WO2021060318A1 - Feuille de dissipation de chaleur, stratifié de feuille de dissipation de chaleur, structure et procédé de traitement de dissipation de chaleur d'élément de génération de chaleur - Google Patents

Feuille de dissipation de chaleur, stratifié de feuille de dissipation de chaleur, structure et procédé de traitement de dissipation de chaleur d'élément de génération de chaleur Download PDF

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Publication number
WO2021060318A1
WO2021060318A1 PCT/JP2020/035908 JP2020035908W WO2021060318A1 WO 2021060318 A1 WO2021060318 A1 WO 2021060318A1 JP 2020035908 W JP2020035908 W JP 2020035908W WO 2021060318 A1 WO2021060318 A1 WO 2021060318A1
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Prior art keywords
heat
heat radiating
groove
sheet
radiating sheet
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PCT/JP2020/035908
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English (en)
Japanese (ja)
Inventor
光祐 和田
金子　政秀
良三 野々垣
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デンカ株式会社
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Priority to JP2021548951A priority Critical patent/JPWO2021060318A1/ja
Publication of WO2021060318A1 publication Critical patent/WO2021060318A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00—Constructional details common to different types of electric apparatus
    • H05K7/20—Modifications to facilitate cooling, ventilating, or heating

Definitions

  • the present invention relates to a heat radiating sheet, a heat radiating sheet laminate including the heat radiating sheet, a structure including the heat radiating sheet, and a heat radiating treatment method of a heat generating element using the heat radiating sheet.
  • heat generating elements such as power devices, transistors, thyristors, and CPUs
  • a heat dissipation measure it has been generally performed to conduct heat generated from a heat generating element to a heat dissipation component such as a heat sink to dissipate heat.
  • a heat radiating sheet has been conventionally used as such a heat radiating material (see, for example, Patent Document 1).
  • the heat radiating sheet cannot follow the micro unevenness on the mounting surface of the heat generating element, the adhesion of the heat radiating sheet to the heat generating element may be insufficient. Therefore, the contact thermal resistance between the heat generating element and the heat radiating sheet may increase.
  • the present inventors have found that the contact thermal resistance between the heat generating element and the heat radiating sheet can be reduced by interposing the heat radiating grease between the heat generating element and the heat radiating sheet.
  • the present inventors intervene a sufficient amount of heat-dissipating grease between the heat-generating element and the heat-dissipating sheet to reduce the contact thermal resistance between the heat-generating element and the heat-dissipating sheet, the heat-dissipating grease spreads.
  • the present invention comprises a heat radiating sheet capable of suppressing the spread of the heat radiating grease when the heat radiating grease is interposed between the heat generating element and the heat radiating sheet, a heat radiating sheet laminate including the heat radiating sheet, and a structure including the heat radiating sheet.
  • An object of the present invention is to provide a heat dissipation processing method for a heat generating element using the heat dissipation sheet.
  • the present inventors have found that the above object can be achieved by providing a predetermined groove on the surface of the heat radiating sheet.
  • the present invention is based on the above findings, and the gist thereof is as follows. [1] A heat radiating sheet provided on the surface with a plurality of first grooves extending in the first direction. [2] The heat radiating sheet according to the above [1], wherein the surface of the portion sandwiched between the first grooves is smooth. [3] The heat radiating sheet according to the above [1] or [2], wherein the distance between the adjacent first grooves is 100 to 1500 ⁇ m.
  • a heat-dissipating sheet laminate comprising the heat-dissipating sheet according to any one of the above [1] to [10], and a heat-dissipating grease layer formed on a grooved surface of the heat-dissipating sheet.
  • a heat radiating sheet capable of suppressing the spread of the heat radiating grease when the heat radiating grease is interposed between the heat generating element and the heat radiating sheet, a heat radiating sheet laminate including the heat radiating sheet, and a structure including the heat radiating sheet.
  • a method for heat dissipation processing of a heat generating element using the heat dissipation sheet can be provided.
  • FIG. 1 is a perspective view of a heat radiating sheet according to an embodiment of the present invention.
  • FIG. 2 is a plan view of a modified example of the heat radiating sheet according to the embodiment of the present invention.
  • 3 (a) and 3 (b) are plan views of another modification of the heat radiating sheet according to the embodiment of the present invention.
  • FIG. 4 is a perspective view of another modified example of the heat radiating sheet according to the embodiment of the present invention.
  • FIG. 5 is a diagram for explaining a heat radiating sheet laminate and a structure according to an embodiment of the present invention.
  • FIG. 6 is a diagram for explaining a modified example of the heat radiating sheet laminate and the structure according to the embodiment of the present invention.
  • FIG. 1 is a perspective view of a heat radiating sheet according to an embodiment of the present invention.
  • FIG. 2 is a plan view of a modified example of the heat radiating sheet according to the embodiment of the present invention.
  • 3 (a) and 3 (b) are plan views of another modification of
  • FIG. 7 is an exploded view of the evaluation jig used for the evaluation test of the spread phenomenon of the heat-dissipating grease.
  • FIG. 8 is a diagram for explaining the spread of the heat-dissipating grease in the evaluation jig.
  • FIG. 1 is a perspective view of a heat radiating sheet according to an embodiment of the present invention.
  • the heat radiating sheet 1 of the embodiment of the present invention extends in a plurality of first grooves 10 extending in the first direction A and in a second direction B different from the first direction A, and intersects the first groove 10.
  • a plurality of second grooves 20 to be provided are provided on the surface 2.
  • the following description does not limit the present invention, but it is considered that the spread phenomenon of the heat-dissipating grease can be suppressed for the following reasons.
  • the minute gap at the contact interface between the heat radiating sheet and the heat generating element becomes smaller due to the thermal expansion of the heat radiating sheet, the excess heat radiating grease that fills the gap flows into the groove on the surface of the heat radiating sheet, and the groove Held in.
  • the gap at the contact interface between the heat radiating sheet and the heat generating element becomes large due to the heat shrinkage of the heat radiating sheet, the heat radiating grease held in the groove on the surface of the heat radiating sheet is supplied to the large gap. ..
