WO2020174755A1

WO2020174755A1 - Cutting tool

Info

Publication number: WO2020174755A1
Application number: PCT/JP2019/043091
Authority: WO
Inventors: 勇樹力宗; 晋奥野; アノンサックパサート; 今村　晋也
Original assignee: 住友電工ハードメタル株式会社
Priority date: 2019-02-26
Filing date: 2019-11-01
Publication date: 2020-09-03

Abstract

The present invention provides a cutting tool comprising a base material and a coating covering the base material, wherein the coating includes a TiCN layer and an α-Al₂O₃ layer formed upon the TiCN layer, and in the α-Al₂O₃ layer, the (0 0 12)-plane orientation index TC(0 0 12) is in the range of 4 to 8.5 inclusive, the (1 1 12)-plane orientation index TC(1 1 12) is in the range of 0.5 to 3 inclusive, and the total of the orientation index TC(0 0 12) and the orientation index TC(1 1 12) is no higher than 9.

Description

\¥02020/174755 1 (: 17 2019/043091

Specification

Title of invention: Cutting tool

Technical field

[0001] The present disclosure relates to a cutting tool. This application claims priority based on Japanese Patent Application No. 201 9-032642 filed on February 26, 2009. All contents described in the Japanese patent application are incorporated by reference into this specification.

Background technology

[0002] Conventionally, various studies have been made for the purpose of extending the life of cutting tools. For example, WO 201 3/037997 (Patent Document 1) discloses a cutting tool including a base material and a coating formed on the surface of the base material.

Prior art documents

Patent literature

[0003] Patent Document 1: International Publication No. 201 3/037997

Summary of the invention

[0004] A cutting tool according to the present disclosure is

A cutting tool comprising a base material and a coating for coating the base material, wherein the coating is formed on the 丨〇 1\1 layer and on the 丨〇 1 \ 1 layer. I 〇 including 3 layers,

In eight丨₂ 〇 _three layers, - the "

The orientation index of the (0 0 1 2) plane (3 (0 0 1 2)) represented by the following formula (1) is 4 or more and 8.5 or less,

The orientation index (3 (1 1 1 2)) of the (1 1 1 2) plane represented by the following formula (2) is ≧0.5 and is 3 or less,

The above-mentioned orientation index (3 (0 0 1 2) and the above-mentioned orientation index (3 (1 1 1 1

2) and the total is 9 or less. 〇 2020/174 755 (: 17 2019/043091

[Number 1]

In equations (1) and (2), I 1< I) indicates the X-ray diffraction intensity obtained when the X-port measurement is performed on the 1< I) plane,

1. (1< I) is the standard strength on the 《−8 丨₂ 〇 ₃ 1< 丨） plane shown in 0 1 0— 0 1 7 3 of

(11 1< I) planes are (0 1 2) planes, (1 0 4) planes, (1 1

0) plane, (1 1 3) plane, (0 2 4) plane, (1 1 6) plane, (3

Indicates either the (0 0) plane, the (0 0 1 2) plane, or the (1 1 1 2) plane.

Brief description of the drawings

[0005] [Fig. 1] Fig. 1 is a perspective view illustrating one embodiment of a base material of a cutting tool.

[FIG. 2] FIG. 2 is a schematic cross-sectional view of a cutting tool according to an aspect of the present embodiment.

[FIG. 3] FIG. 3 is a schematic cross-sectional view of a cutting tool according to another aspect of the present embodiment. MODE FOR CARRYING OUT THE INVENTION

[0006] [Problems to be solved by the present disclosure]

In Patent Document 1, it is possible to improve the performance (for example, abrasion resistance) of a cutting tool by providing a <<_ 8 I 2 0 ₃ layer or the like in which the (○ 0 1) orientation is preferential on the base material. I am letting you. However, the cutting tool "-丨₂ in order to fully enjoy 〇 _three layers benefits of improving wear resistance of the parallel to" - eight I ₂ 〇 ₃ layer and the substrate or the undercoat layer or the like It is also important to promote the improvement of the adhesion force between them (in particular, to suppress the peeling of the coating film due to the welding of the work material during cutting). Under such circumstances, further improvement of the cutting tool having a coating on the surface is required.

[0007] The present disclosure has been made in view of the above circumstances, and has excellent wear resistance. 〇 2020/174755 3 卩 (: 171?2019/043091

It is an object of the present invention to provide a cutting tool having excellent peel resistance.

[0008] [Effects of the present disclosure]

Based on the above, it becomes possible to provide a cutting tool having excellent wear resistance and excellent peel resistance.

[Description of Embodiments of the Present Disclosure]

First, the contents of one aspect of the present disclosure will be listed and described.

[1] A cutting tool according to an aspect of the present disclosure,

A cutting tool comprising a base material and a coating for coating the base material, wherein the coating is formed on the 丨 0\ 1 layer and the 丨 0 1 \ 1 layer. I 〇 including 3 layers,

In eight丨₂ 〇 _three layers, - the "

The orientation index of the (0 0 1 2) plane represented by the following equation (1) (3 (0 0

1 2) is 4 or more and 8.5 or less,

2) and the total is 9 or less.

[Number 2]

,, I) in terms of

Shows the X-ray diffraction intensity required when the X port is measured,

(11 1< I) planes are (0 1 2) planes, (1 0 4) planes, (1 1 〇2020/174755 4 (:171?2019/043091

0) plane, (1 1 3) plane, (0 2 4) plane, (1 1 6) plane, (3

Indicates either the (0 0) plane, the (0 0 1 2) plane, or the (1 1 1 2) plane.

