WO2020177375A1 - 炉压异常的处理方法、设备及存储介质 - Google Patents

炉压异常的处理方法、设备及存储介质 Download PDF

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Publication number
WO2020177375A1
WO2020177375A1 PCT/CN2019/117201 CN2019117201W WO2020177375A1 WO 2020177375 A1 WO2020177375 A1 WO 2020177375A1 CN 2019117201 W CN2019117201 W CN 2019117201W WO 2020177375 A1 WO2020177375 A1 WO 2020177375A1
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WIPO (PCT)
Prior art keywords
furnace
pressure
pressure threshold
preset
preset pressure
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Ceased
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PCT/CN2019/117201
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English (en)
French (fr)
Inventor
赵会刚
周锐
李侨
徐战军
王正远
张伟建
刘永生
武高峰
郭力
赵阳
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Longi Green Energy Technology Co Ltd
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Longi Green Energy Technology Co Ltd
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Publication of WO2020177375A1 publication Critical patent/WO2020177375A1/zh
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/2026—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means with a plurality of throttling means
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means

Definitions

  • the disclosure of this application relates to the field of single crystal furnace control systems, and in particular to a method, equipment and storage medium for processing abnormal furnace pressure.
  • the Czochralski method is one of the methods for preparing single crystal silicon.
  • an inert gas needs to be introduced into the furnace body of the single crystal furnace to ensure that the crystalline silicon is in an inert environment. Grow.
  • the existing furnace pressure detection and processing system can automatically detect the pressure in the furnace body.
  • the control system adjusts the opening of the throttle valve of the single crystal furnace to make the furnace pressure in the furnace body Maintain the pressure range required for normal crystal growth.
  • the embodiments of the present disclosure provide a method, equipment, and storage medium for processing furnace pressure abnormalities, which can classify furnace pressure abnormalities, and perform corresponding furnace pressure adjustment processing and alarm processing for different abnormal situations.
  • the technical solution is as follows:
  • a method for processing abnormal furnace pressure including:
  • the abnormal furnace pressure can be classified, and the corresponding furnace pressure adjustment treatment can be carried out for different abnormal conditions.
  • corresponding alarm prompts are set for different abnormal conditions, and manual confirmation is reminded in time. Operators should keep abreast of the abnormal conditions of the single crystal furnace in time to improve monitoring efficiency.
  • the at least one preset pressure threshold includes: a first preset pressure threshold and a second preset pressure threshold, and the first preset pressure threshold is less than the second preset pressure threshold;
  • the comparison result of the current furnace pressure with at least one preset pressure threshold includes: the current furnace pressure is less than the first pressure preset threshold, the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold, and the current furnace pressure Greater than or equal to the second preset pressure threshold.
  • executing corresponding furnace pressure adjustment processing and alarm processing according to the comparison result includes:
  • the intake valve is controlled to close and the outlet valve is opened, the throttle valve opening is adjusted to the maximum, and the third alarm is triggered.
  • Methods when the furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold, after adjusting the opening of the throttle valve and triggering the first alarm prompt, Methods also include:
  • the opening of the throttle valve is adjusted and the alarm prompt is turned off.
  • the at least one preset pressure threshold further includes:
  • a third preset pressure threshold, the second preset pressure threshold is less than the third preset pressure threshold
  • the comparison result of the current furnace pressure and the at least one preset pressure threshold further includes: the current furnace pressure is greater than or equal to the second preset pressure threshold and less than the third preset pressure threshold, and the current furnace pressure is greater than or equal to the third preset pressure threshold.
  • executing corresponding furnace pressure adjustment processing and alarm processing according to the comparison result further includes:
  • control the inlet valve to close and the outlet valve to open adjust the throttle valve opening to the maximum, control the crucible in the single crystal furnace to drop, and trigger the fourth alarm prompt.
  • the method before obtaining the current furnace pressure in the single crystal furnace body, the method further includes:
  • Obtaining the furnace pressure in the single crystal furnace body includes: obtaining the current furnace pressure in the single crystal furnace body when the air extraction device is turned on.
  • the inlet valve and the outlet valve of the single crystal furnace are controlled to be in a closed state.
  • a device for treating abnormal furnace pressure including:
  • the obtaining module is configured to obtain the current furnace pressure in the furnace body of the single crystal furnace
  • a determining module configured to compare the current furnace pressure with at least one preset pressure threshold to obtain a comparison result
  • the processing module is configured to perform corresponding furnace pressure adjustment processing and alarm processing according to the comparison result.
  • the at least one preset pressure threshold includes: a first preset pressure threshold and a second preset pressure threshold, and the first preset pressure threshold is less than the second preset pressure threshold;
  • the comparison result of the current furnace pressure with at least one preset pressure threshold includes: the current furnace pressure is less than the first pressure preset threshold, the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold, and the current furnace pressure Greater than or equal to the second preset pressure threshold.
  • the processing module is configured to adjust the opening of the throttle valve when the current furnace pressure is less than the first preset pressure threshold
  • a processing module configured to adjust the opening of the throttle valve and trigger a first alarm when the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold;
  • the processing module is configured to, when the current furnace pressure is greater than or equal to the second preset pressure threshold, control the inlet valve to close and the outlet valve to open, adjust the throttle valve opening to the maximum, and trigger a third alarm prompt.
  • the device for processing abnormal furnace pressure further includes: a judgment module;
  • the judgment module is configured to judge whether the alarm duration of the first alarm prompt exceeds a preset time threshold
  • the processing module is configured to adjust the throttle valve opening to the maximum and trigger the second alarm when the alarm duration exceeds the preset time threshold and the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold prompt;
  • the processing module is configured to adjust the opening of the throttle valve and close the alarm prompt when the alarm duration exceeds the preset alarm time and the current furnace pressure is less than the first preset pressure threshold.
  • the at least one preset pressure threshold further includes: a third preset pressure threshold, and the second preset pressure threshold is less than the third preset pressure threshold;
  • the comparison result between the current furnace pressure and the at least one preset pressure threshold further includes: the current furnace pressure is greater than or equal to the second preset pressure threshold and less than the third preset pressure threshold, and the current furnace pressure is greater than or equal to the third preset pressure threshold.
  • the processing module is configured to control the inlet valve to close and the outlet valve to open when the current furnace pressure is greater than or equal to the second preset pressure threshold and less than the third preset pressure threshold , Adjust the throttle valve opening to the maximum and trigger the third alarm prompt;
  • the processing module is configured to, when the current furnace pressure is greater than or equal to the third preset pressure threshold, control the inlet valve to close and the outlet valve to open, adjust the throttle valve opening to the maximum, control the crucible in the single crystal furnace to drop, and trigger the first Four alarm prompts.
  • the device for processing abnormal furnace pressure further includes: a detection module;
  • the detection module is configured to detect whether the furnace body heater of the single crystal furnace is turned on and whether the single crystal furnace is in a non-stop state;
  • the detection module is configured to detect whether the air extraction device of the single crystal furnace is turned on when the furnace body heater of the single crystal furnace is turned on and the single crystal furnace is in a non-stop state;
  • the obtaining module is configured to obtain the current furnace pressure in the furnace body of the single crystal furnace when the air extraction device is turned on.
  • the acquisition module is configured to acquire the current furnace pressure in the furnace body of the single crystal furnace through the furnace pressure detection sensor.
  • a processing device for abnormal furnace pressure includes a processor and a memory.
  • the memory stores at least one computer instruction, and the instruction is loaded and executed by the processor to achieve The first aspect and the steps performed in the method for processing an abnormal furnace pressure described in any embodiment of the first aspect.
  • a computer-readable storage medium is provided, and at least one computer instruction is stored in the storage medium, and the instruction is loaded and executed by a processor to implement the first aspect and any embodiment of the first aspect The steps performed in the described processing method for abnormal furnace pressure.
  • a computer program including computer-readable code, which when the computer-readable code is run on a computing processing device, causes the computing processing device to execute according to claims 1-8 Any one of the methods for treating abnormal furnace pressure.
