CN111385549B

CN111385549B - Adjusting device of spatial light modulator and projection device thereof

Info

Publication number: CN111385549B
Application number: CN201910975494.8A
Authority: CN
Inventors: 周建华; 周正平; 杜鹏; 李屹
Original assignee: Appotronics Corp Ltd
Current assignee: Shenzhen Appotronics Corp Ltd
Priority date: 2018-12-28
Filing date: 2019-10-14
Publication date: 2023-10-10
Anticipated expiration: 2039-10-14
Also published as: WO2021073533A1; CN111385549A

Abstract

The application provides a projection device, which comprises a regulating device of a spatial light modulator, wherein the regulating device of the spatial light modulator comprises an optical machine shell, at least two spatial light modulator assemblies arranged on the optical machine shell and at least one regulating piece, wherein the at least one spatial light modulator assembly is connected to the optical machine shell through the regulating piece, each spatial light modulator assembly comprises a spatial light modulator, and the regulating piece is used for regulating the position of the spatial light modulator in the spatial light modulator assembly connected with the spatial light modulator assembly. The application also provides a device for adjusting the spatial light modulator.

Description

Adjusting device of spatial light modulator and projection device thereof

Technical Field

The present application relates to the field of optical and projection technologies, and in particular, to an adjusting device for a spatial light modulator and a projection apparatus including the adjusting device for the spatial light modulator.

Background

DMD is mainly used as a key output device for imaging in various systems such as home projection, engineering projection, and cinema projection. Under the condition of high brightness output, the single DMD device becomes unstable when exceeding the temperature limit due to heat dissipation limitation, so that the cooperation of multiple DMDs becomes a good choice.

The key point of the cooperation of the multiple DMDs is that the heights of projection pixels are overlapped, so that the relative positions of two or more DMDs are precisely adjusted during installation, the pixel overlap ratio of the multiple DMDs can be still kept to be adjusted after the whole machine is installed and fixed, and the projection pixels of the multiple DMDs are misplaced due to the fact that stress release exists on structural members around the DMDs after the installation, shrinkage exists in the glue solidification process and the like. Thus, it is critical to ensure a stable and reliable fixation after the DMD is well positioned. On one hand, the fixing of the DMD component is required to be ensured to be firm, and the position deviation caused by conventional stress and vibration is avoided; on the other hand, the fixing mode of the DMD component needs to be ensured to be capable of effectively resisting dislocation of projection images of the DMD caused by different thermal expansion degrees of structural members around the DMD under different temperature conditions. This is also a significant challenge currently commonly faced in the entire multi-DMD projection field.

Disclosure of Invention

In view of the above, the present application provides an adjusting device for a spatial light modulator and a projection device including the adjusting device for a spatial light modulator, so that the spatial light modulator can be stably installed and still be adjusted to ensure that the projected image pixels of a plurality of spatial light modulators overlap.

In order to achieve the object, the application provides an adjusting device of a spatial light modulator, which comprises a light machine shell, at least two spatial light modulator assemblies arranged on the light machine shell, and at least one adjusting piece, wherein the at least one spatial light modulator assembly is connected to the light machine shell through the adjusting piece, and the adjusting piece is used for adjusting the position of the spatial light modulator in the spatial light modulator assemblies connected with the adjusting piece. The application also provides a projection device comprising the adjusting device of the spatial light modulator, and the projection device has all the functions and advantages of the adjusting device of the spatial light modulator.

The application realizes that the spatial light modulator can still carry out pixel-level fine adjustment on the position of the spatial light modulator after being installed and fixed by the adjusting piece integrating the fixing function and the adjusting function, ensures the superposition of pixels of projection images of a plurality of spatial light modulators, can effectively reduce the displacement of the modulator chip caused by the influence of factors such as temperature, force, vibration and the like after being installed, and improves the installation stability of the modulator chip.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is an exploded perspective view of an adjusting device of a spatial light modulator according to an embodiment of the present application.

Fig. 2 is an assembled schematic view of fig. 1.

Fig. 3 is a schematic perspective view of one view of the optical engine housing in fig. 1.

Fig. 4 is a schematic perspective view of another view of the optical engine housing in fig. 3.

Fig. 5 is a schematic perspective view of one view of the adjusting member in fig. 1.

Fig. 6 is a perspective view of another view of the regulating member of fig. 5.

FIG. 7 is a schematic view of the installation of the trim element and adjuster of FIG. 1.

FIG. 8 is a schematic illustration of the attachment of the trim element to the mounting plate.

Fig. 9 is a schematic diagram of the principle of the micro-device rotation adjustment DMD assembly.

Fig. 10 is a schematic perspective view of one view of the DMD device of fig. 1.

Fig. 11 is a schematic perspective view of another view angle of the DMD device in fig. 10.

Fig. 12 is a schematic perspective view of one view of the driving plate in fig. 1.

Fig. 13 is a schematic perspective view of one view of the fixing plate in fig. 1.

Fig. 14 is a perspective view of another view of the fixing plate of fig. 13.

Fig. 15 is a schematic view of the partial assembly of fig. 1.

Fig. 16 is a schematic perspective view of one view of the elastic insulating pad in fig. 1.

Fig. 17 is a schematic perspective view of one view of the heat sink in fig. 1.

Fig. 18 is a schematic perspective view of another view of the heat sink of fig. 17.

Fig. 19 is an assembled schematic view of the DMD assembly in fig. 2.

Fig. 20 is a partial structural cross-sectional view of fig. 2.

Fig. 21 is a schematic perspective view of the glass ring of fig. 1 and 20.

Detailed Description

The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without any inventive effort, are intended to be within the scope of the application.

In describing embodiments of the present application, it should be understood that terms such as "upper", "lower", "inner", "outer", "first", "second", "front", "back", and the like are merely for convenience in describing the present application and simplifying the description, and are not intended to have a implication or indicative meaning, and thus should not be construed as limiting the present application.

Referring to fig. 1 and fig. 2 together, fig. 1 is an exploded perspective view of an adjusting device of a spatial light modulator according to an embodiment of the application; fig. 2 is an assembled schematic view of fig. 1. The application provides an adjusting device of a spatial light modulator, comprising an optical machine shell 100, at least two spatial light modulator assemblies 200 arranged on the optical machine shell 100, and at least one adjusting piece 300, wherein at least one spatial light modulator assembly 200 is connected to the optical machine shell 100 through the adjusting piece 300, each spatial light modulator assembly 200 comprises a spatial light modulator 1, and the adjusting piece 300 is used for adjusting the position of a modulator chip 1 in the spatial light modulator assembly 200 connected with the spatial light modulator assembly.

