WO2021003888A1 - 宽动态范围离子检测系统及装置 - Google Patents

宽动态范围离子检测系统及装置 Download PDF

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WO2021003888A1
WO2021003888A1 PCT/CN2019/113124 CN2019113124W WO2021003888A1 WO 2021003888 A1 WO2021003888 A1 WO 2021003888A1 CN 2019113124 W CN2019113124 W CN 2019113124W WO 2021003888 A1 WO2021003888 A1 WO 2021003888A1
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hole
pole piece
dynamic range
grid
wide dynamic
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PCT/CN2019/113124
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English (en)
French (fr)
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谭国斌
苏海波
麦泽彬
陈彦锐
陈景鸿
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广州禾信仪器股份有限公司
昆山禾信质谱技术有限公司
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Publication of WO2021003888A1 publication Critical patent/WO2021003888A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/025—Detectors specially adapted to particle spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/18—Electrode arrangements using essentially more than one dynode
    • H01J43/24—Dynodes having potential gradient along their surfaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/40—Time-of-flight spectrometers

Definitions

  • the invention relates to an ion detection device, in particular to a wide dynamic range ion detection system and device.
  • Time-of-flight mass spectrometer is usually widely used in biochemical qualitative and quantitative analysis due to its fast detection speed and wide mass range.
  • the principle is: in a vacuum environment, after the material molecules (atoms) are ionized in the ionization chamber, different ions obtain the same kinetic energy in the acceleration zone. Because different ions have different masses, their speeds are different.
  • the detector receives Ions are separated and detected at different times.
  • a wide dynamic range ion detection device comprising: a receiving anode plate, the middle of the receiving anode plate is provided with a first through hole through which part of the detected ions pass; a gain component, the gain component and the The first through hole is correspondingly arranged, and the gain element is used to perform gain processing on the detection ions passing through the first through hole; and a first FC detector for receiving the The gain electrons generated after gain processing by the gain component.
  • the receiving anode plate when performing detection, directly receives most of the detection ions that need to be detected, and the first detection signal can be obtained through the ADC acquisition card for large signal detection; Part of the detected ions passes through the first through hole to be received by the gain component and undergo gain processing.
  • the first FC detector receives the gain electrons generated after the gain component gain processing, and can obtain the second detection signal through the ADC acquisition card for small Signal detection. In this way, accurate measurement of a wide range of dynamic ions can be achieved, and the voltage range of the detector can be reduced, thereby increasing the service life of the detector.
  • the wide dynamic range ion detection device further includes a shielding cover, a first grid pole piece and a second grid pole piece, the shielding cover is arranged outside the receiving anode plate, so The middle part of the shielding cover is provided with a second through hole corresponding to the position of the first through hole, the first grid pole piece is arranged on the side of the receiving anode plate away from the shielding cover, and the first Two grid electrode pieces are arranged in the second through hole, and the grid portion of the second grid electrode piece is arranged opposite to the first through hole.
  • the grid portion of the first grid electrode piece and/or the grid portion of the second grid electrode piece is a metal wire grid
  • the mesh of the metal wire grid is 80 mesh to 100 mesh
  • the metal wire diameter of the metal wire grid is 25um-50um.
  • the gain component includes an MCP board, and the MCP board is arranged corresponding to the first through hole.
  • the two MCP boards are arranged at intervals.
  • the wide dynamic range ion detection device further includes a first detection zone pole piece and a second detection zone pole piece, the second grid pole piece, the first detection zone pole piece and The pole pieces of the second detection zone are arranged at intervals in sequence, the pole pieces of the first detection zone are provided with a third through hole, the pole pieces of the second detection zone are provided with a fourth through hole, and the third through hole is connected to the The fourth through holes are arranged corresponding to the positions of the first through holes; one of the MCP plates is located between the second grid pole piece and the first detection zone pole piece, and the MCP plate The edges of the two sides are respectively in electrical contact with the pole piece of the second grid mesh and the pole piece of the first detection zone; the other MCP board is located between the pole piece of the first detection zone and the pole piece of the second detection zone.
  • the edges of the two sides of the MCP board are in electrical contact with the pole pieces of the first detection zone and the pole pieces of the second detection zone; the second grid pole pieces are in electrical contact with the first
  • a first voltage divider resistor is electrically connected between the pole pieces of the detection zone, a second voltage divider resistor is electrically connected between the pole pieces of the first detection zone and the pole piece of the second detection zone, and the pole pieces of the second detection zone are electrically connected.
  • the slice is grounded through the third voltage divider resistor.
  • the wide dynamic range ion detection device further includes a first insulating pad arranged between the second grid pole piece and the first detection zone pole piece, and The second insulation pad between the pole piece of the first detection zone and the pole piece of the second detection zone; the first insulation pad and the second insulation pad are both provided with installation corresponding to the position of the first through hole Hole, the two MCP boards are respectively installed in the two mounting holes.
