WO2020184678A1

WO2020184678A1 - Three-dimensional measuring system, and three-dimensional measuring method

Info

Publication number: WO2020184678A1
Application number: PCT/JP2020/010912
Authority: WO
Inventors: 田村　仁; 智生山形; 健人栗原; 陽一外川
Original assignee: 株式会社東京精密
Priority date: 2019-03-14
Filing date: 2020-03-12
Publication date: 2020-09-17
Also published as: US20210293519A1; GB2596439A; DE112020000438B4; DE112020000438T5; CN113330277B; CN113330277A; GB2596439B; GB202112849D0; US11365959B2

Abstract

Provided are a three-dimensional measuring system and a three-dimensional measuring method having improved measuring accuracy and measuring efficiency. This three-dimensional measuring system is provided with: a platen 18; a robot arm 50 that holds a workpiece W, which is an object being measured, and that is capable of varying the attitude of the workpiece W; and a probe 22 which is configured to be capable of moving relative to the platen 18 and which performs three-dimensional measurement of the workpiece W.

Description

3D measurement system and 3D measurement method

The present invention relates to a three-dimensional measurement system and method, and particularly to a three-dimensional measurement system and method using a three-dimensional measuring machine and a robot arm.

Conventionally, various techniques have been proposed regarding the installation of the workpiece when measuring the workpiece to be measured with the coordinate measuring machine.

For example, Patent Document 1 proposes a measuring jig used when installing a work on a surface plate. In the measuring jig described in Patent Document 1, a block can be appropriately installed on a pallet of a plate material, and a work having a three-dimensional shape can be fixed by this block. Then, a plurality of pallets to which the workpieces are fixed are prepared in advance, and the workpieces are automatically set on the surface plate by exchanging the pallets.

Japanese Unexamined Patent Publication No. 04-324301

Here, the posture of the work to be measured is not necessarily one type, but may extend to multiple types. As described above, when the measurement is performed in a plurality of postures in one work, a measuring jig suitable for each posture of the work is required, which requires man-hours and costs for designing the measuring jig. In addition, the work must be installed on the measuring jig for each measurement posture, and it takes time to prepare for the measurement.

Even when the measuring jig described in Patent Document 1 described above is used, when measuring a plurality of postures on the same work, different pallets must be generated for each posture of the work. In addition, the workpiece must be installed on a different measuring jig for each measurement posture.

In this way, with the conventional technology, there was a problem that the measurement efficiency was poor because the work was installed with human intervention. Further, in a three-dimensional measuring machine, it is one of the important technical issues to improve the measurement accuracy as well as the measurement efficiency.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a three-dimensional measurement system and a three-dimensional measurement method having improved measurement accuracy and measurement efficiency.

In order to achieve the above object, the three-dimensional measurement system according to the first aspect of the present invention is a robot having a surface plate, an end effector for holding a work to be measured, and a variable posture of the work. It includes an arm and a probe configured to be movable relative to the surface plate. Since the robot arm is provided with a variable work posture, the work posture can be easily changed when performing three-dimensional measurement using a probe configured to be relatively movable with respect to the surface plate. Thereby, the efficiency of the three-dimensional measurement can be improved. Further, since the posture of the work is changed by using the robot arm, the variation in the measurement position is reduced, and the measurement accuracy can be improved.

In the three-dimensional measurement system according to the first aspect, preferably, the probe performs three-dimensional measurement of the work while the work is held by the robot arm. Since the work is measured three-dimensionally from the probe while the work is held by the end effector of the robot arm, the posture of the work can be easily changed. Thereby, the efficiency of the three-dimensional measurement can be further improved.

Preferably, the three-dimensional measurement system according to the first aspect is a work by a probe based on a relative position change detecting means for detecting a change in the relative position between the surface plate and the robot arm and a detection result of the relative position change detecting means. It is provided with a correction means for correcting the measurement result of.

An example of an external environment (measurement environment) that can affect the accuracy of three-dimensional measurement is a change in the relative position between the surface plate and the robot arm. Since the change in the relative position between the surface plate and the robot arm can be detected by the relative position change detecting means and the measurement result of the work by the probe can be corrected by the correction means based on the detection result, the three-dimensional measurement of the work can be performed. The accuracy can be further improved.

In the three-dimensional measurement system according to the first aspect, preferably, the relative position change detecting means includes an arm vibration detecting means for detecting the vibration of the robot arm. As a result, the influence of vibration of the robot arm can be reduced, and the accuracy of the three-dimensional measurement can be further improved.

In the three-dimensional measurement system according to the first aspect, preferably, the relative position change detecting means is a surface plate vibration detecting means for detecting the vibration of the surface plate and / or an inclination for detecting the inclination of the surface plate with respect to the horizontal direction. Includes detection means. As a result, the influence of vibration and / or inclination of the surface plate can be reduced, and the accuracy of the three-dimensional measurement can be further improved.

In the three-dimensional measurement system according to the first aspect, preferably, the relative position change detecting means detects the amount of change in the relative position in each of the horizontal direction and the vertical direction, and the correction means is used in each of the horizontal direction and the vertical direction. , The amount of change in the relative position is added or subtracted from the measurement result of the work by the probe.

In the three-dimensional measurement system according to the first aspect, preferably, the relative position change detecting means detects the relative position change in real time, and the correction means uses a probe based on the relative position change detected in real time. The measurement result of the work is corrected in real time.

In the three-dimensional measurement system according to the first aspect, preferably, the relative position change detecting means irradiates the reflector and the reflector with a laser beam, receives the reflected light of the laser beam from the reflector, and receives the reflected light of the laser beam of the reflector. A laser tracker main body for acquiring displacement and a laser tracker having the laser tracker body are provided.

Preferably, the reflector is placed on the robot arm. By arranging the reflector on the robot arm, it is possible to more accurately detect the influence of the vibration of the robot arm itself on the work W.

Preferably, the three-dimensional measurement system according to the first aspect includes a temperature detecting means for detecting the temperature of the work and a correction means for correcting the measurement result of the work by the probe based on the detection result of the temperature detecting means.

A further example of the external environment (measurement environment) that can affect the accuracy of 3D measurement is the temperature of the work. Since the temperature of the work can be detected by the temperature detecting means and the three-dimensional measurement result can be corrected by the correction means based on the temperature of the work, the influence of the temperature of the work can be reduced and the accuracy of the three-dimensional measurement can be further improved. be able to.

In the three-dimensional measurement system according to the first aspect, preferably, the end effector of the robot arm includes a temperature detecting means for detecting the temperature of the work. More preferably, the temperature detecting means is provided on the holding surface on which the end effector holds the work. As a result, the temperature of the work held by the end effector can be detected with high accuracy. Further, since the end effector is provided with the temperature detecting means, the temperature detection can be automatically started when the work is held by the robot arm. As a result, the efficiency of three-dimensional measurement can be improved. More preferably, the three-dimensional measurement system according to the first aspect includes a correction means for correcting the measurement result of the work by the probe based on the detection result of the temperature detection means. Since the three-dimensional measurement result can be corrected based on the temperature of the work, the influence of the temperature of the work can be reduced and the accuracy of the three-dimensional measurement can be further improved.

In the three-dimensional measurement system according to the first aspect, preferably, the temperature detecting means detects the temperature of the work while the work is held by the robot arm. Since the temperature can be detected while the work is held by the robot arm without installing the work on the surface plate, for example, when the work does not meet a predetermined temperature condition, the work is temporarily installed on the surface plate. It can be carried out quickly without any problems. As a result, the operating rate of the three-dimensional measurement system can be improved.

In the three-dimensional measurement system according to the first aspect, preferably, the temperature detecting means starts detecting the temperature of the work when the work is held by the robot arm. In the conventional technique, the temperature is detected after the work is placed on the surface plate, but in the three-dimensional measurement system according to the first aspect, the temperature detection can be started at a timing earlier than the conventional one. For example, this advantage becomes remarkable when the temperature detecting means takes a long time to start up.

In the three-dimensional measurement system according to the first aspect, the robot base that supports the robot arm may be provided outside the surface plate. Since the robot base is provided outside the surface plate, a relatively large robot arm can be used.

In the three-dimensional measurement system according to the first aspect, the robot base that supports the robot arm may be provided on the surface plate. Since the robot base is provided on the surface plate, the vibration system of the robot arm is the same as the vibration system of the surface plate. As a result, the influence of vibration in the external environment can be reduced, and the accuracy of the three-dimensional measurement can be further improved.

In the three-dimensional measurement system according to the first aspect, preferably, the robot arm has a contact portion that directly or indirectly contacts the surface plate when measuring the work by the probe. Since the contact portion of the robot arm is brought into direct or indirect contact with the surface plate, the vibration of the robot arm itself can be reduced, and the accuracy of the three-dimensional measurement can be further improved.

In the three-dimensional measurement system according to the first aspect, a vibration damping member is provided on the surface plate, and the contact portion of the robot arm indirectly contacts the surface plate via the vibration damping member. Since the contact portion of the robot arm indirectly contacts the surface plate, the degree of freedom in the posture of the robot arm at the time of measurement can be improved. In addition, since a gap in the vertical direction (Z direction) can be secured between the robot arm and the surface plate, a workpiece having a relatively long vertical length is held so as not to come into contact with the surface plate for measurement. It can be carried out.

In the three-dimensional measurement system according to the first aspect, preferably, the robot arm includes a plurality of arms and a plurality of joints rotatably connecting the plurality of arms, and the robot arm has a plurality of contact portions. It is one of the joints. More preferably, the contact portion of the robot arm is the joint portion closest to the end effector side among the plurality of joint portions.

Further, in order to achieve the above object, the three-dimensional measurement method according to the second aspect of the present invention uses a transport step for transporting the work to be measured by a robot arm whose posture is variable, and a surface plate. On the other hand, it includes a measurement step of performing a three-dimensional measurement of the work by a probe configured to be relatively movable. The three-dimensional measurement method according to the second aspect can also obtain the same effect as the three-dimensional measurement system according to the first aspect.

In the three-dimensional measurement method according to the second aspect, preferably, in the measurement step, the work is three-dimensionally measured by the probe while the work is held by the robot arm. Since the work is measured three-dimensionally from the probe while the work is held by the end effector of the robot arm, the posture of the work can be easily changed. Thereby, the efficiency of the three-dimensional measurement can be further improved.

Preferably, the three-dimensional measurement method according to the second aspect is based on a relative position change detection step for detecting a change in the relative position between the surface plate and the robot arm and a measurement step based on the detection result by the relative position change detection step. It includes a vibration correction step for correcting the measurement result of the workpiece.

