,为了使第一天线层12和射频芯片17可以与外部电路板连接,本实施例中,在第一天线层12上设置了第二金属连接柱18。第二金属连接柱18设置于第一天线层12的远离第一玻璃基板11的表面,第二金属连接柱18制作材料包括金、银、铜、铝中的一种。第二金属连接柱18的端部暴露在第三封装层19外,或者,可以在第三封装层19上设置导电过孔,以使第二金属连接柱18可与外部电路板连通。Among them, at the same time, after covering the third encapsulation layer 19, in order to make the first antenna layer 12 and the radio frequency chip 17 connect to the external circuit board, in this embodiment, a second metal connection is provided on the first antenna layer 12.柱18。 Post 18. The second metal connecting post 18 is disposed on the surface of the first antenna layer 12 away from the first glass substrate 11, and the material of the second metal connecting post 18 includes one of gold, silver, copper, and aluminum. The end of the second metal connection post 18 is exposed outside the third encapsulation layer 19, or a conductive via may be provided on the third encapsulation layer 19 so that the second metal connection post 18 can communicate with the external circuit board.
为了保证天线和电路板的连接的可靠性,本实施例中,天线还包括焊球凸块20,焊球 凸块20设置在第三封装层19的远离第一玻璃基板11的表面,且焊球凸块20通过金属球垫21和第二金属连接柱18连接。焊球凸块20包括锡焊料、银焊料及金锡合金焊料中的一种。In order to ensure the reliability of the connection between the antenna and the circuit board, in this embodiment, the antenna further includes solder ball bumps 20. The solder ball bumps 20 are arranged on the surface of the third packaging layer 19 away from the first glass substrate 11 and are soldered. The ball bump 20 is connected to the second metal connecting pillar 18 through the metal ball pad 21. The solder bump 20 includes one of tin solder, silver solder, and gold-tin alloy solder.
本实施例中,天线还包括阻容器件22,阻容器件22设置在第三封装层19内,并与第一天线层12电连接。阻容器件22可起到降低干扰的作用,需要说明的是,在第一天线层12和射频芯片17的连接线路之间还可以增加滤波电路,滤波电路和阻容器件22共同起到降低干扰、提高天线性能的作用。In this embodiment, the antenna further includes a containment member 22 which is disposed in the third encapsulation layer 19 and is electrically connected to the first antenna layer 12. The resistance container 22 can play a role in reducing interference. It should be noted that a filter circuit can be added between the first antenna layer 12 and the connection line of the radio frequency chip 17, and the filter circuit and the resistance container 22 together can reduce interference. , The role of improving antenna performance.
上述实施例中,在图6的基础上继续形成第二金属连接柱18、阻容器件22、第三封装层19和焊球凸块20的制作方法可以为:首先,在第一天线层12的远离第一玻璃基板11的表面上形成第二金属连接柱18和阻容器件22;接着,形成覆盖射频芯片17、第二金属连接柱18和阻容器件22的第三封装层19,第二金属连接柱18远离第一玻璃基板11的一端暴露在第三封装层19外;接着,在第三封装层19上形成金属球垫21,金属球垫21和第二金属连接柱18电连接;最后,在金属球垫21上形成焊球凸块20。In the above embodiment, on the basis of FIG. 6, the method for forming the second metal connecting pillar 18, the blocking container 22, the third encapsulation layer 19, and the solder ball bumps 20 can be as follows: first, on the first antenna layer 12 A second metal connecting column 18 and a blocking container 22 are formed on the surface of the first glass substrate 11; then, a third encapsulation layer 19 covering the radio frequency chip 17, the second metal connecting column 18 and the blocking container 22 is formed. The end of the two metal connecting pillars 18 away from the first glass substrate 11 is exposed outside the third packaging layer 19; then, a metal ball pad 21 is formed on the third packaging layer 19, and the metal ball pad 21 is electrically connected to the second metal connecting pillar 18 ; Finally, a solder ball bump 20 is formed on the metal ball pad 21.
本申请实施例一提供的天线,设置第一玻璃基板作为天线介质,相比于采用塑封料作为介质,玻璃材质的第一玻璃基板的介电损耗低,天线增益高,可有效缩小封装体积。另外,第一玻璃基板上下表面的天线金属层通过第一金属连接柱连接,第一金属连接柱和第一玻璃基板之间填充有绝缘体,可避免第一金属连接柱与第一玻璃基板直接接触,可防止第一玻璃基板在温度变化时开裂。此外,第一玻璃基板上的开槽和第一金属连接柱的设计解耦,第一金属连接柱的直径以及第一容置槽在第一玻璃基板中的位置调整不需要玻璃厂商的配合,可大大缩短天线设计的开发周期和重复玻璃基板打样的成本。The antenna provided in the first embodiment of the present application is provided with a first glass substrate as the antenna medium. Compared with the use of a plastic molding compound as the medium, the first glass substrate made of glass has low dielectric loss and high antenna gain, which can effectively reduce the package volume. In addition, the antenna metal layers on the upper and lower surfaces of the first glass substrate are connected by the first metal connecting pillars, and an insulator is filled between the first metal connecting pillars and the first glass substrate to avoid direct contact between the first metal connecting pillars and the first glass substrate. , Can prevent the first glass substrate from cracking when the temperature changes. In addition, the slot on the first glass substrate is decoupled from the design of the first metal connecting column, and the adjustment of the diameter of the first metal connecting column and the position of the first accommodating groove in the first glass substrate does not require the cooperation of the glass manufacturer. It can greatly shorten the development cycle of antenna design and the cost of repeated glass substrate proofing.