[0010] The above cutting tool, by comprising the above-described configuration, the adhesion of the eight I ₂ 〇 _three layers while the maintaining high hardness is improved. As a result, the cutting tool has excellent wear resistance and excellent peeling resistance.

[001 1] [2] It is preferable that the above-mentioned orientation index (3 (1 1 1 2) is 1 or more and 2.5 or less. Become.

[0012] [3] The thickness of the "_ eight丨₂ 〇 ₃ layer 0. 5 or 2 and this is preferably 0 or less. By defining in this way, the cutting tool has excellent wear resistance while maintaining good adhesion between the coating and the substrate.

[0013] [4] The coating film further includes an intermediate layer provided between the above-mentioned layer 1\1 layer and the above-mentioned <<-I ₂ 0 ₃ layer,

The intermediate layer preferably contains a carbonate, a carbonitride oxide, or a boron nitride containing titanium as a constituent element. By prescribing in this way, a cutting tool with even better peel resistance can be obtained.

[5] The thickness of the coating is preferably 1 or more and 30 or less.

By prescribing in this way, a cutting tool with further excellent wear resistance can be obtained.

[001 5] [6] above coating preferably comprises the further the outermost surface layer formed on the "_ eight I ₂ 〇 ₃ layer. By defining in this way, in addition to wear resistance, the cutting tool has excellent discriminating properties of the coating.

[001 6] [Details of the embodiment of the present disclosure]

Hereinafter, one embodiment of the present disclosure (hereinafter referred to as “this embodiment”) will be described. However, the present embodiment is not limited to these. Note in the drawings used in the following description of embodiments, the ^_ reference numerals, the ^_ moiety or represents a significant portion. In the present specification, the notation in the form of "8-Mi" means the upper and lower limits of the range (that is, not less than 8 and not more than Mi), and the description of the unit in 8. 〇2020/174755 5 (:171?2019/043091

If there is no and the unit is listed only in Min, the unit in and the unit in Min are the same. Further, in the present specification, when a compound is represented by a chemical formula in which the ratio of the constituent elements is not limited, such as “Cho 1\1”, the chemical formula is the same as that of any of the conventionally known compositions (elements). Ratio) is included. In this case, the chemical formula shall include not only stoichiometric composition but also non-stoichiometric composition. For example, the chemical formula of "Ding 1\1" is not limited to the stoichiometric composition "Ding ₁ 1X1 _! "

Non-stoichiometric compositions such as " ₈ " are also included. The same applies to the description of compounds other than "Cho 1\1".

[0017] <<Surface coating cutting tool>>

The cutting tool according to the present embodiment,

A cutting tool comprising a base material and a coating for coating the base material, wherein the coating is formed on the 丨〇 1\1 layer and on the 丨〇 1 \ 1 layer. I _; 〇 including 3 layers,

In eight丨₂ 〇 _three layers, - the "

The orientation index of the (0 0 1 2) plane (3 (0 0 1 2)) represented by the above formula (1) is 4 or more and 8.5 or less,

The orientation index of the (1 1 1 2) plane (3 (1 1 1 2)) represented by the above formula (2) is not less than 0.5 and not more than 3,

2) and the total is 9 or less.

[0018] The surface-coated cutting tool of the present embodiment includes a base material and a coating film that coats the base material (hereinafter, simply referred to as "cutting tool"). The above-mentioned cutting tools are, for example, drills, end mills, exchangeable cutting edges for drills, exchangeable cutting edges for end mills, exchangeable cutting edges for milling, exchangeable cutting edges for turning, metal saws, gear cutting tools. , Reamer, tap, etc.

[0019] <Substrate>

The base material of the present embodiment is not limited as long as it is conventionally known as a base material of this type. 〇 2020/174755 6 卩 (：171?2019/043091

The thing of can also be used. For example, the above-mentioned base material is a cemented carbide (eg, tungsten carbide based cemented carbide, a cemented carbide containing 0 〇, a 〇 other 〇 ”, a knives 3, 1 \1 Nitride-added cemented carbide, etc.), thermite (mainly composed of Ding Teng, Ding 1\1, Ding Ting 1\1, etc.), high-speed steel, ceramics (titanium carbide, Silicon carbide, silicon nitride, aluminum nitride, aluminum oxide, etc.), cubic boron nitride sintered body (Sumi 1\1 sintered body), and diamond sintered body. Preferred.

[0020] Among these various base materials,

Base cemented carbide, cermet (especially D

○ It is preferable to select (1 \ 1 group). The reason for this is that these base materials have an excellent balance between hardness and strength, especially at high temperatures, and have excellent properties as base materials for cutting tools for the above-mentioned applications.

[0021] Fig. 1 is a perspective view illustrating one embodiment of a base material of a cutting tool. A cutting tool with such a shape is used as a cutting edge exchange type cutting tip for turning.

The substrate 11 shown in FIG. 1 has a surface including an upper surface, a lower surface and four side surfaces, and has a rectangular prism shape that is slightly thin in the vertical direction as a whole. Further, a through hole penetrating the upper and lower surfaces is formed in the base material 11, and at the boundary portion of the four side surfaces, the adjacent side surfaces are connected with an arc surface.

[0023] In the above-mentioned base material 11, the upper surface and the lower surface form a rake surface 13, and the four side surfaces (and the arc surfaces connecting these to each other) form a flank surface and a rake surface 1 3 The arc surface connecting the flank and the flank forms the cutting edge portion 10. “Cake face” means the face from which the chips scraped from the work material are raked. The “flank surface” means the surface that is in contact with the work material. The cutting edge part is included in the part that constitutes the cutting edge of the cutting tool.