An example of an external environment (measurement environment) that can affect the accuracy of three-dimensional measurement is a change in the relative position between the surface plate and the robot arm. Since the change in the relative position between the surface plate and the robot arm can be detected in the relative position change detection step and the measurement result of the work by the probe can be corrected in the vibration correction step based on the detection result, the work can be measured three-dimensionally. The accuracy of the above can be further improved.

In the three-dimensional measurement method according to the second aspect of the present invention, the relative position change detection step preferably includes a step of detecting vibration of the robot arm. Further, preferably, the relative position change detection step includes a step of detecting the vibration of the surface plate. Further, preferably, the relative position change detection step includes a step of detecting the inclination of the surface plate.

In the three-dimensional measurement method according to the second aspect of the present invention, preferably, the relative position change detection step includes a step of detecting a relative position change amount in each of the horizontal direction and the vertical direction, and the vibration correction step includes a step of detecting the relative position change amount. It includes a step of adding or subtracting the amount of change in the relative position with respect to the measurement result of the workpiece by the probe in each of the horizontal direction and the vertical direction.

In the three-dimensional measurement method according to the second aspect of the present invention, preferably, the relative position change detection step detects the relative position change in real time, and the vibration correction step detects the relative position change detected in real time. Based on this, the measurement result of the workpiece by the probe is corrected in real time.

Preferably, the three-dimensional measurement method according to the second aspect of the present invention includes a temperature detection step for detecting the temperature of the work and a temperature correction for correcting the measurement result of the work by the measurement step based on the detection result by the temperature detection step. Including steps.

A further example of the external environment (measurement environment) that can affect the accuracy of 3D measurement is the temperature of the work. Since the temperature of the work can be detected in the temperature detection step and the three-dimensional measurement result can be corrected based on the temperature of the work in the temperature correction step, the influence of the temperature of the work can be reduced and the accuracy of the three-dimensional measurement can be further improved. Can be made to.

Further, preferably, the three-dimensional measurement method according to the second aspect of the present invention includes a temperature detection step of detecting the temperature of the work by the temperature detecting means provided in the end effector of the robot arm. As a result, the temperature of the work held by the end effector can be detected with high accuracy. Further, since the end effector is provided with the temperature detecting means, the temperature detection can be automatically started when the work is held by the robot arm. As a result, the efficiency of three-dimensional measurement can be improved.

More preferably, the three-dimensional measurement method according to the second aspect of the present invention further includes a temperature correction step for correcting the measurement result of the work by the measurement step based on the detection result by the temperature detection step.

Preferably, the temperature detection step is performed in the transport step. By detecting the temperature of the work in the transport step, the efficiency of the three-dimensional measurement can be further improved.

In the three-dimensional measurement method according to the second aspect, the temperature detection step is preferably performed in a state where the work is held by the robot arm. Even if the work is not installed on the surface plate, the temperature can be detected by the temperature detecting means while the work is held by the robot arm, so that the efficiency of the three-dimensional measurement can be improved.

In the three-dimensional measurement method according to the second aspect, the temperature detection step is preferably started when the work is held by the robot arm. In the conventional technique, the temperature is detected after the work is placed on the surface plate by the robot arm, but in the three-dimensional measurement method according to the second aspect, the temperature detection can be started at a timing earlier than the conventional one. ..

Preferably, the three-dimensional measurement method according to the second aspect includes a temperature determination step of determining whether or not the temperature of the work satisfies a predetermined temperature condition. Thereby, for example, it can be determined whether or not the temperature of the work satisfies the temperature condition suitable for the three-dimensional measurement.

Here, preferably, the temperature determination step is performed in a state where the work is held by the robot arm. Here, more preferably, when it is determined in the temperature determination step that the predetermined temperature condition is not satisfied, the work is carried out while being held by the robot arm. For example, when it is determined that the work does not satisfy a predetermined temperature condition, the work can be quickly carried out without being placed on the surface plate once. Thereby, the efficiency of the three-dimensional measurement can be further improved.

Here, more preferably, the temperature detection step is performed in real time while the work is held by the robot arm, and in the temperature correction step, the measurement result of the work by the measurement step is measured in real time based on the detection result by the temperature detection step. Correct to. Since temperature detection, three-dimensional measurement, and correction of measurement results can be performed while the work is held by the robot arm, the time lag (time difference) from temperature detection to correction of measurement results can be shortened. ..

In the three-dimensional measurement method according to the second aspect, the robot base that supports the robot arm is preferably provided outside the surface plate. Alternatively, preferably, the robot base that supports the robot arm is provided on the surface plate.

The three-dimensional measurement method according to the second aspect preferably includes an installation step in which the contact portion of the robot arm is directly or indirectly contacted with the surface plate while the work is held by the robot arm. Further, preferably, a vibration damping member is provided on the surface plate, and the contact portion of the robot arm indirectly contacts the surface plate via the vibration damping member in the installation step.

In the three-dimensional measurement method according to the second aspect, preferably, the robot arm includes a plurality of arms and a plurality of joint portions rotatably connecting the plurality of arms, and the robot arm has a plurality of contact portions. It is one of the joints. More preferably, the contact portion of the robot arm is the joint portion closest to the end effector side among the plurality of joint portions.

According to the present invention, it is possible to provide a three-dimensional measurement system and a three-dimensional measurement method with improved measurement accuracy and measurement efficiency.

FIG. 1 is a diagram showing an example of a three-dimensional measurement system according to the first embodiment. FIG. 2 is a diagram showing an example of a three-dimensional measuring machine. FIG. 3 is a diagram showing an example of a robot arm. FIG. 4 is a flowchart showing a three-dimensional measurement method according to the first embodiment. FIG. 5 is a diagram illustrating an example of a work transport step in the first embodiment. FIG. 6 is a diagram illustrating an example of an installation step and a measurement step in the first embodiment. FIG. 7 is a diagram illustrating another example of the installation step and the measurement step in the first embodiment. FIG. 8 is a diagram showing an example of the change step in the first embodiment. FIG. 9 is a diagram showing an example in which the joint portion is pressed against the block on the surface plate in the first embodiment. FIG. 10 is a diagram illustrating a case where the gate of the coordinate measuring machine moves in a state where a part of the robot arm is directly pressed against the surface plate in the first embodiment. FIG. 11 is a diagram illustrating a case where the gate of the coordinate measuring machine moves without pressing a part of the robot arm against the surface plate in the first embodiment. FIG. 12 is a schematic configuration diagram of the three-dimensional measurement system according to the second embodiment. FIG. 13 is a diagram illustrating the effect of the movement of the gate of the coordinate measuring machine on the measurement accuracy in the three-dimensional measuring system according to the second embodiment. FIG. 14 is a diagram showing a state in which a part of the robot arm is in direct or indirect contact with the surface plate 18 in the three-dimensional measurement system according to the second embodiment. FIG. 15 is a schematic configuration diagram of the three-dimensional measurement system according to the third embodiment. FIG. 16 is a diagram showing an example of arrangement of the reflector and the laser tracker main body when the relative position change detecting means includes a plurality of laser trackers. FIG. 17 is a flowchart showing a three-dimensional measurement method according to the third embodiment. FIG. 18 is an example of a graph showing a time change of the relative position detected by the relative position change detecting means. FIG. 19 is a schematic configuration diagram of the three-dimensional measurement system according to the fourth embodiment. FIG. 20 is a schematic configuration diagram of the three-dimensional measurement system according to the fifth embodiment. FIG. 21 is a diagram showing an example of an end effector having a temperature detecting means. FIG. 22 is a diagram showing an example of an end effector having a temperature detecting means. FIG. 23 is a flowchart showing a three-dimensional measurement method according to the fifth embodiment. FIG. 24 is a flowchart showing a three-dimensional measurement method according to the first modification of the fifth embodiment. FIG. 25 is a flowchart showing a three-dimensional measurement method according to the third modification of the fifth embodiment.

Hereinafter, embodiments of the measurement method according to the present invention will be described with reference to the accompanying drawings. In the drawings, basically the same components are designated by the same reference numerals.

<First Embodiment>
[CMM]
FIG. 1 is a schematic configuration diagram of the three-dimensional measurement system 1000 according to the present embodiment. In FIG. 1, a part of the column 16 of the coordinate measuring machine 1 is omitted in order to illustrate the robot arm 50. The three-dimensional measurement system 1000 includes a three-dimensional measuring machine 1 and a robot arm device 100. As shown in FIG. 1, in the present embodiment, the robot base 52 of the robot arm 50 is arranged outside the surface plate 18 of the coordinate measuring machine 1.

FIG. 2 is a diagram (perspective view and block diagram) showing an example of the coordinate measuring machine 1 used in the present embodiment. In the following description, a three-dimensional Cartesian coordinate system will be used.

As shown in FIG. 2, the three-dimensional measuring machine 1 according to the present embodiment includes a measuring machine main body 10 and a measuring machine control device 30. In the following description, a contact type three-dimensional measuring machine including a contact type probe as the three-dimensional measuring machine 1 will be described. As a matter of course, the coordinate measuring machine 1 may be a non-contact type three-dimensional measuring machine. When the coordinate measuring machine 1 is a non-contact type three-dimensional measuring machine, for example, a laser probe may be used instead of the contact type probe 22 described below.

First, the measuring machine main body 10 will be described. The measuring machine main body 10 causes the stylus 26 formed at the tip of the probe 22 (including the stylus 24) to be brought into contact with the work W to be measured and scanned, thereby causing the shape (contour) and dimensions of the work W to be scanned. It is a device that measures such things.

As shown in FIG. 2, the measuring machine main body 10 includes a base 20 and a surface plate 18 provided on the base 20. The surface of the surface plate 18 is formed in a plane parallel to the XY plane.

A pair of columns (posts) 16 extending from the surface of the surface plate 18 to the upper side (+ Z direction) in the drawing are attached to the surface plate 18. A beam (beam) 14 is bridged over the upper end (+ Z side end) of the column 16. The pair of columns 16 can move on the surface plate 18 in synchronization with the Y direction, and the beam 14 can move in the Y direction in a state parallel to the X direction. A motor can be used as a driving means for moving the column 16 with respect to the surface plate 18. It is a gate-type coordinate measuring machine 1 in which a gate is formed by a beam 14 and a column 16.

A head 12 extending in the Z direction is attached to the beam 14. The head 12 is movable along the length direction (X direction) of the beam 14. A motor can be used as the driving means for moving the head 12 with respect to the beam 14.

A probe 22 is attached to the lower end of the head 12 (the end on the −Z side) so as to be movable in the vertical direction (Z direction) in the drawing. A motor can be used as a driving means for moving the probe 22 in the vertical direction.

