CN220515664U

CN220515664U - Electric discharge machine

Info

Publication number: CN220515664U
Application number: CN202320876763.7U
Authority: CN
Inventors: 寇崇善; 叶文勇; 陈长营
Original assignee: Highlight Technology Corp
Current assignee: Highlight Technology Corp
Priority date: 2022-06-24
Filing date: 2023-04-19
Publication date: 2024-02-23
Anticipated expiration: 2033-04-19
Also published as: CN117283068A; CN117283069A; CN220515665U; TW202400334A; TW202400330A

Abstract

The utility model relates to an electric discharge machining device, which at least comprises a carrying table, an electric discharge machining unit and a correction device. The carrying platform is used for carrying at least one object to be processed. The electric discharge machining unit includes at least one electrode and a power supply unit for performing an electric discharge machining process on a machining target area of the workpiece along a machining traveling direction by the electrode. When the appearance of the electrode has a region to be corrected, the correction device performs a correction procedure on the electrode, so as to achieve the effect of discharge stabilization and prevent the short circuit problem generated in the discharge machining procedure. The present utility model overcomes the problems with hardware in the prior art described above by providing an improvement in hardware.

Description

Electric discharge machine

Technical Field

The present utility model relates to a machining apparatus, and more particularly, to an electric discharge machining apparatus.

Background

With the rapid growth of the semiconductor industry, electrical discharge machining techniques have been commonly used to process ingots or wafers. Electric discharge machining (Electrical Discharge Machining, EDM) is a manufacturing process in which spark is generated by electric discharge to form a workpiece into a desired shape. The dielectric material separates the two electrodes and applies a voltage to generate a periodic and rapid current discharge for processing the object to be processed. The electric discharge machining technique uses two electrodes, one of which is called a tool electrode or a discharge electrode, and the other of which is called a workpiece electrode, connected to the workpiece. During the electric discharge machining, there is no actual contact between the discharge electrode and the workpiece electrode.

When the potential difference between the two electrodes increases, the electric field between the two electrodes increases until the electric field strength is higher than the dielectric strength, at which time dielectric breakdown occurs, current flows through the two electrodes, and a portion of the material is removed. When the current is stopped, new dielectric material flows to the electric field between the electrodes, excluding some of the material and providing dielectric insulation. After the current flows, the potential difference between the two electrodes returns to the dielectric breakdown, so that the dielectric breakdown can be repeated for a new time.

However, the conventional electric discharge machining technology has disadvantages in that the roughness of the cut surface is poor, and the cut surface has a considerable surface crack, which may even extend in a non-cutting direction, resulting in a cracking effect in an unintended direction. Moreover, in the conventional electric discharge machining technology, for example, when cutting an ingot, a jig is used to clamp the periphery of the ingot, that is, to radially clamp the side edge of the ingot, so as to prevent rolling or displacement. However, since the cutting surface of the ingot is also located in the radial direction, the conventional art can cut only the ingot exposed to the outside of the jig, and cannot cut the region where the jig overlaps the ingot, so that the conventional art needs to stop and readjust the position before cutting again. In addition, current electrical discharge machining techniques can only cut or thin one wafer at a time, which is quite slow. Furthermore, the existing electric discharge machining technology uses only a single cutting line, and the existing electric discharge machining device has no quick-dismantling design, if the cutting line is accidentally broken, the machine needs to be stopped and a considerable time is spent for completing the replacement. It is known that there are still considerable improvements in the prior art, and that the problems of the prior art are caused by hardware.

Disclosure of Invention

Accordingly, one or more objects of the present utility model are to provide an electric discharge machine that overcomes the above-mentioned problems associated with the prior art by improving the hardware and relying on the conventional software and program.

In order to achieve the above object, the present utility model provides an electric discharge machine, at least comprising: a carrying platform for carrying at least one object to be processed; an electric discharge machining unit including at least one electrode and a power supply unit for performing an electric discharge machining process on a machining target area of the workpiece on the stage along a machining traveling direction by the electrode, wherein the electrode is in a suspended state in a discharge section, the power supply unit providing a first power supply to the electrode and the workpiece in the electric discharge machining process for applying a discharge energy to the machining target area of the workpiece via the electrode located in the discharge section; and a correction device for performing a correction procedure on a region to be corrected of an appearance of the electrode to correct the appearance of the electrode.

Wherein the correction device performs the electric discharge machining process on the electrode while the electrode performs the electric discharge machining process on the machining target area.

Wherein the correction device performs the correction process on the electrode before or after the electrode performs the electric discharge machining process on the machining target area.

Wherein the correction device corrects the appearance of the electrode in a quantitative adjustment manner according to a wear rate of the electrode and a feed rate of the electric discharge machining process.

Wherein the correction device corrects the appearance of the electrode in a dynamic adjustment manner according to a real-time state of the electrode.

Wherein the correction device comprises a correction tool assembly, and the correction tool assembly and the electrode generate a relative displacement in the correction procedure to correct the appearance of the electrode.

The correction device comprises a lifting mechanism and/or a translation mechanism, and is used for setting the correction knife assembly so that the correction knife assembly moves to generate the relative displacement with the electrode.

Wherein the trimming component is a laser source, a cutter or a grinding piece.

Wherein the correction device further comprises a chip removing component for removing a chip generated when the appearance of the electrode is corrected while the correction device performs the correction procedure.

Wherein the correction device comprises a scrolling mechanism for scrolling the electrode during the correction process, so that the area to be corrected of the electrode avoids the processing target area of the object to be processed, thereby correcting the appearance of the electrode.

The correction device further comprises a strip dividing component for dividing the electrode into a plurality of electrode strips parallel to each other in the discharge section.

Wherein the electric discharge machining unit further comprises a clamping component for clamping at least one side of the discharge section of the electrode when the electrode performs the electric discharge machining process, and releasing the at least one side of the discharge section of the electrode when the correction device performs the correction process.

The discharge processing device also comprises a slag discharging unit, and when the discharge processing unit performs the discharge processing procedure on the object to be processed, the slag discharging unit provides at least one external force to remove residues generated when the electrode applies the discharge energy to the object to be processed.

Wherein the slag discharging unit adjusts the application direction or the application position of the external force according to the shape of the object to be processed so as to remove the slag.

The electric discharge machining unit further comprises a jig, the jig is formed by correspondingly assembling at least two bearing components and at least two fixing components, the two fixing components are arranged on two base bodies, and the two base bodies are moving mechanisms or rotating mechanisms, so that when the electric discharge machining unit carries out the electric discharge machining procedure along the machining travelling direction, the electric discharge section of the electrode and the machining target area of the object to be machined are in reciprocating or circulating relative movement.

Wherein the electrode is in surrounding connection with the two bearing members or in surrounding connection with the two bearing members respectively by two sides of the electrode, so that the electrode is in the suspended state in the discharge section.

The correction device further comprises a position correction component for adjusting a relative position of the electrode and the object to be processed according to a deviation phenomenon of the electrode in the processing traveling direction so as to correct the processing traveling direction.

The correction device makes the electrode of the area to be corrected move to make the area to be corrected avoid the processing target area of the object to be processed by making the electrode of the area to be corrected appear in appearance, and the area to be corrected is a fracture phenomenon or a fracture sign.

The electrodes are arranged in parallel with each other along a first direction and/or a third direction in the discharge section, wherein the third direction is perpendicular to the first direction.

The correction device further comprises a whole cutter assembly, wherein the whole cutter assembly is used for separating the plurality of electrodes so as to enable the plurality of electrodes to be kept parallel to each other in the discharge section.

The electric discharge machining unit further comprises a separation column, and the plurality of electrodes are abutted against the separation column and are parallel to each other in the discharge section.

The stabilizing member is provided with a plurality of guide grooves for movably accommodating the plurality of electrodes and is used for stabilizing and guiding the plurality of electrodes so that the plurality of electrodes can perform the electric discharge machining process along the machining travelling direction.

