WO2021017537A1 - 微型发光二极管阵列显示背板及其制造方法和修复方法 - Google Patents

微型发光二极管阵列显示背板及其制造方法和修复方法 Download PDF

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WO2021017537A1
WO2021017537A1 PCT/CN2020/085550 CN2020085550W WO2021017537A1 WO 2021017537 A1 WO2021017537 A1 WO 2021017537A1 CN 2020085550 W CN2020085550 W CN 2020085550W WO 2021017537 A1 WO2021017537 A1 WO 2021017537A1
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micro
emitting diode
bonding material
display backplane
light emitting
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French (fr)
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黄安
朱景辉
徐尚君
张惟诚
朱充沛
高威
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南京中电熊猫液晶显示科技有限公司
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Publication of WO2021017537A1 publication Critical patent/WO2021017537A1/zh

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67144Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • H01L27/153Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/483Containers
    • H01L33/486Containers adapted for surface mounting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0066Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body

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  • the invention belongs to the technical field of miniature light-emitting diodes, and specifically relates to a miniature light-emitting diode array display backplane and a manufacturing method and repair method thereof.
  • Micro LED Micro LED
  • OLED Organic Light-Emitting Diode, organic electroluminescence display
  • LCD Liquid Crystal Display (Liquid Crystal Display) technology
  • the challenge is how to remove the bad Micro LED on the display back panel and replace it with a good Micro LED is a problem that needs to be solved.
  • the present invention provides a miniature light-emitting diode array display backplane and a manufacturing method and repairing method thereof.
  • the purpose is to provide a miniature light-emitting diode array display backplane that is easy to repair, so as to realize the repair of the miniature light-emitting diodes, so as to realize Zero defect display.
  • the present invention discloses a miniature light emitting diode array display backplane, including: a display backplane substrate; a plurality of grooves arranged on the display backplane substrate and arranged in an array; A plurality of bottom electrodes of the groove; a plurality of miniature heating resistance wires passing through the groove and contacting the bottom electrode; and a bonding material in the groove and a miniature light emitting diode on the bonding material;
  • the micro heating resistance wire is at least partially located in the groove and partly on the display backplane substrate, and the bottom electrode in the groove is located below the micro heating resistance wire; when the micro light emitting diode is damaged, the micro heating resistance After the wire heats and melts the bonding material, the damaged miniature light-emitting diode can be transferred away.
  • it further includes resistance wire electrodes at both ends of the miniature heating resistance wire.
  • the shape of the miniature heating resistance wire is one of a straight line, a corrugated shape, or a ring shape.
  • the resistance wire electrodes are on two sides or the same side of the bottom electrode.
  • the material of the miniature heating resistance wire is elemental metal or alloy.
  • the present invention also discloses a manufacturing method of a micro light emitting diode array display backplane, which includes the following steps:
  • S05 Implanting miniature light-emitting diodes on the bonding material
  • the bonding material is implanted in the groove through a transfer technology or an electronic vapor deposition or sputtering process.
  • the bonding material is a simple metal or an alloy.
  • the volume of the bonding material is smaller than the volume of the groove.
  • the present invention also discloses a method for repairing a micro light emitting diode array display backplane, which includes the following steps:
  • S4 Stop applying voltage to the miniature heating resistor wire or heating the entire display back plate to cool and solidify the bonding material.
  • a bonding layer is added and a miniature heating resistance wire is arranged at the bottom of the bonding layer, and the bonding layer is heated and melted by applying a voltage to the miniature heating resistance wire, so that the damaged miniature light emitting diode can be transferred away, and the implanted miniature light emitting diode can be repeatedly replaced
  • a micro light emitting diode is separately placed in each groove of the present invention, and no additional repair treatment is required on the bottom electrode, so that the utilization rate of the micro light emitting diode is high.
  • FIG. 1 is a schematic diagram of the display backplane of the micro light emitting diode array of the present invention
  • FIG. 2 is a schematic diagram of the shape of the miniature heating resistance wire of the present invention.
