WO2021036481A1 - Pdms 基片微通道的超低温辅助微磨料气射流加工装置 - Google Patents

Pdms 基片微通道的超低温辅助微磨料气射流加工装置 Download PDF

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WO2021036481A1
WO2021036481A1 PCT/CN2020/099001 CN2020099001W WO2021036481A1 WO 2021036481 A1 WO2021036481 A1 WO 2021036481A1 CN 2020099001 W CN2020099001 W CN 2020099001W WO 2021036481 A1 WO2021036481 A1 WO 2021036481A1
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Prior art keywords
reaction chamber
air pump
gas jet
pdms substrate
ultra
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PCT/CN2020/099001
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English (en)
French (fr)
Inventor
孙玉利
张桂冠
孙淑琴
谢筱萍
盛一
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南京星合精密智能制造研究院有限公司
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Publication of WO2021036481A1 publication Critical patent/WO2021036481A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00—Abrasive blasting machines or devices; Plants
    • B24C3/02—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other
    • B24C3/04—Abrasive blasting machines or devices; Plants characterised by the arrangement of the component assemblies with respect to each other stationary
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00—Abrasive blasting machines or devices; Plants
    • B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material

Definitions

  • the utility model relates to the technical field of PDMS substrate processing, in particular to an ultra-low temperature auxiliary microabrasive gas jet processing device for PDMS substrate microchannels.
  • PDMS polydimethylsiloxane is a kind of organic silicon. Because of its low cost, simple use, good adhesion to silicon wafers, and good chemical inertness, it has become a wide range of applications. Polymer materials used in microfluidics and other fields.
  • the processing of PDMS substrates mostly uses low-temperature microabrasive gas jet technology, but the existing processing devices still have shortcomings.
  • most of the fixtures of the existing processing devices are not adjustable.
  • Conventional processing equipment needs to unload the substrate and turn it over. This method causes a lot of waste of time and is not conducive to the improvement of work efficiency.
  • most of the existing processing equipment reduces the temperature of the entire reaction chamber. The room has a large space and needs to consume more nitrogen for cooling. This method will waste more nitrogen resources and is not low-carbon and environmentally friendly.
  • An ultra-low temperature auxiliary micro-abrasive gas jet processing device for PDMS substrate microchannels includes a reaction chamber.
  • the inner bottom and surface walls of the reaction chamber are respectively fixedly connected with a motor and a mechanical arm on both sides, and the output shaft of the motor is drivingly connected with A rectangular frame, the inner side of the frame is fixedly connected with an electric push rod, the telescopic end of the electric push rod is rotatably connected with a connecting rod, the end of the connecting rod away from the electric push rod is rotatably connected with a pressing rod, the mechanical arm
  • the top of the rotary joint is connected with a nozzle.
  • a control part is arranged on the nozzle, and the control part is composed of a temperature measuring probe and a processor.
  • the top of the reaction chamber is fixedly connected with a first air pump and a second air pump.
  • the inlet end of the second air pump is respectively connected with an inlet pipe and a feed port.
  • the outlet end of the second air pump is connected with the nozzle through a connecting pipe.
  • the inlet end of the first air pump is communicated with the reaction chamber, the outlet end of the first air pump is communicated with the inlet pipe through a three-way valve, and a valve is provided on the top of the inlet.
  • the side end surface of the reaction chamber is provided with a sealed door.
  • the inner surface wall of the connecting pipe is provided with a thermal insulation layer.
  • the processor is electrically connected to the temperature measuring probe and the valve.
  • a motor is arranged inside the reaction chamber, a frame is set on the output shaft of the motor, an electric push rod is arranged on the inner side of the frame, a connecting rod is arranged on the telescopic end of the electric push rod, and a pressure rod is arranged on the connecting rod
  • the reaction type is equipped with a mechanical arm, a nozzle is set on the manipulator, a control part is set on the nozzle, a second air pump is set on the top of the reaction chamber, and an air inlet pipe is set on the second air pump.
  • the axial thrust of the electric push rod is transmitted to the direction perpendicular to the axial direction of the electric push rod so that the push rod can be clamped.
  • the workpiece through this structure, saves the space of the clamping structure; second, when the workpiece needs to be processed on both sides, the motor can drive the frame to rotate 180° to turn the workpiece over, thereby helping to improve the processing efficiency.
