WO2020213040A1

WO2020213040A1 - Wire electric discharge machine

Info

Publication number: WO2020213040A1
Application number: PCT/JP2019/016195
Authority: WO
Inventors: 隆湯澤; 大友　陽一; 柴田　淳一; 瀬口　正記; 三宅　英孝
Original assignee: 三菱電機株式会社
Priority date: 2019-04-15
Filing date: 2019-04-15
Publication date: 2020-10-22
Also published as: CN113677470A; TWI721855B; JP6651064B1; TW202039128A; JPWO2020213040A1; CN113677470B

Abstract

A wire electric discharge machine (100) has: a wire electrode (1) for performing electric discharge of a workpiece (4) by generating an electrical discharge between the wire electrode (1) and the workpiece (4); processing fluid nozzles (5a, 5b) for supplying a processing fluid to a gap between the wire electrode (1) and the workpiece (4) from a direction coaxial with the wire electrode (1); and a processing fluid guide part (10) which is provided with jig plates (10a, 10b), arranges the workpiece (4) in a space between the jig plates (10a, 10b), and guides the processing fluid so that the processing fluid does not escape from the space between the jig plates (10a, 10b). The surface of the jig plates (10a, 10b) that opposes the workpiece (4) is larger than the surface of the workpiece (4) that opposes the jig plates (10a, 10b).

Description

Wire electric discharge machine

The present invention relates to a wire electric discharge machine that processes an workpiece by applying a voltage in the machining fluid to a gap formed between the wire electrode and the workpiece to generate a discharge.

The wire electric discharge machine performs electric discharge machining by moving the wire electrode relative to the workpiece and generating an electric discharge in the gap. Thermal energy and machining debris due to electric discharge are always generated in the machining gap during electric discharge machining. Both thermal energy and machining debris from electric discharge cause instability in electric discharge machining. Therefore, for the purpose of discharging machining waste and cooling between poles, it is necessary to supply the machining fluid from the machining fluid supply device to the poles via the machining fluid nozzle to eliminate the machining destabilizing element. In order to properly supply the machining fluid between the poles, it is necessary to arrange the machining fluid nozzle as close to the workpiece as possible so that the machining fluid is appropriately supplied between the poles.

Patent Document 1 discloses a storage jig for accommodating a columnar ingot which is a work piece. The accommodating jig disclosed in Patent Document 1 includes a pair of side end faces extending along a direction orthogonal to a wire stretched by a pair of supports, and a slit forming a plane orthogonal to the axial direction of a columnar ingot. Have. The drive changes the relative position of the pair of supports and ingots along the pair of side end faces, and the wire slits as the relative position of the pair of supports and ingots changes. Move inside.

Japanese Unexamined Patent Publication No. 2013-166218

The storage jig of the invention according to Patent Document 1 has a structure that surrounds the entire circumference of the side surface portion of the ingot, and the ingot diameter and the slit width are fixed. Therefore, for the storage jig disclosed in Patent Document 1, it is necessary to prepare a plurality of different storage jigs due to the difference in the ingot size or the difference in the size of the processed product.

The present invention has been made in view of the above, and an object of the present invention is to obtain a wire electric discharge machine capable of stably supplying a machining liquid between poles regardless of the size and shape of the workpiece.

In order to solve the above-mentioned problems and achieve the object, the present invention relates to a wire electrode that generates an electric discharge between the work piece and the work piece to perform electric discharge machining, and between the wire electrode and the work piece. A machining fluid nozzle that supplies machining fluid from the direction coaxial with the wire electrode and a pair of plate members are provided in the gap between the two plate members, and the workpiece is placed in the space between the pair of plate members. It has a machining fluid guide unit that guides the machining fluid so that the machining fluid does not escape from the space between them. The surface of the plate member facing the work piece is larger than the surface of the work piece facing the plate member.

The wire electric discharge machine according to the present invention has the effect of being able to stably supply the machining fluid between the poles regardless of the size and shape of the workpiece.