  • FIG. 1 is a flowchart of a method for processing abnormal furnace pressure according to an embodiment of the present disclosure
  • FIG. 2 is a schematic diagram of the structure of a single crystal furnace provided by an embodiment of the present disclosure
  • FIG. 3 is a schematic flowchart of a method for processing abnormal furnace pressure according to an embodiment of the present disclosure
  • FIG. 4 is a schematic flowchart of a method for processing abnormal furnace pressure according to an embodiment of the present disclosure
  • Figure 5 is a structural diagram of a device for treating abnormal furnace pressure provided by an embodiment of the present disclosure
  • FIG. 6 is a structural diagram of a device for treating abnormal furnace pressure provided by an embodiment of the present disclosure.
  • Figure 7 is a structural diagram of a device for treating abnormal furnace pressure provided by an embodiment of the present disclosure.
  • Fig. 8 is a structural diagram of a device for treating abnormal furnace pressure provided by an embodiment of the present disclosure.
  • the embodiment of the present disclosure provides a method for processing abnormal furnace pressure. As shown in FIG. 1, the method for processing abnormal furnace pressure includes the following steps:
  • obtaining the furnace pressure in the single crystal furnace body includes: receiving the current furnace pressure in the single crystal furnace body sent by the furnace pressure detection device.
  • the furnace pressure detection equipment can be a pressure sensor, a pressure measuring instrument, etc.
  • the furnace pressure detection equipment can be set in the exhaust pipe, intake pipe, and single crystal furnace shell of the single crystal furnace, as long as it can detect the pressure in the furnace body. .
  • the at least one preset pressure threshold includes a first preset pressure threshold and a second preset pressure threshold, and the first preset pressure threshold is less than the second preset pressure threshold. Then, comparing the current furnace pressure with at least one preset pressure threshold, and obtaining the comparison result includes: comparing the current furnace pressure with the first preset pressure threshold and the second preset pressure threshold. Therefore, the current furnace pressure is
  • the comparison result of at least one preset pressure threshold includes three situations:
  • A1 The current furnace pressure is less than the first preset pressure threshold
  • A2 The current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold;
  • A3 The current furnace pressure is greater than or equal to the second preset pressure threshold.
  • the at least one preset pressure threshold includes a first preset pressure threshold, a second preset pressure threshold, and a third preset pressure threshold.
  • the first preset pressure threshold is less than the second preset pressure threshold.
  • the second preset pressure threshold is less than the third preset pressure threshold. Then, the comparison result between the current furnace pressure and at least one preset pressure threshold includes four situations:
  • the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold
  • the current furnace pressure is greater than or equal to the second preset pressure threshold and less than the third preset pressure threshold
  • first preset pressure threshold and the second preset pressure threshold in the first example and the second example may be the same or different, depending on the crystal growth process, crystal quality requirements, and different single crystals.
  • the structure of the furnace body is determined comprehensively based on empirical values. Of course, multiple other pressure thresholds can also be set.
  • executing corresponding furnace pressure adjustment processing and alarm processing according to the comparison result includes:
  • the intake valve is controlled to close and the outlet valve is opened, the throttle valve opening is adjusted to the maximum, and the third alarm is triggered.
  • the alarm prompt can be different types of alarm prompt sounds, or different intensities of alarm prompt sounds, or combined with different colors of alarm lights and other methods to generate multiple different types of alarm prompts.
  • the embodiments of the present disclosure do not impose any limitation on this.
  • the first alarm determines whether the alarm duration of the first alarm prompt exceeds a preset time threshold; when the alarm duration exceeds the preset time threshold and the current furnace pressure is greater than or equal to the first preset pressure threshold and When the pressure is less than the second preset pressure threshold, adjust the throttle opening to the maximum and trigger the second alarm prompt; when the alarm duration exceeds the preset alarm time and the current furnace pressure is less than the first preset pressure threshold, adjust the throttle And turn off the alarm prompt.
  • the alarm duration By setting the alarm duration and giving a manual confirmation time, it is convenient to manually eliminate the false alarms and other faults of the equipment itself.
  • the furnace pressure in the single crystal furnace body is judged again, and the corresponding furnace has been Pressure abnormal handling adjustment.
  • executing the corresponding furnace pressure adjustment processing and alarm processing according to the comparison result includes:
  • control the inlet valve to close and the outlet valve to open adjust the throttle valve opening to the maximum, control the crucible in the single crystal furnace to drop, and trigger the fourth alarm prompt.
  • the method for processing abnormal furnace pressure obtained by the embodiment of the present disclosure obtains the current furnace pressure in the single crystal furnace body, compares the current furnace pressure with at least one preset pressure threshold, obtains the comparison result, and executes the corresponding Furnace pressure adjustment treatment.
  • the abnormal furnace pressure can be classified, and the corresponding furnace pressure adjustment treatment can be carried out for different abnormal conditions.
  • corresponding alarm prompts are set for different abnormal conditions, and manual confirmation is reminded in time. Operators should keep abreast of the abnormal conditions of the single crystal furnace in time to improve monitoring and processing efficiency.
  • FIG. 1 shows a method for processing abnormal furnace pressure.
  • FIG. 2 shows the single crystal furnace 10 used in the embodiment of the disclosure.
  • the single crystal furnace 10 includes a pulling head 11, a pulling rope 12 and a crucible 13.
  • the crucible 13 contains silicon material and is arranged at the bottom and around the crucible 13 There is a heater that heats the silicon material to form a silicon melt.
  • the seed crystal not shown in Figure 1
  • the seed crystal one end of the seed crystal is connected with the pulling rope 12, the other end is immersed in silicon melt
  • the pulling head 11 controls the pulling rope 12 to rise and pull ⁇ rod 20.
  • the shell of the single crystal furnace 10 is provided with an air inlet pipe 14 and an exhaust pipe 15, and an air inlet valve 140 is provided at the air inlet pipe 14 to control the gas entering the furnace body; an air outlet is provided at the exhaust pipe 15
  • the valve 150 and the throttle valve 151, the outlet valve 150 controls the flow of gas
  • the throttle valve 151 controls the gas flow.
  • the throttle valve can also be arranged in the intake pipe.
  • An air extraction device (not shown in FIG. 1) is also provided outside the exhaust pipe 15, and the air extraction device is in communication with the exhaust pipe 15, and the air extraction device is configured to extract the gas in the furnace body.
  • inert gas is introduced into the furnace body of the single crystal furnace 10 from the intake pipe 14 and discharged from the exhaust pipe 15.
  • the opening of the throttle valve 151 is adjusted to control the gas flow rate, thereby adjusting the pressure in the furnace body. Value to maintain the pressure in the furnace within the set range.
  • the furnace pressure abnormal processing system adopted in the embodiments of the present disclosure includes a PLC (Programmable Logic Controller) control system, a furnace pressure detector and an alarm device.
  • the PLC control system and the furnace pressure detector and alarm device signal signals respectively connection.
  • the PLC control system controls the working status of the heater, air extraction device, air inlet valve 140, air outlet valve 150, and throttle valve 151 on the furnace body.
  • the furnace pressure detector 16 adopts a pressure sensor and is arranged on the exhaust pipe 15. Of course, it can also be arranged in other parts of the single crystal furnace 10, such as the intake pipe 14, the single crystal furnace 10 furnace body shell, etc., which can detect the furnace body The pressure value is sufficient.
  • the alarm device is provided with multiple types of alarm prompts.
  • alarm prompts 3 or more different types are used for alarm prompts; of course, multi-level alarm prompts can also be provided according to the strength of the alarm prompts and display sounds, or combined with other methods , Can produce a variety of different types of alarm prompts.
  • three furnace pressure thresholds are set in the PLC control system, including: the first-level pressure threshold P1, the second-level pressure threshold P2, and the third-level pressure threshold P3, P1 ⁇ P2 ⁇ P3;
  • the comparison result of the pressure value P of the crystal furnace with the first-level pressure threshold value P1, the second-level pressure threshold value P2 and the third-level pressure threshold value P3 is handled by the control system.
  • multiple types of alarm prompts are set in the alarm device.
