WO2021053852A1 - Dispositif d'inspection d'aspect, procédé d'étalonnage de dispositif d'inspection d'aspect, et programme - Google Patents

Dispositif d'inspection d'aspect, procédé d'étalonnage de dispositif d'inspection d'aspect, et programme Download PDF

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WO2021053852A1
WO2021053852A1 PCT/JP2020/008748 JP2020008748W WO2021053852A1 WO 2021053852 A1 WO2021053852 A1 WO 2021053852A1 JP 2020008748 W JP2020008748 W JP 2020008748W WO 2021053852 A1 WO2021053852 A1 WO 2021053852A1
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Prior art keywords
calibration
feature amount
visual inspection
inspection apparatus
image
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PCT/JP2020/008748
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English (en)
Japanese (ja)
Inventor
貴茂 田中
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オムロン株式会社
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Publication of WO2021053852A1 publication Critical patent/WO2021053852A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction

Definitions

  • the present invention relates to an appearance inspection device that inspects an inspected object based on an image of the inspected object taken by irradiating the inspected object with illumination light, and a calibration method thereof.
  • Patent Document 1 discloses an apparatus for inspecting the appearance of a substrate by combining three-dimensional shape measurement of a mirrored object by a so-called color highlighting method and three-dimensional shape measurement of a diffused object by a so-called phase shift method. There is.
  • the optical system consisting of a light source that irradiates illumination light and an imaging device such as a camera may not be able to exhibit its original performance over time depending on the frequency of use and the environment. By implementing this, it is common to readjust and use it so that the original performance can be exhibited.
  • the above calibration is performed as follows.
  • a jig standard plate or the like
  • the surface of the jig (hereinafter, also referred to as a standard surface) is photographed by a photographing device (that is, the light reflected by the jig is received).
  • the brightness value is extracted from the image taken by the photographing device, and if the value deviates from the preset reference value, the current value on the light source side is adjusted so as to approach the reference value for illumination. Adjust the conditions, irradiate and shoot again. In this way, adjustment is performed so that the extracted luminance value becomes a reference value.
  • the cleanliness of the standard surface is very important. That is, if dust (dust, etc.) or dirt adheres to the standard surface, they are reflected in the captured image, and the brightness value of the portion concerned fluctuates greatly, so that accurate calibration cannot be realized.
  • the present invention has been made in view of the above circumstances, and in the calibration of a visual inspection apparatus performed by photographing a standard surface for calibration, accurate calibration is performed without strictly maintaining the cleanliness of the standard surface.
  • the purpose is to provide a technology that can realize the above.
  • the present invention adopts the following configuration.
  • the visual inspection apparatus is Lighting means that irradiates the object to be inspected with illumination light, An imaging means for photographing the object to be inspected and a standard surface for calibration prepared for calibration. An inspection means for inspecting the object to be inspected by processing an image taken by the photographing means, and an inspection means for inspecting the object to be inspected. A predetermined feature amount is extracted from a plurality of images of the calibration standard surface photographed by the imaging means in a state where the relative positions in the direction parallel to the calibration standard surface are different from those of the imaging means, and the extracted features are extracted. An adjustment feature amount calculation means that calculates one adjustment feature amount based on the values of a plurality of feature amounts, and an adjustment feature amount calculation means. With Based on the adjustment feature amount, the lighting means is calibrated and / or the captured image is corrected.
  • the above feature quantities can be, for example, brightness, brightness, saturation, and the like.
  • the standard surface for calibration may be provided on a standard plate separate from the visual inspection device, and the standard plate may be arranged on the visual inspection device for calibration, or may be built in the visual inspection device. It may be the one that has been calibrated.
  • the visual inspection device may further include a calibration standard plate, and the calibration standard surface may be provided on the calibration standard plate.
  • the appearance device may further include a moving mechanism for moving the calibration standard plate and / or the photographing means in the horizontal direction.