It should be noted that the present application will be described and illustrated with respect to the adjustment device of a DMD spatial light modulator, but the adjustment device of the spatial light modulator is equally applicable to an LCOS spatial light modulator.

For convenience of description, the DMD assembly 200 is hereinafter referred to as a spatial light modulator assembly 200, and the DMD device 1 is referred to as a spatial light modulator 1.

As shown in fig. 1 and 2, in the present embodiment, two DMD assemblies 200 are fixedly mounted on the optical engine housing 100, and the DMD device 1, the driving board 2, the fixing board 3, the heat sink 4 and the plurality of connectors 5 with limiting portions included in each DMD assembly 200 are integrally connected to the optical engine housing 100. Specifically, one DMD assembly 200 is connected to the housing 100 through an adjusting member 300; the other DMD assembly 200 is directly fixed to the camera housing 100.

Referring to fig. 3 and fig. 4 together, fig. 3 is a schematic perspective view of one view of the optical engine housing in fig. 1; fig. 4 is a schematic perspective view of another view of the optical engine housing in fig. 3.

As shown in fig. 3 and 4, in the present embodiment, the optical engine housing 100 includes a generally rectangular frame, and the rectangular frame includes four sidewalls 101, where two adjacent sidewalls 101 are respectively used to fix a DMD assembly 200. A mounting groove 102 is formed on the outer surface of one of the side walls 101 for directly fixing the DMD assembly 200, and the mounting groove 102 is used for mounting the DMD device 1 in the DMD assembly 200. Specifically, the placement groove 102 is approximately rectangular, the placement groove 102 does not pass through the corresponding side wall 101, and an adaptation unfilled corner 103 is formed at one corner of the placement groove 102; a plurality of positioning columns 104 and a plurality of bosses 114 are arranged on the bottom surface of the mounting groove 102 in a protruding way, and the positioning columns 104 and the bosses 114 are used for positioning when the DMD device 1 is mounted; a regular rectangular light hole 105 is further formed in the middle of the bottom surface of the placement groove 102 on one of the side walls 101, the light hole 105 penetrates through the corresponding side wall 101, and the positioning column 104 and the boss 114 are located around the light hole 105; the outer surface of one side wall 101 is respectively provided with convex columns 106 at four corners of the periphery of the mounting groove 102 in a protruding manner, wherein the convex columns 106 are used for fixing the corresponding driving plates 2, and the end part of each convex column 106 is axially provided with a threaded hole; the outer surface of the other side wall 101 for fixing the DMD assembly 200 is provided with a light passing hole 107, two opposite sides of the other side wall 101 opposite to the light passing hole 107 are respectively provided with a convex lug 108 in a protruding mode, the outer surface of each convex lug 108 is provided with a plurality of positioning columns 109, and the positioning columns 109 are used for installing and fixedly connecting the adjusting piece 300 of the corresponding DMD assembly 200.

Preferably, in this embodiment, two positioning columns 104 are disposed, the two positioning columns 104 are disposed at two opposite angles of the light hole 105, the three bosses 114 are disposed in three, and the three bosses 114 are symmetrically disposed around the light hole 105 about a center line of the light hole 105, and the DMD device 1 can be quickly and stably mounted in the mounting groove 102 and positioned in a horizontal direction through the two positioning columns 104 on the bottom surface of the mounting groove 102, and the three bosses 114 on the bottom surface of the mounting groove 102 can perform positioning in a vertical direction on the DMD device 1.

In other embodiments, the positioning posts 104 may be 3, 4, or other numbers; the bosses 114 may be 4 or more in number to smoothly mount the DMD device 1, and the bosses 114 may not be symmetrically disposed about the light-transmitting holes.

In other embodiments, two side walls 101 of the optical engine housing 100 for fixing the DMD assembly 200 may be configured with positioning posts 109, and the positioning posts 109 on each side wall 101 are used to connect to an adjusting member 300.

In other embodiments, the adjusting device of the spatial light modulator may be applied to three DMD assemblies 200, where one DMD assembly 200 is mounted on each of three sidewalls 101 of the four sidewalls 101 of the optical engine housing 100, and an adjusting member 300 is disposed between at least one DMD assembly 200 and the corresponding sidewall 101, and an adjusting member 300 may or may not be disposed between the other two DMD assemblies 200 and the corresponding sidewall 101. It will be appreciated that, when the optical engine housing 100 is provided with the three DMD assemblies 200, the specific structural configuration and the arrangement angle of the sidewalls 101 thereof should be suitable for practical applications.

It should be noted that the optical engine housing 100 also has other structural features, and is not described and illustrated because it is not related to the improvement of the present application.

Referring to fig. 5 to fig. 7, fig. 5 is a schematic perspective view of one view of the adjusting member in fig. 1; FIG. 6 is a schematic perspective view of another view of the adjustment member of FIG. 5; FIG. 7 is a schematic view of the installation of the trim element and adjuster of FIG. 1. As shown in fig. 5 to 7, the regulator 300 has a front surface 301 and a back surface 303, the front surface 301 is used for mounting the DMD device 1, and the back surface 303 is connected to the optical engine housing 100. Specifically, in this embodiment, the adjusting member 300 includes a positioning plate 310, a mounting plate 330, and an adjusting ring 350 connected between the positioning plate 310 and the mounting plate 330, where the DMD device 1 is mounted on the mounting plate 330, and the adjusting ring 350 is adjusted to displace the adjusting ring 350 to drive the mounting plate 330 to displace, so as to drive the DMD device 1 to perform position adjustment.

Preferably, in this embodiment, the mounting plate 330 is disposed in the middle of the rectangular positioning plate 310.

In other embodiments, the positioning plate 310 may have other shapes, such as isosceles trapezoid, diamond, etc., which are consistent with practical situations; the mounting plate 330 may also be positioned at other locations of the positioning plate 310, such as left or right, as desired.

The mounting plate 330 is provided with a mounting groove 332, the mounting groove 332 is internally provided with an adaptation unfilled corner 331, a plurality of positioning columns 333 and a plurality of bosses 363, the DMD device 1 is mounted in the mounting groove 332, and the adaptation unfilled corner 331, the positioning columns 333 and the bosses 363 are used for mounting, guiding and positioning the DMD device 1; the mounting plate 330 has a regular rectangular light hole 335 formed on the bottom surface of the mounting groove 332, and the light hole 335 penetrates the mounting plate 330. The four corners of the front surface of the mounting plate 330 are further provided with protruding columns 334 for mounting and fixing the corresponding driving plate 2, and the end part of each protruding column 334 is axially provided with a threaded hole, and the threaded hole penetrates through the mounting plate 330. The positioning posts 333 and the boss 363 have the same functions as the positioning posts 104 and the boss 114, respectively, and will not be described herein.