The measuring machine main body 10 includes a movement amount measuring unit (for example, a linear encoder, not shown) for measuring the movement amount of each of the column 16, the head 12, and the probe 22.

The probe 22 includes a highly rigid shaft-shaped member (stylus 24). As the material of the stylus 24, for example, cemented carbide, titanium, stainless steel, ceramic, carbon fiber and the like can be used.

A stylus 26 is provided at the tip of the stylus 24 of the probe 22. The stylus 26 is a spherical member having high hardness and excellent wear resistance. As the material of the stylus 26, for example, ruby, silicon nitride, zirconia, ceramic or the like can be used. The diameter of the stylus 26 (hereinafter referred to as the stylus diameter) is 4.0 mm in one example.

When measuring the work W, the column 16, the head 12, and the probe 22 are moved in the XYZ direction to bring the stylus 26 into contact with the work W. Then, the displacement amount of the stylus 26 and the like are measured while scanning the stylus 26 along the outer shape of the work W. Data such as the measured value of the displacement amount is transmitted to the measuring machine control device 30. The measuring machine control device 30 can obtain the shape (contour), dimensions, and the like of the work W by processing this data using a general-purpose measuring program.

The controller 40 is a means for communicating with the measuring machine main body 10, and performs a conversion process of data sent and received with the measuring machine main body 10. The controller 40 is a D / A (digital-to-analog) converter for converting a digital command transmitted from the measuring machine control device 30 to the measuring machine main body 10 into an analog signal, and a measuring machine from the measuring machine main body 10. It may include an A / D (analog-to-digital) converter for converting data such as measured values sent to the control device 30 into digital data.

[Robot arm]
FIG. 3 is a diagram (conceptual diagram and block diagram) showing an example of the robot arm device 100 used in the present embodiment.

The robot arm device 100 is composed of a robot arm 50 and a robot arm control device 60. The robot arm 50 includes a plurality of movable parts, and also includes a plurality of motors for driving the plurality of movable parts. The robot arm control device 60 operates the robot arm 50 by controlling a motor provided in the robot arm 50. The robot arm control device 60 is composed of a computer, and automatically operates the robot arm 50 by a user's operation or a dedicated program.

The robot arm 50 is designed so that the work W can be held. Specifically, the robot arm 50 holds (grasps) the work W by the end effector EE connected to the first joint portion (wrist portion) J1. Further, the end effector EE can freely change the posture of the work W. For example, the end effector EE can change the posture of the work W by rotating in parallel with the YY plane or in parallel with the XY plane.

As shown in FIG. 3, the robot arm 50 has four joints (first joint J1 to fourth joint J4) and three arms (first arms A1 to third arms) sequentially connected by these joints. A3) and an articulated arm having a robot base 52. Specifically, the first joint portion J1 connects the end effector EE and the first arm A1, and the end effector EE is rotatable relative to the first arm A1. The second joint portion J2 connects the first arm A1 and the second arm A2, and the first arm A1 is rotatable around an axis extending in the longitudinal direction of the first arm A1. The third joint portion J3 connects the second arm A2 and the third arm A3, and the second arm A2 can rotate about an axis extending in the horizontal direction with respect to the third arm A3. The fourth joint portion J4 connects the third arm A3 and the tip portion 52a of the robot base 52, and the third arm A3 can rotate about an axis extending horizontally with respect to the robot base 52. The robot arm device 100 shown in FIG. 3 is an example, and other known robot arm devices of other forms may be used.

[Measuring method]
Next, a measurement method using the robot arm device 100 and the coordinate measuring machine 1 will be described. FIG. 4 is a flowchart showing a measurement method using the robot arm device 100 and the coordinate measuring machine 1.

The robot arm device 100 holds the work W outside the measurement space of the coordinate measuring machine 1 by the end effector EE (step S10), and transports the work W into the measurement space of the coordinate measuring machine 1 while holding the work W. (Step S11: Transport step). After that, while the work W is held by the end effector EE, a part of the robot arm 50 is directly pressed (contacted) with the upper surface of the surface plate 18 (hereinafter referred to as the surface plate 18) to bring the work. The measurement posture of W is determined (step S12: installation step). After that, the work W is measured by the coordinate measuring machine 1 (step S13: measurement step). Next, the robot arm device 100 operates the end effector EE to change the posture of the work W while holding the work W (step S14: change step). Then, the work W is measured after the posture is changed by the coordinate measuring machine 1 (step S15).

Next, a detailed explanation will be given regarding the main steps (processes) of the above-mentioned measurement method.

[Transport step (carry-in step)]
FIG. 5 is a diagram illustrating an example of a work W transport step (step S11 in FIG. 4). As shown in FIG. 5, the robot arm device 100 holds the work W outside the measurement space of the coordinate measuring machine 1 by the end effector EE, and holds the work W in the measurement space of the coordinate measuring machine 1 in the held state. Carry. In addition, in FIGS. 5 to 11, the measuring machine control device 30, the controller 40, and the robot arm control device 60 are omitted. Further, in FIGS. 5 to 11, a part of the column 16 of the coordinate measuring machine 1 is omitted in order to illustrate the robot arm 50.

[Installation step and measurement step]
FIG. 6 is a diagram illustrating an example of an installation step (step S12 in FIG. 4) and a measurement step (step S13 in FIG. 4). After the work W is transported to the measurement space of the coordinate measuring machine 1, a part of the robot arm 50 is directly pressed onto the surface plate 18 to determine the posture of the work W, and then the three-dimensional measurement is performed. The work W is measured by the machine 1.

In the case shown in FIG. 6, the work W is positioned by directly pressing the first joint portion J1 (wrist portion) on the end effector EE side, which is a part of the robot arm 50, directly onto the surface plate 18. ing. In this way, by directly pressing the first joint portion J1 (an example of the contact portion) of the robot arm 50 onto the platen 18, ground vibration (vibration of the external environment) and vibration of the robot arm device 100 itself can be generated. It is suppressed, and the influence on the tip portion of the robot arm 50 and the work W is suppressed.

Here, when the first joint portion J1 is not pressed against the surface plate 18, the robot arm 50 is affected by the ground vibration and the vibration of the robot arm device 100 itself. On the other hand, in the present embodiment, as shown in FIG. 6, the first joint portion J1 of the robot arm 50 is pressed onto the surface plate 18, thereby suppressing the influence of vibration on the work W.

Further, the above-mentioned vibration is easily affected by the tip portion (the portion holding the work W) of the robot arm device 100. In the case shown in FIG. 6, the influence of vibration is effectively suppressed by pressing the first joint portion J1 which is the tip portion of the robot arm 50 onto the surface plate 18.

FIG. 7 is a diagram illustrating another example of the installation step and the measurement step. In the case shown in FIG. 7, the third joint portion (an example of the elbow portion and the contact portion) J3 of the robot arm 50 is directly pressed against the surface plate 18 to position the work W. By pressing the third joint portion J3 directly onto the surface plate 18 in this way, the ground vibration and the vibration of the robot arm device 100 itself are suppressed, and the work W held by the end effector EE of the robot arm 50 is suppressed. The influence of vibration on the robot can be suppressed.

[Change step]
FIG. 8 is a diagram showing an example of the change step (step S14 of FIG. 4). As shown in FIG. 8, when changing the posture of the work W, a part of the robot arm 50 (for example, the first joint portion J1) is separated from the surface plate 18 to change the posture of the work W. The robot arm 50 changes the posture of the work W by rotating the end effector EE in parallel with the XX plane. For example, after measuring the front surface of the work W, the posture of the work W is changed in order to measure the back surface of the work W. After the posture of the work W is changed, a part of the robot arm 50 is pressed onto the surface plate 18 at the same position as before the posture of the work W is changed, and the work W whose posture has been changed is measured. The position on the surface plate 18 on which a part of the robot arm 50 is pressed may be different before and after the posture of the work W is changed. In this way, since the posture of the work W can be changed by operating the end effector EE, it is not necessary to prepare a measuring jig for each posture of the work W, and the posture of the work W can be easily changed. it can.

<Modified example of the first embodiment>
In the above-described embodiment, as an example of a mode in which a part of the robot arm 50 is directly pressed against the surface plate 18, a mode in which the joint portions (joint portions J1, joint portions J3) of the robot arm 50 are pressed onto the surface plate 18 This has been described (step S12 in FIG. 4). However, the present invention is not limited to this, and a part of the robot arm 50 may be indirectly pressed against the surface plate 18 in step S12 of FIG. As an example of a mode in which a part of the robot arm 50 is indirectly pressed against the surface plate 18, a case where a part of the robot arm 50 is pressed against a vibration damping member (block) on the surface plate 18 will be described.

FIG. 9 is a diagram showing an example in which the first joint portion J1 is pressed as a part of the robot arm 50 against the upper surface of the block B on the surface plate 18 (hereinafter, referred to as the block B). In this way, by pressing the first joint portion J1 onto the block B installed on the surface plate 18, the same effect as when the first joint portion J1 is directly pressed onto the surface plate 18 can be obtained. Can be done. Specifically, by pressing the first joint portion J1 onto the block B, ground vibration and vibration of the robot arm device 100 itself can be suppressed. Further, by pressing the first joint portion J1 onto the block B, a space can be secured between the end effector EE and the surface plate 18, and even a work WL having a long length in the Z direction comes into contact with the surface plate 18. The measurement can be performed by holding it so that it does not occur.

The shape and material of block B are not particularly limited. The shape and material of the block B are such that a part of the robot arm 50 is pressed on the surface plate 18 and a part of the robot arm 50 is pressed to suppress vibration. Selected in consideration.

Further, according to the present embodiment, since a part of the robot arm 50 is directly (or indirectly) pressed against the surface plate 18, even if the surface plate 18 is tilted due to the movement of the gate, the following As described in the above, the measurement accuracy can be maintained as compared with the case where the robot arm 50 is not pressed.

FIG. 10 is a diagram illustrating a case where the gate of the coordinate measuring machine 1 moves while a part of the robot arm 50 is directly pressed onto the surface plate 18. The inclination of the surface plate 18 shown in FIG. 10 is exaggerated for the sake of explanation, and the inclination of the surface plate 18 is actually very small. When the gate moves along the Y axis, the surface plate 18 is slightly tilted due to the influence of the weight of the gate. Specifically, when the gate moves in the positive direction of the Y-axis, the surface plate 18 sinks due to the weight of the gate at the destination, and the surface plate 18 floats in the opposite direction, resulting in a slight surface plate 18. Tilt. Further, since the surface plate 18 is used as a reference for the measurement space (measurement area) G, the measurement space G of the coordinate measuring machine 1 also tilts as the surface plate 18 tilts, as shown in FIG.