The figure which shows the structure of the wire electric discharge machine which concerns on Embodiment 1 of this invention. Perspective view of the machining fluid guide portion of the wire electric discharge machine according to the first embodiment. Front view of the machining fluid guide portion of the wire electric discharge machine according to the first embodiment. Side view of the machining fluid guide portion of the wire electric discharge machine according to the first embodiment. The figure which shows the flow velocity distribution of the processing liquid during processing of the wire electric discharge machine which concerns on Embodiment 1. The figure which shows the structure of the wire electric discharge machine which concerns on Embodiment 2 of this invention. The perspective view which shows the parallel cutting wire part of the wire electric discharge machine which concerns on Embodiment 2. Perspective view of the base plate of the machining fluid guide portion of the wire electric discharge machine according to the second embodiment. The figure which shows the processing liquid guide part of the wire electric discharge machine which concerns on Embodiment 2 and the state of cutting a work piece. Front view of the machining fluid guide portion of the wire electric discharge machine according to the second embodiment. Side view of the machining fluid guide portion of the wire electric discharge machine according to the second embodiment.

The wire electric discharge machine according to the embodiment of the present invention will be described in detail below with reference to the drawings. The present invention is not limited to this embodiment.

Embodiment 1.
FIG. 1 is a diagram showing a configuration of a wire electric discharge machine according to a first embodiment of the present invention. The wire discharge processing machine 100 according to the first embodiment has a wire feeding bobbin 13 for supplying the wire electrode 1, a wire winding bobbin 14 for winding the wire electrode 1, and a guide roller for appropriately traveling the wire electrode 1. It has 2a and 2b. Further, the wire discharge processing machine 100 includes a pair of processing

liquid nozzles

5a and 5b that inject the processing liquid supplied from the processing liquid supply device 3 toward the workpiece 4, and a power supply 6a that contacts the wire electrode 1. 6b, a surface plate 9 that can move in the horizontal direction, an X-axis drive unit 7 that moves the surface plate 9 in the X-axis direction, a Y-axis drive unit 8 that moves the surface plate 9 in the Y-axis direction, and an X-axis. A shaft drive control unit 12 that controls the drive unit 7 and the Y-axis drive unit 8 and

jig plates

10a and 10b, which are a pair of plate members, are provided, and the machining fluid does not escape from the space between the

jig plates

10a and 10b. It has a processing liquid guide portion 10 for guiding the processing liquid as described above. The wire discharge processing machine 100 has a Cartesian coordinate system in which the vertical direction is the Z-axis direction and the two directions orthogonal to each other in the horizontal plane are the X-axis direction and the Y-axis direction.

The processing power supply 11 applies a voltage to the

power supplies

6a and 6b and the surface plate 9. Therefore, a voltage is also applied to the wire electrode 1 from the processing power source 11 via the

power supply electrons

6a and 6b.

FIG. 2 is a perspective view of a machining fluid guide portion of the wire electric discharge machine according to the first embodiment. FIG. 3 is a front view of the machining fluid guide portion of the wire electric discharge machine according to the first embodiment. FIG. 4 is a side view of the machining fluid guide portion of the wire electric discharge machine according to the first embodiment. The working liquid guide portion 10 is a jig that is supposed to cut a columnar workpiece 4. The pair of

jig plates

10a and 10b of the working liquid guide portion 10 are arranged on both sides in parallel with the cylindrical cross section of the cylindrical workpiece 4 to be cut. The working

liquid nozzles

5a and 5b and the

jig plates

10a and 10b are arranged at intervals D in the axial direction of the wire electrode 1. In the first embodiment, the

jig plates

10a and 10b have a linear peripheral edge on the axial side of the wire electrode 1. Therefore, during machining by the wire electric discharge machine 100, the distance D between the

machining fluid nozzles

5a and 5b and the

jig plates

10a and 10b in the axial direction of the wire electrode 1 is kept constant. In order to improve the machining performance, the machining is performed so that the interval D is as small as possible within the range where the machining fluid nozzles 5a and 5b and the machining fluid guide portion 10 do not come into contact with each other. Although it is assumed here that the peripheral edges of the wire electrodes 1 of the

jig plates

10a and 10b on the axial direction are linear, they do not necessarily have to be linear.

The

jig plates

10a and 10b are surfaces facing the

jig plates

10a and 10b of the workpiece 4, and are larger than the cylindrical end face having the same shape as the cut surface, and cover the entire cylindrical end face of the workpiece 4 and have a peripheral edge. The portion projects from the cylindrical end face of the workpiece 4.