Four connecting pieces 312 are protruded along the length direction of the positioning plate 310 at four corners of the positioning plate 310, and the connecting pieces 312 are used for installing the DMD assembly 200 connected to the adjuster 300 on the optical machine housing 100. Specifically, each connecting piece 312 is provided with a stepped through hole 314, and a large hole of each stepped through hole 314 is formed on the front surface 301.

The positioning plate 310 has a rectangular receiving space 315 formed in the middle of the front surface, the adjusting ring 350 and the mounting plate 330 are both received in the receiving space 315, and the adjusting ring 350 is disposed around the mounting plate 330, so that a first adjusting groove 352 is formed between the adjusting ring 350 and the positioning plate 310, and a second adjusting groove 354 is formed between the adjusting ring 350 and the mounting plate 330.

It is understood that in this embodiment, the accommodating space 315 is configured as a rectangle according to the shape of the rectangular positioning plate 310. In other embodiments, the receiving space 315 may be configured in other corresponding shapes according to the shape of the positioning plate 310, for example, each of the receiving spaces is configured as an isosceles trapezoid like the positioning plate 310.

Further, the gap between the first adjusting groove 352 and the second adjusting groove 354 is in the range of 0.5mm-1mm.

The first adjusting groove 352 extends along the inner wall of the accommodating space 315, at least one elastic first connecting portion 355 for connecting the positioning plate 310 and the adjusting ring 350 is provided on the first adjusting groove 352, each first connecting portion 355 has an elastic U-shaped structure, one end of the first connecting portion 355 is connected to the positioning plate 310, and the other end is connected to the adjusting ring 350; the second adjusting groove 354 extends along the inner wall of the adjusting ring 350, at least one elastic second connecting portion 357 for connecting the mounting plate 330 and the adjusting ring 350 is provided on the second adjusting groove 354, each second connecting portion 357 has a flexible U-shaped structure, one end of the second connecting portion 357 is connected to the mounting plate 330, and the other end is connected to the adjusting ring 350.

Specifically, in the present embodiment, the first adjusting grooves 352 are respectively provided with first connecting portions 355 having a U-shaped structure at middle positions of opposite ends of the adjusting ring 350, one end of each first connecting portion 355 is connected to the inner circumferential surface of the accommodating space 315 of the positioning plate 310, and the other end is connected to the outer circumferential surface of the adjusting ring 350, so that the adjusting ring 350 and the positioning plate 310 are integrally connected; the second adjusting grooves 354 are respectively provided with second connecting portions 357 having a U-shaped structure at positions adjacent to four corners on opposite sides (different from the two side surfaces where the first connecting portions 355 are located) of the adjusting ring 350, and one end of each second connecting portion 357 is connected to the outer circumferential surface of the mounting plate 330, and the other end is connected to the inner circumferential surface of the adjusting ring 350, so that the mounting plate 330 and the adjusting ring 350 are integrally connected. Further, the positioning plate 310, the adjusting ring 350, and the mounting plate 330 are integrally coupled by the first coupling portion 355 and the second coupling portion 357.

In this embodiment, the adjusting ring 350 has an inner wall surface and an outer wall surface, wherein the wall surface closer to the inner mounting groove 332 is defined as the inner wall surface of the adjusting ring 350, and the other wall surface is defined as the outer wall surface of the adjusting ring 350; the mounting plate 330 has only one wall peripheral surface and is opposite to the inner wall peripheral surface of the adjusting ring 350 at intervals, and is defined as an outer wall peripheral surface of the mounting plate 330, and a second adjusting groove 354 is arranged between the outer wall peripheral surface of the mounting plate 330 and the inner wall peripheral surface of the adjusting ring 350; similarly, the accommodating space 315 has only one wall peripheral surface, and is opposite to the outer wall peripheral surface of the adjusting ring 350, and is defined as an inner wall peripheral surface of the accommodating space 315, and a first adjusting groove 352 is disposed between the inner wall peripheral surface of the accommodating space 315 and the outer wall peripheral surface of the adjusting ring 350.

In one embodiment, adjustment ring 355 is a rectangular ring body, comprising 2X-direction sides and 2Y-direction sides, wherein the X-direction is perpendicular to the Y-direction. The first adjusting groove 352 is provided with a group of (2) or two groups of (4) first connecting parts 355 having a U-shaped structure on opposite X-directional sides of the adjusting ring 350, and the second adjusting groove 354 is provided with a group of (2) or two groups of (4) second connecting parts 357 having a U-shaped structure on opposite Y-directional sides of the adjusting ring 350, respectively. In fig. 6, a set of first connection portions 355 are provided on the X-direction side of the adjustment ring 350, and two sets of second connection portions 357 are provided on the Y-direction side of the adjustment ring 350.

In other embodiments, the number of first connections 355 between the adjustment ring 350 and the positioning plate 310, and the number of second connections 357 between the adjustment ring 350 and the mounting plate 330 may be other numbers as practical; the first connection portion 355 may be disposed at any position between the adjusting ring 350 and the positioning plate 310, such as two opposite corners, two adjacent sides, two opposite sides, etc., as required; the second connection portion 357 may be disposed at other positions between the adjusting ring 350 and the mounting plate 330, such as the centers of opposite sides, etc., as required; the first connection portion 355 and/or the second connection portion 357 may be uniformly or non-uniformly arranged.

In other embodiments, the first connection portion 355 and the second connection portion 357 may have other shapes, such as V-shape, rectangular shape with an opening, S-shape, etc., only one end of the first connection portion 355 is connected to the adjusting ring 350, and the other end is connected to the positioning plate 310; one end of the second connection portion 357 may be connected to the adjusting ring 350, and the other end may be connected to the mounting plate 330.

In other embodiments, the adjusting member 300 may be provided with only the first adjusting groove 352 and the corresponding first connecting portion 355, or with more connecting grooves and corresponding connecting portions, as needed.

The positioning plate 310 is further provided with a threaded hole near a long side and/or at least a short side of the fitting unfilled corner 331 for accommodating the trimming member 400, and the trimming member 400 is used for pushing against the mounting plate 330 or the adjusting ring 350. Specifically, in this embodiment, the positioning plate 310 is provided with a first threaded hole 316 at a position near the middle of the long side of the adapting unfilled corner 331, a second threaded hole 318 is provided at a position near the middle of the two short sides of the positioning plate 310, a through hole 356 is provided at a position of the adjusting ring 350 corresponding to the first threaded hole 316, and the first adjusting groove 352 and the second adjusting groove 354 are communicated at the through hole 356, so that the trimming element 400 installed in the first threaded hole 316 can directly push against the mounting plate 330 through the through hole 356; correspondingly, the trimming member 400 received in the second threaded holes 318 on both short sides can push against the adjusting ring 350. The adjustment ring 350 has a raised platform 359 on the front face 301 at a location corresponding to the notch 356, the platform 359 being adapted to ensure that the adjustment ring 350 remains integral at the notch 356.