  • the top of the reaction chamber is provided with a first air pump, one of the air pumps is connected to the second air pump through a three-way valve, the second air pump is provided with a feed port, a valve is provided on the feed port, and the control part is controlled by It is composed of a temperature measuring probe and a processor, a connecting pipe is set between the nozzle and the second air pump, and an insulation layer is set on the inside of the connecting pipe.
  • the temperature measuring probe can detect the temperature of the workpiece, and The data is transmitted to the processor.
  • the valve can be opened by the processor to allow the abrasive to enter the reaction chamber.
  • Automatic control helps to improve the accuracy of processing;
  • the first air pump can be used before processing
  • the reaction chamber is evacuated into a near-vacuum state to prevent moisture in the air from condensing into frost on the surface of the workpiece when the nitrogen is cooled, and the first air pump can circulate the nitrogen and abrasive during the processing, which helps to save the amount of raw materials used. Make production low-carbon and environmentally friendly.
  • Figure 1 shows a schematic diagram of the internal structure of a reaction chamber provided according to an embodiment of the present invention
  • Figure 2 shows a schematic view of the structure of a nozzle and a connecting pipe according to an embodiment of the present invention
  • Fig. 3 shows a schematic diagram of the external structure of a reaction chamber provided according to an embodiment of the present invention.
  • an ultra-low temperature assisted microabrasive gas jet processing device for PDMS substrate microchannels including a reaction chamber 1, and the inner bottom and surface walls of the reaction chamber 1 are respectively fixed on both sides
  • the motor 2 and the mechanical arm 7 are connected.
  • the output shaft of the motor 2 is connected to a rectangular frame 3, the inner side of the frame 3 is fixedly connected with an electric push rod 4, the telescopic end of the electric push rod 4 is rotatably connected with a connecting rod 5, and the connecting rod 5
  • the end far away from the electric push rod 4 is connected to the pressure rod 6 by rotating, the top of the mechanical arm 7 is rotated and connected to the nozzle 8.
  • the electric push rod 4 pushes the connecting rod 5 to move, and then drives the pressure rod 6 to move.
  • the thrust force in the vertical direction is transmitted to the vertical direction, which saves the space occupied by the structure, and the motor 2 drives the frame 3 to rotate to process the back side of the workpiece.
  • two compression rods 6 are provided, and both ends of the two compression rods 6 are slidably connected to the frame 3 to improve the stability of the compression rod 6 when it moves.
  • a control unit 9 is provided on the nozzle 8.
  • the control unit 9 is composed of a temperature measuring probe 901 and a processor 902.
  • the processor 902 is electrically connected to the temperature measuring probe 901 and the valve 15
  • the temperature measuring probe 901 can detect the temperature of the workpiece and transmit the data to the processor 902.
  • the processor 902 can control the opening of the valve 15 so that the device can be processed automatically.
  • the top of the reaction chamber 1 is fixedly connected with a first air pump 10 and a second air pump 11, and the air inlet end of the second air pump 11 is respectively connected with an air inlet pipe 12 and a feed port 13, and the second air pump 11
  • the outlet end of the first air pump 10 communicates with the nozzle 8 through the connecting pipe 16, the inlet end of the first air pump 10 communicates with the reaction chamber 1, the outlet end of the first air pump 10 communicates with the inlet pipe 12 through the three-way valve 14, and the top of the inlet 13
  • a valve 15 is provided.
  • the first air pump 10 can extract the air in the reaction chamber 1 and circulate nitrogen and abrasives into the air inlet pipe 12, so that the raw materials are recycled and the amount of raw materials used is saved.
  • the side end surface of the reaction chamber 1 is provided with a sealing door 18 to improve the sealing performance of the reaction chamber 1 and prevent nitrogen leakage.
  • the inner surface wall of the connecting pipe 16 is provided with an insulation layer 17, and the temperature increase of the nitrogen gas is reduced by the insulation layer 17 and the temperature reduction speed is increased.
  • the motor 2, the electric push rod 4, the mechanical arm 7, the control unit 9, the first air pump 10 and the second air pump 11 are supplied with electricity.
  • the stretch electric push rod 4 pushes the pressure rod 6 to the inside of the frame 3 through the connecting rod 5 until it fits the workpiece, and then fixes the workpiece on the inside of the frame 3, and then closes the sealed door 18 to open
  • the first air pump 10 and the three-way valve 14 are adjusted to make the first air pump 10 communicate with the outside.