  • the first through hole, the second through hole, the third through hole, the fourth through hole, and the mounting hole are all coaxially arranged; the first through hole , The second through hole, the third through hole, the fourth through hole and the mounting hole are all circular holes.
  • the first FC detector includes a metal inner tube and a metal outer tube sleeved outside the metal inner tube, and the metal inner tube is used to receive the gain component generated after gain processing. Gain electrons, and the metal outer cylinder is used to apply DC negative high voltage.
  • a wide dynamic range ion detection system includes the wide dynamic range ion detection device, and further includes an ADC acquisition card and an upper computer.
  • the upper computer communicates with the receiving anode plate and the first The FC detector is electrically connected.
  • the foregoing wide dynamic range ion detection system includes the wide dynamic range ion detection device, its technical effects are brought by the wide dynamic range ion detection device, and the beneficial effects of the wide dynamic range ion detection device The same is not repeated here.
  • the ADC acquisition card is a dual-channel acquisition card, and the dual-channel acquisition card is electrically connected to the receiving anode plate and the first FC detector; or, the ADC acquisition card There are two, one of the ADC acquisition card is electrically connected to the receiving anode plate, and the other ADC acquisition card is electrically connected to the first FC detector.
  • both the receiving anode plate and the first FC detector are electrically connected to the ADC acquisition card through a matching resistor.
  • FIG. 1 is a schematic structural diagram of a wide dynamic range ion detection device according to an embodiment of the present invention
  • Fig. 2 is a schematic structural diagram of a wide dynamic range ion detection system according to an embodiment of the present invention.
  • first and second are only used for description purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined with “first” and “second” may explicitly or implicitly include at least one of the features.
  • a plurality of means at least two, such as two, three, etc., unless otherwise specifically defined.
  • a wide dynamic range ion detection device including a receiving anode plate 10, a gain element 20 and a first FC detector 30.
  • the middle of the receiving anode plate 10 is provided with a first through hole 11 through which some ions pass.
  • the gain component 20 is arranged corresponding to the first through hole 11, and the gain component 20 is used to perform gain processing on the detection ions passing through the first through hole 11.
  • the first FC detector 30 is used to receive gain electrons generated after gain processing by the gain component 20.
  • the receiving anode plate 10 when performing detection work, directly receives most of the detection ions that need to be detected, and can obtain the first detection signal through the ADC acquisition card 140 for the detection of large signals
  • a small part of the detected ions passes through the first through hole 11 and is received by the gain component 20 and undergoes gain processing.
  • the first FC detector 30 receives the gain electrons generated after gain processing by the gain component 20, and can obtain the first through the ADC acquisition card 140
  • the second detection signal is used for small signal detection. In this way, accurate measurement of a wide range of dynamic ions can be achieved, and the voltage range of the detector can be reduced, thereby increasing the service life of the detector.
  • the wide dynamic range ion detection device further includes a shield 40, a first grid pole piece 50 and a second grid pole piece 60.
  • the shielding cover 40 is arranged outside the receiving anode plate 10, the middle of the shielding cover 40 is provided with a second through hole 41 corresponding to the position of the first through hole 11, and the first grid pole piece 50 is arranged on the side of the receiving anode plate 10 away from the shielding cover 40, the second grid electrode piece 60 is arranged in the second through hole 41, and the second grid electrode piece 60
  • the grid portion is opposite to the first through hole 11. In this way, a negative DC high voltage is applied to the first grid pole piece 50 to pull the detected ions, and at the same time, it can restrain the receiving anode plate 10 from generating secondary electrons.
  • a negative DC high voltage is applied to the second grid pole piece 60 to pull the detected ions, and at the same time, it can restrain the receiving anode plate 10 from generating secondary electrons.
  • the first grid pole piece 50, the receiving anode plate 10 and the shielding cover 40 are equivalent to the second FC detector.
  • the shielding cover 40 can prevent the interference of the external electric field on the detected ions, and at the same time can prevent the receiving anode plate 10 from interfering with the second FC detector.
  • the interference effect of an FC detector 30 ensures that the second FC detector performs stable and accurate signal measurement.
  • this embodiment introduces two detection methods.
  • the second FC detector can directly receive the ions to be detected to obtain detection signals, which can more intuitively and accurately reflect the original state of the ions;
  • the MCP board 21 After gaining the detected ions, the amount of small ions is increased, and then received and detected by the first FC detector 30, and converted according to the multiple of the gain, the actual ion intensity can be obtained.
  • the potential applied on the second grid pole piece 60 is higher than the potential applied on the first grid pole piece 50, so as to ensure that the detected ions can be received and detected by the receiving anode plate 10 normally. And it can ensure that a small part of the detected ions pass through the first through hole 11 and be received by the gain component 20.
  • the grid portion of the first grid electrode piece 50 and/or the grid portion of the second grid electrode piece 60 is a metal wire grid, and the mesh of the metal wire grid The diameter of the metal wire of the metal wire grid is 25um-50um. In this way, the external electric field can be prevented from permeating and interfering with the ion channel.