Specifically, as shown in fig. 7, in the embodiment, the fine adjustment element 400 is a screw, since the first adjustment groove 352 is formed between the adjustment ring 350 and the positioning plate 310, and the adjustment ring 350 is connected to the positioning plate 310 through the two first connection portions 355, when the fine adjustment screw 400 in the second threaded hole 318 on any short side of the positioning plate 310 is screwed to push the adjustment ring 350 against, the two first connection portions 355 are elastically deformed, so that the adjustment ring 350 can move in the first adjustment groove 352 along a horizontal plane parallel to the positioning plate 310, so that the position of the adjustment ring 350 relative to the positioning plate 310 is changed, that is, the position of the adjustment ring 350 can be finely adjusted relative to the positioning plate 310, and the mounting plate 330 integrally connected with the adjustment ring 350 is driven to move; similarly, when the fine adjustment screw 400 in the first threaded hole 316 on the long side of the positioning plate 310 is screwed to directly push the mounting plate 330, the four second connection portions 357 are elastically deformed, and the adjusting ring 350 and the mounting plate 330 connected together are correspondingly displaced, so that the adjusting ring 350 can move along the horizontal plane parallel to the positioning plate 310 in the first adjusting groove 352 and the second adjusting groove 354, and the mounting plate 330 is driven to move along the horizontal plane parallel to the positioning plate 310 in the second adjusting groove 354, thereby changing the position of the mounting plate 330 relative to the positioning plate 310.

It should be noted that, screwing the fine adjustment screw 400 to change the position of the mounting plate 330 with respect to the positioning plate 310 means that the degree of tightness of the fine adjustment screw 400 installed in the first threaded hole 316 and/or the second threaded hole 318 is adjusted to change the amount of the pushing force, thereby changing the amount of elastic deformation caused by the pushing force, and realizing the position adjustment of the mounting plate 330. Further, in this embodiment, the DMD device 1 is mounted in the mounting groove 332 of the mounting plate 330, and screwing the trimming screw 400 can make the position of the mounting plate 330 fine-tuned, that is, screwing the trimming screw 400 can make the mounted DMD device 1 fine-tuned.

Preferably, in this embodiment, the fine tuning element 400, i.e. the fine tuning screw, may be further sleeved with a spring, and the fine tuning screw and the threaded hole are better engaged and positioned by using the elastic force of the fine tuning element, so that the adjusted mounting plate 330 may not displace under the action of no external force, and the stability of the DMD device 1 is ensured.

In other embodiments, the trimming member 400 may not be spring-loaded; the trimming member 400 may also be a screw.

In other embodiments, the adjusting ring 350 may not have a through hole 356, and the trimming element 400 is directly used to push the adjusting ring 350 to drive the mounting plate 330 to change its position, or the adjusting ring 350 may have a through hole corresponding to the first threaded hole 316, so that the trimming element 400 installed in the first threaded hole 316 may also directly push the mounting plate 330.

In another embodiment, a first through hole is formed in the center of the long side (Y-direction side) of the positioning plate 310, a second through hole is formed in the adjusting ring 350 at a position corresponding to the first through hole, a threaded hole is formed in the mounting plate 330 at a position corresponding to the second through hole, the trimming member 400 is screwed into the threaded hole in the mounting plate 330 after passing through the first through hole and the second through hole, the trimming member 400 is rotated, the second connecting portion 357 is elastically deformed, and the mounting plate 330 is moved in the X direction or the-X direction.

A third through hole (the third through hole has the same function as the first through hole formed on the long side of the positioning plate 310, and is defined as a third through hole for distinguishing) is formed at the center of the short side (X-direction side) of the positioning plate 310, the adjusting ring 350 is provided with a threaded hole at a position corresponding to the third through hole, the trimming element 400 is screwed into the threaded hole in the adjusting ring 350 after passing through the third through hole, the trimming element 400 is rotated, the first connecting portion 357 is elastically deformed, and the mounting plate 330 is moved along the Y direction or the-Y direction.

In the above embodiment, as shown in fig. 8, the through hole on the positioning plate 310 is a countersunk hole with an inner step surface, the positioning plate 310 is provided with a first fastening portion on the periphery of the through hole, the first fastening portion is a pair of pressing pieces 410 screwed on the positioning plate 310 by screws, and the pair of pressing pieces 410 are axisymmetrically arranged about the through hole; the fine tuning element 400 is provided with a second clamping portion, the second clamping portion is a convex ring 420 which is annularly arranged on the fine tuning element 400, when the fine tuning element 400 passes through the through hole and is in threaded connection with a corresponding threaded hole, the pair of pressing pieces 410 are abutted against one side of the convex ring 420, and the opposite side of the convex ring 420 is abutted against the inner step surface, so that the fine tuning element 400 cannot move relative to the positioning plate 310 along the axial direction of the through hole, and when the fine tuning element 400 is screwed, the fine tuning element 400 only rotates relative to the positioning plate 310 without relative movement, and further the meshing length between the fine tuning element 400 and the corresponding threaded hole is changed, so as to drive the mounting plate 330 to move.

In other embodiments, the positioning plate 310 and the trimming member 400 may be relatively rotated without relative movement by other fastening means, for example, the second fastening portion is a ring groove formed in the trimming member 400, and the pair of pressing pieces are fastened into the ring groove, so that the trimming member 400 may only rotate relative to the positioning plate 310 without relative movement along the axial direction of the through hole.

In the above embodiment, the trimming member 400 may be a trimming screw.

In another embodiment, as shown in fig. 9, two micro-adjustment elements 400 are installed on the long side (Y-direction side) of the positioning plate 310, and the two micro-adjustment elements 400 are rotated reversely to adjust the DMD assembly 200, wherein the two micro-adjustment elements 400 are rotated reversely to adjust the engagement length between the two micro-adjustment elements 400 and the corresponding threaded holes respectively, so as to drive the mounting plate 330 to perform a relative rotation motion on the XY plane, and at this time, the second connection portion 357 is deformed elastically, so that the DMD assembly 200 performs a relative rotation motion on the XY plane. The embodiment shown in fig. 9 achieves rotational adjustment of the DMD.

In the same principle, two micro-adjustment elements 400 may be mounted on the short side (X-direction side) of the positioning plate 310, and by rotating the two micro-adjustment elements 400 in different directions, the first connection portion 355 is elastically deformed, so that the DMD assembly 200 performs a relative rotation motion on the XY plane.

