WO2020179967A1

WO2020179967A1 - Multi-vacuum deposition apparatus including plurality of moving crucibles disposed on up-and-down-moving bottom airtight closure part

Info

Publication number: WO2020179967A1
Application number: PCT/KR2019/004863
Authority: WO
Inventors: 김대일; 박경배; 조용흠; 김찬귀; 방재오; 정희진; 박수환
Original assignee: 주식회사 넵시스
Priority date: 2019-03-05
Filing date: 2019-04-23
Publication date: 2020-09-10
Also published as: KR20200106654A

Abstract

A multi-vacuum deposition apparatus comprises a chamber which has an inner space formed therein and includes a detachable and up-and-down-moving bottom airtight closure part at the bottom thereof. A plurality of crucible parts radially moves along the inner surface of the bottom airtight closure part of the chamber.

Description

Multiple vacuum evaporation device with multiple moving crucibles on the floor sealing part of the elevation

The present invention relates to a vacuum deposition apparatus, and more particularly, to a multiple vacuum deposition apparatus capable of depositing a plurality of substrates at the same time by having a plurality of moving crucibles.

The vacuum deposition apparatus is an apparatus for coating a substrate such as a glass panel with a deposition material in a chamber in a vacuum state, and may evaporate the deposition material in a crucible to deposit a surface of the substrate. Atoms and molecules of the vaporized deposit form a thin film while condensing on a substrate having a relatively low temperature.

In Patent Registration No. 1760257 (Vacuum deposition apparatus and vacuum deposition method for glass products using electron beams), a rotating disk is installed on the upper side of the chamber, and a cradle for fixing the substrate to the lower end of the rotating disk is provided. A number of crucibles are rotated around a rotation axis in the lower part of the chamber.

However, although this prior art is intended to mass-produce by combining a plurality of cradles, since it focuses on selection of a crucible according to a type or size, the efficiency may be inferior to use for simultaneously depositing a plurality of substrates.

The present invention is to solve the problems of the prior art,

First, it is possible to increase production efficiency by depositing multiple large substrates simultaneously,

Second, the crucible can be varied by optimizing the deposition conditions of the substrate so that the deposited material is effectively deposited on the substrate,

Third, it is intended to provide a multi-vacuum deposition apparatus capable of selectively opening and closing a lower chamber to replace a crucible or change its position without entering the chamber.

The multiple vacuum deposition apparatus of the present invention for achieving this purpose may be configured to include a chamber, a crucible, and the like.

The chamber may have a floor sealing part that forms a space therein and is detachable and elevating below it.

The crucible portion can move radially along the inner surface of the bottom sealing portion of the chamber. The crucible portion may be provided with a plurality.

In the multiple vacuum deposition apparatus of the present invention, the crucible portion may include a dopant crucible portion and a host crucible portion. The dopant crucible portion is disposed in the center of the inner surface of the bottom sealing portion of the chamber and can move radially. The host crucible portion is radially disposed on the inner surface of the bottom sealing portion of the chamber and can move radially.

In the multi-vacuum deposition apparatus of the present invention, the crucible part may be composed of a crucible, a rail part, a transfer part, an outer shaft rotation part, and the like.

Crucibles can contain deposits and produce vaporized deposits.

The rail portion is provided on the inner surface of the bottom sealing portion to guide the crucible horizontally in a radial direction.

The conveying unit can move the crucible along the rail unit.

The outer rotating shaft portion may be coupled through the bottom sealing portion of the chamber. One side of the outer rotating shaft part may be coupled to one side of the transfer part to support one side of the transfer part so as to be capable of axial rotation. The other side of the outer rotating shaft part may be coupled to the bottom sealing part to shield the interior of the chamber in a vacuum state.

In the multi-vacuum deposition apparatus of the present invention, the crucible unit may include a crucible shutter for opening and closing an upper opening of the crucible and a shutter rotation unit for rotating the crucible shutter.

In the multi-vacuum deposition apparatus of the present invention, the outer rotating shaft portion may be configured to be manually operated in combination with a worm gear.

In the multi-vacuum deposition apparatus of the present invention, the crucible conveying unit may include a crucible support, a first arm, an inner rotating shaft part, and a second arm.

One side of the crucible stand may be coupled to the crucible and the other side may be coupled to the rail unit.