The correction device makes the area to be corrected avoid the processing target area of the object to be processed by making at least one electrode of the plurality of electrodes move to the position where the area to be corrected appears in appearance, and the area to be corrected is a fracture phenomenon or a fracture sign.

In view of the above, the electrical discharge machining apparatus according to the present utility model has one or more advantages or technical effects:

(1) By improving the hardware, the correction device can correct the appearance of the electrode by the relative displacement between the knife trimming assembly and the electrode so as to prevent the short circuit problem generated in the electric discharge machining process.

(2) By improving the hardware, the correction device can prevent the short circuit problem generated by the electric discharge machining process by scrolling or moving the electrode to avoid the machining target area of the object to be machined.

(3) By improving the hardware, the scrap removing component can remove the scraps and other substances remained on the scrap repairing component and/or the electrode by the relative displacement between the scrap repairing component and the electrode. The slag discharging unit can provide external force for one or more processing target areas to help remove the residues generated by the electric discharge processing procedure or the correction procedure.

(4) By improving hardware, the strip-dividing component can divide the discharge section of the electrode into a plurality of electrode strips by the relative displacement between the trimming component and the electrode so as to avoid the problem of uneven loss of the plate-shaped electrode.

(5) By improving the hardware, the position correction component can correct the processing traveling direction of the electrode and the object to be processed so as to avoid the deviation of the processing traveling direction.

(6) By improving hardware, the clamping component can clamp the electrode to prevent the electrode from changing the processing travelling direction due to being pulled.

(7) By improving hardware, the whole knife assembly can keep parallel among a plurality of electrodes so as to avoid uneven phenomena such as deflection and the like on the surface of an object to be processed after electric discharge machining.

(8) By improving hardware, the stabilizing member can reduce electrode jitter, can also serve as a spacer column to provide a guiding effect, and can serve as an electrical contact.

In order to further understand and appreciate the technical features and effects of the present utility model, a preferred embodiment and a detailed description are provided.

Drawings

Fig. 1 is a schematic front view of an electric discharge machine according to the present utility model, wherein fig. 1 (a) and (B) are schematic views of different embodiments, respectively.

FIG. 2 is a schematic top view showing a partial structure of an electric discharge machine according to the present utility model, wherein the number of electrodes in FIG. 2 (A) is plural and is of a surrounding type design, the number of electrodes in FIG. 2 (B) is single and is of a surrounding type design, and the number of electrodes in FIG. 2 (C) is single and is of a crossover type design.

Fig. 3 is a schematic view showing an arrangement of a plurality of carrying members of the jig according to the present utility model, in which fig. 3 (a) and fig. 3 (B) are different embodiments, and fig. 3 (a) is a schematic view showing that a plurality of electrodes are parallel to each other in a machining traveling direction F to sequentially perform an electric discharge machining process on a single machining target area, and fig. 3 (B) is a schematic view showing that a plurality of electrodes are parallel to each other in a first direction X to simultaneously perform an electric discharge machining process on a plurality of machining target areas.

FIG. 4 is a diagram showing the phenomenon of inconsistent wear of electrodes in an electrical discharge machining process, wherein FIGS. 4 (A) and (B) are diagrams from different viewing angles.

FIG. 5 is a schematic diagram of a correction device of an electric discharge machine according to the present utility model having a cutter assembly, wherein FIGS. 5 (A) and (B) are schematic diagrams from different viewing angles.

Fig. 6 is a schematic view of a correction device of an electric discharge machine according to the present utility model having a lifting mechanism, wherein fig. 6 (a), (B) and (C) are schematic views of different embodiments, respectively.

Fig. 7 is a schematic view of a correction device of an electric discharge machine of the present utility model having a chip removing component, wherein fig. 7 (a) and (B) are schematic views from different viewing angles.

FIG. 8 is a schematic view of a correction device of an electric discharge machine of the present utility model having a scrolling mechanism, wherein FIGS. 8 (A) and (B) are schematic views from different viewing angles.

Fig. 9 is a schematic flow chart of a correction device for an electric discharge machine according to the present utility model by shifting the electrode, wherein fig. 9 (a), (B) and (C) are schematic flow chart steps respectively.

FIG. 10 is a schematic diagram of a correction device for an electrical discharge machining apparatus according to the present utility model, in which FIGS. 10 (A) and (B) are schematic diagrams of different viewing angles.

FIG. 11 is a schematic diagram of an electric discharge machining process performed by a correction device of an electric discharge machining apparatus according to the present utility model using a slitting assembly, wherein FIGS. 11 (A) and (B) are schematic diagrams obtained from different viewing angles.

Fig. 12 is a schematic view of a correction device of an electric discharge machine according to the present utility model having a cutter assembly, wherein fig. 12 (a) and (B) are schematic views from different viewing angles.

Fig. 13 is a schematic view of a correction device of an electric discharge machine according to the present utility model having a position correction unit, wherein fig. 13 (a) and (B) are schematic views from different viewing angles.

FIG. 14 is a schematic view of a fixture rolling electrode of an electrical discharge machining apparatus of the present utility model.

Fig. 15 is a schematic view of an electric discharge machine with a tension control module according to the present utility model.

Fig. 16 is a schematic view of an electric discharge machine with a slag discharging unit according to the present utility model, wherein fig. 16 (a) and (B) are schematic views of different embodiments, respectively.

Reference numerals illustrate:

10: electric discharge machine

20: carrier table

21: bearing plate

22: stabilizing member

28: contact surface

30: electric discharge machining unit

31: electrical contact

32: electrode

32': electrode strip

34: power supply unit

36: jig tool

40: bearing component

41: shaft hole

42: limiting groove

43: trough penetrating groove

44a: first sheet material

44b: second sheet material

47: lead angle

50: holding member

51: bump block

52: seat body

53: bump block

55: coupling device

58: motor with a motor housing

60: tension measuring unit

62: vibration measuring unit

64: slag discharging unit

65: spray head

66: tension control module

68: controller for controlling a power supply

80: correction device

82: knife trimming assembly

83: chip removing assembly

84: rolling mechanism

85: slitting assembly

86: clamping assembly

87: whole knife tackle spare

88: orientation correction assembly

89: detection assembly

90: lifting mechanism

91: rail track

92: translation mechanism

93: sliding table

95: rail track

96: bearing frame

97: sliding table

100: object to be processed

110: machining target area

281: guide groove

A: two sides

B: discharge section

C: region(s)

D: spacing of

X: first direction

Y: second direction

Z: third direction of

F: direction of travel of machining

P1: first power supply

Detailed Description

For the purpose of promoting an understanding of the principles of the utility model, including its principles, its advantages, and its advantages, reference should be made to the drawings and to the accompanying drawings, in which there is illustrated and described herein a specific example of an embodiment of the utility model. In addition, for ease of understanding, like elements in the following embodiments are denoted by like reference numerals.

Furthermore, the terms used throughout the specification and claims, unless otherwise indicated, shall generally be construed to have the ordinary meaning and meaning given to each term in the art, both in the context of the disclosure and in the specific context. Certain words used to describe the utility model will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the utility model.

The use of "first," "second," "third," and the like herein does not specifically refer to order or sequence, nor is it intended to limit the utility model to only distinguish between components or operations that may be described in the same technical term.

Second, the words "comprising," "including," "having," "containing," and the like, as used herein, are open-ended terms, meaning including, but not limited to.

Fig. 1 is a schematic front view of an electric discharge machine according to the present utility model, wherein (a) and (B) are schematic views of different embodiments. FIG. 2 is a schematic top view showing a partial structure of an electric discharge machine according to the present utility model, wherein the number of electrodes in FIG. 2 (A) is plural and is of a surrounding type design, the number of electrodes in FIG. 2 (B) is single and is of a surrounding type design, and the number of electrodes in FIG. 2 (C) is single and is of a crossover type design. Fig. 3 is a schematic layout diagram of the fixture of the present utility model in which a plurality of carrying members are used to arrange the electrodes in parallel, wherein fig. 3 (a) is a process of sequentially performing electric discharge machining on a single machining target area by a plurality of electrodes, and fig. 3 (B) is a process of simultaneously performing electric discharge machining on a plurality of machining target areas by a plurality of electrodes.