Referring to fig. 10 and 11 together, fig. 10 is a schematic perspective view of one view of the DMD device in fig. 1; fig. 11 is a schematic perspective view of another view angle of the DMD device in fig. 10. As shown in fig. 10 and 11, the DMD device 1 is rectangular in shape having a front face 11 and a back face 13, and the DMD device 1 has an adaptation unfilled corner 15 at one corner. A mounting positioning hole 12 and a micromirror light reflecting region 14 are arranged on the front surface 11 of the DMD device 1; the middle part of the back of the DMD device 1 is provided with a heat dissipation area 16 corresponding to the micromirror light reflection area 14, the opposite ends of the back of the DMD device 1 in the heat dissipation area 16 are respectively provided with a positioning column 17, and the back of the DMD device 1 is also provided with a conductive contact array 18 around the heat dissipation area 16.

In this embodiment, one of the DMD devices 1 may be quickly installed in the installation groove 102 of the optical engine housing 100 through the positioning cooperation between the positioning hole 12 and the positioning post 104 and the guiding of the fitting unfilled corner 15 and the fitting unfilled corner 103; by the positioning cooperation of the positioning hole 12 and the positioning post 333, and the guiding of the fitting unfilled corner 15 and the fitting unfilled corner 331, another DMD device 1 may be quickly mounted in the mounting groove 332 of the adjusting member 300.

It will be appreciated that in order for the light from the light source in the projector to strike the micromirror light reflective area 14 of the DMD device 1 through the light holes 105 in the placement slot 102 and the light holes 335 in the placement slot 332, the light holes 105 and the light holes 335 are shaped and sized to match the micromirror light reflective area 14 of the DMD device 1.

Preferably, in this embodiment, the DMD device 1 performs three-point positioning in the vertical direction through three bosses provided on the bottom surface of the corresponding placement groove, and performs positioning in the horizontal direction through cooperation between positioning posts and positioning holes, where the positioning posts and the positioning holes are cooperatively provided as two groups

In other embodiments, the positioning columns and the positioning holes of the DMD device 1 and the corresponding placement grooves may be provided in three groups or other numbers according to the situation; the bosses may be symmetrically arranged four or more according to circumstances, and positioned in the horizontal direction.

In other embodiments, the mounting and positioning structure between the DMD device 1 and the corresponding mounting groove may also be a positioning pin and a positioning hole, and in the case of multiple sets of positioning, the positioning pin may also be used in combination with the positioning hole, and the positioning pin may also be used in combination with the positioning hole.

Further preferably, in this embodiment, after the DMD device 1 is stably mounted in the mounting groove 102 of the optical engine housing 100 and the mounting groove 332 of the adjusting member 300, a ring of natural curing glue may be further disposed between the DMD device 1 and the mounting plate 330, so as to seal and prevent dust in the optical engine housing 100.

Referring to fig. 12, fig. 12 is a schematic perspective view of one view of the driving plate in fig. 1. As shown in fig. 12, the driving board 2 has a front surface 21 and a corresponding back surface 23, the front surface 21 of the driving board 2 is provided with a positioning hole 22 matched with the positioning column 17 on the DMD device 1, and the positioning column 17 can pass through the positioning hole 22 and be further installed and positioned with the fixing board 3; the front surface 21 of the driving board 2 is further provided with a positioning hole 24 for being mounted and matched with the fixing board 3, a screw through hole 26, a through hole 28 for passing through a positioning column 109 on the optical machine housing 100, and a penetrating hole 29 corresponding to the heat dissipation area 16 of the DMD device 1.

Specifically, in the embodiment of the present application, after the DMD device 1 is stably mounted in the mounting groove 102 and/or the mounting groove 332, the corresponding driving board 2 is pressed onto the DMD device 1 by the positioning engagement of the positioning posts 17 and the positioning holes 22, the front surface 21 of the driving board 2 is in contact with the back surface 13 of the DMD device 1, and the DMD device 1 is in point-type electrical connection with the driving board 2 through the conductive contact array 18.

Referring to fig. 13 and 14, fig. 13 is a schematic perspective view of one view of the fixing plate in fig. 1; fig. 14 is a perspective view of another view of the fixing plate of fig. 13. As shown in fig. 13 and 14, the fixing plate 3 is i-shaped, the fixing plate 3 has a front surface 31 and a back surface 33, and positioning posts 32 and positioning holes 34 matching with the positioning posts 17 on the DMD device 1 are provided on the front surface 31 of the fixing plate 3. The middle part of the back 33 of the fixing plate 3 is also provided with penetrating holes 35, screw through holes 36 at four corners and convex columns 38 for fixedly mounting the radiator 4, and the end part of each convex column 38 is axially provided with a threaded hole which penetrates through the fixing plate 3.

Specifically, referring to fig. 15, fig. 15 is a schematic view of the partial assembly of fig. 1. As shown in fig. 15, when the DMD assembly 200 connected to the optical engine housing 100 through the adjusting member 300 is assembled, the DMD device 1 is first accommodated in the accommodation groove 332 of the adjusting member 300, the driving plate 2 is laminated on the front surface 301 of the adjusting member 300, the fixing plate 3 is laminated on the back surface 23 of the driving plate 2 facing away from the adjusting member 300, and the fixing plate 3 is pressed onto the driving plate 2 through the cooperation between the positioning posts 32 and the positioning holes 24 on the driving plate 2 and the positioning cooperation between the positioning holes 34 and the positioning posts 17 on the DMD device 1; the front surface 31 of the fixing plate 3 is contacted with the back surface 23 of the driving plate 2, and four sets of set screws 51 sequentially pass through the screw through holes 36 on the fixing plate 3 and the screw through holes 26 on the driving plate 2 to be matched with the corresponding threaded holes of the convex columns 334 on the adjusting piece 300, so that the driving plate 2 is fixed on the adjusting piece 300, and the DMD device 1 is clamped and positioned in the positioning groove 332 of the adjusting piece 300, so that the DMD device 1 and the driving plate 2 are tightly contacted.

Similarly, when the DMD assembly 200 directly connected to the optical engine housing 100 is assembled, the DMD device 1 is first received in the mounting groove 102 of the optical engine housing 100, the driving board 2 is laminated on the DMD device 1, the fixing board 3 is laminated on the driving board 2, and four sets of the fastening screws 51 sequentially pass through the screw through holes 36 on the fixing board 3 and the screw through holes 26 on the driving board 2 and then are matched with the threaded holes of the protruding columns 106 on the optical engine housing 100, so that the driving board 2 is fixed on the optical engine housing 100, and the DMD device 1 is pressed in the mounting groove 102 of the optical engine housing 100 by the driving board 2.

Referring to fig. 16, fig. 16 is a schematic perspective view of one view of the elastic insulation pad in fig. 1.