  • the calibration standard surface is photographed while moving the imaging means and the calibration standard surface relatively little by little in a direction parallel to each other, so that the imaging means and the calibration standard surface can be easily positioned relative to each other. Can acquire multiple images with different values.
  • the adjustment feature amount calculating means extracts the gradation value of the feature amount of the plurality of images for each region of 1 ⁇ 1 pixel or more, and the floor of each region extracted from the plurality of images.
  • the mode value of the adjustment price may be set as the adjustment feature amount in the region.
  • the term "gradation” used here does not only indicate the lightness and darkness of the image, but also includes the lightness and the degree of saturation in the color. Further, the "gradation value” does not mean only the value of the gradation itself of the feature amount possessed by the pixel of the image data, for example, in 256 steps from 0 to 255, but the feature amount has a range of a certain value.
  • the value set as the representative value for each stage by dividing the level into several stages so as to have it. Specifically, for example, when the gradation values from 0 to 255 are classified into 25 stages and the representative values of each stage are 10, 20, 30, ..., The representative values are included.
  • the gradation value of the feature amount when the region is composed of a plurality of pixels can be an average value, a mode value, or the like of the gradation values of each pixel constituting the region.
  • the adjustment feature amount for each region is not necessarily limited to the mode value of the plurality of gradation values, and may be, for example, the average value or the median value of the plurality of gradation values. , May be the maximum value.
  • the visual inspection device further includes a lighting condition setting means for setting the lighting condition of the illumination light, and the lighting condition setting means has the adjustment feature amount and the preset reference feature amount. By setting the illumination conditions of the illumination light based on the comparison, the illumination means may be calibrated.
  • the lighting conditions can be appropriately reset and the visual inspection of the object to be inspected can be performed.
  • the appearance inspection device further includes a correction image generation means for generating a correction image using the adjustment feature amount, and the correction processing of the image is performed by the inspection means based on the correction image. Therefore, the shading correction of the image captured by the photographing means may be performed.
  • the correction image can be, for example, an image in which the value of each pixel is used as the adjustment feature amount, and by using such image data as a reference for shading correction of the captured image, highly accurate shading correction can be performed. It can be performed.
  • the shading correction is a correction for correcting aberrations of the observation optical system in the captured image.
  • the calibration method of the visual inspection apparatus is described. It is a method of calibrating the visual inspection device that inspects the inspected object based on the image of the inspected object taken by irradiating the inspected object with illumination light.
  • the calibration method referred to here is used to mean not only the calibration method of the optical system but also the correction method in image processing.
  • the calibration standard surface and / or the imaging means is moved in a direction parallel to the calibration standard surface, and the relative position of the calibration standard surface and the imaging means in a direction parallel to the imaging means is set.
  • a plurality of images of the standard surface for calibration in different states may be taken.
  • the gradation values of the feature amounts of the plurality of images are extracted for each region of 1 ⁇ 1 pixel or more, and in the calculation step, the said region for each of the plurality of images extracted.
  • the mode value of the gradation value may be used as the adjustment feature amount in the region.
  • the illumination conditions of the illumination light may be calibrated by comparing the adjustment feature amount with the preset reference feature amount.
  • a correction image may be generated using the adjustment feature amount, and shading correction of the image of the object to be inspected may be performed based on the correction image.
  • the present invention can be regarded as a program for causing the visual inspection apparatus to execute the above method, and as a computer-readable recording medium in which such a program is recorded non-temporarily.
  • FIG. 1 is a schematic view showing a configuration of a visual inspection apparatus according to an application example of the present invention.
  • FIG. 2 is a flowchart showing a flow of calibration processing of the visual inspection apparatus according to the application example of the present invention.
  • FIG. 3A is a first diagram showing the relationship between the calibration standard plate and the photographing range.
  • FIG. 3B is a second diagram showing the relationship between the calibration standard plate and the photographing range.
  • FIG. 3C is a third diagram showing the relationship between the calibration standard plate and the photographing range.