[0024] When the cutting tool is a cutting edge exchange type cutting tip, the base material 11 includes a shape with a chip breaker and a shape without a chip breaker. The shape of the cutting edge 10 is a combination of sharp edge (ridge where rake face and flank intersect), honing (shape with sharp edge added), negative land (chamfered shape), and honing and negative land. Which shape among the different shapes 〇 2020/174755 7 卩 (: 171?2019/043091

Is also included.

The shape of the base material 11 and the name of each part have been described above with reference to FIG. 1. In the cutting tool according to the present embodiment, the shape and the name of each part corresponding to the base material 11 are described. For, the same terms as above will be used. That is, the cutting tool has a rake face, a flank face, and a cutting edge portion that holds the rake face and the flank face.

[0026] <Coating>

The coating film according to the present embodiment includes the 0 layer provided on the base material and the «-8 ₂ 0 ₃ layer formed on the I01\1 layer. The "coating" has an action of improving at least a part of the above-mentioned base material (for example, a part of the above-mentioned rake face) to improve various properties such as peeling resistance and wear resistance in a cutting tool. It is a thing. The coating is preferably applied not only to a part of the base material but also to the entire surface of the base material. However, it does not depart from the scope of the present embodiment even if a part of the substrate is not covered with the coating or the structure of the coating is partially different.

[0027] The coating preferably has a thickness of 1 or more and 30 or less,

It is more preferably 10 or more and 20 or less. Here, the thickness of the coating means the coatings such as 《_8 ₂ 0 ₃ layers, _ 0 1\1 layer, intermediate layer, outermost surface layer, and other layers (for example, underlayer), which will be described later. It means the total thickness of each layer. The thickness of the coating film can be measured, for example, by measuring the cross section of the cutting tool with an optical microscope at a magnification of 100 times. Specifically, it can be obtained by measuring any three points on the cross section and taking the average value of the thicknesses of the three measured points. The same applies to the case of measuring the thickness of each of the _ 8 I ₂ 0 ₃ layers, the _ 1 0 1 layer, the intermediate layer, the outermost surface layer, and other layers described below.

[0028] ((¾ ^_ 8丨₂ 0 ₃ layers)

In this embodiment, the _____________ ₂ 0 ₃ layer is a crystal grain of <<_8_ ₂ 0 ₃ (aluminum oxide whose crystal structure is << type) (hereinafter, may be simply referred to as "grain"). including. That is, the "_ eight丨₂ 〇 ₃ layer of polycrystalline" a layer containing a _ eight丨₂ 〇 ₃ 〇 2020/174755 8 卩 (：171?2019/043091

is there.

[0029] The above "_ eight I ₂ 〇 ₃ layer, within a range not impairing the effects achieved by the cutting tool according to the present embodiment, may be included unavoidable impurities.

[0030] The «_ 8 I ₂ 0 ₃ layer may be provided immediately above the _ 1 I 1 layer as long as the effect of the cutting tool according to the present embodiment is not impaired. For example, FIG. 2), it may be provided on the above-mentioned layer 1\1 through another layer such as an intermediate layer described later (for example, FIG. 3). Above (the ¾- eight I ₂ 〇 _three layers, optionally other layers are provided in the revaluation surface layer or the like thereon (e.g., Fig. 3). In addition, the eight丨₂ 〇 ₃ layer, the It may be the outermost layer of the coating.

[0031] In the present embodiment, "_ eight丨₂ 〇 ₃ layer has a thickness 〇. Preferably 5 or more and 20 or less, more preferably 3 〇! Least 1 〇 less. As a result, it is possible to exert the effect of further excellent wear resistance. The thickness can be measured, for example, by measuring the cross section of the cutting tool as described above with an optical microscope at a magnification of 100,000.

[0032] The above cutting tool is in the "_ eight丨₂ 〇 _three layers,

The orientation index of the (0 0 1 2) plane represented by the above equation (1) (3 (0 0

1 2) is 4 or more and 8.5 or less,

The orientation index of the (1 1 1 2) plane (3 (1 1 1 2)) represented by the above formula (2) is 0.5 or more and 3 or less,

The above orientation index (3 (0 0 1 2) and the above orientation index (3 (1 1 1

2) and the total is 9 or less.

In the above formula (1) and the above formula (2), I (

, I) plane shows the X-ray diffraction intensity obtained when measured (X-ray diffraction measurement). Here, the X-ray diffraction intensity means the height of the peak in the diffraction chart obtained by the X-ray diffraction measurement.丨. (

) Indicates the standard strength in the (1<I) plane of <¾-8 1 ₂ 0 ₃ which is specified in 0 1 0- 0 1 73 of _ 0 0 ₃ force_. The (1< 丨) planes are the (0 1 2) plane, the (1 0 4) plane, the (1 10) plane, the (1 1 3) plane, the (0 2 4) plane, 〇2020/174755 9 卩(：171?2019/043091

(1 1 6) plane, (3 0 0) plane, (0 0 1 2) plane and (1 1

1 2) Indicates any of 9 surfaces.

[0034] Conventionally, it has been considered preferable that the <<_8 1 ₂ 0 ₃ layer has a large content of crystal grains having a (0 0 1) orientation. That is, "_ eight丨₂ 〇 ₃ layer was believed to be the ideal consisting of crystal grains having a (0 0 1) orientation. However, the cutting tool "-丨₂ 〇 ₃ the benefit of improving wear resistance of the layer to enjoy ten minutes, this concurrently" - eight丨₂ 〇 ₃ layer and the substrate or the undercoat layer or the like and It is important to promote the improvement of the adhesion force between the two (especially to suppress the peeling of the coating due to the welding of the work material during cutting).