  • FIG. 3 is a schematic diagram of steps S01-S02 of the manufacturing method of the micro light-emitting diode array display backplane of the present invention.
  • step S04 is a schematic diagram of step S04 of the manufacturing method of the micro light emitting diode array display backplane of the present invention.
  • step S05 is a schematic diagram of step S05 of the manufacturing method of the micro light emitting diode array display backplane of the present invention.
  • FIG. 6 is a schematic diagram of step S2 of the method for repairing the backplane of the micro light emitting diode array display of the present invention.
  • FIG. 7 is a schematic diagram of step S3 of the method for repairing the backplane of the micro light emitting diode array display of the present invention.
  • the present invention provides a miniature light-emitting diode array display backplane, as shown in FIG. 1, including: a display backplane substrate 01; a plurality of grooves 02 arranged on the display backplane substrate 01 and arranged in an array; A plurality of bottom electrodes 03 arranged through the groove 02; a plurality of miniature heating resistance wires 04 passing through the groove 02 and perpendicular to the bottom electrode 03, resistance wire electrodes 041 located at both ends of the micro heating resistance wire 04; and located in the groove
  • the bottom electrode 03 in the groove 02 is located below the miniature heating resistance wire 04.
  • the micro heating resistance wire 04 can transfer the damaged micro light emitting diode 06 after heating and melting the bonding material 05.
  • the micro-light-emitting diode array display backplane may also include the packaging layer of the micro-light-emitting diode 06 and the top electrode (not shown in the figure).
  • the shape of the groove 02 can be any shape, for example, it can be other shapes such as a circle or a square.
  • the shape of the miniature heating resistance wire 04 can be linear, corrugated or ring-shaped, etc., in order to increase the heating area of the bonding material 05.
  • the resistance wire electrodes 041 at both ends of the miniature heating resistance wire 04 can be located on both sides of the bottom electrode 03 or on the same side of the bottom electrode 03.
  • the material of the micro heating resistance wire 04 can be simple metal or alloy material.
  • the invention also discloses a manufacturing method of the micro light emitting diode array display backplane, which includes the following steps:
  • steps S01-S03 are shown in FIG. 3, the formation of groove 02 in step S01 also specifically includes processes such as glue coating, exposure, development, and etching; the formation of bottom electrode 03 in step S02 also specifically includes film formation, coating Glue, exposure, development, and etching processes; the formation of the miniature heating resistance wire 04 and the resistance wire electrode 041 in step S03 also specifically includes the processes of film formation, glue coating, exposure, development, and etching.
  • step S04 is a schematic diagram of step S04.
  • the bonding material 05 is peeled off from the buffer layer 31 on the bonding material substrate 30 by the transfer head 20, and then transferred to the micro light emitting diode to be implanted by the transfer head 20
  • the array shows the groove 02 on the back panel.
  • the bonding material 05 can be implanted in the groove 02 on the display backplane substrate 01 by transfer technology, and can also be implanted by techniques such as electronic evaporation or sputtering.
  • the bonding material 05 may be a simple metal or alloy with a relatively low melting point, such as tin or tin-lead alloy.
  • the volume of the bonding material 05 should be smaller than the volume of the groove 02, and the bonding material 05 needs to be maintained with the micro heating resistance wire 04 Full contact.
  • step S05 is a schematic diagram of step S05.
  • the micro light emitting diode 06 is peeled off from the buffer layer 61 on the micro light emitting diode substrate 60 by the transfer head 20, and then transferred to the micro light emitting diode array to be implanted by the transfer head 20
  • the bonding material 05 is heated and melted and then cooled to room temperature. The purpose is to make the micro light emitting diode 06 and the bottom electrode 03 tightly connected through the bonding material 05.
  • the invention also discloses a method for repairing a micro light emitting diode array display back panel, which is suitable for the micro light emitting diode array display back panel manufactured by the above manufacturing method.
  • the repair method includes the following steps:
  • the bonding material 05 is added and the micro heating resistance wire 04 is arranged at the bottom of the bonding material 05.
  • the micro heating resistance wire 04 is used to heat the bonding material 05 by applying a voltage, so that the damaged micro light emitting diode 06 can be transferred and repeated.
  • the present invention also has higher display backplane resolution and space utilization.