  • the gain component 20 includes an MCP board 21, and the MCP board 21 is arranged corresponding to the first through hole 11. In this way, the ions to be detected are subjected to the gain processing of the MCP plate 21 (Microchannel Plate) to generate gain electrons.
  • the gain component 20 may also be an electron multiplier tube (Electron multiplier tube, EMT) or an electron multiplier (Electron Multipliers, ETP).
  • the two MCP boards 21 are arranged at intervals. In this way, the gain electrons that have undergone gain processing twice are received by the first FC detector 30, and the gain range can reach the order of 10 3 to 10 5 . It can be understood that the number of MCP boards 21 can be set to 3 or more according to actual detection requirements. The more the number of MCP boards 21, the greater the magnitude of the gain that can be achieved.
  • the wide dynamic range ion detection device further includes a first detection zone pole piece 70 and a second detection zone pole piece 80.
  • the second grid pole piece 60, the first detection zone pole piece 70, and the second detection zone pole piece 80 are sequentially spaced apart, and the first detection zone pole piece 70 is provided with a third through hole, so
  • the pole piece 80 of the second detection zone is provided with a fourth through hole, and the third through hole and the fourth through hole are arranged corresponding to the position of the first through hole 11.
  • One of the MCP boards 21 is located between the second grid pole piece 60 and the first detection area pole piece 70, and the edges of the two sides of the MCP board 21 are respectively connected to the second grid pole piece.
  • the sheet 60 is in electrical contact with the pole sheet 70 of the first detection zone.
  • the other MCP board 21 is located between the pole piece 70 of the first detection zone and the pole piece 80 of the second detection zone, and the edges of the two sides of the MCP board 21 are respectively connected to the pole piece of the first detection zone.
  • the sheet 70 is in electrical contact with the pole sheet 80 of the second detection zone.
  • a first voltage dividing resistor 90 is electrically connected between the second grid pole piece 60 and the first detection zone pole piece 70, and the first detection zone pole piece 70 and the second detection zone pole piece 80 are electrically connected.
  • a second voltage dividing resistor 100 is electrically connected therebetween, and the second detection zone pole piece 80 is grounded through the third voltage dividing resistor 110.
  • the first voltage dividing resistor 90, the second voltage dividing resistor 100, the third voltage dividing resistor 110, the second grid pole piece 60, the first detection zone pole piece 70, and the second detection zone pole piece 80 are connected in series.
  • a negative DC high voltage is applied to the second grid pole piece 60, there is a strong electric field between the second grid pole piece 60 and the pole piece 70 of the first detection area, and the pole piece 70 of the first detection area and the pole piece of the second detection area There is a strong electric field between the sheets 80, which can pull and detect ions.
  • the resistance values of the first voltage dividing resistor 90, the second voltage dividing resistor 100, and the third voltage dividing resistor 110 are the same, and high-precision resistors are used specifically, and the resistance deviation is within two thousandths, which is resistant to The voltage is greater than 500V, and the voltage is divided by resistors of the same resistance to ensure a uniform and strong electric field on the ion channel.
  • the wide dynamic range ion detection device further includes a first insulating pad 120 arranged between the second grid pole piece 60 and the first detection zone pole piece 70, and a first insulating pad 120 arranged on the first A second insulating pad 130 between the pole piece 70 in the detection zone and the pole piece 80 in the second detection zone.
  • Both the first insulating pad 120 and the second insulating pad 130 are provided with mounting holes corresponding to the positions of the first through holes 11, and the two MCP boards 21 are respectively mounted in the two mounting holes.
  • the first insulating pad 120 and the second insulating pad 130 are both polytetrafluoroethylene insulating pads, and the outer dimensions of the first insulating pad 120 and the second insulating pad 130 and the pole pieces of the detection area have little deviation to ensure Better insulation and isolation effect.
  • the thickness of the first insulation pad 120 and the second insulation pad 130 is slightly larger than the thickness of the MCP board 21, which can withstand pressure, ensuring that the edge conductors of the MCP board 21 are in good contact with the pole pieces of the detection area while not being subjected to high pressure. damage.
  • the hole diameter of the mounting hole is slightly larger than that of the MCP board 21, so that the MCP board 21 is installed and fixed.
  • the first through hole 11, the second through hole 41, the third through hole, the fourth through hole, and the mounting hole are all arranged coaxially;
  • the hole 11, the second through hole 41, the third through hole, the fourth through hole, and the mounting hole are all circular holes.
  • the two MCP boards 21 can be arranged coaxially and spaced up and down.
  • the first through hole 11, the second through hole 41, the third through hole, the fourth through hole, and the mounting hole may also be holes of other shapes, such as elliptical holes and square holes. Holes, triangular holes and other irregular shaped holes.