One side of the first arm is coupled to the crucible stand and can move horizontally.

One side of the inner rotation shaft part may be coupled to the first arm to rotate the other side of the first arm.

One side of the second arm is coupled to the inner rotary shaft and the other is coupled to the outer rotary shaft, so that the inner rotary shaft is horizontally moved while rotating around the outer rotary shaft.

The multiple vacuum deposition apparatus of the present invention may include a dome portion, a revolving portion, a rotating portion, and the like.

The dome portion may be provided on the upper side of the chamber and may have a plurality of deposition material passage holes.

One side of the revolving portion is coupled to the upper outer side of the chamber and the other side is coupled to the dome portion inside the chamber, so that the dome portion can be lifted and rotated.

One side of the rotating unit may be coupled to the other side of the revolving unit to rotate and tilt, and the other side may support and rotate the substrate outside or inside the deposition material passage hole. The rotating part may be provided with a plurality.

According to the multi-vacuum deposition apparatus of the present invention having such a configuration, a plurality of rotating parts and a plurality of crucible parts are provided so that a plurality of substrates can be simultaneously deposited, thereby enabling high-efficiency mass production.

According to the multiple vacuum deposition apparatus of the present invention, it is possible to optimize the position and direction of the crucible and the substrate through the revolution of the revolving portion, the tilting and rotation of the rotating portion, and the radial horizontal movement of the crucible portion. Evaporation efficiency can be greatly increased.

According to the multiple vacuum deposition apparatus of the present invention, since the lower part of the chamber can be selectively lifted and opened and closed, it is easy to replace the crucible or change the position without entering the chamber.

In addition, according to the multi-vacuum deposition apparatus of the present invention, it is possible to secure work safety in crucible management, to manage contamination inside the chamber, and furthermore, work convenience is increased, and the crucible replacement time can be significantly reduced.

1,2 is a cross-sectional view showing a multiple vacuum deposition apparatus according to the present invention.

3 is a perspective view showing a revolving part and a rotating part of a multiple vacuum deposition apparatus according to the present invention.

4 is a plan view showing a crucible in a multiple vacuum deposition apparatus according to the present invention.

5 is an oblique view showing a crucible transfer unit in a multiple vacuum deposition apparatus according to the present invention.

6 is a cross-sectional view showing a rotating shaft portion of a crucible conveying unit in a multiple vacuum deposition apparatus according to the present invention.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1,2, the multiple vacuum deposition apparatus of the present invention may include a chamber 100, a dome 200, an orbit 300, a rotating part 400, a crucible part 500, and the like. have.

The chamber 100 may form a closed space therein. The chamber 100 may be composed of a chamber body 110, a bottom sealing part 120, a sealing ring 130, and the like.

The chamber body 110 may have a cylindrical shape in which a space is formed therein and a lower portion is opened. The chamber body 110 may be provided with a vacuum pump (not shown) on one side for making the inside of the chamber 100 into a vacuum or maintaining a constant atmospheric pressure. The vacuum pump (not shown) may be connected to an exhaust port (not shown) formed on one side wall or an upper wall of the chamber body 110. The chamber body 110 may include a door (not shown) through which a substrate or the like enters and exits on a side wall.

The bottom sealing portion 120 may selectively open and close the lower opening of the chamber body 110 while elevating. The bottom sealing part 120 may be configured in a disc shape. The bottom sealing part 120 may support the crucible part 500 on the upper surface.

The sealing ring 130 may be provided on an upper surface of the edge of the bottom sealing portion 120 to seal between the chamber body 110 and the bottom sealing portion 120.

The dome part 200 may be provided on the upper side of the chamber 100 and may be configured to separate and close the upper side of the chamber 100 in a vertical direction. The dome part 200 may have a shape in which the center is recessed upward. The dome part 200 may rotate by being coupled to the revolving part 300. The dome part 200 may move up and down together with the orbit part 300, that is, it may be elevated. The dome part 200 may include a plurality of deposition material passing holes H.

The dome part 200 limits the moving space of the vaporized deposit to prevent the vaporized deposit from scattering over the entire inner wall of the chamber 100, and also, due to the revolution, a eddy air flow is generated under the dome part 200, resulting in vaporization. The deposited material may be evenly distributed under the dome part 200.