Here, the problem when the work W is measured without directly (or indirectly) pressing the robot arm 50 against the surface plate 18 will be described. FIG. 11 is a diagram illustrating a case where the gate of the coordinate measuring machine 1 moves without pressing the robot arm 50 against the surface plate 18. When the robot arm 50 is not pressed against the surface plate 18, the robot arm 50 does not move following the inclination of the surface plate 18, and the work W held by the robot arm 50 is related to the inclination of the surface plate 18. It is in a state of being held (fixed) in a fixed position. Further, as the surface plate 18 is tilted, the measurement space GB changes to the measurement space G, but the position of the work W cannot follow this change and remains at a constant position. As a result, when the surface plate 18 is tilted due to the movement of the gate, a large deviation occurs in the relative positional relationship between the surface plate 18 (measurement space) and the work W due to the tilt of the surface plate 18. , It becomes difficult to maintain the measurement accuracy.

On the other hand, in the present embodiment (see FIG. 10), the measurement is performed in a state where a part (first joint portion J1) of the robot arm 50 is directly (or indirectly) pressed against the surface plate 18. .. Therefore, even if the surface plate 18 is tilted, the position (posture) of the robot arm 50 changes according to the tilt of the surface plate 18, and the position of the work W also changes according to the change. That is, since the work W also moves following the inclination of the surface plate 18, it is unlikely that a large deviation will occur in the relative positions of the surface plate 18 and the work W. Therefore, even if the measurement space G moves with the movement of the gate, the relative positions of the work W and the measurement space G are unlikely to shift. Therefore, when a part of the robot arm 50 is not pressed against the surface plate 18. Compared with (see FIG. 11), the measurement accuracy can be maintained.

As described above, when the robot arm 50 is pressed against the surface plate 18, even if the gate moves, the position of the work W can be moved according to the change in the measurement space, so that it is three-dimensional. The accuracy of measurement by the measuring machine 1 can be maintained.

In the above description, an example in which the joint portion is directly or indirectly pressed onto the surface plate 18 as a part of the robot arm 50 has been described, but since the effect of suppressing the vibration to the work W can be obtained. If so, the portion pressed against the surface plate 18 is not limited to the joint portion of the robot arm 50. For example, the arms of the robot arm 50 (arms A1 to A3) may be pressed directly or indirectly onto the surface plate 18, and other parts of the robot arm 50 may be directly or indirectly pressed onto the surface plate 18. It may be pressed against the target. Further, the portion where a part of the robot arm 50 is directly or indirectly pressed is not limited to the surface plate 18, and for example, a part of the robot arm 50 is directly or indirectly pressed on the side surface of the surface plate 18. May be pressed against.

<Second Embodiment>
Next, the three-dimensional measurement system 2000 according to the second embodiment will be described. FIG. 12 is a schematic configuration diagram of the three-dimensional measurement system 2000 according to the second embodiment. As shown in FIG. 12, the three-dimensional measurement system 2000 according to the second embodiment includes a three-dimensional measuring machine 1 and a robot arm device 200. In the first embodiment, the robot arm device 100 includes a robot base 52 arranged outside the surface plate 18 of the coordinate measuring machine 1, whereas in the second embodiment, the robot arm device 200 is attached to the robot base 52. Instead, a robot base 53 arranged on the surface plate 18 of the coordinate measuring machine 1 is provided.

The configuration other than the position of the robot base 53 is basically the same as that of the first embodiment, and the method of measuring the work W according to the configuration of the second embodiment is also basically the same as that of the first embodiment. The description of these will be omitted. Further, it is desirable that the robot arm device 200 is relatively small because it is arranged on the surface plate 18.

Similar to the first embodiment, in the second embodiment as well, since the three-dimensional measurement can be performed while the work is held by the end effector EE of the robot arm 50, the posture of the work can be easily changed.

Further, in the three-dimensional measurement system 2000 according to the second embodiment, since the robot base 53 is arranged on the surface plate 18, the vibration system of the robot arm device 200 is in the horizontal direction (X direction) of the three-dimensional measuring machine 1. The robot arm device 200 is less susceptible to the vibration of the external environment because it is the same as the vibration system in the Y direction and the vertical direction (Z direction). Therefore, it is possible to reduce the influence of vibration of the external environment and improve the accuracy of the three-dimensional measurement of the work W.

Next, the influence of the change in the posture of the platen 18 on the measurement accuracy in the three-dimensional measurement system 2000 according to the second embodiment will be described with reference to FIG. Reference numeral 13A in FIG. 13 indicates a case where a part of the robot arm 50 is directly or indirectly measured in the three-dimensional measurement system 1000 according to the first embodiment without contacting the surface plate 18 (that is, FIG. 11 is shown. Same as the state).

Before the gate of the coordinate measuring machine 1 moves, the surface plate 18 is parallel to the XY plane, and the central axis of the work W is parallel to the Z direction. As shown by reference numeral 13A, the result of the gate of the coordinate measuring machine 1 moving in the positive direction of the Y axis and the position of the gate of the coordinate measuring machine 1 changing from the position indicated by the two-point chain line to the position indicated by the solid line. It is assumed that the posture of the surface plate 18 is changed so that the surface plate 18 is inclined with respect to the horizontal direction due to the influence of the weight of the gate. Then, as described with reference to FIG. 11, the measurement space G also changes with the change in the posture of the surface plate 18. Since the robot base 52 is arranged outside the surface plate 18, the position of the work W held by the end effector EE (central axis L1) does not follow the change in the posture of the surface plate 18. As a result, if the posture of the surface plate 18 changes due to the movement of the gate, the relative positional relationship between the surface plate 18 (and the measurement space G) and the work W changes, which may adversely affect the measurement accuracy.

Reference numeral 13B in FIG. 13 indicates a case where the gate of the coordinate measuring machine 1 moves in the same manner as in reference numeral 13A in the three-dimensional measuring system 2000 according to the second embodiment. As shown by reference numeral 13B, since the robot base 53 is arranged on the surface plate 18, the position of the work W held by the end effector EE can follow the inclination of the surface plate 18. As a result, even when the surface plate 18 is tilted due to the movement of the gate, the relative position between the surface plate 18 (and the measurement space G) and the work W does not change significantly with the tilt of the surface plate 18, and the measurement accuracy is high. Is maintained. As described above, according to the three-dimensional measurement system 2000 according to the second embodiment, the robot arm device 200 can follow the change in the posture of the surface plate 18, so that the influence of the change in the posture of the surface plate 18 is reduced. The work W can be measured three-dimensionally with high accuracy.

The three-dimensional measurement method according to the second embodiment is the same as the three-dimensional measurement method according to the first embodiment shown in FIG. 4 excluding step S12 in which a part of the robot arm 50 is brought into contact with the surface plate 18. Is. Therefore, detailed description of the three-dimensional measurement method according to the second embodiment will be omitted.

In the first embodiment and its modification, a part of the robot arm 50 is directly or indirectly part of the surface plate 18 in order to follow the change in the posture of the surface plate 18 accompanying the movement of the gate of the coordinate measuring machine 1. Is in contact with. On the other hand, in the three-dimensional measurement system 2000 of the second embodiment, since the robot base 53 is arranged on the surface plate 18, it is not necessary to bring a part of the robot arm 50 into contact with the surface plate 18 at the time of measurement. It is possible to ensure the ability to follow changes in the posture of the surface plate 18.

Therefore, in the second embodiment, step S12 in the three-dimensional measurement method according to the first embodiment can be omitted. Therefore, as compared with the first embodiment, the degree of freedom of the posture of the robot arm 50 at the time of measurement is higher in the second embodiment.

<Modified example of the second embodiment>
As described above, in the first embodiment and its modified example, a part (contact portion) of the robot arm 50 such as joint portions J1 and J3 is brought into direct or indirect contact with the surface plate 18 at the time of measurement. There is. Similarly, in the second embodiment, a part of the robot arm 50 may be brought into direct or indirect contact with the surface plate 18 at the time of measurement. That is, in the modified example of the second embodiment, for example, step S12 is performed in the same manner as the three-dimensional measurement method according to the first embodiment shown in FIG.

Reference numeral 14A in FIG. 14 indicates an example of a state in which a part of the robot arm 50 is directly in contact with the surface plate 18 in the three-dimensional measurement system 2000 according to the second embodiment. Reference numeral 14B indicates an example of a state in which the joint portion of the robot arm 50 is indirectly brought into contact with the surface plate 18 via a vibration damping member (block B in the drawing) on the surface plate 18. As the block B, the same block B as in the first embodiment can be used.

As shown by

reference numerals

14A and 14B, since a part of the robot arm 50 is directly or indirectly brought into contact with the surface plate 18, the vibration of the robot arm 50 itself can be reduced, and the measurement accuracy is extended. Can be further improved. Further, when a part of the robot arm 50 is indirectly brought into contact with the surface plate 18 via the block B (in the case of reference numeral 14B in FIG. 14), the distance between the end effector EE and the surface plate 18 in the Z direction. Therefore, it is possible to satisfactorily measure a work W having a long length in the Z direction. In the examples shown by

reference numerals

14A and 14B, the joint portions of the robot arm 50 are brought into direct or indirect contact with the surface plate 18, but of course, as in the modified example of the first embodiment, The contact portion is not limited to the joint portion.

<Third Embodiment>
Next, the three-dimensional measurement system 3000 according to the third embodiment will be described. FIG. 15 is a schematic configuration diagram of the three-dimensional measurement system 3000 according to the third embodiment. As shown in FIG. 15, the three-dimensional measurement system 3000 according to the third embodiment includes a three-dimensional measuring machine 2 and a robot arm device 300. The robot arm device 300 is a robot arm device 200 according to the second embodiment to which an arm vibration detecting means 55 is added as a relative position change detecting means. The three-dimensional measuring machine 2 is a three-dimensional measuring machine 1 according to the first embodiment to which a vibration correction means 31 (correction means) is added.

Also in the third embodiment, since the three-dimensional measurement can be performed while the work is held by the end effector EE of the robot arm 50, the posture of the work can be easily changed.

The relative position change detecting means detects the change in the relative position between the surface plate 18 and the robot arm 50. The relative position change detecting means may detect the change in the relative position on the robot arm 50 side, or may detect the change in the relative position on the surface plate 18 side. Alternatively, the relative position change detecting means may detect the relative position change on both the robot arm 50 side and the surface plate 18 side.