  • the heat radiating grease even if the heat radiating sheet undergoes thermal expansion and contraction, the heat radiating grease only moves back and forth between the gap and the groove, so that it is considered that the spread of the heat radiating grease can be suppressed.
  • the heat radiating sheet 1 of the embodiment of the present invention has a plurality of first grooves 10 and a plurality of second grooves 20 as long as the surface 2 is provided with the plurality of first grooves 10 and the plurality of second grooves 20.
  • the surface provided with 20 is not particularly limited.
  • the heat radiating sheet 1 of the embodiment of the present invention has a plurality of first grooves 10 and a plurality of second grooves only on one surface 2 of the heat radiating sheet among the two main surfaces 2 and 3 of the heat radiating sheet.
  • the groove 20 is provided, a plurality of first grooves and a plurality of second grooves may be provided on both surfaces of the heat radiating sheet.
  • a plurality of first grooves and a plurality of second grooves may be provided on the entire surface of the heat radiating sheet, or a plurality of first grooves and a plurality of second grooves may be provided on a part of the surface of the heat radiating sheet. May be provided. Further, the plurality of first grooves and the plurality of second grooves may be arranged at equal intervals or may be arranged at different intervals. Further, the starting point and the ending point of the first groove and the second groove do not have to exist on the outer periphery of the heat radiating sheet, and at least one of the starting point and the ending point does not have to be on the outer periphery of the heat radiating sheet.
  • the surface 30 of the portion of the heat radiating sheet 1 of the embodiment of the present invention surrounded by the first groove 10 and the second groove 20 is smooth. Thereby, the increase in the contact thermal resistance of the heat radiating sheet 1 caused by providing the plurality of first grooves 10 and the plurality of second grooves 20 on the surface 2 of the heat radiating sheet 1 of the embodiment of the present invention is suppressed. Can be done.
  • the surface roughness is expressed using the surface roughness as a parameter
  • the surface roughness of the surface 30 of the portion surrounded by the first groove 10 and the second groove 20 is preferably the arithmetic mean roughness (Ra).
  • the surface roughness of the surface 30 of the portion surrounded by the first groove 10 and the second groove 20 is a ten-point average roughness (Rz), preferably 11 to 25 ⁇ m, and more preferably 15 to. It is 23 ⁇ m.
  • the arithmetic average roughness (Ra) and the ten-point average roughness (Rz) are values measured in accordance with JIS B0601: 2013.
  • the distance D 10 between the adjacent first grooves 10 in the heat radiating sheet 1 of the embodiment of the present invention is preferably 100 to 1500 ⁇ m.
  • the distance D 10 between the adjacent first grooves 10 is 100 ⁇ m or more, the contact area between the heat generating element and the heat radiating sheet 1 becomes large, and the adhesion between the heat generating element and the heat radiating sheet 1 can be improved. This makes it possible to reduce the contact thermal resistance of the heat radiating sheet 1.
  • the distance D 10 between the adjacent first grooves 10 is 1500 ⁇ m or less, the spreading phenomenon of the heat-dissipating grease can be effectively suppressed.
  • the distance D 10 between the adjacent first grooves 10 is more preferably 200 to 1300 ⁇ m, still more preferably 250 to 1100 ⁇ m.
  • the distance D 20 between the adjacent second grooves 20 is preferably 100 to 1500 ⁇ m, more preferably 200 to 1300 ⁇ m, and further preferably 250 to 1100 ⁇ m.
  • the first groove and the second groove may be formed on the entire heat radiating sheet or a part of the heat radiating sheet, but any of the above distances between adjacent grooves may be formed. Within a preferable range, it is preferable that the first groove and the second groove are formed on the entire heat radiating sheet.
  • the depth H 10 of the first groove 10 in the heat radiating sheet 1 of the embodiment of the present invention is preferably 5 to 25 ⁇ m. If the depth H 10 of the first groove 10 is 5 ⁇ m or more, the heat radiation grease in an amount sufficient to reduce the thermal contact resistance between the heating element and the heat dissipation sheet while suppressing the spread phenomenon of heat dissipation grease It can be held in the first groove 10. If the depth H 10 of the first groove 10 is 25 ⁇ m or less, most of the heat radiation grease was interposed between the heating element and the heat dissipation sheet is held in the first groove 10, the heat radiation and the heating element It is possible to prevent a shortage of heat-dissipating grease interposed between the sheet and the sheet.
  • the depth H 10 of the first groove 10 is more preferably 10 to 20 ⁇ m, still more preferably 13 to 18 ⁇ m.
  • the depth H 20 of the second groove 20 is preferably 5 to 25 ⁇ m, more preferably 10 to 20 ⁇ m, and even more preferably 13 to 18 ⁇ m.
  • the depth H 10 of the first groove 10 and the depth H 20 of the second groove may be different or the same for each groove. When the groove depth is different for each groove, it is preferable that the difference is small.
  • the depth H 10 of the first groove 10 may be different from the depth H 20 of the second groove 20 may be the same. When the groove depth is different between the first groove and the second groove, it is preferable that the difference is small.
  • the depths of the grooves may be the same through one groove, or there may be portions having different depths of the grooves. When there are portions having different groove depths, it is preferable that the difference is small.
  • the width W 10 of the first groove 10 in the heat radiating sheet 1 according to the embodiment of the present invention is preferably 5 to 25 ⁇ m.
  • the width W 10 of the first groove 10 is 5 ⁇ m or more, it can be further suppressed spreading phenomenon of the heat dissipation grease.
  • the width W 10 of the first groove 10 is 25 ⁇ m or less, the contact area between the heating element and the heat dissipation sheet 1 is increased, it is possible to improve the adhesion between the heating element and the heat radiating sheet 1, thereby , The thermal resistance of the heat radiating sheet 1 can be reduced.
  • the width W 10 of the first groove 10 is preferably 7 ⁇ 20 [mu] m, more preferably from 8 ⁇ 15 [mu] m.