Preferably, an elastic insulating pad 7 is further disposed between each driving plate 2 and the corresponding fixing plate 3, and the elastic insulating pad 7 may be one of a rubber pad or a silica gel pad. The shape of the elastic insulating pad 7 is consistent with that of the fixing plate 3, and the elastic insulating pad 7 is mainly used for preventing the driving plate 2 from being short-circuited and also can be used for preventing the fixing plate 3 from grinding the driving plate 2.

Accordingly, as shown in fig. 16, the elastic insulating pad 7 is provided with a hoist through hole 71 through which the positioning post 32 on the fixing plate 3 and the set screw 51 pass together, a through hole 72 through which the set screw 51 passes alone, and a through hole 73 through which the positioning post 17 on the DMD device 1 passes, and the elastic insulating pad 7 is also provided with a through hole 74 corresponding to the through hole 35 of the fixing plate 3.

Further preferably, as shown in fig. 1, in this embodiment, a spacer 8 may be further disposed between each set screw 51 and the corresponding fixing plate 3, and the spacer 8 may be a metal spring, a rubber spring, a silicone spring, or the like.

Through the positioning of the plurality of groups of positioning columns and the positioning holes and the fastening of the set screws 51, the accurate and stable installation of the fixed plate 3, the driving plate 2 and the DMD device 1 is ensured.

In other embodiments, the mating structure between the fixing plate 3, the driving plate 2, and the DMD device 1 for mounting and positioning may also be one of a positioning pin, a positioning hole, and an elastic buckle, or may be a combination structure of a positioning column, a positioning pin, and a positioning hole.

Likewise, in other embodiments, the fixing plate 3 and the elastic insulating pad 7 may be formed into other shapes, such as a rectangle, which are suitable for practical applications, and only need to be provided with positioning holes, through holes, penetrating holes, and other structural features.

Referring to fig. 17 and fig. 18 together, fig. 17 is a schematic perspective view of one view of the heat sink in fig. 1; fig. 18 is a schematic perspective view of another view of the heat sink of fig. 17. As shown in fig. 17 and 18, each heat sink 4 includes a connection block 41 and a heat sink 48 connected to the connection block 41, a heat conduction block 43 protruding from a surface 42 of the connection block 41 facing the fixing plate 3, the heat conduction block 43 being for conducting heat from the DMD device 1 to the heat sink 48 so as to dissipate heat from the DMD device 1. Specifically, in this embodiment, the heat conducting block 43 sequentially passes through the through hole 35 on the fixing plate 3, the through hole 74 on the elastic insulating pad 7, and the through hole 29 on the driving plate 2, and then is close to the heat dissipation area 16 on the back surface 13 of the DMD device 1, so as to dissipate heat of the DMD device 1. The connecting block 41 is also provided with a hoist hole 45 on one surface 42 facing the fixed plate 3, a plurality of connecting holes 47 with step surfaces 46 are arranged on one surface 44 of the connecting block 41 facing away from the fixed plate 3, one part of the hoist hole 45 is communicated with the connecting holes 47, and the other part is in a sinking groove shape. The middle part of the surface 44 of the connecting block 41 facing away from the fixing plate 3 is provided with two connecting grooves 442 along the length direction of the connecting block 41. The heat sink 48 includes two heat pipes 482 and a plurality of heat dissipation fins 484, one end of the two heat pipes 482 is connected to the two connecting grooves 442 of the connecting block 41, and the plurality of heat dissipation fins 484 are connected to the other ends of the two heat pipes 482 in a stacked manner. The heat generated by the DMD device 1 is conducted to the heat dissipation fins 484 through the heat conduction block 43, the connection block 41 and the heat conduction pipe 482, and these heat dissipation fins 484 can accelerate the heat generated by the DMD device 1.

The through holes 35, 74, and 29 through which the heat conductive block 43 sequentially passes are provided at positions corresponding to the heat dissipation regions 16, wherein the through holes 74 and 35 are provided at central positions of the elastic insulating pad 7 and the fixing plate 3, respectively.

It will be appreciated that in other embodiments, the through holes 35 and 74 may be located in other corresponding positions than the center, as the fixing plate 3 and the elastic insulating pad 7 are of other shapes.

Preferably, in this embodiment, a layer of heat-conducting silicone grease is filled between the heat-conducting block 43 and the heat-dissipating area 16 of the DMD device 1 for improving heat-dissipating efficiency.

In other embodiments, other heat conductive materials such as a heat conductive pad may be filled between the heat conductive block 43 and the heat dissipation area 16 of the DMD device 1.

Referring to fig. 19 and 20 together, fig. 19 is a schematic diagram illustrating the assembly of the DMD assembly of fig. 2; fig. 20 is a partial structural cross-sectional view of fig. 2. As shown in fig. 19 and 20, in the present embodiment, four sets of set screws 52, which are sleeved with springs 9, respectively pass through the connection holes 47 of the connection block 41 and then are engaged with the threaded holes of the corresponding bosses 38 of the fixing plate 3, so as to fix the heat sink 4 to the fixing plate 3. One end of each spring 9 is abutted against the nut of the set screw 52, and the other end is abutted against the stepped surface 46 on the connecting hole 47. The portion of the connecting block 41 in which the hoist hole 45 is not connected to the connecting hole 47 corresponds to the position of the set screw 51, and a certain gap is formed between the hoist hole and the nut of the set screw 51.

It should be noted that, after stable assembly, the spring 9 and the elastic members such as the spacer 8 and the elastic insulating pad 7 are in a certain compression state, so as to ensure that the components are tightly attached, and meanwhile, the elastic deformation thereof is utilized to offset the forces generated by the external force, the unstable factors such as vibration, and the like, so as to further ensure the assembly accuracy and stability of the DMD assembly 200.

In addition, the elastic deformation of the elastic member may also disperse and offset the force generated when fastening the set screw 51 and/or the set screw 52, thereby avoiding the direct application of the force to the DMD device 1 to protect the DMD device 1.

It can be understood that in this embodiment, the connecting piece 5 with the limiting portion is specifically a set screw 51 and a set screw 52, where the set screw 51, the set screw 52 and a boss with a threaded hole matched with the screw are disposed correspondingly and distributed on the corresponding component reasonably, and the number of the set screw 51 and/or the set screw 52 may be other than four, and may be specifically set according to practical application situations.

In other embodiments, the connecting piece 5 with the limiting portion may be other fastening structures besides a set screw, including but not limited to an elastic hook.

Referring to fig. 2 and 20 together, in the present embodiment, the DMD device 1, the driving board 2, the fixing board 3, the heat sink 4 and the connecting piece 5 with the limiting portion in each DMD assembly 200 are integrally connected according to the above-mentioned matching manner; one of the DMD assemblies 200 is directly fixed to the opto-mechanical housing 100 by the engagement of the set screw 51 with the threaded hole of the corresponding boss 106, and the other DMD assembly 200 is carried on the adjusting member 300 by the engagement of the set screw 51 with the threaded hole of the corresponding boss 334.