In FIG. 15, an arm vibration detecting means 55 is shown as an example of means for detecting vibration as a change in relative position on the robot arm 50 side. In the robot arm device 300, while the work W is held by the end effector EE, the arm vibration detecting means 55 is used in the horizontal direction (X direction and Y direction) and vertical of the robot arm 50 itself by the drive system of the motor of the robot arm 50. The vibration in the direction (Z direction) is detected in real time and output to the correction means 31 of the three-dimensional measuring machine 2. Real-time means that vibration is detected at all times or at regular intervals within the time required for detection of vibration (change in relative position) (time during which the three-dimensional measurement of the work W is performed). Further, the vibration may be detected not only at regular time intervals but also at unequal time intervals. Further, not only in the case of detecting vibration in real time, data on vibration may be received from the outside.

Here, any kind of vibration detecting device can be used as the arm vibration detecting means 55. Examples of the arm vibration detecting means 55 include a position sensor, a vibration sensor, a laser tracker, and a displacement measuring means. Further, examples of the vibration sensor include an acceleration sensor and various gyro sensors. Further, examples of the displacement measuring means include a capacitance type displacement sensor, an eddy current type displacement sensor, a laser interferometer and the like.

Further, it is preferable that the arm vibration detecting means 55 is provided in the vicinity of the end effector EE that holds the work W. This makes it possible to more accurately detect the influence of the vibration of the robot arm 50 itself on the work W.

The vibration compensating means 31 of the coordinate measuring machine 2 calculates the amplitude in each direction based on the vibration in the X direction, the Y direction, and the Z direction of the robot arm 50 output from the arm vibration detecting means 55, and obtains the calculated amplitude. Based on this, the measured value of the three-dimensional measurement of the work W is corrected in real time, for example. As a result, the influence of vibration of the robot arm 50 can be reduced, and the measurement accuracy can be further improved.

Instead of the arm vibration detecting means 55, a surface plate vibration detecting means 56 that detects a change in the relative position between the surface plate 18 and the robot arm 50 on the surface plate 18 side is used as a three-dimensional measuring machine as a relative position change detecting means. It may be provided in 2. The surface plate vibration detecting means 56 is arranged in the vicinity of the surface plate 18, for example, on the surface plate 18. The surface plate vibration detecting means 56 detects, for example, the vibration of the surface plate 18 in the X direction, the Y direction, and the Z direction as a change in the relative position in real time. As the surface plate vibration detecting means 56, any kind of vibration detecting device can be used as in the arm vibration detecting means 55.

The vibration compensating means 31 calculates the amplitude in each direction based on the vibration in each direction of the surface plate 18 detected by the surface plate vibration detecting means 56, and further, the three-dimensional measurement of the work W is performed based on the amplitude in each direction. Correct the measured value in real time. As a result, the influence of the vibration of the surface plate 18 can be reduced, and the measurement accuracy can be further improved.

Alternatively, the arm vibration detecting means 55 and the surface plate vibration detecting means 56 may be provided in the coordinate measuring machine 2 as the relative position change detecting means. In this case, the vibration compensating means 31 measures the work W in three dimensions based on the vibration of the robot arm 50 detected by the arm vibration detecting means 55 and the vibration of the surface plate 18 detected by the surface plate vibration detecting means 56. Correct the measured value of.

An example of a specific configuration of the relative position change detecting means will be described below. Here, a case where the arm vibration detecting means 55 and the surface plate vibration detecting means 56 as the relative position change detecting means have a plurality of laser trackers will be described. FIG. 16 shows an example of arrangement of a plurality of laser tracker reflectors and a plurality of laser tracker main bodies.

As shown in FIG. 16, the laser tracker as the arm vibration detecting means 55 includes a reflector 55R and a laser tracker main body 55M. The reflector 55R is provided, for example, in the end effector EE, and the laser tracker main body 55M is provided, for example, in the coordinate measuring machine 1.

In FIG. 16, the laser tracker main body 55M is arranged on the surface plate 18, but of course, the laser tracker main body 55M may be arranged outside the surface plate 18.

The laser tracker body 55M is arranged to face the reflector 55R. The laser tracker main body 55M irradiates a laser beam toward the reflector 55R, receives the laser beam (reflected light) reflected from the reflector 55R, and changes the relative position between the end effector EE and the platen 18 (reflector). (Displacement of 55R) is detected. Since the principle and configuration of the laser tracker are known, detailed description thereof will be omitted.

Further, the laser tracker as the surface plate vibration detecting means 56 includes a plurality of reflectors 56R provided on the X-direction and Y-direction side surfaces of the surface plate 18, and a plurality of reflectors 56R arranged to face each of the plurality of reflectors 56R. Includes a laser tracker body 56M. Preferably, the laser tracker body 56M is arranged outside the surface plate 18.

Each laser tracker body 56M irradiates laser light toward the opposing reflector 56R, receives the reflected laser light (reflected light) from the reflector 56R, and receives the laser light (reflected light) at the relative positions of the end effector EE and the platen 18. A change (displacement of the reflector 56R) is detected.

The number of laser trackers in the surface plate vibration detecting means 56 may be one, but when the surface plate 18 is relatively large, a plurality of laser trackers detect a change in the relative position of the surface plate 18 (displacement of the reflector 56R). It is preferable to do so.

Further, in addition to the surface plate vibration detecting means 56, the coordinate measuring machine 1 may be provided with an inclination detecting means (not shown) for detecting the inclination (change in posture) of the surface plate 18. Examples of the tilt detecting means include a tilt sensor, an acceleration sensor, a gyro sensor, and the like.

In this case, the vibration compensating means 31 is the third order of the work W based on the vibration in each direction of the surface plate 18 detected by the surface plate vibration detecting means 56 and the inclination of the surface plate 18 detected by the inclination detecting means. For example, the measured value of the original measurement is corrected in real time. As a result, the accuracy of the three-dimensional measurement can be further improved.

Note that an inclination detecting means may be provided instead of the surface plate vibration detecting means 56.

FIG. 17 is a flowchart showing a three-dimensional measurement method according to the third embodiment. In FIG. 17, the same steps as those in the flowchart shown in FIG. 4 are numbered the same, and the description of the same steps will be omitted.

As shown in FIG. 17, since the robot base 53 is arranged on the surface plate 18 in the third embodiment as in the second embodiment, a part of the robot arm 50 is directly or indirectly fixed. The step of contacting the plate 18 (for example, step S12 in FIG. 4) can be omitted.

In the third embodiment, when the work W is transported to the measurement space (step S11), the relative position change detecting means (that is, the arm vibration detecting means 55 and / or the surface plate vibration detecting means 56) is the surface plate 18 and the robot. It starts to detect the change in the relative position with the arm 50 (step S20), and outputs the detection result to the vibration correction means 31 in real time, for example. Each time the three-dimensional measurement is performed (steps S13 and S15), the vibration correction means 31 corrects the measured value of the three-dimensional measurement based on the detection result output from the relative position change detecting means (steps S21 and S22).

More specifically, for example, when the coordinate measuring system 3000 includes the arm vibration detecting means 55 and the surface plate vibration detecting means 56, the vibration compensating means 31 cancels the vibration of the surface plate 18 with the vibration of the robot arm 50. The measured value of the three-dimensional measurement of the work W is corrected so as to be performed.

As described above, in the present embodiment, since the robot base 53 is arranged on the surface plate 18, the robot arm device 300 is not easily affected by the vibration of the external environment. Further, even if the posture of the surface plate 18 changes due to the movement of the gate, the robot arm device can follow the change in the posture of the surface plate 18. However, even so, since the three-dimensional measurement is performed while the work W is held by the end effector EE, the vibration of the robot arm 50 itself may affect the measured value of the three-dimensional measurement.

Therefore, in steps S21 and S22, the influence of the vibration of the robot arm 50 itself is suppressed by correcting the measurement result of the three-dimensional measurement based on the change in the relative position between the surface plate 18 and the robot arm 50. As a result, the accuracy of the three-dimensional measurement can be further improved.

Here, the correction of the measured value of the three-dimensional measurement based on the detection result of the change in the relative position will be described in more detail. For the sake of explanation, it is assumed that, for example, the relative position change detecting means detects the time change of the relative position of the robot arm 50 in the X direction, the Y direction, and the Z direction. Then, a waveform as shown in FIG. 18 is obtained in each of the X direction, the Y direction, and the Z direction. FIG. 18 is an example of a graph showing a time change of a relative position in one direction detected by the relative position change detecting means, in which the horizontal axis shows time and the vertical axis shows the amount of change (amplitude) of the relative position.

The vibration correction means 31 calculates the amplitude in each direction based on the waveform shown in FIG. 18, and corrects the measured value of the three-dimensional measurement of the work W based on the calculated amplitude. More specifically, the vibration compensating means 31 is relative to the measured value (measured coordinates) of the three-dimensional measurement in each of the X, Y, and Z directions so as to cancel the influence of the change in the relative position. The value corresponding to the amplitude detected by the position change detecting means is added, or the value corresponding to the vibration is subtracted from the measured value of the three-dimensional measurement. Whether addition or subtraction is performed is determined based on the direction in which the relative position changes.

As a result, it is possible to correct the deviation of the measurement point caused by the vibration of the robot arm 50 when performing the three-dimensional measurement. Therefore, the accuracy of the three-dimensional measurement can be further improved.

<Modification 1 of the third embodiment>
Similar to the modified example of the second embodiment, in the third embodiment, a part of the robot arm 50 may be directly or indirectly brought into contact with the surface plate 18 at the time of measurement. For example, in the modified example of the third embodiment, the step of bringing a part of the robot arm 50 directly or indirectly into contact with the surface plate 18 at the time of measurement (for example, step S12 in FIG. 4) is shown in FIG. 3 It may be added between step S11 and step S13 of the measurement method according to the embodiment. As a result, the vibration of the robot arm 50 itself can be reduced, so that the measurement accuracy can be further improved.

<Modification 2 of the third embodiment>
In addition to the surface plate vibration detecting means 56, the coordinate measuring machine 2 may be provided with an inclination detecting means (not shown) for detecting the inclination of the surface plate 18. Examples of the tilt detecting means include a tilt sensor, an acceleration sensor, a gyro sensor, and the like.

The vibration compensating means 31 measures the work W in three dimensions based on the vibration in each direction of the surface plate 18 detected by the surface plate vibration detecting means 56 and the inclination of the surface plate 18 detected by the inclination detecting means. The measured value is corrected in real time, for example. As a result, the accuracy of the three-dimensional measurement can be further improved.

<Fourth Embodiment>
Next, the three-dimensional measurement system 4000 according to the fourth embodiment will be described. FIG. 19 is a schematic configuration diagram of the three-dimensional measurement system 4000 according to the fourth embodiment. As shown in FIG. 19, the three-dimensional measurement system 4000 according to the fourth embodiment includes a three-dimensional measuring machine 2 and a robot arm device 400. The robot arm device 400 replaces the robot base 53 of the robot arm device 300 according to the third embodiment with the robot base 52. The three-dimensional measuring machine 2 is basically the same as the three-dimensional measuring machine 2 according to the third embodiment.

