WO2021056779A1

WO2021056779A1 - Device for reducing deformation of large-area copper sheet after welding

Info

Publication number: WO2021056779A1
Application number: PCT/CN2019/119753
Authority: WO
Inventors: 张茹; 臧天程; 姜维宾; 安勇; 金浩
Original assignee: 烟台台芯电子科技有限公司
Priority date: 2019-09-25
Filing date: 2019-11-20
Publication date: 2021-04-01
Also published as: CN210755728U

Abstract

Disclosed is a device for reducing the deformation of a large-area copper sheet (7) after welding, belonging to the technical field of copper sheet welding processing. The device comprises an upper supporting seat (1), a lower supporting seat (2), an upper pressing plate (4) and a lower pressing plate (6), wherein the upper pressing plate (4) is detachably mounted at the bottom of the upper supporting seat (1); the upper pressing plate (4) is provided with a plurality of hollowed-out mesh holes (41); the upper supporting seat (1) is provided with hollowed-out exhaust holes (11); the mesh holes (41) are in communication with the exhaust holes (11); the lower pressing plate (6) is detachably mounted at the top of the lower supporting seat (2); the upper supporting seat (1) is mounted on the lower supporting seat (2) by means of fastening screws (3); and a central boss (61) for arranging the copper sheet (7) is arranged in the center of the upper surface of the lower pressing plate (6), such that the technical problems of same being prone to deforming, the welding rejection rate being high, and the welding efficiency and the welding quality being low when the copper sheet (7) and the wafer (5) are welded in the prior art are solved.

Description

Device for reducing deformation of large-area copper sheet after welding

Technical field

The utility model relates to a device for reducing the deformation of a large area copper sheet after welding, and belongs to the technical field of copper sheet welding processing.

Background technique

Copper sheet and wafer soldering are generally soldered by solder paste. The method is to put the solder paste between the copper sheet and the wafer and then put it in a vacuum soldering furnace for soldering. However, due to the relatively large area of the copper sheet and the thermal expansion coefficient of the wafer The difference is very large. During the cooling and solidification process, the copper sheet will bend and deform toward the wafer, causing the solder paste to spread around, causing the loss of solder paste in the center area of the copper sheet and the wafer, and increasing the soldering void rate; in the prior art In order to solve this technical problem, sometimes a substrate is pressed on the front surface of the wafer for welding. Although the degree of deformation of the copper sheet can be reduced, there will be deformation, and the substrate will be displaced by the stress of the copper sheet during the welding process. , Causing large-area damage to the wafer, resulting in an increase in the scrap rate of copper wafer welding, and a decrease in welding efficiency and welding quality.

Utility model content

Aiming at the shortcomings of the prior art, the utility model provides a device for reducing the deformation of large-area copper sheets after welding, so as to solve the problems that the copper sheets and wafers in the prior art are easily deformed during welding, the welding waste rate is high, the welding efficiency and the welding Low-quality technical problems.

The technical solution of the utility model to solve the above technical problems is as follows: A device for reducing the deformation of large-area copper sheets after welding, comprising an upper support base, a lower support base, an upper pressing plate and a lower pressing plate, the upper pressing plate can be detachably installed on the upper support At the bottom of the seat, the upper pressing plate is provided with a number of hollow mesh holes, the upper support seat is provided with hollow vent holes, the mesh holes communicate with the vent holes, and the lower pressing plate is detachably mounted on the top of the lower support seat The upper support base is installed on the lower support base by fastening screws, and a central boss for placing copper sheets is provided at the center of the upper surface of the lower pressing plate.

The beneficial effects of the utility model are: the upper support seat and the lower support seat installed by the fastening screws are set, and the upper pressure plate and the lower pressure plate are set at the same time, and the spacing between the upper pressure plate and the lower pressure plate is controlled by the fastening screws, thereby reducing The deformation of the copper sheet and the wafer during welding is installed between the upper plate and the lower plate by tightening screws. During the installation process, the speed, pressure and distance of each point on the lower surface of the upper plate are kept consistent. Ensure that the upper pressing plate presses the wafer down vertically, which will not cause large-area damage to the wafer, and at the same time ensure the consistency of welding quality; by setting hollow vent holes on the upper support base and opening a hollow net on the upper pressing plate Hole is conducive to the discharge of bubbles during welding, reduces the welding void rate, improves the welding quality and reduces the rate of welding rejects.

On the basis of the above technical solution, the present invention can also be improved as follows.