  • the width W 20 of the second groove 20 is preferably 5 ⁇ 25 [mu] m, more preferably 7 ⁇ 20 [mu] m, more preferably from 8 ⁇ 15 [mu] m.
  • the width W 10 of the first groove 10 may be different for each groove, it may be the same. Further, the width W 20 of the second groove 10 may be different or the same for each groove. When the width of the groove is different for each groove, it is preferable that the difference is small.
  • the width W 10 of the first groove 10 may be different from the width W 20 of the second groove 20 may be the same.
  • the widths of the grooves may be the same through one groove, or there may be portions having different widths of the grooves. When there are portions having different groove widths, it is preferable that the difference is small.
  • the ratio (Sg / S ⁇ 100) of the area (Sg) when the first groove 10 and the second groove 20 are projected in the thickness direction to the area (S) when the heat radiating sheet 1 is projected in the thickness direction. %) Is preferably 2 to 20%.
  • the ratio of the area is 2% or more, the spreading phenomenon of the heat-dissipating grease can be suppressed more effectively.
  • the ratio of the above areas is 20% or less, the contact area between the heat generating element and the heat radiating sheet 1 can be increased, and the adhesion between the heat generating element and the heat radiating sheet 1 can be further improved. .. From such a viewpoint, the ratio of the area is more preferably 3 to 15%, still more preferably 4 to 12%.
  • the first groove 10 and the second groove 20 are linearly extending grooves.
  • the heat-dissipating grease can be more easily moved between the gap between the heat-dissipating sheet and the heat-generating element and the groove, and the spread phenomenon of the heat-dissipating grease can be further suppressed.
  • the thickness of the heat radiating sheet 1 according to the embodiment of the present invention is preferably 100 to 1000 ⁇ m.
  • the thickness of the heat radiating sheet 1 according to the embodiment of the present invention is 100 ⁇ m or more, the heat radiating sheet 1 can more closely follow the unevenness of the mounting surface of the heat generating element.
  • the thickness of the heat radiating sheet 1 according to the embodiment of the present invention is 1000 ⁇ m or less, the thermal resistance of the heat radiating sheet can be reduced. From such a viewpoint, the thickness of the heat radiating sheet 1 according to the embodiment of the present invention is more preferably 150 to 650 ⁇ m.
  • the component of the heat radiating sheet 1 according to the embodiment of the present invention is not particularly limited as long as it is a component normally used for the heat radiating sheet.
  • the heat radiating sheet 1 of the embodiment of the present invention can contain a resin binder and a filler having high thermal conductivity.
  • the resin binder used for the heat radiating sheet 1 of the embodiment of the present invention is not particularly limited as long as it is a resin binder usually used for the heat radiating sheet.
  • Examples of the resin binder used for the heat radiating sheet 1 of the embodiment of the present invention include epoxy resin, silicone resin, acrylic resin, phenol resin, melamine resin, urea resin, unsaturated polyester, fluororesin, urethane resin, and polyamide.
  • polyimide polyamideimide, polyetherimide, etc.
  • polyester eg, polybutylene terephthalate, polyethylene terephthalate, etc.
  • polyphenylene ether polyphenylene sulfide, total aromatic polyester, polysulfone, liquid crystal polymer, polyethersulfone, polycarbonate, maleimide modification.
  • resins ABS resins, AAS (acrylonitrile-acrylic rubber / styrene) resins, and AES (acrylonitrile / ethylene / propylene / diene rubber-styrene) resins. These can be used alone or in combination of two or more.
  • the resin binder is preferably rubber or elastomer from the viewpoint of facilitating the handling of the heat radiating sheet 1 and from the viewpoint of further enhancing the adhesion of the heat radiating sheet 1 due to the flexibility of the heat radiating sheet 1.
  • silicone resin is preferable from the viewpoint of heat resistance, weather resistance, electrical insulation and chemical stability.
  • the silicone resin used for the heat radiating sheet 1 of the embodiment of the present invention is an addition reaction type silicone resin from the viewpoint that it does not contain ionic impurities that cause metal corrosion and does not generate by-products after the reaction. Is preferable.
  • the addition reaction type silicone resin is cured by a hydrosilylation reaction between an alkenyl group and a hydrogen atom bonded to a silicon atom using a platinum compound as a catalyst.
  • Examples of the addition reaction type silicone include silicones under the trade name "LR3303-20A / B" manufactured by Asahi Kasei Wacker Silicone Co., Ltd.
  • the filler used for the heat radiating sheet 1 of the embodiment of the present invention is not particularly limited as long as it is a filler usually used for the heat radiating sheet.
  • Examples of the filler used for the heat radiating sheet 1 of the embodiment of the present invention include an inorganic filler and a metal filler.
  • Examples of the inorganic filler include zinc oxide, alumina, boron nitride, aluminum nitride, silicon carbide, silicon nitride and the like.
  • Examples of the metal-based filler include aluminum, silver, and copper. These can be used alone or in combination of two or more.
  • an inorganic filler is preferable from the viewpoint of electrical insulation, and among the inorganic fillers, boron nitride is more preferable from the viewpoint of thermal conductivity and chemical stability. Further, since boron nitride has anisotropy in thermal conductivity, massive boron nitride particles in which the anisotropy of thermal conductivity is suppressed are more preferable.
  • the massive boron nitride particles are particles in which scaly particles of hexagonal boron nitride are aggregated in a mass form.
  • the average particle size of the filler is preferably 15 to 90 ⁇ m.
  • the average particle size of the filler is 15 ⁇ m or more, the content of the filler can be increased.
  • the average particle size of the filler is 90 ⁇ m or less, the heat radiating sheet can be made thin.
  • the average particle size of the filler is more preferably 20 to 70 ⁇ m, further preferably 25 to 50 ⁇ m, and particularly preferably 25 to 45 ⁇ m.
  • the average particle size of the filler can be measured using, for example, a laser diffraction / scattering method particle size distribution measuring device (LS-13 320) manufactured by Beckman Coulter.