Referring to fig. 1 to 3, an Electric Discharge Machining (EDM) apparatus 10 of the present utility model includes a stage 20 and an electric discharge machining unit 30. The stage 20 is used for carrying at least one object to be processed 100. The two ends of the electrode 32 of the electric discharge machining unit 30 are respectively connected across (as shown in fig. 2 (C)) or around (as shown in fig. 1 (a), 1 (B), 2 (a) and 2 (B)) on the two jigs 36, so that the electrode 32 is suspended in the discharge section B. The electrode 32 of the electric discharge machining unit 30 extends along a second direction Y, such that the electrode 32 is parallel to the second direction Y in the discharge section B, wherein the second direction Y is perpendicular to the first direction X and the machining traveling direction F, respectively. The electrode 32 (i.e., the discharge section B of the electrode 32) located in the discharge section B is reciprocally or cyclically moved relative to the processing target area 110 of the object to be processed 100 (e.g., is relatively displaced in the direction of the hollow double-headed arrow or single-headed arrow (second direction Y) shown in fig. 1) to perform an electric discharge machining process, such as a Cutting (Cutting) and/or polishing (Electric Discharge Grinding, EDG) process, on the processing target area 110 of the object to be processed 100 on the stage 20 with the electrode 32 along the processing traveling direction F, on the processing target area 110 of the object to be processed 100 sequentially or simultaneously. The power supply unit 34 of the electric discharge machining unit 30 supplies a first power source P1 to the electrode 32 and the object 100 to be machined in the electric discharge machining process for applying discharge energy to the machining target area 110 of the object 100 to be machined via the electrode 32 located in the electric discharge section B. In the embodiment shown in fig. 1 to 3, the axis of the jig 36 is taken as an example perpendicular to the machining traveling direction F. However, the present utility model is not limited thereto, and in other possible embodiments, the axis of the jig 36 may be parallel to the machine direction F, for example. The object 100 may be any conductor or semiconductor structure, such as an ingot or wafer, for example. The carrier 20 of the present utility model may be a fixed-position carrier or a movable or rotatable moving carrier, wherein the carrier 20 is used as a working platform with a carrier 21, but the present utility model is not limited thereto, and the carrier 20 of the present utility model may alternatively omit the carrier 21 or replace the carrier 21 with an adhesive layer (e.g. conductive adhesive). In order to avoid the shaking phenomenon of the electrode 32 during the electric discharge machining process, the electric discharge machining apparatus 10 of the present utility model optionally has the stabilizing member 22, wherein the stabilizing member 22 is disposed on the carrier 20 and is propped against the two sides a of the electrode 32, and the shape of the stabilizing member 22 is not particularly limited, so long as the shaking of the electrode 32 can be reduced. For example, the contact surface 28 of the stabilizing member 22 contacting the electrode 32 may be a plane (as shown in fig. 1 (a)), for example, to reduce the shaking phenomenon by supporting the electrode 32 in a suspended state, or the contact surface 28 of the stabilizing member 22 contacting the electrode 32 may optionally have a guiding groove 281 (as shown in fig. 1 (B)), the guiding groove 281 not only can support the electrode 32 in a suspended state, but also can stabilize the electrode 32 and provide guiding effect when the electrode 32 reciprocates relative to the object 100 to be processed. In addition, the stabilizing member 22 may alternatively be of a highly telescoping construction whereby the height of the contact surface 28 of the stabilizing member 22 with the electrode 32 may be varied.

As shown in fig. 1 to 3, the electric discharge machining unit 30 includes at least one electrode 32, a power supply unit 34, and a jig 36. The number of the electrodes 32 may be, for example, one (as shown in fig. 2 (B) and 2 (C)) or a plurality thereof, for performing an electric discharge machining process on one machining target area 110 or a plurality of machining target areas 110 (as shown in fig. 2 (a) and 3 (B)) defined on the object to be machined 100. Fig. 3 is a schematic diagram of two embodiments of the present utility model in which the electrodes are arranged in parallel through a plurality of carrying members, wherein fig. 3 (a) is a schematic diagram in which a plurality of electrodes 32 are arranged in parallel along a processing traveling direction F, whereby the plurality of electrodes 32 can sequentially perform an electric discharge machining process on a single machining target 110, and fig. 3 (B) is a schematic diagram in which a plurality of electrodes 32 are arranged in parallel along a first direction X, whereby the plurality of electrodes 32 can simultaneously perform an electric discharge machining process on the plurality of machining targets 110. Taking as an example a plurality of electrodes 32 having discharge sections B extending along the second direction Y, the plurality of electrodes 32 are, for example, linear or plate-like conductive structures, such as conductive wires or foils, which are parallel to each other in a first direction X (as shown in fig. 3 (B)) and/or a machine direction F (as shown in fig. 3 (a)), wherein the machine direction F is parallel to the third direction Z and perpendicular to the first direction X. The number of electrodes 32 is selectively dependent on the actual requirements. The spacing between the electrodes 32 corresponds to the cut or thinned thickness of the object 100 to be processed. The electrodes 32 may have any cross-section that is the same or different from one another, such as a wire or plate (or sheet), or any symmetrical (e.g., circular, square, rectangular) or asymmetrical shape. The power supply unit 34 is electrically connected to the electrode 32 and the object to be processed 100 through the electrical contacts 31 (electrical contact), respectively. The power supply unit 34 may be a set of power outputs or a plurality of sets of power outputs for supplying the first power P1. The power supply unit 34 may be a serial or parallel type electric connection electrode 32, so long as the discharge energy can be applied to the processing target area 110 of the object 100 to be processed through the electrode 32.

The material of the electrode 32 may be selected from the group consisting of Copper (Copper), brass (Brass), molybdenum (Molybdenum), tungsten (Tungsten), graphite (Graphite), steel (Steel), aluminum (Aluminum), and Zinc (Zinc), for example. The thickness of the discharge electrode 32 is less than about 300 μm, preferably in the range of about 30 μm to about 300 μm. It should be noted, however, that the present utility model is illustrated with a plurality of electrodes 32, but is not limited thereto, and that a single electrode, as shown in fig. 2 (C), is also within the scope of the present utility model. It is not further described herein, as it should be apparent to those of ordinary skill in the art from the disclosure and prior art how to apply the techniques of the present utility model to a single electrode or a plurality of electrodes. When the plurality of electrodes 32 are arranged parallel to each other in the processing direction F, the plurality of electrodes 32 sequentially cut or polish the processing target area 110 of the object 100 along the processing direction F, the electrode 32 at the rear will repeatedly pass through the position where the electrode 32 at the front has passed. In other words, for example, in the processing direction F from top to bottom, even if the electrode 32 located in front (for example, the electrode located below) is disconnected, the electrode 32 located behind (for example, the electrode located above) can replace the electrode 32 located in front to apply the discharge energy to the processing target area 110 of the object 100 to be processed. Therefore, the present utility model can avoid the adverse effects of the interruption of the process caused by the disconnection of the electrode 32 by the electrode replacement function.