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

一种微型发光二极管阵列显示背板及其制造方法和修复方法,涉及微型发光二极管的技术领域,所述微型发光二极管阵列显示背板包括:显示背板衬底(01);位于显示背板衬底(01)上且呈阵列排布的多个凹槽(02);阵列排布并经过凹槽(02)的多条底部电极(03);经过凹槽(02)并与底部电极(03)接触的多条微型加热电阻丝(04);以及位于凹槽(02)内的键合材料(05)和位于键合材料(05)上的微型发光二极管(06);其中,所述微型加热电阻丝(04)至少部分位于凹槽(02)内、部分位于显示背板衬底(01)上,凹槽(02)内的底部电极(03)位于所述微型加热电阻丝(04)的下方;当微型发光二极管(06)损坏时,微型加热电阻丝(04)对键合材料(05)进行加热熔融后可以转移走损坏的微型发光二极管(06)。

Description

微型发光二极管阵列显示背板及其制造方法和修复方法
本申请要求于2019年7月29日递交中国专利局、申请号为201910687499.0,发明名称为“微型发光二极管阵列显示背板及其制造方法和修复方法”的中国专利申请的优先权,其全部内容通过引用结合在本申请中。
技术领域
本发明属于微型发光二极管的技术领域,具体涉及微型发光二极管阵列显示背板及其制造方法和修复方法。
背景技术
随着新型显示技术的发展,微型发光二极管(Micro LED)作为新一代显示技术已经登上时代舞台,微型发光二极管比现有的OLED(Organic Light-Emitting Diode,有机电致发光显示)以及LCD(Liquid Crystal Display,液晶显示器)技术亮度更高、功耗更低、发光效率更好、寿命更长,但是目前微型发光二极管依然存在很多待解决的难题,其中微型发光二极管的修补就是其中一项主要的挑战,针对显示背板上坏的Micro LED,如何将其剔除并更换成好的Micro LED就是需要解决的问题。
为了解决这个问题,苹果公司申请了一项专利号为CN108133942A的发明,该发明利用的是冗余Micro LED修补的思想,通过在同一个凹槽内设置多个键合点位,并且凹槽的键合点位上放置同类型的Micro LED,当凹槽内的其中一颗Micro LED存在缺陷时利用电极剪切手法即可进行修补,凹槽内还有其他多个Micro LED作为替补。但是此发明也存在缺陷,其中的损坏的Micro LED并没有做剔除处理,从而使得有缺陷的Micro LED占据了显示背板的空间,这样导致了显示背板的空间利用率和分辨率都较低,并且子像素之间也存在亮度差异。
发明内容
本发明提供一种微型发光二极管阵列显示背板及其制造方法和修复方法,目的在于提供一种易于修补的微型发光二极管阵列显示背板,以实现微型发光二极管的修补,从而让显示背板实现零缺陷显示。
本发明的技术方案如下:
第一方面,本发明公开了一种微型发光二极管阵列显示背板,包括:显示 背板衬底;位于显示背板衬底上且呈阵列排布的多个凹槽;阵列排布并经过凹槽的多条底部电极;经过凹槽并与底部电极接触的多条微型加热电阻丝;以及位于凹槽内的键合材料和位于键合材料上的微型发光二极管;
其中,所述微型加热电阻丝至少部分位于凹槽内、部分位于显示背板衬底上,凹槽内的底部电极位于所述微型加热电阻丝的下方;当微型发光二极管损坏时,微型加热电阻丝对键合材料进行加热熔融后可以转移走损坏的微型发光二极管。
在一种可能的实施方式中,还包括位于微型加热电阻丝两端的电阻丝电极。
在一种可能的实施方式中,所述微型加热电阻丝的形状为直线形、波纹形或环形中的一种。
在一种可能的实施方式中,所述电阻丝电极在底部电极的两侧或同侧。
在一种可能的实施方式中,所述微型加热电阻丝的材料为单质金属或合金。
第二方面,本发明还公开了一种微型发光二极管阵列显示背板的制造方法,包括以下步骤:
S01:在显示背板衬底上形成阵列排布的多个凹槽;
S02:在显示背板衬底上形成阵列排布并经过凹槽的多条底部电极;
S03:形成经过凹槽且与底部电极相接触的多条微型加热电阻丝以及在微型加热电阻丝两端的电阻丝电极;
S04:在凹槽内植入位于微型加热电阻丝上的键合材料;
S05:在键合材料上植入微型发光二极管;
S06:将显示背板进行烘烤加热至键合材料熔点温度使键合材料熔融;
S07:停止加热使键合材料冷却至室温。
在一种可能的实施方式中,所述键合材料通过转移技术或电子蒸镀或溅镀工艺植入凹槽内。
在一种可能的实施方式中,所述键合材料为单质金属或合金。
在一种可能的实施方式中,所述键合材料的体积小于凹槽的容积。
第三方面,本发明还公开了一种微型发光二极管阵列显示背板的修复方 法,包括以下步骤:
S1:检测位于微型发光二极管阵列显示背板上的微型发光二极管损坏的颗数;
S2:若微型发光二极管损坏的颗数较少,首先对损坏的微型发光二极管对应的微型加热电阻丝施加电压,使得损坏的微型发光二极管对应的键合材料熔融,然后转移走损坏的微型发光二极管;
若微型发光二极管损坏的颗数较多,首先对整块微型发光二极管阵列显示背板进行加热,使得所有键合材料熔融;然后转移走损坏的微型发光二极管;
S3:维持键合材料在熔融状态,待更换的微型发光二极管植入空的凹槽内;
S4:停止对微型加热电阻丝加电压或整块显示背板加热,使键合材料冷却固化。
本发明能够带来以下至少一项有益效果:
本发明通过增设键合层并在键合层底部设置微型加热电阻丝,利用微型加热电阻丝加电压热融化键合层从而可以转移走损坏的微型发光二极管,并可以重复更换植入微型发光二极管;此外,本发明的每个凹槽内单独放置一颗微型发光二极管,不需要对底部电极做额外修补处理,从而使得微型发光二极管的利用率高。
附图说明
为了更清楚地说明本申请实施例中的技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图仅仅是本申请中记载的一些实施例,对于本领域普通技术人员来讲,还可以根据这些附图获得其他的附图。
图1是本发明的微型发光二极管阵列显示背板示意图;
图2是本发明的微型加热电阻丝的形状示意图;
图3是本发明微型发光二极管阵列显示背板制造方法的步骤S01-S02示意图;
图4是本发明微型发光二极管阵列显示背板制造方法的步骤S04示意图;
图5是本发明微型发光二极管阵列显示背板制造方法的步骤S05示意图;
图6是本发明微型发光二极管阵列显示背板修复方法的步骤S2示意图;
图7是本发明微型发光二极管阵列显示背板修复方法的步骤S3示意图。
具体实施方式
为了更清楚地说明本发明实施例或现有技术中的技术方案,下面将对照附图说明本发明的具体实施方式。显而易见地,下面描述中的附图仅仅是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图,并获得其他的实施方式。
为使图面简洁,各图中只示意性地表示出了与本发明相关的部分,它们并不代表其作为产品的实际结构。另外,以使图面简洁便于理解,在有些图中具有相同结构或功能的部件,仅示意性地绘示了其中的一个,或仅标出了其中的一个。在本文中,“一个”不仅表示“仅此一个”,也可以表示“多于一个”的情形。
下面以具体实施例详细介绍本发明的技术方案。
本发明提供一种微型发光二极管阵列显示背板,如图1所示,包括:显示背板衬底01;位于显示背板衬底01上且呈阵列排布的多个凹槽02;阵列排布并经过凹槽02的多条底部电极03;经过凹槽02并与底部电极03相垂直的多条微型加热电阻丝04,位于微型加热电阻丝04两端的电阻丝电极041;以及位于凹槽02内的键合材料05和位于键合材料05上的微型发光二极管06;其中,微型加热电阻丝04至少部分位于凹槽02内、部分位于显示背板衬底01上。凹槽02内的底部电极03位于所述微型加热电阻丝04的下方。当微型发光二极管06损坏时,微型加热电阻丝04对键合材料05进行加热熔融后可以转移走损坏的微型发光二极管06。此外,所述微型发光二极管阵列显示背板还可以包括微型发光二极管06的封装层及顶部电极(图中未显示)。
其中,所述凹槽02形状可以是任意形状,例如可以是圆形或方形等其他形状。
如图2所示,所述微型加热电阻丝04的形状可以是直线形,也可以是波纹形或环形等其它形状,目的是为了增加键合材料05的受热面积。所述微型加热电阻丝04两端的电阻丝电极041可以位于底部电极03的两侧,也可以位于底部电极03的同侧。所述微型加热电阻丝04的材料可以是单质金属,也可以是合金材料。
本发明还公开了一种微型发光二极管阵列显示背板的制造方法,包括以下步骤:
S01:在显示背板衬底01上形成阵列排布的多个凹槽02;
S02:在显示背板衬底01上形成阵列排布并经过凹槽02的多条底部电极03;
S03:形成经过凹槽02且与底部电极03相接触的多条微型加热电阻丝04以及在微型加热电阻丝04两端的电阻丝电极041;
S04:在凹槽02内植入位于微型加热电阻丝04上的键合材料05;
S05:在键合材料上植入微型发光二极管06;
S06:将显示背板进行烘烤加热至键合材料05熔点温度使键合材料05熔融;
S07:停止加热使键合材料05冷却至室温。
其中,步骤S01-S03如图3所示,步骤S01中凹槽02的形成还具体包括涂胶、曝光、显影以及刻蚀等工艺;步骤S02中底部电极03的形成还具体包括成膜、涂胶、曝光、显影以及刻蚀等工艺;步骤S03中微型加热电阻丝04以及电阻丝电极041的形成还具体包括成膜、涂胶、曝光、显影以及刻蚀等工艺。
图4是步骤S04的示意图,如图4所示,键合材料05通过转移头20与键合材料衬底30上的缓冲层31剥离,然后被转移头20转移到待植入的微型发光二极管阵列显示背板上的凹槽02内。其中,所述键合材料05除了可以通过转移技术植入显示背板衬底01上的凹槽02内,还可以通过电子蒸镀或溅镀工艺等技术植入。键合材料05可以是熔点较低的单质金属或合金,如锡或锡铅合金等材料。此外,为了保证键合材料05熔融后的高度不超过凹槽02的深度,所述键合材料05的体积要小于凹槽02的容积,且键合材料05还需与微型加热电阻丝04保持充分接触。
图5是步骤S05的示意图,如图所示,微型发光二极管06通过转移头20与微型发光二极管衬底60上的缓冲层61剥离,然后被转移头20转移到待植入的微型发光二极管阵列显示背板上的凹槽02内,将键合材料05加热熔融之后再冷却至室温,目的是为了使得微型发光二极管06与底部电极03通过键合材料05能够紧密相连。
本发明还公开了一种微型发光二极管阵列显示背板的修复方法,适用于上述的制造方法制造出的微型发光二极管阵列显示背板,当有微型发光二极管06 出现损坏时,可对损坏的微型发光二极管06进行剔除和更换,所述修复方法包括以下步骤:
S1:检测位于微型发光二极管阵列显示背板上的微型发光二极管06损坏的颗数;
S2:如图6所示,若微型发光二极管06损坏的颗数较少(少于10颗以内),首先对损坏的微型发光二极管06对应的微型加热电阻丝04施加电压,使得损坏的微型发光二极管06对应的键合材料05熔融,然后转移走损坏的微型发光二极管06;
若微型发光二极管06损坏的颗数较多(多于10颗),则对整块微型发光二极管阵列显示背板进行加热,使得所有键合材料05熔融;然后转移走损坏的微型发光二极管06;
S3:如图7所示,维持键合材料05在熔融状态,待更换的微型发光二极管06植入空的凹槽02内;
S4:停止对微型加热电阻丝04加电压或整块显示背板加热,使键合材料05冷却固化。
此外,在对显示背板进行修复的过程中,反复的冷却熔融有可能会损耗键合材料05,当键合材料05不足时可以通过转移技术再次植入。
本发明通过增设键合材料05并在键合材料05底部设置微型加热电阻丝04,利用微型加热电阻丝04加电压热融化键合材料05从而可以转移走损坏的微型发光二极管06,并可以重复更换植入微型发光二极管06;此外,本发明的每个凹槽02内单独放置一颗微型发光二极管06,这样就不需要对底部电极03做额外修补处理,微型发光二极管06的利用率高。另外本发明也具有较高的显示背板分辨率高和空间利用率。
应当说明的是,以上所述仅是本发明的优选实施方式,但是本发明并不限于上述实施方式中的具体细节,应当指出,对于本技术领域的普通技术人员来说,在本发明的技术构思范围内,在不脱离本发明原理的前提下,还可以做出若干改进和润饰,对本发明的技术方案进行多种等同变换,这些改进、润饰和等同变换也应视为本发明的保护范围。