  • FIG. 3D is a fourth diagram showing the relationship between the calibration standard plate and the photographing range.
  • FIG. 3E is a fifth diagram showing the relationship between the calibration standard plate and the photographing range.
  • FIG. 3A is a first diagram showing the relationship between the calibration standard plate and the photographing range.
  • FIG. 3B is a second diagram showing the relationship between the calibration standard plate and the photographing range.
  • FIG. 3C is a third diagram showing the relationship between the calibration standard
  • FIG. 3F is a sixth diagram showing the relationship between the calibration standard plate and the photographing range.
  • FIG. 4 is a schematic view showing the configuration of the substrate inspection apparatus according to the first embodiment.
  • FIG. 5 is a plan view illustrating the configuration of the lighting device according to the first embodiment.
  • FIG. 6 is a block diagram illustrating a function of the information processing apparatus according to the first embodiment.
  • FIG. 7 is a flowchart showing the flow of the substrate inspection process of the substrate inspection apparatus according to the first embodiment.
  • FIG. 1 is a schematic schematic view showing a schematic configuration of an appearance inspection device 9 according to this application example.
  • the visual inspection device 9 is a device that takes an image of an inspection object (not shown) and inspects the inspection object based on the image, and as shown in FIG. 1, the main configuration is illumination as a lighting means. It has a device 91, a camera 92 as an imaging means, an information processing device 93 (for example, a computer) as an inspection means, and a moving mechanism 94.
  • the lighting device 91 is configured to be able to irradiate the inspection object and the calibration standard plate 95 with illumination light.
  • the camera 92 is a photographing means for photographing an inspection object in a state of being irradiated with illumination light and a calibration standard plate 95 and outputting a digital image.
  • the image of the inspection object taken by the photographing means will be referred to as an observation image
  • the image of the calibration standard plate 95 will be referred to as a calibration image.
  • the camera 92 includes, for example, an optical system and an image sensor.
  • the information processing device 93 has functions such as control of a lighting device 91, a camera 92, and a moving mechanism 94, processing of an image captured from the camera 92, and three-dimensional shape measurement, and corresponds to the inspection means in the present invention. ..
  • the information processing device 93 includes a CPU (Central Processing Unit), a RAM (Random Access Memory), a non-volatile storage device (for example, a hard disk drive, a flash memory, etc.), an input device (for example, a keyboard, a mouse, a touch panel, etc.), and a display. It can be configured by a computer equipped with a device (eg, a liquid crystal display, etc.).
  • the moving mechanism 94 also serves as a stage on which the inspection object or the standard plate 95 for calibration is placed, and is driven by an actuator such as a motor (not shown) in the X-axis direction and the Y-axis shown in FIG. Move in the direction, and if the inspection object or the calibration standard plate 95 is placed, move these as well.
  • an actuator such as a motor (not shown) in the X-axis direction and the Y-axis shown in FIG. Move in the direction, and if the inspection object or the calibration standard plate 95 is placed, move these as well.
  • the calibration standard plate 95 is, for example, a white plate member that reflects the illumination light from the illumination device 91 to the camera 92.
  • the illumination light reflecting surface of the calibration standard plate 95 (that is, the surface imaged by the camera 92) corresponds to the calibration standard surface in the present invention.
  • the calibration standard plate 95 may be a separate body from the visual inspection device 9, or may be incorporated in the device.
  • the appearance inspection device 9 When the appearance inspection device 9 having the above configuration performs the appearance inspection of the inspection object, a plurality of images of the inspection object in a state of being irradiated with the illumination light from the lighting device 91 are photographed by the camera 92 and photographed.
  • the information processing apparatus 93 inspects the inspected object by performing image processing on the generated image by a method such as a color highlighting method.
  • the information processing device 93 includes an image acquisition unit 931, an adjustment feature amount calculation unit 932, a calibration processing unit 933, a lighting condition setting unit 934, and a movement mechanism control unit 935 as functional modules related to visual inspection.
  • the image acquisition unit 931 is a function of capturing an image from the camera 92. For example, in addition to an observation image of an inspection object irradiated with illumination light, a plurality of calibration images obtained by photographing a calibration standard plate 95 are acquired. .. For example, in this application example, six calibration image data obtained by photographing different parts of the calibration standard plate 95 are acquired.
  • the adjustment feature amount calculation unit 932 is a function for calculating the adjustment feature amount used for calibration. For example, in this application example, a feature amount (for example, a luminance value) possessed by each pixel of the image is extracted from each of the six calibration image data acquired by the image acquisition unit 931, and based on this, one pixel is extracted. Calculate the adjustment feature amount of. For example, for each pixel, the mode value of the data of the six luminance values extracted from the six image data is obtained, and the value of the mode value is used as the adjustment feature amount. For example, when the brightness values of a certain pixel obtained from the six calibration images are three for 200, two for 150, and one for 100, the adjustment feature amount of the pixel is set to 200. In this example, it can be considered that some obstacles such as dust and dirt have occurred in the places where the normal standard surface has a brightness value of 200 and the brightness values are 150 and 100.
  • the calibration processing unit 933 is a function of comparing and calibrating the adjustment feature amount calculated by the adjustment feature amount calculation unit 932 with the preset calibration reference value, and whether or not there is a difference between the two values. Find out whether the value of is high or its degree.
  • the illumination condition setting unit 934 is a function of setting the illumination condition by the illumination device 91, and the adjustment feature amount extracted from the calibration image based on the result obtained by the calibration processing unit 933 is the calibration reference value. Processing such as changing the current value of the lighting device 91 is performed so as to match with.
  • the movement mechanism control unit 935 is a mechanism that controls the drive of the movement mechanism 94, and controls an actuator for moving the movement mechanism 94 based on a user's input, a predetermined program, or the like.
  • the information processing device 93 controls the lighting device 91 and irradiates the calibration standard plate with the lighting light (step S901).
  • the information processing device 93 controls the camera 92 to take a picture of the calibration standard plate 95 in a state of being irradiated with the illumination light, and acquires an image (step S902).
  • the information processing apparatus 93 determines whether or not the number of times the calibration standard plate 95 has been photographed has reached the specified number of times (step S903).
  • the specified number of times is not limited as long as it is 2 times or more, but it can be, for example, 6 times.
  • the process proceeds to step S904, the calibration standard plate 95 is moved in the X-axis direction and / or the Y-axis direction (step S904), and then in step S902. Return and repeat the subsequent processing.
  • the range of the calibration standard plate 95 that fits in the field of view of the camera 92 becomes a range different from that at the time of the previous shooting, and the calibration images for the specified number of times of shooting the different range of the calibration standard plate 95 are acquired.
  • 3A to 3F show the relationship between the calibration standard plate 95 and the imaging ranges of the six calibration images.
  • the rectangle shown by the broken line in the figure is the shooting range.
  • H indicates dust and Y indicates dirt.
  • step S903 When it is determined in step S903 that the imaging has been performed a predetermined number of times, the information processing apparatus 93 extracts a feature amount from the acquired plurality of calibration images (step S905), and based on the extracted plurality of feature amounts. , The adjustment feature amount is calculated (step S906). Subsequently, the information processing apparatus 93 compares the calculated adjustment feature amount with the preset calibration reference value (step S907), and sets the lighting conditions as necessary based on the comparison result. (Step S908). Specifically, if there is a difference between the adjustment feature amount and the calibration reference value, the lighting conditions are reset by adjusting the current value of the lighting device 91 so as to calibrate the difference. .. This completes a series of routines for the calibration process of the optical system of the visual inspection device 9.
  • step S903 when the number of times of shooting is less than the specified number of times in step S903, the process returns to step S902 through step S904, but the process may return to step S901. That is, the lighting may be turned ON / OFF each time the image is taken.
  • the visual inspection device 9 Due to the configuration of the visual inspection device 9 according to the present application example as described above, even if some dust or dirt is generated on the calibration standard plate 95, the feature amount obtained from a plurality of calibration images can be obtained. Based on this, the adjustment feature amount of each pixel is calculated, so that the influence of dust and dirt can be reduced and highly accurate calibration can be performed. Therefore, it is possible to reduce the cost for ensuring and maintaining the cleanliness of the calibration standard plate 95.
  • FIG. 4 is a schematic view showing the hardware configuration of the substrate inspection device.
  • This substrate inspection device 1 is used for substrate appearance inspection (for example, inspection of solder joint state after reflow) in a surface mounting line.
  • the board inspection device 1 mainly includes a stage 10, a measurement unit 11, a control device 12, an information processing device 13, and a display device 14.
  • the measuring unit 11 includes a camera 110 and a lighting device 111.
  • the stage 10 is a mechanism for holding the substrate to be inspected and the calibration standard plate 15 and aligning them with the photographing position of the camera 110. As shown in FIG. 4, when the X-axis and the Y-axis are taken parallel to the stage 10 and the Z-axis is taken perpendicular to the stage 10, the stage 10 can translate at least two axes in the X direction and the Y direction.
  • the camera 110 is arranged so that the optical axis is parallel to the Z axis, and photographs the substrate on the stage 10 and the calibration standard plate 15 from vertically above.
  • the image data captured by the camera 110 is taken into the information processing device 13.
  • the camera 110 may have any field of view capable of capturing a desired imaging range, and any known technique can be adopted.
  • the lighting device 111 (111R, 111G, 111B) is a lighting means for irradiating a substrate and a standard plate 15 for calibration with illumination light of a different color (wavelength).
  • FIG. 4 schematically shows an XZ cross section of the illuminating device 111.
  • the illuminating device 111 is annular so that light of the same color can be illuminated from all directions (all directions around the Z axis). Or it has a dome shape.
  • FIG. 5 is a schematic plan view schematically showing the arrangement relationship of the light sources 111R, 111G, and 111B of the lighting device 111.
  • the lighting device 111 has a structure in which three annular light sources, a red light source 111R, a green light source 111G, and a blue light source 111B, are arranged concentrically around the optical axis of the camera 110.
  • the elevation angles and orientations of the light sources 111R, 111G, and 111B are adjusted so that the incident angles with respect to the substrate and the calibration standard plate 15 increase in the order of red light, green light, and blue light.
  • Such a lighting device 111 can be formed, for example, by arranging LEDs of each color R, G, and B in an annular shape on the outside of a dome-shaped diffuser plate.
  • the control device 12 is a control means for controlling the operation of the substrate inspection device 1, and is responsible for movement control of the stage 10, lighting and dimming control of the lighting device 111, shooting control of the camera 110, and the like.
  • the information processing apparatus 13 uses the image data captured from the camera 110 to acquire various measured values related to the calibration standard plate 15, calibrate the optical system of the measuring unit 11, and the state of the substrate to be inspected. It is a device that has a function of inspecting.
  • the display device 14 is a device that displays the measured values and inspection results obtained by the information processing device 13.
  • the information processing device 13 can be composed of, for example, a general-purpose computer having a CPU, RAM, a non-volatile storage device, and an input device. In FIG. 4, the control device 12, the information processing device 13, and the display device 14 are shown as separate blocks, but these may be configured by separate devices or may be configured by a single device. Good.
  • the calibration standard plate 15 has an area wider than the field of view of the camera, and is a white plate that reflects the illumination light from the illumination device 111 to the camera 110, whereby an image for calibration can be acquired. It is used by installing it on the stage 10 when performing calibration.
  • FIG. 6 is a block diagram showing a configuration of a functional module related to inspection processing provided by the information processing apparatus 13. These functional modules are realized by the CPU of the information processing device 13 reading and executing a program stored in the auxiliary storage device. However, all or part of the functions may be configured by a circuit such as an ASIC or FPGA.
  • the image acquisition unit 131 and the adjustment feature amount calculation unit 132 are the same as those of the visual inspection device 9 according to the application example for each function module of the calibration processing unit 133, detailed description thereof will be omitted.
  • the corrected image generation unit 134 is a function of generating a corrected image used for shading correction of the observed image. Using the adjustment feature amount calculated by the adjustment feature amount calculation unit 132, each pixel constituting the image generates a correction image composed of the adjustment feature amount.
  • the three-dimensional shape measurement unit 135 is a functional module that measures (restores) the three-dimensional shape of the substrate to be inspected from the two-dimensional image data.
  • An image obtained by the so-called color highlighting method is used to measure the three-dimensional shape of the substrate.
  • the color highlighting method irradiates a substrate with light of a plurality of colors (that is, wavelengths) at different incident angles, and the surface of the substrate has color characteristics according to its normal direction (that is, a normal reflection direction when viewed from a camera). This is a method of capturing the three-dimensional shape of the substrate surface as two-dimensional hue information by taking a picture with the color of the light source in the above appearing.
  • the inspection unit 136 measures various indexes related to the shape of the inspection board based on the three-dimensional shape data obtained by the three-dimensional shape measurement unit 135, and uses these measured values to inspect the state of the board. Is.
  • the storage unit 137 is a functional module that stores various programs, an inspection program that defines inspection items and conditions in the inspection unit 136, and a program for calibrating the visual inspection device 9.
  • the inspection program defines, for example, the position and size of the inspection target, the size of parts, the type of index to be measured, and the judgment reference value (threshold value and range for judging non-defective product and defective product) for each index. ..
  • the output processing unit 138 outputs a command for controlling the stage 10 and the measurement unit 11 to the control device 12, and outputs the measurement value and the inspection result obtained by the inspection unit 136 to the display device 14 and the like. It is a functional module to do.
  • FIG. 7 is a flowchart showing the flow of the inspection process.
  • step S101 a process of calibrating the optical system of the substrate inspection apparatus 1 is executed (step S101). Since the processing is the same as that of the visual inspection apparatus 9 according to the application example, detailed description thereof will be omitted, but a plurality of calibration image data (for example, one resolution each) obtained by photographing different parts of the calibration standard plate 15. As described above, about 10 image data having different positions in the shooting range) are acquired, the adjustment feature amount is calculated from the image, and calibration is performed based on this.
  • a plurality of calibration image data for example, one resolution each
  • the information processing apparatus 13 generates a correction image used for shading correction of the observed image in the correction image generation unit 134 (step S102). Specifically, as described above, using the adjustment feature amount calculated during the calibration process in step S101, each pixel constituting the image generates a correction image composed of the adjustment feature amount.
  • control device 12 controls the stage 10 according to the inspection program stored in the storage unit 137, and moves the stage 10 to the substrate measurement position (field of view of the camera 110) to be inspected (step S103). Then, the control device 12 turns on the lighting device 111 (step S104), and takes a picture with the camera 110 in a state of irradiating with red light, green light, and blue light (step S105). The obtained image data (observed image) is taken into the information processing device 13 by the image acquisition unit 131.
  • the information processing apparatus 13 performs shading correction on the observation image obtained in step S105 with reference to the correction image obtained in step S102 (step S106). Then, the three-dimensional shape measuring unit 135 restores the three-dimensional shape of the substrate from the observation image corrected in this way, and the inspection unit 136 uses the three-dimensional shape and the threshold value of the inspection program to determine the substrate. A visual inspection is carried out (step S107). When the inspection is completed, the display device 14 displays the result of the inspection (step S108) and ends a series of processes.
  • a predetermined feature amount is extracted from a plurality of images obtained by photographing different parts of the calibration standard plate 15, and based on the values of the extracted plurality of feature amounts. It is possible not only to calibrate the lighting conditions but also to perform shading correction of the image of the image to be inspected by using the adjustment feature amount calculated in the above.