[0035] The inventors of the present invention have conducted extensive studies to solve the above-mentioned problems. As a result, a crystal having a (1 1 1 2) orientation is generated before a crystal grain having a (0 0 1) orientation is generated. by generating the particle was found that the first time the adhesion between the "_ eight I ₂ 〇 ₃ layer and the substrate or the undercoat layer or the like is improved. Further, the present inventors have examined the relationship between the existence ratio of the crystal grains having the (0 0 1) orientation and the crystal grains having the (1 1 1 2) orientation and the orientation index, and found that (0 0 1 ) The orientation index of crystal grains with (1 1 1 2) orientation and the orientation index of crystal grains with (1 1 1 2) orientation is the existence ratio of crystal grains with (○ 0 1) orientation and crystal grains with (1 1 1 2) orientation. (Volume ratio) and the orientation index of the (0 0 1 2) plane represented by the above formula (1) (3 (0 0 1

2) is 4 or more and 8.5 or less, and the orientation index of the (1 1 1 2) plane represented by the above formula (2) 〇 (1 1 1 2) is 0.5 or more and 3 or less. I found it. By adhesion of the "_ eight丨₂ 〇 _three layers is improved, the cutting tool has excellent have wear resistance, and excellent peeling resistance.

In the present specification, when discussing the orientation of crystal grains, (0 0

1 2) The orientation corresponding to the plane is expressed as “(0 0 1) orientation”. (0 0

This is because the orientation corresponding to the 1 2) plane and the orientation corresponding to the (0 0 1) plane are the same. On the other hand, when discussing the orientation index, “Cho (0 0

1 2)”, etc., and is expressed by the Miller index of the crystal plane corresponding to the orientation index. \¥02020/174755 10 (: 17 2019/043091

It

The above-mentioned orientation index (0 0 1 2) can be obtained by, for example, a mouth measurement performed under the following conditions. Specifically, the "- eight for丨₂ 〇 _three layers any one point definitive to perform the X-ray diffraction measurements were obtained based on the equation (1) (0 0 1 2) plane orientation the index and the orientation index Ding 〇 (0 0 1 2) in the eight丨₂ 〇 _three layers. However, when selecting "any one point" above, points that show abnormal values at first glance are excluded. In this embodiment, since the <¾-8丨203 layer has high uniformity, the orientation index 0 (0 0 1 2) is calculated for a plurality of points in the <¾-8丨203 layer. The present inventors believe that no significant difference is found even when obtained. Orientation index Ding (3 (1 1 1 2) can also be determined on SL and the same method should be noted that the "-. Eight丨₂ 〇 on _three layers when the outermost surface layer or the like is formed the eight by polishing the outermost layer, etc. I, since to expose the 〇 _three layers, and carrying out the X port measurement.

[0038] (Conditions for X-ray diffraction measurement)

X-ray output 45 1<, 200 〇 18

X-ray source, wavelength

1 .54 1 862

Detector 〇 / 1 e X

IV a 250

Scan axis 20/0

Longitudinal restriction slit width 2.0 0! 0!

Scan mode 〇〇 1 \ 1 丨 1 \ 111 〇 113

Scan speed 20°/〇! 1 门

[0039] The orientation index ◯ (1 1 1 2) is preferably 0.5 or more and 3 or less, and more preferably 0.5 or more and 2 or less.

The above-mentioned orientation index (3 (0 0 12)) is preferably 4.3 or more and 7.5 or less, and more preferably 5 or more and 7.5 or less.

[0041] (7 \ 〇 1 \ 1 layer)

The ∨ ◯ !\1 layer may be provided immediately above the base material as long as the effect of the cutting tool according to the present embodiment is not impaired (for example, FIG. 2 and FIG. 3). 〇 2020/174755 1 1 卩 (：171?2019/043091

), and may be provided on the above-mentioned base material via another layer such as an underlayer described later. Here, the "custom-character 1\1 layer" means a layer made of the compound represented by custom-character 1\1.

[0042] The above-mentioned custom layer 1\1 may contain inevitable impurities as long as the effect of the cutting tool according to the present embodiment is not impaired.

[0043] The thickness of the above-mentioned 0 1\1 layer is preferably 0.5 or more and 20 or less, and more preferably 3 or more and 10 or less. The wear resistance is further improved by setting the thickness of the above-mentioned 丨○|\! layer as described above. The thickness can be measured, for example, by measuring a cross section of the cutting tool as described above with an optical microscope at a magnification of 100 times.

[0044] (Intermediate layer)

The coating preferably further comprises an intermediate layer that are provided between the Ding丨Rei_1 \ 1 layer and the "_ eight丨₂ 〇 _three layers. The intermediate layer preferably contains a carbonate, a carbonitride oxide, or a boronitride containing titanium as a constituent element. Thus, "the film - I ₂ 〇 _three layers adhesion is improved, improvement of the wear resistance can be obtained effectively. In one aspect of the present embodiment, it is preferable that the intermediate layer is made of one kind of compound selected from the group consisting of carbonates, oxycarbonitrides, and boronitrides, which include gadolinium as a constituent element. That is, it is preferable that the intermediate layer is made of a compound represented by _______, ___1\10 or ___1\1. It is more preferable that the above-mentioned intermediate layer is a decaded layer (a layer made of a compound represented by decided part).