实施例二Example two
图11是本申请实施例二提供的天线的结构示意图,参考图11所示,本申请实施例二提供的天线包括:第一玻璃基板11、第一天线层12、第二天线层13、第一封装层14、第二封装层15、第一金属连接柱16、射频芯片17、第二金属连接柱18、第三封装层19、焊球凸块20、第二玻璃基板23、第三天线层24和第四封装层25。FIG. 11 is a schematic structural diagram of the antenna provided in the second embodiment of the present application. Referring to FIG. 11, the antenna provided in the second embodiment of the present application includes: a first glass substrate 11, a first antenna layer 12, a second antenna layer 13, and a second antenna layer. An encapsulation layer 14, a second encapsulation layer 15, a first metal connection pillar 16, a radio frequency chip 17, a second metal connection pillar 18, a third encapsulation layer 19, a solder bump 20, a second glass substrate 23, and a third antenna Layer 24 and fourth encapsulation layer 25.
其中,第一玻璃基板11和第二玻璃基板23均为由玻璃制成的板状结构,第一玻璃基板11包括相对设置的第一表面和第二表面,第一表面为图11所示的第一玻璃基板11的下表面,第二表面为图11所示的第一玻璃基板11的上表面。第一玻璃基板11和第二玻璃基板23作为天线介质,其厚度为150μm-800μm,相比于采用塑封料作为天线介质,可降低介质厚度。Wherein, the first glass substrate 11 and the second glass substrate 23 are both plate-shaped structures made of glass, and the first glass substrate 11 includes a first surface and a second surface that are arranged oppositely, and the first surface is shown in FIG. 11 The lower surface of the first glass substrate 11 and the second surface are the upper surface of the first glass substrate 11 shown in FIG. 11. The first glass substrate 11 and the second glass substrate 23 are used as the antenna medium and have a thickness of 150 μm-800 μm, which can reduce the thickness of the medium compared to using a plastic molding compound as the antenna medium.
本实施例中,采用第一玻璃基板11和第二玻璃基板23作为天线介质,相比于采用塑封料作为天线介质,可降低介电损耗,提高天线性能。且相比于塑封料,玻璃基板机械强度高、翘曲低、封装和后续上板加工难度低,失效风险低。In this embodiment, the first glass substrate 11 and the second glass substrate 23 are used as the antenna medium. Compared with the use of a plastic molding compound as the antenna medium, the dielectric loss can be reduced and the antenna performance can be improved. Compared with plastic packaging materials, the glass substrate has high mechanical strength, low warpage, low difficulty in packaging and subsequent board processing, and low failure risk.
第一天线层12设置于第一玻璃基板11的第一表面,第二天线层13设置于第一玻璃基板11的第二表面,第三天线层24设置于第二玻璃基板23的远离第一玻璃基板11的表面上。第一天线层12、第二天线层13和第三天线层24均为金属布线层,其材料可以包括铜、镍、铝、金、银、钛中的一种或两种以上的组合,并可根据天线的性能需求,设置成各种不同的图形。The first antenna layer 12 is disposed on the first surface of the first glass substrate 11, the second antenna layer 13 is disposed on the second surface of the first glass substrate 11, and the third antenna layer 24 is disposed on the second glass substrate 23 away from the first surface. On the surface of the glass substrate 11. The first antenna layer 12, the second antenna layer 13 and the third antenna layer 24 are all metal wiring layers, and their materials may include one or a combination of two or more of copper, nickel, aluminum, gold, silver, and titanium, and It can be set into various patterns according to the performance requirements of the antenna.
在一种可能的实施方式中,第一天线层12、第二天线层13和第三天线层24上均可以设置有重新布线层,重新布线层的厚度为3μm-10μm。重新布线层可实现高密度布线,减 小天线互连的尺度和损耗,压缩互连空间,扩大天线设计的灵活性。In a possible implementation manner, the first antenna layer 12, the second antenna layer 13 and the third antenna layer 24 may all be provided with a rewiring layer, and the thickness of the rewiring layer is 3 μm-10 μm. The rewiring layer can realize high-density wiring, reduce the scale and loss of antenna interconnection, compress the interconnection space, and expand the flexibility of antenna design.
其中,第一封装层14覆盖第一表面和第一天线层12,第二封装层15覆盖第二表面和第二天线层13,第四封装层25覆盖第二玻璃基板23的远离第一玻璃基板11的表面及第三天线层24。第一封装层14、第二封装层15和第四封装层25均可以包括环氧树脂、硅胶、聚酰亚胺PI中的一种,分别起到保护第一天线层12、第二天线层13和第三天线层24的作用。Wherein, the first encapsulation layer 14 covers the first surface and the first antenna layer 12, the second encapsulation layer 15 covers the second surface and the second antenna layer 13, and the fourth encapsulation layer 25 covers the second glass substrate 23 away from the first glass. The surface of the substrate 11 and the third antenna layer 24. The first encapsulation layer 14, the second encapsulation layer 15 and the fourth encapsulation layer 25 may all include one of epoxy resin, silicone rubber, and polyimide PI to protect the first antenna layer 12 and the second antenna layer, respectively. 13 and the role of the third antenna layer 24.
第一玻璃基板11中设置有第一容置槽111,第一容置槽111内设置有绝缘体112,第一金属连接柱16设置于绝缘体112中,且第一金属连接柱16的两端分别与第一天线层12和第二天线层13连接。第一金属连接柱16的制作材料包括金、银、铜、铝中的一种,设置于第一容置槽111内,第一金属连接柱16的两端分别与第一天线层12和第二天线层13连接。第一容置槽111为贯穿第一玻璃基板11的厚度方向的通孔,第一容置槽111内设置由绝缘材料构成的绝缘体112,绝缘体112用于隔离第一金属连接柱112和第一玻璃基板11,防止第一金属连接柱112的侧面与第一玻璃基板11接触,防止第一金属连接柱112影响第一玻璃基板11的机械性能。A first accommodating groove 111 is provided in the first glass substrate 11, an insulator 112 is provided in the first accommodating groove 111, the first metal connecting column 16 is provided in the insulator 112, and two ends of the first metal connecting column 16 are respectively It is connected to the first antenna layer 12 and the second antenna layer 13. The material of the first metal connecting column 16 includes one of gold, silver, copper, and aluminum, and is arranged in the first accommodating groove 111. Both ends of the first metal connecting column 16 are connected to the first antenna layer 12 and the first antenna layer 12 and the second antenna layer. The two antenna layers 13 are connected. The first accommodating groove 111 is a through hole penetrating the thickness direction of the first glass substrate 11, and an insulator 112 made of insulating material is provided in the first accommodating groove 111. The insulator 112 is used to isolate the first metal connecting pillar 112 from the first metal connecting pillar 112. The glass substrate 11 prevents the side surface of the first metal connecting column 112 from contacting the first glass substrate 11, and prevents the first metal connecting column 112 from affecting the mechanical properties of the first glass substrate 11.
本实施例中,射频芯片17设置于第一天线层12的远离第一玻璃基板11的表面,且与第一天线层12电连接。射频芯片17一方面和第一天线层12电连接,另一方面与电路板连接。In this embodiment, the radio frequency chip 17 is disposed on the surface of the first antenna layer 12 away from the first glass substrate 11 and is electrically connected to the first antenna layer 12. The radio frequency chip 17 is electrically connected to the first antenna layer 12 on the one hand, and is connected to the circuit board on the other hand.
此外,第二金属连接柱18设置于第一天线层12的远离第一玻璃基板11的表面,第三封装层19覆盖射频芯片17和第二金属连接柱18,且第三封装层19的远离第一玻璃基板11的表面上暴露出第二金属连接柱18的端部。In addition, the second metal connecting pillar 18 is disposed on the surface of the first antenna layer 12 away from the first glass substrate 11, the third packaging layer 19 covers the radio frequency chip 17 and the second metal connecting pillar 18, and the third packaging layer 19 is far away The end of the second metal connection pillar 18 is exposed on the surface of the first glass substrate 11.
焊球凸块20设置在第三封装层19的远离第一玻璃基板11的表面,且焊球凸块20通过金属球垫21和第二金属连接柱18连接。The solder ball bumps 20 are disposed on the surface of the third packaging layer 19 away from the first glass substrate 11, and the solder ball bumps 20 are connected to the second metal connecting pillars 18 through the metal ball pads 21.
在一种可能的实施方式中,图11提供的天线结构可采用以下制作方法制作而成:In a possible implementation manner, the antenna structure provided in FIG. 11 may be manufactured by the following manufacturing method:
在实施例一所述的天线制作方法的基础上,提供第二玻璃基板23;将第二玻璃基板23粘接在第二封装层15上;在第二玻璃基板23的远离第一玻璃基板11的表面上形成第三天线层24,以及形成覆盖第三天线层24的第四封装层25。On the basis of the antenna manufacturing method described in the first embodiment, a second glass substrate 23 is provided; the second glass substrate 23 is bonded to the second encapsulation layer 15; the second glass substrate 23 is far away from the first glass substrate 11 A third antenna layer 24 is formed on the surface, and a fourth encapsulation layer 25 covering the third antenna layer 24 is formed.
在另一种可能的实施方式中,图11提供的天线结构,可采用以下步骤制作而成:In another possible implementation manner, the antenna structure provided in FIG. 11 can be manufactured using the following steps:
首先,提供第一玻璃基板11和第二玻璃基板23。First, the first glass substrate 11 and the second glass substrate 23 are provided.
参考图12所示,接下来,可在第二玻璃基板23上形成第二天线层13和位于第二天线层13上的第一金属连接柱16,以及形成覆盖第二天线层13的第二封装层15。其中,可采用化学气相沉积工艺、蒸镀工艺、溅射工艺、电镀工艺或化学镀工艺在第二玻璃基板23上形成金属层,可通过对金属层进行刻蚀以形成图形化的第二天线层13和第一金属连接柱16。第二封装层15可采用压缩成型、传递模塑成型、液封成型、真空层压及旋涂等工艺形成。Referring to FIG. 12, next, a second antenna layer 13 and a first metal connecting post 16 located on the second antenna layer 13 can be formed on the second glass substrate 23, and a second antenna layer 13 covering the second antenna layer 13 can be formed. Encapsulation layer 15. Wherein, a chemical vapor deposition process, an evaporation process, a sputtering process, an electroplating process or an electroless plating process can be used to form a metal layer on the second glass substrate 23, and the metal layer can be etched to form a patterned second antenna The layer 13 and the first metal connection pillar 16. The second encapsulation layer 15 can be formed by compression molding, transfer molding, liquid sealing, vacuum lamination, spin coating, and other processes.
然后,可在第一玻璃基板11中开设第一容置槽111,其中,第一容置槽111的位置和第一金属连接柱16的位置对应。第一容置槽111可以为直接在第一玻璃基板11上开设的通孔,也可先在第一玻璃基板11上开盲孔,再将第一玻璃基板11研磨减薄,直至露出盲孔的底部,形成通孔。Then, a first accommodating groove 111 may be opened in the first glass substrate 11, wherein the position of the first accommodating groove 111 corresponds to the position of the first metal connecting pillar 16. The first accommodating groove 111 may be a through hole directly opened on the first glass substrate 11, or a blind hole may be opened on the first glass substrate 11 first, and then the first glass substrate 11 may be ground and thinned until the blind hole is exposed At the bottom, a through hole is formed.
参考图13所示,下一步,可将第一玻璃基板11粘接在第二玻璃基板23上,第一金属连 接柱16插装在第一容置槽111内;并使用绝缘材料填充满第一容置槽111以形成绝缘体112。Referring to FIG. 13, in the next step, the first glass substrate 11 can be bonded to the second glass substrate 23, the first metal connecting column 16 is inserted into the first accommodating groove 111; and the insulating material is used to fill the first accommodating groove 111. A accommodating groove 111 is formed to form an insulator 112.
绝缘材料可以为环氧树脂、硅胶、聚酰亚胺PI中的一种,绝缘材料填充在第一容置槽111内后,可隔离第一金属连接柱16和第一容置槽111的内壁面,防止第一金属连接柱16影响到第一玻璃基板11的机械性能。The insulating material may be one of epoxy resin, silica gel, and polyimide PI. After the insulating material is filled in the first accommodating groove 111, it can isolate the first metal connecting column 16 and the inside of the first accommodating groove 111. The wall surface prevents the first metal connecting pillar 16 from affecting the mechanical properties of the first glass substrate 11.
在另一种可能的实施方式中,第一金属连接柱16也可以在形成绝缘体112后,通过在绝缘体112中开孔并进行电镀形成,此时,绝缘体112是便于加工开孔的环氧树脂等材料。In another possible embodiment, the first metal connecting pillar 16 may also be formed by opening holes in the insulator 112 and electroplating after forming the insulator 112. In this case, the insulator 112 is an epoxy resin that is convenient for processing and opening holes. And other materials.
参考图14所示,接下来,可在第一玻璃基板11的远离第二玻璃基板23的表面上形成第一天线层12,以及形成覆盖第一天线层12的第一封装层14;在第二玻璃基板23的远离第一玻璃基板11的表面上形成第三天线层24,以及形成覆盖第三天线层24的第四封装层25。Referring to FIG. 14, next, the first antenna layer 12 may be formed on the surface of the first glass substrate 11 away from the second glass substrate 23, and the first encapsulation layer 14 covering the first antenna layer 12 may be formed; A third antenna layer 24 is formed on the surface of the two glass substrates 23 away from the first glass substrate 11, and a fourth encapsulation layer 25 covering the third antenna layer 24 is formed.
其中,可采用化学气相沉积工艺、蒸镀工艺、溅射工艺、电镀工艺或化学镀工艺在第一玻璃基板11的表面上形成金属层,可通过对金属层进行刻蚀以形成图形化的第一天线层12。同样地,可在第二玻璃基板23的表面上形成第三天线层24。第一封装层14和第四封装层25均可采用压缩成型、传递模塑成型、液封成型、真空层压及旋涂等工艺形成,以分别起到保护第一天线层12和第三天线层24的作用。Wherein, a chemical vapor deposition process, an evaporation process, a sputtering process, an electroplating process or an electroless plating process can be used to form a metal layer on the surface of the first glass substrate 11, and the metal layer can be etched to form a patterned second One antenna layer 12. Similarly, the third antenna layer 24 may be formed on the surface of the second glass substrate 23. Both the first encapsulation layer 14 and the fourth encapsulation layer 25 can be formed by compression molding, transfer molding, liquid sealing, vacuum lamination, spin coating, etc., to protect the first antenna layer 12 and the third antenna, respectively The role of layer 24.
为了实现第二天线层13和第一金属连接柱14的连接,在形成绝缘体112后,可以通过将第一玻璃基板11和绝缘体112研磨减薄,使第一金属连接柱16的端部暴露在绝缘体112的表面,以使第二天线层13和暴露在绝缘体112表面的第一金属连接柱16直接连接。或者,在形成绝缘体112后,也可在绝缘体112上设置多个过孔,形成第二天线层13时,过孔被金属材料填充形成导电过孔114,第二天线层13通过导电过孔114与第一金属连接柱16连接。参考图15所示,接下来,可在第一天线层12的远离第一玻璃基板11的表面上形成连接射频芯片17,并在第一天线层12的远离第一玻璃基板11的表面上形成第二金属连接柱18,再形成覆盖射频芯片17和第一天线层12的远离第一玻璃基板11的表面的第三封装层19,第二金属连接柱18远离第一玻璃基板11的一端暴露在第三封装层19外。In order to realize the connection between the second antenna layer 13 and the first metal connection post 14, after the insulator 112 is formed, the first glass substrate 11 and the insulator 112 can be ground and thinned, so that the end of the first metal connection post 16 is exposed. The surface of the insulator 112 is directly connected to the second antenna layer 13 and the first metal connecting post 16 exposed on the surface of the insulator 112. Alternatively, after the insulator 112 is formed, multiple vias may be provided on the insulator 112. When the second antenna layer 13 is formed, the vias are filled with a metal material to form a conductive via 114, and the second antenna layer 13 passes through the conductive via 114. Connect with the first metal connecting pillar 16. Referring to FIG. 15, next, a connecting radio frequency chip 17 may be formed on the surface of the first antenna layer 12 away from the first glass substrate 11, and formed on the surface of the first antenna layer 12 away from the first glass substrate 11. The second metal connecting column 18 forms a third encapsulation layer 19 covering the radio frequency chip 17 and the surface of the first antenna layer 12 away from the first glass substrate 11, and the end of the second metal connecting column 18 away from the first glass substrate 11 is exposed Outside the third encapsulation layer 19.
其中,第三封装层19可以包括环氧树脂、硅胶、聚酰亚胺PI中的一种,起到保护射频芯片17的作用。同时,在覆盖了第三封装层19后,为了使第一天线层12和射频芯片17可以与外部电路板连接,本实施例中,在第一天线层12上设置了第二金属连接柱18,第二金属连接柱18制作材料包括金、银、铜、铝中的一种。第二金属连接柱18的端部暴露在第三封装层19外,或者,可以在第三封装层19上设置导电过孔,以使第二金属连接柱18可与外部电路板连通。Wherein, the third encapsulation layer 19 may include one of epoxy resin, silica gel, and polyimide PI, which plays a role of protecting the radio frequency chip 17. At the same time, after covering the third encapsulation layer 19, in order to enable the first antenna layer 12 and the radio frequency chip 17 to be connected to the external circuit board, in this embodiment, a second metal connecting post 18 is provided on the first antenna layer 12. The material of the second metal connecting pillar 18 includes one of gold, silver, copper, and aluminum. The end of the second metal connection post 18 is exposed outside the third encapsulation layer 19, or a conductive via may be provided on the third encapsulation layer 19 so that the second metal connection post 18 can communicate with the external circuit board.
最后,参考图11所示,可在第三封装层19上形成金属球垫21,金属球垫21和第二金属连接柱18电连接;并在金属球垫21上形成焊球凸块20。Finally, referring to FIG. 11, a metal ball pad 21 may be formed on the third packaging layer 19, and the metal ball pad 21 and the second metal connecting pillar 18 may be electrically connected; and a solder ball bump 20 may be formed on the metal ball pad 21.
本申请实施例二提供的天线,设置第一玻璃基板和第二玻璃基板作为天线介质,相比于采用塑封料作为介质,介电损耗低、天线增益高,可有效缩小封装体积。第一金属连接柱和第一玻璃基板之间填充有绝缘体,可避免第一金属连接柱与第一玻璃基板直接接触,可防止第一玻璃基板在温度变化时开裂。此外,第一玻璃基板上的开槽和第一金属连接柱的设计解耦,第一金属连接柱的直径以及第一容置槽在第一玻璃基板中的位置调整不需要玻璃厂商的配合,可大大缩短天线设计的开发周期和重复玻璃基板打样的成本。The antenna provided in the second embodiment of the present application is provided with the first glass substrate and the second glass substrate as the antenna medium. Compared with the use of a plastic molding compound as the medium, the antenna has low dielectric loss and high antenna gain, which can effectively reduce the package volume. An insulator is filled between the first metal connecting column and the first glass substrate, which can prevent the first metal connecting column from directly contacting the first glass substrate, and can prevent the first glass substrate from cracking when the temperature changes. In addition, the slot on the first glass substrate is decoupled from the design of the first metal connecting column, and the adjustment of the diameter of the first metal connecting column and the position of the first accommodating groove in the first glass substrate does not require the cooperation of the glass manufacturer. It can greatly shorten the development cycle of antenna design and the cost of repeated glass substrate proofing.
实施例三Example three
本申请实施例三提供一种终端,包括:电路板以及如上实施例一或二提供的天线,该天线与电路板连接。其中,本申请实施例三涉及的终端设备可以包括手机、手表、平板电脑、个人数字助理(Personal Digital Assistant,PDA)、销售终端(Point of Sales,POS)、车载电脑等电子设备。The third embodiment of the present application provides a terminal, which includes a circuit board and the antenna provided in the first or second embodiment above, and the antenna is connected to the circuit board. Among them, the terminal devices involved in the third embodiment of the present application may include electronic devices such as mobile phones, watches, tablet computers, personal digital assistants (PDAs), point of sales (POS), and in-vehicle computers.
本申请实施例三提供的终端中,包括上述实施例一或实施例二提供的天线,因此也具有上述实施例一或实施例二所述的优点,具体可参考上面相关描述,在此不再赘述。The terminal provided in the third embodiment of the present application includes the antenna provided in the above-mentioned embodiment 1 or the second embodiment, and therefore also has the advantages described in the above-mentioned embodiment 1 or the second embodiment. For details, please refer to the relevant description above, which will not be omitted here. Go into details.
本申请的说明书中各实施例或实施方式采用递进的方式描述,每个实施例重点说明的都是与其他实施例的不同之处,各个实施例之间相同相似部分相互参见即可。The embodiments or implementations in the specification of this application are described in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other.
在本申请的说明书的描述中,参考术语“一个实施方式”、“一些实施方式”、“示意性实施方式”、“示例”、“具体示例”、或“一些示例”等的描述意指结合实施方式或示例描述的具体特征、结构、材料或者特点包含于本申请的至少一个实施方式或示例中。在本说明书中,对上述术语的示意性表述不一定指的是相同的实施方式或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施方式或示例中以合适的方式结合。In the description of the specification of the present application, the description with reference to the terms "one embodiment", "some embodiments", "exemplary embodiments", "examples", "specific examples", or "some examples" etc. means to combine The specific features, structures, materials, or characteristics described in the embodiments or examples are included in at least one embodiment or example in the present application. In this specification, the schematic representation of the above-mentioned terms does not necessarily refer to the same embodiment or example. Moreover, the described specific features, structures, materials or characteristics can be combined in any one or more embodiments or examples in a suitable manner.
最后应说明的是:以上各实施例仅用以说明本申请的技术方案,而非对其限制;尽管参照前述各实施例对本申请进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分或者全部技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本申请各实施例技术方案的范围。Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit it; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: The technical solutions described in the foregoing embodiments can still be modified, or some or all of the technical features can be equivalently replaced; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the technical solutions of the embodiments of the present application. range.

Claims (26)

  1. 一种天线,其特征在于,包括:第一玻璃基板、第一天线层、第二天线层、第一封装层、第二封装层和第一金属连接柱;An antenna, characterized by comprising: a first glass substrate, a first antenna layer, a second antenna layer, a first packaging layer, a second packaging layer, and a first metal connecting column;
    所述第一玻璃基板包括相对设置的第一表面和第二表面,所述第一天线层设置于所述第一表面,所述第二天线层设置于所述第二表面,所述第一封装层覆盖所述第一表面和所述第一天线层,所述第二封装层覆盖所述第二表面和第二天线层;The first glass substrate includes a first surface and a second surface that are opposed to each other. The first antenna layer is disposed on the first surface, the second antenna layer is disposed on the second surface, and the first An encapsulation layer covers the first surface and the first antenna layer, and the second encapsulation layer covers the second surface and the second antenna layer;
    所述第一玻璃基板中设置有第一容置槽,所述第一容置槽内设置有绝缘体,所述第一金属连接柱设置于所述绝缘体中,且所述第一金属连接柱的两端分别与所述第一天线层和所述第二天线层连接。A first accommodating groove is provided in the first glass substrate, an insulator is provided in the first accommodating groove, the first metal connecting column is arranged in the insulator, and the first metal connecting column is The two ends are respectively connected to the first antenna layer and the second antenna layer.
  2. 根据权利要求1所述的天线,其特征在于,所述天线还包括:与所述第一天线层电连接的射频芯片。The antenna according to claim 1, wherein the antenna further comprises: a radio frequency chip electrically connected to the first antenna layer.
  3. 根据权利要求2所述的天线,其特征在于,所述射频芯片设置于所述第一天线层的远离所述第一玻璃基板的表面。The antenna according to claim 2, wherein the radio frequency chip is disposed on a surface of the first antenna layer away from the first glass substrate.
  4. 根据权利要求2所述的天线,其特征在于,所述第一玻璃基板内设置有第二容置槽,所述射频芯片位于所述第二容置槽内。The antenna according to claim 2, wherein a second accommodating groove is provided in the first glass substrate, and the radio frequency chip is located in the second accommodating groove.
  5. 根据权利要求3所述的天线,其特征在于,所述天线还包括第二金属连接柱和第三封装层;The antenna according to claim 3, wherein the antenna further comprises a second metal connecting post and a third encapsulation layer;
    所述第二金属连接柱设置于所述第一天线层的远离所述第一玻璃基板的表面,所述第三封装层覆盖所述射频芯片和所述第二金属连接柱,且所述第三封装层的远离所述第一玻璃基板的表面上暴露出所述第二金属连接柱的端部。The second metal connecting pillar is disposed on the surface of the first antenna layer away from the first glass substrate, the third packaging layer covers the radio frequency chip and the second metal connecting pillar, and the first antenna layer The end of the second metal connecting pillar is exposed on the surface of the three encapsulation layer away from the first glass substrate.
  6. 根据权利要求5所述的天线,其特征在于,所述天线还包括焊球凸块,所述焊球凸块设置在所述第三封装层的远离所述第一玻璃基板的表面,且所述焊球凸块通过金属球垫和所述第二金属连接柱连接。The antenna according to claim 5, wherein the antenna further comprises a solder ball bump, the solder ball bump is provided on a surface of the third packaging layer away from the first glass substrate, and The solder ball bumps are connected to the second metal connecting pillars through metal ball pads.
  7. 根据权利要求6所述的天线,其特征在于,所述天线还包括阻容器件,所述阻容器件设置在所述第三封装层内,并与所述第一天线层电连接。The antenna according to claim 6, wherein the antenna further comprises a blocking member, the blocking member is disposed in the third encapsulation layer and is electrically connected to the first antenna layer.
  8. 根据权利要求1所述的天线,其特征在于,所述第一天线层上设置有第一重新布线层。The antenna according to claim 1, wherein a first rewiring layer is provided on the first antenna layer.
  9. 根据权利要求1-8任一项所述的天线,其特征在于,所述天线还包括第二玻璃基板、第三天线层和第四封装层;The antenna according to any one of claims 1-8, wherein the antenna further comprises a second glass substrate, a third antenna layer, and a fourth encapsulation layer;
    所述第二玻璃基板设置于所述第二天线层远离所述第一玻璃基板的表面上,所述第三天线层设置于所述第二玻璃基板的远离所述第一玻璃基板的表面上,所述第四封装层覆盖所述第二玻璃基板的远离所述第一玻璃基板的表面及所述第三天线层。The second glass substrate is disposed on a surface of the second antenna layer away from the first glass substrate, and the third antenna layer is disposed on a surface of the second glass substrate away from the first glass substrate The fourth encapsulation layer covers the surface of the second glass substrate away from the first glass substrate and the third antenna layer.
  10. 根据权利要求9所述的天线,其特征在于,所述第二天线层上设置有第二重新布线层。The antenna according to claim 9, wherein a second rewiring layer is provided on the second antenna layer.
  11. 根据权利要求10所述的天线,其特征在于,所述第二重新布线层的厚度为3μm-10μm。The antenna according to claim 10, wherein the thickness of the second rewiring layer is 3 μm-10 μm.
  12. 根据权利要求9所述的天线,其特征在于,所述第一玻璃基板和所述第二玻璃基板的厚度为150μm-800μm。The antenna according to claim 9, wherein the thickness of the first glass substrate and the second glass substrate is 150 μm-800 μm.
  13. 根据权利要求1所述的天线,其特征在于,所述绝缘体内设置有导电过孔,所述 导电过孔与所述第一金属连接柱和所述第一天线层连接。The antenna according to claim 1, wherein a conductive via is provided in the insulator, and the conductive via is connected to the first metal connecting post and the first antenna layer.
  14. 一种终端,其特征在于,包括:电路板以及如权利要求1-13任一项所述的天线,所述天线与所述电路板连接。A terminal, characterized by comprising: a circuit board and the antenna according to any one of claims 1-13, and the antenna is connected to the circuit board.
  15. 一种天线封装方法,其特征在于,包括以下步骤:An antenna packaging method, characterized in that it comprises the following steps:
    提供支撑基底,所述支撑基底上设置有分离层;Providing a supporting substrate, the supporting substrate is provided with a separation layer;
    在所述分离层上形成第一天线层,并在所述第一天线层上形成第一金属连接柱;Forming a first antenna layer on the separation layer, and forming a first metal connecting pillar on the first antenna layer;
    形成覆盖所述第一天线层的第一封装层,所述第一金属连接柱远离分离层的一端暴露在所述第一封装层外;Forming a first encapsulation layer covering the first antenna layer, and one end of the first metal connecting pillar away from the separation layer is exposed outside the first encapsulation layer;
    提供第一玻璃基板,所述第一玻璃基板中设置有第一容置槽;Providing a first glass substrate, and a first accommodating groove is provided in the first glass substrate;
    将所述第一玻璃基板粘接在所述分离层上,所述第一金属连接柱放置于所述第一容置槽内,并使用绝缘材料填充所述第一容置槽以形成绝缘体;Bonding the first glass substrate to the separation layer, placing the first metal connecting column in the first accommodating groove, and filling the first accommodating groove with an insulating material to form an insulator;
    在所述第一玻璃基板的远离所述支撑基底的表面上形成第二天线层,以及形成覆盖所述第二天线层的第二封装层,所述第二天线层和所述第一金属连接柱电连接;A second antenna layer is formed on the surface of the first glass substrate away from the support base, and a second encapsulation layer covering the second antenna layer is formed, and the second antenna layer is connected to the first metal Column electrical connection;
    剥离所述分离层和所述支撑基底。The separation layer and the supporting substrate are peeled off.
  16. 根据权利要求15所述的天线封装方法,其特征在于,剥离所述分离层和所述支撑基底的步骤之后,所述天线封装方法还包括:The antenna packaging method according to claim 15, wherein after the step of peeling off the separation layer and the supporting substrate, the antenna packaging method further comprises:
    在所述第一天线层的远离所述第一玻璃基板的表面上接合射频芯片,所述射频芯片和所述第一天线层电连接。A radio frequency chip is bonded to a surface of the first antenna layer away from the first glass substrate, and the radio frequency chip is electrically connected to the first antenna layer.
  17. 根据权利要求16所述的天线封装方法,其特征在于,在所述第一天线层的远离所述第一玻璃基板的表面上接合射频芯片的步骤之后,所述天线封装方法还包括:The antenna packaging method of claim 16, wherein after the step of bonding a radio frequency chip on a surface of the first antenna layer away from the first glass substrate, the antenna packaging method further comprises:
    在所述第一天线层的远离所述第一玻璃基板的表面上形成第二金属连接柱;Forming a second metal connecting pillar on the surface of the first antenna layer away from the first glass substrate;
    形成覆盖所述射频芯片的第三封装层,所述第二金属连接柱远离所述第一玻璃基板的一端暴露在所述第三封装层外。A third packaging layer covering the radio frequency chip is formed, and an end of the second metal connecting pillar away from the first glass substrate is exposed outside the third packaging layer.
  18. 根据权利要求17所述的天线封装方法,其特征在于,在所述第一天线层的远离所述第一玻璃基板的表面上接合射频芯片的步骤之后,所述天线封装方法还包括:18. The antenna packaging method of claim 17, wherein after the step of bonding a radio frequency chip on a surface of the first antenna layer away from the first glass substrate, the antenna packaging method further comprises:
    在所述第一天线层的远离所述第一玻璃基板的表面上形成或贴装阻容器件;Forming or attaching a blocking container on the surface of the first antenna layer away from the first glass substrate;
    形成覆盖所述阻容器件以及所述第一天线层的远离所述第一玻璃基板的表面的第三封装层。A third encapsulation layer covering the blocking container member and the surface of the first antenna layer away from the first glass substrate is formed.
  19. 根据权利要求17或18所述的天线封装方法,其特征在于,所述天线封装方法还包括:The antenna packaging method according to claim 17 or 18, wherein the antenna packaging method further comprises:
    在所述第三封装层上形成金属球垫,所述金属球垫和所述第二金属连接柱电连接;Forming a metal ball pad on the third packaging layer, and the metal ball pad is electrically connected to the second metal connecting post;
    在所述金属球垫上形成焊球凸块。A solder ball bump is formed on the metal ball pad.