  • LS-13 320 laser diffraction / scattering method particle size distribution measuring device manufactured by Beckman Coulter.
  • the obtained average particle size is, for example, the average particle size according to the volume statistical value.
  • the content of the filler with respect to the total 100% by volume of the resin binder and the filler is preferably 30 to 85% by volume, more preferably 40 to 80% by volume.
  • the content of the filler is 30% by volume or more, the thermal conductivity of the heat radiating sheet 1 is improved, and sufficient heat radiating performance can be easily obtained.
  • the content of the filler is 85% by volume or less, it is possible to suppress the tendency for voids to occur during molding of the heat radiating sheet, and it is possible to improve the insulating property and mechanical strength of the heat radiating sheet 1.
  • the heat radiating sheet 1 of the embodiment of the present invention may include a reinforcing layer.
  • the reinforcing layer plays a role of further improving the mechanical strength of the heat radiating sheet 1, and further suppresses the stretching of the heat radiating sheet 1 in the plane direction when the heat radiating sheet 1 is compressed in the thickness direction to improve the insulating property. It also has the effect of securing.
  • the reinforcing layer include resin films such as glass cloth, alumina cloth, polyester, polyamide, polyimide, polycarbonate and acrylic resin, and cloth fiber mesh cloth such as cotton, linen, aramid fiber, cellulose fiber, nylon fiber and polyolefin fiber.
  • non-woven fabrics such as aramid fibers, cellulose fibers, nylon fibers and polyolefin fibers, metal fiber mesh cloths such as stainless steel, copper and aluminum, and metal foils such as copper, nickel and aluminum. These can be used alone or in combination of two or more. Among these, glass cloth is preferable from the viewpoint of thermal conductivity and insulating property.
  • the thickness of the glass cloth is preferably 10 ⁇ m to 150 ⁇ m, more preferably 15 to 90 ⁇ m, still more preferably 20 to 50 ⁇ m.
  • the thickness of the glass cloth is 10 ⁇ m or more, it is possible to prevent the glass cloth from breaking during handling.
  • the thickness of the glass cloth is 150 ⁇ m or less, it is possible to suppress a decrease in the thermal conductivity of the heat radiating sheet due to the glass cloth.
  • Some commercially available glass cloths have a fiber diameter of 4 to 9 ⁇ m, and these can be used for the heat dissipation sheet 1.
  • the tensile strength of the glass cloth is, for example, 100 to 1000 N / 25 mm.
  • the length of one side of the opening of the glass cloth is preferably 0.1 to 1.0 mm from the viewpoint of balancing thermal conductivity and strength.
  • the glass cloth that can be used for the heat radiating sheet 1 includes, for example, a product name "H25 F104" manufactured by Unitika Ltd.
  • the heat radiating sheet 1 may contain components other than the resin binder, the filler, and the reinforcing layer. Other components are additives, flame retardants, silicone oils, silane materials, silane coupling agents, platinum catalysts, hardeners, colorants, etc., and are, for example, 10% by volume or less in 100% by volume of the heat radiation sheet 1. It may be 5% by volume or less, preferably 3% by volume or less, and more preferably 1% by volume or less.
  • the heat radiating sheet of the present invention may include a base resin layer.
  • the base resin layer plays a role of further improving the heat resistance of the heat radiating sheet.
  • the heat radiating sheet of the present invention includes a resin composition layer containing the above-mentioned resin binder and filler, and a base resin layer adjacent to the resin composition layer. Then, it is preferable that the above-mentioned groove is formed on one surface of the resin composition layer and the base resin layer is arranged on the other surface side of the resin composition layer. Further, the resin composition layer may include the above-mentioned reinforcing layer.
  • the base resin layer preferably contains a resin having a glass transition point of 200 ° C. or higher. When the glass transition point is 200 ° C. or higher, sufficient heat resistance can be obtained, and the insulating property and thermal conductivity of the laminate can be maintained well.
  • the base resin layer may be a layer formed from a coating film or a layer formed from a film.
  • polyimide As the resin constituting the base resin layer, polyimide, polyamideimide, polyamide (particularly aromatic polyamide), polyether sulfone, polyetherimide, polyethylene naphthalate, polytetrafluoroethylene (PTFE) or tetrafluoroethylene per.
  • PTFE polytetrafluoroethylene
  • PFA Fluoroalkyl vinyl ether copolymer
  • the content of the resin in the base resin layer is not particularly limited, but the lower limit is preferably 78% by volume or more, more preferably 80% by volume or more, and further preferably 82% by volume or more.
  • the upper limit is preferably 92% by volume or less, more preferably 90% by volume or less, still more preferably 88% by volume or less.
  • the base resin layer preferably contains an inorganic filler.
  • an inorganic filler By containing the inorganic filler in the base resin layer, the insulating property, thermal conductivity, peel strength and the like can be improved. In particular, it is presumed that the peel strength is increased because the inorganic filler forms irregularities at the interface between the base resin layer and the resin composition layer, and an anchor effect is generated.
  • the inorganic filler the same filler as the above-mentioned filler can be used.
  • the content of the inorganic filler in the base resin layer is not particularly limited, but the lower limit is preferably 8% by volume or more, more preferably 10% by volume or more, and further preferably 12% by volume or more.
  • the upper limit is preferably 22% by volume or less, more preferably 20% by volume or less, still more preferably 18% by volume or less.
  • the base resin layer may contain a small amount of the above-mentioned other components, or may contain a small amount of impurities.
  • the total content of the resin and the inorganic filler in the base resin layer is preferably 90% by volume or more, more preferably 95% by volume or more, and further preferably 97% by volume or more.
  • the thickness of the base resin layer is preferably in the following range from the viewpoint of insulation, thermal conductivity, and processability.
  • the lower limit is preferably 0.010 mm or more. By setting it to 0.010 mm or more, the insulating property can be further improved and the workability can be improved. It is more preferably 0.012 mm or more, still more preferably 0.015 mm or more.
  • the upper limit is preferably 0.100 mm or less. It is more preferably 0.070 mm or less, still more preferably 0.050 mm or less.
