JP7458578B2 - 3D measurement system and 3D measurement method - Google Patents

Description

The present invention relates to a three-dimensional measuring system and a three-dimensional measuring method, and particularly to a three-dimensional measuring system and a three-dimensional measuring method using a three-dimensional measuring machine and a robot arm.

Conventionally, in order to improve the accuracy of 3D measurement, technology has been proposed that corrects the 3D measurement results based on the temperature of the workpiece when measuring the workpiece with a 3D measuring machine. .

For example, in Patent Document 1, a three-dimensional measuring machine main body includes a temperature sensor that detects the temperature of a workpiece. When performing three-dimensional measurement, a temperature sensor is attached to a workpiece installed in a three-dimensional measuring machine to detect the temperature of the workpiece. Then, the measurement results of the three-dimensional measurement are corrected using the detected temperature of the workpiece. Even if the temperature of the workpiece differs from the predetermined temperature, the measurement results of the three-dimensional measurement can be corrected, so the temperature acclimatization of the workpiece is omitted, increasing measurement efficiency.

Japanese Patent Application Publication No. 11-190617

However, with the technology described in Patent Document 1, in order to detect the temperature of the workpiece, it is necessary to place the workpiece on a three-dimensional measuring device and manually attach the temperature sensor to the workpiece on the three-dimensional measuring device. . There is a problem in that this installation work reduces the efficiency of three-dimensional measurement.

The present invention was made in consideration of these circumstances, and aims to provide a three-dimensional measurement system and a three-dimensional measurement method that can detect the temperature of a workpiece without human intervention.

In order to achieve the above object, a three-dimensional measurement system according to a first aspect of the present invention includes a surface plate, an end effector that holds a workpiece to be measured, and a robot that can change the posture of the workpiece. The present invention includes an arm, a probe configured to be movable relative to the surface plate and that performs three-dimensional measurement of the workpiece, and a temperature detection means that is provided on the end effector and detects the temperature of the workpiece.

According to the three-dimensional measurement system according to the first aspect, the temperature of the workpiece can be detected by the temperature detection means provided on the end effector of the robot arm. Since there is no need to manually attach the temperature detection means to the workpiece, the efficiency of three-dimensional measurement can be improved.

In the three-dimensional measurement system according to the first aspect, preferably, the temperature detection means detects the temperature of the work while the work is held by the robot arm. The temperature can be detected while the workpiece is being held by the robot arm without having to place the workpiece on the surface plate, so for example, if the workpiece does not meet the specified temperature conditions, it is possible to temporarily set the workpiece on the surface plate. It can be carried out quickly without any problems. Thereby, the operating rate of the three-dimensional measurement system can be improved.

In the three-dimensional measurement system according to the first aspect, the temperature detection means preferably starts detecting the temperature of the workpiece when the workpiece is held by the robot arm. In conventional technology, the temperature detection is performed after the workpiece is placed on the surface plate, but in the three-dimensional measurement system according to the first aspect, temperature detection can be started at an earlier timing than in the past. For example, this advantage becomes more noticeable when it takes a long time for the temperature detection means to start up.

In the three-dimensional measurement system according to the first aspect, the temperature detection means is preferably provided on a holding surface on which the end effector holds the workpiece. By minimizing the gap between the workpiece and the end effector, temperature detection can be performed accurately.

Preferably, the three-dimensional measurement system according to the first aspect includes a correction means for correcting the measurement result of the workpiece by the probe based on the detection result by the temperature detection means. The correction means can correct the three-dimensional measurement result based on the detected temperature of the workpiece, so the accuracy of the three-dimensional measurement can be improved.

In the three-dimensional measurement system according to the first aspect, the robot base that supports the robot arm may be provided outside the surface plate. Since the robot base is provided outside the surface plate, a relatively large robot arm can be used.

In the three-dimensional measurement system according to the first aspect, the robot base that supports the robot arm may be provided on a surface plate. Since the robot base is installed on the surface plate, the vibration system of the robot arm is the same as that of the surface plate. Thereby, the influence of vibrations in the external environment can be reduced, and the accuracy of three-dimensional measurement can be further improved.

In the three-dimensional measurement system according to the first aspect, preferably, the probe performs three-dimensional measurement of the work while the work is held by the robot arm. Since the three-dimensional measurement of the workpiece is performed while the workpiece is held by the robot arm, the posture of the workpiece can be easily changed during the three-dimensional measurement.

In order to achieve the above object, the three-dimensional measuring method according to the second aspect of the present invention includes a loading step of holding the workpiece to be measured by the end effector of the robot arm and loading the workpiece, a temperature detection step of detecting the temperature of the workpiece by a temperature detection means provided on the end effector, and a measurement step of performing three-dimensional measurement of the workpiece by a probe configured to be movable relative to the surface plate. The three-dimensional measuring method according to the second aspect can also achieve the same effects as the three-dimensional measuring system according to the first aspect.

In the three-dimensional measurement method according to the second aspect, preferably the temperature detection step is performed in the carrying-in step. Since the temperature of the workpiece is detected by the temperature detecting means provided in the end effector, the temperature detecting step can be performed in parallel with the carrying-in step. Thereby, the efficiency of three-dimensional measurement can be improved.

In the three-dimensional measurement method according to the second aspect, the temperature detection step is preferably performed while the workpiece is held by the robot arm. Since the temperature can be detected by the temperature detection means while the workpiece is held by the robot arm without having to place the workpiece on a surface plate, the efficiency of three-dimensional measurement can be improved.

In the three-dimensional measurement method according to the second aspect, preferably, the temperature detection step is started when the workpiece is held by the robot arm. In conventional technology, temperature detection was performed after placing the workpiece on a surface plate using a robot arm, but with the three-dimensional measurement method according to the second aspect, temperature detection can be started at an earlier timing than before. .

Preferably, the three-dimensional measurement method according to the second aspect includes a temperature determination step of determining whether the temperature of the workpiece satisfies a predetermined temperature condition. This makes it possible to determine, for example, whether the temperature of the workpiece satisfies temperature conditions suitable for three-dimensional measurement.

Here, preferably, the temperature determination step is performed with the workpiece being held by the robot arm. More preferably, if it is determined in the temperature determination step that the predetermined temperature condition is not satisfied, the workpiece is carried out while being held by the robot arm. For example, if it is determined that the workpiece does not satisfy a predetermined temperature condition, the workpiece can be quickly removed without being placed on the surface plate. Thereby, the efficiency of three-dimensional measurement can be further improved.

In the three-dimensional measuring method according to the second aspect, preferably, the measuring step is performed while the workpiece is held by a robot arm. Since the three-dimensional measurement of the workpiece is performed using the probe while the workpiece is held by the robot arm, the posture of the workpiece can be easily changed during the three-dimensional measurement.

Preferably, the three-dimensional measurement method according to the second aspect includes a correction step of correcting the measurement result of the workpiece in the measurement step based on the detection result in the temperature detection step. Since the correction step allows the three-dimensional measurement result to be corrected based on the detected temperature of the workpiece, the accuracy of the three-dimensional measurement can be improved.

More preferably, the temperature detection step is performed in real time while the workpiece is held by the robot arm, and in the correction step, the measurement result of the workpiece in the measurement step is updated in real time based on the detection result in the temperature detection step. to correct. Temperature detection, three-dimensional measurement, and measurement result correction can be performed while the workpiece is held by the robot arm, reducing the time lag between temperature detection and measurement result correction. .

In the three-dimensional measuring method according to the second aspect, the robot base that supports the robot arm is preferably provided outside the base plate. Since the robot base is provided outside the base plate, a relatively large robot arm can be used.

Alternatively, in the three-dimensional measurement method according to the second aspect, the robot base that supports the robot arm is preferably provided on a surface plate. Since the robot base is installed on the surface plate, the vibration system of the robot arm is the same as that of the surface plate. Thereby, the influence of vibrations in the external environment can be reduced, and the accuracy of three-dimensional measurement can be further improved.

According to the present invention, the temperature of a workpiece held by a robot arm is measured in three dimensions while the workpiece is being held by a temperature detection means, so that the temperature of the workpiece can be detected without manual intervention.

1 is a schematic configuration diagram of a three-dimensional measurement system according to a first embodiment. FIG. 2 is a diagram showing an example of a measuring device main body. It is a figure showing an example of a robot arm. FIG. 3 is a diagram showing an example of an end effector having temperature detection means. FIG. 3 is a diagram showing an example of an end effector having temperature detection means. FIG. 1 is a functional block diagram of a three-dimensional measurement system according to a first embodiment. 3 is a flowchart showing a three-dimensional measurement method according to the first embodiment. It is a flowchart which shows the three-dimensional measurement method based on 2nd Embodiment. It is a flowchart which shows the three-dimensional measurement method based on 3rd Embodiment. FIG. 3 is a schematic configuration diagram of a three-dimensional measurement system according to a fourth embodiment.

Below, an embodiment of the measurement method according to the present invention will be described with reference to the attached drawings. Note that essentially the same components in the drawings are given the same reference symbols.

<First embodiment>
FIG. 1 is a schematic configuration diagram of a three-dimensional measurement system 1000 according to the first embodiment. In FIG. 1 and some other figures, a part of the column 16 of the coordinate measuring machine 1 is omitted to illustrate the robot arm device 100. A three-dimensional measuring system 1000 according to the first embodiment includes a three-dimensional measuring machine 1, a robot arm device 100, a temperature detecting means 55, and a general control device 70.

As shown in FIG. 1, the robot base 52 of the robot arm 50 is placed outside the surface plate 18 of the coordinate measuring machine 1. Since the robot base 52 is disposed outside the surface plate 18, the robot arm device 100 may be relatively large.

The coordinate measuring machine 1 includes a measuring machine main body 10, a data processing device 30, and a measuring machine controller 40. FIG. 2 is a diagram showing an example of the measuring device main body 10. Note that the following description uses a three-dimensional orthogonal coordinate system.

In the following description, a contact three-dimensional measuring machine including a contact probe will be described as the three-dimensional measuring machine 1. Naturally, the coordinate measuring machine 1 may be a non-contact type coordinate measuring machine. When the coordinate measuring machine 1 is a non-contact type coordinate measuring machine, for example, a laser probe may be used instead of the contact type probe 22 described below.

The measuring device main body 10 measures the shape (contour) and dimensions of the workpiece W by bringing a measuring stylus 26 formed at the tip of the probe 22 (including the stylus 24) into contact with the workpiece W to be measured and scanning it. etc. to be measured.

As shown in FIG. 2, the measuring device main body 10 includes a base 20 and a surface plate 18 provided on the base 20. The surface of the surface plate 18 is formed in a flat plane parallel to the X-Y plane.

A pair of columns (pillars) 16 are attached to the surface plate 18, extending from the surface of the surface plate 18 upward in the figure (+Z direction). A beam 14 spans the upper end (+Z side end) of the column 16. The pair of columns 16 are movable synchronously in the Y direction on the surface plate 18, and the beam 14 is movable in the Y direction parallel to the X direction. A motor can be used as the driving means for moving the column 16 relative to the surface plate 18. Note that the three-dimensional measuring machine 1 is a gate-type three-dimensional measuring machine 1 in which a gate is formed by a beam 14 and a column 16.

A head 12 extending in the Z direction is attached to the beam 14. The head 12 is movable along the length direction (X direction) of the beam 14. A motor can be used as the drive means for moving the head 12 relative to the beam 14.

A probe 22 is attached to the lower end (-Z side end) of the head 12 so as to be movable in the vertical direction (Z direction) in the figure. A motor can be used as a driving means for moving the probe 22 in the vertical direction.

The measuring device main body 10 includes a movement amount measuring section (for example, a linear encoder, not shown) for measuring the movement amount of each of the column 16, the head 12, and the probe 22.

The probe 22 includes a highly rigid shaft-shaped member (stylus 24). As the material of this stylus 24, for example, super hard alloy, titanium, stainless steel, ceramic, carbon fiber, etc. can be used.

A probe 26 is provided at the tip of the stylus 24 of the probe 22 . The probe 26 is a spherical member with high hardness and excellent wear resistance. As the material of the probe 26, for example, ruby, silicon nitride, zirconia, ceramic, etc. can be used. The diameter of the measuring tip 26 (hereinafter referred to as stylus diameter) is, for example, 4.0 mm.

When measuring the workpiece W, the column 16, head 12, and probe 22 are moved in the XYZ directions to bring the probe 26 into contact with the workpiece W. Then, while scanning the measuring stylus 26 along the outer shape of the workpiece W, the amount of displacement of the measuring stylus 26, etc. is measured. Data such as the measured value of the displacement amount is transmitted to the data processing device 30. The data processing device 30 is able to obtain the shape (outline), dimensions, etc. of the workpiece W by processing this data using a general-purpose measurement program.

The measuring machine controller 40 is a means for communicating with the measuring machine main body 10, and performs conversion processing of data transmitted and received between the measuring machine main body 10. The measuring machine controller 40 includes a D/A (digital-to-analog) converter for converting digital commands sent from the data processing device 30 to the measuring machine main body 10 into analog signals, and a D/A (digital-to-analog) converter for converting digital commands sent from the data processing device 30 to the measuring machine main body 10, and a It may also include an A/D (analog-to-digital) converter for converting data such as measured values sent to the processing device 30 into digital data.

Robot arm device 100 includes a robot arm 50 and a robot arm controller 60. FIG. 3 is a diagram showing an example of the robot arm 50.

The robot arm 50 includes a plurality of movable parts and a plurality of motors that respectively drive the plurality of movable parts. The robot arm controller 60 operates the robot arm 50 by controlling motors and the like provided in the robot arm 50. The robot arm controller 60 is composed of, for example, a computer, and automatically operates the robot arm 50 according to a user's operation or a dedicated program.

The robot arm 50 is designed to be able to hold the workpiece W. Specifically, the robot arm 50 holds (grasps) the workpiece W by the end effector EE connected to the first joint portion (wrist portion) J1. Furthermore, the end effector EE can freely change the posture of the workpiece W. For example, the end effector EE can change the posture of the work W by rotating parallel to the YZ plane or parallel to the XY plane.

As shown in FIG. 3, the robot arm 50 includes, for example, four joints (first joint J1 to fourth joint J4) and three arms (first arm A1 to fourth joint J4) connected sequentially by these joints. It is a multi-joint arm having three arms A3) and a robot base 52. Specifically, the first joint J1 connects the end effector EE and the first arm A1, and the end effector EE is rotatable relative to the first arm A1. The second joint J2 connects the first arm A1 and the second arm A2, and the first arm A1 is rotatable around an axis extending in the longitudinal direction of the first arm A1. The third joint J3 connects the second arm A2 and the third arm A3, and the second arm A2 is rotatable about an axis extending in the horizontal direction with respect to the third arm A3. The fourth joint J4 connects the third arm A3 and the tip 52a of the robot base 52, and the third arm A3 is rotatable around an axis extending horizontally with respect to the robot base 52. Note that the robot arm device 100 shown in FIG. 3 is an example, and other forms of known robot arm devices may be used.

Temperature detection means 55 includes a temperature sensor 57 and a sensor controller 56. The temperature sensor 57 detects the temperature of the workpiece W. The sensor controller 56 is composed of, for example, a computer, and automatically operates the temperature sensor 57 according to a user's operation or a dedicated program.

Here, the temperature detection means 55 may detect the temperature of the work W in real time and output it to the overall control device 70. Real-time means that vibrations are detected constantly or at regular intervals within the time required to detect vibrations (changes in relative position) (the time during which three-dimensional measurement of the workpiece W is performed). Further, vibrations may be detected not only at fixed time intervals but also at unequal time intervals. Furthermore, the present invention is not limited to the case where vibrations are detected in real time, and data related to vibrations may be received from the outside. Alternatively, the temperature of the workpiece W may be outputted from the temperature detection means 55 to the overall control device 70 in accordance with a notification from the overall control device 70.

Any type of temperature sensor can be used as the temperature sensor 57. Examples of the temperature sensor 57 include a thermocouple thermometer, a resistance thermometer, an infrared thermometer, a bimetal thermometer, and the like.

The temperature sensor 57 is not particularly limited as long as it can detect the temperature of the workpiece W while it is held by the end effector EE, but preferably, the temperature sensor 57 is It is provided on the holding surface that holds (retains) W. Thereby, the temperature of the workpiece W held by the end effector EE can be detected with high accuracy.

Next, an example of an end effector EE equipped with a temperature sensor 57 will be described with reference to Figures 4 and 5. The end effector EE is replaced as appropriate depending on the shape and material of the workpiece W.

FIG. 4 shows an example of an end effector EE that can be suitably used when holding a rectangular workpiece W. Reference numeral 4A in FIG. 4 is a front view of the end effector EE, and reference numeral 4B is a view showing a holding surface. As shown by reference numeral 4A, the end effector EE includes a base portion 71 and a pair of claw portions 72. The base end side of the base portion 71 is connected to the first arm A1 of the robot arm 50. A pair of claw portions 72 are provided on the distal end side of the base portion 71. The pair of claw portions 72 are configured to be movable so as to move away from and toward each other, and the workpiece W is held in the gap between the pair of claw portions 72 as shown by reference numeral 4C. That is, the mutually opposing surfaces of the pair of claws 72 constitute a pair of holding surfaces 73 that hold the workpiece W.

As shown at 4B, a temperature sensor 57 is provided on at least one of the holding surfaces 73. When the work W is held by the end effector EE, the work W comes into contact with the temperature sensor 57 provided on the holding surface 73, and the temperature sensor 57 starts detecting the temperature of the work W. Preferably, all holding surfaces 73 are provided with temperature sensors 57. Thereby, temperature measurement accuracy can be improved.

Figure 5 shows an example of an end effector EE that can be suitably used to hold a cylindrical workpiece W. In Figure 5, reference numeral 5A is a front view of the end effector EE, and reference numeral 5B is a bottom view. As shown by reference numerals 5A and 5B, the end effector EE comprises a base 75 and a set of three chucks 76. The base end side of the base 75 is connected to the first arm A1 of the robot arm 50.

The set of chucks 76 is provided on the tip side of the base 75. The set of chucks 76 are arranged on the same circumference at 120 degree intervals, and each is configured to be movable in the radial direction. As shown by reference symbol 5C, the workpiece W is held in the gap between the set of chucks 76. In other words, the radially central surfaces of the set of chucks 76 form a set of holding surfaces 77 that hold the workpiece W. As shown by reference symbol 5B, at least one of the holding surfaces 77 is provided with a temperature sensor 57. Preferably, all of the holding surfaces 77 are provided with a temperature sensor 57.

In this way, since the temperature sensor 57 is provided in the end effector EE, there is no need to manually attach the temperature sensor 57 to the workpiece W carried into the coordinate measuring machine 1. Therefore, the efficiency of three-dimensional measurement can be improved.

In addition, in the past, when temperature sensors were attached using magnets, there was a problem that the temperature sensor could not be attached depending on the material of the workpiece, but this problem can also be solved.

FIG. 6 is a functional block diagram of the three-dimensional measurement system 1000. As shown in FIG. 6, the overall control device 70 is connected to the data processing device 30, the measuring machine controller 40, the sensor controller 56, and the robot arm controller 60, and controls them by communicating data and signals with them. Unify and control.

Furthermore, the overall control device 70 is equipped with a correction means 71. The correction means 71 corrects the measurement results of the coordinate measuring machine 1 based on the temperature of the workpiece W detected by the temperature detection means 55.

The overall control device 70, the data processing device 30, the measuring machine controller 40, the robot arm controller 60, and the correction means 71 can be realized using a computer including a processor. Examples of the processor include a CPU (Central Processing Unit) and an FPGA (Field Programmable Gate Array).

Examples of the computer include a personal computer, a microcomputer, a PLC (Programmable Logic Controller), and the like. A computer may include a memory such as a ROM or RAM, an external storage device such as a hard disk, an input device, an output device, a network connection device, and the like. A program for controlling each device and means is stored in the memory, and when a processor reads and executes this program, various arithmetic processing and control processing are performed.

For example, a program for moving the robot arm 50 may be stored in the memory of the robot arm controller 60, and the processor may read and execute this program to automatically transport the workpiece W and change its posture. Furthermore, by linking the data processing device 30 and the robot arm controller 60, all three-dimensional measurements may be performed automatically.

[Measuring method]
Next, a three-dimensional measurement method according to the first embodiment will be explained. FIG. 7 is a flowchart showing the three-dimensional measurement method according to the first embodiment.

The robot arm device 100 holds the workpiece W outside the measurement space of the coordinate measuring machine 1 with the end effector EE (step S10: holding step). When the end effector EE holds the workpiece W, the workpiece W and the temperature sensor 57 come into contact, and the temperature detection means 55 starts detecting the temperature of the workpiece W (step S20: temperature detection step). Here, at the timing when the workpiece W is held by the end effector EE, for example, the integrated control device 70 may send a signal instructing the temperature detection means 55 to start temperature detection.

The end effector EE automatically starts detecting the temperature of the workpiece W when it holds the workpiece W, so the temperature of the workpiece W can be detected during the time from when the workpiece W is held (step S10) to when the workpiece W is placed (step S12: placement step), which will be described later. This advantage is significant when it takes a relatively long time for the temperature sensor 57 to start up.

Subsequently, the workpiece W is carried into the coordinate measuring machine 1 (step S11: carrying-in step), and the workpiece W is placed at a predetermined measurement position within the measurement space. In the case of the first embodiment, the workpiece W is placed on the surface plate 18 (step S12). Here, the work W may be placed directly on the surface plate 18, or may be placed indirectly on the surface plate 18 via a jig (not shown). Here, if the temperature detection result is not automatically output from the temperature detection means 55 to the overall control device 70, after placing the workpiece W (step S12), for example, the temperature detection result from the temperature detection means 55 It is also possible to send a signal instructing the output of the temperature detection result to the temperature detection result.

After the workpiece W is placed in step S12, it is preferable that the workpiece W is held by the end effector EE at least until the temperature detection result is output. This is because if the end effector EE removes the workpiece W, the temperature sensor 57 provided on the end effector EE will come into contact with the outside air, and there is a possibility that the temperature of the workpiece W cannot be measured correctly.

After step S12, when the temperature detection result of the workpiece W is output from the temperature detection means 55 to the overall control device 70 (step S21), the overall control device 70 judges whether or not the temperature detection result of the workpiece W satisfies a predetermined temperature condition (step S13: temperature judgment step). Here, the temperature condition is set in advance, for example, based on the temperature range of the workpiece W that can be measured by the three-dimensional measuring machine 1. For example, if the temperature of the atmosphere to be three-dimensionally measured is 20 degrees Celsius, the predetermined temperature condition may be set to 20 degrees Celsius ± 2 degrees Celsius, or 20 degrees Celsius ± 1 degree Celsius.

If it is determined that the detection result of the temperature of the workpiece W does not satisfy the predetermined temperature condition (NO in step S13), the overall control device 70 notifies the user to that effect (not shown). The overall control device 70 may provide this notification by, for example, turning on an indicator light or issuing a warning with a buzzer. Subsequently, the end effector EE moves the held workpiece W from the measurement position to a predetermined position outside the coordinate measuring machine 1 (step S23: unloading step), and then proceeds to step S19. For example, in step S23, the workpiece W may be moved to a temperature acclimation area as a predetermined position.

According to the first embodiment, since the temperature can be determined while the workpiece W is being held, the workpiece W that does not meet the temperature conditions can be quickly removed from the coordinate measuring machine without first removing the workpiece W from the end effector EE. It can be carried out from 1. Thereby, the operating efficiency of the coordinate measuring machine 1 can be improved.

If it is determined that the detection result of the temperature of the workpiece W satisfies the predetermined temperature condition (YES in step S13), the workpiece W is removed from the end effector EE, and the robot arm 50 retreats (step S14). Subsequently, three-dimensional measurement is performed on the workpiece W (step S15). The correction means 71 corrects the measurement result of the three-dimensional measurement based on the temperature detection result output from the temperature detection means 55 in step S21 (step S16).

Note that if it is necessary to change the posture of the workpiece W when performing three-dimensional measurement, after holding the workpiece W again with the end effector EE and changing the posture of the workpiece W, steps S14 to S16 are repeated (not shown). ).

When the three-dimensional measurement is completed, the overall control device 70 outputs the temperature-corrected measurement results (step S17). The robot arm device 100 carries out the measured workpiece W from the coordinate measuring machine 1 (step S18: carrying out step). If there is another workpiece W to be measured (YES in step S19), the process returns to step S10 and the same process is repeated for the new workpiece W.

If there is no other workpiece W to be measured (NO in step S19), the process ends. As described above, according to the present embodiment, by providing the temperature detection means 55 in the end effector EE, temperature detection can be started promptly at the timing when the workpiece W is held by the end effector EE without manual intervention. can. Therefore, the efficiency of three-dimensional measurement can be improved. Further, since the temperature can be detected while the workpiece is being held by the end effector EE, and the workpiece W that does not meet the temperature conditions can be quickly removed from that state, the operating rate of the three-dimensional measuring machine 1 can be increased.

<Modified example of the first embodiment>
In the first embodiment, it is determined whether the workpiece W satisfies a predetermined temperature condition (step S13 in FIG. 7). However, if it is known in advance that the workpiece W satisfies a predetermined temperature condition, for example, steps S13 and S23 in FIG. 7 may be omitted. Thereby, the efficiency of three-dimensional measurement can be further improved.

<Second embodiment>
Next, a second embodiment will be described. In the first embodiment, the three-dimensional measurement is performed with the workpiece W placed directly or indirectly on the surface plate 18. In the second embodiment, three-dimensional measurement is performed while the workpiece W is held by the end effector EE. The configuration of the three-dimensional measurement system according to the second embodiment is the same as the three-dimensional measurement system 1000 according to the first embodiment, so a description of the system configuration will be omitted.

FIG. 8 shows a flowchart of the three-dimensional measurement method according to the second embodiment. As shown in FIG. 8, in the three-dimensional measuring method according to the second embodiment, step S12 and step S14 are deleted from the flowchart of the three-dimensional measuring method according to the first embodiment shown in FIG. Step S30 is added between. Since the other steps are basically the same as those in the first embodiment, a description thereof will be omitted.

Similarly to the first embodiment, in the second embodiment, when the end effector EE holds the workpiece W (step S10), the workpiece W and the temperature sensor 57 come into contact, and the temperature detection means 55 detects the temperature of the workpiece W. (Step S20). Since the temperature detection means 57 can automatically start detecting the temperature of the workpiece W at the timing when the end effector EE holds the workpiece W, this step is a step of manually attaching a sensor for detecting the temperature of the workpiece W to the robot arm 50 or the like. can be omitted.

After the start of temperature detection (step S20), in parallel with steps S11 to S19, the detection result of the temperature of the workpiece W is sent from the temperature detection means 55 to the central control device at fixed time intervals, at irregular time intervals, or in real time. It is output (transferred) to 70.

When the workpiece W is carried into the coordinate measuring machine 1 (step S11), the workpiece W is placed at a predetermined measurement position within the measurement space. In the case of the second embodiment, the workpiece W is set in a predetermined posture while being held by the end effector EE (step S30: placement step). In the second embodiment as well, similarly to the first embodiment, the temperature of the workpiece W is detected during the period from when the workpiece W is held (step S11) to when the posture of the workpiece W is determined (step S30).

Here, if the temperature detection result from the temperature detection means 55 is not output in real time to the overall control device 70, after the posture of the workpiece W is set in step S30, for example, a signal may be sent from the overall control device 70 to the temperature detection means 55 instructing it to output the temperature detection result.

After step S30, while the workpiece W is held by the end effector EE, the temperature of the workpiece W is determined (step S13), three-dimensional measurement (step S15), and correction (step S16) as in the first embodiment. I do. In the second embodiment, as in the first embodiment, the temperature is determined while the workpiece W is being held, so that the workpiece W that does not meet the temperature conditions can be immediately removed from the It can be carried out from the original measuring machine 1.

In the second embodiment, the step of directly or indirectly placing the workpiece W on the surface plate 18 (step S12 in FIG. 7), and the step of retracting the robot arm 50 before performing three-dimensional measurement (see FIG. Since step S14) of No. 7 is omitted, the efficiency of three-dimensional measurement can be further improved.

In addition, in the second embodiment, temperature detection, three-dimensional measurement, and measurement result correction are performed while the workpiece W is held by the end effector EE, so the time lag between temperature detection and measurement result correction ( time difference) can be shortened. Thereby, the measurement results of the three-dimensional measurement can be temperature-corrected with high accuracy.

Note that when the temperature detection means 55 detects the temperature in real time, the correction is performed based on the temperature detection result output from the temperature detection means 55 in real time (step S22) instead of the temperature detection result output in step S21. The means 71 may correct the measurement results of the three-dimensional measurement in real time (step S16). Thereby, the accuracy of three-dimensional measurement can be further improved.

Furthermore, if it is necessary to change the posture of the workpiece W when performing three-dimensional measurement, in the second embodiment, the three-dimensional measurement is performed while the workpiece W is being held, so the posture of the workpiece W can be changed in the first embodiment. It can be changed more easily than the form. For example, the posture of the workpiece W can be changed by rotating the end effector EE parallel to the XZ plane while holding the workpiece W with the end effector EE.

Furthermore, in the second embodiment, three-dimensional measurement is performed with the workpiece held by the end effector EE of the robot arm 50, so there is no need to prepare a measurement jig for each posture of the workpiece W. Therefore, the efficiency of three-dimensional measurement can be further improved.

<Modification of the second embodiment>
In the second embodiment, similarly to the modified example of the first embodiment, if it is known in advance that the workpiece W satisfies a predetermined temperature condition, steps S13 and S23 in Fig. 8 may be omitted, thereby further improving the efficiency of the three-dimensional measurement.

<Third embodiment>
Next, a third embodiment will be described. In the first and second embodiments, the workpiece W determined in temperature determination to not satisfy the temperature condition is moved from the coordinate measuring machine 1, but the location to which the workpiece W is moved is not particularly described. In the third embodiment, as an example, the workpiece W determined not to satisfy the temperature conditions in the second embodiment is moved to a temperature conditioning area.

In the third embodiment, a work stocker for storing workpieces W and a place (temperature acclimatization place) for temporarily storing workpieces W that do not meet predetermined temperature conditions are provided in advance in the vicinity of the three-dimensional measurement system 1000. (Illustrated). The configuration of the three-dimensional measurement system according to the third embodiment is the same as the three-dimensional measurement system 1000 according to the first embodiment, so the description of the system configuration will be omitted.

FIG. 9 shows a flowchart of a three-dimensional measurement method according to the third embodiment. As shown in FIG. 9, in the third embodiment, step S23 is changed to step S40, and step S19 is changed to step S41 and step S42 in the flowchart of the three-dimensional measurement method according to the second embodiment shown in FIG. . Since the other steps are basically the same as those in the second embodiment, their explanation will be omitted.

In the third embodiment, when it is determined that the detection result of the temperature of the workpiece W does not satisfy the predetermined temperature condition (NO in step S13), the workpiece W held by the end effector EE is moved to a temperature acclimation area. (Step S40: Export step). Next, it is determined whether there is another work in the work stocker (step S41). If it is determined that there is another workpiece in the workpiece stocker (YES in step S41), the process returns to step S10 and processes from step S10 onward are performed for another workpiece W in the workpiece stocker.

If it is determined that there is no other work in the work stocker (NO in step S41), proceed to step S42 and determine whether there is another work in the temperature acclimation area. If it is determined that there is another work in the temperature acclimation area (YES in step S42), return to step S10 and perform the processing from step S10 onwards for the other work W in the temperature acclimation area. If it is determined that there is no other work in the temperature acclimation area (YES in step S42), end the processing.

Naturally, the third embodiment can obtain the same effects as the second embodiment. Further, in the third embodiment, the workpiece W determined not to satisfy the predetermined temperature condition is temporarily moved to a temperature acclimation area in step S23. Then, after three-dimensional measurement is performed on another workpiece W acquired by the workpiece stocker, three-dimensional measurement is performed on the workpiece W that has been warmed up (temperature-seasoned) in the temperature-seasoning field. Thereby, the operating rate of the three-dimensional measuring machine 1 can be increased.

<Modification of third embodiment>
In the third embodiment, a case has been described in which the temperature run-in field is applied to the three-dimensional measurement method according to the second embodiment, but it goes without saying that the temperature run-in field can also be applied to the three-dimensional measurement method according to the first embodiment. is also possible. Even in the modification of the third embodiment, the operating rate of the three-dimensional measuring machine 1 can be increased.

<Fourth embodiment>
Next, a fourth embodiment will be described. FIG. 10 shows a schematic configuration of a three-dimensional measurement system 2000 according to the fourth embodiment. In the three-dimensional measurement system 1000 according to the first to third embodiments and their modifications, the robot base 52 of the robot arm device 100 is arranged outside the surface plate 18.

On the other hand, as shown in FIG. 10, in the fourth embodiment, instead of the robot base 52 disposed outside the surface plate 18, the robot arm device 200 has a robot base 53 disposed on the surface plate 18. Equipped with. The other configurations are the same as those of the three-dimensional measurement system according to the first embodiment, so descriptions thereof will be omitted. Since the robot base 52 is placed on the surface plate 18, the robot arm device 200 is preferably relatively small.

Naturally, also in the fourth embodiment, since the three-dimensional measurement system 2000 includes the temperature detection means 55 and the correction means 71, it is possible to obtain the same effects as the first to third embodiments and their modifications. .

Further, according to the fourth embodiment, in the three-dimensional measuring system 2000 according to the fourth embodiment, the robot base 53 is placed on the surface plate 18, so the vibration system of the robot arm device 100 is connected to the three-dimensional measuring machine. The vibration system in the horizontal direction (X direction and Y direction) and vertical direction (Z direction) is the same as that of Embodiment 1, and compared to the first to third embodiments and their modifications, vibrations in the external environment (for example, This has the effect of making it less susceptible to ground vibrations).

In addition, since the robot base 53 is placed on the base plate 18, even if the position of the base plate 18 changes due to the movement of the gate, the relative position between the base plate 18 (and the measurement space G) and the workpiece W does not change significantly due to the change in the position of the base plate 18, and measurement accuracy is maintained.

In this way, according to the three-dimensional measurement system 2000 of the fourth embodiment, the robot arm device 200 can follow the change in the posture of the base plate 18, thereby reducing the effect of the change in the posture of the base plate 18 and enabling more accurate three-dimensional measurement of the workpiece W.

＜Effects＞
As described above, the temperature detection means 55 provided on the end effector EE can detect the temperature of the workpiece W held by the end effector EE, thereby eliminating the need for a user to attach a sensor for detecting the temperature of the workpiece W to the robot arm 50, etc. Also, since the temperature of the workpiece W can be measured during the time from when the workpiece W is held until when it is placed at the measurement position, the efficiency of three-dimensional measurement can be improved.

While the workpiece W is held by the end effector EE, the temperature of the workpiece W can be detected by the temperature detection means 55 provided in the end effector EE. Therefore, a workpiece that does not satisfy the predetermined temperature condition can be promptly removed from the coordinate measuring machine 1 without once removing the workpiece W from the end effector EE.

In addition, when performing three-dimensional measurement with the workpiece W held by the end effector EE, the time lag from temperature detection to correction of measurement results is shortened, so the measurement results of three-dimensional measurement can be temperature-corrected with high accuracy. be able to.

When three-dimensional measurement is performed while the workpiece W is held by the end effector EE, the temperature of the workpiece W is detected in real time by the temperature detection means 55 provided in the end effector EE, and the temperature is measured based on the temperature detected in real time. The measurement result of the three-dimensional measurement of the workpiece W can be corrected in real time by the correction means 71. Thereby, the measurement results of three-dimensional measurement can be corrected with high accuracy.

When the robot base 53 is placed on the surface plate 18, the effect of vibrations from the external environment on the workpiece W can be reduced, and the ability to follow the changes in the position of the surface plate 18 as the gate moves can be ensured. This in turn can further improve the accuracy of three-dimensional measurement.

<Others>
Although examples of the present invention have been described above, it goes without saying that the present invention is not limited to the embodiments described above, and that various modifications can be made without departing from the spirit of the present invention.

For example, in the above description, a configuration in which the correction means 71 is provided within the overall control device 70 has been described, but it goes without saying that the correction means 71 may be provided in an external device separate from the overall control device 70.

1: Coordinate measuring machine 10: Measuring machine body 12: Head 14: Beam 16: Column 18: Surface plate 20: Base 22: Probe 24: Stylus 26: Measuring head 30: Data processing device 40: Measuring machine controller 50: Robot arms 52, 53: Robot base 52a: Tip portion 55: Temperature detection means 56: Sensor controller 57: Temperature sensor 60: Robot arm controller 70: General control device 71: Correction means 100, 200: Robot arm devices 1000, 2000 : Three-dimensional measurement system A1 : First arm A2 : Second arm A3 : Third arm EE : End effector J1 : First joint part J2 : Second joint part J3 : Third joint part J4 : Fourth joint part W : work

Claims (13)

With a fixed plate,
a robot arm having an end effector for holding a workpiece to be measured and capable of varying the posture of the workpiece ;
a temperature detection means provided in the end effector for detecting a temperature of a workpiece, the temperature detection means starting to detect the temperature of the held workpiece when the workpiece is held by the robot arm;
A means for determining whether the temperature of the workpiece satisfies a temperature condition;
a probe configured to be movable relative to the surface plate, the probe performing three-dimensional measurement of the workpiece that satisfies the temperature condition while the workpiece is held by the robot arm;
A three-dimensional measuring system comprising: The temperature detection means is provided on a holding surface on which the end effector holds the workpiece.
The three-dimensional measurement system according to claim 1 . comprising a correction means for correcting the measurement result of the workpiece by the probe based on the detection result by the temperature detection means;
The three-dimensional measurement system according to claim 1 or 2 . a robot base supporting the robot arm is provided outside the surface plate;
The three-dimensional measurement system according to any one of claims 1 to 3 . a robot base supporting the robot arm is provided on the surface plate;
The three-dimensional measurement system according to any one of claims 1 to 3 . a loading step of holding a workpiece to be measured by an end effector of a robot arm and loading the workpiece;
a temperature detection step of starting to detect the temperature of the held workpiece when the workpiece is held by the robot arm by a temperature detection means provided on the end effector;
a temperature determination step of determining whether the temperature of the workpiece satisfies a predetermined temperature condition;
a measuring step of performing three-dimensional measurement of the workpiece that satisfies the temperature condition while the workpiece is held by the robot arm using a probe configured to be movable relative to the surface plate;
Three-dimensional measurement methods including. The temperature detection step is performed in the loading step,
The three-dimensional measuring method according to claim 6 . The temperature detection step is performed with the workpiece being held by the robot arm.
The three-dimensional measuring method according to claim 6 or 7 . If it is determined in the temperature determination step that the predetermined temperature condition is not satisfied, the workpiece is carried out while being held by the robot arm.
The three-dimensional measuring method according to any one of claims 6 to 8 . A correction step of correcting a measurement result of the workpiece in the measurement step based on a detection result in the temperature detection step,
The three-dimensional measuring method according to any one of claims 6 to 9 . The temperature detection step is performed in real time while the workpiece is held by the robot arm,
In the correction step, the measurement result of the workpiece in the measurement step is corrected in real time based on the detection result in the temperature detection step.
The three-dimensional measuring method according to claim 10 . a robot base that supports the robot arm is provided outside the surface plate;
The three-dimensional measuring method according to any one of claims 6 to 11 . A robot base supporting the robot arm is provided on the base plate.
The three-dimensional measuring method according to any one of claims 6 to 11 .

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