  • the first FC detector 30 includes a metal inner tube 31 and a metal outer tube 32 sleeved outside the metal inner tube 31, and the metal inner tube 31 is used to receive the gain assembly 20
  • the metal outer cylinder 32 is used to apply DC negative high voltage to gain electrons generated after gain processing. In this way, the metal outer cylinder 32 can suppress the generation of secondary electrons of the metal inner cylinder 31 and ensure the accuracy of the detection signal.
  • both the metal outer cylinder 32 and the metal inner cylinder 31 are made of stainless steel.
  • the first detection zone pole piece 70, the second detection zone pole piece 80, the first grid pole piece 50 and the second grid pole piece 60 are all made of stainless steel.
  • a wide dynamic range ion detection system including the wide dynamic range ion detection device described in any of the above embodiments, and also includes an ADC acquisition card 140 and a host computer 150.
  • the host computer 150 is electrically connected to the receiving anode plate 10 and the first FC detector 30 through the ADC acquisition card 140 respectively.
  • the foregoing wide dynamic range ion detection system includes the wide dynamic range ion detection device, its technical effects are brought by the wide dynamic range ion detection device, and the beneficial effects of the wide dynamic range ion detection device The same is not repeated here.
  • the ADC acquisition card 140 is a dual-channel acquisition card, and the dual-channel acquisition card is electrically connected to the receiving anode plate 10 and the first FC detector 30 respectively; or, the ADC acquisition card 140 There are two, one of the ADC acquisition card 140 is electrically connected to the receiving anode plate 10, and the other ADC acquisition card 140 is electrically connected to the first FC detector 30.
  • both the receiving anode plate 10 and the first FC detector 30 are electrically connected to the ADC acquisition card 140 through a matching resistor 160.
  • the resistance value of the matching resistor 160 can be selected from 20 ⁇ to 2000 ⁇ , specifically 50 ⁇ .
  • the signals of the first FC detector 30 and the second FC detector are converted into voltage signals by the matching resistor 160, which are respectively recorded by the dual-channel acquisition card, and finally the upper computer 150 performs software data processing.