  • the film to be the base resin layer can be produced according to a known film production method. In addition, products sold on the market may be obtained and used.
  • the form of the heat radiating sheet of the present invention is not particularly limited. It may be a single leaf product or a roll product.
  • the heat radiating sheet 1 of the embodiment of the present invention can be manufactured, for example, by a manufacturing method having the following steps 1 to 5.
  • Step 1 the resin binder and the filler before curing are mixed to prepare a composition for a heat radiating sheet.
  • Step 2 the heat-dissipating sheet composition is applied onto the film.
  • the coating method is not particularly limited, and known coating methods such as a doctor blade method, a comma coater method, a screen printing method, and a roll coater method that can uniformly coat can be adopted.
  • the doctor blade method and the comma coater method are preferable from the viewpoint that the thickness of the applied heat radiating sheet composition can be controlled with high accuracy.
  • the heat radiating sheet includes a reinforcing layer, it is preferable to apply the heat radiating sheet composition after placing the reinforcing layer on the film.
  • the composition for the heat radiating sheet may be applied to both sides of the reinforcing layer so that the reinforcing layer is arranged at the center in the thickness direction of the heat radiating sheet.
  • the resin composition is applied on the base sheet to be the base resin layer.
  • conventionally known methods such as a coater method, a doctor blade method, an extrusion molding method, an injection molding method, a press molding method and the like can be used.
  • the heat radiating sheet composition may be applied to both sides of the base resin layer so that the base resin layer is arranged at the center in the thickness direction of the heat radiating sheet.
  • Step 3 the composition for a heat radiating sheet applied to the film to be held is dried.
  • Step 4 the dried heat-dissipating sheet composition is crosslinked to prepare a heat-dissipating sheet precursor sheet.
  • Step 5 a plurality of first ridges extending in the first direction and a plurality of second ridges extending in a second direction different from the first direction and intersecting the first ridge are surfaced.
  • a transfer sheet to be provided Such a transfer sheet can be produced, for example, by embossing the sheet.
  • the heat radiating sheet precursor sheet is heated and pressurized from above the transfer sheet.
  • the heat radiation sheet precursor sheet is plastically deformed, and a first groove and a second groove are formed on the surface of the heat radiation sheet precursor sheet.
  • the embossing is performed on the side where the composition for the heat radiating sheet is applied.
  • the depths of the first groove and the second groove can be controlled by adjusting the pressure when the heat radiation sheet precursor sheet is heated and pressurized. Further, the first groove and the second groove may be directly formed on the surface of the heat radiation sheet precursor sheet by embossing.
  • the heat radiating sheet of one embodiment of the present invention can be deformed as follows.
  • the angle formed by the first direction A, which is the direction in which the first groove 10 extends, and the second direction B, which is the direction in which the second groove 20 extends is 90 °. there were.
  • the angle formed by the first direction in which the first groove extends and the second direction in which the second groove extends is not limited to 90 °.
  • the angle formed by the first direction A in which the first groove 10A extends and the second direction B in which the second groove 20A extends is 120 °. It may be. From the viewpoint that the spreading phenomenon of the heat radiating grease can be suppressed more uniformly with respect to the surface direction of the heat radiating sheet 1, the first direction and the second direction in which the first groove extends in the heat radiating sheet of the present invention.
  • the angle formed by the second direction which is the direction in which the groove extends, is preferably 30 to 150 °, more preferably 60 to 120 °, still more preferably 80 to 100 °, and particularly preferably 90 °. is there. When there are a plurality of intersections with the second groove in one first groove, or when there are a plurality of intersections with the first groove in one second groove, the first groove at each intersection
  • the angle formed by the second groove may be the same or different.
  • the first groove 10 and the second groove 20 are grooves extending linearly.
  • the shapes of the first groove and the second groove are not limited to a linear shape.
  • the first groove 10B is a groove extending in a wavy shape in the first direction A
  • the second groove 20B is a groove extending in a wavy shape in the second direction B. It may be a groove.
  • the first groove 10C is a groove extending in a zigzag shape in the first direction A
  • the second groove 20C is a zigzag shape in the second direction B. It may be a groove extending to. Further, the shape of the first groove 10C extending in the first direction A may be different from the shape of the second groove 20C extending in the second direction.
  • the cross-sectional shape of the first groove 10 and the second groove 20 was quadrangular.
  • the shape of the cross section of the first groove and the second groove of the heat radiating sheet is not limited to the quadrangle.
  • it may be U-shaped, triangular, or trapezoidal.
  • the shape of the cross section of the first groove of the heat radiating sheet may be different from the shape of the cross section of the second groove.
  • the heat radiating sheet 1 of the embodiment of the present invention extends in a plurality of first grooves 10 extending in the first direction A and in a second direction B different from the first direction A.
  • the surface 2 is provided with a plurality of second grooves 20 that intersect the first groove 10.
  • the heat radiating sheet 1D may have only a plurality of first grooves 10 extending in the first direction A on the surface 2, and the second groove 20 may not be provided on the surface 2. .. Even when the heat radiating sheet 1D is provided with only a plurality of first grooves 10 extending in the first direction A on the surface 2, the heat radiating sheet 1D can suppress the spreading phenomenon of the heat radiating grease.
  • the heat radiating sheet 1 includes both the plurality of first grooves 10 and the plurality of second grooves 20.
  • the area of the heat radiating sheet 1D where the first groove 10 is provided, the distance between the adjacent first grooves 10, the depth H 10 of the first groove 10, and the depth H of the first groove 10. 10 the ratio of the area of the groove in the width W 10, the surface of the first groove 10, the shape of the groove, and the sectional shape of the groove, the first groove in the heat dissipation sheet 1 of the above-described embodiment of the present invention
  • the ratio of the area of the groove on the surface, the shape of the groove, the cross-sectional shape of the groove, and the like are the same. Further, similarly to the surface 30 of the portion surrounded by the first groove 10 and the second groove 20 in the heat radiating sheet 1 of the embodiment of the present invention, it is sandwiched between the adjacent first grooves 10 in the heat radiating sheet 1D. It is preferable that the surface 30D of the portion is also smooth.