Further, as shown in fig. 20, in the embodiment of the present application, the adjusting device of the spatial light modulator further includes a plurality of glass rings 500, the glass rings 500 are sleeved on the positioning posts 109 corresponding to the optical engine housing 100 and abut against the stepped surfaces in the stepped through holes 314 on the positioning plate 310, and the glass rings 500 are used for fixing the adjusting member 300 connected with the DMD assembly 200 on the optical engine housing 100.

Referring to fig. 5 and 21, fig. 21 is a schematic perspective view of the glass ring in fig. 1 and 20. Specifically, as shown in fig. 5, the stepped through hole 314 includes a first hole having a diameter greater than or equal to the outer diameter of the glass ring 500 and a second hole communicating with the first hole, the second hole having a diameter greater than or equal to the diameter of the positioning post 109 and less than the outer diameter of the glass ring 500, and the glass ring 500 having an inner diameter greater than or equal to the diameter of the positioning post 109. In the fitting process, the lower surface 501 of the glass ring 500 is abutted against the stepped surface in the stepped through hole 314, and a certain gap exists between the glass ring 500 and the positioning column 109 and the adjusting member 300.

Further, in the embodiment of the present application, the gap between the glass ring 500 and the positioning post 109 of the optical engine housing 100 and the gap between the glass ring 500 and the stepped through hole 314 of the adjusting member 300 are coated with photo-curing adhesive, and the adjusting member 300 connected with the DMD assembly 200 is fixed on the optical engine housing 100 by using a light beam with a specific wavelength to perform irradiation curing.

Preferably, in this embodiment, the photo-curing adhesive is an adhesive with small shrinkage rate and small thermal expansion coefficient in the curing process, and may specifically be an ionic polymerization type epoxy resin UV glue, and the light beam with the specific wavelength is one of ultraviolet light and visible light.

As shown in fig. 21, the glass ring 500 has a lower surface 501 in contact with the stepped surface of the stepped through hole 314, and an inner side surface 502 opposite to the cylindrical surface of the positioning post 109, and also has an upper surface 503 and an outer side surface 504 opposite to the lower surface 501 and the inner side surface 502, respectively. Wherein the inner side 502 includes two inner chamfer surfaces and an inner cylindrical surface (not shown), and the outer side 504 includes two outer chamfer surfaces and an outer cylindrical surface (not shown).

Preferably, in this embodiment, the lower surface 501 and the inner side 502 of the glass ring 500 are roughened surfaces, so that the UV glue applied between the glass ring 500 and the positioning posts 109 and the adjusting member 300 has better adhesive strength, and the upper surface 503 and the outer side 504 of the glass ring 500 are polished surfaces, so that the light beam with the specific wavelength is fully irradiated to the glue applying position.

In other embodiments, the lower surface 501 and the inner side 502 of the glass ring 500 may also be roughened by treatments including, but not limited to, scoring, sand blasting, etc. to provide better UV glue bond strength.

It should be noted that, in this embodiment, the adjusting member 300 and the positioning post 109 are made of materials with thermal expansion coefficients similar to those of the glass ring, so that the thermal expansion rhythms of the structural member adjusting member 300, the glass ring 500 and the positioning post 109 around the DMD device 1 are substantially consistent, and the projection image pixels of the multiple DMD devices 1 are ensured to overlap.

Preferably, both the adjuster 300 and the positioning post 109 may be formed of kovar.

In summary, in the embodiment of the present application, the complete assembly mode of the adjusting device of the spatial light modulator is specifically as follows:

firstly, one of the DMD devices 1 is mounted in the mounting groove 102 of the optical machine housing 100 through the cooperation of the positioning hole 12 on the front face 11 and the positioning post 104 on the optical machine housing 100, and the other DMD device 1 is mounted in the mounting groove 332 of the adjusting member 300 through the cooperation of the positioning hole 12 and the positioning post 333 on the adjusting member 300, and after the DMD device 1 is stably mounted, a circle of natural curing glue for sealing dust prevention is arranged around the DMD device 1.

Next, the driver board 2 is pressed against the corresponding DMD device 1 by the engagement between the positioning holes 22 on the driver board 2 and the positioning posts 17 on the rear surface 13 of the DMD device 1, and the DMD device 1 and the driver board 2 are electrically connected in a dot-like manner.

In order to prevent the driver board 2 from being scratched or short-circuited, the elastic insulating pad 7 is preferably attached to the rear surface 23 of the driver board 2 facing away from the DMD device 1 by the engagement between the through hole 73 and the positioning post 17 on the DMD device 1. Subsequently, the fixing plate 3 is pressed onto the driving plate 2 attached with the elastic insulating pad 7 through the matching between the positioning posts 32 and the positioning holes 24 on the driving plate 2 and the positioning matching between the positioning holes 34 and the positioning posts 17 on the DMD device 1, the front surface 31 of the fixing plate 3 is opposite to the back surface 23 of the driving plate 2, and four groups of fastening screws 51 sleeved with gaskets 8 sequentially pass through screw through holes 36 on the fixing plate 3 and screw through holes 26 on the driving plate 2 to be matched with corresponding threaded holes of the convex posts 334 on the adjusting piece 300, so that one driving plate 2 is fixed on the adjusting piece 300, and the DMD device 1 is clamped and positioned in 332 of the adjusting piece 300; similarly, the four sets of fastening screws 51 sequentially pass through the screw through holes 36 on the fixing plate 3 and the screw through holes 26 on the driving plate 2 and then are matched with the threaded holes of the convex columns 106 on the optical engine housing 100, so that the driving plate 2 is fixed on the optical engine housing 100, and the DMD device 1 is pressed in the mounting groove 102 of the optical engine housing 100 by the driving plate 2.

Then, the heat conducting block 43 on the heat spreader 4 sequentially passes through the fixing plate 3, the elastic insulating pad 7 and the penetrating hole on the driving plate 2 to be close to the heat dissipating area 16 on the back of the DMD device 1, and then four sets of fastening screws 52 sleeved with springs 9 pass through the connecting holes 47 on the connecting block 41 of the heat spreader 4, and the fastening screws 52 are matched with the threaded holes of the protruding columns 38 on the fixing plate 3, so that the heat spreader 4 is fixed on the fixing plate 3.

Through the above steps, one DMD assembly 200 is completely fixed on the optical engine housing 100, and the other DMD assembly 200 is carried on the adjusting member 300.