[0045] The intermediate layer may contain inevitable impurities as long as the effect of the cutting tool according to the present embodiment is not impaired.

[0046] The thickness of the intermediate layer is preferably not less than 0.1 and not more than 2, and more preferably not less than 0.5 and not more than 1.5. The thickness can be measured, for example, by measuring a cross section of the cutting tool as described above with an optical microscope at a magnification of 100 times.

[0047] (Outermost layer) 〇 2020/174755 12 ((171?2019/043091

The coating is

It is preferable. By doing so, in addition to wear resistance, the cutting tool has excellent discriminating properties of the coating. It is preferable that the outermost surface layer is made of a compound represented by TOKYO TEN, TONE 1\1 or TET TEN 1\1. The toughness of the coating is improved when the outermost surface layer is made of the compound represented by the formula (3, T. 1\1 or T. O. 1\1).

[0048] The outermost surface layer may contain inevitable impurities as long as the effects of the cutting tool according to the present embodiment are not impaired.

[0049] The outermost surface layer preferably has a thickness of not less than 0.1 and not more than 20!, more preferably not less than 0.30! and not more than 0.6!!. The thickness can be measured, for example, by measuring the cross section of the cutting tool as described above with an optical microscope at a magnification of 100 times.

[0050] (Other layers)

The coating may further contain other layers as long as the effects of the present embodiment are not impaired. Examples of the other layer include a base layer provided directly on the base material. By including the underlayer, the coating improves adhesion to the base material. As the above-mentioned base layer, for example, a layer composed of 1\1 can be mentioned.

[0051] <<Method for producing surface-coated cutting tool>>

The manufacturing method of the cutting tool according to the present embodiment,

A method of manufacturing the above cutting tool,

A step of preparing the base material (hereinafter, referred to as “first step”),

The process of forming a custom-made 1\1 layer on the above substrate (hereinafter referred to as the "second process")

The above Ding丨Rei_1 \] "_ eight on the layer丨₂ 〇 ₃ of the step of generating nuclear (hereinafter referred to as the" third step ") and,

The _ eight "_ eight丨₂ 〇 ₃ from the nucleus"丨₂ 〇 _third step of growing a crystal (hereinafter, referred to as "fourth process") and a,

The third step is performed by chemical vapor deposition, 〇 ₂ ^1-1 ₄ gas and gas 〇2020/174755 13 卩(：171?2019/043091

And supplying a source gas containing gas. Hereinafter, each step will be described.

In the first step, the base material is prepared. As the above-mentioned substrate, any substrate can be used as long as it is a conventionally known substrate of this type as described above. As a method for preparing the above-mentioned base material, a commercially available product may be purchased, or a raw material may be produced. For example, when the above-mentioned base material is made of cemented carbide, raw material powders having the compounding composition (mass %) described in the examples below are uniformly mixed using a commercially available attritor, and then this mixed powder is used. A predetermined shape (for example, model number 0 manufactured by Sumitomo Electric Hardmetal Co., Ltd.

(1 204081\1-11)) and then sintering it in a specified sintering furnace at 1300 to 1500 ^° ∘ or less for 1 to 2 hours to obtain the above-mentioned base material made of cemented carbide. Can be obtained 〇

"204081\1_11" is the shape of a cutting edge exchange type cutting tip for turning (for example, see Fig. 1).

In the second step, a thin layer is formed on the base material. The second step is performed by, for example, a chemical vapor deposition method.

[0054] Here, "to form the slab 01\1 layer on the substrate" means that the slab I\1\1 layer is formed on the upper side of the substrate. In other words, the 011\1 layer may be formed directly on the base material, or may be formed on the base material via another layer such as a base layer described later. ..

[0055] Specifically, first, as a raw material gas, the amount of gas is 0, ₄ , 0, 1 ^to 1, _3, 1, and 1! · Use.

The amount is, for example, Ding丨〇丨₄ from 2 1 0 vol%, 0.1 7 the Rei_1 ^~ 1 ₃ Rei_1 \ 1 2.

5% by volume and the balance may be.

The temperature in the reaction vessel during the reaction in the second step is preferably 800 ^° to 920 ^° .

The pressure inside the reaction vessel during the reaction in the second step is preferably 51< ₃ to 101< ₃ .

[0058] The total gas flow rate during the reaction in the second step was 501_/○ 1 侨n~ 1 501_/○ 1 〇 2020/174755 14 卩 (：171?2019/043091

It is preferably I.

The reaction time in the second step can be appropriately changed depending on the thickness of the thin film 1\1 layer to be formed.

[0059] <Third step>

In the third step, generating the signature to丨Rei_1 \ 1 layer on "_ eight丨₂ 〇 ₃ nuclei. The third step is performed by a chemical vapor deposition method comprises feeding a raw material gas containing 〇 ₂ ^1-1 ₄ gas and 3 gas.

[0060] Here, - a "Ding丨Rei_1" to \ one layer on to generate the eight丨₂ 〇 ₃ nuclei ", said Ding 1

In other words,

The core of «8 丨₂ 〇 ₃ may be generated just above the above-mentioned 丨〇 1 \ 1 layer, or through the other layers such as the middle layer and the above-mentioned 丨〇 1 \ 1 layer. May be generated above.

[0061] On the base material

It is performed by a chemical vapor deposition (〇 necked method) 〇 ₂ ^1-1 ₄ gas and

By supplying a source gas containing a gas, "- it generates viii丨₂ 〇 ₃ nuclei. That is, the third step is performed by a chemical vapor deposition method comprises feeding a raw material gas containing 〇 ₂ ^1-1 ₄ gas and 3 gas. Here, the "raw material gas" in the third process is 〇--\

It means a material gas for generating an I ₂ 〇 ₃ nuclei.