  • the heat radiating sheet according to the embodiment of the present invention extends in a third direction different from the first direction and the second direction in addition to the first groove and the second groove, and the first
  • the surface may be provided with a plurality of third grooves that intersect the groove and the second groove. In this case as well, the spread phenomenon of the heat-dissipating grease can be suppressed.
  • the heat radiating sheet according to the embodiment of the present invention has a fourth direction different from the first direction, the second direction and the third direction.
  • the surface may be provided with a plurality of fourth grooves extending in the direction and intersecting the first groove, the second groove and the third groove.
  • the heat radiating sheet according to the embodiment of the present invention may further be provided with a plurality of grooves in one direction or two or more directions different from these directions on the surface.
  • the heat-dissipating sheet laminate 100 according to the embodiment of the present invention is the heat-dissipating sheet 1 according to the embodiment of the present invention, and the surface of the heat-dissipating sheet 1 provided with the first groove and the second groove. Includes a thermal grease layer 110 formed on top of it. As a result, the contact thermal resistance between the heat generating element 210 and the heat radiating sheet 1 can be reduced, and the spread phenomenon of the heat radiating grease can be suppressed.
  • the heat-dissipating grease 110 used in the heat-dissipating sheet laminate 100 according to the embodiment of the present invention is not particularly limited as long as it is a heat-dissipating grease usually used as a heat-dissipating material.
  • the thermal grease is, for example, a paste obtained by kneading a liquid polymer and a filler.
  • the filler for example, the same filler as that used for the heat radiating sheet 1 of the above-described embodiment of the present invention can be used.
  • an inorganic filler is preferable from the viewpoint of electrical insulation, and among the inorganic fillers, alumina is more preferable from the viewpoint of thermal conductivity, insulation, and cost.
  • Liquid polymers include, for example, hydrocarbon oils such as polyolefins, alkyl aromatics and alicyclic compounds, polyethers such as polyglycols and phenyl ethers, esters such as diesters and polyol esters, and aromatic phosphoric acid esters. Examples thereof include phosphorus compounds, silicon compounds such as silicones, halogen compounds such as fluorinated polyethers, mineral oils, fluorosilicones, acrylic resins and urethane resins. Among these liquid polymers, silicone is preferable from the viewpoint of heat resistance, weather resistance, electrical insulation and chemical stability.
  • the amount of the heat-dissipating grease 110 used in the heat-dissipating sheet laminate 100 according to the embodiment of the present invention is 1.5 to 8 per 180 mm ⁇ 100 mm of the heat-dissipating sheet as long as the shape of the groove is within the above preferable range. It may be 0 ml, 2.3 to 4.5 ml, or 2.6 to 3.8 ml. Further, the viscosity of 25 ° C. at a shear rate of 10s-1 of ordinary thermal grease is effective if it is in the range of 15 to 1000 Pa ⁇ s, and in order to make it within the above range, for example, by a method of vacuum defoaming / mixing. You may adjust.
  • the heat radiating sheet laminate of one embodiment of the present invention can be deformed as follows.
  • the heat radiating grease 110 is arranged only on one surface side of the heat radiating sheet 1.
  • the heat radiating greases 110 and 120 may be arranged on both sides of the heat radiating sheet 1E as in the heat radiating sheet laminated body 100A shown in FIG.
  • the contact thermal resistance between the heat radiating sheet 1E and the heat sink 300 can also be reduced.
  • the above-mentioned first groove and second groove are provided on both surfaces of the heat radiating sheet 1E.
  • heat radiating sheet of the heat radiating sheet laminate of one embodiment of the present invention a modified example of the heat radiating sheet of one embodiment of the present invention may be used. In this case as well, the spread phenomenon of the heat-dissipating grease can be suppressed.
  • the structure 200 according to the embodiment of the present invention includes the heat radiating sheet 1 according to the embodiment of the present invention, the heat generating element 210 mounted on the heat radiating sheet 1, and the heat radiating sheet 1 and the heat generating element 210.
  • a heat radiating grease 110 is provided between the two.
  • the above-mentioned first groove and second groove are provided on the surface of the heat radiating sheet 1 on the heat radiating grease 110 side.
  • the heat radiating grease 110 the same heat radiating grease as that used for the above-mentioned heat radiating sheet laminate can be used.
  • Heat generating element examples include a power device, a transistor, a thyristor, a CPU, an IGBT module, a diode and the like.
  • the structure of one embodiment of the present invention can be modified as follows.
  • ⁇ Modification example 1> In the structure 200 of the embodiment of the present invention shown in FIG. 5, the heat radiating grease 110 is arranged only on one surface side of the heat radiating sheet 1. However, as in the structure 200A shown in FIG. 6, the heat radiating greases 110 and 120 may be arranged on both sides of the heat radiating sheet 1E. As a result, the contact thermal resistance between the heat radiating sheet 1E and the heat sink 300 can also be reduced. In this case, the above-mentioned first groove and second groove are provided on both surfaces of the heat radiating sheet 1E.
  • a substrate on which the heat generating element is mounted may be placed on the heat radiating sheet.
  • ⁇ Modification example 3> As the heat radiating sheet of the structure of one embodiment of the present invention, a modified example of the heat radiating sheet of one embodiment of the present invention may be used. In this case as well, the spread phenomenon of the heat-dissipating grease can be suppressed.
  • the heat-dissipating treatment method for the heat-generating element of the present invention includes a step of applying heat-dissipating grease to the surface of the heat-dissipating sheet 1 of the present invention provided with the first groove and the second groove, and the surface of the heat-dissipating sheet coated with the heat-dissipating grease.
  • the step of arranging the heat generating element is included. As a result, the contact thermal resistance between the heat generating element and the heat radiating sheet can be reduced, and the spread phenomenon of the heat radiating grease can be suppressed.
  • an automatic dispensing method or a screen printing method is used for the application of the thermal grease.