  • the interior of the reaction chamber 1 is drawn into a near vacuum state by the first air pump 10, and then nitrogen is introduced from the inlet pipe 12, and the second air pump 11 is turned on And adjust the three-way valve 14 to connect the first air pump 10 with the air inlet pipe 12.
  • the mechanical arm 7 can drive the nozzle 8 to move to the top of the workpiece. Nitrogen gas is sprayed from the nozzle 8 through the connecting pipe 16 to cool the workpiece.
  • the temperature measuring probe 901 can The temperature of the workpiece is measured, and the measured data is sent to the processor 902.
  • the processor 902 controls the valve 15 to open, and the abrasive enters from the inlet 13 and follows the nitrogen from the nozzle 8
  • the workpiece is processed by spraying out; secondly, the first air pump 10 can suck in the nitrogen and abrasives in the reaction chamber 1 and transport them back to the air inlet pipe 12.
  • the processor 902 controls the valve 15 to open, and the abrasive enters from the inlet 13 and follows the nitrogen from the nozzle 8
  • the first air pump 10 can suck in the nitrogen and abrasives in the reaction chamber 1 and transport them back to the air inlet pipe 12.
  • the amount of nitrogen and abrasives used is saved, and the workpieces need to be doubled.
  • turn on the motor 2 to drive the frame 3 to rotate 180°, and then the back side of the workpiece can be processed.
  • the reverse side of the workpiece does not need to be suspended for processing, and the existing ultra-low temperature assistance can be solved by local cooling and recycling of materials.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，包括反应室(1)，反应室(1)的内部底表壁两侧分别固定连接有电机(2)和机械臂(7)。连接杆(5)上设置了压杆(6)，反应室(1)的内部设置了机械臂(7)，机械臂(7)上设置了喷嘴(8)，喷嘴(8)上设置了控制部(9)，反应室(1)的顶部设置了第二气泵(11)，第二气泵(11)上设置了进气管(12)，采用此设计的好处在于：其一，通过拉伸电动推杆(4)可推动连接杆(5)移动，由于压杆(6)与框架(3)滑动连接，进而把电动推杆(4)轴向的推力传递到与电动推杆(4)轴向垂直的方向使压杆(6)可以夹持工件，通过该结构节省了夹持结构的空间；其二，在需要对工件进行双面加工时，通过电机(2)带动框架(3)旋转180°即可使工件翻转，进而有助于提高加工的效率。

Description

PDMS基片微通道的超低温辅助微磨料气射流加工装置 技术领域
本实用新型涉及PDMS基片加工技术领域，尤其涉及一种PDMS基片微通道的超低温辅助微磨料气射流加工装置。
 背景技术
PDMS聚二甲基硅氧烷，是有机硅的一种，因其成本低，使用简单，同硅片之间具有良好的粘附性，而且具有良好的化学惰性等特点，成为一种广泛应用于微流控等领域的聚合物材料。
PDMS基片的加工大多采用低温微磨料气射流技术，但是现有的加工装置仍然存在不足之处，首先，现有加工装置的夹具大多不可调节，在需要对PDMS基片进行双面加工时，常规的加工装置需要卸下基片，将其翻面，这种方式造成大量的时间浪费，不利于工作效率的提高；其次，现有加工装置大多为将整个反应室的温度全部降低，由于反应室的空间较大，需要消耗较多的氮气进行降温，这种方式会浪费较多的氮气资源，不低碳环保。
 技术问题
为了解决现有超低温辅助微磨料气射流加工装置的夹具不可调节以及浪费大量氮气资源的问题，而提出的一种PDMS基片微通道的超低温辅助微磨料气射流加工装置。
 技术解决方案
为了实现上述目的，本实用新型采用了如下技术方案：
一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，包括反应室，所述反应室的内部底表壁两侧分别固定连接有电机和机械臂，所述电机的输出轴传动连接有矩形的框架，所述框架的内侧固定连接有电动推杆，所述电动推杆的伸缩端转动连接有连接杆，所述连接杆远离电动推杆的一端转动连接有压杆，所述机械臂的顶部转动连接有喷嘴。
作为上述技术方案的进一步描述：
所述压杆设有两个，所述两个压杆的两端均与框架滑动连接。
作为上述技术方案的进一步描述：
所述喷嘴上设有控制部，所述控制部由测温探头和处理器组成。
作为上述技术方案的进一步描述：
所述反应室的顶部固定连接有第一气泵和第二气泵，所述第二气泵进气端分别连通有进气管和进料口，第二气泵的出气端通过连接管与喷嘴连通，所述第一气泵的进气端与反应室连通，第一气泵的出气端通过三通阀与进气管连通，所述进料口的顶部设有阀门。
作为上述技术方案的进一步描述：
所述反应室的侧端面设有密封门。
作为上述技术方案的进一步描述：
所述连接管的内表壁设有保温层。
作为上述技术方案的进一步描述：
所述处理器与测温探头和阀门均通过电连接。
 有益效果
1、本实用新型中，反应室的内部设置了电机，电机的输出轴设置了框架，框架的内侧设置了电动推杆，电动推杆的伸缩端设置了连接杆，连接杆上设置了压杆，反应式的内部设置了机械臂，机械臂上设置了喷嘴，喷嘴上设置了控制部，反应室的顶部设置了第二气泵，第二气泵上设置了进气管，采用此设计的好处在于：其一，通过拉伸电动推杆可推动连接杆选动，由于压杆与框架滑动连接，进而把电动推杆轴向的推力传递到与电动推杆轴向垂直的方向使压杆可以夹持工件，通过该结构节省了夹持结构的空间；其二，在需要对工件进行双面加工时，通过电机带动框架旋转180°即可使工件翻转，进而有助于提高加工的效率。
2、本实用新型中，反应室的顶部设置了第一气泵，其一气泵通过三通阀与第二气泵连接，第二气泵上设置了进料口，进料口上设置了阀门，控制部由测温探头和处理器组成，喷嘴和第二气泵之间设置了连接管，连接管的内侧设置了保温层，采用此设计的好处在于：其一，测温探头可以检测工件的温度，并且将数据传输给处理器，当温度降至磨料的工作温度时，通过处理器打开阀门即可使磨料进入反应室，通过自动化控制有助于提高加工的精度；其二，第一气泵可在加工前将反应室抽成近真空状态，在氮气降温时避免空气中的水汽在工件表面凝结成冰霜，并且在加工的过程中第一气泵可将氮气和磨料循环，有助于节省原料的使用量，使生产低碳环保。
 附图说明
图1示出了根据本实用新型实施例提供的反应室的内部结构示意图；
图2示出了根据本实用新型实施例提供的喷嘴与连接管的结构示意图；
图3示出了根据本实用新型实施例提供的反应室的外部结构示意图。
图例说明：
1、反应室；2、电机；3、框架；4、电动推杆；5、连接杆；6、压杆；7、机械臂；8、喷嘴；9、控制部；901、测温探头；902、处理器；10、第一气泵；11、第二气泵；12、进气管；13、进料口；14、三通阀；15、阀门；16、连接管；17、保温层；18、密封门。
 本发明的实施方式
下面将结合本实用新型实施例中的附图，对本实用新型实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本实用新型一部分实施例，而不是全部的实施例。基于本实用新型中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其它实施例，都属于本实用新型保护的范围。
请参阅图1-3，本实用新型提供一种技术方案：一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，包括反应室1，反应室1的内部底表壁两侧分别固定连接有电机2和机械臂7，电机2的输出轴传动连接有矩形的框架3，框架3的内侧固定连接有电动推杆4，电动推杆4的伸缩端转动连接有连接杆5，连接杆5远离电动推杆4的一端转动连接有压杆6，机械臂7的顶部转动连接有喷嘴8，电动推杆4推动连接杆5移动，进而带动压杆6移动，通过将电动推杆4轴向的推力传递至垂直的方向，节省了结构占用的空间，并且通过电机2带动框架3旋转即可对工件的背面进行加工。
具体的，如图1所示，压杆6设有两个，两个压杆6的两端均与框架3滑动连接，提高压杆6移动时的稳定性。