Conventionally, purposes 〇 ₂ ^1-1 ₄ gas to generate a carbide in "_ eight丨₂ 〇 ₃ except layer a layer of the coating was used. But,

The inventors of the present invention are the first to find out that 0 ₂ 1 ^to 1 ₄ gas is used when nuclei of <<_ 8 ₂ 0 ₃ are generated on the above-mentioned 0 1 1 layer. Above 〇 ₂ ^1-1 ₄ gas is the production phase

The present inventors believe that they act as a catalyst.

[0062] Specifically, hundred ₂ as a source gas First, 〇 ₂ ¹ 1 _4, 1 ^to 1_Rei丨, eight丨〇丨_3, ¹ 1 ₂

3 and! - 1 ₂ is used. The amount is, for example, a hundred ₂ 〇. 5-3 vol%,

0 to 1 to 2% by volume, 1 ^to 10% ^to 0.5 to 4% by volume, 8% to 0% ₃ to 5 to 13% by volume,

The amount may be 1 to 3% by volume, and the balance may be.

[0063] The temperature of the reaction vessel during the reaction in the third step, at 9 7 0 ^° 〇 ~ 1 0 3 0 ^° 〇〇2020/174755 15 卩(：171?2019/043091

Preferably.

[0064] The pressure in the reaction vessel during the reaction in the third step is 80 ₃ to 150 ^ 9

It is preferably 3.

[0065] The total gas flow rate during the reaction in the third step was 301_/○ 1 丨n~ 1 00 !_/○!

It is preferably I.

The reaction time in the third step is preferably 2 minutes to 60 minutes,

It is more preferably 5 minutes to 40 minutes.

[0066] <Fourth step>

In the fourth step, the above-mentioned "_ eight丨₂ from 〇 ₃ nuclear" _ eight丨₂ 〇 ₃ of Ru were grown crystal. Method of growing _ eight丨₂ 〇 ₃ crystal "from _ eight丨₂ 〇 ₃ nuclei" above is executed by O O method.

[0067] Specifically, first, as a raw material gas, 〇〇 ₂ , 1 ^to 100 丨, 880 丨〇丨₃ ,

Use 2. The amount is, for example, a hundred ₂ 〇. 5-3 vol%, 1 ^to 1_Rei丨a 4-6% by volume, the eight I 〇 I _3. 5 to 1 3 vol%,

Adjusted between 1 and 3 vol%, the remainder can be mentioned that a 1 ^to 1 _2.

[0068] The temperature in the reaction vessel during the reaction in the fourth step is preferably 950 ^° to 1050 ^° .

[0069] The pressure in the reaction vessel during the reaction in the fourth step is 1

Is preferred.

[0070] The total gas flow rate during the reaction in the fourth step was 301_/〇 1 丨n~ 1 00 !_/〇!

It is preferably I.

The reaction time in the fourth step, it is possible to apply Yibin changed according to the thickness of the deposition to "_ eight丨₂ 〇 _three layers.

[0071] <Other processes>

In the manufacturing method according to the present embodiment, in addition to the above-described steps, other steps may be appropriately performed within a range that does not impair the effects of the present embodiment.

[0072] In the present embodiment, before the second step, a step of forming an underlayer on the base material may be included. In the present embodiment, after the fourth step, the "_ eight丨₂ \¥02020/174755 16 卩(: 17 2019/043091

The step of forming the outermost surface layer on the _three layers may be included.

When forming the above-mentioned base layer or outermost surface layer, each layer may be formed by a conventional method.

[0074] The above description includes the features described below.

(Appendix 1)

A surface-coated cutting tool comprising a base material and a coating for coating the base material, wherein the coating is formed on the 丨 0\ 1 layer and the 丨 0 1 \ 1 layer. _ Including 8 layers and 3 layers,

In the "_ eight丨₂ 〇 _three layers,

1 2) is 4 or more and 8.5 or less,

The orientation index (3 (0 1 1 2) and the orientation index (3 (1 1 1 1

2) Surface coated cutting tools with a total of 9 or less.

[Number 3]

(In formula (1) and formula (2), I 1< I) indicates the X-ray diffraction intensity obtained when the X-port measurement is performed on the 1< I) plane.

1. (1< I) is the standard strength on the 《―8丨₂ ○ ₃ 1<丨） plane shown in 01 0—01 73

(11 1< I) planes are (0 1 2) planes, (1 0 4) planes, (1 1

0) plane, (1 1 3) plane, (0 2 4) plane, (1 1 6) plane, (3

Either of 0 0) plane, (0 0 1 2) plane and (1 1 1 2) plane 〇2020/174755 17 卩(：171?2019/043091

I will )

(Appendix 2)

The surface-coated cutting tool according to Appendix 1, wherein the orientation index (3 (1 1 1 2)) is 1 or more and 2.5 or less.

(Appendix 3)

The "-. Eight丨₂ 〇 ₃ layer has a thickness at 〇 5 01 or more 2 0 01 or less, the surface-coated cutting tool according to Supplementary Note 1 or 2.

(Appendix 4)

It said coating further comprises an intermediate layer that are disposed between the said and the signature丨〇 1 \ 1 layer "_ eight丨₂ 〇 _three layers,

4. The surface-coated cutting tool according to any one of appendices 1 to 3, wherein the intermediate layer contains a carbonate, a carbonitride oxide, or a boronitride containing gallium as a constituent element.