Since the three-dimensional measurement method according to the fourth embodiment is basically the same as that of the third embodiment, the description thereof will be omitted. Also in the fourth embodiment, since the three-dimensional measurement can be performed while the work is held by the end effector EE of the robot arm 50, the posture of the work can be easily changed.

In the fourth embodiment, since the robot base 52 is arranged outside the surface plate 18, the vibration system of the coordinate measuring machine 2 and the vibration system of the robot arm device 400 are separate systems as in the first embodiment. It has become. However, since the relative position change detecting means (that is, the arm vibration correcting means 55 and / or the surface plate vibration detecting means 56) and the vibration correcting means 31 are provided, the influence of the vibration of the robot arm 50 and / or the influence of the vibration of the surface plate 18 Can be reduced. Therefore, as in the third embodiment, it is not always necessary to bring a part of the robot arm 50 directly or indirectly into contact with the surface plate 18 as in the first embodiment.

In the three-dimensional measurement system 4000 according to the fourth embodiment, since it is not necessary to arrange the robot base 52 on the surface plate 18, a robot arm device larger than that of the third embodiment is used as the robot arm device 400. Can be done.

<Modification 1 of the fourth embodiment>
Similar to the first embodiment and its modifications, in the fourth embodiment as well, a part of the robot arm 50 may be directly or indirectly brought into contact with the surface plate 18 at the time of measurement. Since the three-dimensional measurement method according to the modified example of the fourth embodiment is basically the same as the modified example of the third embodiment, the description thereof will be omitted. Also in the modified example of the fourth embodiment, since the vibration of the robot arm 50 itself can be reduced, the accuracy of the three-dimensional measurement of the work W can be further improved.

<Modification 2 of the fourth embodiment>
Similar to the second modification of the third embodiment, in addition to the surface plate vibration detecting means 56, the coordinate measuring machine 2 may be provided with an inclination detecting means (not shown) for detecting the inclination of the surface plate 18. As a result, also in the second modification of the fourth embodiment, the vibration compensating means 31 vibrates in each direction of the surface plate 18 detected by the surface plate vibration detecting means 56, and the surface plate 18 detected by the inclination detecting means. The measured value of the three-dimensional measurement of the work W can be corrected in real time, for example, based on the inclination of the work W, and the accuracy of the three-dimensional measurement can be further improved. In addition, the inclination detecting means may be provided instead of the surface plate vibration detecting means 56.

<Fifth Embodiment>
Next, the three-dimensional measurement system 5000 according to the fifth embodiment will be described. FIG. 20 is a schematic configuration diagram of the three-dimensional measurement system 5000 according to the fifth embodiment. As shown in FIG. 20, the three-dimensional measurement system 5000 according to the fifth embodiment includes a three-dimensional measuring machine 3 and a robot arm device 500.

The robot arm device 500 is a robot arm device 100 according to the first embodiment with the temperature detecting means 57 added. The three-dimensional measuring machine 3 is a three-dimensional measuring machine 1 according to the first embodiment to which a temperature compensating means (correcting means) 32 is added.

Similar to the first embodiment, in the fifth embodiment as well, since the three-dimensional measurement can be performed while the work is held by the end effector EE of the robot arm 50, the posture of the work can be easily changed.

As the temperature detecting means 57, any kind of temperature sensor can be used. Examples of the temperature detecting means 57 include a thermocouple thermometer, a resistance thermometer, an infrared thermometer, and a bimetal thermometer.

In the robot arm device 100, the temperature detecting means 57 may be provided anywhere as long as the temperature of the work W held by the end effector EE can be detected. However, preferably, the temperature detecting means 57 is an end effector. It is provided on the holding surface that holds (holds) the work W in the EE. As a result, the temperature of the work W held by the end effector EE can be detected with high accuracy.

In the coordinate measuring machine 1, the temperature compensating means 32 determines whether or not the three-dimensional measurement is possible based on the temperature of the work W detected by the temperature detecting means 57. Further, the temperature correction means 32 corrects the measured value of the three-dimensional measurement based on the detected temperature of the work W.

Next, an example of the end effector EE including the temperature detecting means 57 will be described with reference to FIGS. 21 and 22. The end effector EE is appropriately replaced according to the shape and material of the work W.

FIG. 21 shows an example of an end effector EE that can be suitably used when holding a square-shaped work W. Reference numeral 21A in FIG. 21 is a front view of the end effector EE, and reference numeral 21B is a diagram showing a holding surface. As shown by reference numeral 21A, the end effector EE includes a base portion 71 and a pair of claw portions 72. The base end side of the base portion 71 is connected to the first arm A1 of the robot arm 50. The pair of claw portions 72 are provided on the tip end side of the base portion 71. The pair of claws 72 are configured to be movable so as to be separated from each other and close to each other, and the work W is held in the gap between the pair of claws 72 as shown by reference numeral 21C. That is, the surfaces of the pair of claws 72 facing each other form a pair of holding surfaces 73 for holding the work W.

As shown by reference numeral 21B, a temperature detecting means 57 is provided on at least one of the holding surfaces 73. When the work W is held by the end effector EE, the work W comes into contact with the temperature detecting means 57 provided on the holding surface 73, and the temperature detection of the work W by the temperature detecting means 57 is started. Preferably, all holding surfaces 73 are provided with temperature detecting means 57. As a result, the temperature measurement accuracy can be improved.

FIG. 22 shows an example of an end effector EE that can be suitably used when holding a cylindrical work W. Reference numeral 22A in FIG. 22 is a front view of the end effector EE, and reference numeral 22B is a bottom view. As shown by

reference numerals

22A and 22B, the end effector EE includes a base 75 and a set of three chucks 76. The base end side of the base portion 75 is connected to the first arm A1 of the robot arm 50. A set of chucks 76 is provided on the distal end side of the base 75. A set of chucks 76 are arranged on the same circumference at intervals of 120 degrees, and are configured to be movable in the radial direction. As shown by reference numeral 22C, the work W is held in the gap between the set of chucks 76. That is, the radial center side of the set of chucks 76 constitutes a set of holding surfaces 77 for holding the work W.

As shown by reference numeral 22B, a temperature detecting means 57 is provided on at least one of the holding surfaces 77. Preferably, all holding surfaces 77 are provided with temperature detecting means 57.

FIG. 23 is a flowchart showing a three-dimensional measurement method according to the fifth embodiment. In FIG. 23, the same steps as those in the flowchart shown in FIG. 4 are numbered the same, and the description of the same steps will be omitted. As can be seen from FIG. 23, the three-dimensional measurement method according to the fifth embodiment is obtained by adding steps S30 to S33 to the three-dimensional measurement method according to the first embodiment. In the first embodiment, a part of the robot arm 50 is directly brought into contact with the surface plate 18 (for example, step S12), but of course, the robot arm is the same as the modified example of the first embodiment. A part of 50 may be indirectly brought into contact with the surface plate 18.

In the fifth embodiment, when the end effector EE holds the work W (step S10), the work W and the temperature detecting means 57 come into contact with each other, and the temperature detecting means 57 starts detecting the temperature of the work W (step S30: Temperature detection step). After that, in parallel with steps S11 to S33, the temperature detection means 57 outputs the temperature detection result to the temperature correction means 32 at regular time intervals, unequal time intervals, or in real time.

Here, when the temperature detection result is not automatically output from the temperature detection means 57 to the temperature correction means 32, after setting the posture of the work W (step S12), for example, the temperature correction means 32 to the temperature detection means 57 On the other hand, a signal instructing the output of the temperature detection result may be sent.

In this way, since the temperature detecting means 57 can automatically start the temperature detection of the work W at the timing when the end effector EE holds the work W, the user attaches a sensor for detecting the temperature of the work W to the robot arm 50 or the like. The process can be omitted. Further, since the end effector EE starts to detect the temperature of the work W while holding the work W, the work W is in the time from the holding of the work W (step S10: holding step) to the installation of the work W (step S12). Temperature detection can be performed. This advantage is remarkable when the rise of the temperature detecting means 57 takes a relatively long time. Thereby, the efficiency of the three-dimensional measurement can be improved.

When a part of the robot arm 50 is directly or indirectly brought into contact with the surface plate 18 to determine the measurement posture of the work W (step S12), the temperature compensating means 32 is the temperature detecting means in the coordinate measuring machine. It is determined whether or not the temperature of the work W detected by 57 satisfies a predetermined temperature condition (step S31: temperature determination step).

Here, the temperature condition is set in advance based on, for example, the temperature range of the work W that can be measured by the coordinate measuring machine 3. For example, when the temperature of the atmosphere to be measured three-dimensionally is 20 degrees Celsius, a predetermined temperature condition may be set to 20 degrees Celsius ± 2 degrees Celsius or 20 degrees Celsius ± 1 degree Celsius.

When it is determined that the temperature of the work W does not satisfy the predetermined temperature condition (step S31: No), the user is notified to that effect (not shown), and the temperature is based on the newly detected temperature after the elapse of the predetermined time. And the temperature is judged again. When it is determined that the temperature of the work W is suitable for the measurement of the work W (step S31: Yes), the three-dimensional measurement of the work W is performed (step S13).

Subsequently, the temperature compensating means 32 corrects the measured value of the three-dimensional measurement of the work W based on the temperature detection result of the work W output from the temperature detecting means 57 during the three-dimensional measurement of the work W (step S32). ). Here, when the temperature detecting means 57 detects the temperature in real time and the temperature detected by the temperature compensating means 32 is output in real time, the measured value of the three-dimensional measurement may be corrected in real time.

When the three-dimensional measurement in the posture determined in step S12 is completed, the posture of the work W is changed by the robot arm 50 (step S14). Subsequently, the work after the posture change is similarly subjected to the three-dimensional measurement (step S15), and the measured value of the three-dimensional measurement is corrected based on the detected temperature (step S32).

In this way, the accuracy of the three-dimensional measurement of the work W can be improved by correcting the measured value of the three-dimensional measurement based on the temperature of the work W. In the above description, it is determined whether or not the work W satisfies a predetermined temperature condition (step S31 in FIG. 23). However, if it is known in advance that the work W satisfies a predetermined temperature condition, step S31 in FIG. 23 may be omitted. Thereby, the efficiency of the three-dimensional measurement can be further improved.

<Modification 1 of the fifth embodiment>
Next, a modification 1 of the fifth embodiment will be described. In the fifth embodiment, the work W determined not to satisfy the temperature condition in the temperature determination is not moved, but in the modified example 1 of the fifth embodiment, as an example, the work determined not to satisfy the temperature condition is not moved. Move W to the temperature break-in field.