具体的，如图1和图2所示，喷嘴8上设有控制部9，控制部9由测温探头901和处理器902组成，处理器902与测温探头901和阀门15均通过电连接，测温探头901可检测工件的温度并且将数据传输给处理器902，处理器902可控制阀门15的开启，使装置可以自动化加工。
具体的，如图1所示，反应室1的顶部固定连接有第一气泵10和第二气泵11，第二气泵11进气端分别连通有进气管12和进料口13，第二气泵11的出气端通过连接管16与喷嘴8连通，第一气泵10的进气端与反应室1连通，第一气泵10的出气端通过三通阀14与进气管12连通，进料口13的顶部设有阀门15，第一气泵10可将反应室1内的空气抽出，并且将氮气和磨料循环通入进气管12，循环使用原料节省了原料的使用量。
具体的，如图3所示，反应室1的侧端面设有密封门18，提高反应室1的密封性，防止氮气泄露。
具体的，如图2所示，连接管16的内表壁设有保温层17，通过保温层17减少氮气温度提高，提高降温的速度。
工作原理：使用时，给电机2、电动推杆4、机械臂7、控制部9、第一气泵10和第二气泵11通以市电，首先，打开密封门18，将工件放置于框架3的两个压杆6之间，拉伸电动推杆4通过连接杆5推动压杆6向框架3的内侧移动直至贴合工件，进而将工件固定在框架3的内侧，接着关闭密封门18开启第一气泵10并且调节三通阀14使第一气泵10与外界连通，通过第一气泵10将反应室1的内部抽成近真空状态，再从进气管12通入氮气、开启第二气泵11并且调节三通阀14使第一气泵10与进气管12连通，机械臂7可带动喷嘴8移动至工件的上方，氮气经过连接管16从喷嘴8喷出对工件进行降温，测温探头901可对工件进行测温，将测得的数据传给处理器902，当温度降到磨料可加工的温度时，处理器902控制阀门15打开，磨料从进料口13进入并且跟随氮气一同从喷嘴8喷出对工件进行加工；其次，第一气泵10可将反应室1内部的氮气和磨料吸进并且输送回进气管12，通过循环使用节省了氮气和磨料的使用量，在需要对工件进行双面加工时，开启电机2带动框架3旋转180°，即可对工件的背面进行加工，通过上述的步骤，工件的反面不需要暂停加工，并且通过局部降温和循环用料可解决现有超低温辅助微磨料气射流加工装置的夹具不可调节以及浪费大量氮气资源的问题。
以上所述，仅为本实用新型较佳的具体实施方式，但本实用新型的保护范围并不局限于此，任何熟悉本技术领域的技术人员在本实用新型揭露的技术范围内，根据本实用新型的技术方案及其实用新型构思加以等同替换或改变，都应涵盖在本实用新型的保护范围之内。

Claims (7)

  1. 一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，包括反应室（1），其特征在于，所述反应室（1）的内部底表壁两侧分别固定连接有电机（2）和机械臂（7），所述电机（2）的输出轴传动连接有矩形的框架（3），所述框架（3）的内侧固定连接有电动推杆（4），所述电动推杆（4）的伸缩端转动连接有连接杆（5），所述连接杆（5）远离电动推杆（4）的一端转动连接有压杆（6），所述机械臂（7）的顶部转动连接有喷嘴（8）。
  2. 根据权利要求1所述的一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，其特征在于，所述压杆（6）设有两个，所述两个压杆（6）的两端均与框架（3）滑动连接。
  3. 根据权利要求1所述的一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，其特征在于，所述喷嘴（8）上设有控制部（9），所述控制部（9）由测温探头（901）和处理器（902）组成。
  4. 根据权利要求3所述的一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，其特征在于，所述反应室（1）的顶部固定连接有第一气泵（10）和第二气泵（11），所述第二气泵（11）进气端分别连通有进气管（12）和进料口（13），第二气泵（11）的出气端通过连接管（16）与喷嘴（8）连通，所述第一气泵（10）的进气端与反应室（1）连通，第一气泵（10）的出气端通过三通阀（14）与进气管（12）连通，所述进料口（13）的顶部设有阀门（15）。
  5. 根据权利要求1所述的一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，其特征在于，所述反应室（1）的侧端面设有密封门（18）。
  6. 根据权利要求4所述的一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，其特征在于，所述连接管（16）的内表壁设有保温层（17）。
  7. 根据权利要求4所述的一种PDMS基片微通道的超低温辅助微磨料气射流加工装置，其特征在于，所述处理器（902）与测温探头（901）和阀门（15）均通过电连接。
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