(Appendix 5)

The surface coating cutting tool according to any one of appendices 1 to 4, wherein the coating has a thickness of 1 or more and 30 or less.

(Appendix 6)

The coating is

, The surface-coated cutting tool according to any one of appendices 1 to 5.

Example

Hereinafter, the present invention will be described in detail with reference to Examples, but the present invention is not limited thereto.

[0076] <<Preparation of cutting tool>>

First, as a first step, a base material to be coated with a coating film was prepared. Specifically, raw material powders having the following composition (mass %) were uniformly mixed using a commercially available attritor to obtain mixed powders.

Composition of raw powder

〇〇 7 mass% 〇 2020/174755 18 卩(: 171?2019/043091

〇 “ ₃ 0 ₂ 0.5 mass%

1\1 cup ○ 3.5% by mass

Ding ₃ ○ 1.0 mass%

Balance

[0077] Next, this mixed powder was pressure-molded into a predetermined shape (model number 〇 1\/1 〇 1 204081\1_11 manufactured by Sumitomo Electric Hardmetal Co., Ltd.), and the obtained compact was formed. A substrate made of cemented carbide was obtained by placing it in a sintering furnace and sintering at 1300 to 1500 ^° for 1 to 2 hours.

"204081\1-11" is the shape of a cutting edge exchange type cutting tip for turning.

On the surface of the base material, by forming the underlayer shown in Table 4, the 0 1 \ 1 layer, the intermediate layer, the <¾_8 ₂ 0 3 layer and the outermost surface layer in this order, A film was formed on the surface. The method for producing each layer constituting the coating film will be described below.

[0079] (Formation of the underlayer, the 0x1\1 layer and the intermediate layer)

Under the film-forming conditions shown in Table 1, a reaction gas having the composition shown in Table 1 was jetted onto the surface of the base material to form an underlayer, a 0-layer and an intermediate layer in this order ( Second step).

[0080] [Table 1]

[0081] («_ 8 I 2 0 3 layer formation)

Furnace pressure 1003, reaction temperature 1000° 〇, gas flow rate

Under the film forming conditions of n, the reaction gas having the composition shown in Table 2 〇 2020/174755 19 卩(: 171?2019/043091

Gush over the surface of the middle layer in between

(Third step). In addition, in the sample N 0.12, the treatment corresponding to the third step was not performed.

[0082] [Table 2]

[0083] Next, the furnace pressure 353, the reaction temperature 100 000 °, the gas flow rate

Under门deposition conditions, the reaction gas having the composition shown below, an intermediate layer near Ru said "- and ejected on the eighth丨₂ 〇 ₃ nuclei" - eight丨₂ 〇 ₃ crystals Was grown (fourth step). By the above procedure, "- it was formed eight丨₂ 〇 _three layers.

Reaction gas composition in the fourth step 〇2020/174755 20 卩(：171?2019/043091

〇〇 ₂ : 2% by volume

1 ^to 10 1 :2 volume%

Eight I ⁽ 3 I ₃ : 10% by volume)

N ₂ 3:. 〇 5 vol%

1 ^~ 1 ₂ :Remaining

[0084] (Formation of outermost surface layer)

Under the film formation conditions described in Table 3, the reaction gas having the composition shown in Table 3, to form an outermost layer and ejected onto the surface of a A ₂ 〇 _three layers.

[0085] [Table 3]

[0086] The cutting tools of Samples N 0.1 to 14 were manufactured by the above procedure. Sample 1 \1 ○ 0.1 ~

The cutting tools 6, 13, and 14 correspond to the examples. The cutting tools of Sample 1\10 .7 to 12 correspond to the comparative example.

[0087] <<Characteristic evaluation of cutting tool>>

. Above manner Sample 1 \ 1_Rei produced 1 with 1 4 cutting tool, each cutting tool by X-ray diffraction measurement "-丨₂ 〇 number orientation finger of each orientation plane in the _three-layer It was measured. The measurement was performed under the following conditions. First, by polishing the outermost surface layer being made the "_ eight丨₂ 〇 ₃ layer form to expose the eight I ₂ 〇 _three layers. Then "one arbitrary point in _ eight I ₂ 〇 _three layers were measured X-ray diffraction seek orientation index of each orientation plane. Orientation index (○ (0 0 1 2)) and orientation index ⁽ 3 (1 1

Table 2 shows the results focusing on 1). Note that the "- eight丨₂ 〇 for the points multiple of _three layers orientation index Ding 0 (0 0 1 2) and the alignment index Ding ⁽³ (1

1 1 2) was calculated, but no significant difference was found.

[0088] (Conditions for X-ray diffraction measurement)

X-ray output 45 !<, 200 〇 18 X-ray source, wavelength 1.54 1 862

Detector D/t e X U l t r a 250

Skiyan axis 2 e/e

Length limit slit width 2. O mm

Scan mode CONT I N U 0 U S

Skiyan speed 20°/m i n

[Measurement of thickness of coating film, etc.]

The coating, and the underlying layer that composes the coating, the Io layer, the intermediate layer, <<

The thickness of each of the I203 layer and the outermost surface layer was obtained from a cross-section sample parallel to the normal direction of the surface of the base material using an optical microscope. The results are shown in Table 4.

[0090] [Table 4]

1 set fee 1 to 12: Ding 〇 N1 〇, Sample 1 3: Ding 丨〇〇, Sample 1 4: Ding 丨

[0091] <<Cutting test>>

The following cutting tests were performed using the cutting tools of Sample 1\0.1 to 14 produced as described above.