Referring to fig. 1 to 2, the jig 36 is selectively formed by, for example, at least two carrying members 40 and at least two holding members 50 respectively and correspondingly assembled. The two sides A of the electrode 32 are respectively supported against the two carrying members 40 in a movable or fixed manner, so that the discharge section B of the electrode 32 is in a suspended state, wherein the two carrying members 40 are separated from each other by a distance. The dimensions of the two carrying members 40 and the heights of the electrodes 32 carried by the same are not particularly limited as long as the discharge sections B of the electrodes 32 are suspended. The holding member 50 selectively and firmly connects with the carrying member 40 in a detachable or fixed manner, the holding member 50 is disposed on the base 52, wherein the base 52 can be a structure for fixing the position of the holding member 50, or the base 52 can be a moving mechanism for moving or rotating the holding member 50, so as to correspondingly drive the carrying member 40 to move or rotate, and the discharging section B of the electrode 32 can move in a left-right reciprocating manner. The present utility model is not limited to the stage 20 driving the object 100 to be processed toward the electrode 32 of the electric discharge machining unit 30 or the base 52 driving the electrode 32 to move toward the object 100 to be processed, and the utility model can be applied only if the Electric Discharge Machining (EDM) unit 30 and the object 100 to be processed on the stage 20 can perform relative movement along the above-mentioned machining traveling direction F. The base 52 is exemplified as a moving mechanism, which may be any moving mechanism capable of moving back and forth, such as a sliding mechanism, or may be any rotating mechanism capable of rotating back and forth or circularly, such as a motor, for driving the holding member 50 to move or rotate, respectively. Thereby, the carrying member 40 and the holding member 50 may be selectively moved reciprocally or cyclically with the electrode 32 such that the electrode 32 applies discharge energy to the object 100 in the discharge section B. In order to provide better adhesion of the electrode 32 to the carrier 40, the edges of the carrier 40 are optionally provided with a chamfer 47, as shown in fig. 2.

In other possible embodiments, the electric discharge machining unit 30 of the present utility model may be configured to reciprocate or cyclically move the discharge sections B of the plurality of electrodes 32 by, for example, reciprocally or cyclically rotating more than two carrying members 40. As shown in fig. 3 (a) and (B), each electrode 32 surrounds four carrying members 40, wherein fig. 3 (a) and fig. 3 (B) are different embodiments, and fig. 3 (a) is a parallel arrangement of the electrodes 32 along the processing traveling direction F, so that the plurality of electrodes 32 can sequentially perform an electric discharge machining process on a single target area 110, and fig. 3 (B) is a parallel arrangement of the electrodes 32 along the first direction X, so that the plurality of electrodes 32 can simultaneously perform an electric discharge machining process on a plurality of target areas 110. The electrodes 32 share two carrying members 40 among the four carrying members 40, so that two sides a of the electrodes 32 are in contact with each other to be in a stacked state and are movably abutted against the two carrying members 40, and the rest of the carrying members 40 are disposed in pairs at different vertical heights or horizontal positions, such that the electrodes 32 are arranged in parallel with each other at an interval in a processing traveling direction F (as shown in fig. 3 (a)) or in a first direction X (as shown in fig. 3 (B)). Thus, when the carrying member 40 is reciprocally or circularly rotated, the discharge sections B of the electrodes 32 are also displaced in the second direction Y relative to the workpiece 100. Wherein the shared carrier member 40 is, for example, synchronously reciprocating or cyclically rotating.

Briefly, the present utility model is exemplified by various means for relatively moving the discharge section B of the electrode 32 and the processing target area 110 of the object 100 along the processing traveling direction F. The first method is that the workpiece 100 moves along the machining traveling direction F and the electrode 32 is stationary in the machining traveling direction F. The second method is that the electrode 32 moves along the machining traveling direction F and the object 100 to be machined is stationary in the machining traveling direction F. The third method is that the electrode 32 and the workpiece 100 move in the direction opposite to the machining traveling direction F.

Similarly, the present utility model can also be used to move the discharge section B of the electrode 32 and the processing target 110 of the object 100 along the second direction Y. The first way is that the object 100 to be processed moves along the second direction Y and the electrode 32 is stationary in the second direction Y. The second way is that the electrode 32 moves along the second direction Y and the object 100 to be processed is stationary in the second direction Y. The third method is that the electrode 32 and the workpiece 100 move in the opposite direction of the second direction Y. In the second manner of moving the discharge section B and the processing target 110 along the second direction Y, the present utility model may also, for example, move the electrode 32 left and right (reciprocally) or continuously (circularly) by means of the jig 36, or fix the electrode 32 on the jig 36, but move the electrode 32 indirectly by moving the jig 36 left and right (reciprocally) along the second direction Y shown in the figures by means of the base 52.

It should be noted that the present utility model is not limited to the above-described various moving methods for performing the electric discharge machining process. For example, it is also contemplated that the object 100 moves along the machining direction F and the electrode 32 is stationary in both the machining direction F and the second direction Y, or that the electrode 32 moves along the machining direction F and the object 100 is stationary in both the machining direction F and the second direction Y. That is, any moving means that can perform the electric discharge machining process falls within the scope of the present utility model.

As shown in fig. 4 (a) and (B), the appearance (e.g., bottom surface) of the electrode 32 is prone to generate inconsistent wear (i.e., the area to be modified defined by the present utility model) during the electrical discharge machining process, which results in shorting problems during the electrical discharge machining process. Although there are a number of reasons (e.g., extrinsic and intrinsic reasons) that may cause the electrode 32 to wear out unevenly, in order to more thoroughly solve the short-circuit problem caused by the wear-out inconsistency, one feature of the EDM device 10 of the present utility model is to have a correction device 80 for correcting the electrode 32 having an area to be corrected in appearance, as shown in fig. 5 (a) and (B). The correction device 80 performs a correction process on the electrode 32, for example, corrects the appearance of the electrode 32 while the electrode 32 performs an electric discharge machining process on the machining target area 110. However, the present utility model is not limited thereto, and the correction device 80 may perform the correction process on the electrode 32 before or after the electrode 32 performs the electric discharge process on the processing target area 110, for example. That is, whenever the correction device 80 performs a correction procedure on the electrode 32, it is within the scope of the claimed utility model to correct the appearance of the electrode 32 so that the discharge can be stabilized. Fig. 4 (a) and (B) are schematic views from different angles, but for brevity, fig. 4 (a) only shows a part of the structure of each component, fig. 4 (B) only shows the component to be specifically described, and fig. 5 and the other similar drawings are presented in the same manner, so that the description is omitted here. In addition, in the embodiment shown in fig. 4 to 16, the axis of the jig 36 is parallel to the machine direction F.

For example, as shown in fig. 5 (a) and (B), the correction device 80 of the present utility model may include, for example, a correction tool 82 for correcting the appearance of the electrode 32 by the relative displacement between the correction tool 82 and the electrode 32 during the correction process. The trimming member 82 of the present utility model is, for example, a laser source, a cutter or a polishing member, which may be, for example, fixed or movable on the stage 20 or the base 52, or may be independently disposed in the electric discharge machining apparatus 10 (as shown in fig. 6 (a) to (C)), but the present utility model is not limited thereto, and any technical means that can change the appearance of the electrode 32 is within the scope of the present utility model. Moreover, it is within the scope of the claimed utility model that the modification device 80 of the present utility model modifies the appearance of the electrode 32 in real time, periodically or aperiodically, as long as the modification device 80 modifies the appearance of the discharge section B of the electrode 32, for example, to make the wear level uniform or to obtain the desired appearance of the electrode 32.

The correction device 80 of the present utility model can selectively correct the appearance of the electrode 32 in a quantitatively adjusted manner according to the wear rate (e.g., theoretical or measured wear rate) of the electrode 32 and the feed rate of the electric discharge machining process, wherein the correction device 80 can, for example, correct the appearance of the electrode 32 in a quantitatively adjusted manner along the machining traveling direction F (e.g., move the cutter assembly 82 a predetermined distance relative to the workpiece 100 along the machining traveling direction F at a predetermined rate) or correct the appearance of the electrode 32 in a quantitatively adjusted manner along the second direction Y (e.g., move the electrode 32 a predetermined length relative to the workpiece 100 along the second direction Y at a predetermined rate). Alternatively, the correction device 80 can selectively correct the appearance of the electrode 32 in a dynamic adjustment manner according to the real-time status of the electrode 32. For example, the present utility model may also optionally obtain the real-time status of the electrode 32, such as the real-time wear level, by the detection device 89. The detecting element 89 is, for example, a discharge change detecting element or a photoelectric detecting element or an image detecting element having a light emitter and a light receiver, for example, to know the wear of the discharge section B of the electrode 32 by light interruption or light intensity change. It should be apparent to those skilled in the art from this disclosure that the correction device 80 of the present utility model is not an improvement over software or programming, but rather, modifies the appearance of the electrode 32 by improving hardware and relying on conventional software and programming.