  • FIG. 3 a schematic flow chart of the method for treating abnormal furnace pressure provided by this embodiment. Specifically, including:
  • the PLC control system After the PLC control system is started, the PLC control system cyclically detects whether the heater is turned on and whether the single crystal furnace is in a non-stop state. When the PLC control system detects that the heater is not turned on and/or the single crystal furnace is in a shutdown state, the cycle detection continues. When the PLC control system detects that the heater is turned on and the single crystal furnace is in a non-stop state, the PLC control system detects whether the air extraction device is turned on.
  • the PLC control system When the PLC control system detects that the air extraction device is not turned on, the PLC control system controls the intake valve 140 and the air outlet valve 150 to be closed; when the PLC control system detects that the air extraction device is turned on, the PLC control system starts to determine the pressure value in the furnace in real time Compare the result of P with multiple pressure thresholds P1, P2, P3, and perform corresponding abnormality processing.
  • the PLC control system judges whether P is less than P1.
  • the corresponding abnormal treatment is that the control system automatically adjusts the throttle opening.
  • the PLC control system automatically adjusts the opening degree of the throttle valve 151, and adjusts the gas flow to adjust the pressure value in the furnace body.
  • This abnormal treatment belongs to the normal treatment of furnace body pressure during crystal growth.
  • the PLC control system judges that P is not less than P1, it is judged whether P is greater than or equal to P1 and less than P2.
  • P1 ⁇ P ⁇ P2 the corresponding abnormality processing is that the PLC control system automatically adjusts the opening of the throttle valve 151; alarm;
  • the device adopts the first-level alarm prompt and sets the alarm duration T.
  • the PLC control system judges whether the alarm duration exceeds T. If it exceeds the alarm duration T, the PLC control system judges that the pressure value P in the furnace body is still P1 ⁇ P ⁇ P2, and the corresponding abnormality treatment is that the PLC control system adjusts the throttle valve opening to the maximum , The alarm device uses a secondary alarm prompt; if the alarm duration T is exceeded, the PLC control system judges that the pressure value in the furnace body P ⁇ P1, the corresponding abnormality processing is that the PLC control system automatically adjusts the throttle valve opening and the alarm device cancels the alarm prompt. Setting the alarm duration T is convenient for the operator to confirm the abnormal situation and eliminate the faults such as false alarms in the equipment itself.
  • the PLC control system determines that P is not greater than or equal to P1 and less than P2, it determines whether P is greater than or equal to P2 and less than P3.
  • P2 ⁇ P ⁇ P3 the corresponding abnormal treatment is that the PLC control system controls the intake valve to be in the closed state, the outlet valve to be in the open state, and adjusts the throttle valve opening to the maximum.
  • the alarm device uses a three-level alarm prompt. At this time, a three-level alarm is used to alert the operator of the current furnace body abnormality.
  • the PLC control system judges that P is not greater than or equal to P2 and less than P3, it is judged whether P is greater than or equal to P3.
  • the corresponding abnormality treatment is that the PLC control system controls the intake valve to be closed and out of air.
  • the valve is in an open state, and the opening of the throttle valve is adjusted to the maximum, and the crucible is controlled to drop to separate the crystal from the silicon melt; the alarm device adopts a four-level alarm prompt. Control the crucible to drop to separate the crystal from the silicon melt, stop the crystal growth, and reduce the impact on the crystal quality.
  • the method for processing abnormal furnace pressure obtained by the embodiment of the present disclosure obtains the current furnace pressure in the single crystal furnace body, compares the current furnace pressure with at least one preset pressure threshold, obtains the comparison result, and executes the corresponding Furnace pressure adjustment treatment.
  • abnormal furnace pressure can be classified, and corresponding furnace pressure adjustments can be performed for different abnormal conditions, so that operators can understand the abnormal conditions of the single crystal furnace in time and improve the monitoring and processing efficiency.
  • another embodiment of the present disclosure provides a method for processing abnormal furnace pressure.
  • the furnace pressure detection and processing system as described in the second embodiment is adopted, and two furnace pressure thresholds are set in the PLC control system, including: the first-level pressure threshold Y1 and the second-level pressure threshold Y2, the PLC control system According to the comparison result of the pressure value P and the first-level pressure threshold Y1 and the second-level pressure threshold Y2, the PLC control system performs corresponding abnormality processing; the alarm device is based on the comparison result of the pressure value P and the first-level pressure threshold Y1 and the second-level pressure threshold Y2 , The alarm device uses the corresponding type of alarm prompt.
  • FIG. 4 it is a schematic flow chart of the method for processing abnormal furnace pressure provided by this embodiment. Specifically, including:
  • the PLC control system After the PLC control system is started, the PLC control system cyclically detects whether the heater is turned on and whether the single crystal furnace is in a non-stop state. When the PLC control system detects that the heater is not turned on and/or the single crystal furnace is in a shutdown state, the cycle detection continues. When the PLC control system detects that the heater is turned on and the single crystal furnace is in a non-stop state, the PLC control system detects whether the air extraction device is turned on.
  • the PLC control system When the PLC control system detects that the air extraction device is not turned on, the PLC control system controls the intake valve 140 and the air outlet valve 150 to be closed; when the PLC control system detects that the air extraction device is turned on, the PLC control system starts to determine the pressure value in the furnace in real time Compare the results of P with multiple pressure thresholds Y1 and Y2, and perform corresponding abnormality processing.
  • the PLC control system determines whether the furnace pressure value P is less than Y1.
  • the corresponding abnormal treatment is that the PLC control system automatically adjusts the opening of the throttle valve 151 and adjusts the gas flow to adjust the pressure value in the furnace.
  • the PLC control system judges whether the furnace pressure value P is greater than or equal to Y1 and less than Y2.
  • the corresponding abnormality treatment is that the control system automatically adjusts the throttle valve opening; the alarm device adopts a first-level alarm prompt, And set the alarm duration T.
  • the PLC control system judges that the pressure value P in the furnace body is still Y1 ⁇ P ⁇ Y2, and the corresponding abnormal treatment is that the control system adjusts the throttle opening to the maximum, and the alarm device adopts a secondary alarm prompt; After the alarm duration T is exceeded, the PLC control system judges the pressure value P in the furnace body, P ⁇ Y1, and the corresponding abnormal treatment is that the control system automatically adjusts the throttle valve opening and the alarm device cancels the alarm prompt.
  • the PLC control system judges whether the furnace pressure value P is greater than or equal to Y2.
  • the corresponding abnormal treatment is that the PLC control system controls the intake valve to be closed, the outlet valve to be open, and adjusts the throttle valve to open The temperature reaches the maximum, and the crucible is controlled to drop to separate the crystal from the silicon melt; the alarm device adopts a three-level alarm prompt.
  • the control system judges the comparison result of the value P of the pressure in the furnace with the pressure threshold, so that different abnormal situations can be processed correspondingly.
  • multi-level alarm prompts are set up to give alarm prompts for different abnormal situations and promptly remind manual confirmation.
  • the alarm duration is set, and the control system itself is used for priority processing, which is convenient for manual confirmation and eliminates the equipment's own false alarms and other faults, so as to facilitate the operator to understand the abnormal situation of the single crystal furnace in time, and improve the monitoring and processing efficiency.
  • the device 50 for processing abnormal furnace pressure includes: an acquisition module 501, a determination module 502, and a processing module 503;
  • the obtaining module 501 is configured to obtain the current furnace pressure in the furnace body of the single crystal furnace
  • the determining module 502 is configured to compare the current furnace pressure with at least one preset pressure threshold to obtain a comparison result
  • the processing module 503 is configured to execute corresponding furnace pressure adjustment processing and alarm processing according to the comparison result.
  • the at least one preset pressure threshold includes: a first preset pressure threshold and a second preset pressure threshold, the first preset pressure threshold being smaller than the second preset pressure threshold;
  • the comparison result of the current furnace pressure with at least one preset pressure threshold includes: the current furnace pressure is less than the first pressure preset threshold, the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold, and the current furnace pressure Greater than or equal to the second preset pressure threshold.
  • the processing module 503 is configured to adjust the opening of the throttle valve when the current furnace pressure is less than the first preset pressure threshold
  • the processing module 503 is configured to adjust the opening of the throttle valve and trigger the first alarm when the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold;
  • the processing module 503 is configured to, when the current furnace pressure is greater than or equal to the second preset pressure threshold, control the inlet valve to close and the outlet valve to open, adjust the throttle valve opening to the maximum, and trigger a third alarm prompt.
  • the device 50 for processing abnormal furnace pressure further includes: a judgment module 504;
  • the judging module 504 is configured to judge whether the alarm duration of the first alarm prompt exceeds a preset time threshold
  • the processing module 503 is configured to adjust the throttle valve opening to the maximum and trigger the second when the alarm duration exceeds the preset time threshold and the current furnace pressure is greater than or equal to the first preset pressure threshold and less than the second preset pressure threshold Alarm prompt;
  • the processing module 503 is configured to adjust the opening of the throttle valve and close the alarm prompt when the alarm duration exceeds the preset alarm time and the current furnace pressure is less than the first preset pressure threshold.
  • the at least one preset pressure threshold value further includes: a third preset pressure threshold value, and the second preset pressure threshold value is less than the third preset pressure threshold value;
  • the comparison result between the current furnace pressure and the at least one preset pressure threshold further includes: the current furnace pressure is greater than or equal to the second preset pressure threshold and less than the third preset pressure threshold, and the current furnace pressure is greater than or equal to the third preset pressure threshold.
  • the processing module 503 is configured to control the inlet valve to close and the outlet valve to open, and to adjust the throttle valve to open when the current furnace pressure is greater than or equal to the second preset pressure threshold and less than the third preset pressure threshold. To the maximum and trigger the third alarm prompt;
  • the processing module 503 is configured to, when the current furnace pressure is greater than or equal to the third preset pressure threshold, control the inlet valve to close and the outlet valve to open, adjust the throttle valve opening to the maximum, control the crucible in the single crystal furnace to drop and trigger The fourth alarm prompt.
  • the device 50 for processing abnormal furnace pressure further includes: a detection module 505;
  • the detection module 505 is configured to detect whether the furnace body heater of the single crystal furnace is turned on and whether the single crystal furnace is in a non-stop state;
  • the detection module 505 is configured to detect whether the air extraction device of the single crystal furnace is turned on when the furnace body heater of the single crystal furnace is turned on and the single crystal furnace is in a non-stop state;
  • the obtaining module 501 is configured to obtain the current furnace pressure in the furnace body of the single crystal furnace when the air extraction device is turned on.
  • the obtaining module 501 is configured to obtain the current furnace pressure in the furnace body of the single crystal furnace through the furnace pressure detection sensor.
  • the device for processing abnormal furnace pressure obtained by the embodiment of the present disclosure obtains the current furnace pressure in the single crystal furnace body, compares the current furnace pressure with at least one preset pressure threshold, obtains the comparison result, and executes the corresponding Furnace pressure adjustment treatment.
  • the abnormal furnace pressure can be classified, and the corresponding furnace pressure adjustment treatment can be carried out for different abnormal conditions.
  • corresponding alarm prompts are set for different abnormal conditions, and manual confirmation is reminded in time. Operators should keep abreast of the abnormal conditions of the single crystal furnace in time to improve monitoring and processing efficiency.
  • an embodiment of the present disclosure also provides a device for processing abnormal furnace pressure.
  • the device for processing abnormal furnace pressure includes a receiver 801, a transmitter 802, a memory 803, and a processor 804.
  • the transmitter 802 and The memory 803 is respectively connected to the processor 804, and at least one computer instruction is stored in the memory 803, and the processor 804 is configured to load and execute at least one computer instruction, so as to realize the treatment of abnormal furnace pressure described in the embodiment corresponding to FIG. 1 method.
  • the embodiment of the present disclosure also provides a computer-readable storage medium.
  • the non-transitory computer-readable storage medium may be a read-only memory (English : Read Only Memory, ROM), Random Access Memory (English: Random Access Memory, RAM), CD-ROM, magnetic tape, floppy disk and optical data storage device, etc.
  • the storage medium stores at least one computer instruction configured to execute the method for processing abnormal furnace pressure described in the embodiment corresponding to FIG. 1.
  • an embodiment of the present disclosure also provides a computer program, including computer readable code, when the computer readable code runs on a computing processing device , Causing the computing and processing device to execute the method for processing abnormal furnace pressure described in the embodiment corresponding to FIG. 1 above.
  • the device embodiments described above are merely illustrative.
  • the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in One place, or it can be distributed to multiple network units.
  • Some or all of the modules can be selected according to actual needs to achieve one of the objectives of the solutions of the embodiments. Those of ordinary skill in the art can understand and implement it without creative work.
  • Each component embodiment of the present application may be implemented by hardware, or by software modules running on one or more processors, or by a combination of them.
  • a microprocessor or a digital signal processor (DSP) may be used in practice to implement some or all of the functions of some or all components in the computing processing device according to the embodiments of the present application.
  • This application can also be implemented as a device or device program (for example, a computer program and a computer program product) for executing part or all of the methods described herein.
  • Such a program for implementing the present application may be stored on a computer-readable medium, or may have the form of one or more signals. Such signals can be downloaded from Internet websites, or provided on carrier signals, or provided in any other form.
  • any reference signs placed between parentheses should not be constructed as a limitation to the claims.
  • the word “comprising” does not exclude the presence of elements or steps not listed in the claims.
  • the word “a” or “an” preceding an element does not exclude the presence of multiple such elements.
  • the application can be implemented by means of hardware including several different elements and by means of a suitably programmed computer. In the unit claims enumerating several devices, several of these devices may be embodied by the same hardware item.
  • the use of the words first, second, and third, etc. do not indicate any order. These words can be interpreted as names.

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Abstract

一种炉压异常的处理方法、设备及存储介质，涉及单晶炉控制系统领域，能够对炉压异常进行分类，并针对不同异常情况进行对应的炉压调节处理和报警处理。该方法包括获取单晶炉炉体内的当前炉压（101）；将当前炉压与至少一个预设压强阈值进行比较，获得比较结果（102）；根据比较结果执行对应的炉压调节处理和报警处理（103）。

Description

炉压异常的处理方法、设备及存储介质
本申请要求在2019年03月07日提交中国专利局、申请号为201910171265.0、发明名称为“炉压异常的处理方法、设备及存储介质”的中国专利申请的优先权，其全部内容通过引用结合在本申请中。
技术领域
本申请公开涉及单晶炉控制系统领域，尤其涉及一种炉压异常的处理方法、设备及存储介质。
背景技术
直拉单晶制造法(Czochralski，CZ法)是制备单晶硅的方法之一，在晶体硅制备过程中，需要向单晶炉的炉体内通入惰性气体，以保证晶体硅在惰性环境中生长。为了保证正常拉晶，现有的炉压检测处理系统，能够自动检测炉体内压强，当炉体内压强发生变化时，控制系统通过调节单晶炉的节流阀开度，使炉体内的炉压维持在晶体正常生长所需的压强范围内。
随着对拉晶成本降低的迫切需求，坩埚尺寸不断变大，坩埚内的容料量也越来越多，随之可能会出现一些设备异常、人为误操作等导致漏硅、埚裂等意外事故发生。在漏硅、埚裂等意外事故发生时，炉压会升高，超过晶体正常生长所需的压强范围。当节流阀调节幅度超过调节压强阈值时，现有炉压检测处理系统会进行报警处理，但是不能针对不同的炉压异常情况进行对应的异常处理，使得操作人员不能及时了解炉压异常情况以及执行对应的处理。
发明内容
本公开实施例提供一种炉压异常的处理方法、设备及存储介质，能够对炉压异常进行分类，并针对不同异常情况进行对应的炉压调节处理和报警处理。所述技术方案如下：
根据本公开实施例的第一方面，提供一种炉压异常的处理方法，该方法包括：
获取单晶炉炉体内的当前炉压；
将所述当前炉压与至少一个预设压强阈值进行比较，获得比较结果；
根据比较结果执行对应的炉压调节处理和报警处理。
通过预先设置多个压强阈值，可以将炉压异常情况进行分类，并针对不同的异常情况进行对应的炉压调节处理，同时，针对不同的异常情况设置对应的报警提示，及时提醒人工确认，以便操作人员及时了解单晶炉的异常情况，提高监控效率。
在第一方面的第一种可能实现方式中，至少一个预设压强阈值包括：第一预设压强阈值、第二预设压强阈值，第一预设压强阈值小于第二预设压强阈值；
当前炉压与至少一个预设压强阈值的比较结果包括：当前炉压小于第一压强预设阈值、当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值、当前炉压大于或等于第二预设压强阈值。
在第一方面的第二种可能实现方式中，根据比较结果执行对应的炉压调节处理和报警处理包括：
在当前炉压小于第一预设压强阈值时，调节节流阀的开度；
在当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀的开度以及触发第一报警提示；
在当前炉压大于或等于第二预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大以及触发第三报警提示。
在第一方面的第三种可能实现方式中，在炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀的开度以及触发第一报警提示之后，方法还包括：
判断第一报警提示的报警持续时间是否超过预设时间阈值；
在报警持续时间超过预设时间阈值且当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀开度至最大并触发第二报警提示；
在报警持续时间超过预设报警时间且当前炉压小于第一预设压强阈值时，调节节流阀的开度并关闭报警提示。
在第一方面的第四种可能实现方式中，至少一个预设压强阈值还包括：
第三预设压强阈值，第二预设压强阈值小于第三预设压强阈值；
当前炉压与至少一个预设压强阈值的比较结果还包括：当前炉压大于或等于第二预设压强阈值且小于第三预设压强阈值、当前炉压大于或等于第三 预设压强阈值。
在第一方面的第五种可能实现方式中，根据比较结果执行对应的炉压调节处理和报警处理还包括：
在当前炉压大于或等于第二预设压强阈值且小于第三预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大以及触发第三报警提示；
在当前炉压大于或等于第三预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大、控制单晶炉中的坩埚下降以及触发第四报警提示。
在第一方面的第六种可能实现方式中，获取单晶炉炉体内的当前炉压之前，该方法还包括：
检测单晶炉的炉体加热器是否开启以及检测单晶炉是否为非停炉状态；在单晶炉的炉体加热器开启且单晶炉为非停炉状态时，检测单晶炉的抽气装置是否开启；
获取单晶炉炉体内的炉压包括：在抽气装置开启时，获取单晶炉炉体内的当前炉压。
在第一方面的第七种可能实现方式中，在抽气装置未开启时，控制单晶炉的进气阀和出气阀处于关闭状态。
根据本公开实施例的第二方面，提供一种炉压异常的处理装置，包括：
获取模块，配置为获取单晶炉炉体内的当前炉压；
确定模块，配置为将所述当前炉压与至少一个预设压强阈值进行比较，获得比较结果；
处理模块，配置为根据比较结果执行对应的炉压调节处理和报警处理。
在第二方面的第一种可能实现方式中，至少一个预设压强阈值包括：第一预设压强阈值、第二预设压强阈值，第一预设压强阈值小于第二预设压强阈值；
当前炉压与至少一个预设压强阈值的比较结果包括：当前炉压小于第一压强预设阈值、当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值、当前炉压大于或等于第二预设压强阈值。
在第二方面的第二种可能实现方式中，
处理模块，配置为在当前炉压小于第一预设压强阈值时，调节节流阀的开度；
处理模块，配置为在当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀的开度以及触发第一报警提示；
处理模块，配置为在当前炉压大于或等于第二预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大以及触发第三报警提示。
在第二方面的第三种可能实现方式中，炉压异常的处理装置还包括：判断模块；
判断模块，配置为判断第一报警提示的报警持续时间是否超过预设时间阈值；
处理模块，配置为在报警持续时间超过预设时间阈值且当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀开度至最大并触发第二报警提示；
处理模块，配置为在报警持续时间超过预设报警时间且当前炉压小于第一预设压强阈值时，调节节流阀的开度并关闭报警提示。
在第二方面的第四种可能实现方式中，至少一个预设压强阈值还包括：第三预设压强阈值，第二预设压强阈值小于第三预设压强阈值；
当前炉压与至少一个预设压强阈值的比较结果还包括：当前炉压大于或等于第二预设压强阈值且小于第三预设压强阈值、当前炉压大于或等于第三预设压强阈值。
在第二方面的第五种可能实现方式中，处理模块，配置为在当前炉压大于或等于第二预设压强阈值且小于第三预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大以及触发第三报警提示；
处理模块，配置为在当前炉压大于或等于第三预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大、控制单晶炉中的坩埚下降以及触发第四报警提示。
在第二方面的第六种可能实现方式中，炉压异常的处理装置还包括：检测模块；
检测模块，配置为检测单晶炉的炉体加热器是否开启以及检测单晶炉是否为非停炉状态；
检测模块，配置为在单晶炉的炉体加热器开启且单晶炉为非停炉状态时，检测单晶炉的抽气装置是否开启；
获取模块，配置为在抽气装置开启时，获取单晶炉炉体内的当前炉压。
在第二方面的第七种可能实现方式中，获取模块，配置为通过炉压检测 传感器获取单晶炉炉体内的当前炉压。
根据本公开实施例的第三方面，提供一种炉压异常的处理设备，炉压异常的处理设备包括处理器和存储器，存储器中存储有至少一条计算机指令，指令由处理器加载并执行以实现第一方面以及第一方面的任一实施例所描述的炉压异常的处理方法中所执行的步骤。
根据本公开实施例的第四方面，提供一种计算机可读存储介质，存储介质中存储有至少一条计算机指令，指令由处理器加载并执行以实现第一方面以及第一方面的任一实施例所描述的炉压异常的处理方法中所执行的步骤。
根据本公开实施例的第五方面，提供一种计算机程序，包括计算机可读代码，当所述计算机可读代码在计算处理设备上运行时，导致所述计算处理设备执行根据权利要求1-8中的任一项所述的炉压异常的处理方法。
上述说明仅是本申请技术方案的概述，为了能够更清楚了解本申请的技术手段，而可依照说明书的内容予以实施，并且为了让本申请的上述和其它目的之一、特征和优点能够更明显易懂，以下特举本申请的具体实施方式。
附图说明
为了更清楚地说明本申请实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作一简单地介绍，显而易见地，下面描述中的附图是本申请的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本公开实施例提供的一种炉压异常的处理方法的流程图；
图2是本公开实施例提供的一种单晶炉的结构示意图；
图3是本公开实施例提供的一种炉压异常的处理方法的流程示意图；
图4是本公开实施例提供的一种炉压异常的处理方法的流程示意图；
图5是本公开实施例提供的一种炉压异常的处理装置的结构图；
图6是本公开实施例提供的一种炉压异常的处理装置的结构图；
图7是本公开实施例提供的一种炉压异常的处理装置的结构图；
图8是本公开实施例提供的一种炉压异常的处理设备的结构图。
10--单晶炉、11--提拉头、12--提拉绳、13--坩埚、14--进气管道、140--进气阀、15--排气管道、150--出气阀、151--节流阀、16--炉压检测器、20--晶棒。
具体实施例
为使本申请实施例的目的之一、技术方案和优点更加清楚，下面将结合本申请实施例中的附图，对本申请实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例是本申请一部分实施例，而不是全部的实施例。基于本申请中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本申请保护的范围。
这里将详细地对示例性实施例进行说明，其示例表示在附图中。下面的描述涉及附图时，除非另有表示，不同附图中的相同数字表示相同或相似的要素。以下示例性实施例中所描述的实施方式并不代表与本公开相一致的所有实施方式。相反，它们仅是与如所附权利要求书中所详述的、本公开的一些方面相一致的装置和方法的例子。
实施例一
本公开实施例提供一种炉压异常的处理方法，如图1所示，该炉压异常的处理方法包括以下步骤：
101、获取单晶炉炉体内的当前炉压。
在本公开的实施例中，获取单晶炉炉体内的炉压包括：接收炉压检测设备发送的单晶炉炉体内的当前炉压。炉压检测设备可以是压力传感器、压力测量仪等，炉压检测设备可以设置在单晶炉的排气管道、进气管道、单晶炉壳体等地方，只要能够检测炉体内的压强即可。
102、将所述当前炉压与至少一个预设压强阈值进行比较，获得比较结果。
在第一个示例中，至少一个预设压强阈值包括第一预设压强阈值和第二预设压强阈值，第一预设压强阈值小于第二预设压强阈值。那么，将所述当前炉压与至少一个预设压强阈值进行比较，获得比较结果包括：比较当前炉压与第一预设压强阈值、第二预设压强阈值的大小，因此，当前炉压与至少一个预设压强阈值的比较结果包括三种情况：
A1：当前炉压小于第一预设压强阈值；
A2：当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈 值；
A3：当前炉压大于或等于第二预设压强阈值。
在第二个示例中，至少一个预设压强阈值包括第一预设压强阈值、第二预设压强阈值、第三预设压强阈值，第一预设压强阈值小于第二预设压强阈值，第二预设压强阈值小于第三预设压强阈值。那么，当前炉压与至少一个预设压强阈值的比较结果包括四种情况：
B1：当前炉压小于第一预设压强阈值；
B2：当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值；
B3：当前炉压大于或等于第二预设压强阈值且小于第三预设压强阈值；
B4：当前炉压大于或等于第三预设压强阈值。
需要说明的是，第一个示例中和第二个示例中的第一预设压强阈值和第二预设压强阈值可以相同，也可以不同，具体根据晶体生长工艺、晶体品质要求、不同单晶炉的炉体结构等依据经验值综合确定。当然，还可以设置多个其他压强阈值。
103、根据比较结果执行对应的炉压调节处理和报警处理。
基于步骤102中的第一个示例所描述的比较结果，根据比较结果执行对应的炉压调节处理和报警处理包括：
在当前炉压小于第一预设压强阈值时，调节节流阀的开度；
在当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀的开度以及触发第一报警提示；
在当前炉压大于或等于第二预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大以及触发第三报警提示。
通过设置多个压强阈值，可以将炉压异常情形进行分类，针对不同异常情形进行有针对性的处理；同时，在炉压出现异常时，设置多个类型报警提示，有助于操作人员根据不同报警类型判断当前异常情况。需要说明 的是，报警提示可以是不同类型的报警提示音，也可以是不同强度的报警提示音，或与不同颜色的报警灯等其他方式结合，能够产生多种不同类型的报警提示即可，本公开实施例对此不加任何限定。
可选的，在第一报警触发后，判断第一报警提示的报警持续时间是否超过预设时间阈值；在报警持续时间超过预设时间阈值且当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀开度至最大并触发第二报警提示；在报警持续时间超过预设报警时间且当前炉压小于第一预设压强阈值时，调节节流阀的开度并关闭报警提示。通过设置报警持续时间，给出人工确认时间，便于人工排除设备自身存在的误报等故障，同时，在报警持续时间结束后对单晶炉炉体内的炉压再次进行判断，已进行对应的炉压异常处理调节。
基于步骤102中的第二个示例所描述的比较结果，根据比较结果执行对应的炉压调节处理和报警处理包括：
在当前炉压小于第一预设压强阈值时，调节节流阀的开度；
在当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀的开度以及触发第一报警提示；
在当前炉压大于或等于第二预设压强阈值且小于第三预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大以及触发第三报警提示；
在当前炉压大于或等于第三预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大、控制单晶炉中的坩埚下降以及触发第四报警提示。
本公开实施例提供的炉压异常的处理方法，获取单晶炉炉体内的当前炉压，将所述当前炉压与至少一个预设压强阈值进行比较，获得比较结果，根据比较结果执行对应的炉压调节处理。通过预先设置多个压强阈值，可以将炉压异常情况进行分类，并针对不同的异常情况进行对应的炉压调节处理，同时，针对不同的异常情况设置对应的报警提示，及时提醒人工确认，以便操作人员及时了解单晶炉的异常情况，提高监控及处理效率。
实施例二
基于上述图1对应的实施例提供的炉压异常的处理方法，本公开另一实施例提供一种炉压异常的处理方法。在介绍本公开实施例之前，首先介绍单晶炉的结构。如图2所示为本公开实施例采用的单晶炉10，单晶炉10包括提拉头11、提拉绳12和坩埚13，坩埚13内容纳有硅料，在坩埚13底部和四周设置有加热器，加热器加热硅料以形成硅熔体。在晶体制备过程中，首先引入籽晶(图1中未示出)，籽晶一端与提拉绳12连接，另一端浸入硅熔体，然后由提拉头11控制提拉绳12上升，拉制晶棒20。
单晶炉10炉体壳体上设置有进气管道14和排气管道15，在进气管道14处设置有进气阀140，以控制气体进入炉体；在排气管道15处设置有出气阀150和节流阀151，出气阀150控制气体的流通，节流阀151控制气体流量。当然，节流阀也可以设置在进气管道。在排气管道15外还设置有抽气装置(图1中未示出)，抽气装置与排气管道15连通，抽气装置配置为抽出炉体内的气体。在晶体生长过程中，从进气管道14向单晶炉10炉体内通入惰性气体，并由排气管道15排出，通过调节节流阀151的开度控制气体流量，进而调节炉体内的压强值，使炉体内压强维持在设定的范围内。
本公开实施例采用的炉压异常的处理系统，包括PLC(Programmable Logic Controller，可编程逻辑控制器)控制系统、炉压检测器和报警装置，PLC控制系统分别与炉压检测器和报警装置信号连接。PLC控制系统控制加热器、抽气装置、进气阀140、出气阀150和节流阀151等炉体上装置的工作状态。炉压检测器16采用压强传感器，设置在排气管道15上，当然也可以设置在单晶炉10其他地方，比如进气管道14、单晶炉10炉体壳体等，能够检测炉体内的压强值即可。报警装置设置有多个类型报警提示，具体地，采用3种或以上不同类报警提示音进行报警提示；当然，也可以根据报警提、示音的强度进行多级报警提示，或与其他方式结合，能够产生多种不同类型的报警提示即可。
在本公开实施例中，PLC控制系统内设置三个炉压压强阈值，包括：一级压强阈值P1、二级压强阈值P2和三级压强阈值P3，P1<P2<P3；PLC控制系统根据单晶炉的压强值P与一级压强阈值P1、二级压强阈值P2和三 级压强阈值P3的比较结果，由控制系统进行对应异常处理。同时，在报警装置中设置多类报警提示。
参照图3所示，本实施例提供的炉压异常的处理方法的流程示意图。具体的，包括：
在PLC控制系统启动后，PLC控制系统循环检测加热器是否开启、单晶炉是否为非停炉状态。在PLC控制系统检测出加热器未开启和/或单晶炉处于停炉状态时，继续循环检测。在PLC控制系统检测出加热器开启且单晶炉处于非停炉状态时，PLC控制系统检测抽气装置是否开启。在PLC控制系统检测抽气装置未开启时，PLC控制系统控制进气阀140、出气阀150处于关闭状态；在PLC控制系统检测抽气装置开启时，PLC控制系统开始实时判断炉体内的压强值P与多个压强阈值P1、P2、P3的比较结果，并进行对应的异常处理。
首先，PLC控制系统判断P是否小于P1，在PLC控制系统判断P小于P1时，对应的异常处理为控制系统自动调节节流阀开度。PLC控制系统自动调节节流阀151开度，调节气体流量以调节炉体内的压强值。该异常处理属于晶体生长过程炉体压强的正常处理。
然后，在PLC控制系统判断P不小于P1时，判断P是否大于或等于P1且小于P2，在P1≤P＜P2时，对应的异常处理为PLC控制系统自动调节节流阀151开度；报警装置采用一级报警提示，并设置报警持续时间T。
判断报警持续时间是否超过T，若超过报警持续时间T后，PLC控制系统判断炉体内的压强值P仍然是P1≤P＜P2，对应的异常处理为PLC控制系统调节节流阀开度至最大，报警装置采用二级报警提示；若超过报警持续时间T后，PLC控制系统判断炉体内的压强值P<P1，对应的异常处理为PLC控制系统自动调节节流阀开度，报警装置撤销报警提示。设置报警持续时间T，便于操作人员对该异常情况进行确认，排除设备自身存在的误报等故障。
其次，在PLC控制系统判断P不大于或等于P1且小于P2时，判断P是否大于或等于P2且小于P3。在P2≤P＜P3时，对应的异常处理为PLC控制系统控制进气阀处于关闭状态、出气阀处于打开状态，并调节节流阀开度至最大。报警装置采用三级报警提示。此时采用三级报警提示操作人员当 前的炉体异常情况。
再次，在PLC控制系统判断P不满足大于或等于P2且小于P3时，判断P是否大于或等于P3，在P≥P3时，对应的异常处理为PLC控制系统控制进气阀处于关闭状态、出气阀处于打开状态，并调节节流阀开度至最大，并控制坩埚下降，使晶体与硅熔体脱离；报警装置采用四级报警提示。控制坩埚下降，使晶体与硅熔体脱离，停止晶体生长，减少对晶体品质的影响。
本公开实施例提供的炉压异常的处理方法，获取单晶炉炉体内的当前炉压，将所述当前炉压与至少一个预设压强阈值进行比较，获得比较结果，根据比较结果执行对应的炉压调节处理。通过预先设置多个压强阈值，可以将炉压异常情况进行分类，并针对不同的异常情况进行对应的炉压调节处理，便于操作人员及时了解单晶炉的异常情况，提高监控及处理效率。
实施例三
基于上述图1对应的实施例提供的炉压异常的处理方法和图2所描述的单晶炉，本公开另一实施例提供一种炉压异常的处理方法。在本公开实施例中，采用如实施例二所述的炉压检测处理系统，PLC控制系统内设置两个炉压压强阈值，包括：一级压强阈值Y1和二级压强阈值Y2，PLC控制系统根据压强值P与一级压强阈值Y1和二级压强阈值Y2的比较结果，由PLC控制系统进行对应异常处理；报警装置根据压强值P与一级压强阈值Y1和二级压强阈值Y2的比较结果，报警装置采用对应类型报警提示。
如图4所示，为本实施例提供的炉压异常的处理方法流程示意图。具体的，包括：
在PLC控制系统启动后，PLC控制系统循环检测加热器是否开启、单晶炉是否为非停炉状态。在PLC控制系统检测出加热器未开启和/或单晶炉处于停炉状态时，继续循环检测。在PLC控制系统检测出加热器开启且单晶炉处于非停炉状态时，PLC控制系统检测抽气装置是否开启。在PLC控制系统检测抽气装置未开启时，PLC控制系统控制进气阀140、出气阀150处于关闭状态；在PLC控制系统检测抽气装置开启时，PLC控制系统开始实时判断炉体内的压强值P与多个压强阈值Y1、Y2的比较结果，并进行对应的异常处理。
首先，PLC控制系统判断炉压值P是否小于Y1，在P<Y1时，对应的异常处理为PLC控制系统自动调节节流阀151开度，调节气体流量以调节炉体内的压强值。
其次，PLC控制系统判断炉压值P是否大于或等于Y1且小于Y2，在Y1≤P＜Y2时，对应的异常处理为控制系统自动调节节流阀开度；报警装置采用一级报警提示，并设置报警持续时间T。
若超过报警持续时间T后，PLC控制系统判断炉体内的压强值P仍然是Y1≤P＜Y2，对应的异常处理为控制系统调节节流阀开度至最大，报警装置采用二级报警提示；若超过报警持续时间T后，PLC控制系统判断炉体内的压强值P，P<Y1，对应的异常处理为控制系统自动调节节流阀开度，报警装置撤销报警提示。
再次，PLC控制系统判断炉压值P是否大于或等于Y2，在P≥Y2时，对应的异常处理为PLC控制系统控制进气阀处于关闭状态、出气阀处于打开状态，并调节节流阀开度至最大，并控制坩埚下降，使晶体与硅熔体脱离；报警装置采用三级报警提示。
本公开实施例提供的炉压异常的处理方法，通过设置多个压强阈值，由控制系统判断炉体内压强的值P与压强阈值的比较结果，能够对不同异常情况进行对应的异常处理。同时，设置多级报警提示，对不同异常情况进行报警提示，及时提醒人工确认。另外，设置报警持续时间，利用控制系统自身优先进行处理，便于人工确认，消除设备自身误报等故障，进而便于操作人员及时了解单晶炉的异常情况，提高监控及处理效率。
实施例四
基于上述图1和图3对应的实施例中所描述的炉压异常的处理方法，下述为本公开装置实施例，可以用于执行本公开方法实施例。
本公开实施例提供一种炉压异常的处理装置，如图5所示，该炉压异常的处理装置50包括：获取模块501、确定模块502和处理模块503；
获取模块501，配置为获取单晶炉炉体内的当前炉压；
确定模块502，配置为将所述当前炉压与至少一个预设压强阈值进行比较，获得比较结果；
处理模块503，配置为根据比较结果执行对应的炉压调节处理和报警处理。
在一个实施例中，至少一个预设压强阈值包括：第一预设压强阈值、第二预设压强阈值，第一预设压强阈值小于第二预设压强阈值；
当前炉压与至少一个预设压强阈值的比较结果包括：当前炉压小于第一压强预设阈值、当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值、当前炉压大于或等于第二预设压强阈值。
在一个实施例中，处理模块503，配置为在当前炉压小于第一预设压强阈值时，调节节流阀的开度；
处理模块503，配置为在当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀的开度以及触发第一报警提示；
处理模块503，配置为在当前炉压大于或等于第二预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大以及触发第三报警提示。
在一个实施例中，如图6所示，炉压异常的处理装置50还包括：判断模块504；
判断模块504，配置为判断第一报警提示的报警持续时间是否超过预设时间阈值；
处理模块503，配置为在报警持续时间超过预设时间阈值且当前炉压大于或等于第一预设压强阈值且小于第二预设压强阈值时，调节节流阀开度至最大并触发第二报警提示；
处理模块503，配置为在报警持续时间超过预设报警时间且当前炉压小于第一预设压强阈值时，调节节流阀的开度并关闭报警提示。
在一个实施例中，至少一个预设压强阈值还包括：第三预设压强阈值，第二预设压强阈值小于第三预设压强阈值；
当前炉压与至少一个预设压强阈值的比较结果还包括：当前炉压大于或等于第二预设压强阈值且小于第三预设压强阈值、当前炉压大于或等于第三预设压强阈值。
在一个实施例中，处理模块503，配置为在当前炉压大于或等于第二预设压强阈值且小于第三预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大以及触发第三报警提示；
处理模块503，配置为在当前炉压大于或等于第三预设压强阈值时，控制进气阀关闭及出气阀打开、调节节流阀开度至最大、控制单晶炉中的坩埚下降以及触发第四报警提示。
在一个实施例中，如图7所示，炉压异常的处理装置50还包括：检测模块505；
检测模块505，配置为检测单晶炉的炉体加热器是否开启以及检测单晶炉是否为非停炉状态；
检测模块505，配置为在单晶炉的炉体加热器开启且单晶炉为非停炉状态时，检测单晶炉的抽气装置是否开启；
获取模块501，配置为在抽气装置开启时，获取单晶炉炉体内的当前炉压。
在一个实施例中，获取模块501，配置为通过炉压检测传感器获取单晶炉炉体内的当前炉压。
本公开实施例提供的炉压异常的处理装置，获取单晶炉炉体内的当前炉压，将所述当前炉压与至少一个预设压强阈值进行比较，获得比较结果，根据比较结果执行对应的炉压调节处理。通过预先设置多个压强阈值，可以将炉压异常情况进行分类，并针对不同的异常情况进行对应的炉压调节处理，同时，针对不同的异常情况设置对应的报警提示，及时提醒人工确认，以便操作人员及时了解单晶炉的异常情况，提高监控及处理效率。
参考图8所示，本公开实施例还提供了一种炉压异常的处理设备，该炉压异常的处理设备包括接收器801、发射器802、存储器803和处理器804，该发射器802和存储器803分别与处理器804连接，存储器803中存储有至少一条计算机指令，处理器804配置为加载并执行至少一条计算机指令，以实现上述图1对应的实施例中所描述的炉压异常的处理方法。
基于上述图1对应的实施例中所描述的炉压异常的处理方法，本公开实施例还提供一种计算机可读存储介质，例如，非临时性计算机可读存储介质 可以是只读存储器(英文：Read Only Memory，ROM)、随机存取存储器(英文：Random Access Memory，RAM)、CD-ROM、磁带、软盘和光数据存储装置等。该存储介质上存储有至少一条计算机指令，配置为执行上述图1对应的实施例中所描述的炉压异常的处理方法。
本领域普通技术人员可以理解实现上述实施例的全部或部分步骤可以通过硬件来完成，也可以通过程序来指令相关的硬件完成，所述的程序可以存储于一种计算机可读存储介质中，上述提到的存储介质可以是只读存储器，磁盘或光盘等。
基于上述图1对应的实施例中所描述的炉压异常的处理方法，本公开实施例还提供一种计算机程序，包括计算机可读代码，当所述计算机可读代码在计算处理设备上运行时，导致所述计算处理设备执行上述图1对应的实施例中所描述的炉压异常的处理方法。
本领域技术人员在考虑说明书及实践这里公开的公开后，将容易想到本公开的其它实施方案。本申请旨在涵盖本公开的任何变型、用途或者适应性变化，这些变型、用途或者适应性变化遵循本公开的一般性原理并包括本公开未公开的本技术领域中的公知常识或惯用技术手段。说明书和实施例仅被视为示例性的，本公开的真正范围和精神由下面的权利要求指出。
以上所描述的装置实施例仅仅是示意性的，其中所述作为分离部件说明的单元可以是或者也可以不是物理上分开的，作为单元显示的部件可以是或者也可以不是物理单元，即可以位于一个地方，或者也可以分布到多个网络单元上。可以根据实际的需要选择其中的部分或者全部模块来实现本实施例方案的目的之一。本领域普通技术人员在不付出创造性的劳动的情况下，即可以理解并实施。
本申请的各个部件实施例可以以硬件实现，或者以在一个或者多个处理器上运行的软件模块实现，或者以它们的组合实现。本领域的技术人员应当理解，可以在实践中使用微处理器或者数字信号处理器(DSP)来实现根据本申请实施例的计算处理设备中的一些或者全部部件的一些或者全部功能。本申请还可以实现为用于执行这里所描述的方法的一部分或者全部的设备或者装置程序(例如，计算机程序和计算机程序产品)。这样的实现本申请的程序可以存储在计算机可读介质上，或者可以具有一个或者多个信号的形 式。这样的信号可以从因特网网站上下载得到，或者在载体信号上提供，或者以任何其他形式提供。
本文中所称的“一个实施例”、“实施例”或者“一个或者多个实施例”意味着，结合实施例描述的特定特征、结构或者特性包括在本申请的至少一个实施例中。此外，请注意，这里“在一个实施例中”的词语例子不一定全指同一个实施例。
在此处所提供的说明书中，说明了大量具体细节。然而，能够理解，本申请的实施例可以在没有这些具体细节的情况下被实践。在一些实例中，并未详细示出公知的方法、结构和技术，以便不模糊对本说明书的理解。
在权利要求中，不应将位于括号之间的任何参考符号构造成对权利要求的限制。单词“包含”不排除存在未列在权利要求中的元件或步骤。位于元件之前的单词“一”或“一个”不排除存在多个这样的元件。本申请可以借助于包括有若干不同元件的硬件以及借助于适当编程的计算机来实现。在列举了若干装置的单元权利要求中，这些装置中的若干个可以是通过同一个硬件项来具体体现。单词第一、第二、以及第三等的使用不表示任何顺序。可将这些单词解释为名称。
最后应说明的是：以上实施例仅用以说明本申请的技术方案，而非对其限制；尽管参照前述实施例对本申请进行了详细的说明，本领域的普通技术人员应当理解：其依然可以对前述各实施例所记载的技术方案进行修改，或者对其中部分技术特征进行等同替换；而这些修改或者替换，并不使相应技术方案的本质脱离本申请各实施例技术方案的精神和范围。

Claims (11)

  1. 一种炉压异常的处理方法，其特征在于，所述方法包括：
    获取单晶炉炉体内的当前炉压；
    将所述当前炉压与至少一个预设压强阈值进行比较，获得比较结果；
    根据所述比较结果执行对应的炉压调节处理和报警处理。
  2. 根据权利要求1所述的方法，其特征在于，所述至少一个预设压强阈值包括：第一预设压强阈值、第二预设压强阈值，所述第一预设压强阈值小于所述第二预设压强阈值；
    所述当前炉压与至少一个预设压强阈值的比较结果包括：所述当前炉压小于所述第一压强预设阈值、所述当前炉压大于或等于所述第一预设压强阈值且小于所述第二预设压强阈值、所述当前炉压大于或等于所述第二预设压强阈值。
  3. 根据权利要求2所述的方法，其特征在于，所述根据所述比较结果执行对应的炉压调节处理和报警处理包括：
    在所述当前炉压小于所述第一预设压强阈值时，调节节流阀的开度；
    在所述当前炉压大于或等于所述第一预设压强阈值且小于所述第二预设压强阈值时，调节所述节流阀的开度以及触发第一报警提示；
    在所述当前炉压大于或等于所述第二预设压强阈值时，控制进气阀关闭及出气阀打开、调节所述节流阀开度至最大以及触发第三报警提示。
  4. 根据权利要求3所述的方法，其特征在于，在所述炉压大于或等于所述第一预设压强阈值且小于所述第二预设压强阈值时，调节所述节流阀的开度以及触发第一报警提示之后，所述方法还包括：
    判断所述第一报警提示的报警持续时间是否超过预设时间阈值；
    在所述报警持续时间超过所述预设时间阈值且当前炉压大于或等于所述第一预设压强阈值且小于所述第二预设压强阈值时，调节所述节流阀开度至最大并触发第二报警提示；
    在所述报警持续时间超过所述预设报警时间且当前炉压小于所述第一预设压强阈值时，调节所述节流阀的开度并关闭报警提示。
  5. 根据权利要求3所述的方法，其特征在于，所述至少一个预设压强阈值还包括：第三预设压强阈值，所述第二预设压强阈值小于所述第三预设压强阈值；
    所述当前炉压与至少一个预设压强阈值的比较结果还包括：所述当前炉压大于或等于所述第二预设压强阈值且小于所述第三预设压强阈值、所述当前炉压大于或等于所述第三预设压强阈值。
  6. 根据权利要求5所述的方法，其特征在于，所述根据所述比较结果执行对应的炉压调节处理和报警处理还包括：
    在所述当前炉压大于或等于所述第二预设压强阈值且小于所述第三预设压强阈值时，控制所述进气阀关闭及所述出气阀打开、调节所述节流阀开度至最大以及触发第三报警提示；
    在所述当前炉压大于或等于所述第三预设压强阈值时，控制所述进气阀关闭及所述出气阀打开、调节所述节流阀开度至最大、控制所述单晶炉中的坩埚下降以及触发第四报警提示。
  7. 根据权利要求1所述的方法，其特征在于，所述获取单晶炉炉体内的当前炉压之前，所述方法还包括：
    检测所述单晶炉的炉体加热器是否开启以及检测所述单晶炉是否为非停炉状态；
    在所述单晶炉的炉体加热器开启且所述单晶炉为非停炉状态时，检测所述单晶炉的抽气装置是否开启；
    所述获取单晶炉炉体内的炉压包括：在所述抽气装置开启时，获取所述单晶炉炉体内的当前炉压。
  8. 根据权利要求7所述的方法，其特征在于，所述获取所述单晶炉炉体内的当前炉压包括：
    通过炉压检测传感器获取所述单晶炉炉体内的当前炉压。
  9. 一种炉压异常的处理设备，其特征在于，所述炉压异常的处理设备包括处理器和存储器，所述存储器中存储有至少一条计算机指令，所述指令由所述处理器加载并执行以实现权利要求1至权利要求8任一项所述的炉压异常的处理方法中所执行的步骤。
  10. 一种计算机可读存储介质，其特征在于，所述存储介质中存储有至少一条计算机指令，所述指令由处理器加载并执行以实现权利要求1至权利要求8任一项所述的炉压异常的处理方法中所执行的步骤。
  11. 一种计算机程序，包括计算机可读代码，当所述计算机可读代码在计算处理设备上运行时，导致所述计算处理设备执行根据权利要求1-8中的 任一项所述的炉压异常的处理方法。
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