  • the heat radiating sheet 1 of the embodiment of the present invention and the modified examples 1A to 1D thereof are only one form, and the heat radiating sheet of the present invention is not limited. Further, the heat radiating sheet laminated body 100 and the structure 200 of one embodiment of the present invention and the modified examples 100A and 200A thereof are only one form, and the heat radiating sheet laminated body and the structure of the present invention are not limited.
  • the following evaluations were performed on the heat radiating sheets of Examples and Comparative Examples.
  • the thickness of the heat radiating sheet was arbitrarily measured at 10 points using a thickness gauge (manufactured by Mitutoyo Co., Ltd., model number: 547-301), and the average value was taken as the thickness of the heat radiating sheet.
  • the heat dissipation sheet conforms to JIS B0601: 2013 under the conditions of measurement length 10,000 ⁇ m, measurement pitch 10 ⁇ m, and measurement speed 500 ⁇ m. The surface roughness was measured.
  • the depth of the grooves is determined by randomly extracting 5 grooves on the surface with a scanning electron microscope (SEM) after cross-sectioning by ion milling treatment in which Ar is irradiated to the surface direction of the heat radiation sheet. The depth was measured and the average value was adopted.
  • SEM scanning electron microscope
  • the width of the groove is determined by randomly extracting 5 grooves on the surface with a scanning electron microscope (SEM) after cross-sectioning by ion milling treatment in which Ar is irradiated to the surface direction of the heat radiation sheet. The width was measured and the average value was adopted.
  • SEM scanning electron microscope
  • the angle formed by the ridges in the two directions of the transfer sheet used to form the groove on the surface of the heat radiating sheet is the angle formed by the first direction and the second direction in the heat radiating sheet of the example or the comparative example. did.
  • the shape of the ridges of the transfer sheet used to form the grooves on the surface of the heat radiating sheet was the shape of the first groove and the second groove in the heat radiating sheet of the example or the comparative example.
  • the evaluation jig 400 fixes the transparent glass plate 420 and the glass plate 420 sandwiching the heat radiating sheet 500 and the heat radiating grease 600 dripping on the heat radiating sheet in combination with the aluminum plate 410 on which the heat radiating sheet 500 is placed and the aluminum plate 410.
  • the aluminum plate 410 is provided with a hole 411 for passing the screw portion 441 of the bolt 440.
  • the glass plate fixing plate 430 is provided with a hollow portion 431 for fitting the glass plate 420 and a hole 432 for passing the screw portion 441 of the bolt 440.
  • the depth of the hollow portion 431 is slightly smaller than the thickness of the glass plate 420.
  • the aluminum plate 110 an aluminum plate made of material A-5052 was used.
  • the size of the aluminum plate 110 was 180 mm ⁇ 100 mm ⁇ 10 mm.
  • the size of the glass plate 120 was 70 mm ⁇ 55 mm ⁇ 10 mm.
  • a vinyl chloride resin was used for the glass plate fixing plate 130.
  • the size of the glass plate fixing plate 130 was 180 mm ⁇ 100 mm ⁇ 30 mm mm.
  • a heat radiating sheet 500 provided with a hole 510 for passing the screw portion 441 of the bolt 440 was placed on the aluminum plate 410. Then, 16 ml of the heat radiating grease 600 was dropped onto the heat radiating sheet 410 placed on the aluminum plate 410. The position where the heat radiating grease 600 was dropped on the heat radiating sheet 500 was a position corresponding to the center of the glass plate 420 placed on the heat radiating grease 600.
  • the glass plate fixing plate 430 in which the glass plate 420 was fitted was placed on the heat radiating sheet 500 to which the heat radiating grease 600 was dropped.
  • the heat-dissipating grease 600 is sandwiched between the heat-dissipating sheet 500 and the glass plate 420.
  • the aluminum plate 410 and the glass plate 420 are used by using the nut 450. Tightened between.
  • the tightening force per unit area between the aluminum plate 410 and the glass plate 420 was 0.2 MPa. As shown in FIG.
  • the spread of the thermal paste 600 could be seen through the glass plate 420 and the glass plate fixing plate 430. Then, the thermal paste 600 was photographed through the glass plate 420 and the glass plate fixing plate 430, and the area (S1) of the thermal paste 600 spread from the photographed image was measured.
  • the heat cycle test was performed with the evaluation jig 400 sandwiching the heat radiating sheet 500 and the heat radiating grease 600 horizontal.
  • a 100-cycle heat cycle test was performed with one cycle of holding at a temperature of ⁇ 40 ° C. for 30 minutes and holding at a temperature of 125 ° C. for 30 minutes.
  • the thermal paste 600 was photographed through the glass plate 420 and the glass plate fixing plate 430, and the area (S2) of the thermal paste 600 spread from the photographed image was measured. ..
  • thermal grease used in the evaluation test of the spread phenomenon of thermal grease manufactured by Denka Co., Ltd., trade name: GFC-PF3, viscosity at 25 ° C. at a shear rate of 10s -1, 22 Pa ⁇ s, amount dropped: 3.2 ml
  • Example 1 Preparation of hexagonal boron nitride
  • Boric acid, melamine, and calcium carbonate (all of which are special grade reagents) are mixed at a mass ratio of 70:50: 5, and the temperature is raised from room temperature to 1400 ° C. in 1 hour in a nitrogen gas atmosphere at 1400 ° C. After holding for 3 hours, the temperature was raised to 1900 ° C. for 4 hours, held at 1900 ° C. for 2 hours, and then cooled to room temperature to produce hexagonal boron nitride. After crushing this, it was crushed and sieved to prepare massive boron nitride particles. The average particle size of the produced massive boron nitride particles was 50 ⁇ m.
  • composition for heat dissipation sheet 650 g of the produced massive boron nitride particles were added to 110 g of silicone resin (manufactured by Asahi Kasei Wacker Silicone Co., Ltd., model number: LR3303-20A) and 110 g of silicone resin (manufactured by Asahi Kasei Wacker Silicone Co., Ltd., model number: LR3303-20B).