In the first modification of the fifth embodiment, a work stocker for storing the work W and a place (temperature break-in place) for temporarily storing the work W that does not satisfy a predetermined temperature condition are previously provided in the vicinity of the three-dimensional measurement system 5000. Provided (not shown). Since the configuration of the three-dimensional measurement system according to the first modification of the fifth embodiment is the same as that of the three-dimensional measurement system 5000 according to the fifth embodiment, the description of the system configuration will be omitted.

FIG. 24 shows a flowchart of the three-dimensional measurement method according to the first modification of the fifth embodiment. As shown in FIG. 24, in the first modification of the fifth embodiment, when it is determined in step S31 that the predetermined temperature condition is not satisfied in the flowchart of the three-dimensional measurement method according to the fifth embodiment shown in FIG. 23. Step S40 is added, and step S34, step S41, and step S42 are added after step S33. Since the other steps are basically the same as those in the fifth embodiment, the description thereof will be omitted.

In the first modification of the fifth embodiment, when it is determined that the temperature detection result of the work W satisfies a predetermined temperature condition (Yes in step S31), the work W is three-dimensionally formed as in the fifth embodiment. After performing the measurement and temperature correction, the work W is carried out from the coordinate measuring machine 3 (step S34), and the process proceeds to step S41.

On the other hand, when it is determined that the temperature detection result of the work W does not satisfy the predetermined temperature condition (No in step S31), the work W held in the end effector EE is moved to the temperature break-in field (step). S40: Carry-out step), the process proceeds to step S41.

According to the first modification of the fifth embodiment, the temperature is determined while the work W is held, and the work W that does not satisfy the temperature condition is quickly measured by the coordinate measuring machine without removing the work W from the end effector EE. It can be carried out from 3. As a result, the operating rate of the coordinate measuring machine 3 can be improved.

Subsequently, in step S41, it is determined whether or not there is another work in the work stocker. When it is determined that the work stocker has another work (Yes in step S41), the process returns to step S10, and the processing after step S10 is performed for the other work W in the work stocker.

When it is determined that there is no other work in the work stocker (No in step S41), it is determined whether or not there is another work in the temperature break-in field (step S42). When it is determined that there is another work in the temperature break-in field (Yes in step S42), the process returns to step S10, and the processing after step S10 is performed on the other work W in the temperature break-in field. When it is determined that there is no other work in the temperature break-in field (Yes in step S42), the process ends.

As a matter of course, the modification 1 of the fifth embodiment can obtain the same effect as that of the fifth embodiment. Further, in the first modification of the fifth embodiment, the work W determined not to satisfy the predetermined temperature condition is temporarily moved to the temperature break-in field in step S40. Then, after performing the three-dimensional measurement on another work W acquired by the work stocker, the three-dimensional measurement is performed on the work W that has been temperature-conditioned (temperature-conditioned) in the temperature break-in field. As a result, the operating rate of the coordinate measuring machine 3 can be increased.

<Modification 2 of the fifth embodiment>
In the fifth embodiment described above, the configuration in which the temperature detecting means 57 and the temperature compensating means 32 are added to the robot arm device 100 and the three-dimensional measuring machine 1 according to the first embodiment has been described. However, the three-

dimensional measurement systems

2000 and 3000 according to the second and third embodiments, which include the robot base 53 arranged on the surface plate 18 instead of the robot base 52 arranged outside the surface plate 18. The temperature detecting means 57 and the temperature compensating means 32 may be added to the above.

The three-dimensional measurement method according to the second modification of the fifth embodiment is a step of directly or indirectly abutting a part of the robot arm 50 on the surface plate 18 from the flowcharts shown in FIGS. 23 and 24 (step S12). It is the same as the one excluding. That is, by applying the modification 2 of the fifth embodiment to the modification 1 of the fifth embodiment and the fifth embodiment, the effect of the modification 1 of the fifth embodiment and the fifth embodiment can be obtained. In addition, even if the robot arm 50 is not directly or indirectly brought into contact with the surface plate 18, the influence of vibration of the external environment can be reduced and the followability to the change in the posture of the surface plate 18 can be ensured. The effect of the second and third embodiments that can be obtained can also be obtained.

<Modification 3 of the fifth embodiment>
Since the configuration of the three-dimensional measurement system according to the third modification of the fifth embodiment is the same as that of the three-dimensional measurement system 5000 according to the fifth embodiment, the description of the system configuration will be omitted.

FIG. 25 shows a flowchart showing a three-dimensional measurement method according to the third modification of the fifth embodiment. As shown in FIG. 25, in the third modification of the fifth embodiment, step S12 of the flowchart of the three-dimensional measurement method according to the fifth embodiment shown in FIG. 23 is changed to step S50, and further, a predetermined step S31 is performed. When it is determined that the temperature condition is satisfied, step S51 is added, and step S34 and step S52 are added after step S33. Further, when it is determined in step S31 that the predetermined temperature condition is not satisfied, step S53 is added. Since the other steps are basically the same as those in the fifth embodiment, the description thereof will be omitted.

In the fifth embodiment and the modified examples 1 and 2, the three-dimensional measurement is performed while the work W is held by the end effector EE. On the other hand, in the third modification of the fifth embodiment, the work W is placed on the surface plate 18, and the three-dimensional measurement is performed with the work W removed from the end effector EE.

Therefore, in the third modification of the fifth embodiment, after the work W is carried into the three-dimensional measurement 3 in step S11 (step S11), when the work W is arranged at a predetermined measurement position in the measurement space, the work W Is placed on the surface plate 18 (step S50). Here, the work W may be placed directly on the surface plate 18, or may be indirectly placed on the surface plate 18 via a jig (not shown).

After mounting the work W in step S50, it is preferable that the work W is held by the end effector EE at least until the temperature detection result is output. This is because if the end effector EE removes the work W, the temperature detecting means 57 provided in the end effector EE may come into contact with the outside air, and the temperature of the work W may not be measured correctly.

After step S50, when the temperature detection means 57 outputs the temperature detection result of the work W to the temperature correction means 32, the temperature correction means 32 determines whether or not the temperature detection result of the work W satisfies a predetermined temperature condition. (Step S31). If it is known in advance that the work W satisfies a predetermined temperature condition, for example, step S31 may be omitted. Thereby, the efficiency of the three-dimensional measurement can be further improved.

When it is determined that the temperature detection result of the work W does not satisfy the predetermined temperature condition (No in step S13), the user is notified to that effect (not shown). Subsequently, the end effector EE moves the held work W from the measurement position to a predetermined position outside the coordinate measuring machine 3 (step S53: carry-out step), and then proceeds to step S52.

Since the temperature can be determined while holding the work W, the work W that does not satisfy the temperature condition can be quickly carried out from the coordinate measuring machine 3 without temporarily removing the work W from the end effector EE. As a result, the operating rate of the coordinate measuring machine 3 can be improved.

When it is determined that the temperature detection result of the work W satisfies a predetermined temperature condition (Yes in step S13), the work W is removed from the end effector EE, and the robot arm 50 is retracted (step S51). Subsequently, the work W is measured three-dimensionally in the same manner as in the fifth embodiment, and further, the temperature is corrected based on the temperature used in the temperature determination in step S31.

If it is necessary to change the posture of the work W when performing the three-dimensional measurement, the work W is held again by the end effector EE to change the posture of the work W, and then the three-dimensional measurement and the temperature correction are performed.

When the three-dimensional measurement is completed, the robot arm device 500 carries out the work W for which the measurement has been completed from the three-dimensional measuring machine 3 (step S34). If there is another work W to be measured (Yes in step S52), the process returns to step S10, and the same process is repeated for the new work W.

If there is no other work W to be measured (No in step S52), the process ends. As a matter of course, the modification 3 of the fifth embodiment has the effect that it is not necessary to manually attach the temperature detecting means 57 as in the fifth embodiment, and the temperature detection is started at an early timing. The effect of being able to do is obtained.

Further, in the third modification of the fifth embodiment, the three-dimensional measurement is performed with the work W removed from the end effector EE, but even in that case, the work W is held by the end effector EE before being removed from the end effector EE. The temperature can be detected and the temperature can be determined in this state. As a result, the work W that does not satisfy the temperature condition can be quickly carried out from that state, so that the operating rate of the coordinate measuring machine 3 can be increased.

Further, step S51 and step S52 in FIG. 25 may be changed from step S40 in FIG. 24 to step S42. As a result, in addition to the above effects, the same effects as those of the first modification of the fifth embodiment can be realized.

In the modified example of the fifth embodiment, the robot base 53 arranged on the surface plate 18 may be used instead of the robot base 52 arranged outside the surface plate 18.

<Modification 4 of the fifth embodiment>
In the three-dimensional measurement system 5000 according to the fifth embodiment shown in FIG. 20, the arm vibration detection means 55 and / or the surface plate vibration detection means 56 and the vibration correction means 31 described in the third and fourth embodiments are provided. Further may be added.

According to the fourth modification of the fifth embodiment, the measured value of the three-dimensional measurement of the work W can be corrected based on the vibration of the robot arm 50 and / or the surface plate 18 and the temperature of the work W. The accuracy of the three-dimensional measurement can be further improved.

<Others>
Further, the measuring machine control device 30, the vibration compensation means 31, the temperature compensation means 32, and the robot arm control device 60 are realized by a general-purpose computer such as a workstation or a personal computer, and are realized by a general-purpose computer such as a workstation or a personal computer, and have a CPU (Central Processing Unit) and an FPGA (Field Programmable Gate Array). ), A memory such as ROM and RAM, an external recording device such as a hard disk, an input device, an output device, a network connection device, and the like. A program for operating the measuring machine main body 10 is stored in the memory of the measuring machine control device 30, and measurement may be automatically performed by reading and executing this program by the processor. Further, a program for moving the robot arm 50 is stored in the memory of the robot arm control device 60, and the processor reads and executes this program to automatically carry the work W and change the posture. You may. Further, the measuring machine control device 30 and the robot arm control device 60 may cooperate with each other to automatically perform the entire measurement.

<Effect>
As described above, in the three-

dimensional measurement systems

1000, 2000, 3000, 4000, and 5000, the posture of the work W is easily changed because the work W is measured three-dimensionally while being held by the end effector EE. can do. Thereby, the efficiency of the three-dimensional measurement can be improved.

In the three-

dimensional measurement systems

1000, 4000, and 5000, a part of the robot arm 50 is directly or indirectly abutted on the surface plate 18 of the coordinate measuring machine 1 while the work W is held by the end effector EE. The work W is measured three-dimensionally. As a result, the influence of the vibration of the robot arm 50 on the work W can be reduced, so that the accuracy of the three-dimensional measurement can be improved.