At least one of the pair of

jig plates

10a and 10b of the working liquid guide portion 10 has conductivity. The workpiece 4 is fixed to the conductive side of the pair of

jig plates

10a and 10b. As a method of fixing the workpiece 4 to the

jig plates

10a and 10b, welding using a low melting point metal having a melting point of 300 ° C. or lower and bonding using a conductive adhesive can be applied. When welding one of the

jig plates

10a and 10b and the workpiece 4 using a low melting point metal, it is necessary to heat the

jig plates

10a and 10b and the workpiece 4 to perform the welding operation. However, the workpiece 4 can be easily removed from the

jig plates

10a and 10b only by heating the workpiece 4 and the

jig plates

10a and 10b after processing. Further, in the case of bonding using a conductive adhesive, when the processed workpiece 4 is removed from the

jig plates

10a and 10b, it is necessary to dissolve the conductive adhesive by an appropriate method. The workpiece 4 can be easily fixed to the

jig plates

10a and 10b. The workpiece 4 does not necessarily have to be fixed by the

jig plates

10a and 10b, and a member for holding the workpiece 4 arranged in the space between the

jig plates

10a and 10b may be separately provided.

The working liquid guide portion 10 to which the workpiece 4 is fixed to the conductive side of the pair of

jig plates

10a and 10b is fixed to the surface plate 9. Further, of the

jig plates

10a and 10b, the one having conductivity is electrically connected to the surface plate 9. Therefore, a voltage is applied to the workpiece 4 from the machining power source 11 via the surface plate 9 and the

jig plates

10a and 10b.

FIG. 5 is a diagram showing the flow velocity distribution of the machining fluid during machining of the wire electric discharge machine according to the first embodiment. FIG. 5 also shows the flow velocity distribution of the machining fluid when the machining fluid guide portion 10 is not provided. The flow velocity value indicates a value in the processing gap where the wire electrode 1 is arranged. When there is no machining fluid guide portion 10, the flow velocity of the machining fluid ejected from the

machining fluid nozzles

5a and 5b is slow before colliding with the workpiece 4, and the flow velocity slightly increases after colliding with the workpiece 4, and then. The flow velocity drops sharply toward the center of the workpiece 4. On the other hand, when the machining fluid guide portion 10 is provided, the machining fluid ejected from the

machining fluid nozzles

5a and 5b has a high flow velocity before colliding with the workpiece 4, and the flow velocity significantly increases after colliding with the workpiece 4. .. This is because the processing liquid supplied to the workpiece 4 is obstructed by the processing liquid guide portion 10 and loses a refuge. After that, although the flow velocity gradually decreases toward the central portion of the workpiece 4, the flow velocity immediately after the collision with the workpiece 4 is large, so that the flow velocity at the central portion of the workpiece 4 is the machining fluid. It increases more than when there is no guide portion 10. Therefore, the wire electric discharge machine 100 according to the first embodiment can stably supply the machining liquid between the poles regardless of the shape of the workpiece 4.

In order to increase the flow velocity of the machining fluid in the machining gap where the wire electrode 1 is arranged, it is preferable that the intervals between the

jig plates

10a and 10b are narrow. The nozzle widths W1 of the

machining fluid nozzles

5a and 5b shown in FIG. 4 are changed according to the distance W2 between the

jig plates

10a and 10b. If there is no change in the nozzle width W1 of the

machining fluid nozzles

5a and 5b even though the distance W2 between the

jig plates

10a and 10b is increased, there is a gap between the

jig plates

10a and 10b and the

machining fluid nozzles

5a and 5b. The increased working liquid supplied from the working

liquid nozzles

5a and 5b goes out of the space between the

jig plates

10a and 10b through the gap between the

jig plates

10a and 10b and the working

liquid nozzles

5a and 5b. leak. Therefore, the nozzle width W1 of the

machining fluid nozzles

5a and 5b is adjusted according to the distance W2 between the

jig plates

10a and 10b, and the opening of the groove 41 surrounded by the

jig plates

10a and 10b and the workpiece 4 is formed. The

machining fluid nozzles

5a and 5b cover the entire width direction. That is, the nozzle width W1 of the working

liquid nozzles

5a and 5b is set to be equal to or larger than the distance W2 between the

jig plates

10a and 10b.

In the wire electric discharge machine 100 according to the first embodiment, since it is not necessary to cover the entire workpiece 4 with the

jig plates

10a and 10b, the

jig plates

10a and 10b are individually covered according to the dimensions of the workpiece 4. No need to make. Further, since the workpiece 4 is arranged in the space between the

jig plates

10a and 10b, even if the width dimension of the workpiece 4 varies, the distance W2 between the

jig plates

10a and 10b can be adjusted. The workpiece 4 can be stably held. That is, the

jig plates

10a and 10b can stably hold the workpieces 4 having different dimensions. Further, since the

jig plates

10a and 10b are not damaged by electric discharge machining, the

jig plates

10a and 10b can be used repeatedly.