Further, the lower surface of the upper support seat is provided with an upper groove, the upper surface of the lower support seat is provided with a lower groove, the upper groove is set in a positive T shape, and the lower groove is set in a reverse direction. In the ⊥ type, both ends of the upper pressure plate are provided with upper bosses that are inserted and matched with the upper groove, and both ends of the lower pressure plate are provided with lower bosses that are inserted and matched with the lower groove.

The beneficial effect of adopting the above-mentioned further solution is that by providing the upper groove of the upper support seat and the upper boss of the upper pressing plate to insert and cooperate, and the lower groove of the lower support seat and the lower boss of the lower pressing plate to insert and cooperate, it is convenient for quick installation and It is convenient and quick to disassemble the upper support base and the upper pressing plate and the lower support base and the lower pressing plate, which saves time and effort.

Further, both the upper pressing plate and the lower pressing plate are made of quartz material.

The beneficial effect of adopting the above-mentioned further solution is that by using the upper pressing plate and the lower pressing plate made of quartz material, the pollution of the wafer and the copper sheet during the welding process is avoided, and the welding quality is ensured.

Further, the vent hole is set to be circular, the mesh is set to be square, the central boss is set to be circular, the diameter of the vent hole is the same as the diameter of the central boss, and the diameter of the mesh The total area is greater than the area of the wafer.

The beneficial effect of adopting the above-mentioned further solution is that by setting the shape and size of the vent hole and the mesh hole and the central boss, it is beneficial to discharge the bubbles generated during the welding process in time and reduce the welding void rate.

Further, the edge of the central boss is provided with ribs, the inner diameter of the ribs is larger than the radius of the copper sheet, and the height of the ribs is smaller than the thickness of the copper sheet.

The beneficial effect of adopting the above-mentioned further solution is that by providing the ribs, it is beneficial to limit the position of the copper sheet on the central boss and prevent the copper sheet from being displaced during the downward movement of the upper pressing plate, thereby further ensuring the welding quality.

Description of the drawings

Figure 1 is a schematic cross-sectional structure diagram of the utility model;

Figure 2 is a schematic sectional view of the upper pressing plate;

Fig. 3 is a schematic cross-sectional view of the lower pressing plate.

In the figure 1. Upper support base, 2. Lower support base, 3. Fastening screws, 4. Upper pressure plate, 5. Wafer, 6. Lower pressure plate, 7. Copper sheet, 11. Vent hole, 12. Upper recess Groove, 21. Lower groove, 41. Mesh, 42. Upper boss, 61. Central boss, 62. Lower boss.

detailed description

The principles and features of the utility model will be described below in conjunction with the accompanying drawings. The examples cited are only used to explain the utility model and are not intended to limit the scope of the utility model.

A device for reducing the deformation of a large-area copper sheet after welding, comprising an upper support base 1, a lower support base 2, an upper pressing plate 4 and a lower pressing plate 6. The upper pressing plate 4 and the lower pressing plate 6 are made of quartz material. The upper pressing plate 4 and the lower pressing plate 6 avoid contamination of the wafer 5 and the copper sheet 7 during the welding process and ensure the welding quality. The upper pressing plate 4 can be detachably installed at the bottom of the upper support base 1, and the upper pressing plate 4 is provided A number of hollow mesh holes 41, the upper support 1 is provided with a hollow vent hole 11, the mesh hole 41 is in communication with the vent hole 11, the vent hole 11 is set in a circular shape, and the mesh hole 41 The central boss 61 is set in a square shape, the diameter of the vent hole 11 is the same as the diameter of the central boss 61, the total area of the mesh 41 is larger than the area of the wafer 5, and the lower The pressure plate 6 is detachably installed on the top of the lower support base 2. The upper support base 1 is installed on the lower support base 2 by fastening screws 3, and the center of the upper surface of the lower pressure plate 6 is provided with a central protrusion for placing the copper sheet 7 at the center. Table 61, the edge of the central boss 61 is provided with ribs, the inner diameter of the ribs is greater than the radius of the copper sheet 7, and the height of the ribs is less than the thickness of the copper sheet 7. The copper sheet on the boss is limited to prevent the copper sheet from being displaced during the downward movement of the upper pressing plate, thereby further ensuring the welding quality. The shape and size of the central boss 61 are provided by setting the vent 11 and mesh 41 , It is beneficial to timely discharge the bubbles generated in the welding process and reduce the welding void rate.