In addition, the trimming member 82 may be selectively designed to be of a lift-type, whereby the height may be changed according to the wear rate of the electrode 32 and the feed rate of the electric discharge machining process so that the wear level of the discharge section B of the electrode 32 is uniform. For example, assuming that the moving speed of the stage 20 (the feeding speed of the electric discharge machining process) is d length per minute and the theoretical wear rate of the electrode 32 is 0.1d length per minute, if the trimming member 82 is disposed on the stage 20, the trimming member 82 of the present utility model can be stuck to the bottom surface of the electrode 32 during the electric discharge machining process, and extend out by 0.1d length per minute toward the electrode 32 by elevating the design, so that the discharge section B of the electrode 32 can reach a predetermined wear level during the whole electric discharge machining process. Similarly, the trimming device 82 of the present utility model can be dynamically adjusted to raise and lower to a desired height in real time according to the real-time status such as the real-time wear of the electrode 32, so as to correct the appearance of the electrode 32 in real time. For example, the trimming member 82 of the present utility model may be configured to be raised and lowered to a height, for example, or the trimming member 82 of the present utility model may be provided to a lifting mechanism 90, as shown in fig. 6 (a) to (C), for example, whereby the height can be raised and lowered as required by the trimming process, and the feeding speed of the trimming member 82 can be controlled. The lifting mechanism 90 may be, for example, a sliding table type lifting table as shown in fig. 6 (B) and 6 (C), i.e., a sliding table 93 capable of lifting along a track 91, and the tool repairing assembly 82 is disposed on the sliding table 93, for example, via a carrier for carrying a wafer or via a carrier 96. Alternatively, the lifting mechanism 90 may be, for example, a spring type (or telescopic type) lifting table as shown in fig. 6 (a). Moreover, the elevating mechanism 90 of the present utility model is not limited to manual or automatic designs, and is intended to be within the scope of the present utility model as long as the knife assembly 82 can be elevated and lowered. In addition, the repair tool assembly 82 may be disposed on the lifting mechanism 90, for example, via a translation mechanism 92, as shown in fig. 6 (C), and has a sliding table 97 that can translate along a track 95, so that the repair tool assembly 82 can be selectively moved by the translation mechanism 92 along the track 95 to the position below the electrode 32 during the repair process, and removed after the repair process is completed. Although the structure shown in fig. 6 is taken as an illustrative example, the present utility model is not limited thereto, and any design that can move the position of the trimming member 82 to generate a relative displacement with the electrode 32 or move the position of the electrode 32 to generate a relative displacement with the trimming member 82 is within the scope of the present utility model. It should be apparent to those skilled in the art from this disclosure that the trimming assembly 82 of the trimming device 80 of the present utility model is not an improvement to software or programming, but rather, can modify the appearance of the electrode 32 by improving hardware and relying on conventional software and programming.

Taking the trimming member 82 as a laser source or a cutter, for example, it can be located at the bottom side or side of the electrode 32, when the trimming member 82 and the electrode 32 are relatively displaced, the laser light of the laser source or the cutting edge of the cutter can be used to cut off part of the thickness of the bottom of the electrode 32, so that the appearance of the electrode 32 having inconsistent degree of loss on the discharge section B of the electrode 32 becomes flattened. Taking the polishing member as an example, the polishing member 82 may be located on the bottom side of the electrode 32, for example, and when the relative displacement is generated between the polishing member 82 and the electrode 32, the polishing member is used to polish out a portion of the thickness of the bottom of the electrode 32, so as to planarize the appearance of the electrode 32, which would otherwise have inconsistent wear, as shown in fig. 5 (B) and fig. 6 (a) to (C).

In addition, since the correction device 80 may remain on the cutter assembly 82 or the electrode 32 during the correction process. Thus, as shown in fig. 7 (a) and (B), the correction device 80 of the present utility model further optionally includes a chip removing component 83, which may be a cleaning tool such as a sponge or a scraping bar, or an ultrasonic component, for example, and is disposed on the stage 20, the base 52, or other components, for abutting against the bottom of the electrode 32 and/or the top of the trimming member 82, whereby the chip removing component 83 may also remove the chips and other materials remaining on the trimming member 82 and/or the electrode 32 when the correction device 80 corrects the appearance of the electrode 32 by the relative displacement between the trimming member 82 and the electrode 32. The arrangement of the chip removing member 83 is not limited to a fixed or movable design, as long as the cleaning and removal of the residual chips and the like can be achieved, and it is within the scope of the claimed utility model. In addition, the chip removing component 83 of the present utility model may be an ultrasonic component, and is disposed on the trimming component 82, the lifting mechanism 90 or the translation mechanism 92 shown in fig. 6, for example, so as to increase the trimming speed and provide chip removing effect to reduce the sticking of the abrasive paper chip or the abrasive chip adhered to the electrode 32.

In addition, the correction device 80 of the present utility model can also remove the area C of inconsistent wear of the electrode 32, for example, by shifting, so as to avoid the use as the discharge section B. As shown in fig. 8 (a) and 8 (B), the correction device 80 of the present utility model may optionally include, for example, a scrolling mechanism 84. Wherein, when the appearance of the electrode 32 appears in the area to be corrected in the discharge section B, for example, an uneven wear phenomenon or even a breakage phenomenon or sign occurs, the scrolling mechanism 84 of the correction device 80 may scroll at least the electrode 32 appearing in the area to be corrected in the appearance or move the electrode 32 appearing in the area to be corrected (area C) away from (or staggering) the processing target area 110 of the object to be processed 100, for example, scroll the broken electrode 32 to the outside of the stabilizing member 22, thereby changing other normal areas of the electrode 32 as the discharge section B and blocking the interference generated by the broken electrode 32. The present utility model may, for example, use a fixture 36 having a holding member 50 and a carrying member 40 of a scrolling design as the scrolling mechanism 84. The scrolling mechanism 84 of the present utility model is not limited to manual or automatic designs and the structural design is not limited to the above examples, as long as the area of inconsistent wear of the electrodes 32 is removable from being used as the discharge section B, which is within the scope of the claimed utility model.

For example, as shown in fig. 9 (a) to 9 (C), if the bottom electrode 32 is exposed to the breaking phenomenon as shown in fig. 9 (a) in the discharge section B during the electric discharge machining process (i.e., before the electric discharge machining process is completed), the present utility model can selectively shift the position of the workpiece 100 actively (e.g., to the left, as shown in fig. 9 (B)) so that the electrode 32 broken to the right is separated from (avoided) the workpiece 100. Then, the electrode 32 is moved rightward, so that the left broken electrode is separated from (avoided from) the object 100 to be processed. At this time, the broken electrode 32 may be selectively sucked or stuck, or even the broken electrode 32 may be sheared off, or even the broken electrode 32 may be separated from the workpiece 100. Next, as shown in fig. 9 (C), the workpiece 100 is moved to the previous electric discharge machining position, and the electric discharge machining process, which has not been completed previously, is continued on the workpiece 100 with the other unbroken electrodes 32 until the entire electric discharge machining process is completed. Therefore, the present utility model can avoid the conventional process that the whole electric discharge machining apparatus and the electric discharge machining process are completely interrupted and the unfinished electric discharge machining process can be continued after the electrode 32 is manually arranged. Similarly, the present utility model may also scroll the broken electrode 32 to the left and/or right outside the stabilizing member 22, for example, by means of the jig 36 (or the scrolling mechanism 84 of the correction device 80), as shown in fig. 9 (C), and then continue the electric discharge machining process, which has not been completed previously, with the other unbroken electrode 32 on the object 100 until the whole electric discharge machining process is completed. In the embodiment example shown in fig. 9 (a) to 9 (C), the present utility model takes an example in which the stabilizing member 22 is located on the stage 20 and is located at both sides of the object to be processed 100, for example, whereby the electrode 32 cannot naturally enter the inner side of the stabilizing member 22 again after the electrode 32 is discharged to the outer side of the stabilizing member 22, so that the electrode 32 having a breakage phenomenon can be easily eliminated. Similarly, the stabilizing member 22 of the present utility model may be selectively located on the base 52, or the stabilizing member 22 may be located on both the carrier 20 and the base 52, so as to eliminate the broken electrode 32 by shifting.