Embodiment 2.
FIG. 6 is a diagram showing a configuration of a wire electric discharge machine according to a second embodiment of the present invention. FIG. 7 is a perspective view showing a parallel cutting wire portion of the wire electric discharge machine according to the second embodiment. The same parts as those of the wire electric discharge machine 100 according to the first embodiment are designated by the same reference numerals, and the description thereof will be omitted. The four

guide rollers

2a, 2b, 2c, and 2d are arranged so as to be parallel to each other in the axial direction. The wire electrode 1 unwound from the wire feeding bobbin 13 is wound around the

guide rollers

2a, 2b, 2c, and 2d a plurality of times at intervals from each other, and then wound on the wire winding bobbin 14. A portion of the wire electrode 1 stretched in parallel between the guide roller 2b and the guide roller 2c forms a parallel cutting wire portion 15. The parallel cutting wire portion 15 simultaneously performs electric discharge machining on a plurality of locations of the workpiece 4. The parallel cutting wire portion 15 restrains each wire electrode 1 at an appropriate position by the

positioning guide rollers

2e and 2f. Inside the processing tank 26, a Z-axis stage 27 whose position can be adjusted in the Z-axis direction is installed. A machining fluid guide portion 10 is installed on the Z-axis stage 27. Therefore, by driving the Z-axis stage 27, the workpiece 4 held by the machining fluid guide portion 10 moves in the Z-axis direction.

A voltage is applied to the wire electrode 1 via the

power supply electrons

6a and 6b. The machining debris discharged from the workpiece 4 during machining is appropriately removed, and the machining fluid 25 is supplied between the poles via the

machining fluid nozzles

5a and 5b for cooling the interpole portions. The wire positions are constrained by the

positioning guide rollers

2e and 2f so that the wire electrode 1 does not vibrate during machining and the machining accuracy is not deteriorated.

The parallel cutting wire portion 15 is arranged in the machining fluid 25 in the machining tank 26, and electric discharge machining is performed in the machining fluid 25.

The

machining fluid nozzles

5a and 5b are installed on the left and right sides of the machining fluid guide section 10, and supplies the machining fluid 25 to the machining section where electric discharge machining is performed by the parallel cutting wire section 15. The processing voltage is applied to the wire electrode 1 via the

power supply electrons

6a and 6b, and a discharge is generated between the wire electrode 1 and the workpiece 4 separated by a small distance. Since the position of the workpiece 4 held by the machining fluid guide portion 10 is always controlled by a position control device (not shown) with a minute gap between them, the workpiece 4 is formed as the machining groove is formed by the electric discharge. Is gradually fed in the direction of the parallel cutting wire portion 15 to deepen the processing groove, and finally the workpiece 4 is cut into a thin plate shape.

Here, the workpiece 4 needs to be sliced into a plurality of thin plates. The workpiece 4 includes a metal such as tungsten or molybdenum as a sputtering target, ceramics such as polycrystalline silicon carbide used as various structural members, single crystal silicon as a semiconductor device wafer, single crystal silicon carbide, and single crystal. There are semiconductor materials such as gallium nitride and single crystal gallium oxide, single crystal and polycrystalline silicon used as solar cell wafers, and the like. Of the above, metal has a low resistivity and does not hinder the application of electric discharge machining. As a semiconductor material and a solar cell material, electric discharge machining is possible for a material having a specific resistance of about 100 Ωcm or less, preferably a material having a non-resistance of about 10 Ωcm or less.

Note that FIG. 7 shows an example in which one wire electrode 1 is wound around four

guide rollers

2a, 2b, 2c, and 2d, but the present invention is not limited to this case, and one wire electrode 1 is used. As long as the parallel cutting wire portion 15 is formed, the specific configuration thereof is not particularly limited.

FIG. 8 is a perspective view of the base plate of the machining fluid guide portion of the wire electric discharge machine according to the second embodiment. FIG. 9 is a diagram showing a state in which the machining fluid guide portion of the wire electric discharge machine according to the second embodiment and the workpiece are cut. FIG. 10 is a front view of the machining fluid guide portion of the wire electric discharge machine according to the second embodiment. FIG. 11 is a side view of the machining fluid guide portion of the wire electric discharge machine according to the second embodiment. The working liquid guide portion 10 has a base plate 10c and a facing plate 10d, which are a pair of plate members. The base plate 10c is composed of a lower base portion 101 and a plate portion 102 thinner than the base portion 101. The facing plate 10d is screwed to the base portion 101 with bolts 19.