  • the distance between the adjacent first ridges and the distance between the adjacent second ridges on the transfer sheet was 1.0 mm.
  • the width of the first ridge and the second ridge was 10 ⁇ m.
  • the height of the first ridge and the second ridge was 20 ⁇ m.
  • the angle formed by the first direction and the second direction was 90 °.
  • the first ridge and the second ridge were linearly extending ridges.
  • the cross-sectional shape of the first ridge and the second ridge was quadrangular.
  • Heat dissipation sheet After placing the transfer sheet on the precursor sheet, press for 30 minutes under the conditions of a temperature of 165 ° C and a pressure of 150 kgf / cm 2 using a flat plate press (manufactured by Yanase Seisakusho Co., Ltd.). Then, a groove was formed on the surface of the heat radiating sheet precursor sheet to prepare the heat radiating sheet of Example 1.
  • Example 2 Heat-dissipating sheet The heat-dissipating sheet of Example 2 was prepared in the same manner as in Example 1 except that the pressure of the flat plate press when forming the groove on the surface of the precursor sheet was changed from 150 kgf / cm 2 to 220 kgf / cm 2. Made.
  • Example 3 Heat-dissipating sheet The heat-dissipating sheet of Example 3 was prepared in the same manner as in Example 1 except that the pressure of the flat plate press when forming the groove on the surface of the precursor sheet was changed from 150 kgf / cm 2 to 50 kgf / cm 2. Made.
  • Example 4 After arranging a polyimide film (manufactured by Toray DuPont Co., Ltd., trade name Kapton 100H, thickness 0.026 mm) as a base resin layer on a Teflon (registered trademark) sheet when preparing a heat-dissipating sheet precursor sheet, The above composition for heat radiating sheet was coated on a polyimide film with a thickness of 0.2 mm with a comma coater, dried at 75 ° C. for 5 minutes, and the composition for heat radiating sheet was coated on one side of the polyimide film.
  • a polyimide film manufactured by Toray DuPont Co., Ltd., trade name Kapton 100H, thickness 0.026 mm
  • Teflon registered trademark
  • Example 4 After the polyimide film so that it is on the upper side, apply the composition for heat dissipation sheet on the polyimide film to a thickness of 0.2 mm with a comma coater, dry at 75 ° C. for 5 minutes, and heat dissipation sheets on both sides. A sheet of the composition for heat dissipation sheet coated with the composition for heat dissipation was prepared. Other than that, the heat radiating sheet of Example 4 was produced in the same manner as in Example 1.
  • Table 1 shows the evaluation results of the heat dissipation sheets of Examples 1 to 3 and Comparative Example 1.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thermal Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Laminated Bodies (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

L'invention concerne une feuille de dissipation de chaleur (1D) ayant une surface (2) qui a une pluralité de premières rainures (10) qui s'étendent dans une première direction (A). Ce stratifié de feuille de dissipation de chaleur comprend la feuille de dissipation de chaleur et une couche de graisse de dissipation de chaleur. Cette structure comprend la feuille de dissipation de chaleur, un élément de génération de chaleur qui est disposé sur la feuille de dissipation de chaleur, et une graisse de dissipation de chaleur qui est interposée entre la feuille de dissipation de chaleur et l'élément de génération de chaleur. Ce procédé de traitement de dissipation de chaleur d'élément de génération de chaleur comprend une étape consistant à appliquer une graisse de dissipation de chaleur sur la feuille de dissipation de chaleur et une étape consistant à agencer un élément de génération de chaleur sur la surface sur laquelle la graisse de dissipation de chaleur a été appliquée. La présente invention concerne : une feuille de dissipation de chaleur qui peut supprimer l'étalement d'une couche de graisse de dissipation de chaleur qui est interposée entre la feuille de dissipation de chaleur et un élément de génération de chaleur ; un stratifié de feuille de dissipation de chaleur qui comprend la feuille de dissipation de chaleur ; une structure qui comprend la feuille de dissipation de chaleur ; et un procédé de traitement de dissipation de chaleur d'élément de génération de chaleur qui utilise la feuille de dissipation de chaleur.
PCT/JP2020/035908 2019-09-25 2020-09-24 Feuille de dissipation de chaleur, stratifié de feuille de dissipation de chaleur, structure et procédé de traitement de dissipation de chaleur d'élément de génération de chaleur WO2021060318A1 (fr)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024048358A1 (fr) * 2022-09-01 2024-03-07 デクセリアルズ株式会社 Stratifié et procédé de fabrication de stratifié

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437069U (fr) * 1977-08-19 1979-03-10
JPS56161699A (en) * 1980-05-16 1981-12-12 Denki Kagaku Kogyo Kk Method of mounting electric part and insulating heat dissipating sheet used therefor
JPH02166755A (ja) * 1988-12-21 1990-06-27 Nec Corp 伝熱シート
JP2017025186A (ja) * 2015-07-21 2017-02-02 住友ベークライト株式会社 熱伝導性樹脂組成物、回路基板用積層体、回路基板および半導体装置
WO2018190233A1 (fr) * 2017-04-12 2018-10-18 デンカ株式会社 Feuille thermoconductrice et son procédé de fabrication

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437069U (fr) * 1977-08-19 1979-03-10
JPS56161699A (en) * 1980-05-16 1981-12-12 Denki Kagaku Kogyo Kk Method of mounting electric part and insulating heat dissipating sheet used therefor
JPH02166755A (ja) * 1988-12-21 1990-06-27 Nec Corp 伝熱シート
JP2017025186A (ja) * 2015-07-21 2017-02-02 住友ベークライト株式会社 熱伝導性樹脂組成物、回路基板用積層体、回路基板および半導体装置
WO2018190233A1 (fr) * 2017-04-12 2018-10-18 デンカ株式会社 Feuille thermoconductrice et son procédé de fabrication

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024048358A1 (fr) * 2022-09-01 2024-03-07 デクセリアルズ株式会社 Stratifié et procédé de fabrication de stratifié

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