Claims (10)

  1. 一种微型发光二极管阵列显示背板,其特征在于,包括:
    显示背板衬底;
    位于所述显示背板衬底上且呈阵列排布的多个凹槽;
    阵列排布并经过凹槽的多条底部电极;
    经过凹槽并与底部电极接触的多条微型加热电阻丝;以及位于凹槽内的键合材料和位于所述键合材料上的微型发光二极管;
    其中,所述微型加热电阻丝至少部分位于凹槽内、部分位于所述显示背板衬底上,凹槽内的底部电极位于所述微型加热电阻丝的下方;当所述微型发光二极管损坏时,微型加热电阻丝对所述键合材料进行加热熔融后可以转移走损坏的微型发光二极管。
  2. 根据权利要求1所述的微型发光二极管阵列显示背板,其特征在于,还包括位于所述微型加热电阻丝两端的电阻丝电极。
  3. 根据权利要求1所述的微型发光二极管阵列显示背板,其特征在于,所述微型加热电阻丝的形状为直线形、波纹形或环形中的一种。
  4. 根据权利要求2所述的微型发光二极管阵列显示背板,其特征在于,所述电阻丝电极在底部电极的两侧或同侧。
  5. 根据权利要求1所述的微型发光二极管阵列显示背板,其特征在于,所述微型加热电阻丝的材料为单质金属或合金。
  6. 一种微型发光二极管阵列显示背板的制造方法,其特征在于,包括以下步骤:
    S01:在显示背板衬底上形成阵列排布的多个凹槽;
    S02:在显示背板衬底上形成阵列排布并经过凹槽的多条底部电极;
    S03:形成经过凹槽且与底部电极相接触的多条微型加热电阻丝以及在微型加热电阻丝两端的电阻丝电极;
    S04:在凹槽内植入位于微型加热电阻丝上的键合材料;
    S05:在所述键合材料上植入微型发光二极管;
    S06:将所述显示背板进行烘烤加热至所述键合材料熔点温度使所述键合材料熔融;
    S07:停止加热使所述键合材料冷却至室温。
  7. 根据权利要求6所述的微型发光二极管阵列显示背板的制造方法,其特征在于,所述键合材料通过转移技术或电子蒸镀或溅镀工艺植入凹槽内。
  8. 根据权利要求6所述的微型发光二极管阵列显示背板的制造方法,其特征在于,所述键合材料为单质金属或合金。
  9. 根据权利要求6所述的微型发光二极管阵列显示背板的制造方法,其特征在于,所述键合材料的体积小于凹槽的容积。
  10. 一种微型发光二极管阵列显示背板的修复方法,其特征在于,包括以下步骤:
    S1:检测位于微型发光二极管阵列显示背板上的微型发光二极管损坏的颗数;
    S2:若微型发光二极管损坏的颗数不大于10,首先对损坏的微型发光二极管对应的微型加热电阻丝施加电压,使得损坏的微型发光二极管对应的键合材料熔融,然后转移走损坏的微型发光二极管;
    若微型发光二极管损坏的颗数大于10,首先对整块微型发光二极管阵列显示背板进行加热,使得所有键合材料熔融;然后转移走损坏的微型发光二极管;
    S3:维持键合材料在熔融状态,待更换的微型发光二极管植入空的凹槽内;
    S4:停止对微型加热电阻丝加电压或整块显示背板加热,使键合材料冷却固化。
PCT/CN2020/085550 2019-07-29 2020-04-20 微型发光二极管阵列显示背板及其制造方法和修复方法 WO2021017537A1 (zh)

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