The boundary between the base portion 101 and the plate portion 102 is a step 103. A cut-off end face fixing block 16 is installed on the step 103. The portion of the step 103 of the base portion 101 includes

protrusions

104 and 105 protruding upward at intervals in the left-right direction. The protrusion 105 is provided with a screw hole, and the bolt 18 is screwed into the protrusion 105. A contact plate 17 is arranged at the screw tip of the bolt 18. A cut-off end face fixing block 16 is arranged between the contact plate 17 and the protrusion 104. By tightening the bolt 18, the cover plate 17 is pressed against the cut-off end face fixing block 16, and the cut-off end face fixing block 16 is sandwiched and fixed between the protrusion 104 and the cover plate 17.

The cut-off end face fixing block 16 positions and fixes the cut-off end surface of the workpiece 4 in the vertical direction. The upper surface of the cut-off end face fixing block 16 is above both the

protrusions

104 and 105. Therefore, even if the parallel cutting wire portion 15 completely cuts off the workpiece 4, the parallel cutting wire portion 15 only cuts the cut-off end face fixing block 16 and does not damage the base plate 10c. The cut-off end face fixing block 16 is separable from the base plate 10c and can be replaced every time the workpiece 4 is processed.

By fixing the cut-off end surface of the work piece 4 with the cut-off end face fixing block 16, the work piece 4 can be energized until the moment when the work piece 4 is cut off, so that stable machining can be performed.

The workpiece 4 and the base plate 10c are fixed by bonding with a conductive adhesive or welding using a low melting point metal having a melting point of 300 ° C. or lower. Since both the conductive adhesive and the low melting point metal are conductive materials, electrical conduction can be provided between the workpiece 4 and the working liquid guide portion 10. In order to perform electric discharge machining, it is necessary to apply a voltage from the machining power source 11 between the wire electrode 1 and the workpiece 4. Since there is electrical continuity between the workpiece 4 and the machining fluid guide portion 10, as shown in FIG. 9, a feeder line connecting portion 28 is provided on the base plate 10c and a voltage is applied from the machining power supply 11 to perform machining. A voltage can be applied to the workpiece 4 via the liquid guide portion 10.

The cut-off end face fixing block 16 has conductivity. Therefore, the feeder line connection portion 28 may be provided in the cut-off end face fixing block 16 and a voltage may be applied from the processing power source 11 to the cut-off end face fixing block 16. Even when the feeder line connection portion 28 is provided on the base plate 10c, a voltage is applied to the base plate 10c from the machining power supply 11 via the cut-off end face fixing block 16 until just before the parallel cutting wire portion 15 cuts off the workpiece 4. Will be. Therefore, even if the feeder line connecting portion 28 is provided on the cut-off end face fixing block 16, electric discharge machining can be performed with the same quality as when the feeder line connecting portion 28 is provided on the base plate 10c.

The base portion 101 is provided with a reference surface 20 for measuring the inclination of the workpiece 4. When it is desired to accurately adjust the angle of the cut surface of the workpiece 4, it is necessary to adjust the position and posture of the workpiece 4 by using an angle adjusting mechanism or the like. When adjusting the position and orientation of the work piece 4 with reference to the surface of the work piece 4, it is difficult to make accurate adjustments if the surface of the work piece 4 is rough. However, it is not preferable from the viewpoint of cost to polish the surface of the workpiece 4 only for adjusting the position and posture of the workpiece 4. In the wire electric discharge machine 100 according to the second embodiment, a reference surface 20 for measuring the inclination of the workpiece 4 is provided on the base plate 10c. If the relative position between the workpiece 4 and the reference surface 20 is measured and grasped in advance, the position and orientation of the workpiece 4 can be adjusted by using the reference surface 20. Since the reference surface 20 is exposed even when the workpiece 4 is held, the position and posture of the workpiece 4 can be adjusted while the workpiece 4 is held by the machining fluid guide portion 10. it can.