In short, the correction device 80 of the present utility model can make the wear of the discharge section B of the electrode 32 uniform, for example, by removing, thereby providing the effect of discharge stabilization. Alternatively, the correction device 80 of the present utility model can remove the area C of inconsistent wear of the electrode 32, for example, by shifting, so as to avoid the discharge section B. However, the present utility model is not limited thereto, and the correction device 80 of the present utility model may be used to achieve the effect of correcting the appearance of the electrode 32 by combining the above two methods or using any feasible method. In other words, no matter what technical means is adopted by the correction device 80 to perform the correction procedure on the electrode 32, the short circuit problem caused by the inconsistent wear level can be solved, which falls within the scope of the present utility model.

The correction device 80 of the present utility model may optionally further comprise at least one clamping member 86 (shown in fig. 4-9) fixedly disposed on the base 52 or other component of the electrical discharge machining apparatus 10 for selectively clamping at least one side, e.g., both sides, of the discharge section B of the electrode 32. The clamping assembly 86 is embodied, for example, but not limited to, a structure having a vice. For example, when the present utility model utilizes the left and right (along the second direction Y) movement of the base 52 to drive the electrode 32 to move synchronously relative to the workpiece 100 via the fixture 36, the clamping assembly 86 can selectively clamp the electrode 32 (as shown in fig. 8B) so that the electrode 32 performs the electric discharge machining process. The clamping assembly 86 not only can be used to selectively fix the position of the electrode 32, but also can prevent the electrode 36 from loosening due to pulling during the electric discharge machining process and causing the tension of the electrode 32 to decrease, thereby adversely affecting the electric discharge machining process. Similarly, the clamping assembly 86 may release the electrode 32 when the fixture 36 has a need to scroll the electrode 32 (e.g., to perform a corrective procedure or to move the electrode 32 to perform an electrical discharge machining procedure).

As shown in fig. 5 to 9, since the discharge section B of the electrode 32 is advanced along the machining traveling direction F to apply discharge energy to the machining target area 110 of the workpiece 100 and the discharge section B of the electrode 32 and the machining target area 110 of the workpiece 100 are simultaneously moved relatively along the second direction Y in the electric discharge machining process, the electric discharge machining apparatus 10 of the present utility model may optionally have the stabilizing member 22 disposed on the base 52 or other members of the electric discharge machining apparatus 10, such as the stage 20, and the disposition position of the stabilizing member 22 is, for example, at least one side or the outer side of the discharge section B of the electrode 32, and the type of the stabilizing member 22 is not particularly limited, so long as the occurrence of the shaking of the electrode 32 can be reduced. For example, the stabilizing member 22 has a guiding groove 281, the guiding groove 281 has a dimension, such as a depth or width, sufficient to movably accommodate the electrodes 32, and the number of the guiding groove 281 corresponds to the electrodes 32, thereby maintaining the distance between the electrodes 32, reducing the swing along the first direction X, effectively stabilizing the electrodes 32 and providing guiding effect. In addition, the stabilizing member 22 may be selectively designed in a highly stretchable structure, whereby the height of the guide groove 281 where the stabilizing member 22 contacts the electrode 32 may be changed according to the depth of the processing groove of the processing target region 110 of the object 100 to be processed. Wherein the stripe structure between two adjacent guide grooves 281 of the stabilizing member 22 can be used as a separation column for separating the plurality of electrodes 32 and making them parallel to each other. The electrode 32 is abutted against the partition column, for example, the electrode 32 is movably abutted against the partition column, and the position of the partition column is fixed, but the partition column can be of a fixed type or a rolling type design and is provided with a limit groove so as to serve as a guide column. The separation columns may also be selectively conductive, whereby the electrodes 32 may be electrically connected to the power supply unit 34 via the separation columns, i.e. the separation columns may also be selectively used as the electrical contacts 31 of fig. 1. In addition, the separation columns may also be made of insulating materials, so as to avoid electrical connection between the electrodes 32. Wherein the two carrying members 40 are rotated, for example, reciprocally or cyclically, synchronously and at the same rotational speed, so that the speeds of the reciprocal or cyclic movements of the electrodes 32 along the second direction Y are the same.

As shown in fig. 10 (a), 10 (B), 11 (a) and 11 (B), the correction device 80 of the present utility model may optionally further comprise at least one slitting component 85, for example, disposed on the base 52 or any position of the electric discharge machining device, and the electrode 32 (for example, a plate shape) may be cut into a plurality of electrode strips 32' (for example, strips) parallel to each other by the relative movement between the slitting component 85 and the plate-shaped electrode 32. The splitting assembly 85 is, for example, a vice clamping knife with a plurality of blades, but is not limited thereto. For example, if the plate-shaped electrode 32 is clamped by the cutting edge of the vice clamping knife, when the relative movement between the strip-shaped element 85 and the plate-shaped electrode 32 is generated along the second direction Y (for example, the position of the strip-shaped element 85 is fixed, and the electrode 32 is rolled by the jig 36 to move horizontally relative to the strip-shaped element 85 in the second direction Y), the plate-shaped electrode 32 with a wider width is cut into a plurality of electrode strips 32' with a narrower width. Since the spacing between adjacent blades is equal to the width of the electrode strip 32'. Therefore, the present utility model can also change the spacing or number of the multiple cutting edges of the vise clamping blade to adjust the width or number of electrode strips 32'. In addition, if the present utility model uses the rolling electrode 32 to make the stripping device 85 perform the stripping process on the electrode 32, the clamping device 86 of the present utility model can selectively release the electrode 32 temporarily during the stripping process of the stripping device 85 due to the requirement of the fixture 36 for rolling the electrode 32. Similarly, if the present utility model employs the moving of the stripping element 85 to strip the electrode 32 with fixed position, the clamping element 86 of the present utility model can selectively clamp the electrode 32 to prevent the electrode 32 from rolling during the stripping process of the stripping element 85.

As shown in fig. 12 (a) and 12 (B), the correction device 80 of the present utility model may optionally include at least one finishing cutter assembly 87, for example, disposed on the base 52 or at any position of the electric discharge machining device 10, the finishing cutter assembly 87 contacting the electrode 32, the discharge sections B of the strip-shaped or plate-shaped electrode 32 may be arranged in a straight line or a vertical line by means of the relative movement between the finishing cutter assembly 87 and the electrode 32, and if the number of the electrodes 32 is plural, the finishing cutter assembly 87 may arrange the electrodes 32 in a parallel state with each other. The whole cutter assembly 87 has a plurality of comb teeth, for example, and abuts against both sides of each electrode 32 by two adjacent comb teeth, and the whole cutter assembly 87 is of a movable design, for example, moving from one side of the discharge section B to the other side (along the second direction Y), but is not limited thereto. In addition, if the electrode 32 is fixed in position by moving the trimming member 87, the clamping member 86 of the present utility model can selectively clamp the electrode 32 to prevent the electrode 32 from loosening when the trimming member 87 performs the trimming process. Similarly, if the present utility model uses the electrode 32 rolling manner to make the electrode 32 complete the electrode procedure, the clamping assembly 86 of the present utility model can selectively release the electrode 32 temporarily during the electrode 32 complete the electrode procedure by the tool 36. Wherein the teeth of the cutter assembly 87 can be used as separating posts to separate the plurality of electrodes 32 and to make them parallel to each other.