  • the dual-channel acquisition card can independently perform data recording and range setting according to the actual signal size.
  • the flight distances of the detection ions of the first FC detector 30 and the second FC detector are different, and the flight time has a certain deviation.
  • the self-made software system can be used to The two channels perform time-of-flight calibration and combine the spectra at the same time to finally achieve simultaneous detection with a wide dynamic range.

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Abstract

一种宽动态范围离子检测系统及装置，宽动态范围离子检测装置包括接收阳极板（10）、增益组件（20）及第一FC检测器（30）。接收阳极板（10）的中部设有部分检测离子穿过的第一通孔（11）。增益组件（20）与第一通孔（11）对应设置，增益组件（20）用于将从第一通孔（11）穿过的检测离子进行增益处理。第一FC检测器（30）用于接收经增益组件（20）增益处理后产生的增益电子。上述的宽动态范围离子检测装置，进行检测工作时，小部分检测离子穿过第一通孔（11）由增益组件（20）接收并进行增益处理，第一FC检测器（30）接收经增益组件（20）增益处理后产生的增益电子，并可以通过ADC采集卡（140）获得第二检测信号，用于小信号的检测。如此，能实现准确测量宽范围动态离子，以及能减小检测器的电压使用范围，从而增加检测器的使用寿命。

Description

宽动态范围离子检测系统及装置 技术领域
本发明涉及一种离子检测装置，特别是涉及一种宽动态范围离子检测系统及装置。
背景技术
飞行时间质谱(time-of-flight mass spectrometer,TOFMS)由于检测速度快、质量范围宽，通常被广泛的用于生物化学定性及定量分析。其原理为：在真空环境下，物质分子(原子)在电离室电离后，不同的离子在加速区获得相同的动能，由于不同离子质量不同，其速度不同，在离子飞行过程中，检测器接收离子的时间不同而被分离检测。
随着现代科技的发展，对于离子的检测需求越来越高，传统的检测器已经不能满足某些领域的应用，主要原因有几下几个方面：1)检测器材料电子增益能力不是没有上限的，在一定条件下会趋于饱和；2)长期处于高电压工作状态，对于检测器的损耗将大大增加；3)电子增益范围随电压增加不完全呈线性关系。如此，对于例如要求宽动态检测(四个量级以上)的应用，常规的检测器设计将不再满足要求。
发明内容
基于此，有必要克服现有技术的缺陷，提供一种宽动态范围离子检测系统及装置，它能够准确测量宽范围动态离子。
其技术方案如下：一种宽动态范围离子检测装置，包括：接收阳极板，所述接收阳极板的中部设有部分检测离子穿过的第一通孔；增益组件，所述增益组件与所述第一通孔对应设置，所述增益组件用于将从所述第一通孔穿过的所述检测离子进行增益处理；及第一FC检测器，所述第一FC检测器用于接收经所述增益组件增益处理后产生的增益电子。
上述的宽动态范围离子检测装置，进行检测工作时，先由接收阳极板直接接收所需要检测的大部分检测离子，并可以通过ADC采集卡获得第一检测信号，用于大信号的检测；小部分检测离子穿过第一通孔由增益组件接收并进行增益处理，第一FC检测器接收经增益组件增益处理后产生的增益电子，并可以通过ADC采集卡获得第二检测信号，用于小信号的检测。如此，能实现准确测量宽范围动态离子，以及能减小检测器的电压使用范围，从而增加检测器的使用寿命。
在其中一个实施例中，所述的宽动态范围离子检测装置还包括屏蔽罩、第一栅网极片与第二栅网极片，所述屏蔽罩罩设于所述接收阳极板外，所述屏蔽罩的中部设有与所述第一通孔位置相应的第二通孔，所述第一栅网极片设置于所述接收阳极板背离于所述屏蔽罩的一侧，所述第二栅网极片设置于所述第二通孔中，所述第二栅网极片的栅网部位与所述第一通孔相对设置。
在其中一个实施例中，所述第一栅网极片的栅网部位和/或所述第二栅网极片的栅网部位为金属丝栅网，所述金属丝栅网的目数为80目～100目，所述金属丝栅网的金属丝直径为25um～50um。
在其中一个实施例中，所述增益组件包括MCP板，所述MCP板与所述第一通孔对应设置。
在其中一个实施例中，所述MCP板为两个，两个所述MCP板间隔设置。
在其中一个实施例中，所述的宽动态范围离子检测装置还包括第一检测区极片与第二检测区极片，所述第二栅网极片、所述第一检测区极片与所述第二检测区极片依次间隔设置，所述第一检测区极片设有第三通孔，所述第二检测区极片设有第四通孔，所述第三通孔与所述第四通孔均和所述第一通孔位置相应设置；其中一个所述MCP板位于所述第二栅网极片与所述第一检测区极片之间，且所述MCP板的两侧面的边缘分别与所述第二栅网极片与所述第一检测区极片电性接触；另一个所述MCP板位于所述第一检测区极片与所述第二检测区极片之间，且所述MCP板的两侧面的边缘分别与所述第一检测区极片与所述第二检测区极片电性接触；所述第二栅网极片与所述第一检测区极片之间电连接有第一分压电阻，所述第一检测区极片与所述第二检测区极片之间电连接有第二分压电阻，所述第二检测区极片通过第三分压电阻接地设置。