  • the stage on which the calibration standard plate is placed is moved to acquire calibration images obtained by photographing a plurality of different parts, but by moving the photographing means in a horizontal plane, You may try to get this.
  • the calibration standard plate has an area wider than the field of view of the camera, but it is not always necessary, and the calibration standard plate has an area equal to or narrower than the field of view of the camera. It may be a thing. Even in this case, the purpose can be achieved by narrowing down the area for processing the captured image.
  • the standard plate for calibration is a white plate, but it does not have to be white and may be a transparent plate. Further, the calibration standard plate does not have to be a separate body from the visual inspection device, and may be a jig fixed within the imaging range of the camera.
  • the luminance value was extracted from each pixel of the acquired image, but for example, the average luminance value of each pixel in the region is taken as one unit of 100 ⁇ 100 pixels.
  • the value may be extracted as a "feature amount gradation value". According to such a method, the processing load can be reduced and the processing time can be shortened as compared with the case where the "adjustment feature amount" is calculated for each pixel.
  • One aspect of the present invention is a lighting means (91) that irradiates an object to be inspected with illumination light.
  • An inspection means (93) that inspects the object to be inspected by processing an image taken by the photographing means, and an inspection means (93).
  • a predetermined feature amount was extracted from a plurality of images of the calibration standard surface photographed by the photographing means in a state where the relative positions of the photographing means and the calibration standard surface in the horizontal direction were different, and the extracted features were extracted.
  • An adjustment feature amount calculation means (932) that calculates one adjustment feature amount based on the values of a plurality of feature amounts, and an adjustment feature amount calculation means (932).
  • the visual inspection device (9) performs calibration of the lighting means and / or correction processing of the captured image based on the adjustment feature amount. Is.
  • another aspect of the present invention is a method of calibrating an appearance inspection device that inspects the inspected object based on an image of the inspected object taken by irradiating the inspected object with illumination light.
  • An irradiation step (S901) of irradiating the calibration standard surface prepared for calibration with the illumination light and A photographing step (S902; S903; S904) for photographing a plurality of different ranges of the calibration standard surface irradiated with the illumination light, and
  • An extraction step (S905) for extracting a feature amount from a plurality of images of the standard surface for calibration taken in the photographing step, respectively.

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Abstract

La présente invention concerne un dispositif d'inspection d'aspect qui comprend un moyen d'éclairage pour émettre une lumière d'éclairage sur un objet en cours d'inspection, un moyen de photographie pour photographier l'objet en cours d'inspection et une surface de référence d'étalonnage préparée pour un étalonnage, un moyen d'inspection pour inspecter l'objet en cours d'inspection par traitement d'une image photographiée par le moyen de photographie, et un moyen de calcul de valeur de caractéristique de réglage pour extraire des valeurs de caractéristiques prescrites d'une pluralité d'images de la surface de référence d'étalonnage photographiées par le moyen de photographie lorsque les moyens de photographie et la surface de référence d'étalonnage ont été dans différentes relations de position horizontale et pour calculer une valeur de caractéristique de réglage unique sur la base de la pluralité de valeurs de caractéristiques extraites. Le dispositif d'inspection d'aspect utilise la valeur de caractéristique de réglage pour étalonner le moyen d'éclairage et/ou corriger l'image photographiée.
PCT/JP2020/008748 2019-09-20 2020-03-02 Dispositif d'inspection d'aspect, procédé d'étalonnage de dispositif d'inspection d'aspect, et programme WO2021053852A1 (fr)

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JP2019-171844 2019-09-20
JP2019171844A JP2021047162A (ja) 2019-09-20 2019-09-20 外観検査装置、外観検査装置の較正方法

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JP2012112729A (ja) * 2010-11-22 2012-06-14 Toshiba Corp 表面検査装置のシェーディング補正方法
JP2012173045A (ja) * 2011-02-18 2012-09-10 Jfe Steel Corp 表面検査装置の評価装置及び表面検査装置の評価方法
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