[0092] <Abrasion resistance test> 〇2020/174755 22 卩(：171?2019/043091

For the cutting tools of Sample 1\10. 1 to 14 under the following cutting conditions, the cutting time until the flank wear amount (V well) was 0.2 was measured, and the tool life was evaluated. The results are shown in Table 5. It can be evaluated that the longer the cutting time, the better the wear resistance of the cutting tool, and the longer the life of the cutting tool.

[0093] (Cutting conditions for wear resistance test)

Work Material = 3450 Round Bar

Peripheral speed: 280111/111 1

Feed rate: 〇 1 511 1111 “6

Depth of cut:

Cutting fluid: None

Specimen 1\1 ○ .1 ~ 14 cutting tools, the maximum flank wear amount (\/13013 father) is ○ under the following cutting conditions.

The tool life was evaluated by measuring the cutting time until it became. The results are shown in Table 5. It can be evaluated that there is a high possibility that a longer cutting life will be realized as a cutting tool with better peel resistance as the cutting time increases.

(Cutting conditions for peel resistance test)

Work Material: 3200 Round Bar

Peripheral speed: 400111/111 I 1^

Feed rate: ○ 3 ○ 11 11/" 6

Depth of cut: 1.

Cutting fluid: None

[0096] 〇 2020/174755 23 卩 (：171?2019/043091

[Table 5]

[0097] From the results of the cutting tests described above, "- I ₂ 〇 ₃ orientation in layer index Ding (3 (0

0 1 2) is 4 or more and 8.5 or less, and the orientation index (3 (1 1 1 2) is 0 5 or more and 3 or less. and 1 4), the cutting time in the abrasion resistance test is at 5 0 minutes or more, and definitive cutting time in peeling resistance test was found to be at least 1 0 minutes. Meanwhile, "_ eight丨₂ 〇 _A cutting tool with 3 (1 (1 1 1 2)) of less than 0,5 in the _three layers (Sample 1\10.7 to 9 and 12) has a cutting time of 2 in the peel resistance test. was min. the samples N 0.. 7 to 9 and 1 2 of the cutting tool, in the peeling of the coating occurs is considered that the wear of the flank was promoted. Further, "_ eight丨₂ 〇 _three layers Cutting tools with a directional index of 0 (0 0 12) less than 4 (Sample N 0.10 ~

For 1), the cutting time in the wear resistance test was less than 50 minutes.

From the above results, the orientation index of the 《_8 丨₂ 0 ₃ layer is 0 (0 0 1 2

) Is 4 or more and 8.5 or less and the orientation index (3 (1 1 1 2) is 0.5 or more and 3 or less, the cutting tool has excellent wear resistance and peeling resistance. I knew that. 〇 2020/174755 24 卩 (：171?2019/043091

Although the embodiments and examples of the present invention have been described above, it is also planned from the beginning to appropriately combine the configurations of the above-described embodiments and examples.

The embodiments and examples disclosed this time are to be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above-described embodiments and examples but by the scope of claims, and is intended to include meanings equivalent to the scope of claims and all modifications within the scope. Explanation of symbols

[0100] 1 3 rake face, 1 sink face,

Cutting edge, 10 cutting tools,

1 1 base material, 1 2 «— 8 丨₂ 〇 ₃ layers, 1 3 middle layer, 1 4 outermost layer, 1 5 丨〇 !\1 layer

Claims

〇 2020/174755 25 卩 (: 171?2019/043091 Claims [Claim 1] A cutting tool comprising a substrate and a coating for coating the substrate, wherein the coating is Including one layer and the «_ eight _ thirty-three layers formed on the above-mentioned one-thousand-one layer, the __ eight _ thirty-three layers are represented by the following formula (1). The orientation index of the (0 0 1 2) plane is 0 (0 0 1 2) is 4 or more and 8.5 or less, and the orientation index of the (1 1 1 2) plane is represented by the following formula (2). 〇 (1 1 1 2) is ≧ 0.5 and 3 or less, and the sum of the orientation index (3 (0 0 1 2) and the orientation index (3 (11 1 2)) is 9 or less. There is a cutting tool.

[Number 1]

In equations (1) and (2), I (11 1< I) indicates the X-ray diffraction intensity obtained when the X-port measurement is performed on the (11 1< 丨) plane,

I. (1< I) is the standard strength in the (11 1< I) plane of 《_8 丨₂ 〇 ₃ shown in 0 1 0-0 1 7 3 of ◯ 0 3

(11 1< I) planes are (0 1 2) planes, (1 0 4) planes, (1

1 0) plane, (1 1 3) plane, (0 2 4) plane, (1 1 6

) Plane, (300) plane, (0 0 1 2) plane and (1 1 1 2) plane.

[Claim 2] The cutting tool according to claim 1, wherein the orientation index (3 (1 1 1 2) is 1 or more and 2.5 or less.

The thickness of the claims 3] wherein "_ eight丨₂ 〇 _three layers is 0.5 01 or more 2 0 less 〇2020/174755 26 卩(：171?2019/043091

The cutting tool according to claim 1 or 2.

[Claim 4] The coating, wherein the signature丨Rei_1 \ 1 layer "- further comprising an intermediate layer provided between the丨₂ 〇 _three layers,

The cutting tool according to any one of claims 1 to 3, wherein the intermediate layer contains a carbonate, a carbonitride oxide, or a boron nitride containing titanium as a constituent element.

[Claim 5] The cutting tool according to any one of claims 1 to 4, wherein the coating has a thickness of 1 or more and 30 or less.

[Claim 6] The coating is

The cutting tool according to any one of claims 1 to 5, further comprising: