WO2021073533A1

WO2021073533A1 - Adjustment apparatus of spatial light modulator and projection apparatus thereof

Info

Publication number: WO2021073533A1
Application number: PCT/CN2020/120897
Authority: WO
Inventors: 周建华; 周正平; 杜鹏; 李屹
Original assignee: 深圳光峰科技股份有限公司
Priority date: 2018-12-28
Filing date: 2020-10-14
Publication date: 2021-04-22
Also published as: CN111385549B; CN111385549A

Abstract

Provided in the present application are a projection apparatus, which comprises an adjustment apparatus of a spatial light modulator. The adjustment apparatus of a spatial light modulator comprises an optical machine housing, at least two spatial light modulator assemblies that are disposed on the optical machine housing and at least one adjustment member. At least one spatial light modulator assembly is connected onto the optical machine housing by means of the adjustment member, each spatial light modulator assembly comprises one spatial light modulator, and the adjustment member is used to adjust the position of the spatial light modulator in the spatial light modulator assembly connected thereto. Further provided in the present application is the adjustment apparatus of a spatial light modulator.

Description

Adjusting device of spatial light modulator and its projection device

Technical field

This application relates to the field of optics and projection technology, and in particular to an adjustment device of a spatial light modulator and a projection device including the adjustment device of the spatial light modulator.

Background technique

In many types of systems such as home projection, engineering projection and cinema projection, DMD is mainly used as the key output device for imaging. In the case of high-brightness output, a single DMD device will become very unstable when the temperature limit is exceeded due to heat dissipation limitations, so the use of multiple DMDs together becomes a good choice.

The key to the use of multiple DMDs is the overlap of the projection pixels. This not only requires precise adjustment of the relative position of two or more DMDs during installation, but also ensures that the entire machine can still maintain multiple DMDs after being installed and fixed. The pixel coincidence degree is adjusted to prevent the stress release of the structural parts around the DMD after installation, and the shrinkage during the glue curing process, which causes the projection pixels of multiple DMDs to be misaligned. Therefore, it is very critical to ensure the stable and reliable fixing method of the DMD after adjusting the position. On the one hand, it is necessary to ensure that the DMD components are firmly fixed and will not shift due to conventional forces and vibrations; on the other hand, it is necessary to ensure that the DMD components are fixed in a way that can effectively resist the different thermal expansion of the DMD surrounding structural parts due to different temperature conditions. The degree causes the dislocation of the DMD projected image. This is also a major problem faced by the entire multi-DMD projection field.

Summary of the invention

In view of this, the present application provides an adjusting device of a spatial light modulator and a projection device including the adjusting device of the spatial light modulator, so that the position of the spatial light modulator can be adjusted after being stably installed, ensuring multiple spaces The projected image pixels of the light modulator overlap.

To achieve this objective, the present application provides an adjusting device for a spatial light modulator, which includes an optical engine housing, at least two spatial light modulator components arranged on the optical engine housing, and at least one adjusting member, wherein at least A spatial light modulator assembly is connected to the optical machine housing through the adjusting member, and the adjusting member is used to adjust the position of the spatial light modulator in the connected spatial light modulator assembly. The present application also provides a projection device including the adjustment device of the above-mentioned spatial light modulator, and the projection device has all the functions and advantages of the adjustment device of the above-mentioned spatial light modulator.

This application, through the adjustment piece that integrates the fixed function and the adjustment function, realizes that the spatial light modulator can still be fine-tuned at the pixel level after being installed and fixed, so as to ensure that the pixels of the projected image of multiple spatial light modulators overlap, and can It effectively reduces the displacement of the modulator chip caused by temperature, force, vibration and other factors after installation, and improves the stability of the modulator chip installation.

Description of the drawings

In order to more clearly describe the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed in the embodiments. Obviously, the drawings in the following description are only some embodiments of the present application. A person of ordinary skill in the art can obtain other drawings based on these drawings without creative work.

FIG. 1 is a three-dimensional exploded schematic diagram of an adjusting device of a spatial light modulator in one of the embodiments of the present application.

Fig. 2 is a schematic diagram of the assembly of Fig. 1.

FIG. 3 is a perspective view of the three-dimensional structure of the opto-mechanical housing in FIG. 1 from one perspective.

FIG. 4 is a schematic diagram of the three-dimensional structure of the opto-mechanical housing in FIG. 3 from another viewing angle.

Fig. 5 is a perspective view of the three-dimensional structure of the adjusting member in Fig. 1.

Fig. 6 is a three-dimensional structural diagram of the adjusting member in Fig. 5 from another perspective.

Fig. 7 is a schematic diagram of the installation of the fine adjustment element and the adjustment piece in Fig. 1.

Figure 8 is a schematic diagram of the connection between the trimming element and the mounting plate.

Fig. 9 is a schematic diagram of the principle of adjusting the DMD assembly by rotating the fine-tuning element.

FIG. 10 is a three-dimensional structure diagram of the DMD device in FIG. 1 from one angle of view.

FIG. 11 is a schematic diagram of the three-dimensional structure of the DMD device in FIG. 10 from another perspective.

FIG. 12 is a perspective view of the three-dimensional structure of the driving board in FIG. 1.

FIG. 13 is a perspective view of the three-dimensional structure of the fixing plate in FIG. 1.

FIG. 14 is a three-dimensional structural diagram of the fixing plate in FIG. 13 from another perspective.

Fig. 15 is a partial assembly schematic diagram of Fig. 1.

FIG. 16 is a perspective view of the three-dimensional structure of the elastic insulating pad in FIG. 1.

FIG. 17 is a perspective view of the three-dimensional structure of the heat sink in FIG. 1.

FIG. 18 is a schematic diagram of the three-dimensional structure of the heat sink in FIG. 17 from another perspective.

Fig. 19 is a schematic diagram of the assembly of the DMD assembly in Fig. 2.

Fig. 20 is a partial cross-sectional view of the structure in Fig. 2.

FIG. 21 is a schematic diagram of the three-dimensional structure of the glass ring in FIG. 1 and FIG. 20.

Detailed ways

The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by a person of ordinary skill in the art without creative work shall fall within the protection scope of this application.

In the description of the embodiments of the present application, it should be understood that the terms "upper", "lower", "inner", "outer", "first", "second", "front", "back" and other terms are only It is for the convenience of describing the application and simplifying the description, rather than having an implied or indicative meaning, and therefore cannot be understood as a limitation to the application.

Please refer to FIG. 1 and FIG. 2 together. FIG. 1 is a three-dimensional exploded schematic diagram of an adjusting device of a spatial light modulator in one embodiment of the present application; FIG. 2 is an assembly schematic diagram of FIG. 1. The present application provides an adjusting device for a spatial light modulator, which includes an optical machine housing 100, at least two spatial light modulator assemblies 200 arranged on the optical machine housing 100, and at least one adjusting member 300, of which at least one The spatial light modulator assembly 200 is connected to the optical machine housing 100 through an adjusting member 300. Each spatial light modulator assembly 200 includes a spatial light modulator 1, and the adjusting member 300 is used for the spatial light modulator connected to it. The modulator chip 1 in the assembly 200 performs position adjustment.

It should be noted that this application will use the DMD spatial light modulator to describe and explain the adjustment device, but the adjustment device of the spatial light modulator is also applicable to the LCOS spatial light modulator.

For the convenience of description, the DMD assembly 200 described below is the spatial light modulator assembly 200, and the DMD device 1 is the spatial light modulator 1.

As shown in FIG. 1 and FIG. 2, in this embodiment, two DMD components 200 are fixedly installed on the optical machine housing 100, and each DMD component 200 includes a DMD device 1, The driving board 2, the fixing board 3, the radiator 4, and a number of connecting pieces 5 with limit parts are connected in a body and fixed on the optical engine housing 100. Specifically, one of the DMD components 200 is connected to the opto-mechanical housing 100 through an adjusting member 300; the other DMD component 200 is directly fixed to the opto-mechanical housing 100.

Please refer to FIG. 3 and FIG. 4 together. FIG. 3 is a three-dimensional structure diagram of the optical machine housing in FIG. 1 from one angle; FIG. 4 is a three-dimensional structure diagram of the optical machine housing in FIG. 3 from another angle.

As shown in FIGS. 3 and 4, in this embodiment, the optical machine housing 100 includes a roughly rectangular frame, and the rectangular frame includes four sidewalls 101, two of which are adjacent to each other. The side walls 101 are respectively used for fixing a DMD assembly 200. The outer surface of one of the side walls 101 used for directly fixing the DMD assembly 200 is provided with a mounting groove 102, and the mounting groove 102 is used for mounting the DMD device 1 in the DMD assembly 200. Specifically, the placement groove 102 is generally rectangular, the placement groove 102 does not penetrate the corresponding side wall 101, and a corner of the placement groove 102 is provided with a fitting notch 103; one of the side walls 101 is A number of positioning posts 104 and a number of bosses 114 are protrusively provided on the bottom surface of the placement groove 102. The positioning posts 104 and the bosses 114 are used for positioning when the DMD device 1 is installed; one of the side walls 101 is in the placement groove 102. There is also a regular rectangular light-transmitting hole 105 opened in the middle of the bottom surface of the light-transmitting hole 105, the light-transmitting hole 105 penetrates the corresponding side wall 101, and the positioning pillar 104 and the boss 114 are located around the light-transmitting hole 105; The outer surface of the wall 101 is respectively protruded at the four corners of the periphery of the placement groove 102 with protrusions 106 for fixing the corresponding driving board 2, and the end of each protrusion 106 is axially provided with a threaded hole; for fixing the DMD assembly 200 The outer surface of the other side wall 101 is provided with a light through hole 107, the other side wall 101 is provided with a lug 108 on the opposite sides of the light hole 107, and the outer surface of each lug 108 is provided There are several positioning posts 109, and the positioning posts 109 are used to install and fix the adjustment member 300 connected to the corresponding DMD assembly 200.

Preferably, in this embodiment, there are two positioning posts 104, the two positioning posts 104 are located at two opposite corners of the light-transmitting hole 105, and the number of bosses 114 is three. Three bosses 114 are symmetrically arranged around the light-transmitting hole 105 with respect to the center line of the light-transmitting hole 105, and the DMD device 1 can be quickly and stably installed in the mounting groove through the two positioning posts 104 on the bottom surface of the mounting groove 102 The three bosses 114 on the bottom surface of the placement groove 102 can position the DMD device 1 in the vertical direction.

In other embodiments, the number of the positioning posts 104 may be 3, 4, or other numbers; the number of the boss 114 may be 4 or more, so that the DMD device 1 can be installed smoothly, and the boss 114 It is also not necessary to symmetrically arrange the light-transmitting holes.

In other embodiments, the two side walls 101 for fixing the DMD assembly 200 on the opto-mechanical housing 100 can be configured with positioning posts 109, and the positioning posts 109 on each side wall 101 are used To connect an adjusting member 300.

In other embodiments, the adjustment device of the spatial light modulator may be applied to the three DMD assembly 200, and three of the four side walls 101 of the optical machine housing 100 are respectively mounted with one In the DMD assembly 200, at least one of the DMD assemblies 200 and the corresponding side wall 101 is provided with an adjusting member 300, and the other two DMD assemblies 200 and the corresponding side wall 101 may be provided with or without an adjusting member 300. It can be understood that when the optical machine housing 100 is installed with the three DMD assembly 200, its specific structure and shape and the setting angle of the side wall 101 should meet the actual application.

It should be noted that the opto-mechanical housing 100 also has other structural features, which are not described and illustrated because they are not related to the improvement of the present application.

Please refer to FIGS. 5 to 7 together. FIG. 5 is a three-dimensional structural diagram of the adjusting member in FIG. 1 from one perspective; FIG. 6 is a three-dimensional structural diagram of the adjusting member in FIG. 5 from another perspective; FIG. 7 is a diagram Installation diagram of fine-tuning components and adjustment parts in 1. As shown in FIGS. 5 to 7, the adjusting member 300 has a front surface 301 and a back surface 303, the front surface 301 is used for mounting the DMD device 1, and the back surface 303 is connected to the optical machine housing 100. Specifically, in this embodiment, the adjusting member 300 includes a substantially rectangular positioning plate 310, a mounting plate 330, and an adjusting ring 350 connected between the positioning plate 310 and the mounting plate 330. The DMD device 1 is mounted on On the mounting plate 330, adjusting the adjusting ring 350 can make the adjusting ring 350 displace and drive the mounting plate 330 to move, thereby driving the DMD device 1 to perform position adjustment.

Preferably, in this embodiment, the mounting plate 330 is arranged in the middle of the rectangular positioning plate 310.

In other embodiments, the positioning plate 310 can be in other shapes that meet the actual situation, such as an isosceles trapezoid, a diamond shape, etc.; the mounting plate 330 can also be set at other positions of the positioning plate 310 according to requirements, such as left or right. Set to the right.

The mounting plate 330 is provided with a seating groove 332, and the seating groove 332 has a fitting notch 331, a plurality of positioning posts 333, and a plurality of bosses 363. The DMD device 1 is installed in the seating groove 332. The adapter notch 331, the positioning post 333, and the boss 363 are used for mounting, guiding and positioning the DMD device 1; the mounting plate 330 is provided with a regular rectangular light-transmitting hole 335 on the bottom surface of the mounting groove 332, The light-transmitting hole 335 penetrates the mounting board 330. The four corners of the front surface of the mounting plate 330 are also provided with protruding posts 334 for mounting and fixing the corresponding driving plate 2. The end of each protruding post 334 is axially provided with threaded holes, and the threaded holes pass through the mounting plate 330. Wherein, the positioning post 333 and the boss 363 respectively have the same functions as the aforementioned positioning post 104 and the boss 114, and will not be repeated here.

The four corners of the positioning plate 310 are protrudingly provided with four connecting pieces 312 along the length direction of the positioning plate 310, and these connecting pieces 312 are used to mount the DMD assembly 200 connected to the adjusting member 300 on the opto-mechanical housing. 100 up. Specifically, each connecting piece 312 is provided with a stepped through hole 314, and the large hole of each stepped through hole 314 is opened on the front surface 301.

A generally rectangular receiving space 315 is opened in the middle of the front of the positioning plate 310. The adjusting ring 350 and the mounting plate 330 are both received in the receiving space 315, and the adjusting ring 350 is located around the outside of the mounting plate 330, so that the adjusting ring 350 A first adjusting groove 352 is formed between the positioning plate 310 and a second adjusting groove 354 is formed between the adjusting ring 350 and the mounting plate 330.

It can be understood that, in this embodiment, the receiving space 315 is set to be rectangular according to the shape of the rectangular positioning plate 310. In other embodiments, the accommodating space 315 can be set in other corresponding shapes according to the shape of the positioning plate 310, for example, it is set in an isosceles trapezoid like the positioning plate 310.

Further, the gap between the first adjusting groove 352 and the second adjusting groove 354 ranges from 0.5 mm to 1 mm.

Wherein, the first adjusting groove 352 extends along the peripheral surface of the inner wall of the accommodating space 315, and at least one elastic first connecting portion 355 for connecting the positioning plate 310 and the adjusting ring 350 is provided on the first adjusting groove 352, each The first connecting portion 355 has an elastic U-shaped structure. One end of the first connecting portion 355 is connected to the positioning plate 310, and the other end is connected to the adjusting ring 350; the second adjusting groove 354 is along the inner wall of the adjusting ring 350. The second adjusting groove 354 is provided with at least one elastic second connecting portion 357 for connecting the mounting plate 330 and the adjusting ring 350. Each second connecting portion 357 is also a U-shaped structure with elasticity. One end of the second connecting portion 357 is connected to the mounting plate 330, and the other end is connected to the adjusting ring 350.

Specifically, in this embodiment, the first adjusting groove 352 is provided with a U-shaped first connecting portion 355 at the middle positions of the opposite ends of the adjusting ring 350, and one end of each first connecting portion 355 is connected to the positioning The other end of the inner wall surface of the receiving space 315 of the plate 310 is connected to the outer wall surface of the adjusting ring 350, so that the adjusting ring 350 and the positioning plate 310 are connected as a whole; the second adjusting groove 354 is located at two opposite sides of the adjusting ring 350 The sides (different from the two sides where the first connecting portion 355 is located) are respectively provided with second connecting portions 357 having a U-shaped structure near the four corners, and one end of each second connecting portion 357 is connected to the peripheral surface of the outer wall of the mounting plate 330 On the upper side, the other end is connected to the inner wall peripheral surface of the adjusting ring 350, so that the mounting plate 330 and the adjusting ring 350 are integrally connected. Further, the positioning plate 310, the adjusting ring 350, and the mounting plate 330 are connected in one body through the first connecting portion 355 and the second connecting portion 357.

It should be noted that, in this embodiment, the adjusting ring 350 has two inner and outer wall peripheral surfaces, wherein the wall peripheral surface closer to the inner placement groove 332 is defined as the inner wall peripheral surface of the adjusting ring 350, and the other wall peripheral surface The surface is defined as the peripheral surface of the outer wall of the adjusting ring 350; the mounting plate 330 has only one wall peripheral surface, and is opposed to the inner wall peripheral surface of the adjusting ring 350, which is defined as the peripheral surface of the outer wall of the mounting plate 330, and the peripheral surface of the mounting plate 330 There is a second adjusting groove 354 between the peripheral surface of the outer wall and the peripheral surface of the inner wall of the adjusting ring 350; similarly, the accommodating space 315 has only one wall peripheral surface, and is spaced opposite to the peripheral surface of the adjusting ring 350, defining it It is the inner wall peripheral surface of the receiving space 315, and a first adjusting groove 352 is interposed between the inner wall peripheral surface of the receiving space 315 and the outer wall peripheral surface of the adjusting ring 350.

In one embodiment, the adjusting ring 355 is a rectangular ring body, including two X-direction sides and two Y-direction side surfaces, where the X-direction is perpendicular to the Y-direction. The first adjusting groove 352 is provided on the opposite X-direction side of the adjusting ring 350 with one group (2) or two groups (4) of the first connecting portion 355 in a U-shaped structure, and the second adjusting groove 354 is in the adjusting ring. One set (2) or two (4) second connecting portions 357 in a U-shaped structure are respectively provided on the opposite Y-direction sides of 350. In FIG. 6, the X-direction side of the adjustment ring 350 is provided with a set of first connecting portions 355, and the adjusting ring 350Y is provided with a set of second connecting portions 357 on the side thereof.

In other embodiments, the number of the first connecting portions 355 between the adjusting ring 350 and the positioning plate 310 and the number of the second connecting portions 357 between the adjusting ring 350 and the mounting plate 330 may also be other actual numbers. The position of the first connecting portion 355 can also be set at any position between the adjusting ring 350 and the positioning plate 310 as required, such as two opposite corners, two adjacent sides, opposite sides, etc.; the second connecting portion The position of 357 can also be set at other positions between the adjusting ring 350 and the mounting plate 330 as required, such as the centers of opposite sides; the first connecting portion 355 and/or the second connecting portion 357 can also be uniform or non-uniform. Arrange evenly.

In other embodiments, the first connecting portion 355 and the second connecting portion 357 may have other shapes, such as a V shape, a rectangular shape with an opening, an S shape, etc., and only one end of the first connecting portion 355 is connected to the adjusting ring. 350, the other end is connected to the positioning plate 310; one end of the second connecting portion 357 is connected to the adjusting ring 350, and the other end is connected to the mounting plate 330.

In other embodiments, the adjusting member 300 may also be provided with only the first adjusting groove 352 and the corresponding first connecting portion 355 as required, or more connecting grooves and corresponding connecting portions may be provided as required.

One long side and/or at least one short side of the positioning plate 310 close to the fitting notch 331 is also provided with a threaded hole for inserting the fine adjustment element 400, the fine adjustment element 400 is used to push the mounting plate 330 Or adjusting ring 350. Specifically, in this embodiment, a first threaded hole 316 is provided at the middle position of the long side of the positioning plate 310 close to the fitting notch 331, and a first threaded hole 316 is provided at the middle position of the two short sides of the positioning plate 310. The second threaded hole 318, the adjusting ring 350 is provided with a through hole 356 at a position corresponding to the first threaded hole 316, and the first adjusting groove 352 and the second adjusting groove 354 are connected at the through hole 356, so that the first The fine adjustment element 400 installed in a threaded hole 316 can directly push the mounting plate 330 through the through hole 356; correspondingly, the fine adjustment element 400 installed in the second threaded holes 318 on the two short sides can push the adjustment ring 350. The adjusting ring 350 has a convex platform 359 on the front surface 301 corresponding to the notch 356, and the platform 359 is used to ensure that the adjusting ring 350 is still integrated at the notch 356.

Specifically, as shown in FIG. 7, in this embodiment, the fine adjustment element 400 is a screw, because there is a first adjustment groove 352 between the adjustment ring 350 and the positioning plate 310, and the adjustment ring 350 and the positioning plate 310 are separated from each other. They are connected by two first connecting parts 355. Therefore, when the fine adjustment screw 400 in the second threaded hole 318 on any short side of the positioning plate 310 is pushed against the adjusting ring 350, the two first connecting parts 355 will meet The elastic deformation occurs so that the adjusting ring 350 can move in the first adjusting groove 352 along a horizontal plane parallel to the positioning plate 310, so that the position of the adjusting ring 350 relative to the positioning plate 310 is changed, that is, the position of the adjusting ring 350 It can be fine-tuned relative to the positioning plate 310 to drive the mounting plate 330 integrated with the adjusting ring 350 to move; similarly, when the fine-tuning screw 400 in the first threaded hole 316 on the long side of the positioning plate 310 is screwed, it is directly When the mounting plate 330 is pushed against, the four second connecting portions 357 will also be elastically deformed, and the adjusting ring 350 and the mounting plate 330 that are connected together will have corresponding displacements. The adjusting ring 350 can be positioned in the first adjusting groove 352 and the first adjusting groove 352 The second adjusting groove 354 moves along the horizontal plane parallel to the positioning plate 310, and the mounting plate 330 is driven to move in the second adjusting groove 354 along the horizontal plane parallel to the positioning plate 310, so that the mounting plate can be moved. The position of the 330 relative to the positioning plate 310 changes.

It should be noted that turning the fine adjustment screw 400 to change the position of the mounting plate 330 relative to the positioning plate 310 refers to adjusting the fine adjustment screw 400 installed in the first threaded hole 316 and/or the second threaded hole 318 The degree of tightness is used to change the magnitude of the thrust force, thereby changing the amount of elastic deformation caused by it, so that the position of the mounting plate 330 can be adjusted. Further, in this embodiment, the DMD device 1 is installed in the mounting groove 332 of the mounting plate 330, and the position of the mounting plate 330 can be fine-tuned by turning the fine-adjusting screw 400, that is, the position of the mounting plate 330 can be fine-tuned by turning the fine-adjusting screw 400. The position of DMD device 1 is fine-tuned.

Preferably, in this embodiment, the fine-tuning element 400, that is, the fine-tuning screw, can also be sleeved with a spring, through which the elastic force enables the fine-tuning screw to better engage and position the threaded hole, so that the adjusted mounting plate 330 There is no displacement under the action of no external force, and the stability of the DMD device 1 is ensured.

In other embodiments, the fine-tuning element 400 may not be sleeved with a spring; the fine-tuning element 400 may also be a screw.

In other embodiments, the adjustment ring 350 may not have a through hole 356, and the fine adjustment element 400 is directly used to push the adjustment ring 350 to drive the mounting plate 330 to change position, or the adjustment ring 350 corresponds to The position of the first threaded hole 316 is also provided with a through hole, so that the fine adjustment element 400 installed in the first threaded hole 316 can also directly push the mounting plate 330.

In another embodiment, a first through hole is opened at the center of the long side (Y-direction side) of the positioning plate 310, and the adjusting ring 350 is provided with a second through hole at a position corresponding to the first through hole. The mounting plate 330 is provided with a threaded hole at a position corresponding to the second through hole, and the fine adjustment element 400 is threadedly connected to the threaded hole in the mounting plate 330 through the first through hole and the second through hole. , Rotating the fine-tuning element 400, the second connecting portion 357 will be elastically deformed, and the mounting plate 330 will move in the X direction or the -X direction.

A third through hole is opened at the center of the short side (X-side side) of the positioning plate 310 (the third through hole has the same function as the first through hole opened on the long side of the positioning plate 310. To distinguish, define Is the third through hole), the adjusting ring 350 is provided with a threaded hole at a position corresponding to the third through hole, the fine adjusting element 400 is threadedly connected to the threaded hole in the adjusting ring 350 after passing through the third through hole, and rotates In the fine-tuning element 400, the first connecting portion 357 will be elastically deformed, and the mounting plate 330 will move in the Y direction or the -Y direction.

It should be noted that, in the above embodiment, as shown in FIG. 8, the through hole on the positioning plate 310 is a counterbore with an inner stepped surface, and the positioning plate 310 is on the peripheral side of the through hole. A first locking portion is provided, and the first locking portion is a pair of pressing pieces 410 screwed to the positioning plate 310 by screws, and the pair of pressing pieces 410 are arranged symmetrically about the through hole; The fine-tuning element 400 is provided with a second locking portion, and the second locking portion is a convex ring 420 that is arranged around the fine-tuning element 400. When the fine-tuning element 400 passes through the through hole, it is connected to the corresponding threaded hole. During the threaded connection, the pair of pressing pieces 410 abuts on one side of the convex ring 420, and the opposite side of the convex ring 420 abuts on the inner step surface, so that the fine adjustment element 400 cannot Moves relative to the positioning plate 310 along the axial direction of the through hole, so that when the fine adjustment element 400 is screwed, the fine adjustment element 400 only rotates relative to the positioning plate 310 without relative movement, thereby changing The meshing length between the fine adjustment element 400 and the corresponding threaded hole is used to drive the mounting plate 330 to move.

In other embodiments, the positioning plate 310 and the fine-tuning element 400 may be locked in other ways to achieve relative rotation between the two without relative movement. For example, the second locking part is Opened in the ring groove of the fine-tuning element 400, the pair of pressing pieces are clamped into the ring groove, and the fine-tuning element 400 can also be rotated only relative to the positioning plate 310 without moving along the axis of the through hole. Relative movement in the direction.

In the above embodiment, the fine adjustment element 400 may be a fine adjustment screw.

In another embodiment, as shown in FIG. 9, two fine-tuning elements 400 are installed on the long side (Y-direction side) of the positioning plate 310, and the two fine-tuning elements 400 are rotated in opposite directions to realize the alignment of the DMD assembly 200. The two fine-tuning elements 400 are rotated in opposite directions to adjust the engagement lengths between the two fine-tuning elements 400 and their corresponding threaded holes respectively, thereby driving the mounting plate 330 to make a relative rotational movement on the XY plane. , The second connecting portion 357 is elastically deformed, thereby causing the DMD assembly 200 to make a relative rotational movement on the XY plane. The embodiment shown in FIG. 9 realizes the rotation adjustment of the DMD.

By the same principle, two fine-tuning elements 400 can also be installed on the short side (X-direction side) of the positioning plate 310. By rotating the two fine-tuning elements 400 in different directions, the first connecting portion 355 is generated. The elastic deformation causes the DMD assembly 200 to make a relative rotational movement on the XY plane.

Please refer to FIG. 10 and FIG. 11 together. FIG. 10 is a three-dimensional structure diagram of the DMD device in FIG. 1 from one perspective; FIG. 11 is a three-dimensional structure diagram of the DMD device in FIG. 10 from another perspective. As shown in FIG. 10 and FIG. 11, the DMD device 1 is rectangular and has a front surface 11 and a back surface 13, and a corner of the DMD device 1 has a matching notch 15. A mounting positioning hole 12 and a micro-mirror reflective area 14 are provided on the front side 11 of the DMD device 1; a heat dissipation area 16 is provided in the middle of the back side of the DMD device 1 corresponding to the micro-mirror reflective area 14, and the DMD device 1 The back surface of the DMD device 1 is provided with positioning posts 17 at opposite ends of the heat dissipation area 16 respectively, and the back surface of the DMD device 1 is also provided with a conductive contact array 18 around the heat dissipation area 16.

In this embodiment, through the positioning cooperation of the positioning hole 12 and the positioning post 104, and the guidance of the adapting missing corner 15 and the adapting missing corner 103, one of the DMD devices 1 can be quickly installed on the In the placement groove 102 of the optical engine housing 100; and through the positioning and matching of the positioning hole 12 and the positioning post 333, and the guidance of the adapting missing corner 15 and the adapting missing corner 331, another DMD device can be 1 Quickly install in the mounting groove 332 of the adjusting member 300.

It can be understood that, in order to make the light of the light source in the projector pass through the light-transmitting hole 105 in the installation groove 102 and the light-transmitting hole 335 in the installation groove 332, it is irradiated on the micro-mirror reflective area 14 of the DMD device 1 Above, the shape and size of the light-transmitting hole 105 and the light-transmitting hole 335 need to match with the micro-mirror reflective area 14 on the DMD device 1.

Preferably, in this embodiment, the DMD device 1 performs three-point positioning in the vertical direction through three bosses provided on the bottom surface of the corresponding placement groove, and performs horizontal positioning through the cooperation between the positioning column and the positioning hole. Positioning, the positioning column and the positioning hole are arranged in two groups in cooperation

In other embodiments, the DMD device 1 and the positioning posts and positioning holes of the corresponding placement grooves can be set in three groups or other numbers according to the situation; the bosses can be set symmetrically to four or more according to the situation, and they are horizontal. Positioning in the direction.

In other embodiments, the installation and positioning structure between the DMD device 1 and the corresponding placement groove may also be a positioning pin and a positioning hole. In the case of multiple sets of positioning, it may also be a positioning column and a positioning hole, a positioning pin and a positioning hole. Use of holes.

Further preferably, in this embodiment, after the DMD device 1 is stably installed in the installation groove 102 of the optical machine housing 100 and the installation groove 332 of the adjusting member 300, there may be provided between the DMD device 1 and the installation board 330 A circle of natural curing glue is used to seal the inside of the optical engine housing 100 and prevent dust.

Please refer to FIG. 12. FIG. 12 is a perspective view of the three-dimensional structure of the driving board in FIG. 1. As shown in Figure 12, the drive board 2 has a front face 21 and a corresponding back face 23. The front face 21 of the drive board 2 is provided with a positioning hole 22 that matches the positioning post 17 on the DMD device 1. The column 17 can pass through the positioning hole 22 and be further installed and positioned with the fixing plate 3; the front face 21 of the driving plate 2 is also provided with positioning holes 24 for fitting with the fixing plate 3, screw through holes 26, and A through hole 28 for the positioning post 109 on the optical engine housing 100 to pass through, and a through hole 29 corresponding to the heat dissipation area 16 of the DMD device 1.

Specifically, in the embodiment of the present application, after the DMD device 1 is stably installed in the installation groove 102 and/or the installation groove 332, the corresponding driving board 2 passes through the positioning column 17 and the positioning The positioning of the hole 22 is matched and pressed on the DMD device 1. The front face 21 of the driving board 2 is in contact with the back face 13 of the DMD device 1, and the DMD device 1 is connected to the driving board through the conductive contact array 18 and the driving board with a 2-point electrical connection. connection.

Please refer to FIGS. 13 and 14. FIG. 13 is a three-dimensional structural diagram of the fixing plate in FIG. 1 from one view angle; FIG. 14 is a three-dimensional structural diagram of the fixing plate in FIG. 13 from another view angle. As shown in Figures 13 and 14, the fixing plate 3 is in the shape of an I-shape, the fixing plate 3 has a corresponding front 31 and a back 33, and a positioning post 32 is provided on the front 31 of the fixing plate 3, and The positioning holes 34 on the DMD device 1 are matched with the positioning posts 17. The middle part of the back 33 of the fixing plate 3 is also provided with through holes 35, screw through holes 36 at the four corners, and protruding posts 38 for fixing and installing the radiator 4, and the end of each protruding post 38 is axially opened There is a threaded hole, and the threaded hole penetrates the fixing plate 3.

Specifically, please refer to FIG. 15 together, which is a partial assembly diagram of FIG. 1. As shown in FIG. 15, when assembling the DMD assembly 200 connected to the optical machine housing 100 through the adjusting member 300, the DMD device 1 is first received in the seating groove 332 of the adjusting member 300, and the driving board 2 is laminated on the adjusting member 300. On the front surface 301, the fixed plate 3 is laminated on the back 23 of the drive plate 2 facing away from the adjusting member 300. The fixed plate 3 passes through the fit between the positioning posts 32 and the positioning holes 24 on the drive plate 2, and the positioning holes 34 are connected to the DMD device 1. The upper positioning posts 17 are pressed against the driving board 2 by the positioning cooperation; the front 31 of the fixing board 3 is in contact with the back 23 of the driving board 2, and then the four sets of set screws 51 are passed through the fixing board 3 in turn. The screw through holes 36 on the upper and the screw through holes 26 on the driving board 2 are matched with the threaded holes of the corresponding protrusion 334 on the adjusting member 300, so that the driving board 2 is fixed on the adjusting member 300, and the DMD device 1 is clamped It is pressed and positioned in the seating groove 332 of the adjusting member 300 to ensure that the DMD device 1 and the driving board 2 are in close contact.

Similarly, when assembling the DMD assembly 200 directly connected to the optical machine housing 100, first place the DMD device 1 in the placement slot 102 of the optical machine housing 100, stack the driving board 2 on the DMD device 1, and then fix it. The board 3 is stacked on the driving board 2, and the four sets of the set screws 51 are passed through the screw through holes 36 on the fixing board 3 and the screw through holes 26 on the driving board 2 in sequence, and then they are connected with the convex on the optical engine housing 100. The threaded holes of the column 106 are matched to fix the driving board 2 on the optical engine housing 100, and the DMD device 1 is pressed by the driving board 2 into the seating groove 102 of the optical engine housing 100.

Please refer to FIG. 16. FIG. 16 is a perspective view of the three-dimensional structure of the elastic insulating pad in FIG. 1.

Preferably, an elastic insulating pad 7 is further provided between each driving plate 2 and the corresponding fixing plate 3, and the elastic insulating pad 7 may be one of a rubber pad or a silicone pad. The shape of the elastic insulating pad 7 is consistent with the shape of the fixing plate 3. The elastic insulating pad 7 is mainly used to prevent the drive plate 2 from being short-circuited, and can also be used to prevent the fixing plate 3 from abrading the drive plate 2.

Correspondingly, as shown in FIG. 16, the elastic insulating pad 7 is provided with a gourd through hole 71 for the positioning post 32 on the fixing plate 3 and the set screw 51 to pass through together, and the set screw 51 through holes 72 that pass through separately, and through holes 73 through which the positioning posts 17 on the DMD device 1 pass. The elastic insulating pad 7 is also provided with a through hole corresponding to the through hole 35 of the fixing plate 3孔74.

Further preferably, as shown in FIG. 1, in this embodiment, a gasket 8 may be provided between each set screw 51 and the corresponding fixing plate 3. The gasket 8 may be a metal shrapnel or a rubber shrapnel. Or silicone shrapnel, etc.

Through the positioning of the multiple sets of positioning posts and positioning holes and the fastening of the set screws 51, accurate and stable installation of the fixing board 3, the driving board 2, and the DMD device 1 are ensured.

In other embodiments, the mating structure for mounting and positioning between the fixing plate 3, the driving plate 2, and the DMD device 1 may also be a type including positioning pins, positioning holes, and elastic buckles. , It can also be a combination structure of positioning column, positioning pin and positioning hole.

Similarly, in other embodiments, the shape of the fixing plate 3 and the elastic insulating pad 7 can also be made into other shapes that meet the actual application conditions, such as a rectangle, and only need to be provided with positioning holes, through holes, penetrating holes and other corresponding structures. feature.

Please refer to FIGS. 17 and 18 together. FIG. 17 is a schematic view of the three-dimensional structure of the heat sink in FIG. 1 from one perspective; FIG. 18 is a schematic view of the three-dimensional structure of the heat sink in FIG. 17 from another perspective. As shown in FIGS. 17 and 18, each heat sink 4 includes a connecting block 41 and a heat sink 48 connected to the connecting block 41. A side 42 of the connecting block 41 facing the fixing plate 3 protrudes The heat-conducting block 43 is used to conduct the heat on the DMD device 1 to the heat sink 48 so as to dissipate the heat of the DMD device 1. Specifically, in this embodiment, the heat conducting block 43 passes through the through hole 35 on the fixing plate 3, the through hole 74 on the elastic insulating pad 7 and the through hole 29 on the drive plate 2 in sequence, and then interacts with the The heat dissipation area 16 on the back 13 of the DMD device 1 is close to each other to dissipate the heat of the DMD device 1. The side 42 of the connecting block 41 facing the fixing plate 3 is further provided with a gourd hole 45, and the side 44 of the connecting block 41 facing away from the fixing plate 3 is provided with a plurality of connecting holes 47 with stepped surfaces 46. One part communicates with the connecting hole 47, and the other part has a countersunk shape. The middle portion of the side 44 of the connecting block 41 facing away from the fixing plate 3 is provided with two connecting grooves 442 along the length direction of the connecting block 41. The heat sink 48 includes two heat pipes 482 and a number of heat dissipation fins 484. One end of the two heat pipes 482 is connected to the two connection grooves 442 of the connecting block 41, and a number of heat dissipation fins 484 are connected in a layered manner. At the other end of the two heat pipes 482. The heat generated by the DMD device 1 is conducted to the heat dissipation fins 484 through the heat conduction block 43, the connection block 41 and the heat conduction tube 482, and these heat dissipation fins 484 can accelerate the dissipation of the heat generated by the DMD device 1.

It should be noted that the penetration holes 35, the penetration holes 74, and the penetration holes 29 through which the heat conducting block 43 sequentially passes are all disposed at positions corresponding to the heat dissipation area 16, wherein the penetration hole 74 The and through holes 35 are respectively arranged at the center positions of the elastic insulating pad 7 and the fixing plate 3.

It can be understood that, in other embodiments, when the fixing plate 3 and the elastic insulating pad 7 have other shapes, the penetration hole 35 and the penetration hole 74 may also be arranged in other corresponding positions other than the central position.

Preferably, in this embodiment, a layer of thermal conductive silicone grease is filled between the thermal conductive block 43 and the heat dissipation area 16 of the DMD device 1 to improve the heat dissipation efficiency.

In other embodiments, other thermally conductive materials such as thermally conductive pads may be filled between the thermally conductive block 43 and the heat dissipation area 16 of the DMD device 1.

Please refer to FIG. 19 and FIG. 20 together. FIG. 19 is an assembly diagram of the DMD assembly in FIG. 2; FIG. 20 is a partial cross-sectional view of the structure in FIG. As shown in Figures 19 and 20, in this embodiment, the four sets of set screws 52 with springs 9 respectively pass through the connecting holes 47 on the connecting block 41 and then connect to the corresponding protruding posts 38 on the fixing plate 3. The threaded holes are matched to fix the radiator 4 on the fixing plate 3. Among them, one end of each spring 9 abuts against the nut of the set screw 52, and the other end abuts against the step surface 46 on the connecting hole 47. The part of the sink groove on the connecting block 41 where the gourd hole 45 and the connecting hole 47 are not connected corresponds to the position of the set screw 51, and there is a certain gap between the nut of the set screw 51.

It should be noted that the spring 9 and the above-mentioned gasket 8, the elastic insulating pad 7 and other elastic parts are in a certain compressed state after stable assembly to ensure that the components are tightly fitted, and at the same time, the external force and vibration are reduced by its elastic deformation. The forces generated by other unstable factors are offset, thereby further ensuring the accuracy and stability of the assembly of the DMD assembly 200.

In addition, the elastic deformation of the above-mentioned elastic member can also disperse and offset the force generated when the tightening screw 51 and/or the tightening screw 52 are tightened, so as to avoid directly applying force to the DMD device 1 to protect the DMD device 1.

It can be understood that, in this embodiment, the connecting member 5 with the limiting portion is specifically a set screw 51 and a set screw 52. The set screw 51, the set screw 52, and the screw-fitted opening are provided with threads. The convex posts of the holes are arranged correspondingly and reasonably distributed on the corresponding parts. The number of the set screws 51 and/or the set screws 52 can also be other than the four groups, which can be set according to the actual application. .

In other embodiments, the connecting member 5 with the limiting portion may also be a fastening structure member other than a tightening screw, including but not limited to an elastic hook.

Please refer to FIG. 2 and FIG. 20 together. In this embodiment, the DMD device 1, the driving board 2, the fixing board 3, the heat sink 4, and the connecting member 5 with a limit portion in each DMD assembly 200 are in accordance with The above-mentioned matching method is connected in one body; one of the DMD components 200 is directly fixed to the optical machine housing 100 through the cooperation of the set screw 51 and the threaded hole of the corresponding boss 106, and the other DMD component 200 is directly fixed to the optical machine housing 100 through the set screw 51 The adjusting member 300 is carried on the adjusting member 300 in cooperation with the threaded hole of the corresponding boss 334.

Further, as shown in FIG. 20, in the embodiment of the present application, the adjusting device of the spatial light modulator further includes a plurality of glass rings 500, and the glass rings 500 are sleeved on the corresponding parts of the optomechanical housing 100 On the positioning post 109 and abutting against the stepped surface in the stepped through hole 314 on the positioning plate 310, and the glass ring 500 is used to fix the adjusting member 300 connected with the DMD assembly 200 to the optical engine housing 100 .

Please refer to FIGS. 5 and 21 together. FIG. 21 is a schematic diagram of the three-dimensional structure of the glass ring in FIGS. 1 and 20. Specifically, as shown in FIG. 5, the stepped through hole 314 includes a first hole and a second hole communicating with the first hole, and the diameter of the first hole is greater than or equal to the outer diameter of the glass ring 500 The diameter of the second hole is greater than or equal to the diameter of the positioning pillar 109 but less than the outer diameter of the glass ring 500, and the inner diameter of the glass ring 500 is greater than or equal to the diameter of the positioning pillar 109. During installation and cooperation, the lower surface 501 of the glass ring 500 abuts against the stepped surface in the stepped through hole 314, and there is a certain gap between the glass ring 500, the positioning column 109 and the adjusting member 300.

Further, in the embodiment of the present application, the gap between the glass ring 500 and the positioning post 109 of the optomechanical housing 100, and the gap between the glass ring 500 and the stepped through hole 314 of the adjusting member 300 are both It is coated with a light-curable adhesive, and is irradiated and cured with a light beam of a specific wavelength, so that the adjusting member 300 connected with the DMD assembly 200 is fixed on the optical machine housing 100.

Preferably, in this embodiment, the light-curing adhesive adopts an adhesive with a small shrinkage rate and a small thermal expansion coefficient during the curing process. Specifically, it may be an ion-polymerized epoxy resin UV glue. The light beam is one of ultraviolet light and visible light.

As shown in FIG. 21, the glass ring 500 has a lower surface 501 in contact with the step surface of the stepped through hole 314, and an inner side surface 502 opposite to the cylindrical surface of the positioning column 109, and also has a lower surface 501 and The inner side 502 is opposite to the upper surface 503 and the outer side 504. Wherein, the inner side surface 502 includes two inner chamfered surfaces and an inner cylindrical surface (not shown in the figure), and the outer side surface 504 includes two outer chamfered surfaces and an outer cylindrical surface (not shown in the figure).

Preferably, in this embodiment, the lower surface 501 and the inner side surface 502 of the glass ring 500 are rough surfaces, so that the UV smeared between the glass ring 500 and the positioning column 109 and the adjusting member 300 The glue has better bonding strength, and the upper surface 503 and the outer side surface 504 of the glass ring 500 are polished surfaces, so that the light beam of the specific wavelength can fully irradiate the glue application position.

In other embodiments, the lower surface 501 and the inner side surface 502 of the glass ring 500 may also be processed to increase the roughness including but not limited to scribing stripes, sandblasting, etc., so as to make the UV glue bonding strength better.

It should be noted that, in this embodiment, the adjusting member 300 and the positioning column 109 are made of materials with a thermal expansion coefficient similar to that of the glass ring, so that the structural member adjusting member 300 and the glass ring around the DMD device 1 The rhythm of the thermal expansion of 500 and the positioning column 109 is basically the same, which ensures that the projection image pixels of the multiple DMD devices 1 coincide.

Preferably, both the adjusting member 300 and the positioning post 109 can be made of Kovar alloy.

In summary, in the embodiment of the present application, the complete assembly method of the adjusting device of the spatial light modulator is specifically as follows:

First, one of the DMD devices 1 is installed in the placement groove 102 of the optomechanical housing 100 through the positioning holes 12 on the front surface 11 and the positioning posts 104 on the optomechanical housing 100, and the other DMD device 1 passes through the The positioning hole 12 and the positioning post 333 on the adjusting member 300 are fitted in the positioning groove 332 of the adjusting member 300. After the DMD device 1 is stably installed, a circle is set around the DMD device 1 for sealing and dustproof natural curing glue.

Then, through the cooperation between the positioning holes 22 on the driving board 2 and the positioning posts 17 on the back 13 of the DMD device 1, the driving board 2 is pressed on the corresponding DMD device 1, between the DMD device 1 and the driving board 2. Point-type electrical connection.

In order to prevent the driving board 2 from being abraded or short-circuited, the elastic insulating pad 7 is preferably attached to the back 23 of the driving board 2 away from the DMD device 1 through the cooperation between the through holes 73 and the positioning posts 17 on the DMD device 1. Subsequently, the fixing plate 3 is pressed against the elastic insulating pad by the cooperation between the positioning post 32 and the positioning hole 24 on the driving board 2, and the positioning cooperation between the positioning hole 34 and the positioning post 17 on the DMD device 1. On the drive plate 2 of 7, the front 31 of the fixed plate 3 is opposite to the back 23 of the drive plate 2, and the four sets of set screws 51 covered with spacers 8 are passed through the screw through

holes

36 and 36 on the fixed plate 3 in turn. The screw through holes 26 on the driving board 2 are matched with the threaded holes of the corresponding protrusions 334 on the adjusting member 300, so that a driving board 2 is fixed on the adjusting member 300, and the DMD device 1 is clamped and positioned on the adjusting member. 300 within 332; similarly, the four sets of the set screws 51 are passed through the screw through holes 36 on the fixing plate 3 and the screw through holes 26 on the drive plate 2 in turn, and then connect with the convex post on the optical engine housing 100 The threaded holes of 106 are matched to fix a driving board 2 on the optomechanical housing 100, and the DMD device 1 is pressed by the driving board 2 into the seating groove 102 of the optomechanical housing 100.

Then, the heat conducting block 43 on the radiator 4 passes through the fixing plate 3, the elastic insulating pad 7 and the penetration holes on the drive plate 2 in turn to be close to the heat dissipation area 16 on the back of the DMD device 1, and then the spring 9 is covered The four sets of fixing screws 52 pass through the connecting holes 47 on the connecting block 41 of the radiator 4, and the tightening screws 52 are matched with the threaded holes of the boss 38 on the fixing plate 3 to fix the radiator 4 on the fixing plate 3. .

Through the above steps, one of the DMD components 200 is completely fixed on the optical machine housing 100, and the other DMD component 200 is carried on the adjusting member 300.

Finally, through the cooperation between the stepped through hole 314 on the adjusting member 300 and the positioning post 109 on the optomechanical housing 100, the adjusting member 300 carrying the DMD assembly 200 is connected to the optomechanical housing 100. After determining that the images projected by the two DMD devices 1 are completely overlapped, the four glass rings 500 are correspondingly sleeved on each positioning post 109 of the optical engine housing 100 to compress the adjusting member 300 and the adjusting member The stepped surface in the stepped through hole 314 of 300 abuts against each other. Apply UV glue to the gap between the glass ring 500, the positioning pillar 109 and the adjusting member 300, and irradiate it with ultraviolet light to cure it, thereby carrying the DMD The adjusting member 300 of the device 100 is also fixed on the optical machine housing 100.

Above, the two DMD assemblies 200 in the embodiment of the present application are both fixed on the optical machine housing 100, which realizes the stable assembly of the components in the entire adjustment device of the spatial light modulator.

Further, during the use of the adjustment device of the spatial light modulator, the fine adjustment element 400 installed in the second threaded hole 318 on the adjustment member 300 can be twisted to push the adjustment ring 350 on the adjustment member 300 to make It is deformed, which in turn drives the position of the mounting plate 330 relative to the positioning plate 310 to change, or by screwing the fine adjustment element 400 installed in the first threaded hole 316 of the adjusting member 300 to directly push the mounting plate 330 to change its position. In this way, the pixel-level position fine adjustment of the DMD device 1 installed in the mounting board 330 is realized, and the projection images of the multiple DMD components 200 can be accurately overlapped. That is, the adjustment device of the spatial light modulator can also be used for subsequent correction and adjustment.

It can be understood that, in the above-mentioned embodiment, the complete assembly method of the adjustment device of the spatial light modulator is described by using the dual DMD assembly 200 as an example. In other embodiments, the above-mentioned spatial light modulator The adjustment device and the installation method can also be applied to more than two DMD assemblies 200, which will not be repeated here.

Similarly, the adjustment device of the spatial light modulator can also be applied to an LCOS spatial light modulator including multiple LCOS chips.

In addition, the adjustment device of the spatial light modulator described in the embodiments of the present application can also be applied to a projection device, so that a projection device applying the adjustment device of the above-mentioned spatial light modulator also has the advantages of the adjustment device of the above-mentioned spatial light modulator. All features and advantages.

The above are the preferred embodiments of this application. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of this application, several improvements and modifications can be made, and these improvements and modifications are also considered. The scope of protection of this application.

Claims

An adjusting device of a spatial light modulator, characterized in that the adjusting device of the spatial light modulator comprises an optical machine housing, at least two spatial light modulator components arranged on the optical machine housing, and at least An adjusting member, wherein at least one of the spatial light modulator components is connected to the optical machine housing through the adjusting member, each of the spatial light modulator components includes a spatial light modulator, and the adjusting member is used for Adjust the position of the spatial light modulator in the connected spatial light modulator assembly.
The adjusting device of the spatial light modulator according to claim 1, wherein the adjusting member includes a positioning plate, a mounting plate, and an adjusting ring connected between the positioning plate and the mounting plate, and The spatial light modulator is installed on the mounting plate, and the adjusting ring is adjusted so that the adjusting ring is displaced to drive the mounting plate to move, so as to drive the spatial light modulator to perform position adjustment.
The adjusting device of the spatial light modulator according to claim 2, wherein the positioning plate is provided with a receiving space, the adjusting ring is arranged around the mounting plate, and the mounting plate and the adjusting ring are one And housed in the accommodating space.
The adjustment device of the spatial light modulator according to claim 3, wherein a first adjustment groove is formed between the adjustment ring and the positioning plate, and the adjustment ring is arranged along a horizontal plane parallel to the positioning plate. The upper moving position in the first adjusting groove drives the moving position of the mounting plate.
The adjusting device of the spatial light modulator according to claim 4, wherein the first adjusting groove is provided with at least one first connecting portion for connecting the positioning plate and the adjusting ring, and at least one The first connecting portion has elasticity, and the adjusting ring is moved in the first adjusting groove through the elastic deformation of the first connecting portion.
The adjusting device of the spatial light modulator according to claim 5, wherein a second adjusting groove is formed between the adjusting ring and the mounting plate, and the adjusting ring can be adjusted between the first adjusting groove and the second adjusting groove. Move the position in the groove to drive the moving position of the mounting plate.
The adjusting device of the spatial light modulator according to claim 6, wherein the second adjusting groove is provided with at least one second connecting portion for connecting the mounting plate and the adjusting ring, and at least one The second connecting portion has elasticity, and the adjusting ring is moved in the second adjusting groove through the elastic deformation of the second connecting portion.
7. The adjusting device of the spatial light modulator according to claim 7, wherein one end of the first connecting portion is connected to the adjusting ring, and the other end of the first connecting portion is connected to the positioning plate; One end of the second connecting portion is connected to the adjustment ring, and the other end of the second connecting portion is connected to the mounting plate.
8. The adjusting device of the spatial light modulator according to claim 8, wherein the first connecting portion and the second connecting portion have a U-shaped structure, a V-shaped structure, a rectangular structure with an opening, or an S-shaped structure.
The adjusting device of the spatial light modulator according to claim 2, characterized in that, a long side and/or at least one short side of the positioning plate is provided with a threaded hole for inserting a fine adjustment element, and the screw The fine adjustment element movably installed in the threaded hole can push the adjustment ring to move the adjustment ring to drive the mounting plate to move.
The adjustment device of the spatial light modulator according to claim 10, wherein the adjustment ring is provided with a through hole corresponding to at least one of the threaded holes, and the fine adjustment member inserted in the at least one threaded hole passes through The through hole can push the mounting board.
The adjustment device of the spatial light modulator according to claim 2, wherein a first through hole for the fine adjustment element to pass through is opened on one long side and/or at least one short side of the positioning plate , The positioning plate is provided with a first engagement portion on the peripheral side of the first through hole, the adjustment ring is provided with a first threaded hole at a position corresponding to the first through hole; the fine adjustment element is provided The second locking part, the fine adjustment element penetrates the first through hole and is threadedly connected with the first threaded hole, the first locking part and the second locking part are correspondingly locked to prevent The fine adjustment element moves relative to the positioning plate along the axial direction of the first through hole; the adjustment ring is driven to move by screwing the fine adjustment element, thereby driving the mounting plate to move.
The adjusting device of the spatial light modulator according to claim 12, wherein the adjusting ring is provided with a second through hole at a position corresponding to the first through hole, and the mounting plate is connected to the second through hole. A second threaded hole is opened at a position corresponding to the through hole, and a fine adjustment element threadedly connected to the second threaded hole through the first through hole and the second through hole drives the mounting plate to move.
3. The adjusting device of the spatial light modulator according to claim 2, wherein a mounting groove is formed on the mounting plate, and the spatial light modulator is accommodated in the mounting groove.
The adjusting device of the spatial light modulator according to claim 2, wherein the adjusting device of the spatial light modulator further comprises a plurality of glass rings, and the glass rings are sleeved on corresponding positions of the optical engine housing The glass ring is used to fix the adjusting member connected with the spatial light modulator assembly on the optical engine housing.
The adjustment device of the spatial light modulator according to claim 15, wherein the gap between the glass ring and the positioning column, and the gap between the glass ring and the stepped through hole They are coated with light-curing adhesives and irradiated and cured by light beams of specific wavelengths.
The adjusting device of the spatial light modulator according to claim 16, wherein the lower surface and the inner side surface of the glass ring are rough surfaces, and the upper surface and the outer side surface of the glass ring are polished surfaces.
A projection device, characterized by comprising the adjustment device of the spatial light modulator according to any one of claims 1 to 17.