In the

robot arm devices

200 and 300, since the robot base 53 is arranged on the surface plate 18, vibration of the external environment does not occur even if a part of the robot arm 50 is not directly or indirectly pressed against the surface plate 18. It is possible to reduce the influence of the work W on the work W and ensure the ability to follow the posture change of the surface plate 18. As a result, the accuracy of the three-dimensional measurement can be further improved.

As described above, it goes without saying that even in the three-

dimensional measurement systems

2000 and 3000, a part of the robot arm 50 may be brought into direct or indirect contact.

The arm vibration detecting means 55 and / or the surface plate vibration detecting means 56 of the

robot arm devices

300 and 400 detect the vibration of the robot arm 50 and / or the surface plate 18, and the coordinate measuring machine 2 is based on the detected vibration. The vibration correction means 31 of the above can correct the measured value of the three-dimensional measurement of the work W. As a result, the accuracy of the three-dimensional measurement can be further improved.

The temperature of the work W held in the end effector EE is detected by the temperature detecting means 57 of the robot arm device 400, and the temperature compensating means 32 of the coordinate measuring machine 3 measures the work W three-dimensionally based on the detected temperature. The measured value of can be corrected. This makes it possible to omit the step of attaching the sensor for detecting the temperature of the work W to the robot arm 50 or the like by the user. Further, since the temperature of the work W can be measured during the time until the work W is transported and installed at the measurement position, the efficiency of the three-dimensional measurement can be further improved. In addition, the accuracy of the three-dimensional measurement can be further improved by performing the temperature correction.

By arbitrarily combining the components of the

robot arm devices

100, 200, 300, 400 and the three-

dimensional measuring machines

1, 2, and 3, the desired effect among the above effects can be appropriately obtained.

Although the examples of the present invention have been described above, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

1, 2, 3: Three-dimensional measuring machine 10: Measuring machine main body 12: Head 14: Beam 16: Column 18: Plate plate 20: Base 22: Probe 24: Stylus 26: Stylus 30: Measuring machine control device 31: Vibration compensating means 32: Temperature compensating means 40: Controller 50: Robot arm 52, 53: Robot base 52a: Tip portion 55: Arm vibration detecting means 56: Plate vibration detecting means 57: Temperature detecting means 60: Robot arm control device 71, 75: Base 72: Claw 73, 77: Holding surface 76:

Chuck

100, 200, 300, 400, 500:

Robot arm device

1000, 2000, 3000, 4000 5000: Three-dimensional measurement system A1: First arm A2: 2nd arm A3: 3rd arm B: Block EE: End effector J1: 1st joint part J2: 2nd joint part J3: 3rd joint part J4: 4th joint part L1: Central axis of work W: Work

Claims

Surface plate and
A robot arm that holds the work to be measured and has a variable posture of the work.
A probe that is configured to be movable relative to the surface plate and that performs three-dimensional measurement of the work.
A three-dimensional measurement system equipped with.
While the work is held by the robot arm, the probe makes a three-dimensional measurement of the work.
The three-dimensional measurement system according to claim 1.
A relative position change detecting means for detecting a change in the relative position between the surface plate and the robot arm,
A correction means for correcting the measurement result of the work by the probe based on the detection result of the relative position change detecting means, and a correction means.
The three-dimensional measurement system according to claim 1 or 2.
The relative position change detecting means includes an arm vibration detecting means for detecting the vibration of the robot arm.
The three-dimensional measurement system according to claim 3.
The arm vibration detecting means detects vibration in the vicinity of the tip of the robot arm.
The three-dimensional measurement system according to claim 4.
The relative position change detecting means includes a surface plate vibration detecting means for detecting the vibration of the surface plate.
The three-dimensional measurement system according to any one of claims 3 to 5.
The relative position change detecting means includes an inclination detecting means for detecting the inclination of the surface plate with respect to the horizontal direction.
The three-dimensional measurement system according to any one of claims 3 to 6.
The relative position change detecting means detects the amount of change in the relative position in each of the horizontal direction and the vertical direction.
The correction means adds or subtracts the amount of change in the relative position with respect to the measurement result of the work by the probe in each of the horizontal direction and the vertical direction.
The three-dimensional measurement system according to any one of claims 3 to 7.
The relative position change detecting means detects the change in the relative position in real time.
The correction means corrects the measurement result of the work by the probe in real time based on the change in the relative position detected in real time.
The three-dimensional measurement system according to any one of claims 3 to 8.
The relative position change detecting means includes a reflector and
A laser tracker body that irradiates the reflector with a laser beam, receives the reflected light of the laser beam from the reflector, and acquires the displacement of the reflector.
Equipped with a laser tracker with
The reflector is arranged on the robot arm,
The three-dimensional measurement system according to any one of claims 3 to 9.
A temperature detecting means for detecting the temperature of the work and
A correction means for correcting the measurement result of the work by the probe based on the detection result of the temperature detection means, and a correction means.
The three-dimensional measurement system according to any one of claims 1 to 10.
The end effector of the robot arm includes a temperature detecting means for detecting the temperature of the work.
The three-dimensional measurement system according to any one of claims 1 to 10.
The temperature detecting means is provided on a holding surface on which the end effector holds the work.
The three-dimensional measurement system according to claim 12.
The three-dimensional measurement system according to claim 12 or 13, further comprising a correction means for correcting the measurement result of the work by the probe based on the detection result of the temperature detecting means.
The temperature detecting means detects the temperature of the work while the work is held by the robot arm.
The three-dimensional measurement system according to any one of claims 11 to 14.
When the work is held by the robot arm, the temperature detecting means starts detecting the temperature of the work.
The three-dimensional measurement system according to claim 15.
The robot base that supports the robot arm is provided outside the surface plate.
The three-dimensional measurement system according to any one of claims 1 to 16.
The robot base that supports the robot arm is provided on the surface plate.
The three-dimensional measurement system according to any one of claims 1 to 16.
The robot arm has a contact portion that directly or indirectly contacts the surface plate when the work is measured by the probe.
The three-dimensional measurement system according to any one of claims 1 to 18.
A vibration damping member is provided on the surface plate.
The contact portion of the robot arm indirectly contacts the surface plate via the vibration damping member.
The three-dimensional measurement system according to claim 19.
The robot arm includes a plurality of arms and a plurality of joints rotatably connecting the plurality of arms.
The contact portion of the robot arm is one of the plurality of joint portions.
The three-dimensional measurement system according to claim 19 or 20.
The contact portion of the robot arm is the joint portion closest to the end effector side among the plurality of joint portions.
The three-dimensional measurement system according to claim 21.
A transport step in which the work to be measured is transported by a robot arm whose posture is variable.
A measurement step in which the work is three-dimensionally measured by a probe configured to move relative to the surface plate, and
Three-dimensional measurement method including.
In the measurement step, while the work is held by the robot arm, the probe is used to perform three-dimensional measurement of the work.
The three-dimensional measurement method according to claim 23.
A relative position change detection step for detecting a change in the relative position between the surface plate and the robot arm, and
A vibration correction step that corrects the measurement result of the work by the measurement step based on the detection result by the relative position change detection step, and a vibration correction step.
The three-dimensional measurement method according to claim 23 or 24.
The relative position change detection step includes a step of detecting vibration of the robot arm.
The three-dimensional measuring method according to claim 25.
The relative position change detection step includes a step of detecting vibration of the surface plate.
The three-dimensional measurement method according to claim 25 or 26.
The relative position change detection step includes a step of detecting the inclination of the surface plate with respect to the horizontal direction.
The three-dimensional measurement method according to any one of claims 25 to 27.
The relative position change detection step includes a step of detecting the amount of change in the relative position in each of the horizontal direction and the vertical direction.
The vibration correction step includes a step of adding or subtracting a change amount of the relative position with respect to the measurement result of the work by the probe in each of the horizontal direction and the vertical direction.
The three-dimensional measurement method according to any one of claims 25 to 28.
The relative position change detection step detects the change in the relative position in real time.
The vibration correction step corrects the measurement result of the work by the probe in real time based on the change in the relative position detected in real time.
The three-dimensional measurement method according to any one of claims 25 to 29.
The three-dimensional measurement method according to any one of claims 25 to 30, further comprising a temperature detection step of detecting the temperature of the work by a temperature detecting means provided on the end effector of the robot arm.
A temperature correction step that corrects the measurement result of the work by the measurement step based on the detection result by the temperature detection step, and
31. The three-dimensional measurement method according to claim 31.
A temperature detection step for detecting the temperature of the work and
A temperature correction step that corrects the measurement result of the work by the measurement step based on the detection result by the temperature detection step, and
The three-dimensional measurement method according to any one of claims 25 to 30, comprising the above.
The temperature detection step is performed in real time while the work is held by the robot arm.
In the temperature correction step, the measurement result of the work by the measurement step is corrected in real time based on the detection result by the temperature detection step.
The three-dimensional measurement method according to claim 32 or 33.
The temperature detection step is performed in the transport step.
The three-dimensional measurement method according to any one of claims 31 to 34.
The temperature detection step is performed while the work is held by the robot arm.
The three-dimensional measurement method according to any one of claims 31 to 35.
The temperature detection step is started when the work is held by the robot arm.
The three-dimensional measuring method according to claim 36.
A temperature determination step for determining whether or not the temperature of the work satisfies a predetermined temperature condition,
The three-dimensional measurement method according to any one of claims 31 to 37.
The temperature determination step is performed in a state where the work is held by the robot arm.
The three-dimensional measuring method according to claim 38.
When it is determined in the temperature determination step that the predetermined temperature condition is not satisfied, the work is carried out while being held by the robot arm.
The three-dimensional measurement method according to claim 39.
The robot base that supports the robot arm is provided outside the surface plate.
The three-dimensional measurement method according to any one of claims 23 to 40.
The robot base that supports the robot arm is provided on the surface plate.
The three-dimensional measurement method according to any one of claims 23 to 40.
An installation step in which the contact portion of the robot arm is brought into direct or indirect contact with the surface plate while the work is held by the robot arm.
The three-dimensional measurement method according to any one of claims 23 to 42.
A vibration damping member is provided on the surface plate.
In the installation step, the contact portion of the robot arm indirectly contacts the surface plate via the vibration damping member.
The three-dimensional measuring method according to claim 43.
The robot arm includes a plurality of arms and a plurality of joints rotatably connecting the plurality of arms.
The contact portion of the robot arm is one of the plurality of joint portions.
The three-dimensional measurement method according to claim 43 or 44.
The contact portion of the robot arm is the joint portion closest to the end effector side among the plurality of joint portions.
The three-dimensional measuring method according to claim 45.