As shown in fig. 13 (a) and 13 (B), the correction device 80 of the present utility model may optionally further comprise a position correction component 88 for adjusting the relative position of the electrode 32 and the object 100 to correct the machining traveling direction F of the electrode 32 and the object 100 when the machining traveling direction F of the electrode 32 is deviated or the like. For example, the alignment device 88 may be, for example, a telescopic ram (e.g., a manual or electric telescopic ram), and by, for example, pushing the stage 20, the electrode 32, or other components of the electric discharge machining apparatus that can change the relative alignment of the electrode 32 or the workpiece 100, the effect of correspondingly adjusting the relative alignment of the electrode 32 and the workpiece 100 along the first direction X can be achieved. For example, the present utility model can determine whether the machining traveling direction F of the electrode 32 is shifted, for example, by the detecting means 89. The detecting device 89 is, for example, a discharge change detecting device or a photoelectric detecting device or an image detecting device having a light emitter and a light receiver, and is used for detecting whether the processing traveling direction F of the electrode 32 is deviated or not by light interruption or light intensity change. It should be apparent to those skilled in the art from this disclosure that the orientation correction assembly 88 of the present utility model is not an improvement over software or programming, but rather an improvement over hardware, and that it should be apparent how the present utility model relies on conventional software and programming to correct the machine direction F of travel of the electrode 32 and the object 100 to be machined.

In addition, in the present utility model, the means for reciprocatingly or circularly scrolling the electrode 32 by the jig 36 may be as shown in fig. 14 and 15, wherein the electrode 32 surrounds (spans two sides) two jigs 36 or spans two jigs 36 only on one side, for example. The two jigs 36 are rotatably disposed on the base 52, and the two jigs 36 are connected to two motors 58 via two couplings 55, for example, so that the two jigs 36 can correspondingly rotate by the operation of the two motors 58, and the electrode 32 can reciprocate or circularly move along the second direction Y. Since the discharge section B of the electrode 32 is in a suspended state, the present utility model optionally has a tension control module 66 (as shown in fig. 15), which includes, for example, a tension measuring unit 60 and a controller 68, wherein the tension measuring unit 60 is used for measuring the tension value of the electrode 32, and the controller 68 is electrically connected to the two motors 58, so as to control the two motors 58 according to the tension value of the electrode 32, so that the two motors 58 respectively perform constant-speed winding and unwinding rotations, and further adjust the tension value of the electrode 32, thereby making the electrode 32 maintain the tension value of the specified value when moving along the second direction Y. In addition, the present utility model can calculate the time for the two motors 58 to exchange the operation direction according to the length and the moving speed of the electrode 32, so as to achieve the effect of reciprocating the electrode 32.

It should be noted that although the present utility model enumerates several means to perform one or more functions, the present utility model is not limited thereto. The present utility model may alternatively be configured such that a single component performs multiple functions, such as integrating the stabilizing member 22 and the finishing cutter assembly 87 into the same component, or, for example, integrating one or more of the stabilizing member 22, the finishing cutter assembly 87, the clamping assembly 86, the chip removing assembly 83, and other components of the electrical discharge machining apparatus 10 into the same component. Similarly, the present utility model is not limited to the selection of all the above-described members, and the electric discharge machine of the present utility model may select only a part of the above-described members so as to perform the electric discharge machining process.

In each of the above embodiments, the electric discharge machining unit 30 of the present utility model may optionally include a slag discharging unit. For example, as shown in fig. 16 (a) and (B), the electric discharge machining unit 30 of the present utility model may optionally include a slag discharging unit 64, wherein when the electric discharge machining unit 30 performs an electric discharge machining process on the workpiece 100, the slag discharging unit 64 provides one or more external force to remove residues generated by the electrode 32 when the workpiece 100 is applied with discharge energy, and the direction or position of application of the external force generated by the slag discharging unit 64 corresponds to the discharge section B of the electrode 32. The slag discharging unit 64 may be, for example, an air flow generator, a water flow generator, an ultrasonic generator, a piezoelectric oscillator, or a magnetic force generating component. The external force can be, for example, air flow, water flow, ultrasonic vibration, piezoelectric vibration, suction force, magnetic force, or the like. The slag discharging unit 64 is not limited to be disposed on the stage 20, and may be disposed around the discharge section B of the electrode 32. Taking the slag discharging unit 64 as an ultrasonic generator or a piezoelectric oscillator as an example, the slag discharging unit 64 may be disposed on the jig 36 or the carrier 20, for example, by directly generating an external force to directly act on the jig 36 or the carrier 20, the external force generated by the slag discharging unit 64 may also vibrate the jig 36, the object to be processed 100 or the electrode 32, for example, and simultaneously vibrate, for example, to provide an effect of assisting in removing residues. In addition, as shown in fig. 16 (B), the slag discharging unit 64 of the present utility model may selectively adjust the application direction and/or the application position of the external force according to the shape of the workpiece 100 to remove the residue generated by the electrode 32 applying the discharge energy to the workpiece 100. For example, taking the slag discharging unit 64 as an example of a water flow generator capable of spraying water to remove residues, the slag discharging unit 64 is, for example, a shower head 65 having a plurality of movable positions, and the direction of spraying water can be adjusted according to the shape of the object 100 to be processed. For example, if the object 100 to be processed is an ingot, the plurality of shower heads 65 of the slag discharging unit 64 are distributed on the arc surface of the ingot and are selectively distributed on both sides of the arc surface of the ingot. Furthermore, the plurality of nozzles 65 of the slag discharging unit 64 can selectively adjust the arc shape or the position of the nozzle according to the real-time depth position of the electric discharge machining, thereby achieving the effect of dynamically adjusting the water spraying according to the shape of the object to be machined 100. Similarly, the slag discharging unit 64 can be used as the chip removing assembly, and the slag discharging unit 64 is only used as a water flow generator for illustration, however, it should be understood by those skilled in the art how to modify any feasible slag discharging unit 64 by modifying hardware, and rely on the conventional software and program to achieve the effect of dynamically adjusting the water spraying design of the present utility model or achieve the effect of dynamically spraying water along with the shape of the workpiece 100, which is not described herein. In the embodiment shown in fig. 16 (a) and (B), the carrying member 40 includes a first sheet 44a and a second sheet 44B, respectively, and the electrodes 32 are sandwiched between the first sheet 44a and the second sheet 44B, so that the plurality of electrodes 32 are parallel to each other in the machining traveling direction F for performing an electric discharge machining process on the object 100 to be machined. For example, the carrier member 40 may have a through slot 43, and the carrier member 40 may be sleeved on the protrusion 53 of the holding member 50 by the through slot 43. Because the electrode 32 is clamped on the jig 36, the utility model can achieve the effect of quickly replacing the electrode 32 by the quick-dismantling design of the jig 36.

In the present utility model, the surface of the carrier member 40 may have a plurality of limiting grooves 42 (as shown in fig. 2) for limiting the electrodes 32 in the limiting grooves 42, and the electrodes 32 in different limiting grooves 42 may be electrically independent of each other or may be electrically connected in series. The number of electrodes 32 in different limiting grooves 42 is not limited to be the same as each other, i.e., the number of electrodes 32 in different limiting grooves 42 may be different from each other. The spacing grooves 42 are also arranged in parallel along the first direction X at the above-mentioned spacing D, whereby the electrodes 32 can be arranged in parallel along the first direction X. The width of the limiting groove 42 corresponds to the width of the electrode 32, for example, the width of the limiting groove 42 is slightly larger than the width of the electrode 32, thereby limiting the electrode 32 in the limiting groove 42. The holding member 50 selectively and firmly connects the carrying member 40 in a detachable or fixed manner, and the connection between the carrying member 40 and the holding member 50 is not particularly limited, so long as the carrying member 40 can be connected to the holding member 50, or the carrying member 40 can selectively perform movements such as movement or rotation by means of movements such as movement or rotation of the holding member 50. The bearing member 40 is, for example, a cylindrical (as shown in fig. 2) or other shaped sleeve with a shaft hole 41, and the bearing member 40 can be sleeved on the protrusion 51 of the holding member 50 by using the shaft hole 41. In addition, in order to reduce the time required for replacing the electrode 32 when the electrode 32 is accidentally broken, the present utility model may also be used to first sleeve the shaft hole 41 of the carrier member 40 over a Dummy support member also having a bump. Therefore, the user can quickly take out the carrying member 40 with the electrode 32 surrounded by the supporting member, and sleeve the shaft hole 41 of the carrying member 40 on the protrusion 51 of the holding member 50, or insert the protrusion 51 of the holding member 50 into the shaft hole 41 of the carrying member 40, so that the assembly of the fixture 36 can be quickly completed. However, the fixture 36 of the present utility model is not limited thereto, and any fixture 36 may be configured to carry the electrode 32 so as to perform the electric discharge machining process on the electrode 32, which is within the scope of the present utility model.