在其中一个实施例中，所述的宽动态范围离子检测装置还包括设置于所述第二栅网极片与所述第一检测区极片之间的第一绝缘垫，以及设置于所述第一检测区极片与所述第二检测区极片之间的第二绝缘垫；所述第一绝缘垫与所述第二绝缘垫均设有与所述第一通孔位置相应的安装孔，两个所述MCP板分别安装于两个所述安装孔中。
在其中一个实施例中，所述第一通孔、所述第二通孔、所述第三通孔、所述第四通孔及所述安装孔均同轴设置；所述第一通孔、所述第二通孔、所述第三通孔、所述第四通孔及所述安装孔均为圆形孔。
在其中一个实施例中，所述第一FC检测器包括金属内筒及套设于所述金属内筒外的金属外筒，所述金属内筒用于接收所述增益组件增益处理后产生的增益电子，所述金属外筒用于施加直流负高压。
一种宽动态范围离子检测系统，包括述的宽动态范围离子检测装置，还包括ADC采集卡与上位机，所述上位机通过所述ADC采集卡分别与所述接收阳极板、所述第一FC检测器电性连接。
上述的宽动态范围离子检测系统，由于包括所述的宽动态范围离子检测装置，其技术效果由所述的宽动态范围离子检测装置带来，与所述的宽动态范围离子检测装置的有益效果相同，在此不进行赘述。
在其中一个实施例中，所述ADC采集卡为双通道采集卡，所述双通道采集卡分别与所述接收阳极板、所述第一FC检测器电性连接；或者，所述ADC采集卡为两个，其中一个所述ADC采集卡与所述接收阳极板电性连接，另一个所述ADC采集卡与所述第一FC检测器电性连接。
在其中一个实施例中，所述接收阳极板与所述第一FC检测器均通过匹配电阻与所述ADC采集卡电性连接。
附图说明
图1为本发明一实施例所述的宽动态范围离子检测装置的结构示意图；
图2为本发明一实施例所述的宽动态范围离子检测系统的结构示意图。
附图标记：
10、接收阳极板，11、第一通孔，20、增益组件，21、MCP板，30、第一FC检测器，31、金属内筒，32、金属外筒，40、屏蔽罩，41、第二通孔，50、第一栅网极片，60、第二栅网极片，70、第一检测区极片，80、第二检测区极片，90、第一分压电阻，100、第二分压电阻，110、第三分压电阻，120、第一绝缘垫，130、第二绝缘垫，140、ADC采集卡，150、上位机，160、匹配电阻。
具体实施方式
为使本发明的上述目的、特征和优点能够更加明显易懂，下面结合附图对本发明的具体实施方式做详细的说明。在下面的描述中阐述了很多具体细节以便于充分理解本发明。但是本发明能够以很多不同于在此描述的其它方式来实施，本领域技术人员可以在不违背本发明内涵的情况下做类似改进，因此本发明不受下面公开的具体实施例的限制。
在本发明的描述中，需要理解的是，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括至少一个该特征。在本发明的描述中，“多个”的含义是至少两个，例如两个，三个等，除非另有明确具体的限定。
在本发明的描述中，需要理解的是，当一个元件被认为是“连接”另一个元件，可以是直接连接到另一个元件或者可能同时存在中间元件。相反，当元件为称作“直接”与另一元件连接时，不存在中间元件。
在一个实施例中，请参阅图1，一种宽动态范围离子检测装置，包括接收阳极板10、增益组件20及第一FC检测器30。所述接收阳极板10的中部设有部分检测离子穿过的第一通孔11。所述增益组件20与所述第一通孔11对应设置，所述增益组件20用于将从所述第一通孔11穿过的所述检测离子进行增益处理。所述第一FC检测器30用于接收经所述增益组件20增益处理后产生的增益电子。
上述的宽动态范围离子检测装置，进行检测工作时，先由接收阳极板10直接接收所需要检测的大部分检测离子，并可以通过ADC采集卡140获得第一检 测信号，用于大信号的检测；小部分检测离子穿过第一通孔11由增益组件20接收并进行增益处理，第一FC检测器30接收经增益组件20增益处理后产生的增益电子，并可以通过ADC采集卡140获得第二检测信号，用于小信号的检测。如此，能实现准确测量宽范围动态离子，以及能减小检测器的电压使用范围，从而增加检测器的使用寿命。
进一步地，所述的宽动态范围离子检测装置还包括屏蔽罩40、第一栅网极片50与第二栅网极片60。所述屏蔽罩40罩设于所述接收阳极板10外，所述屏蔽罩40的中部设有与所述第一通孔11位置相应的第二通孔41，所述第一栅网极片50设置于所述接收阳极板10背离于所述屏蔽罩40的一侧，所述第二栅网极片60设置于所述第二通孔41中，所述第二栅网极片60的栅网部位与所述第一通孔11相对设置。如此，第一栅网极片50上施加负直流高压，用于牵引检测离子，同时能抑制接收阳极板10产生二次电子。同样地，第二栅网极片60上施加负直流高压，用于牵引检测离子，同时能抑制接收阳极板10产生二次电子。此外，第一栅网极片50、接收阳极板10及屏蔽罩40相当于第二FC检测器，屏蔽罩40能防止外部电场对检测离子的干扰影响，同时也能避免接收阳极板10对第一FC检测器30干扰影响，保证第二FC检测器对信号进行稳定准确测量。
如此可见，本实施例引入两种检测方式，其一、第二FC检测器能直接接收所需要检测的离子获得检测信号，能较为直观地、准确地反应离子原始状态；其二、MCP板21将检测离子进行增益后，增大小离子的量，再通过第一FC检测器30进行接收检测，根据增益的倍数进行换算，便可得到实际离子强度大小。
此外，可选地，检测工作时，第二栅网极片60上施加的电势高于第一栅网极片50上所施加的电势，从而保证检测离子能够正常被接收阳极板10接收检 测，以及能保证小部分检测离子穿过第一通孔11被增益组件20所接收。
在一个实施例中，所述第一栅网极片50的栅网部位和/或所述第二栅网极片60的栅网部位为金属丝栅网，所述金属丝栅网的目数为80目～100目，所述金属丝栅网的金属丝直径为25um～50um。如此，能较好地防止外部电场渗透干扰离子通道。
在一个实施例中，所述增益组件20包括MCP板21，所述MCP板21与所述第一通孔11对应设置。如此，待检测离子经MCP板21(Micro channel Plate，板微通道板)增益处理后产生增益电子。此外，可选地，增益组件20还可以为电子倍增管(Electron multiplier tube，EMT)或电子倍增器(Electron Multipliers，ETP)。
进一步地，所述MCP板21为两个，两个所述MCP板21间隔设置。如此，经过两次增益处理后的增益电子被第一FC检测器30接收，能实现增益范围达到10 3～10 5量级。可以理解的是，根据实际检测情况需要可以将MCP板21设置为3个或以上，MCP板21数量越多，能实现的增益量级越大。
进一步地，所述的宽动态范围离子检测装置还包括第一检测区极片70与第二检测区极片80。所述第二栅网极片60、所述第一检测区极片70与所述第二检测区极片80依次间隔设置，所述第一检测区极片70设有第三通孔，所述第二检测区极片80设有第四通孔，所述第三通孔与所述第四通孔均和所述第一通孔11位置相应设置。其中一个所述MCP板21位于所述第二栅网极片60与所述第一检测区极片70之间，且所述MCP板21的两侧面的边缘分别与所述第二栅网极片60与所述第一检测区极片70电性接触。另一个所述MCP板21位于所述第一检测区极片70与所述第二检测区极片80之间，且所述MCP板21的两侧面 的边缘分别与所述第一检测区极片70与所述第二检测区极片80电性接触。所述第二栅网极片60与所述第一检测区极片70之间电连接有第一分压电阻90，所述第一检测区极片70与所述第二检测区极片80之间电连接有第二分压电阻100，所述第二检测区极片80通过第三分压电阻110接地设置。如此，第一分压电阻90、第二分压电阻100、第三分压电阻110、第二栅网极片60、第一检测区极片70及第二检测区极片80串联连接在一起，在第二栅网极片60上施加负直流高压时，第二栅网极片60与第一检测区极片70之间有强电场，第一检测区极片70与第二检测区极片80之间有强电场，能起到牵引检测离子的作用。此外，具体而言，第一分压电阻90、第二分压电阻100、第三分压电阻110的阻值相同，均具体采用高精密电阻，其阻值偏差在千分之二以内，耐压均大于500V，通过相同阻值的电阻进行分压处理，能保证离子通道上为均匀强电场。
进一步地，所述的宽动态范围离子检测装置还包括设置于所述第二栅网极片60与所述第一检测区极片70之间的第一绝缘垫120，以及设置于所述第一检测区极片70与所述第二检测区极片80之间的第二绝缘垫130。所述第一绝缘垫120与所述第二绝缘垫130均设有与所述第一通孔11位置相应的安装孔，两个所述MCP板21分别安装于两个所述安装孔中。具体而言，第一绝缘垫120与第二绝缘垫130均为聚四氟乙烯绝缘垫，第一绝缘垫120与第二绝缘垫130的外部尺寸与的检测区极片偏差不大，以保证较好的绝缘隔离效果。此外，第一绝缘垫120与第二绝缘垫130的厚度略大于MCP板21的厚度，能承受压力，保证MCP板21边缘导电体与检测区极片良好接触的同时不会承受较大压力被损坏。另外，安装孔的孔径略大于MCP板21，实现安装固定MCP板21。
在一个实施例中，所述第一通孔11、所述第二通孔41、所述第三通孔、所 述第四通孔及所述安装孔均同轴设置；所述第一通孔11、所述第二通孔41、所述第三通孔、所述第四通孔及所述安装孔均为圆形孔。如此，能实现两个MCP板21同轴心上下间隔布置。此外，所述第一通孔11、所述第二通孔41、所述第三通孔、所述第四通孔及所述安装孔还可以为其它形状的孔，例如椭圆形孔、方形孔、三角形孔以及其它不规则形状孔。
在一个实施例中，所述第一FC检测器30包括金属内筒31及套设于所述金属内筒31外的金属外筒32，所述金属内筒31用于接收所述增益组件20增益处理后产生的增益电子，所述金属外筒32用于施加直流负高压。如此，金属外筒32能抑制金属内筒31二次电子的产生，保证检测信号的准确性。
在一个实施例中，具体而言，金属外筒32与金属内筒31均采用不锈钢材料制造。此外，所述第一检测区极片70、第二检测区极片80、第一栅网极片50与第二栅网极片60均采用不锈钢材料制造。
在一个实施例中，请一并参阅图1及图2，一种宽动态范围离子检测系统，包上述任一实施例括述的宽动态范围离子检测装置，还包括ADC采集卡140与上位机150。所述上位机150通过所述ADC采集卡140分别与所述接收阳极板10、所述第一FC检测器30电性连接。
上述的宽动态范围离子检测系统，由于包括所述的宽动态范围离子检测装置，其技术效果由所述的宽动态范围离子检测装置带来，与所述的宽动态范围离子检测装置的有益效果相同，在此不进行赘述。
进一步地，所述ADC采集卡140为双通道采集卡，所述双通道采集卡分别与所述接收阳极板10、所述第一FC检测器30电性连接；或者，所述ADC采集卡140为两个，其中一个所述ADC采集卡140与所述接收阳极板10电性连接， 另一个所述ADC采集卡140与所述第一FC检测器30电性连接。
进一步地，所述接收阳极板10与所述第一FC检测器30均通过匹配电阻160与所述ADC采集卡140电性连接。如此，能避免检测信号返回，保证检测信号的准确性。其中，匹配电阻160的阻值可选为20Ω～2000Ω，具体为50Ω。如此，第一FC检测器30和第二FC检测器的信号经匹配电阻160转换成电压信号，分别被双通道采集卡记录，最终由上位机150进行软件数据处理。双通道采集卡根据实际信号大小，可以独立进行数据记录及量程设置，第一FC检测器30和第二FC检测器的检测离子飞行距离不同，飞行时间存在一定偏差，通过自制的软件系统可对两个通道进行飞行时间校准，同时合并谱图，最终实现宽动态范围同时检测。
以上所述实施例的各技术特征可以进行任意的组合，为使描述简洁，未对上述实施例中的各个技术特征所有可能的组合都进行描述，然而，只要这些技术特征的组合不存在矛盾，都应当认为是本说明书记载的范围。
以上所述实施例仅表达了本发明的几种实施方式，其描述较为具体和详细，但并不能因此而理解为对发明专利范围的限制。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和改进，这些都属于本发明的保护范围。因此，本发明专利的保护范围应以所附权利要求为准。

Claims (12)

  1. 一种宽动态范围离子检测装置，其特征在于，包括：
    接收阳极板，所述接收阳极板的中部设有部分检测离子穿过的第一通孔；
    增益组件，所述增益组件与所述第一通孔对应设置，所述增益组件用于将从所述第一通孔穿过的所述检测离子进行增益处理；及
    第一FC检测器，所述第一FC检测器用于接收经所述增益组件增益处理后产生的增益电子。
  2. 根据权利要求1所述的宽动态范围离子检测装置，其特征在于，还包括屏蔽罩、第一栅网极片与第二栅网极片，所述屏蔽罩罩设于所述接收阳极板外，所述屏蔽罩的中部设有与所述第一通孔位置相应的第二通孔，所述第一栅网极片设置于所述接收阳极板背离于所述屏蔽罩的一侧，所述第二栅网极片设置于所述第二通孔中，所述第二栅网极片的栅网部位与所述第一通孔相对设置。
  3. 根据权利要求2所述的宽动态范围离子检测装置，其特征在于，所述第一栅网极片的栅网部位和/或所述第二栅网极片的栅网部位为金属丝栅网，所述金属丝栅网的目数为80目～100目，所述金属丝栅网的金属丝直径为25um～50um。
  4. 根据权利要求2所述的宽动态范围离子检测装置，其特征在于，所述增益组件包括MCP板，所述MCP板与所述第一通孔对应设置。
  5. 根据权利要求4所述的宽动态范围离子检测装置，其特征在于，所述MCP板为两个，两个所述MCP板间隔设置。
  6. 根据权利要求5所述的宽动态范围离子检测装置，其特征在于，还包括第一检测区极片与第二检测区极片，所述第二栅网极片、所述第一检测区极片 与所述第二检测区极片依次间隔设置，所述第一检测区极片设有第三通孔，所述第二检测区极片设有第四通孔，所述第三通孔与所述第四通孔均和所述第一通孔位置相应设置；其中一个所述MCP板位于所述第二栅网极片与所述第一检测区极片之间，且所述MCP板的两侧面的边缘分别与所述第二栅网极片与所述第一检测区极片电性接触；另一个所述MCP板位于所述第一检测区极片与所述第二检测区极片之间，且所述MCP板的两侧面的边缘分别与所述第一检测区极片与所述第二检测区极片电性接触；所述第二栅网极片与所述第一检测区极片之间电连接有第一分压电阻，所述第一检测区极片与所述第二检测区极片之间电连接有第二分压电阻，所述第二检测区极片通过第三分压电阻接地设置。
  7. 根据权利要求6所述的宽动态范围离子检测装置，其特征在于，还包括设置于所述第二栅网极片与所述第一检测区极片之间的第一绝缘垫，以及设置于所述第一检测区极片与所述第二检测区极片之间的第二绝缘垫；所述第一绝缘垫与所述第二绝缘垫均设有与所述第一通孔位置相应的安装孔，两个所述MCP板分别安装于两个所述安装孔中。
  8. 根据权利要求7所述的宽动态范围离子检测装置，其特征在于，所述第一通孔、所述第二通孔、所述第三通孔、所述第四通孔及所述安装孔均同轴设置；所述第一通孔、所述第二通孔、所述第三通孔、所述第四通孔及所述安装孔均为圆形孔。
  9. 根据权利要求1～8任意一项所述的宽动态范围离子检测装置，其特征在于，所述第一FC检测器包括金属内筒及套设于所述金属内筒外的金属外筒，所述金属内筒用于接收所述增益组件增益处理后产生的增益电子，所述金属外筒用于施加直流负高压。
  10. 一种宽动态范围离子检测系统，其特征在于，包括如权利要求1至9任意一项所述的宽动态范围离子检测装置，还包括ADC采集卡与上位机，所述上位机通过所述ADC采集卡分别与所述接收阳极板、所述第一FC检测器电性连接。
  11. 根据权利要求10所述的宽动态范围离子检测系统，其特征在于，所述ADC采集卡为双通道采集卡，所述双通道采集卡分别与所述接收阳极板、所述第一FC检测器电性连接；或者，所述ADC采集卡为两个，其中一个所述ADC采集卡与所述接收阳极板电性连接，另一个所述ADC采集卡与所述第一FC检测器电性连接。
  12. 根据权利要求10所述的宽动态范围离子检测系统，其特征在于，所述接收阳极板与所述第一FC检测器均通过匹配电阻与所述ADC采集卡电性连接。
PCT/CN2019/113124 2019-07-10 2019-10-24 宽动态范围离子检测系统及装置 WO2021003888A1 (zh)

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