In the wire electric discharge machine 100 according to the second embodiment, since the wire electrodes 1 are stretched in parallel to form the parallel cutting wire portion 15, the openings of the

machining fluid nozzles

5a and 5b become large, and the machining fluid nozzles 5a, The initial speed of the machining fluid 25 supplied from 5b is lower than that of the wire electric discharge machine 100 according to the first embodiment. The wire electric discharge machine 100 according to the second embodiment holds the workpiece 4 in the space between the base plate 10c and the facing plate 10d. Further, the base plate 10c and the facing plate 10d are surfaces facing the base plate 10c and the facing plate 10d of the workpiece 4, which are larger than the cylindrical end face having the same shape as the cut surface and cover the entire cylindrical end face of the workpiece 4. , The peripheral edge portion projects from the cylindrical end face of the workpiece 4. Therefore, the machining fluid 25 that has collided with the workpiece 4 is hindered by the machining fluid guide portion 10 and loses a refuge, and the flow velocity is high. Therefore, the speed of the machining fluid 25 supplied from the

machining fluid nozzles

5a and 5b. Is reduced in the central portion of the workpiece 4, but the machining fluid 25 can be better supplied to the machining gap as compared with the case where the machining fluid guide portion 10 is not provided. Therefore, although the wire electric discharge machine 100 according to the second embodiment is a multi-wire type provided with a parallel cutting wire portion 15, the machining speed is improved, the machining state is stabilized, the wire breakage is prevented, and the machining groove width is reduced. , And the roughness of the machined surface can be improved.

The wire electric discharge machine 100 according to the second embodiment can suppress a decrease in the flow velocity of the machining liquid 25 in the machining gap, and can contribute to the stabilization of machining, as in the first embodiment.

The configuration shown in the above-described embodiment shows an example of the content of the present invention, can be combined with another known technique, and is one of the configurations without departing from the gist of the present invention. It is also possible to omit or change the part.

1 Wire electrode, 2a, 2b, 2c, 2d guide roller, 2e, 2f positioning guide roller, 3 machining fluid supply device, 4 workpiece, 5a, 5b machining fluid nozzle, 6a, 6b power supply, 7 X-axis drive unit , 8 Y-axis drive unit, 9 surface plate, 10 machining fluid guide unit, 10a, 10b jig plate, 10c base plate, 10d facing plate, 11 machining power supply, 12-axis drive control unit, 13 wire feeding bobbin, 14 wire winding Bobbin, 15 parallel cutting wire part, 16 cut-off end face fixing block, 17 cover plate, 18, 19 bolt, 20 reference surface, 25 processing liquid, 26 processing tank, 27 Z-axis stage, 28 power supply line connection part, 41 groove part, 100 Wire discharge processing machine, 101 base part, 102 plate part, 103 step, 104, 105 protrusion part.

Claims

A wire electrode that generates an electric discharge between the workpiece and the workpiece to perform electrical discharge machining,
A machining fluid nozzle that supplies a machining fluid to the gap between the wire electrode and the workpiece from a direction coaxial with the wire electrode.
The work piece is provided in a pair of plate members and the workpiece is arranged in a space between the pair of plate members, and the work liquid is placed so that the work liquid does not escape from the space between the pair of plate members. It has a processing liquid guide part to guide
A wire electric discharge machine characterized in that the surface of the plate member facing the work piece is larger than the surface of the work piece facing the plate member.
The working liquid nozzle and the pair of plate members are arranged at intervals in the axial direction of the wire electrode.
The wire electric discharge machine according to claim 1, wherein the distance between the peripheral edge of the plate member and the machining fluid nozzle is constant during the electric discharge machining.
The wire electric discharge machine according to claim 1 or 2, wherein the nozzle width of the machining fluid nozzle is equal to or larger than the distance between the pair of plate members.
The wire electrode is
Any of claims 1 to 3, wherein the portions stretched in parallel with each other parallel to each other in the axial direction form a parallel cutting wire portion for simultaneously performing electric discharge machining at a plurality of locations of the workpiece. The wire electric discharge machine according to item 1.
The wire electric discharge machine according to any one of claims 1 to 4, wherein the workpiece is fixed to one of the pair of plate members.
The wire electric discharge machine according to claim 5, wherein at least one of the pair of plate members to which the workpiece is fixed has conductivity.
A claim characterized in that one of the pair of plate members to which the workpiece is fixed and the workpiece are fixed by welding with a metal having a melting point of 300 ° C. or lower or bonding with a conductive adhesive. Item 6. The wire electric discharge machine according to Item 6.
The wire electric discharge machine according to any one of claims 1 to 7, wherein the machining fluid guide portion has a cut-off end face fixing block for positioning and fixing the cut-off end surface of the workpiece. ..
The wire electric discharge machine according to claim 8, wherein the cut-off end face fixing block can be separated from the pair of plate members.
The wire electric discharge machine according to any one of claims 1 to 9, wherein the machining fluid guide portion has a reference surface for measuring the inclination of the workpiece.