One side of the revolving part 300 may be coupled to the upper outer side of the chamber 100 and the other side may be inserted into the inner space of the chamber 100 through the upper wall of the chamber 100. The revolving part 300 may include an revolving part shaft 310, an revolving part driving part 320, a revolving part frame 330, and the like.

The revolving part shaft 310 may penetrate the upper wall of the chamber 100 and extend into the inner space of the chamber 100. The revolving part shaft 310 may have an inner end coupled to the dome part 200 to support and rotate the dome part 200. The revolving part shaft 310 may move the dome part 200 up and down while moving up and down.

The revolving unit driving unit 320 may rotate and/or elevate the revolving unit shaft 310.

The revolving part frame 330 may be vertically or horizontally coupled to the revolving part shaft 310 in the inner space of the chamber 100. The revolving part frame 330 may couple and support a plurality of rotating parts 400 at an edge. The revolving part frame 330 may rotate along with the rotation of the revolving part shaft 310 and rotate the revolving part 400 around the revolving part shaft 310, ie, revolve. The revolving part frame 330 may individually tilt the rotating part 400 coupled to the edge.

The rotating part 400 supports and rotates the substrate and may be located outside the deposition material passage hole H. The rotating part 400 may be symmetrically coupled to the edge of the rotating part frame 330. The rotating part 400 may rotate together with the dome part 200 according to the rotation of the orbit frame 330, that is, it may orbit.

The rotating part 400 may include a rotating part main body 410, a substrate fixing part 420, and the like.

One side of the rotating part main body 410 may be tiltably coupled to the rotating part frame 330.

The substrate fixing part 420 may be coupled to the other side of the rotating body 410 to support and fix the substrate. The substrate fixing part 420 may rotate the substrate while rotating. The substrate fixing part 420 may be located outside the deposition material passing hole H or may be inserted into the deposition material passing hole H if necessary.

When a plurality of rotating parts 400 are provided, each rotating part 400 may be individually controlled, that is, tilted and rotated.

The crucible part 500 may vaporize the deposited material in the chamber 100 and supply it in the downward direction of the dome part 200. The vaporized deposition material may pass through the deposition material passage hole H of the dome part 200 and may be deposited on the surface of the substrate fixed to the substrate fixing part 420.

The crucible part 500 includes a crucible 510, a rail part 520, a crucible transfer part 530, and the like, so that the crucible 510 is formed along the inner surface of the bottom sealing part 120 in the chamber 100. Can be moved horizontally. The crucible part 500 may include a plurality of crucibles 510.

The crucible part 500 may horizontally move the crucible 510 along the rail part 520 and adjust the position of the crucible 510 so that vaporized deposits are optimally deposited on the substrate surface.

The crucible part 500 will be described in detail later with reference to FIGS. 3 to 5.

In the multiple deposition apparatus of the present invention having such a configuration, the method of replacing the crucible is, first, the vacuum in the chamber 100 is destroyed, and the bottom sealing portion 120 of the chamber 100 is lowered. Thereafter, the crucible 510 may be moved to the outside and then replaced.

Thereafter, after moving the replaced crucible 510 to the process position, the bottom sealing portion 120 of the chamber 100 is raised. When the bottom sealing part 120 rises, the chamber 100 is shielded from the outside, and then the inside of the chamber 100 is made into a vacuum, and then the deposition process may be performed.

The multi-deposition apparatus of the present invention having such a configuration can enable a large-sized evaporation apparatus to be implemented by a worker directly entering and working.

As shown in Figure 3, the revolving unit frame 330 is coupled to the revolving unit shaft 310, can be lifted and rotated together according to the elevating and rotating of the revolving unit shaft 310, and can be configured in a plate shape. I can.

The rotating part 400 may include a rotating part main body 410, a substrate fixing part 420, a hood 430, and the like.

A plurality of the rotating part body 410 may be provided to be symmetrical along the edge of the rotating part shaft 330. A tilting shaft 340 is provided at an edge end of the revolving part frame 330, and the upper side of the rotating part body 410 may be coupled to the tilting shaft 340 to rotate, that is, tilt.

The substrate fixing part 420 may be provided under the rotating part 400 to support and fix the substrate.

The hood 430 is coupled along the edge of the substrate fixing part 420, and when the substrate fixing part 420 is located outside the deposition material passing hole H, vaporization rising in the direction of the deposition material passing hole H It is possible to block the deposition material from moving to the upper side of the dome 200 by passing through the deposition material passage hole (H). Through this, it is possible to block or minimize waste of the vaporized deposit without being deposited on the substrate.

As shown in FIG. 4, the crucible part 500 may include a host crucible 511, a dopant crucible 513, and the like.

Host crucibles 511 are spaced a predetermined distance from the center of the inner surface of the bottom sealing portion 120 may be arranged radially. The host crucible 511 is supported by the host pedestal 531 and may horizontally move radially along the host rail part 521.

The dopant crucible 513 may be located at the center of the inner surface of the bottom sealing part 120. The dopant crucible 513 is supported by the dopant pedestal 533 and may move radially along the dopant rail part 523.

As shown in FIG. 4, the crucible part 500 may have a structure in which one dopant crucible 513 is radially surrounded by a plurality of host crucibles 511.

5, the host crucible part includes a host crucible 511, a crucible shutter 512, a host rotating part 514, a host rail part 521, a conveying part 530, an outer rotating shaft part 538, etc. It can be configured.

The host crucible 511 may contain a host deposition material therein. The host crucible 511 may be provided with a heating wire to vaporize the host deposit. The vaporized host deposit is discharged through the upper opening and can move to the substrate.

The crucible shutter 512 may selectively open and close the upper opening of the host crucible 511 while rotating horizontally from the upper side of the host crucible 511.

The shutter rotation unit 514 may be provided with a motor or the like to selectively rotate the crucible shutter 512.

The host rail part 521 may be radially disposed on the inner surface of the bottom sealing part 120 to guide the radially horizontal movement of the host crucible 511. The host rail part 521 may be coupled to the lower side of the host cradle 531 supporting the host crucible 511 to guide the host cradle 531.

The transfer unit 530 is to radially move the host crucible 511 along the host rail unit 521, and the host pedestal 531, the first arm 532, the inner rotating shaft part 534, the second arm 536 ), etc.

The host pedestal 531 may support the host crucible 511 on the upper side and move horizontally by being coupled to the host rail unit 521 on the lower side.

One side of the first arm 532 may be coupled to the host pedestal 531 and the other side may be coupled to the inner rotation shaft portion 534. The first arm 532 may horizontally move the host pedestal 531 while horizontally moving according to the axial rotation of the inner rotational shaft 534.

The inner rotation shaft portion 534 may be coupled between the first arm 532 and the second arm 536 to convert the horizontal movement of the second arm 536 into a horizontal movement of the first arm 532.

One side of the second arm 536 may be coupled to the inner rotation shaft portion 534 and the other side may be coupled to the outer rotation shaft portion 538. The second arm 536 axially rotates the inner rotary shaft 534 while rotating around the outer rotary shaft 538, and as a result, the first arm 532 axially coupled to the inner rotary shaft 534 It can be moved horizontally.

The outer rotation shaft part 538 may be exposed to the outside of the chamber 100 by having an upper side coupled to the second arm 536 and a lower side passing through the bottom sealing part 120. The outer rotating shaft part 538 may vacuum shield the inside of the chamber 100 by combining the outer surface with the bottom sealing part 120. An external drive unit for rotating the second arm 536 may be coupled to a lower side of the outer rotation shaft part 538. The external drive may use a rotation motor, a worm gear, or the like. The worm gear may be useful when the outer rotation shaft part 538 is manually axially rotated.

5 illustrates the host crucible 511, but the configuration of the transfer unit of FIG. 5 can be applied to the transfer of the dopant crucible 513 in the same manner.

As shown in FIG. 6, the outer rotating shaft portion 538 of FIG. 5 may include a shaft sealing portion 10, a magnetic fluid 20, a bearing portion 30, and the like.

The shaft sealing portion 10 may be sealedly coupled to the bottom sealing portion 120 while passing through the bottom sealing portion 120.

The magnetic fluid 20 is inserted between the shaft seal 10 and the second arm 536 to vacuum shield the interior of the chamber 100 and the second arm 536 when the second arm 536 rotates. I can.

The bearing part 30 is coupled to the shaft sealing part 10 on one side and the second arm 536 on the other side to allow the second arm 536 to slide smoothly with respect to the shaft sealing part 10. have.

The utility 600 includes a power line, a signal line, a coolant, and the like, and these may be connected to the shutter rotation unit 514 or the like through the inside of the outer rotation shaft unit 538.

The configuration of the outer rotation shaft part 538 shown in FIG. 6 can be similarly applied to the inner rotation shaft part 534, in this case, the shaft seal part 10 is coupled to the second arm 536, and the magnetic fluid ( 20) and the bearing unit 30 may be coupled between the second arm 536 and the first arm 532.

The present invention has been described above based on several embodiments, but this is for illustrating the present invention. Those skilled in the art will be able to variously change or modify these embodiments. However, since the scope of the present invention is defined by the claims below, such changes or modifications can be interpreted as being included in the scope of the present invention.

[Explanation of code]

100: chamber 110: chamber body

120: chamber bottom sealing portion 130: sealing ring

200: dome part 300: revolution part

310: idle shaft 320: idle drive unit

330: revolution part frame 340: tilting axis

400: rotating part 410: rotating part main body

420: substrate fixing portion 430: hood

500: crucible part 510: crucible

511: host crucible 512: crucible shutter

513: dopant crucible 514: shutter rotating part

520: rail part 521: host rail part

523: dopant rail part 530: transfer part

531: host pedestal 532: first arm

533: dopant support 534: inner rotating shaft portion

536: second arm 538: outer rotating shaft portion

600: utility 10: shaft seal

20: magnetic fluid 30: bearing part

H: Through hole for deposit

Claims

In the vacuum deposition apparatus,

A chamber formed with a space therein and provided with a bottom sealing portion that is detachable and elevating below;

A multi-vacuum deposition apparatus having a plurality of moving crucibles in the elevated floor sealing portion, including a plurality of crucibles moving radially along the inner surface of the bottom sealing portion of the chamber.
The method of claim 1, wherein the crucible part

A dopant crucible part disposed in the center of the inner surface of the bottom sealing part and moving radially;

A multi-vacuum deposition apparatus having a plurality of moving crucibles on the floor sealing portion to be elevated and including a plurality of host crucibles disposed radially on the inner surface of the bottom sealing portion and moving radially.
The method of claim 2, wherein the crucible part

A crucible containing a deposit;

A rail part provided on an inner surface of the bottom sealing part to radially horizontally guide the crucible;

A transfer part for moving the crucible along the rail part;

It is coupled through the bottom sealing part of the chamber, one side is coupled to one side of the transfer unit to support one side of the transfer unit so as to be axially rotatable, and the other side is coupled to the bottom sealing unit to shield the inside of the chamber in a vacuum state. A multi-vacuum deposition apparatus having a plurality of moving crucibles on a bottom sealing portion that rises and falls, including an outer rotating shaft portion.
The method of claim 3, wherein the crucible part

A crucible shutter for opening and closing the upper opening of the crucible;

Multiple vacuum evaporation apparatus having a plurality of moving crucibles in a bottom sealing portion for elevating and descending, including a shutter rotation unit for rotating the crucible shutter.
The method of claim 3,

The outer rotary shaft portion is coupled to the worm gear and can be manually operated, the multiple vacuum deposition apparatus having a plurality of moving crucibles on the elevating floor sealing portion.
The method of claim 3, wherein the crucible transfer unit

One side is coupled to the crucible and the other side is a crucible support coupled to the rail unit;

A first arm having one side coupled to the crucible support and moving horizontally;

An inner rotation shaft portion having one side coupled to the first arm to rotate the other side of the first arm;

A plurality of moving crucibles on the bottom sealing part for ascending and descending, including a second arm that is coupled to the inner rotation shaft part on one side and the outer rotation shaft part on the other side to horizontally move the inner rotation shaft part while axially rotating around the outer rotation shaft part Multiple vacuum deposition apparatus having a.
The method according to any one of claims 1 to 6,

A dome portion provided on the upper side of the chamber and having a plurality of deposition material passage holes;

One side is coupled to the upper and outer side of the chamber and the other side is coupled to the dome portion in the interior of the chamber to lift and rotate the dome portion;

One side is coupled to the other side of the revolving part to revolve and tilt, and the other side has a plurality of moving crucibles in the elevating floor sealing part including a plurality of rotating parts supporting and rotating the substrate outside or inside the deposit passage hole. Multiple vacuum deposition equipment.