In summary, the electric discharge machine of the present utility model has one or more advantages or technical effects:

(1) The correction device can correct the appearance of the electrode by means of the relative displacement between the knife trimming assembly and the electrode so as to prevent the short circuit problem generated in the electric discharge machining process.

(2) The correction device can prevent the short circuit problem generated in the electric discharge machining process by rolling or moving the electrode to avoid the machining target area of the object to be machined.

(3) The chip removing component can remove the chips and other substances remained on the trimming component and/or the electrode by the relative displacement between the trimming component and the electrode. The slag discharging unit can provide external force for one or more processing target areas to help remove the residues generated by the electric discharge processing procedure or the correction procedure.

(4) The strip-dividing assembly can cut the discharge section of the electrode into a plurality of electrode strips by means of the relative displacement between the trimming assembly and the electrode, thereby avoiding the problem of uneven loss of the plate-shaped electrode.

(5) The position correcting component can correct the processing travelling direction of the electrode and the object to be processed, thereby avoiding the deviation of the processing travelling direction.

(6) The clamping assembly can clamp the electrode to prevent the electrode from changing the processing travelling direction due to pulling.

(7) The whole knife assembly can keep parallel among a plurality of electrodes, and can avoid uneven phenomena such as deflection and the like on the surface of an object to be processed after electric discharge machining.

(8) The stabilizing member reduces electrode jitter, provides a guiding effect as a separator column, and serves as an electrical contact.

The foregoing is by way of example only and is not intended as limiting. Any equivalent modifications or variations to the present utility model without departing from the spirit and scope thereof are intended to be included in the following claims.

Claims

1. An electric discharge machine, comprising:

a carrying platform for carrying at least one object to be processed;

an electric discharge machining unit including at least one electrode for performing an electric discharge machining process on at least one machining target area of the workpiece on the stage along a machining traveling direction with the electrode in a suspended state at a discharge section, and a power supply unit for supplying a first power source to the electrode and the workpiece in the electric discharge machining process for applying a discharge energy to the machining target area of the workpiece via the electrode located in the discharge section; and

A correction device for performing a correction procedure on a region to be corrected of the appearance of the electrode to correct the appearance of the electrode.

2. The electric discharge machining apparatus according to claim 1, wherein the correction means performs the correction process on the electrode while the electrode performs the electric discharge machining process on the machining target area.

3. The electric discharge machining apparatus according to claim 1, wherein the correction means performs the correction process on the electrode before or after the electrode performs the electric discharge machining process on the machining target area.

4. The electrical discharge machining apparatus according to claim 1, 2 or 3 wherein the correction means corrects the appearance of the electrode in a quantitative adjustment manner based on a wear rate of the electrode and a feed rate of the electrical discharge machining process.

5. The electrical discharge machining apparatus of claim 1, 2 or 3 wherein the correction means corrects the appearance of the electrode in a dynamically adjusted manner based on a real-time state of the electrode.

6. The electrical discharge machining apparatus of claim 1 wherein the correction device comprises a trimming assembly that is displaced relative to the electrode during the correction process to correct the appearance of the electrode.

7. The electrical discharge machining apparatus of claim 6 wherein the correction device includes a lifting mechanism and/or a translation mechanism for positioning the repair blade assembly such that the repair blade assembly moves in position to produce the relative displacement with the electrode.

8. The electrical discharge machining apparatus of claim 6 wherein the trimming assembly is a laser source, a tool, or a grinding member.

9. The electrical discharge machining apparatus according to claim 6 wherein the correction device further comprises a chip removing member for removing a chip generated when the appearance of the electrode is corrected while the correction device performs the correction process.

10. The electrical discharge machining apparatus according to claim 1 wherein the correction device comprises a scrolling mechanism for scrolling the electrode during the correction process so that the area to be corrected of the electrode avoids the machining target area of the object to be machined, thereby correcting the appearance of the electrode.

11. The electrical discharge machining apparatus of claim 1 wherein the correction device further comprises a slitting assembly for dividing the electrode into a plurality of electrode strips parallel to each other in the discharge section.

12. The electrical discharge machining apparatus of claim 1 wherein the electrical discharge machining unit further comprises a clamping assembly for clamping at least one side of the discharge section of the electrode when the electrode is subjected to the electrical discharge machining process and releasing the at least one side of the discharge section of the electrode when the correction device is subjected to the correction process.

13. The electric discharge machining apparatus according to claim 1, wherein the electric discharge machining apparatus further comprises a slag discharging unit that provides at least one external force to remove a slag generated when the electrode applies the electric discharge energy to the workpiece when the electric discharge machining unit performs the electric discharge machining process on the workpiece.

14. The electric discharge machining apparatus according to claim 13, wherein the slag discharging unit adjusts an application direction or an application position of the external force according to the shape of the workpiece to remove the slag.

15. The electrical discharge machining apparatus of claim 1 wherein the electrical discharge machining unit further comprises:

the fixture is formed by correspondingly assembling at least two bearing members and at least two fixing members, the two fixing members are arranged on two seat bodies, and the two seat bodies are moving mechanisms or rotating mechanisms, so that when the electric discharge machining unit performs the electric discharge machining process along the machining travelling direction, the electric discharge section of the electrode and the machining target area of the object to be machined are in reciprocating or circulating relative movement.

16. The electrical discharge machining apparatus of claim 15 wherein the electrode is in surrounding contact with the two carrier members or with both sides of the electrode respectively contacting the two carrier members such that the electrode is in the suspended state in the discharge section.

17. The electric discharge machine of claim 1 wherein the correction device further comprises a position correction component for adjusting a relative position of the electrode and the object to be machined to correct the machining direction of travel based on an offset of the electrode in the machining direction of travel.

18. The electrical discharge machining apparatus according to claim 1 wherein the correction means causes the region to be corrected to avoid the machining target region of the object to be machined by moving the electrode to the position where the region to be corrected appears in appearance, the region to be corrected being a fracture phenomenon or a sign of fracture.

19. The electrical discharge machining apparatus according to any one of claims 1-3 and 6-17 wherein the number of electrodes is plural, the plural electrodes being arranged parallel to each other along a first direction and/or a third direction in the discharge section, wherein the third direction is perpendicular to the first direction.

20. The electrical discharge machining apparatus of claim 19 wherein the correction device further comprises a cutter assembly separating the plurality of electrodes such that the plurality of electrodes remain aligned parallel to one another in the discharge section.

21. The electrical discharge machining apparatus of claim 19 wherein the electrical discharge machining unit further comprises a separator post against which the plurality of electrodes are abutted for causing the plurality of electrodes to be parallel to each other in the discharge section.

22. The electrical discharge machining apparatus of claim 19 further comprising a stabilizing member having a plurality of guide slots for removably receiving the plurality of electrodes for stabilizing and guiding the plurality of electrodes to cause the plurality of electrodes to perform the electrical discharge machining process along the machine direction.

23. The electrical discharge machining apparatus according to claim 19 wherein the correction means causes the region to be corrected to avoid the machining target region of the workpiece by moving at least one of the plurality of electrodes at which the region to be corrected appears in appearance, the region to be corrected being a fracture phenomenon or a sign of fracture.