Finally, through the cooperation between the step through hole 314 on the adjusting piece 300 and the positioning column 109 on the optical engine housing 100, the adjusting piece 300 carrying the DMD assembly 200 is connected to the optical engine housing 100, after the images projected by the two DMD devices 1 are determined to be completely overlapped by using the adjusting jig, four glass rings 500 are correspondingly sleeved on each positioning column 109 of the optical engine housing 100 to press the adjusting piece 300 and are abutted against the step surface in the step through hole 314 of the adjusting piece 300, and the gaps among the glass rings 500, the positioning columns 109 and the adjusting piece 300 are smeared with UV glue and are irradiated by ultraviolet light to be solidified, so that the adjusting piece 300 carrying the DMD device 100 is also fixed on the optical engine housing 100.

As described above, the two DMD assemblies 200 in the embodiment of the present application are both fixed to the optical engine housing 100, so that stable assembly of each component in the adjusting device of the entire spatial light modulator is achieved.

Further, in the use process of the adjusting device of the spatial light modulator, the adjusting ring 350 on the adjusting member 300 can be pushed against by screwing the micro-adjusting element 400 installed in the second threaded hole 318 on the adjusting member 300 to deform, so as to drive the position of the mounting plate 330 relative to the positioning plate 310 to change, or the micro-adjusting element 400 installed in the first threaded hole 316 on the adjusting member 300 can be directly pushed against the mounting plate 330 to change the position, so that the pixel-level fine adjustment of the DMD device 1 installed in the mounting plate 330 is realized, and the projection images of a plurality of DMD assemblies 200 are ensured to be accurately overlapped, i.e. the adjusting device of the spatial light modulator can also be used for subsequent correction adjustment.

It should be understood that in the above embodiment, the complete assembly of the adjusting device of the spatial light modulator is illustrated by taking the dual DMD assembly 200 as an example, and in other embodiments, the adjusting device and the mounting manner of the spatial light modulator are applicable to more than two DMD assemblies 200, which are not described herein.

Likewise, the modulation device of the spatial light modulator can also be applied to an LCOS spatial light modulator comprising a plurality of LCOS chips.

In addition, the adjusting device of the spatial light modulator according to the embodiment of the application can be applied to a projection device, so that the projection device using the adjusting device of the spatial light modulator has all functions and advantages of the adjusting device of the spatial light modulator.

While the foregoing is directed to the preferred embodiments of the present application, it will be appreciated by those skilled in the art that changes and modifications may be made without departing from the principles of the application, such changes and modifications are also intended to be within the scope of the application.

Claims

1. An adjusting device of a spatial light modulator is characterized in that the adjusting device of the spatial light modulator comprises an optical machine shell, at least two spatial light modulator assemblies arranged on the optical machine shell, and at least one adjusting piece, wherein at least one spatial light modulator assembly is connected to the optical machine shell through the adjusting piece, each spatial light modulator assembly comprises a spatial light modulator, and the adjusting piece is used for adjusting the position of the spatial light modulator in the spatial light modulator assembly connected with the spatial light modulator assembly;

The adjusting piece comprises a positioning plate, an installing plate and an adjusting ring connected between the positioning plate and the installing plate, and the spatial light modulator is installed on the installing plate;

a first through hole for allowing the fine tuning element to pass through is formed in one long side and/or at least one short side of the positioning plate, a first clamping part is formed in the periphery of the first through hole in the positioning plate, a first threaded hole is formed in the position, corresponding to the first through hole, of the adjusting ring, a second clamping part is formed in the fine tuning element, the fine tuning element passes through the first through hole and is in threaded connection with the first threaded hole, the first clamping part and the second clamping part are correspondingly clamped to prevent the fine tuning element from moving relative to the positioning plate along the axial direction of the first through hole, and the meshing length between the fine tuning element and the first threaded hole is changed by screwing the fine tuning element to drive the adjusting ring to move, so that the mounting plate is driven to move.

2. The device according to claim 1, wherein the positioning plate is provided with a receiving space, the adjusting ring is disposed around the mounting plate, and the mounting plate and the adjusting ring are received in the receiving space.

3. The adjustment device of claim 2, wherein a first adjustment slot is formed between the adjustment ring and the positioning plate, the adjustment ring moving in position in the first adjustment slot along a horizontal plane parallel to the positioning plate to move the mounting plate in position.

4. A spatial light modulator according to claim 3 wherein the first regulating groove is provided with at least one first connecting portion for connecting the positioning plate and the regulating ring, at least one of the first connecting portions having elasticity, and the regulating ring is moved in the first regulating groove by elastic deformation of the first connecting portion.

5. The device of claim 4, wherein a second adjustment slot is formed between the adjustment ring and the mounting plate, the adjustment ring being movable in position within the first adjustment slot and the second adjustment slot to move the mounting plate in position.

6. The device according to claim 5, wherein the second regulating groove is provided with at least one second connecting portion for connecting the mounting plate and the regulating ring, at least one of the second connecting portions having elasticity, and the regulating ring is moved in the second regulating groove by elastic deformation of the second connecting portion.

7. The adjustment device of a spatial light modulator according to claim 6, wherein one end of the first connection portion is connected to the adjustment ring, and the other end of the first connection portion is connected to the positioning plate; one end of the second connecting part is connected with the adjusting ring, and the other end of the second connecting part is connected with the mounting plate.

8. The device of claim 7, wherein the first and second connection portions have a U-shaped structure, a V-shaped structure, a rectangular structure with an opening, or an S-shaped structure.

9. The device according to claim 1, wherein the adjusting ring has a second through hole at a position corresponding to the first through hole, the mounting plate has a second threaded hole at a position corresponding to the second through hole, and the fine adjustment element screwed to the second threaded hole through the first through hole and the second through hole drives the mounting plate to move.

10. The device for adjusting a spatial light modulator according to claim 1, wherein the mounting plate is provided with a placement groove, and the spatial light modulator is accommodated in the placement groove.

11. The device according to claim 1, further comprising a plurality of glass rings, wherein the glass rings are sleeved on the positioning posts corresponding to the optical machine housing and are abutted against the step surfaces in the step through holes on the positioning plate, and the glass rings are used for fixing the adjusting member connected with the spatial light modulator assembly on the optical machine housing.

12. The device according to claim 11, wherein a photo-curing adhesive is applied to a gap between the glass ring and the positioning post and a gap between the glass ring and the stepped through hole, and the photo-curing adhesive is cured by irradiation with a light beam having a specific wavelength.

13. The spatial light modulator adjustment device according to claim 12, wherein the lower surface and the inner side surface of the glass ring are roughened surfaces, and the upper surface and the outer side surface of the glass ring are polished surfaces.

14. Projection apparatus, characterized in that it comprises an adjustment device of a spatial light modulator according to any of claims 1 to 13.