The lower surface of the upper support seat 1 is provided with an upper groove 12, the upper surface of the lower support seat 2 is provided with a lower groove 21, the upper groove 12 is set in a positive T shape, and the lower groove 21 It is set in the inverted ⊥ shape. Both ends of the upper pressure plate 4 are provided with upper bosses 42 that are inserted and matched with the upper groove 12, and both ends of the lower pressure plate 6 are provided with lower bosses that are inserted and matched with the lower groove 21. 62. The upper groove 12 of the upper support base 1 is inserted and fitted with the upper boss 42 of the upper pressing plate 4, and the lower groove 21 of the lower support base 2 is inserted and matched with the lower boss 62 of the lower pressing plate 6 to facilitate quick installation. And to disassemble the upper support base 1 and the upper pressing plate 4, and the lower support base 2 and the lower pressing plate 6, which is convenient and quick, and saves time and effort.

Principle of use: Place the copper sheet 7 brushed with solder paste on the central boss 61 of the lower plate 6, place the wafer 5 on top of the copper sheet 7, and then place the lower plate 6 containing the copper sheet 7 and the wafer 5 Install on the lower support base 2, install the upper pressing plate 4 on the upper support base 1, install the tightening screw 3 on the upper support base 1, insert the tightening screw 3 into the screw hole of the lower support base 2, and rotate the tightening screw 3. Make the upper pressing plate 4 and the lower pressing plate 6 compress the copper sheet 7 and the wafer 5, and finally put the installed device into the vacuum welding furnace for welding operation.

The upper support seat 1 and the lower support seat 2 are installed by setting the fastening screws 3, and the upper pressure plate 4 and the lower pressure plate 6 are set at the same time, and then the distance between the upper pressure plate 4 and the lower pressure plate 6 is controlled by the fastening screw 3, thereby reducing The deformation of the copper sheet 7 and the wafer 5 during welding is installed between the upper plate 4 and the lower plate 6 by the fastening screw 3. The speed and pressure of each point on the lower surface of the upper plate 4 during the installation process Keep the same distance as the distance to ensure that the upper pressing plate 4 presses down the wafer 5 vertically, which will not cause large-area damage to the wafer 5, and at the same time, it can also ensure the consistency of the welding quality; by setting the hollow row on the upper support base 1 The air holes 11 and the hollow mesh 41 on the upper pressing plate 4 are beneficial to the discharge of bubbles during welding, reduce the welding void rate, improve the welding quality and reduce the welding waste rate.

The above descriptions are only preferred embodiments of the present utility model, and are not intended to limit the present utility model. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in this utility model. Within the scope of protection of utility models.

Claims

A device for reducing the deformation of a large area copper sheet after welding, which is characterized in that it comprises an upper support base, a lower support base, an upper pressure plate and a lower pressure plate. The upper pressure plate is detachably mounted on the bottom of the upper support base, and the upper pressure plate A number of hollow mesh holes are provided, the upper support base is provided with hollow exhaust holes, the mesh holes communicate with the exhaust holes, the lower pressing plate is detachably mounted on the top of the lower support base, and the upper support base passes tightly The fixed screw is installed on the lower support seat, and a central boss for placing the copper sheet is arranged at the center of the upper surface of the lower pressing plate.
The device for reducing the deformation of a large-area copper sheet after welding according to claim 1, wherein the lower surface of the upper support seat is provided with an upper groove, and the upper surface of the lower support seat is provided with a lower groove, The upper groove is set in a positive T shape, the lower groove is set in a reversed ⊥ shape, both ends of the upper pressure plate are provided with upper bosses that are inserted and matched with the upper groove, and the lower pressure plate Both ends are provided with lower bosses that are inserted and matched with the lower groove.
The device for reducing the deformation of a large-area copper sheet after welding according to claim 2, wherein the upper pressing plate and the lower pressing plate are both made of quartz.
The device for reducing the deformation of a large-area copper sheet after welding according to claim 1, wherein the vent hole is set to be round, the mesh is set to be square, and the central boss is set to be round. The diameter of the vent hole is the same as the diameter of the central boss, and the total area of the mesh is larger than the area of the wafer.
The device for reducing the deformation of a large area copper sheet after welding according to claim 4, wherein the edge of the central boss is provided with a rib, the inner diameter of the rib is larger than the radius of the copper sheet, and the stopper The height of the edge is smaller than the thickness of the copper sheet.