  20. 根据权利要求15所述的天线封装方法,其特征在于,在所述分离层上形成第一天线层后,所述天线封装方法还包括:在所述第一天线层上连接射频芯片;The antenna packaging method according to claim 15, wherein after the first antenna layer is formed on the separation layer, the antenna packaging method further comprises: connecting a radio frequency chip on the first antenna layer;
    在提供第一玻璃基板的步骤之后,所述天线封装方法还包括:在所述第一玻璃基板上开设第二容置槽;After the step of providing the first glass substrate, the antenna packaging method further includes: opening a second accommodating groove on the first glass substrate;
    在将所述第一玻璃基板粘接在所述分离层上的步骤包括:将所述射频芯片放置于所述第二容置槽内,并使用绝缘材料填充所述第二容置槽以形成所述绝缘体。The step of bonding the first glass substrate on the separation layer includes: placing the radio frequency chip in the second accommodating groove, and filling the second accommodating groove with an insulating material to form The insulator.
  21. 根据权利要求15所述的天线封装方法,其特征在于,所述天线封装方法还包括:The antenna packaging method of claim 15, wherein the antenna packaging method further comprises:
    提供第二玻璃基板;Provide a second glass substrate;
    将所述第二玻璃基板粘接在所述第二封装层上;Bonding the second glass substrate to the second packaging layer;
    在所述第二玻璃基板的远离所述第一玻璃基板的表面上形成第三天线层,以及形成覆盖所述第三天线层的第四封装层。A third antenna layer is formed on the surface of the second glass substrate away from the first glass substrate, and a fourth encapsulation layer covering the third antenna layer is formed.
  22. 一种天线封装方法,其特征在于,包括以下步骤:An antenna packaging method, characterized in that it comprises the following steps:
    提供第一玻璃基板和第二玻璃基板;Provide a first glass substrate and a second glass substrate;
    在所述第一玻璃基板中开设第一容置槽;Opening a first accommodating groove in the first glass substrate;
    在所述第二玻璃基板上形成第二天线层和位于所述第二天线层上的第一金属连接柱,以及形成覆盖所述第二天线层的第二封装层;Forming a second antenna layer and a first metal connecting post on the second antenna layer on the second glass substrate, and forming a second encapsulation layer covering the second antenna layer;
    将所述第一玻璃基板粘接在所述第二玻璃基板上,所述第一金属连接柱插装在所述第一容置槽内;Bonding the first glass substrate to the second glass substrate, and inserting the first metal connecting column into the first accommodating groove;
    使用绝缘材料填充所述第一容置槽以形成绝缘体;Filling the first accommodating groove with an insulating material to form an insulator;
    在所述第一玻璃基板的远离所述第二玻璃基板的表面上形成第一天线层,以及形成覆盖所述第一天线层的第一封装层;Forming a first antenna layer on the surface of the first glass substrate away from the second glass substrate, and forming a first encapsulation layer covering the first antenna layer;
    在所述第二玻璃基板的远离所述第一玻璃基板的表面上形成第三天线层,以及形成覆盖所述第三天线层的第四封装层。A third antenna layer is formed on the surface of the second glass substrate away from the first glass substrate, and a fourth encapsulation layer covering the third antenna layer is formed.
  23. 根据权利要求22所述的封装方法,其特征在于,所述天线封装方法还包括:The packaging method of claim 22, wherein the antenna packaging method further comprises:
    在所述第一天线层的远离所述第一玻璃基板的表面上形成连接射频芯片。A connection radio frequency chip is formed on the surface of the first antenna layer away from the first glass substrate.
  24. 根据权利要求23所述的封装方法,其特征在于,所述天线封装方法还包括:The packaging method of claim 23, wherein the antenna packaging method further comprises:
    在所述第一天线层的远离所述第一玻璃基板的表面上形成第二金属连接柱;Forming a second metal connecting pillar on the surface of the first antenna layer away from the first glass substrate;
    形成覆盖所述射频芯片和所述第一天线层的远离所述第一玻璃基板的表面的第三封装层,所述第二金属连接柱远离所述第一玻璃基板的的一端暴露在所述第三封装层外。A third encapsulation layer covering the radio frequency chip and the surface of the first antenna layer away from the first glass substrate is formed, and an end of the second metal connecting column away from the first glass substrate is exposed to the Outside the third encapsulation layer.
  25. 根据权利要求24所述的天线封装方法,其特征在于,所述天线封装方法还包括:在所述第三封装层上形成金属球垫,所述金属球垫和所述第二金属连接柱电连接;The antenna packaging method of claim 24, wherein the antenna packaging method further comprises: forming a metal ball pad on the third packaging layer, and the metal ball pad and the second metal connecting post are electrically connected to each other. connection;
    在所述金属球垫上形成焊球凸块。A solder ball bump is formed on the metal ball pad.
  26. 一种程序产品,其特征在于,所述程序产品包括计算机程序,所述计算机程序存储在可读存储介质中,通信装置的至少一个处理器可以从所述可读存储介质读取所述计算机程序,所述至少一个处理器执行所述计算机程序使得通信装置实施如权利要求15-21任意一项所述的方法或者如权利要求22-25任意一项所述的方法。A program product, characterized in that the program product includes a computer program, the computer program is stored in a readable storage medium, and at least one processor of a communication device can read the computer program from the readable storage medium The execution of the computer program by the at least one processor causes the communication device to implement the method according to any one of claims 15-21 or the method according to any one of claims 22-25.
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